CN117491829B - Microchannel plate output electronic diffuse spot testing method and testing system - Google Patents
Microchannel plate output electronic diffuse spot testing method and testing system Download PDFInfo
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- 238000012360 testing method Methods 0.000 title claims abstract description 97
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- 238000003825 pressing Methods 0.000 claims abstract description 30
- 239000006185 dispersion Substances 0.000 claims abstract description 19
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- 239000000919 ceramic Substances 0.000 claims description 72
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- 125000006850 spacer group Chemical group 0.000 claims description 14
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- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 7
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- 229910002065 alloy metal Inorganic materials 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
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- 229910000833 kovar Inorganic materials 0.000 description 2
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- G—PHYSICS
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/24—Testing of discharge tubes
- G01R31/25—Testing of vacuum tubes
- G01R31/252—Testing of electron multipliers, e.g. photo-multipliers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0425—Test clips, e.g. for IC's
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Abstract
The invention provides a micro-channel plate output electronic diffuse spot test method and a micro-channel plate output electronic diffuse spot test system, the test system comprises a light source, a photocathode, a test fixture, a fluorescent screen, a camera and a computer system which are sequentially arranged. The test fixture clamps the microchannel plate, after the incident photoelectron electrons are multiplied, the emergent electrons fly to the fluorescent screen under the action of an electric field, and scattered circular spots are projected on the fluorescent screen; collecting the diffuse spot image, and then carrying out graphic processing to obtain an electronic radial offset; an adjusting washer is arranged between the output surface of the microchannel plate and the fluorescent screen for adjusting the distance between the output surface and the fluorescent screen. And a plurality of through hole metal sheets are placed on the input surface, so that the quantity and the diameter of the input electron beam spots are controlled, and the input electron beam spots are reinforced by metal pressing sheets. The test system of the invention can test and obtain the comparison of the diameters of the dispersion spots by changing the production process of the micro-channel plate or the distance between the micro-channel plate and the fluorescent screen, the voltage, the aperture of the test fixture and the like, thereby testing the change of the resolution of the micro-channel plate.
Description
Technical Field
The invention relates to the technical field of micro-channel plates, in particular to a direct performance test technology of a micro-channel plate, and specifically relates to a micro-channel plate output electronic dispersion spot test method and a micro-channel plate output electronic dispersion spot test system.
Background
The microchannel plate (Microchannel Plate, abbreviated as MCP) is a three-dimensional electron multiplication array composed of millions of micro-channel electron multipliers, can multiply electron flows distributed in two dimensions for multiple times, realizes weak signal detection, and is widely applied to vacuum micro-light image intensifiers (abbreviated as image tubes) to realize signal detection and amplification.
The key indicator for evaluating the image intensifier is the quality Factor (FOM), which is defined as the product of the signal-to-noise ratio and the resolution, wherein the resolution reflects the detail resolution of the image intensifier, namely the problem that the image intensifier cannot see clearly, and the factors influencing the resolution of the image intensifier are more, and the performance parameters of the MCP have the greatest influence on the resolution of the image intensifier.
Existing researches and practices show that the resolution of the MCP and the resolution of the image intensifier show positive correlation trend under the condition that other conditions are equal, but at present, no effective method is available for directly measuring and evaluating the resolution of the MCP, and usually after the MCP is assembled, the resolution of an image tube is tested, and the resolution performance of the MCP is reversely deduced from the resolution of the image intensifier. The image intensifier also comprises a photoelectric cathode, a fluorescent screen and the like, and the voltages and distances between the cathode and the MCP as well as between the MCP and the fluorescent screen can influence the resolution of the image intensifier, so that the spatial resolution performance of the MCP can not be directly and accurately judged in the mode, and the process optimization of the MCP in the aspect of resolution performance is seriously hindered because the test result feedback is slow due to the complicated tube making process and long period.
Therefore, the resolution performance of the MCP cannot be completely matched with that of the micro-light image intensifier at present, and because the image intensifier is too many in variables in the process of controlling a tube, when the tube resolution is unqualified, the reason that the resolution cannot reach the preset standard and requirement is difficult to accurately position can only be based on theoretical and empirical researches, and possible problems can be analyzed, so that the final conclusion has poor reliability and the waste of resources and time is caused.
In addition, in the prior art, an attempt is made to measure the resolution of the MCP, for example, a low-light image intensifier with better indexes and with MCP as electron multiplication is selected, and the resolution value R 0 of the low-light image intensifier is measured on a common low-light image intensifier test bench as the standard value of the resolution of the MCP to be measured; then, after the MCP is detached, performing independent test, observing dark emission bright spot images on a fluorescent screen, calculating the average value of the bright spot diameters, and taking the average value as a measurement standard value d1; then, for the MCP device to be tested, the same method is adopted to carry out independent test, the average value of the bright spot diameter can be obtained and used as a measured value d2, and the resolution of the MCP to be tested is calculated as follows: (d 1/d 2) R 0. However, in this method, the quality and index of the MCP itself, which is the measurement basis, are used as the reference, but it is difficult to ensure the quality requirement thereof, and at the same time, the resolution standard obtained is the resolution of the microimage intensifier, and not the resolution performance of the MCP, so that the resolution performance of the MCP cannot be directly reflected and obtained.
Therefore, how to evaluate the resolution performance through the test system after the MCP fabrication is completed, and to guide the rapid iteration and optimization of the process is always a difficult problem faced by MCP production and application manufacturers.
Prior art literature:
Patent document 1: CN104913909A micro-channel plate resolution measuring device
Disclosure of Invention
In view of the problem that the resolution of the MCP cannot be directly evaluated in the prior art, the invention aims to provide a micro-channel plate output electron speckle test method and a micro-channel plate output electron speckle test system, which are based on an electron motion track theoretical model in a near-patch type electron optical system, collect a speckle image of MCP output electrons on a fluorescent screen by using a camera, evaluate the resolution of the MCP according to the diameter of the speckle after image processing by a comparison method, and fill the blank that manufacturers and users cannot measure the resolution of the MCP.
According to a first aspect of the present invention, a micro-channel plate output electron speckle test system is provided, comprising a light source, a photocathode, a test fixture, a fluorescent screen, a camera, and a computer system for image processing;
The light source is arranged for emitting a light beam;
the photocathode is arranged at the front position of the light source and is irradiated by a light beam to excite photoelectrons;
The test fixture is arranged at the front position of the photocathode and is used for clamping a micro-channel plate, and after the micro-channel plate is used for carrying out electron multiplication on incident photoelectrons, the emergent electrons fly to the fluorescent screen in a parabolic track under the action of an electric field and are projected on the fluorescent screen to form a dispersed circular spot;
the camera is arranged in front of the fluorescent screen and is used for collecting the speckle image;
the computer system is used for carrying out data processing according to the speckle images to obtain electronic radial offset;
Wherein, in the test fixture, at least one adjusting washer is arranged between the microchannel plate and the fluorescent screen and is used for adjusting the distance between the output surface of the microchannel plate and the fluorescent screen.
As an optional embodiment, in the test fixture, a metal sheet with a peripheral dimension consistent with that of the microchannel plate is disposed in the direction of the input surface of the microchannel plate, and a plurality of first through holes are disposed on the surface of the metal sheet and used for regulating and controlling the diameter of the electron beam spot input by the microchannel plate. The thickness of the metal sheet is 10-100 mu m, the number of the first through holes is 1-10, and the aperture of the first through holes is 10-100 mu m.
As an optional embodiment, in the test fixture, a metal pressing sheet with a peripheral dimension consistent with that of the microchannel plate and the metal sheet is further disposed in the direction of the input surface of the microchannel plate, the metal pressing sheet presses the metal sheet and presses the metal sheet on the input surface of the microchannel plate, and a second through hole corresponding to the first through hole is disposed on the metal pressing sheet, and the aperture of the second through hole is larger than that of the first through hole. The thickness of the metal pressing sheet is 0.5-3mm, the number of the second through holes is 1-10, and the aperture of the second through holes is 1-5 mm.
As an alternative embodiment, the adjusting washer is a metal washer, and the thickness is 1-20cm.
As an alternative embodiment, the test fixture comprises an upper fixture, an elastic washer, a metal washer, a microchannel plate, an inner metal claw disk and a lower fixture which are arranged in sequence;
the lower clamp comprises a metal cylinder and a ceramic base which are positioned in the direction of the input surface of the microchannel plate;
the upper clamp comprises an outer metal claw disc and a ceramic cylinder which are positioned in the direction of the output surface of the microchannel plate;
The metal cylinder, the ceramic base, the elastic gasket, the metal gasket, the inner metal claw disc, the outer metal claw disc and the ceramic cylinder are all of annular structures and are concentrically distributed in sequence from bottom to top;
The metal cylinder is provided with an inner step surface and an outer step surface, the ceramic base is arranged on the outer step surface of the metal cylinder, the elastic gasket is arranged on the inner step surface of the metal cylinder, and the metal gasket is arranged on the elastic gasket in a cushioning manner;
The outer wall of the ceramic base is provided with a guide groove, the inner metal claw disc is provided with a guide claw, the guide claw of the inner metal claw disc is arranged to be attached to the guide groove of the outer wall of the ceramic base and axially slide so as to press the micro-channel plate placed on the metal gasket, a metal sheet and a metal pressing sheet are sequentially arranged between the input surface of the micro-channel plate and the metal gasket, the metal pressing sheet is pressed on the metal sheet, and through holes with consistent positions are correspondingly arranged on the metal sheet and the metal pressing sheet; the aperture of the through hole on the metal pressing sheet is larger than that of the through hole on the metal sheet;
The outer wall of the ceramic base is provided with a clamping groove, the outer metal claw disc is provided with a claw, and the claw is arranged to be clamped into the clamping groove when the outer metal claw disc is downwards close to the inner metal claw disc and moves to a preset position so as to fix the micro-channel plate;
The lower clamp further comprises a first ceramic gasket and a cathode ring which are sequentially arranged below the metal cylinder, the ceramic base, the metal cylinder, the first ceramic gasket and the cathode ring are sequentially overlapped and formed, the outer diameters of the ceramic base, the metal cylinder and the first ceramic gasket are the same, and the cathode ring faces the photocathode;
the upper clamp further comprises a metal ring, a second ceramic washer, a spacer ring and an adjusting washer fluorescent screen which are sequentially arranged above the ceramic cylinder, the outer metal claw disc, the ceramic cylinder, the metal ring, the second ceramic washer, the spacer ring, the adjusting washer and the fluorescent screen are sequentially formed in a superposition mode, and the outer diameters of the outer metal claw disc, the ceramic cylinder, the metal ring, the second ceramic washer, the spacer ring, the adjusting washer and the fluorescent screen are identical.
According to a second aspect of the object of the present invention, there is also provided a method for testing a microchannel plate output electron speckle, the method comprising the steps of:
working voltages are respectively applied to a photocathode, a microchannel plate and a fluorescent screen in the test system;
The microchannel plate with working voltage and fluorescent screen 0 are equivalent to be plate capacitor, two plates corresponding to the plate capacitor are respectively defined as cathode and anode, the microchannel plate is set as anode, the electrode spacing is l, the fluorescent screen is set as cathode, high voltage va=u, vo=0 is applied between the plates, then longitudinal uniform electric field E is formed between the two plates, and the electric potential along Z axis direction is Assuming that the initial emission angle of the outgoing electron from the O point is α, the initial energy of the outgoing electron and the energy thereof in the r and z axis directions are defined as ε 0、εr、εz, respectively, the motion trail of the electron is expressed as:
when the outgoing electrons reach the fluorescent screen, the radial height of the falling point is as follows:
In a near-patch focusing tube, a kilovolt-level high voltage is applied between the microchannel plate and the phosphor screen, so u > ε z, then we obtain:
εr＝ε0sin2α
This gives:
Taking the angle distribution and the energy distribution of the emergent electrons into consideration, taking sin alpha as the maximum value of 1 and the maximum initial kinetic energy as epsilon m, obtaining the maximum dispersion radius of the emergent electron beam spots as follows:
The high voltage u is applied between the plates to be a fixed value, so that the dispersion spots with different diameters are obtained by changing the initial kinetic energy of the output electrons or the voltage and the interval between the microchannel plate and the fluorescent screen in the test process;
Collecting diffuse spot images with different diameters between a microchannel plate and a fluorescent screen under different voltages and different distances through a camera, and obtaining the actual diameter of the diffuse spot after graphic processing;
Thus, the electron radial offset is obtained by digital comparison of the diameters of the diffuse spots for evaluating the resolution.
In an embodiment of the invention, the distance between the microchannel plate and the fluorescent screen is adjusted by using adjusting washers with different thicknesses, so as to obtain the dispersed circular spots with different diameters on the fluorescent screen.
The microchannel plate output electron dispersion spot testing method and the microchannel plate output electron dispersion spot testing system are combined, based on the conventional microchannel plate testing clamp, a metal sheet and a metal pressing sheet are added on the input surface of the microchannel plate, and the size of an incident electron beam spot is controlled; a metal gasket is added on the output surface of the microchannel plate to control the distance between the emergent electrons and the fluorescent screen; after the electrons are emitted from the microchannel plate, a dispersed circular spot is formed by projecting the electrons onto a fluorescent screen in a parabolic track under the action of an electric field, an image is acquired by a camera, and then pixels are extracted through image processing for data analysis, so that the radial offset of the electrons, namely the dispersion degree of the electrons, is obtained.
The invention effectively evaluates the change of the resolution of the microchannel plate based on the change of the size and radial offset of the acquired electron dispersion spots by improving the structural design of the test fixture, and changes the geometric structure of the microchannel plate and the test technological parameters (such as changing the distance between the microchannel plate and a fluorescent screen and changing the aperture of the applied high-voltage source and the microchannel plate) in the test process, thereby providing a reliable and rapid resolution evaluation method and a test system for microchannel plate manufacturers and users, filling the problem that the manufacturers and users of the microchannel plate cannot directly evaluate the resolution, being applicable to the conventional test instruments and microchannel plates with different specifications, effectively improving the quality of the microchannel plate and avoiding the problem of scrapping a micro-image intensifier caused by the fact that the resolution of the microchannel plate cannot meet the requirements.
It should be understood that all combinations of the foregoing concepts, as well as additional concepts described in more detail below, may be considered a part of the inventive subject matter of the present disclosure as long as such concepts are not mutually inconsistent. In addition, all combinations of claimed subject matter are considered part of the disclosed inventive subject matter.
The foregoing and other aspects, embodiments, and features of the present teachings will be more fully understood from the following description, taken together with the accompanying drawings. Other additional aspects of the invention, such as features and/or advantages of the exemplary embodiments, will be apparent from the description which follows, or may be learned by practice of the embodiments according to the teachings of the invention.
Drawings
The drawings are not intended to be drawn to scale. In the drawings, each identical or nearly identical component that is illustrated in various figures may be represented by a like numeral. For purposes of clarity, not every component may be labeled in every drawing. Embodiments of various aspects of the invention will now be described, by way of example, with reference to the accompanying drawings, in which:
FIG. 1 is a schematic diagram of a microchannel plate output electronic speckle test system in accordance with an embodiment of the invention.
Fig. 2 is a schematic structural view of a test fixture according to an embodiment of the present invention.
Fig. 3 is a schematic diagram of electronic motion of a proximity system in accordance with an embodiment of the present invention.
Fig. 4 is a schematic diagram of a process for digitizing a luminescent screen test picture taken by a camera according to an embodiment of the invention.
Detailed Description
For a better understanding of the technical content of the present invention, specific examples are set forth below, along with the accompanying drawings.
Aspects of the invention are described in this disclosure with reference to the drawings, in which are shown a number of illustrative embodiments. It should be understood that the various concepts and embodiments described above, as well as those described in more detail below, may be implemented in any of a number of ways, as the disclosed concepts and embodiments are not limited to any implementation. Additionally, some aspects of the disclosure may be used alone or in any suitable combination with other aspects of the disclosure.
{ Microchannel plate output electronic diffuse spot test system }
The microchannel plate output electron speckle test system in connection with the embodiments shown in fig. 1 and 2 comprises a light source 100, a photocathode 200, a test fixture 300, a phosphor screen 400, a camera 500, and a computer system for image processing, which are arranged in this order.
A light source 100 arranged to emit a light beam.
The photocathode 200 is disposed at a position in front of the light source 100, and is irradiated with a light beam to excite photoelectrons e 1.
The test fixture 300 is disposed at a front position of the photocathode 200, and the test fixture 300 is used for clamping the micro-channel plate 20, and after the incident photoelectron e1 is subjected to electron multiplication through the micro-channel plate 20, the emergent electron e2 flies to the fluorescent screen 400 in a parabolic track under the action of an electric field, and a dispersed circular spot is projected on the fluorescent screen 400.
A camera 500, disposed in front of the phosphor screen 400, is provided for capturing the speckle image.
And the computer system is used for carrying out data processing according to the speckle images to obtain the electronic radial offset.
Wherein in the test fixture 300, at least one adjustment washer 18 is provided between the microchannel plate 20 and the luminescent screen 400 for adjusting the distance between the output face of the microchannel plate 20 and the luminescent screen 400.
In combination with the example shown in fig. 2, in the design of the test fixture 300 proposed in the present invention, on the basis of the existing micro-channel plate test fixture, for example, the test fixture with publication number CN 215728302U, a metal sheet with a certain thickness is placed between the metal gasket located in the direction of the input surface and the micro-channel plate, and a certain number of through holes are formed thereon, so as to realize the number and diameter control of the input electron beam spots. A metal gasket with a certain thickness is placed between the isolating ring of the output face and the fluorescent screen to be used as a distance adjusting gasket, the thickness of the metal gasket is adjustable, and the distance control between the output electrons and the fluorescent screen is realized. The method comprises the steps of taking a standard microchannel plate as a sample for testing, emitting photoelectrons onto the microchannel plate by a cathode, collecting images on a fluorescent screen by a camera and processing the images to obtain the diameters of the diffuse spots, taking the data as a standard value, then changing the production process of the microchannel plate or the distance between the microchannel plate and the fluorescent screen, voltage and aperture of the microchannel plate, and comparing the diameters of the diffuse spots obtained by testing, thereby judging the change of resolution.
The variation trend of the resolution of the micro-channel plate under different process conditions obtained based on the test system disclosed by the invention is consistent with the variation trend of the resolution of the micro-optical image intensifier after tube making, so that the defects of micro-channel plate production and application manufacturers in MCP resolution detection can be overcome by the test system and the test method disclosed by the invention, and the development and optimization of MCP resolution performance improvement technology and process are effectively improved.
Referring to fig. 1 and 2, in the exemplary test fixture 300, a metal sheet 17 having an outer peripheral dimension identical to that of the microchannel plate 20 is disposed in the direction of the input surface of the microchannel plate 20, and a plurality of first through holes are disposed on the surface of the metal sheet 17 for adjusting and controlling the diameter of the electron beam spot input by the microchannel plate. Wherein the thickness of the metal sheet 17 is 10-100 μm, the number of the first through holes is 1-10, and the aperture of the first through holes is 10-100 μm.
Thus, a foil 17 is placed on the input face of the MCP for controlling the size of the electron beam spot incident on the input face of the microchannel plate.
As shown in fig. 1 and 2, in the exemplary test jig 300, in the direction of the input surface of the microchannel plate 20, there is further provided a metal pressing sheet 16 having an outer peripheral dimension identical to that of both the microchannel plate 20 and the metal sheet 17, the metal pressing sheet 16 presses the metal sheet 17 and presses the metal sheet 17 together against the input surface of the microchannel plate 20, and there is provided a second through hole corresponding to the first through hole in position on the metal pressing sheet 16, the second through hole having a larger diameter than the first through hole. Wherein, the thickness of the metal pressing sheet 16 is 0.5-3mm, the number of the second through holes is 1-10, and the aperture of the second through holes is 1-5 mm.
Thus, the metal pressing piece 16, which is completely identical in outer diameter dimension and through hole position with the metal sheet, is pressed over the metal sheet 17, preventing deformation and dislocation of the metal sheet. Meanwhile, the aperture of the through hole of the metal pressing sheet 16 is larger than that of the through hole of the metal sheet, and the light beam passing is not affected.
In an embodiment of the present invention, the adjustment washer 18 may be designed as a metal washer, having a thickness of 1-20cm, placed on the spacer of the microchannel plate test fixture for controlling the distance of movement of the MCP output electrons.
{ Test jig 300 })
As shown in fig. 2, a test fixture 300 is modified from the prior art design and includes an upper fixture, an elastic washer 5, a metal washer 6, a microchannel plate 20, an inner metal claw disk 7, and a lower fixture, which are sequentially disposed.
The lower clamp comprises a metal cylinder 3 and a ceramic base 4 which are positioned in the direction of the input surface of the microchannel plate 20.
The upper clamp comprises an outer metal claw disc 8 and a ceramic cylinder 9 which are positioned in the direction of the output surface of the microchannel plate 20.
The metal cylinder 3, the ceramic base 4, the elastic gasket 5, the metal gasket 6, the inner metal claw disc 7, the outer metal claw disc 8 and the ceramic cylinder 9 are all of annular structures and are concentrically distributed in sequence from bottom to top.
The metal cylinder 3 is provided with an inner step surface and an outer step surface, the ceramic base 4 is arranged on the outer step surface of the metal cylinder 3, the elastic gasket 5 is arranged on the inner step surface of the metal cylinder 3, and the metal gasket 6 is arranged on the elastic gasket 5 in a cushioning manner.
The outer wall of the ceramic base 4 is provided with a guide groove, the inner metal claw disk 7 is provided with a guide claw, the guide claw of the inner metal claw disk is arranged to be attached to the guide groove of the outer wall of the ceramic base and axially slide so as to press a micro-channel plate 20 placed on the metal gasket 6, a metal sheet 17 and a metal pressing sheet 16 are sequentially arranged between the input surface of the micro-channel plate 20 and the metal gasket 6, the metal pressing sheet 16 is pressed on the metal sheet 17, and through holes with consistent positions are correspondingly arranged on the metal sheet 17 and the metal pressing sheet 16; the aperture of the through-holes in the metal sheet 16 is larger than the aperture of the through-holes in the metal sheet 17.
When the micro-channel plate is assembled and pre-positioned, the inner metal claw disk 7 and the micro-channel plate do not move horizontally, so that the micro-channel plate is prevented from being scratched, and the metal film on the surface of the micro-channel plate is effectively protected.
The outer wall of the ceramic base 4 is provided with a clamping groove, and the outer metal claw disk 8 is provided with a claw which is arranged to be clamped into the clamping groove when the outer metal claw disk is downwardly close to the inner metal claw disk 8 and moves to a predetermined position so as to fix the micro-channel plate 20.
In an alternative embodiment, the clamping groove is L-shaped and comprises a first groove and a second groove, wherein the first groove is axially arranged along the ceramic base 6, and the second groove is circumferentially arranged along the ceramic base 3.
Specifically, the outer metal claw disk 8 is pressed down, the claw 81 slides into the first groove in the axial direction, the outer metal claw disk 8 is rotated again, the elastic washer 5 is compressed, the claw 81 slides into the second groove, and the elastic washer 5 maintains compressive stress, so that the upper clamp 15 and the lower clamp 14 are clamped.
The lower clamp further comprises a first ceramic gasket 2 and a cathode ring 1 which are sequentially arranged below the metal cylinder 3, wherein the ceramic base 4, the metal cylinder 3, the first ceramic gasket 2 and the cathode ring 1 are sequentially formed in a superposition mode, the outer diameters of the ceramic base 4, the metal cylinder 3 and the first ceramic gasket 2 are the same, and the cathode ring 1 faces the photocathode 200.
The upper fixture further comprises a metal ring 10, a second ceramic washer 11, a spacer 12, an adjusting washer 18 and a fluorescent screen 400 which are sequentially arranged above the ceramic cylinder 9, wherein the outer metal claw disc 8, the ceramic cylinder 9, the metal ring 10, the second ceramic washer 11, the spacer 12, the adjusting washer 18 and the fluorescent screen 400 are sequentially overlapped and formed, and the outer diameters of the outer metal claw disc 8, the ceramic cylinder 9, the metal ring 10, the second ceramic washer 11, the spacer 12, the adjusting washer 18 and the fluorescent screen 400 are the same.
In an alternative embodiment, the cathode ring 1 and the metal cylinder 3 are made of conductive kovar alloy metal, and the first ceramic washer 2 and the ceramic base 4 are made of insulating ceramic materials.
Wherein, cathode ring 1, first ceramic washer 2, metal cylinder 3, ceramic base 4 are welded to form an integral lower fixture.
In an alternative embodiment, the outer diameters of the first ceramic washer 2, the metal cylinder 3 and the ceramic base 4 are the same, so that the assembly is facilitated by using a clamp.
As shown in fig. 2, the metal cylinder 3 is provided with an inner step surface 31 and an outer step surface, the ceramic base 4 is arranged on the outer step surface of the metal cylinder 3, the elastic washer 5 is placed on the inner step surface 31 of the metal cylinder 3, the metal washer 6 is arranged on the elastic washer 5 in a cushioning manner, and after the placement is completed, the upper end surface of the metal washer 6 is higher than the upper end surface of the metal cylinder 3. The inner diameter of the outer stepped surface of the metal cylinder 3 is slightly smaller than the inner diameter of the ceramic base 4, so that the ceramic base 4 is conveniently sleeved on the metal cylinder 3.
The outer metal claw disk 8, the metal ring 10 and the isolation ring 12 are made of conductive kovar alloy metal, and the ceramic cylinder 9 and the second ceramic washer 11 are made of insulating ceramic materials.
The outer metal claw disk 8, the ceramic cylinder 9, the metal ring 10, the second ceramic washer 11, the spacer 12 and the screen 13 are welded to form an integrally formed upper clamp.
Wherein, the outer diameter of the elastic gasket 5 and the metal gasket 6 is slightly larger than the inner diameter of the inner step surface 31 of the metal cylinder 3, so that the elastic gasket 5 and the metal gasket 6 are conveniently placed on the inner step surface 31 of the metal cylinder 3, and then the metal pressing sheet 16, the metal sheet 17 and the micro-channel plate 20 are stacked.
The elastic gasket 5 is a conductive rubber gasket, and may be conductive and elastic.
Further, the inner diameter of the metal gasket 6 is slightly smaller than the outer diameter of the microchannel plate, the outer diameter of the metal gasket 6 is slightly larger than that of the microchannel plate, so that the microchannel plate can be effectively placed.
When the micro-channel plate is disassembled, the upper clamp 15 is pressed, the elastic gasket 5 is contracted and rotated again, so that the clamping jaws 81 slide out from the second groove and the first groove, the lower clamp 14 and the upper clamp 15 are separated, and the tested micro-channel plate is taken out.
As shown in fig. 1 and 2, the photocathode 200, the microchannel plate 20 and the phosphor screen 400 are respectively and correspondingly provided with an operating power source, namely a first voltage source 201, a second voltage source 21 and a third voltage source 19 as shown in the drawings.
Referring to fig. 2, as an alternative embodiment, the metal cylinder 3 is connected to the positive electrode of the second voltage source 21 (high voltage source), and the output current of the second voltage source 21 sequentially passes through the metal cylinder 3, the elastic washer 5 and the metal washer 6 to provide the working voltage input of the micro-channel plate 20.
The outer metal claw disk 8 is connected to the negative electrode of the second voltage source 21, and the second voltage source 21 sequentially passes through the outer metal claw disk 8 and the inner metal claw disk 7 to provide a current loop of the micro-channel plate so as to form a closed circuit, so that the micro-channel plate is in a voltage loading test state.
The spacer 12 is connected to a third voltage source 19 (high voltage source) to provide an operating voltage for the phosphor screen 400 through the spacer 12.
It should be understood that, in the embodiment of the present invention, the computer system and the camera 500 (such as a CCD camera) are configured with corresponding working power supplies, which will not be described in detail.
{ Microchannel plate output electronic diffuse spot test method })
Referring to fig. 3 and 4, the micro-channel board output electronic speckle test system according to the above embodiment performs the output electronic speckle test process of the micro-channel board, including:
Working voltages are respectively applied to the photocathode 200, the microchannel plate 20 and the fluorescent screen 400 in the test system;
The microchannel plate 20 with the working voltage applied and the fluorescent screen 400 are equivalent to be a plate capacitor, two plate electrodes corresponding to the plate capacitor are respectively defined as a cathode and an anode, the microchannel plate 20 is taken as the anode, the electrode distance is l, the fluorescent screen 400 is taken as the cathode, and high voltages va=u and vo=0 are applied between the plates, so that a longitudinal uniform electric field E is formed between the two plates, and the electric potential along the Z-axis direction is Assuming that the initial emission angle of the outgoing electron from the O point is α, the initial energy of the outgoing electron and the energy thereof in the r and z axis directions are defined as ε 0、εr、εz, respectively, the motion trail of the electron is expressed as:
when the outgoing electrons reach the fluorescent screen, the radial height of the falling point is as follows:
In a near-patch focusing tube, a kilovolt-level high voltage is applied between the microchannel plate and the phosphor screen, so u > > ε z, then we obtain:
εr＝ε0sin2α
This gives:
Taking the angle distribution and the energy distribution of the emergent electrons into consideration, taking sin alpha as the maximum value of 1 and the maximum initial kinetic energy as epsilon m, obtaining the maximum dispersion radius of the emergent electron beam spots as follows:
The high voltage u is applied between the plates to be a fixed value, so that the dispersion spots with different diameters are obtained by changing the initial kinetic energy of the output electrons or the voltage and the interval between the microchannel plate and the fluorescent screen in the test process;
Collecting diffuse spot images with different diameters between a microchannel plate and a fluorescent screen under different voltages and different distances through a camera, and obtaining the actual diameter of the diffuse spot after graphic processing;
Thus, the electron radial offset is obtained by digital comparison of the diameters of the diffuse spots for evaluating the resolution.
In the test method, the distance between the micro-channel plate and the fluorescent screen is adjusted by using the adjusting washers 18 with different thicknesses, so as to obtain the dispersed circular spots with different diameters on the fluorescent screen, and further the resolution of the micro-channel plate can be evaluated through numerical comparison.
In order to better understand the testing procedure of the above embodiments of the present invention, the following will further describe the specific embodiments.
{ Example 1}
Firstly, a microchannel plate with the aperture of 10 mu m, the hole spacing of 12 mu m and the output end coating depth of 2.0d is selected as a test object, the test object is installed in a test fixture 300, a metal sheet 17 is assembled on the input end of the microchannel plate, the thickness of 50 mu m, the number of through holes of 5 and the aperture of 30 mu m are selected, a matched metal pressing sheet 16 is selected, and the thickness of 1mm, the number of through holes of 5 and the aperture of 3mm are selected. A metal gasket arranged between the isolation ring 12 and the fluorescent screen, the thickness of which is 5cm;
secondly, selecting 5000V anode voltage, realizing electron multiplication through a microchannel plate after electrons are incident, presenting 5 bright spots on a fluorescent screen, and collecting images by using a camera;
And thirdly, performing image processing by using Matlab in a computer system to obtain the diameters of the diffuse spots of 5 bright spots, and taking an average value as a reference value.
{ Example 2}
Firstly, a microchannel plate with the aperture of 10 mu m, the hole spacing of 12 mu m and the output end coating depth of 4.0d is selected as a research object, the microchannel plate is installed in a test fixture 300, metal sheets assembled on the input end of the microchannel plate are selected, the thickness of the metal sheets is 50 mu m, the number of through holes is 5, the aperture of the metal sheets is 30 mu m, matched metal press sheets are selected, and the thickness of the metal sheets is 1mm, the number of the through holes is 5, and the aperture of the metal sheets is 3mm. A metal gasket is mounted between the spacer 12 and the screen, with a thickness of 5cm being chosen.
Secondly, selecting 5000V anode voltage, realizing electron multiplication through a microchannel plate after electrons are incident, presenting 5 bright spots on a fluorescent screen, and collecting images by using a camera;
Thirdly, performing image processing by using Matlab in a computer system to obtain the diameters of the diffuse spots of 5 bright spots, and taking an average value as the actual diameters of the diffuse spots under the group of tests.
{ Example 3}
Firstly, a microchannel plate with the aperture of 10 mu m, the hole spacing of 12 mu m and the output end coating depth of 2.0d is selected as a research object, the microchannel plate is installed in a test fixture, a metal sheet is assembled on the input end of the microchannel plate, the thickness of 50 mu m, the number of through holes of 5 and the aperture of 30 mu m are selected, matched metal pressing sheets are selected, and the thickness of 1mm, the number of through holes of 5 and the aperture of 3mm are selected. A metal gasket is arranged between the isolation ring and the fluorescent screen, and the thickness is 5cm.
And secondly, selecting 2000V anode voltage, realizing electron multiplication through MCP after electrons are incident, presenting 5 bright spots on a fluorescent screen, and collecting images by using a camera.
Thirdly, carrying out image processing by Matlab in a computer system to obtain the diameters of the diffuse spots of 5 bright spots, and taking the average value as the actual diameters of the diffuse spots under the group of tests.
{ Example 4}
Firstly, a microchannel plate with the aperture of 5 mu m, the hole spacing of 6 mu m and the coating depth of 2.0d at the output end is selected as a research object, the microchannel plate is installed in a test fixture, and the input end is assembled with: the metal sheet is provided with a plurality of metal layers, selecting a thickness of 50 μm, 5 through holes and a pore diameter of 30 μm; and (3) metal tabletting, wherein the thickness is 1mm, the number of through holes is 5, and the aperture is 3mm. A metal gasket is arranged between the isolation ring and the fluorescent screen, and the thickness is 5cm;
Secondly, anode voltage is selected to be 5000V, electron multiplication is realized through MCP after electrons are incident, 5 bright spots are displayed on a fluorescent screen, and an image is acquired by a camera;
Thirdly, performing image processing by using Matlab in a computer system to obtain the diameters of the diffuse spots of 5 bright spots, and taking an average value as the actual diameters of the diffuse spots under the group of tests.
By combining the foregoing examples 1-4, the MCP hole pitch, the depth of the coating film at the output end, the anode voltage, and the diameter of the diffuse spots were changed according to the test method of the microchannel plate, and the test results are shown in the following table.
| Example 1 | Example 2 | Example 3 | Example 4 | |
| Depth of output electrode | 2.0d | 4.0d | 2.0d | 2.0d |
| Anode voltage | 5000V | 5000V | 2000V | 5000V |
| Pitch of holes | 12μm | 12μm | 12μm | 6μm |
| Diameter of diffuse plaque | 3.1mm | 2.5mm | 3.6mm | 2.1mm |
According to the test data of the table, the diameter of the diffuse spots is changed along with the change of the MCP hole distance, the coating depth of the output end and the parameters of anode voltage in the test process, and the order of the diameters of the diffuse spots tested in the four process states can correspond to the resolution of corresponding MCP tubes (image intensifier, also called image tube), so that the test method and the test system provided by the invention can effectively evaluate the resolution of the MCP.
While the invention has been described with reference to preferred embodiments, it is not intended to be limiting. Those skilled in the art will appreciate that various modifications and adaptations can be made without departing from the spirit and scope of the present invention. Accordingly, the scope of the invention is defined by the appended claims.
Claims (9)
1. The microchannel plate output electronic dispersion circular spot testing system is characterized by comprising a light source (100), a photocathode (200), a testing fixture (300), a fluorescent screen (400), a camera (500) and a computer system for image processing, wherein the light source, the photocathode (200), the testing fixture (300), the fluorescent screen (400) and the camera (500) are sequentially arranged;
-said light source (100) being arranged for emitting a light beam;
The photocathode (200) is arranged at the front position of the light source (100) and is irradiated by a light beam to excite photoelectrons (e 1);
The test fixture (300) is arranged at the front position of the photocathode (200), the test fixture (300) is used for clamping the micro-channel plate (20), after the micro-channel plate (20) is used for carrying out electron multiplication on incident photoelectrons (e 1), outgoing electrons (e 2) fly to the fluorescent screen (400) in a parabolic track under the action of an electric field, and a dispersed circular spot is projected on the fluorescent screen (400); in the test fixture (300), at least one adjusting washer (18) is arranged between the microchannel plate (20) and the fluorescent screen (400) and is used for adjusting the distance between the output surface of the microchannel plate (20) and the fluorescent screen (400) so as to obtain dispersed circular spots with different diameters on the fluorescent screen;
The camera (500) is arranged in front of the fluorescent screen (400) and is used for acquiring dispersed circular spot images with different diameters, which are obtained under different voltages and different distances between the microchannel plate and the fluorescent screen;
The computer system is used for carrying out data processing according to the dispersed circular spot images with different diameters, which are obtained between the micro-channel plate and the fluorescent screen under different voltages and different distances, so as to obtain the radial offset of electrons; and evaluating the resolution by the radial offset of the electrons.
2. The micro-channel plate output electron-dispersion circular spot testing system according to claim 1, wherein in the testing fixture (300), a metal sheet (17) with the outer peripheral dimension consistent with the micro-channel plate (20) is arranged in the direction of the input surface of the micro-channel plate (20), and a plurality of first through holes are arranged on the surface of the metal sheet (17) for regulating and controlling the diameter of the micro-channel plate input electron beam spot.
3. The microchannel plate output electronic dispersion circular spot testing system according to claim 2, wherein the thickness of the metal sheet (17) is 10-100 μm, the number of the first through holes is 1-10, and the aperture of the first through holes is 10-100 μm.
4. A micro-channel plate output electronic dispersion circular spot testing system according to claim 2 or 3, characterized in that, in the testing fixture (300), in the direction of the input surface of the micro-channel plate (20), a metal pressing sheet (16) with the peripheral dimension consistent with that of the micro-channel plate (20) and the metal sheet (17) is further provided, the metal pressing sheet (16) presses the metal sheet (17) and presses the input surface of the micro-channel plate (20) together, and a second through hole corresponding to the first through hole is provided on the metal pressing sheet (16), and the aperture of the second through hole is larger than that of the first through hole.
5. The microchannel plate output electronic dispersion circular spot testing system according to claim 4, wherein the thickness of the metal pressing sheet (16) is 0.5-3mm, the number of the second through holes is 1-10, and the aperture of the second through holes is 1-5 mm.
6. The microchannel plate output electronic dispersion circular spot testing system according to claim 4, wherein the adjusting washer (18) is a metal washer having a thickness of 1-20cm.
7. The microchannel plate output electronic dispersion circular spot testing system according to claim 4, wherein the testing fixture (300) comprises an upper fixture, an elastic washer (5), a metal washer (6), a microchannel plate (20), an inner metal claw disk (7) and a lower fixture, which are arranged in sequence;
the lower clamp comprises a metal cylinder (3) and a ceramic base (4) which are positioned in the direction of the input surface of the microchannel plate (20);
The upper clamp comprises an outer metal claw disc (8) and a ceramic cylinder (9) which are positioned in the direction of the output surface of the microchannel plate (20);
The metal cylinder (3), the ceramic base (4), the elastic gasket (5), the metal gasket (6), the inner metal claw disc (7), the outer metal claw disc (8) and the ceramic cylinder (9) are all of annular structures and are concentrically and sequentially distributed from bottom to top;
The metal cylinder (3) is provided with an inner step surface and an outer step surface, the ceramic base (4) is arranged on the outer step surface of the metal cylinder (3), the elastic gasket (5) is arranged on the inner step surface of the metal cylinder (3), and the metal gasket (6) is arranged on the elastic gasket (5) in a cushioning manner;
The outer wall of the ceramic base (4) is provided with a guide groove, the inner metal claw disc (7) is provided with a guide claw, the guide claw of the inner metal claw disc is arranged to be attached to the guide groove of the outer wall of the ceramic base and axially slide so as to press a micro-channel plate (20) placed on the metal gasket (6), a metal sheet (17) and a metal pressing sheet (16) are sequentially arranged between the input surface of the micro-channel plate (20) and the metal gasket (6), the metal pressing sheet (16) is pressed on the metal sheet (17), and through holes with consistent positions are correspondingly arranged on the metal pressing sheet (16); the aperture of the through hole on the metal pressing sheet (16) is larger than that of the through hole on the metal sheet (17);
The outer wall of the ceramic base (4) is provided with a clamping groove, the outer metal claw disc (8) is provided with a claw, and the claw is arranged to be clamped into the clamping groove when the outer metal claw disc is downwards close to the inner metal claw disc (8) and moves to a preset position so as to fix the micro-channel plate (20);
The lower clamp further comprises a first ceramic gasket (2) and a cathode ring (1) which are sequentially arranged below the metal cylinder (3), wherein the ceramic base (4), the metal cylinder (3), the first ceramic gasket (2) and the cathode ring (1) are sequentially formed in a superposition mode, the outer diameters of the ceramic base (4), the metal cylinder (3) and the first ceramic gasket (2) are the same, and the cathode ring (1) faces the photocathode (200);
the upper clamp is characterized by further comprising a metal ring (10), a second ceramic gasket (11), a spacer ring (12), an adjusting gasket (18) and a fluorescent screen (400) which are sequentially arranged above the ceramic cylinder (9), wherein the outer metal claw disc (8), the ceramic cylinder (9), the metal ring (10), the second ceramic gasket (11), the spacer ring (12), the adjusting gasket (18) and the fluorescent screen (400) are sequentially overlapped and formed, and the outer diameters of the outer metal claw disc (8), the ceramic cylinder (9), the metal ring (10), the second ceramic gasket (11), the spacer ring (12), the adjusting gasket (18) and the fluorescent screen (400) are the same.
8. A microchannel plate output electronic dispersed circular spot testing method of the microchannel plate output electronic dispersed circular spot testing system according to claim 7, characterized in that the testing method comprises the following steps:
working voltages are respectively applied to a photocathode (200), a microchannel plate (20) and a fluorescent screen (400) in the test system;
The microchannel plate (20) to which the working voltage is applied and the fluorescent screen (400) are equivalently formed into a plate capacitor, two plate electrodes corresponding to the plate capacitor are respectively defined as a cathode and an anode, the microchannel plate (20) is taken as the anode, the electrode distance is l, the fluorescent screen (400) is taken as the cathode, and high voltages va=u and vo=0 are applied between the plates, so that a longitudinal uniform electric field E is formed between the two plates, and the electric potential along the Z axis direction is as follows:
；
Assuming that the initial emission angle of the outgoing electron from the O point is α, the initial energy of the outgoing electron and the energy thereof in the r and z axis directions are defined as ε 0、εr、εz, respectively, the motion trail of the electron is expressed as:
；
when the outgoing electrons reach the fluorescent screen, the radial height of the falling point is as follows:
；
In a near-patch focusing tube, a kilovolt-level high voltage is applied between the microchannel plate and the phosphor screen, so u > ε z, then we obtain:
；
；
This gives:
；
Taking the angle distribution and the energy distribution of the emergent electrons into consideration, taking sin alpha as the maximum value of 1 and the maximum initial kinetic energy as epsilon m, obtaining the maximum dispersion radius of the emergent electron beam spots as follows:
；
The high voltage u is applied between the plates to be a fixed value, so that the dispersed circular spots with different diameters are obtained by changing the initial kinetic energy of the output electrons or the voltage and the interval between the microchannel plate and the fluorescent screen in the test process;
Collecting the dispersed circular spot images with different diameters obtained under different voltages and different distances between the microchannel plate and the fluorescent screen through a camera, and obtaining the actual diameter of the dispersed circular spot after performing graphic processing;
Thus, the electronic radial offset is obtained by digital comparison of the diameters of the dispersed circular spots for evaluating the resolution.
9. The method for testing the output electronic dispersed circular spots of the micro-channel plate according to claim 8, wherein the method is characterized in that the dispersed circular spots with different diameters are obtained on the fluorescent screen by using the adjusting gaskets (18) with different thicknesses to adjust the distance between the micro-channel plate and the fluorescent screen.
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| CN215728302U (en) * | 2021-08-23 | 2022-02-01 | 北方夜视科技(南京)研究院有限公司 | Micro-channel plate test fixture |
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| RU2350446C2 (en) * | 2003-03-31 | 2009-03-27 | Л-3 Коммьюникейшнз Корпорейшн | Assembly on basis of microchannel plate |
| CN104913909B (en) * | 2015-06-25 | 2017-09-05 | 北方夜视技术股份有限公司 | A kind of measurement apparatus of microchannel plate resolving power |
| CN108020325B (en) * | 2017-12-13 | 2023-06-30 | 深圳大学 | A time-of-flight measurement system based on microchannel plate gating technology |
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| CN111983345B (en) * | 2020-07-24 | 2023-03-14 | 北方夜视技术股份有限公司 | Special-shaped microchannel plate test fixture device |
| CN114487743B (en) * | 2022-01-25 | 2025-07-25 | 东莞市中科原子精密制造科技有限公司 | Microchannel plate collection efficiency testing system and testing method |
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| CN111090028A (en) * | 2019-12-16 | 2020-05-01 | 北方夜视技术股份有限公司 | Device and method for superposition test of double-piece microchannel plate |
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