CN117330606A - Accelerated aging performance test system of palladium alloy hydrogen sensor - Google Patents
Accelerated aging performance test system of palladium alloy hydrogen sensor Download PDFInfo
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- CN117330606A CN117330606A CN202311240659.XA CN202311240659A CN117330606A CN 117330606 A CN117330606 A CN 117330606A CN 202311240659 A CN202311240659 A CN 202311240659A CN 117330606 A CN117330606 A CN 117330606A
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- electromagnetic valve
- palladium alloy
- cavity
- hydrogen sensor
- alloy hydrogen
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- 230000032683 aging Effects 0.000 title claims abstract description 45
- 239000001257 hydrogen Substances 0.000 title claims abstract description 37
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 37
- 229910001252 Pd alloy Inorganic materials 0.000 title claims abstract description 31
- 238000011056 performance test Methods 0.000 title claims abstract description 16
- 125000004435 hydrogen atom Chemical class [H]* 0.000 title claims abstract 9
- 238000012360 testing method Methods 0.000 claims abstract description 35
- 239000007789 gas Substances 0.000 claims description 38
- 238000004088 simulation Methods 0.000 claims description 25
- 238000010438 heat treatment Methods 0.000 claims description 22
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 13
- 238000009826 distribution Methods 0.000 claims description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000012774 insulation material Substances 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 238000009835 boiling Methods 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000002480 mineral oil Substances 0.000 claims description 3
- 235000010446 mineral oil Nutrition 0.000 claims description 3
- 230000035882 stress Effects 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 3
- 238000006731 degradation reaction Methods 0.000 abstract description 2
- 238000011161 development Methods 0.000 abstract description 2
- 230000018109 developmental process Effects 0.000 abstract description 2
- 238000005457 optimization Methods 0.000 abstract description 2
- 150000002431 hydrogen Chemical class 0.000 description 27
- 238000000034 method Methods 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000003878 thermal aging Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
Abstract
The invention discloses an accelerated aging performance test system of a palladium alloy hydrogen sensor. The accelerated aging performance test system of the palladium alloy hydrogen sensor provided by the invention can obtain the complete aging process of the palladium alloy hydrogen sensor in the service state of a closed environment, and can obtain the aging performance degradation process of the palladium alloy hydrogen sensor in different aging time periods without stress effect, thereby providing a test means for the development and optimization of the palladium alloy hydrogen sensor.
Description
Technical Field
The invention relates to the technical field of performance test of semiconductor components, in particular to an accelerated aging performance test system of a palladium alloy hydrogen sensor.
Background
The measurement performance of the palladium alloy hydrogen sensor can be gradually reduced when the palladium alloy hydrogen sensor runs in a working environment, and the stability in calibration-free time is the precondition of normal service. In order to define the upper limit of the service life of the palladium alloy hydrogen sensor in the working environment, the most feasible mode is to conduct an accelerated aging test on the palladium alloy hydrogen sensor on the premise of keeping the failure mode and the failure mechanism unchanged, analyze the failure mechanism of the palladium alloy hydrogen sensor and further obtain a prediction method of the measurement performance of the gas sensor. At present, the primary problem is that a testing system for an accelerated aging test of a gas sensor is lacking, main sensitive stress of a palladium alloy hydrogen sensor can be temperature, gas circulation impact, vibration and the like, an accelerated aging test scheme needs to be designed by considering the main stress effect, and a corresponding test platform is built.
Disclosure of Invention
The invention aims to provide an accelerated aging performance test system of a palladium alloy hydrogen sensor, which is used for constructing a thermal aging, gas impact circulation and vibration acceleration test platform of the palladium alloy hydrogen sensor and completing the accelerated aging process of the palladium alloy hydrogen sensor through the thermal, impact circulation and vibration acceleration tests.
The technical scheme for realizing the purpose of the invention is as follows:
an accelerated aging performance test system of a palladium alloy hydrogen sensor comprises a test platform; the test platform comprises a simulation cavity and a placement box; the simulation cavity is a metal hollow cavity, a heat insulation material is filled between the cavity wall outer shell and the inner shell, a triangular groove is formed in the bottom of the cavity wall outer shell, and the simulation cavity is fixed at the bottom of the placement box through a triangular buckle; insulating mineral oil with boiling point not lower than 200 ℃ and temperature fluctuation not higher than +/-0.5 ℃ is filled between the placing box and the simulation cavity; a vibrating table is arranged in the simulation cavity, a porous heating shell with an openable top is arranged on the vibrating table, and at least three samples, namely palladium alloy hydrogen sensors, are arranged in the heating shell; the gas distribution system is connected with high-purity nitrogen, high-purity hydrogen and high-purity oxygen; the air distribution system is also connected into the heating shell through a target air passage provided with a second electromagnetic valve; the high-purity nitrogen is also connected into the heating shell through a background gas circuit provided with a first electromagnetic valve; the vacuum pump is connected into the heating shell through an exhaust pipeline provided with a third electromagnetic valve; the temperature and humidity meter is used for testing the temperature and humidity inside the heating shell and the barometer is used for testing the air pressure inside the simulation cavity; the data acquisition system is connected to the sample through an aviation plug fixed in the simulation cavity and is used for acquiring the resistance value of the sample; the system also comprises an industrial personal computer connected to the data acquisition system and used for controlling the first electromagnetic valve, the second electromagnetic valve, the third electromagnetic valve, the vacuum pump, the heating shell, the air distribution system and the vibrating table.
The accelerated aging performance test system of the palladium alloy hydrogen sensor provided by the invention can obtain the complete aging process of the palladium alloy hydrogen sensor in the service state of a closed environment, and can obtain the aging performance degradation process of the palladium alloy hydrogen sensor in different aging time periods without stress effect, thereby providing a test means for the development and optimization of the palladium alloy hydrogen sensor.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Detailed Description
In order to advance the reliability research progress of the current domestic palladium alloy hydrogen sensor, the magnitude traceability problem of the palladium alloy hydrogen sensor is practically solved, an accelerated aging test scheme of the hydrogen sensor needs to be designed in consideration of a working environment, a corresponding test platform is built, an accelerated aging test under the strengthening stress is carried out, and the aging mechanism of the gas sensor is analyzed to judge whether the measurement uncertainty of the hydrogen sensor can meet the actual requirements. In order to solve the defects of the hydrogen gas sensor in the aging system, the invention provides an accelerated aging performance test system of a palladium alloy hydrogen sensor.
The invention is further described below with reference to the accompanying drawings.
Firstly, a test platform of an accelerated aging performance test system of a palladium alloy hydrogen sensor is built, then, an accelerated aging test of a sample 17 (namely the palladium alloy hydrogen sensor) with temperature aging, gas impact aging and vibration aging is sequentially carried out, the process is continuously circulated, in the process of carrying out the temperature aging, gas impact aging and vibration aging test, the aging performance index of the sample 17 is tested, the aging performance of the sample 17 is a resistance value, the data acquisition system 11 is controlled by the industrial personal computer 21 to carry out the real-time resistance value test of the sample 17, the number of channels of the data acquisition system 11 is not less than the number of the sample 17, and the specific aging performance indexes comprise but are not limited to indication error, repeatability, response time and recovery time, zero point and range drift.
The test platform of the accelerated aging performance test system of the palladium alloy hydrogen sensor is shown in fig. 1, and mainly comprises a simulation cavity 19, a gas distribution system 6, a placement box 20, a vibration table 18, high-purity hydrogen 4, high-purity oxygen 5, high-purity nitrogen 3, a background gas circuit 2, a target gas circuit 7, a discharge gas circuit 14, a first electromagnetic valve 1, a second electromagnetic valve 8, a third electromagnetic valve 13, a hygrothermograph 9, a barometer 10, an aviation plug 15, a vacuum pump 12, a sample 17, an industrial personal computer 21 and a data acquisition and storage system 11. The bottom of the placement box 20 is provided with a triangular buckle for fixing the simulation cavity 19, the placement box 20 is filled with insulating mineral oil with the boiling point not lower than 200 ℃, and the temperature fluctuation is not higher than +/-0.5 ℃; the simulation cavity 19 is a hollow cavity, the outer shell and the inner shell of the cavity wall are made of metal, the middle of the cavity wall is filled with heat insulation materials, the bottom of the cavity wall is provided with a triangular groove, a sensor of the hygrothermograph 9 and the barometer 10 and a vibrating table 18 are arranged in the cavity wall, the vibrating table 18 is provided with a porous heating shell 16 with an openable top, a sample 17 is arranged in the heating shell 16, and the data acquisition system 11 is connected to the sample 17 through an aviation plug 15 of the simulation cavity 19; the free volume of the interior space of the simulation chamber 19 should be as low as possible, typically not higher than 20% of the total volume; the gas distribution system 6 is configured with mixed gases with different concentrations, different components, different moisture contents and different pressures, the high-purity nitrogen 3 is background gas in the gas distribution system, and the high-purity hydrogen 4 and the high-purity oxygen 5 are target gases in the gas distribution system; the output target gas temperature should be selectable and stable at 20-180 ℃, the gas flow range should be selectable at 0-400 sccm, the flow accuracy is not lower than +/-1% of the measuring range, and the output pressure should be selectable at 100-500 kPa; the background air path 2 and the target air path 7 are converged after being controlled by the first electromagnetic valve 1 and the second electromagnetic valve 8, and then are input into a heating shell 16 in a simulation cavity 19, and a discharge air path 14 is sequentially connected to the third electromagnetic valve 13 and the vacuum pump 12 from the heating shell 16; the heat insulation materials are wrapped outside the pipelines of the background gas circuit 2 and the target gas circuit 7; the industrial personal computer 21 is respectively connected with and controls the first electromagnetic valve 1, the second electromagnetic valve 8, the third electromagnetic valve 13, the vacuum pump 12, the heating shell 16, the air distribution system 6 and the vibrating table 18.
When the accelerated aging performance test system is used, the number of samples 17 in each group of aging acceleration tests is not less than 3, and the samples 17 with qualified performance are placed into the simulation cavity 19 and are correctly connected.
When the target gas is input, firstly, the second electromagnetic valve 8 and the first electromagnetic valve 1 are closed, the third electromagnetic valve 13 is opened, and the vacuum pump 12 is opened to evacuate the gas; then, the first electromagnetic valve 1 is closed, the second electromagnetic valve 8 and the third electromagnetic valve 13 are opened, and the gas distribution system 6 is opened to input specified target gas into the simulation cavity 19 until the barometer 10 displays that the pressure in the simulation cavity 19 is standard atmospheric pressure.
Before the temperature aging test, the limit working temperature T of the sample 17 is tested by a stepping method N The operating temperature of sample 17 was noted as T 0 The performance test temperature of sample 17 was recorded as T M The method comprises the steps of carrying out a first treatment on the surface of the Then, a cycle time Ttemperature in the holding tank 20 and the heating housing 16 is set to show a periodic variation, and the test piece 17 is aged d under the temperature condition 1 Cycle, d 1 The value of (2) is adjusted according to the actual aging requirement, and can be 1000.
One cycle contains i phases, i=5, and the expression of the temperature over time t in the kth cycle is:
wherein k is 1 ，k 2 ，k 3 The temperature adjustment rates for the holding tank 20 and the heating housing 16, respectively, are typically maximized.
In the gas impact aging test, the test sample 17 was recorded at a test temperature T M The response time and recovery time at t res And t rec The temperature of the placement box 20 is set to be the test temperature T M And closing the heating shell 16, opening the third electromagnetic valve 13, and controlling the first electromagnetic valve 1 and the second electromagnetic valve 8 to open and close and circularly feed the target gas and the background gas into the simulation cavity 19 by using the industrial personal computer 21, wherein the feeding time of the target gas is as followsResponse time, the introduction time of the background gas is the recovery time, and d is circularly introduced 1 Cycle, d 1 The value of (2) is adjusted according to the actual aging requirement, and can be 1000.
When the gas vibration aging test is carried out, target gas is input into the simulation cavity 19, the vibration frequency and amplitude of the vibration table 18 are opened and set, and the duration time is t s ；t s The value of (2) is adjusted according to the actual aging requirement, and the available value is 24 hours.
And (3) testing the aging performance test process of the system, and adopting software programming to control, test and collect data.
Claims (1)
1. The accelerated aging performance test system of the palladium alloy hydrogen sensor is characterized by comprising a test platform; the test platform comprises a simulation cavity (19) and a placement box (20); the simulation cavity (19) is a metal hollow cavity, a heat insulation material is filled between the cavity wall outer shell and the inner shell, a triangular groove is formed in the bottom of the cavity wall outer shell, and the simulation cavity (19) is fixed at the bottom in the placement box (20) through a triangular buckle; insulating mineral oil with boiling point not lower than 200 ℃ and temperature fluctuation not higher than +/-0.5 ℃ is filled between the placing box (20) and the simulation cavity (19); a vibrating table (18) is arranged in the simulation cavity (19), a porous heating shell (16) with an openable top is arranged on the vibrating table (18), and at least three samples (17) namely palladium alloy hydrogen sensors are arranged in the heating shell (16);
the device also comprises a gas distribution system (6), wherein the gas distribution system (6) is connected with the high-purity nitrogen (3), the high-purity hydrogen (4) and the high-purity oxygen (5);
the air distribution system (6) is also connected into the heating shell (16) through a target air passage (7) provided with a second electromagnetic valve (8);
the high-purity nitrogen (3) is also connected into the heating shell (16) through a background gas circuit (2) provided with a first electromagnetic valve (1); the vacuum pump (12) is connected into the heating shell (16) through a discharge gas circuit (14) provided with a third electromagnetic valve (13);
the device also comprises a temperature and humidity meter (9) for testing the temperature and humidity inside the heating shell (16) and a barometer (10) for testing the air pressure inside the simulation cavity (19); the device also comprises a data acquisition system (11), wherein the data acquisition system (11) is connected to the sample (17) through an aviation plug (15) fixed in the simulation cavity (19) and is used for acquiring the resistance value of the sample; the intelligent control system further comprises an industrial personal computer (21) connected to the data acquisition system (11) and used for controlling the first electromagnetic valve (1), the second electromagnetic valve (8), the third electromagnetic valve (13), the vacuum pump (12), the heating shell (16), the air distribution system (6) and the vibrating table (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311240659.XA CN117330606A (en) | 2023-09-25 | 2023-09-25 | Accelerated aging performance test system of palladium alloy hydrogen sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311240659.XA CN117330606A (en) | 2023-09-25 | 2023-09-25 | Accelerated aging performance test system of palladium alloy hydrogen sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117330606A true CN117330606A (en) | 2024-01-02 |
Family
ID=89278273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311240659.XA Pending CN117330606A (en) | 2023-09-25 | 2023-09-25 | Accelerated aging performance test system of palladium alloy hydrogen sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117330606A (en) |
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2023
- 2023-09-25 CN CN202311240659.XA patent/CN117330606A/en active Pending
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