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CN117144302B - Method for preparing high-entropy coating for high-speed rail bearing by utilizing electron beam physical vapor deposition technology - Google Patents

Method for preparing high-entropy coating for high-speed rail bearing by utilizing electron beam physical vapor deposition technology Download PDF

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CN117144302B
CN117144302B CN202311011587.1A CN202311011587A CN117144302B CN 117144302 B CN117144302 B CN 117144302B CN 202311011587 A CN202311011587 A CN 202311011587A CN 117144302 B CN117144302 B CN 117144302B
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bearing
coating
electron beam
vapor deposition
entropy
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CN117144302A (en
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刘伟东
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Zhongzhe High Speed Railway Bearing Co ltd
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Zhongzhe High Speed Railway Bearing Co ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • C23C14/30Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C30/00Alloys containing less than 50% by weight of each constituent
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Sliding-Contact Bearings (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a method for preparing a high-entropy coating for a high-speed rail bearing by utilizing an electron beam physical vapor deposition technology, which adopts an EB-PVD process to prepare FeCrCoNiAlMo x coating on the surface of bearing steel, wherein the interface of the coating and a matrix is mainly metallurgical bonding, the bonding force is strong, the stability is good, the surface is smooth, the coating structure is mainly single dendrite, the coating preparation process is carried out under a vacuum condition, the pollution and the oxidation of the coating are effectively prevented, and the excellent wear resistance and the high service life of the coating are endowed.

Description

Method for preparing high-entropy coating for high-speed rail bearing by utilizing electron beam physical vapor deposition technology
Technical Field
The invention belongs to the technical field of surface modification, and relates to a method for preparing a high-entropy coating for a high-speed rail bearing by utilizing an electron beam physical vapor deposition technology.
Background
The high-speed rail bearing is a core component in a high-speed train transmission system, and has important significance for the running performance, the service life and the reliability of the high-speed rail. The service life and reliability of the bearing are one of the main reasons for limiting the speed increase of the high-speed train, and the running speed of the high-speed train of the Beijing Shanghai of China is 350km/h at present. At present, the existing bearing steel is adopted, and the speed increasing capability of the high-speed rail is limited. Advanced surface strengthening technology is required to strengthen the bearing performance, thereby further improving the speed of the train.
High-entropy alloys are generally defined as alloys that are alloyed from five or more elemental components at or near equiatomic ratios, with mixed entropy being higher than melting entropy, typically forming a high-entropy solid solution phase. Electron beam vapor deposition (EB-PVD) techniques are a composite of both electron beam and physical vapor deposition techniques. A technology for obtaining a coating or film by condensing a target atomic deposition substrate by irradiating the target with electron beams having high energy density to cause instantaneous melting and evaporation. Compared with other coating material preparation technologies, electron gun used in the EB-PVD process has high emission power, can evaporate and deposit high-melting-point materials such as high-melting-point oxides, boron nitride, graphite, silicides and the like, and in addition, since gas-phase particles can not follow the solubility rule which must be followed in liquid phase, the technology can prepare substances which are difficult or even impossible to prepare in conventional metallurgical processes. The coating and the matrix are not well combined, so that the coating is easy to fall off in the service process of the coating, and the wear resistance and the service life of the coating are affected. The EB-PVD process is utilized to deposit the high-entropy alloy coating, so that the coating with good interface bonding can be obtained, the wear resistance is greatly improved, and the service life of the coating is also well improved.
In the EB-PVD method in the prior art, a molten pool with different sizes and uneven distribution is usually formed in the deposition process by evaporation deposition, so that the coating is easy to fall off in the use process, and the service life of the coating is influenced.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a method for preparing a high-entropy coating for a high-speed rail bearing by utilizing an electron beam physical vapor deposition technology, which adopts an EB-PVD technology to prepare a FeCrCoNiAlMo x coating on the surface of bearing steel, wherein the interface of the coating and a matrix is mainly metallurgical bonding, the bonding force is strong, the stability is good, the surface is smooth, the coating structure is mainly single dendrite, the coating preparation process is carried out under a vacuum condition, the pollution and the oxidation of the coating are effectively prevented, and the excellent wear resistance and the high service life of the coating are endowed.
In order to achieve the above purpose, the present invention provides the following technical solutions:
a method for preparing a high-entropy coating for a high-speed rail bearing by utilizing an electron beam physical vapor deposition technology comprises the following steps:
(1) Pretreatment of bearing surfaces: wiping the surface of a bearing by using absolute ethyl alcohol, then immersing the bearing in an acetone solution for ultrasonic treatment for 15-30 min, and then drying the bearing at 120 ℃ for 10-20 min;
(2) Electron beam physical vapor deposition of high entropy alloy coatings: placing a high-entropy alloy target and a bearing in an electron beam vapor deposition device, adjusting the distance between the target and the bearing to be 300-500 mm, shielding the position of the bearing by a baffle plate, closing a vacuum chamber door and an air inlet valve, starting a power supply, sequentially starting a mechanical pump and a vacuum gauge, starting a molecular pump when the vacuum degree is reduced to below 5Pa, waiting for the vacuum degree to be reduced to 6.5X10 -3 Pa, preheating the bearing to 600-800 ℃ for 30min, then starting pre-evaporation, removing the baffle plate for formal evaporation after the target forms a stable molten pool, and adjusting process parameters to control the evaporation rate of the target; and after the deposition is finished, waiting for the bearing to naturally cool to room temperature, and removing vacuum to obtain the bearing with the deposited coating.
Preferably, in the step (2), the high-entropy alloy target material is FeCrCoNiAlMo x, and the molar ratio of each element is Fe: cr: co: ni: al: mo=1-2:1-2:0.25-1.5.
Preferably, in the step (2), the mol ratio of each element in the FeCrCoNiAlMo x target is Fe: cr: co: ni: al: mo=1:1:1:1:1:0.25 to 1.5.
Preferably, in the step (2), the process parameters of the electron beam physical vapor deposition process are as follows: the voltage is 6-12 KV, the beam current is 100-200 mA, the incident angle of vapor particles is 30-60 degrees, the deposition time is 20-60 min, and the deposition rate is 20-750 nm/min.
Preferably, the thickness of the high-entropy alloy coating prepared in the step (2) is 20-40 μm.
Preferably, the material of the bearing is any one of 8Cr4Mo4V bearing steel, 9Cr18 bearing steel, G20CrNi2MoA bearing steel, GCr15 bearing steel, M50NiL bearing steel and AISI 52100 bearing steel.
The invention has the beneficial effects that:
(1) According to the invention, the EB-PVD process is adopted to prepare FeCrCoNiAlMo x coating on the surface of the bearing steel, the interface of the coating and the substrate is mainly metallurgical bonding, bonding is performed in a metal bond mode, the bonding force is strong, the stability is good, the surface is smooth, the heat conduction direction can be regulated and controlled to be consistent by controlling the parameters of the EBPVD, so that the generation of dendrite structure is initiated, the coating structure is mainly single dendrite, the coating preparation process is performed under vacuum condition, the coating is effectively prevented from being polluted and oxidized, and excellent wear resistance and long service life are provided for the coating;
(2) The EB-PVD technology in the invention can prepare a plurality of substances which are difficult to prepare or even impossible to prepare by the conventional metallurgical technology because the gas phase particles can not obey the solubility rule which the gas phase particles have to obey in the liquid phase, and has more advantages compared with the laser cladding technology (the laser cladding technology is used for generating the liquid phase by rapidly heating and cooling alloy or powder, and the formed coating is mainly metallurgical or physical combination);
(3) The invention carries out pre-evaporation treatment before formal evaporation, and aims to form a molten pool with uniform and stable size, and an uneven volcanic pit structure can be formed after solidification of the molten pool, so that the volcanic pit structure can be firmly combined with a film subjected to follow-up formal evaporation, the coating is prevented from falling off in the use process, and the wear resistance and the service life of the coating are greatly improved;
(4) In the aspect of the preparation process, the bearing steel base material is subjected to preheating treatment before electron beam physical vapor deposition treatment, so that the stress generated by the coating in the subsequent deposition process is effectively reduced, microcracks in the coating are eliminated, and the service performance of the coating is improved; the coating is easier to load on the surface of the matrix by the front surface treatment such as ultrasonic cleaning, so that the coating is prevented from being leaked, and vapor atoms are more beneficial to being deposited on the surface of the matrix;
(5) The thermal expansion coefficient is a main influencing factor of firm combination of the coating and the matrix, the Fe-based high-entropy alloy coating is selected, the thermal expansion coefficient difference between the Fe-based high-entropy alloy coating and the bearing steel matrix is smaller, an intermediate coating with physical properties between the coating and the matrix is not required to be introduced to transition so as to ensure that the coating is not easy to fall off, the physical properties between the coating and the matrix are small in difference, the compatibility is good, the matching degree is high, the coating can be firmly attached to the matrix and is not easy to fall off, in addition, the stress can be avoided due to the small difference of the thermal expansion coefficient, and thus, the generation of cracks is avoided;
(6) According to the invention, al is added into the Fe-based high-entropy alloy to promote the generation of a compact alumina film, and the layer of the alumina film can resist the external force abrasion action in the abrasion process, so that the abrasion mechanism is influenced, and the abrasion resistance of the coating is improved; because the bearing generates high temperature by friction heat in the service abrasion process and increases abrasion, the abrasion generated under the action of high temperature can be restrained by adding Mo, so that the high temperature performance of the coating is improved.
The invention effectively improves the bonding strength and the wear resistance of the coating by combining and selecting the element components of the high-entropy alloy coating and matching with the improvement of the preparation process, and the process method is easy to implement, and is particularly suitable for the technical field of bearing surface modification.
Drawings
FIG. 1 is a SEM cross-sectional morphology of the high entropy coating prepared in example 2;
FIG. 2 is a graph comparing the friction coefficients of the high entropy coatings prepared in examples 1-3 and comparative example 1;
FIG. 3 is a plot of friction volume versus the high entropy coating prepared in examples 1-3 and comparative example 1;
FIG. 4 is a graph comparing the abrasion rates of the high entropy coatings prepared in examples 1-3 and comparative example 1;
FIG. 5 is a graph comparing the hardness of the high entropy coatings prepared in examples 1-3 and comparative example 1.
Detailed Description
The technical scheme of the invention is further described in detail by examples.
Example 1
A method for preparing a high-entropy coating for a high-speed rail bearing by utilizing an electron beam physical vapor deposition technology comprises the following specific preparation steps:
(1) Pretreatment of bearing surfaces: dipping absolute ethyl alcohol into dry rag to wipe the surface of the bearing to remove large particle pollutants, then immersing the bearing into a plastic tank filled with acetone solution for ultrasonic treatment for 15min, pouring out the acetone solution, and finally drying in a drying oven at 120 ℃ for 20min to prepare electron beam physical vapor deposition treatment;
(2) Electron beam physical vapor deposition of high entropy alloy coatings: placing a copper crucible filled with a high-entropy alloy target and a bearing in an electron beam vapor deposition device, adjusting the distance between the target and the bearing (the target distance is 300 mm), shielding the position of the bearing by a baffle, and closing a vacuum chamber door and an air inlet valve. Starting a power supply, starting a mechanical pump and a vacuum gauge in sequence, starting a molecular pump when the vacuum degree is reduced to below 5Pa, and waiting for the vacuum degree to be reduced to 6.5 multiplied by 10 -3 Pa. And then heating the bearing to 600 ℃ by using resistance wires, preheating for 30min, then starting pre-evaporation, and removing the baffle plate for formal evaporation after the target material forms a stable molten pool. The adjusting process parameters are as follows: the voltage is 6KV, the beam current is 100 mA, the incident angle of vapor particles is 30 degrees, the deposition time is 20min, and the deposition rate is 20 nm/min, so that the evaporation rate of a target material is controlled. And after the deposition is finished, waiting for the bearing to naturally cool to room temperature, unloading vacuum, and opening the vacuum chamber to take out the bearing with the deposited coating.
The target material of the high-entropy alloy in the step (2) is FeCrCoNiAlMo x, and the mol ratio of each element is Fe: cr: co: ni: al: mo=1.5:1.5:1.5:1.5:1.5:0.375.
The thickness of the high-entropy alloy coating prepared in the step (2) is 20-40 mu m.
The bearing material used in this example was 8Cr4Mo4V bearing steel.
The high entropy alloy coating in this example FeCrCoNiAlMo x had an average coefficient of friction of 0.514, a friction volume of 0.281mm 3, a wear rate of 8.29mm 3·N-1·m-1 and a hardness of 660 HV.
Example 2
A method for preparing a high-entropy coating for a high-speed rail bearing by utilizing an electron beam physical vapor deposition technology comprises the following specific preparation steps:
(1) Pretreatment of bearing surfaces: dipping absolute ethyl alcohol into dry rag to wipe the surface of the bearing, then immersing the bearing into a plastic tank filled with acetone solution for ultrasonic treatment for 20min hours, pouring out the acetone solution, and finally drying in a drying oven at 120 ℃ for 15 minutes to prepare electron beam physical vapor deposition treatment;
(2) Electron beam physical vapor deposition of high entropy alloy coatings: placing a copper crucible filled with a high-entropy alloy target and a bearing in an electron beam vapor deposition device, adjusting the distance between the target and the bearing (the target distance is 400 mm), shielding the position of the bearing by a baffle, and closing a vacuum chamber door and an air inlet valve. Starting a power supply, starting a mechanical pump and a vacuum gauge in sequence, starting a molecular pump when the vacuum degree is reduced to below 5Pa, and waiting for the vacuum degree to be reduced to 6.5 multiplied by 10 -3 Pa. And then heating the bearing to 700 ℃ by using resistance wires, preheating for 30min, then starting pre-evaporation, and removing the baffle plate for formal evaporation after the target material forms a stable molten pool. The adjusting process parameters are as follows: the voltage is 8KV, the beam current is 150 mA, the incident angle of vapor particles is 45 degrees, the deposition time is 40 min, and the deposition rate is 350 nm/min so as to control the evaporation rate of the target material. And after the deposition is finished, waiting for the bearing to naturally cool to room temperature, unloading vacuum, and opening the vacuum chamber to take out the bearing with the deposited coating.
The target material of the high-entropy alloy in the step (2) is FeCrCoNiAlMo x, and the mol ratio of each element is Fe: cr: co: ni: al: mo=2:2:2:2:2:1.5.
The thickness of the high-entropy alloy coating prepared in the step (2) is 20-40 mu m.
The bearing material used in this example was GCr15 bearing steel.
This example is the preferred embodiment, and FeCrCoNiAlMo x high-entropy alloy coating has an average coefficient of friction of 0.443, a friction volume of 0.119mm 3, a wear rate of 4.41mm 3·N-1·m-1, and a hardness of 706 HV.
Example 3
A method for preparing a high-entropy coating for a high-speed rail bearing by utilizing an electron beam physical vapor deposition technology comprises the following specific preparation steps:
(1) Pretreatment of bearing surfaces: dipping absolute ethyl alcohol into dry rag to wipe the surface of the bearing, then immersing the bearing into a plastic tank filled with acetone solution for ultrasonic treatment for 30 min hours, pouring out the acetone solution, and finally drying in a drying oven at 120 ℃ for 20 minutes to prepare electron beam physical vapor deposition treatment;
(2) Electron beam physical vapor deposition of high entropy alloy coatings: placing a copper crucible filled with a high-entropy alloy target and a bearing in an electron beam vapor deposition device, adjusting the distance between the target and the bearing (the target distance is 500 mm), shielding the position of the bearing by a baffle, and closing a vacuum chamber door and an air inlet valve. Starting a power supply, starting a mechanical pump and a vacuum gauge in sequence, starting a molecular pump when the vacuum degree is reduced to below 5Pa, and waiting for the vacuum degree to be reduced to 6.5 multiplied by 10 -3 Pa. And then heating the bearing to 800 ℃ by using a resistance wire, preheating for 30min, then starting pre-evaporation, and removing the baffle plate for formal evaporation after the target material forms a stable molten pool. The adjusting process parameters are as follows: the voltage is 6-12 KV, the beam current is 100-200 mA, the incident angle of vapor particles is 30-60 degrees, the deposition time is 20-60 min, and the deposition rate is 20-750 nm/min so as to control the evaporation rate of a target material. And after the deposition is finished, waiting for the bearing to naturally cool to room temperature, unloading vacuum, and opening the vacuum chamber to take out the bearing with the deposited coating.
The target material of the high-entropy alloy in the step (2) is FeCrCoNiAlMo x, and the mol ratio of each element is Fe: cr: co: ni: al: mo=1:1:1:1:1:1.5.
The thickness of the high-entropy alloy coating prepared in the step (2) is 20-40 mu m.
The bearing material used in this example was M50NiL bearing steel.
In this example FeCrCoNiAlMo x the high-entropy alloy coating has an average coefficient of friction of 0.494, a friction volume of 0.177 mm 3, a wear rate of 6.28 mm 3·N-1·m-1 and a hardness of 681HV.
Comparative example 1
The difference from the best example 2 is that a FeCrCoNiAlMo x high-entropy alloy coating is prepared on GCr15 bearing steel by adopting a thermal spraying method, feCrCoNiAlMo0.75 high-entropy alloy powder raw material is sprayed on the surface of the bearing steel by adopting a thermal spraying device, and the thermal spraying process parameters are as follows: the spraying distance is 120 cm, the argon flow is 80L min -1, the hydrogen flow is 20L min -1, the input current is 500A, the voltage is 70V, and the spraying distance is 100mm.
The average wear coefficient of the FeCrCoNiAlMo x high entropy alloy coating in comparative example 1 was 0.687, the friction volume was 0.456mm 3, the wear rate was 10.4mm 3·N-1·m-1, and the hardness was 609HV.
Referring to the drawings in the specification, wherein FIG. 1 shows a coating prepared by the method of example 2, the area cross-section of which consists essentially of a single dendrite; FIG. 2 shows that the coatings prepared by the methods of examples 1-3 have better average coefficient of friction, wear rate and friction volume than comparative example 1, and in particular example 2 has the best performance; FIG. 3 shows that the coatings prepared by the methods of examples 1-3 all have higher hardness than comparative example 1, especially example 2.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.

Claims (4)

1. The method for preparing the high-entropy coating for the high-speed rail bearing by utilizing the electron beam physical vapor deposition technology is characterized by comprising the following steps of:
(1) Pretreatment of the bearing surface;
(2) Electron beam physical vapor deposition of high entropy alloy coatings: placing a high-entropy alloy target and a bearing in an electron beam vapor deposition device, shielding the bearing by a baffle, preheating the bearing to 600-800 ℃ after controlling the vacuum degree, then starting pre-evaporation, removing the baffle for formal evaporation after the target forms a stable molten pool, waiting for the bearing to naturally cool to room temperature after deposition is finished, and discharging vacuum to obtain a bearing of a deposited coating;
In the step (2), the high-entropy alloy target material is FeCrCoNiAlMo x, and the mol ratio of each element is Fe: cr: co: ni: al: mo=1-2:1-2:0.25-1.5;
In the step (2), the target distance between the target and the bearing is regulated to 300-500 mm, and the vacuum degree is controlled to be 6.5X10 -3 Pa;
In the step (2), the process parameters of the electron beam physical vapor deposition treatment are as follows: the voltage is 6-12 kV, the beam current is 100-200 mA, the incident angle of vapor particles is 30-60 degrees, the deposition time is 20-60 min, and the deposition rate is 20-750 nm/min.
2. The method for preparing the high-entropy coating for the high-speed rail bearing by utilizing the electron beam physical vapor deposition technology according to claim 1, wherein in the step (1), absolute ethyl alcohol is utilized to wipe the surface of the bearing, then the bearing is immersed in an acetone solution for ultrasonic treatment for 15-30 min, and then the bearing is dried at 120 ℃ for 10-20 min.
3. The method for preparing the high-entropy coating for the high-speed rail bearing by utilizing the electron beam physical vapor deposition technology according to claim 1, wherein the thickness of the high-entropy alloy coating prepared in the step (2) is 20-40 μm.
4. The method for preparing the high-entropy coating for the high-speed rail bearing by using the electron beam physical vapor deposition technology according to claim 1, wherein the material of the bearing is any one of 8Cr4Mo4V bearing steel, 9Cr18 bearing steel, G20CrNi2MoA bearing steel, GCr15 bearing steel, M50NiL bearing steel and AISI 52100 bearing steel.
CN202311011587.1A 2023-08-11 2023-08-11 Method for preparing high-entropy coating for high-speed rail bearing by utilizing electron beam physical vapor deposition technology Active CN117144302B (en)

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