CN117211656A - Multifunctional magnetic control shutter microstructure and shutter microchip manufacturing method - Google Patents

Abstract

The invention discloses a multifunctional magnetic control shutter microstructure, which comprises an outer frame, wherein a microchip array made of a plurality of microchip is arranged in the outer frame, the upper end and the lower end of the microchip array are connected with hinge structures, and the microchip is a magnetic flexible film piece. A manufacturing approach of the micro-sheet of the multi-functional magnetic control shutter, including step one, make the magnetic flexible film; the first step further comprises a step (11): mixing hard magnetic microparticles with a solidifiable gel solution to prepare a magnetic gel solution, and a step (12): preparing a magnetic flexible film layer, wherein the step (13) is as follows: magnetizing the magnetic flexible film layer; and step two, cutting the magnetic flexible film layer into micro-sheets. The micro-structure consists of a micro-chip array and hinges at two ends, combines the characteristics of the micro-chip, can realize accurate deformation around the hinges under the control of a magnetic field, can realize a plurality of deformation modes such as back and forth swing, continuous rotation and the like under the control of the magnetic field, and widens the functions of the magnetic response micro-structure array.

Description

A multifunctional magnetically controlled shutter microstructure and a manufacturing method of shutter microchips

Technical field

The present invention relates to the technical field of magnetically controlled structures, specifically a multifunctional magnetically controlled shutter microstructure and a manufacturing method of shutter microchips.

Background technique

Microstructures that can respond to external stimuli have broad application prospects in the fields of soft robotics, liquid manipulation, sensing and actuators. Among them, magnetic drive has the advantages of instantaneous response, good biocompatibility, high control accuracy and good penetration, and is an excellent drive method. Under magnetic field control, magnetically responsive microstructured functional surfaces can achieve reversible switching of morphology and can be controlled remotely and instantaneously. They are widely used in water mist collection, wettability switching, droplet manipulation, patterned display, light manipulation and other fields.

However, existing magnetic response microstructures are usually micropillar arrays, cilia arrays, microchip arrays, etc., which usually produce bending deformation under the control of magnetic fields. They have shortcomings such as single deformation method, low controllability precision, and limited functions. The above shortcomings limit the use of microstructures and also bring difficulties to the use of microstructures on soft robots.

Contents of the invention

In view of the problems existing in the above-mentioned prior art, the present invention provides a multifunctional magnetically controlled shutter microstructure and a manufacturing method thereof.

In order to achieve the above objectives, the present invention is achieved through the following technical solutions:

A multifunctional magnetically controlled shutter microstructure, including an outer frame. A microchip array made of a plurality of microchips is provided in the outer frame. The upper and lower ends of the microchip array are connected with hinge structures. The microchips are magnetic flexible film sheets.

Further, the surface of the magnetic flexible film sheet is also covered with one or more of a hydrophilic layer, a hydrophobic layer, and a super-lubricant layer.

A method for manufacturing multifunctional magnetic shutter microchips, including step 1: making a magnetic flexible film; said step 1 also includes step (11): mixing hard magnetic microparticles with a solidifiable gel solution to prepare a magnetic gel Solution, step (12): prepare a magnetic flexible film layer, step (13): magnetize the magnetic flexible film layer; step 2, cut the magnetic flexible film layer into micro pieces.

Further, in step (11), the hard magnetic microparticles and the coagulable gel solution are evenly mixed at a ratio of 2 to 5:1 to 3.

Further, the hard magnetic microparticles are at least one of ferrite, rubber magnets, alnico, samarium cobalt or neodymium iron boron particles.

Further, the average size of the hard magnetic microparticles is 5 to 100 μm.

Further, the solidifiable gel solution in step (11) is any one of polydimethylsiloxane (PDMS), Dow Corning 1700 (SE1700), silica gel (Ecoflex00-30) or flexible light-curing epoxy resin. A sort of.

Further, the thickness of the magnetic flexible film layer in step (12) is 10-1000 μm.

Further, in step (12), a spin coater is used to spin-coat the magnetic gel solution produced in step (11) into a film, the spin-coating speed is 500-700r/min, and the film is placed at 60-80°C. Curing in oven for 4 to 6 hours.

Further, step three is included: wrapping a functional layer on the surface of the microchip, and the modified layer includes any one or more of a hydrophilic layer, a hydrophobic layer, and a super-lubricant layer.

Beneficial effects of the present invention:

The invention provides a multifunctional magnetically controlled shutter microstructure. The structure is composed of a microchip array and hinges at both ends. The microchip array can achieve precise deformation around the hinges under the control of a magnetic field. At the same time, the microchip array can achieve precise deformation around the hinges under the control of a magnetic field. It can also realize various deformation modes such as back and forth swinging and continuous rotation, which broadens the functions of the magnetic response microstructure array. The manufacturing method of shutter microchips is made by mixing hard magnetic microparticles and solidifiable gel solution and using laser processing. It has the characteristics of simple process, low cost and high processing efficiency. Using laser processing technology to directly prepare magnetically controlled microstructure arrays on magnetic films abandons the shortcomings of traditional magnetic fluid self-assembly methods and template methods to intelligently process large aspect ratio microstructure arrays, and has the advantages of simple process, low cost, High efficiency features. The front and back sides of the microchip array can be modified into a variety of hydrophilic and hydrophobic forms, which can broaden the functions and application fields of magnetically responsive microstructure arrays.

Description of the drawings

Figure 1 is a schematic structural diagram of the microstructure of the multifunctional magnetic shutter of the present invention;

Figure 2 is a schematic diagram of the microchip functional layer coating process of the present invention;

Figure 3 is a physical diagram of the sample of the present invention;

Figure 4 is a stress-strain diagram of the microstructure of the magnetron shutter of the present invention;

Figure 5 is a hysteresis loop diagram of the microstructure of the magnetically controlled shutter of the present invention.

In the picture: 1-microchip array, 2-hinge, 3-outer frame, 4-hard magnetic particles, 5-matrix.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

Please refer to Figures 1-5. The multifunctional magnet-controlled shutter microstructure provided by the present invention includes an outer frame 1. The outer frame 1 is provided with a microchip array made of a plurality of microchips 2. The upper and lower sides of the microchip array are Both ends are connected with hinge structures 3, and the microchips 2 are magnetic flexible film sheets. The surface of the magnetic flexible film sheet is also covered with one or more of a hydrophilic layer, a hydrophobic layer, and a super-lubricant layer. The shape of the microchip array is one of rectangle, circle, rhombus, and star.

For the magnetically controlled shutter microstructure of the present invention, a magnetic field with a strength of 105mT that can be rotated is applied externally. When the external magnetic field gradually rotates clockwise from 90° to -90°, the microchip also rotates clockwise from 0° to 180° along with the magnetic field. °, and the rotation angle of the microchip is almost consistent with the rotation angle of the external magnetic field, that is, the rotation angle of the microchip can be accurately controlled by the external magnetic field.

Microchip 2 is made with one side hydrophilic and one hydrophobic. For droplets that fall onto the surface of the shutters, when the rotating magnetic field is 90°, the superphobic surface of the microchip of the shutters faces upward. At this time, the droplets are due to surface tension. Formation of spherical droplets. When the magnetic field is rotated 180°, the hydrophilic surface of the shutter faces upward, and the droplets are adsorbed on the surface of the shutter. If the shutter is in a tilted state, the directional droplet drop can be achieved by adjusting the placement angle of the blind, and the rotating magnetic field can be used to control the droplet drop or interception as needed to achieve intelligent switching.

Please refer to Figures 4 and 5. After testing, it was found that the maximum strain of the microstructure of a multifunctional magnetic shutter provided by the present invention is 250%, indicating that the magnetic shutter has excellent elasticity. The remanent magnetization intensity is about 60emu/g and the coercive force is about 6000oe, indicating that the magnetically controlled shutters have strong remanence characteristics.

Example 1

A method for manufacturing multifunctional magnetically controlled shutter microchips, including

Step 1. Make magnetic flexible film

Step (11): Use (Ecoflex00-30) silica gel, mix liquid A and liquid B evenly at a ratio of 1:1 to prepare a gel solution. Then, the gel solution and NdFeB particles were evenly mixed at a weight ratio of 2:1 to prepare a gel solution containing magnetic particles.

Step (12): Preparing a flexible film containing magnetic particles

The method of forming the thin layer is one of spin coating, spray coating and blade coating. In this embodiment, the spin coating method is used. The prepared magnetic gel solution is made into a flexible film using a spin coater. The spin coating speed is 500 to 700 r/min. In this embodiment, 500 r/min is used. The curing method includes natural curing and heating and curing in an oven. In this embodiment, heating and curing in an oven are used. After spin coating, place the magnetic film in an oven at 60-80°C to cure for 4-6 hours.

Step (13): Magnetize the magnetic flexible film layer, use a magnetizer to magnetize the prepared flexible film, and the pulse magnetic field intensity is 0.5-5T.

Step 2: Cut the magnetic flexible film layer into micro pieces

The selected microchip shape of the magnetic shutter structure is rectangular. The laser processing path is first designed and then imported into the laser processing equipment. The laser type is one of ultraviolet laser, infrared laser, nanosecond laser, picosecond laser and femtosecond laser. In this embodiment, a UV laser marking machine is used to cut the magnetic film. The laser power is 1-10W. In this embodiment, the laser power is 2.1W and the cutting speed is 50-1000mm/s. In this embodiment, the cutting speed is 800mm/s. .

Step 3: Wrap the functional layer on the surface of the microchip

The surface of the microchip is modified for wettability, and the hydrophilic calcium sulfate powder is evenly coated on the front side of the magnetic silica gel film using coating technology to make the front side of the silica gel film a super-hydrophilic surface. A UV laser marking machine is used to bake it. To etch the reverse side of the magnetic film, the laser power is 2.1W and the ablation speed is 100mm/s, making the reverse side of the silicone film a superhydrophobic surface.

Example 2

A method for manufacturing multifunctional magnetically controlled shutter microchips, including

Step 1. Make magnetic flexible film

Step (11): Use (Ecoflex00-30) silica gel, mix liquid A and liquid B evenly at a ratio of 1:1 to prepare a gel solution. Then, the gel solution and NdFeB particles are evenly mixed at a weight ratio of 1.5:1 to prepare a gel solution containing magnetic particles.

Step (12): Preparing a flexible film containing magnetic particles

The method of forming the thin layer is one of spin coating, spray coating and blade coating. In this embodiment, the spin coating method is used. The prepared magnetic gel solution is made into a flexible film using a spin coater. The spin coating speed is 500 to 700 r/min. In this embodiment, 500 r/min is used. The curing method includes natural curing and heating and curing in an oven. In this embodiment, heating and curing in an oven are used. After spin coating, place the magnetic film in an oven at 60-80°C to cure for 4-6 hours.

Step (13): Magnetize the magnetic flexible film layer, use a magnetizer to magnetize the prepared flexible film, and the pulse magnetic field intensity is 0.5-5T.

Step 2: Cut the magnetic flexible film layer into micro pieces

The selected microchip shape of the magnetic shutter structure is rectangular. The laser processing path is first designed and then imported into the laser processing equipment. The laser type is one of ultraviolet laser, infrared laser, nanosecond laser, picosecond laser and femtosecond laser. In this embodiment, a UV laser marking machine is used to cut the magnetic film. The laser power is 1-10W. In this embodiment, the laser power is 2.1W and the cutting speed is 50-1000mm/s. In this embodiment, the cutting speed is 800mm/s. .

Step 3: Wrap the functional layer on the surface of the microchip

The surface of the microchip is modified for wettability, and the hydrophilic calcium sulfate powder is evenly coated on the front side of the magnetic silica gel film using coating technology to make the front side of the silica gel film a super-hydrophilic surface. A UV laser marking machine is used to bake it. To etch the reverse side of the magnetic film, the laser power is 2.1W and the ablation speed is 100mm/s, making the reverse side of the silicone film a superhydrophobic surface.

Example 3

A method for manufacturing multifunctional magnetically controlled shutter microchips, including

Step 1. Make magnetic flexible film

Step (11): Use (Ecoflex00-30) silica gel, mix liquid A and liquid B evenly at a ratio of 1:1 to prepare a gel solution. Then, the gel solution and NdFeB particles were evenly mixed at a weight ratio of 5:3 to prepare a gel solution containing magnetic particles.

Step (12): Preparing a flexible film containing magnetic particles

The method of forming the thin layer is one of spin coating, spray coating and blade coating. In this embodiment, the spin coating method is used. The prepared magnetic gel solution is made into a flexible film using a spin coater. The spin coating speed is 500 to 700 r/min. In this embodiment, 500 r/min is used. The curing method includes natural curing and heating and curing in an oven. In this embodiment, heating and curing in an oven are used. After spin coating, place the magnetic film in an oven at 60-80°C to cure for 4-6 hours.

Step (13): Magnetize the magnetic flexible film layer, use a magnetizer to magnetize the prepared flexible film, and the pulse magnetic field intensity is 0.5-5T.

Step 2: Cut the magnetic flexible film layer into micro pieces

The selected microchip shape of the magnetic shutter structure is rectangular. The laser processing path is first designed and then imported into the laser processing equipment. The laser type is one of ultraviolet laser, infrared laser, nanosecond laser, picosecond laser and femtosecond laser. In this embodiment, a UV laser marking machine is used to cut the magnetic film. The laser power is 1-10W. In this embodiment, the laser power is 2.1W and the cutting speed is 50-1000mm/s. In this embodiment, the cutting speed is 800mm/s. .

Step 3: Wrap the functional layer on the surface of the microchip

The surface of the microchip is modified for wettability, and the hydrophilic calcium sulfate powder is evenly coated on the front side of the magnetic silica gel film using coating technology to make the front side of the silica gel film a super-hydrophilic surface. A UV laser marking machine is used to bake it. To etch the reverse side of the magnetic film, the laser power is 2.1W and the ablation speed is 100mm/s, making the reverse side of the silicone film a superhydrophobic surface.

The above content is a further detailed description of the present invention in combination with specific preferred embodiments, and it cannot be concluded that the specific implementation of the present invention is limited to these descriptions. For those of ordinary skill in the technical field to which the present invention belongs, several simple deductions or substitutions can be made without departing from the concept of the present invention, and all of them should be regarded as belonging to the protection scope of the present invention.

Claims (10)

1. A multifunctional magnetic control shutter microstructure is characterized in that: the micro-chip array is characterized by comprising an outer frame (1), wherein a micro-chip array made of a plurality of micro-chips (2) is arranged in the outer frame (1), the upper end and the lower end of the micro-chip array are connected with hinge structures (3), and the micro-chips (2) are magnetic flexible film pieces.

2. The multi-function magnetically controlled shutter microstructure of claim 1, wherein: the surface of the magnetic flexible film piece is also coated with one or more of a hydrophilic layer, a hydrophobic layer and a super-lubricating layer.

3. A manufacturing method of a multifunctional magnetic control louver micro-plate is characterized in that: the method comprises the steps of firstly, manufacturing a magnetic flexible film; the first step further comprises a step (11): mixing hard magnetic microparticles with a solidifiable gel solution to prepare a magnetic gel solution, and a step (12): preparing a magnetic flexible film layer, wherein the step (13) is as follows: magnetizing the magnetic flexible film layer; and step two, cutting the magnetic flexible film layer into micro-sheets.

4. The method for manufacturing the micro-sheet of the multifunctional magnetic control shutter according to claim 3, wherein the method comprises the following steps: in the step (11), the hard magnetic microparticles and the solidifiable gel solution are uniformly mixed according to the ratio of 2-5:1-3.

5. The method for manufacturing the micro-sheet of the multifunctional magnetic control shutter according to claim 4, which is characterized in that: the hard magnetic micro particles are at least one of ferrite, rubber magnet, aluminum nickel cobalt, samarium cobalt or neodymium iron boron particles.

6. The method for manufacturing the micro-sheet of the multifunctional magnetic control shutter according to claim 5, which is characterized in that: the average size of the hard magnetic microparticles is 5-100 μm.

7. The method for manufacturing the micro-sheet of the multifunctional magnetic control shutter according to claim 3, wherein the method comprises the following steps: the curable gel solution in the step (11) is any one of Polydimethylsiloxane (PDMS), dakangnin 1700 (SE 1700), silica gel (Ecoflex 00-30) or flexible photo-curable epoxy resin.

8. The method for manufacturing the micro-sheet of the multifunctional magnetic control shutter according to claim 3, wherein the method comprises the following steps: the thickness of the magnetic flexible film layer in the step (12) is 10-1000 mu m.

9. The method for manufacturing the micro-sheet of the multifunctional magnetic control shutter according to claim 3, wherein the method comprises the following steps: and (3) spin-coating the magnetic gel solution manufactured in the step (11) into a film by adopting a spin-coating instrument in the step (12), wherein the spin-coating speed is 500-700 r/min, and placing the film in an oven at 60-80 ℃ for curing for 4-6 h.

10. The method for manufacturing the micro-sheet of the multifunctional magnetic control shutter according to claim 3, wherein the method comprises the following steps: and step three, wrapping a functional layer on the surface of the microchip, wherein the modification layer comprises any one or more of a hydrophilic layer, a hydrophobic layer and an ultra-lubricating layer.