CN117419044B

CN117419044B - Automatic exhaust device of circulation system

Info

Publication number: CN117419044B
Application number: CN202311563435.2A
Authority: CN
Inventors: 王光光; 李永惠
Original assignee: Wuxi Warm Core Semiconductor Technology Co ltd
Current assignee: Wuxi Warm Core Semiconductor Technology Co ltd
Priority date: 2023-11-22
Filing date: 2023-11-22
Publication date: 2024-09-27
Anticipated expiration: 2043-11-22
Also published as: CN117419044A

Abstract

The invention belongs to the technical field of pump circulation of cooling liquid in the production process of semiconductor wafers, and discloses an automatic exhaust device of a circulation system, which comprises an exhaust box, wherein the interior of the exhaust box is hollow, and the box wall of the exhaust box is provided with a pump end hole; the top wall of the exhaust box is connected with a liquid supplementing pipe and an exhaust pipe which are communicated with the inner cavity; the box wall of the exhaust box is connected with a liquid return pipe communicated with the inner cavity; the height of the pump end hole is below the pipe orifice of the liquid supplementing pipe and the exhaust pipe, and the liquid return pipe receives liquid pumped out by the output end of the pump and participates in circulation. In the invention, the original gas in the exhaust box and the gas in the circulating pipeline are extruded by the liquid in the exhaust box and are discharged through the exhaust pipe, thereby ensuring the automatic exhaust of the gas, avoiding the manual exhaust through a three-way valve and simultaneously ensuring the efficient and safe operation of the pump; the liquid supplementing pipe, the exhaust pipe, the liquid returning pipe and the liquid discharging pipe are directly integrated on the exhaust box, so that the structure is simpler, and the pipeline crossing and interference are not easy to generate under the condition of multiple branches.

Description

Automatic exhaust device of circulation system

Technical Field

The invention belongs to the technical field of pump circulation of cooling liquid in the production process of semiconductor wafers, and particularly relates to an automatic exhaust device of a circulation system.

Background

In the aspect of pump circulation of cooling liquid in the production process of semiconductor wafers, manual exhaust is performed through a three-way valve (air is sucked in during pump operation, so that the efficiency of the pump is reduced and even damaged), and each equipment operation is required to be manually exhausted, so that the operation is complicated. And the pipelines on the passageway are branched more, a plurality of tee joints are needed to be used for connection, the whole pipeline is longer, and the occupied space is more.

Disclosure of Invention

In view of the above-mentioned problems with the background art, the present invention has as its object: aims at providing an automatic exhaust device of a circulating system.

In order to achieve the technical purpose, the invention adopts the following technical scheme:

an automatic exhaust device of a circulating system comprises an exhaust box, wherein the interior of the exhaust box is hollow, and a box wall of the exhaust box is provided with a pump end hole for supplying liquid to an input port of a pump;

The top wall of the exhaust box is connected with a liquid supplementing pipe and an exhaust pipe which are communicated with the inner cavity;

the box wall of the exhaust box is connected with a liquid return pipe communicated with the inner cavity;

The height of the pump end hole is positioned below the pipe orifices of the liquid supplementing pipe and the exhaust pipe, and the liquid return pipe receives liquid which is pumped out by the output end of the pump and participates in circulation.

The liquid supplementing pipe is characterized in that the liquid supplementing pipe is connected with a check valve, the allowable flowing direction of the check valve is the direction of supplementing liquid to the exhaust box, and the check valve can prevent the liquid and the gas from flowing back upwards through the liquid supplementing pipe and ensure the direction of gas discharge due to the structural design.

Further limiting, the other end of the fluid infusion pipe is connected with the fluid infusion box, so that the fluid infusion box stores liquid for evacuating gas, the liquid is infused into the exhaust box through the fluid infusion pipe, the gas is extruded into the exhaust pipe for discharging, and the gas is prevented from entering the pump.

Further limited, the liquid supplementing pipe is connected with the bottom of the liquid supplementing box, so that the liquid pressure at the bottom of the liquid supplementing box is large enough, and the liquid can be ensured to be discharged under enough power.

Further limited, the blast pipe is connected with the top of the fluid infusion case, and the fluid infusion case is arranged at the bottom of the fluid infusion case to supplement fluid, the non-liquid space is increased, the air pressure above the fluid infusion case is reduced, the discharged gas can compensate the pressure reduced due to fluid infusion, and the smooth performance of fluid infusion is assisted.

Further limited, the liquid supplementing box is provided with a liquid adding opening, and the liquid adding opening is used for supplementing liquid in the liquid supplementing box.

Further limited, the box wall of exhaust box is connected with the communicating fluid-discharge tube of inner chamber, the fluid-discharge tube normal close, and such structural design, fluid-discharge tube are used for discharging the liquid in the exhaust box, when the exhaust box is required to carry out the exhaust operation, and the fluid-discharge tube needs to be closed, guarantees the existence of inside liquid, and the increase of inside liquid can the displacement air.

Further, the exhaust box is welded at the pump head of the pump, so that the exhaust box occupies less space after being integrated at the pump head of the pump.

The invention has the beneficial effects that:

1. Original gas in the exhaust box and gas in the circulating pipeline are extruded by liquid in the exhaust box and are discharged through the exhaust pipe, so that automatic exhaust of the gas is ensured, manual exhaust is not required through a three-way valve, and efficient and safe operation of the pump is ensured;

2. the liquid supplementing pipe, the exhaust pipe, the liquid returning pipe and the liquid discharging pipe are directly integrated on the exhaust box, the structure is simpler, the pipeline crossing and interference are not easy to occur under the condition of multiple branches, and the cost of the hand valve and the three-way valve is saved.

Drawings

The invention can be further illustrated by means of non-limiting examples given in the accompanying drawings;

FIG. 1 is a schematic view of the whole structure of an embodiment of an automatic exhaust device of a circulation system according to the present invention;

FIG. 2 is a schematic view of an embodiment of an automatic exhaust apparatus exposing an interior of an exhaust box of a circulation system according to the present invention;

the main reference numerals are as follows:

1. An exhaust box; 11. a pump end hole;

2. a fluid supplementing pipe;

3. An exhaust pipe;

4. A liquid return pipe;

5. A liquid discharge pipe;

6. A pump;

7. A one-way valve;

8. A fluid supplementing box;

9. And a liquid adding port.

Detailed Description

In order that those skilled in the art will better understand the present invention, the following technical scheme of the present invention will be further described with reference to the accompanying drawings and examples.

As shown in fig. 1-2, the automatic exhaust device of the circulation system comprises an exhaust box 1, wherein the interior of the exhaust box 1 is hollow, and a pump end hole 11 for supplying liquid to an input port of a pump 6 is arranged on the box wall of the exhaust box 1;

The top wall of the exhaust box 1 is connected with a liquid supplementing pipe 2 and an exhaust pipe 3 which are communicated with the inner cavity;

the box wall of the exhaust box 1 is connected with a liquid return pipe 4 communicated with the inner cavity;

Wherein the height of the pump end hole 11 is positioned below the orifices of the fluid supplementing pipe 2 and the exhaust pipe 3, and the fluid return pipe 4 receives the liquid pumped out by the output end of the pump 6 and participated in circulation.

In this embodiment:

before the pump 6 is started, liquid is replenished to the inner cavity of the exhaust box 1 through the liquid replenishing pipe 2, original gas in the inner cavity of the exhaust box 1 is extruded by the added liquid and is discharged through the exhaust pipe 3, the height of the pump end hole 11 is positioned below the pipe orifices of the liquid replenishing pipe 2 and the exhaust pipe 3 and can be arranged at the lowest side of the exhaust box 1, so that the pump end hole 11 is submerged by the liquid, and the gas cannot enter;

After the pump 6 is started, the pump runs at a low speed, liquid in the exhaust box 1 is pumped into the circulation pipeline through the pump end hole 11 to participate in circulation, and then returns to the exhaust box 1 again through the liquid return pipe 4, in this process, the liquid supplementing pipe 2 needs to supplement liquid in time, the pump end hole 11 is ensured to be submerged all the time until the gas in the circulation pipeline is exhausted through the exhaust pipe 3, and the pump 6 can run normally;

In this process, original gas in the exhaust box 1 and gas in the circulation pipeline are extruded by the liquid in the exhaust box 1 and are discharged through the exhaust pipe 3, so that automatic exhaust of gas is ensured, manual exhaust is not needed through a three-way valve, and meanwhile, efficient and safe operation of the pump 6 is ensured.

Preferably, the check valve 7 is connected to the pipeline of the fluid infusion tube 2, the allowable flowing direction of the check valve 7 is the direction of supplementing liquid to the exhaust box 1, and the check valve 7 can prevent the liquid and the gas from flowing back upwards through the fluid infusion tube 2 and ensure the direction of gas discharge by adopting the structural design. In practice, other configurations for preventing the backflow of fluid may be specifically contemplated as the case may be.

Preferably, the other end of the fluid infusion tube 2 is connected with a fluid infusion box 8, so that the fluid infusion box 8 stores liquid for evacuating gas, the liquid is infused into the exhaust box 1 through the fluid infusion tube 2, the gas is extruded into the exhaust tube 3 for discharging, and the gas is ensured not to enter the pump 6. In practice, other fluid-replacement storage configurations may be specifically contemplated as appropriate.

Preferably, the fluid infusion tube 2 is connected with the bottom of the fluid infusion tank 8, and the fluid pressure at the bottom of the fluid infusion tank 8 is large enough to ensure that the fluid is drained under enough power. In practice, other structural shapes for smooth fluid replacement may be specifically considered according to the specific circumstances.

Preferably, the top of blast pipe 3 and fluid replacement box 8 is connected, and this kind of structural design, fluid replacement box 8 arranges the fluid replacement under, and non-liquid space increases, and the air pressure above reduces, and the gaseous pressure that reduces because of the fluid replacement of being able to compensate by the exhaust, and supplementary fluid replacement goes on smoothly. In practice, other structural shapes that compensate for the reduced air pressure may be specifically contemplated as appropriate.

Preferably, the liquid replenishing tank 8 is provided with a liquid filling opening 9, and the liquid filling opening 9 is used for replenishing liquid in the liquid replenishing tank 8. In practice, other liquid feeding structures may be specifically considered according to the specific circumstances.

Preferably, the box wall of the exhaust box 1 is connected with the liquid discharge pipe 5 communicated with the inner cavity, the liquid discharge pipe 5 is normally closed, and the liquid discharge pipe 5 is used for discharging liquid in the exhaust box 1, so that when the exhaust box 1 is required to perform exhaust operation, the liquid discharge pipe 5 needs to be closed, the existence of internal liquid is ensured, and the increase of the internal liquid can discharge air. In practice, other drainage structures of the venting cartridge 1 may be specifically considered as the case may be.

Preferably, the exhaust box 1 is welded at the pump head of the pump 6, and the structural design is integrated behind the pump head of the pump 6, so that the occupied space is smaller. In practice, other structural shapes that reduce the size of the occupied space may also be specifically considered as the case may be.

The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications and variations of the invention be covered by the claims of this invention, which are within the skill of those skilled in the art, can be made without departing from the spirit and scope of the invention disclosed herein.

Claims

1. An automatic exhaust device of a circulation system, which is characterized in that: the device comprises an exhaust box (1), wherein the interior of the exhaust box (1) is hollow, and a box wall of the exhaust box (1) is provided with a pump end hole (11) for supplying liquid to an input port of a pump (6);

The top wall of the exhaust box (1) is connected with a liquid supplementing pipe (2) and an exhaust pipe (3) which are communicated with the inner cavity;

the box wall of the exhaust box (1) is connected with a liquid return pipe (4) communicated with the inner cavity;

the height of the pump end hole (11) is below the pipe orifices of the fluid supplementing pipe (2) and the exhaust pipe (3), and the fluid return pipe (4) receives the liquid pumped out by the output end of the pump (6) and participated in circulation.

2. An automatic exhaust device of a circulation system according to claim 1, wherein: the pipeline of the fluid infusion pipe (2) is connected with a one-way valve (7), and the allowable flowing direction of the one-way valve (7) is the direction of supplementing liquid to the exhaust box (1).

3. An automatic exhaust device of a circulation system according to claim 2, characterized in that: the other end of the fluid infusion tube (2) is connected with a fluid infusion box (8).

4. An automatic exhaust apparatus of a circulation system according to claim 3, wherein: the liquid supplementing pipe (2) is connected with the bottom of the liquid supplementing box (8).

5. An automatic exhaust apparatus of a circulation system according to claim 3, wherein: the exhaust pipe (3) is connected with the top of the fluid infusion box (8).

6. An automatic exhaust apparatus of a circulation system according to claim 3, wherein: the liquid supplementing box (8) is provided with a liquid adding opening (9).

7. An automatic exhaust device of a circulation system according to claim 1, wherein: the box wall of the exhaust box (1) is connected with a liquid discharge pipe (5) communicated with the inner cavity, and the liquid discharge pipe (5) is normally closed.

8. An automatic exhaust device of a circulation system according to claim 1, wherein: the exhaust box (1) is welded at the pump head of the pump (6).