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CN117375581A - A high-frequency and high-voltage pulse power module - Google Patents

A high-frequency and high-voltage pulse power module Download PDF

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Publication number
CN117375581A
CN117375581A CN202311300217.XA CN202311300217A CN117375581A CN 117375581 A CN117375581 A CN 117375581A CN 202311300217 A CN202311300217 A CN 202311300217A CN 117375581 A CN117375581 A CN 117375581A
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resistor
capacitor
frequency
terminal
module
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CN117375581B (en
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范硕
贾克
汪兆强
余海琴
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Hefei Yingbo Intelligent Technology Co ltd
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Hefei Yingbo Intelligent Technology Co ltd
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K3/00Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/53Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
    • H03K3/57Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback the switching device being a semiconductor device
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00Details of apparatus for conversion
    • H02M1/08Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B70/00Technologies for an efficient end-user side electric power management and consumption
    • Y02B70/10Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Dc-Dc Converters (AREA)

Abstract

The invention relates to the technical field of power electronic power supplies, and discloses a high-frequency high-voltage pulse power supply module which comprises an HV input module, a current feedback module, a frequency feedback module and an HV output module which are mutually coupled; the current feedback module adopts a high-frequency counting technology and a Hall current acquisition technology, so that high-efficiency switching of high and low current output modes can be ensured, and the frequency feedback module adopts a MOSFET to construct a power switch module, so that the switch control efficiency is improved, the pulse width is effectively controlled, the sensitivity of a detector is improved, and the stability of the pulse output frequency and the power stability of the HV output module is ensured.

Description

一种高频高压脉冲电源模块A high-frequency and high-voltage pulse power module

技术领域Technical field

本发明涉及电力电子电源技术领域,具体涉及一种高频高压脉冲电源模块。The invention relates to the technical field of power electronic power supplies, and in particular to a high-frequency and high-voltage pulse power supply module.

背景技术Background technique

电子捕获检测器(electroncapturedetector),简称ECD。电子捕获检测器也是一种离子化检测器,它是一个有选择性的高灵敏度的检测器,它只对具有电负性的物质,如含卤素、硫、磷、氮的物质有信号,物质的电负性越强,也就是电子吸收系数越大,检测器的灵敏度越高,而对电中性(无电负性)的物质,如烷烃等则无信号。Electron capture detector (electroncapture detector), referred to as ECD. The electron capture detector is also a kind of ionization detector. It is a selective and highly sensitive detector. It only has signals for electronegative substances, such as substances containing halogen, sulfur, phosphorus, and nitrogen. The stronger the electronegativity, that is, the greater the electron absorption coefficient, the higher the sensitivity of the detector. However, there is no signal for electrically neutral (no electronegativity) substances, such as alkanes.

在ECD中使用的He气源离化辉光放电,其实是一种产生电子的机制。具体来说,当He气通过辉光放电室时,会受到足够的能量激发而产生电子。这些电子随后被电负性化合物捕获,产生负离子。辉光放电的能量可以通过调节辉光放电室的电压来控制,一般来说,辉光放电的电源需要提供稳定的直流电压,通常在几千伏到几万伏之间,具体电压的大小和稳定性会影响到辉光放电的效果和电子的产生效率。电源的稳定性也会影响到ECD的灵敏度和噪声水平。因此,对于电源的要求主要是要提供稳定、高频、高压的脉冲电源。The He gas source ionization glow discharge used in ECD is actually a mechanism for generating electrons. Specifically, when He gas passes through the glow discharge chamber, it will be excited by enough energy to generate electrons. These electrons are then captured by electronegative compounds, creating negative ions. The energy of glow discharge can be controlled by adjusting the voltage of the glow discharge chamber. Generally speaking, the power supply of glow discharge needs to provide a stable DC voltage, usually between a few thousand volts and tens of thousands of volts. The specific voltage and Stability will affect the glow discharge effect and electron generation efficiency. The stability of the power supply also affects the sensitivity and noise level of the ECD. Therefore, the main requirement for power supply is to provide stable, high-frequency, high-voltage pulse power supply.

发明内容Contents of the invention

本发明的目的在于提供一种高频高压脉冲电源模块,解决以下技术问题:The purpose of the present invention is to provide a high-frequency and high-voltage pulse power supply module to solve the following technical problems:

如何提供适合ECD使用的稳定、高频、高压的脉冲电源。How to provide stable, high-frequency, high-voltage pulse power supply suitable for ECD use.

本发明的目的可以通过以下技术方案实现:The object of the present invention can be achieved through the following technical solutions:

一种高频高压脉冲电源模块,包括相互耦合的HV输入模块、电流反馈模块、频率反馈模块和HV输出模块;A high-frequency and high-voltage pulse power supply module includes a mutually coupled HV input module, a current feedback module, a frequency feedback module and an HV output module;

所述电流反馈模块用于高、低电流输出模式的高效切换,所述频率反馈模块用于保证所述HV输出模块的脉冲输出频率、功率稳定的稳定性。The current feedback module is used for efficient switching between high and low current output modes, and the frequency feedback module is used to ensure the stability of the pulse output frequency and power of the HV output module.

通过上述技术方案,本发明采用高效的低压转换高压技术,以MOSFET作为功率开关器件,采用脉宽调制PWM技术,提高开关控制的稳定性;通过电流反馈模块、频率反馈模块的反馈技术,提高高压脉冲电源输出电压、电流及频率的稳定性。Through the above technical solution, the present invention adopts efficient low-voltage conversion to high-voltage technology, uses MOSFET as the power switching device, and adopts pulse width modulation PWM technology to improve the stability of switching control; through the feedback technology of current feedback module and frequency feedback module, it improves the stability of high-voltage switching. Stability of pulse power supply output voltage, current and frequency.

作为本发明进一步的方案:所述HV输入模块包括:As a further solution of the present invention: the HV input module includes:

接线端JP1、极性电容PC1、极性电容PC2和保险丝F1;Terminal JP1, polar capacitor PC1, polar capacitor PC2 and fuse F1;

其中,所述接线端JP1的端子1与所述极性电容PC1、所述极性电容PC2和所述保险丝F1的一端接地连接,所述所述极性电容PC1和所述极性电容PC2各自远离接地端的一端连接,所述保险丝F1的另一端与所述接线端JP1的端子2连接。Wherein, the terminal 1 of the terminal JP1 is connected to the ground with the polar capacitor PC1, the polar capacitor PC2 and one end of the fuse F1, and the polar capacitor PC1 and the polar capacitor PC2 are respectively One end away from the ground terminal is connected, and the other end of the fuse F1 is connected to the terminal 2 of the terminal JP1.

作为本发明进一步的方案:所述电流反馈模块包括:As a further solution of the present invention: the current feedback module includes:

电阻PR1、电阻PR2、电容C2、电容C3、电容C6、电容PC7、极性电容PC8、电感L2、霍尔传感器U1;Resistor PR1, resistor PR2, capacitor C2, capacitor C3, capacitor C6, capacitor PC7, polar capacitor PC8, inductor L2, Hall sensor U1;

其中,所述电阻PR1和所述电阻PR2的一端与所述电容PC7的一端连接,所述电容PC7的另一端接地后与所述霍尔传感器U1的接地引脚连接;所述电容C3的一端接所述霍尔传感器U1的电源电压引脚,配5V电压,另一端接地;One end of the resistor PR1 and the resistor PR2 is connected to one end of the capacitor PC7, and the other end of the capacitor PC7 is connected to the ground and connected to the ground pin of the Hall sensor U1; one end of the capacitor C3 Connect the power supply voltage pin of the Hall sensor U1 with 5V voltage, and the other end is grounded;

所述电感L2的一端与所述极性电容PC8的一端和所述霍尔传感器U1的采样电流负端引脚连接,另一端与所述电容C2和所述电容C6各自的一端以及所述HV输出模块连接,所述电容C2的另一端和所述极性电容PC8的另一端接地;One end of the inductor L2 is connected to one end of the polar capacitor PC8 and the negative terminal pin of the sampling current of the Hall sensor U1, and the other end is connected to one end of each of the capacitor C2 and the capacitor C6 and the HV The output module is connected, and the other end of the capacitor C2 and the other end of the polar capacitor PC8 are grounded;

所述霍尔传感器U1的采样电流正端与所述保险丝F1连接。The sampling current positive end of the Hall sensor U1 is connected to the fuse F1.

作为本发明进一步的方案:所述HV输出模块包括接线端JP3和变压器TRANS5;As a further solution of the present invention: the HV output module includes terminal JP3 and transformer TRANS5;

其中,所述接线端JP3的端子1和端子3之间设置所述变压器TRANS5的副边,所述变压器TRANS5的原边两端与所述频率反馈模块连接。Wherein, the secondary side of the transformer TRANS5 is disposed between terminal 1 and terminal 3 of the terminal JP3, and both ends of the primary side of the transformer TRANS5 are connected to the frequency feedback module.

作为本发明进一步的方案:所述频率反馈模块包括第一反馈单元和第二反馈单元;As a further solution of the present invention: the frequency feedback module includes a first feedback unit and a second feedback unit;

所述第一反馈单元包括MOS管Q1、电阻DR1、电阻DR11、电阻DR27、电阻DR14、电阻DR15、电阻DR16、电容C4、电容C5和驱动IC1;The first feedback unit includes MOS transistor Q1, resistor DR1, resistor DR11, resistor DR27, resistor DR14, resistor DR15, resistor DR16, capacitor C4, capacitor C5 and driver IC1;

所述第一反馈单元包括MOS管Q2、电阻DR12、电阻DR13、电阻DR28、电阻DR17、电阻DR18、电阻DR22、电容MC3和驱动IC2;The first feedback unit includes MOS transistor Q2, resistor DR12, resistor DR13, resistor DR28, resistor DR17, resistor DR18, resistor DR22, capacitor MC3 and driver IC2;

其中,所述变压器TRANS5的原边一端与所述MOS管Q1的源极连接,另一端与所述MOS管Q2的源极连接;所述MOS管Q1的漏极接地,所述MOS管Q1的栅极分别与所述电阻DR1、所述电阻DR11、所述电阻DR27的一端连接,所述电阻DR1和所述电阻DR11的另一端与所述驱动IC1连接,所述电阻DR27的另一端接地;Among them, one end of the primary side of the transformer TRANS5 is connected to the source of the MOS tube Q1, and the other end is connected to the source of the MOS tube Q2; the drain of the MOS tube Q1 is grounded, and the The gate is connected to one end of the resistor DR1, the resistor DR11, and the resistor DR27 respectively, the other ends of the resistor DR1 and the resistor DR11 are connected to the driving IC1, and the other end of the resistor DR27 is grounded;

所述驱动IC1的输入正端与所述电阻DR15和所述电阻DR16的一端连接,所述电阻DR15的另一端接PWM输入信号,所述电阻DR16的另一端接频率输入信号;所述驱动IC1的输入负端与所述电阻DR14连接后接地;所述驱动IC1的电源引脚接所述电容C5后接地;The positive input terminal of the driving IC1 is connected to one end of the resistor DR15 and the resistor DR16, the other end of the resistor DR15 is connected to the PWM input signal, and the other end of the resistor DR16 is connected to the frequency input signal; the driving IC1 The negative input end of the input terminal is connected to the resistor DR14 and then grounded; the power pin of the driver IC1 is connected to the capacitor C5 and then grounded;

所述驱动IC2的输入正端与所述电阻DR17和所述电阻DR18的一端连接,所述电阻DR17的另一端接PWM输入信号,所述电阻DR18的另一端接频率输入信号;所述驱动IC2的输入负端与所述电阻DR22连接后接地;所述驱动IC2的电源引脚同时接所述电容C4和所述电容MC3后接地;The positive input terminal of the driving IC2 is connected to one end of the resistor DR17 and the resistor DR18, the other end of the resistor DR17 is connected to the PWM input signal, and the other end of the resistor DR18 is connected to the frequency input signal; the driving IC2 The input negative terminal is connected to the resistor DR22 and then grounded; the power pin of the driver IC2 is connected to the capacitor C4 and the capacitor MC3 and then grounded;

所述MOS管Q2的漏极接地,所述MOS管Q2的栅极分别与所述电阻DR12、所述电阻DR13、所述电阻DR28的一端连接,所述电阻DR12和所述电阻DR13的另一端与所述驱动IC2连接,所述电阻DR28的另一端接地。The drain of the MOS tube Q2 is grounded, and the gate of the MOS tube Q2 is connected to one end of the resistor DR12, the resistor DR13, and the resistor DR28 respectively, and the other ends of the resistor DR12 and the resistor DR13 Connected to the driver IC2, the other end of the resistor DR28 is connected to ground.

作为本发明进一步的方案:所述驱动IC1和所述驱动IC2的电源引脚均配12V电压。As a further solution of the present invention: the power supply pins of the driving IC1 and the driving IC2 are both equipped with 12V voltage.

本发明的有益效果:本发明采用高效的低压转换高压技术,以MOSFET作为功率开关器件,采用脉宽调制PWM技术,提高开关控制的稳定性;通过电流反馈模块、频率反馈模块的反馈技术,提高高压脉冲电源输出电压、电流及频率的稳定性。Beneficial effects of the present invention: The present invention adopts efficient low-voltage conversion to high-voltage technology, uses MOSFET as the power switching device, and adopts pulse width modulation PWM technology to improve the stability of switching control; through the feedback technology of the current feedback module and the frequency feedback module, the invention improves the stability of the switching control. Stability of output voltage, current and frequency of high-voltage pulse power supply.

附图说明Description of the drawings

下面结合附图对本发明作进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings.

图1为本发明中高频高压脉冲电源模块的电路示意图。Figure 1 is a schematic circuit diagram of a high-frequency and high-voltage pulse power supply module of the present invention.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其它实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

请参阅图1所示,本发明为一种高频高压脉冲电源模块,包括相互耦合的HV输入模块、电流反馈模块、频率反馈模块和HV输出模块;Please refer to Figure 1. The present invention is a high-frequency and high-voltage pulse power supply module, which includes a mutually coupled HV input module, a current feedback module, a frequency feedback module and an HV output module;

所述电流反馈模块用于高、低电流输出模式的高效切换,所述频率反馈模块用于保证所述HV输出模块的脉冲输出频率、功率稳定的稳定性。The current feedback module is used for efficient switching between high and low current output modes, and the frequency feedback module is used to ensure the stability of the pulse output frequency and power of the HV output module.

通过上述技术方案,本发明采用高效的低压转换高压技术,以MOSFET作为功率开关器件,采用脉宽调制PWM技术,提高开关控制的稳定性;通过电流反馈模块、频率反馈模块的反馈技术,提高高压脉冲电源输出电压、电流及频率的稳定性。Through the above technical solution, the present invention adopts efficient low-voltage conversion to high-voltage technology, uses MOSFET as the power switching device, and adopts pulse width modulation PWM technology to improve the stability of switching control; through the feedback technology of current feedback module and frequency feedback module, it improves the stability of high-voltage switching. Stability of pulse power supply output voltage, current and frequency.

作为本发明进一步的方案:所述HV输入模块包括:As a further solution of the present invention: the HV input module includes:

接线端JP1、极性电容PC1、极性电容PC2和保险丝F1;Terminal JP1, polar capacitor PC1, polar capacitor PC2 and fuse F1;

其中,所述接线端JP1的端子1与所述极性电容PC1、所述极性电容PC2和所述保险丝F1的一端接地连接,所述所述极性电容PC1和所述极性电容PC2各自远离接地端的一端连接,所述保险丝F1的另一端与所述接线端JP1的端子2连接。Wherein, the terminal 1 of the terminal JP1 is connected to the ground with the polar capacitor PC1, the polar capacitor PC2 and one end of the fuse F1, and the polar capacitor PC1 and the polar capacitor PC2 are respectively One end away from the ground terminal is connected, and the other end of the fuse F1 is connected to the terminal 2 of the terminal JP1.

作为本发明进一步的方案:所述电流反馈模块包括:As a further solution of the present invention: the current feedback module includes:

电阻PR1、电阻PR2、电容C2、电容C3、电容C6、电容PC7、极性电容PC8、电感L2、霍尔传感器U1;Resistor PR1, resistor PR2, capacitor C2, capacitor C3, capacitor C6, capacitor PC7, polar capacitor PC8, inductor L2, Hall sensor U1;

其中,所述电阻PR1和所述电阻PR2的一端与所述电容PC7的一端连接,所述电容PC7的另一端接地后与所述霍尔传感器U1的接地引脚连接;所述电容C3的一端接所述霍尔传感器U1的电源电压引脚,配5V电压,另一端接地;One end of the resistor PR1 and the resistor PR2 is connected to one end of the capacitor PC7, and the other end of the capacitor PC7 is connected to the ground and connected to the ground pin of the Hall sensor U1; one end of the capacitor C3 Connect the power supply voltage pin of the Hall sensor U1 with 5V voltage, and the other end is grounded;

所述电感L2的一端与所述极性电容PC8的一端和所述霍尔传感器U1的采样电流负端引脚连接,另一端与所述电容C2和所述电容C6各自的一端以及所述HV输出模块连接,所述电容C2的另一端和所述极性电容PC8的另一端接地;One end of the inductor L2 is connected to one end of the polar capacitor PC8 and the negative terminal pin of the sampling current of the Hall sensor U1, and the other end is connected to one end of each of the capacitor C2 and the capacitor C6 and the HV The output module is connected, and the other end of the capacitor C2 and the other end of the polar capacitor PC8 are grounded;

所述霍尔传感器U1的采样电流正端与所述保险丝F1连接。The sampling current positive end of the Hall sensor U1 is connected to the fuse F1.

在本发明的本实施例中,霍尔传感器U1采用型号为CC6900的单芯片霍尔效应电流传感器,CC6900内部集成了一颗高精度,低噪声的线性霍尔电路和一根低阻抗的主电流导线。当采样电流流经主电流导线,其产生的磁场在霍尔电路上感应出相应的电信号,经过信号处理电路输出电压信号,使得产品更易于使用。线性霍尔电路采用先进的BiCMOS制程生产,包含了高灵敏度霍尔传感器,霍尔信号预放大器,高精度的霍尔温度补偿单元,振荡器,动态失调消除电路和放大器输出模块。In this embodiment of the invention, the Hall sensor U1 uses a single-chip Hall effect current sensor model CC6900. CC6900 integrates a high-precision, low-noise linear Hall circuit and a low-impedance main current sensor. wire. When the sampling current flows through the main current wire, the magnetic field generated by it induces a corresponding electrical signal on the Hall circuit, and the voltage signal is output through the signal processing circuit, making the product easier to use. The linear Hall circuit is produced using an advanced BiCMOS process and includes a high-sensitivity Hall sensor, a Hall signal pre-amplifier, a high-precision Hall temperature compensation unit, an oscillator, a dynamic offset cancellation circuit and an amplifier output module.

作为本发明进一步的方案:所述HV输出模块包括接线端JP3和变压器TRANS5;As a further solution of the present invention: the HV output module includes terminal JP3 and transformer TRANS5;

其中,所述接线端JP3的端子1和端子3之间设置所述变压器TRANS5的副边,所述变压器TRANS5的原边两端与所述频率反馈模块连接。Wherein, the secondary side of the transformer TRANS5 is disposed between terminal 1 and terminal 3 of the terminal JP3, and both ends of the primary side of the transformer TRANS5 are connected to the frequency feedback module.

在本发明的本实施例中,变压器TRANS5采用铁基纳米晶磁芯、原副边同轴绕制技术,能够满足低压至高压转换过程中输出脉冲电压的稳定性。In this embodiment of the invention, transformer TRANS5 adopts iron-based nanocrystalline magnetic core and primary and secondary coaxial winding technology, which can meet the stability of the output pulse voltage during the conversion process from low voltage to high voltage.

作为本发明进一步的方案:所述频率反馈模块包括第一反馈单元和第二反馈单元;As a further solution of the present invention: the frequency feedback module includes a first feedback unit and a second feedback unit;

所述第一反馈单元包括MOS管Q1、电阻DR1、电阻DR11、电阻DR27、电阻DR14、电阻DR15、电阻DR16、电容C4、电容C5和驱动IC1;The first feedback unit includes MOS transistor Q1, resistor DR1, resistor DR11, resistor DR27, resistor DR14, resistor DR15, resistor DR16, capacitor C4, capacitor C5 and driver IC1;

所述第一反馈单元包括MOS管Q2、电阻DR12、电阻DR13、电阻DR28、电阻DR17、电阻DR18、电阻DR22、电容MC3和驱动IC2;The first feedback unit includes MOS transistor Q2, resistor DR12, resistor DR13, resistor DR28, resistor DR17, resistor DR18, resistor DR22, capacitor MC3 and driver IC2;

其中,所述变压器TRANS5的原边一端与所述MOS管Q1的源极连接,另一端与所述MOS管Q2的源极连接;所述MOS管Q1的漏极接地,所述MOS管Q1的栅极分别与所述电阻DR1、所述电阻DR11、所述电阻DR27的一端连接,所述电阻DR1和所述电阻DR11的另一端与所述驱动IC1连接,所述电阻DR27的另一端接地;Among them, one end of the primary side of the transformer TRANS5 is connected to the source of the MOS tube Q1, and the other end is connected to the source of the MOS tube Q2; the drain of the MOS tube Q1 is grounded, and the The gate is connected to one end of the resistor DR1, the resistor DR11, and the resistor DR27 respectively, the other ends of the resistor DR1 and the resistor DR11 are connected to the driving IC1, and the other end of the resistor DR27 is grounded;

所述驱动IC1的输入正端与所述电阻DR15和所述电阻DR16的一端连接,所述电阻DR15的另一端接PWM输入信号,所述电阻DR16的另一端接频率输入信号;所述驱动IC1的输入负端与所述电阻DR14连接后接地;所述驱动IC1的电源引脚接所述电容C5后接地;The positive input terminal of the driving IC1 is connected to one end of the resistor DR15 and the resistor DR16, the other end of the resistor DR15 is connected to the PWM input signal, and the other end of the resistor DR16 is connected to the frequency input signal; the driving IC1 The negative input end of the input terminal is connected to the resistor DR14 and then grounded; the power pin of the driver IC1 is connected to the capacitor C5 and then grounded;

所述驱动IC2的输入正端与所述电阻DR17和所述电阻DR18的一端连接,所述电阻DR17的另一端接PWM输入信号,所述电阻DR18的另一端接频率输入信号;所述驱动IC2的输入负端与所述电阻DR22连接后接地;所述驱动IC2的电源引脚同时接所述电容C4和所述电容MC3后接地;可控脉宽调制(PWM)技术构建脉冲信号发生模块,解决了高、低电流输出模式的高效切换,提高了He气源离化辉光放电的效率。The positive input terminal of the driving IC2 is connected to one end of the resistor DR17 and the resistor DR18, the other end of the resistor DR17 is connected to the PWM input signal, and the other end of the resistor DR18 is connected to the frequency input signal; the driving IC2 The input negative terminal is connected to the resistor DR22 and then grounded; the power pin of the driver IC2 is connected to the capacitor C4 and the capacitor MC3 at the same time and then grounded; a pulse signal generation module is constructed using controllable pulse width modulation (PWM) technology. It solves the problem of efficient switching between high and low current output modes and improves the efficiency of He gas source ionization glow discharge.

所述MOS管Q2的漏极接地,所述MOS管Q2的栅极分别与所述电阻DR12、所述电阻DR13、所述电阻DR28的一端连接,所述电阻DR12和所述电阻DR13的另一端与所述驱动IC2连接,所述电阻DR28的另一端接地。The drain of the MOS tube Q2 is grounded, and the gate of the MOS tube Q2 is connected to one end of the resistor DR12, the resistor DR13, and the resistor DR28 respectively, and the other ends of the resistor DR12 and the resistor DR13 Connected to the driver IC2, the other end of the resistor DR28 is connected to ground.

作为本发明进一步的方案:所述驱动IC1和所述驱动IC2的电源引脚均配12V电压。As a further solution of the present invention: the power supply pins of the driving IC1 and the driving IC2 are both equipped with 12V voltage.

以上对本发明的一个实施例进行了详细说明,但所述内容仅为本发明的较佳实施例,不能被认为用于限定本发明的实施范围。凡依本发明申请范围所作的均等变化与改进等,均应仍归属于本发明的专利涵盖范围之内。An embodiment of the present invention has been described in detail above, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the implementation scope of the present invention. All equivalent changes and improvements made within the scope of the present invention shall still fall within the scope of the patent of the present invention.

Claims (6)

1.一种高频高压脉冲电源模块,其特征在于,包括相互耦合的HV输入模块、电流反馈模块、频率反馈模块和HV输出模块;1. A high-frequency and high-voltage pulse power supply module, characterized in that it includes a mutually coupled HV input module, a current feedback module, a frequency feedback module and an HV output module; 所述电流反馈模块用于高、低电流输出模式的高效切换,所述频率反馈模块用于保证所述HV输出模块的脉冲输出频率、功率稳定的稳定性。The current feedback module is used for efficient switching between high and low current output modes, and the frequency feedback module is used to ensure the stability of the pulse output frequency and power of the HV output module. 2.根据权利要求1所述的高频高压脉冲电源模块,其特征在于,所述HV输入模块包括:2. The high-frequency and high-voltage pulse power supply module according to claim 1, characterized in that the HV input module includes: 接线端JP1、极性电容PC1、极性电容PC2和保险丝F1;Terminal JP1, polar capacitor PC1, polar capacitor PC2 and fuse F1; 其中,所述接线端JP1的端子1与所述极性电容PC1、所述极性电容PC2和所述保险丝F1的一端接地连接,所述所述极性电容PC1和所述极性电容PC2各自远离接地端的一端连接,所述保险丝F1的另一端与所述接线端JP1的端子2连接。Wherein, the terminal 1 of the terminal JP1 is connected to the ground with the polar capacitor PC1, the polar capacitor PC2 and one end of the fuse F1, and the polar capacitor PC1 and the polar capacitor PC2 are respectively One end away from the ground terminal is connected, and the other end of the fuse F1 is connected to the terminal 2 of the terminal JP1. 3.根据权利要求2所述的高频高压脉冲电源模块,其特征在于,所述电流反馈模块包括:3. The high-frequency and high-voltage pulse power supply module according to claim 2, characterized in that the current feedback module includes: 电阻PR1、电阻PR2、电容C2、电容C3、电容C6、电容PC7、极性电容PC8、电感L2、霍尔传感器U1;Resistor PR1, resistor PR2, capacitor C2, capacitor C3, capacitor C6, capacitor PC7, polar capacitor PC8, inductor L2, Hall sensor U1; 其中,所述电阻PR1和所述电阻PR2的一端与所述电容PC7的一端连接,所述电容PC7的另一端接地后与所述霍尔传感器U1的接地引脚连接;所述电容C3的一端接所述霍尔传感器U1的电源电压引脚,配5V电压,另一端接地;One end of the resistor PR1 and the resistor PR2 is connected to one end of the capacitor PC7, and the other end of the capacitor PC7 is connected to the ground and connected to the ground pin of the Hall sensor U1; one end of the capacitor C3 Connect the power supply voltage pin of the Hall sensor U1 with 5V voltage, and the other end is grounded; 所述电感L2的一端与所述极性电容PC8的一端和所述霍尔传感器U1的采样电流负端引脚连接,另一端与所述电容C2和所述电容C6各自的一端以及所述HV输出模块连接,所述电容C2的另一端和所述极性电容PC8的另一端接地;One end of the inductor L2 is connected to one end of the polar capacitor PC8 and the negative terminal pin of the sampling current of the Hall sensor U1, and the other end is connected to one end of each of the capacitor C2 and the capacitor C6 and the HV The output module is connected, and the other end of the capacitor C2 and the other end of the polar capacitor PC8 are grounded; 所述霍尔传感器U1的采样电流正端与所述保险丝F1连接。The sampling current positive end of the Hall sensor U1 is connected to the fuse F1. 4.根据权利要求2所述的高频高压脉冲电源模块,其特征在于,所述HV输出模块包括接线端JP3和变压器TRANS5;4. The high-frequency and high-voltage pulse power supply module according to claim 2, wherein the HV output module includes terminal JP3 and transformer TRANS5; 其中,所述接线端JP3的端子1和端子3之间设置所述变压器TRANS5的副边,所述变压器TRANS5的原边两端与所述频率反馈模块连接。Wherein, the secondary side of the transformer TRANS5 is disposed between terminal 1 and terminal 3 of the terminal JP3, and both ends of the primary side of the transformer TRANS5 are connected to the frequency feedback module. 5.根据权利要求4所述的高频高压脉冲电源模块,其特征在于,所述频率反馈模块包括第一反馈单元和第二反馈单元;5. The high-frequency and high-voltage pulse power supply module according to claim 4, wherein the frequency feedback module includes a first feedback unit and a second feedback unit; 所述第一反馈单元包括MOS管Q1、电阻DR1、电阻DR11、电阻DR27、电阻DR14、电阻DR15、电阻DR16、电容C4、电容C5和驱动IC1;The first feedback unit includes MOS transistor Q1, resistor DR1, resistor DR11, resistor DR27, resistor DR14, resistor DR15, resistor DR16, capacitor C4, capacitor C5 and driver IC1; 所述第一反馈单元包括MOS管Q2、电阻DR12、电阻DR13、电阻DR28、电阻DR17、电阻DR18、电阻DR22、电容MC3和驱动IC2;The first feedback unit includes MOS transistor Q2, resistor DR12, resistor DR13, resistor DR28, resistor DR17, resistor DR18, resistor DR22, capacitor MC3 and driver IC2; 其中,所述变压器TRANS5的原边一端与所述MOS管Q1的源极连接,另一端与所述MOS管Q2的源极连接;所述MOS管Q1的漏极接地,所述MOS管Q1的栅极分别与所述电阻DR1、所述电阻DR11、所述电阻DR27的一端连接,所述电阻DR1和所述电阻DR11的另一端与所述驱动IC1连接,所述电阻DR27的另一端接地;Among them, one end of the primary side of the transformer TRANS5 is connected to the source of the MOS tube Q1, and the other end is connected to the source of the MOS tube Q2; the drain of the MOS tube Q1 is grounded, and the The gate is connected to one end of the resistor DR1, the resistor DR11, and the resistor DR27 respectively, the other ends of the resistor DR1 and the resistor DR11 are connected to the driving IC1, and the other end of the resistor DR27 is grounded; 所述驱动IC1的输入正端与所述电阻DR15和所述电阻DR16的一端连接,所述电阻DR15的另一端接PWM输入信号,所述电阻DR16的另一端接频率输入信号;所述驱动IC1的输入负端与所述电阻DR14连接后接地;所述驱动IC1的电源引脚接所述电容C5后接地;The positive input terminal of the driving IC1 is connected to one end of the resistor DR15 and the resistor DR16, the other end of the resistor DR15 is connected to the PWM input signal, and the other end of the resistor DR16 is connected to the frequency input signal; the driving IC1 The negative input end of the input terminal is connected to the resistor DR14 and then grounded; the power pin of the driver IC1 is connected to the capacitor C5 and then grounded; 所述驱动IC2的输入正端与所述电阻DR17和所述电阻DR18的一端连接,所述电阻DR17的另一端接PWM输入信号,所述电阻DR18的另一端接频率输入信号;所述驱动IC2的输入负端与所述电阻DR22连接后接地;所述驱动IC2的电源引脚同时接所述电容C4和所述电容MC3后接地;The positive input terminal of the driving IC2 is connected to one end of the resistor DR17 and the resistor DR18, the other end of the resistor DR17 is connected to the PWM input signal, and the other end of the resistor DR18 is connected to the frequency input signal; the driving IC2 The input negative terminal is connected to the resistor DR22 and then grounded; the power pin of the driver IC2 is connected to the capacitor C4 and the capacitor MC3 and then grounded; 所述MOS管Q2的漏极接地,所述MOS管Q2的栅极分别与所述电阻DR12、所述电阻DR13、所述电阻DR28的一端连接,所述电阻DR12和所述电阻DR13的另一端与所述驱动IC2连接,所述电阻DR28的另一端接地。The drain of the MOS tube Q2 is grounded, and the gate of the MOS tube Q2 is connected to one end of the resistor DR12, the resistor DR13, and the resistor DR28 respectively, and the other ends of the resistor DR12 and the resistor DR13 Connected to the driver IC2, the other end of the resistor DR28 is connected to ground. 6.根据权利要求5所述的高频高压脉冲电源模块,其特征在于,所述驱动IC1和所述驱动IC2的电源引脚均配12V电压。6. The high-frequency and high-voltage pulse power supply module according to claim 5, wherein the power pins of the driving IC1 and the driving IC2 are both equipped with 12V voltage.
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