CN117293073B - Multi-size wafer transmission detection device - Google Patents
Multi-size wafer transmission detection device Download PDFInfo
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- CN117293073B CN117293073B CN202311235899.0A CN202311235899A CN117293073B CN 117293073 B CN117293073 B CN 117293073B CN 202311235899 A CN202311235899 A CN 202311235899A CN 117293073 B CN117293073 B CN 117293073B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a multi-size wafer transmission detection device, which relates to the related field of wafer detection and comprises a mounting table, a conveying mechanism, an adjusting mechanism and a conveying mechanism, wherein the center of the top of the mounting table is connected with the conveying mechanism in a sliding manner, the rear end of the top of the conveying mechanism is fixedly connected with the adjusting mechanism, the right end of the top of the mounting table is fixedly connected with the conveying mechanism, the conveying mechanism is arranged, two groups of clamping pieces are driven to move oppositely through a first transmission piece, then the clamping pieces are used for clamping wafer boxes with different sizes through the matching of damping rods and steel columns on the clamping pieces, then the first cylinder is used for driving the two wafer boxes with different sizes to carry out conveying, the multi-function is realized, the adjusting mechanism is arranged, the front and back movement of the detecting mechanism is realized through the second transmission piece, and then the up and down movement of the detecting mechanism is driven through the relative arrangement of two groups of cams, so that the detecting mechanism is adjusted according to the placement positions of different wafer boxes.
Description
Technical Field
The invention relates to the field of wafer detection, in particular to a multi-size wafer transmission detection device.
Background
The wafer transmission system is an important component part in the special semiconductor equipment, and is responsible for rapidly, efficiently and reliably transmitting wafers among different process modules, the wafers are transmitted back and forth among different chambers, and the wafers are required to be carried to different stations according to a given track by a mechanical arm, so that a multi-size wafer transmission detection device is arranged.
When the existing multi-size wafer transmission detection device is used, the placement position of the wafer box is difficult to change, so that the wafer box is fixed in position, the capability of simultaneously placing two sizes of wafer boxes is difficult to achieve in the process of transmitting the wafer boxes, and the use is single; when the existing multi-size wafer transmission detection device is used for detecting the wafer boxes, the positions of the sensors of the wafer boxes are difficult to change, so that the wafer boxes placed far away are difficult to detect;
When the position of the sensor is adjusted, the position of the wafer box is difficult to detect, and therefore errors of the sensor in the adjusting process can be caused; when the conventional multi-size wafer transmission detection device is used, the positions of a transmission arm for receiving and sending wafers are difficult to adjust, and wafers with different sizes are difficult to transmit.
Disclosure of Invention
Accordingly, in order to solve the above-mentioned shortcomings, the present invention provides a multi-size wafer transfer inspection apparatus.
The invention is realized in such a way, a multi-size wafer transmission detection device is constructed, the device comprises a mounting table, a conveying mechanism is connected in a sliding manner at the center of the top of the mounting table, an adjusting mechanism is fixedly connected to the rear end of the top of the conveying mechanism, and a transmission mechanism is fixedly connected to the right end of the top of the mounting table;
The conveying mechanism comprises a first cylinder, and the rear end of the top of the mounting table is fixedly connected with the first cylinder; the first cylinder front end push rod is fixedly connected with a moving plate, and the moving plate is in sliding connection with the center of the top of the mounting table; the bottom of the moving plate is fixedly connected with a first transmission piece; the first sliding block is fixedly connected with the top of the first transmission piece and is in sliding connection with the top of the moving plate; the left end and the right end of the bottom of the first sliding block are respectively connected with a clamping moving block in a rotating way through a rotating rod, and the clamping moving blocks are in sliding connection with the top of the moving plate; the top of the clamping moving block is fixedly connected with a mounting plate; the right end of the mounting plate is fixedly connected with the clamping piece; the mounting table top is fixedly connected with the I-shaped block through a connecting rod.
Preferably, the adjusting mechanism comprises a first mounting frame, and the rear end of the top of the I-shaped block is fixedly connected with the first mounting frame; the bottom of the transverse plate at the top of the first installation frame is fixedly connected with a second transmission piece; the bottom of the second transmission part is fixedly connected with a connecting frame; the left end and the right end of the connecting frame are fixedly connected with the first motor; the right end output shaft of the first motor is fixedly connected with a cam through a connecting rod, and an arc chute is arranged on the cam; the left end and the right end of the second sliding block are both in sliding connection with the arc-shaped sliding groove on the cam through the sliding blocks; wherein, the cam is equipped with two sets of, and two sets of cams are relative setting.
Preferably, the adjusting mechanism further comprises a limiting rod, and a second sliding block which is convenient for limiting the second sliding block is fixedly connected to the center of the bottom of the connecting frame; the detection mechanism is fixedly connected with the bottom of the second sliding block through a connecting rod.
Preferably, the detection mechanism comprises a mounting box, and the bottom of the second sliding block is fixedly connected with the mounting box through a connecting rod; the right end of the top of the mounting box is fixedly connected with the second motor; the bottom of the mounting box is rotationally connected with a turntable through a connecting rod; the left end of the bottom of the turntable is fixedly connected with the sensor; the right end of the bottom of the turntable is fixedly connected with an industrial camera; the output shaft at the bottom of the second motor is fixedly connected with a connecting rod; the rotating block is rotationally connected with the top of the connecting rod.
Preferably, the detection mechanism further comprises a clamping block, the rotating block is provided with an empty slot, and the empty slot is fixedly connected with the clamping block through a spring; the gear is rotationally connected with the lower part of the bottom of the rotating block, and the clamping block is clamped with the upper tooth section of the gear; wherein, the gear bottom is through connecting rod fixedly connected with carousel.
Preferably, the transmission mechanism comprises a second installation frame, and the right end of the top of the installation table is fixedly connected with the second installation frame; the top of the second mounting frame top transverse plate is fixedly connected with a third motor through a mounting frame; the output shaft at the bottom of the third motor is fixedly connected with a third transmission piece; the top of the top transverse plate of the second mounting frame is rotationally connected with the second air cylinder through the mounting frame; and the second air cylinder bottom pushing rod is fixedly connected with the fixing plate.
Preferably, the transmission mechanism further comprises a fixed block, and the rear end of the bottom of the fixed plate is fixedly connected with the fixed block; the clamping block is connected with the front end of the bottom of the fixing plate in a sliding manner through the electromagnetic block.
Preferably, the third transmission part consists of two groups of belt pulleys and a belt, and the pushing rod at the bottom of the second cylinder is in sliding connection with the belt pulley at the left end of the third transmission part through a flat key.
Preferably, the second transmission piece comprises mount pad, lead screw, motor and movable block, and this movable block bottom fixedly connected with link.
Preferably, the first driving medium includes driving medium motor, driving medium gear and pinion rack, and pinion rack top passes through connecting block and first sliding block fixed connection, the holder includes that installation shell, steel column and damping rod constitute.
The invention has the following advantages: the present invention provides a multi-size wafer transfer inspection apparatus by improvement herein, with the following improvements over the same type of equipment:
according to the multi-size wafer transmission detection device, the conveying mechanism is arranged, the first transmission part drives the two groups of clamping parts to move oppositely, then the clamping parts are matched with the damping rods and the steel columns on the clamping parts to clamp wafer boxes with different sizes, and the first cylinder drives the two wafer boxes with different sizes to convey, so that the multi-use is realized.
According to the multi-size wafer transmission detection device, the adjusting mechanism is arranged, the second transmission piece is used for moving the detection mechanism back and forth, and the two groups of cams are arranged oppositely to drive the detection mechanism to move up and down, so that the detection mechanism is adjusted according to the placement positions of different wafer boxes.
According to the multi-size wafer transmission detection device, the detection mechanism is arranged, and the clamping block is clamped with the upper tooth section of the gear, so that the gear drives the turntable to rotate by one hundred eighty degrees through the connecting rod, the positions of the sensor and the industrial camera are replaced, and the detection error is reduced.
According to the multi-size wafer transmission detection device, the transmission mechanism is arranged, and wafers are placed in the wafer box through the matching of the second air cylinder and the third transmission piece, so that the wafers with different sizes can be clamped and placed conveniently.
Drawings
FIG. 1 is a schematic perspective view of a mounting table according to the present invention;
FIG. 2 is a schematic perspective view of a conveying mechanism according to the present invention;
FIG. 3 is a schematic view of a three-dimensional exploded structure of the conveying mechanism of the present invention;
FIG. 4 is a schematic perspective view of an adjustment mechanism according to the present invention;
FIG. 5 is a schematic elevational view of the adjustment mechanism of the present invention;
FIG. 6 is a schematic perspective view of a detection mechanism according to the present invention;
FIG. 7 is a schematic top view of the mounting box of the present invention;
fig. 8 is a schematic perspective view of a transmission mechanism according to the present invention.
Wherein: the device comprises a mounting table-1, a conveying mechanism-2, a first cylinder-21, a moving plate-22, a first transmission piece-23, a first sliding block-24, a clamping moving block-25, a mounting plate-26, a clamping piece-27, an I-shaped block-28, an adjusting mechanism-3, a first mounting frame-31, a second transmission piece-32, a connecting frame-33, a first motor-34, a cam-35, a second sliding block-36, a limiting rod-37, a detecting mechanism-38, a mounting box-381, a second motor-382, a turntable-383, a sensor-384, an industrial camera-385, a connecting rod-386, a rotating block-387, a clamping block-388, a gear-389, a conveying mechanism-4, a second mounting frame-41, a third motor-42, a third transmission piece-43, a second cylinder-44, a fixing plate-45, a fixing block-46 and a clamping block-47.
Detailed Description
The principles and features of the present invention are described below with reference to fig. 1-8, the examples being provided for illustration only and not for limitation of the scope of the invention. The invention is more particularly described by way of example in the following paragraphs with reference to the drawings. Advantages and features of the invention will become more apparent from the following description and from the claims. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the invention.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When a component is considered to be "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
Embodiment one:
Referring to fig. 1 to 3, the multi-size wafer transmission detection device of the invention comprises a mounting table 1, a conveying mechanism 2 is slidably connected to the center of the top of the mounting table 1, an adjusting mechanism 3 is fixedly connected to the rear end of the top of the conveying mechanism 2, and a transmission mechanism 4 is fixedly connected to the right end of the top of the mounting table 1;
the conveying mechanism 2 comprises a first air cylinder 21, the rear end of the top of the mounting table 1 is fixedly connected with the first air cylinder 21, a push rod at the front end of the first air cylinder 21 is fixedly connected with a moving plate 22, the moving plate 22 is in sliding connection with the center of the top of the mounting table 1, the bottom of the moving plate 22 is fixedly connected with a first transmission piece 23, and the first transmission piece 23 is convenient for driving a first sliding block 24 to move;
the top of the first transmission piece 23 is fixedly connected with a first sliding block 24, the first sliding block 24 is in sliding connection with the top of the moving plate 22, the left end and the right end of the bottom of the first sliding block 24 are respectively and rotatably connected with a clamping moving block 25 through a rotating rod, the clamping moving block 25 is in sliding connection with the top of the moving plate 22, and the first sliding block 24 is convenient for driving the clamping moving block 25 to move through the rotating rod;
The clamping moving block 25 top fixedly connected with mounting panel 26, mounting panel 26 right-hand member fixedly connected with clamping piece 27, mount table 1 top is through connecting rod fixedly connected with I-shaped piece 28, and first driving medium 23 includes driving medium motor, driving medium gear and pinion rack, and pinion rack top is through connecting block and first sliding block 24 fixed connection, and clamping piece 27 includes that installation shell, steel column and damping rod constitute, and clamping piece 27 is convenient for carry out the centre gripping to different size wafer boxes.
The working principle of a multi-size wafer transfer inspection apparatus based on embodiment 1 is:
Firstly, when the equipment is used, the equipment is firstly placed in a working area, and then the device is connected with an external power supply, so that the power supply required by the work of the equipment can be provided.
Secondly, when two wafer boxes with different sizes are required to be conveyed, the two groups of wafer boxes are placed on the I-shaped block 28, then a transmission piece motor on the first transmission piece 23 is started, the transmission piece motor drives a transmission piece gear to rotate, the transmission piece gear drives a toothed plate to move forward, the toothed plate drives the first sliding block 24 to move forward through a moving block, the first sliding block 24 drives the two groups of mounting plates 26 to move in opposite directions through a rotating rod, the mounting plates 26 drive the two groups of clamping pieces 27 to move in opposite directions, the wafer boxes with different sizes are clamped through the matching of damping rods and steel columns on the clamping pieces 27, then the first air cylinder 21 is started, the first air cylinder 21 drives the moving plate 22 to move, the moving plate 22 drives the clamping moving block 25 to move, and the clamping moving block 25 drives the wafer boxes with different sizes to be conveyed through the clamping pieces 27, so that the wafer boxes with different sizes are used for multiple purposes.
Embodiment two:
Referring to fig. 4 to 5, in comparison with the first embodiment, the apparatus for detecting multi-size wafer transfer according to the present invention further includes: the adjusting mechanism 3 comprises a first mounting frame 31, the rear end of the top of the I-shaped block 28 is fixedly connected with the first mounting frame 31, the bottom of a transverse plate at the top of the first mounting frame 31 is fixedly connected with a second transmission member 32, and the second transmission member 32 is convenient for driving the connecting frame 33 to move forwards and backwards;
The bottom of the second transmission member 32 is fixedly connected with a connecting frame 33, the left end and the right end of the connecting frame 33 are fixedly connected with a first motor 34, the right end output shaft of the first motor 34 is fixedly connected with a cam 35 through a connecting rod, the cam 35 is provided with an arc chute, and the first motor 34 is convenient for driving the cam 35 to rotate;
The left end and the right end of the second sliding block 36 are both in sliding connection with the arc-shaped sliding grooves on the cams 35 through the sliding blocks, the cams 35 are provided with two groups, the two groups of cams 35 are oppositely arranged, a limiting rod 37 which is convenient for limiting the second sliding block 36 is fixedly connected to the center of the bottom of the connecting frame 33, and the second sliding block 36 is convenient for driving the detection mechanism 38 to move;
The bottom of the second sliding block 36 is fixedly connected with a detection mechanism 38 through a connecting rod, the second transmission piece 32 consists of a mounting seat, a screw rod, a motor and a moving block, and the bottom of the moving block is fixedly connected with a connecting frame 33.
In this embodiment:
When the position of the detection mechanism 38 needs to be adjusted, the motor on the second transmission member 32 is started, the motor drives the screw rod to rotate, the screw rod drives the moving block to move, the moving block drives the connecting frame 33 to move, the front and back movement of the detection mechanism 38 is realized through the connecting frame 33, then two groups of first motors 34 are started, the two groups of first motors 34 drive the two groups of cams 35 to rotate through the connecting rod, the second sliding block 36 is driven to move on the limiting rod 37 through the relative arrangement of the two groups of cams 35, the up and down movement of the detection mechanism 38 is realized, and the detection mechanism 38 is adjusted according to the placement positions of different wafer boxes.
Embodiment III:
Referring to fig. 6 to fig. 7, in the multi-size wafer transmission detection apparatus of the present invention, compared with the first embodiment, the embodiment further includes: the detection mechanism 38 comprises a mounting box 381, the bottom of the second sliding block 36 is fixedly connected with the mounting box 381 through a connecting rod, the right end of the top of the mounting box 381 is fixedly connected with a second motor 382, and the second motor 382 is convenient for driving the connecting rod 386 to rotate;
The bottom of the installation box 381 is rotationally connected with a turntable 383 through a connecting rod, the left end of the bottom of the turntable 383 is fixedly connected with a sensor 384, the right end of the bottom of the turntable 383 is fixedly connected with an industrial camera 385, and the industrial camera 385 is convenient for detecting the position of the wafer box;
The output shaft fixedly connected with connecting rod 386 in the bottom of second motor 382, connecting rod 386 top rotates and is connected with rotating block 387, is equipped with the empty slot on the rotating block 387, and this empty slot is interior to be connected with fixture block 388 through spring fixedly, and rotating block 387 bottom below rotates and is connected with gear 389, and fixture block 388 and the last tooth section block of gear 389, and gear 389 bottom is convenient for drive gear 389 rotation through connecting rod fixedly connected with carousel 383.
In this embodiment:
When the wafer box is required to be detected, the position of the wafer box is detected through the industrial camera 385 first, then the position of the industrial camera 385 is adjusted through the cooperation of the first transmission piece 23 and the first motor 34, when the position is adjusted to a proper position, the second motor 382 is started, the second motor 382 drives the connecting rod 386 to rotate, the connecting rod 386 drives the rotating block 387 to rotate, the rotating block 387 drives the clamping block 388 to rotate, when the rotating block rotates to a proper distance, the clamping block 388 is clamped with the upper tooth section of the gear 389, then the second motor 382 is started again, the steps are repeated, the gear 389 is driven to rotate through the clamping block 388, the rotating disc 383 is driven to rotate for one hundred eighty degrees through the connecting rod, and therefore the positions of the sensor 384 and the industrial camera 385 are replaced, and detection errors are reduced.
Embodiment four:
Referring to fig. 8, in comparison with the first embodiment, the multi-size wafer transmission detection apparatus of the present invention further includes: the transmission mechanism 4 comprises a second installation frame 41, the right end of the top of the installation table 1 is fixedly connected with the second installation frame 41, the top of a transverse plate at the top of the second installation frame 41 is fixedly connected with a third motor 42 through the installation frame, and the third motor 42 is convenient for driving a third transmission member 43 to work;
the output shaft at the bottom of the third motor 42 is fixedly connected with a third transmission member 43, the top of a transverse plate at the top of the second mounting frame 41 is rotatably connected with a second air cylinder 44 through the mounting frame, and the second air cylinder 44 is convenient for driving a fixed plate 45 to move;
The push rod at the bottom of the second air cylinder 44 is fixedly connected with a fixed plate 45, the rear end of the bottom of the fixed plate 45 is fixedly connected with a fixed block 46, the front end of the bottom of the fixed plate 45 is slidably connected with a clamping block 47 through an electromagnetic block, the third transmission piece 43 consists of two groups of belt pulleys and a belt, and the push rod at the bottom of the second air cylinder 44 is slidably connected with the belt pulley at the left end of the third transmission piece 43 through a flat key, and the clamping block 47 is convenient for clamping a wafer.
In this embodiment:
When the wafer box is conveyed to a proper position through the first air cylinder 21, the second air cylinder 44 is started, the second air cylinder 44 drives the fixing plate 45 to move downwards, the fixing plate 45 drives the fixing block 46 and the clamping block 47 to move downwards, then the electromagnetic block at the bottom of the fixing plate 45 works through the external current output device, the electromagnetic block at the bottom of the fixing plate 45 drives the clamping block 47 to move towards the direction of the fixing block 46, the wafer is clamped through the cooperation of the fixing block 46 and the clamping block 47, then the third motor 42 is started, the third motor 42 drives the right end belt pulley of the third driving member 43 to rotate, the right end belt pulley of the third driving member 43 drives the left end belt pulley of the third driving member 43 to rotate through a belt, the left end belt pulley of the third driving member 43 drives the fixing plate 45 to rotate through the pushing rod of the second air cylinder 44, the fixing plate 45 drives the wafer to rotate through the fixing block 46 and the clamping block 47, and then the second air cylinder 44 is started again, the wafer is driven to move downwards through the second air cylinder 44, and the wafer is placed in the wafer box, so that clamping placement of different wafer sizes can be carried out.
According to the multi-size wafer transmission detection device, the conveying mechanism 2 is arranged, the first transmission part 23 drives the two groups of clamping parts 27 to move oppositely, then the clamping parts 27 are matched with the damping rods and the steel columns to clamp wafer boxes with different sizes, and the first cylinder 21 drives the two wafer boxes with different sizes to convey, so that the multi-use is realized; setting an adjusting mechanism 3, realizing the forward and backward movement of the detecting mechanism 38 through the second transmission piece 32, and driving the detecting mechanism 38 to move up and down through the opposite arrangement of the two groups of cams 35, so as to adjust the detecting mechanism 38 according to the placement positions of different wafer boxes; the detection mechanism 38 is arranged, and the clamping block 388 is clamped with the upper tooth section of the gear 389, so that the gear 389 drives the turntable 383 to rotate for one hundred eighty degrees through the connecting rod, and the positions of the sensor 384 and the industrial camera 385 are replaced, so that detection errors are reduced; the transmission mechanism 4 is arranged, and wafers are placed in the wafer box through the cooperation of the second air cylinder 44 and the third transmission piece 43, so that the wafers with different sizes can be clamped and placed conveniently.
The basic principle and main characteristics of the invention and the advantages of the invention are shown and described above, standard parts used by the invention can be purchased from market, special-shaped parts can be customized according to the description of the specification and the drawings, the specific connection modes of the parts adopt conventional means such as mature bolt rivets and welding in the prior art, the machinery, the parts and the equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection modes in the prior art, so that the description is omitted.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. The utility model provides a multisize wafer transmission detection device, includes mount table (1), mount table (1) top center department sliding connection has conveying mechanism (2), conveying mechanism (2) top rear end fixedly connected with adjustment mechanism (3), mount table (1) top right-hand member fixedly connected with conveying mechanism (4);
The method is characterized in that: the conveying mechanism (2) comprises: the rear end of the top of the mounting table (1) is fixedly connected with the first air cylinder (21); the front end pushing rod of the first air cylinder (21) is fixedly connected with the moving plate (22), and the moving plate (22) is in sliding connection with the center of the top of the mounting table (1); the bottom of the moving plate (22) is fixedly connected with a first transmission piece (23); the top of the first transmission piece (23) is fixedly connected with a first sliding block (24), and the first sliding block (24) is in sliding connection with the top of the movable plate (22); the left end and the right end of the bottom of the first sliding block (24) are rotatably connected with the clamping moving block (25) through a rotating rod, and the clamping moving block (25) is slidably connected with the top of the moving plate (22); the mounting plate (26) is fixedly connected with the top of the clamping moving block (25); the clamping pieces (27) are fixedly connected to opposite ends of the two mounting plates (26) respectively; the top of the mounting table (1) is fixedly connected with the I-shaped block (28) through a connecting rod;
The clamping piece (27) comprises a mounting shell, a steel column and a damping rod;
The transmission detection device drives the two groups of clamping pieces (27) to move in opposite directions through the first transmission piece (23), then clamps wafer boxes with different sizes through the matching of damping rods and steel columns on the clamping pieces (27), and drives the two wafer boxes with different sizes to be conveyed through the first air cylinder (21).
2. A multi-size wafer transfer inspection apparatus as claimed in claim 1, wherein: the adjusting mechanism (3) comprises: the first mounting frame (31) is fixedly connected with the rear end of the top of the I-shaped block (28); the bottom of the transverse plate at the top of the first mounting frame (31) is fixedly connected with a second transmission member (32); the connecting frame (33) is fixedly connected with the bottom of the second transmission piece (32); the left end and the right end of the connecting frame (33) are fixedly connected with the first motor (34); the right end output shaft of the first motor (34) on the left side of the connecting frame (33) is fixedly connected with the cam (35) through a connecting rod, and the left end output shaft of the first motor (34) on the right side of the connecting frame (33) is fixedly connected with the cam (35) through a connecting rod; and the cam (35) is provided with an arc chute; the left end and the right end of the second sliding block (36) are both in sliding connection with the arc-shaped sliding groove on the cam (35) through the sliding blocks; wherein, the cam (35) is provided with two groups, and the two groups of cams (35) are oppositely arranged.
3. A multi-size wafer transfer inspection apparatus as claimed in claim 2, wherein: the adjusting mechanism (3) further comprises: the limiting rod (37) is fixedly connected with the center of the bottom of the connecting frame (33), and the limiting rod (37) is convenient for limiting the second sliding block (36); the detection mechanism (38), second sliding block (36) bottom is connected with detection mechanism (38) through the connecting rod fixedly.
4. A multi-size wafer transfer inspection apparatus as claimed in claim 3, wherein: the detection mechanism (38) includes: the bottom of the second sliding block (36) is fixedly connected with the mounting box (381) through a connecting rod; the right end of the top of the installation box (381) is fixedly connected with the second motor (382); the bottom of the installation box (381) is rotatably connected with the turntable (383) through a connecting rod; the sensor (384) is fixedly connected with the left end of the bottom of the turntable (383); an industrial camera (385), wherein the right end of the bottom of the turntable (383) is connected with the industrial camera (385); a connecting rod (386), wherein the connecting rod (386) is fixedly connected with an output shaft at the bottom of the second motor (382); and the rotating block (387) is rotatably connected with the top of the connecting rod (386).
5. A multi-size wafer transfer inspection apparatus as claimed in claim 4, wherein: the detection mechanism (38) further includes: the clamping block (388) is arranged on the rotating block (387), and the clamping block (388) is fixedly connected in the empty groove through a spring; the gear (389) is rotationally connected with the gear (389) below the bottom of the rotating block (387), and the clamping block (388) is clamped with the upper tooth section of the gear (389); wherein, gear (389) bottom is through connecting rod fixedly connected with carousel (383).
6. A multi-size wafer transfer inspection apparatus as claimed in claim 5, wherein: the transmission mechanism (4) comprises: the right end of the top of the mounting table (1) is fixedly connected with the second mounting frame (41); the top of the top transverse plate of the second mounting frame (41) is fixedly connected with the third motor (42) through the mounting frame; the bottom output shaft of the third motor (42) is fixedly connected with the third transmission member (43); the top of the top transverse plate of the second mounting frame (41) is rotatably connected with the second air cylinder (44) through the mounting frame; and the fixed plate (45) is fixedly connected with the pushing rod at the bottom of the second air cylinder (44).
7. A multi-size wafer transfer inspection apparatus as claimed in claim 6, wherein: the transport mechanism (4) further comprises: the fixed block (46), the fixed block (46) is fixedly connected with the rear end of the bottom of the fixed plate (45); the clamping block (47), the front end of the bottom of the fixed plate (45) is connected with the clamping block (47) in a sliding way through the electromagnetic block.
8. A multi-size wafer transfer inspection apparatus as claimed in claim 7, wherein: the third transmission part (43) consists of two groups of belt pulleys and a belt, and a push rod at the bottom of the second cylinder (44) is in sliding connection with the belt pulley at the left end of the third transmission part (43) through a flat key.
9. A multi-size wafer transfer inspection apparatus as claimed in claim 8, wherein: the second transmission piece (32) is composed of a mounting seat, a screw rod, a motor and a moving block, and the bottom of the moving block is fixedly connected with a connecting frame (33).
10. A multi-size wafer transfer inspection apparatus as claimed in claim 9, wherein: the first transmission piece comprises a transmission piece motor, a transmission piece gear and a toothed plate, and the top of the toothed plate is fixedly connected with the first sliding block through a connecting block.
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| CN202311235899.0A CN117293073B (en) | 2023-09-22 | 2023-09-22 | Multi-size wafer transmission detection device |
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| CN202311235899.0A CN117293073B (en) | 2023-09-22 | 2023-09-22 | Multi-size wafer transmission detection device |
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| CN117293073B true CN117293073B (en) | 2024-05-07 |
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| CN117293073A (en) | 2023-12-26 |
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