CN117070912B - A synergistic adsorption plate for coating deposits in a vacuum coating machine - Google Patents
A synergistic adsorption plate for coating deposits in a vacuum coating machine Download PDFInfo
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- CN117070912B CN117070912B CN202311049999.4A CN202311049999A CN117070912B CN 117070912 B CN117070912 B CN 117070912B CN 202311049999 A CN202311049999 A CN 202311049999A CN 117070912 B CN117070912 B CN 117070912B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D163/00—Coating compositions based on epoxy resins; Coating compositions based on derivatives of epoxy resins
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D175/00—Coating compositions based on polyureas or polyurethanes; Coating compositions based on derivatives of such polymers
- C09D175/04—Polyurethanes
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/40—Additives
- C09D7/60—Additives non-macromolecular
- C09D7/63—Additives non-macromolecular organic
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
- C23C4/08—Metallic material containing only metal elements
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/129—Flame spraying
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/131—Wire arc spraying
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- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
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Abstract
The invention discloses a synergistic adsorption plate for coating sediments in a vacuum coating machine, which relates to the technical field of coating and comprises a substrate plate, wherein a sand spraying layer is arranged on the substrate plate, a normal-temperature spraying layer is arranged on the sand spraying layer, a thermal spraying layer is arranged on the normal-temperature spraying layer, the air pressure of the sand spraying layer in sand spraying is 0.1-3 Kgf/cm < 2 >, brown corundum with 10-80 meshes is adopted as sand spraying particles, the roughness Ra of the sand spraying layer is 3-8 mu m, the normal-temperature spraying layer comprises, by mass, 30-60% of adhesion promoter, 0-40% of polyurethane resin and 0-40% of epoxy resin, and the thickness of the normal-temperature spraying layer is 0.5-1 mu m.
Description
Technical Field
The invention relates to the technical field of coating, in particular to a synergistic adsorption plate for coating sediments in a vacuum coating machine, which can be applied to the industries of vacuum sputtering coating, optical vacuum coating, semiconductors, liquid crystal panels, optical communication, automobile glass, decorative coating and the like.
Background
The adsorption plate is used for sucking away redundant coating sediments in the cavity of the coating machine, and has the characteristic of adsorbing the coating sediments because the adsorption plate is provided with a film layer (the thickness of the film layer is 0.01-1.00 mm), and has the function of enabling particles to stay on the adsorption plate and not to fall off easily.
The roughness (Ra) of the adsorption plate on the market is generally below 25 mu m, the specific roughness (Ra) is between 15 and 25 mu m, when the adsorption plate absorbs the coating deposit, the adsorption plate is easy to fall down along with the change of the gas parameters in the vacuum furnace due to insufficient depth, the adsorption amount of the adsorption plate relative to the coating deposit is insufficient due to insufficient surface area of the adsorption plate, and in addition, delamination and slag falling phenomena are easy to occur when the adsorption plate is bent.
Because the existing adsorption plate has the defects, the maintenance period of the vacuum furnace is short, and the production cost and the yield of the coating machine are affected to a certain extent.
Disclosure of Invention
The invention provides a technical scheme capable of solving the problems in order to overcome the defects of the prior art.
A synergistic adsorption plate for coating sediments in a vacuum coating machine comprises a substrate plate;
The substrate plate is provided with a sand spraying layer, the sand spraying layer is provided with a normal-temperature spraying layer, and the normal-temperature spraying layer is provided with a thermal spraying layer;
the surface of the base material plate is roughened by the sand blasting layer, the air pressure of the sand blasting layer during sand blasting is 0.1-3 Kgf/cm <2 >, 10-80-mesh brown corundum is adopted as sand blasting particles of the sand blasting layer, and the roughness Ra of the sand blasting layer is 3-8 mu m;
The normal temperature spray coating is formed by forming a spray film on the sand spraying layer by adopting a coupling agent, wherein the coupling agent comprises, by mass, 30-60% of adhesion promoter, 0-40% of polyurethane resin and 0-40% of epoxy resin, the adhesion promoter is formed by mixing any one or more groups of silane, titanate, aluminate, zirconate, aluminum-titanium composite, borate, organic sulfonic acid, polyacrylamide, curing agent and promoter, and the thickness of the normal temperature spray coating is 0.5-1 mu m.
As a further scheme of the invention, the substrate plate adopts any one of a 304 stainless steel plate, a copper plate, an aluminum plate, a titanium plate, an engineering plastic PA plate, an engineering plastic PEEK plate, a silicon plate and a ceramic plate.
The coupling agent of the normal temperature spray coating comprises 52-60% of aluminate, 26-35% of polyurethane resin, 5-21% of curing agent and 1-2% of accelerator according to mass percent.
As a further scheme of the invention, the thermal spraying layer is sprayed on the sand spraying layer in an electric arc thermal spraying mode, the wire diameter of a metal wire in the electric arc thermal spraying is 0.5-5mm, the wire feeding speed in the electric arc thermal spraying is 1-20mm/sec, the compressed air in the electric arc thermal spraying is 0.1-3.0 Kgf/cm < 2 >, and the current in the electric arc thermal spraying is 200-600A.
As a further proposal of the invention, the wire diameter during the electric arc thermal spraying is 2.0mm, the wire feeding speed during the electric arc thermal spraying is 10mm/sec, the compressed air during the electric arc thermal spraying is 0.13-0.15Kgf/cm < 2 >, the current during the electric arc thermal spraying is 300-350A, the thickness of the thermal spraying layer is 0.1-0.5mm, the roughness Ra of the thermal spraying layer is 35-45 mu m, the Rz is 200-300 mu m, and the surface area of the thermal spraying layer is more than 4 times the surface area of the substrate plate.
As a further scheme of the invention, the metal wire is any one of aluminum wire, copper wire, nickel wire and stainless steel wire during electric arc thermal spraying.
The thermal spraying layer is sprayed on the sand spraying layer in a flame spraying mode, a spray gun is adopted to spray on the sand spraying layer in flame spraying, combustion gas sprayed by the spray gun comprises 0.08-0.14MPa of acetylene, 0.5-0.7MPa of oxygen and 0.5-0.7MPa of air, metal powder is adopted to be sent into the spray gun for spraying at the speed of 10-150g/min in flame spraying, and the size of the metal powder is 50-150 meshes.
As a further proposal of the invention, metal powder is fed into a spray gun for spraying at the speed of 25-30g/min, the size of the metal powder is 60-120 meshes, the speed of the spray gun is 150mm/sec, the distance between the spray gun and the sand blasting layer is 20-30cm, and the thickness of the thermal spraying layer is 0.1-0.5mm.
As a further proposal of the invention, the metal powder used in flame spraying adopts any one metal particle among aluminum, copper, indium and tin.
As a further scheme of the invention, a wind gun is used for dedusting on the thermal spraying coating, the wind pressure of the wind gun is 6-8 Kgf/cm <2 >, and then the wind gun is placed into a water tank for ultrasonic cleaning, and the power of ultrasonic cleaning is 150w.
Compared with the prior art, the invention has the beneficial effects that:
1. The surface of the base material plate is coated with a coupling agent and subjected to electric arc or flame thermal spraying to generate an adsorption plate product with the roughness of about 30-80 mu m, and the hole depth of the adsorption plate can be increased along with the increase of the roughness, so that the deeper the holes are, the less the coating deposition is easy to fall off.
2. The invention is a practical method for manufacturing the structural characteristics of the film layer on the adsorption plate, increases the binding force between the roughness of the film layer and the substrate plate, further increases the adsorption surface area, has good film layer binding property, is not easy to fall off residues, and has better adsorption effect when compared with the untreated same surface, the product characteristics of the adsorption plate can be increased by more than 4 times through measurement.
3. The invention makes a synergistic adsorption plate of the coating sediments in the vacuum coating machine, increases the roughness to 30-80 mu m to increase the absorption of various coating sediments, increases the adsorption rate of the adsorption plate by more than or equal to 30%, increases the yield by more than or equal to 10% after verification of the vacuum coating machine and can prolong the service period.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained according to these drawings without inventive faculty for a person skilled in the art.
FIG. 1 is a schematic illustration of the process flow of the present invention;
FIG. 2 is a schematic illustration of a process flow employing arc thermal spraying in accordance with the present invention;
FIG. 3 is a schematic illustration of a process flow employing flame thermal spraying in accordance with the present invention;
FIG. 4 is a schematic structural view of a synergistic adsorption plate made by arc thermal spraying according to the invention;
FIG. 5 is a schematic diagram of the structure of a synergistic adsorption plate made by flame thermal spraying.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown.
The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention.
All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected via an intervening medium, or in communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
As shown in fig. 1 to 5, the synergistic adsorption plate for coating sediments in a vacuum coating machine comprises a substrate plate 1;
The base material plate 1 is provided with a sand blasting layer 2, the sand blasting layer 2 is provided with a normal temperature spraying layer 3, and the normal temperature spraying layer 3 is provided with a thermal spraying layer 4;
the sand blasting layer 2 is used for coarsening the sand blasting surface on the surface of the base material plate 1, the air pressure of the sand blasting layer 2 during sand blasting is 0.1-3 Kgf/cm <2 >, 10-80-mesh brown corundum is adopted as sand blasting particles of the sand blasting layer 2, and the roughness Ra of the sand blasting layer 2 is 3-8 mu m;
The normal temperature spray coating 3 is formed by forming a spray film on the sand spraying layer 2 by adopting a coupling agent, wherein the coupling agent comprises, by mass, 30-60% of adhesion promoter, 0-40% of polyurethane resin and 0-40% of epoxy resin, the adhesion promoter is formed by mixing any one or more groups of silane, titanate, aluminate, zirconate, aluminum-titanium composite, borate, organic sulfonic acid, polyacrylamide, curing agent and promoter, and the thickness of the normal temperature spray coating 3 is 0.5-1 mu m.
As a further scheme of the invention, the base material plate 1 adopts any one of a 304 stainless steel plate, a copper plate, an aluminum plate, a titanium plate, an engineering plastic PA plate, an engineering plastic PEEK plate, a silicon plate and a ceramic plate.
The coupling agent of the normal temperature spray coating 3 comprises 52-60% of aluminate, 26-35% of polyurethane resin, 5-21% of curing agent and 1-2% of accelerator according to mass percent.
As a further scheme of the invention, the thermal spraying layer 4 is sprayed on the sand blasting layer 2 in an electric arc thermal spraying mode, the wire diameter of a metal wire in the electric arc thermal spraying is 0.5-5mm, the wire feeding speed in the electric arc thermal spraying is 1-20mm/sec, the compressed air in the electric arc thermal spraying is 0.1-3.0 Kgf/cm < 2 >, and the current in the electric arc thermal spraying is 200-600A.
As a further proposal of the invention, the wire diameter at the time of electric arc thermal spraying is 2.0mm, the wire feeding speed at the time of electric arc thermal spraying is 10mm/sec, the compressed air at the time of electric arc thermal spraying is 0.13-0.15Kgf/cm < 2 >, the current at the time of electric arc thermal spraying is 300-350A, the thickness of the thermal spraying layer 4 is 0.1-0.5mm, the roughness Ra of the thermal spraying layer 4 is 35-45 mu m, rz is 200-300 mu m, and the surface area of the thermal spraying layer 4 is more than 4 times the surface area of the base plate 1.
As a further scheme of the invention, the metal wire is any one of aluminum wire, copper wire, nickel wire and stainless steel wire during electric arc thermal spraying.
As a further scheme of the invention, the thermal spraying layer 4 is sprayed on the sand blasting layer 2 in a flame spraying mode, a spray gun is adopted to spray on the sand blasting layer 2 in flame spraying, combustion gas sprayed by the spray gun comprises 0.08-0.14MPa of acetylene, 0.5-0.7MPa of oxygen and 0.5-0.7MPa of air, metal powder is adopted to be sent into the spray gun for spraying at the speed of 10-150g/min in flame spraying, and the size of the metal powder is 50-150 meshes.
As a further proposal of the invention, metal powder is fed into a spray gun for spraying at the speed of 25-30g/min, the size of the metal powder is 60-120 meshes, the speed of the spray gun is 150mm/sec, the distance between the spray gun and the sand blasting layer 2 is 20-30cm, and the thickness of the thermal spraying layer 4 is 0.1-0.5mm.
As a further proposal of the invention, the metal powder used in flame spraying adopts any one metal particle among aluminum, copper, indium and tin.
As a further scheme of the invention, a wind gun is used for dedusting on the thermal spraying layer 4, the wind pressure of the wind gun is 6-8 Kgf/cm <2 >, and then the wind gun is placed into a water tank for ultrasonic cleaning, and the power of the ultrasonic cleaning is 150w.
The invention also provides two cases when the operation is implemented:
In the first embodiment, as shown in fig. 1,2 and 4,
The base material plate 1 adopts 304 stainless steel plates;
The method comprises the steps that a sand spraying layer 2 is arranged on a base plate 1, sand spraying surface roughening is conducted on the surface of the base plate 1 through the sand spraying layer 2, air pressure during sand spraying is 0.1-3 Kgf/cm < 2 >, sand spraying particles are 10-80 meshes of brown corundum, and roughness Ra of the sand spraying layer 2 is 3-8 mu m;
The normal temperature spray coating 3 is a film sprayed on the sand blasting layer 2 by adopting a coupling agent, the thickness of the film is 0.5-1 mu m, and the coupling agent comprises 52-60% of aluminate, 26-35% of polyurethane resin, 5-21% of curing agent and 1-2% of accelerator according to mass percent;
The thermal spraying layer 4 is arranged on the normal temperature spraying layer 3 in an electric arc thermal spraying mode, an aluminum wire with the wire diameter of 2.0mm is adopted as a metal wire for electric arc thermal spraying, the wire feeding speed is 10mm/sec, compressed air in electric arc thermal spraying is 0.13-0.15 Kgf/cm < 2 >, current adopted in electric arc thermal spraying is 300-350A, the thickness of the thermal spraying layer 4 is 0.1-0.5mm, the roughness Ra of the thermal spraying layer 4 is 35-45 mu m, rz is 200-300 mu m, and the surface area of the thermal spraying layer 4 is more than 4 times that of the base material plate 1;
The surface of the thermal spraying coating 4 is dedusted by using an air gun, the air pressure of the air gun is 6-8 Kgf/cm < 2 >, and then the thermal spraying coating is put into clean water to be cleaned by using ultrasonic waves, the power of ultrasonic cleaning is 150w, and the synergistic adsorption plate is manufactured.
In the second embodiment, as shown in figures 1, 3 and 5,
The base material plate 1 adopts 304 stainless steel plates;
The method comprises the steps that a sand spraying layer 2 is arranged on a base plate 1, sand spraying surface roughening is conducted on the surface of the base plate 1 through the sand spraying layer 2, air pressure during sand spraying is 0.1-3 Kgf/cm < 2 >, sand spraying particles are 10-80 meshes of brown corundum, and roughness Ra of the sand spraying layer 2 is 3-8 mu m;
The normal temperature spray coating 3 is a film sprayed on the sand blasting layer 2 by adopting a coupling agent, the thickness of the film is 0.5-1 mu m, and the coupling agent comprises 52-60% of aluminate, 26-35% of polyurethane resin, 5-21% of curing agent and 1-2% of accelerator according to mass percent;
The thermal spraying layer 4 is arranged on the normal temperature spraying layer 3 in a flame spraying mode, combustion gas sprayed by a spray gun comprises 0.08-0.14MPa of acetylene, 0.5-0.7MPa of oxygen and 0.5-0.7MPa of air, metal powder in flame spraying is aluminum powder particles with 60-120 meshes, the aluminum powder is sent into the spray gun for spraying at a speed of 25-30g/min, the speed of the spray gun is 150mm/sec, the distance between the spray gun and the sand blasting layer 2 is 20-30cm, and the thickness of the thermal spraying layer 4 is 0.1-0.5mm;
The surface of the thermal spraying coating 4 is dedusted by using an air gun, the air pressure of the air gun is 6-8 Kgf/cm < 2 >, and then the thermal spraying coating is put into clean water to be cleaned by using ultrasonic waves, the power of ultrasonic cleaning is 150w, and the synergistic adsorption plate is manufactured.
The invention coats the coupling agent on the base material plate 1, uses electric arc or flame to carry out thermal spraying, and then makes the surface generate roughness of about 30-80 mu m, the coupling agent can increase the depth of roughness, and can also make the thermal spraying material well combined with the base material plate 1, the coating can not fall off during bending, the high roughness can increase the surface adsorption force, and the coating deposit is firmly adhered, and the adsorption plate product of the invention achieves the expected result through the verification of a coating machine.
The verification result of the coating machine shows that the high-surface-area adsorption plate and the aluminum material have no delamination phenomenon and have no slag falling problem in actual measurement.
The invention makes a synergistic adsorption plate of the coating sediments in the vacuum coating machine, increases the roughness to 30-80 mu m to increase the absorption of various coating sediments, increases the adsorption rate of the adsorption plate by more than or equal to 30%, increases the yield by more than or equal to 10% after verification of the vacuum coating machine and can prolong the service period.
The present embodiment is not limited in any way by the shape, material, structure, etc. of the present invention, and any simple modification, equivalent variation and modification made to the above embodiments according to the technical substance of the present invention are all included in the scope of protection of the technical solution of the present invention.
Claims (10)
1. A synergistic adsorption plate for coating sediments in a vacuum coating machine comprises a substrate plate (1);
the base material plate is characterized in that a sand spraying layer (2) is arranged on the base material plate (1), a normal-temperature spraying layer (3) is arranged on the sand spraying layer (2), and a thermal spraying layer (4) is arranged on the normal-temperature spraying layer (3);
The sand blasting layer (2) is used for coarsening the sand blasting surface on the surface of the base material plate (1), the air pressure of the sand blasting layer (2) during sand blasting is 0.1-3 Kgf/cm < 2 >, 10-80-mesh brown corundum is adopted as sand blasting particles of the sand blasting layer (2), and the roughness Ra of the sand blasting layer (2) is 3-8 mu m;
The normal temperature spray coating (3) is formed by forming a spray coating film on the sand blasting layer (2) by adopting a coupling agent, wherein the coupling agent comprises, by mass, 30-60% of an adhesion promoter, 0-40% of polyurethane resin and 0-40% of epoxy resin, the adhesion promoter is formed by mixing any one or more groups of silanes, titanates, aluminates, zirconates, aluminum-titanium composites, borates, organic sulfonic acid, polyacrylamide, curing agents and promoters, and the thickness of the normal temperature spray coating (3) is 0.5-1 mu m.
2. The synergistic adsorption plate for coating sediments in a vacuum coating machine according to claim 1, wherein the base material plate (1) is any one of a 304 stainless steel plate, a copper plate, an aluminum plate, a titanium plate, an engineering plastic PA plate, an engineering plastic PEEK plate, a silicon plate and a ceramic plate.
3. The synergistic adsorption plate for coating sediments in a vacuum coating machine according to claim 1, wherein the coupling agent of the normal temperature spray coating layer (3) comprises 52-60% of aluminate, 26-35% of polyurethane resin, 5-21% of curing agent and 1-2% of accelerator in percentage by mass.
4. A synergistic adsorption plate for coating deposits in a vacuum coating machine according to claim 1, 2 or 3, wherein the thermal spray coating layer (4) is sprayed on the sand blasting layer (2) by means of electric arc thermal spraying, the wire diameter during electric arc thermal spraying is 0.5-5mm, the wire feeding speed during electric arc thermal spraying is 1-20mm/sec, the compressed air during electric arc thermal spraying is 0.1-3.0 Kgf/cm < 2 >, and the current during electric arc thermal spraying is 200-600A.
5. A synergistic adsorption plate for coating deposits in a vacuum coating machine according to claim 4, characterized in that the wire diameter at the time of arc thermal spraying is 2.0mm, the wire feeding speed at the time of arc thermal spraying is 10mm/sec, the compressed air at the time of arc thermal spraying is 0.13-0.15Kgf/cm2, the current at the time of arc thermal spraying is 300-350A, the thickness of the thermal spraying layer (4) is 0.1-0.5mm, the roughness Ra of the thermal spraying layer (4) is 35-45 μm, rz is 200-300 μm, and the surface area of the thermal spraying layer (4) is 4 times or more than the surface area of the base plate (1).
6. The synergistic adsorption plate of claim 5, wherein the metal wire is any one of aluminum wire, copper wire, nickel wire and stainless steel wire.
7. A synergistic adsorption plate for coating sediments in a vacuum coating machine according to any one of claims 1, 2 or 3, wherein the thermal spraying layer (4) is sprayed on the sand blasting layer (2) by flame spraying, a spray gun is adopted for spraying on the sand blasting layer (2) during flame spraying, combustion gas sprayed by the spray gun comprises acetylene 0.08-0.14MPa, oxygen 0.5-0.7MPa and air 0.5-0.7MPa, metal powder is adopted for spraying at a speed of 10-150g/min, and the size of the metal powder is 50-150 meshes.
8. A synergistic adsorption plate for coating deposits in a vacuum coating machine according to claim 7, characterized in that metal powder is fed into a spray gun at a speed of 25-30g/min for spraying in flame spraying, the size of the metal powder is 60-120 meshes, the speed of the spray gun is 150mm/sec, the distance between the spray gun and the sand blasting layer (2) is 20-30cm, and the thickness of the thermal spraying layer (4) is 0.1-0.5mm.
9. The synergistic adsorption plate of claim 8, wherein the metal powder is any one of aluminum, copper, indium and tin.
10. A synergistic adsorption plate for coating sediments in a vacuum coating machine according to claim 1, wherein a wind gun is used for dedusting on the thermal spraying layer (4), the wind pressure of the wind gun is 6-8 Kgf/cm < 2 >, then the obtained product is placed in a water tank for ultrasonic cleaning, and the power of the ultrasonic cleaning is 150w.
Priority Applications (1)
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| CN112126960A (en) * | 2019-06-25 | 2020-12-25 | 株式会社爱发科 | Surface treatment method |
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| JPH11236667A (en) * | 1998-02-20 | 1999-08-31 | Trace Storage Technol Corp | Shield for sputtering device and treatment of surface of the same |
| US20020090464A1 (en) * | 2000-11-28 | 2002-07-11 | Mingwei Jiang | Sputter chamber shield |
| US20060292310A1 (en) * | 2005-06-27 | 2006-12-28 | Applied Materials, Inc. | Process kit design to reduce particle generation |
| WO2010024391A1 (en) * | 2008-09-01 | 2010-03-04 | 積水化学工業株式会社 | Laminate and method for producing laminate |
| CN102011085B (en) * | 2010-10-29 | 2013-05-01 | 宁波江丰电子材料有限公司 | Method for processing surface of attachment-resisting plate |
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| CN113549858A (en) * | 2021-07-22 | 2021-10-26 | 福建阿石创新材料股份有限公司 | High-roughness protective coating for thin-wall protective cover of sputter coating machine and preparation method thereof |
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