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CN117467934A - Masks, mask devices and display panels - Google Patents

Masks, mask devices and display panels Download PDF

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Publication number
CN117467934A
CN117467934A CN202311433563.5A CN202311433563A CN117467934A CN 117467934 A CN117467934 A CN 117467934A CN 202311433563 A CN202311433563 A CN 202311433563A CN 117467934 A CN117467934 A CN 117467934A
Authority
CN
China
Prior art keywords
body region
clamping
slot
area
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311433563.5A
Other languages
Chinese (zh)
Inventor
付佳
冯士振
范柳彬
刘颖
周皓月
赵栋
陈源源
赵晶晶
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kunshan Govisionox Optoelectronics Co Ltd
Original Assignee
Kunshan Govisionox Optoelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kunshan Govisionox Optoelectronics Co Ltd filed Critical Kunshan Govisionox Optoelectronics Co Ltd
Priority to CN202311433563.5A priority Critical patent/CN117467934A/en
Publication of CN117467934A publication Critical patent/CN117467934A/en
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/16Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

The embodiment of the specification provides a mask, a mask device and a display panel. The mask plate can comprise: a body region extending along a first direction; wherein the body region has a first centerline parallel to the first direction, the body region being divided into a first body region and a second body region by the first centerline; a shielding region extending from a portion of the sidewall of the second body region along a second direction intersecting the first direction; the mask plate comprises at least one slot which is asymmetrically arranged relative to the first central line. The deflection torque generated by the mask plate which is asymmetric relative to the central line of the body due to the shielding area in the screen opening process can be offset to a certain extent, and the manufacturing precision of the special-shaped area of the display panel is improved.

Description

Mask plate, mask device and display panel
Technical Field
The embodiment of the specification relates to the field of electronic products, in particular to a mask plate, a mask device and a display panel.
Background
Along with development of technology, various electronic products become an indispensable part of our life, play a vital role in various fields of work, study, information communication, living and the like, and along with continuous iterative development of products, people gradually require functions of the electronic products in other aspects. Specifically, for example, photographing, face recognition, and the like.
With the continuous improvement of the use experience of human beings on electronic products, other functional components are arranged in front of the display panel. Such as front cameras, face recognition sensors, and other components. The member passes through a Notch (Notch) area or a drip area provided in the display panel, and possibly other areas of the display surface. The component placement area is not capable of vapor deposition of organic pixel material, and is typically masked using a precision mask to provide pixel openings. However, after the mask plate is provided with the special-shaped area for shielding the pixel opening area of the area, offset and turnover can be generated in the screen tensioning process, so that the manufacturing precision of the special-shaped area is affected, and the display effect of the electronic product is affected.
Disclosure of Invention
In view of this, various embodiments of the present disclosure are directed to providing a mask, a mask device, and a display panel, so as to improve the manufacturing accuracy of the abnormal region of the display panel to a certain extent, and further improve the display effect.
To achieve the above object, an embodiment of the present disclosure provides a reticle including: a body region extending along a first direction; wherein the body region has a first centerline parallel to the first direction, the body region being divided into a first body region and a second body region by the first centerline; a shielding region extending from a portion of the sidewall of the second body region along a second direction intersecting the first direction; the mask plate comprises at least one slot which is asymmetrically arranged relative to the first central line.
One embodiment of the present disclosure provides a mask assembly including the reticle.
One embodiment of the present disclosure provides a mask apparatus, including the above mask assembly.
One embodiment of the present disclosure provides a display panel, where the mask device described above is used in a manufacturing process of the display panel.
Compared with the related art, the display panel provided by the specification has the beneficial effects that: the body area of the special-shaped mask plate is divided into a first body area and a second body area along a first central line of the first direction, at least one slot is asymmetrically arranged relative to the first body area and the second body area, so that torque difference can be generated between the first body area and the second body area relative to the central area due to asymmetric slots in the screen opening process, deflection torque generated by the mask plate relative to the central line of the body due to asymmetric shielding areas in the screen opening process can be counteracted to a certain extent, and the manufacturing precision of the special-shaped area of the display panel is improved.
Drawings
The accompanying drawings are included to provide a further understanding of embodiments of the specification and are incorporated in and constitute a part of this specification, illustrate embodiments of the specification and together with the description serve to explain the principles of the specification. In the drawings.
Fig. 1 is a schematic structural diagram of a mask according to an embodiment of the present disclosure.
Fig. 2 is a schematic structural diagram of a mask according to an embodiment of the present disclosure, where a slot is located inside a clamping area.
Fig. 3 is a schematic structural diagram of a mask according to an embodiment of the present disclosure, where the number of shielding areas is multiple.
Fig. 4 is a schematic structural diagram of a body region of a mask according to an embodiment of the present disclosure, where the slot includes a half-groove located in the body region.
Detailed Description
In order that those skilled in the art will better understand the present application, a technical solution in the embodiments of the present specification will be clearly and completely described in the following description with reference to the accompanying drawings in the embodiments of the present specification, and it is apparent that the described embodiments are only some embodiments of the present specification, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are intended to be within the scope of the present application based on the embodiments herein.
It is noted that in this specification relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
Features and embodiments of various aspects of the present description are described in detail below. Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
Please refer to fig. 1. One embodiment of the present description provides a reticle 10, the reticle 10 may include a body region 110 extending along a first direction X; the body region 110 has a first centerline Z1 parallel to the first direction X, the body region 110 being divided into a first body region 111 and a second body region 113 by the first centerline 115; a shielding region 117 extending from a portion of a sidewall of the second body region 113 in a second direction Y intersecting the first direction X; at least one slot 119 provided in the body region 110, the at least one slot 119 being asymmetrically arranged with respect to the first body region 111 and the second body region 113.
In this embodiment, in the process of manufacturing the display panel, some special-shaped regions need to be manufactured. The special-shaped region can be in a water drop shape, a bang shape or other shapes. The shaped region may not have organic pixel material or other material, so the mask 10 is typically used to block the shaped region when the organic pixel material or other material is evaporated. The mask 10 may include at least one shielding region 117, where the shielding region 117 is configured to shield the shaped region during evaporation, to avoid unwanted materials on the shaped region during evaporation, and the shape and size of the shielding region 117 may be the same as the shape and size of the shaped region.
In this embodiment, the reticle 10 may include a body region 110 for supporting a shielding region 117. The body region 110 may extend lengthwise as a whole with long sides and short sides. The first direction X may refer to an extension direction of the long side of the body region 110. The short side of the body region 110 may define the second direction Y. The body region 110 may have a first centerline Z1 and a second centerline Z2. The first centerline Z1 may extend in the first direction X and pass through the center of the body region 110. The second centerline Z2 may extend in the second direction Y and also pass through the center of the body region 110. It will be appreciated that the first centerline Z1 intersects the second centerline Z2 at the center of the body region 110.
The body region 110 may be divided into a first body region 111 and a second body region 113 by a first center line Z1. The body region 110 may correspond to an circumscribed square shape as a whole. For example, the body region 110 may be generally circumscribed by a rectangle. The first central line Z1 may divide the circumscribed rectangle equally into two parts along the first direction X. The second central line Z2 may divide the circumscribed rectangle equally into two parts along the second direction Y.
The first body region 111 may have a first sidewall 121 remote from the second body region 113. The second body region 113 may have a second sidewall 123 remote from the first body region 111. The first and second sidewalls 121 and 123 may respectively form one long side of the body region 110. The first and second sidewalls 121 and 123 may each extend along the first direction X, and a distance between the first sidewall 121 and the first center line Z1 is equal to a distance between the second sidewall 123 and the first center line Z1.
The shielding region 117 extends out of the second sidewall 123 along the second direction Y. The second direction Y may intersect the first direction X. Further, the first direction X may have an included angle with the second direction Y. Those skilled in the art will appreciate that the specified angles may be set according to the actual structural needs. Specifically, in the present embodiment, the designated angle may be 90 °, that is, the first direction X and the second direction Y are perpendicular to each other.
Reticle 10 may include a first clamping zone 125 and a second clamping zone 126, with body region 110 being intermediate first clamping zone 125 and second clamping zone 126 along a first direction. During the screen tensioning process, first clamping area 125 and second clamping area 126 are clamped to apply tension to reticle 10.
Reticle 10 may include at least one slot 119 asymmetrically disposed with respect to first centerline Z1. Specifically, for example, the at least one slot 119 may include a first slot 127 located in the first clamping zone 125 and a second slot 129 located in the second clamping zone 126. The grooves 119 can be used to balance the internal stress of the mask 10 during the screen tensioning process, and reduce distortion caused by stress imbalance due to the shaped shielding region. Further, the at least one slot 119 may be symmetrically arranged with respect to the second centerline Z2. Specifically, during the screen tensioning process, tension is typically applied to reticle 10 along first direction X. In this way, the at least one slot 119 is symmetrically arranged with respect to the second centerline Z2, achieving a force balance overall along the first direction X. Furthermore, by the asymmetric arrangement of the at least one slot 119 with respect to the first centerline Z1, there is a difference between the overall force applied by the first body region 111 and the overall force applied by the second body region 113. Specifically, for example, as shown in fig. 2, the first clamping area 125 is divided into a first clamping portion 131 and a second clamping portion 133 by a first center line Z1. The second clamping area 126 is divided into a third clamping portion 135 and a fourth clamping portion 137 by a first center line Z1. The first slot 127 is located at the first clamping portion 131 with a larger area than the second clamping portion 133, and the second slot 129 is located at the third clamping portion 135 with a larger area than the fourth clamping portion 137.
Alternatively, the first slot 127 may be entirely located at the first clamping portion 111, and the second slot 129 may be entirely located at the third clamping portion 135. At this time, the tension applied to the first body region 111 during the net stretching process is greatly reduced, and the tension difference between the first body region 111 and the second body region 113 is larger.
Alternatively, the first slot 127 is divided by a first center line Z1 into a first portion 141 at the first clamping portion 131, and a second portion 143 at the second clamping portion 133. The area of the first portion 141 is larger than the area of the second portion 143. The second slot 129 is divided by a first centerline Z1 into a third portion 145 at the third clamping portion 135 and a fourth portion 147 at the fourth clamping portion 137. The area of the third portion 145 is larger than the area of the fourth portion 147. It is possible to achieve adjustment of the tension difference between the first body region 111 and the second body region 113 during the web tensioning process.
The slot 119 may be arranged in a shape suitable for the actual conditions. Specifically, the shape of the slot 119 may be a regular rectangle, triangle, or other polygon, or may be a circle, or may be a combination of rounded transitions based on a polygon. In some embodiments, adapted to the wire-tensioning process, two jaws may be formed in the first clamping zone 125 and the second clamping zone 126, respectively. Specifically, for example, the first slot 127 may extend from an end surface of the first clamping zone 125 away from the second clamping zone 126 toward the second center line Z2, and the second slot 129 may extend from an end surface of the second clamping zone 126 away from the first clamping zone 125 toward the second center line Z2, such that two claws are formed at each of the first clamping zone 125 and the second clamping zone 126, respectively, for being clamped in the net-expanding process. Of course, as shown in fig. 2, at least one slot 119 may be located entirely inside the first clamping area 125 and the second clamping area 126, and may be a through slot penetrating the mask 10.
In some embodiments, let the width of the body region 110 along the extending direction of the second center line Z2 be L, let the distance between the first slot 127 and the first sidewall 121 along the extending direction of the second center line Z2 be L1, let the distance between the first slot 127 and the second sidewall 123 along the extending direction of the second center line Z2 be L2, let the overall area of the body region 110 be S1, let the area of the shielding region 117 be S2, and let the width of the shielding region 117 along the extending direction of the second center line Z2 be L3. In the process of performing the net stretching, the tension applied to the first body area 111 is F1, the tension applied to the second body area 113 is F2, and the whole mask 110 needs to conform to the constraint relation: [ f2 ] (L/2-L2/2) -f1 ] (L/2-L1/2) ], s1= [ f2 ] (L/2+l3/2) +f1 ] (L-L1/2+l3/2) ], S2.
In this way, the mask 110 can counteract the torque caused by the special-shaped shielding area, and the overall shape of the mask 110 in the screen-tensioning process is maintained, so that the accuracy of the display panel manufactured later is improved.
In some embodiments, the number of occlusion regions 117 may not be limited to one. Specifically, as shown in fig. 3, the second sidewall 123 may be provided with a plurality of shielding regions 117 having the same shape and size. For example, the second sidewall 123 may be provided with three shielding regions 117, and the three shielding regions 117 are symmetrically arranged with respect to the second center line Z2.
Let the length of the body region 110 along the extending direction of the second center line Z2 be L, let the distance between the extending direction of the first slot 127 along the second center line Z2 and the first sidewall 121 be L1, let the distance between the extending direction of the first slot 127 along the second center line Z2 and the second sidewall 123 be L2, let the length of the shielding region 117 along the extending direction of the second center line Z2 be L3, let the length of the body region 110 along the first direction X be L4, let the overall area of the body region 110 be S1, let the area of each shielding region 117 be S2, let n shielding regions be a positive integer, let each shielding region 117 have a shielding region center line Z3 (only one is illustrated in the figure) parallel to the second center line Z2, and let the distance between adjacent shielding region center lines Z3 be L5. In the process of performing the net stretching, the tension applied to the first body area 111 is F1, the tension applied to the second body area 113 is F2, and the whole mask 110 needs to conform to the constraint relation:
in some embodiments, as shown in fig. 4. The at least one slot 119 may include a half-notch 139 in the second body region 113. Specifically, half-grooves 139 may be etched to a depth for second body region 113, but not through reticle 10. In some embodiments, the depth of half-grooves 139 is 40% to 60% of the thickness of the body region. The depth of the half groove 139 may be set according to the area of the shielding region 117, thereby reducing the weight of the second body region 113, and thus canceling the torque generated from the shielding region 117 to the center of the body region 110 to some extent. Specifically, for example, the depth of half-groove 139 may be 50% of the thickness of body region 110, and a portion of body region 110 may be etched to remove half of the thickness of body region 110 by etching, thereby forming half-groove 139.
In some embodiments, the weight of the second body region 113 may also be adjusted by adjusting the pattern area, the position, etc. of the half groove 139, so that the torque generated by the shielding region 117 to the center of the body region 110 is reduced, the overturning of the mask 10 is avoided to a certain extent, and the quality of the display panel is improved. In some embodiments, half-score 139 may traverse second body region 113 along first direction X.
Let the length of the body region 110 along the extending direction of the second center line Z2 be L, let the length of the shielding region 117 along the extending direction of the second center line Z2 be L3, let the length of the half-groove 139 along the extending direction of the second center line Z2 be L6, let the area of the half-groove 139 be S3, let the area of the shielding region 117 be S2, the constraint relationship that the mask 10 integrally conforms to include: [ L/2-L6/2 ]. S3= [ L3/2+L/2 ]. S2.
In some embodiments, the reticle 10 is a metal reticle.
In this embodiment, the reticle 10 may be a metal reticle. Specifically, for example, the reticle 10 may be a precision metal reticle. Of course, the mask may be a common mask.
One embodiment of the present disclosure provides a reticle assembly that may include any of the reticles described above.
One embodiment of the present disclosure provides a mask apparatus, which may include the above-described reticle assembly.
One embodiment of the present disclosure also provides a display panel manufactured using the mask device described above.
The various embodiments in this specification are themselves focused on differing portions from other embodiments, and the various embodiments may be explained in cross-reference to one another. Any combination of the various embodiments in the present specification is encompassed by the disclosure of the present specification by a person of ordinary skill in the art based on general technical knowledge.
The technical features of the above embodiments may be combined in any manner, and for brevity, all of the possible combinations of the technical features of the above embodiments are not described, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above description is only of some embodiments of the present disclosure, and is not intended to limit the present disclosure, but any modifications, equivalents, etc. within the spirit and principles of the present disclosure are intended to be included in the scope of the disclosure.

Claims (10)

1. A reticle, characterized in that the reticle comprises:
a body region extending along a first direction; wherein the body region has a first centerline parallel to the first direction, the body region being divided into a first body region and a second body region by the first centerline;
a shielding region extending from a portion of the sidewall of the second body region along a second direction intersecting the first direction;
the mask plate comprises at least one slot which is asymmetrically arranged relative to the first central line.
2. The reticle of claim 1, wherein the body region has a second centerline perpendicular to the first centerline; the at least one slot is symmetrically arranged with respect to the second centerline.
3. The reticle of claim 2, wherein the reticle comprises a first clamping zone and a second clamping zone, the body zone being located between the first clamping zone and the second clamping zone along the first direction; the at least one slot includes a first slot in the first clamping region and a second slot in the second clamping region; the first clamping area is divided into a first clamping part and a second clamping part by the first central line, and the second clamping area is divided into a third clamping part and a fourth clamping part by the first central line; the area of the first slot at the first clamping part is larger than the area of the second clamping part, and the area of the second slot at the third clamping part is larger than the area of the fourth clamping part;
preferably, the first slot is located entirely in the first clamping portion, and the second slot is located entirely in the third clamping portion;
preferably, the first slot is divided by the first center line into a first portion located at the first clamping portion and a second portion located at the second clamping portion, and the second slot is divided by the first center line into a third portion located at the third clamping portion and a fourth portion located at the fourth clamping portion; wherein the area of the first portion is larger than the area of the second portion, and the area of the third portion is larger than the area of the fourth portion.
4. The reticle of claim 3, wherein the first body region has a first sidewall remote from the second body region, the second body region has a second sidewall remote from the first body region; let the length of the body region along the extending direction of the second center line be L, let the distance between the extending direction of the first slot along the second center line and the first side wall be L1, let the distance between the extending direction of the first slot along the second center line and the second side wall be L2, let the length of the shielding region along the extending direction of the second center line be L3, let the length of the body region along the first direction be L4, let the overall area of the body region be S1, let the area of each shielding region be S2, let n shielding regions be a positive integer, let n be a shielding region center line parallel to the second center line, let the distance between adjacent shielding region center lines be L5, let the tension force received by the first body region be F1, let the tension force received by the second body region be F2, the constraint relation to which the mask plate needs to conform include:
5. a reticle according to claim 3 wherein the first slot extends from an end of the first clamping zone remote from the second clamping zone towards the second centre line, two jaws being formed in the first clamping zone, the second slot extending from an end of the second clamping zone remote from the first clamping zone towards the second centre line, two jaws being formed in the second clamping zone; alternatively, the first slot is located inside the first clamping region, and the second slot is located inside the second clamping region.
6. The reticle of claim 1, wherein at least one slot comprises a half-cut in the second body region.
7. The reticle of claim 6, wherein the half-grooves have a depth of 40% -60% of the thickness of the body region.
8. The reticle of claim 6, wherein the length of the body region along the second direction is L, the length of the shielding region along the second direction is L3, the length of the half-groove along the second direction is L6, the area of the half-groove is S3, the area of the shielding region is S2, and the constraint relationship of the reticle in whole comprises: [ L/2-L6/2 ]. S3= [ L3/2+L/2 ]. S2.
9. A masking device, characterized in that it comprises a reticle according to any one of claims 1-8.
10. A display panel, characterized in that the mask device according to claim 9 is used in the manufacturing process of the display panel.
CN202311433563.5A 2023-10-31 2023-10-31 Masks, mask devices and display panels Pending CN117467934A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311433563.5A CN117467934A (en) 2023-10-31 2023-10-31 Masks, mask devices and display panels

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311433563.5A CN117467934A (en) 2023-10-31 2023-10-31 Masks, mask devices and display panels

Publications (1)

Publication Number Publication Date
CN117467934A true CN117467934A (en) 2024-01-30

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CN111748766A (en) * 2020-06-22 2020-10-09 武汉华星光电半导体显示技术有限公司 Metal mask plate
CN113322430A (en) * 2021-05-28 2021-08-31 昆山国显光电有限公司 Mask structure and mask structure manufacturing method
CN114150265A (en) * 2021-12-30 2022-03-08 福建华佳彩有限公司 Mask strip structure for special-shaped screen and manufacturing method thereof

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107740040A (en) * 2017-09-08 2018-02-27 上海天马有机发光显示技术有限公司 Mask plate component and evaporation coating device
CN108998756A (en) * 2018-07-27 2018-12-14 京东方科技集团股份有限公司 Support bar
CN109321880A (en) * 2018-10-18 2019-02-12 京东方科技集团股份有限公司 a mask
CN210916231U (en) * 2019-10-18 2020-07-03 昆山国显光电有限公司 Mask plate
CN211546648U (en) * 2019-11-21 2020-09-22 云谷(固安)科技有限公司 mask
CN111394692A (en) * 2020-05-09 2020-07-10 京东方科技集团股份有限公司 Mask plate
CN111647846A (en) * 2020-05-29 2020-09-11 昆山国显光电有限公司 Support strip and mask
CN111748766A (en) * 2020-06-22 2020-10-09 武汉华星光电半导体显示技术有限公司 Metal mask plate
CN113322430A (en) * 2021-05-28 2021-08-31 昆山国显光电有限公司 Mask structure and mask structure manufacturing method
CN114150265A (en) * 2021-12-30 2022-03-08 福建华佳彩有限公司 Mask strip structure for special-shaped screen and manufacturing method thereof

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