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CN117690778A - Mass spectrometer ion transmission method and device - Google Patents

Mass spectrometer ion transmission method and device Download PDF

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Publication number
CN117690778A
CN117690778A CN202410151147.4A CN202410151147A CN117690778A CN 117690778 A CN117690778 A CN 117690778A CN 202410151147 A CN202410151147 A CN 202410151147A CN 117690778 A CN117690778 A CN 117690778A
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channel
ion
axis
sampling
assembly
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CN117690778B (en
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张远清
尚雪松
王晶
凌星
程文播
唐玉国
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Suzhou Institute of Biomedical Engineering and Technology of CAS
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/062Ion guides
    • H01J49/063Multipole ion guides, e.g. quadrupoles, hexapoles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/0027Methods for using particle spectrometers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/062Ion guides
    • H01J49/065Ion guides having stacked electrodes, e.g. ring stack, plate stack
    • H01J49/066Ion funnels

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

The invention discloses a mass spectrometer ion transmission method and a device, wherein ions are introduced into a vacuum side from an atmospheric pressure side by adopting a sample introduction channel, and the diameter of a sample introduction port of the sample introduction channel positioned on the atmospheric pressure side is smaller than that of a sample outlet positioned on the vacuum side; the transmission channel is funnel-shaped, the axis of the sample introduction channel and the axis of the transmission channel are arranged in an angle or parallel offset manner, the airflow carrying ions entering the vacuum cavity is blocked by the ion funnel assembly, the directional airflow of the gas is fully blocked and diffused, the gas is prevented from flowing into the cavity where the multipole rod assembly is positioned, and the vacuum load pressure of the cavity is relieved; the ion-carrying gas flow contains interfering particles, which are arranged in an angle or offset manner, the ion funnel component blocks the interfering particles, and charged ions to be analyzed are blocked in the funnel-shaped inner space under the pseudopotential well effect of the radio frequency electric field, focused into extremely fine ions and moved towards the outlet side, and cannot leak out of the ion funnel component or collide with the ion funnel component.

Description

一种质谱仪离子传输方法以及装置Mass spectrometer ion transmission method and device

技术领域Technical field

本发明涉及质谱仪领域,尤其是涉及质谱仪离子传输方法以及装置。The present invention relates to the field of mass spectrometers, and in particular to mass spectrometer ion transmission methods and devices.

背景技术Background technique

质谱仪是一种广泛应用于环境监测、食品安全、药物研发、材料科学、生命科学及石油化工等领域的分析仪器。在所有质谱仪器中,有约一半以上为大气压电离源质谱仪。此类质谱均需面临将带电离子从大气压转移到真空系统中进行质量分析的问题。目前质谱仪器中多采用真空小孔搭配多极杆,或者毛细管搭配离子漏斗等典型方案作为大气压-真空接口下的离子传输装置。质谱仪器升级换代的主要方向在于提升仪器信号强度和信噪比,降低干扰噪声等方面。Mass spectrometer is an analytical instrument widely used in environmental monitoring, food safety, drug research and development, materials science, life science and petrochemical industry. More than half of all mass spectrometry instruments are atmospheric pressure ionization source mass spectrometers. This type of mass spectrometry faces the problem of transferring charged ions from atmospheric pressure to a vacuum system for mass analysis. At present, typical solutions such as vacuum orifices paired with multipole rods, or capillaries paired with ion funnels are commonly used in mass spectrometry instruments as ion transmission devices at the atmospheric pressure-vacuum interface. The main direction of upgrading mass spectrometry instruments is to improve instrument signal strength and signal-to-noise ratio, and reduce interference noise.

专利US6107628A中,公开了用于将在近大气压下产生的离子和其他带电粒子导入真空区域的方法和设备,采用了毛细管进样,搭配离子漏斗实现在0.1-50 Torr真空压力下的高效离子聚焦。相比于传统四极杆方案多用于mTorr级及以下真空压力环境,离子漏斗能够实现在更高压力下的离子聚焦,因而可以通过提升进样孔尺寸增加进样量,提升信号强度,具有较好优势。但该方案未考虑毛细管直接进样产生的强烈定向气流对离子漏斗真空腔室的下一级真空腔室产生的较高真空负载,也未考虑离子流中的中性粒子对后续质量分析器、检测器等环节的干扰问题。Patent US6107628A discloses a method and equipment for introducing ions and other charged particles generated at near atmospheric pressure into a vacuum area. Capillary sampling is used, and an ion funnel is used to achieve efficient ion focusing under vacuum pressures of 0.1-50 Torr. . Compared with traditional quadrupole solutions, which are mostly used in vacuum pressure environments of mTorr level and below, the ion funnel can achieve ion focusing at higher pressures. Therefore, the injection volume can be increased by increasing the size of the injection hole, and the signal intensity can be improved, which has a higher Good advantage. However, this plan does not consider the high vacuum load produced by the strong directional airflow generated by direct injection of capillary tubes on the next-stage vacuum chamber of the ion funnel vacuum chamber, nor does it consider the impact of neutral particles in the ion flow on the subsequent mass analyzer, Interference problems in detectors and other links.

专利US9240310B2中,公开了改进离子进入质谱仪的方法和装置,锥形进样管,相比于普通的毛细进样管,具有更高的离子捕获和传输效率,且离子流集中性较好。尤其对于纳升电喷雾等应用场景具有明显优势,可在一定程度上提升信号强度。但该方案同样未考虑进样管直接进样产生的强烈定向气流对后续离子传输或质量分析真空腔室的产生的较高真空负载,也未考虑离子流中的中性粒子对后续质量分析器、检测器等环节的干扰问题。Patent US9240310B2 discloses a method and device for improving ion entry into a mass spectrometer. The tapered sampling tube has higher ion capture and transmission efficiency and better ion flow concentration than ordinary capillary sampling tubes. It has obvious advantages especially for application scenarios such as nanoelectrospray, which can improve signal strength to a certain extent. However, this solution also does not consider the high vacuum load generated by the strong directional airflow generated by direct injection of the sample tube on subsequent ion transmission or the mass analysis vacuum chamber, nor does it consider the impact of neutral particles in the ion flow on the subsequent mass analyzer. , detectors and other links of interference problems.

发明内容Contents of the invention

为了克服现有技术的不足,本发明的目的之一在于提供一种质谱仪离子传输方法,能够将带电离子从大气压转移到真空系统中并且能够避免进样产生的定向气流以及中性粒子对后续分析的影响。In order to overcome the shortcomings of the existing technology, one of the purposes of the present invention is to provide a mass spectrometer ion transmission method that can transfer charged ions from atmospheric pressure to a vacuum system and can avoid the directional airflow and neutral particles generated by sample injection to cause subsequent damage. Analytical impact.

为了克服现有技术的不足,本发明的目的之二在于提供一种质谱仪离子传输装置,能够将带电离子从大气压转移到真空系统中并且能够避免进样产生的定向气流以及中性粒子对后续分析的影响。In order to overcome the shortcomings of the existing technology, the second object of the present invention is to provide a mass spectrometer ion transmission device that can transfer charged ions from atmospheric pressure to a vacuum system and can avoid the directional airflow and neutral particles generated by sample injection to cause subsequent damage. Analytical impact.

本发明的目的之一采用如下技术方案实现:One of the purposes of the present invention is achieved by adopting the following technical solutions:

一种质谱仪离子传输方法,包括以下步骤:A mass spectrometer ion transmission method includes the following steps:

通过采用锥形管的进样通道使离子从大气压侧进入真空侧,所述进样通道呈锥形,所述进样通道位于所述大气压侧的进样口直径小于位于所述真空侧的出样口的直径;Ions are made to enter the vacuum side from the atmospheric pressure side by using a sampling channel of a tapered tube. The sampling channel is tapered, and the diameter of the inlet of the sampling channel on the atmospheric pressure side is smaller than that of the outlet on the vacuum side. The diameter of the sample port;

采用多个透镜极片叠装形成离子漏斗组件,所述离子漏斗组件设有传输通道,靠近所述进样通道的部分透镜极片的内径相同形成直筒形离子通道,便于离子在大范围内被捕获到所述离子漏斗组件内部,远离所述进样通道的部分透镜极片的内径沿离子运动方向逐渐减小,形成漏斗形离子通道便于离子在逐渐聚焦形成更细的离子束穿过最后一个内径最小的透镜极片进入多极杆组件;Multiple lens pole pieces are stacked to form an ion funnel assembly. The ion funnel assembly is provided with a transmission channel. The inner diameters of some lens pole pieces close to the sampling channel are the same to form a straight cylindrical ion channel, which facilitates ions to be transported over a wide range. Captured inside the ion funnel assembly, the inner diameter of the part of the lens pole piece away from the sampling channel gradually decreases along the direction of ion movement, forming a funnel-shaped ion channel that facilitates the ions to gradually focus to form a thinner ion beam and pass through the last The lens pole piece with the smallest inner diameter enters the multipole assembly;

所述进样通道的轴线与所述传输通道的轴线呈角度设置或平行偏移设置;The axis of the sampling channel and the axis of the transmission channel are set at an angle or offset in parallel;

所述进样通道上施加直流电压V1,多个所述透镜极片上施加有直流电压和射频电压,其中相邻两所述透镜极片上施加相位相反的射频电压,沿离子运动方向多个所述透镜极片上的直流电压从V2逐渐过渡到V3,所述多极杆组件上施加有直流电压V4,V1、V2、V3、V4按单向递增或递减以驱使离子从所述进样通道经所述传输通道至所述多极杆组件。A DC voltage V1 is applied to the sampling channel, a DC voltage and a radio frequency voltage are applied to a plurality of the lens pole pieces, wherein a radio frequency voltage with an opposite phase is applied to two adjacent lens pole pieces, and a plurality of the lens pole pieces are applied in the direction of ion movement. The DC voltage on the lens pole piece gradually transitions from V2 to V3, and a DC voltage V4 is applied to the multipole rod assembly. V1, V2, V3, and V4 increase or decrease in one direction to drive ions from the sampling channel through the the transmission channel to the multipole assembly.

进一步的,当所述进样通道的轴线与所述传输通道的轴线呈角度设置时,所述进样通道的轴线与所述传输通道的轴线之间的夹角为0.1-30°。Further, when the axis of the sampling channel and the axis of the transmission channel are arranged at an angle, the angle between the axis of the sampling channel and the axis of the transmission channel is 0.1-30°.

进一步的,当所述进样通道的轴线与所述传输通道的轴线平行偏移设置时,所述进样通道的轴线与所述传输通道的轴线的偏移距离为1-10mm。Further, when the axis of the sampling channel and the axis of the transmission channel are offset in parallel, the offset distance between the axis of the sampling channel and the axis of the transmission channel is 1-10 mm.

进一步的,所述进样通道的进样口内径为0.1-5mm,所述进样通道锥度为0.3-10°。Further, the inner diameter of the injection port of the sampling channel is 0.1-5 mm, and the taper of the sampling channel is 0.3-10°.

进一步的,所述质谱仪离子传输方法还包括加热步骤,所述加热步骤具体为:对所述进样通道进行加热,使进入所述进样通道的带溶剂离子团簇去溶剂化并解离形成带电离子。Further, the mass spectrometer ion transmission method also includes a heating step. The heating step specifically includes: heating the sampling channel to desolvate and dissociate the solvent-bearing ion clusters entering the sampling channel. Charged ions are formed.

进一步的,所述多极杆组件上施加有射频电压,其中相邻两杆间施加的射频电压相位相反。Further, a radio frequency voltage is applied to the multipole rod assembly, wherein the radio frequency voltages applied between two adjacent rods have opposite phases.

本发明的目的之二采用如下技术方案实现:The second object of the present invention is achieved by adopting the following technical solutions:

一种质谱仪离子传输装置,用于实施上述任意一种质谱仪离子传输方法,所述质谱仪离子传输装置包括真空腔体以及安装于所述真空腔体内的离子漏斗组件,所述质谱仪离子传输装置还包括进样组件以及多极杆组件,所述进样组件安装于所述真空腔体一侧,所述多极杆组件安装于所述真空腔体内部,所述离子漏斗组件位于所述进样组件以及所述多极杆组件之间,所述进样组件包括锥形管,所述锥形管设有进样通道,所述进样通道呈锥形,所述进样通道位于所述大气压侧的进样口直径小于位于所述真空侧的出样口的直径,所述离子漏斗组件设有传输通道,所述传输通道靠近所述进样通道一侧宽度相等形成直筒形离子通道,所述传输通道靠近所述多极杆组件一侧宽度逐渐缩小形成漏斗形离子通道,所述进样通道的轴线与所述传输通道的轴线呈角度设置或平行偏移设置。A mass spectrometer ion transmission device used to implement any of the above-mentioned mass spectrometer ion transmission methods. The mass spectrometer ion transmission device includes a vacuum chamber and an ion funnel assembly installed in the vacuum chamber. The mass spectrometer ion transmission device The transmission device also includes a sampling assembly and a multipole rod assembly. The sampling assembly is installed on one side of the vacuum chamber. The multipole rod assembly is installed inside the vacuum chamber. The ion funnel assembly is located on the side of the vacuum chamber. Between the sampling assembly and the multipole assembly, the sampling assembly includes a tapered tube, the tapered tube is provided with a sampling channel, the sampling channel is tapered, and the sampling channel is located The diameter of the sample inlet on the atmospheric pressure side is smaller than the diameter of the sample outlet on the vacuum side. The ion funnel assembly is provided with a transmission channel. The width of the transmission channel close to the sample injection channel is equal to form a straight cylindrical ion channel, the width of the transmission channel near the multipole assembly gradually decreases to form a funnel-shaped ion channel, and the axis of the sampling channel and the axis of the transmission channel are set at an angle or offset in parallel.

进一步的,所述离子漏斗组件包括多个透镜极片,所述透镜极片叠装,每一所述透镜极片设有内孔,多个所述透镜极片的内孔形成所述传输通道,靠近所述进样通道的部分所述透镜极片的内径相同形成直筒形离子通道,远离所述进样通道的部分所述透镜极片的内径沿离子运动方向逐渐减小,形成漏斗形离子通道。Further, the ion funnel assembly includes a plurality of lens pole pieces, the lens pole pieces are stacked, each of the lens pole pieces is provided with an inner hole, and the inner holes of the plurality of lens pole pieces form the transmission channel. , the inner diameter of the lens pole piece close to the sampling channel is the same to form a straight cylindrical ion channel, and the inner diameter of the lens pole piece far away from the sampling channel gradually decreases along the ion movement direction to form a funnel-shaped ion channel. aisle.

进一步的,当所述进样通道的轴线与所述传输通道的轴线呈角度设置时,所述进样通道的轴线与所述传输通道的轴线之间的夹角为0.1-30°。Further, when the axis of the sampling channel and the axis of the transmission channel are arranged at an angle, the angle between the axis of the sampling channel and the axis of the transmission channel is 0.1-30°.

进一步的,当所述进样通道的轴线与所述传输通道的轴线平行偏移设置时,所述进样通道的轴线与所述传输通道的轴线的偏移距离为1-10mm。Further, when the axis of the sampling channel and the axis of the transmission channel are offset in parallel, the offset distance between the axis of the sampling channel and the axis of the transmission channel is 1-10 mm.

相比现有技术,本发明质谱仪离子传输方法通过采用锥形管的进样通道使离子从大气压侧进入真空侧,进样通道位于大气压侧的进样口直径小于位于真空侧的出样口的直径;离子漏斗组件的传输通道,靠近进样通道的部分透镜极片的内径相同形成直筒形离子通道,便于离子在大范围内被捕获到离子漏斗组件内部,远离进样通道的部分透镜极片的内径沿离子运动方向逐渐减小,形成漏斗形离子通道便于离子在逐渐聚焦形成更细的离子束穿过最后一个内径最小的透镜极片进入多极杆组件;进样通道的轴线与传输通道的轴线呈角度设置或平行偏移设置;通过上述设计,由大气压环境中通过锥形进样管进入到真空腔体内的携带离子的气流,会被离子漏斗组件阻挡,缓解气流中的强烈的定向流,使定向流得到充分的阻挡和扩散,避免流入多极杆组件所在的腔室,从而缓解多极杆组件所处的腔室的真空负载压力;携带离子的气流中,也包含一些中性粒子等其他干扰粒子,角度布置或偏移布置的布局,可以由离子漏斗组件阻挡此类粒子,而待分析的带电离子则会在离子漏斗组件的射频电场的赝势阱效应下,被阻挡在漏斗形状内部空间而不会漏到离子漏斗组件外面或撞到离子漏斗组件上,聚焦为极细的离子流,并沿漏斗形状向离子漏斗组件出口侧运动。Compared with the prior art, the ion transmission method of the mass spectrometer of the present invention uses a sampling channel of a tapered tube to allow ions to enter the vacuum side from the atmospheric pressure side. The diameter of the sampling port located on the atmospheric pressure side of the sampling channel is smaller than the sample outlet located on the vacuum side. diameter; in the transmission channel of the ion funnel assembly, the inner diameters of some lens pole pieces close to the sampling channel are the same to form a straight cylindrical ion channel, which facilitates ions to be captured into the interior of the ion funnel assembly over a wide range. The inner diameter of the piece gradually decreases along the direction of ion movement, forming a funnel-shaped ion channel, which facilitates ions to gradually focus to form a thinner ion beam, which passes through the last lens pole piece with the smallest inner diameter and enters the multipole assembly; the axis of the injection channel and the transmission The axis of the channel is set at an angle or parallel offset; through the above design, the airflow carrying ions entering the vacuum chamber through the tapered sampling tube in the atmospheric pressure environment will be blocked by the ion funnel assembly, alleviating the strong impact in the airflow. Directional flow can fully block and diffuse the directional flow to avoid flowing into the chamber where the multipole assembly is located, thereby alleviating the vacuum load pressure of the chamber where the multipole assembly is located; the airflow carrying ions also contains some Other interfering particles such as sexual particles, angular or offset layouts can be blocked by the ion funnel assembly, while the charged ions to be analyzed will be blocked under the pseudopotential well effect of the radio frequency electric field of the ion funnel assembly In the internal space of the funnel shape without leaking to the outside of the ion funnel assembly or hitting the ion funnel assembly, it is focused into an extremely fine ion flow and moves along the funnel shape toward the outlet side of the ion funnel assembly.

附图说明Description of the drawings

图1为本发明质谱仪离子传输方法的流程图;Figure 1 is a flow chart of the ion transmission method of the mass spectrometer of the present invention;

图2为本发明质谱仪离子传输装置第一实施例的立体图;Figure 2 is a perspective view of the first embodiment of the mass spectrometer ion transmission device of the present invention;

图3为图2的质谱仪离子传输装置的立体剖视图;Figure 3 is a three-dimensional cross-sectional view of the ion transmission device of the mass spectrometer of Figure 2;

图4为图2的质谱仪离子传输装置的锥形管的剖视图;Figure 4 is a cross-sectional view of the conical tube of the mass spectrometer ion transmission device of Figure 2;

图5为图2的质谱仪离子传输装置的离子漏斗组件的剖视图;Figure 5 is a cross-sectional view of the ion funnel assembly of the mass spectrometer ion transmission device of Figure 2;

图6为图2的质谱仪离子传输装置的局部结构剖视图;Figure 6 is a partial structural cross-sectional view of the ion transmission device of the mass spectrometer of Figure 2;

图7为本发明质谱仪离子传输装置第二实施例的剖视图;Figure 7 is a cross-sectional view of a second embodiment of the mass spectrometer ion transmission device of the present invention;

图8为本发明质谱仪离子传输装置中进样通道的轴线与传输通道的轴线偏移布置时的离子聚焦与传输仿真图。Figure 8 is a simulation diagram of ion focusing and transmission when the axis of the sampling channel and the axis of the transmission channel are offset in the ion transmission device of the mass spectrometer of the present invention.

图中:10、进样组件;11、壳体;12、锥形管;120、安装部;121、延伸部;122、进样通道;20、真空腔体;30、离子漏斗组件;31、透镜极片;32、安装柱;33、电路板;34、传输通道;40、多极杆组件。In the picture: 10. Sampling component; 11. Shell; 12. Conical tube; 120. Installation part; 121. Extension part; 122. Sampling channel; 20. Vacuum chamber; 30. Ion funnel assembly; 31. Lens pole piece; 32. Mounting column; 33. Circuit board; 34. Transmission channel; 40. Multipole assembly.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

需要说明的是,当组件被称为“固定于”另一个组件,它可以直接在另一个组件上或者也可以存在另一中间组件,通过中间组件固定。当一个组件被认为是“连接”另一个组件,它可以是直接连接到另一个组件或者可能同时存在另一中间组件。当一个组件被认为是“设置于”另一个组件,它可以是直接设置在另一个组件上或者可能同时存在另一中间组件。本文所使用的术语“垂直的”、“水平的”、“左”、“右”以及类似的表述只是为了说明的目的。It should be noted that when a component is referred to as being "fixed to" another component, it can be directly on the other component or another intermediate component may be present through which it is fixed. When a component is said to be "connected" to another component, it can be directly connected to the other component or there may be another intermediate component present at the same time. When a component is said to be "disposed on" another component, it can be directly located on the other component or another intervening component may be present. The terms "vertical," "horizontal," "left," "right" and similar expressions are used herein for illustrative purposes only.

除非另有定义,本文所使用的所有的技术和科学术语与属于本发明的技术领域的技术人员通常理解的含义相同。本文中在本发明的说明书中所使用的术语只是为了描述具体的实施例的目的,不是旨在于限制本发明。本文所使用的术语“及/或”包括一个或多个相关的所列项目的任意的和所有的组合。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which the invention belongs. The terminology used herein in the description of the invention is for the purpose of describing specific embodiments only and is not intended to limit the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

请参阅图1至图7,本发明质谱仪离子传输方法,包括以下步骤:Please refer to Figures 1 to 7. The mass spectrometer ion transmission method of the present invention includes the following steps:

通过采用锥形管12的进样通道122使离子从大气压侧进入真空侧,进样通道122呈锥形,进样通道122位于大气压侧的进样口直径小于位于真空侧的出样口的直径;The sampling channel 122 of the tapered tube 12 is used to allow ions to enter the vacuum side from the atmospheric pressure side. The sampling channel 122 is tapered, and the diameter of the sampling port located on the atmospheric pressure side of the sampling channel 122 is smaller than the diameter of the sample outlet located on the vacuum side. ;

采用多个透镜极片31叠装形成离子漏斗组件30,离子漏斗组件30设有传输通道34,靠近进样通道122的部分透镜极片31的内径相同形成直筒形离子通道,便于离子在大范围内被捕获到离子漏斗组件30内部,远离进样通道122的部分透镜极片31的内径沿离子运动方向逐渐减小,形成漏斗形离子通道便于离子在逐渐聚焦形成更细的离子束穿过最后一个内径最小的透镜极片31进入多极杆组件40;A plurality of lens pole pieces 31 are stacked to form an ion funnel assembly 30. The ion funnel assembly 30 is provided with a transmission channel 34. The inner diameters of some of the lens pole pieces 31 close to the sampling channel 122 are the same to form a straight cylindrical ion channel, which facilitates the movement of ions in a wide range. are captured inside the ion funnel assembly 30, and the inner diameter of the part of the lens pole piece 31 away from the sampling channel 122 gradually decreases along the direction of ion movement, forming a funnel-shaped ion channel that facilitates the ions to gradually focus to form a thinner ion beam and pass through the final A lens pole piece 31 with the smallest inner diameter enters the multipole assembly 40;

进样通道122的轴线与传输通道34的轴线呈角度设置或平行偏移设置;The axis of the sampling channel 122 and the axis of the transmission channel 34 are set at an angle or are offset in parallel;

进样通道122上施加直流电压V1,多个透镜极片31上施加有直流电压和射频电压,其中相邻两透镜极片31上施加相位相反的射频电压,沿离子运动方向多个透镜极片31上的直流电压从V2逐渐过渡到V3,多极杆组件40上施加有直流电压V4和射频电压,其中相邻两杆间施加相位相反的射频电压,V1、V2、V3、V4根据带电离子的正负电荷情况,按单向递增或递减以驱使离子从进样通道122经传输通道34至多极杆组件40。A DC voltage V1 is applied to the sampling channel 122, and a DC voltage and a radio frequency voltage are applied to a plurality of lens pole pieces 31, wherein an opposite phase radio frequency voltage is applied to two adjacent lens pole pieces 31, and a plurality of lens pole pieces are applied along the direction of ion movement. The DC voltage on 31 gradually transitions from V2 to V3. A DC voltage V4 and a radio frequency voltage are applied to the multipole rod assembly 40. A radio frequency voltage with opposite phases is applied between two adjacent rods. V1, V2, V3, and V4 are charged according to the charged ions. The positive and negative charge conditions increase or decrease in one direction to drive the ions from the sampling channel 122 to the multipole assembly 40 through the transmission channel 34 .

具体的,锥形管12可在较小的内孔孔径(取锥形管12的最小内径值)下,实现采用更大孔径小孔或普通圆形截面毛细管才能等效的离子捕获效率。相比于较大孔径的小孔或毛细管因其真空度较差的情况,较小的内孔孔径带来更小的真空负载压力。同时,锥形毛细管的离子束发散比较小,具有比较好的集中性。锥形管12的进样通道122在离子入口侧具有较小的内径,在离子出口侧具有较大的内径。一般的,锥形管12的最小内径在0.1-5mm之间,进样通道122锥度在0.3-10°之间。优选的,锥形管12最小内径在0.3-1.5mm之间,进样通道122锥度在0.5-2°之间。进样组件10在锥形管12进样通道122附近设有加热功能,可实现带溶剂离子团簇的高效去溶剂化,并解离形成带电离子。锥形管12的进样通道122上施加有直流电压V1。Specifically, the tapered tube 12 can achieve the equivalent ion capture efficiency using a larger diameter small hole or an ordinary circular cross-section capillary under a smaller inner hole diameter (taking the minimum inner diameter value of the tapered tube 12). Compared with small holes or capillaries with larger pore diameters due to their poor vacuum degree, smaller inner pore diameters bring smaller vacuum load pressures. At the same time, the ion beam divergence of the tapered capillary is relatively small and has relatively good concentration. The sampling channel 122 of the tapered tube 12 has a smaller inner diameter on the ion inlet side and a larger inner diameter on the ion outlet side. Generally, the minimum inner diameter of the tapered tube 12 is between 0.1-5 mm, and the taper of the sampling channel 122 is between 0.3-10°. Preferably, the minimum inner diameter of the tapered tube 12 is between 0.3-1.5 mm, and the taper of the sampling channel 122 is between 0.5-2°. The sampling assembly 10 is provided with a heating function near the sampling channel 122 of the conical tube 12 to achieve efficient desolvation of solvent-bearing ion clusters and dissociation to form charged ions. A DC voltage V1 is applied to the sampling channel 122 of the conical tube 12 .

具体的,离子漏斗组件30由20-100片左右的透镜极片31叠加组成。透镜极片31上施加有直流电压和射频电压。其中射频电压幅值在20-400V,频率在0.1MHz-5MHz之间,优选的频率在0.5-2MHz之间。相邻极片间施加相位相反的射频电压。靠近离子入口一侧的10-50片透镜极片31采用相同内径,以便形成一段直筒形离子通道,便于离子在大范围内被捕获到离子漏斗内部。靠近离子出口一侧的10-50片透镜极片31随着离子运动方向采用逐渐缩小的内径,以便形成一段漏斗形离子通道,便于离子在离子漏斗内部逐渐聚焦形成更细的离子束,以便顺利通过离子漏斗中最后一片内径最小的透镜的内孔,进入第二级离子传输结构。透镜极片31上的直流电压,一般从离子入口侧直流电压V2逐渐过渡到离子出口侧电压V3。Specifically, the ion funnel assembly 30 is composed of about 20-100 lens pole pieces 31 stacked together. Direct current voltage and radio frequency voltage are applied to the lens pole piece 31 . The radio frequency voltage amplitude is between 20-400V, the frequency is between 0.1MHz-5MHz, and the preferred frequency is between 0.5-2MHz. Radio frequency voltages with opposite phases are applied between adjacent pole pieces. The 10-50 lens pole pieces 31 on the side near the ion inlet adopt the same inner diameter to form a straight cylindrical ion channel to facilitate ions to be captured into the interior of the ion funnel over a wide range. The 10-50 lens pole pieces 31 near the ion outlet adopt a gradually smaller inner diameter along with the direction of ion movement, so as to form a funnel-shaped ion channel, which facilitates the ions to gradually focus inside the ion funnel to form a thinner ion beam, so as to smoothly Enter the second-stage ion transmission structure through the inner hole of the last lens with the smallest inner diameter in the ion funnel. The DC voltage on the lens pole piece 31 generally transitions gradually from the ion entrance side DC voltage V2 to the ion exit side voltage V3.

多极杆组件40为第二级离子传输结构,多极杆组件40由一组偶数根的平行或锥形布置的导电杆,导电杆采用导电金属杆、镀有导电层的陶瓷杆或石英杆中的任意一种或多种布置而成。多极杆组件40上施加有射频电压和直流电压。其中射频电压幅值在20-4000V,频率在0.1MHz-5MHz之间,优选的频率在0.5-2MHz之间。相邻两杆间施加相位相反的射频电压。金属杆上施加有直流电压V4。优选的,多极杆组件40一般采用四极杆结构、六极杆结构或八极杆结构。The multipole rod assembly 40 is a second-stage ion transmission structure. The multipole rod assembly 40 consists of a set of even numbers of conductive rods arranged in parallel or conical shapes. The conductive rods are made of conductive metal rods, ceramic rods coated with a conductive layer, or quartz rods. Arranged from any one or more of them. Radio frequency voltage and DC voltage are applied to the multipole assembly 40 . The radio frequency voltage amplitude is between 20-4000V, the frequency is between 0.1MHz-5MHz, and the preferred frequency is between 0.5-2MHz. Radio frequency voltages with opposite phases are applied between two adjacent poles. A DC voltage V4 is applied to the metal rod. Preferably, the multipole assembly 40 generally adopts a quadrupole structure, a hexapole structure or an octupole structure.

对于上述进样组件10、离子漏斗组件20、多极杆组件40上的各个直流电压V1、V2、V3、V4,一般单向递增或递减,主要取决于所分析离子的电荷性质。对于正离子,一般V1、V2、V3、V4按单向递减的数值设置,以便正离子在逐渐递减的电势场中,在电场力的作用下,主动向后级运动。对于负离子,一般V1、V2、V3、V4按单向递增的数值设置,以便负离子在逐渐递增的电势场中,在电场力的作用下,主动向后级运动。The DC voltages V1, V2, V3, and V4 on the above-mentioned sampling assembly 10, ion funnel assembly 20, and multipole assembly 40 generally increase or decrease in one direction, mainly depending on the charge properties of the ions being analyzed. For positive ions, generally V1, V2, V3, and V4 are set with one-way decreasing values, so that the positive ions actively move to the rear stage under the action of the electric field force in the gradually decreasing electric potential field. For negative ions, generally V1, V2, V3, and V4 are set with one-way increasing values, so that the negative ions actively move to the rear stage under the action of the electric field force in the gradually increasing electric potential field.

真空腔体20,用于隔离内部真空环境与外部大气压环境。一般离子漏斗组件20所在的腔段,真空度在1-10Torr,采用抽速范围在10-200 m3/h的机械泵实现;多极杆组件40所在的腔段,真空度在1-10mTorr,一般采用抽速范围在10-1000 L/s的涡轮分子泵实现。The vacuum chamber 20 is used to isolate the internal vacuum environment from the external atmospheric pressure environment. Generally, the cavity section where the ion funnel assembly 20 is located has a vacuum degree of 1-10Torr, which is achieved by a mechanical pump with a pumping speed range of 10-200 m3 / h; the cavity section where the multipole rod assembly 40 is located, the vacuum degree is 1-10mTorr. , generally implemented by a turbomolecular pump with a pumping speed range of 10-1000 L/s.

本申请中的进样通道122的轴线与传输通道34的轴线呈角度设置或平行偏移设置。当进样通道122的轴线与传输通道34的轴线呈角度设置时,进样通道122的轴线与传输通道34的轴线之间的夹角为0.1-30°。优选的范围在1-5°之间。当进样通道122的轴线与传输通道34的轴线平行偏移设置时,进样通道122的轴线与传输通道34的轴线的偏移距离为1-10mm。优选的范围在2-5mm之间。进样通道122的轴线与传输通道34的轴线平行偏移设置时,离子聚焦与传输仿真效果如图8所示。这样布局的好处是:1)由大气压环境中通过进样组件10的锥形管12进入到真空腔体20内的携带离子的气流,会被离子漏斗组件30阻挡,缓解气流中的强烈的定向流,使定向流得到充分的阻挡和扩散,避免流入多极杆组件40所在的腔室,从而缓解多极杆组件40所处的腔室的真空负载压力;2)携带离子的气流中,也包含一些中性粒子等其他干扰粒子,角度布置或平行偏移布置的布局,可以由离子漏斗组件30阻挡此类粒子,而待分析的带电离子则会在离子漏斗组件30射频电场的赝势阱效应下,被阻挡在漏斗形状内部空间而不会漏到离子漏斗组件30外面或撞到离子漏斗组件30上,聚焦为极细的离子流,并沿漏斗形状向离子漏斗组件30出口侧运动。In this application, the axis of the sampling channel 122 and the axis of the transmission channel 34 are arranged at an angle or are offset in parallel. When the axis of the sampling channel 122 and the axis of the transmission channel 34 are arranged at an angle, the angle between the axis of the sampling channel 122 and the axis of the transmission channel 34 is 0.1-30°. The preferred range is between 1-5°. When the axis of the sampling channel 122 is offset parallel to the axis of the transmission channel 34, the offset distance between the axis of the sampling channel 122 and the axis of the transmission channel 34 is 1-10 mm. The preferred range is between 2-5mm. When the axis of the sampling channel 122 and the axis of the transmission channel 34 are offset and set parallel to each other, the ion focusing and transmission simulation effects are as shown in Figure 8 . The advantages of this layout are: 1) The airflow carrying ions that enters the vacuum chamber 20 through the conical tube 12 of the sampling assembly 10 in an atmospheric pressure environment will be blocked by the ion funnel assembly 30, alleviating the strong orientation in the airflow. flow, so that the directional flow is fully blocked and diffused to avoid flowing into the chamber where the multipole assembly 40 is located, thereby alleviating the vacuum load pressure of the chamber where the multipole assembly 40 is located; 2) In the air flow carrying ions, also A layout that contains some neutral particles and other interfering particles arranged at an angle or with a parallel offset can block such particles by the ion funnel assembly 30, while the charged ions to be analyzed will be in the pseudopotential well of the radio frequency electric field of the ion funnel assembly 30 Under the effect, the ions are blocked in the internal space of the funnel shape and will not leak out of the ion funnel assembly 30 or hit the ion funnel assembly 30 , and are focused into an extremely fine ion flow, and move toward the outlet side of the ion funnel assembly 30 along the funnel shape.

本发明还涉及一种质谱仪离子传输装置,用于实施上述质谱仪离子传输方法,质谱仪离子传输装置包括进样组件10、真空腔体20、离子漏斗组件30以及多极杆组件40。The present invention also relates to a mass spectrometer ion transmission device for implementing the above mass spectrometer ion transmission method. The mass spectrometer ion transmission device includes a sample introduction assembly 10, a vacuum chamber 20, an ion funnel assembly 30 and a multipole rod assembly 40.

进样组件10位于质谱仪离子传输装置的大气压侧,进样组件10包括壳体11以及安装于壳体11的锥形管12。锥形管12设有进样通道122,进样通道122从大气压侧延伸至真空侧。具体的,锥形管12包括安装部120以及从安装部120延伸而出的延伸部121,安装部120外表面呈锥形,延伸部121呈圆柱形。进样通道122贯穿安装部120以及延伸部121,进样通道122整体呈锥形,进样通道122位于大气压侧的进样口直径小于位于真空侧的出样口的直径。锥形管12的最小内径在0.1-5mm之间,进样通道122锥度在0.3-10°之间。优选的,锥形管12最小内径在0.3-1.5mm之间,进样通道122锥度在0.5-2°之间。这种设计使锥形管12可在较小的内孔孔径(取锥形管12的最小内径值)下,实现采用更大孔径小孔或普通圆形截面毛细管才能等效的离子捕获效率。相比于较大孔径的小孔或毛细管因其真空度较差的情况,较小的内孔孔径带来更小的真空负载压力。同时,锥形毛细管的离子束发散比较小,具有比较好的集中性。The sampling assembly 10 is located on the atmospheric pressure side of the ion transmission device of the mass spectrometer. The sampling assembly 10 includes a housing 11 and a conical tube 12 installed on the housing 11 . The tapered tube 12 is provided with a sampling channel 122, which extends from the atmospheric pressure side to the vacuum side. Specifically, the tapered tube 12 includes a mounting part 120 and an extension part 121 extending from the mounting part 120. The outer surface of the mounting part 120 is tapered, and the extension part 121 is cylindrical. The sampling channel 122 passes through the mounting part 120 and the extension part 121. The sampling channel 122 is tapered as a whole. The diameter of the sampling port on the atmospheric pressure side of the sampling channel 122 is smaller than the diameter of the sampling port on the vacuum side. The minimum inner diameter of the tapered tube 12 is between 0.1-5 mm, and the taper of the sampling channel 122 is between 0.3-10°. Preferably, the minimum inner diameter of the tapered tube 12 is between 0.3-1.5 mm, and the taper of the sampling channel 122 is between 0.5-2°. This design allows the tapered tube 12 to achieve the equivalent ion capture efficiency that can only be achieved by using a larger diameter small hole or an ordinary circular cross-section capillary under a smaller inner hole diameter (taking the minimum inner diameter value of the tapered tube 12). Compared with small holes or capillaries with larger pore diameters due to their poor vacuum degree, smaller inner pore diameters bring smaller vacuum load pressures. At the same time, the ion beam divergence of the tapered capillary is relatively small and has relatively good concentration.

真空腔体20用于隔离内部真空环境与外部大气压环境。具体的,真空腔体20为中空结构,真空腔体20一侧与进样组件10的壳体11密封连接。真空腔体20整体向离子运动的方向(进样通道122的延伸方向)延伸。离子漏斗组件20所在的腔段,真空度在1-10Torr,采用抽速范围在10-200 m3/h的机械泵实现;多极杆组件40所在的腔段,真空度在1-10mTorr,一般采用抽速范围在10-1000 L/s的涡轮分子泵实现。The vacuum chamber 20 is used to isolate the internal vacuum environment from the external atmospheric pressure environment. Specifically, the vacuum chamber 20 has a hollow structure, and one side of the vacuum chamber 20 is sealingly connected to the housing 11 of the sampling assembly 10 . The entire vacuum chamber 20 extends in the direction of ion movement (the extension direction of the sampling channel 122 ). The cavity section where the ion funnel assembly 20 is located has a vacuum degree of 1-10Torr, which is achieved by a mechanical pump with a pumping speed range of 10-200 m3 / h; the cavity section where the multipole assembly 40 is located has a vacuum degree of 1-10mTorr. Generally, a turbomolecular pump with a pumping speed range of 10-1000 L/s is used.

离子漏斗组件30包括多个透镜极片31、安装柱32以及电路板33,多个透镜极片31安装在安装柱32上并相互叠装。电路板33安装于透镜极片31并对透镜极片31施加电压。具体的,每一透镜极片31设有内孔,多个透镜极片31的内孔形成传输通道34。靠近进样通道122的部分透镜极片31的内径相同形成直筒形离子通道,远离进样通道122的部分透镜极片31的内径沿离子运动方向逐渐减小,形成漏斗形离子通道。具体的,离子漏斗组件30由20-100片左右的透镜极片31叠加组成。透镜极片31上施加有直流电压和射频电压。其中射频电压幅值在20-400V,频率在0.1MHz-5MHz之间,优选的频率在0.5-2MHz之间。相邻极片间施加相位相反的射频电压。靠近离子入口一侧的10-50片透镜极片31采用相同内径,以便形成一段直筒形离子通道,便于离子在大范围内被捕获到离子漏斗内部。靠近离子出口一侧的10-50片透镜极片31随着离子运动方向采用逐渐缩小的内径,以便形成一段漏斗形离子通道,便于离子在离子漏斗内部逐渐聚焦形成更细的离子束,以便顺利通过离子漏斗中最后一片内径最小的透镜的内孔,进入第二级离子传输结构。透镜极片31上的直流电压,一般从离子入口侧直流电压V2逐渐过渡到离子出口侧电压V3。The ion funnel assembly 30 includes a plurality of lens pole pieces 31 , a mounting post 32 and a circuit board 33 . The plurality of lens pole pieces 31 are installed on the mounting post 32 and stacked on each other. The circuit board 33 is mounted on the lens pole piece 31 and applies voltage to the lens pole piece 31 . Specifically, each lens pole piece 31 is provided with an inner hole, and the inner holes of the plurality of lens pole pieces 31 form transmission channels 34 . The inner diameters of the lens pole pieces 31 close to the sampling channel 122 are the same to form a straight cylindrical ion channel, and the inner diameters of the lens pole pieces 31 far away from the sampling channel 122 gradually decrease along the ion movement direction to form a funnel-shaped ion channel. Specifically, the ion funnel assembly 30 is composed of about 20-100 lens pole pieces 31 stacked together. Direct current voltage and radio frequency voltage are applied to the lens pole piece 31 . The radio frequency voltage amplitude is between 20-400V, the frequency is between 0.1MHz-5MHz, and the preferred frequency is between 0.5-2MHz. Radio frequency voltages with opposite phases are applied between adjacent pole pieces. The 10-50 lens pole pieces 31 on the side near the ion inlet adopt the same inner diameter to form a straight cylindrical ion channel to facilitate ions to be captured into the interior of the ion funnel over a wide range. The 10-50 lens pole pieces 31 near the ion outlet adopt a gradually smaller inner diameter along with the direction of ion movement, so as to form a funnel-shaped ion channel, which facilitates the ions to gradually focus inside the ion funnel to form a thinner ion beam, so as to smoothly Enter the second-stage ion transmission structure through the inner hole of the last lens with the smallest inner diameter in the ion funnel. The DC voltage on the lens pole piece 31 generally transitions gradually from the ion entrance side DC voltage V2 to the ion exit side voltage V3.

请继续参阅图6,在第一实施例中,进样通道122的轴线与传输通道34的轴线平行偏移设置,进样通道122的轴线与传输通道34的轴线的偏移距离为1-10mm。优选的范围在2-5mm之间。Please continue to refer to FIG. 6 . In the first embodiment, the axis of the sampling channel 122 is offset parallel to the axis of the transmission channel 34 . The offset distance between the axis of the sampling channel 122 and the axis of the transmission channel 34 is 1-10 mm. . The preferred range is between 2-5mm.

请继续参阅图7,在第二实施例中,进样通道122的轴线与传输通道34的轴线呈角度设置,进样通道122的轴线与传输通道34的轴线之间的夹角为0.1-30°。优选的范围在1-5°之间。Please continue to refer to FIG. 7 . In the second embodiment, the axis of the sampling channel 122 and the axis of the transmission channel 34 are arranged at an angle. The angle between the axis of the sampling channel 122 and the axis of the transmission channel 34 is 0.1-30. °. The preferred range is between 1-5°.

平行偏移设置或呈角度设置具有以下优点:1)由大气压环境中通过进样组件10的锥形管12进入到真空腔体20内的携带离子的气流,会被离子漏斗组件30阻挡,缓解气流中的强烈的定向流,使定向流得到充分的阻挡和扩散,避免流入多极杆组件40所在的腔室,从而缓解多极杆组件40所处的腔室的真空负载压力;2)携带离子的气流中,也包含一些中性粒子等其他干扰粒子,角度布置或偏移布置的布局,可以由离子漏斗组件30阻挡此类粒子,而待分析的带电离子则会在离子漏斗组件30的射频电场的赝势阱效应下,被阻挡在漏斗形状内部空间而不会漏到离子漏斗组件30外面或撞到离子漏斗组件30上,聚焦为极细的离子流,并沿漏斗形状向离子漏斗组件30出口侧运动。Parallel offset settings or angled settings have the following advantages: 1) The airflow carrying ions entering the vacuum chamber 20 through the conical tube 12 of the sampling assembly 10 in an atmospheric pressure environment will be blocked by the ion funnel assembly 30, easing the The strong directional flow in the airflow fully blocks and diffuses the directional flow to avoid flowing into the chamber where the multipole assembly 40 is located, thereby alleviating the vacuum load pressure of the chamber where the multipole assembly 40 is located; 2) Carrying The ion flow also contains some neutral particles and other interfering particles. The angular or offset layout can block such particles by the ion funnel assembly 30, while the charged ions to be analyzed will be in the ion funnel assembly 30. Under the pseudopotential well effect of the radio frequency electric field, the ions are blocked in the internal space of the funnel shape and will not leak out of the ion funnel assembly 30 or hit the ion funnel assembly 30, and are focused into an extremely fine ion flow, and flow toward the ion funnel along the funnel shape. The outlet side of assembly 30 moves.

多极杆组件40为第二级离子传输结构,多极杆组件40由一组偶数根的平行或锥形布置的导电杆,采用导电金属杆、镀有导电层的陶瓷杆或石英杆等中的任意一种或多种布置而成。多极杆组件40上施加有射频电压和直流电压。其中射频电压幅值在20-4000V,频率在0.1MHz-5MHz之间,优选的频率在0.5-2MHz之间。相邻两杆间施加相位相反的射频电压。金属杆上施加有直流电压V4。优选的,多极杆组件40一般采用四极杆结构、六极杆结构或八极杆结构。The multipole rod assembly 40 is a second-stage ion transmission structure. The multipole rod assembly 40 is composed of a set of even numbers of conductive rods arranged in parallel or conical shapes. The multipole rod assembly 40 is made of conductive metal rods, ceramic rods or quartz rods plated with a conductive layer, etc. Arranged in any one or more ways. Radio frequency voltage and DC voltage are applied to the multipole assembly 40 . The radio frequency voltage amplitude is between 20-4000V, the frequency is between 0.1MHz-5MHz, and the preferred frequency is between 0.5-2MHz. Radio frequency voltages with opposite phases are applied between two adjacent poles. A DC voltage V4 is applied to the metal rod. Preferably, the multipole assembly 40 generally adopts a quadrupole structure, a hexapole structure or an octupole structure.

对于上述进样组件10、离子漏斗组件20、多极杆组件40上的各个直流电压V1、V2、V3、V4,一般单向递增或递减,主要取决于所分析离子的电荷性质。对于正离子,一般V1、V2、V3、V4按单向递减的数值设置,以便正离子在逐渐递减的电势场中,在电场力的作用下,主动向后级运动。对于负离子,一般V1、V2、V3、V4按单向递增的数值设置,以便负离子在逐渐递增的电势场中,在电场力的作用下,主动向后级运动。The DC voltages V1, V2, V3, and V4 on the above-mentioned sampling assembly 10, ion funnel assembly 20, and multipole assembly 40 generally increase or decrease in one direction, mainly depending on the charge properties of the ions being analyzed. For positive ions, generally V1, V2, V3, and V4 are set with one-way decreasing values, so that the positive ions actively move to the rear stage under the action of the electric field force in the gradually decreasing electric potential field. For negative ions, generally V1, V2, V3, and V4 are set with one-way increasing values, so that the negative ions actively move to the rear stage under the action of the electric field force in the gradually increasing electric potential field.

本申请质谱仪离子传输装置主要用于大气压电离源质谱仪中,带电离子从大气压环境向真空环境中的质量分析器转移过程中,涉及到的多级差分真空及高效离子传输环节。该方案相比于现有商品仪器中使用的方案或现有专利中已有的方案,具有明显的区别。本申请方案具有结构简单、高离子捕获效率、低真空负载压力、低中性粒子干扰等特点。低真空负载压力有利于进一步提高进样部分开孔大小以便增加进样量,从而提升信号强度。因此,利用本申请预期可显著提高信号强度并降低噪声,提升信噪比,具有较高的实用价值和产业化价值。The ion transmission device of the mass spectrometer of this application is mainly used in the atmospheric pressure ionization source mass spectrometer. The process of transferring charged ions from the atmospheric pressure environment to the mass analyzer in the vacuum environment involves multi-stage differential vacuum and high-efficiency ion transmission links. This solution is significantly different from the solutions used in existing commercial instruments or existing patents. The proposed solution has the characteristics of simple structure, high ion capture efficiency, low vacuum load pressure, and low neutral particle interference. Low vacuum load pressure is conducive to further increasing the opening size of the sampling part to increase the injection volume, thereby improving signal intensity. Therefore, it is expected that the use of this application can significantly improve the signal strength, reduce the noise, and improve the signal-to-noise ratio, which has high practical value and industrialization value.

以上实施例仅表达了本发明的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进演变,都是依据本发明实质技术对以上实施例做的等同修饰与演变,这些都属于本发明的保护范围。The above embodiments only express several embodiments of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the invention. It should be noted that, for those of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present invention, which are equivalent modifications to the above embodiments based on the essential technology of the present invention. and evolution, these all belong to the protection scope of the present invention.

Claims (10)

1.一种质谱仪离子传输方法,其特征在于,包括以下步骤:1. A mass spectrometer ion transmission method, characterized in that it includes the following steps: 通过采用锥形管的进样通道使离子从大气压侧进入真空侧,所述进样通道呈锥形,所述进样通道位于所述大气压侧的进样口直径小于位于所述真空侧的出样口的直径;Ions are made to enter the vacuum side from the atmospheric pressure side by using a sampling channel of a tapered tube. The sampling channel is tapered, and the diameter of the inlet of the sampling channel on the atmospheric pressure side is smaller than that of the outlet on the vacuum side. The diameter of the sample port; 采用多个透镜极片叠装形成离子漏斗组件,所述离子漏斗组件设有传输通道,靠近所述进样通道的部分透镜极片的内径相同形成直筒形离子通道,便于离子在大范围内被捕获到所述离子漏斗组件内部,远离所述进样通道的部分透镜极片的内径沿离子运动方向逐渐减小,形成漏斗形离子通道便于离子在逐渐聚焦形成更细的离子束穿过最后一个内径最小的透镜极片进入多极杆组件;Multiple lens pole pieces are stacked to form an ion funnel assembly. The ion funnel assembly is provided with a transmission channel. The inner diameters of some lens pole pieces close to the sampling channel are the same to form a straight cylindrical ion channel, which facilitates ions to be transported over a wide range. Captured inside the ion funnel assembly, the inner diameter of the part of the lens pole piece away from the sampling channel gradually decreases along the direction of ion movement, forming a funnel-shaped ion channel that facilitates the ions to gradually focus to form a thinner ion beam and pass through the last The lens pole piece with the smallest inner diameter enters the multipole assembly; 所述进样通道的轴线与所述传输通道的轴线呈角度设置或平行偏移设置;The axis of the sampling channel and the axis of the transmission channel are set at an angle or offset in parallel; 所述进样通道上施加直流电压V1,多个所述透镜极片上施加有直流电压和射频电压,其中相邻两所述透镜极片上施加相位相反的射频电压,沿离子运动方向多个所述透镜极片上的直流电压从V2逐渐过渡到V3,所述多极杆组件上施加有直流电压V4,V1、V2、V3、V4按单向递增或递减以驱使离子从所述进样通道经所述传输通道至所述多极杆组件。A DC voltage V1 is applied to the sampling channel, a DC voltage and a radio frequency voltage are applied to a plurality of the lens pole pieces, wherein a radio frequency voltage with an opposite phase is applied to two adjacent lens pole pieces, and a plurality of the lens pole pieces are applied in the direction of ion movement. The DC voltage on the lens pole piece gradually transitions from V2 to V3, and a DC voltage V4 is applied to the multipole rod assembly. V1, V2, V3, and V4 increase or decrease in one direction to drive ions from the sampling channel through the the transmission channel to the multipole assembly. 2.根据权利要求1所述的质谱仪离子传输方法,其特征在于:当所述进样通道的轴线与所述传输通道的轴线呈角度设置时,所述进样通道的轴线与所述传输通道的轴线之间的夹角为0.1-30°。2. The mass spectrometer ion transmission method according to claim 1, characterized in that: when the axis of the sampling channel and the axis of the transmission channel are arranged at an angle, the axis of the sampling channel and the axis of the transmission channel are arranged at an angle. The angle between the axes of the channels is 0.1-30°. 3.根据权利要求1所述的质谱仪离子传输方法,其特征在于:当所述进样通道的轴线与所述传输通道的轴线平行偏移设置时,所述进样通道的轴线与所述传输通道的轴线的偏移距离为1-10mm。3. The mass spectrometer ion transmission method according to claim 1, characterized in that: when the axis of the sampling channel and the axis of the transmission channel are offset in parallel, the axis of the sampling channel is parallel to the axis of the transmission channel. The offset distance of the axis of the transmission channel is 1-10mm. 4.根据权利要求1所述的质谱仪离子传输方法,其特征在于:所述进样通道的进样口内径为0.1-5mm,所述进样通道锥度为0.3-10°。4. The mass spectrometer ion transmission method according to claim 1, characterized in that: the inner diameter of the injection port of the sampling channel is 0.1-5 mm, and the taper of the sampling channel is 0.3-10°. 5.根据权利要求1所述的质谱仪离子传输方法,其特征在于:所述质谱仪离子传输方法还包括加热步骤,所述加热步骤具体为:对所述进样通道进行加热,使进入所述进样通道的带溶剂离子团簇去溶剂化并解离形成带电离子。5. The mass spectrometer ion transmission method according to claim 1, characterized in that: the mass spectrometer ion transmission method further includes a heating step, and the heating step specifically includes: heating the sampling channel to allow the ions to enter the mass spectrometer. The solvent-bearing ion clusters in the injection channel are desolvated and dissociated to form charged ions. 6.根据权利要求1所述的质谱仪离子传输方法,其特征在于:所述多极杆组件上施加有射频电压,其中相邻两杆间施加的射频电压相位相反。6. The mass spectrometer ion transmission method according to claim 1, characterized in that: a radio frequency voltage is applied to the multipole rod assembly, and the radio frequency voltage applied between two adjacent rods has opposite phases. 7.一种质谱仪离子传输装置,用于实施如权利要求1-6任意一项所述的质谱仪离子传输方法,所述质谱仪离子传输装置包括真空腔体以及安装于所述真空腔体内的离子漏斗组件,其特征在于:所述质谱仪离子传输装置还包括进样组件以及多极杆组件,所述进样组件安装于所述真空腔体一侧,所述多极杆组件安装于所述真空腔体内部,所述离子漏斗组件位于所述进样组件以及所述多极杆组件之间,所述进样组件包括锥形管,所述锥形管设有进样通道,所述进样通道呈锥形,所述进样通道位于所述大气压侧的进样口直径小于位于所述真空侧的出样口的直径,所述离子漏斗组件设有传输通道,所述传输通道靠近所述进样通道一侧宽度相等形成直筒形离子通道,所述传输通道靠近所述多极杆组件一侧宽度逐渐缩小形成漏斗形离子通道,所述进样通道的轴线与所述传输通道的轴线呈角度设置或平行偏移设置。7. A mass spectrometer ion transmission device, used to implement the mass spectrometer ion transmission method according to any one of claims 1-6, the mass spectrometer ion transmission device includes a vacuum chamber and is installed in the vacuum chamber The ion funnel assembly is characterized in that: the mass spectrometer ion transmission device also includes a sampling assembly and a multipole rod assembly, the sampling assembly is installed on one side of the vacuum chamber, and the multipole rod assembly is installed on Inside the vacuum chamber, the ion funnel assembly is located between the sampling assembly and the multipole assembly. The sampling assembly includes a tapered tube, and the tapered tube is provided with a sampling channel. The sampling channel is tapered, and the diameter of the sampling port located on the atmospheric pressure side of the sampling channel is smaller than the diameter of the sample outlet located on the vacuum side. The ion funnel assembly is provided with a transmission channel, and the transmission channel The width of the side close to the sampling channel is equal to form a straight cylindrical ion channel, and the width of the transmission channel close to the multipole assembly gradually decreases to form a funnel-shaped ion channel. The axis of the sampling channel is in line with the transmission channel. The axis is set at an angle or parallel offset. 8.根据权利要求7所述的质谱仪离子传输装置,其特征在于:所述离子漏斗组件包括多个透镜极片,所述透镜极片叠装,每一所述透镜极片设有内孔,多个所述透镜极片的内孔形成所述传输通道,靠近所述进样通道的部分所述透镜极片的内径相同形成直筒形离子通道,远离所述进样通道的部分所述透镜极片的内径沿离子运动方向逐渐减小,形成漏斗形离子通道。8. The mass spectrometer ion transmission device according to claim 7, wherein the ion funnel assembly includes a plurality of lens pole pieces, the lens pole pieces are stacked, and each lens pole piece is provided with an inner hole. , the inner holes of a plurality of the lens pole pieces form the transmission channel, the inner diameters of the part of the lens pole pieces close to the sampling channel are the same to form a straight cylindrical ion channel, and the part of the lens far away from the sampling channel The inner diameter of the pole piece gradually decreases along the direction of ion movement, forming a funnel-shaped ion channel. 9.根据权利要求7所述的质谱仪离子传输装置,其特征在于:当所述进样通道的轴线与所述传输通道的轴线呈角度设置时,所述进样通道的轴线与所述传输通道的轴线之间的夹角为0.1-30°。9. The mass spectrometer ion transmission device according to claim 7, characterized in that: when the axis of the sampling channel and the axis of the transmission channel are arranged at an angle, the axis of the sampling channel and the axis of the transmission channel are arranged at an angle. The angle between the axes of the channels is 0.1-30°. 10.根据权利要求7所述的质谱仪离子传输装置,其特征在于:当所述进样通道的轴线与所述传输通道的轴线平行偏移设置时,所述进样通道的轴线与所述传输通道的轴线的偏移距离为1-10mm。10. The mass spectrometer ion transmission device according to claim 7, characterized in that: when the axis of the sampling channel and the axis of the transmission channel are offset parallel to each other, the axis of the sampling channel is parallel to the axis of the transmission channel. The offset distance of the axis of the transmission channel is 1-10mm.
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