CN117074149A - Multifunctional vacuum sample cleaning device and how to use it - Google Patents

Abstract

The invention discloses a multifunctional vacuum sample cleaning device, which includes: a cleaning box; a vacuum pump set; a plasma component, which uses plasma to treat the sample surface and takes away sample dirt through the vacuum pump set to form a plasma cleaning mode; and a lighting component, which includes UV module and heating module; among them, the UV module irradiates the sample surface with UV rays and takes away the sample contaminants through the vacuum pump set, forming a UV cleaning mode; the heating module heats the chamber to volatilize the contaminants on the sample surface and takes away the sample through the vacuum pump set dirt to form a heating cleaning mode; in which, after the sample is placed in the chamber, any one or more of the plasma cleaning mode, ultraviolet cleaning mode, and heating cleaning mode are combined to allow the sample to achieve multi-functionality in a single area Clean. The invention also relates to a method of using a multifunctional vacuum sample cleaning device. The invention has strong versatility, can effectively reduce sample preparation time and cost, optimize sample preparation procedures, and improve efficiency.

Description

Multifunctional vacuum sample cleaning device and how to use it

Technical field

The invention relates to the technical field of electron microscope cleaning, and in particular to a multifunctional vacuum sample cleaning device and a method of using the multifunctional vacuum sample cleaning device.

Background technique

In the electron microscopy analysis system, including transmission electron microscopy analysis, scanning electron microscopy analysis, etc., it has high requirements on samples. The sample and the end of the sample rod will more or less absorb organic matter and gas molecules in the air during the sample preparation and loading process. , if these contaminants are brought into the transmission electron microscope/scanning electron microscope vacuum chamber with the sample and sample rod, it will affect the clarity of the electron microscope imaging, and even the contaminants will affect the vacuum degree of the lens barrel, which will affect the electron microscope objective lens, pole piece, light The lantern and filament cause pollution and shorten the service life of the electron microscope. Therefore, the sample needs to be pre-cleaned before entering the electron microscope. However, the products currently on the market are relatively single, that is, the equipment usually only has a single cleaning function. If multiple cleaning modes are required, they need to be transferred between different equipment. This Problems such as troublesome operation, increased costs, and large space occupied by multiple devices are inevitable. It can be seen that equipment with only a single cleaning function has poor versatility and cannot meet the different cleaning requirements of different samples, prolonging the sample preparation time and increasing costs.

Therefore, it is necessary to provide a new way to solve the above technical problems.

Contents of the invention

In view of the shortcomings of the existing technology, the purpose of the present invention is to provide a multifunctional vacuum sample cleaning device to form a multifunctional cleaning device that integrates three cleaning modes: plasma cleaning, ultraviolet cleaning and heated vacuum desorption cleaning. It is universal. It has strong performance and can effectively reduce sample preparation time and cost, optimize sample preparation procedures and improve efficiency.

The technical solution of the present invention is summarized as follows:

A multifunctional vacuum sample cleaning device, including:

The cleaning box has a chamber formed in it for placing the sample;

A vacuum pump set, which is installed with the cleaning box and communicates with the chamber, and is used to evacuate the chamber;

A plasma component is installed on one side of the cleaning box and communicates with the chamber; and the plasma component uses plasma to treat the sample surface and takes away sample dirt through the vacuum pump group to form a plasma cleaning mode;

A lighting assembly is installed on the top of the cleaning box and extends into the chamber; and the lighting assembly includes a UV module and a heating module; wherein,

The ultraviolet module irradiates the surface of the sample with ultraviolet radiation and takes away sample dirt through the vacuum pump unit to form an ultraviolet cleaning mode;

The heating module heats the chamber to volatilize contaminants on the sample surface and take away the sample contaminants through the vacuum pump group, forming a heating cleaning mode;

Wherein, after the sample is placed in the chamber, any one or more of the plasma cleaning mode, the ultraviolet cleaning mode, and the heating cleaning mode are combined so that the sample can achieve multiple functions in a single area. Clean.

Preferably, a pull-out bracket assembly is provided in the chamber, and the bracket assembly includes at least three sets of horizontal guide rails for placing trays to form multiple sample storage areas.

Preferably, the plasma component and the vacuum pump set are connected to different sides of the cleaning box; wherein,

The communication point between the plasma component and the chamber is located on the upper side of the bracket component;

The communication point between the vacuum pump set and the chamber is close to the bottom of the bracket assembly.

Preferably, the lighting assembly further includes:

A lamp holder, which is installed with the cleaning box and forms the top finish of the cleaning box;

A lamp panel, which is installed with the lamp holder and located below the lamp holder, and the ultraviolet module and heating module are fixed to the lamp panel;

A lampshade is fixed to the lamp panel and is provided outside the ultraviolet module and the heating module, and is used to guide the emission direction of the light from the ultraviolet module and the heating module.

Preferably, the light assembly is located directly above the bracket assembly, and the lampshade guides the vertical illumination of light from the ultraviolet module and the heating module to the bracket assembly.

Preferably, the light coverage area of the light assembly is larger than the upper surface area of the bracket assembly.

Preferably, the cleaning box is provided with at least one sample rod mounting port, which is located on the side opposite to the plasma component. The sample rod mounting port is connected to the chamber and is used to plug in a transmission electron microscope. Sample rod.

Preferably, it further includes: an exhaust assembly connected to the cleaning box and communicated into the chamber, and the exhaust assembly and the vacuum pump set are located on the same side of the cleaning box.

Preferably, the cleaning box is further equipped with a first flange, a second flange, a third flange and a fourth flange; wherein the first flange is used to dock with the plasma component; the The second flange is used to connect the exhaust assembly and the chamber; the third flange is used to connect the vacuum pump set and the chamber; the fourth flange is used to connect with a vacuum gauge. .

The present invention also provides a method of using a multifunctional vacuum sample cleaning device, which is applied to the multifunctional vacuum sample cleaning device as described above, including the steps:

Step 1: After placing the sample in the chamber of the cleaning box, select the cleaning mode of the cleaning device; wherein the cleaning mode at least includes a plasma cleaning mode, an ultraviolet cleaning mode and a heating cleaning mode;

Step 2. Start the cleaning device:

When the cleaning device is in the plasma cleaning mode, the plasma generated by the plasma component enters the chamber, causing the residual organic pollutants on the sample surface to decompose and be extracted by the vacuum pump unit;

When the cleaning device is in the ultraviolet cleaning mode, the ultraviolet module provides two bands of ultraviolet light to irradiate the chamber at the same time. High concentrations of highly active oxygen radicals are generated in the chamber. The contaminants on the sample surface react with the oxygen radicals to decompose and are pumped out by the vacuum pump unit. remove;

When the cleaning device is in the heating cleaning mode, the light waves emitted by the heating module heat the chamber, causing the temperature of the sample to rise, volatilizing the organic matter and moisture attached to the surface, and being pumped out by the vacuum pump unit;

Step 3: After the sample cleaning is completed, close the cleaning device.

Compared with the existing technology, the beneficial effects of the present invention are:

The present invention provides a multifunctional vacuum sample cleaning device, which is provided with a vacuum pump group, a plasma component, an ultraviolet module and a heating module to form a multifunctional cleaning device that integrates three cleaning modes: plasma cleaning, ultraviolet cleaning and heated vacuum desorption cleaning. The device can perform plasma cleaning, or UV cleaning, and/or heated vacuum desorption cleaning in the same chamber, and can select the corresponding cleaning mode or combined cleaning mode according to the requirements of different electron microscopes for samples, effectively reducing the contaminants attached to the sample. , reduce or even eliminate the impact of carbon deposition during the sample microscopic imaging process, improve the quality of sample preparation, and have strong versatility, which can effectively reduce sample preparation time and cost, optimize sample preparation procedures, and improve efficiency; and, at the same time, samples can be processed Vacuum storage effectively ensures sample quality.

The above description is only an overview of the technical solutions of the present invention. In order to have a clearer understanding of the technical means of the present invention and implement them according to the contents of the description, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings. Specific embodiments of the present invention are given in detail by the following examples and accompanying drawings.

Description of the drawings

The drawings described here are used to provide a further understanding of the present invention and constitute a part of this application. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the attached picture:

Figure 1 is a schematic diagram of the overall structure of the multifunctional vacuum sample cleaning device in the present invention;

Figure 2 is a schematic diagram of the overall structure of the multifunctional vacuum sample cleaning device in the present invention; Figure 2;

Figure 3 is an exploded structural view of the multifunctional vacuum sample cleaning device of the present invention;

Figure 4 is a schematic diagram of the assembly relationship between the cleaning box, the plasma component and the lighting component in the present invention;

Figure 5 is a schematic diagram of the overall structure of the lighting assembly in the present invention;

Figure 6 is a schematic diagram of the exploded structure of the lighting assembly in the present invention;

Figure 7 is a schematic diagram of the installation position relationship between the ultraviolet module, the heating module and the light panel in the present invention;

Figure 8 is a schematic diagram of the exploded structure of the ultraviolet module in the present invention;

Figure 9 is a schematic structural diagram of the heating module in the present invention;

Figure 10 is a schematic diagram of the installation structure of the door of the cleaning box in the present invention;

Figure 11 is a schematic structural diagram of the bracket assembly of the cleaning box in the present invention.

In the picture: 1. Cleaning device;

10. Cleaning box; 11. Chamber; 12. Sample rod installation port; 13. First flange; 14. Second flange; 15. Third flange; 16. Fourth flange; 17. Bracket assembly ; 171. Horizontal guide rail; 172. Tray; 173. Ventilation slot; 18. Door body; 181. Glass panel;

20. Plasma components; 21. Plasma interface; 22. Plasma shell;

30. Lighting component; 31. UV module; 311. Pallet component; 3111. Pallet; 3112. Pillar; 312. UV lamp component; 3121. Bending part; 3122. Connection part; 32. Heating module; 321. Halogen lamp holder; 3211, plug; 322, halogen bulb; 33, lamp holder; 331, mounting hole; 332, mounting stop; 34, lamp panel; 341, square hole; 35, junction box; 36, lampshade; 361, Reflective plate; 362, protective plate; 3621, light-transmitting hole;

40. Exhaust assembly; 41. Exhaust valve;

50. Vacuum gauge.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

In the drawings, the shapes and dimensions may be exaggerated for clarity, and the same reference numbers will be used throughout the drawings to refer to the same or similar parts.

In the following description, terms such as center, thickness, height, length, front, back, rear, left, right, top, bottom, upper, lower, etc. are defined with respect to the configuration shown in the respective figures. , in particular, "height" is equivalent to the size from top to bottom, "width" is equivalent to the size from left to right, and "depth" is equivalent to the size from front to back. They are relative concepts, so it may be based on It changes accordingly in different locations and usage conditions, so these or other directions should not be interpreted as restrictive terms.

Terms referring to attachment, coupling, and the like (e.g., "connected" and "attached") mean that structures are in a fixed or attached relationship, directly or indirectly, to each other through intervening structures, and are movable or rigid attachments or relationships, unless Otherwise stated explicitly.

Example 1

An embodiment of the present invention provides a multifunctional vacuum sample cleaning device 1, as shown in Figures 1 to 11, including:

The cleaning box 10 has a chamber 11 formed in it for placing the sample to be cleaned;

A vacuum pump set is installed with the cleaning box 10 and communicates with the chamber 11, and is used to evacuate the chamber 11;

The plasma component 20 is installed on one side of the cleaning box 10 and communicates with the chamber 11; and the plasma component 20 uses plasma to process the sample surface and takes away sample dirt through the vacuum pump group to form plasma. cleaning mode;

The lighting assembly 30 is installed on the top of the cleaning box 10 and extends into the chamber 11; and the lighting assembly 30 includes a UV module 31 and a heating module 32; wherein,

The ultraviolet module 31 irradiates the sample surface with ultraviolet radiation and takes away the sample dirt through the vacuum pump group to form an ultraviolet cleaning mode;

The heating module 32 heats the chamber 11 to volatilize the sample surface contaminants and take away the sample contaminants through the vacuum pump group, forming a heating cleaning mode;

After the sample is placed in the chamber 11, any one or more of the plasma cleaning mode, the ultraviolet cleaning mode, and the heating cleaning mode are combined so that the sample can be cleaned in a single area. Multifunctional cleaning.

Specifically, the plasma cleaning mode, the ultraviolet cleaning mode and the heating cleaning mode can all be controlled individually; therefore, after placing the sample in the chamber, only the plasma cleaning mode or the ultraviolet cleaning mode or the heating cleaning mode can be selected. , that is, executing a single cleaning mode; you can also combine different cleaning modes, such as combining plasma cleaning mode and UV cleaning mode, or combining UV cleaning mode and heating cleaning mode, or combining plasma cleaning mode and heating cleaning mode, or combining plasma cleaning mode, UV cleaning mode and heating cleaning mode to achieve multi-functional cleaning effects.

The cleaning device 1 can be used for cleaning various scanning electron microscopes, focused ion beam microscopes, and transmission electron microscope sample rods and has functions such as constant temperature vacuum sample storage; the cleaning device 1 consists of a set of vacuum sample chambers 11 and three cleaning functional components. To achieve at least three cleaning modes:

Plasma cleaning mode uses plasma to achieve effects that conventional cleaning methods cannot achieve; plasma is a state of matter, also called the fourth state of matter; applying enough energy to gas to ionize it becomes a plasma state. The "active" components of plasma include: ions, electrons, active groups, excited nuclide (metastable state), photons, etc.; by utilizing the properties of these active components to treat the sample surface, the sample and sample rod are removed Contamination on the surface prevents carbon deposition from reducing image resolution and causing misjudgment in sample micro-area analysis, thereby achieving cleaning and other purposes.

In the ultraviolet cleaning mode, the ultraviolet module 31 in the present invention irradiates the chamber 11 with two special bands of ultraviolet light at the same time. A high concentration of highly active oxygen free radicals are generated in the chamber 11, and the pollutants on the sample surface and the oxygen free radicals are decomposed and removed by reaction. ; Specifically, by generating high-intensity UV light of 185nm and 254nm to decompose organic molecules (pollutants), the 185nm light can convert oxygen molecules ^O2 into active ^O3 ozone molecules, and the 254nm light simultaneously excites organic molecules on the surface, making It is more easily absorbed and decomposed by ozone molecules, allowing for cleaning and other purposes.

In the heating cleaning mode, the chamber 11 heats up quickly and can be heated up to 150°C. When used with a vacuum pump unit, contaminants on the surface of the sample can be quickly evaporated and removed, thereby achieving cleaning and other purposes; heating cleaning can perfectly preserve the inherent shape of the material. Its physical properties are also improved to make it suitable for observation and imaging under an electron microscope; preferably, the heating module 32 is equipped with a high-precision temperature controller to control the temperature accuracy within ±1°C.

The present invention forms a multifunctional cleaning device 1 that integrates three cleaning modes: plasma cleaning, ultraviolet cleaning and heated vacuum desorption cleaning by arranging a vacuum pump group, a plasma component 20, an ultraviolet module 31 and a heating module 32, that is, it can be used in the same Plasma cleaning, ultraviolet cleaning, and/or heated vacuum desorption cleaning are performed in the chamber 11. Corresponding cleaning modes or combined cleaning modes can be selected according to the requirements of different electron microscopes for samples, effectively reducing contaminants attached to the sample, and reducing or even eliminating the sample. The impact of carbon deposition during the microscopic imaging process improves the quality of sample preparation, and is highly versatile. It can effectively reduce sample preparation time and cost, optimize sample preparation procedures, and improve efficiency. At the same time, samples can be stored in vacuum to effectively ensure sample quality.

In one embodiment, as shown in FIGS. 9 and 10 , a pull-out bracket assembly 17 is provided in the cleaning box 10 . The bracket assembly 17 includes at least three sets of horizontal guide rails 171 for placing the tray 172 to form multiple sample storage areas.

Furthermore, the front and rear side walls of the bracket assembly 17 are arranged through, and ventilation slots 173 are provided on the left and right side walls. This arrangement is conducive to the flow of gas in the chamber 11 to improve the cleaning effect.

In one embodiment, the plasma component 20 and the vacuum pump set are connected to different sides of the cleaning box 10; wherein,

The plasma component 20 is connected to the cleaning box 10 near the top, and the vacuum pump group is connected to the cleaning box 10 near the bottom; specifically,

The communication point between the plasma component 20 and the chamber 11 is located on the upper side of the bracket component 17;

The communication point between the vacuum pump set and the chamber 11 is close to the bottom of the bracket assembly 17 .

This arrangement is conducive to increasing the contact surface between the plasma gas and the sample placed on the bracket assembly 17, thereby improving the plasma cleaning effect.

Further, as shown in FIGS. 1-4 , the plasma component 20 includes an inductively coupled plasma source. Among them, the new inductively coupled plasma source (ICP), whose particle density is much higher than that of the traditional capacitively coupled plasma technology (CCP), can efficiently remove hydrocarbon contaminants on the sample surface by generating high concentrations of oxygen radicals; and Downstream (downstream plasma) ) cleaning method, non-destructive cleaning of the sample surface, maintaining the original morphology of the sample surface to the greatest extent.

Further, the plasma component 20 includes a plasma interface 21 and a plasma shell 22; wherein, the plasma shell 22 is used to accommodate plasma, and the plasma interface 21 is provided at an end of the plasma shell 22 to communicate with the cleaning box. The side walls of the body 10 are connected to directionally deliver plasma into the chamber 11 .

The working principle of the plasma cleaning mode includes: placing the sample in the chamber 11 of the cleaning box 10 , after the plasma source generates plasma in the plasma shell 22 , the negative pressure generated by pumping the vacuum pump group causes the plasma to pass through the plasma interface 21 It flows downstream into the chamber 11 and reacts chemically with the organic pollutants remaining on the surface of the sample to generate CO ₂ , CO and H ₂ O, which are pumped out by the vacuum pump group to reduce carbon deposition on the electron microscope sample and improve imaging resolution and contrast.

In one embodiment, as shown in Figures 5-9, the lighting assembly 30 further includes:

The lamp holder 33 is installed with the cleaning box 10 and forms the top finish of the cleaning box 10;

The lamp panel 34 is installed with the lamp holder 33 and located below the lamp holder 33, and the UV module 31 and the heating module 32 are fixed to the lamp panel 34;

A junction box 35 is fixedly connected to the light panel 34 to form a wiring space for the light assembly 30;

The lampshade 36 is fixed to the lamp panel 34 and covers the outside of the ultraviolet module 31 and the heating module 32, and is used to guide the emission direction of the light from the ultraviolet module 31 and the heating module 32.

Specifically, a mounting hole 331 is provided on the surface of the lamp holder 33, and the lamp holder 33 is fixed to the cleaning box 10 through the mounting hole 331, and a mounting stop 332 is formed on the surface of the lamp holder 33 facing the cleaning box 10. The installation stop 332 is adapted to the shape of the upper opening of the cleaning box 10. When the light assembly 30 is installed on the cleaning box 10, the installation stop 332 extends into the opening to form a seal; the light panel 34 It is fixedly connected to the lamp holder 33 through fasteners, and a square hole 341 is opened in the middle of the lamp plate 34, and its position corresponds to the junction box 35 to facilitate the wiring harness; on the one hand, the lampshade 36 can be provided Protecting the UV module 31 and the heating module 32, on the other hand, it can realize the directional emission of the light from the UV module 31 and the heating module 32, that is, the UV module 31 and the heating module 32 are fixed on the lamp panel 34 to achieve vertical illumination of the sample and precise control. It can quickly clean and remove contaminants on the sample surface.

Further, as shown in FIG. 4 , the light assembly 30 is located directly above the bracket assembly 17 , and the lampshade 36 guides the vertical illumination of the light from the ultraviolet module 31 and the heating module 32 to the bracket assembly 17 .

Furthermore, the light coverage area of the light assembly 30 is larger than the upper surface area of the bracket assembly 17 , that is, the cleaning rate and cleaning effect are enhanced by increasing the coverage area of the light assembly 30 .

Further, the heating modules are distributed on the outer peripheral side of the ultraviolet module.

In one embodiment, the UV module 31 includes a bracket assembly 311 and a UV lamp assembly 312 installed with the bracket assembly 311; wherein,

The support plate assembly 311 includes at least four pillars 3112 for fixed connection with the lamp panel 34; the UV lamp assembly 312 is bent in an S-shape and is disposed below the support plate assembly 311.

Specifically, in this embodiment, the supporting plate assembly 311 includes a supporting plate 3111 and four pillars 3112 located at both edges of the supporting plate 3111; wherein, the UV lamp assembly 312 includes a bending portion 3121 and a connecting portion 3122. The bending portion 3121 is bent in an S-shape on the lower side of the supporting plate 3111, and the connecting portion 3122 extends to the upper side of the supporting plate 3111; on the one hand, this arrangement enables the UV lamp assembly 312 to be clamped on the supporting plate 3111 on the other hand, it is convenient to connect the connecting part 3122 to the control circuit.

Further, two pillars 3112 are respectively provided on opposite sides of the supporting plate 3111. One end of the pillars 3112 is fixed to the supporting plate 3111, and the other end is fixed to the light panel 34, so as to facilitate the installation of the ultraviolet module 31 on the supporting plate 3111. The lower side of the junction box 35 has good stability.

The working principle of the UV cleaning mode includes: placing the sample in the chamber 11 of the cleaning box 10, the UV lamp assembly 312 provides two special band ultraviolet lights to simultaneously irradiate the chamber 11, and a high concentration and high activity is generated in the chamber 11 Oxygen free radicals, sample surface contaminants and oxygen free radicals react and decompose and are removed by the vacuum pump unit to achieve cleaning purposes.

In one embodiment, the heating module 32 includes at least four halogen lamps, and the halogen lamps include a halogen lamp holder 321 and a halogen bulb 322; wherein,

A plug 3211 is formed on the end of the halogen lamp holder 321 for connection with the lamp panel 34;

The halogen bulb 322 is connected to the halogen lamp holder 321, and the light waves emitted by the halogen bulb 322 are used to heat the sample to be cleaned in the chamber 11.

The light output of halogen lamps is more concentrated, the light pattern is more concentrated, and the light pattern has no obvious light and dark areas, and can heat up quickly.

Further, two halogen lamps are respectively installed on opposite sides of the lamp panel 34 .

The working principle of vacuum heating cleaning is as follows: the sample is placed in the chamber 11 of the cleaning box 10, and the light waves emitted by the halogen lamp heat the chamber 11 to increase the temperature of the electron microscope sample and remove the organic matter attached to the surface of the electron microscope sample. and water volatilizes to generate CO ₂ , CO and H ₂ O, which are pumped out by the vacuum pump group to reduce carbon deposits on electron microscope samples and improve imaging resolution and contrast.

In one embodiment, the junction box 35 is covered with reflective material to adjust the light path.

Further, the lampshade 36 includes a reflective plate 361 and a protective plate 362; wherein,

The reflective plate 361 is fixedly connected to the lamp panel 34 and surrounds the outer peripheral side of the ultraviolet module 31 and the heating module 32 to prevent dust while ensuring that the ultraviolet module 31 and the heating module 32 illuminate the cavity vertically. Room 11;

The protective plate 362 is installed on the lower side of the reflective plate 361 , and a plurality of light-transmitting holes 3621 are formed on the protective plate 362 to facilitate the transmission of light from the ultraviolet module 31 and the heating module 32 .

Among them, the reflective plate 361 is used to reflect the light of the halogen lamp onto the sample to accelerate the temperature rise.

In one embodiment, as shown in Figures 2 and 3, it also includes: an exhaust assembly 40, which is connected to the cleaning box 10 and communicates with the chamber 11; and the exhaust assembly 40 and The vacuum pump set is located on the same side of the cleaning box 10 . Further, the exhaust assembly 40 and the vacuum pump unit are located on the same horizontal line. Specifically, the exhaust assembly 40 includes an exhaust valve 41 to control the working state of the exhaust assembly 40. When the cleaning device 1 completes the cleaning work, the exhaust valve 41 of the exhaust assembly 40 can be opened. , the air inside the chamber 11 can be discharged to the outside of the chamber 11 .

In one embodiment, as shown in Figures 1 and 3, the cleaning box 10 is provided with at least one sample rod mounting port 12, which is located on the side opposite to the plasma assembly 20. The sample rod is installed The port 12 is connected with the chamber 11 and is used for inserting the transmission electron microscope sample rod. By reserving a special interface on the cleaning box 10 to facilitate the access of the transmission electron microscope sample rod, efficient cleaning of samples from both scanning electron microscopes and transmission electron microscopes can be achieved on one machine.

In one embodiment, as shown in FIGS. 2 and 3 , the cleaning box 10 is also equipped with a vacuum gauge 50 , which is located on the side wall of the cleaning box 10 and communicates with the chamber 11 . The vacuum degree of the chamber 11 is measured. Specifically, the vacuum gauge 50 is used to monitor the vacuum degree value in the chamber 11 in real time, and form a feedback system with the gas circuit system to control the gas flow in the chamber 11. Moreover, since the chamber 11 is connected with the plasma component 20 and the ultraviolet module 31. The heating module 32 is connected, so that the vacuum degree value in the entire cleaning box 10 can be monitored through the vacuum gauge 50 .

In one embodiment, as shown in Figures 1-3 and 10, the cleaning box 10 is also equipped with a first flange 13, a second flange 14, a third flange 15 and a fourth flange 16; wherein , the first flange 13 is used to dock with the plasma interface 21; the second flange 14 is used to connect the exhaust assembly 40 and the chamber 11; the third flange 15 is used to connect the vacuum pump group and the Chamber 11; the fourth flange 16 is used to connect the vacuum gauge 50 and the chamber 11.

Furthermore, the cleaning device 1 in the present invention also includes a vacuum storage function. The working principle of the vacuum storage is: place the electron microscope sample/transmission electron microscope sample rod in the chamber 11 of the cleaning box 10, and use a vacuum pump set to clean the chamber. The chamber 11 is evacuated, and at the same time, the residual gas and contaminants on the surface of the electron microscope sample/transmission electron microscope sample rod are removed, thereby realizing vacuum storage of the electron microscope sample and the transmission electron microscope sample rod.

In one embodiment, the cleaning box 10 adopts a combined structure of welding and splicing, and the main body of the chamber 11 adopts a welded structure, which has good air tightness.

Furthermore, the cleaning box 10 is also provided with a door 18 for opening and closing the chamber 11; wherein, an O-ring is used to seal the door 18 and the cleaning box 10. .

Further, the door 18 includes a glass panel 181 to facilitate observation of the cleaning status and cleaning process of the sample in the chamber 11 , wherein the glass panel 181 is made of quartz glass.

Example 2

The embodiment of the present invention also provides a method of using a multifunctional vacuum sample cleaning device 1, which is applied to the multifunctional vacuum sample cleaning device 1 described in Embodiment 1, including the steps:

Step 1: After placing the sample in the chamber 11 of the cleaning box 10, select the cleaning mode of the cleaning device 1; wherein the cleaning mode at least includes a plasma cleaning mode, an ultraviolet cleaning mode and a heating cleaning mode;

Step 2. Start the cleaning device 1:

When the cleaning device 1 is in the plasma cleaning mode, the plasma generated by the plasma component 20 enters the chamber 11 to decompose the organic pollutants remaining on the surface of the sample and be pumped out by the vacuum pump unit;

When the cleaning device 1 is in the ultraviolet cleaning mode, the ultraviolet module 31 provides two bands of ultraviolet light to simultaneously irradiate the chamber 11. A high concentration of highly active oxygen radicals are generated in the chamber 11, and the pollutants on the sample surface react and decompose with the oxygen radicals. and be extracted and removed by the vacuum pump unit;

When the cleaning device 1 is in the heating cleaning mode, the light waves emitted by the heating module 32 heat the chamber 11, causing the temperature of the sample to increase and the organic matter and moisture attached to the surface to volatilize, and be pumped out by the vacuum pump unit;

Step 3: After the sample cleaning is completed, close the cleaning device 1.

Although the embodiments of the present invention have been disclosed above, they are not limited to the applications listed in the description and embodiments. They can be applied to various fields suitable for the present invention. For those familiar with the art, they can easily Additional modifications may be made and the invention is therefore not limited to the specific details and illustrations shown and described herein without departing from the general concept defined by the claims and their equivalent scope.

Claims (10)

1. A multifunctional vacuum sample cleaning device, comprising:

a cleaning box body, in which a chamber is formed for placing a sample;

the vacuum pump set is arranged on the cleaning box body and communicated with the cavity and is used for vacuumizing the cavity;

a plasma component which is arranged at one side of the cleaning box body and is communicated with the cavity; the plasma component treats the surface of the sample by utilizing plasma and takes away sample dirt through the vacuum pump set to form a plasma cleaning mode;

the light assembly is arranged at the top of the cleaning box body and extends into the cavity; the light assembly comprises an ultraviolet module and a heating module; wherein,

the ultraviolet module irradiates ultraviolet on the surface of the sample and takes away sample dirt through the vacuum pump set to form an ultraviolet cleaning mode;

the heating module heats the cavity to volatilize pollutants on the surface of the sample and takes away the pollutants of the sample through the vacuum pump set so as to form a heating cleaning mode;

after the sample is placed in the cavity, the sample can be cleaned in a single area by combining any one or more of the plasma cleaning mode, the ultraviolet cleaning mode and the heating cleaning mode.

2. The multi-functional vacuum sample cleaning device of claim 1, wherein: the chamber is internally provided with a drawable bracket assembly which comprises at least three groups of horizontal guide rails for placing trays to form a plurality of sample storage areas.

3. The multi-functional vacuum sample cleaning device of claim 2, wherein: the plasma component and the vacuum pump set are connected to different sides of the cleaning box body; wherein,

the communication part of the plasma component and the chamber is positioned on the upper side of the bracket component;

the communicating part of the vacuum pump set and the cavity is close to the bottom of the bracket component.

4. The multi-purpose vacuum sample cleaning device of claim 2 wherein said light assembly further comprises:

a lamp socket mounted with the washing case and forming a top finish of the washing case;

the lamp panel is installed with the lamp holder and positioned below the lamp holder, and the ultraviolet module and the heating module are fixed with the lamp panel;

the lamp shade is fixed with the lamp panel and covers the outer sides of the ultraviolet module and the heating module, and is used for guiding the emergent direction of lamplight of the ultraviolet module and the heating module.

5. The multi-functional vacuum sample cleaning device of claim 4, wherein: the lamplight assembly is located right above the support assembly, and the lamp shade guides the ultraviolet module and the lamp light of the heating module to vertically irradiate on the support assembly.

6. The multi-functional vacuum sample cleaning device of claim 5, wherein: the light coverage area of the light assembly is larger than the upper surface area of the bracket assembly.

7. The multi-functional vacuum sample cleaning device of claim 1, wherein: the cleaning box body is provided with at least one sample rod mounting port which is positioned on one side opposite to the plasma component, and the sample rod mounting port is communicated with the cavity and is used for being inserted with a transmission electron microscope sample rod.

8. The multi-purpose vacuum sample cleaning device of claim 1, further comprising: and the exhaust assembly is connected with the cleaning box body and communicated into the cavity, and the exhaust assembly and the vacuum pump set are positioned on the same side of the cleaning box body.

9. The multi-functional vacuum sample cleaning apparatus of claim 8, wherein: the cleaning box body is also provided with a first flange, a second flange, a third flange and a fourth flange; wherein the first flange is configured to interface with the plasma assembly; the second flange is used for connecting the exhaust assembly and the chamber; the third flange is used for connecting the vacuum pump set and the chamber; the fourth flange is used for being connected with a vacuum gauge.

10. A method of using a multifunctional vacuum sample cleaning device according to any one of claims 1-9, comprising the steps of:

step one, after a sample is placed in a cavity of the cleaning box body, a cleaning mode of a cleaning device is selected; wherein the cleaning mode at least comprises a plasma cleaning mode, an ultraviolet cleaning mode and a heating cleaning mode;

step two, starting the cleaning device:

when the cleaning device is in a plasma cleaning mode, plasma generated by the plasma component enters the cavity, so that organic pollutants remained on the surface of the sample are decomposed and pumped out by the vacuum pump set;

when the cleaning device is in an ultraviolet cleaning mode, the ultraviolet module provides ultraviolet light with two wave bands to irradiate the cavity at the same time, high-concentration high-activity oxygen free radicals are generated in the cavity, and pollutants on the surface of the sample and the oxygen free radicals are decomposed through reaction and are pumped out by the vacuum pump set for removal;

when the cleaning device is in a heating and cleaning mode, the cavity is heated by the light waves emitted by the heating module, so that the temperature of the sample is increased to volatilize organic matters and moisture attached to the surface of the sample, and the sample is pumped out by the vacuum pump set;

and step three, closing the cleaning device after the sample is cleaned.