CN117130098B - Compact adiabatic optical isolator - Google Patents
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Abstract
本发明属于集成光学技术领域,具体涉及一种紧凑型绝热光隔离器。本发明包括第一包层、第二包层、第三包层、第一硅芯及第二硅芯;第一包层的上端分别设置第一硅芯及第二硅芯;第一硅芯及第二硅芯的四周均设置第二包层;第一硅芯及第二硅芯的上端设置第三包层;沿光束传播方向,第一硅芯为宽波导,第二硅芯为窄波导,第一硅芯、第二硅芯均包括依次连接的输入端、第一绝热耦合器过渡结构、绝热耦合器转换结构、第二绝热耦合器过渡结构及输出端;第一绝热耦合器过渡结构用于实现输入端窄波导中TE0模式的绝热传输;绝热耦合器转换结构将窄波导中的TE0模式转换成宽波导中的TM0模式;第二绝热耦合器过渡结构用于实现宽波导中TM0模式的绝热传输。
The present invention belongs to the field of integrated optical technology, and specifically relates to a compact adiabatic optical isolator. The present invention comprises a first cladding, a second cladding, a third cladding, a first silicon core and a second silicon core; the first silicon core and the second silicon core are respectively arranged at the upper end of the first cladding; the second cladding is arranged around the first silicon core and the second silicon core; the third cladding is arranged at the upper end of the first silicon core and the second silicon core; along the propagation direction of the light beam, the first silicon core is a wide waveguide, and the second silicon core is a narrow waveguide, and the first silicon core and the second silicon core both comprise an input end, a first adiabatic coupler transition structure, an adiabatic coupler conversion structure, a second adiabatic coupler transition structure and an output end connected in sequence; the first adiabatic coupler transition structure is used to realize the adiabatic transmission of the TE 0 mode in the narrow waveguide at the input end; the adiabatic coupler conversion structure converts the TE 0 mode in the narrow waveguide into the TM 0 mode in the wide waveguide; the second adiabatic coupler transition structure is used to realize the adiabatic transmission of the TM 0 mode in the wide waveguide.
Description
技术领域Technical Field
本发明属于集成光学技术领域,具体涉及一种紧凑型绝热光隔离器。The invention belongs to the technical field of integrated optics, and in particular relates to a compact adiabatic optical isolator.
背景技术Background Art
在集成光子回路中,由于种种原因会产生与正向传输光方向相反的反射光,例如当光信号在不同结构之间传输时,将会在连接处产生与原传输方向相反的反射光,导致其他模式或者辐射模式的激发,从而破坏传输稳定性并给器件带来各种不良影响。光隔离器在保证光前向传输的同时通过阻挡反射光到达激光腔来降低信号噪声,保持系统稳定性,通常放置在激光源和后续器件之间,广泛用于光通信系统,在论文D.Jalas,A.Petrov,M.Eich,W.Freude,S.Fan,Z.Yu,R.Baets,M.A.Melloni,J.D.Joannopoulos,M.Vanwolleghem,C.R.Doerr,and H.Renner,“What is—and what is not—an opticalisolator,”Nature Photon,7(8),579–582(2013).体现了这一点。In integrated photonic circuits, reflected light in the opposite direction of the forward transmission light may be generated for various reasons. For example, when an optical signal is transmitted between different structures, reflected light in the opposite direction of the original transmission direction will be generated at the connection, leading to the excitation of other modes or radiation modes, thereby destroying the transmission stability and causing various adverse effects on the device. Optical isolators reduce signal noise and maintain system stability by blocking reflected light from reaching the laser cavity while ensuring forward transmission of light. They are usually placed between the laser source and subsequent devices and are widely used in optical communication systems. In the paper D. Jalas, A. Petrov, M. Eich, W. Freude, S. Fan, Z. Yu, R. Baets, M. This is reflected in A.Melloni, JD Joannopoulos, M.Vanwolleghem, CR Doerr, and H.Renner, “What is—and what is not—an optical isolator,” Nature Photon, 7(8), 579–582 (2013).
目前光隔离器作为分立器件,器件尺寸大、成本高、封装困难。随着集成光学技术的发展,光隔离器需要实现单片集成,以减小器件尺寸,提高集成度和可靠性,并降低成本。基于绝热模式演化的绝热器件由于具有很宽的带宽和很好的制造公差,绝热器件在大规模光子集成芯片中占有举足轻重的地位,在论文T.-L.Liang,Y.Tu,X.Chen,Y.Huang,Q.Bai,Y.Zhao,J.Zhang,Y.Yuan,J.Li,F.Yi,W.Shao,and S.-T.Ho,“A Fully Numerical Methodfor Designing EfficientAdiabatic Mode Evolution Structures(Adiabatic Taper,Coupler,Splitter,Mode Converter)Applicable to Complex Geometries,”J.Lightw.Technol.,39(17),5531-5547(2021).体现了这一点。但是为了保证绝热模式演化从而不激发其他模式,绝热光隔离器需要很大的器件尺寸,这就与光子集成芯片朝更高集成度的发展趋势背道而驰。At present, optical isolators are discrete devices with large device size, high cost and difficult packaging. With the development of integrated optical technology, optical isolators need to be integrated on a single chip to reduce device size, improve integration and reliability, and reduce cost. Adiabatic devices based on adiabatic mode evolution have a very wide bandwidth and good manufacturing tolerance. Adiabatic devices play an important role in large-scale photonic integrated chips. This is reflected in the paper T.-L. Liang, Y. Tu, X. Chen, Y. Huang, Q. Bai, Y. Zhao, J. Zhang, Y. Yuan, J. Li, F. Yi, W. Shao, and S.-T. Ho, "A Fully Numerical Method for Designing Efficient Adiabatic Mode Evolution Structures (Adiabatic Taper, Coupler, Splitter, Mode Converter) Applicable to Complex Geometries," J. Lightw. Technol., 39 (17), 5531-5547 (2021). However, in order to ensure the evolution of the adiabatic mode and thus not excite other modes, the adiabatic optical isolator requires a large device size, which runs counter to the development trend of photonic integrated chips towards higher integration.
发明内容Summary of the invention
本发明的目的在于提供一种紧凑型绝热光隔离器,实现光隔离及实现不同模式之间的转换,而且还可以实现不同波导之间模式能量的传输。解决目前光隔离器“尺寸大、集成度低”的问题,旨在设计尺寸小、损耗低、传输效率高、结构简单的光隔离器。The purpose of the present invention is to provide a compact adiabatic optical isolator, which can achieve optical isolation and conversion between different modes, and can also achieve the transmission of mode energy between different waveguides. The problem of "large size and low integration" of the current optical isolator is solved, and the purpose is to design an optical isolator with small size, low loss, high transmission efficiency and simple structure.
本发明为实现上述发明目的,采取的技术方案如下:一种紧凑型绝热光隔离器,包括第一包层、第二包层、第三包层、第一硅芯及第二硅芯;所述第一包层的上端分别设置第一硅芯及第二硅芯;所述第一硅芯及第二硅芯的四周均设置第二包层;所述第一硅芯及第二硅芯的上端设置第三包层;沿光束传播方向,第一硅芯为宽波导,第二硅芯为窄波导,所述第一硅芯、第二硅芯均包括依次连接的输入端、第一绝热耦合器过渡结构、绝热耦合器转换结构、第二绝热耦合器过渡结构及输出端;所述第一绝热耦合器过渡结构用于实现输入端窄波导中TE0模式的绝热传输;所述绝热耦合器转换结构将窄波导中的TE0模式转换成宽波导中的TM0模式;所述第二绝热耦合器过渡结构用于实现宽波导中TM0模式的绝热传输。In order to achieve the above-mentioned invention object, the technical scheme adopted by the present invention is as follows: a compact adiabatic optical isolator comprises a first cladding, a second cladding, a third cladding, a first silicon core and a second silicon core; the first silicon core and the second silicon core are respectively arranged at the upper end of the first cladding; the second cladding is arranged around the first silicon core and the second silicon core; the third cladding is arranged at the upper end of the first silicon core and the second silicon core; along the propagation direction of the light beam, the first silicon core is a wide waveguide, and the second silicon core is a narrow waveguide, and the first silicon core and the second silicon core each comprise an input end, a first adiabatic coupler transition structure, an adiabatic coupler conversion structure, a second adiabatic coupler transition structure and an output end connected in sequence; the first adiabatic coupler transition structure is used to realize the adiabatic transmission of the TE 0 mode in the narrow waveguide at the input end; the adiabatic coupler conversion structure converts the TE 0 mode in the narrow waveguide into the TM 0 mode in the wide waveguide; the second adiabatic coupler transition structure is used to realize the adiabatic transmission of the TM 0 mode in the wide waveguide.
进一步的作为本发明的优选技术方案,入射光束波长设置为1550nm;所述第一硅芯与第二硅芯的折射率nSi=3.455,厚度均为h2=220nm;所述输入端和输出端是平行板波导;在输入端的方向,所述第一硅芯的宽度为WI=0.54μm;所述第二硅芯的宽度为wI=0.46μm,其中WI+wI=1μm,第一硅芯与第二硅芯之间的间隙G=150nm;在输出端的方向,所述第一硅芯的宽度为WO=0.7μm,所述第二硅芯的宽度为wO=0.3μm,其中WO+wO=1μm,第一硅芯与第二硅芯之间的间隙G=150nm。这两端长度的选择对整个结构没有影响,可以任意选择。As a further preferred technical solution of the present invention, the wavelength of the incident light beam is set to 1550nm; the refractive index of the first silicon core and the second silicon core is n Si =3.455, and the thickness is h 2 =220nm; the input end and the output end are parallel plate waveguides; in the direction of the input end, the width of the first silicon core is W I =0.54μm; the width of the second silicon core is w I =0.46μm, where W I +w I =1μm, and the gap between the first silicon core and the second silicon core is G =150nm; in the direction of the output end, the width of the first silicon core is W O =0.7μm, the width of the second silicon core is w O =0.3μm, where W O +w O =1μm, and the gap between the first silicon core and the second silicon core is G =150nm. The selection of the lengths of these two ends has no effect on the entire structure and can be selected arbitrarily.
进一步的作为本发明的优选技术方案,所述第一包层的材料为SiO2,折射率nSiO2=1.445,厚度为h1,宽度W0>WI+wI+G;第二包层的材料为Air,折射率nAir=1,厚度为h2=220nm;第三包层的材料为Ce:YIG,折射率nCe:YIG=2.2,厚度为h3,宽度W0。Further as a preferred technical solution of the present invention, the material of the first cladding is SiO 2 , with a refractive index of n SiO 2 =1.445, a thickness of h 1 , and a width of W 0 >W I +w I +G; the material of the second cladding is Air, with a refractive index of n Air =1, and a thickness of h 2 =220 nm; the material of the third cladding is Ce:YIG, with a refractive index of n Ce:YIG =2.2, a thickness of h 3 , and a width of W 0 .
进一步的作为本发明的优选技术方案,所述第一绝热耦合器过渡结构在光束传播方向上包含一个片段,由直线连接宽度W1=0.54μm和W2,其中0.54μm<W2<0.595μm,长度Lt1=13.696μm。Further as a preferred technical solution of the present invention, the first adiabatic coupler transition structure comprises a segment in the beam propagation direction, connected by a straight line with widths W 1 =0.54 μm and W 2 , wherein 0.54 μm<W 2 <0.595 μm, and length L t1 =13.696 μm.
进一步的作为本发明的优选技术方案,所述绝热耦合器转换结构在光束传播方向上包含十个片段:片段一由直线连接宽度W2和Wa=0.595μm,长度L1=43.57μm;片段二由直线连接宽度Wa=0.595μm和Wb=0.597μm,长度L2=68.592μm;片段三由直线连接宽度Wb=0.597μm和Wc=0.598μm,长度L3=167.485μm;片段四由直线连接宽度Wc=0.598μm和Wd=0.599μm,长度L4=137.295μm;片段五由直线连接宽度Wd=0.599μm和We=0.60μm,长度L5=151.88μm;片段六由直线连接宽度We=0.60μm和Wf=0.601μm,长度L6=143.955μm;片段七由直线连接宽度Wf=0.601μm和Wg=0.602μm,长度L7=81.77μm;片段八由直线连接宽度Wg=0.602μm和Wh=0.604μm,长度L8=75.125μm;片段九由直线连接宽度Wh=0.604μm和Wk=0.608μm,长度L9=38.488μm;片段十由直线连接宽度Wk=0.608μm和W3,长度L10=12.982μm,片段一至片段十的总长度Lt2=921.142μm。Further, as a preferred technical solution of the present invention, the adiabatic coupler conversion structure comprises ten segments in the beam propagation direction: segment one is connected by a straight line with a width of W2 and Wa =0.595μm and a length of L1 =43.57μm; segment two is connected by a straight line with a width of Wa =0.595μm and Wb =0.597μm and a length of L2 =68.592μm; segment three is connected by a straight line with a width of Wb =0.597μm and Wc =0.598μm and a length of L3 =167.485μm; segment four is connected by a straight line with a width of Wc =0.598μm and Wd =0.599μm and a length of L4 =137.295μm; segment five is connected by a straight line with a width of Wd =0.599μm and We =0.60μm and a length of L5 =167.485μm. =151.88μm; segment six is connected by a straight line with a width of We =0.60μm and Wf =0.601μm, and a length of L6 =143.955μm; segment seven is connected by a straight line with a width of Wf =0.601μm and Wg =0.602μm, and a length of L7 =81.77μm; segment eight is connected by a straight line with a width of Wg =0.602μm and Wh =0.604μm, and a length of L8 =75.125μm; segment nine is connected by a straight line with a width of Wh =0.604μm and Wk =0.608μm, and a length of L9 =38.488μm; segment ten is connected by a straight line with a width of Wk =0.608μm and W3 , and a length of L10 =12.982μm. The total length of segments one to ten is Lt2 =921.142μm.
进一步的作为本发明的优选技术方案,所述第二绝热耦合器过渡结构在光束传播方向上包含一个片段,由直线连接宽度W3和W4=0.70μm,其中0.608μm<W3<0.7μm,长度Lt3=2.813μm。Further as a preferred technical solution of the present invention, the second adiabatic coupler transition structure comprises a segment in the beam propagation direction, connected by a straight line with widths W 3 and W 4 = 0.70 μm, wherein 0.608 μm<W 3 <0.7 μm, and length L t3 = 2.813 μm.
进一步的作为本发明的优选技术方案,W2=0.59μm。Further, as a preferred technical solution of the present invention, W 2 =0.59 μm.
进一步的作为本发明的优选技术方案,W3=0.63μm。Further, as a preferred technical solution of the present invention, W 3 =0.63 μm.
本发明所述的一种紧凑型绝热光隔离器,采用以上技术方案与现有技术相比,具有以下技术效果:The compact adiabatic optical isolator of the present invention adopts the above technical solution and has the following technical effects compared with the prior art:
(1)本发明紧凑型绝热光隔离器的绝热耦合器转换结构将窄波导中的TE0模式转换成宽波导中的TM0模式,实现了不同波导之间TE0模式和TM0模式之间的转换连接,不仅实现了不同模式之间的转换,而且实现了不同波导之间模式能量的传输。(1) The adiabatic coupler conversion structure of the compact adiabatic optical isolator of the present invention converts the TE 0 mode in a narrow waveguide into the TM 0 mode in a wide waveguide, realizing the conversion connection between the TE 0 mode and the TM 0 mode between different waveguides, which not only realizes the conversion between different modes, but also realizes the transmission of mode energy between different waveguides.
(2)本发明提出的绝热光隔离器只需要总长度108μm就可以实现90%的功率转换效率,而传统设计需要1540μm才能实现90%的功率传输效率,本发明绝热光隔离器的器件尺寸相比于现有的设计整整缩短了14倍,可以将集成度推向更高的水平。(2) The adiabatic optical isolator proposed in the present invention only requires a total length of 108 μm to achieve a power conversion efficiency of 90%, while the traditional design requires 1540 μm to achieve a power transmission efficiency of 90%. The device size of the adiabatic optical isolator of the present invention is shortened by 14 times compared with the existing design, which can push the integration level to a higher level.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本发明实施例的绝热光隔离器的输入端示意图;FIG1 is a schematic diagram of an input end of an adiabatic optical isolator according to an embodiment of the present invention;
图2为本发明实施例的绝热光隔离器的输出端示意图;FIG2 is a schematic diagram of an output end of an adiabatic optical isolator according to an embodiment of the present invention;
图3为本发明实施例的绝热光隔离器各个波导宽度W下对应的各个模式的有效折射率示意图;3 is a schematic diagram of the effective refractive index of each mode corresponding to each waveguide width W of the adiabatic optical isolator according to an embodiment of the present invention;
图4为本发明实施例的绝热光隔离器第一硅芯与第二硅芯俯视图;FIG4 is a top view of a first silicon core and a second silicon core of an adiabatic optical isolator according to an embodiment of the present invention;
图5为本发明模式转换效率与传统设计即线性形状连接的对比示意图;FIG5 is a schematic diagram showing a comparison of the mode conversion efficiency of the present invention and the conventional design, i.e., a linear shape connection;
其中,附图标记为:1-第一包层;2-第二包层;3-第三包层;4-第一硅芯;5-第二硅芯;6-输入端;7-第一绝热耦合器过渡结构;8-绝热耦合器转换结构;9-第二绝热耦合器过渡结构;10-输出端。Among them, the figure markings are: 1-first cladding; 2-second cladding; 3-third cladding; 4-first silicon core; 5-second silicon core; 6-input end; 7-first adiabatic coupler transition structure; 8-adiabatic coupler conversion structure; 9-second adiabatic coupler transition structure; 10-output end.
具体实施方式DETAILED DESCRIPTION
下面结合附图详细的描述本发明的作进一步的解释说明,以使本领域的技术人员可以更深入地理解本发明并能够实施,但下面通过参考实例仅用于解释本发明,不作为本发明的限定。The present invention is further explained below in detail with reference to the accompanying drawings so that those skilled in the art can more deeply understand the present invention and be able to implement it. However, the following reference examples are only used to explain the present invention and are not intended to limit the present invention.
如图1-2所示,一种紧凑型绝热光隔离器,包括第一包层1、第二包层2、第三包层3、第一硅芯4及第二硅芯5;第一包层1的上端分别设置第一硅芯4及第二硅芯5;第一硅芯4及第二硅芯5的四周均设置第二包层2;第一硅芯4及第二硅芯5的上端设置第三包层3;沿光束传播方向,第一硅芯4为宽波导,第二硅芯5为窄波导,第一硅芯4、第二硅芯5均包括依次连接的输入端6、第一绝热耦合器过渡结构7、绝热耦合器转换结构8、第二绝热耦合器过渡结构9及输出端10;第一绝热耦合器过渡结构7用于实现输入端6窄波导中TE0模式的绝热传输;绝热耦合器转换结构8将窄波导中的TE0模式转换成宽波导中的TM0模式;第二绝热耦合器过渡结构9用于实现宽波导中TM0模式的绝热传输。As shown in Fig. 1-2, a compact adiabatic optical isolator comprises a first cladding 1, a second cladding 2, a third cladding 3, a first silicon core 4 and a second silicon core 5; the first silicon core 4 and the second silicon core 5 are respectively arranged at the upper end of the first cladding 1; the second cladding 2 is arranged around the first silicon core 4 and the second silicon core 5; the third cladding 3 is arranged at the upper end of the first silicon core 4 and the second silicon core 5; along the propagation direction of the light beam, the first silicon core 4 is a wide waveguide, and the second silicon core 5 is a narrow waveguide, and the first silicon core 4 and the second silicon core 5 each comprise an input end 6, a first adiabatic coupler transition structure 7, an adiabatic coupler conversion structure 8, a second adiabatic coupler transition structure 9 and an output end 10 connected in sequence; the first adiabatic coupler transition structure 7 is used to realize the adiabatic transmission of the TE 0 mode in the narrow waveguide of the input end 6; the adiabatic coupler conversion structure 8 converts the TE 0 mode in the narrow waveguide into the TM 0 mode in the wide waveguide; the second adiabatic coupler transition structure 9 is used to realize the adiabatic transmission of the TM 0 mode in the wide waveguide.
入射光束波长设置为1550nm;第一硅芯4与第二硅芯5的折射率nSi=3.455,厚度均为h2=220nm;输入端6和输出端10是平行板波导;在输入端6的方向,第一硅芯4的宽度为WI=0.54μm;第二硅芯5的宽度为wI=0.46μm,其中WI+wI=1μm,第一硅芯4与第二硅芯5之间的间隙G=150nm;在输出端10的方向,第一硅芯4的宽度为WO=0.7μm,第二硅芯5的宽度为wO=0.3μm,其中WO+wO=1μm,第一硅芯4与第二硅芯5之间的间隙G=150nm。这两端长度的选择对整个结构没有影响,可以任意选择。The wavelength of the incident light beam is set to 1550nm; the refractive index of the first silicon core 4 and the second silicon core 5 is n Si =3.455, and the thickness is h 2 =220nm; the input end 6 and the output end 10 are parallel plate waveguides; in the direction of the input end 6, the width of the first silicon core 4 is W I =0.54μm; the width of the second silicon core 5 is w I =0.46μm, where W I + w I =1μm, and the gap between the first silicon core 4 and the second silicon core 5 is G =150nm; in the direction of the output end 10, the width of the first silicon core 4 is W O =0.7μm, the width of the second silicon core 5 is w O =0.3μm, where W O + w O =1μm, and the gap between the first silicon core 4 and the second silicon core 5 is G =150nm. The selection of the length of these two ends has no effect on the entire structure and can be selected arbitrarily.
如图3所示,本发明计算了宽波导为第一硅芯4的宽度W从输入端宽度WI=0.54μm变化到输出端宽度WO=0.7μm,窄波导为第二硅芯5的宽度w从输入端宽wI=0.46μm变化到输出端宽度wO=0.3μm,各个模式对应的有效折射率变化曲线图,该图给出了宽波导第一硅芯4和窄波导第二硅芯5中TE0模式和TM0模式的有效传播折射率随波导宽度W的变化。从图上黑色实线可以看出,窄波导中的TE0模式在宽度W=0.6μm附近转换成宽波导中的TM0模式。As shown in FIG3 , the present invention calculates the change of the width W of the wide waveguide, which is the first silicon core 4, from the input end width W I = 0.54 μm to the output end width W O = 0.7 μm, and the change of the width w of the narrow waveguide, which is the second silicon core 5, from the input end width W I = 0.46 μm to the output end width W O = 0.3 μm, and the effective refractive index change curve corresponding to each mode, which shows the change of the effective propagation refractive index of the TE 0 mode and the TM 0 mode in the wide waveguide first silicon core 4 and the narrow waveguide second silicon core 5 with the waveguide width W. It can be seen from the black solid line in the figure that the TE 0 mode in the narrow waveguide is converted into the TM 0 mode in the wide waveguide near the width W = 0.6 μm.
为了实现窄波导中的TE0模式和宽波导中的TM0模式之间的转换:第一步、设计一个“第一绝热耦合器过渡结构7”实现窄波导中TE0模式的绝热传输;第二、设计一个“绝热耦合器转换结构8”将窄波导中的TE0模式转换成宽波导中的TM0模式;第三、设计一个“第二绝热耦合器过渡结构9”实现宽波导中TM0模式的绝热传输。通过以上三步的设计,可以实现光隔离,即可以将窄波导中的TE0模式传输到宽波导中的TM0模式:不仅实现了不同模式之间的转换,而且实现了不同波导之间模式能量的传输。与此同时,为了提高光子集成芯片的集成度实现更小尺寸以满足新一代信息技术发展的需求,设计一个尽可能短的绝热光隔离器将窄波导中的TE0模式转换成宽波导中的TM0模式。In order to realize the conversion between the TE 0 mode in the narrow waveguide and the TM 0 mode in the wide waveguide: the first step is to design a "first adiabatic coupler transition structure 7" to realize the adiabatic transmission of the TE 0 mode in the narrow waveguide; second, to design an "adiabatic coupler conversion structure 8" to convert the TE 0 mode in the narrow waveguide into the TM 0 mode in the wide waveguide; third, to design a "second adiabatic coupler transition structure 9" to realize the adiabatic transmission of the TM 0 mode in the wide waveguide. Through the above three-step design, optical isolation can be achieved, that is, the TE 0 mode in the narrow waveguide can be transmitted to the TM 0 mode in the wide waveguide: not only the conversion between different modes is realized, but also the transmission of mode energy between different waveguides is realized. At the same time, in order to improve the integration of photonic integrated chips and achieve a smaller size to meet the needs of the development of new generation information technology, an adiabatic optical isolator as short as possible is designed to convert the TE 0 mode in the narrow waveguide into the TM 0 mode in the wide waveguide.
第一包层1的材料为SiO2,折射率nSiO2=1.445,厚度为h1,宽度W0>WI+wI+G;第二包层2的材料为Air,折射率nAir=1,厚度为h2=220nm;第三包层3的材料为Ce:YIG,折射率nCe:YIG=2.2,厚度为h3,宽度W0。The material of the first cladding layer 1 is SiO 2 , with a refractive index of n SiO 2 =1.445, a thickness of h 1 , and a width of W 0 >W I +w I +G; the material of the second cladding layer 2 is Air, with a refractive index of n Air =1, a thickness of h 2 =220 nm; the material of the third cladding layer 3 is Ce:YIG, with a refractive index of n Ce:YIG =2.2, a thickness of h 3 , and a width of W 0 .
如图4所示,绝热光隔离器的宽波导为第一硅芯4和窄波导为第二硅芯5的宽度变化的连接方式,下面只给出宽波导为第一硅芯4的连接方式,窄波导为第二硅芯5的宽度对于本领域内的技术人员来说,能够计算出来。As shown in FIG4 , the wide waveguide of the adiabatic optical isolator is a first silicon core 4 and the narrow waveguide is a second silicon core 5 in a connection manner in which the widths thereof vary. Only the connection manner in which the wide waveguide is the first silicon core 4 is given below, and the width of the narrow waveguide being the second silicon core 5 can be calculated by those skilled in the art.
第一绝热耦合器过渡结构7在光束传播方向上包含一个片段,由直线连接宽度W1=0.54μm和W2,其中0.54μm<W2<0.595μm,长度Lt1=13.696μm。W2=0.59μm。The first adiabatic coupler transition structure 7 comprises a segment in the beam propagation direction, connected by a straight line with widths W 1 =0.54 μm and W 2 , where 0.54 μm<W 2 <0.595 μm, and a length L t1 =13.696 μm, and W 2 =0.59 μm.
绝热耦合器转换结构8在光束传播方向上包含十个片段:片段一由直线连接宽度W2和Wa=0.595μm,长度L1=43.57μm;片段二由直线连接宽度Wa=0.595μm和Wb=0.597μm,长度L2=68.592μm;片段三由直线连接宽度Wb=0.597μm和Wc=0.598μm,长度L3=167.485μm;片段四由直线连接宽度Wc=0.598μm和Wd=0.599μm,长度L4=137.295μm;片段五由直线连接宽度Wd=0.599μm和We=0.60μm,长度L5=151.88μm;片段六由直线连接宽度We=0.60μm和Wf=0.601μm,长度L6=143.955μm;片段七由直线连接宽度Wf=0.601μm和Wg=0.602μm,长度L7=81.77μm;片段八由直线连接宽度Wg=0.602μm和Wh=0.604μm,长度L8=75.125μm;片段九由直线连接宽度Wh=0.604μm和Wk=0.608μm,长度L9=38.488μm;片段十由直线连接宽度Wk=0.608μm和W3,长度L10=12.982μm,片段一至片段十的总长度Lt2=921.142μm。The adiabatic coupler conversion structure 8 comprises ten segments in the beam propagation direction: segment one is connected by a straight line with a width of W2 and Wa =0.595 μm and a length of L1 =43.57 μm; segment two is connected by a straight line with a width of Wa =0.595 μm and Wb =0.597 μm and a length of L2 =68.592 μm; segment three is connected by a straight line with a width of Wb =0.597 μm and Wc =0.598 μm and a length of L3 =167.485 μm; segment four is connected by a straight line with a width of Wc =0.598 μm and Wd =0.599 μm and a length of L4 =137.295 μm; segment five is connected by a straight line with a width of Wd =0.599 μm and We =0.60 μm and a length of L5 =151.88 μm; segment six is connected by a straight line with a width of We =0.60μm and Wf =0.601μm, length L6 =143.955μm; segment seven is connected by a straight line with a width of Wf =0.601μm and Wg =0.602μm, length L7 =81.77μm; segment eight is connected by a straight line with a width of Wg =0.602μm and Wh =0.604μm, length L8 =75.125μm; segment nine is connected by a straight line with a width of Wh =0.604μm and Wk =0.608μm, length L9 =38.488μm; segment ten is connected by a straight line with a width of Wk =0.608μm and W3 , length L10 =12.982μm, and the total length of segments one to ten is Lt2 =921.142μm.
第二绝热耦合器过渡结构9在光束传播方向上包含一个片段,由直线连接宽度W3和W4=0.70μm,其中0.608μm<W3<0.7μm,长度Lt3=2.813μm。W3=0.63μm。The second adiabatic coupler transition structure 9 comprises a segment in the beam propagation direction, connected by a straight line with widths W 3 and W 4 =0.70 μm, where 0.608 μm<W 3 <0.7 μm, and a length L t3 =2.813 μm. W 3 =0.63 μm.
本发明中绝热光隔离器长度的选择是基于典型的绝热光束传播理论——沿光束传播方向的均衡模式转换功率损耗。通过仿真模拟计算,各个片段所选择的长度都对应相同的模式转换功率损耗。The selection of the length of the adiabatic optical isolator in the present invention is based on the typical adiabatic beam propagation theory - balanced mode conversion power loss along the beam propagation direction. Through simulation calculation, the length selected for each segment corresponds to the same mode conversion power loss.
图5给出了本实施例中设计的绝热光隔离器的功率转换效率,并与传统设计(线性形状连接)进行对比。从该图中可以看出,对于相同的转换效率,本发明设计出的器件长度比传统设计所需器件长度要短很多。例如,在功率传输效率为90%时,本发明设计所需要的长度为108μm,传统设计则需要1540μm。因此,当需要90%的功率传输效率时,传统设计所需要的长度是本发明设计需要长度的14倍以上,充分证明了本发明提出的绝热光隔离器具有小尺寸的优点,助力光子芯片朝更高集成度的方向发展。Figure 5 shows the power conversion efficiency of the adiabatic optical isolator designed in this embodiment, and compares it with the traditional design (linear shape connection). It can be seen from the figure that for the same conversion efficiency, the device length designed by the present invention is much shorter than the device length required by the traditional design. For example, when the power transmission efficiency is 90%, the length required for the design of the present invention is 108μm, while the traditional design requires 1540μm. Therefore, when a power transmission efficiency of 90% is required, the length required for the traditional design is more than 14 times the length required for the design of the present invention, which fully proves that the adiabatic optical isolator proposed by the present invention has the advantage of small size, helping photonic chips to develop in the direction of higher integration.
以上所述的具体实施方案,对本发明的目的、技术方案和有益效果进行了进一步的详细说明,所应理解的是,以上所述仅为本发明的具体实施方案而已,并非用以限定本发明的范围,任何本领域的技术人员,在不脱离本发明的构思和原则的前提下所做出的等同变化与修改,均应属于本发明保护的范围。The specific implementation scheme described above further describes in detail the purpose, technical scheme and beneficial effects of the present invention. It should be understood that the above is only a specific implementation scheme of the present invention and is not intended to limit the scope of the present invention. Any equivalent changes and modifications made by any technician in the field without departing from the concept and principle of the present invention should fall within the scope of protection of the present invention.
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