CN117778984A - Vacuum processing apparatus and processing method - Google Patents

Abstract

The invention relates to the technical field of vacuum treatment and discloses a vacuum treatment device and a treatment method, wherein the vacuum treatment device comprises a first cavity, a second cavity, a first driving mechanism and a sealing driving mechanism, the first cavity comprises a plurality of first subchambers which are arranged in the first cavity along the circumferential direction of the first cavity, the second cavity comprises a plurality of second subchambers which are arranged along the circumferential direction of the first cavity, the output end of the first driving mechanism can drive the second cavity to rotate so that each second subchamber sequentially corresponds to each first subchamber to form a space, the sealing driving mechanism comprises a push-pull assembly connected with the second subchamber, and the sealing driving mechanism also comprises a second driving mechanism which is connected with the push-pull assembly and can reciprocate along the axial direction of the first cavity, and can drive the push-pull assembly so that the second subchambers are abutted with the first subchambers which form the space correspondingly to form a relatively independent sealing space. The vacuum processing device and the processing method can realize reliable and controllable sealing under the existence of internal and external pressure differences.

Description

Vacuum processing apparatus and processing method

Technical Field

The invention relates to the technical field of vacuum treatment, in particular to a vacuum treatment device and a treatment method.

Background

In the prior art, a multi-chamber vacuum processing apparatus can continuously perform various vacuum processing processes such as coating, etching, and heat treatment on a workpiece. Taking a multi-chamber vacuum coating device as an example, a plurality of subchambers with relatively independent spaces can be arranged in a main chamber, coating sources are arranged in the subchambers, and a workpiece sequentially completes required coating procedures in the subchambers, so that continuous coating is realized.

In the above process, to achieve switching of the workpiece between different subchambers, the subchambers are typically divided into two parts that can be spatially separated, and controllable sealing is achieved using a variable volume flexible seal drive mechanism. However, the existing telescopic sealing driving mechanism has the risk of sealing failure when bearing larger internal and external pressure differences, and the stability of continuous coating is affected.

Disclosure of Invention

The invention aims to provide a vacuum processing device which solves the problem that a telescopic sealing driving mechanism is invalid in sealing due to the fact that the telescopic sealing driving mechanism is subjected to the action of internal and external pressure differences.

To achieve the purpose, the invention adopts the following technical scheme:

in one aspect, the present invention provides a vacuum processing apparatus comprising:

the first cavity comprises a transmission space and a plurality of first subchambers which are arranged in the first cavity along the circumferential direction of the first cavity and can be selectively communicated with the transmission space; and

The second cavity comprises a plurality of second subchambers which can be selectively communicated with the transmission space, the second subchambers are arranged along the circumferential direction of the first cavity, a workpiece can be arranged in the first subchambers and/or the second subchambers, and the first subchambers and/or the second subchambers are provided with processing mechanisms which correspond to the processed surface of the workpiece;

the vacuum processing apparatus further includes: the output end of the first driving mechanism is connected with the second cavity and can drive the second cavity to rotate so that each second sub-cavity sequentially corresponds to each first sub-cavity in space; and

The sealing driving mechanism comprises a push-pull assembly connected to the second subcavity and a second driving mechanism which is connected with the push-pull assembly and can reciprocate along the axial direction of the first subcavity, and the second driving mechanism can drive the push-pull assembly so that the second subcavity and the first subcavity corresponding to the forming space are abutted to form a relatively independent sealing space.

As a preferred scheme of the vacuum treatment device, the push-pull assembly comprises a push-pull rod and/or a connecting rod assembly with adjustable telescopic distance.

As a preferable scheme of the vacuum processing device, a guide frame body is arranged between the output end of the second driving mechanism and the push-pull assembly.

As the preferable scheme of vacuum processing device, the one end of push-and-pull rod with the second subchamber rotates to be connected, the other end of push-and-pull rod rotates to be connected the output of second actuating mechanism, the output of second actuating mechanism follows the axial reciprocating motion of first cavity, in order to drive the other end of push-and-pull rod is kept away from first working position of first subchamber with be close to the second working position of first subchamber is removed, the other end of push-and-pull rod is moved to when second working position, first subchamber with form relatively independent sealed space between the second subchamber.

As a preferable mode of the vacuum processing device, the connecting rod assembly is a scissor mechanism.

As a preferable mode of the vacuum processing device, one end part of the first connecting rod or the second connecting rod of the scissor mechanism is in sliding connection with the second subchamber.

As the preferable scheme of the vacuum processing device, the first cavity is provided with a connecting part which is in sliding connection with the second subcavity, the connecting part is connected with the output end of the first driving mechanism, and a guiding mechanism which guides the second subcavity to be close to or far away from the first subcavity is arranged between the connecting part and the second subcavity.

As a preferable mode of the vacuum processing apparatus, at least one of the first subchambers is provided with a carrying port capable of communicating with the outside of the first subchamber, and a chamber door is arranged at the carrying port.

As a preferable mode of the vacuum processing apparatus, at least one of the first subchambers is provided with a maintenance door capable of communicating with the outside of the first subchamber.

As a preferable mode of the vacuum processing apparatus, a plurality of the processing mechanisms are disposed in one relatively independent sealed space formed by abutting the second subchamber and the first subchamber.

As a preferable mode of the vacuum processing device, a workpiece clamp is detachably arranged on the first subchamber and/or the second subchamber, and the workpiece is arranged on the first subchamber and/or the second subchamber through the workpiece clamp.

As a preferable scheme of the vacuum processing device, the first cavity is provided with a rotation driving mechanism movably connected with the workpiece clamp, and the rotation driving mechanism is used for driving the workpiece clamp to rotate so as to realize the rotation of the workpiece.

The invention also provides a processing method based on the vacuum processing device, at least one first subchamber is provided with a carrying port which can be communicated with the outside of the first subchamber, and a chamber door is arranged at the carrying port;

The second subchamber and the first subchamber are in abutting connection when the relatively independent sealing space is formed, and are in non-abutting connection when the second subchamber and the first subchamber are in abutting connection; when the first sub-cavity is in a non-abutting state, the second sub-cavity and the first sub-cavity are in a corresponding state when the space is formed, and otherwise, the first sub-cavity and the first sub-cavity are in a non-corresponding state;

the vacuum treatment method comprises the following steps:

and (3) carrying in procedure: opening the chamber door, wherein the workpiece enters the first cavity from the outside of the first cavity through the conveying opening and is arranged on the first subchamber and/or the second subchamber;

corresponding state rotating procedure: the first driving mechanism drives each second subchamber to rotate so that the second subchamber and the first subchamber enter a corresponding state;

sealing procedure: the second driving mechanism drives the second subchamber to enter an abutting state;

the treatment process comprises the following steps: starting the processing mechanism to execute corresponding operation on the workpieces in the relatively independent sealed space;

and (3) a sealing releasing step: the second driving mechanism drives the second subchamber to enter a non-abutting state;

non-corresponding state rotation process: the first driving mechanism drives each second subchamber to rotate so that the second subchamber and the first subchamber enter a non-corresponding state;

And (3) carrying out the working procedure: and opening the chamber door, and separating the workpiece from the first subchamber and/or the second subchamber, so that the workpiece enters the outside of the first chamber from the first chamber through the conveying opening.

As a preferable mode of the vacuum processing method, the carrying-in step and/or the carrying-out step are performed simultaneously with the processing step.

As a preferable scheme of the vacuum treatment method, at least one first subchamber is provided with a maintenance door which can be communicated with the outside of the first subchamber;

the vacuum processing method further includes a maintenance process of: and opening the maintenance door to maintain the first cavity and/or the processing mechanism.

The invention has the beneficial effects that: in the vacuum processing device provided by the invention, a workpiece to be processed is firstly placed on a first subcavity and/or a second subcavity, a first driving mechanism drives all the second subcavities to rotate, so that the second subcavities correspond to the first subcavities in a space, and then the plurality of push-pull components are pushed to move together through the linear motion of the second driving mechanism, so that the plurality of second subcavities are synchronously pushed to abut against the first subcavities corresponding to the space, the second subcavities and the first subcavities form a relatively independent sealing space together, and the workpiece is processed in the relatively independent sealing space of a vacuum environment through the processing mechanism. In the process, the sealing driving mechanism adopts a mechanical mechanism with larger mechanical strength, the sealing effect is better, and even when the internal and external pressure differences of the transmission space and the relatively independent sealing space are larger during sealing, reliable and controllable sealing can be realized, so that the stability of continuous processing of workpieces can be ensured.

The invention also provides a vacuum treatment method based on the vacuum treatment device, so that the beneficial effects of the vacuum treatment method are consistent with those of the vacuum treatment device, and detailed description is omitted.

Drawings

FIG. 1 is a side view of a first embodiment of a vacuum processing apparatus (a conveyance port is opened, and a first sub-chamber and a second sub-chamber are brought into contact with each other) according to a specific embodiment of the present invention;

FIG. 2 is a side view of a second embodiment of the vacuum processing apparatus (the transfer port is closed, and the first sub-chamber and the second sub-chamber are away from each other);

fig. 3 is a top view showing a first example of a vacuum processing apparatus (in which a transfer port is opened and a first sub-chamber and a second sub-chamber are brought into contact with each other) according to an embodiment of the present invention;

fig. 4 is a side view of the first embodiment of the vacuum processing apparatus (the first sub-chamber and the second sub-chamber are in contact with each other);

FIG. 5 is a second side view of the vacuum processing apparatus (the first sub-chamber and the second sub-chamber are located away from each other) according to the embodiment of the present invention;

Fig. 6 is a plan view structural view of a second example of the vacuum processing apparatus (the conveyance port and the maintenance door are opened) according to the embodiment of the present invention.

In the figure:

10. a first cavity; 1. a first subchamber; 11. a conveying port; 111. a transport subchamber door; 12. a film coating source; 121. a maintenance door;

2. a second subchamber; 21. a workpiece holder; 22. a first magnet; 23. a second magnet; 24. a first magnetic gear; 25. a second magnetic gear; 26. a rotation driving mechanism;

3. a first driving mechanism; 31. a revolution plate;

4. a second driving mechanism; 41. a main rod; 42. a guide frame body; 43. a bellows;

5. a push-pull rod; 51. a connecting shaft;

6. a scissors mechanism; 61. a scissors fork rod; 601. a first connecting rod; 602. a second connecting rod; 603. a rotating shaft;

7. a guide mechanism; 71. a linear guide rail; 72. a first slider; 701. a vertical guide rail; 702. a second slider;

8. a bias voltage introducing mechanism;

9. and a support frame body.

Detailed Description

The invention is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present invention are shown in the drawings.

In the description of the present invention, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the invention. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

Example 1

As shown in fig. 1 to 3, the present embodiment discloses a vacuum processing apparatus including a first chamber 10, a second chamber, and a first driving mechanism 3. The first cavity 10 is vertically arranged, and the first cavity 10 is a polyhedral prism, namely an octahedral prism. The first chamber 10 includes a transmission space, which is an inner space of the first chamber 10. During the vacuum treatment, the transfer space is in a vacuum state. The first chamber 10 is provided at a peripheral side thereof with a plurality of first sub-chambers 1 selectively communicating with the transmission space. Of course, in other embodiments, the first cavity 10 may also be in the shape of a cylinder, a long (positive) square body, etc., which is not particularly limited in this embodiment.

The second cavity comprises a plurality of second sub-cavities 2 which are selectively communicated with the transmission space, the plurality of second sub-cavities 2 are arranged along the circumference of the first cavity 10, one side of the second sub-cavity 2, which faces the first sub-cavity 1, is provided with an opening, and a workpiece can be arranged on the second sub-cavity 2 and/or the first sub-cavity 1 through the opening. Preferably, the number of the second subcavities 2 is the same as the number of the first subcavities 1, and the first subcavities 1 and/or the second subcavities 2 are provided with a processing mechanism, and the processing mechanism performs processing or machining operation corresponding to the processed surface of the workpiece. In this embodiment, the workpiece is disposed on the second sub-chamber 2 through the opening, and the first sub-chamber 1 is provided with the processing mechanism.

The term "selectively communicates with the transmission space" as used herein means that the transmission space may be in spatial communication under certain conditions, and may be in a spatially independent state under other conditions.

Illustratively, when the first sub-chamber 1 and the second sub-chamber 2 are not abutted, the two are in a gas-transmission unblocked state, i.e. a space communication state, with the transmission space. When the openings of the first sub-cavity 1 and the second sub-cavity 2 are opposite to and abutted against each other to form a sealed space which is relatively independent in space, the inside of the sealed space is relatively independent in space from the transmission space outside the sealed space, and gas is not smoothly conveyed, namely, the sealed space is in a relatively independent state. It should be understood that the relatively independent state herein does not mean absolute gas isolation, and can be considered to be a relatively independent state as long as the inside and outside of the relatively independent sealed space can maintain a predetermined air pressure difference requirement required for vacuum processing.

The first driving mechanism 3 is arranged on the first cavity 10, the output end of the first driving mechanism 3 is coaxially arranged with the first cavity 10, and the first driving mechanism 3 can drive the second cavity to rotate, so that a plurality of second subcavities 2 are sequentially in one-to-one correspondence with a plurality of first subcavities 1, namely, space correspondence is formed, and multi-station switching is realized. The first driving mechanism 3 of the present embodiment may be any one of a stepping motor, a servo motor, and the like, and the present embodiment is not particularly limited thereto. The term "space correspondence" as used herein refers to a state in which the openings of a certain first sub-chamber 1 and a certain second sub-chamber 2 are facing each other, but have not yet been abutted to form a sealed space that is spatially independent. The spatial correspondence of the second sub-chamber 2 with the first sub-chamber 1 may be understood as a necessary premise that the second sub-chamber 2 and the first sub-chamber 1 form a relatively independent sealed space.

It can be understood that the workpiece to be processed is placed on the first sub-cavity 1 and/or the second sub-cavity 2, the first driving mechanism 3 drives all the second sub-cavities 2 to rotate, so that the second sub-cavities 2 sequentially form space corresponding with the first sub-cavity 1 according to the processing or processing procedure, and then the plurality of second sub-cavities 2 and the first sub-cavity 1 are mutually close to each other and are abutted to form relatively independent sealing space by virtue of the sealing driving mechanism capable of realizing sealing, thereby ensuring the stability of the processing process and ensuring that a plurality of procedures are not interfered with each other.

Based on the above, in the prior art, a volume-variable telescopic sealing driving mechanism is generally adopted to realize controllable sealing, but the conventional telescopic sealing driving mechanism has the risk of sealing failure when bearing a larger internal and external pressure difference, so that the stability of continuous coating is affected.

In view of the above technical problems, as shown in fig. 1 and 2, the vacuum processing apparatus of the present embodiment further includes a seal driving mechanism including a push-pull assembly and a second driving mechanism 4. The second driving mechanism 4 is disposed on the first cavity 10, and an output end of the second driving mechanism 4 performs linear reciprocating motion along an axis of the first cavity 10. The push-pull assembly is provided with a plurality of, and the one end of a plurality of push-pull assemblies is rotated respectively and is connected in a plurality of second subcavities 2 and keep away from first subcavities 1 one side, and the other end of a plurality of push-pull assemblies is all rotated and is connected in the output of second actuating mechanism 4. The movement of the output end of the second driving mechanism 4 can push the plurality of second sub-cavities 2 to synchronously approach the first sub-cavity 1, so that the first sub-cavity 1 and the second sub-cavity 2 which are in a space corresponding state are abutted to form a relatively independent sealing space, or can pull the plurality of second sub-cavities 2 to synchronously separate from the first sub-cavity 1, so that the abutment is released, and the second sub-cavity 2 and the first sub-cavity 1 are both in a state of being communicated with the transmission space. The second driving mechanism 4 in the present embodiment may be any one of a linear driving structure such as an air cylinder or an electric push rod, and is not particularly limited in the present embodiment.

It can be understood that the plurality of push-pull components are pushed to move synchronously by the linear motion of the second driving mechanism 4, so that the plurality of second subcavities 2 are synchronously pushed to be close to the first subcavities 1, and then the second subcavities 2 are abutted with the first subcavities 1 corresponding to the space of the second subcavities, so that relatively independent sealing spaces are formed together. The relatively independent sealed space may accommodate the work and the processing mechanism, and the transfer port 11 or the maintenance door 121 may be provided on the chamber wall, so that the aforementioned relatively independent sealed space may be used as the processing space, the transfer space, or the maintenance space. The relatively independent sealing space is relatively isolated from the transmission space through the cavity wall, and the workpiece can be subjected to processing operations such as vacuum coating, heating, etching and the like. In the process, the sealing driving mechanism adopts a mechanical mechanism with larger mechanical strength, the sealing effect is better, the internal and external pressure differences of the transmission space and the processing space are always consistent during sealing, and the stability of continuous processing of the workpiece can be ensured.

Preferably, as shown in fig. 1, the push-pull assembly of this embodiment includes a push-pull rod 5, two ends of the push-pull rod 5 are respectively and fixedly provided with a connecting shaft 51, a rotation axis of the connecting shaft 51 is perpendicular to a movement direction of the second driving mechanism 4, and two ends of the two connecting shafts 51 are respectively and rotatably connected with the output ends of the second subcavity 2 and the second driving mechanism 4 through ear plates.

It will be appreciated that one end of the push-pull rod 5 is rotatably connected to the second sub-chamber 2 and the other end is rotatably connected to the second driving mechanism 4 via a connecting shaft 51. The other end of the push-pull rod 5 can be driven to move to a first working position far away from the first subcavity 1 or to move to a second working position close to the first subcavity 1 by the movement of the second driving mechanism 4. When the other end of the push-pull rod 5 moves to the second working position, the second subcavity 2 is abutted against a relatively independent space formed on the first subcavity 1, and when the other end of the push-pull rod 5 moves to the first working position, the second subcavity 2 is far away from the first subcavity 1 and is positioned in the transmission space. Wherein, a plurality of push-pull rods 5 can be arranged between the second subcavity 2 and the output end of the second driving mechanism 4, so that the mechanical strength is improved, and two push-pull rods 5 are arranged in the embodiment.

Preferably, in order to ensure a radial movement of the second sub-chamber 2 along the first chamber 10. As shown in fig. 2 and 3, a connection part connected with a plurality of second subchambers 2 is arranged in the first cavity 10, the connection part is a revolution disc 31, the center of the end face of the revolution disc 31 is vertically fixed with the output end of the first driving mechanism 3, a plurality of first subchambers 1 are radially arranged on the end face, far away from the first driving mechanism 3, of the revolution disc 31, and the revolution disc 31 can be driven to rotate through the first driving mechanism 3, namely, the plurality of first subchambers 1 can synchronously rotate.

Further, a guiding mechanism 7 for guiding the second sub-cavities 2 to move along the radial direction of the first cavity 10 is disposed between the revolution disc 31 and the plurality of second sub-cavities 2, the guiding mechanism 7 includes a guiding member and a first slider 72, the guiding member is a linear guide 71, two opposite sides of the linear guide 71 along the length direction thereof are provided with sliding grooves (not shown in the figure), one end of the first slider 72 is fixedly connected with one side of the second sub-cavity 2, the other end of the first slider 72 away from the second sub-cavity 2 is provided with a groove (not shown in the figure) matched with the width of the linear guide 71, two opposite surfaces of the groove are fixedly connected with sliding strips (not shown in the figure) matched with the sliding grooves along the length direction of the linear guide 71, the first slider 72 is slidably embedded in the linear guide 71 through the mutual matching of the linear guide 71 and the first slider 72 can move along the length direction of the linear guide 71, but cannot deviate from the linear guide 71, so as to match the rotation of the first driving mechanism 3, and the second sub-cavity 2 can be aligned with the first sub-cavity 1 accurately.

Preferably, as shown in fig. 2 and 3, the output end of the second driving mechanism 4 is coaxially and fixedly provided with a main rod 41, and the ear plates connected with the push-pull rods 5 are fixedly connected to the peripheral side of the main rod 41, so that the second driving mechanism 4 can meet the installation of a plurality of push-pull rods 5. In order to ensure that the linear motion of the second driving mechanism 4 can be kept stable, a guide frame 42 for guiding the movement of the main rod 41 is arranged at the center of the end face of the revolution disc 31 far away from the first driving mechanism 3, the main rod 41 is arranged in the guide frame 42, a sliding groove capable of enabling the lug plate and the push-pull rod 5 to penetrate out is arranged on the guide frame 42, and the shaking of the main rod 41 can be reduced under the guidance of the guide frame 42, so that the thrust of the second driving mechanism 4 is transmitted to the second subcavity 2 as much as possible.

The main rod 41 needs to extend to the outside of the first cavity 10 through the first cavity 10, in order to avoid vacuum leakage in a gap between the main rod 41 and the first cavity 10, a bellows 43 is sleeved on a part of the main rod 41 located at the outside of the first cavity 10, one end of the bellows 43 is fixedly connected with the outer wall of the first cavity 10, and the other end of the bellows 43 is fixedly connected with the main rod 41, so that the bellows 43 stretches and contracts synchronously along with movement of the main rod 41, and the possibility of vacuum leakage is reduced.

Based on the above, as shown in fig. 3, at least one of the plurality of first sub-chambers 1 is provided with a transfer port 11 capable of communicating with the outside of the first chamber 10, and at least one processing mechanism is disposed on all of the plurality of first sub-chambers 1 excluding the first sub-chamber 1 having the transfer port 11, the processing mechanism corresponding to the processed surface of the workpiece.

Specifically, after the vacuum processing of the workpiece is completed, the workpiece is taken out from the conveying port 11 through the conveying mechanism, or the workpiece to be vacuum processed is put into the second sub-chamber 2 through the conveying port 11 through the conveying mechanism. The conveying mechanism of the embodiment may be a mobile robot, a mechanical clamping jaw, etc., and all mechanical structures capable of transferring workpieces are omitted here, and detailed description is omitted here because the conveying mechanism is in the prior art. The processing mechanism of this embodiment is a coating source 12, and the vacuum processing is vacuum coating. A plurality of coating sources 12 can be arranged in each first subchamber 1 to perform vacuum coating treatment on different surfaces of the workpiece. Wherein, the conveying port 11 is provided with a conveying subchamber door 111, and when the first subchamber 1 and the second subchamber 2 are in a relatively independent sealing state, the conveying subchamber door 111 is opened so that the conveying mechanism conveys the workpiece; the carrying subchamber door 111 is closed when the second subchamber 2 needs to rotate the conditioning station to ensure that the vacuum environment within the transport space is not compromised. The side of the first sub-chamber 1 away from the second sub-chamber 2 is provided with a maintenance door 121, and when the coating source 12 needs maintenance or material replenishment, an operator can operate the coating source by opening the maintenance door 121.

Preferably, in order to allow the workpiece to rotate on the second sub-chamber 2, the processing means such as the plating source 12 can perform the processing steps such as vacuum plating on the surface of the workpiece more omnidirectionally. As shown in fig. 1 and 2, the second sub-chamber 2 is detachably provided with a workpiece holder 21, a workpiece is loaded on the second sub-chamber 2 by the workpiece holder 21, and the first chamber 10 is provided with a rotation driving mechanism 26 movably connected with the workpiece holder 21, for driving the workpiece holder 21 to rotate so as to realize rotation of the workpiece around the axis, so as to improve uniformity of vacuum treatment such as vacuum coating. The rotation driving mechanism 26 in the present embodiment may be any of driving structures such as an air cylinder and an electric push rod, and is not particularly limited in the present embodiment.

It will be appreciated that the workpiece holder 21 may be provided on the first sub-chamber 1 or/and the second sub-chamber 2.

Specifically, the workpiece holder 21 is vertically arranged in the second sub-cavity 2, two ends of the workpiece holder 21 are respectively provided with a second magnet 23, two opposite surfaces of the second sub-cavity 2 are provided with a first magnet 22, the first magnet 22 is rotationally connected to the second sub-cavity 2 through a rotating shaft, the axial direction of the rotating shaft is vertically arranged, the first magnet 22 and the second magnet 23 are both L-shaped, and the corners of the first magnet 22 and the second magnet 23 are magnetically attracted to each other, so that the workpiece holder 21 is firmly adsorbed on the second sub-cavity 2.

Further, in order to connect the rotation driving mechanism 26 to the rotation shaft to rotate the work holder 21. A second magnetic gear 25 is fixedly connected to the rotating shaft close to the rotation driving mechanism 26, the output end of the rotation driving mechanism 26 is positioned in the first cavity 10, a first magnetic gear 24 which is movably meshed with the second magnetic gear 25 is fixedly connected to the end part of the rotation driving mechanism, and tooth grooves of the first magnetic gear 24 and the second magnetic gear 25 are horizontally arranged. It can be understood that when the second sub-cavity 2 and the first sub-cavity 1 are in a sealed state, the first magnetic gear 24 and the second magnetic gear 25 are close to each other and generate magnetic interaction, and the workpiece clamp 21 can be driven to rotate by driving the rotation driving mechanism 26, so that the workpiece is subjected to multi-surface processing by being matched with the coating sources 12 in different directions; when the second subcavity 2 is separated from the first subcavity 1 along the guiding mechanism 7, the first magnetic gear 24 is synchronously separated from the second magnetic gear 25 along the tooth slot of the second subcavity 2 and loses magnetic interaction, so that synchronous transposition is realized by matching with the first driving mechanism 3.

Preferably, a vacuum pump and a purge valve (not shown) may be provided on each of the first chamber 10 and the second sub-chamber 2 in order to control the vacuum degree inside the vacuum processing apparatus.

Example two

The vacuum processing apparatus according to this embodiment has substantially the same structure as that of the first embodiment, and is mainly different from the first embodiment in that, as shown in fig. 4 to 6: the push-pull assembly of the embodiment comprises a connecting rod assembly with adjustable telescopic distance, and the connecting rod assembly is a scissor mechanism 6. The scissor mechanism 6 comprises a plurality of groups of scissor rods 61 rotationally connected through a rotating shaft 603, the scissor rods 61 comprise a first connecting rod 601 and a second connecting rod 602, the first connecting rod 601 and the second connecting rod 602 are mutually intersected, the center of each connecting rod is provided with the rotating shaft 603 in a penetrating mode, the first connecting rod 601 and the second connecting rod 602 are rotationally connected through the rotating shaft 603, each group of scissor rods 61 is arranged side by side, and the end portions of the adjacent first connecting rods 601 are rotationally connected with the end portions of the second connecting rods 602 through the rotating shaft 603. The first connecting rod 601 of scissors mechanism 6 one end is connected with mobile jib 41 rotation through axis of rotation 603 cooperation otic placode, and the second connecting rod 602 of scissors mechanism 6 one end is connected with the direction support body 42 rotation, and the first connecting rod 601 of scissors mechanism 6 other end then is connected with second subcavity 2 sliding connection through axis of rotation 603 cooperation otic placode, and specifically, the one side that second subcavity 2 kept away from first subcavity 1 still is provided with vertical guide rail 701, rotates on the first connecting rod 601 of scissors mechanism 6 other end and is connected with second slider 702, and second slider 702 slides and inlays on vertical guide rail 701 to this direction scissors mechanism 6 stretches out and draws back along the horizontal direction. The second connecting rod 602 at the other end of the scissor mechanism 6 is rotatably connected with the first subchamber 1 through a rotation shaft 603. It will be appreciated that the rotational connection may be hinged, ball hinged or pin-jointed.

It will be appreciated that the vertical guide 701 may also be disposed between the second connecting rod 602 and the first sub-chamber 1, and at this time, the second slider 702 is rotatably connected to the second connecting rod 602 at the other end of the scissor mechanism 6.

In combination with the above, since the movement stroke of the scissor mechanism 6 is longer, the second sub-cavity 2 can extend the workpiece into the first sub-cavity 1, preferably, the second sub-cavity 2 of the embodiment is a flat plate, the side of the second sub-cavity 2 close to the first sub-cavity 1 is provided with the supporting frame 9, the first magnet 22 is correspondingly arranged on the supporting frame 9, and the supporting frame 9 supports the workpiece clamp 21.

The workpiece holder 21 is preferably also provided with a bias introduction mechanism 8 for electrically conducting the workpiece to a potential. The method is mainly used for sputtering coating, and in the process of sputtering coating, a sputtering target material is negatively charged to be a cathode, and a workpiece is grounded. After the workpiece is negatively charged by the bias introduction mechanism 8, more positive charges can be attracted, which is beneficial to improving the coating quality of the workpiece. Since the specific structure of the bias introducing mechanism 8 is conventional, further description is omitted here.

As shown in fig. 6, for a certain relatively independent sealed space formed by abutting the second subchamber 2 and the first subchamber 1, a plurality of groups of coating sources 12 are configured, so that vacuum coating in multiple directions can be realized, and the applicability and coating quality of the vacuum coating device are improved.

As shown in fig. 6, in this embodiment, compared with the first embodiment, the second sub-chamber 2 has a smaller chamber area than the first sub-chamber 1. So set up, under the condition that first sub-cavity 1 and the mutual butt of second sub-cavity 2 form relative independent vacuum processing space, when second actuating mechanism 4 synchronous pulling a plurality of second sub-cavities 2 kept away from first sub-cavity 1, because the removal of second sub-cavity 2 causes the disturbance to the interior vacuum processing gas environment of first sub-cavity 1 less to be favorable to keeping the relative stability of vacuum processing process.

Example III

The present embodiment provides a vacuum processing method based on the first and second embodiments, in which at least two first sub-chambers 1 are disposed in a first chamber 10 of the vacuum processing apparatus, the first sub-chambers 1 are configured with a processing mechanism and/or a conveying mechanism, and at least two second sub-chambers 2 capable of placing workpieces are disposed in the first chamber 10. The first sub-chamber 1 and the second sub-chamber 2 have a corresponding relationship in number, preferably the same number.

At least one first sub-cavity 1 is provided with a carrying port 11 which can be communicated with the outside of the first cavity, and a chamber door 111 is arranged at the carrying port 11;

The second sub-cavity 2 and the first sub-cavity 1 are in abutting connection when being in abutting connection to form a relatively independent sealing space, and are in non-abutting connection on the contrary; when the first sub-cavity 1 is in a non-contact state, the second sub-cavity 2 and the first sub-cavity 1 are in a corresponding state when the space is corresponding, and otherwise, the first sub-cavity and the second sub-cavity are in a non-corresponding state. It is understood that, herein, the abutting state refers to a state that the first sub-cavity 1 and the second sub-cavity 2 in the spatially corresponding state abut to form a relatively independent sealed space under the action of the seal driving mechanism.

The vacuum treatment method may include the steps of:

and (3) carrying in procedure: opening the chamber door 111, and conveying the workpiece from the outside of the first chamber 10 into the first chamber 10 through the conveying opening 11, and being disposed on the first sub-chamber 1 and/or the second sub-chamber 2; it is to be understood that the carry-in process may be performed when the first sub-chamber 1 and the second sub-chamber 2 are in the contact state or the non-contact state. It is understood that the carry-in process may include a closing process of the chamber door 111 after the workpiece is carried in. It can be appreciated that when the first sub-cavity 1 and the second sub-cavity 2 are in the abutting state, the relatively independent sealed space formed by the abutting still belongs to the interior of the first cavity 10.

Corresponding state rotating procedure: the first driving mechanism 3 drives each second sub-cavity 2 to rotate, so that the second sub-cavity 2 and the first sub-cavity 1 can enter a corresponding state in sequence. It will be appreciated that the corresponding state rotation process is preferably performed when the first sub-chamber 1 and the second sub-chamber 2 are in a non-abutting state.

Sealing procedure: the second driving mechanism 4 drives the second sub-cavity 2 to enable the first sub-cavity 1 and the second sub-cavity 2 to enter a contact state. It will be appreciated that the sealing process is preferably performed while the first sub-chamber 1 and the second sub-chamber 2 are in the corresponding states.

The treatment process comprises the following steps: and starting the processing mechanism to execute vacuum processing operations such as corresponding vacuum coating and the like on the workpieces in the relatively independent sealed spaces. It will be appreciated that the treatment process is preferably performed when the first sub-chamber 1 and the second sub-chamber 2 are in abutment.

And (3) a sealing releasing step: the second driving mechanism 4 drives the second sub-cavity 2 to enable the first sub-cavity 1 and the second sub-cavity 2 to enter a non-abutting state. It will be appreciated that the unsealing process is preferably performed when the first sub-chamber 1 and the second sub-chamber 2 are in abutment. It will be appreciated that the non-abutting state of the first sub-chamber 1 and the second sub-chamber 2 after the unsealing process is initially the corresponding state.

Non-corresponding state rotation process: the first driving mechanism 3 drives each second sub-cavity 2 to rotate, so that the second sub-cavity 2 and the first sub-cavity 1 enter a non-corresponding state. It will be appreciated that the non-corresponding state rotation process is preferably performed when the first sub-chamber 1 and the second sub-chamber 2 are in a non-abutting state.

And (3) carrying out the working procedure: the chamber door 111 is opened, and the workpiece is separated from the first sub-chamber 1 and/or the second sub-chamber 2, and is then transferred from the inside of the first chamber 10 into the outside of the first chamber 10 through the transfer port 11. It will be appreciated that the carry-out process may be performed when the first sub-chamber 1 and the second sub-chamber 2 are in the abutting state or the non-abutting state. It will be appreciated that the carry-out process may include a process of closing the chamber door 111 after the workpiece is carried out.

One workable workflow is provided below:

before starting vacuum treatment such as vacuum coating, the workpiece is moved onto the second subchamber 2 by a moving-in procedure under the action of a moving mechanism such as a manipulator; if the carry-in process is completed in the abutting state, the first sub-chamber 1 and the second sub-chamber 2 may be separated from each other, that is, in the non-abutting state, by performing the unsealing process on the condition that the requirement such as the vacuum degree is satisfied: thereafter, the process is carried out,

A. Performing a non-corresponding state rotating process, namely, under the action of the first driving mechanism 3, dislocating the first subcavity 1 and the second subcavity 2 from corresponding states which are opposite in space so as to enter a non-corresponding state;

B. then, a corresponding state rotating process is carried out, namely, under the continuous action of the first driving mechanism 3, the second subcavity 2 and the adjacent other first subcavity 1 enter a corresponding state; the adjacent other first subchamber 1 can be provided with a vacuum treatment mechanism such as a coating source;

C. then, a sealing process is performed, namely, the first sub-cavity 1 and the second sub-cavity 2 which are in the corresponding states are brought into contact with each other under the action of the second driving mechanism 4, so that a relatively independent sealing space capable of performing vacuum treatment is formed;

D. then, a processing procedure is carried out, namely, the workpiece is processed by a vacuum processing mechanism in the sealed space;

E. then, a sealing removing process is performed, namely, the first subcavity 1 and the second subcavity 2 which are in the abutting state are brought into a non-abutting state under the action of the second driving mechanism 4, so that the workpiece is convenient to perform the next vacuum treatment process;

F. then, repeating the steps A-E to finish the next vacuum treatment process of the workpiece; similarly, the workpiece completes all the preset vacuum treatment procedures;

G. Thereafter, a non-corresponding state rotating process and/or a corresponding state rotating process are performed, that is, the second sub-chamber 2 provided with the workpiece for which all the predetermined vacuum processing processes are completed and the first sub-chamber 1 provided with the carrying port 11 are brought into a corresponding state in which the space is opposed to each other by the first driving mechanism 3;

H. then, a sealing process is performed, namely, the first subcavity 1 and the second subcavity 2 are brought into a contact state under the action of the second driving mechanism 4, so that a relatively independent sealing space is formed, and the workpiece carrying-out process is facilitated;

I. thereafter, the carrying-out step is performed, that is, the chamber door 111 is opened, the workpiece is separated from the second sub-chamber 2 by a carrying mechanism such as a robot, and the workpiece is carried from the inside of the first chamber 10 to the outside of the first chamber 10 through the carrying port 11.

It will be appreciated that if the carry-in process is completed in a non-abutting state, the sealing process may be performed first, and then the a-I process may be performed.

It can be appreciated that in this embodiment, the second sub-cavity 2 and the second sub-cavity 2 together form a relatively independent sealed space capable of performing vacuum treatment or processing through the action of the sealing driving mechanism, so that multiple kinds of processing can be completed continuously on the workpiece, the sealing performance is good, and the stability is high.

Further, the carrying-in process and/or the carrying-out process are performed simultaneously with the processing process, and the parallel operation can improve the efficiency of the vacuum processing. It will be appreciated that the first sub-chamber 1 and the second sub-chamber 2 are preferably in abutment when the carry-in process and/or the carry-out process is co-stepped with the processing process.

Wherein, be provided with on at least one first sub-cavity 1 can with the maintenance door 121 of the external intercommunication of first cavity 10, the vacuum processing method still includes the maintenance process, maintenance process: the maintenance door 121 is opened to perform maintenance on the first chamber 10 and/or the processing mechanism. It will be appreciated that the processing steps may also be synchronized while the maintenance steps are performed, thereby improving the efficiency and flexibility of the vacuum process. It will be appreciated that the first sub-chamber 1 and the second sub-chamber 2 are preferably in abutment when the maintenance process and the treatment process are co-stepped.

It is to be understood that the above examples of the present invention are provided for clarity of illustration only and are not limiting of the embodiments of the present invention. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the invention. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are desired to be protected by the following claims.

Claims (15)

1. A vacuum processing apparatus comprising:

a first cavity (10) including a transmission space and a plurality of first sub-cavities (1) which are provided in the first cavity (10) in a circumferential direction of the first cavity (10) and are selectively communicable with the transmission space; and

The second cavity comprises a plurality of second subcavities (2) which can be selectively communicated with the transmission space, the second subcavities (2) are arranged along the circumferential direction of the first cavity (10), a workpiece can be arranged in the first subcavities (1) and/or the second subcavities (2), and the first subcavities (1) and/or the second subcavities (2) are provided with a processing mechanism which corresponds to the processed surface of the workpiece; it is characterized in that the method comprises the steps of,

the vacuum processing apparatus further includes: the output end of the first driving mechanism (3) is connected with the second cavity and can drive the second cavity to rotate so that each second sub-cavity (2) sequentially corresponds to each first sub-cavity (1) in space; and

The sealing driving mechanism comprises a push-pull assembly connected to the second sub-cavity (2), and further comprises a second driving mechanism (4) connected with the push-pull assembly and capable of moving back and forth along the axial direction of the first cavity (10), wherein the second driving mechanism (4) can drive the push-pull assembly so that the second sub-cavity (2) and the first sub-cavity (1) corresponding to the formation space are abutted to form a relatively independent sealing space.

2. Vacuum processing apparatus according to claim 1, characterized in that the push-pull assembly comprises a push-pull rod (5) and/or a telescopic distance adjustable linkage assembly.

3. Vacuum processing apparatus according to claim 1, characterized in that a guiding frame (42) is arranged between the output end of the second drive mechanism (4) and the push-pull assembly.

4. Vacuum processing apparatus according to claim 2, wherein one end of the push-pull rod (5) is rotatably connected to the second subchamber (2), the other end of the push-pull rod (5) is rotatably connected to the output end of the second driving mechanism (4), and the output end of the second driving mechanism (4) reciprocates along the axial direction of the first chamber (10), so as to drive the other end of the push-pull rod (5) to move between a first working position far from the first subchamber (1) and a second working position close to the first subchamber (1), and when the other end of the push-pull rod (5) moves to the second working position, the relatively independent sealing space is formed between the first subchamber (1) and the second subchamber (2).

5. Vacuum processing apparatus according to claim 2, characterized in that the linkage assembly is a scissor mechanism (6).

6. Vacuum processing apparatus according to claim 5, characterized in that one end of the first connecting rod (601) or the second connecting rod (602) of the scissor mechanism (6) forms a sliding connection with the second subchamber (2).

7. Vacuum processing apparatus according to any one of claims 1 to 6, characterized in that the first chamber (10) is provided with a connection part in sliding connection with the second sub-chamber (2), the connection part being connected to the output end of the first drive mechanism (3), a guiding mechanism (7) being provided between the connection part and the second sub-chamber (2) for guiding the second sub-chamber (2) towards or away from the first sub-chamber (1).

8. Vacuum processing apparatus according to any one of claims 1 to 6, characterized in that at least one of the first subchambers (1) is provided with a transport opening (11) which can communicate with the outside of the first chamber (10), the transport opening (11) being provided with a chamber door (111).

9. Vacuum processing apparatus according to any of claims 1 to 6, characterized in that at least one of the first subchambers (1) is provided with a maintenance door (121) which can communicate with the external connection of the first chamber (10).

10. A vacuum processing apparatus according to any one of claims 1 to 6, wherein a plurality of the processing mechanisms are arranged in one relatively independent sealed space formed by abutting the second sub-chamber (2) and the first sub-chamber (1).

11. Vacuum processing apparatus according to any one of claims 1 to 6, characterized in that a workpiece holder (21) is detachably arranged on the first subcavity (1) and/or the second subcavity (2), the workpiece being arranged on the first subcavity (1) and/or the second subcavity (2) by the workpiece holder (21).

12. Vacuum processing apparatus according to claim 11, wherein the first chamber (10) is provided with a rotation driving mechanism (26) movably connected to the workpiece holder, the rotation driving mechanism (26) being configured to drive the workpiece holder (21) to rotate so as to effect the workpiece rotation.

13. Vacuum processing method, based on a vacuum processing apparatus according to any of claims 1 to 12, characterized in that at least one of the first sub-chambers (1) is provided with a transport port (11) capable of communicating with the outside of the first chamber (10), the transport port (11) being provided with a chamber door (111);

The second subcavity (2) and the first subcavity (1) are in an abutting state when being abutted to form the relatively independent sealed space, and are in a non-abutting state otherwise; when the first sub-cavity (1) is in a non-abutting state, the second sub-cavity (2) and the first sub-cavity (1) form a corresponding state when the space corresponds, and otherwise, the first sub-cavity and the second sub-cavity are in a non-corresponding state;

the vacuum treatment method comprises the following steps:

and (3) carrying in procedure: opening the chamber door (111), wherein the workpiece enters the first chamber (10) from the outside of the first chamber (10) through the conveying opening (11) and is arranged on the first sub-chamber (1) and/or the second sub-chamber (2);

corresponding state rotating procedure: the first driving mechanism (3) drives each second subcavity (2) to rotate so as to enable the second subcavity (2) and the first subcavity (1) to enter a corresponding state;

sealing procedure: the second driving mechanism (4) drives the second subcavity (2) to enter an abutting state;

the treatment process comprises the following steps: starting the processing mechanism to execute corresponding operation on the workpieces in the relatively independent sealed space;

and (3) a sealing releasing step: the second driving mechanism (4) drives the second subcavity (2) to enter a non-abutting state;

Non-corresponding state rotation process: the first driving mechanism (3) drives each second subcavity (2) to rotate so as to enable the second subcavity (2) and the first subcavity (1) to enter a non-corresponding state;

and (3) carrying out the working procedure: and opening the chamber door (111), separating the workpiece from the first subcavity (1) and/or the second subcavity (2), and then entering the outside of the first chamber (10) from the first chamber (10) through the conveying opening (11).

14. The vacuum processing method according to claim 13, wherein the carrying-in step and/or the carrying-out step are performed simultaneously with the processing step.

15. Vacuum processing method according to claim 13, characterized in that at least one of the first subchambers (1) is provided with a maintenance door (121) capable of communicating with the outside of the first chamber (10);

the vacuum processing method further includes a maintenance process of: -opening the maintenance door (121) for performing maintenance of the first chamber (10) and/or the handling mechanism.