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CN117433500B - Polarization mode multiplexing double optical path fiber optic gyroscope based on photonic chip - Google Patents

Polarization mode multiplexing double optical path fiber optic gyroscope based on photonic chip Download PDF

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CN117433500B
CN117433500B CN202311770361.XA CN202311770361A CN117433500B CN 117433500 B CN117433500 B CN 117433500B CN 202311770361 A CN202311770361 A CN 202311770361A CN 117433500 B CN117433500 B CN 117433500B
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polarization
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CN117433500A (en
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吕海斌
邓麟
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Guangdong Osno Industry Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58Turn-sensitive devices without moving masses
    • G01C19/64Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
    • G01C19/72Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
    • G01C19/725Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers using nxn optical couplers, e.g. 3x3 couplers

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Abstract

本发明实施例公开了一种基于光子芯片的偏振模式复用双倍光程的光纤陀螺,包括光子集成芯片、光源、探测器、光纤环、调制器和信号处理电路,所述光子集成芯片包括衬底,衬底上集成有偏振选择光栅、两个分束器以及4个端面耦合器,光源、探测器各通过一端面耦合器与其中一分束器连接,光纤环两端尾纤各通过一端面耦合器与另一分束器连接,偏振选择光栅连接两个分束器;偏振选择光栅使TM偏振光透射,TE偏振光反射,或者使TM偏振光反射,TE偏振光透射。本发明利用包含偏振选择光栅的光子集成芯片设计实现光纤陀螺偏振模式复用的双倍光程,在不增加光纤环长度的前提下,增强了陀螺Sagnac旋转效应,实现陀螺的小体积、低成本以及高精度。

The embodiment of the present invention discloses a polarization mode multiplexing double optical path optical fiber gyroscope based on a photon chip, comprising a photon integrated chip, a light source, a detector, a fiber ring, a modulator and a signal processing circuit, wherein the photon integrated chip comprises a substrate, on which a polarization selection grating, two beam splitters and four end couplers are integrated, the light source and the detector are each connected to one of the beam splitters through an end coupler, the pigtails at both ends of the fiber ring are each connected to another beam splitter through an end coupler, and the polarization selection grating connects the two beam splitters; the polarization selection grating transmits TM polarized light and reflects TE polarized light, or reflects TM polarized light and transmits TE polarized light. The present invention utilizes a photon integrated chip design including a polarization selection grating to realize the double optical path of polarization mode multiplexing of a fiber gyroscope, enhances the Sagnac rotation effect of the gyroscope without increasing the length of the fiber ring, and realizes the small size, low cost and high precision of the gyroscope.

Description

基于光子芯片的偏振模式复用双倍光程的光纤陀螺Polarization mode multiplexing double optical path fiber optic gyroscope based on photonic chip

技术领域Technical Field

本发明涉及集成光学和光纤陀螺技术领域,尤其涉及一种基于光子芯片的偏振模式复用双倍光程的光纤陀螺。The invention relates to the technical fields of integrated optics and fiber optic gyroscopes, and in particular to a fiber optic gyroscope based on a photonic chip that multiplexes polarization modes and doubles the optical path.

背景技术Background technique

陀螺是一种用于测量载体旋转角速度的敏感设备,当三轴正交安装时,可以用于建立运动的空间坐标系,这是运动测量与控制的基础。陀螺根据其工作原理,可以被分类为机械陀螺、激光陀螺、光纤陀螺、微机械陀螺等。光纤陀螺基于Sagnac干涉原理,利用光纤闭合回路中顺逆两束光的干涉来测量旋转角速度,具有高精度、高可靠、高带宽的特点。A gyroscope is a sensitive device used to measure the rotation angular velocity of a carrier. When the three axes are installed orthogonally, it can be used to establish a spatial coordinate system for motion, which is the basis for motion measurement and control. Gyroscopes can be classified into mechanical gyroscopes, laser gyroscopes, fiber optic gyroscopes, micromechanical gyroscopes, etc. based on their working principles. The fiber optic gyroscope is based on the Sagnac interference principle and uses the interference of two forward and reverse light beams in a closed fiber loop to measure the rotation angular velocity. It has the characteristics of high precision, high reliability and high bandwidth.

传统光纤陀螺使用偏振器、耦合器等分立器件逐一熔接的制作方式,并依赖手工装配,如此制作而成的陀螺体积大,成本高,一致性差,制作效率低。利用集成光学工艺将光纤陀螺所用核心器件集成于同片光子芯片之上,大幅降低器件尺寸,并且规模化的流片过程可以实现器件的低成本与一致性。因此光纤陀螺的光子集成化是光纤陀螺发展的重要方向。Traditional fiber optic gyroscopes are made by welding discrete components such as polarizers and couplers one by one and rely on manual assembly. The gyroscopes produced in this way are large in size, high in cost, poor in consistency, and low in production efficiency. Integrated optical technology is used to integrate the core components used in fiber optic gyroscopes on the same photonic chip, greatly reducing the size of the device, and the large-scale tape-out process can achieve low cost and consistency of the device. Therefore, photonic integration of fiber optic gyroscopes is an important direction for the development of fiber optic gyroscopes.

光纤陀螺的Sagnac相位ϕ s可由式(1)表示:The Sagnac phase ϕ s of the fiber optic gyroscope can be expressed by equation (1):

(1) (1)

其中,L为光纤长度,D为光纤环直径,λ为工作波长,c为真空中的光速,Ω为旋转角速度。根据式(1)所示的干涉原理,在陀螺尺寸(光纤环直径)、以及工作波长确定的情况下,光纤长度越长则陀螺对转速的敏感度越高,即精度越高。但是光纤越长,则陀螺体积越大,成本也越高。针对此问题,学者提出在不增加光纤长度的前提下,通过光路设计手段,使光在光纤环中通过2次,从而加倍光程,达到提升陀螺精度的目标。目前提出的方案如使用多芯光纤,或者增加多个分立的分束器等,但目前方案所需增加的器件成本高,体积大,难以满足陀螺小型化、低成本的发展需求。Among them, L is the length of the fiber, D is the diameter of the fiber ring, λ is the operating wavelength, c is the speed of light in vacuum, and Ω is the rotation angular velocity. According to the interference principle shown in equation (1), when the gyroscope size (fiber ring diameter) and operating wavelength are determined, the longer the fiber length, the higher the gyroscope's sensitivity to rotational speed, that is, the higher the accuracy. However, the longer the optical fiber, the larger the gyroscope and the higher the cost. In response to this problem, scholars proposed to use optical path design methods to make the light pass through the fiber ring twice without increasing the length of the optical fiber, thereby doubling the optical path and achieving the goal of improving the accuracy of the gyroscope. Currently proposed solutions include using multi-core optical fibers or adding multiple discrete beam splitters. However, the additional components required for the current solution are high in cost and large in size, making it difficult to meet the development needs of miniaturization and low cost of gyroscopes.

发明内容Summary of the invention

本发明实施例所要解决的技术问题在于,提供一种偏振模式复用光子芯片,以实现双倍光程的光纤陀螺,使光在光纤环中通过2次,加倍光程,低成本、小型化的提升陀螺精度。The technical problem to be solved by the embodiments of the present invention is to provide a polarization mode multiplexing photonic chip to realize a fiber optic gyroscope with double optical path, allowing light to pass through the fiber ring twice, doubling the optical path, low cost and miniaturization. Improve gyro accuracy.

为了解决上述技术问题,本发明实施例提出了一种基于光子芯片的偏振模式复用双倍光程的光纤陀螺,包括光子集成芯片、光源、探测器、光纤环、调制器和信号处理电路,所述光子集成芯片包括衬底,衬底上集成有偏振选择光栅、两个分束器以及4个端面耦合器,光源、探测器各通过一端面耦合器与其中一分束器连接,光纤环两端尾纤各通过一端面耦合器与另一分束器连接,偏振选择光栅连接两个分束器;偏振选择光栅使TM偏振光透射,TE偏振光反射,或者使TM偏振光反射,TE偏振光透射。In order to solve the above technical problems, embodiments of the present invention propose a photonic chip-based polarization mode multiplexing double optical path fiber optic gyroscope, including a photonic integrated chip, a light source, a detector, a fiber ring, a modulator and a signal processing circuit. The photonic integrated chip includes a substrate on which a polarization-selective grating, two beam splitters and four end-face couplers are integrated. The light source and the detector are each connected to one of the beam splitters through an end-face coupler. The optical fiber ring The pigtails at both ends are each connected to the other beam splitter through an end face coupler, and the polarization selection grating connects the two beam splitters; the polarization selection grating transmits TM polarized light and reflects TE polarized light, or reflects TM polarized light and TE Polarized light transmission.

进一步地,相对于光子集成芯片的耦合偏振轴方向,光纤环一端尾纤偏振角呈0°,另一端尾纤偏振角为90°。Furthermore, relative to the coupling polarization axis direction of the photonic integrated chip, the polarization angle of the pigtail at one end of the optical fiber ring is 0°, and the polarization angle of the pigtail at the other end is 90°.

进一步地,偏振选择光栅采用由周期性折射率交替的波导组成的光栅结构,且光栅周期L满足如下布拉格光栅方程:Furthermore, the polarization selective grating adopts a grating structure composed of waveguides with periodic alternating refractive index, and the grating period L satisfies the following Bragg grating equation:

其中,λ为工作中心波长,L 1为光栅周期中宽度小的区域的长度,/为宽度小 的波导中TE/TM模式的有效折射率,而/为周期中宽度大的波导中TE/TM模式的有效 折射率。 Among them, λ is the working center wavelength, L 1 is the length of the small width area in the grating period, / is the effective refractive index of the TE/TM mode in the small-width waveguide, and / is the effective refractive index of the TE/TM mode in a waveguide with a large width in the period.

进一步地,偏振选择光栅的波导集成于光子集成芯片的衬底上,衬底的材料采用Si、SiO2、Si3N4、LNOI中的一种或多种。Further, the waveguide of the polarization selective grating is integrated on the substrate of the photonic integrated chip, and the material of the substrate is one or more of Si, SiO 2 , Si 3 N 4 , and LNOI.

进一步地,所述分束器采用Y波导、定向耦合器或多模干涉器。Further, the beam splitter adopts Y waveguide, directional coupler or multi-mode interferometer.

进一步地,端面耦合器为倒拉锥结构。Further, the end coupler has an inverted tapered structure.

进一步地,光源使用高偏振光源或低偏振光源,若偏振选择光栅设计为TM偏振光透射,则光源以TM的偏振态进入光子集成芯片;若偏振选择光栅设计为TE偏振光透射,则光源以TE的偏振态进入光子集成芯片。Furthermore, the light source uses a high polarization light source or a low polarization light source. If the polarization selection grating is designed to transmit TM polarized light, the light source enters the photonic integrated chip in the TM polarization state; if the polarization selection grating is designed to transmit TE polarized light, the light source The polarization state of TE enters the photonic integrated chip.

进一步地,所述光源采用端面耦合的方式,贴装于光子集成芯片侧边;或将高偏振光源先对轴耦合到保偏光纤,然后再将保偏光纤对轴端面耦合到光子集成芯片;或使用低偏振光源先耦合到保偏光纤,在保偏光纤中引入光纤起偏器,然后再将保偏光纤对轴端面耦合到光子集成芯片。Furthermore, the light source is mounted on the side of the photon integrated chip by end-face coupling; or a high-polarization light source is first axially coupled to a polarization-maintaining fiber, and then the axial end face of the polarization-maintaining fiber is coupled to the photon integrated chip; or a low-polarization light source is first coupled to a polarization-maintaining fiber, a fiber polarizer is introduced into the polarization-maintaining fiber, and then the axial end face of the polarization-maintaining fiber is coupled to the photon integrated chip.

进一步地,探测器贴装于光子集成芯片侧边,完成光电转换,并连接信号处理电路完成陀螺信号的解算;或将信号光先耦合到接收光纤,然后再通过接收光纤将信号光引到探测器。Furthermore, the detector is mounted on the side of the photonic integrated chip to complete the photoelectric conversion, and is connected to the signal processing circuit to complete the resolution of the gyroscope signal; or the signal light is first coupled to the receiving optical fiber, and then the signal light is guided to the detector through the receiving optical fiber.

进一步地,应用于830nm、850nm、1310nm、1550nm多种波长系统。Further, it is applied to multiple wavelength systems of 830nm, 850nm, 1310nm, and 1550nm.

本发明的有益效果为:The beneficial effects of the present invention are:

1、本发明将偏振选择光栅、分束器A、分束器B以及4个端面耦合器集成于光子集成芯片上,替代传统光纤陀螺光器件分立制作,接续熔接,手工盘绕的制作方式,提升陀螺的规模化生产水平,缩小陀螺体积,降低陀螺成本,提升陀螺生产一致性。1. The present invention integrates a polarization selective grating, a beam splitter A, a beam splitter B and four end couplers on a photonic integrated chip, replacing the traditional fiber optic gyroscope optical device discrete production, splicing, and manual winding production methods, thereby improving the scale production level of the gyroscope, reducing the size of the gyroscope, reducing the cost of the gyroscope, and improving the consistency of gyroscope production.

2、本发明使用偏振选择的光栅结构以及偏振模转换的耦合方式,令光在光纤环中传播2次,实现光程的加倍,低成本、小体积的提升陀螺精度。2. The present invention uses a polarization-selective grating structure and a coupling method of polarization mode conversion to propagate light twice in the fiber ring, thereby doubling the optical path and improving gyro accuracy at low cost and small size.

3、本发明实现光源、光纤与光子集成芯片的低损耦合,结构紧凑,稳定性高,利于陀螺的规模化批产。3. The present invention realizes low-loss coupling of light sources, optical fibers and photonic integrated chips, has a compact structure and high stability, and is conducive to large-scale mass production of gyroscopes.

4、本发明适用于硅、二氧化硅、氮化硅、氮氧化硅、薄膜铌酸锂等多类型衬底,并适用于多工作波长系统。4. The present invention is suitable for multiple types of substrates such as silicon, silicon dioxide, silicon nitride, silicon oxynitride, and thin film lithium niobate, and is suitable for multi-working wavelength systems.

附图说明Description of drawings

图1是本发明实施例的基于光子芯片的偏振模式复用双倍光程的光纤陀螺的原理结构图。Figure 1 is a schematic structural diagram of a fiber optic gyroscope based on a photonic chip that multiplexes polarization modes and doubles the optical path according to an embodiment of the present invention.

图2是本发明实施例的偏振选择光栅的原理示意图。Figure 2 is a schematic diagram of the principle of a polarization selective grating according to an embodiment of the present invention.

图3是本发明实施例的偏振选择光栅的仿真图。Figure 3 is a simulation diagram of a polarization selective grating according to an embodiment of the present invention.

图4是本发明实施例的MMI分束器设计仿真图。Figure 4 is a simulation diagram of the MMI beam splitter design according to the embodiment of the present invention.

图5是本发明实施例的端面耦合器设计仿真示例图。FIG. 5 is an example diagram of an end-face coupler design simulation according to an embodiment of the present invention.

附图标号说明Explanation of reference numbers

光子集成芯片1,偏振选择光栅2,光源3,端面耦合器4,分束器5,光纤环6,探测器7,调制器8,信号处理电路9,模式转换波导11,光栅结构12。Photonic integrated chip 1, polarization selective grating 2, light source 3, end coupler 4, beam splitter 5, fiber ring 6, detector 7, modulator 8, signal processing circuit 9, mode conversion waveguide 11, grating structure 12.

具体实施方式Detailed ways

需要说明的是,在不冲突的情况下,本申请中的实施例及实施例中的特征可以相互结合,下面结合附图和具体实施例对本发明作进一步详细说明。It should be noted that, in the absence of conflict, the embodiments in the present application and the features in the embodiments may be combined with each other. The present invention will be further described in detail below in conjunction with the drawings and specific embodiments.

本发明实施例中若有方向性指示(诸如上、下、左、右、前、后……)仅用于解释在某一特定姿态(如附图所示)下各部件之间的相对位置关系、运动情况等,如果该特定姿态发生改变时,则该方向性指示也相应地随之改变。If there are directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention, they are only used to explain the relative positions between the components in a specific posture (as shown in the accompanying drawings). relationship, movement conditions, etc., if the specific posture changes, the directional indication will also change accordingly.

另外,在本发明中若涉及“第一”、“第二”等的描述仅用于描述目的,而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。In addition, descriptions involving "first", "second", etc. in the present invention are for descriptive purposes only and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of indicated technical features. Therefore, features defined as "first" and "second" may explicitly or implicitly include at least one of these features.

请参照图1,本发明实施例的基于光子芯片的偏振模式复用双倍光程的光纤陀螺包括光子集成芯片、光源、探测器、光纤环、调制器、信号处理电路。光子集成芯片包括衬底,衬底上集成有偏振选择光栅、两个分束器以及4个端面耦合器。Referring to Fig. 1, the polarization mode multiplexing double optical path optical fiber gyroscope based on the photon chip of the embodiment of the present invention comprises a photon integrated chip, a light source, a detector, a fiber ring, a modulator, and a signal processing circuit. The photon integrated chip comprises a substrate, on which a polarization selective grating, two beam splitters, and four end couplers are integrated.

4个端面耦合器,一个与光源耦合,其模场设计与光源模场匹配;一个与探测器耦合,模场与探测器感光面匹配;另外两个与光纤环的保偏尾纤耦合,模场设计与光纤模场匹配。端面耦合器的作用在于提升光源/光纤与光子集成芯片的耦合效率,降低光路的损耗。There are 4 end-face couplers, one is coupled with the light source, and its mode field is designed to match the mode field of the light source; one is coupled with the detector, and the mode field matches the photosensitive surface of the detector; the other two are coupled with the polarization-maintaining pigtails of the fiber ring, and the mode Field design matches fiber mode field. The function of the end face coupler is to improve the coupling efficiency between the light source/optical fiber and the photonic integrated chip and reduce the loss of the optical path.

2个分束器的分束比为1:1,其作用为将1束入射光分为等振幅的2束出射光。在两个分束器之间采用偏振选择光栅,通过光栅占空比和光栅周期的设计,实现偏振分束,TM偏振光通过,TE偏振光反射,或TE偏振光通过,TM偏振光反射。The beam splitting ratio of the two beam splitters is 1:1, and their function is to divide one incident light into two outgoing lights of equal amplitude. A polarization-selective grating is used between the two beam splitters. Through the design of the grating duty cycle and grating period, polarization splitting is achieved, whereby TM polarized light passes and TE polarized light is reflected, or TE polarized light passes and TM polarized light is reflected.

光纤环的两根尾纤的主轴分别与光子集成芯片的耦合偏振轴平行和垂直,由此第一次通过光纤环的TM光转换为TE光,回到偏振选择光栅被反射回光纤环,再经光纤环二次传播后,TE光转换为TM光,通过偏振选择光栅进入探测器,并完成信号的解调。如此干涉光分别以TM、TE光的形式两次通过光纤环,实现了干涉光程的翻倍。The main axes of the two pigtails of the fiber ring are respectively parallel and perpendicular to the coupling polarization axis of the photonic integrated chip. Therefore, the TM light passing through the fiber ring for the first time is converted into TE light, returns to the polarization selection grating and is reflected back to the fiber ring, and then passes through the fiber ring. After the second propagation of the optical fiber ring, the TE light is converted into TM light, enters the detector through the polarization selection grating, and completes signal demodulation. In this way, the interference light passes through the fiber ring twice in the form of TM and TE light, doubling the interference optical path.

示例:为方便本发明实施例的描述,采用TM偏振光通过,TE偏振光反射的偏振选择光栅。Example: To facilitate the description of the embodiment of the present invention, a polarization selective grating is used that passes TM polarized light and reflects TE polarized light.

本发明实施例中,光源为高偏TM输出,端面耦合贴装于光子集成芯片侧端,微调光源位置,使光源出射位置与端面耦合器接收端准直,保证入射光子芯片的光最大。TM偏振光在光子集成芯片中传输,经过一个分束器进入偏振选择光栅。TM光通过偏振选择光栅,被另一个分束器分为等振幅的两束光,一束光经过端面耦合器顺时针进入光纤环,另一束光经过端面耦合器逆时针进入光纤环。其中一端尾纤偏振角呈0°,另一端偏振角为90°。In the embodiment of the present invention, the light source is a high-bias TM output, and the end-face coupling is mounted on the side of the photonic integrated chip. The position of the light source is fine-tuned to align the light source emission position with the receiving end of the end-face coupler to ensure that the light incident on the photonic chip is maximized. TM polarized light is transmitted in the photonic integrated chip and enters the polarization selection grating through a beam splitter. The TM light passes through the polarization selective grating and is divided into two beams of equal amplitude by another beam splitter. One beam of light enters the fiber ring clockwise through the end face coupler, and the other beam enters the fiber ring counterclockwise through the end face coupler. The polarization angle of one end of the pigtail is 0°, and the polarization angle of the other end is 90°.

由于采用了这种正交偏振模式耦合,通过光纤环的光被转换为正交偏振态,通过光纤环的TM偏振光被转换为TE偏振光。顺逆两束光均经分束器合束以TE偏振态射入偏振选择光栅,被光栅反射再次回到分束器,再一次被分为顺逆传输的两束光,通过光纤环后再一次偏振转换,TE偏振光转换为TM偏振光,经过分束器合束干涉,携带相位信息(包含为增加敏感性由调制器产生的调制相位和待解调的与转速线性相关的Sagnac相位)以TM偏振态通过偏振选择光栅,进入分束器,其中一半光射入探测器,完成光电转换。探测器连接信号处理电路,完成转速信号的解算。Due to this orthogonal polarization mode coupling, the light passing through the fiber ring is converted into the orthogonal polarization state, and the TM polarized light passing through the fiber ring is converted into TE polarized light. Both forward and reverse beams of light are combined by the beam splitter and enter the polarization selection grating in the TE polarization state. They are reflected by the grating and return to the beam splitter. They are again divided into two beams of forward and reverse transmission. After passing through the optical fiber ring, they are transmitted again. In one polarization conversion, TE polarized light is converted into TM polarized light, which undergoes combined beam interference through a beam splitter and carries phase information (including the modulation phase generated by the modulator to increase sensitivity and the Sagnac phase to be demodulated, which is linearly related to the rotation speed) The TM polarization state passes through the polarization selection grating and enters the beam splitter, where half of the light enters the detector to complete photoelectric conversion. The detector is connected to the signal processing circuit to complete the calculation of the rotational speed signal.

顺时针的光每经过一次光纤环,附加相位1/2(+/>),逆时针的光每经过一次光纤环,附加相位−1/2(/>+/>),其中/>为调制相位。经过两次入环之前的分束,入射光被分为等振幅的4束光,2次顺时针通过光纤环的光I cwcw,携带相位(/>+/>);2次逆时针通过光纤环的光I ccwccw,携带相位(/> );第一次顺时针,第二次逆时针通过的光,I cwccw,附加相位抵消为0,第一次逆时针,第二次顺时针通过的光,I ccwcw,附加相位抵消为0。当分束器为理想1:1分束,且不考虑损耗的情况下,顺逆光干涉后的光强I可以表示为:Each time the clockwise light passes through the fiber ring, an additional phase of 1/2 ( +/> ), each time the counterclockwise light passes through the fiber ring, an additional phase of −1/2(/> +/> ), where/> is the modulation phase. After two beam splittings before entering the ring, the incident light is divided into four beams of equal amplitude. The light I cwcw that passes through the fiber ring clockwise twice carries the phase (/> +/> ); The light I ccwccw that passes through the fiber ring counterclockwise twice carries the phase (/> ); for the light that passes clockwise for the first time and counterclockwise for the second time, I cwccw , the additional phase offset is 0, and for the light that passes counterclockwise for the first time and clockwise for the second time, I ccwcw , the additional phase offset is 0. When the beam splitter is an ideal 1:1 beam splitter and the loss is not considered, the light intensity I after forward and reverse light interference can be expressed as:

(2) (2)

其中,I 0为输入光功率,由式(2)可知,通过控制电路稳定控制输入光功率及调制深度,便可通过干涉后光强的测量解算出旋转Sagnac相位ϕ s,并且由于双倍光程,具有双倍的信噪比。Among them, I 0 is the input optical power. It can be seen from equation (2) that by stably controlling the input optical power and modulation depth through the control circuit, the rotating Sagnac phase ϕ s can be calculated by measuring the light intensity after interference, and due to the double light process, with double the signal-to-noise ratio.

本发明中的偏振选择光栅如图2所示,偏振选择光栅的波导结构集成于衬底之上,衬底材料可以为硅、二氧化硅、氮化硅、氮氧化硅、薄膜铌酸锂(Si,SiO2,Si3N4,LNOI)等等。偏振选择光栅是由模式转换波导以及周期性的光栅结构组成。The polarization selective grating in the present invention is shown in Figure 2. The waveguide structure of the polarization selective grating is integrated on the substrate. The substrate material can be silicon, silicon dioxide, silicon nitride, silicon oxynitride, thin film lithium niobate ( Si, SiO 2 , Si 3 N 4 , LNOI) and so on. Polarization selective gratings are composed of mode conversion waveguides and periodic grating structures.

模式转换波导用于实现光栅结构两侧的直波导模式和光栅结构中的Bloch模式之间的匹配,降低插入损耗。The mode conversion waveguide is used to achieve matching between the straight waveguide modes on both sides of the grating structure and the Bloch mode in the grating structure to reduce insertion loss.

光栅结构由周期性折射率交替的波导组成,光栅周期L设计满足如下布拉格光栅方程:The grating structure consists of waveguides with periodic alternating refractive index. The grating period L is designed to satisfy the following Bragg grating equation:

(3) (3)

其中,λ为工作中心波长,L 1为光栅周期中宽度小的区域的长度,/为宽度小 的波导中TE/TM模式的有效折射率,而/为周期中宽度大的波导中TE/TM模式的有效 折射率。偏振光在偏振选择光栅中的仿真如图3所示。由仿真结果可知,TM光低损的通过了 偏振选择光栅,TE光被光栅反射。 Among them, λ is the working center wavelength, L 1 is the length of the small width area in the grating period, / is the effective refractive index of the TE/TM mode in the small-width waveguide, and / is the effective refractive index of the TE/TM mode in a waveguide with a large width in the period. The simulation of polarized light in a polarization selective grating is shown in Figure 3. It can be seen from the simulation results that the TM light passes through the polarization selective grating with low loss, and the TE light is reflected by the grating.

本发明中的分束器可采用Y波导、定向耦合器或多模干涉器(MMI),为便于说明,以MMI设计为例,MMI由锥形的波导过渡区域和多模干涉区域组成,具体参数依照衬底、波导折射率及工艺参数确定,设计框图及数值仿真示例如图4所示。本发明中的端面耦合器为倒拉锥结构,拉锥参数依照波导参数及拟选择的光源模场或光纤模场确定,仿真示例如图5所示。The beam splitter in the present invention can use a Y waveguide, a directional coupler or a multi-mode interferometer (MMI). For the convenience of explanation, the MMI design is taken as an example. The MMI consists of a tapered waveguide transition area and a multi-mode interference area. Specifically, The parameters are determined according to the substrate, waveguide refractive index and process parameters. The design block diagram and numerical simulation example are shown in Figure 4. The end face coupler in the present invention has an inverted tapered structure, and the tapered parameters are determined according to the waveguide parameters and the light source mode field or optical fiber mode field to be selected. A simulation example is shown in Figure 5.

本发明利用偏振模式复用的光子集成芯片实现了光纤陀螺的双倍光程,在不增加光纤长度的情况下,加倍了干涉效应,从而大幅提升陀螺精度。利用光子集成芯片替代传统的分立光器件,借助集成光学规模化流片工艺,有利于陀螺的一致性、规模化量产,并缩小陀螺体积、降低陀螺成本,提升制造效率。The present invention uses a polarization mode multiplexed photonic integrated chip to double the optical path of the fiber optic gyroscope. It doubles the interference effect without increasing the length of the fiber, thereby greatly improving the accuracy of the gyroscope. The use of photonic integrated chips to replace traditional discrete optical devices, and the integrated optical large-scale tape-out process, are conducive to the consistency of gyroscopes, large-scale mass production, reduction of gyroscope size, reduction of gyroscope costs, and improvement of manufacturing efficiency.

本发明可应用于Si,SiO2,Si3N4,LNOI等多种集成光芯片材料,并可应用于830nm、850nm、1310nm、1550nm多种波长系统。本发明小体积、低成本的实现了光纤陀螺精度的有效提升。本发明还可为光纤电流互感器、光纤水听器等其它光纤传感器的研制,提供有力支撑。The invention can be applied to Si, SiO 2 , Si 3 N 4 , LNOI and other integrated optical chip materials, and can be applied to multiple wavelength systems of 830nm, 850nm, 1310nm and 1550nm. The invention realizes the effective improvement of the accuracy of the fiber optic gyroscope with small size and low cost. The present invention can also provide strong support for the development of other optical fiber sensors such as optical fiber current transformers and optical fiber hydrophones.

尽管已经示出和描述了本发明的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本发明的范围由所附权利要求及其等同范围限定。Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art will understand that various changes, modifications, and substitutions can be made to these embodiments without departing from the principles and spirit of the invention. and modifications, the scope of the present invention is defined by the appended claims and their equivalents.

Claims (9)

1. The optical fiber gyro comprises a photon integrated chip, a light source, a detector, an optical fiber ring, a modulator and a signal processing circuit, and is characterized in that the photon integrated chip comprises a substrate, a polarization selection grating, two beam splitters and 4 end face couplers are integrated on the substrate, the light source and the detector are respectively connected with one of the beam splitters through one end face coupler, tail fibers at two ends of the optical fiber ring are respectively connected with the other beam splitter through one end face coupler, and the polarization selection grating is connected with the two beam splitters; the polarization selection grating transmits the TM polarized light, reflects the TE polarized light, or reflects the TM polarized light, and transmits the TE polarized light;
the polarization selection grating adopts a grating structure composed of waveguides with periodic alternating refractive indexes, and the grating periodLThe following bragg grating equation is satisfied:
wherein,λas the wavelength of the center of operation,L 1 for the length of the area of small width in the grating period,//>is the effective refractive index of TE/TM mode in the waveguide with small width, and +.>//>Is the effective refractive index of the TE/TM mode in the waveguide with large width in the period.
2. The photonic-chip-based polarization-mode multiplexing double-path fiber optic gyroscope of claim 1, wherein the fiber optic ring has a fiber pigtail polarization angle of 0 ° at one end and a fiber pigtail polarization angle of 90 ° at the other end with respect to the coupling polarization axis direction of the photonic integrated chip.
3. The photonic chip-based polarization mode multiplexing double-optical-path fiber gyroscope according to claim 1, wherein the waveguide of the polarization-selective grating is integrated on the substrate of the photonic integrated chip, and the substrate is made of Si and SiO 2 、Si 3 N 4 One or more of LNOI.
4. The photonic chip-based polarization mode multiplexing double-optical path fiber gyroscope according to claim 1, wherein the beam splitter has a beam splitting ratio of 1:1, and the beam splitter adopts a Y waveguide, a directional coupler or a multimode interferometer.
5. The photonic chip-based polarization mode multiplexing double-optical path fiber gyroscope of claim 1, wherein the end-face coupler is of a back taper structure.
6. The photonic chip-based polarization mode multiplexing double optical path fiber gyroscope of claim 1, wherein the light source uses a high-polarization light source or a low-polarization light source, and if the polarization-selective grating is designed to transmit TM polarized light, the light source enters the photonic integrated chip in TM polarized state; if the polarization-selective grating is designed to transmit TE polarized light, the light source enters the photonic integrated chip in the TE polarization state.
7. The photonic chip-based polarization mode multiplexing double-optical-path fiber gyroscope according to claim 6, wherein the light source is attached to the side of the photonic integrated chip in an end-face coupling manner; or the high-polarization light source is firstly coupled to the polarization-maintaining optical fiber in a counter shaft mode, and then the end face of the polarization-maintaining optical fiber in the counter shaft mode is coupled to the photon integrated chip; or coupling the low-polarization light source to a polarization-maintaining optical fiber, introducing an optical fiber polarizer into the polarization-maintaining optical fiber, and coupling the polarization-maintaining optical fiber to the shaft end face to the photon integrated chip.
8. The photonic chip-based polarization mode multiplexing double-optical-path fiber gyroscope according to claim 1, wherein the detector is attached to the side of the photonic integrated chip to complete photoelectric conversion, and is connected with the signal processing circuit to complete resolution of a gyroscope signal; or the signal light is coupled to the receiving optical fiber, and then the signal light is led to the detector through the receiving optical fiber.
9. The photonic-chip-based polarization-mode multiplexing double-path fiber optic gyroscope of any of claims 1-8, applied to multiple wavelength systems of 830nm, 850nm, 1310nm, 1550 nm.
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