CN117673203A - Solar cell, preparation method thereof, photovoltaic module and photovoltaic system - Google Patents
Solar cell, preparation method thereof, photovoltaic module and photovoltaic system Download PDFInfo
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Abstract
本申请涉及太阳能电池技术领域,特别是涉及一种太阳能电池及其制备方法、光伏组件和光伏系统。以减少激光辅助烧结对硅基底层造成的伤害,从而提高电池性能。一种太阳能电池的制备方法,太阳能电池具有受光区域和非受光区域,太阳能电池包括:硅基底层以及设置于硅基底层的厚度方向的第一侧且位于非受光区域的第一电极图案,第一电极图案至少采用激光辐照工艺进行制备;该方法包括:在采用激光辐照工艺制备第一电极图案之前,在硅基底层的第一侧且至少在第一区域形成第一激光遮挡层,第一区域是指从第一电极图案的边沿向远离第一电极图案的方向延伸第一距离所覆盖的受光区域,第一激光遮挡层用于对激光照射到受光区域中的至少第一区域进行遮挡。
The present application relates to the technical field of solar cells, and in particular to a solar cell and its preparation method, photovoltaic modules and photovoltaic systems. To reduce the damage caused by laser-assisted sintering to the silicon base layer, thereby improving battery performance. A method for preparing a solar cell. The solar cell has a light-receiving area and a non-light-receiving area. The solar cell includes: a silicon base layer and a first electrode pattern disposed on a first side of the silicon base layer in the thickness direction and located in the non-light-receiving area. An electrode pattern is prepared using at least a laser irradiation process; the method includes: before using a laser irradiation process to prepare the first electrode pattern, forming a first laser shielding layer on the first side of the silicon base layer and at least in the first area, The first area refers to a light-receiving area covered by a first distance extending from the edge of the first electrode pattern in a direction away from the first electrode pattern. The first laser shielding layer is used to irradiate laser light to at least the first area in the light-receiving area. Occlusion.
Description
技术领域Technical field
本申请涉及太阳能电池技术领域,特别是涉及一种太阳能电池及其制备方法、光伏组件和光伏系统。The present application relates to the technical field of solar cells, and in particular to a solar cell and its preparation method, photovoltaic modules and photovoltaic systems.
背景技术Background technique
随着太阳能电池技术的发展,越来越多类型的太阳能电池被研发出来。目前,太阳能电池类型主要包括钝化发射区背接触(Passivated Emitter and Rear Contact,PERC)电池、隧穿氧化层钝化接触(Tunnel Oxide Passivated Contact,TOPCON)太阳能电池、异质结(Hetero-Junction with Intrinsic Thin Film,HIT)太阳能电池和叉指背接触(Interdigitated Back Contact,IBC)电池等。With the development of solar cell technology, more and more types of solar cells have been developed. At present, solar cell types mainly include Passivated Emitter and Rear Contact (PERC) cells, Tunnel Oxide Passivated Contact (TOPCON) solar cells, Hetero-Junction with Intrinsic Thin Film (HIT) solar cells and Interdigitated Back Contact (IBC) batteries, etc.
随着这些电池技术的发展,栅线技术越来越成为制约电池成本和效率的关键。目前栅线技术使用的最多的还是丝网印刷技术,为了降低银耗量,激光转印、电镀、银包铜等技术都在研究和开发中,而目前除了采用激光烧结技术与这些技术联用具有较大的研究成效以外,其他技术均未有较大的突破。With the development of these battery technologies, grid line technology has increasingly become the key to restricting battery cost and efficiency. At present, the most commonly used grid line technology is screen printing technology. In order to reduce silver consumption, laser transfer printing, electroplating, silver-coated copper and other technologies are under research and development. At present, in addition to using laser sintering technology in conjunction with these technologies Except for the great research results, there have been no major breakthroughs in other technologies.
发明内容Contents of the invention
基于此,有必要提供一种太阳能电池及其制备方法、光伏组件和光伏系统。以减少激光烧结对硅基底层造成的伤害,从而提高电池性能。Based on this, it is necessary to provide a solar cell and its preparation method, photovoltaic module and photovoltaic system. To reduce the damage caused by laser sintering to the silicon base layer, thereby improving battery performance.
第一方面,提供一种太阳能电池的制备方法,所述太阳能电池具有受光区域和非受光区域,所述太阳能电池包括:硅基底层以及设置于所述硅基底层的厚度方向的第一侧的第一电极图案,所述第一电极图案位于所述太阳能电池的非受光区域,所述第一电极图案至少采用激光辐照工艺进行制备;所述制备方法包括:In a first aspect, a method for preparing a solar cell is provided. The solar cell has a light-receiving area and a non-light-receiving area. The solar cell includes: a silicon base layer and a first side disposed on a first side of the silicon base layer in the thickness direction. A first electrode pattern, the first electrode pattern is located in the non-light-receiving area of the solar cell, the first electrode pattern is prepared using at least a laser irradiation process; the preparation method includes:
在采用所述激光辐照工艺制备所述第一电极图案之前,在所述硅基底层的所述第一侧且至少在第一区域形成第一激光遮挡层,所述第一区域是指从所述第一电极图案的边沿向远离所述第一电极图案的方向延伸第一距离所覆盖的受光区域,所述第一距离为0.1mm~0.5mm,所述第一激光遮挡层用于对激光照射到所述受光区域中的至少所述第一区域进行遮挡。Before using the laser irradiation process to prepare the first electrode pattern, a first laser shielding layer is formed on the first side of the silicon base layer and at least in a first area, and the first area refers to from The edge of the first electrode pattern extends in a direction away from the first electrode pattern by the light-receiving area covered by a first distance, and the first distance is 0.1 mm to 0.5 mm, and the first laser shielding layer is used to The laser irradiates at least the first area in the light-receiving area to block it.
可选地,所述第一激光遮挡层的材料为导电材料;Optionally, the material of the first laser shielding layer is a conductive material;
在采用所述激光辐照工艺制备所述第一电极图案之前,在所述硅基底层的所述第一侧且位于所述受光区域和所述非受光区域形成所述第一激光遮挡层;Before using the laser irradiation process to prepare the first electrode pattern, forming the first laser shielding layer on the first side of the silicon base layer and located in the light-receiving area and the non-light-receiving area;
并在采用激光辐照工艺制备所述第一电极图案之后,将所述第一激光遮挡层位于所述受光区域的部分去除。After the first electrode pattern is prepared using a laser irradiation process, the portion of the first laser shielding layer located in the light-receiving area is removed.
可选地,所述在所述硅基底层的所述第一侧且位于所述受光区域和所述非受光区域形成所述第一激光遮挡层,包括:Optionally, forming the first laser shielding layer on the first side of the silicon base layer and located in the light-receiving area and the non-light-receiving area includes:
采用磁控溅射或蒸镀在所述硅基底层的所述第一侧且位于所述受光区域和所述非受光区域形成所述第一激光遮挡层。The first laser shielding layer is formed on the first side of the silicon base layer and located in the light-receiving area and the non-light-receiving area by magnetron sputtering or evaporation.
可选地,所述第一激光遮挡层的材料为导电材料;Optionally, the material of the first laser shielding layer is a conductive material;
在采用所述激光辐照工艺制备所述第一电极图案之前,采用图案化工艺,在所述硅基底层的所述第一侧且位于所述第一区域和所述非受光区域形成所述第一激光遮挡层;Before using the laser irradiation process to prepare the first electrode pattern, a patterning process is used to form the first electrode pattern on the first side of the silicon base layer and in the first area and the non-light-receiving area. The first laser shielding layer;
并在采用激光辐照工艺制备所述第一电极图案之后,将所述第一激光遮挡层位于所述第一区域的部分去除。After the first electrode pattern is prepared using a laser irradiation process, the portion of the first laser shielding layer located in the first region is removed.
可选地,采用图案化工艺,在所述硅基底层的所述第一侧且位于所述第一区域和所述非受光区域形成所述第一激光遮挡层,包括:Optionally, a patterning process is used to form the first laser shielding layer on the first side of the silicon base layer and in the first area and the non-light-receiving area, including:
采用掩膜板对所述受光区域中除所述第一区域以外的区域进行遮挡,并采用磁控溅射或蒸镀在所述硅基底层的所述第一侧且位于所述第一区域和所述非受光区域形成所述第一激光遮挡层。Use a mask plate to block the area in the light-receiving area except the first area, and use magnetron sputtering or evaporation to deposit on the first side of the silicon base layer and located in the first area. and the non-light-receiving area form the first laser shielding layer.
可选地,所述第一激光遮挡层的材料包括:铜、银、铝、镍和锡中的一种或多种。Optionally, the material of the first laser shielding layer includes one or more of copper, silver, aluminum, nickel and tin.
可选地,所述第一激光遮挡层的厚度为10nm~500nm。Optionally, the thickness of the first laser shielding layer is 10 nm to 500 nm.
可选地,在采用激光辐照工艺制备所述第一电极图案之前,在所述硅基底层的所述第一侧且至少在第一区域形成第一激光遮挡层之后,所述制备方法还包括:Optionally, before using a laser irradiation process to prepare the first electrode pattern, and after forming a first laser shielding layer on the first side of the silicon base layer and at least in the first area, the preparation method further include:
在所述硅基底层的第一侧且位于所述非受光区域形成第二电极图案;Form a second electrode pattern on the first side of the silicon base layer and in the non-light-receiving area;
采用激光辐照工艺制备所述第一电极图案,包括:Preparing the first electrode pattern using a laser irradiation process includes:
对所述第二电极图案进行激光辐照处理,制备所述第一电极图案。The second electrode pattern is subjected to laser irradiation treatment to prepare the first electrode pattern.
可选地,所述太阳能电池还包括:设置于所述硅基底层的厚度方向的第二侧的第三电极图案,所述第三电极图案位于所述太阳能电池的非受光区域;所述制备方法还包括:Optionally, the solar cell further includes: a third electrode pattern disposed on the second side in the thickness direction of the silicon base layer, the third electrode pattern being located in a non-light-receiving area of the solar cell; the preparation Methods also include:
在采用激光辐照工艺制备所述第三电极图案之前,在所述硅基底层的所述第二侧且至少在第二区域形成第二激光遮挡层,所述第二区域是指从所述第三电极图案的边沿向远离所述第三电极图案的方向延伸第二距离所覆盖的受光区域,所述第二距离为0.1mm~0.5mm,所述第二激光遮挡层用于对激光照射到所述受光区域中的至少所述第二区域进行遮挡。Before using a laser irradiation process to prepare the third electrode pattern, a second laser shielding layer is formed on the second side of the silicon base layer and at least in a second area, where the second area refers to the The edge of the third electrode pattern extends to the light-receiving area covered by a second distance in a direction away from the third electrode pattern. The second distance is 0.1 mm to 0.5 mm. The second laser shielding layer is used for laser irradiation. At least the second area in the light receiving area is blocked.
可选地,所述第二激光遮挡层的材料为导电材料;Optionally, the material of the second laser shielding layer is a conductive material;
在采用所述激光辐照工艺制备所述第三电极图案之前,在所述硅基底层的所述第二侧且位于所述受光区域和所述非受光区域形成所述第二激光遮挡层;Before using the laser irradiation process to prepare the third electrode pattern, forming the second laser shielding layer on the second side of the silicon base layer and located in the light-receiving area and the non-light-receiving area;
并在采用激光辐照工艺制备所述第三电极图案之后,将所述第二激光遮挡层位于所述受光区域的部分去除。And after using a laser irradiation process to prepare the third electrode pattern, the portion of the second laser shielding layer located in the light-receiving area is removed.
可选地,所述在所述硅基底层的所述第二侧且位于所述受光区域和所述非受光区域形成所述第二激光遮挡层,包括:Optionally, forming the second laser shielding layer on the second side of the silicon base layer and located in the light-receiving area and the non-light-receiving area includes:
采用磁控溅射或蒸镀在所述硅基底层的所述第二侧且位于所述受光区域和所述非受光区域形成所述第二激光遮挡层。The second laser shielding layer is formed on the second side of the silicon base layer and located in the light-receiving area and the non-light-receiving area by magnetron sputtering or evaporation.
可选地,所述第二激光遮挡层的材料为导电材料;Optionally, the material of the second laser shielding layer is a conductive material;
在采用所述激光辐照工艺制备所述第三电极图案之前,采用图案化工艺,在所述硅基底层的所述第二侧且位于所述第二区域和所述非受光区域形成所述第二激光遮挡层;Before using the laser irradiation process to prepare the third electrode pattern, a patterning process is used to form the second electrode pattern on the second side of the silicon base layer and in the second area and the non-light-receiving area. the second laser shielding layer;
并在采用激光辐照工艺制备所述第三电极图案之后,将所述第二激光遮挡层位于所述第二区域的部分去除。And after using a laser irradiation process to prepare the third electrode pattern, the portion of the second laser shielding layer located in the second region is removed.
可选地,采用图案化工艺,在所述硅基底层的所述第二侧且位于所述第二区域和所述非受光区域形成所述第二激光遮挡层,包括:Optionally, a patterning process is used to form the second laser shielding layer on the second side of the silicon base layer and in the second area and the non-light-receiving area, including:
采用掩膜板对所述受光区域中除所述第二区域以外的区域进行遮挡,并采用磁控溅射或蒸镀在所述硅基底层的所述第二侧且位于所述第二区域和所述非受光区域形成所述第二激光遮挡层。A mask is used to block the area in the light-receiving area except the second area, and magnetron sputtering or evaporation is used to coat the second side of the silicon base layer and be located in the second area. and the non-light-receiving area form the second laser shielding layer.
可选地,所述第二激光遮挡层的材料包括:铜、银、铝、镍和锡中的一种或多种。Optionally, the material of the second laser shielding layer includes one or more of copper, silver, aluminum, nickel and tin.
可选地,所述第二激光遮挡层的厚度为10nm~500nm。Optionally, the thickness of the second laser shielding layer is 10 nm to 500 nm.
可选地,在采用激光辐照工艺制备所述第三电极图案之前,在所述硅基底层的所述第二侧且至少在第二区域形成第二激光遮挡层之后,所述制备方法还包括:Optionally, before using a laser irradiation process to prepare the third electrode pattern, and after forming a second laser shielding layer on the second side of the silicon base layer and at least in the second area, the preparation method further include:
在所述硅基底层的第二侧且位于所述非受光区域形成第四电极图案;Form a fourth electrode pattern on the second side of the silicon base layer and in the non-light-receiving area;
采用激光辐照工艺制备所述第三电极图案,包括:Preparing the third electrode pattern using a laser irradiation process includes:
对所述第四电极图案进行激光辐照处理,制备所述第三电极图案。The fourth electrode pattern is subjected to laser irradiation treatment to prepare the third electrode pattern.
第二方面,提供一种如第一方面所述的制备方法制备的太阳能电池。A second aspect provides a solar cell prepared by the preparation method described in the first aspect.
第三方面,提供一种光伏组件,包括:多个串联和/或并联连接的太阳能电池;In a third aspect, a photovoltaic component is provided, including: a plurality of solar cells connected in series and/or in parallel;
至少一个所述太阳能电池为如第二方面所述的太阳能电池。At least one of the solar cells is a solar cell as described in the second aspect.
第四方面,提供一种光伏系统,包括如第三方面所述的光伏组件。A fourth aspect provides a photovoltaic system, including the photovoltaic module described in the third aspect.
上述的太阳能电池及其制备方法、光伏组件和光伏系统的有益效果如下:The beneficial effects of the above-mentioned solar cells and their preparation methods, photovoltaic modules and photovoltaic systems are as follows:
通过在硅基底层的第一侧且至少在第一区域形成第一激光遮挡层,由于该第一激光遮挡层用于对激光照射到受光区域中的至少第一区域进行遮挡,因此,在后续采用激光辐照工艺制备第一电极图案时,可以减少激光对硅基底层造成损伤,从而可以提高电池效率。同时,采用激光对第一电极图案进行烧结,可以增加第一电极图案与硅基底层之间的接触性能,降低接触阻抗。而当该太阳能电池为HIT电池的情况下,可以增加第一电极图案和第一透明导电氧化物层之间的接触性能,降低接触阻抗,并且还可以满足HIT太阳能电池的低温要求,在采用低温银浆制作第一电极图案时,通过激光烧结可以将低温银浆中的树脂成分烧结完全,从而可以提高第一电极图案的电导率和焊接牢固性。By forming the first laser shielding layer on the first side of the silicon base layer and at least in the first region, since the first laser shielding layer is used to shield at least the first region of the light-receiving region from laser irradiation, in the subsequent When the first electrode pattern is prepared using a laser irradiation process, laser damage to the silicon base layer can be reduced, thereby improving cell efficiency. At the same time, using a laser to sinter the first electrode pattern can increase the contact performance between the first electrode pattern and the silicon base layer and reduce the contact resistance. When the solar cell is a HIT cell, the contact performance between the first electrode pattern and the first transparent conductive oxide layer can be increased, the contact resistance can be reduced, and the low temperature requirements of the HIT solar cell can be met. When the silver paste is used to make the first electrode pattern, the resin component in the low-temperature silver paste can be completely sintered through laser sintering, thereby improving the conductivity and welding firmness of the first electrode pattern.
附图说明Description of drawings
图1为本申请实施例提供的一种太阳能电池的剖视结构示意图;Figure 1 is a schematic cross-sectional structural diagram of a solar cell provided by an embodiment of the present application;
图2为本申请实施例提供的一种在硅基底层的第一侧形成第一电极图案的流程示意图;Figure 2 is a schematic flowchart of forming a first electrode pattern on the first side of the silicon base layer according to an embodiment of the present application;
图3为本申请实施例提供的另一种在硅基底层的第一侧形成第一电极图案的流程示意图;Figure 3 is another schematic flow chart of forming a first electrode pattern on the first side of the silicon base layer according to an embodiment of the present application;
图4为本申请实施例提供的一种在硅基底层的第二侧形成第二电极图案的流程示意图;Figure 4 is a schematic flowchart of forming a second electrode pattern on the second side of the silicon base layer according to an embodiment of the present application;
图5为本申请实施例提供的另一种在硅基底层的第二侧形成第二电极图案的流程示意图。FIG. 5 is a schematic flowchart of another method of forming a second electrode pattern on the second side of the silicon base layer according to an embodiment of the present application.
具体实施方式Detailed ways
为使本申请的上述目的、特征和优点能够更加明显易懂,下面结合附图对本申请的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本申请。但是本申请能够以很多不同于在此描述的其它方式来实施,本领域技术人员可以在不违背本申请内涵的情况下做类似改进,因此本申请不受下面公开的具体实施例的限制。In order to make the above objects, features and advantages of the present application more obvious and easy to understand, the specific implementation modes of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be implemented in many other ways different from those described here. Those skilled in the art can make similar improvements without violating the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.
除非上下文另有要求,否则,在整个说明书和权利要求书中,术语“包括”被解释为开放、包含的意思,即为“包含,但不限于”。在说明书的描述中,术语“一个实施例”、“一些实施例”、“示例性实施例”、“示例性地”或“一些示例”等旨在表明与该实施例或示例相关的特定特征、结构、材料或特性包括在本公开的至少一个实施例或示例中。上述术语的示意性表示不一定是指同一实施例或示例。此外,所述的特定特征、结构、材料或特点可以以任何适当方式包括在任何一个或多个实施例或示例中。Unless the context requires otherwise, throughout the specification and claims, the term "including" is to be interpreted in an open, inclusive sense, that is, "including, but not limited to." In the description of the specification, the terms "one embodiment," "some embodiments," "exemplary embodiments," "exemplarily," or "some examples" and the like are intended to indicate specific features associated with the embodiment or example. , structures, materials or characteristics are included in at least one embodiment or example of the present disclosure. The schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials or characteristics described may be included in any suitable manner in any one or more embodiments or examples.
本文参照作为理想化示例性附图的剖视图和/或平面图描述了示例性实施方式。在附图中,为了清楚,放大了层和区域的厚度。因此,可设想到由于例如制造技术和/或公差引起的相对于附图的形状的变动。因此,示例性实施方式不应解释为局限于本文示出的区域的形状,而是包括因例如制造而引起的形状偏差。例如,示为矩形的蚀刻区域通常将具有弯曲的特征。因此,附图中所示的区域本质上是示意性的,且它们的形状并非旨在示出设备的区域的实际形状,并且并非旨在限制示例性实施方式的范围。Example embodiments are described herein with reference to cross-sectional illustrations and/or plan views that are idealized illustrations. In the drawings, the thickness of layers and regions are exaggerated for clarity. Accordingly, variations from the shapes in the drawings due, for example, to manufacturing techniques and/or tolerances are contemplated. Thus, example embodiments should not be construed as limited to the shapes of regions illustrated herein but are to include deviations in shapes that result from, for example, manufacturing. For example, an etched area shown as a rectangle will typically have curved features. Accordingly, the regions shown in the figures are schematic in nature and their shapes are not intended to illustrate the actual shapes of regions of the device and are not intended to limit the scope of the exemplary embodiments.
“A和/或B”,包括以下三种组合:仅A,仅B,及A和B的组合。"A and/or B" includes the following three combinations: A only, B only, and a combination of A and B.
在本文中,除非另有说明,“一种或多种”表示一种或大于等于两种。In this article, unless otherwise stated, "one or more" means one or more than two.
本文中,“例如”、“如”、“示例”、“举例”等用于描述目的,表示在前与在后的不同技术方案在涵盖内容上存在关联,但并不应理解为对前一技术方案的限定,也不能理解为对本文保护范围的限制。在本文中,如无其他说明,A(如B),表示B为A中的一种非限制性示例,可以理解A不限于为B。In this article, "for example", "such as", "example", "example", etc. are used for descriptive purposes and indicate that the different technical solutions before and after are related in the content covered, but should not be understood as a reference to the previous one. The limitations of the technical solution cannot be understood as limiting the scope of protection of this article. In this article, if there is no other explanation, A (such as B) means that B is a non-limiting example of A, and it can be understood that A is not limited to B.
本文中,“可选地”、“可选的”、“可选”,指可有可无,也即指选自“有”或“无”两种并列方案中的任一种。如果一个技术方案中出现多处“可选”,如无特别说明,且无矛盾之处或相互制约关系,则每项“可选”各自独立。In this article, "optionally", "optional", and "optional" mean that it is optional, that is, it refers to any one of the two parallel solutions of "with" or "without". If there are multiple "optionals" in a technical solution, each "optional" will be independent unless otherwise specified and there is no contradiction or mutual restriction.
本文中,“可选地含有”、“可选地包含”等描述,表示“含有或不含有”。“可选的组分X”,表示组分X存在或不存在,或者表示含有或不含有该组分X。In this article, descriptions such as “optionally containing” and “optionally containing” mean “containing or not containing”. "Optional component X" means the presence or absence of component X, or the presence or absence of component X.
本文中,“第一方面”、“第二方面”等中,术语“第一”、“第二”等仅用于描述目的,不能理解为指示或暗示相对重要性或数量,也不能理解为隐含指明所指示的技术特征的重要性或数量。In the "first aspect", "second aspect", etc., the terms "first", "second", etc. are used for descriptive purposes only and shall not be understood as indicating or implying relative importance or quantity, nor shall they be understood as An implicit indication of the importance or quantity of the technical feature indicated.
需要说明的是,当元件被称为“固定于”或“设置于”另一个元件,它可以直接在另一个元件上或者也可以存在居中的元件。当一个元件被认为是“连接”另一个元件,它可以是直接连接到另一个元件或者可能同时存在居中元件。本文所使用的术语“垂直的”、“水平的”、“上”、“下”、“左”、“右”以及类似的表述只是为了说明的目的,并不表示是唯一的实施方式。It should be noted that when an element is referred to as being "mounted" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is said to be "connected" to another element, it can be directly connected to the other element or there may also be intervening elements present. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation manner.
除非另有定义,本文所使用的所有的技术和科学术语与属于本申请的技术领域的技术人员通常理解的含义相同。本文中在本申请的说明书中所使用的术语只是为了描述具体的实施例的目的,不是旨在于限制本申请。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing specific embodiments only and is not intended to limit the application.
本文中,以开放式描述的技术特征中,包括所列举特征组成的封闭式技术方案,也包括包含所列举特征的开放式技术方案。In this article, the technical features described in open format include closed technical solutions composed of the listed features, and also include open technical solutions including the listed features.
在本文中,“至少一种”的含义是一种以上,如一种,两种及两种以上。“多种”或“几种”的含义是至少两种,例如两种,三种等,“多层”的含义是至少两层,例如两层,三层等,除非另有明确具体的限定。在本申请的描述中,“若干”的含义是至少一个,例如一个,两个等,除非另有明确具体的限定。In this article, "at least one" means more than one kind, such as one kind, two kinds and more than two kinds. "Multiple" or "several" means at least two, such as two, three, etc., and "multiple" means at least two, such as two, three, etc., unless otherwise clearly and specifically limited. . In the description of this application, "several" means at least one, such as one, two, etc., unless otherwise expressly and specifically limited.
本文中,涉及到数值区间(也即数值范围),如无特别说明,该数值区间内可选的数值的分布视为连续,且包括该数值区间的两个数值端点(即最小值及最大值),以及这两个数值端点之间的每一个数值。如无特别说明,当数值区间仅仅指向该数值区间内的整数时,包括该数值范围的两个端点整数,以及两个端点之间的每一个整数,相当于直接列举了每一个整数。当提供多个数值范围描述特征或特性时,可以合并这些数值范围。换言之,除非另有指明,否则本文中所公开之数值范围应理解为包括其中所归入的任何及所有的子范围。该数值区间中的“数值”可以为任意的定量值,比如数字、百分比、比例等。“数值区间”允许广义地包括百分比区间,比例区间,比值区间等数值区间类型。In this article, when it comes to numerical intervals (i.e., numerical ranges), unless otherwise specified, the distribution of optional values within the numerical interval is considered continuous and includes the two numerical endpoints of the numerical interval (i.e., the minimum value and the maximum value). ), and every value between the two numeric endpoints. Unless otherwise specified, when a numerical range only points to integers within the numerical range, including the two endpoint integers of the numerical range and every integer between the two endpoints is equivalent to directly enumerating every integer. When multiple numerical ranges are provided to describe a characteristic or characteristic, these numerical ranges can be combined. In other words, unless otherwise indicated, numerical ranges disclosed herein should be understood to include any and all subranges subsumed therein. The "value" in this numerical range can be any quantitative value, such as numbers, percentages, ratios, etc. "Numeric interval" allows a broad range of numerical interval types including percentage interval, proportion interval, ratio interval and other numerical interval types.
本文中,涉及到温度参数,如无特别限定,既允许为恒温处理,也允许在一定温度区间内进行处理。所述的恒温处理允许温度在仪器控制的精度范围内进行波动。In this article, when it comes to temperature parameters, if there are no special restrictions, either constant temperature treatment or treatment within a certain temperature range is allowed. The thermostatic treatment described allows the temperature to fluctuate within the accuracy of the instrument control.
本文所用的填充因子(FF)是指实际最大可获得功率(Pm或Vmp*Jmp)与理论(非实际可获得的)功率(Jsc*Voc)的比值。因此,FF可由下式决定:The fill factor (FF) used in this article refers to the ratio of the actual maximum available power (Pm or Vmp*Jmp) to the theoretical (not actually available) power (Jsc*Voc). Therefore, FF can be determined by:
FF=(Vmp*Jmp)/(Jsc*Voc)FF=(Vmp*Jmp)/(Jsc*Voc)
其中Jmp及Vmp分别表示在最大功率点(Pm)处的电流密度及电压,该点是通过改变电路中的电阻直到J*V为最大值而获得的;Jsc及Voc分别表示短路电流及开路电压。填充因子是评价太阳能电池的关键参数。商业用太阳能电池通常具有约60%及以上的填充因子。Among them, Jmp and Vmp respectively represent the current density and voltage at the maximum power point (Pm), which is obtained by changing the resistance in the circuit until J*V is the maximum value; Jsc and Voc represent the short-circuit current and open-circuit voltage respectively. . Fill factor is a key parameter for evaluating solar cells. Commercial solar cells typically have fill factors of about 60% and above.
本文所用的开路电压(Voc)是在无连接的外部负载条件下装置的阳极与阴极之间的电位差。As used herein, open circuit voltage (Voc) is the potential difference between the anode and cathode of a device without a connected external load.
本文所用的太阳能电池的功率转换效率(PCE)是指从吸收光转换为电能的功率百分比。太阳能电池的功率转换效率(PCE)可通过标准测试条件(STC)下入射光辐射照度(E:W/m2)及太阳能电池的表面积(Ac:m2)除最大功率点(Pm)而算出。STC通常指在为温度25℃、辐射照度1000W/m2、空气质量1.5(AM1.5)的光谱。As used herein, the power conversion efficiency (PCE) of a solar cell refers to the percentage of power converted from absorbed light into electrical energy. The power conversion efficiency (PCE) of a solar cell can be calculated by dividing the maximum power point (Pm) by dividing the incident light irradiance (E: W/m 2 ) and the surface area of the solar cell (Ac: m 2 ) under standard test conditions (STC) . STC usually refers to the spectrum at a temperature of 25°C, a radiation intensity of 1000W/m 2 and an air quality of 1.5 (AM1.5).
在目前的电池技术中,异质结电池由于具有结构简单、工艺温度低、钝化效果好、开路电压高、温度特性好、双面发电等特点而成为硅基太阳能电池的研究热点之一。In current battery technology, heterojunction cells have become one of the research hotspots of silicon-based solar cells due to their simple structure, low process temperature, good passivation effect, high open circuit voltage, good temperature characteristics, and double-sided power generation.
特别是HIT太阳能电池在全生命周期发电量上的优势,其与PERC电池的单瓦成本差距若可以缩小至1毛/W左右,则可产生较高的性价比。并且随着N型硅基底减薄、银浆耗量降低、设备和靶材降本等方式,可以使得HIT太阳能电池达到越来越高的性价比。In particular, due to the advantages of HIT solar cells in terms of full life cycle power generation, if the cost gap per watt between HIT solar cells and PERC cells can be narrowed to about 1 gross/W, a higher cost performance can be achieved. And with the thinning of N-type silicon substrates, reduction of silver paste consumption, and cost reduction of equipment and targets, HIT solar cells can achieve increasingly higher cost performance.
而目前浆料降本仍然面临着很大的问题。特别是由于HIT太阳能电池的低温工艺,无法使用传统的高温银浆,而低温银浆存在电导率低,焊接拉力低等缺陷,致使其耗量较大,且低温工艺使得银浆中的树脂成分难以完全烧结,焊带焊接较困难,存在产品的耐久性风险。At present, slurry cost reduction is still facing big problems. In particular, due to the low-temperature process of HIT solar cells, traditional high-temperature silver paste cannot be used, and low-temperature silver paste has defects such as low conductivity and low welding tension, resulting in large consumption, and the low-temperature process reduces the resin content in the silver paste. It is difficult to sinter completely, and it is difficult to weld the ribbon, which poses a risk to the durability of the product.
目前,为了降低银耗量,激光转印、电镀、银包铜等技术都在研究和开发中。其中,激光转印技术目前尚处于小批量实验研究阶段,线宽可以做到23微米左右,虽然对银耗量和电池效率都有帮助,但是耗材和工艺长期稳定性有待进一步考量。电镀工艺污染高,工艺流程复杂,虽然可以将栅线做得很细,可以减少遮光面积,但是也容易脱落,且设备投资较大。银包铜工艺目前多用在电池的背面,目前还处于验证和改进阶段,无法投入生产。Currently, in order to reduce silver consumption, laser transfer, electroplating, silver-coated copper and other technologies are being researched and developed. Among them, laser transfer technology is still in the small-batch experimental research stage, and the line width can be about 23 microns. Although it is helpful for silver consumption and battery efficiency, the long-term stability of consumables and processes needs further consideration. The electroplating process has high pollution and complicated process flow. Although the gate lines can be made very thin and can reduce the shading area, they are also easy to fall off and require a large investment in equipment. The silver-coated copper process is currently mostly used on the back of batteries. It is still in the verification and improvement stage and cannot be put into production.
激光烧结技术是利用激光束的高能热量对已经形成的电极图案或导电浆料等进行照射,使得电极图案或导电浆料与硅或透明导电氧化物层在高温下进行结合的技术,其中,该激光束照射时主要集中在电极图案或导电浆料上,但是,对于太阳能电池而言,若激光束控制不精确,很容易对电极图案边缘的硅基底层造成伤害,不利于电池性能的提高。Laser sintering technology is a technology that uses the high-energy heat of the laser beam to irradiate the formed electrode pattern or conductive paste, etc., so that the electrode pattern or conductive paste and silicon or transparent conductive oxide layer are combined at high temperature. Among them, the The laser beam is mainly concentrated on the electrode pattern or conductive paste during irradiation. However, for solar cells, if the laser beam control is not precise, it can easily cause damage to the silicon base layer at the edge of the electrode pattern, which is not conducive to the improvement of battery performance.
基于此,第一方面,本申请的一些实施例提供一种太阳能电池的制备方法,如图1所示,该太阳能电池1具有受光区域S和非受光区域Z,太阳能电池1包括:硅基底层11以及设置于硅基底层11的厚度方向的第一侧11a的第一电极图案121,第一电极图案121位于太阳能电池1的非受光区域Z,第一电极图案121至少采用激光辐照工艺进行制备。如图1、图2和图3所示,该制备方法包括:Based on this, in the first aspect, some embodiments of the present application provide a method for preparing a solar cell. As shown in Figure 1, the solar cell 1 has a light-receiving area S and a non-light-receiving area Z. The solar cell 1 includes: a silicon base layer 11 and the first electrode pattern 121 disposed on the first side 11a in the thickness direction of the silicon base layer 11. The first electrode pattern 121 is located in the non-light-receiving area Z of the solar cell 1. The first electrode pattern 121 is formed using at least a laser irradiation process. preparation. As shown in Figure 1, Figure 2 and Figure 3, the preparation method includes:
在S202)、采用激光辐照工艺制备第一电极图案121之前,S201)、在硅基底层11的第一侧11a且至少在第一区域N形成第一激光遮挡层131,第一区域N是指从第一电极图案121的边沿向远离第一电极图案121的方向延伸第一距离所覆盖的受光区域,第一距离为0.1mm~0.5mm,第一激光遮挡层131用于对激光照射到受光区域S中的至少第一区域N进行遮挡。In S202), before using the laser irradiation process to prepare the first electrode pattern 121, S201), form the first laser shielding layer 131 on the first side 11a of the silicon base layer 11 and at least in the first region N, and the first region N is Refers to the light-receiving area covered by a first distance extending from the edge of the first electrode pattern 121 in a direction away from the first electrode pattern 121. The first distance is 0.1 mm to 0.5 mm. The first laser shielding layer 131 is used to irradiate the laser to At least the first area N in the light receiving area S is blocked.
其中,太阳能电池是一种利用太阳光直接发电的光电半导体薄片,太阳能电池的受光区域是指可以接受太阳光的照射,便于太阳能电池中的PN结发生光生伏特效应的区域,其需要太阳能电池在这部分区域的受光面上是透明的,太阳光可以入射到太阳能电池的PN结上;而为了将太阳能电池发电产生的电能引出,则在太阳能电池的正面或背面制作栅线,来收集光生载流子,该栅线所在的区域不能透过太阳光,因此,这部分区域也可以称为非受光区域。Among them, a solar cell is an optoelectronic semiconductor sheet that uses sunlight to directly generate electricity. The light-receiving area of a solar cell refers to an area that can receive sunlight and facilitate the photovoltaic effect of the PN junction in the solar cell. This requires the solar cell to be in The light-receiving surface of this part of the area is transparent, and sunlight can be incident on the PN junction of the solar cell. In order to extract the electric energy generated by the solar cell, grid lines are made on the front or back of the solar cell to collect the light-generated carrier. The area where the grid line is located cannot transmit sunlight, so this area can also be called a non-light-receiving area.
根据太阳能电池的结构不同,栅线可以设置于该太阳能电池的正面和/或背面。Depending on the structure of the solar cell, the grid lines may be disposed on the front and/or back of the solar cell.
例如,该太阳能电池可以为PERC电池、TOPCon电池、HIT太阳能电池和xBC电池中的任一种,在此不做具体限定。For example, the solar cell can be any one of PERC cells, TOPCon cells, HIT solar cells, and xBC cells, which are not specifically limited here.
在太阳能电池为PERC电池的情况下,该硅基底层11可以为P型硅基底,栅线可以设置在PERC电池的正面和背面,这时,栅线可以包括第一电极图案和第二电极图案,该第一电极图案可以设置在PERC电池的正面或背面,第二电极图案可以设置在该PERC电池的背面或正面。When the solar cell is a PERC cell, the silicon base layer 11 can be a P-type silicon base, and the grid lines can be disposed on the front and back of the PERC cell. In this case, the grid lines can include a first electrode pattern and a second electrode pattern. , the first electrode pattern can be disposed on the front or back of the PERC battery, and the second electrode pattern can be disposed on the back or front of the PERC battery.
在太阳能电池为TOPCon电池的情况下,该硅基底层11可以为N型硅基底,栅线可以设置在TOPCon电池的正面和背面。这时,栅线可以包括第一电极图案和第二电极图案,第一电极图案可以设置在该TOPCon电池的正面或背面,第二电极图案可以设置在该TOPCon电池的背面或正面。When the solar cell is a TOPCon cell, the silicon base layer 11 can be an N-type silicon base, and the gate lines can be provided on the front and back of the TOPCon cell. At this time, the gate line may include a first electrode pattern and a second electrode pattern. The first electrode pattern may be disposed on the front or back of the TOPCon battery, and the second electrode pattern may be disposed on the back or front of the TOPCon battery.
在太阳能电池为HIT太阳能电池的情况下,该硅基底层11可以为N型硅基底,栅线可以设置在HIT太阳能电池的正面和背面。这时,栅线可以包括第一电极图案和第二电极图案,第一电极图案可以设置在该HIT太阳能电池的正面或背面,第二电极图案可以设置在该HIT太阳能电池的背面或正面。When the solar cell is a HIT solar cell, the silicon base layer 11 can be an N-type silicon base, and the gate lines can be provided on the front and back of the HIT solar cell. At this time, the gate line may include a first electrode pattern and a second electrode pattern. The first electrode pattern may be disposed on the front or back of the HIT solar cell, and the second electrode pattern may be disposed on the back or front of the HIT solar cell.
在太阳能电池为xBC电池的情况下,该硅基底层11可以为N型硅基底或P型硅基底,栅线可以设置在xBC电池的背面。这时,栅线可以包括第一电极图案,第一电极图案可以设置在该xBC电池的背面。When the solar cell is an xBC cell, the silicon base layer 11 can be an N-type silicon base or a P-type silicon base, and the gate line can be disposed on the back side of the xBC cell. At this time, the gate line may include a first electrode pattern, and the first electrode pattern may be disposed on the back of the xBC battery.
这里,需要说明的是,本申请实施例提供的太阳能电池的制备方法适用于上述任一种太阳能电池,在此,仅以太阳能电池为HIT太阳能电池为例,对该太阳能电池的制备方法进行详细描述,并不对其他太阳能电池的制备方法造成限制。Here, it should be noted that the solar cell preparation method provided in the embodiment of the present application is applicable to any of the above-mentioned solar cells. Here, only taking the solar cell as a HIT solar cell as an example, the preparation method of the solar cell will be described in detail. Description does not limit the preparation methods of other solar cells.
如图1和图2所示,该HIT太阳能电池除包括上述硅基底层11和设置于硅基底层11的厚度方向的第一侧11a的第一电极图案121以外,还可以包括设置于硅基底层11和第一电极图案121之间的第一本征非晶硅层141、第一掺杂层151和第一透明导电氧化物层161,该第一侧11a可以为该太阳能电池1的正面,也即为第一电极图案121设置在该太阳能电池1的正面的示例。这时,如图2所示,在S202)、采用激光辐照工艺制备第一电极图案121之前,通过在第一透明导电氧化物层161上且至少在第一区域N形成第一激光遮挡层131,由于该第一区域N是指从第一电极图案121的边沿向远离第一电极图案121的方向延伸第一距离L所覆盖的受光区域,第一距离为0.1mm~0.5mm,因此,该第一激光遮挡层131至少位于该第一电极图案121的边缘向外的一定区域范围(也即第一区域)内,如此,在采用激光辐照工艺制备第一电极图案121时,由于激光的发散,照射到该第一电极图案121的边缘向外的一定区域范围(也即第一区域)内的激光可以被第一激光遮挡层131遮挡,从而可以减少激光对硅基底层11的受光区域S至少位于第一区域N的部分造成损伤,满足HIT太阳能电池的低温要求,从而可以提高电池效率。同时,采用激光辐照制备第一电极图案121,还可以对第一电极图案121进行再次烧结,例如该第一电极图案121可以是低温银浆,从而可以将低温银浆中的树脂成分完全烧结掉,从而可以提高第一电极图案121的电导率和焊接牢固性。As shown in FIGS. 1 and 2 , in addition to the silicon base layer 11 and the first electrode pattern 121 disposed on the first side 11 a in the thickness direction of the silicon base layer 11 , the HIT solar cell may also include a silicon base layer 11 . The first intrinsic amorphous silicon layer 141, the first doped layer 151 and the first transparent conductive oxide layer 161 between the bottom layer 11 and the first electrode pattern 121, the first side 11a can be the front side of the solar cell 1 , that is, it is an example in which the first electrode pattern 121 is provided on the front side of the solar cell 1 . At this time, as shown in FIG. 2 , before using the laser irradiation process to prepare the first electrode pattern 121 in S202 ), a first laser shielding layer is formed on the first transparent conductive oxide layer 161 and at least in the first region N. 131. Since the first area N refers to the light-receiving area covered by the first distance L extending from the edge of the first electrode pattern 121 in a direction away from the first electrode pattern 121, and the first distance is 0.1 mm to 0.5 mm, therefore, The first laser shielding layer 131 is located at least within a certain area (ie, the first area) outward from the edge of the first electrode pattern 121. In this way, when the first electrode pattern 121 is prepared using a laser irradiation process, due to the laser The divergence of the laser irradiated into a certain area (i.e., the first area) outward from the edge of the first electrode pattern 121 can be blocked by the first laser shielding layer 131 , thereby reducing the light reception of the silicon base layer 11 by the laser. Damage is caused to at least the portion of the region S located in the first region N to meet the low temperature requirements of the HIT solar cell, thereby improving the cell efficiency. At the same time, laser irradiation is used to prepare the first electrode pattern 121, and the first electrode pattern 121 can also be sintered again. For example, the first electrode pattern 121 can be a low-temperature silver paste, so that the resin component in the low-temperature silver paste can be completely sintered. removed, thereby improving the electrical conductivity and welding firmness of the first electrode pattern 121 .
其中,由于该第一激光遮挡层131至少形成在第一区域N,因此,可以采用掩膜板对硅基底层11的受光区域S除第一区域N以外的区域和非受光区域Z进行遮挡的方式,在硅基底层11的第一区域N形成该第一激光遮挡层131,从而可以使第一激光遮挡层131仅覆盖在第一区域N,进而达到对激光照射到硅基底层11的第一区域N进行遮挡的目的。或者,可以采用整层覆盖的方式,使得该第一激光遮挡层131既形成在硅基底层11的受光区域S,又形成在硅基底层11的非受光区域Z,同样能够达到对激光照射到硅基底层11的第一区域N进行遮挡的目的,从而减少激光对硅基底层11的第一区域N造成损伤。Since the first laser shielding layer 131 is formed in at least the first region N, a mask can be used to shield the light-receiving region S of the silicon base layer 11 except the first region N and the non-light-receiving region Z. In this way, the first laser shielding layer 131 is formed in the first region N of the silicon base layer 11, so that the first laser shielding layer 131 can only cover the first region N, thereby achieving the first effect of laser irradiation on the silicon base layer 11. A region N is used for the purpose of occlusion. Alternatively, the entire layer coverage method can be used, so that the first laser shielding layer 131 is formed both in the light-receiving area S of the silicon base layer 11 and in the non-light-receiving area Z of the silicon base layer 11 , which can also achieve the goal of protecting the laser irradiation area. The purpose of shielding the first region N of the silicon base layer 11 is to reduce laser damage to the first region N of the silicon base layer 11 .
在一些实施例中,如图2所示,该第一激光遮挡层131的材料为导电材料;In some embodiments, as shown in Figure 2, the material of the first laser shielding layer 131 is a conductive material;
在S202)、采用激光辐照工艺制备第一电极图案121之前,S201)、在硅基底层11的第一侧11a且位于受光区域S和非受光区域Z形成第一激光遮挡层131;In S202), before using the laser irradiation process to prepare the first electrode pattern 121, S201), form the first laser shielding layer 131 on the first side 11a of the silicon base layer 11 and in the light-receiving area S and the non-light-receiving area Z;
并在S202)、采用激光辐照工艺制备第一电极图案121之后,S203)、将第一激光遮挡层131位于受光区域S的部分去除。And in S202), after using the laser irradiation process to prepare the first electrode pattern 121, S203), remove the portion of the first laser shielding layer 131 located in the light-receiving area S.
在这些实施例中,仍然以该太阳能电池为HIT太阳能电池为例,如图2所示,S201)、在硅基底层11的第一侧11a且位于受光区域S和非受光区域Z形成第一激光遮挡层131,可以包括:在第一透明导电氧化物层161上且位于受光区域S和非受光区域Z均形成第一激光遮挡层131,可以减少掩膜板的使用,且在S202)、采用激光辐照工艺形成第一电极图案121之后,通过将第一激光遮挡层131位于受光区域S的部分去除,可以仅在非受光区域Z保留该第一激光遮挡层131,不会对硅基底层11的受光区域S造成遮光,同时,由于该第一激光遮挡层131的材料为导电材料,因此,该第一激光遮挡层131位于非受光区域Z的部分可以作为第一电极图案121的一部分进行导电,不会对第一电极图案121的导电性能产生影响。In these embodiments, still taking the solar cell as a HIT solar cell as an example, as shown in FIG. 2, S201), a first side is formed on the first side 11a of the silicon base layer 11 and located in the light-receiving area S and the non-light-receiving area Z. The laser shielding layer 131 may include: forming the first laser shielding layer 131 on the first transparent conductive oxide layer 161 and located in both the light-receiving area S and the non-light-receiving area Z, which can reduce the use of masks, and in S202), After the first electrode pattern 121 is formed using a laser irradiation process, by removing the portion of the first laser shielding layer 131 located in the light-receiving area S, the first laser shielding layer 131 can be retained only in the non-light-receiving area Z, without damaging the silicon base. The light-receiving area S of the bottom layer 11 blocks light. At the same time, since the material of the first laser blocking layer 131 is a conductive material, the portion of the first laser blocking layer 131 located in the non-light-receiving area Z can be used as a part of the first electrode pattern 121 Conducting electricity will not affect the conductive performance of the first electrode pattern 121 .
示例地,该第一激光遮挡层131的材料可以为金属导电材料。For example, the material of the first laser shielding layer 131 may be a metal conductive material.
在一些实施例中,在硅基底层11的第一侧11a且位于受光区域S和非受光区域Z形成第一激光遮挡层131,可以包括:采用磁控溅射、蒸镀或溶液法在硅基底层11的第一侧11a且位于受光区域S和非受光区域Z形成第一激光遮挡层131。In some embodiments, forming the first laser shielding layer 131 on the first side 11a of the silicon base layer 11 and located in the light-receiving area S and the non-light-receiving area Z may include: using magnetron sputtering, evaporation or solution method to form the first laser shielding layer 131 on the silicon. The first side 11 a of the base layer 11 and located in the light-receiving area S and the non-light-receiving area Z form a first laser shielding layer 131 .
在这些实施例中,无需掩膜板即可实现对第一区域N进行遮挡。In these embodiments, the first area N can be blocked without a mask.
在采用溶液法在硅基底层11的第一侧11a且位于受光区域S和非受光区域Z形成第一激光遮挡层131时,以第一激光遮挡层131的材料为金属导电材料为例,可以将金属离子的溶液铺设于硅基底层11的第一侧11a且位于受光区域S和非受光区域Z,形成液膜,然后采用热还原的方法将金属离子还原成金属从而得以沉积形成第一激光遮挡层131。When using a solution method to form the first laser shielding layer 131 on the first side 11a of the silicon base layer 11 and located in the light-receiving area S and the non-light-receiving area Z, assuming that the material of the first laser shielding layer 131 is a metal conductive material, for example, A solution of metal ions is laid on the first side 11a of the silicon base layer 11 and located in the light-receiving area S and the non-light-receiving area Z to form a liquid film, and then a thermal reduction method is used to reduce the metal ions into metal to deposit and form the first laser Occlusion layer 131.
在一些实施例中,该第一激光遮挡层131的材料包括:铜、银,铝,镍和锡中的一种或多种。In some embodiments, the material of the first laser shielding layer 131 includes one or more of copper, silver, aluminum, nickel and tin.
在这些实施例中,这些材料可以起到对激光遮挡的作用,同时,采用这些材料,在非受光区域Z形成保留的情况下,这些材料作为第一电极图案121的一部分还可以增大第一电极图案121在第一透明导电氧化物层161上的粘附性能,例如,在后续通过丝网印刷在第一激光遮挡层131位于非受光区域Z的部分上形成导电银浆的情况下,通过对第一激光遮挡层131的材料进行合理选择,如选择具有粘附性能的材料,该第一激光遮挡层131还能够增大导电银浆在第一透明导电氧化物层161上的附着性能,同时,由于该第一激光遮挡层131本身为导电材料,因此,在导电银浆的使用量相同的情况下,可以增大第一激光遮挡层131与第一透明导电氧化物层161之间的接触性能,降低接触阻抗,并提高导电性能。In these embodiments, these materials can play a role in shielding the laser. At the same time, using these materials, when the non-light-receiving area Z is retained, these materials as part of the first electrode pattern 121 can also increase the size of the first electrode pattern 121 . The adhesion performance of the electrode pattern 121 on the first transparent conductive oxide layer 161 is determined by, for example, when a conductive silver paste is subsequently formed on the portion of the first laser shielding layer 131 located in the non-light-receiving area Z by screen printing. By rationally selecting the material of the first laser shielding layer 131, such as selecting a material with adhesion properties, the first laser shielding layer 131 can also increase the adhesion performance of the conductive silver paste on the first transparent conductive oxide layer 161, At the same time, since the first laser shielding layer 131 itself is a conductive material, when the amount of conductive silver paste is the same, the distance between the first laser shielding layer 131 and the first transparent conductive oxide layer 161 can be increased. Contact performance, reduce contact resistance, and improve conductive properties.
在一些实施例中,该第一激光遮挡层131的厚度为10nm~500nm。In some embodiments, the thickness of the first laser shielding layer 131 is 10 nm to 500 nm.
在这些实施例中,通过控制第一激光遮挡层131的厚度在上述范围内,能够起到对第一区域N进行激光遮挡的作用,同时还能够一定程度上提高第一电极图案121的导电性能和附着性能。In these embodiments, by controlling the thickness of the first laser shielding layer 131 within the above range, the first region N can be shielded from the laser, and at the same time, the conductive performance of the first electrode pattern 121 can be improved to a certain extent. and adhesion properties.
在一些实施例中,S203)、将第一激光遮挡层131位于受光区域S的部分去除,可以包括:根据第一激光遮挡层131和第一透明导电氧化物层161在同一刻蚀工艺下的刻蚀速率不同,即可将第一激光遮挡层131位于受光区域S的部分去除。In some embodiments, S203), removing the portion of the first laser shielding layer 131 located in the light-receiving area S may include: according to the first laser shielding layer 131 and the first transparent conductive oxide layer 161 under the same etching process. With different etching rates, the portion of the first laser shielding layer 131 located in the light-receiving area S can be removed.
示例地,该第一激光遮挡层131的材料为上述金属材料的情况下,根据第一激光遮挡层131和第一透明导电氧化物层161对化学试剂的抗腐蚀性能不同,即可将第一激光遮挡层131位于受光区域S的部分去除。For example, when the material of the first laser shielding layer 131 is the above-mentioned metal material, the first laser shielding layer 131 and the first transparent conductive oxide layer 161 may have different corrosion resistance to chemical reagents. The portion of the laser shielding layer 131 located in the light receiving area S is removed.
其中,该化学试剂示例地可以为能够使第一激光遮挡层131的材料发生溶解的任何化学试剂。The chemical reagent may be, for example, any chemical reagent that can dissolve the material of the first laser shielding layer 131 .
示例地,以第一激光遮挡层131的材料为铜为例,该化学试剂可以为酸和氧化物的混合溶剂,氧化物用于将铜氧化成铜离子,酸用于对铜离子进行溶解,例如该化学试剂可以为硫酸、盐酸和硝酸与双氧水、氯化铁、硝酸铁和过硫酸钠的任意组合。以第一激光遮挡层131的材料为银为例,该化学试剂也可以为硫酸、盐酸和硝酸与双氧水、氯化铁、硝酸铁和过硫酸钠的任意组合。以第一激光遮挡层131的材料为铝为例,该化学试剂可以为硝酸、盐酸和硫酸中的任一种或两种组合。以第一激光遮挡层131的材料为锡为例,该化学试剂可以为硝酸、盐酸和硫酸中的任一种或两种组合。以第一激光遮挡层131的材料为镍为例,该化学试剂可以为硝酸、盐酸和硫酸中的任一种或两种组合。For example, assuming that the material of the first laser shielding layer 131 is copper, the chemical reagent can be a mixed solvent of an acid and an oxide. The oxide is used to oxidize copper into copper ions, and the acid is used to dissolve the copper ions. For example, the chemical reagent can be any combination of sulfuric acid, hydrochloric acid, and nitric acid with hydrogen peroxide, ferric chloride, ferric nitrate, and sodium persulfate. Taking the material of the first laser shielding layer 131 as silver as an example, the chemical reagent can also be any combination of sulfuric acid, hydrochloric acid, and nitric acid with hydrogen peroxide, ferric chloride, ferric nitrate, and sodium persulfate. Taking the material of the first laser shielding layer 131 as aluminum as an example, the chemical reagent may be any one or a combination of two of nitric acid, hydrochloric acid and sulfuric acid. Taking the material of the first laser shielding layer 131 as tin, for example, the chemical reagent may be any one or a combination of two of nitric acid, hydrochloric acid and sulfuric acid. Taking the material of the first laser shielding layer 131 as nickel as an example, the chemical reagent may be any one or a combination of two of nitric acid, hydrochloric acid and sulfuric acid.
在另一些实施例中,如图3所示,第一激光遮挡层131的材料为导电材料;In other embodiments, as shown in Figure 3, the material of the first laser shielding layer 131 is a conductive material;
在S202)、采用激光辐照工艺制备第一电极图案121之前,S201)、采用图案化工艺,在硅基底层11的第一侧11a且位于第一区域N和非受光区域Z形成第一激光遮挡层131;Before S202) using a laser irradiation process to prepare the first electrode pattern 121, S201) using a patterning process to form a first laser on the first side 11a of the silicon base layer 11 and located in the first area N and the non-light-receiving area Z. Occlusion layer 131;
并在S202)、采用激光辐照工艺制备第一电极图案121之后,S203)、将第一激光遮挡层131位于第一区域N的部分去除。And in S202), after using the laser irradiation process to prepare the first electrode pattern 121, S203), remove the portion of the first laser shielding layer 131 located in the first region N.
在这些实施例中,可以仅在第一区域N和非受光区域Z形成第一激光遮挡层131,从而可以对激光照射到硅基底层11位于第一区域N的部分进行遮挡,减少激光对硅基底层11位于第一区域N的部分造成损伤。In these embodiments, the first laser shielding layer 131 can be formed only in the first area N and the non-light-receiving area Z, so that the laser irradiation can be shielded from the portion of the silicon base layer 11 located in the first area N, reducing the laser's impact on the silicon. The portion of the base layer 11 located in the first region N is damaged.
其中,可以通过涂覆光刻胶、曝光、显影等工艺实现图案化,也可以直接采用掩膜板遮挡的方式对非遮挡区域进行沉积来实现图案化。Among them, patterning can be achieved through processes such as coating of photoresist, exposure, and development, or patterning can be achieved by depositing non-blocking areas directly using masking.
在一些实施例中,S201)采用图案化工艺,在硅基底层11的第一侧11a且位于第一区域N和非受光区域Z形成第一激光遮挡层131,包括:In some embodiments, S201) uses a patterning process to form the first laser shielding layer 131 on the first side 11a of the silicon base layer 11 and in the first area N and the non-light-receiving area Z, including:
采用掩膜板对受光区域S中除第一区域N以外的区域进行遮挡,并采用磁控溅射、蒸镀或溶液法在硅基底层11的第一侧11a且位于第一区域N和非受光区域Z形成第一激光遮挡层131。A mask is used to shield the area other than the first area N in the light-receiving area S, and magnetron sputtering, evaporation or solution method is used to cover the first side 11a of the silicon base layer 11 and is located between the first area N and non-first area N. The light-receiving area Z forms the first laser shielding layer 131 .
在这些实施例中,该第一激光遮挡层131可以为金属导电材料,采用溶液法制备时的描述可以参照上述在硅基底层11的第一侧11a位于受光区域S和非受光区域Z形成第一激光遮挡层131的描述,在此不再赘述。In these embodiments, the first laser shielding layer 131 can be a metal conductive material. The description of the preparation using the solution method can refer to the above-mentioned formation of the first side 11a of the silicon base layer 11 in the light-receiving area S and the non-light-receiving area Z. The description of the laser shielding layer 131 will not be repeated here.
在一些实施例中,S203)、将第一激光遮挡层131位于第一区域N的部分去除,可以参照上述将第一激光遮挡层131位于受光区域S的部分去除的描述,在此不再赘述。In some embodiments, S203), remove the portion of the first laser shielding layer 131 located in the first area N. Reference may be made to the above description of removing the portion of the first laser shielding layer 131 located in the light-receiving area S, which will not be described again here. .
其中,对上述第一电极图案121的具体制备方法不做限定,该第一电极图案121除了采用激光辐照工艺制备以外,还可以与丝网印刷、电镀、激光转印和银包银等技术联合制备得到,在此不对第一电极图案121的具体制备工艺造成限定,所有采用激光辐照工艺对第一电极图案121进行辅助烧结的制备工艺均在本申请的保护范围之内。The specific preparation method of the above-mentioned first electrode pattern 121 is not limited. In addition to being prepared by a laser irradiation process, the first electrode pattern 121 can also be combined with technologies such as screen printing, electroplating, laser transfer, and silver coating. The specific preparation process of the first electrode pattern 121 is not limited here. All preparation processes that use a laser irradiation process to assist sintering of the first electrode pattern 121 are within the scope of protection of this application.
在一些实施例中,如图2和图3所示,在S202)、采用激光辐照工艺制备第一电极图案121之前,S201)、在硅基底层11的第一侧11a且至少在第一区域N形成第一激光遮挡层131之后,制备方法还包括:In some embodiments, as shown in Figures 2 and 3, before S202) using a laser irradiation process to prepare the first electrode pattern 121, S201), on the first side 11a of the silicon base layer 11 and at least on the first After the first laser shielding layer 131 is formed in the region N, the preparation method further includes:
S200)、在硅基底层11的第一侧11a且位于非受光区域Z形成第二电极图案122;S200), forming a second electrode pattern 122 on the first side 11a of the silicon base layer 11 and located in the non-light-receiving area Z;
S202)、采用激光辐照工艺制备第一电极图案121,包括:S202), using a laser irradiation process to prepare the first electrode pattern 121, including:
对第二电极图案122进行激光辐照处理,制备第一电极图案121。The second electrode pattern 122 is subjected to laser irradiation processing to prepare the first electrode pattern 121.
在这些实施例中,该第二电极图案122可以为银浆,在采用激光辐照工艺对第二电极图案122辐照处理之后,第二电极图案122中的银在超高能量下与第一透明导电氧化物层161形成欧姆接触,或者,第二电极图案122中的银与第一激光遮挡层131位于非受光区域Z的部分熔合,形成第一电极图案121,均能够提高第一电极图案121的导电性能和其与硅基底层的结合性能。In these embodiments, the second electrode pattern 122 may be a silver paste. After the second electrode pattern 122 is irradiated using a laser irradiation process, the silver in the second electrode pattern 122 interacts with the first electrode pattern 122 under ultra-high energy. The transparent conductive oxide layer 161 forms an ohmic contact, or the silver in the second electrode pattern 122 is fused with the part of the first laser shielding layer 131 located in the non-light-receiving area Z to form the first electrode pattern 121, both of which can improve the first electrode pattern. The conductive properties of 121 and its bonding properties with the silicon base layer.
在一些实施例中,如图1所示,该太阳能电池1还包括:设置于硅基底层11的厚度方向的第二侧11b的第三电极图案123,第三电极图案123位于太阳能电池1的非受光区域Z;如图1、图4和图5所示,该制备方法还包括:In some embodiments, as shown in FIG. 1 , the solar cell 1 further includes: a third electrode pattern 123 disposed on the second side 11 b of the silicon base layer 11 in the thickness direction. The third electrode pattern 123 is located on the solar cell 1 Non-light-receiving area Z; as shown in Figure 1, Figure 4 and Figure 5, the preparation method also includes:
在S302)、采用激光辐照工艺制备第三电极图案123之前,S301)、在硅基底层11的第二侧11b且至少在第二区域P形成第二激光遮挡层132,第二区域P是指从第三电极图案123的边沿向远离第三电极图案123的方向延伸第二距离所覆盖的受光区域,第二距离为0.1mm~0.5mm,第二激光遮挡层132用于对激光照射到受光区域S中的第二区域P进行遮挡。Before S302) using a laser irradiation process to prepare the third electrode pattern 123, S301) forming a second laser shielding layer 132 on the second side 11b of the silicon base layer 11 and at least in the second region P. The second region P is Refers to the light-receiving area covered by a second distance extending from the edge of the third electrode pattern 123 in a direction away from the third electrode pattern 123. The second distance is 0.1 mm to 0.5 mm. The second laser shielding layer 132 is used to irradiate the laser to The second area P in the light receiving area S is blocked.
在这些实施例中,与上述第一电极图案121相反地,第三电极图案123设置在该太阳能电池1的背面。这时,如图1所示,该HIT太阳能电池还可以包括设置于硅基底层11和第三电极图案123之间的第二本征非晶硅层142、第二掺杂层152和第二透明导电氧化物层162。此时,与上述第一电极图案121相类似地,在S302)、采用激光辐照工艺制备第三电极图案123之前,通过在第二透明导电氧化物层162上且至少在第二区域P形成第二激光遮挡层132,由于该第二激光遮挡层132用于对激光照射到受光区域S中的至少第二区域P进行遮挡,因此,在采用激光辐照工艺制备第三电极图案123时,可以减少激光对硅基底层11的第二区域P造成损伤,满足HIT太阳能电池的低温要求,从而可以提高电池效率。同时,采用激光辐照制备第三电极图案123,还可以对第三电极图案123进行再次烧结,例如该第三电极图案123可以是低温银浆,从而可以进一步对低温银浆中的树脂成分完全烧结掉,从而可以提高第三电极图案123的电导率和焊接牢固性。In these embodiments, contrary to the first electrode pattern 121 described above, a third electrode pattern 123 is provided on the back side of the solar cell 1 . At this time, as shown in FIG. 1 , the HIT solar cell may further include a second intrinsic amorphous silicon layer 142 disposed between the silicon base layer 11 and the third electrode pattern 123 , a second doped layer 152 and a second Transparent conductive oxide layer 162 . At this time, similar to the above-mentioned first electrode pattern 121, in S302), before using the laser irradiation process to prepare the third electrode pattern 123, by forming on the second transparent conductive oxide layer 162 and at least in the second region P The second laser shielding layer 132 is used to shield at least the second area P of the light-receiving area S from laser irradiation. Therefore, when the third electrode pattern 123 is prepared using a laser irradiation process, It can reduce laser damage to the second area P of the silicon base layer 11, meet the low temperature requirements of HIT solar cells, and thus improve the cell efficiency. At the same time, laser irradiation is used to prepare the third electrode pattern 123, and the third electrode pattern 123 can also be sintered again. For example, the third electrode pattern 123 can be a low-temperature silver paste, so that the resin component in the low-temperature silver paste can be further completely treated. sintered away, so that the electrical conductivity and welding firmness of the third electrode pattern 123 can be improved.
其中,与上述第一激光遮挡层132相类似地,该第二激光遮挡层132也可以采用掩膜板对硅基底层11的受光区域S除第一区域N以外的区域和非受光区域Z进行遮挡的方式制备得到,也可以采用沉积使其整层覆盖在受光区域S和非受光区域Z,均能够达到对激光照射到硅基底层11的受光区域S进行遮挡的目的,从而可以减少激光对硅基底层11的受光区域S造成损伤。Similar to the above-mentioned first laser shielding layer 132, the second laser shielding layer 132 can also use a mask to mask the light-receiving area S of the silicon base layer 11 except the first area N and the non-light-receiving area Z. It is prepared by blocking, or it can be deposited so that the entire layer covers the light-receiving area S and the non-light-receiving area Z, which can achieve the purpose of blocking the light-receiving area S of the silicon base layer 11 when the laser is irradiated, thereby reducing the laser radiation. The light-receiving area S of the silicon base layer 11 is damaged.
在一些实施例中,如图4所示,该第二激光遮挡层132的材料为导电材料;In some embodiments, as shown in Figure 4, the material of the second laser shielding layer 132 is a conductive material;
在S302)、采用激光辐照工艺制备第三电极图案123之前,S301)、在硅基底层11的第二侧11b且位于受光区域S和非受光区域Z形成第二激光遮挡层132;Before S302) using a laser irradiation process to prepare the third electrode pattern 123, S301) forming a second laser shielding layer 132 on the second side 11b of the silicon base layer 11 and located in the light-receiving area S and the non-light-receiving area Z;
并在S302)、采用激光辐照工艺制备第三电极图案123之后,S303)、将第二激光遮挡层132位于受光区域S的部分去除。And in S302), after using the laser irradiation process to prepare the third electrode pattern 123, S303), remove the portion of the second laser shielding layer 132 located in the light-receiving area S.
在这些实施例中,与上述第一电极图案121相类似地,在第二透明导电氧化物层162上且位于受光区域S和非受光区域Z均形成第二激光遮挡层132的情况下,同样可以减少掩膜板的使用,且在采用激光辐照工艺形成第三电极图案123之后,通过将第二激光遮挡层132位于受光区域S的部分去除,不会对硅基底层11的受光区域S造成遮光,同时,由于该第二激光遮挡层132的材料为导电材料,因此,该第二激光遮挡层132位于非受光区域Z的部分可以作为第三电极图案123的一部分进行导电,不会对第三电极图案123的导电性能产生影响。In these embodiments, similar to the first electrode pattern 121 described above, when the second laser shielding layer 132 is formed on the second transparent conductive oxide layer 162 and located in both the light-receiving area S and the non-light-receiving area Z, the same The use of masks can be reduced, and after the third electrode pattern 123 is formed using a laser irradiation process, by removing the portion of the second laser shielding layer 132 located in the light-receiving area S, the light-receiving area S of the silicon base layer 11 will not be affected. At the same time, because the material of the second laser shielding layer 132 is a conductive material, the portion of the second laser shielding layer 132 located in the non-light-receiving area Z can be conductive as a part of the third electrode pattern 123 and will not cause The conductive performance of the third electrode pattern 123 has an impact.
在一些实施例中,该第二激光遮挡层132的材料包括:铜、银,铝,镍和锡中的一种或多种。In some embodiments, the material of the second laser shielding layer 132 includes one or more of copper, silver, aluminum, nickel and tin.
在这些实施例中,与上述第一激光遮挡层132的材料相类似地,这些材料同样能够在对激光遮挡的情况下,提高该第三电极图案123的导电性能和在第二透明导电氧化物层162上的粘附性能,具体说理可以参见上述对第一电极图案121的描述,在此不再赘述。In these embodiments, similar to the materials of the above-mentioned first laser shielding layer 132, these materials can also improve the conductive performance of the third electrode pattern 123 and the second transparent conductive oxide in the case of blocking the laser. For the specific explanation of the adhesion performance on the layer 162, please refer to the above description of the first electrode pattern 121, which will not be described again here.
在一些实施例中,该第二激光遮挡层132的厚度为10nm~500nm。In some embodiments, the thickness of the second laser shielding layer 132 is 10 nm to 500 nm.
在这些实施例中,通过控制第二激光遮挡层132的厚度在上述范围内,同样能够起到对受光区域S进行激光遮挡的作用,同时还能够一定程度上提高第三电极图案123的导电性能和其在第二透明导电氧化物层162上的附着性能。In these embodiments, by controlling the thickness of the second laser shielding layer 132 within the above range, it can also play a role in shielding the light-receiving area S from the laser, and at the same time, it can also improve the conductive performance of the third electrode pattern 123 to a certain extent. and its adhesion properties on the second transparent conductive oxide layer 162 .
在一些实施例中,在硅基底层11的第二侧11b且位于受光区域S和非受光区域Z形成第二激光遮挡层132,可以包括:采用磁控溅射、蒸镀或溶液法在硅基底层11的第二侧11b且位于受光区域和非受光区域形成第二激光遮挡层132。In some embodiments, forming the second laser shielding layer 132 on the second side 11b of the silicon base layer 11 and located in the light-receiving area S and the non-light-receiving area Z may include: using magnetron sputtering, evaporation or solution method to form the second laser shielding layer 132 on the silicon. A second laser shielding layer 132 is formed on the second side 11b of the base layer 11 and located in the light-receiving area and the non-light-receiving area.
在这些实施例中,无需掩膜板即可实现对第二区域P进行遮挡。具体制备方法可以参照上述第一激光遮挡层131的描述,在此不再赘述。In these embodiments, the second area P can be blocked without a mask. For the specific preparation method, please refer to the above description of the first laser shielding layer 131, which will not be described again here.
在一些实施例中,S303)、将第二激光遮挡层132位于第二区域P的部分去除,可以参照上述将第一激光遮挡层131位于受光区域S的部分去除的描述,在此不再赘述。In some embodiments, S303), remove the portion of the second laser shielding layer 132 located in the second area P. Reference may be made to the above description of removing the portion of the first laser shielding layer 131 located in the light-receiving area S, which will not be described again. .
在另一些实施例中,如图5所示,第二激光遮挡层132的材料为导电材料;In other embodiments, as shown in FIG. 5 , the material of the second laser shielding layer 132 is a conductive material;
在采用激光辐照工艺制备第三电极图案123之前,采用图案化工艺,在硅基底层11的第二侧11b且位于第二区域P和非受光区域Z形成第二激光遮挡层132;Before using the laser irradiation process to prepare the third electrode pattern 123, a patterning process is used to form a second laser shielding layer 132 on the second side 11b of the silicon base layer 11 and located in the second area P and the non-light-receiving area Z;
并在采用激光辐照工艺制备第三电极图案123之后,将第二激光遮挡层132位于第二区域P的部分去除。After the third electrode pattern 123 is prepared using a laser irradiation process, the portion of the second laser shielding layer 132 located in the second region P is removed.
在这些实施例中,可以仅在第二区域P和非受光区域Z形成第一激光遮挡层132,从而可以对激光照射到硅基底层11位于第二区域P的部分进行遮挡,减少激光对硅基底层11位于第二区域P的部分造成损伤。In these embodiments, the first laser shielding layer 132 can be formed only in the second area P and the non-light-receiving area Z, so that the laser irradiation can be shielded from the portion of the silicon base layer 11 located in the second area P, reducing the laser's impact on the silicon. The portion of the base layer 11 located in the second region P is damaged.
其中,可以通过涂覆光刻胶、曝光、显影等工艺实现图案化,也可以直接采用掩膜板遮挡的方式对非遮挡区域进行沉积来实现图案化。Among them, patterning can be achieved through processes such as coating of photoresist, exposure, and development, or patterning can be achieved by depositing non-blocking areas directly using masking.
在一些实施例中,采用图案化工艺,在硅基底层11的第二侧11b且位于第二区域P和非受光区域Z形成第二激光遮挡层132,包括:In some embodiments, a patterning process is used to form the second laser shielding layer 132 on the second side 11b of the silicon base layer 11 and located in the second area P and the non-light-receiving area Z, including:
采用掩膜板对受光区域S中除第二区域P以外的区域进行遮挡,并采用磁控溅射、蒸镀或溶液法在硅基底层11的第二侧11b且位于第二区域P和非受光区域Z形成第二激光遮挡层132。A mask is used to block the area in the light-receiving area S except the second area P, and magnetron sputtering, evaporation or solution method is used to cover the second side 11b of the silicon base layer 11 and is located between the second area P and non-second area P. The light-receiving area Z forms the second laser shielding layer 132 .
在一些实施例中,将第二激光遮挡层132位于第二区域P的部分去除,可以参照上述将第一激光遮挡层131位于第一区域N的部分去除的描述,在此不再赘述。In some embodiments, to remove the portion of the second laser shielding layer 132 located in the second region P, reference may be made to the above description of removing the portion of the first laser shielding layer 131 located in the first region N, which will not be described again here.
其中,对上述第三电极图案123的具体制备方法也不做限定,与上述第一电极图案121相类似地,该第三电极图案123除了采用激光辐照工艺制备以外,也可以采用与丝网印刷、电镀、激光转印和银包银等技术联合的方式制备得到,在此不做具体限定。The specific preparation method of the above-mentioned third electrode pattern 123 is not limited. Similar to the above-mentioned first electrode pattern 121, in addition to being prepared by laser irradiation process, the third electrode pattern 123 can also be prepared by wire mesh. It can be prepared by a combination of technologies such as printing, electroplating, laser transfer and silver coating, and is not specifically limited here.
在一些实施例中,如图4和图5所示,在S302)、采用激光辐照工艺制备第三电极图案123之前,S301)、在硅基底层11的第二侧11b且至少在第二区域P形成第二激光遮挡层132之后,制备方法还包括:In some embodiments, as shown in FIGS. 4 and 5 , before S302) using a laser irradiation process to prepare the third electrode pattern 123, S301), on the second side 11b of the silicon base layer 11 and at least on the second After the second laser shielding layer 132 is formed in the region P, the preparation method further includes:
S300)、在硅基底层11的第二侧11b且位于非受光区域形成第四电极图案124;S300), forming a fourth electrode pattern 124 on the second side 11b of the silicon base layer 11 and located in the non-light-receiving area;
S302)、采用激光辐照工艺制备第三电极图案123,包括:S302), using a laser irradiation process to prepare the third electrode pattern 123, including:
对第四电极图案124进行激光辐照处理,制备第三电极图案123。The fourth electrode pattern 124 is subjected to laser irradiation processing to prepare the third electrode pattern 123.
在这些实施例中,该第四电极图案124可以为银浆,在采用激光辐照工艺对第四电极图案124辐照处理之后,第四电极图案124中的银在超高能量下与第二透明导电氧化物层162形成欧姆接触,或者,第四电极图案124中的银与第二激光遮挡层132位于非受光区域Z的部分熔合,形成第三电极图案123,均能够提高第三电极图案123的导电性能和其与硅基底层11的结合性能。In these embodiments, the fourth electrode pattern 124 may be a silver paste. After the fourth electrode pattern 124 is irradiated using a laser irradiation process, the silver in the fourth electrode pattern 124 interacts with the second electrode pattern 124 under ultra-high energy. The transparent conductive oxide layer 162 forms an ohmic contact, or the silver in the fourth electrode pattern 124 is fused with the part of the second laser shielding layer 132 located in the non-light-receiving area Z to form the third electrode pattern 123, both of which can improve the third electrode pattern. The conductive properties of 123 and its bonding properties with the silicon base layer 11.
第二方面,本申请的一些实施例提供一种如第一方面所述的制备方法制备的太阳能电池。In a second aspect, some embodiments of the present application provide a solar cell prepared by the preparation method described in the first aspect.
该太阳能电池的受光区域在制备过程中受到激光辐照较少,可以减少硅基底层的激光损伤,从而可以提高该太阳能电池的效率。The light-receiving area of the solar cell is less irradiated by laser during the preparation process, which can reduce laser damage to the silicon base layer, thereby improving the efficiency of the solar cell.
第三方面,本申请的一些实施例提供一种光伏组件,该光伏组件包括:多个串联和/或并联连接的太阳能电池;In a third aspect, some embodiments of the present application provide a photovoltaic module, which includes: a plurality of solar cells connected in series and/or in parallel;
至少一个所述太阳能电池为如第二方面所述的太阳能电池。At least one of the solar cells is a solar cell as described in the second aspect.
由于光伏组件包括由上述实施例提供的太阳能电池,因此,具有与上述第二方面所述的太阳能电池相同的有益效果,在此不再赘述。Since the photovoltaic module includes the solar cell provided by the above embodiment, it has the same beneficial effects as the solar cell described in the second aspect, which will not be described again here.
第四方面,本申请的一些实施例提供一种光伏系统,包括如第三方面所述的光伏组件。In a fourth aspect, some embodiments of the present application provide a photovoltaic system, including the photovoltaic component as described in the third aspect.
由于光伏系统包括由上述实施例提供的光伏组件,因此,具有与上述第三方面所述的光伏组件相同的有益效果,在此不再赘述。Since the photovoltaic system includes the photovoltaic module provided by the above embodiment, it has the same beneficial effects as the photovoltaic module described in the above third aspect, which will not be described again here.
光伏系统可应用在光伏电站中,例如地面电站、屋顶电站、水面电站等,也可应用在利用太阳能进行发电的设备或者装置上,例如用户太阳能电源、太阳能路灯、太阳能汽车、太阳能建筑等等。当然,可以理解的是,光伏系统的应用场景不限于此,也即是说,光伏系统可应用在需要采用太阳能进行发电的所有领域中。以光伏发电系统网为例,光伏系统可包括光伏阵列、汇流箱和逆变器,光伏阵列可为多个太阳能电池的阵列组合,例如,多个太阳能电池可组成多个光伏阵列,光伏阵列连接汇流箱,汇流箱可对光伏阵列所产生的电流进行汇流,汇流后的电流流经逆变器转换成市电电网要求的交流电之后接入市电网络以实现太阳能供电。Photovoltaic systems can be used in photovoltaic power stations, such as ground power stations, rooftop power stations, water surface power stations, etc., or in equipment or devices that use solar energy to generate electricity, such as user solar power supplies, solar street lights, solar cars, solar buildings, etc. Of course, it is understandable that the application scenarios of photovoltaic systems are not limited to this, that is to say, photovoltaic systems can be applied in all fields that require solar energy to generate electricity. Taking the photovoltaic power generation system network as an example, the photovoltaic system can include a photovoltaic array, a combiner box and an inverter. The photovoltaic array can be an array combination of multiple solar cells. For example, multiple solar cells can form multiple photovoltaic arrays. The photovoltaic arrays are connected The combiner box can combine the current generated by the photovoltaic array. The combined current flows through the inverter and is converted into the alternating current required by the mains grid and then connected to the mains network to realize solar power supply.
为了对本申请实施例的技术效果进行客观评价,将通过如下实施例和对比例对本申请进行详细地示例性地说明。In order to objectively evaluate the technical effects of the embodiments of the present application, the present application will be exemplarily described in detail through the following examples and comparative examples.
在以下的实施例和对比例中,所有原料均可以通过商业形式购买获得,并且为了保持实验的可靠性,如下实施例和对比例所采用的原料均具有相同的物理和化学参数或经过同样的处理方法制备得到。In the following examples and comparative examples, all raw materials can be purchased commercially, and in order to maintain the reliability of the experiment, the raw materials used in the following examples and comparative examples all have the same physical and chemical parameters or have undergone the same process. Processing methods are prepared.
实施例1Example 1
实施例1的太阳能电池的制备方法如下:The preparation method of the solar cell of Example 1 is as follows:
步骤1)、对N型硅基底进行清洗、制绒,得到制绒后的N型硅基底;Step 1): Clean and texturize the N-type silicon substrate to obtain a texturized N-type silicon substrate;
步骤2)、在制绒后的N型硅基底的正面制备第一本征非晶硅层、P掺杂的非晶硅层和第一TCO(Transparent Conductive Oxide,透明导电氧化物)层;Step 2), preparing a first intrinsic amorphous silicon layer, a P-doped amorphous silicon layer and a first TCO (Transparent Conductive Oxide, transparent conductive oxide) layer on the front side of the textured N-type silicon substrate;
步骤3)、采用磁控溅射在第一TCO层上位于受光区域和非受光区域均制备铜金属层,铜金属层的厚度为100nm;Step 3): Use magnetron sputtering to prepare a copper metal layer on the first TCO layer in both the light-receiving area and the non-light-receiving area. The thickness of the copper metal layer is 100nm;
步骤4)、采用丝网印刷工艺在铜金属层上制备正面的导电浆料图案,并采用激光辅助烧结制备正面电极图案;Step 4): Use a screen printing process to prepare a front conductive paste pattern on the copper metal layer, and use laser-assisted sintering to prepare a front electrode pattern;
步骤5)、将铜金属层位于受光区域的部分采用硫酸和双氧水的混合溶剂溶解去除,其中,硫酸的质量浓度为10%,双氧水的质量浓度为3%;Step 5): Dissolve and remove the part of the copper metal layer located in the light-receiving area with a mixed solvent of sulfuric acid and hydrogen peroxide, where the mass concentration of sulfuric acid is 10% and the mass concentration of hydrogen peroxide is 3%;
步骤6)、在N型硅基底的背面制备第二本征非晶硅层、B掺杂的非晶硅层和第二TCO层;Step 6), preparing a second intrinsic amorphous silicon layer, a B-doped amorphous silicon layer and a second TCO layer on the back side of the N-type silicon substrate;
步骤7)、采用磁控溅射在第二TCO层上位于受光区域和非受光区域均制备铜金属层,铜金属层的厚度为30nm;Step 7): Use magnetron sputtering to prepare a copper metal layer on the second TCO layer in both the light-receiving area and the non-light-receiving area. The thickness of the copper metal layer is 30nm;
步骤8)、采用丝网印刷工艺在步骤7)的铜金属层上制备背面的导电浆料图案,并采用激光辅助烧结制备背面电极图案;Step 8), using a screen printing process to prepare the conductive paste pattern on the back on the copper metal layer in step 7), and using laser-assisted sintering to prepare the back electrode pattern;
步骤9)、将步骤7)所得到的铜金属层位于受光区域的部分采用硫酸和双氧水的混合溶剂溶解去除,其中,硫酸的质量浓度为10%,双氧水的质量浓度为3%。Step 9): Dissolve and remove the portion of the copper metal layer obtained in step 7) located in the light-receiving area using a mixed solvent of sulfuric acid and hydrogen peroxide, where the mass concentration of sulfuric acid is 10% and the mass concentration of hydrogen peroxide is 3%.
实施例2Example 2
实施例2中太阳能电池的制备方法与实施例1中太阳能电池的制备方法基本相同,不同之处在于:The preparation method of the solar cell in Example 2 is basically the same as the preparation method of the solar cell in Example 1, except that:
在步骤3)中,在第一TCO层上位于受光区域和非受光区域均制备镍金属层;In step 3), prepare a nickel metal layer on both the light-receiving area and the non-light-receiving area on the first TCO layer;
在步骤5)、将镍金属层位于受光区域的部分采用硝酸溶解去除,其中,硝酸的质量浓度为10%;In step 5), the part of the nickel metal layer located in the light-receiving area is removed by dissolving and removing it with nitric acid, wherein the mass concentration of nitric acid is 10%;
在步骤7)中,在第二TCO层上位于受光区域和非受光区域均制备镍金属层;In step 7), prepare a nickel metal layer on both the light-receiving area and the non-light-receiving area on the second TCO layer;
在步骤9)中,将步骤7)所得到的镍金属层位于受光区域的部分采用硝酸溶解去除,其中,硝酸的质量浓度为10%。In step 9), the portion of the nickel metal layer obtained in step 7) located in the light-receiving area is dissolved and removed with nitric acid, where the mass concentration of nitric acid is 10%.
实施例3Example 3
实施例3中太阳能电池的制备方法与实施例1中太阳能电池的制备方法基本相同,不同之处在于:The preparation method of the solar cell in Example 3 is basically the same as the preparation method of the solar cell in Example 1, except that:
在步骤3)中,在第一TCO层上位于受光区域和非受光区域均制备锡金属层;In step 3), prepare a tin metal layer on both the light-receiving area and the non-light-receiving area on the first TCO layer;
在步骤5)、将锡金属层位于受光区域的部分采用硫酸溶解去除,其中,硫酸的质量浓度为10%;In step 5), the portion of the tin metal layer located in the light-receiving area is dissolved and removed with sulfuric acid, wherein the mass concentration of sulfuric acid is 10%;
在步骤7)中,在第二TCO层上位于受光区域和非受光区域均制备锡金属层;In step 7), prepare a tin metal layer on the second TCO layer in both the light-receiving area and the non-light-receiving area;
在步骤9)中,将步骤7)所得到的锡金属层位于受光区域的部分采用硫酸溶解去除,其中,硫酸的质量浓度为10%。In step 9), the portion of the tin metal layer obtained in step 7) located in the light-receiving area is dissolved and removed with sulfuric acid, where the mass concentration of sulfuric acid is 10%.
实施例4Example 4
实施例4中太阳能电池的制备方法与实施例1中太阳能电池的制备方法基本相同,不同之处在于:The preparation method of the solar cell in Example 4 is basically the same as the preparation method of the solar cell in Example 1, except that:
步骤3)中,仅在第一TCO层上位于第一区域(从正面电极图案的边沿向远离正面电极图案的方向延伸的距离为0.1mm)和非受光区域形成铜金属层;In step 3), a copper metal layer is formed only on the first TCO layer in the first area (the distance extending from the edge of the front electrode pattern in a direction away from the front electrode pattern is 0.1 mm) and the non-light-receiving area;
步骤7)中,仅在第二TCO层上位于第二区域(从背面电极图案的边沿向远离背面电极图案的方向延伸的距离为0.1mm)和非受光区域形成铜金属层。In step 7), a copper metal layer is formed only on the second TCO layer in the second area (the distance extending from the edge of the back electrode pattern in a direction away from the back electrode pattern is 0.1 mm) and the non-light-receiving area.
实施例5Example 5
实施例5中太阳能电池的制备方法与实施例2中太阳能电池的制备方法基本相同,不同之处在于:The preparation method of the solar cell in Example 5 is basically the same as the preparation method of the solar cell in Example 2, except that:
步骤3)中,仅在第一TCO层上位于第一区域(从正面电极图案的边沿向远离正面电极图案的方向延伸的距离为0.1mm)和非受光区域形成镍金属层;In step 3), a nickel metal layer is formed only on the first TCO layer in the first area (the distance extending from the edge of the front electrode pattern in a direction away from the front electrode pattern is 0.1 mm) and the non-light-receiving area;
步骤7)中,仅在第二TCO层上位于第二区域(从背面电极图案的边沿向远离背面电极图案的方向延伸的距离为0.1mm)和非受光区域形成镍金属层。In step 7), a nickel metal layer is formed only on the second TCO layer in the second area (the distance extending from the edge of the back electrode pattern in a direction away from the back electrode pattern is 0.1 mm) and the non-light-receiving area.
实施例6Example 6
实施例6中太阳能电池的制备方法与实施例3中太阳能电池的制备方法基本相同,不同之处在于:The preparation method of the solar cell in Example 6 is basically the same as the preparation method of the solar cell in Example 3, except that:
步骤3)中,仅在第一TCO层上位于第一区域(从正面电极图案的边沿向远离正面电极图案的方向延伸的距离为0.1mm)和非受光区域形成锡金属层;In step 3), a tin metal layer is formed only on the first TCO layer in the first area (the distance extending from the edge of the front electrode pattern in a direction away from the front electrode pattern is 0.1 mm) and the non-light-receiving area;
步骤7)中,仅在第二TCO层上位于第二区域(从背面电极图案的边沿向远离背面电极图案的方向延伸的距离为0.1mm)和非受光区域形成锡金属层。In step 7), a tin metal layer is formed only on the second TCO layer in the second area (the distance extending from the edge of the back electrode pattern in a direction away from the back electrode pattern is 0.1 mm) and the non-light-receiving area.
对比例1Comparative example 1
对比例1中太阳能电池的制备方法与实施例1的制备方法基本相同,不同之处在于:The preparation method of the solar cell in Comparative Example 1 is basically the same as that of Example 1, except that:
在步骤4)和步骤8)之前均不在第一TCO层上和第二TCO层上制备铜金属层。No copper metal layer is prepared on the first TCO layer and the second TCO layer before step 4) and step 8).
测试例test case
对实施例1~6和对比例1提供的太阳能电池的PCE,以及太阳能电池中的正面电极图案的线阻、串联电阻(Rs)和焊接压力在同等的条件下进行测试,具体测试结果如下表1所示:The PCE of the solar cells provided in Examples 1 to 6 and Comparative Example 1, as well as the line resistance, series resistance (Rs) and welding pressure of the front electrode pattern in the solar cell were tested under the same conditions. The specific test results are as follows: 1 shows:
表1Table 1
由表1可知,本申请实施例提供的太阳能电池的光电转换效率相对于对比例1具有较大程度的提高,且正面电极图案的线阻、串联电阻均有较大程度的降低,而焊接拉力也随着金属层的材料不同有不同程度的提高或者持平,这说明本申请实施例提供的太阳能电池的制备方法起到了减少激光损伤,提高光电转换效率的技术效果。As can be seen from Table 1, the photoelectric conversion efficiency of the solar cell provided by the embodiment of the present application is greatly improved compared to Comparative Example 1, and the line resistance and series resistance of the front electrode pattern are greatly reduced, while the welding pull force Also depending on the material of the metal layer, there are varying degrees of improvement or the same level, which shows that the solar cell preparation method provided in the embodiment of the present application has the technical effect of reducing laser damage and improving photoelectric conversion efficiency.
以上所述实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above-described embodiments can be combined in any way. To simplify the description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, All should be considered to be within the scope of this manual.
以上所述实施例仅表达了本申请的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对申请专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本申请构思的前提下,还可以做出若干变形和改进,这些都属于本申请的保护范围。因此,本申请专利的保护范围应以所附权利要求为准。The above-described embodiments only express several implementation modes of the present application, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the patent application. It should be noted that, for those of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all fall within the protection scope of the present application. Therefore, the protection scope of this patent application should be determined by the appended claims.
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CN114203833A (en) * | 2021-11-30 | 2022-03-18 | 福建金石能源有限公司 | Manufacturing method of back contact heterojunction solar cell with low laser damage |
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CN118658895A (en) * | 2024-05-31 | 2024-09-17 | 天合光能股份有限公司 | Heterojunction solar cell and preparation method thereof, photovoltaic module |
CN118658895B (en) * | 2024-05-31 | 2025-02-28 | 天合光能股份有限公司 | Heterojunction solar cell and preparation method thereof, photovoltaic module |
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