CN117524816B - X-ray tube and anode recovery method - Google Patents
X-ray tube and anode recovery method Download PDFInfo
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- CN117524816B CN117524816B CN202410009103.8A CN202410009103A CN117524816B CN 117524816 B CN117524816 B CN 117524816B CN 202410009103 A CN202410009103 A CN 202410009103A CN 117524816 B CN117524816 B CN 117524816B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
- H01J35/105—Cooling of rotating anodes, e.g. heat emitting layers or structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/52—Recovery of material from discharge tubes or lamps
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Abstract
The invention relates to the technical field of X-ray tubes, and provides an X-ray tube and an anode recycling method, which comprises the following steps: a tube shell, wherein the tube cavity of the tube shell forms a vacuum environment; the cathode insulation end sealing assembly is arranged on the tube shell; the cathode assembly is arranged on the cathode insulation end seal assembly and is positioned in the pipe cavity; the anode insulation end sealing assembly is arranged on the tube shell; the anode in the tube cavity comprises an anode handle, a target disc matrix, a heat dissipation compact body, a protection transition layer and a heat radiation enhancement layer, and the anode handle is arranged on the anode insulation end sealing assembly. The invention can obviously lighten the adsorption of the exposed surface of the anode to gas and organic solvent, avoid the problem of ignition in the tube shell, avoid the cracking phenomenon of the heat radiation enhancement layer through the double-layer structure of the heat radiation enhancement layer and the protection transition layer, and realize the purpose of improving the heat radiation effect of the anode.
Description
Technical Field
The invention relates to the technical field of X-ray tubes, in particular to an X-ray tube and an anode recycling method.
Background
Target disk assemblies are used in many applications, such as in an electronic computed tomography (Computed Tomography, CT) technique, where an electron beam is used to bombard a target layer of a target disk to generate radiation.
Specifically, electrons are generated by heating a filament of tungsten or tungsten alloy of the cathode, and then the electrons are accelerated by applying high voltage between the cathode and the anode, so that the electrons bombard a target surface layer formed by a metal material, and the high-speed electrons act on metal target atoms to emit rays outwards through bremsstrahlung or characteristic radiation.
In practical application of the anode target disk assembly, most of the input energy is converted into heat after the accelerated electron beam is used for bombarding the target surface layer, and the accumulated heat is easy to damage the anode target disk assembly. This heat is efficiently dissipated by designing the functional structure inside the bulb, otherwise the accumulated heat can cause serious damage to the components such as the vacuum bearing, the rotor, the target disk, etc.
It has been found that in one prior art solution, the heat distribution area can be increased by rotating the target layer, but the heat dissipation efficiency is limited due to the rotation rate.
In another prior art solution, graphite material is used to dissipate the accumulated heat, such as by affixing bulk graphite to the back of the target disk substrate to increase the heat capacity and heat radiation performance of the anode target disk assembly.
However, it has been found through further studies that the following problems are liable to occur due to the problem of loose porosity of the microstructure of the graphite material.
First point: the porous structure of the graphite material is easy to adsorb gas impurities, such as oxygen, nitrogen, hydrogen, steam, carbon monoxide, argon and other gases, organic solvents, greasy dirt and the like, so that the quality of the anode target plate assembly is reduced, and the tube core ignition problem occurs when the quality is serious. In particular, these gaseous or liquid organic molecules are not easily removed completely during the cleaning, vacuum degassing and bake out processes, resulting in a small amount of residue. The gas residue may result in poor vacuum in the die and the organic molecule residue may crack into free carbon under heating, which may create die ignition problems.
Second point: graphite fracture risk is higher, needs long-time preheating when leading to equipment to use, can't heat up and cool down fast, and the thermal shock resistance of positive pole target disk subassembly reduces, and production efficiency reduces.
Third point: in the application of the anode target disc assembly, under the conditions of failure of the bulb tube and damage of the tube shell, insulating oil is easy to soak graphite at high temperature, and the porous structure of the graphite is easy to cause the insulating oil to permeate into the graphite and carbonize, so that a target disc substrate cannot be recovered, and the production cost is increased.
Fourth point: graphite has weaker mechanical property, lower bending strength and compressive strength, insufficient hardness and poor wear resistance, and is easy to machine, ultrasonically clean or drop tiny graphite particles due to the characteristic of a porous structure during vacuum heat treatment, and the peeled particles are likely to influence the normal operation of a bearing once entering a tube core along with parts.
In addition, the related art disclosed in some prior patent documents has a problem and disadvantage:
first, the prior patent (EP 4006949A 1) discloses a transmissive target, specification [0095 ]]The segment describes: typical materials used as diamond allotropes are graphite, graphene and sp only 2 And glass carbon formed by bonds. These materials may be used to form the carbon-containing region 45. That is, in the prior patent (EP 4006949 A1), the "glassy carbon" may replace the "graphite" as long as it has the technical effect of "heat dissipation". Referring to fig. 4A and 4B, a carbon-containing region 45 is located between the target layer 42 and the diamond substrate 46, and the heat dissipation effect of the carbon-containing region 45 is also limited.
Second, prior patent (CN 107068524 a) discloses an apparatus for X-ray generation and a method of making the same, which is paragraph [0030] of the specification, such materials may not be limited to use as X-ray emitting materials, but may be used for surface emissivity enhancement. However, see again paragraph [0029] of its specification and fig. 4: in one embodiment, layer 92 is tungsten, layer 93 is rhenium, and layer 94 is an alloy of tungsten and rhenium, which merely describes how the X-ray emissive material is applied to the target layer of the target disk. Such a structure for improving the surface emissivity is also a common and effective technique.
Third, the prior literature (preparation of high specific strength glassy carbon-based high temperature composite heat shield material and performance research, university of aviation aerospace in south Beijing, tang Kaiyuan) correspondingly discloses: the outer dense shell layer of the glassy carbon matrix is made by precursor dip pyrolysis (PIP). The precursor has a solids content of 78% to 85% (see page 20, paragraph 3 of this prior document). It is speculated that the glass-to-carbon transition is closely related to the e-stage, which is at a temperature of 500 ℃ to 600 ℃ (see page 26, paragraph 2 of this prior document). Further, this prior document does not mention how to provide a "glassy carbon layer" on the anode.
Fourth, the prior patent (CN 103370764 a) discloses an anode disk element with a refractory intermediate layer and VPS focal track, which still has poor heat dissipation.
Therefore, a new X-ray tube is needed to solve the problem of heat dissipation of the anode and reduce the problem of gas impurity adsorption.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, the present invention is to provide an X-ray tube and an anode recycling method, which can significantly reduce the adsorption of the exposed surface of the anode to the gas and the organic solvent, avoid the occurrence of a sparking problem in the tube shell, avoid the occurrence of cracking phenomenon of the heat radiation enhancement layer by the double-layer structure of the heat radiation enhancement layer and the protection transition layer, and improve the heat dissipation effect of the anode.
In order to solve the above technical problems, the present invention provides an X-ray tube, comprising:
a tube shell, wherein the tube cavity of the tube shell forms a vacuum environment;
the cathode insulation end sealing assembly is arranged on the tube shell;
the cathode assembly is arranged on the cathode insulation end seal assembly and is positioned in the pipe cavity;
the anode insulation end sealing assembly is arranged on the tube shell;
the anode is positioned in the tube cavity and comprises an anode handle, a target disc matrix, a heat dissipation compact body, a protection transition layer and a heat radiation enhancement layer, wherein the anode handle is arranged on the anode insulation end sealing assembly; the back of the target disc substrate is one surface of the target disc substrate, which is opposite to the cathode assembly, the heat dissipation compact body is arranged on the back of the target disc substrate and consists of a graphite material layer and a glassy carbon material layer, the graphite material layer is in contact connection with the back of the target disc substrate, and the glassy carbon material layer is arranged on the outer surface of the graphite material layer; the protection transition layer is arranged on the outer side surface of the glassy carbon material layer, and the thermal radiation enhancement layer is arranged on the outer side surface of the protection transition layer.
Preferably, the X-ray tube further comprises a bearing assembly, the bearing assembly being disposed on the anode insulating end seal assembly; the anode is of a rotary structure, and an anode handle of the anode is rotatably arranged on the anode insulation end sealing assembly around the axis of the anode handle through a bearing assembly.
Preferably, the graphite material layer of the heat dissipation compact is welded to the back surface of the target disk substrate.
Preferably, the graphite material layer is vacuum brazed to the back side of the target disk substrate.
Preferably, the outer side surface of the graphite material layer, which is not contacted with the substrate of the target disk, is completely coated by the glassy carbon material layer, and only the glassy carbon material layer is exposed in the vacuum environment of the tube cavity.
Preferably, the glassy carbon material layer is formed on the graphite material layer through an impregnation process or a cracking process;
the dipping process comprises the following steps: s11, manufacturing an anode radiator, wherein the anode radiator is made of graphite material, and the local outer surface of the anode radiator is shielded; s12, immersing the anode radiator in raw materials of an immersion process, wherein the raw materials of the immersion process are glassy carbon soluble compound solutions, the concentration of the raw materials of the immersion process is selected from 20% to 70%, the temperature of the immersion process is selected from 200 ℃ to 450 ℃, the glassy carbon material layer is formed on the unmasked surface of the anode radiator, and the rest structure of the anode radiator except the glassy carbon material layer is a graphite material layer;
the cracking process comprises the following steps: s21, manufacturing an anode radiator, wherein the anode radiator is made of graphite material, and the local outer surface of the anode radiator is shielded; s22, immersing the anode radiator in fissionable material liquid, forming a fissionable material layer on the unmasked surface of the anode radiator, firstly heating the fissionable material layer, and then carbonizing the fissionable material layer to form the glassy carbon material layer; the process temperature of the heating treatment is selected from 250 ℃ to 450 ℃, the process temperature of the carbonization treatment is selected from 300 ℃ to 500 ℃, the environmental concentration of carbon elements of the carbonization treatment is selected from 30% to 60%, the glassy carbon material layer is formed on the unmasked surface of the anode radiator, and the rest structure of the anode radiator except the glassy carbon material layer is a graphite material layer.
Preferably, the thermal expansion coefficient of the protective transition layer is equal to or smaller than that of the thermal radiation enhancement layer, and the ratio between the two thermal expansion coefficients is 0.8-1.
Preferably, the material of the thermal radiation enhancement layer has a thermal radiation emissivity of 0.7 or more.
Preferably, the material for protecting the transition layer comprises a transition main body material and a transition doped metal, the transition main body material is metal carbide, the metal element of the metal carbide is selected from at least one of IVB and VB group metals, and the metal element of the transition doped metal is selected from at least one of IVB and VB group metals.
Preferably, the material of the thermal radiation enhancement layer comprises an enhancement host material and an enhancement doped metal, the enhancement host material is selected from at least one of metal oxides, metal nitrides and metal carbides, the metal element of the metal oxides is selected from at least one of metals of groups IVB, VB and VIB, the metal element of the metal nitrides is selected from at least one of metals of groups IVB, VB and VIB, the metal element of the metal carbides is selected from at least one of metals of groups IVB, VB and VIB, and the metal element of the enhancement doped metal is selected from at least one of metals of groups IVB, VB and VIB.
Preferably, the protection transition layer and the heat radiation enhancement layer are connected in advance to form a double-layer film structure, and are arranged on the outer side surface of the heat dissipation compact body.
The invention also provides an anode recovery method for processing the X-ray tube, comprising the following steps:
sequentially or simultaneously removing a thermal radiation enhancement layer and a protection transition layer on the external surface of the heat dissipation compact body of the anode;
removing the glassy carbon material layer in the heat dissipation compact body of the anode;
in the remaining portion of the anode, the target disk substrate and graphite material layer are recovered.
As described above, the X-ray tube and the anode recovery method of the present invention have the following advantageous effects:
the main innovation of the X-ray tube is that the structural design of the anode is as follows: the structural design of the anode is suitable for the application scene of an X-ray tube, mainly utilizes the compactness of a heat dissipation compact body and the enhanced heat dissipation of a heat radiation enhancement layer, obviously reduces the adsorption of the anode to gas and organic solvents, and improves the heat dissipation performance of the anode. First point: the porosity of the outer side surface of the heat dissipation compact body is very low, the adsorption of gas and organic solvent is obviously reduced, in addition, the spalling in the pretreatment process can be avoided without special surface treatment, and the heat insulating oil is not easy to permeate into the high-temperature heat dissipation compact body and can not react with the heat dissipation compact body. There is also a more important technical effect: because the outer side surface of the heat dissipation compact body is difficult to be attached with organic molecules, free elements can not be generated when the heat dissipation compact body is used, and the problem of ignition in a tube shell is avoided. The second point is that the heat radiation effect of the anode can be affected more or less due to the compactness of the heat radiation compact body, and the heat radiation enhancement layer is arranged on part of the surface of the heat radiation compact body through the protection transition layer, so that the heat radiation efficiency of the heat radiation compact body is higher, the heat radiation effect of the heat radiation compact body is further improved, and the overall heat radiation effect of the anode is further improved. The protective transition layer is arranged between the heat radiation compact body and the heat radiation enhancement layer, because the heat expansion coefficients of the heat radiation enhancement layer and the heat radiation compact body are unequal, the heat radiation enhancement layer can be cracked due to the factors such as heat expansion and cold contraction, and the like, so that the seepage prevention function and the heat radiation efficiency are influenced. It should be noted that the thickness of the protective transition layer should not be too high, which would affect the heat dissipation performance of the heat dissipation compact; the thickness should not be too low, and too low can lead to insufficient protection of the transition layer, affect the anti-seepage function and affect the heat radiation efficiency. Therefore, the X-ray tube can obviously lighten the adsorption of the exposed surface of the anode to gas and organic solvent, avoid the problem of ignition in a tube shell, avoid the cracking phenomenon of the heat radiation enhancement layer through the double-layer structure of the heat radiation enhancement layer and the protection transition layer, and improve the overall heat dissipation effect of the anode.
Drawings
Fig. 1 is a cross-sectional view of an X-ray tube in accordance with an embodiment of the present invention.
Fig. 2 is a cross-sectional view of an anode in an embodiment of the invention.
Description of element numbers: the cathode-insulating end seal assembly 2, the cathode assembly 3, the anode-insulating end seal assembly 4, the bearing assembly 5, the anode 6, the anode shank 61, the target disk substrate 62, the heat dissipation compact 63, the graphite material layer 631, the glassy carbon material layer 632, the protective transition layer 64, the heat radiation enhancement layer 65, the target layer 66, and the window assembly 7.
Detailed Description
Further advantages and effects of the present invention will become apparent to those skilled in the art from the disclosure of the present invention, which is described by the following specific examples.
It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for the purpose of understanding and reading the disclosure, and are not intended to limit the scope of the invention, which is defined by the appended claims, but rather by the claims, unless otherwise indicated, and unless otherwise indicated, all changes in structure, proportions, or otherwise, used by those skilled in the art, are included in the spirit and scope of the invention. Also, the terms such as "upper," "lower," "left," "right," "middle," and "a" and the like recited in the present specification are merely for descriptive purposes and are not intended to limit the scope of the invention, but are intended to provide relative positional changes or modifications without materially altering the technical context in which the invention may be practiced.
As shown in fig. 1 and 2, in order to solve the above technical problems, the present invention provides an X-ray tube, comprising:
the tube shell 1, the tube cavity 11 of the tube shell 1 forms a vacuum environment;
the cathode insulation end seal assembly 2 is arranged on the tube shell 1;
a cathode assembly 3, the cathode assembly 3 being disposed on the cathode insulation end seal assembly 2 and being located in the lumen 11;
the anode insulation end seal assembly 4 is arranged on the tube shell 1;
an anode 6 is positioned in the lumen 11, the anode 6 comprising an anode stem 61, a target disk substrate 62, a heat dissipating compact 63, a protective transition layer 64, and a thermal radiation enhancement layer 65, the anode stem 61 being disposed on the anode insulating end seal assembly 4.
Basic principle of the above-mentioned X-ray tube: the tube shell 1 is used for providing a vacuum environment, a window assembly 7 is arranged on the tube shell 1, and the window assembly 7 is used for transmitting X rays; a cathode assembly 3 is arranged on the cathode insulation end seal assembly 2 and is positioned in the tube cavity 11, and the end part of the cathode assembly 3 is used for emitting electron beams; the anode 6 is arranged semi-suspended inside the envelope 1 and the end face of the anode 6 is intended to be bombarded by an electron beam for the generation of X-rays.
The main innovation of the above-mentioned X-ray tube is the structural design of the anode 6: the anode 6 includes an anode stem 61, a target disk substrate 62, a heat dissipating compact 63, a protective transition layer 64, and a heat radiation enhancing layer 65. The anode stem 61, the target plate base 62, the heat dissipation compact 63, the protective transition layer 64, and the heat radiation enhancement layer 65 may be sequentially connected. The structural design of the anode 6 is suitable for the application scene of an X-ray tube, and mainly utilizes the compactness of the heat dissipation compact body 63 and the enhanced heat dissipation of the heat radiation enhancement layer 65 to obviously reduce the adsorption of the anode 6 to gas and organic solvents and improve the heat dissipation performance of the anode 6.
Specifically, the first point: the porosity of the outer surface of the heat dissipating compact 63 is very low, the adsorption of gas and organic solvent is remarkably reduced, in addition, peeling during pretreatment can be avoided without special surface treatment, and the hot insulating oil is not easy to penetrate into the inside of the high-temperature heat dissipating compact 63 and does not react with the inside. There is also a more important technical effect: since the organic molecules are difficult to adhere to the outer surface of the heat dissipation compact 63, the heat dissipation compact 63 does not generate free elements when in use, and the problem of ignition in the tube shell 1 is avoided. Second, since the compactness of the heat dissipation compact body 63 itself affects the heat dissipation effect of the anode 6 more or less, the heat radiation enhancement layer 65 is disposed on a part of the surface of the heat dissipation compact body 63 through the protection transition layer 64, so that the heat radiation efficiency of the heat dissipation compact body 63 is higher, and the heat dissipation effect of the heat dissipation compact body 63 is improved, thereby improving the overall heat dissipation effect of the anode 6. The reason why the protective transition layer 64 is disposed between the heat dissipating compact 63 and the heat dissipating enhancement layer 65 is that the heat expansion coefficients of the heat dissipating compact 63 and the heat dissipating enhancement layer 65 are not equal, which may cause cracking of the heat dissipating enhancement layer 65 due to thermal expansion and contraction, thereby affecting the anti-seepage function and the heat dissipating efficiency. It should be noted that the thickness of the protective transition layer 64 should not be too high, which would affect the heat dissipation performance of the heat dissipation compact; the thickness should not be too low, which would result in insufficient protection of the transition layer 64, affect the barrier function and affect the heat radiation efficiency.
Therefore, the X-ray tube of the present invention can significantly reduce the adsorption of the gas and the organic solvent on the exposed surface of the anode 6, avoid the occurrence of ignition problem in the tube case 1, avoid the occurrence of cracking phenomenon of the thermal radiation enhancement layer 65 by the double-layer structure of the thermal radiation enhancement layer 65 and the protection transition layer 64, and improve the overall heat dissipation effect of the anode 6.
Referring mainly to fig. 2, the front surface of the target disc substrate 62 is the surface of the target disc substrate 62 facing the cathode assembly 3, the back surface of the target disc substrate 62 is the surface of the target disc substrate 62 facing away from the cathode assembly 3, in order to further reduce the adsorption of the heat dissipation compact 63 to the gas and the organic solvent, the heat dissipation compact 63 is disposed on the back surface of the target disc substrate 62, the heat dissipation compact 63 is composed of a graphite material layer 631 and a glassy carbon material layer 632 (the thickness dimension of the glassy carbon material layer 632 shown in fig. 2 is not the actual dimension, and a suitable thickening and drawing treatment is performed for the convenience of those skilled in the art), the graphite material layer 631 is in contact connection with the back surface of the target disc substrate 62, and the glassy carbon material layer 632 is disposed on the outer surface of the graphite material layer 631; the protective transition layer 64 is disposed on an outer surface of the glassy carbon material layer 632, and the thermal radiation enhancement layer 65 is disposed on an outer surface of the protective transition layer 64. The back surface of the target disc substrate 62 is the surface of the target disc substrate 62 facing away from the cathode assembly 3, the heat dissipation compact 63 is used for conducting and dissipating heat of the target disc substrate 62, and the heat dissipation compact 63 may be a laminated structure formed by a graphite material layer 631 and a glassy carbon material layer 632. Because the glassy carbon material layer 632 covers the outer surface of the graphite material layer 631, the heat dissipation effect of the graphite material layer 631 is affected to a certain extent, and the heat radiation enhancement layer 65 is arranged on the glassy carbon material layer 632 through the protection transition layer 64, so that the heat radiation efficiency of the heat dissipation compact 63 is higher.
Specifically, the transmission type target disclosed in the prior patent (EP 4006949 A1) is to form a "carbon-containing region" on the surface layer of the diamond substrate due to the thermal structural change, and the "carbon-containing region" may be glassy carbon, only to increase the connection stability and thermal conductivity between the diamond substrate and the target layer. Referring to fig. 4A and 5B of the prior art (EP 4006949 A1), a carbon-containing region 45 made of vitreous carbon is located between the target layer 42 and the region 46 of the diamond substrate 41, that is, the carbon-containing region 45 made of vitreous carbon is in a non-exposed state.
The essence of the present invention is the new application invention using known materials (i.e. glassy carbon materials) compared to the transmissive targets disclosed in the prior patent (EP 4006949 A1). That is, the heat dissipation compact 63 thus provided has a more efficient heat dissipation effect and an impurity adsorption prevention effect. Specifically, the heat dissipation compact 63 is a laminated structure formed by the graphite material layer 631 and the glassy carbon material layer 632, which can allow only the glassy carbon material layer 632 to be in an exposed state, and the molding process of the glassy carbon material layer 632 is an impregnation process or a cracking process; the heat dissipation compact body 63 for dissipating the heat of the target disc matrix 62 is arranged on the back surface of the target disc matrix 62, so that the characteristic of high density of the glassy carbon material can be fully utilized, the advantages of two materials of the glassy carbon material layer and the graphite material layer are combined, and the stacked structure is adopted to replace a single material for heat dissipation. The "carbon-containing region" of the transmissive target disclosed in the prior patent (EP 4006949 A1) is merely for the purpose of enhancing the connection stability and the firmness, and is not for the purpose of avoiding the adsorption of impurities by the transmissive target. In contrast, according to the present invention, the stacked structure of the heat dissipating dense body 63 has the graphite material layer 631 outside the glassy carbon material layer 632, and the microstructure of the glassy carbon material is very dense, the porosity is very low, the adsorption of gas and organic solvent is remarkably reduced, the mechanical properties of the glassy carbon material are excellent, the exfoliation in the pretreatment process can be avoided without special surface treatment, and the hot insulating oil is not easy to penetrate into or react with the inside of the high-temperature glassy carbon material layer, so that the above problems can be effectively reduced. Further, the surface of the glassy carbon material layer 632 can be simply polished to remove surface impurities (such as carbide remained on the surface layer), which is beneficial to recycling the anode 6 and effectively reduces the production cost. There is also a more important technical effect: since the organic molecules are difficult to adhere to the outer surface of the heat dissipating compact 63, free carbon is not generated in the heat dissipating compact 63 when in use, and the problem of ignition in the envelope 1 is avoided.
The anode 6 may be fixedly disposed on the anode insulating end seal assembly 4, or may be rotatably disposed on the anode insulating end seal assembly 4. The X-ray tube also comprises a bearing assembly 5, wherein the bearing assembly 5 is arranged on the anode insulation end seal assembly 4; when the anode 6 is of a rotary type structure, the anode handle 61 of the anode 6 is rotatably arranged on the anode insulation end seal assembly 4 around the axis thereof through the bearing assembly 5. The rotary structure of the anode 6 can uniformly disperse and transfer a large amount of heat generated by the electron beam striking the target surface layer 66 to the whole heat dissipation compact 63, thereby improving the overall heat dissipation effect of the anode 6.
Further, the material of the target disk substrate 62 may be a molybdenum alloy (TZM). In the embodiment of the invention, the TZM has high melting point, excellent high-temperature mechanical property and thermal conductivity, and can efficiently conduct out the heat generated by the electron bombardment of the target surface. The material of the target layer 66 may be a rhenium tungsten alloy target. In the embodiment of the invention, tungsten has high melting point, good heat conduction performance and creep resistance. The large atomic number of tungsten increases the likelihood of electron bombardment producing bremsstrahlung and characteristic radiation X-rays. A welding process may be used between the target disk substrate 62 and the target layer 66 to improve the fixation and stability between the target disk substrate 62 and the target layer 66. Further, a brazing process is adopted, the brazing filler metal can be Ti, zr or alloy materials thereof, ti is titanium, zr is zirconium, and the quality of the brazing process is improved. Further, a vacuum brazing process is adopted, and the melting point of the brazing material can be 1600-1900 ℃, for example 1750 ℃, so that the quality of the brazing process is further improved. It should be noted that the process temperature should not be too high, which would result in excessive brazing, affecting the heat conductivity of the resulting heat dissipating compact; the process temperature should not be too low, which would lead to insufficient brazing, affecting the heat conductivity of the resulting heat dissipating compact.
In order to further reduce the adsorption of the heat dissipation compact 63 to the gas and the organic solvent and improve the heat dissipation effect on the target disk substrate 62, the heat dissipation compact 63 is connected to the back surface of the target disk substrate 62 by a metal heat conducting material, and the outer surface of the graphite material layer 631, which is not in contact with the target disk substrate 62, is completely covered by the glassy carbon material layer 632, and only the glassy carbon material layer 632 is exposed in the vacuum environment of the lumen 11.
Further, in order to improve the connection stability between the graphite material layer 631 and the target disk substrate 62 and to secure the heat transfer efficiency between the graphite material layer 631 and the target disk substrate 62, the graphite material layer 631 is braze-bonded to the back surface of the target disk substrate 62. Further, the vacuum brazing process may be used to braze the heat dissipating compact to the back surface of the target disc substrate, so as to improve the connection strength and fineness between the heat dissipating compact containing the glassy carbon material layer and the target disc substrate, and thus to facilitate improvement of the quality of the anode 6.
In order to facilitate the formation of the glassy carbon material layer 632 of the heat dissipation compact 63 and to improve the compactness of the glassy carbon material layer 632, the glassy carbon material layer 632 is formed on the graphite material layer 631 through an impregnation process or a cracking process. The invention applies the dipping process and the cracking process to the technical field of X-ray tubes for the first time.
The dipping process comprises the following steps: s11, manufacturing an anode radiator, wherein the anode radiator is made of graphite material, and the local outer surface of the anode radiator is shielded; s12, immersing the anode radiator in the raw material of the dipping process to form the glassy carbon material layer 632 on the unmasked surface of the anode radiator, wherein the rest structure of the anode radiator except the glassy carbon material layer 632 is the graphite material layer 631.
In a specific implementation manner of the impregnation process, firstly, an anode radiator is manufactured, the anode radiator is of an existing structure, the anode radiator can be a second substrate disclosed in the existing patent (application number is 202010373988.1), the anode radiator is used as a blank of the heat dissipation compact 63, and the anode radiator is made of graphite materials; then, one end surface of the anode radiator is shielded by a protective layer (protective layer is not shown), the shielded end surface is used for connecting the back surface of the target disk substrate 62, and the other surfaces of the anode radiator are exposed; then, immersing the anode radiator in the glassy carbon soluble compound solution to form a glassy carbon material layer 632 on the rest surfaces of the anode radiator; and finally, taking out the anode radiator and removing the protective layer. The remaining structure of the anode heat sink except for the glassy carbon material layer 632 is a graphite material layer 631. Thus, the controllability of emissivity and compactness can be effectively improved, and the quality of the glassy carbon material layer 632 can be improved, so that the quality of the anode target disc assembly can be improved.
Further, the process parameters of the impregnation method meet one or more of the following: the raw materials of the dipping process are glassy carbon soluble compound solutions, wherein the solvents of the glassy carbon soluble compound solutions are selected from the group consisting of: deionized water; the raw material concentration is selected from: 40% to 50%, for example 45%; the process temperature is selected from: 300 ℃ to 350 ℃, e.g. 325 ℃.
It should be noted that the concentration of the raw materials (such as the glassy carbon soluble compound solution) should not be too high, and too high can cause too high impregnation concentration to affect the compactness and mechanical properties of the formed glassy carbon material layer; the concentration of the raw materials is not too low, and the too low concentration can lead to insufficient impregnation concentration, so that the density and mechanical properties of the formed glassy carbon material layer are affected.
Particularly, the process temperature should not be too high, which can cause too high impregnation degree to affect the density and mechanical properties of the formed glassy carbon material layer; the process temperature should not be too low, and too low can lead to insufficient impregnation degree, and the density and mechanical properties of the formed glassy carbon material layer are affected.
In addition, the rest actions and rest means of the dipping process are the existing actions and the existing means, and the invention is not repeated.
The cracking process comprises the following steps: s21, manufacturing an anode radiator, wherein the anode radiator is made of graphite material, and the local outer surface of the anode radiator is shielded; s22, immersing the anode radiator in the fissionable material liquid, forming a fissionable material layer on the unmasked surface of the anode radiator, heating the fissionable material layer, carbonizing the fissionable material layer, forming the glassy carbon material layer 632 on the unmasked surface of the anode radiator, and forming a graphite material layer 631 as the rest structure of the anode radiator except the glassy carbon material layer 632.
In one embodiment of the cracking process, firstly, an anode radiator (same as the anode radiator of the dipping process) is produced; furthermore, one end face of the anode radiator is shielded by a mask layer, and the end face is used for being connected with the back face of the target disc base body and exposing the other surfaces of the anode radiator; then immersing the anode radiator in a fissionable material liquid to form a fissionable material layer on the remaining surface; then, heating the fissionable material layer; carbonizing the fissionable material layer at a heated temperature to form the glassy carbon material layer 632 on the remaining surface; finally, the anode radiator is taken out, and the mask layer is removed. The remaining structure of the anode heat sink except for the glassy carbon material layer 632 is a graphite material layer 631. Thus, the controllability of emissivity and compactness can be effectively improved, and the quality of the glassy carbon material layer 632 can be improved, so that the quality of the anode target disc assembly can be improved.
Further, the process parameters of the cracking process may satisfy one or more of the following: the fissionable material of the fissionable material layer is selected from one or more of the following: furfuryl alcohol resin and phenolic resin; the process temperature of the heating treatment is selected from the group consisting of: 300 ℃ to 350 ℃, e.g. 325 ℃; the heat-treated gas atmosphere is selected from: an inert gas atmosphere and a nitrogen atmosphere; the process temperature of the carbonization treatment is selected from the group consisting of: 300 ℃ to 350 ℃, e.g. 325 ℃; the carbon element environmental concentration of the carbonization treatment is selected from the group consisting of: 40% to 50%, for example 45%.
It should be noted that the process temperature of the heating treatment should not be too high, and the too high temperature can cause excessive cracking degree, and affect the density and mechanical properties of the formed heat dissipation compact body; the process temperature of the heating treatment is not too low, and the too low temperature can lead to insufficient cracking degree, so that the density and mechanical property of the formed heat dissipation compact body are affected.
It should be noted that the process temperature of the carbonization treatment should not be too high, and the too high carbonization degree can cause excessive carbonization, so as to affect the density and mechanical properties of the formed heat dissipation compact; the carbonization treatment process temperature should not be too low, and too low can lead to insufficient carbonization degree, and the compactness and mechanical properties of the formed heat dissipation compact body are affected.
Particularly, the environment concentration of the carbon element in the carbonization treatment should not be too high, and the excessive high carbon element can cause excessive carbonization degree to influence the density and mechanical property of the formed heat dissipation compact; the environment concentration of the carbon element in the carbonization treatment is not too low, and the insufficient carbonization degree can be caused by the too low environment concentration, so that the density and mechanical property of the formed heat dissipation compact body are affected.
In addition, the rest actions and rest means of the cracking process are the existing actions and the existing means, and the invention is not repeated.
In order to further avoid cracking of the thermal radiation enhancement layer 65, the thermal expansion coefficient of the protective transition layer 64 is equal to or smaller than that of the thermal radiation enhancement layer 65, and the ratio between the two thermal expansion coefficients is 0.8-1. Further, the ratio of the thermal expansion coefficients is 0.95 to 1. For example, the thermal expansion coefficient of the protective transition layer 64 is α1, and the thermal expansion coefficient of the heat radiation enhancement layer 65 is α2, α1/α2=0.95. Specifically, because the thermal expansion coefficients of the thermal radiation enhancement layer 65 and the heat dissipation compact body 63 (specifically, the glassy carbon material layer) are unequal, the thermal radiation enhancement layer 65 may be cracked due to factors such as thermal expansion and contraction, so as to influence the anti-seepage function and the thermal radiation efficiency.
To further carry outThe material of the heat radiation enhancement layer 65 has a heat radiation emissivity of 0.7 or more, preferably 0.8 or more, with high overall heat radiation effect of the anode. The emissivity is selected based on the coefficient of thermal expansion of the thermal radiation enhancement layer 65. The emissivity of thermal radiation refers to the ability of an object to emit thermal radiation, which is a dimensionless physical quantity, generally denoted epsilon. The emissivity of the thermal radiation ranges from 0 to 1, where 0 means that the object does not emit thermal radiation and 1 means that the object emits thermal radiation completely. The heat radiation formula is expressed as: p=ε σ T 4 P represents the heat radiation power density emitted from the surface of the object per unit time, ε is the heat radiation emissivity of the object, σ is the Stefan-Boltzmann constant, and T is the absolute temperature of the object. In order to facilitate adjustment of the thermal expansion coefficient of the protection transition layer 64, the material of the protection transition layer 64 includes a transition host material and a transition doped metal, the transition host material is a metal carbide, a metal element of the metal carbide is selected from at least one of group ivb and group vb metals, and a metal element of the transition doped metal is selected from at least one of group ivb and group vb metals. For example, the transition host material of the protective transition layer 64 is TiC, zrC. In particular, although these metal carbides are existing, there is no suggestion in the prior art that the combination of the metal carbide coating and the glassy carbon material layer is interconnected, so that the heat dissipation effect of the anode can be further improved. Wherein TiC is titanium carbide, zrC is zirconium carbide, and the metal carbide coating can be a single material or a stacked layer of multiple materials, so that the influence of thermal expansion and cold contraction can be further lightened, and the effectiveness of the protective transition layer 64 and the quality consistency of the anode 6 are improved.
Still further, the process of forming the protective transition layer 64 may satisfy one or more of the following: the forming thickness is selected from: 1 μm to 5 μm, for example 3 μm; the forming process is selected from: chemical vapor deposition (Chemical Vapor Deposition, CVD) and physical vapor deposition (Physical Vapor Deposition, PVD).
In order to further enhance the heat dissipation effect of the anode, the material of the heat radiation enhancement layer 65 includes an enhancement bodyThe material and the reinforced doped metal are selected from at least one of metal oxide, metal nitride and metal carbide, the metal element of the metal oxide is selected from at least one of IV B, V B and VI B group metal, the metal element of the metal nitride is selected from at least one of IV B, V B and VI B group metal, the metal element of the metal carbide is selected from at least one of IV B, V B and VI B group metal, and the metal element of the reinforced doped metal is selected from at least one of IV B, V B and VI B group metal. Preferably, the reinforcing host material of the thermal radiation reinforcing layer 65 is selected from CrC, crN, cr 2 O 3 WC, WOx, tiC and TiAlN; most preferably, the reinforcing host material of the thermal radiation reinforcing layer 65 is selected from CrC, WC, tiC and TiAlN. Although these oxides, nitrides and carbides are existing, there is no suggestion in the prior art that the combination of these oxides, nitrides and carbides with the glassy carbon material layer can further improve the heat radiation efficiency of the anode under the combined action of the oxides, nitrides and carbides with the glassy carbon material, thereby improving the overall heat radiation effect of the anode. Wherein CrC is chromium carbide, crN is chromium nitride, cr 2 O 3 The material of the thermal radiation enhancement layer 65 may be selected from a single material or a stacked layer of a plurality of materials, so that the influence of thermal expansion and contraction can be further reduced, and the quality consistency of the anode 6 can be improved. Preferably, the process of forming the thermal radiation enhancement layer satisfies one or more of the following: the forming process is selected from chemical vapor deposition (Chemical Vapor Deposition, CVD) and physical vapor deposition (Physical Vapor Deposition, PVD); the forming thickness is selected from: 2 μm to 10 μm, for example 6 μm. It should be noted that the thickness of the thermal radiation enhancement layer 65 should not be too high, which would result in too thick thermal radiation enhancement layer, affecting the thermal conductivity of the resulting heat dissipating compact; the thickness of the heat radiation layer is not too low, and the heat radiation enhancement layer is insufficient due to the too low thickness, so that the heat radiation efficiency of the formed heat radiation compact body is affected.
In order to facilitate the fabrication of the anode, the protective transition layer 64 and the heat radiation enhancement layer 65 are connected in advance to form a double-layer film structure, and then the double-layer film structure is disposed on the outer surface of the heat dissipation compact 63.
The invention also provides an anode recovery method for processing the X-ray tube, comprising the following steps:
removing the thermal radiation enhancement layer 65 and the protective transition layer 64 on the outer side surface of the heat dissipation compact 63 of the anode 6 sequentially or simultaneously;
in the heat dissipation compact 63 of the anode 6, the glassy carbon material layer 632 is removed;
in the remaining part of the anode 6, the target disk substrate 62 and the graphite material layer 631 are recovered.
The anode recycling method can reduce recycling difficulty and improve recycling quality.
In conclusion, the invention can obviously lighten the adsorption of the exposed surface of the anode to the gas and the organic solvent, avoid the problem of ignition in the tube shell, avoid the cracking phenomenon of the heat radiation enhancement layer through the double-layer structure of the heat radiation enhancement layer and the protection transition layer, and improve the heat radiation effect of the anode. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications and variations of the invention be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.
Claims (11)
1. An X-ray tube comprising:
the pipe comprises a pipe shell (1), wherein a pipe cavity (11) of the pipe shell (1) forms a vacuum environment;
the cathode insulation end seal assembly (2), the cathode insulation end seal assembly (2) is arranged on the tube shell (1);
a cathode assembly (3), the cathode assembly (3) being disposed on the cathode insulation end seal assembly (2) and being located in the lumen (11);
the anode insulation end sealing assembly (4), the anode insulation end sealing assembly (4) is arranged on the tube shell (1);
the method is characterized in that: the anode (6) is positioned in the pipe cavity (11), the anode (6) comprises an anode handle (61), a target disc substrate (62), a heat dissipation compact body (63), a protection transition layer (64) and a heat radiation enhancement layer (65), and the anode handle (61) is arranged on the anode insulation end sealing assembly (4); the back of the target disc substrate (62) is one surface of the target disc substrate (62) facing away from the cathode assembly (3), the heat dissipation compact body (63) is arranged on the back of the target disc substrate (62), the heat dissipation compact body (63) is composed of a graphite material layer (631) and a glassy carbon material layer (632), the graphite material layer (631) is in contact connection with the back of the target disc substrate (62), and the glassy carbon material layer (632) is arranged on the outer side surface of the graphite material layer (631); the protective transition layer (64) is arranged on the outer side surface of the glassy carbon material layer (632), and the thermal radiation enhancement layer (65) is arranged on the outer side surface of the protective transition layer (64);
the outer side surface of the graphite material layer (631) which is not contacted with the connecting target disc matrix (62) is completely covered by the glassy carbon material layer (632), and only the glassy carbon material layer (632) is exposed in the vacuum environment of the tube cavity (11).
2. The X-ray tube according to claim 1, wherein: the X-ray tube also comprises a bearing assembly (5), wherein the bearing assembly (5) is arranged on the anode insulation end sealing assembly (4); the anode (6) is of a rotary structure, and an anode handle (61) of the anode (6) is rotatably arranged on the anode insulation end sealing assembly (4) around the axis of the anode handle through a bearing assembly (5).
3. The X-ray tube according to claim 1 or 2, wherein: the graphite material layer (631) of the heat dissipation compact body (63) is welded and connected to the back surface of the target disc base body (62).
4. An X-ray tube according to claim 3, characterized in that: the graphite material layer (631) is connected to the back surface of the target disk base body (62) by vacuum brazing.
5. The X-ray tube according to claim 1, wherein: the glassy carbon material layer (632) is formed on the graphite material layer (631) through an impregnation process or a cracking process;
the dipping process comprises the following steps: s11, manufacturing an anode radiator, wherein the anode radiator is made of graphite material, and the local outer surface of the anode radiator is shielded; s12, immersing the anode radiator in raw materials of an immersion process, wherein the raw materials of the immersion process are glassy carbon soluble compound solutions, the concentration of the raw materials of the immersion process is selected from 20% to 70%, the temperature of the immersion process is selected from 200 ℃ to 450 ℃, a glassy carbon material layer (632) is formed on the unmasked surface of the anode radiator, and the rest structure of the anode radiator except the glassy carbon material layer (632) is a graphite material layer (631);
the cracking process comprises the following steps: s21, manufacturing an anode radiator, wherein the anode radiator is made of graphite material, and the local outer surface of the anode radiator is shielded; s22, immersing the anode radiator in the fissionable material liquid, forming a fissionable material layer on the unmasked surface of the anode radiator, heating the fissionable material layer, and carbonizing the fissionable material layer; the process temperature of the heating treatment is selected from 250 ℃ to 450 ℃, the process temperature of the carbonization treatment is selected from 300 ℃ to 500 ℃, the environmental concentration of carbon elements of the carbonization treatment is selected from 30% to 60%, the glassy carbon material layer (632) is formed on the unmasked surface of the anode radiator, and the rest structure of the anode radiator except the glassy carbon material layer (632) is a graphite material layer (631).
6. The X-ray tube according to claim 1, wherein: the thermal expansion coefficient of the protective transition layer (64) is equal to or smaller than that of the thermal radiation enhancement layer (65), and the ratio between the two thermal expansion coefficients is 0.8-1.
7. The X-ray tube according to claim 1 or 2 or 6, wherein: the material of the heat radiation enhancement layer (65) has a heat radiation emissivity of 0.7 or more.
8. The X-ray tube according to claim 1 or 2 or 6, wherein: the material of the protective transition layer (64) comprises a transition main body material and transition doped metal, wherein the transition main body material is metal carbide, the metal element of the metal carbide is selected from at least one of IVB and VB group metal, and the metal element of the transition doped metal is selected from at least one of IVB and VB group metal.
9. The X-ray tube according to claim 1 or 2 or 6, wherein: the material of the thermal radiation enhancement layer (65) comprises an enhancement host material and an enhancement doped metal, wherein the enhancement host material is selected from at least one of metal oxides, metal nitrides and metal carbides, metal elements of the metal oxides are selected from at least one of metals of groups IVB, VB and VIB, metal elements of the metal nitrides are selected from at least one of metals of groups IVB, VB and VIB, metal elements of the metal carbides are selected from at least one of metals of groups IVB, VB and VIB, and metal elements of the enhancement doped metal are selected from at least one of metals of groups IVB, VB and VIB.
10. The X-ray tube according to claim 1, wherein: the protective transition layer (64) and the heat radiation enhancement layer (65) are connected in advance to form a double-layer film structure, and are arranged on the outer side surface of the heat dissipation compact body (63).
11. An anode recycling method for treating an X-ray tube according to any one of claims 1 to 10, comprising the steps of:
removing the heat radiation enhancement layer (65) and the protection transition layer (64) on the outer side surface of the heat radiation compact body (63) of the anode (6) sequentially or simultaneously;
removing the glassy carbon material layer (632) in the heat dissipation compact (63) of the anode (6);
in the remaining part of the anode (6), the target disk substrate (62) and the graphite material layer (631) are recovered.
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| CN202410009103.8A CN117524816B (en) | 2024-01-04 | 2024-01-04 | X-ray tube and anode recovery method |
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| CN202410009103.8A CN117524816B (en) | 2024-01-04 | 2024-01-04 | X-ray tube and anode recovery method |
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| US3646380A (en) * | 1968-08-17 | 1972-02-29 | Philips Corp | Rotating-anode x-ray tube with a metal envelope and a frustoconical anode |
| DE2146918A1 (en) * | 1971-09-20 | 1973-03-22 | Siemens Ag | ROTARY ROTARY ANODE |
| US4392238A (en) * | 1979-07-18 | 1983-07-05 | U.S. Philips Corporation | Rotary anode for an X-ray tube and method of manufacturing such an anode |
| US4516255A (en) * | 1982-02-18 | 1985-05-07 | Schwarzkopf Development Corporation | Rotating anode for X-ray tubes |
| JPH04363843A (en) * | 1991-09-18 | 1992-12-16 | Hitachi Ltd | X-ray tube targets and X-ray tubes |
| JPH0864386A (en) * | 1994-08-29 | 1996-03-08 | Shimadzu Corp | Rotary anode x-ray tube device |
| CN117174557A (en) * | 2023-11-03 | 2023-12-05 | 上海超群检测科技股份有限公司 | High-energy micro-focus X-ray tube |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US6301333B1 (en) * | 1999-12-30 | 2001-10-09 | Genvac Aerospace Corp. | Process for coating amorphous carbon coating on to an x-ray target |
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|---|---|---|---|---|
| US3646380A (en) * | 1968-08-17 | 1972-02-29 | Philips Corp | Rotating-anode x-ray tube with a metal envelope and a frustoconical anode |
| DE2146918A1 (en) * | 1971-09-20 | 1973-03-22 | Siemens Ag | ROTARY ROTARY ANODE |
| US4392238A (en) * | 1979-07-18 | 1983-07-05 | U.S. Philips Corporation | Rotary anode for an X-ray tube and method of manufacturing such an anode |
| US4516255A (en) * | 1982-02-18 | 1985-05-07 | Schwarzkopf Development Corporation | Rotating anode for X-ray tubes |
| JPH04363843A (en) * | 1991-09-18 | 1992-12-16 | Hitachi Ltd | X-ray tube targets and X-ray tubes |
| JPH0864386A (en) * | 1994-08-29 | 1996-03-08 | Shimadzu Corp | Rotary anode x-ray tube device |
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| CN117524816A (en) | 2024-02-06 |
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