CN117128768B - Roasting fixing device for production of isostatic pressing graphite crucible for third-generation semiconductor - Google Patents
Roasting fixing device for production of isostatic pressing graphite crucible for third-generation semiconductor Download PDFInfo
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- CN117128768B CN117128768B CN202311394264.5A CN202311394264A CN117128768B CN 117128768 B CN117128768 B CN 117128768B CN 202311394264 A CN202311394264 A CN 202311394264A CN 117128768 B CN117128768 B CN 117128768B
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 30
- 239000010439 graphite Substances 0.000 title claims abstract description 30
- 239000004065 semiconductor Substances 0.000 title claims abstract description 19
- 238000000462 isostatic pressing Methods 0.000 title claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 230000007246 mechanism Effects 0.000 claims abstract description 72
- 230000017105 transposition Effects 0.000 claims abstract description 43
- 238000009413 insulation Methods 0.000 claims abstract description 8
- 238000013016 damping Methods 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 238000001354 calcination Methods 0.000 claims description 2
- 230000005484 gravity Effects 0.000 abstract description 5
- 238000001125 extrusion Methods 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 238000007373 indentation Methods 0.000 abstract description 4
- 230000009471 action Effects 0.000 abstract description 3
- 238000013467 fragmentation Methods 0.000 abstract description 2
- 238000006062 fragmentation reaction Methods 0.000 abstract description 2
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 238000010795 Steam Flooding Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D15/00—Adaptations of machines or engines for special use; Combinations of engines with devices driven thereby
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D15/00—Adaptations of machines or engines for special use; Combinations of engines with devices driven thereby
- F01D15/12—Combinations with mechanical gearing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
- F16F15/067—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H47/00—Combinations of mechanical gearing with fluid clutches or fluid gearing
- F16H47/06—Combinations of mechanical gearing with fluid clutches or fluid gearing the fluid gearing being of the hydrokinetic type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B33/00—Steam-generation plants, e.g. comprising steam boilers of different types in mutual association
- F22B33/18—Combinations of steam boilers with other apparatus
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens or the like for the charge within the furnace
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Thermal Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to the technical field of graphite crucible production, in particular to a roasting fixing device for producing an isostatic pressing graphite crucible for a third-generation semiconductor, which comprises a frame, wherein a heat insulation plate is fixed at the height of the middle section of the frame, a plurality of bearing plates are fixed on the upper side of the frame at equal intervals, and the roasting fixing device further comprises: the fixed supporting mechanisms are respectively fixed on the upper sides of the bearing plates. According to the invention, the steam driving mechanism drives the crucible transposition mechanisms to operate, and the crucible transposition mechanisms can continuously rotate the crucible intermittently during roasting, so that not only can each position of the crucible transposition mechanisms be heated uniformly, the roasting uniformity be improved, uneven fragmentation caused by heating can be avoided, but also the generation of indentation caused by extrusion deformation of the contact position between the outer side of the crucible and the supporting support plate under the action of the gravity of the crucible can be avoided, and the flatness of the outer surface of the crucible can be reduced.
Description
Technical Field
The invention relates to the technical field of graphite crucible production, in particular to a roasting fixing device for the production of an isostatic pressing graphite crucible for a third-generation semiconductor.
Background
The third-generation semiconductor material can realize better electron concentration and motion control, is more suitable for manufacturing high-temperature, high-frequency, radiation-resistant and high-power electronic devices, has important application value in the fields of photoelectrons and microelectronics, and needs to be subjected to heating treatment by an isostatic pressing graphite crucible during processing.
The graphite crucible for heating the third generation semiconductor material needs to be roasted during processing, so that graphite forms graphite oxide, the strength and the heat conducting performance of the graphite crucible are improved, and each graphite crucible needs to be fixed and supported by a fixing device during large-scale roasting of the graphite crucible.
The bulletin number is: CN216954070U discloses a roasting fixing device for graphite crucible production, which comprises a placing rack, wherein the lower end surface of the placing rack is symmetrically fixed with supporting legs, a movable placing plate is arranged in the placing rack, guide rods are symmetrically fixed in the placing rack, meanwhile, a vertical rod is fixed in the placing rack, and a crucible body is placed on the placing plate; further comprises: the fixed box is fixed place the board up end, and fixed box is run through by the montant and slide to fixed box passes through screw thread and adjusting screw interconnect, and adjusting screw bearing connects on the fly leaf simultaneously.
Based on the above search and in combination with the real problem discovery: the existing graphite crucible fixing device supports and fixes the crucible from the side through the clamping plate, and because the graphite crucible is different according to the used composite materials, the materials can be softened to a certain extent in the roasting process, meanwhile, the graphite crucible is influenced by self gravity, the contact position between the outer side of the crucible and the clamping plate is easy to deform to generate an indentation, the flatness of the surface of the outer side of the crucible is reduced, and meanwhile, the contact position between the outer side of the crucible and the clamping plate is concentrated in stress, so that the integral stress of the crucible is uneven easily caused, and the risk of cracking exists.
Disclosure of Invention
The invention aims to provide a roasting fixing device for the production of an isostatic pressing graphite crucible for a third-generation semiconductor, which aims to solve the problems in the background technology.
The technical scheme of the invention is as follows: the utility model provides a three generations of static pressure graphite crucible production is with roasting fixing device, includes the frame, the middle section high department of frame is fixed with the heat insulating board, and the upside equidistant a plurality of loading boards that are fixed with of frame still includes: the fixed supporting mechanisms are respectively fixed on the upper sides of the bearing plates; the crucible transposition mechanisms are respectively arranged at positions between each fixed supporting mechanism and the heat insulation plate; the fixed support mechanism comprises a cylindrical shell fixed on the upper side of a bearing plate, an inner thread ring is connected to the upper end of the outer side of the cylindrical shell through thread rotation, a lifting ring is connected to the lower end of the inner thread ring in a rotating mode, the lifting ring is slidably sleeved on the outer side of the cylindrical shell, four telescopic fixed arms which are circumferentially arranged are slidably inserted in the outer side of the cylindrical shell, support supporting plates are fixed to the upper ends of the telescopic fixed arms, push-pull connecting rods are connected to the lower ends of the four telescopic fixed arms in a rotating mode, one ends of the push-pull connecting rods are connected with the inner side of the lifting ring in a rotating mode, and a descending buffer mechanism is arranged at the position, located at the center, of the upper end of the cylindrical shell.
Preferably, the crucible transposition mechanism comprises a main connecting rod which penetrates through the lower end of the cylindrical shell and is movably connected with the lower end of the cylindrical shell, a fixing sleeve which is fixed at the position of the lower side of the heat insulation plate and corresponds to the position of the main connecting rod, and a transverse frame which is fixed at the lower side of the frame, wherein a cross frame which is positioned inside the cylindrical shell is fixed at the upper end of the main connecting rod, four transposition support arms which are circumferentially arranged are fixed at the upper side of the cross frame, transposition support plates are fixed at the upper ends of the four transposition support arms, the main connecting rod penetrates through the inside of the fixing sleeve, a convex ring is fixed at the position of the lower end of the main connecting rod, a lifting mechanism is arranged between the convex ring and the frame, one side of the convex ring is fixedly provided with a first pull rod, a connecting shaft is inserted at the upper end of the first pull rod, two thrust blocks are symmetrically fixed at the positions of the upper end and the lower end of the fixing sleeve, one side of the two thrust blocks is provided with an arc-shaped guide surface, and a damping mechanism is arranged between the fixing sleeve and the convex ring.
Preferably, the elevating system is including fixing the horizontal frame of frame downside and rotating the link of connection at the bulge loop lower extreme, the inboard one end of link rotates and is connected with the lift connecting rod, the upside of horizontal frame corresponds the position department of link and runs through the rotation and be connected with the worm, and the upside of horizontal frame is located worm one side position department and is fixed with the riser, the one end rotation of riser is connected with the worm wheel, worm wheel and worm meshing, and through rising buffer gear swing joint between worm wheel and the lift connecting rod, be provided with steam drive mechanism between worm and the frame.
Preferably, the steam driving mechanism comprises a small steam boiler, a driven bevel gear fixed at the lower end of a worm, a driving shaft inserted in the transverse frame in a rotating mode, and a driving shell fixed at the lower side of the frame, wherein a steam pipe is connected to an air outlet of the small steam boiler, a driving bevel gear meshed with each driven bevel gear is fixed at the outer side of the driving shaft, a driven gear is fixed at one end of the driving shaft, a U-shaped air passage is arranged in the driving shell, one side of the U-shaped air passage penetrates through and is connected with a driving shaft extending to the outer portion of the driving shell in a penetrating mode, one end of the U-shaped air passage is communicated with one end of the steam pipe, a driving gear meshed with the driven gear is fixed at one end of the driving shaft, a plurality of first lantern rings and second lantern rings are fixed at equal intervals on the outer sides of the driving shaft, a plurality of first blades arranged circumferentially are fixed on the outer sides of the first lantern rings, and a plurality of second blades arranged circumferentially are fixed on the outer sides of the second lantern rings.
Preferably, the rising buffer mechanism comprises a guide chute arranged at one side of the worm wheel, a guide rod is fixed at the inner side of the guide chute, a guide slide block is slidably connected at the inner side of the guide rod, the guide slide block is slidably sleeved on the outer side of the guide rod, one end of the guide slide block is elastically connected with one end of the inner side of the guide chute through a first spring, and one side of the guide slide block is rotatably connected with one end of the lifting connecting rod.
Preferably, the damping mechanism comprises a second pull rod fixed on one side of the convex ring and two arc-shaped guide bars fixed on one side of the fixed sleeve and positioned at the upper end and the lower end, wherein the outer sides of the arc-shaped guide bars are both connected with arc-shaped sliding blocks in a sliding manner, a rubber bar is fixed between the arc-shaped sliding blocks, a guide groove is formed in one side of the rubber bar, the upper end of the second pull rod is connected with the inner side of the guide groove in a sliding manner, and the other side of the rubber bar is tightly attached to the outer side of the fixed sleeve.
Preferably, one end of the connecting frame is fixed with a first limiting plate, a second limiting plate is fixed at the position of the lower end of the fixing sleeve corresponding to the first limiting plate, a limiting guide rod is fixed at the lower side of the second limiting plate, and the limiting guide rod penetrates through the inside of the first limiting plate in a sliding mode.
Preferably, the descending buffer mechanism comprises a supporting sleeve fixed at the central position of the upper end of the cylindrical shell, the upper end of the inner side of the supporting sleeve is slidably connected with a movable supporting plate, and the lower end of the movable supporting plate is elastically connected with the bottom end of the inner side of the supporting sleeve through a second spring.
Preferably, one side of each of the four supporting support plates is provided with an arc-shaped surface.
Preferably, the thread angle between the internal thread ring and the cylindrical shell is smaller than the friction angle.
The invention provides a roasting fixing device for the production of an isostatic pressing graphite crucible for a third-generation semiconductor through improvement, and compared with the prior art, the roasting fixing device has the following improvement and advantages:
the method comprises the following steps: according to the invention, the four support supporting plates of the fixed support mechanism are adjusted in intervals, so that the four support supporting plates support the side face of the crucible in four directions, and meanwhile, the movable support plate of the descending buffer mechanism supports the bottom of the crucible, so that the crucible is stressed more uniformly, and the crucible can be prevented from being cracked and deformed during roasting.
And two,: according to the invention, the steam driving mechanism drives the crucible transposition mechanisms to operate, and the crucible transposition mechanisms can continuously rotate the crucible intermittently during roasting, so that not only can each position of the crucible transposition mechanisms be heated uniformly, the roasting uniformity be improved, uneven fragmentation caused by heating can be avoided, but also the generation of indentation caused by extrusion deformation of the contact position between the outer side of the crucible and the supporting support plate under the action of the gravity of the crucible can be avoided, and the flatness of the outer surface of the crucible can be reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a partially disassembled schematic illustration of the present invention;
FIG. 3 is an enlarged schematic view of the structure of FIG. 2A according to the present invention;
FIG. 4 is a first cross-sectional schematic view of the present invention;
FIG. 5 is an enlarged schematic view of the structure of FIG. 4B according to the present invention;
FIG. 6 is an enlarged schematic view of the structure of FIG. 5C in accordance with the present invention;
FIG. 7 is an enlarged schematic view of the structure of FIG. 5D according to the present invention;
FIG. 8 is a second cross-sectional schematic view of the present invention;
fig. 9 is an enlarged schematic view of the structure of fig. 8E according to the present invention.
Reference numerals:
1. a frame; 2. a heat insulating plate; 3. a carrying plate; 101. a cylindrical shell; 102. a telescopic fixed arm; 103. a supporting pallet; 104. an internal thread ring; 105. lifting rings; 106. push-pull connecting rod; 201. a main connecting rod; 202. a cross; 203. a transposition support arm; 204. a transposition support plate; 205. a fixed sleeve; 206. a thrust block; 207. a convex ring; 208. a first pull rod; 209. a connecting shaft; 210. a roller; 211. a transverse frame; 212. a worm; 213. a vertical plate; 214. a worm wheel; 215. a connecting frame; 216. lifting a connecting rod; 217. a guide chute; 218. a guide slide block; 219. a guide rod; 220. a first spring; 221. a first limiting plate; 222. a second limiting plate; 223. a limit guide rod; 224. a second pull rod; 225. arc-shaped conducting bars; 226. an arc-shaped sliding block; 227. a rubber strip; 228. a guide groove; 301. a driven bevel gear; 302. a drive shaft; 303. a drive bevel gear; 304. a driven gear; 305. a drive gear; 306. a small-sized steam boiler; 307. a steam pipe; 308. a driving case; 309. a U-shaped air passage; 310. a driving shaft; 311. a first collar; 312. a second collar; 313. a first blade; 314. a second blade; 401. a support sleeve; 402. a movable support plate; 403. and a second spring.
Detailed Description
The following detailed description of the present invention clearly and fully describes the technical solutions of the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention provides a roasting fixing device for the production of an isostatic pressing graphite crucible for a third-generation semiconductor through improvement, which comprises the following technical scheme:
as shown in fig. 1 to 9, an embodiment of the present invention provides a baking and fixing device for producing an isostatic pressing graphite crucible for a third generation semiconductor, which includes a frame 1, a heat insulation board 2 is fixed at the middle section height of the frame 1, and a plurality of bearing boards 3 are fixed at equal intervals on the upper side of the frame 1, and further includes: a plurality of fixed supporting mechanisms which are respectively fixed on the upper sides of the plurality of bearing plates 3; the crucible transposition mechanisms are respectively arranged at positions between each fixed supporting mechanism and the heat insulation plate 2; the fixed supporting mechanism comprises a cylindrical shell 101 fixed on the upper side of a bearing plate 3, an inner threaded ring 104 is connected to the upper end of the outer side of the cylindrical shell 101 through threaded rotation, a lifting ring 105 is connected to the lower end of the inner threaded ring 104 in a rotating mode, the lifting ring 105 is slidably sleeved on the outer side of the cylindrical shell 101, four circumferentially arranged telescopic fixed arms 102 are slidably inserted in the outer side of the cylindrical shell 101, supporting plates 103 are fixed to the upper ends of the four telescopic fixed arms 102, push-pull connecting rods 106 are connected to the lower ends of the four telescopic fixed arms 102 in a rotating mode, one ends of the four push-pull connecting rods 106 are connected with the inner side of the lifting ring 105 in a rotating mode, and a descending buffer mechanism is arranged at the position, located at the center, of the upper end of the cylindrical shell 101.
Further, the crucible transposition mechanism comprises a main connecting rod 201 which penetrates through and is movably connected to the lower end of the cylindrical shell 101, a fixing sleeve 205 which is fixed at the position, corresponding to the main connecting rod 201, of the lower side of the heat insulation plate 2, and a transverse frame 211 which is fixed at the lower side of the frame 1, wherein a cross 202 which is positioned in the cylindrical shell 101 is fixed at the upper end of the main connecting rod 201, four transposition support arms 203 which are arranged in a circumferential manner are fixed at the positions of four ends of the cross 202, transposition support plates 204 are fixed at the upper ends of the four transposition support arms 203, the main connecting rod 201 penetrates through the inside of the fixing sleeve 205, a convex ring 207 is fixed at the position of the outer side of the main connecting rod 201, a lifting mechanism is arranged between the convex ring 207 and the frame 1, a first pull rod 208 is fixed at one side of the convex ring 207, a connecting shaft 209 is inserted and fixed at the upper end of the first pull rod 208, idler wheels 210 are rotatably connected at one side of the fixing sleeve 205, two thrust blocks 206 are symmetrically fixed at the positions of the upper end and lower end of the fixing sleeve 205, arc-shaped guide surfaces are arranged at one side of the two thrust blocks 206, and a damping mechanism is arranged between the fixing sleeve 205 and the convex ring 207;
through crucible transposition mechanism, can constantly carry out intermittent rotation to the crucible, not only make its each position can evenly be heated, improve the calcination degree of consistency, avoid the crucible to be heated inhomogeneous cracked, can avoid under crucible self gravity effect moreover, lead to the crucible outside to receive the extrusion with supporting plate 103 contact position and produce the indentation, reduce crucible outward appearance roughness.
Further, the lifting mechanism comprises a transverse frame 211 fixed at the lower side of the frame 1 and a connecting frame 215 rotatably connected to the lower end of the convex ring 207, one end of the inner side of the connecting frame 215 is rotatably connected with a lifting connecting rod 216, the upper side of the transverse frame 211 is correspondingly provided with a worm 212 in a penetrating and rotating manner at the position corresponding to the connecting frame 215, the upper side of the transverse frame 211 is provided with a vertical plate 213 fixed at the position of one side of the worm 212, one end of the vertical plate 213 is rotatably connected with a worm wheel 214, the worm wheel 214 is meshed with the worm 212, the worm wheel 214 is movably connected with the lifting connecting rod 216 through a lifting buffer mechanism, and a steam driving mechanism is arranged between the worm 212 and the frame 1;
the lifting mechanism is used for driving the main connecting rod 201 of the crucible transposition mechanism to move up and down, so that the crucible is driven to move up and down, and the crucible is conveniently subjected to rotary transposition.
Further, the steam driving mechanism comprises a small steam boiler 306, driven bevel gears 301 fixed at the lower end of the worm 212, a driving shaft 302 rotatably inserted into the transverse frame 211, and a driving shell 308 fixed at the lower side of the frame 1, wherein a steam pipe 307 is connected to an air outlet of the small steam boiler 306, a driving bevel gear 303 meshed with each driven bevel gear 301 is fixed at the outer side of the driving shaft 302, a driven gear 304 is fixed at one end of the driving shaft 302, a U-shaped air channel 309 is formed in the driving shell 308, one side of the U-shaped air channel 309 penetrates through and is rotatably connected with a driving shaft 310 extending to the outer side of the driving shell 308, one end of the U-shaped air channel 309 is communicated with one end of the steam pipe 307, a driving gear 305 meshed with the driven gear 304 is fixed at one end of the driving shaft 310, a plurality of first lantern rings 311 and a plurality of second lantern rings 312 are fixed at equal intervals on the outer sides of the driving shaft 310, a plurality of first blades 313 are arranged circumferentially, and a plurality of second blades 314 are fixed on the outer sides of the plurality of second lantern rings 312;
through steam drive mechanism, can stably provide the driving force under high temperature environment, make power transmission more smooth-going when the crucible transposition mechanism, prevent that high temperature from influencing crucible transposition mechanism's operating stability, guarantee the stability when shifting the crucible, reduce the rocking of crucible.
Further, the rising buffer mechanism comprises a guide chute 217 arranged at one side of the worm wheel 214, a guide rod 219 is fixed at the inner side of the guide chute 217, a guide slide block 218 is connected at the inner side of the guide rod 219 in a sliding manner, the guide slide block 218 is sleeved at the outer side of the guide rod 219 in a sliding manner, one end of the guide slide block 218 is elastically connected with one end of the inner side of the guide chute 217 through a first spring 220, and one side of the guide slide block 218 is rotatably connected with one end of the lifting connecting rod 216;
the main connecting rod 201 drives the four transposition supporting plates 204 to move upwards, when the four transposition supporting plates 204 are in contact with the outer sides of the crucible, the transposition supporting plates 204 and the main connecting rod 201 can receive downward reaction force, the reaction force can be transmitted to the guide sliding block 218 of the lifting buffer mechanism through the connecting frame 215 and the lifting connecting rod 216, and then transmitted to the first spring 220 through the guide sliding block 218, the first spring 220 can buffer instant impact to a certain extent, and excessive impact to the crucible at the moment of supporting the crucible is avoided, and crucible deformation and breakage are avoided.
Further, the damping mechanism comprises a second pull rod 224 fixed on one side of the convex ring 207 and two arc-shaped guide bars 225 fixed on one side of the fixed sleeve 205 and positioned at the upper end and the lower end, the outer sides of the two arc-shaped guide bars 225 are both in sliding connection with arc-shaped sliding blocks 226, a rubber bar 227 is fixed between the two arc-shaped sliding blocks 226, a guide groove 228 is formed in one side of the rubber bar 227, the upper end of the second pull rod 224 is in sliding connection with the inner side of the guide groove 228, and the other side of the rubber bar 227 is tightly attached to the outer side of the fixed sleeve 205;
when the main connecting rod 201 rotates at each angle, the second pull rod 224 of the damping mechanism can be driven to rotate along with the second pull rod 224, the second pull rod 224 can slide along the inner side of the guide groove 228, when the second pull rod 224 rotates along with the main connecting rod 201, the rubber strip 227 and the two arc sliding blocks 226 can be driven to move along the tracks of the two arc guide strips 225, so that the rubber strip 227 rotates around the fixed sleeve 205, one side of the rubber strip 227 is tightly attached to the outer side of the fixed sleeve 205, when the rubber strip 227 rotates at the outer side of the fixed sleeve 205, friction is generated between the rubber strip 227 and the fixed sleeve 205, the friction force can quickly stop the rotation of the main connecting rod 201 after the main connecting rod 201 rotates each time, and the normal transposition operation of the crucible is prevented from being influenced by rotating too much angles of rotational inertia of the main connecting rod 201.
Further, a first limiting plate 221 is fixed at one end of the connecting frame 215, a second limiting plate 222 is fixed at the position of the lower end of the fixing sleeve 205 corresponding to the first limiting plate 221, a limiting guide rod 223 is fixed at the lower side of the second limiting plate 222, and the limiting guide rod 223 penetrates through and is connected to the inside of the first limiting plate 221 in a sliding manner;
when the connecting frame 215 moves up and down, the first limiting plate 221 is driven to move up and down synchronously, the first limiting plate 221 can move up and down along the outer side of the limiting guide rod 223, the limiting guide rod 223 can limit the first limiting plate 221 and the connecting frame 215, the connecting frame 215 is prevented from rotating, the connecting frame 215 only moves up and down linearly, and the transmission stability is improved.
Further, the descending buffer mechanism comprises a supporting sleeve 401 fixed at the upper end of the cylindrical shell 101 and located at the central position, the upper end of the inner side of the supporting sleeve 401 is connected with a movable supporting plate 402 in a sliding manner, and the lower end of the movable supporting plate 402 is elastically connected with the bottom end of the inner side of the supporting sleeve 401 through a second spring 403;
through descending buffer mechanism, when main connecting rod 201 and transposition layer board 204 drive the crucible to move down, the bottom of crucible first with descending buffer mechanism's movable support plate 402 contact, when the crucible contacted with movable support plate 402 the moment, second spring 403 can cushion the impact force that produces in the moment, has further protected the crucible.
Further, one side of each of the four supporting plates 103 is provided with an arc surface;
the arced surface can be better attached to the outer side of the crucible, so that the contact area between the supporting plate 103 and the crucible is increased, the extrusion to the outer side of the crucible is reduced, and the deformation of the crucible is reduced.
Further, the thread lead angle between the internal thread ring 104 and the cylindrical shell 101 is smaller than the friction angle;
plays a role of self-locking, prevents the internal thread ring 104 and the lifting ring 105 from moving slightly up and down, thereby preventing the intervals between the four supporting plates 103 from changing, improving the supporting stability of the crucible and effectively avoiding deformation or breakage during crucible roasting.
Working principle: when the crucible supporting device is used, the distance between the four supporting plates 103 of the fixed supporting mechanism is adjusted according to the size of the crucible, firstly, the internal thread ring 104 is rotated, the lifting ring 105 is driven to move up and down through threads, the lifting ring 105 moves up and down, the four push-pull connecting rods 106 are driven to rotate synchronously, the four telescopic fixed arms 102 can be driven to move synchronously through the rotation of the four push-pull connecting rods 106, the four supporting plates 103 can be driven to move, after the distance between the four supporting plates 103 is adjusted, the crucible to be roasted is placed on the upper side of the movable supporting plate 402 of the descending buffer mechanism, the movable supporting plate 402 is pressed downwards under the action of the gravity of the crucible, the movable supporting plate 402 moves downwards to compress the second spring 403 by a certain amount, the outer side of the crucible can be contacted with the arc-shaped surface on one side of the four supporting plates 103 before the second spring 403 is completely compressed, and the side wall of the crucible is supported by the four supporting plates 103, so that the bottom of the crucible is supported by the movable supporting plate 402, the stress is more uniform, and the cracking and deformation can be prevented during roasting;
in the process of roasting the crucible, the small steam boiler 306 of the steam driving mechanism can release high-pressure steam, the high-pressure steam flows into the inner side of the U-shaped air passage 309 through the steam pipe 307, when the steam flows through the plurality of first blades 313 and the second blades 314, the first collar 311 and the second collar 312 can be pushed to rotate, so that the driving shaft 310 is driven to rotate, the rest steam is discharged to the outside through the other end of the U-shaped air passage 309, the driving shaft 310 drives the driving gear 305 to rotate, the driving gear 305 drives the driven gear 304 to rotate through teeth, the driven gear 304 drives the driving shaft 302 to rotate, the driving shaft 302 drives the plurality of driving bevel gears 303 on the outer side of the driving gear to rotate, and each driving bevel gear 303 drives the driven bevel gear 301 at the corresponding position to rotate respectively;
the worm 212 of the lifting mechanism is driven to rotate by the rotation of the bevel gear 301, the worm 212 drives the worm wheel 214 to rotate, the connecting frame 215 can be driven to move up and down by the lifting connecting rod 216 when the worm wheel 214 rotates, the connecting frame 215 drives the main connecting rod 201 of the crucible transposition mechanism to move up and down vertically, the main connecting rod 201 drives the convex ring 207 and the first pull rod 208 to move up synchronously, the cross 202 at the upper end of the main connecting rod 201 is driven to move up when the main connecting rod 201 moves up, the cross 202 drives the four transposition support arms 203 and the four transposition support plates 204 to move up, the four transposition support plates 204 support the crucible from the side surface of the crucible, when the roller 210 at the upper end of the main connecting rod 201 contacts with an arc-shaped guide surface at one side of a thrust block 206, the crucible is driven by the roller 210 to apply a torsion force to the first pull rod 208, the first pull rod 208 drives the main connecting rod 201 to rotate by a certain angle through the convex ring 207, the main connecting rod 201 can drive the crucible 201 to rotate by a certain angle through the four transposition support plates 204 at the upper end, the main connecting rod 201 moves up and down along with the connecting frame 215, when the main connecting rod 201 moves down, the crucible is driven by the four transposition support plates 204 to move down, the crucible is not in contact with the crucible, and the crucible is not in the same side surface, the crucible is heated by the arc-shaped guide surface is not in the reverse direction, the crucible is not heated, the crucible is not heated, and the crucible is not heated, and the crucible is heated;
when the main connecting rod 201 rotates at each angle, the second pull rod 224 of the damping mechanism can be driven to rotate along with the second pull rod 224, the second pull rod 224 can slide along the inner side of the guide groove 228, when the second pull rod 224 rotates along with the main connecting rod 201, the rubber strip 227 and the two arc sliding blocks 226 can be driven to move along the tracks of the two arc guide strips 225, so that the rubber strip 227 rotates around the fixed sleeve 205, and as one side of the rubber strip 227 is tightly attached to the outer side of the fixed sleeve 205, when the rubber strip 227 rotates at the outer side of the fixed sleeve 205, friction is generated between the rubber strip 227 and the fixed sleeve 205, the friction force can quickly stop the rotation of the main connecting rod 201 after each rotation of the main connecting rod 201, and the normal transposition operation of the crucible is prevented from being influenced by rotating too much angle due to rotational inertia of the main connecting rod 201;
the worm wheel 214 rotates to drive the connecting frame 215 and the main connecting rod 201 to move upwards, the main connecting rod 201 drives the four transposition supporting plates 204 to move upwards, when the four transposition supporting plates 204 are contacted with the outer sides of the crucible, the transposition supporting plates 204 and the main connecting rod 201 can receive downward reaction force, the reaction force can be transmitted to the guide sliding block 218 of the lifting buffer mechanism through the connecting frame 215 and the lifting connecting rod 216 and then transmitted to the first spring 220 through the guide sliding block 218, the first spring 220 can buffer instant impact to a certain extent, and excessive impact to the crucible caused by the instant of supporting the crucible is avoided, and crucible deformation and breakage are avoided; meanwhile, when the crucible is driven to move downwards, the bottom of the crucible is contacted with the movable supporting plate 402 of the descending buffer mechanism, and when the crucible is contacted with the movable supporting plate 402, the impact force generated in the moment can be buffered by the second spring 403, so that the crucible is further protected.
The previous description is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (9)
1. The utility model provides a calcination fixing device is used in production of isostatic pressure graphite crucible for third generation semiconductor, includes frame (1), the middle section high department of frame (1) is fixed with heat insulating board (2), and the upside equidistant a plurality of loading board (3) that are fixed with of frame (1), its characterized in that still includes:
the fixed supporting mechanisms are respectively fixed on the upper sides of the bearing plates (3);
the crucible transposition mechanisms are respectively arranged at positions between each fixed supporting mechanism and the heat insulation plate (2);
the fixed supporting mechanism comprises a cylindrical shell (101) fixed on the upper side of a bearing plate (3), an inner threaded ring (104) is connected to the upper end of the outer side of the cylindrical shell (101) through threaded rotation, a lifting ring (105) is connected to the lower end of the inner threaded ring (104) in a rotating mode, the lifting ring (105) is slidably sleeved on the outer side of the cylindrical shell (101), four telescopic fixed arms (102) which are circumferentially arranged are slidably inserted in the outer side of the cylindrical shell (101), supporting plates (103) are fixed to the upper ends of the four telescopic fixed arms (102), push-pull connecting rods (106) are connected to the lower ends of the four telescopic fixed arms (102) in a rotating mode, one ends of the four push-pull connecting rods (106) are connected with the inner side of the lifting ring (105), and a descending buffer mechanism is arranged at the central position of the upper end of the cylindrical shell (101).
The crucible transposition mechanism comprises a main connecting rod (201) which penetrates through the lower end of a cylindrical shell (101) and is movably connected with the lower end of the cylindrical shell, a fixing sleeve (205) which is fixed at the position of the lower side of the heat insulation plate (2) and corresponds to the main connecting rod (201), a transverse frame (211) which is fixed at the lower side of the frame (1), a cross (202) which is positioned in the cylindrical shell (101) is fixed at the upper end of the main connecting rod (201), four transposition support arms (203) which are circumferentially arranged are fixed at the upper side of the cross (202), transposition support plates (204) are fixed at the upper ends of the four transposition support arms (203), the main connecting rod (201) penetrates through the inside of the fixing sleeve (205), a convex ring (207) is fixed at the position of the lower end of the outer side of the main connecting rod (201), a lifting mechanism is arranged between the convex ring (207) and the frame (1), a first pull rod (208) is fixed at one side of the convex ring (207), a connecting shaft (209) is inserted and fixed at the upper end of the first pull rod (208), two thrust blocks (206) are symmetrically arranged at the two sides of the two thrust blocks (210) which are symmetrically arranged at the two sides of the two thrust blocks (209), a damping mechanism is arranged between the fixed sleeve (205) and the convex ring (207).
2. The baking and fixing device for producing the isostatic pressing graphite crucible for the third-generation semiconductor according to claim 1, wherein the baking and fixing device comprises the following components: the lifting mechanism comprises a transverse frame (211) fixed at the lower side of the frame (1) and a connecting frame (215) rotationally connected to the lower end of the convex ring (207), wherein one end of the inner side of the connecting frame (215) is rotationally connected with a lifting connecting rod (216), a worm (212) is rotationally connected to the upper side of the transverse frame (211) corresponding to the position of the connecting frame (215) in a penetrating mode, a vertical plate (213) is fixed to the upper side of the transverse frame (211) at one side of the worm (212), one end of the vertical plate (213) is rotationally connected with a worm wheel (214), the worm wheel (214) is meshed with the worm (212), the worm wheel (214) is movably connected with the lifting connecting rod (216) through a lifting buffer mechanism, and a steam driving mechanism is arranged between the worm (212) and the frame (1).
3. The baking and fixing device for producing the isostatic pressing graphite crucible for the third-generation semiconductor according to claim 2, wherein: the steam driving mechanism comprises a small steam boiler (306), driven bevel gears (301) fixed at the lower ends of worms (212), a driving shaft (302) rotatably inserted in a transverse frame (211), and a driving shell (308) fixed at the lower side of a frame (1), wherein a steam pipe (307) is connected with an air outlet of the small steam boiler (306), a driving bevel gear (303) meshed with each driven bevel gear (301) is fixed at the outer side of the driving shaft (302) corresponding to the position of each driven bevel gear (301), a driven gear (304) is fixed at one end of the driving shaft (302), a U-shaped air channel (309) is formed in the driving shell (308), a driving shaft (310) extending to the outer side of the driving shell (308) is rotatably connected at one side of the U-shaped air channel (309) in a penetrating mode, one end of the U-shaped air channel (309) is communicated with one end of the steam pipe (307), a driving gear (305) meshed with the driven gear (304) is fixed at one end of the driving shaft (310), a plurality of first lantern rings (311) and second lantern rings (312) are fixed at equal intervals on the outer side of the driving shaft (310), a plurality of first lantern rings (312) are arrayed on the outer side of the first lantern rings (312) in a certain circle, a plurality of second blades (314) which are circumferentially arranged are fixed on the outer sides of the second lantern rings (312).
4. The baking and fixing device for producing the isostatic pressing graphite crucible for the third-generation semiconductor according to claim 2, wherein: the lifting buffer mechanism comprises a guide chute (217) arranged on one side of a worm wheel (214), a guide rod (219) is fixed on the inner side of the guide chute (217), a guide slide block (218) is connected to the inner side of the guide rod (219) in a sliding mode, the guide slide block (218) is arranged on the outer side of the guide rod (219) in a sliding mode in a sleeved mode, one end of the guide slide block (218) is elastically connected with one end of the inner side of the guide chute (217) through a first spring (220), and one side of the guide slide block (218) is rotatably connected with one end of a lifting connecting rod (216).
5. The baking and fixing device for producing the isostatic pressing graphite crucible for the third-generation semiconductor according to claim 1, wherein the baking and fixing device comprises the following components: the damping mechanism comprises a second pull rod (224) fixed on one side of a convex ring (207) and two arc-shaped guide bars (225) fixed on one side of a fixed sleeve (205) and positioned at the upper end and the lower end, wherein the outer sides of the arc-shaped guide bars (225) are both connected with arc-shaped sliding blocks (226) in a sliding mode, rubber bars (227) are fixed between the arc-shaped sliding blocks (226), one side of each rubber bar (227) is provided with a guide groove (228), the upper end of the second pull rod (224) is connected with the inner side of each guide groove (228) in a sliding mode, and the other side of each rubber bar (227) is tightly attached to the outer side of the fixed sleeve (205).
6. The baking and fixing device for producing the isostatic pressing graphite crucible for the third-generation semiconductor according to claim 2, wherein: one end of the connecting frame (215) is fixed with a first limiting plate (221), a second limiting plate (222) is fixed at the position of the lower end of the fixing sleeve (205) corresponding to the first limiting plate (221), a limiting guide rod (223) is fixed at the lower side of the second limiting plate (222), and the limiting guide rod (223) penetrates through the inside of the first limiting plate (221) in a sliding mode.
7. The baking and fixing device for producing the isostatic pressing graphite crucible for the third-generation semiconductor according to claim 1, wherein the baking and fixing device comprises the following components: the descending buffer mechanism comprises a supporting sleeve (401) fixed at the upper end of the cylindrical shell (101) and located at the central position, the upper end of the inner side of the supporting sleeve (401) is connected with a movable supporting plate (402) in a sliding mode, and the lower end of the movable supporting plate (402) is elastically connected with the bottom end of the inner side of the supporting sleeve (401) through a second spring (403).
8. The baking and fixing device for producing the isostatic pressing graphite crucible for the third-generation semiconductor according to claim 1, wherein the baking and fixing device comprises the following components: one side of each of the four supporting plates (103) is provided with an arc-shaped surface.
9. The baking and fixing device for producing the isostatic pressing graphite crucible for the third-generation semiconductor according to claim 1, wherein the baking and fixing device comprises the following components: the thread lead angle between the internal thread ring (104) and the cylindrical shell (101) is smaller than the friction angle.
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| CN117760150B (en) * | 2024-02-22 | 2024-05-03 | 福建福碳新材料科技有限公司 | Isostatic graphite processing cooling device for manufacturing large semiconductor silicon wafer |
| CN118423979B (en) * | 2024-07-01 | 2024-08-23 | 福建福碳新材料科技有限公司 | Three-generation semiconductor isostatic pressing graphite roasting furnace protection device |
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