CN117740208B - Micro-cantilever Liang Chujiao sensor and preparation method thereof - Google Patents
Micro-cantilever Liang Chujiao sensor and preparation method thereofInfo
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- CN117740208B CN117740208B CN202311761861.7A CN202311761861A CN117740208B CN 117740208 B CN117740208 B CN 117740208B CN 202311761861 A CN202311761861 A CN 202311761861A CN 117740208 B CN117740208 B CN 117740208B
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Abstract
发明涉及一种微悬臂梁触觉传感器及其制备方法，包括：基座，基座的上表面向上凸起形成皱缩结构，皱缩结构的横截面沿皱缩结构的轴线方向自上至下先减小再增大；基座绕皱缩结构沿其周向设有多个沟槽，沟槽包括沟槽本体以及自沟槽本体延伸至皱缩结构顶端的沟槽连接部；感应元件，填充在多个沟槽中；触杆，同轴连接在皱缩结构的顶端，触杆的弹性模量大于基座的弹性模量。本发明能够本申请在检测的过程中发生偏转而非弯曲，将应力信号高效的转化为电信号，可以为外电路提供一个更加明显的电信号，具有检测阈值低，精度高、响应速度高的特点，成本低，且能够实现小型化。
This invention relates to a micro cantilever beam tactile sensor and its fabrication method, comprising: a base, the upper surface of which protrudes upward to form a wrinkled structure, the cross-section of which decreases and then increases from top to bottom along the axial direction of the wrinkled structure; the base having multiple grooves around the wrinkled structure along its circumference, each groove including a groove body and a groove connecting portion extending from the groove body to the top of the wrinkled structure; a sensing element filled in the multiple grooves; and a contact rod coaxially connected to the top of the wrinkled structure, the elastic modulus of which is greater than that of the base. This invention enables deflection rather than bending during detection, efficiently converting stress signals into electrical signals, providing a more obvious electrical signal for external circuits. It features a low detection threshold, high accuracy, high response speed, low cost, and miniaturization.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a micro-cantilever Liang Chujiao sensor and a preparation method thereof.
Background
The tactile sensor estimates the basic characteristics of the object and realizes feedback by tactile information such as pressure, vibration, position and the like, and the tactile sensor in the prior art cannot meet the design requirements of high precision, high response speed, low cost and miniaturization.
Disclosure of Invention
Therefore, the invention aims to solve the technical problems that the design requirements of high precision, high response speed, low cost and miniaturization cannot be met in the prior art.
In order to solve the above technical problems, in one aspect, the present invention provides a micro-cantilever Liang Chujiao sensor, including:
The base is provided with a plurality of grooves along the circumference of the base around the shrinkage structure, and the grooves comprise groove bodies and groove connecting parts extending from the groove bodies to the top ends of the shrinkage structures;
an induction element filled in the plurality of trenches;
And the feeler lever is coaxially connected to the top end of the shrinkage structure, and the elastic modulus of the feeler lever is greater than that of the base.
In one embodiment of the invention, the elastic modulus of the feeler lever is 100 times the elastic modulus of the base.
In one embodiment of the invention, the base is smaller in size than the feeler lever in the axial direction of the feeler lever.
In one embodiment of the invention, the ratio of the size of the base to the size of the feeler is greater than 1:5 along the axial direction of the feeler.
In one embodiment of the invention, the plurality of grooves are equally disposed on the base along the circumference of the corrugated structure.
In one embodiment of the invention, the feeler lever is fixed to the base by gluing.
In one embodiment of the invention, the base is made of one of polydimethylsiloxane, epoxy resin and rubber.
In one embodiment of the invention, the sensing material comprises polydimethylsiloxane, nickel powder, gaIn alloy, and silver ion conductive ink.
In one embodiment of the invention, the feeler lever is one of conical and cylindrical.
In another aspect, the invention provides a method of making a micro-cantilever Liang Chujiao sensor, comprising:
filling a base material in a mould, and forming a base after curing and forming the base material;
filling the induction material in the grooves, and curing and forming the induction material into an induction element;
and removing the redundant material removing part on the base, and connecting the feeler lever to the top of the shrinkage structure in the base.
Compared with the prior art, the technical scheme of the invention has the following advantages:
According to the micro-cantilever Liang Chujiao sensor and the preparation method thereof, the elastic modulus of the trolley is larger than that of the base, so that the sensing element can have larger strain after load is applied. In addition, the application is provided with the shrinkage structure on the substrate, and the shrinkage part has the stress concentration effect, so that the application can deflect rather than bend in the detection process, efficiently convert stress signals into electric signals, provide an obvious electric signal for an external circuit, and has the characteristics of low detection threshold, high precision and high response speed, is low in cost and can realize miniaturization.
Drawings
In order that the invention may be more readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings, in which
FIG. 1 is a schematic diagram of a micro-cantilever Liang Chujiao sensor in accordance with a preferred embodiment of the present invention;
FIG. 2 is a schematic view of a base curing mold of the present invention;
FIG. 3 is a schematic illustration of the inductive material filling the susceptor in accordance with the present invention;
FIG. 4 is a schematic illustration of the invention after the inductive element is fixedly formed;
FIG. 5 is a schematic diagram of a simulation of the present application 1-2;
FIG. 6 is a schematic diagram of a simulation of the present application 2 for examples 1-2;
FIG. 7 is a flow chart of a method of manufacturing a micro-cantilever Liang Chujiao sensor.
The reference numerals of the specification are 100, a base, 110, a shrinking structure, 120, a groove, 121, a groove body, 122 and a groove connecting part;
200. an inductive element;
300. A feeler lever;
400. a material removing part.
Detailed Description
The invention will be further described in connection with the accompanying drawings and specific examples which are set forth so that those skilled in the art will better understand the invention and will be able to practice it, but the examples are not intended to be limiting of the invention.
Referring to fig. 1 to 4, the present invention provides a micro-cantilever Liang Chujiao sensor, which includes:
The base 100, the upper surface of the base 100 is convex upward to form the crimp structure 110, the cross section of the crimp structure 110 decreases from top to bottom and then increases along the axial direction of the crimp structure 110, and in some embodiments, the longitudinal section of the crimp structure 110 may be hyperbolic. The base 100 is provided with a plurality of grooves 120 along the circumferential direction around the shrinkage structure 110, and the grooves 120 comprise groove bodies 121 and groove connecting parts 122 extending from the groove bodies 121 to the top ends of the shrinkage structure 110;
a sensing element 200 filled in the plurality of trenches 120;
The feeler lever 300 is coaxially connected to the top end of the crimping structure 110, and the elastic modulus of the feeler lever 300 is greater than that of the base 100. In some embodiments, the feeler lever 300 may be processed by 3D printing, laser processing, or the like. The material of the feeler lever 300 can be cemented carbide such as tungsten steel, cobalt molybdenum alloy, stainless steel, etc., so long as the phenomenon that deflection occurs without load is not applied after the base 100 and the feeler lever 300 are adhered is ensured.
The elastic modulus of the feeler lever 300 is 100 times that of the base 100.
Referring to fig. 5 to 6, comparative example 1 uses a homogenizing rod of a soft material (having a small elastic modulus), and comparative example 2 uses a homogenizing rod of a hard material (having a large elastic modulus). The application adopts a heterogeneous rod with a hard upper part and a soft lower part. The same load was applied to examples 1-2 and the present application, and the following conclusion was drawn (in fig. 5 and 6, the left view is comparative example 1, the middle view is comparative example 2, and the right view is the present application):
Example 1, in which the base is a soft material, and the present application have a greater strain value than comparative example 2, and under the same conditions, a greater strain represents a more pronounced signal output. The deflection of the present application is smaller and thus the response is faster than in comparative example 1. In summary, the lever portion is rigid, and the base is flexible, so that the response speed can be improved while high precision is maintained.
Specifically, the elastic modulus of the feeler 300 is greater than that of the base 100 in the present application, which enables a greater strain to be imparted to the sensing element 200 after the load is applied. In addition, the application is provided with the shrinkage structure 110 on the substrate, and the shrinkage part has the stress concentration effect, so that the application can deflect rather than bend in the detection process, efficiently convert stress signals into electric signals, provide an obvious electric signal for an external circuit, and has the characteristics of low detection threshold, high precision and high response speed, is low in cost and can realize miniaturization.
In some embodiments, the thickness of the base 100 may be set to 3mm-10mm. Alternatively, the thickness of the base 100 may be set to 6mm. It should be noted that the thickness of the base 100 cannot be too thin, which is inconvenient for filling the sensing material at the trench 120 and providing electrodes at the sensing material for completing an external circuit.
Further, the size of the base 100 is smaller than the size of the feeler 300 in the axial direction of the feeler 300. Along the axis of the feeler 300, the ratio of the size of the base 100 to the size of the feeler 300 is greater than 1:5.
Specifically, the length of the feeler lever 300 is also much longer than that of the base 100, so that the stiffer feeler lever 300 will deflect only by a certain angle during the detection of the tactile force, the feeler lever 300 will not deform itself, and the portion of the whole micro-cantilever Liang Chujiao sensor that bends will only be at the base 100, therefore, under the same tactile force, the application can make the strain of the sensing element 200 larger and the rate of change of resistance larger.
The plurality of grooves 120 are equally disposed on the base 100 along the circumference of the corrugated structure 110. In some embodiments, the number of grooves 120 may be 8-12. Specifically, the plurality of grooves 120 in this embodiment are uniformly distributed along the circumferential direction, so that the sensor can sense a tactile force in any direction, and the direction of the applied tactile force can be determined according to the change rate of resistance of the resistance-change sensing material in different directions. Of course, the grooves 120 on the base 10020 may be arranged in any form, so as to meet the requirement of detection.
The feeler lever 300 is adhered and fixed to the base 100 by glue. For example, the contact rod 300 and the base 100 may be adhered by one of 502 glue, 101 glue, and AB glue.
The base 100 is made of one of polydimethylsiloxane, epoxy, and rubber. In particular, the material employed in this embodiment facilitates material removal to form trench 120. In other embodiments, other materials may be used for the base 100, as long as the base is easy to remove. The curing mode of the base 100 should be determined according to the material selected for the base 100. For example, when the material of the base 100 is polydimethylsiloxane, the material of the base 100 may be filled in a mold by heating under reduced pressure, and cured by heating at 90 to 110 ℃ for 4 hours at 50 to 100 Kpa. The polydimethylsiloxane can be naturally solidified after standing for 8-10 hours at room temperature. When the base 100 is made of rubber, the base is cured and molded by heating for 1-3 hours at 100-150 ℃.
The sensing material comprises polydimethylsiloxane, nickel powder, gaIn alloy and silver ion conductive ink. In some other embodiments, the sensing material may be selected from other piezoresistive materials. After the dimethylsiloxane, nickel powder, gaIn alloy and silver ion conductive ink are thoroughly mixed, they are stirred for 10-15 minutes and filled in the grooves 120 of the susceptor 100. Heating for 4 hours at 90-110 ℃ and 50-100KPa, and curing and molding. Of course, other piezoresistive materials may be selected for the sensing material.
The feeler lever 300 has one of a conical shape and a cylindrical shape. The stability of the cylinder is good. The conical material is less and the stability is good. The feeler lever 300 is made of a light material and a high hardness material.
Referring to fig. 7, in another aspect, the invention provides a method for manufacturing a micro-cantilever Liang Chujiao sensor, comprising:
Step S100, filling a base 100 material in a mold, and forming a base 100 after curing and molding the base 100 material;
Step 200, filling the sensing material in the plurality of grooves 120, curing and forming the sensing element 200, and curing and forming the sensing element 200 after connecting the sensing material with the electrode.
Step S300, removing the excessive material removing portion 400 on the base 100, and connecting the feeler lever 300 to the top of the shrinkage structure 110 in the base 100.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present invention will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. And obvious changes and modifications which are extended therefrom are still within the scope of the invention.
Claims (7)
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311761861.7A CN117740208B (en) | 2023-12-20 | 2023-12-20 | Micro-cantilever Liang Chujiao sensor and preparation method thereof |
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| CN202311761861.7A CN117740208B (en) | 2023-12-20 | 2023-12-20 | Micro-cantilever Liang Chujiao sensor and preparation method thereof |
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| CN117740208B true CN117740208B (en) | 2025-11-07 |
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Citations (2)
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| CN114459642A (en) * | 2022-01-26 | 2022-05-10 | 浙江大学 | Robot bionic flexible electronic skin with controllable global rigidity |
| CN114923605A (en) * | 2022-04-26 | 2022-08-19 | 苏州大学 | A kind of micro-cantilever beam sensor and preparation method thereof |
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| US4616511A (en) * | 1985-02-20 | 1986-10-14 | Eaton Corporation | Tactile sensor |
| US6988412B1 (en) * | 2004-11-30 | 2006-01-24 | Endevco Corporation | Piezoresistive strain concentrator |
| CN101308051B (en) * | 2008-07-01 | 2011-01-12 | 西安交通大学 | Three-dimensional micro- force silicon micro- sensor |
| CN101776495B (en) * | 2010-03-12 | 2011-08-17 | 浙江大学 | Micro/nano fiber structure-based touch sensor and preparation method thereof |
| CN107830875B (en) * | 2017-09-14 | 2020-07-28 | 南京航空航天大学 | Shape-controllable robot bionic tentacle touch sensor and detection method |
| CN111473895B (en) * | 2020-03-16 | 2021-06-29 | 吉林大学 | a tactile sensor |
| CN114935375B (en) * | 2022-05-27 | 2024-11-26 | 西南科技大学 | A bionic ciliary micro-flow sensor, preparation method and preparation device thereof |
| CN114993528B (en) * | 2022-08-05 | 2022-11-01 | 四川大学 | A kind of highly sensitive tactile sensor and preparation method thereof |
| CN115541092A (en) * | 2022-10-08 | 2022-12-30 | 东南大学 | Multi-directional force touch sensor and preparation method thereof |
| CN116105914A (en) * | 2022-12-08 | 2023-05-12 | 北京工业大学 | A three-dimensional pressure sensor capable of measuring effective stress in saturated formation |
| CN116465289A (en) * | 2023-04-24 | 2023-07-21 | 西安理工大学 | Variable-rigidity scanning measuring head for bending deformation of piezoelectric driving mechanism |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114459642A (en) * | 2022-01-26 | 2022-05-10 | 浙江大学 | Robot bionic flexible electronic skin with controllable global rigidity |
| CN114923605A (en) * | 2022-04-26 | 2022-08-19 | 苏州大学 | A kind of micro-cantilever beam sensor and preparation method thereof |
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