CN117288314A - Optical fiber acoustic wave sensor for simultaneously detecting transverse wave and longitudinal wave - Google Patents
Optical fiber acoustic wave sensor for simultaneously detecting transverse wave and longitudinal wave Download PDFInfo
- Publication number
- CN117288314A CN117288314A CN202310308467.1A CN202310308467A CN117288314A CN 117288314 A CN117288314 A CN 117288314A CN 202310308467 A CN202310308467 A CN 202310308467A CN 117288314 A CN117288314 A CN 117288314A
- Authority
- CN
- China
- Prior art keywords
- optical fiber
- light source
- transverse
- longitudinal
- wavelength division
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
Description
技术领域Technical field
本发明涉及声波探测技术领域,具体为一种同时探测横波和纵波的光纤声波传感器。The present invention relates to the technical field of acoustic wave detection, specifically an optical fiber acoustic wave sensor that simultaneously detects transverse waves and longitudinal waves.
背景技术Background technique
声波是由物体的振动在介质中传播形成,传播的形式分为两种类型,当声波传播过程中,介质质点振动方向与声传播方向一致时,称为纵波;介质质点振动方向与声传播方向垂直时,称为横波。Sound waves are formed by the vibration of objects propagating in the medium. The forms of propagation are divided into two types. When the sound wave propagates, the vibration direction of the medium particles is consistent with the sound propagation direction, it is called a longitudinal wave; the vibration direction of the medium particles is consistent with the sound propagation direction. When vertical, it is called a transverse wave.
因为横波和纵波传播特性不一样,因此相应传感器测量的检测机理也不一样。纵波探测器主要是通过传感薄膜感应纵波声压的变化,从而引起传感薄膜发生形变,再将膜片形变量转换为电信号;横波探测器主要是通过质量块或悬臂梁结构来感应横波加速度变化,从而导致悬臂梁所受应变或者质量块发生位移,再将悬臂梁应变或者质量块的位移转换为电信号。Because the propagation characteristics of transverse waves and longitudinal waves are different, the detection mechanisms measured by the corresponding sensors are also different. The longitudinal wave detector mainly senses changes in the longitudinal wave sound pressure through the sensing film, causing the sensing film to deform, and then converts the diaphragm deformation into an electrical signal; the shear wave detector mainly senses the shear wave through a mass block or cantilever beam structure. The acceleration changes, resulting in the strain of the cantilever beam or the displacement of the mass block, and then the cantilever beam strain or the displacement of the mass block is converted into an electrical signal.
现有技术中电子式声波传感技术相对成熟,但仍存在一些不足,如电缆负载、连接电缆的共振效应、低频噪音大,稳定性、可靠性较差;信号易受外界复杂环境电磁干扰、低频测量阻抗匹配难度大等问题;横波传感器与纵波传感器是分离、集成性差、灵敏度偏低、体积大,不能满足一些特殊应用环境的需求。如管道泄露时,管内流体与管壁相互作用,会发出沿管道内传播的纵波信号和沿着管壁传输的横波信号,因此可以通过检测泄露声波方式实时监控管道泄露情况。在老管道内安装传感器难度高,因此要求传感器集成度要高、体积要小、灵敏度还要高,而现有探测器横、纵传感器是分离的,一般只安装纵波探测器,降低探测的精度。声波探测还可用于石油、天然气等资源勘探,地震、泥石流等自然预警以及船舶、飞机等噪声监测。可通过横、纵波联合探测的方式可有效提高相应领域的测量精度,所以研发横波和纵波同时探测的高灵敏度声波传感很有必要。The electronic acoustic wave sensing technology in the existing technology is relatively mature, but there are still some shortcomings, such as cable load, resonance effect of connecting cables, large low-frequency noise, poor stability and reliability; signals are susceptible to electromagnetic interference from complex external environments, Low-frequency measurement impedance matching is difficult and other issues; transverse wave sensors and longitudinal wave sensors are separated, have poor integration, low sensitivity, and large size, and cannot meet the needs of some special application environments. For example, when a pipeline leaks, the interaction between the fluid in the pipe and the pipe wall will emit longitudinal wave signals that propagate along the pipeline and shear wave signals that propagate along the pipe wall. Therefore, pipeline leakage can be monitored in real time by detecting leakage sound waves. It is difficult to install sensors in old pipelines, so the sensors are required to be highly integrated, small in size, and highly sensitive. However, existing detectors have separate transverse and longitudinal sensors. Generally, only longitudinal wave detectors are installed, which reduces the detection accuracy. . Acoustic detection can also be used for resource exploration such as oil and natural gas, natural early warning such as earthquakes and debris flows, and noise monitoring such as ships and aircraft. The measurement accuracy in the corresponding field can be effectively improved through joint detection of transverse and longitudinal waves. Therefore, it is necessary to develop high-sensitivity acoustic wave sensors that detect both transverse and longitudinal waves simultaneously.
发明内容Contents of the invention
针对现有技术的以上缺陷和改进需求,本发明提供了一种同时探测横波和纵波的光纤声波传感器,具体包括:In view of the above defects and improvement needs of the existing technology, the present invention provides an optical fiber acoustic wave sensor that simultaneously detects transverse waves and longitudinal waves, specifically including:
传感单元,与环形器相连,用于同时探测横波和纵波,传感单元包括:The sensing unit is connected to the circulator and is used to detect transverse waves and longitudinal waves at the same time. The sensing unit includes:
支撑板;support plate;
空心偏心光纤,其一端穿过支撑板并与支撑板固定在一起,另一端插入空心玻璃毛细管中构成悬臂梁结构;Hollow eccentric optical fiber, one end of which passes through the support plate and is fixed with the support plate, and the other end is inserted into the hollow glass capillary tube to form a cantilever beam structure;
光纤光栅,刻于空心偏心光纤固定端的一侧;Fiber grating, engraved on one side of the fixed end of the hollow eccentric fiber;
长周期光栅,刻于空心偏心光纤固定端的另一侧;Long period grating, engraved on the other side of the fixed end of the hollow eccentric fiber;
传感薄膜,粘贴于空心玻璃毛细管的端面;The sensing film is pasted on the end face of the hollow glass capillary tube;
保护壳,固定在支撑板上,用于保护内部传感结构;A protective shell, fixed on the support plate, is used to protect the internal sensing structure;
透声孔,开设于保护壳一侧带,外部纵波声信号通过透声孔作用在传感薄膜上;The sound-transmitting hole is opened on one side of the protective shell, and the external longitudinal wave sound signal acts on the sensing film through the sound-transmitting hole;
其中,传感单元中空心偏心光纤为悬臂梁,空心玻璃毛细管为质量块,两者共同组成悬臂梁结构,用于横波探测;传感单元中空心偏心光纤的端面与传感薄膜组成法布里珀罗干涉仪,用于纵波探测。Among them, the hollow eccentric optical fiber in the sensing unit is a cantilever beam, and the hollow glass capillary tube is a mass block. The two together form a cantilever beam structure for shear wave detection; the end face of the hollow eccentric optical fiber in the sensing unit and the sensing film form a Fabry Perot interferometer for longitudinal wave detection.
进一步的,本发明提供的一种同时探测横波和纵波的光纤声波传感器,还包括:Further, the invention provides an optical fiber acoustic wave sensor that simultaneously detects transverse waves and longitudinal waves, further including:
波分复用器,其第一输入端口和第二输入端口分别与第一光源和第二光源的输出端连接;A wavelength division multiplexer, the first input port and the second input port of which are respectively connected to the output ends of the first light source and the second light source;
环形器,其第一输入端口与波分复用器的输出端口相连,其第一输出端口与传感单元中的空心偏心光纤相连;A circulator, the first input port of which is connected to the output port of the wavelength division multiplexer, and the first output port of which is connected to the hollow eccentric optical fiber in the sensing unit;
解波分复用器,其输入端口与环形器的第二输出端口相连,其第一输出端口和第二输出端口分别与第一光电探测器和第二光电探测器相连;A demultiplexer, the input port of which is connected to the second output port of the circulator, and the first and second output ports of which are respectively connected to the first photodetector and the second photodetector;
其中,波分复用器将不同波长的激光耦合至同一光纤中,环形器将传感单元的反射光定向传输至解波分复用器,解波分复用器将第一光源和第二光源发出的光分离开来,解波分复用器的第一输出端口输出第一光源对应波长的光,解波分复用器的第二输出端口输出第二光源对应波长的光,第一光电探测器和第二光电探测器分别将两路光信号转换为电信号,第一光电探测器输出横波信号,第二光电探测器输出纵波信号。Among them, the wavelength division multiplexer couples lasers of different wavelengths into the same optical fiber, the circulator directionally transmits the reflected light of the sensing unit to the wavelength division multiplexer, and the wavelength division multiplexer couples the first light source and the second light source. The light emitted by the light source is separated, the first output port of the wavelength division multiplexer outputs light with the wavelength corresponding to the first light source, and the second output port of the wavelength division multiplexer outputs light with the wavelength corresponding to the second light source. The photodetector and the second photodetector respectively convert two optical signals into electrical signals. The first photodetector outputs a transverse wave signal, and the second photodetector outputs a longitudinal wave signal.
进一步的,空心偏心光纤与空心玻璃毛细管构成悬臂梁结构,用于探测横波信号;Furthermore, the hollow eccentric optical fiber and the hollow glass capillary tube form a cantilever beam structure for detecting shear wave signals;
空心偏心光纤的端面与传感薄膜构成法布里珀罗腔,用于探测纵波信号。The end face of the hollow eccentric optical fiber and the sensing film form a Fabry-Perot cavity, which is used to detect longitudinal wave signals.
进一步的,光纤光栅用于感知悬臂梁应变变换,并将第一光源的部分光反射至解波分复用器用横波信号解调;Further, the fiber grating is used to sense the strain transformation of the cantilever beam, and reflect part of the light from the first light source to the demultiplexer to demodulate the shear wave signal;
长周期光栅将第一光源进光纤光栅透射出的光耦合至包层中损耗掉,隔绝纵波信号对横波探测的干扰。The long-period grating couples the light transmitted from the first light source into the fiber grating and loses it in the cladding, thereby isolating the interference of longitudinal wave signals on transverse wave detection.
进一步的,空心偏心光纤作为悬臂梁结构,光纤横截面积小,且纤芯靠近光纤外表面,感应横波信号时,应变灵敏度高于普通单模光纤一个数量级,有利于横波探测;Furthermore, the hollow eccentric fiber has a cantilever beam structure, the cross-sectional area of the fiber is small, and the fiber core is close to the outer surface of the fiber. When sensing shear wave signals, the strain sensitivity is an order of magnitude higher than that of ordinary single-mode fiber, which is conducive to shear wave detection;
空心偏心光纤的纤芯正对着传感薄膜中心位置,传感薄膜感应纵波信号时,中心位置灵敏度最大。The core of the hollow eccentric optical fiber is facing the center of the sensing film. When the sensing film senses longitudinal wave signals, the center position has the greatest sensitivity.
进一步的,空心玻璃毛细管壁厚为30~100μm,既作为悬臂梁的质量块,又用于固定传感薄膜。Furthermore, the wall thickness of the hollow glass capillary is 30 to 100 μm, which not only serves as the mass block of the cantilever beam, but also is used to fix the sensing film.
进一步的,第一光源的中心波长位于波分复用器的第一输入端口对应带宽内;Further, the central wavelength of the first light source is located within the corresponding bandwidth of the first input port of the wavelength division multiplexer;
第二光源的中心波长位于波分复用器的第二输入端口对应带宽内;The central wavelength of the second light source is located within the corresponding bandwidth of the second input port of the wavelength division multiplexer;
第一光源的中心波长与长周期光栅中心波长一致,且位于光纤光栅反射谱斜边中间区域,确保传感器具有高横波探测灵敏度。The central wavelength of the first light source is consistent with the central wavelength of the long period grating and is located in the middle area of the hypotenuse of the fiber grating reflection spectrum, ensuring that the sensor has high shear wave detection sensitivity.
进一步的,波分复用器与解波分复用器性能参数一致。Furthermore, the performance parameters of the wavelength division multiplexer and the demultiplexer are consistent.
进一步的,环形器第一输出端口与空心偏心光纤连接采用对芯熔接,降低系统插损。Furthermore, the first output port of the circulator is connected to the hollow eccentric fiber using core-to-core fusion splicing to reduce system insertion loss.
进一步的,第一光电探测器探测范围包含第一光源发出的光波;Further, the detection range of the first photodetector includes the light waves emitted by the first light source;
第二光电探测器探测范围包含第二光源发出的光波。The detection range of the second photodetector includes the light waves emitted by the second light source.
与现有技术相比,本发明提供了一种同时探测横波和纵波的光纤声波传感器,其有益效果是:Compared with the existing technology, the present invention provides an optical fiber acoustic wave sensor that simultaneously detects transverse waves and longitudinal waves. Its beneficial effects are:
(1)本发明通过传感单元可同时感应横波和纵波信号,通过空心偏心光纤与空心玻璃毛细管构成的悬臂梁结构将横波信号转为光纤光栅的应变变化,通过空心偏心光纤端面与传感薄膜构成的法布里珀罗腔感应纵波信号;(1) The present invention can simultaneously sense transverse and longitudinal wave signals through the sensing unit, and convert the transverse wave signal into the strain change of the fiber grating through the cantilever beam structure composed of a hollow eccentric optical fiber and a hollow glass capillary tube. Through the end face of the hollow eccentric optical fiber and the sensing film, The constituted Fabry-Perot cavity induces longitudinal wave signals;
(2)本发明的传感单元具有很高的横波探测灵敏度,采用空心偏心光纤作为悬臂梁,光纤的横截面积大大减小,同时纤芯靠近光纤外面,更容易感知因横波信号造成的悬臂梁根部应变变化;(2) The sensing unit of the present invention has high shear wave detection sensitivity. It uses a hollow eccentric optical fiber as a cantilever beam. The cross-sectional area of the optical fiber is greatly reduced. At the same time, the core is close to the outside of the optical fiber, making it easier to detect the cantilever caused by the shear wave signal. Strain changes at the beam root;
(3)本发明的传感单元具有很高的纵波探测灵敏度,采用的传感薄膜的材料不受限制,可通过减小传感薄膜厚度的方式,显著提高传感器的纵波探测灵敏度;(3) The sensing unit of the present invention has high longitudinal wave detection sensitivity, and the material of the sensing film used is not limited. The longitudinal wave detection sensitivity of the sensor can be significantly improved by reducing the thickness of the sensing film;
(4)本发明的传感单元不包含任何电器件,外部横、纵波调制的是光信号,抗电磁干扰能力强,可用于遥感和易燃易爆等应用环境。(4) The sensing unit of the present invention does not contain any electrical components. The external transverse and longitudinal waves modulate optical signals. It has strong anti-electromagnetic interference ability and can be used in remote sensing and flammable and explosive application environments.
(5)本发明的传感器通过波分复用器和解波分复用器以及光纤光栅和长周期光纤的选波特性,可实现横波和纵波信号同时功率解调,相互之间串扰几乎为0,解调精度高,信噪比高于50dB。(5) The sensor of the present invention can realize simultaneous power demodulation of transverse and longitudinal wave signals through the wavelength division multiplexer and demultiplexer as well as the wave selection characteristics of fiber grating and long-period optical fiber, and the crosstalk between each other is almost zero. , high demodulation accuracy and signal-to-noise ratio higher than 50dB.
附图说明Description of drawings
图1为本发明提供的一种同时探测横波和纵波的光纤声波传感器的结构示意图;Figure 1 is a schematic structural diagram of an optical fiber acoustic wave sensor that simultaneously detects transverse waves and longitudinal waves provided by the present invention;
图2为本发明提供的一种同时探测横波和纵波的光纤声波传感器中传感单元的结构示意图;Figure 2 is a schematic structural diagram of a sensing unit in an optical fiber acoustic wave sensor that simultaneously detects transverse waves and longitudinal waves provided by the present invention;
图3为本发明提供的一种同时探测横波和纵波的光纤声波传感器中空心偏心光纤的截面图;Figure 3 is a cross-sectional view of a hollow eccentric optical fiber in an optical fiber acoustic wave sensor that simultaneously detects transverse waves and longitudinal waves provided by the present invention;
图4为本发明提供的一种同时探测横波和纵波的光纤声波传感器中空心偏心光纤与空心玻璃毛细管固定后的截面图;Figure 4 is a cross-sectional view of a hollow eccentric optical fiber and a hollow glass capillary tube fixed in a fiber optic acoustic wave sensor for simultaneously detecting transverse waves and longitudinal waves provided by the present invention;
图5为本发明提供的一种同时探测横波和纵波的光纤声波传感器的整体结构示意图;Figure 5 is a schematic diagram of the overall structure of an optical fiber acoustic wave sensor that simultaneously detects transverse waves and longitudinal waves provided by the present invention;
图6为本发明提供的一种同时探测横波和纵波的光纤声波传感器的信息流程图。Figure 6 is an information flow chart of an optical fiber acoustic wave sensor that simultaneously detects transverse waves and longitudinal waves provided by the present invention.
图中:1、第一光源;2、第二光源;3、波分复用器;4、环形器;5、解波分复用器;6、传感单元;7、第一光电探测器;8、第二光电探测器;9、长周期光栅;10、光纤光栅;11、空心偏心光纤;12、空心玻璃毛细管;13、传感薄膜;14、支撑板;15、保护壳;16、透声孔;17、胶水。In the figure: 1. First light source; 2. Second light source; 3. Wavelength division multiplexer; 4. Circulator; 5. Wavelength division multiplexer; 6. Sensing unit; 7. First photodetector ; 8. Second photodetector; 9. Long period grating; 10. Fiber grating; 11. Hollow eccentric optical fiber; 12. Hollow glass capillary; 13. Sensing film; 14. Support plate; 15. Protective shell; 16. Sound hole; 17. Glue.
具体实施方式Detailed ways
下面结合附图1至图6,对本发明的具体实施方式作进一步描述。以下实施例仅用于更加清楚地说明本发明的技术方案,而不能以此来限制本发明的保护范围。Specific embodiments of the present invention will be further described below with reference to the accompanying drawings 1 to 6 . The following examples are only used to more clearly illustrate the technical solutions of the present invention, but cannot be used to limit the scope of the present invention.
实施例1:如图1和图6所示,本发明提供的一种同时探测横波和纵波的光纤声波传感器,其中:Embodiment 1: As shown in Figure 1 and Figure 6, the present invention provides an optical fiber acoustic wave sensor that simultaneously detects transverse waves and longitudinal waves, wherein:
传感单元6的结构示意图如图2所示。传感单元6包括长周期光栅9和光纤光栅10,空心偏心光纤11,空心玻璃毛细管12,传感薄膜13,支撑板14,保护壳15和透声孔16。The structural diagram of the sensing unit 6 is shown in Figure 2. The sensing unit 6 includes a long period grating 9 and a fiber grating 10, a hollow eccentric optical fiber 11, a hollow glass capillary 12, a sensing film 13, a support plate 14, a protective shell 15 and a sound-transmitting hole 16.
空心偏心光纤11的一端穿过支撑板14并与支撑板14固定在一起,另一端插入空心玻璃毛细管12中构成悬臂梁结构,在靠近空心偏心光纤11固定端一侧刻有光纤光栅10,用于感知横波信号;在空心偏心光纤11另一端刻有长周期光栅9,用于隔绝纵波信号对横波探测的干扰。空心玻璃毛细管12的端面粘贴有传感薄膜13,空心偏心光纤11的端面与传感薄膜13之间形成法布里珀罗干涉仪用于探测纵波信号。保护壳15固定在支撑板14上,用于保护内部传感结构,保护壳15一侧带有透声孔16,外部纵波声信号可通过透声孔16作用在传感薄膜13上。One end of the hollow eccentric optical fiber 11 passes through the support plate 14 and is fixed with the support plate 14, and the other end is inserted into the hollow glass capillary 12 to form a cantilever beam structure. A fiber grating 10 is engraved on the side close to the fixed end of the hollow eccentric optical fiber 11. For sensing transverse wave signals; a long-period grating 9 is engraved on the other end of the hollow eccentric optical fiber 11 to isolate the interference of longitudinal wave signals on transverse wave detection. A sensing film 13 is pasted on the end face of the hollow glass capillary tube 12, and a Fabry-Perot interferometer is formed between the end face of the hollow eccentric optical fiber 11 and the sensing film 13 for detecting longitudinal wave signals. The protective shell 15 is fixed on the support plate 14 to protect the internal sensing structure. The protective shell 15 has a sound-transmitting hole 16 on one side, and external longitudinal wave sound signals can act on the sensing film 13 through the sound-transmitting hole 16 .
其中,空心玻璃毛细管12的端面截面如图3所示,中间为空气孔;包层为圆环形;纤芯在圆环形包层中。Among them, the end section of the hollow glass capillary tube 12 is shown in Figure 3, with an air hole in the middle; the cladding is annular; and the core is in the annular cladding.
空心玻璃毛细管12与空心偏心光纤11通过胶水17固定在一起,固定后截面图如图4所示,保证空心偏心光纤11的纤芯在空心玻璃毛细管12圆心附近。The hollow glass capillary tube 12 and the hollow eccentric optical fiber 11 are fixed together through glue 17. The cross-sectional view after fixation is shown in Figure 4, ensuring that the core of the hollow eccentric optical fiber 11 is near the center of the hollow glass capillary tube 12.
在本实施例中,光纤光栅10的中心波长对应的反射率为90%以上,长周期光栅9中心波长对应的透射率小于10%,隔绝法布里珀罗干涉仪反射信号对横波探测的干扰。In this embodiment, the reflectivity corresponding to the center wavelength of the fiber grating 10 is more than 90%, and the transmittance corresponding to the center wavelength of the long period grating 9 is less than 10%, which isolates the interference of the reflected signal of the Fabry-Perot interferometer on the shear wave detection. .
在本实施例中,空心偏心光纤11从支撑板14到传感薄膜13的距离为2~8cm,可保证传感器在高灵敏度探测横波信号同时具有较宽的频率探测范围,可根据实际的测量频率范围调节空心偏心光纤11的长度,可实现1Hz~100kHz频率范围内的横波信号的测量。In this embodiment, the distance between the hollow eccentric optical fiber 11 from the support plate 14 to the sensing film 13 is 2 to 8 cm, which ensures that the sensor detects shear wave signals with high sensitivity and has a wide frequency detection range. According to the actual measurement frequency By adjusting the length of the hollow eccentric optical fiber 11 within the range, measurement of transverse wave signals in the frequency range of 1Hz to 100kHz can be achieved.
在本实施例中,空心偏心光纤11的横截面积越小,传感器横波探测灵敏度越高,但制作成本也越高、制作难度也越大,综合考虑空心偏心光纤11的内直径为30~60μm,外直径为100~150μm为宜。In this embodiment, the smaller the cross-sectional area of the hollow eccentric optical fiber 11 is, the higher the shear wave detection sensitivity of the sensor is, but the higher the production cost and the greater the difficulty of production. Considering that the inner diameter of the hollow eccentric optical fiber 11 is 30-60 μm , the outer diameter is preferably 100~150μm.
在本实施例中,空心偏心光纤11纤芯的直径为8-10μm,便于和单模光纤熔接,插损小。In this embodiment, the diameter of the core of the hollow eccentric optical fiber 11 is 8-10 μm, which is convenient for splicing with single-mode optical fiber and has low insertion loss.
在本实施例中,空心偏心光纤11的纤芯在空心玻璃毛细管12圆心附近,保证空心偏心光纤11纤芯正对传感薄膜13中心,使得传感器能够获得最大纵波探测灵敏度,灵敏度为100~200mV/g。In this embodiment, the core of the hollow eccentric optical fiber 11 is near the center of the hollow glass capillary tube 12, ensuring that the core of the hollow eccentric optical fiber 11 is facing the center of the sensing film 13, so that the sensor can obtain the maximum longitudinal wave detection sensitivity, with a sensitivity of 100-200mV. /g.
在本实施例中,空心玻璃毛细管12的壁厚为30~100μm,便于固定传感薄膜13。In this embodiment, the wall thickness of the hollow glass capillary tube 12 is 30-100 μm, which is convenient for fixing the sensing film 13.
在本实施例中,传感薄膜13的材料为二氧化硅薄膜,与空心玻璃毛细管12和空心偏心光纤11的材料为同一种材料,可有效降低传感器的热噪声。In this embodiment, the material of the sensing film 13 is a silicon dioxide film, which is the same material as the hollow glass capillary tube 12 and the hollow eccentric optical fiber 11 , which can effectively reduce the thermal noise of the sensor.
在本实施例中,空心偏心光纤11端面到传感薄膜13的距离为50~200μm,该范围内法布里珀罗干涉仪具有较高的对比度,传感器纵波探测灵敏度高。In this embodiment, the distance from the end face of the hollow eccentric optical fiber 11 to the sensing film 13 is 50 to 200 μm. Within this range, the Fabry-Perot interferometer has a high contrast and the sensor has high longitudinal wave detection sensitivity.
在本实施例中,传感薄膜13的厚度越薄,传感器纵波探测灵敏度越高,但探测频率范围约到,综合考虑,传感薄膜13的厚度为0.5~2μm为宜,可根据实际的测量频率范围设置传感薄膜13的厚度,可实现1Hz~100kHz频率范围内的纵波信号的测量,灵敏度大小为100~500mV/Pa。In this embodiment, the thinner the thickness of the sensing film 13, the higher the longitudinal wave detection sensitivity of the sensor. However, the detection frequency range is approximately 0.5 to 2 μm. Taking comprehensive considerations into account, the thickness of the sensing film 13 is preferably 0.5 to 2 μm, which can be determined according to actual measurements. The frequency range sets the thickness of the sensing film 13 to achieve measurement of longitudinal wave signals in the frequency range of 1Hz to 100kHz, with a sensitivity of 100 to 500mV/Pa.
在本实施例中,支撑板14采用铝制方形板,铝制材料轻盈便于开孔和维护,便于传感单元固定在探测结构表面。In this embodiment, the support plate 14 is made of an aluminum square plate. The aluminum material is light and easy to drill holes and maintain, and facilitates the sensing unit to be fixed on the surface of the detection structure.
本发明提供的一种同时探测横波和纵波的光纤声波传感器的结构如图如5所示,包括第一光源1和第二光源2;波分复用器3和解波分复用器5;环形器4;传感单元6;第一光电探测器7和第二光电探测器8。The structure of an optical fiber acoustic wave sensor that simultaneously detects transverse waves and longitudinal waves provided by the present invention is shown in Figure 5, including a first light source 1 and a second light source 2; a wavelength division multiplexer 3 and a demultiplexer 5; a ring 4; sensing unit 6; first photodetector 7 and second photodetector 8.
第一光源1和第二光源2输出端分别连接波分复用器3的第一输入端口和第二输入端口,通过波分复用器3将不同波长的激光耦合至同一光纤中;环形器4将传感单元6的反射光定向传输至解波分复用器5,环形器4第一输入端口连接波分复用器3的输出端口,环形器4的第一输出端口连接传感单元6中的空心偏心光纤11,环形器4的第二输出端口连接解波分复用器5的输入端口;解波分复用器5将第一光源1和第二光源2发出的光分离开来,解波分复用器5的第一端口输出第一光源1对应波长的光并与第一光电探测器7连接在一起,解波分复用器5的第二输出端口输出第二光源2对应波长的光并与第二光电探测器8连接在一起;第一光电探测器7和第二光电探测器8分别将两路光信号转换为电信。The output ends of the first light source 1 and the second light source 2 are respectively connected to the first input port and the second input port of the wavelength division multiplexer 3, and lasers of different wavelengths are coupled into the same optical fiber through the wavelength division multiplexer 3; circulator 4. Directly transmit the reflected light of the sensing unit 6 to the demultiplexer 5. The first input port of the circulator 4 is connected to the output port of the wavelength division multiplexer 3. The first output port of the circulator 4 is connected to the sensing unit. The hollow eccentric optical fiber 11 in 6, the second output port of the circulator 4 is connected to the input port of the wavelength division multiplexer 5; the wavelength division multiplexer 5 separates the light emitted by the first light source 1 and the second light source 2 Next, the first port of the wavelength division multiplexer 5 outputs the light of the corresponding wavelength of the first light source 1 and is connected with the first photodetector 7, and the second output port of the wavelength division multiplexer 5 outputs the second light source. 2 corresponds to the wavelength of light and is connected with the second photodetector 8; the first photodetector 7 and the second photodetector 8 respectively convert the two optical signals into telecommunications.
在本实施例中,第一光源1为窄带激光器,线宽小于1MHz,工作中心波长λ1在波分复用器3第一输入端口的工作波长范围内,第一光源1的线宽远小于光纤光栅10带宽,光纤光栅10微弱波长漂移都会引起反射功率的变化,保证传感器具有很高的横波探测灵敏度;第二光源2为窄带激光器,线宽小于1GHz,可保证法布里珀罗干涉仪具有较高的对比度,工作中心波长λ2在波分复用器3第二输入端口的工作波长范围内,保证传感器具有很高的纵波探测灵敏度。In this embodiment, the first light source 1 is a narrowband laser with a linewidth less than 1 MHz. The working center wavelength λ1 is within the working wavelength range of the first input port of the wavelength division multiplexer 3. The linewidth of the first light source 1 is much smaller than that of the optical fiber. The bandwidth of the grating 10 and the weak wavelength drift of the fiber grating 10 will cause changes in the reflected power, ensuring that the sensor has high shear wave detection sensitivity; the second light source 2 is a narrow-band laser with a line width of less than 1GHz, which ensures that the Fabry-Perot interferometer has The high contrast ratio and the working center wavelength λ2 are within the working wavelength range of the second input port of the wavelength division multiplexer 3, ensuring that the sensor has high longitudinal wave detection sensitivity.
在本实施例中,第一光源1的中心波长和长周期光栅9的透射中心波长基本一致,隔绝纵波信号对横波探测的干扰.In this embodiment, the center wavelength of the first light source 1 is basically the same as the transmission center wavelength of the long period grating 9, thereby isolating the interference of longitudinal wave signals on transverse wave detection.
在本实施例中,环形器4第一输出端口与传感单元空心偏心光纤11连接时采用对芯连接,减小连接插损。In this embodiment, when the first output port of the circulator 4 is connected to the hollow eccentric optical fiber 11 of the sensing unit, a core-to-core connection is used to reduce the connection insertion loss.
在本实施例中,没有信号作用在传感器上时,光纤光栅10对第一光源1发出的光反射率为40~60%,初始工作波长位于光纤光栅10反射谱斜边中间位置,保证传感器横波探测时既有较大的灵敏度,又有较大的动态探测范围。In this embodiment, when no signal acts on the sensor, the reflectivity of the light emitted by the fiber grating 10 to the first light source 1 is 40 to 60%. The initial operating wavelength is located in the middle of the hypotenuse of the reflection spectrum of the fiber grating 10 to ensure that the transverse wave of the sensor is It has both greater sensitivity and greater dynamic detection range during detection.
在本实施例中,光纤光栅10采用相移光纤光栅,相移光纤光栅的反射谱斜边更陡峭,横波探测时灵敏度更高,可达300~500mV/g。In this embodiment, the fiber grating 10 uses a phase-shifted fiber grating. The hypotenuse of the reflection spectrum of the phase-shifted fiber grating is steeper, and the sensitivity during shear wave detection is higher, which can reach 300 to 500 mV/g.
在本实施例中,长周期光栅9刻写在靠近传感薄膜一端,传感器探测横波信号时,长周期光栅9所受应变可以忽略不计,可保证长周期光栅9的中心投射波长始终与第一光源1中心波长基本一致,达到完全隔绝纵波信号对横波探测的干扰。In this embodiment, the long period grating 9 is written close to one end of the sensing film. When the sensor detects the transverse wave signal, the strain on the long period grating 9 is negligible, which ensures that the center projection wavelength of the long period grating 9 is always consistent with the first light source. 1. The central wavelengths are basically the same, completely isolating the interference of longitudinal wave signals on transverse wave detection.
在本实施例中,波分复用器3和解波分复用器5均为双通道粗波分复用器,价格便宜,各通道间相互串扰小、插损小、性能稳定。In this embodiment, both the wavelength division multiplexer 3 and the demultiplexer 5 are dual-channel coarse wavelength division multiplexers, which are cheap, have small crosstalk between channels, small insertion loss, and stable performance.
本发明提供的一种同时探测横波和纵波的光纤声波传感器的信号流程如图6所示,第一光源1和第二光源2均为窄带激光器,发出的激光对应的中心波长分为λ1和λ2,第一光源1和第二光源2发出的激光通过波分复用器3耦合至同于光纤中,然后通过环形器4传输至传感单元6。传感单元6中空心偏心光纤11为悬臂梁,空心玻璃毛细管12为质量块,两者共同组成悬臂梁结构,用于横波探测;传感单元6中空心偏心光纤11的端面与传感薄膜13组成法布里珀罗干涉仪,用于纵波探测。横纵波信号同时作用在传感单元上时,悬臂梁结构只对横波信号敏感,悬臂梁与横波信号发生同步振动,从而使得光纤光栅10受到相应的频率的应变调制,进而使得光纤光栅10的反射谱发生周期性漂移;法布里珀罗干涉仪只对纵波信号敏感,传感薄膜能够感应纵波信号,使得法布里珀罗干涉仪的腔长受到周期性调制,调制频率与纵波信号一致。第一光源1发射的光部分被光纤光栅10反射,其余的光被长周期光纤9耦合到包层中损耗掉了,因此横波信号主要调制的是第一光源1发出的光;第二光源2发射的光不在光纤光栅10反射带宽内和长周期光栅9透射带宽内,可以全部传输至法布里珀罗干涉仪,因此纵波信号主要调制的第二光源2发出的光。被信号调制后的反射光λ1和λ2,通过环形器4传输至解波分复用器5,解波分复用器5将波长分为λ1和λ2的光分离开来,分别传输至第一光电探测器7和第二光电探测器8,第一光电探测器7和第二光电探测器8最终把光信号转换为电信号,第一光电探测器7输出的横波信号,第二光电探测器8输出的是纵波信号。The signal flow of an optical fiber acoustic wave sensor that simultaneously detects transverse waves and longitudinal waves provided by the present invention is shown in Figure 6. Both the first light source 1 and the second light source 2 are narrow-band lasers, and the corresponding center wavelengths of the emitted laser are divided into λ1 and λ2. , the laser light emitted by the first light source 1 and the second light source 2 is coupled into the same optical fiber through the wavelength division multiplexer 3, and then transmitted to the sensing unit 6 through the circulator 4. The hollow eccentric optical fiber 11 in the sensing unit 6 is a cantilever beam, and the hollow glass capillary tube 12 is a mass block. The two together form a cantilever beam structure for shear wave detection; the end face of the hollow eccentric optical fiber 11 in the sensing unit 6 is in contact with the sensing film 13 A Fabry-Perot interferometer is used for longitudinal wave detection. When transverse and longitudinal wave signals act on the sensing unit at the same time, the cantilever beam structure is only sensitive to the transverse wave signal, and the cantilever beam and the transverse wave signal vibrate synchronously, so that the fiber grating 10 is strain modulated at the corresponding frequency, thereby causing the reflection of the fiber grating 10 The spectrum undergoes periodic drift; the Fabry-Perot interferometer is only sensitive to longitudinal wave signals, and the sensing film can sense longitudinal wave signals, causing the cavity length of the Fabry-Perot interferometer to be periodically modulated, and the modulation frequency is consistent with the longitudinal wave signal. Part of the light emitted by the first light source 1 is reflected by the fiber grating 10, and the remaining light is coupled into the cladding by the long-period optical fiber 9 and lost. Therefore, the shear wave signal mainly modulates the light emitted by the first light source 1; the second light source 2 The emitted light is not within the reflection bandwidth of the fiber grating 10 and the transmission bandwidth of the long period grating 9, and can be completely transmitted to the Fabry-Perot interferometer. Therefore, the longitudinal wave signal mainly modulates the light emitted by the second light source 2. The reflected lights λ1 and λ2 modulated by the signal are transmitted to the wavelength division multiplexer 5 through the circulator 4. The wavelength division multiplexer 5 separates the light into wavelengths λ1 and λ2 and transmits them to the first light source respectively. The photodetector 7 and the second photodetector 8, the first photodetector 7 and the second photodetector 8 finally convert the optical signal into an electrical signal, the transverse wave signal output by the first photodetector 7, the second photodetector 8 outputs a longitudinal wave signal.
综合来看,本发明提供了一种同时探测横波和纵波的光纤声波传感器,具有以下有益效果:Taken together, the present invention provides an optical fiber acoustic wave sensor that simultaneously detects transverse waves and longitudinal waves, which has the following beneficial effects:
(1)本发明通过传感单元可同时感应横波和纵波信号,通过空心偏心光纤与空心玻璃毛细管构成的悬臂梁结构将横波信号转为光纤光栅的应变变化,通过空心偏心光纤端面与传感薄膜构成的法布里珀罗腔感应纵波信号;(1) The present invention can simultaneously sense transverse and longitudinal wave signals through the sensing unit, and convert the transverse wave signal into the strain change of the fiber grating through the cantilever beam structure composed of a hollow eccentric optical fiber and a hollow glass capillary tube. Through the end face of the hollow eccentric optical fiber and the sensing film, The constituted Fabry-Perot cavity induces longitudinal wave signals;
(2)本发明的传感单元具有很高的横波探测灵敏度,采用空心偏心光纤作为悬臂梁,光纤的横截面积大大减小,同时纤芯靠近光纤外面,更容易感知因横波信号造成的悬臂梁根部应变变化;(2) The sensing unit of the present invention has high shear wave detection sensitivity. It uses a hollow eccentric optical fiber as a cantilever beam. The cross-sectional area of the optical fiber is greatly reduced. At the same time, the core is close to the outside of the optical fiber, making it easier to detect the cantilever caused by the shear wave signal. Strain changes at the beam root;
(3)本发明的传感单元具有很高的纵波探测灵敏度,采用的传感薄膜的材料不受限制,可通过减小传感薄膜厚度的方式,显著提高传感器的纵波探测灵敏度;(3) The sensing unit of the present invention has high longitudinal wave detection sensitivity, and the material of the sensing film used is not limited. The longitudinal wave detection sensitivity of the sensor can be significantly improved by reducing the thickness of the sensing film;
(4)本发明的传感单元不包含任何电器件,外部横、纵波调制的是光信号,抗电磁干扰能力强,可用于遥感和易燃易爆等应用环境。(4) The sensing unit of the present invention does not contain any electrical components. The external transverse and longitudinal waves modulate optical signals. It has strong anti-electromagnetic interference ability and can be used in remote sensing and flammable and explosive application environments.
(5)本发明的传感器通过波分复用器和解波分复用器以及光纤光栅和长周期光纤的选波特性,可实现横波和纵波信号同时功率解调,相互之间串扰几乎为0,解调精度高,信噪比高于50dB。(5) The sensor of the present invention can realize simultaneous power demodulation of transverse and longitudinal wave signals through the wavelength division multiplexer and demultiplexer as well as the wave selection characteristics of fiber grating and long-period optical fiber, and the crosstalk between each other is almost zero. , high demodulation accuracy and signal-to-noise ratio higher than 50dB.
以上所述实施例仅为本发明较佳的具体实施方式,本发明的保护范围不限于此,任何熟悉本领域的技术人员在本发明披露的技术范围内,可显而易见地得到的技术方案的简单变化或等效替换,均属于本发明的保护范围。The above-described embodiments are only preferred specific implementations of the present invention, and the protection scope of the present invention is not limited thereto. Any person familiar with the art can obviously obtain simple technical solutions within the technical scope disclosed in the present invention. Changes or equivalent substitutions all fall within the protection scope of the present invention.
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202310308467.1A CN117288314A (en) | 2023-03-28 | 2023-03-28 | Optical fiber acoustic wave sensor for simultaneously detecting transverse wave and longitudinal wave |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202310308467.1A CN117288314A (en) | 2023-03-28 | 2023-03-28 | Optical fiber acoustic wave sensor for simultaneously detecting transverse wave and longitudinal wave |
Publications (1)
Publication Number | Publication Date |
---|---|
CN117288314A true CN117288314A (en) | 2023-12-26 |
Family
ID=89250605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202310308467.1A Pending CN117288314A (en) | 2023-03-28 | 2023-03-28 | Optical fiber acoustic wave sensor for simultaneously detecting transverse wave and longitudinal wave |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN117288314A (en) |
-
2023
- 2023-03-28 CN CN202310308467.1A patent/CN117288314A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN108036852B (en) | A kind of fibre-optical acoustic sensor and multiple spot acoustic detector | |
CN113252572B (en) | Optical fiber tip type photoacoustic gas sensing system and method | |
CN102374895B (en) | A large dynamic fiber optic vibration sensor | |
CN111103051B (en) | Fiber optic interferometric hydrophone detection system and method | |
US11629979B2 (en) | Diaphragm-based fiber acoustic sensor | |
CN104703105B (en) | Double FP chambers optical fiber sound sensing probes and its sensor-based system | |
CN105242067B (en) | A kind of diaphragm type high-fineness Fabry Perot optical fiber acceleration transducer based on Fiber Bragg Grating FBG | |
CN104390694B (en) | Cladded-fiber grating vibration senses instrument | |
CN105241541B (en) | A kind of diaphragm type high-fineness Fabry Perot optical fibre sound pressure sensor based on Fiber Bragg Grating FBG | |
CN104792402B (en) | A kind of sound wave sense measuring device based on optical fiber sagnac interferometer | |
CN111854923B (en) | Acoustic wave measurement system, cantilever beam type optical fiber acoustic wave sensor demodulation system and method | |
CN108445362A (en) | Shelf depreciation ultrasonic signal detecting system based on optical fiber sensing technology and method | |
ITMI20130138A1 (en) | OPTICAL SENSOR FOR PRESSURE MEASURES WITHOUT CONTACT. | |
CN112033908A (en) | A single light source optical fiber photoacoustic gas sensing system and method | |
CN101545851A (en) | Long period fiber grating-based reflection-type optical fiber biochemical sensor and manufacturing method thereof | |
CN111829645B (en) | Acoustic/vibration monitoring system based on optical fiber sensor | |
CN109186743B (en) | A Phase-Sensitive Optical Time Domain Reflectometer Distributed Optical Fiber Three-Component Acoustic Sensing System | |
CN111928937B (en) | Optical fiber vibration sensing probe and optical fiber microseismic monitoring system | |
CN107860326B (en) | Single-fiber multi-parameter integrated sensing system for deep deformation monitoring of slope | |
CN105783996A (en) | Optical fiber sensor capable of measuring acoustic wave and pressure simultaneously | |
CN117288314A (en) | Optical fiber acoustic wave sensor for simultaneously detecting transverse wave and longitudinal wave | |
CN110793617B (en) | A remote external modulation optical fiber interference vibration measurement device and method | |
Li et al. | Recent Progress in Fiber Optic Acoustic Sensor and Its Applications: A Review | |
CN113686367B (en) | Sensing structure based on optical fiber coupling induction transparency, manufacturing process and sensing device | |
CN114061732A (en) | One-dimensional optical fiber vector hydrophone structure |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination |