CN117026148A - Corrosion-resistant wear-resistant high-temperature-resistant coating material for PVD (physical vapor deposition) and preparation method thereof - Google Patents
Corrosion-resistant wear-resistant high-temperature-resistant coating material for PVD (physical vapor deposition) and preparation method thereof Download PDFInfo
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- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/02—Pretreatment of the material to be coated
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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Abstract
The invention discloses an anti-corrosion wear-resistant high-temperature-resistant coating material for PVD and a preparation method thereof. The anti-corrosion wear-resistant high-temperature-resistant coating material for PVD comprises an AlCrMoN coating, and the anti-corrosion wear-resistant high-temperature-resistant coating material is enhanced by adding Mo atoms into the coating. According to the invention, the AlCrMoN coating is prepared by polishing and cleaning a substrate and then utilizing a target material through cathodic arc evaporation and magnetron sputtering. Compared with the prior art, the corrosion-resistant wear-resistant high-temperature-resistant coating material for PVD, which is prepared by the invention, has the advantages of corrosion resistance, wear resistance, high temperature resistance and the like.
Description
Technical Field
The invention relates to the technical field of surface coating, in particular to an anti-corrosion wear-resistant high-temperature-resistant coating material for PVD and a preparation method thereof.
Background
In cutting, the tool performance has a decisive influence on the efficiency, accuracy, quality, etc. of the cutting. In order to improve the cutting performance of the cutter in all aspects, a more effective and common method is to coat a layer of materials with multiple layers of performances such as corrosion resistance, wear resistance, high temperature resistance, high hardness and the like on a substrate by adopting various coating technologies. The coating material can be used as a barrier, is beneficial to reducing the abrasion of the cutter, can obviously improve the processing efficiency, can prolong the service life of the cutter and reduces the production cost.
The coating is characterized in that the coating film is combined with the base material of the cutter, so that the wear resistance of the cutter is improved without reducing the toughness of the base material, thereby reducing the friction factor between the cutter and a workpiece and prolonging the service life of the cutter. Whereas cemented carbides used in chip forming metal cutting tools are often coated with Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD).
The principle of PVD coating technology is that under vacuum condition, low voltage and high current arc discharge technology is adopted, gas discharge is utilized to evaporate target material, evaporated material and gas are ionized, and the acceleration of electric field is utilized to deposit evaporated material and its reaction product on workpiece. Meanwhile, compared with vacuum evaporation coating and vacuum sputtering coating, the PVD ion coating has strong bonding force between a film layer and the surface of a workpiece, and is more durable and wear-resistant; the diffraction performance of ions is good, and a workpiece with a complex shape can be plated; the film deposition rate is high, and the production efficiency is high; the types of the coating layers are wide; the film layer has the advantages of stable performance, high safety and the like.
Among them, physical Vapor Deposition (PVD) mainly includes two processes, namely vacuum evaporation and sputtering, and most of metal, alloy and metal compound films in integrated circuit manufacturing technology are prepared by adopting physical vapor deposition process. Sputtering is a process method that gas is ionized in a certain vacuum environment to form plasma, positively charged gas ions bombard a target cathode, and sputtered target atoms and other particles are transferred to the surface of a substrate in a gas phase to form a film. In magnetron sputtering, a magnetic field parallel to and orthogonal to the sputtering gas electric field is generally introduced into the surface of the target cathode, and the magnetic field can effectively inhibit electrons from escaping from the surface of the target cathode, and promote gas ionization, so that the plasma density is greatly improved. The disadvantage of this technique is the tendency to cause target poisoning and reduced sputter yield. Sputtering is generally classified into direct current sputtering, radio frequency sputtering, magnetron sputtering, and the like according to an electromagnetic field exciting gas plasma.
In addition, cathodic arc evaporation is also a method of preparing thin film materials by arc-generating the cathode with a high voltage in a vacuum environment. This method produces a high current density at the evaporation source, so that the evaporation material evaporates and deposits on the substrate at an extremely high speed. The cathodic arc evaporation technology has the characteristics of rapidness, high temperature, high current density, low vapor pressure and the like, and is suitable for almost all materials including high-melting-point materials.
CN112391591B discloses a superhard coating of WCrSiN and a preparation method thereof, which are completed through main operation steps of installation, medium frequency bias cleaning, sputtering of a primer layer WCrSi, sputtering of a main body layer WCrSiN and the like, and through three-phase compounding of (W, cr) 2N and (W, cr) N, siNx, the synergistic strengthening effect of different scales is realized based on the combination of solid solution strengthening, multiphase strengthening and nano composite structure, and the hardness of the film is improved. But can see that large particles appear on the surface of the coating, so that the compactness effect of the coating is affected, and the wear resistance of the cutter is further affected.
CN116411244a discloses a multi-structure heterogeneous coating, its preparation method and application. The AlTiN/TiSiN nano multilayer is a nano multilayer formed by alternately arranging AlTiN and TiSiN layers, and the TiSiN layer is a nano composite structure formed by embedding nanocrystalline into an amorphous matrix. Although comprising a multilayer coating, more than 5 atomic% of Si leads to the appearance of hexagonal phases that lead to poor mechanical properties, such as insufficient hardness, etc.
Disclosure of Invention
In view of the defects of insufficient wear resistance and insufficient hardness of the cutter, the technical problem to be solved by the invention is to improve the corrosion resistance, wear resistance and high temperature resistance of the coating material by PVD technology.
In order to achieve the above purpose, the invention provides a preparation method of a corrosion-resistant, wear-resistant and high-temperature-resistant coating material for PVD, which comprises the following steps:
step 1: preparing and preprocessing a matrix material;
step 2: glow cleaning is carried out on the base material to remove the surface oxide layer;
step 3: ion etching treatment, namely etching a matrix material by adopting Ar and an arc discharge ion source; step 4: in a nitrogen atmosphere, preparing an AlCrMoN coating on the surface of the substrate by utilizing a magnetron sputtering Mo target and an arc evaporation AlCr target.
Preferably, the AlCrMoN coating has 40-65wt% of Al, 15-45wt% of Cr, 5-25wt% of Mo and the balance of N atoms.
Preferably, the AlCrMoN coating has a hardness of 34.8-36.8Gpa.
Preferably, the AlCrMoN coating has an elastic modulus of 496-537GPa.
Preferably, the residual stress of the AlCrMoN coating is-4.6 to-3.3 GPa.
Preferably, the AlCrMoN coating has a coefficient of friction of 0.58-0.62.
Preferably, the AlCrMoN coating has a wear rate of 4.1X10 -16 mm 3 /(N·m)-13.4×10 -16 mm 3 /(N·m)。
Preferably, the pressure of the nitrogen atmosphere is 0.2-3.2Pa.
Preferably, the average current density of the cathode arc evaporation AlTi target material is 0.2-2.5A/cm 2 。
Preferably, the percentage of Al atoms in the AlCr target is 60-70wt%.
Preferably, the average sputtering power of the magnetron sputtering Mo target material is 2-25W/cm 2 。
Preferably, the pretreatment includes at least one of mechanical grinding, polishing, and cleaning.
The invention also discloses an application of the preparation method of the corrosion-resistant wear-resistant high-temperature-resistant coating material for PVD in metal or ceramic surface treatment and metal or ceramic processing.
In specific applications, such as cutting tools for the processing of steel, the surface of the metal material is strengthened to increase the corrosion resistance and wear resistance, and there are common techniques of ion nitriding, coating and a combination of ion nitriding and coating. CrN has remarkable strong lubricating property and high temperature resistance, is most suitable for cutting tools of copper metals and coatings of wear-resistant and corrosion-resistant parts, and aluminum-containing transition metal nitride AlCrN has higher hardness and wear resistance than the traditional CrN. The AICrN coating prepared by PVD technology has a metastable solid solution structure based on face-centered cubic CrN lattice, but excessive Al content can lead to precipitation of hexagonal lattice AIN, resulting in reduced hardness, the introduction of Al significantly improves oxidation resistance of CrN, is beneficial to forming a continuous compact oxide layer, and the metastable nature of supersaturated AlCrN leads to phase decomposition into stable AlN and Cr at high temperature accompanied by mechanical degradation, and high friction coefficient and insufficient high temperature wear resistance limit high-level application of AlCrN coating.
Mo is however also considered to be a very promising hard nitride coating alloying element with MoO formation 3 The potential of the alloy is that the alloy is in a layered structure along a plane, the shearing strength is low, and Mo element is also dissolved in a metal sub-lattice and can replace Cr and Al atoms. Due to the Mo oxide (MoO) 2 Or MoO 3 ) The oxide layer on the AlCrMoN coating has higher deformability and tends to adhere to the wear track rather than break up to form abrasive particles;
in addition, since Mo itself has a large atomic weight, the outward diffusion rate is slow, resulting in aggregation at the interface during oxidation, so Mo is enriched at the coating interface, forming a Mo-N-O interlayer, and possibly improving the adhesion of the friction layer. Thus, the formation of the oxidized friction layer is promoted and the abrasive grains are reduced, and further abrasion of the coating layer can be prevented. Meanwhile, when Mo element is added, the high temperature resistance of the AlCrN coating can be obviously improved.
The invention has the beneficial effects that:
compared with the prior art, mo and elements are added into aluminum-containing transition metal nitride AlCrN, so that a Mo-N-O interlayer is formed, the adhesive force of a friction layer is possibly improved, the formation of an oxidized friction layer is further promoted, abrasive particles are reduced, further abrasion of a coating is reduced, and the corrosion resistance and abrasion resistance of the coating for PVD are improved.
Detailed Description
The parameters and sources of the specific chemicals used in the examples.
Hard alloy block: brand number: YG6, hardness: 89HRA, inc.
Sand paper: model: 2000, marronot shield protective articles e-commerce limited company with granularity of 500-4000 meshes.
OPS polishing solution: CAS:11-2-8, wiHaidae wetting New Material technologies Co.
Example 1
The preparation method of the corrosion-resistant wear-resistant high-temperature-resistant coating material for PVD comprises the following steps:
step 1: grinding a matrix material hard alloy block with the size of 16 multiplied by 4mm and a model AISI304 stainless steel sheet with the size of 50 multiplied by 10 multiplied by 0.8mm by using 2000 sand paper, then polishing by using OPS polishing liquid, and then sequentially polishing and grinding by using water and absolute ethyl alcohol under 25KHz ultrasonic for 20min at 60 ℃, wherein the roughness of the surface of the treated base material is 0.02 mu m;
step 2: installing the hard alloy block treated in the step 1 and the AISI304 stainless steel sheet in a deposition chamber so that the distance between the hard alloy block and the AISI304 stainless steel sheet is 50cm; the deposition chamber is vacuumized to 4.5X10 -3 Under Pa, then gradually heating from 25 ℃ to 355 ℃ within 30 min; then, vacuumizing to 2.5Pa, and carrying out glow discharge plasma surface cleaning treatment in Ar for 25min under a bias voltage of-800V;
step 3: an etching process was performed at an Ar pressure of 2.5Pa and a pulse bias voltage of-600V (80% duty cycle and 80kHz frequency) for 10 minutes;
step 4: in pure N 2 Preparing AlCrMoN nano composite lamellar coating by reaction in atmosphere: during the deposition, N is introduced first 2 Regulating the pressure in the deposition chamber to 3.0Pa, and evaporating Al by utilizing a magnetron sputtering Mo target material and an electric arc 60 Cr 40 Target material, mo target average sputtering power is 10W/cm 2 、Al 60 Cr 40 The average current density of the target material is 1A/cm 2 The deposition bias voltage is-100V, and the magnetron sputtering and cathode arc evaporation power supply is simultaneously started, so that the substrate material rotates and revolves, and the AlCrMoN coating is obtained through deposition.
Example 2
This embodiment 2 is different from embodiment 1 in that:
step 4: in pure N 2 Preparing AlCrMoN nano composite lamellar coating by reaction in atmosphere: during the deposition, N is introduced first 2 Regulating the pressure in the deposition chamber to 3.0Pa, and evaporating Al by utilizing a magnetron sputtering Mo target material and an electric arc 60 Cr 40 Target material, mo target average sputtering power is 20W/cm 2 、Al 60 Cr 40 The average current density of the target material is 2A/cm 2 The deposition bias voltage is-100V, and the magnetron sputtering and cathode arc evaporation power supply is started at the same time, so that the substrate material is self-transferred and revolved, and the AlCrMoN coating is obtained through deposition.
Example 3
This embodiment 3 is different from embodiment 1 in that:
step 4: in pure N 2 Preparing AlCrMoN nano composite lamellar coating by reaction in atmosphere: during the deposition, N is introduced first 2 Regulating the pressure in the deposition chamber to 3.0Pa, and evaporating Al by utilizing a magnetron sputtering Mo target material and an electric arc 60 Cr 40 Target material, mo target average sputtering power is 25W/cm 2 、Al 60 Cr 40 The average current density of the target material is 2.5A/cm 2 The deposition bias voltage is-100V, and the magnetron sputtering and cathode arc evaporation power supply is started at the same time, so that the substrate material is self-transferred and revolved, and the AlCrMoN coating is obtained through deposition.
Example 4
This embodiment 4 is different from embodiment 1 in that:
step 4: in pure N 2 Preparing AlCrMoN nano composite lamellar coating by reaction in atmosphere: during the deposition, N is introduced first 2 Regulating the pressure in the deposition chamber to 3.0Pa, and evaporating Al by utilizing a magnetron sputtering Mo target material and an electric arc 70 Cr 30 Target material, mo target average sputtering power is 10W/cm 2 、Al 70 Cr 30 The average current density of the target material is 1A/cm 2 The deposition bias voltage is-100V, and the magnetron sputtering and cathode arc evaporation power supply is started at the same time, so that the substrate material is self-transferred and revolved, and the AlCrMoN coating is obtained through deposition.
Example 5
This embodiment 5 is different from embodiment 1 in that:
step 4: in pure N 2 Preparing AlCrMoN nano composite lamellar coating by reaction in atmosphere: during the deposition, N is introduced first 2 Regulating the pressure in the deposition chamber to 3.0Pa, and evaporating Al by utilizing a magnetron sputtering Mo target material and an electric arc 70 Cr 30 Target material, mo target average sputtering power is 20W/cm 2 、Al 70 Cr 30 The average current density of the target material is 2A/cm 2 The deposition bias voltage is-100V, and the magnetron sputtering and cathode arc evaporation power supply is started at the same time, so that the substrate material is self-transferred and revolved, and the AlCrMoN coating is obtained through deposition.
Example 6
This embodiment 5 is different from embodiment 1 in that:
step 4: in pure N 2 Preparing AlCrMoN nano composite lamellar coating by reaction in atmosphere: during the deposition, N is introduced first 2 Regulating the pressure in the deposition chamber to 3.0Pa, and evaporating Al by utilizing a magnetron sputtering Mo target material and an electric arc 70 Cr 30 Target material, mo target average sputtering power is 25W/cm 2 、Al 70 Cr 30 The average current density of the target material is 2.5A/cm 2 The deposition bias voltage is-100V, and the magnetron sputtering and cathode arc evaporation power supply is started at the same time, so that the substrate material is self-transferred and revolved, and the AlCrMoN coating is obtained through deposition.
Example 7
This embodiment 7 is different from embodiment 1 in that:
step 4: in pure N 2 Preparing AlCrMoN nano composite lamellar coating by reaction in atmosphere: during the deposition, N is introduced first 2 Regulating the pressure in the deposition chamber to 3.0Pa, and evaporating Al by utilizing a magnetron sputtering Mo target material and an electric arc 65 Cr 35 Target material, mo target average sputtering power is 10W/cm 2 、Al 65 Cr 35 The average current density of the target material is 1A/cm 2 The deposition bias voltage is-100V, and the magnetron sputtering and cathode arc evaporation power supply is started at the same time, so that the substrate material is self-transferred and revolved, and the AlCrMoN coating is obtained through deposition.
Example 8
This embodiment 8 is different from embodiment 1 in that:
step 4: in pure N 2 Preparing AlCrMoN nano composite lamellar coating by reaction in atmosphere: during the deposition, N is introduced first 2 Regulating the pressure in the deposition chamber to 3.0Pa, and evaporating Al by utilizing a magnetron sputtering Mo target material and an electric arc 65 Cr 35 Target material, mo target average sputtering power is 20W/cm 2 、Al 65 Cr 35 The average current density of the target material is 2A/cm 2 The deposition bias voltage is-100V, and the magnetron sputtering and cathode arc evaporation power supply is started at the same time, so that the substrate material is self-transferred and revolved, and the AlCrMoN coating is obtained through deposition.
Example 9
This embodiment 9 is different from embodiment 1 in that:
step 4: in pure N 2 Preparing AlCrMoN nano composite lamellar coating by reaction in atmosphere: during the deposition, N is introduced first 2 Regulating the pressure in the deposition chamber to 3.0Pa, and evaporating Al by utilizing a magnetron sputtering Mo target material and an electric arc 65 Cr 35 Target material, mo target average sputtering power is 25W/cm 2 、Al 65 Cr 35 The average current density of the target material is 2.5A/cm 2 The deposition bias voltage is-100V, and the magnetron sputtering and cathode arc evaporation power supply is started at the same time, so that the substrate material is self-transferred and revolved, and the AlCrMoN coating is obtained through deposition.
Comparative example 1
This comparative example 1 is different from example 1 in that:
step 4: at N 2 And Ar in a mixed atmosphere to prepare the AlCrMoN nano composite lamellar coating: during the deposition process, N is introduced 2 Regulating the pressure in the deposition chamber to 1.5Pa and N 2 Partial pressure of 40%, ar partial pressure of 60%, and Al was sputtered by magnetron sputtering 70 Cr 25 Mo 5 Preparation of Al from target 70 Cr 25 Mo 5 Coating, al 70 Cr 25 Mo 5 The average sputtering power of the target was 20W/cm 2 The deposition bias was-100V.
Comparative example 2
This comparative example 2 is different from example 1 in that:
in pure stateN 2 Preparing AlCrMoN nano composite lamellar coating by reaction in atmosphere: during the deposition, N is introduced first 2 Regulating the pressure in the deposition chamber to 5.5Pa, and evaporating Al by arc 70 Cr 25 Mo 5 Preparation of AlCrMoN coating by target material, al 70 Cr 25 Mo 5 The average sputtering power of the target was 20W/cm 2 The deposition bias was-100V.
Comparative example 3
This comparative example 3 is different from example 1 in that:
step 4: in pure N 2 Preparing AlCrMoN nano composite lamellar coating by reaction in atmosphere: during the deposition, N is introduced first 2 Regulating the pressure in the deposition chamber to 3.0Pa, and evaporating Al by utilizing a magnetron sputtering B target and an electric arc 60 Cr 40 Target material, B target average sputtering power is 10W/cm 2 、Al 60 Cr 40 The average current density of the target material is 1A/cm 2 The deposition bias voltage is-100V, and the magnetron sputtering and cathodic arc evaporation power supply is simultaneously started, so that the substrate material is self-transferred and revolved, and the AlCrBN coating is obtained by deposition.
Test case
The coatings of examples 1-9 and comparative examples 1-3 were tested for binding force with the base stainless steel sheet and the hard aluminum alloy block by using a scratch test method, the coatings of examples 1-9 and comparative examples 1-3 were tested for fracture toughness by using an indentation method, cutting performance of the coated cutter was confirmed by using a high-speed dry cutting process for 316L stainless steel, residual stress of the coatings was characterized by using a film stress meter, friction coefficient and wear rate of the coatings were characterized by using a ball-disc frictional wear tester, the coatings of examples 1-9 and comparative examples 1-3 were cut to 20X 5nm by using a nanoindentation method for hardness test and elastic modulus test, the test method and procedure were performed according to International Standard ISO-14577, and the test results are shown in Table 1.
TABLE 1
From Table one can see that the performance of each of the example 1 is best among the sets of data for example 1 and comparative examples 1-6. The possible reason is that the composite multilayer coating enhances the wear resistance of the tool, and then by adding Mo and Cr to the coating. CrN has remarkable strong lubricating property and high temperature resistance, the oxidation resistance of CrN is remarkably improved by introducing Al, the continuous compact oxide layer is formed, meanwhile, mo has larger atomic weight and slower outward diffusion speed by adding Mo, aggregation is caused at an interface in the oxidation process, and the AlCrN coating with high Al content is directionally grown due to low surface mobility and other dynamic constraints.
Looking at table one, in combination with examples 4, 7, examples 5, 8, examples 6, 9, it can be seen that the coating fracture toughness is increased, probably due to solid solution strengthening with Mo addition. The residual stress variation in table one was observed, as an increase in residual stress resulted in a greater lattice distortion, thus impeding dislocation movement, and a slight increase in residual stress contributed to the increase in hardness of the Mo-containing coating. The lower coefficient of friction of examples 1-9 can be seen from the coefficient of friction in Table one. The possible reason is that during the break-in phase of the coating, the irregularities of the friction pair surface are rapidly worn out, resulting in more increase of adhesion and friction, the coefficient of friction stabilizing when the friction surfaces are in full contact. The friction layer having a corundum structure (Al, cr) 2 O 3 Oxides due to Al 2 O 3 And Cr (V) 2 O 3 Is miscible, (Al, cr) 2 O 3 Lattice ratio of solid solution to pure Al 2 O 3 Larger and more stable.
In addition, under the condition of high temperature, the flash evaporation temperature of the intersection can accelerate the oxidation of the nitride coating to form a thicker oxide layer, and the breakage and the separation of Mo generate more abrasive particles, so that the AlC coating which can be the AlC coating bears high-temperature intense abrasion, the oxide on the AlCrMoN coating has higher deformability due to lower shearing strength of the Mo oxide and tends to adhere to abrasion tracks instead of breakage to form the abrasive particles, and more importantly, the Mo is enriched at the interface of the coating to form a Mo-N-O interlayer, so that the friction layer has good effect on maintenance, and the high-temperature resistance of the AlCrN is remarkably improved by the alloying of the AlCrMoN and the Mo.
By combining example 1 and comparative examples 1-2, it is possible to combine the properties of the coatings produced by cathodic arc evaporation and magnetron sputtering techniques to better than by using cathodic arc evaporation and magnetron sputtering techniques alone.
It was found from example 1 and comparative example 3 that the effect of B element in the preparation of AlCrBN coating was slightly inferior to that of AlCrMoN coating, probably because the nano-sized fcc-AlCrN grains in AlCrBN coating were surrounded by a thin layer of BNx phase, resulting in coating having ultra-high hardness and low pressure stress, and that the presence of c-BN, c-BN phase, was also found in AlCrBN coating, possessing ultra-high hardness, high wear resistance and high temperature hardness. The B element is doped in the coating to generate effects of solid solution strengthening, grain refinement and the like, so that the hardness and friction and wear properties of the coating are obviously improved. At the same time, B element can also form BO 3 In the form of a polymer with a planar structure, the wear resistance of AlCrN coatings can be improved as well. But the differences may be due to various aspects of the crystal lattice, etc.
Claims (10)
1. A preparation method of an anti-corrosion wear-resistant high-temperature-resistant coating material for PVD is characterized by comprising the following steps of: the method comprises the following steps:
step 1: pretreatment of a matrix material;
step 2: glow cleaning is carried out on the base material to remove the surface oxide layer;
step 3: ion etching treatment, namely etching a matrix material by adopting Ar and an arc discharge ion source;
step 4: in nitrogen atmosphere, preparing AlCrMoN coating on the surface of the substrate material by utilizing the magnetron sputtering Mo target and the arc evaporation AlCr target.
2. The method for preparing the corrosion-resistant, wear-resistant and high-temperature-resistant coating material for PVD according to claim 1, wherein the method comprises the following steps: the AlCrMoN coating comprises 18-25wt% of Al, 9-24wt% of Cr, 2-12wt% of Mo and 35-58wt% of N.
3. The method for preparing the corrosion-resistant, wear-resistant and high-temperature-resistant coating material for PVD according to claim 2, wherein the method comprises the following steps: the hardness of the AlCrMoN coating is 34.8-36.8Gpa; the elastic modulus of the AlCrMoN coating is 496-537GPa; the residual stress of the AlCrMoN coating is-4.6 to-3.3 GPa, the friction coefficient of the AlCrMoN coating is 0.58 to 0.62, and the wear rate of the AlCrMoN coating is 4.1X10 -16 mm 3 /(N·m)-13.4×10 -16 mm 3 /(N·m)。
4. The method for preparing the corrosion-resistant, wear-resistant and high-temperature-resistant coating material for PVD according to claim 1, wherein the method comprises the following steps: the pressure of the nitrogen atmosphere is 0.2-3.2Pa.
5. The method for preparing the corrosion-resistant, wear-resistant and high-temperature-resistant coating material for PVD according to claim 1, wherein the method comprises the following steps: the average current density of the AlCr target material evaporated by the cathodic arc is 0.2-2.5A/cm 2 。
6. The method for preparing the corrosion-resistant, wear-resistant and high-temperature-resistant coating material for PVD according to claim 1, wherein the method comprises the following steps: the percentage of Al atoms in the AlCr target material is 60-70wt%.
7. The method for preparing the corrosion-resistant, wear-resistant and high-temperature-resistant coating material for PVD according to claim 1, wherein the method comprises the following steps: the average sputtering power of the magnetron sputtering Mo target material is 2-25W/cm 2 。
8. The method for preparing the corrosion-resistant, wear-resistant and high-temperature-resistant coating material for PVD according to claim 1, wherein the method comprises the following steps: the pretreatment comprises at least one of mechanical grinding, polishing and cleaning.
9. A corrosion-resistant, wear-resistant and high-temperature-resistant coating material for PVD, characterized in that it is produced by the method according to any of claims 1 to 8.
10. Use of a method for the preparation of a corrosion-resistant, wear-resistant, high-temperature-resistant coating material for PVD according to any of claims 1 to 8 for the surface treatment of metals or ceramics, for the processing of metals or ceramics.
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| CN102353164A (en) * | 2011-08-25 | 2012-02-15 | 山东力诺新材料有限公司 | High-temperature solar selective absorption coating and preparation method thereof |
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| CN107557736A (en) * | 2017-10-30 | 2018-01-09 | 广东工业大学 | A kind of AlCrSiVN nano-composite coatings and preparation method thereof |
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| CN102353164A (en) * | 2011-08-25 | 2012-02-15 | 山东力诺新材料有限公司 | High-temperature solar selective absorption coating and preparation method thereof |
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| JP2015218335A (en) * | 2014-05-13 | 2015-12-07 | 株式会社神戸製鋼所 | Nitride membrane, and manufacturing method thereof |
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