CN117704957A - Measuring system for object to be measured - Google Patents

Abstract

The system comprises a tool device, a processing device, a laser interferometer and a motion device, wherein the motion device is arranged on the tool device, and the laser interferometer is used for outputting a first stripe image under the condition that the object to be measured is arranged on the tool device; the processing device is used for determining the position of the object to be detected according to the first stripe image; and under the condition that the position of the object to be measured deviates from the optimal measurement position, controlling the movement device to rotate so as to adjust the position of the object to be measured to the optimal measurement position; the laser interferometer is configured to measure the object to be measured to obtain a measurement result of the object to be measured when the position of the object to be measured is the optimal measurement position.

Description

Measuring system for the object to be measured

Technical field

The embodiments of the present disclosure relate to the technical field of laser measurement, and more specifically, to a measurement system for an object to be measured.

Background technique

Laser interferometer is a universal length measurement that uses the laser wavelength as a known length and uses the Michelson interference system to measure displacement.

In the related art, in order to improve the measurement accuracy of the laser interferometer, the object to be measured, such as the lens, is usually manually adjusted to a suitable position based on the image output by the laser interferometer, and then the lens is measured based on the laser interferometer. However, due to the diversity of lens surface types, the adjustment methods for each surface type are also different. The manual judgment and adjustment method is not only time-consuming and wasteful of manpower, but also cannot guarantee that the lens can be adjusted to the appropriate position for every measurement. affects the measurement accuracy.

Contents of the invention

One purpose of the embodiments of the present disclosure is to provide a new technical solution for a measurement system for an object to be measured.

The present disclosure provides a measurement system for an object to be measured, including a tooling device, a processing device, a laser interferometer and a motion device, and the motion device is provided on the tooling device,

The laser interferometer is used to output a first fringe image when the object to be measured is placed on the tooling device;

The processing device is used to determine the position of the object to be measured based on the first stripe image; and,

When the position of the object to be measured deviates from the optimal measurement position, control the rotation of the motion device to adjust the position of the object to be measured to the optimal measurement position;

The laser interferometer is used to measure the object to be measured to obtain a measurement result of the object to be measured when the position of the object to be measured is the optimal measurement position.

Optionally, the processing device is also configured to receive a mode selection instruction input by the user; and,

In response to the mode selection instruction, control the laser interferometer to enter the corresponding working mode;

Wherein, the working mode includes stripe pattern mode and dot pattern mode.

Optionally, the laser interferometer is used to output a first fringe image when the object to be measured is placed on the tooling device, specifically including:

When the object to be measured is placed on the tooling device, if the laser interferometer is in the fringe pattern mode, the first fringe image is output.

Optionally, the laser interferometer is also configured to output a standard spot diagram image if the laser interferometer is in the spot diagram mode when the object to be measured is not placed on the tooling device; and ,

When the object to be measured is placed on the tooling device, if the laser interferometer is in the spot diagram mode, output the current spot diagram image;

The processing module is also used to control the rotation of the motion device according to the standard dot map image and the current dot map image.

Optionally, the processing module is used to control the motion device according to the standard point map image and the current point map image, specifically including:

Compare the standard dot map image and the current dot map image;

When the deviation between the standard dot map image and the current dot map image is outside the preset deviation range, the movement device is controlled to rotate so that the standard dot map image and the current dot map image The deviation between them is within the preset deviation range.

Optionally, the processing device is also configured to control the rotation of the movement device to cause the laser if the laser interferometer is in the fringe pattern mode when the sample module is placed on the tooling device. The interferometer outputs a second fringe image.

Optionally, the optimal measurement position is a position that satisfies the set measurement conditions;

Wherein, the set measurement condition at least includes that the number of stripes included in the first stripe image is less than or equal to the set number of stripes.

Optionally, the object to be measured is a lens, and the measurement result of the object to be measured at least includes the flatness of the lens.

Optionally, the processing device is also used to store the measurement results of the object to be measured.

Optionally, the motion device is a six-axis motor.

One beneficial effect of the embodiments of the present disclosure is that the laser interferometer will output a first fringe image when the object to be measured is placed on the tooling device, and the processing device can determine the location of the object to be measured based on the first fringe image. And when the position of the object to be measured deviates from the best measurement position, the movement device is controlled to rotate to adjust the position of the object to be measured to the best measurement position. The position of the laser interferometer at the object to be measured is: The object to be measured is measured in the best measuring position. Through the measurement system for the object to be measured provided by the embodiments of the present disclosure, it can automatically adjust the object to be measured to the optimal measurement position, and then measure the object to be measured by a laser interferometer without manual intervention, while ensuring measurement accuracy.

Other features of the present specification and its advantages will become apparent from the following detailed description of exemplary embodiments of the present specification with reference to the accompanying drawings.

Description of the drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the specification and together with the description, serve to explain the principles of the specification.

Figure 1 is a schematic diagram of a measurement system for an object to be measured according to an embodiment of the present disclosure;

Figure 2 is a schematic diagram of a second stripe image according to an embodiment of the present disclosure;

Figure 3 is a schematic diagram of a standard dot plot image according to an embodiment of the present disclosure;

Figure 4 is a schematic diagram of rotating the tilted X-axis and tilted Y-axis of the motion device according to an embodiment of the present disclosure;

FIG. 5 is a schematic diagram of a first stripe image according to an embodiment of the present disclosure.

Detailed ways

Various exemplary embodiments of the present disclosure will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangement of components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the disclosed embodiments unless otherwise specifically stated.

The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the disclosure, its application or uses.

Techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods and devices should be considered a part of the specification. .

In all examples shown and discussed herein, any specific values are to be construed as illustrative only and not as limiting. Accordingly, other examples of the exemplary embodiments may have different values.

It should be noted that similar reference numerals and letters refer to similar items in the following figures, so that once an item is defined in one figure, it does not need further discussion in subsequent figures.

<System Embodiment>

An embodiment of the disclosure provides a measurement system for an object to be measured. FIG. 1 is a hardware schematic diagram of a measurement system for an object to be measured according to an embodiment of the disclosure. As shown in Figure 1, the measurement system 1 of the object to be measured includes a tooling device 11, a processing device 12, a laser interferometer 13 and a movement device 14. The movement device 14 is provided on the tooling device 11 so that when the movement device 14 rotates The tooling device 11 can be driven to rotate, thereby adjusting the position of the object to be tested placed on the tooling device 11 .

In this embodiment, the tooling device 11 is used to place the object to be tested. The object to be tested may be a lens in a VR (Virtual Reality) device. The lens is usually a flat lens. The flatness of the lens can be measured through the testing system of the object to be tested according to the embodiment of the present disclosure. For example, the lens is usually placed on the tooling device 11 by a surveyor.

In this embodiment, the laser interferometer 13 is used to output a first fringe image when the object to be measured is placed on the tooling device 11 .

In an optional embodiment, the laser interferometer 13 is used to output the first fringe image when the object to be measured is placed on the tooling device 11, specifically including: when the object to be measured is placed on the tooling device 11 In the case of the tooling device 11, if the laser interferometer 13 is in the fringe pattern mode, the first fringe image is output.

Among them, the laser interferometer 13 will output a fringe image only when the laser interferometer 13 is in the fringe pattern mode. Usually, the processing device 12 controls the laser interferometer 13 to enter the fringe pattern mode.

Continuing the above example, when the measuring personnel places the lens on the tooling device 11, if the laser interferometer 13 is in the fringe pattern mode, the laser interferometer 13 will output the first fringe image 4 shown in Figure 5. Of course, the first fringe image 4 shown in FIG. 5 may also be the fringe image output by the laser interferometer 13 when the position of the lens is the optimal measurement position.

In this embodiment, the processing device 12 is configured to determine the position of the object to be measured based on the first stripe image; and, when the position of the object to be measured deviates from the optimal measurement position , controlling the rotation of the motion device 14 to adjust the position of the object to be measured to the optimal measurement position.

Wherein, the optimal measurement position is a position that satisfies the set measurement conditions. Wherein, the set measurement condition at least includes that the number of stripes included in the first stripe image is less than or equal to the set number of stripes. The set number of stripes can be set according to the product requirements of the object to be measured, and is not limited in this embodiment.

It should be noted that since the surface shape of the object to be measured, such as a lens, is usually inconsistent, measurement conditions matching the surface shape of the lens can be preset and stored in the processing device 12 . That is to say, in this embodiment, the set measurement conditions Not specifically limited.

It can be understood that when the position of the object to be measured is the optimal measurement position, at this time, the number of fringes included in the first fringe image output by the laser interferometer 13 is less than or equal to the set number of fringes, or it can be Simply understood, at this time, the number of fringes included in the first fringe image output by the laser interferometer 13 is relatively minimal, and the measurement accuracy is higher.

The motion device 14 may be a six-axis motor. The rotation of the motion device 14 mentioned in this step usually refers to the fine adjustment of the motion device 14. Specifically, it may be the tilt X axis (Tilt_X axis for short) and Tilt the Y axis (Tilt_Y for short) to rotate.

Specifically, the processing device 12 will determine the position of the object to be measured based on the first stripe image, and when the position of the object to be measured deviates from the optimal measurement position, it will control the rotation of the Tilt_X axis and Tilt_Y axis of the motion device. , when the Tilt_X axis and Tilt_Y axis of the motion device rotate, the tooling device 11 on which the object to be measured is placed will be driven to rotate, so that the position of the object to be measured is adjusted. It should be noted that during this process, the processing device 12 needs to obtain the first fringe image output by the laser interferometer 13 every set time period, in order to determine whether the position of the lens has been adjusted to the optimal position based on the first fringe image. Best measurement position.

Continuing the above example, after the laser interferometer 13 outputs the first fringe image, the processing device 12 will determine the position of the lens based on the first fringe image. Referring to Figure 4, if the position of the lens deviates from the optimal measurement position, it will control The Tilt_X axis and Tilt_Y axis of the motion device 14 rotate to drive the tooling device 11 on which the lens is placed to rotate, thereby adjusting the position of the lens. During the adjustment process, the processing device 12 will acquire the first fringe image output by the laser interferometer 13. If the first fringe image 4 shown in Figure 5 is acquired, it indicates that the position of the lens has been adjusted to the optimal measurement position.

In this embodiment, the laser interferometer 13 is used to measure the object to be measured to obtain the measured value of the object to be measured when the position of the object to be measured is the optimal measurement position. Measurement results.

Wherein, when the object to be measured is a lens, the measurement result of the object to be measured at least includes the flatness of the flat lens.

Continuing the above example, when the lens is at the optimal measurement position, that is, when the laser interferometer 13 outputs the first fringe image 4 shown in FIG. 5 , the laser interferometer 13 will measure the lens to obtain the value of the lens. Flatness.

In an optional embodiment, the processing device 12 is also used to store the measurement results of the object to be measured.

Continuing with the above example, after the laser interferometer 13 obtains the flatness of the lens, the processing device 12 will store the flatness of the lens so that the measuring personnel can perform subsequent process operations based on the flatness of the lens.

According to the measurement system of the object to be measured according to the embodiment of the present disclosure, the laser interferometer will output a first fringe image when the object to be measured is placed on the tooling device, and the processing device can determine the location of the object to be measured based on the first fringe image. position, and when the position of the object to be measured deviates from the best measurement position, the movement device is controlled to rotate to adjust the position of the object to be measured to the best measurement position. The laser interferometer is at the position of the object to be measured. When the position is the best measurement position, the object to be measured will be measured. Through the measurement system for the object to be measured provided by the embodiments of the present disclosure, it can automatically adjust the object to be measured to the optimal measurement position, and then measure the object to be measured by a laser interferometer without manual intervention, while ensuring measurement accuracy.

In one embodiment, before placing the object to be measured on the tooling device 11, it is usually necessary to calibrate the motion device 14 based on the sample module. Specifically, the X-axis and Y-axis of the motion device 14 can be rotated so that The laser interferometer 13 can produce normal fringe images.

In this embodiment, the processing device 11 is also used to control the rotation of the motion device so that the laser interferometer 13 is in the fringe pattern mode when the sample module is placed on the tooling device. The laser interferometer 13 outputs a second fringe image.

Among them, the sample module can be a Golden module.

Among them, the second stripe image can be simply understood as a normal stripe image.

Continuing the above example, before placing the lens on the tooling device 11, first install the Golden module on the tooling device 11. If the laser interferometer 13 is in the fringe pattern mode, the processing device 11 will control the X-axis and Y-axis of the motion device 14 Rotate so that the second fringe image 2 shown in FIG. 2 appears on the laser interferometer 13 .

In one embodiment, before placing the object to be measured on the tooling device 11, it is usually necessary to make a rough adjustment to the motion device 14. Specifically, this may be to rotate the Tilt_X axis and the Tilt_Y axis of the motion device 14 so that the object to be measured can be placed on the tooling device 11. After the measuring object is placed on the tooling device 11, the laser interferometer 13 can output a valid first fringe image.

In this embodiment, the laser interferometer 13 is also used to output a standard spot diagram image if the laser interferometer 13 enters the spot diagram mode when the object to be measured is not placed on the tooling device.

Among them, the laser interferometer 13 will output a dot pattern image only when the laser interferometer 13 is in the dot pattern mode. Usually, the processing device 12 controls the laser interferometer 13 to enter the spot diagram mode.

The standard spot diagram image can be understood as the spot diagram image output by the laser interferometer 13 when no object to be measured is placed on the tooling device 11 .

Continuing the above example, no object to be measured is placed on the tooling device 11. If the laser interferometer 13 is in the spot diagram mode, the laser interferometer 13 will output the standard spot diagram image 3 shown in Figure 3.

In this embodiment, the laser interferometer 13 is also used to output the current point map image if the laser interferometer enters the spot map mode when the object to be measured is placed on the tooling device.

The current point map image can be understood as the point map image output by the laser interferometer 13 when the object to be measured is placed on the tooling device 11 .

Continuing the above example, the lens is placed on the tooling device 11. If the laser interferometer 13 enters the spot map mode, the laser interferometer 13 will output the current spot map image.

In this embodiment, the processing module 12 is also used to control the rotation of the motion device 14 according to the standard dot map image and the current dot map image.

In an optional embodiment, the processing module 12 is configured to control the rotation of the motion device 14 according to the standard dot map image and the current dot map image, specifically including: comparing the standard dot map image. and the current point diagram image; when the deviation between the standard point diagram image and the current point diagram image is outside the preset deviation range, control the movement device 14 to rotate so that the standard point The deviation between the map image and the current point map image is within the preset deviation range.

The preset deviation range may be a value set according to actual scenarios and actual product requirements, which is not limited in this embodiment.

Continuing with the above example, the processing module 12 identifies the first coordinate information of the central light point in the standard point diagram image shown in FIG. 3 and the second coordinate information of the central light point in the current point diagram image, and compares the first coordinate information and For the second coordinate information, if the deviation between the first coordinate information and the second coordinate information is outside the preset deviation range, the Tilt_X axis and Tilt_Y axis of the motion device 14 are controlled to rotate, so that the first coordinate information and the second coordinate information are The deviation between coordinate information is within the preset deviation range.

It should be noted that during this process, the processing device 12 needs to obtain the current dot map image output by the laser interferometer 13 every set time period, so as to determine whether the standard dot map image and the current dot map image have been combined. The deviation between them is adjusted to the preset deviation range.

In one embodiment, the processing device 12 is also configured to receive a mode selection instruction input by the user; in response to the mode selection instruction, control the laser interferometer 13 to enter a corresponding working mode.

Wherein, the working mode includes stripe pattern mode and dot pattern mode.

It should be noted that the mode selection instruction may be a voice instruction or a text instruction, which is not limited in this embodiment. Through this embodiment, the processing device 12 can control the laser interferometer 13 to enter the fringe pattern mode or the dot pattern mode, so that the laser interferometer 13 outputs a fringe image or a dot pattern image as required.

This embodiment provides a human-computer interaction interface to support the measurement personnel to select the required working mode according to the current actual needs.

<Example>

Next, taking the object to be measured as a lens as an example, and combining Figures 1 to 5, an example of a measurement method based on the measurement system of the object to be measured is shown. In this example, the measurement method includes:

In step 201, the surveyor places the Golden module on the tooling device 11.

Step 202: When the Golden module is placed on the tooling device 11, the processing device 12 controls the laser interferometer 13 to enter the fringe pattern mode. When the laser interferometer 13 is in the fringe pattern mode, the processing device 12 controls the motion device 14. The X-axis and Y-axis rotate so that the laser interferometer 13 outputs the second fringe image 2 shown in FIG. 2 .

Step 203: When no object to be measured is placed on the tooling device 11, the processing device 12 controls the laser interferometer 13 to enter the spot pattern mode. When the laser interferometer 13 is in the spot pattern mode, the laser interferometer 13 outputs a pattern. Standard dot plot image shown in 3.

In step 204, the tester places the lens on the tooling device 11.

Step 205: When the lens is placed on the tooling device 11, the laser interferometer 13 outputs the current spot map image.

Step 206: The processing device 12 identifies the first coordinate information of the central light point in the standard point diagram image shown in Figure 3 and the second coordinate information of the central light point in the current point diagram image, and compares the first coordinate information with the second coordinate information. Two coordinate information, if the deviation between the first coordinate information and the second coordinate information is outside the preset deviation range, the Tilt_X axis and Tilt_Y axis of the motion device 14 are controlled to rotate, so that the first coordinate information and the second coordinate information The deviation between the information lies within the preset deviation range.

Step 207, the processing device 12 controls the laser interferometer 13 to enter the fringe pattern mode. When the laser interferometer 13 is in the fringe pattern mode, the laser interferometer 13 outputs the first fringe image.

Step 208, the processing device 12 determines the position of the lens based on the first fringe image, and when the position of the lens deviates from the optimal measurement position, controls the Tilt_X axis and Tilt_Y axis of the motion device 14 to rotate in order to drive The tooling device 11 on which the lens is placed rotates to adjust the position of the lens.

In this step 208, during the process of adjusting the position of the lens, the processing device 12 can obtain the first fringe image output by the laser interferometer 13 at every set time period, and obtain the first fringe image output by the laser interferometer 13 after the first fringe image output by the laser interferometer 13. When the fringe image is the first fringe image 4 shown in Figure 5, that is, when the number of fringes in the first fringe image is less than or equal to the set number of fringes, it indicates that the position of the lens has been adjusted to the optimal measurement. Location.

Step 209: When the position of the lens is the optimal measurement position, the laser interferometer 13 measures the lens to obtain the flatness of the lens.

Step 210, the processing device 12 stores the flatness of the lens.

According to this example, it can automatically adjust the lens to the optimal measurement position, and then measure the lens with a laser interferometer without manual intervention and ensuring measurement accuracy.

In the description of this specification, reference to the description of the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" or the like is intended to be in conjunction with the implementation. An example or example describes a specific feature, structure, material, or characteristic that is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Although the embodiments of the present application have been shown and described, those of ordinary skill in the art will understand that various changes, modifications, substitutions and modifications can be made to these embodiments without departing from the principles and purposes of the present application. The scope of the application is defined by the claims and their equivalents.

Claims (10)

1. A measurement system for an object to be measured, characterized in that it includes a tooling device, a processing device, a laser interferometer and a motion device, and the motion device is provided on the tooling device, The laser interferometer is used to output a first fringe image when the object to be measured is placed on the tooling device; The processing device is used to determine the position of the object to be measured based on the first stripe image; and, When the position of the object to be measured deviates from the optimal measurement position, control the rotation of the motion device to adjust the position of the object to be measured to the optimal measurement position; The laser interferometer is used to measure the object to be measured to obtain a measurement result of the object to be measured when the position of the object to be measured is the optimal measurement position. 2. The system according to claim 1, characterized in that, The processing device is also used to receive a mode selection instruction input by the user; and, In response to the mode selection instruction, control the laser interferometer to enter the corresponding working mode; Wherein, the working mode includes stripe pattern mode and dot pattern mode. 3. The system according to claim 2, the laser interferometer is used to output a first fringe image when the object to be measured is placed on the tooling device, specifically including: When the object to be measured is placed on the tooling device, if the laser interferometer is in the fringe pattern mode, the first fringe image is output. 4. The system according to claim 2, characterized in that, The laser interferometer is also used to output a standard spot diagram image if the laser interferometer is in the spot diagram mode when the object to be measured is not placed on the tooling device; and, When the object to be measured is placed on the tooling device, if the laser interferometer is in the spot diagram mode, output the current spot diagram image; The processing module is also used to control the rotation of the motion device according to the standard dot map image and the current dot map image. 5. The system according to claim 4, characterized in that the processing module is used to control the motion device according to the standard point diagram image and the current point diagram image, specifically including: Compare the standard dot map image and the current dot map image; When the deviation between the standard dot map image and the current dot map image is outside the preset deviation range, the movement device is controlled to rotate so that the standard dot map image and the current dot map image The deviation between them is within the preset deviation range. 6. The system according to claim 2, characterized in that, The processing device is also used to control the rotation of the motion device so that the laser interferometer outputs a third Two-stripe image. 7. The system according to any one of claims 1 to 6, characterized in that the optimal measurement position is a position that satisfies the set measurement conditions; Wherein, the set measurement condition at least includes that the number of stripes included in the first stripe image is less than or equal to the set number of stripes. 8. The system according to any one of claims 1 to 6, wherein the object to be measured is a lens, and the measurement result of the object to be measured at least includes the flatness of the lens. 9. The system according to any one of claims 1 to 6, characterized in that, The processing device is also used to store the measurement results of the object to be measured. 10. The system according to any one of claims 1 to 6, characterized in that the motion device is a six-axis motor.