CN117517342A - Optical detection system and optical detection method - Google Patents
Optical detection system and optical detection method Download PDFInfo
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- CN117517342A CN117517342A CN202311471314.5A CN202311471314A CN117517342A CN 117517342 A CN117517342 A CN 117517342A CN 202311471314 A CN202311471314 A CN 202311471314A CN 117517342 A CN117517342 A CN 117517342A
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- 238000001514 detection method Methods 0.000 title claims abstract description 55
- 230000003287 optical effect Effects 0.000 title claims abstract description 47
- 238000003384 imaging method Methods 0.000 claims abstract description 26
- 238000012545 processing Methods 0.000 claims abstract description 20
- 230000005540 biological transmission Effects 0.000 claims abstract description 9
- 239000013307 optical fiber Substances 0.000 claims description 17
- 206010019909 Hernia Diseases 0.000 claims description 3
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- 239000004065 semiconductor Substances 0.000 abstract description 8
- 238000012937 correction Methods 0.000 abstract description 4
- 238000004458 analytical method Methods 0.000 abstract description 3
- 238000003708 edge detection Methods 0.000 abstract description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses an optical detection system and an optical detection method, wherein the optical detection system comprises: the device comprises a light emitting module, a light adjusting module, an imaging module and a processing module; the light emitting module comprises a light source for emitting light; the light adjusting module is positioned on the transmission path of the light and used for adjusting the light to the sample to be measured. The invention can rapidly judge whether the defect of the semiconductor chip exists or not, and has the advantages of rapidness, non-contact, no damage and the like; the adopted compact, low-power-consumption and high-performance industrial camera can stably acquire images in full resolution and full frame without additional refrigeration of a fan, can utilize dark field correction of pixels per se to obtain excellent image uniformity, and has higher detection precision; the processing module can recognize the image characteristics according to different detection requirements, and then perform image gray adjustment, edge detection, target analysis and other processes, and the detection area is adjustable.
Description
Technical Field
The present invention relates to the field of optical detection technology, and in particular, to an optical detection system and an optical detection method.
Background
With the development of integration and multifunctionality of semiconductor chips, the surface feature area is smaller and smaller, the processing difficulty is larger and larger, and after each processing step, whether defects such as grooves, particles, scratches and the like exist in the chip or not needs to be detected, and coordinate positions corresponding to the defects are marked.
At present, the most common method for detecting the defects of the semiconductor chip is visual detection, but the general visual detection has low reaction speed, can not quickly detect and judge whether the defects of the semiconductor chip exist or not and judge the coordinate positions of the corresponding defects, and is difficult to adapt to the production requirements of integration and multifunction of the semiconductor chip at present.
Accordingly, in view of the above-described technical problems, it is necessary to provide an optical detection system and an optical detection method.
Disclosure of Invention
The invention aims to provide an optical detection system and an optical detection method, which can solve the problem that whether a semiconductor chip defect exists or not and the coordinate position of the corresponding defect cannot be detected and judged rapidly.
To achieve the above object, an embodiment of the present invention provides an optical detection system including: the device comprises a light emitting module, a light adjusting module, an imaging module and a processing module.
The light emitting module comprises a light source and an optical fiber fixing device, wherein the light source is used for emitting light, and the optical fiber fixing device is fixedly connected with an optical fiber. The light adjusting module is positioned on the transmission path of the light and used for adjusting the light to the sample to be measured. The imaging module is used for obtaining an image of the sample to be detected formed by the reflection of the light rays and an image of any region to be detected of the sample to be detected. The processing module is used for identifying the image of the sample to be detected and extracting the characteristic information of each region in the image of the sample to be detected.
In one or more embodiments of the invention, the light source is a hernia lamp.
In one or more embodiments of the present invention, the wavelength range of the light is 380nm to 700nm, and the spectrum distribution in the 380nm to 700nm band is flat, so as to meet the system requirements of optical detection.
In one or more embodiments of the present invention, the light adjusting module includes a diaphragm, a light path, and a beam splitter, the diaphragm is installed at a bottom end of the optical fiber fixing device, the light path is installed at a bottom end of the diaphragm, the beam splitter is located at one side of the light path, and an objective lens is installed at a bottom end of the beam splitter.
In one or more embodiments of the present invention, the through hole of the diaphragm is an adjustable aperture.
In one or more embodiments of the present invention, the optical path includes a fourth lens, a fifth lens, a reflective mirror, and a sixth lens, where the fourth lens, the fifth lens, and the reflective mirror are all located on a transmission path of the light, and the sixth lens is located on an outgoing light transmission path of the reflective mirror.
In one or more embodiments of the invention, the beam splitter is a half mirror.
In one or more embodiments of the present invention, the imaging module includes a tube lens and an imaging unit, which is an image sensor.
In one or more embodiments of the present invention, an optical detection system further includes: the camera comprises an electric moving platform, a carrying platform and a lifting platform, wherein the carrying platform is arranged on the electric moving platform, the electric moving platform can drive the carrying platform to horizontally move in the XY two directions, the industrial camera is arranged on the lifting platform, and the lifting platform can drive the industrial camera to vertically lift in the Z direction.
To achieve the above object, an embodiment of the present invention further provides an optical detection method, including the steps of:
s1, placing a sample to be tested on a carrier, and adjusting an objective lens to move up and down along the vertical direction so that the objective lens focuses light on the surface of the sample to be tested;
s2, the light source emits light, and the light sequentially passes through the light adjusting module and the beam splitter and irradiates the sample to be detected, and is reflected by the sample to be detected to form reflected light;
s3, the reflected light is projected to an imaging unit through a beam splitter and a lens barrel lens in sequence, so that the imaging unit obtains image information of a sample to be detected;
s4, analyzing and processing the image information by the processing module, judging whether the image area is an area to be detected, if so, acquiring the position information and the area information of the area to be detected, identifying the image of the area to be detected, extracting the characteristic information of each structure in the image of the area to be detected, judging whether the structure is the structure to be detected according to the characteristic information of the structure, if so, acquiring the position information and the area information of the structure to be detected, generating a detection path according to the position information of all the areas to be detected, controlling the sample to be detected to correspondingly move, adjusting the magnification of the industrial camera, and adjusting the position and the area of the detection area.
Compared with the prior art, the embodiment of the invention has the following technical effects: the invention can rapidly judge whether the defect of the semiconductor chip exists or not and has the advantages of rapidness, non-contact, no damage and the like. The compact, low-power-consumption and high-performance industrial camera adopted by the invention can stably acquire images in full resolution and full frame without additional refrigeration of a fan, can utilize dark field correction of pixels per se to obtain excellent image uniformity, and has higher detection precision. The processing module can recognize the image characteristics according to different detection requirements, and then perform image gray adjustment, edge detection, target analysis and other processes, and the detection area is adjustable.
Drawings
FIG. 1 is a schematic diagram of an optical detection system according to an embodiment of the present invention;
FIG. 2 is a system block diagram of an optical detection system according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of an optical detection system according to an embodiment of the present invention.
The main reference numerals illustrate:
10. an electric moving platform; 20. a carrier; 30. a lifting platform; 40. an industrial camera; 41. a barrel lens; 411. a first lens; 412. a second lens; 413. a third lens; 42. a beam splitter; 43. an objective lens; 44. an optical fiber fixing device; 441. an optical fiber; 45. a diaphragm; 46. an optical path; 461. a fourth lens; 462. a fifth lens; 463. a reflective mirror; 464. and a lens six.
Detailed Description
The following detailed description of embodiments of the invention is, therefore, to be taken in conjunction with the accompanying drawings, and it is to be understood that the scope of the invention is not limited to the specific embodiments.
Throughout the specification and claims, unless explicitly stated otherwise, the term "comprise" or variations thereof such as "comprises" or "comprising", etc. will be understood to include the stated element or component without excluding other elements or components.
As shown in fig. 1 to 3, an optical inspection system according to a preferred embodiment of the present invention includes an electric moving platform 10, a stage 20, a lifting platform 30, and an industrial camera 40, the stage 20 being mounted on the electric moving platform 10 for carrying a sample to be inspected. The electric moving platform 10 can drive the carrying platform 20 to horizontally move in the XY two directions under the control of the processing module.
Referring to fig. 3, the industrial camera 40 is mounted on the lifting platform 30, and the lifting platform 30 can drive the industrial camera 40 to vertically lift in the Z direction, so that the objective lens 43 focuses light on the surface of the sample to be measured, and the imaging definition is ensured.
Referring to fig. 1 and 2, the detection system includes a light emitting module, a light adjusting module, an imaging module, and a processing module. Referring to fig. 1, the light emitting module includes a light source for emitting light and an optical fiber fixing device 44. The optical fiber fixing device 44 is fixedly connected with an optical fiber 441, and the optical fiber 441 is used for converting light rays emitted by the light source. Wherein the light source is a hernia lamp. The wavelength range of light emitted by the light source is 380-700 nm, and the spectrum distribution of the light source in the wave band of 380-700 nm is smooth, so that the system requirement of optical detection can be met. The light adjusting module is positioned on the transmission path of the light and used for adjusting the light to the sample to be measured.
Referring to fig. 1, the light conditioning module includes a diaphragm 45, an optical path 46, and a beam splitter 42. The diaphragm 45 is fixedly arranged at the bottom end of the optical fiber fixing device 44, and the through hole of the diaphragm 45 is an adjustable aperture. The light quantity is adjustable, and the incident light is the central light of the optical fiber, so that the uniformity of the incident light brightness is ensured.
Referring to fig. 1, the optical path 46 is installed at the bottom end of the diaphragm 45, the optical path 46 includes a fourth lens 461, a fifth lens 462, a reflective mirror 463 and a sixth lens 464, the fourth lens 461, the fifth lens 462 and the reflective mirror 463 are all located on the transmission path of the light, and the sixth lens 464 is located on the outgoing light transmission path of the reflective mirror 463. The beam splitter 42 is located on one side of the optical path 46, and the beam splitter 42 is a half mirror that can transmit a portion of the light while ensuring that a portion of the light is sufficiently reflected.
Referring to fig. 1, an objective lens 43 is mounted at the bottom end of the beam splitter 42, and the objective lens 43 is used for converging the light reflected by the beam splitter 42, so that the light is perpendicularly incident on the surface of the sample to be measured. Specifically, the light emitted from the light source is converted by the optical fiber 441, then reaches the fourth lens 461 and the fifth lens 462 through the diaphragm 45, then passes through the sixth lens 464 through the reflector 463, and then passes through the beam splitter 42 after beam expansion and shaping of the light.
The beam splitter 42 reflects the beam-expanded and shaped light to the objective lens 43, and the objective lens 43 converges the reflected light to make the light vertically incident on the surface of the sample to be measured, and collects the reflected light of the sample to be measured.
The imaging module is used for obtaining an image of the sample to be detected formed by light reflection and an image of any region to be detected of the sample to be detected. The imaging module includes a tube lens 41 and an imaging unit, which is an image sensor. The image sensor uses light imaging so that a processing module can recognize, position and analyze the area of the area to be detected according to the image.
As shown in fig. 1, the tube lens 41 includes a first lens 411, a second lens 412, and a third lens 413. The first lens 411, the second lens 412 and the third lens 413 are sequentially located on the transmission path of the reflected light of the sample to be tested. After the reflected light of the sample to be measured is projected through the beam splitter 42, the reflected light sequentially passes through the third lens 413, the second lens 412 and the first lens 411 and then is projected to the imaging unit, so that the imaging unit obtains the image information of the sample to be measured.
The processing module is used for identifying the image of the sample to be detected and extracting the characteristic information of each region in the image of the sample to be detected. It is noted that the industrial camera 40 can stably acquire images in full resolution and full frames, and can obtain excellent image uniformity by using dark field correction of pixels. And the industrial camera 40 has a low-frequency flat field calibration function, so that the consistency of imaging of different lenses, angles, colors and different types of light sources can be ensured.
Another embodiment of the present invention also provides an optical detection method, including the steps of:
s1, placing a sample to be tested on a carrier 20, and adjusting an objective lens 43 to move up and down along the vertical direction so that the objective lens 43 focuses light on the surface of the sample to be tested;
s2, the light source emits light, the light sequentially passes through the light adjusting module and the beam splitter 42 and irradiates the sample to be measured, and the light is reflected by the sample to be measured to form reflected light;
s3, the reflected light is projected to an imaging unit through a beam splitter 42 and a lens barrel lens 41 in sequence, so that the imaging unit obtains image information of a sample to be detected;
s4, analyzing and processing the image information by the processing module, judging whether the image area is an area to be detected, and if so, acquiring the position information and the area information of the area to be detected. And identifying the image of the region to be detected, extracting the characteristic information of each structure in the image of the region to be detected, and judging whether the structure is the structure to be detected or not according to the characteristic information of the structure. If so, acquiring the position information and the area information of the structure to be detected, generating a detection path according to the position information of all the areas to be detected, controlling the sample to be detected to correspondingly move, adjusting the magnification of the industrial camera 40, and adjusting the position and the area of the detection area.
In S3, the imaging unit obtains the defect information of the sample to be detected carried by the image information of the sample to be detected.
When the light emitting module is used, the light emitting module emits light, so that the light irradiates the sample to be measured and is reflected by the sample to be measured to form reflected light. The reflected light feeds back an image of the test sample to the imaging module through the beam splitter 42. According to the precision requirement of the region to be detected, the amplification factor of the image of the test sample is adjusted, the area of the detection region of the optical detection system is adjustable, and the processing module acquires the position information and the area information of the region to be detected according to the image of the sample to be detected.
The invention can rapidly judge whether the defects of the semiconductor chip exist or not, has the advantages of rapidness, non-contact, no damage and the like, adopts the compact, low-power consumption and high-performance industrial camera 40, can stably acquire images in full resolution and full frame without additional refrigeration of a fan, can obtain excellent image uniformity by using dark field correction of pixels, has higher detection precision, and can perform image gray scale adjustment, edge detection, target analysis and other treatments after the processing module identifies the image characteristics according to different detection requirements, and the detection area is adjustable.
The foregoing descriptions of specific exemplary embodiments of the present invention are presented for purposes of illustration and description. It is not intended to limit the invention to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain the specific principles of the invention and its practical application to thereby enable one skilled in the art to make and utilize the invention in various exemplary embodiments and with various modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims and their equivalents.
Claims (10)
1. An optical detection system, comprising:
the light emitting module comprises a light source and an optical fiber fixing device, wherein the light source is used for emitting light, and the optical fiber fixing device is fixedly connected with an optical fiber;
the light adjusting module is positioned on the transmission path of the light and is used for adjusting the light to the sample to be measured;
the imaging module is used for obtaining an image of the sample to be detected formed by the reflection of the light rays and an image of any region to be detected of the sample to be detected;
the processing module is used for identifying the image of the sample to be detected and extracting the characteristic information of each region in the image of the sample to be detected.
2. An optical detection system according to claim 1, wherein the light source is a hernia lamp.
3. The optical detection system according to claim 2, wherein the wavelength range of the light is 380 nm-700 nm, and the spectrum distribution in the 380 nm-700 nm wave band is flat, so as to meet the system requirement of optical detection.
4. An optical detection system according to claim 1, wherein the light conditioning module comprises a diaphragm, an optical path and a beam splitter, the diaphragm is mounted at the bottom end of the optical fiber fixing device, the optical path is mounted at the bottom end of the diaphragm, the beam splitter is located at one side of the optical path, and the bottom end of the beam splitter is provided with an objective lens.
5. An optical detection system according to claim 4 wherein the aperture of the diaphragm is an adjustable aperture.
6. The optical detection system of claim 4 wherein the optical path includes a fourth lens, a fifth lens, a mirror, and a sixth lens, the fourth lens, the fifth lens, and the mirror each being positioned in the path of the light rays, the sixth lens being positioned in the path of the outgoing light rays from the mirror.
7. An optical detection system according to claim 4 wherein the beam splitter is a half mirror.
8. The optical detection system of claim 1, wherein the imaging module comprises a tube lens and an imaging unit, the imaging unit being an image sensor.
9. An optical detection system according to claim 1, wherein the optical detection system further comprises: the camera comprises an electric moving platform, a carrying platform and a lifting platform, wherein the carrying platform is arranged on the electric moving platform, the electric moving platform can drive the carrying platform to horizontally move in the XY two directions, the industrial camera is arranged on the lifting platform, and the lifting platform can drive the industrial camera to vertically lift in the Z direction.
10. An optical detection method, comprising the steps of:
s1, placing a sample to be tested on a carrier, and adjusting an objective lens to move up and down along the vertical direction so that the objective lens focuses light on the surface of the sample to be tested;
s2, the light source emits light, and the light sequentially passes through the light adjusting module and the beam splitter and irradiates the sample to be detected, and is reflected by the sample to be detected to form reflected light;
s3, the reflected light is projected to an imaging unit through a beam splitter and a lens barrel lens in sequence, so that the imaging unit obtains image information of a sample to be detected;
s4, analyzing and processing the image information by the processing module, judging whether the image area is an area to be detected, if so, acquiring the position information and the area information of the area to be detected, identifying the image of the area to be detected, extracting the characteristic information of each structure in the image of the area to be detected, judging whether the structure is the structure to be detected according to the characteristic information of the structure, if so, acquiring the position information and the area information of the structure to be detected, generating a detection path according to the position information of all the areas to be detected, controlling the sample to be detected to correspondingly move, adjusting the magnification of the industrial camera, and adjusting the position and the area of the detection area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311471314.5A CN117517342A (en) | 2023-11-07 | 2023-11-07 | Optical detection system and optical detection method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311471314.5A CN117517342A (en) | 2023-11-07 | 2023-11-07 | Optical detection system and optical detection method |
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| CN117517342A true CN117517342A (en) | 2024-02-06 |
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| CN202311471314.5A Pending CN117517342A (en) | 2023-11-07 | 2023-11-07 | Optical detection system and optical detection method |
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- 2023-11-07 CN CN202311471314.5A patent/CN117517342A/en active Pending
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