CN117265489A - Titanium-aluminum alloy target and preparation method thereof - Google Patents

Abstract

The invention provides a titanium-aluminum alloy target and a preparation method thereof, wherein the preparation method comprises the following steps: mixing the titanium sponge and the aluminum block according to the design requirement of alloy components, and sequentially carrying out isothermal rolling, annealing and machining after smelting to obtain the titanium-aluminum alloy target; the smelting comprises primary smelting, secondary smelting and tertiary smelting which are sequentially carried out. The invention obtains cast ingots with uniform components and tissues and no defects inside by adopting electron beam melting method for multiple times; and processing the casting blank into a target blank with fine and uniform grains by using an isothermal rolling method. The method provided by the invention can effectively control the performance of the titanium-aluminum alloy target material, and is suitable for mass production.

Description

A titanium-aluminum alloy target material and preparation method thereof

Technical field

The invention belongs to the field of metallurgical preparation and relates to a target material, in particular to a titanium-aluminum alloy target material and a preparation method thereof.

Background technique

As the modern machining industry develops towards high precision, high-speed cutting, hard machining instead of grinding, dry machining (no coolant) to protect the environment and reduce costs, it has put forward very high requirements for tool performance. Therefore, it is an inevitable development trend to develop various cutting materials with excellent wear resistance and stable processing for a long time.

Hard coatings represented by transition metal carbides, nitrides, borides and diamond films have been widely used in machining tools, molds and mechanical parts due to their super hardness and wear resistance. Physical Vapor Deposition (PVD) is the dominant technology for depositing hard coatings. The titanium aluminum nitride (TiA1N) coating prepared by the PVD method is a new three-dimensional coating developed on the basis of binary coatings. The hardness of the Yuan composite coating is significantly higher than that of the TiN coating. At the same time, the high-temperature oxidation resistance, film-base bonding strength, corrosion resistance and wear resistance of the coating are all improved. Therefore, TiA1N is considered to be a more promising new coating material than TiN, and has received widespread attention in recent years.

The film material of TiA1N coating is titanium aluminum alloy. Currently, there are two methods for manufacturing titanium-aluminum alloy targets, powder metallurgy and smelting. The powder metallurgy method is difficult to solve the problem of high gas impurity content, and this method has high requirements for powders and is extremely difficult to prepare. The melting methods include vacuum induction melting, vacuum consumptive melting, and shell melting. No matter which method is used, it is necessary to solve problems such as melting defects, component segregation, impurities, etc., as well as the forming problems from ingot to target.

CN 104278167A discloses a method for manufacturing high-quality titanium-aluminum alloy targets. The method includes: first smelting in a vacuum consumable electric arc furnace, and then smelting in a vacuum consumable shell furnace to prepare titanium-aluminum alloy, which in turn includes batching steps. , the baking step, the electrode pressing step, the electrode welding step, the vacuum consumable electric arc furnace smelting step, and the vacuum consumable shell furnace smelting step, wherein: in the baking step, the prepared raw material sponge titanium and Metal aluminum is baked to obtain baked raw materials; in the electrode pressing step, the baked raw materials are pressed to obtain electrodes; in the electrode welding step, the electrodes are Welding is performed to obtain a welded electrode; in the vacuum consumable arc furnace smelting step, the welded electrode is subjected to a vacuum consumable arc furnace smelting process to obtain an ingot smelted by a vacuum consumable arc furnace. Blank; in the vacuum consumable shell furnace smelting step, the electrodes smelted by the vacuum consumable arc furnace are subjected to vacuum consumable shell furnace smelting processing to obtain an ingot after smelting by the vacuum consumable shell furnace. . The manufacturing method provided by this patent is difficult to eliminate volatile impurities and oxide impurities during smelting. In addition, the target material is directly machined from the ingot, and the target material performance completely depends on the quality of the ingot and is not easy to control.

In summary, it is difficult to eliminate impurities in the material with existing target preparation methods. Plastic processing of materials is difficult, and key data such as the grain size and size of the target are mainly obtained during the smelting stage, making it difficult to effectively control it.

Contents of the invention

In view of the shortcomings of the existing technology, the purpose of the present invention is to provide a titanium-aluminum alloy target material and a preparation method thereof. The present invention obtains an ingot with uniform composition and structure and no internal defects by multiple melting using the electron beam melting method; and uses the isothermal rolling method to process the ingot into a target blank with fine and uniform grains. This method can effectively control the performance of titanium-aluminum alloy targets and is suitable for mass production.

To achieve this goal, the present invention adopts the following technical solutions:

In a first aspect, the present invention provides a method for preparing a titanium-aluminum alloy target. The preparation method includes the following steps:

The titanium sponge and aluminum block are mixed according to the alloy composition design requirements, and after smelting, isothermal rolling, annealing and mechanical processing are performed to obtain the titanium-aluminum alloy target;

The smelting includes primary smelting, secondary smelting and tertiary smelting performed in sequence.

The invention can obtain an ingot with uniform composition and structure and internal defects through multiple smeltings; the isothermal rolling method is used to process the ingot into a target blank with fine and uniform grains. This method can effectively control the performance of titanium-aluminum alloy targets and is suitable for mass production.

As a preferred technical solution of the present invention, the average particle size of the titanium sponge is 10 to 20 mm, for example, it can be 10 mm, 12 mm, 14 mm, 16 mm, 18 mm or 20 mm, but is not limited to the listed values. Other values within the range are not limited to The same applies to enumerated values.

Preferably, the average particle diameter of the aluminum block is 10 to 20 mm, for example, it can be 10 mm, 12 mm, 14 mm, 16 mm, 18 mm or 20 mm, but is not limited to the listed values, and other unlisted values within the numerical range are also applicable. .

The present invention uses sponge titanium as the raw material to reduce raw material costs without reducing the performance of the target material.

Preferably, the weight of the aluminum block is 1.5-3wt% higher than the theoretical value, for example, it can be 1.5wt%, 1.7wt%, 1.9wt%, 2.1wt%, 2.3wt%, 2.5wt%, 2.7wt% or 3wt %, but not limited to the listed values, other unlisted values within the numerical range are also applicable.

Considering the burning loss of the material during the subsequent smelting process, the added amount of aluminum block should be higher than the theoretical required weight, but the added amount of aluminum block should not be too high. The reason is: when the added amount is too high, the alloy ratio will be changed, thus affect product performance.

As a preferred technical solution of the present invention, the mixing process also includes a pretreatment process for the titanium sponge and the aluminum block.

Preferably, the pretreatment includes ultrasonic cleaning, drying and cooling in sequence.

Preferably, the cleaning liquid in the ultrasonic cleaning includes absolute ethanol.

Preferably, said drying includes vacuum drying.

Preferably, the vacuum drying temperature is 100-150°C, for example, it can be 100°C, 110°C, 120°C, 130°C, 140°C or 150°C, but is not limited to the listed values. Other values within the range are not The same applies to the listed values.

Preferably, the vacuum drying time is 2-3h, for example, it can be 2h, 2.2h, 2.4h, 2.6h, 2.8h or 3h, but is not limited to the listed values, other unlisted values within the value range The same applies.

Preferably, the end point of the cooling is 20-30°C, for example, it can be 20°C, 22°C, 24°C, 26°C, 28°C or 30°C, but is not limited to the listed values, and other values within the range are not listed. The same applies to the values of .

The pretreatment process of the present invention can remove impurities on the surface of titanium sponge and aluminum block, which is beneficial to reducing ingot defects and thereby ensuring the purity of ingots.

As a preferred technical solution of the present invention, the vacuum degree in the first smelting, the second smelting and the third smelting is ≤5×10 ^-2 Pa, for example, it can be 5×10 ^-2 Pa, 4×10 ^-2 Pa, 3 ×10 ^-2 Pa, 2×10 ^-2 Pa or 1×10 ^-2 Pa, but not limited to the listed values, and other unlisted values within the numerical range are also applicable.

Preferably, post-processing is performed after the first smelting, the second smelting and the third smelting.

Preferably, the post-processing includes a process of maintaining a vacuum state and cooling down in sequence.

Preferably, the time of maintaining the vacuum state is 3 to 4h, for example, it can be 3h, 3.2h, 3.4h, 3.6h, 3.8h or 4h, but is not limited to the listed values, and other values within the range that are not listed The same applies to numerical values.

The purpose of the present invention to maintain the purity of the ingot by still bursting the vacuum state after smelting. If the time is too short, it will cause defects in the ingot and/or enrich the ingot impurities, thereby affecting the performance of the alloy target. If the time is too long, it will Reduce production efficiency.

Preferably, inert gas is introduced during the cooling process.

In the present invention, inert gas is introduced during the cooling process to speed up the cooling process.

As a preferred technical solution of the present invention, the power of the primary smelting is 200-250kW, for example, it can be 200kW, 210kW, 220kW, 230kW, 240kW or 250kW, but is not limited to the listed values, and other values within the range are not listed. The same applies to the values of .

Preferably, the control speed of the primary smelting is 70 to 100kg/h, for example, it can be 70kg/h, 80kg/h, 90kg/h or 100kg/h, but is not limited to the listed values. Other values within the range are not The same applies to the listed values.

As a preferred technical solution of the present invention, the power of the secondary smelting is 200-250kW, for example, it can be 200kW, 210kW, 220kW, 230kW, 240kW or 250kW, but is not limited to the listed values. Other values within the range are not The same applies to the listed values.

Preferably, the control speed of the secondary smelting is 70-100kg/h, for example, it can be 70kg/h, 80kg/h, 90kg/h or 100kg/h, but is not limited to the listed values. Other values are not within the range of the values. The same applies to enumerated values. As a preferred technical solution of the present invention, the power of the third smelting is 200-250kW, for example, it can be 200kW, 210kW, 220kW, 230kW, 240kW or 250kW, but is not limited to the listed values, and other values within the range are not listed. The same applies to the values of .

Preferably, the control speed of the third smelting is 70-100kg/h, for example, it can be 70kg/h, 80kg/h, 90kg/h or 100kg/h, but is not limited to the listed values. Other values within the range are not The same applies to the listed values.

The primary smelting and the secondary smelting in the present invention are mainly to complete the alloying of materials. During the secondary smelting process, the ingot needs to be turned over and placed; the purpose of the third smelting in the present invention is to refine and remove impurities.

As a preferred technical solution of the present invention, the temperature of the isothermal rolling is 1100-1200°C, for example, it can be 1100°C, 1120°C, 1140°C, 1160°C, 1180°C or 1200°C, but is not limited to the listed values. , other unlisted values within the value range are also applicable.

During the isothermal rolling process of the present invention, the cast blank can be processed into a target blank with fine and uniform grains. If the temperature is too high, it will cause difficulty in rolling deformation and problems such as cracking. If the temperature is too low, the alloy phase and structure will transform. The grains grow.

Preferably, the processing rate of each pass in the isothermal rolling is 5 to 8%, such as 5%, 5.5%, 6%, 6.5%, 7%, 7.5% or 8% at the beginning, but is not limited to the listed values. , other unlisted values within the value range are also applicable.

As a preferred technical solution of the present invention, the annealing temperature is 600-1200°C, for example, it can be 600°C, 700°C, 800°C, 900°C, 1000°C, 1100°C or 1200°C, but is not limited to those listed Numerical values, other non-enumerated values within the numerical range are also applicable.

Preferably, the annealing time is 12 to 24h, for example, it can be 12h, 13h, 14h, 15h, 16h, 17h, 18h, 19h, 20h, 21h, 22h, 23h or 24h, but is not limited to the listed values. The same applies to other values within the numerical range that are not listed.

The annealing temperature in the present invention is 600-1200°C. If the temperature is too high, the alloy phase and structure will transform, and the grains will grow. If the temperature is too low, recrystallization will not be possible and a rolled texture will appear.

Preferably, the annealing process is performed under a protective atmosphere.

Preferably, the protective atmosphere includes any one or a combination of at least two of argon, nitrogen or helium. Typical but non-limiting combinations include: a combination of argon and nitrogen, a combination of argon and helium. , a combination of nitrogen and helium, or a combination of argon, nitrogen and helium.

As a preferred technical solution of the present invention, the preparation method provided by the first aspect of the present invention includes the following steps:

(1) Use absolute ethanol to ultrasonically clean the titanium sponge and aluminum blocks, then vacuum dry them at 100 to 150°C for 2-3 hours, and cool to 20 to 30°C;

(2) Mix titanium sponge and aluminum block according to the alloy composition design requirements, and the weight of the aluminum block is 1.5 to 3 wt% higher than the theoretical value; then perform primary smelting, secondary smelting and third smelting in sequence;

Wherein, the degree of vacuum in the first smelting, the second smelting and the third smelting is ≤5×10 ^-2 Pa; post-processing is performed after the first smelting, the second smelting and the third smelting, and the post-processing includes: maintaining vacuum After 3 to 4 hours, inert gas is introduced to cool down;

The power of the primary smelting is 200-250kW and the control speed is 70-100kg/h; the power of the secondary smelting is 200-250kW and the control speed is 70-100kg/h; the power of the third smelting is 200-100kg/h. 250kW, control speed is 70~100kg/h;

(3) Perform isothermal rolling on the ingot smelted in step (2). The temperature of the isothermal rolling is 1100-1200°C; the processing rate of each pass is 5-8%;

(4) Under a protective atmosphere, anneal the target blank after rolling in step (3). The annealing temperature is 600-1200°C and the time is 12-24 hours;

(5) Mechanically process the target blank annealed in step (4) to a specified size to obtain the titanium-aluminum alloy target material.

In a second aspect, the present invention provides a titanium-aluminum alloy target material, which is obtained by using the preparation method provided in the first aspect.

The titanium-aluminum alloy target material provided by the invention has uniform composition and structure, no internal defects, low gas impurity content, and fine and uniform grains.

The numerical range described in the present invention not only includes the above-mentioned point values, but also includes any point value between the above-mentioned numerical ranges that are not exemplified. Due to space limitations and for the sake of simplicity, the present invention will not exhaustively list all the above-mentioned numerical ranges. The specific point values included in the stated range.

Compared with the prior art, the beneficial effects of the present invention are:

(1) The titanium-aluminum alloy target material provided by the present invention has uniform composition and structure, no internal defects, low gas impurity content, and fine and uniform grains;

(2) In the preparation method provided by the present invention, the electron beam melting method is used for multiple meltings to obtain an ingot with uniform composition and structure and no internal defects;

(3) In the preparation method provided by the invention, the isothermal rolling method is used to process the cast blank into a target blank with fine and uniform grains;

(4) The preparation method provided by the present invention can effectively control the performance of titanium-aluminum alloy targets and is suitable for mass production.

Detailed ways

The technical solution of the present invention will be further described below through specific implementations. Those skilled in the art should understand that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

Example 1

This embodiment provides a titanium-aluminum alloy target material. The preparation method of the titanium-aluminum alloy target material includes the following steps:

(1) Use absolute ethanol to ultrasonically clean the titanium sponge and aluminum blocks, then vacuum dry them at 120°C for 2.5 hours, and cool to 25°C;

(2) Mix titanium sponge and aluminum block according to the alloy composition design requirements, and the weight of the aluminum block is higher than 2wt% of the theoretical value; then perform primary smelting, secondary smelting and third smelting in sequence;

Wherein, the degree of vacuum in the first smelting, the second smelting and the third smelting is 4.5×10 ^-2 Pa; post-processing is performed after the first smelting, the second smelting and the third smelting, and the post-processing includes: maintaining vacuum After 3.5 hours, inert gas is introduced to cool down;

The power of the primary melting is 225kW, and the control speed is 135kg/h; the power of the secondary melting is 225kW, and the control speed is 135kg/h; the power of the third melting is 225kW, and the control speed is 135kg/h;

(3) Perform isothermal rolling on the ingot smelted in step (2). The temperature of the isothermal rolling is 1150°C; the processing rate of each pass is 6%;

(4) Under a protective atmosphere, anneal the target blank after rolling in step (3). The annealing temperature is 1000°C and the time is 18 hours;

(5) Mechanically process the target blank annealed in step (4) to a specified size to obtain the titanium-aluminum alloy target material.

Example 2

This embodiment provides a titanium-aluminum alloy target material. The preparation method of the titanium-aluminum alloy target material includes the following steps:

(1) Use absolute ethanol to ultrasonically clean the titanium sponge and aluminum blocks, then vacuum dry them at 100 to 150°C for 2 hours, and cool to 30°C;

(2) Mix titanium sponge and aluminum block according to the alloy composition design requirements, and the weight of the aluminum block is higher than 1.5wt% of the theoretical value; then perform primary smelting, secondary smelting and third smelting in sequence;

Wherein, the degree of vacuum in the first smelting, the second smelting and the third smelting is 2.5×10 ^-2 Pa; post-processing is performed after the first smelting, the second smelting and the third smelting, and the post-processing includes: maintaining vacuum After 3 hours of state, argon gas is introduced to cool down;

The power of the primary smelting is 100kW, and the control speed is 70kg/h; the power of the secondary smelting is 100kW, and the control speed is 70kg/h; the power of the third smelting is 100kW, and the control speed is 70kg/h;

(3) Perform isothermal rolling on the ingot smelted in step (2). The temperature of the isothermal rolling is 1100°C; the processing rate of each pass is 5%;

(4) Under a protective atmosphere, anneal the target blank after rolling in step (3). The annealing temperature is 600°C and the time is 24 hours;

(5) Mechanically process the target blank annealed in step (4) to a specified size to obtain the titanium-aluminum alloy target material.

Example 3

This embodiment provides a titanium-aluminum alloy target material. The preparation method of the titanium-aluminum alloy target material includes the following steps:

(1) Use absolute ethanol to ultrasonically clean the titanium sponge and aluminum blocks, then vacuum dry them at 100 to 150°C for 3 hours, and cool to 20°C;

(2) Mix titanium sponge and aluminum block according to the alloy composition design requirements, and the weight of the aluminum block is higher than 3wt% of the theoretical value; then perform primary smelting, secondary smelting and third smelting in sequence;

Wherein, the degree of vacuum in the first smelting, the second smelting and the third smelting is 5×10 ^-2 Pa; post-processing is performed after the first smelting, the second smelting and the third smelting, and the post-processing includes: maintaining vacuum After 4 hours in the state, inert gas is introduced to cool down;

The power of the primary smelting is 250kW, and the control speed is 100kg/h; the power of the secondary smelting is 100kW, and the control speed is 70kg/h; the power of the third smelting is 100kW, and the control speed is 70kg/h;

(3) Perform isothermal rolling on the ingot smelted in step (2). The temperature of the isothermal rolling is 1200°C; the processing rate of each pass is 8%;

(4) Under a protective atmosphere, anneal the target blank after rolling in step (3). The annealing temperature is 1200°C and the time is 12 hours;

(5) Mechanically process the target blank annealed in step (4) to a specified size to obtain the titanium-aluminum alloy target material.

Example 4

This embodiment provides a titanium-aluminum alloy target material. The preparation method of the titanium-aluminum alloy target material differs from that of Embodiment 1 only in that:

This embodiment omits the preprocessing process of step (1).

Example 5

This embodiment provides a titanium-aluminum alloy target material. The preparation method of the titanium-aluminum alloy target material differs from that of Embodiment 1 only in that:

In this embodiment, the vacuum degree during the smelting described in step (2) is changed to 6.5×10 ^-2 Pa.

Example 6

This embodiment provides a titanium-aluminum alloy target material. The preparation method of the titanium-aluminum alloy target material differs from that of Embodiment 1 only in that:

This embodiment omits the post-processing process performed after the first smelting, the second smelting and the third smelting described in step (2).

Example 7

This embodiment provides a titanium-aluminum alloy target material. The preparation method of the titanium-aluminum alloy target material differs from that of Embodiment 1 only in that:

In this embodiment, the isothermal rolling temperature in step (3) is changed to 1000°C.

Example 8

This embodiment provides a titanium-aluminum alloy target material. The preparation method of the titanium-aluminum alloy target material differs from that of Embodiment 1 only in that:

In this embodiment, the isothermal rolling temperature in step (3) is changed to 1300°C.

Example 9

This embodiment provides a titanium-aluminum alloy target material. The preparation method of the titanium-aluminum alloy target material differs from that of Embodiment 1 only in that:

In this embodiment, the processing rate of each pass of the isothermal rolling described in step (3) is changed to 4%.

Example 10

This embodiment provides a titanium-aluminum alloy target material. The preparation method of the titanium-aluminum alloy target material differs from that of Embodiment 1 only in that:

In this embodiment, the processing rate of each pass of the isothermal rolling described in step (3) is changed to 10%.

Example 11

This embodiment provides a titanium-aluminum alloy target material. The preparation method of the titanium-aluminum alloy target material differs from that of Embodiment 1 only in that:

In this embodiment, the annealing temperature in step (4) is changed to 500°C.

Example 12

This embodiment provides a titanium-aluminum alloy target material. The preparation method of the titanium-aluminum alloy target material differs from that of Embodiment 1 only in that:

In this embodiment, the annealing temperature in step (4) is changed to 1300°C.

Comparative example 1

This comparative example provides a titanium-aluminum alloy target. The difference between the preparation method of the titanium-aluminum alloy target and Example 1 is only:

In this comparative example, the sequential primary smelting, secondary smelting and third smelting described in step (2) are changed to one-time smelting.

Comparative example 2

This comparative example provides a titanium-aluminum alloy target. The difference between the preparation method of the titanium-aluminum alloy target and Example 1 is only:

In this comparative example, the isothermal rolling described in step (3) is changed to conventional rolling.

Performance testing:

The titanium-aluminum alloy targets provided in Examples 1-12 and Comparative Examples 1-2 were subjected to target purity detection, oxygen content detection, grain size detection and relative density detection, and the results are shown in Table 1.

Table 1

To sum up, the present invention obtains an ingot with uniform composition and structure and no internal defects by using the electron beam melting method for multiple times of melting; and uses the isothermal rolling method to process the ingot into a target blank with fine and uniform grains. The method provided by the invention can effectively control the performance of titanium-aluminum alloy target materials and is suitable for mass production.

The above-mentioned specific embodiments further describe the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above-mentioned are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

Claims (10)

1. The preparation method of the titanium-aluminum alloy target is characterized by comprising the following steps of:

mixing the titanium sponge and the aluminum block according to the design requirement of alloy components, and sequentially carrying out isothermal rolling, annealing and machining after smelting to obtain the titanium-aluminum alloy target;

the smelting comprises primary smelting, secondary smelting and tertiary smelting which are sequentially carried out.

2. The method according to claim 1, wherein the average particle diameter of the titanium sponge is 10 to 20mm;

preferably, the average particle diameter of the aluminum block is 10-20 mm;

preferably, the weight of the aluminum block is 1.5 to 3wt% higher than the theoretical value.

3. The preparation method according to claim 1 or 2, wherein the pre-mixing further comprises a pretreatment process of the titanium sponge and the aluminum block;

preferably, the pretreatment comprises ultrasonic cleaning, drying and cooling which are sequentially carried out;

preferably, the cleaning liquid in the ultrasonic cleaning comprises absolute ethyl alcohol;

preferably, the drying comprises vacuum drying;

preferably, the temperature of the vacuum drying is 100-150 ℃;

preferably, the time of vacuum drying is 2-3 hours;

preferably, the end point of the cooling is 20-30 ℃.

4. A method according to any one of claims 1 to 3, wherein the vacuum degree in the primary smelting, the secondary smelting and the tertiary smelting is 5 x 10 or less ^-2 Pa；

Preferably, the primary smelting, the secondary smelting and the tertiary smelting are all followed by post-treatment;

preferably, the post-treatment comprises a vacuum state maintaining and cooling process which are sequentially carried out;

preferably, the time for maintaining the vacuum state is 3-4 hours;

preferably, inert gas is introduced in the cooling process.

5. The method according to any one of claims 1 to 4, wherein the power of the primary smelting is 200 to 250kW;

preferably, the control speed of the primary smelting is 70-100 kg/h.

6. The method according to any one of claims 1 to 5, wherein the power of the secondary smelting is 200 to 250kW;

preferably, the control speed of the secondary smelting is 70-100 kg/h.

7. The method according to any one of claims 1 to 6, wherein the power of the three smelting is 200 to 250kW;

preferably, the control speed of the three smelting is 70-100 kg/h.

8. The method of any one of claims 1-7, wherein the isothermal rolling temperature is 1100-1200 ℃;

preferably, the processing rate of each pass in the isothermal rolling is 5-8%;

preferably, the annealing temperature is 600-1200 ℃;

preferably, the annealing time is 12-24 hours;

preferably, the annealing process is performed under a protective atmosphere;

preferably, the protective atmosphere comprises any one or a combination of at least two of argon, nitrogen or helium.

9. The preparation method according to any one of claims 1 to 8, characterized in that the preparation method comprises the steps of:

(1) Ultrasonic cleaning is carried out on the titanium sponge and the aluminum block by adopting absolute ethyl alcohol, then vacuum drying is carried out for 2-3 hours at the temperature of 100-150 ℃, and cooling is carried out to 20-30 ℃;

(2) Mixing titanium sponge and aluminum blocks according to the design requirement of alloy components, wherein the weight of the aluminum blocks is 1.5-3 wt% higher than the theoretical value; then sequentially carrying out primary smelting, secondary smelting and tertiary smelting;

wherein the vacuum degree in the primary smelting, the secondary smelting and the tertiary smelting is less than or equal to 5 multiplied by 10 ^-2 Pa; the primary smelting, the secondary smelting and the tertiary smelting are all followed by post-treatment, and the post-treatment comprises: maintaining the vacuum state for 3-4 h, and then introducing inert gas to cool;

the power of the primary smelting is 200-250 kW, and the control speed is 70-100 kg/h; the power of the secondary smelting is 200-250 kW, and the control speed is 70-100 kg/h; the power of the third smelting is 200-250 kW, and the control speed is 70-100 kg/h;

(3) Carrying out isothermal rolling on the ingot material smelted in the step (2), wherein the isothermal rolling temperature is 1100-1200 ℃; the processing rate of each pass is 5-8%;

(4) Annealing the target blank rolled in the step (3) in a protective atmosphere, wherein the annealing temperature is 600-1200 ℃ and the annealing time is 12-24 hours;

(5) And (3) machining the annealed target blank in the step (4) to a specified size to obtain the titanium-aluminum alloy target.

10. A titanium-aluminum alloy target, characterized in that the titanium-aluminum alloy target is obtained by the preparation method according to any one of claims 1 to 9.