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CN117260400B - A dry grinding method for grinding fused quartz rotating parts using a small-diameter ball-end grinding wheel - Google Patents

A dry grinding method for grinding fused quartz rotating parts using a small-diameter ball-end grinding wheel

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Publication number
CN117260400B
CN117260400B CN202311327633.9A CN202311327633A CN117260400B CN 117260400 B CN117260400 B CN 117260400B CN 202311327633 A CN202311327633 A CN 202311327633A CN 117260400 B CN117260400 B CN 117260400B
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China
Prior art keywords
grinding
grinding wheel
axis
workpiece
spindle
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CN117260400A (en
Inventor
陈明君
秦彪
刘赫男
程健
吴春亚
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Harbin Institute of Technology Shenzhen
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Harbin Institute of Technology Shenzhen
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Priority to CN202311327633.9A priority Critical patent/CN117260400B/en
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/50—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground, e.g. strings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The invention discloses a dry grinding processing method for grinding a fused quartz revolving body part by a small-diameter ball head grinding wheel, relates to the technical field of ultra-precise processing, and aims to solve the problems of surface damage and subsurface damage generated by the existing grinding method and limit the further improvement of the grinding processing precision of the part. The invention adopts a ceramic-based CBN grinding wheel, runs a numerical control machining program, carries out grinding machining along the grinding wheel movement track, does not add any grinding fluid between the grinding wheel and a workpiece in the process, stops the running of a grinding wheel spindle and a workpiece spindle when the total grinding depth of the grinding wheel reaches the preset feeding total amount, and operates a machine tool to enable a ball head grinding wheel to be far away from the workpiece, thereby completing ultra-precise grinding of the workpiece. According to the invention, the high-temperature-resistant ceramic-based CBN grinding wheel is adopted to carry out dry grinding on the fused quartz revolving body part, so that the temperature of the grinding wheel and the surface of a workpiece is increased, the critical grinding depth of brittle-plastic transition of fused quartz materials is increased, and a smooth surface without cracks is obtained.

Description

Dry grinding method for grinding fused quartz revolving body part by small-diameter ball head grinding wheel
Technical Field
The invention relates to the technical field of ultra-precise machining, in particular to a dry grinding method for grinding fused quartz revolving parts by using a small-diameter ball head grinding wheel.
Background
For processing hard and brittle materials such as fused quartz, procedures such as rough grinding, fine grinding, ultra-fine grinding, polishing and the like are generally adopted to obtain higher surface quality and surface shape precision. In the grinding stage, trace removal of surface material is achieved due to the interaction of abrasive particles with the workpiece, but due to the high strength and low fracture toughness of fused silica materials, the surface and subsurface of the materials inevitably generate a large number of structural defects such as pits, scratches, cracks, and the like. Such grinding defects directly affect the subsequent polishing efficiency.
At present, for processing of some small-caliber thin-wall complex components, grinding processing is usually carried out by adopting a small-diameter ball grinding wheel so as to avoid interference in the grinding process. For the grinding process of the small-diameter ball head grinding wheel, due to the limitation of the size, even if the rotating speed of the main shaft of the grinding wheel reaches tens of thousands of revolutions per minute, the relative grinding speed between the grinding wheel and the workpiece is still at a low level. The grinding speed in the grinding process parameters is a key factor influencing the removal mode of hard and brittle materials such as fused quartz, and according to the skin effect of grinding subsurface cracks, the larger the grinding speed is, the smaller the depth of subsurface cracks generated by grinding is, and conversely, the larger the depth of subsurface cracks generated by grinding is. Therefore, how to improve the surface quality of fused quartz materials in the grinding process of the small-diameter grinding wheel and reduce the subsurface damage depth of the fused quartz materials is a key problem in the research of the grinding process of the existing small-diameter ball grinding wheel.
Disclosure of Invention
The invention aims to solve the technical problems that:
the surface damage and subsurface damage generated by the existing grinding method limit the further improvement of the grinding precision of the parts.
The invention adopts the technical scheme for solving the technical problems:
The invention provides a dry grinding method for grinding a fused quartz revolving body part by a small-diameter ball head grinding wheel, which comprises the following steps:
S1, clamping a fused quartz rotary workpiece and a ceramic-based CBN grinding wheel, starting a grinding machine tool, and controlling each motion axis of the machine tool to return to zero;
S2, adjusting the height of the sphere center of the grinding wheel to be consistent with the height of the rotation axis of the workpiece through a CCD camera and an amplifying lens;
s3, measuring outline dimension parameters of the workpiece through a CCD camera and an amplifying lens, drawing a two-dimensional outline model of the workpiece, constructing a grinding wheel motion track according to the two-dimensional outline model, and writing a numerical control machining program according to the grinding wheel motion track;
S4, selecting a point on the ball grinding wheel movement track as a trial cut point for tool setting, and recording the coordinate (x 1,y1) of the point under a workpiece coordinate system O w(xw,yw,zw;
s5, moving the grinding wheel to a position (x 1+δ,y1), wherein delta is a reserved value of a tool setting error;
s6, setting feeding amount, and controlling the grinding wheel to move towards the direction close to the workpiece so as to reduce the gap between the grinding wheel and the surface of the workpiece;
s7, manually rotating the workpiece spindle, and executing S6 again if collision sound is not generated, and directly executing S8 if periodic sound is generated;
S8, recording X, Y coordinate values of the current trial cut point and the coordinate origin of the machine tool, and controlling the grinding wheel to move by delta d distance in the direction away from the workpiece under the current position, wherein the gap between the grinding wheel and the workpiece is a machining reserved distance for compensating tool setting errors;
S9, starting a grinding wheel spindle and a workpiece spindle, and setting grinding parameters;
s10, running a numerical control machining program to enable the grinding wheel to do reciprocating feeding motion along the grinding wheel motion track, wherein no grinding fluid is added between the grinding wheel and the workpiece in the process;
And S11, stopping running of the grinding wheel spindle and the workpiece spindle when the total grinding depth of the grinding wheel reaches the preset feeding total amount, and operating the machine tool to enable the ball head grinding wheel to be far away from the workpiece, so that ultra-precise grinding of the workpiece is completed.
Further, the average grain size of the abrasive grains of the ceramic-based CBN grinding wheel is 1-5 mu m.
Further, S3 includes the following steps:
S31, measuring outline dimension parameters of the workpiece through a CCD camera and an amplifying lens, and drawing a two-dimensional outline model of the workpiece in software;
S32, establishing a grinding wheel coordinate system (XYZO) and a workpiece coordinate system (X wYwZwOw), wherein the directions X, Y and Z of the workpiece coordinate system are consistent with a machine tool coordinate system;
s33, outwards shifting a workpiece contour line in the two-dimensional contour model by Rs+a to form a motion track of the grinding wheel, wherein Rs is the radius of the ball grinding wheel, a is a tool setting error reserved value, and a numerical control machining program is written according to the motion track of the grinding wheel.
Further, the feed amount in S6 is 1. Mu.m.
The grinding machine tool comprises three linear motion shafts X, Y, Z, a C-axis rotary table, two precise fine adjustment linear feed shafts, a U-axis and a V-axis, a grinding wheel spindle and a workpiece spindle, wherein the axis direction of the workpiece spindle is parallel to the motion direction of the Y-axis, the grinding wheel spindle is obliquely hung below the C-axis rotary table, the axis included angle between the grinding wheel spindle and the horizontal plane is 40 degrees, the central axis of the C-axis rotary table is parallel to the Z-axis, the heights of the C-axis rotary table and the grinding wheel spindle can be changed by moving the C-axis rotary table along the Z-axis direction, the U-axis is connected with the rotating end of the C-axis rotary table through a U-axis connecting frame, one end of the V-axis is installed on the U-axis connecting frame, the other end of the V-axis is connected with the U-axis, and a U-axis protection cover is installed on the U-axis.
Further, the grinding machine tool further comprises a monitoring device, a horizontal workbench and a workpiece spindle protecting cover, wherein the horizontal workbench is arranged below the ball head grinding wheel, the workpiece spindle protecting cover is arranged on the horizontal workbench, the workpiece spindle is arranged in the workpiece spindle protecting cover, the horizontal workbench is arranged on a two-dimensional moving platform, the horizontal workbench is operable to move along the X-axis direction and the Y-axis direction of the grinding machine tool on the two-dimensional moving platform respectively, the monitoring device is arranged on the horizontal workbench, the monitoring device comprises a CCD camera and an amplifying lens, the CCD camera is arranged on the horizontal workbench, and the amplifying lens is arranged on the CCD camera.
Further, the horizontal workbench is horizontally arranged, the central axis of the workpiece main shaft is parallel to the horizontal workbench, and the workpiece is clamped at the end part of the workpiece main shaft.
Further, a V-axis slide is arranged on the V-axis, the V-axis slide is horizontally arranged, the V-axis slide is parallel to the X-axis of the grinding machine, and the U-axis is operable to slide along the V-axis slide.
Further, a U-axis slideway is arranged on the U-axis, the U-axis slideway is horizontally arranged, the U-axis slideway is parallel to the Y-axis of the grinding machine tool, and the tool spindle fixing frame drives the ball head grinding wheel to operably slide along the U-axis slideway.
Compared with the prior art, the invention has the beneficial effects that:
According to the dry grinding processing method for grinding the fused quartz revolving body part by the small-diameter ball head grinding wheel, the high-temperature-resistant ceramic-based CBN grinding wheel is adopted for dry grinding of the fused quartz revolving body part, so that the temperature of the grinding wheel and the surface of a workpiece is increased, the mechanical property of a fused quartz material is changed, the brittle-plastic transition critical grinding depth of the fused quartz material is improved, the material removing mode is changed from brittle removal to plastic removal, a smooth surface without cracks is obtained, and the grinding processing precision is improved.
The method of the invention realizes the plastic domain ultra-precise grinding processing of the fused quartz revolving body part, reduces the surface roughness from 226.188nm to 44.272nm, and obviously improves the surface quality of the workpiece.
The method has certain universality and can be popularized to the high-efficiency, low-damage and high-quality ultra-precise grinding processing of small-caliber (phi 20-phi 50 mm) rotary parts.
Drawings
FIG. 1 is a schematic diagram of a dry grinding processing device for grinding a fused quartz rotary part by a small-diameter ball head grinding wheel in an embodiment of the invention;
FIG. 2 is a diagram of a wheel motion profile in an embodiment of the present invention;
FIG. 3 is a diagram of the depth of field of a dry grinding surface of a fused silica solid part in an embodiment of the invention;
FIG. 4 is a graph showing the results of a white light interferometer for the surface roughness of a dry grinding of a solid part of revolution of fused silica in an embodiment of the present invention;
FIG. 5 is a view of the wet grinding surface oversubstance of a fused silica solid part in an embodiment of the present invention;
FIG. 6 shows the results of a white light interferometer for wet-grinding surface roughness of a solid part of revolution of fused silica in an embodiment of the present invention.
Reference numerals illustrate:
1. c axle revolving stage, 2, U axle link, 3, V axle, 4, grinding wheel spindle mount, 5, grinding wheel spindle, 6, bulb emery wheel, 7, horizontal workbench, 8, work piece spindle protection cover, 9, work piece to be processed, 10, work piece spindle, 11, U axle protection cover, 12, U axle.
Detailed Description
In the description of the present invention, it should be noted that terms such as "upper", "lower", "front", "rear", "left", "right", and the like in the embodiments indicate terms of orientation, and only for simplifying the description based on the positional relationship of the drawings in the specification, do not represent that the elements and devices and the like referred to must be operated according to the specific orientation and the defined operations and methods, configurations in the specification, and such orientation terms do not constitute limitations of the present invention.
In the description of the present invention, it should be noted that the terms "first," "second," and "third" mentioned in the embodiments of the present invention are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", or a third "may explicitly or implicitly include one or more such feature.
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.
The invention provides a dry grinding processing method for grinding a fused quartz revolving body part by a small-diameter ball head grinding wheel, which is shown in figures 1 to 2 and comprises the following steps of:
S1, clamping a fused quartz rotary workpiece and a ceramic-based CBN grinding wheel, starting a grinding machine tool, and controlling each motion axis of the machine tool to return to zero;
S2, moving a Z-axis lifting table through a CCD camera and an amplifying lens, and adjusting the height of the spherical center of the grinding wheel to be consistent with the height of the rotation axis of the workpiece;
s3, measuring outline dimension parameters of the workpiece through a CCD camera and an amplifying lens, drawing a two-dimensional outline model of the workpiece, constructing a grinding wheel motion track according to the two-dimensional outline model, and writing a numerical control machining program according to the grinding wheel motion track;
S4, selecting a point on the ball grinding wheel movement track as a trial cut point for tool setting, and recording the coordinate (x 1,y1) of the point under a workpiece coordinate system O w(xw,yw,zw;
s5, moving the grinding wheel to a position (x 1+δ,y1), wherein delta is a reserved value of a tool setting error;
s6, setting feeding amount, and controlling the grinding wheel to move towards the direction close to the workpiece so as to reduce the gap between the grinding wheel and the surface of the workpiece;
s7, manually rotating the workpiece spindle, and executing S6 again if collision sound is not generated, and directly executing S8 if periodic sound is generated;
S8, recording X, Y coordinate values of the current trial cut point and the coordinate origin of the machine tool, and controlling the grinding wheel to move by delta d distance in the direction away from the workpiece under the current position, wherein the gap between the grinding wheel and the workpiece is a machining reserved distance for compensating tool setting errors;
S9, starting a grinding wheel spindle and a workpiece spindle, and setting grinding parameters;
s10, running a numerical control machining program to enable the grinding wheel to do reciprocating feeding motion along the grinding wheel motion track, wherein no grinding fluid is added between the grinding wheel and the workpiece in the process;
And S11, stopping running of the grinding wheel spindle and the workpiece spindle when the total grinding depth of the grinding wheel reaches the preset feeding total amount, and operating the machine tool to enable the ball head grinding wheel to be far away from the workpiece, so that ultra-precise grinding of the workpiece is completed.
In the processing method in the embodiment, no grinding fluid is added in the process of processing the fused quartz rotary part, and the ceramic-based CBN grinding wheel with small diameter and high temperature resistance is adopted for directly grinding, so that the effect of the grinding fluid is not generated, the heat exchange between the grinding wheel and the workpiece is reduced, the local temperature of the workpiece is increased, the plastic domain processing of the fused quartz workpiece is realized, and the surface quality of the surface of the fused quartz element is further improved.
In a second specific embodiment, the average grain size of abrasive grains of the ceramic-based CBN grinding wheel is 1-5 mu m. The other embodiments are the same as those of the first embodiment.
In a third embodiment, S3 comprises the following steps:
S31, measuring outline dimension parameters of the workpiece through a CCD camera and an amplifying lens, and drawing a two-dimensional outline model of the workpiece in software;
S32, establishing a grinding wheel coordinate system (XYZO) and a workpiece coordinate system (X wYwZwOw), wherein the directions X, Y and Z of the workpiece coordinate system are consistent with a machine tool coordinate system;
S33, outwards shifting a workpiece contour line in the two-dimensional contour model by Rs+a to form a motion track of the grinding wheel, wherein Rs is the radius of the ball grinding wheel, a is a tool setting error reserved value, and a numerical control machining program is written according to the motion track of the grinding wheel. The other embodiments are the same as those of the first embodiment.
In this embodiment, as shown in fig. 2, for the grinding wheel motion track of the cylindrical fused quartz revolving body workpiece, the offset compensation amount is offset in the direction closer to the entity of the workpiece along the grinding wheel motion track during machining. For feeding of the circular arc machining profile, the compensation amount is offset along the connecting line direction of the circular arc center point and all points on the circular arc section, and the feeding of the ball head grinding wheel is realized by changing the position of a workpiece relative to the grinding wheel.
In the fourth embodiment, the feeding amount in S6 is 1 μm. The other embodiments are the same as those of the first embodiment.
The grinding machine tool comprises three linear motion shafts X, Y, Z, a C-axis rotary table 1, two precise fine adjustment linear feed shafts, a U-axis 12 and a V-axis 3, a grinding wheel spindle 5 and a workpiece spindle 10, wherein the axis direction of the workpiece spindle 10 is parallel to the Y-axis motion direction, the grinding wheel spindle 5 is obliquely hung below the C-axis rotary table 1, the axis included angle between the grinding wheel spindle 5 and the horizontal plane is 40 degrees, the central axis of the C-axis rotary table 1 is parallel to the Z-axis, the heights of the C-axis rotary table 1 and the grinding wheel spindle 5 can be changed by moving the C-axis rotary table 1 along the Z-axis direction, the U-axis 12 is connected with the rotating end of the C-axis rotary table 1 through a U-axis connecting frame 2, one end of the V-axis 3 is arranged on the U-axis connecting frame, the other end of the V-axis 3 is connected with the U-axis 12, and a U-axis protection cover 11 is arranged on the U-axis 12. During grinding of fused silica solid parts, the ball grinding wheel 6 moves along the contour of the workpiece 9 to be processed. The other embodiments are the same as those of the first embodiment.
In this embodiment, for cylindrical fused silica solid parts, the grinding wheel is reciprocated along the Y axis. During grinding, the relative grinding speeds of the workpiece and the grinding wheel are adjusted by adjusting the rotating speeds of the workpiece spindle and the grinding wheel spindle. And the feeding speed of the workpiece and the grinding wheel is regulated by controlling the movement speed of the two-dimensional moving platform. And the machine tool movement system completes the feeding movement of the ball grinding wheel by controlling the size of the radius compensation value of the cutter, thereby realizing the adjustment of the grinding depth.
The grinding machine tool further comprises a monitoring device, a horizontal workbench 7 and a workpiece spindle protecting cover 8, wherein the horizontal workbench 7 is arranged below the ball head grinding wheel, the workpiece spindle protecting cover 8 is arranged on the horizontal workbench 7, the workpiece spindle 10 is arranged in the workpiece spindle protecting cover 8, the horizontal workbench 7 is arranged on a two-dimensional moving platform, the horizontal workbench 7 is operable to move on the two-dimensional moving platform along the X-axis direction and the Y-axis direction of the grinding machine tool respectively, the monitoring device is arranged on the horizontal workbench 7, the monitoring device comprises a CCD camera and an amplifying lens, the CCD camera is arranged on the horizontal workbench, and the amplifying lens is arranged on the CCD camera. This embodiment is otherwise identical to embodiment five.
In a seventh embodiment, the horizontal workbench 7 is horizontally arranged, the central axis of the workpiece spindle 10 is parallel to the horizontal workbench 7, and the workpiece is clamped at the end part of the workpiece spindle 10. This embodiment is otherwise identical to the sixth embodiment.
In the eighth specific embodiment, the V-axis 3 is provided with a V-axis slideway, the V-axis slideway is horizontally arranged, the V-axis slideway is parallel to the X axis of the grinding machine tool, and the V-axis 3 can slide along the V-axis slideway in an operable manner. This embodiment is otherwise identical to embodiment seven.
In a ninth specific embodiment, a U-axis slideway is arranged on the U-axis 12, the U-axis slideway is horizontally arranged, the U-axis slideway is parallel to the Y-axis of the grinding machine tool, and the ball grinding wheel 6 is driven by the grinding wheel spindle fixing frame 4 to operably slide along the U-axis slideway. This embodiment is otherwise identical to embodiment eight.
Example 1
In order to verify the processing effect of the method, the dry grinding processing method for grinding the fused quartz revolving body part by the small-diameter ball head grinding wheel is compared with the existing wet grinding processing method, the fused quartz glass rod is processed by adopting the same processing technological parameters and a ceramic-based CBN grinding wheel (the grain diameter is 3 mu m), the processing technological parameters are that the rotational speed of the ball head grinding wheel is 71000r/min, the rotational speed of a workpiece is 30r/min, the grinding depth is 1 mu m, the feeding speed is 30 mu m/s, and the processing is stopped when the total grinding depth of the grinding wheel reaches 10 mu m, so that the grinding is completed. As shown in FIG. 3, in order to obtain the super depth image of the surface of the element by the method of the invention, the surface appearance of the workpiece is a typical plastic stripe, the surface roughness of the workpiece is measured by using a white light interferometer, the result is shown in FIG. 4, the roughness result is 44.272, which is far lower than the result of wet grinding processing by adopting the same process parameters and grinding wheel, the surface of the wet grinding processing fused quartz glass rod is provided with a large number of material breakage and brittle pits generated by brittle removal, and the surface roughness of the workpiece is 226.188nm, as shown in FIG. 5.
The result shows that the dry grinding processing of the fused quartz glass rod by using the small-diameter ceramic-based CBN grinding wheel can realize the plastic domain processing of the fused quartz revolving body part, and the roughness is reduced from 226.188nm to 44.272nm, so that the surface quality of the workpiece is obviously improved. The high-temperature-resistant ceramic-based CBN grinding wheel is adopted to carry out dry grinding on the fused quartz revolving body part, so that the temperature of the grinding wheel and the surface of a workpiece is increased, the mechanical property of the fused quartz material is changed, the critical grinding depth of the brittle-plastic transition of the fused quartz material is improved, and a smooth surface without cracks is obtained.
Although the present disclosure is disclosed above, the scope of the present disclosure is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the disclosure, and such changes and modifications would be within the scope of the disclosure.

Claims (9)

1.一种小直径球头砂轮磨削熔石英回转体零件的干磨削加工方法，其特征在于，包括如下步骤：1. A dry grinding method for grinding fused quartz rotating parts using a small-diameter ball-end grinding wheel, characterized by comprising the following steps: S1、将熔石英回转体工件和陶瓷基CBN砂轮进行装夹，启动磨削加工机床，控制机床各运动轴回零；S1. Clamp the fused quartz rotating workpiece and the ceramic-based CBN grinding wheel, start the grinding machine, and control each moving axis of the machine to return to zero; S2、通过CCD相机和放大镜头，调整砂轮球心的高度与工件回转轴线高度一致；S2. Use the CCD camera and magnifying lens to adjust the height of the grinding wheel center to be consistent with the height of the workpiece rotation axis; S3、通过CCD相机和放大镜头测量工件的轮廓尺寸参数，绘制工件的二维轮廓模型，根据二维轮廓模型构建砂轮运动轨迹，根据砂轮运动轨迹编写数控加工程序；S3, measuring the contour size parameters of the workpiece through a CCD camera and a magnifying lens, drawing a two-dimensional contour model of the workpiece, constructing a grinding wheel motion trajectory based on the two-dimensional contour model, and writing a CNC machining program based on the grinding wheel motion trajectory; S4、在球头砂轮运动轨迹上选取一点作为试切点进行对刀，记录该点在工件坐标系Ow(xw,yw,zw)下的坐标(x1,y1)；S4. Select a point on the motion trajectory of the ball-end grinding wheel as a trial cutting point for tool setting, and record the coordinates (x 1 , y 1 ) of the point in the workpiece coordinate system O w (x w , y w , z w ); S5、将砂轮移动至(x1+δ,y1)处，其中，δ为对刀误差的预留值；S5. Move the grinding wheel to (x 1 +δ,y 1 ), where δ is the reserved value for tool setting error; S6、设定进给量，控制砂轮向靠近工件方向移动，使砂轮与工件表面之间的间隙减小；S6. Set the feed rate and control the grinding wheel to move closer to the workpiece, so that the gap between the grinding wheel and the workpiece surface is reduced; S7、手动旋转工件主轴，若未产生碰撞声音，则再次执行S6；若出现周期性的声音，则直接执行S8；S7: Manually rotate the workpiece spindle. If no collision sound is generated, execute S6 again. If a periodic sound is generated, execute S8 directly. S8、记录当前试切点与机床坐标原点的X、Y坐标值，在当前位置下，控制砂轮向远离工件方向移动Δd距离，此时砂轮与工件之间的间隙为加工预留距离，用于补偿对刀误差；S8. Record the X and Y coordinates of the current trial cutting point and the machine tool coordinate origin. At the current position, control the grinding wheel to move away from the workpiece by a distance of Δd. At this time, the gap between the grinding wheel and the workpiece is the machining reserved distance, which is used to compensate for the tool setting error. S9、开启砂轮主轴与工件主轴，设定磨削参数；S9, turn on the grinding wheel spindle and the workpiece spindle, and set the grinding parameters; S10、运行数控加工程序，使砂轮沿着砂轮运动轨迹做往复进给运动，过程中砂轮与工件之间不添加任何磨削液；S10, running the CNC machining program to make the grinding wheel perform reciprocating feeding motion along the grinding wheel motion trajectory, without adding any grinding fluid between the grinding wheel and the workpiece during the process; S11、当砂轮总磨削深度达到预设进给总量，停止砂轮主轴与工件主轴的运转，操作机床使球头砂轮远离工件，完成对工件的超精密磨削。S11. When the total grinding depth of the grinding wheel reaches the preset total feed amount, stop the operation of the grinding wheel spindle and the workpiece spindle, operate the machine tool to move the ball head grinding wheel away from the workpiece, and complete the ultra-precision grinding of the workpiece. 2.根据权利要求1所述的小直径球头砂轮磨削熔石英回转体零件的干磨削加工方法，其特征在于，所述陶瓷基CBN砂轮的磨粒平均粒径为1～5μm。2. The dry grinding method for grinding fused quartz rotating parts with a small-diameter ball-end grinding wheel according to claim 1, characterized in that the average particle size of the abrasive grains of the ceramic-based CBN grinding wheel is 1 to 5 μm. 3.根据权利要求1所述的小直径球头砂轮磨削熔石英回转体零件的干磨削加工方法，其特征在于，S3包括如下步骤：3. The dry grinding method for grinding fused quartz rotating parts using a small-diameter ball-end grinding wheel according to claim 1, wherein S3 comprises the following steps: S31、通过CCD相机和放大镜头测量工件的轮廓尺寸参数，在软件中绘制工件的二维轮廓模型；S31, measure the contour size parameters of the workpiece through the CCD camera and the magnifying lens, and draw the two-dimensional contour model of the workpiece in the software; S32、建立砂轮坐标系(XYZO)和工件坐标系(XwYwZwOw)，其中，工件坐标系的X、Y和Z三个方向与机床坐标系一致；S32. Establish a grinding wheel coordinate system (XYZO) and a workpiece coordinate system ( XwYwZwOw ) , wherein the X, Y, and Z directions of the workpiece coordinate system are consistent with the machine tool coordinate system; S33、将二维轮廓模型中工件轮廓线向外部偏移Rs+a，形成砂轮的运动轨迹；其中Rs为球头砂轮的半径，a为对刀误差预留值，根据砂轮运动轨迹编写数控加工程序。S33. Offset the workpiece contour line in the two-dimensional contour model outward by Rs+a to form the motion trajectory of the grinding wheel; where Rs is the radius of the ball-end grinding wheel, and a is the reserved value for tool setting error. Write a CNC machining program based on the motion trajectory of the grinding wheel. 4.根据权利要求1所述的小直径球头砂轮磨削熔石英回转体零件的干磨削加工方法，其特征在于，S6中所述进给量为1μm。4. The dry grinding method for grinding fused quartz rotating parts with a small-diameter ball-end grinding wheel according to claim 1, characterized in that the feed rate in S6 is 1 μm. 5.根据权利要求1所述的小直径球头砂轮磨削熔石英回转体零件的干磨削加工方法，其特征在于，所述磨削加工机床，包含：三个直线运动轴X、Y、Z轴，一个C轴转台、两个精密微调直线进给轴U轴、V轴，以及一个砂轮主轴和一个工件主轴，工件主轴轴线方向平行于Y轴运动方向；砂轮主轴斜挂于C轴转台下方，其轴线与水平面夹角为40°；C轴转台中心轴线与Z轴平行，通过其沿Z轴方向运动可以改变C轴转台和砂轮主轴的高度，所述U轴通过U轴连接架和C轴转台的转动端连接，V轴的一端安装在所述U轴连接架上，V轴的另一端和所述U轴连接，所述U轴上安装有U轴保护罩。5. The dry grinding method for grinding fused quartz rotating parts with a small-diameter ball-end grinding wheel according to claim 1 is characterized in that the grinding machine comprises: three linear motion axes X, Y, and Z axes, a C-axis turntable, two precision fine-tuning linear feed axes U and V axes, and a grinding wheel spindle and a workpiece spindle, the axis direction of the workpiece spindle is parallel to the movement direction of the Y axis; the grinding wheel spindle is obliquely hung below the C-axis turntable, and the angle between its axis and the horizontal plane is 40°; the central axis of the C-axis turntable is parallel to the Z axis, and the height of the C-axis turntable and the grinding wheel spindle can be changed by moving it along the Z axis, the U axis is connected to the rotating end of the C-axis turntable through a U-axis connecting frame, one end of the V axis is installed on the U-axis connecting frame, and the other end of the V axis is connected to the U axis, and a U axis protective cover is installed on the U axis. 6.根据权利要求5所述的小直径球头砂轮磨削熔石英回转体零件的干磨削加工方法，其特征在于，所述磨削加工机床，还包含：监控装置、水平工作台和工件主轴保护罩，所述水平工作台设于所述球头砂轮的下方，所述工件主轴保护罩安装在所述水平工作台上，所述工件主轴安装在所述工件主轴保护罩内，所述水平工作台安装在二维移动平台上，所述水平工作台在所述二维移动平台上可操作地分别沿磨削加工机床的X轴方向和Y轴方向运动，所述监控装置安装在所述水平工作台上，所述监控装置包括：CCD相机和放大镜头，所述CCD相机安装在所述水平工作台上，所述放大镜头安装在所述CCD相机上。6. The dry grinding method for grinding fused quartz rotating parts with a small-diameter ball-end grinding wheel according to claim 5 is characterized in that the grinding machine tool also includes: a monitoring device, a horizontal workbench and a workpiece spindle protection cover, the horizontal workbench is arranged below the ball-end grinding wheel, the workpiece spindle protection cover is installed on the horizontal workbench, the workpiece spindle is installed in the workpiece spindle protection cover, the horizontal workbench is installed on a two-dimensional movable platform, and the horizontal workbench can be operated to move along the X-axis and Y-axis directions of the grinding machine tool on the two-dimensional movable platform respectively, the monitoring device is installed on the horizontal workbench, the monitoring device includes: a CCD camera and a magnifying lens, the CCD camera is installed on the horizontal workbench, and the magnifying lens is installed on the CCD camera. 7.根据权利要求6所述的小直径球头砂轮磨削熔石英回转体零件的干磨削加工方法，其特征在于，所述水平工作台水平设置，工件主轴的中心轴线和所述水平工作台平行，工件装夹在工件主轴的端部。7. The dry grinding method for grinding fused quartz rotating parts with a small-diameter ball-end grinding wheel according to claim 6 is characterized in that the horizontal worktable is arranged horizontally, the central axis of the workpiece spindle is parallel to the horizontal worktable, and the workpiece is clamped at the end of the workpiece spindle. 8.根据权利要求7所述的小直径球头砂轮磨削熔石英回转体零件的干磨削加工方法，其特征在于，所述V轴上设有V轴滑道，所述V轴滑道水平设置，所述V轴滑道与磨削加工机床的X轴平行，所述V轴可操作地沿所述V轴滑道滑动。8. The dry grinding method for grinding fused quartz rotating parts with a small-diameter ball-end grinding wheel according to claim 7 is characterized in that a V-axis slideway is provided on the V-axis, the V-axis slideway is horizontally arranged, the V-axis slideway is parallel to the X-axis of the grinding machine tool, and the V-axis is operable to slide along the V-axis slideway. 9.根据权利要求8所述的小直径球头砂轮磨削熔石英回转体零件的干磨削加工方法，其特征在于，所述U轴上设有U轴滑道，所述U轴滑道水平设置，所述U轴滑道与磨削加工机床的Y轴平行，通过砂轮主轴固定架带动球头砂轮可操作地沿所述U轴滑道滑动。9. The dry grinding method for grinding fused quartz rotating parts with a small-diameter ball-end grinding wheel according to claim 8 is characterized in that a U-axis slide is provided on the U-axis, the U-axis slide is arranged horizontally, the U-axis slide is parallel to the Y-axis of the grinding machine tool, and the ball-end grinding wheel is driven by the grinding wheel spindle fixing frame to slide operably along the U-axis slide.
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