CN116985159A - Manipulator with liftable arm - Google Patents

Abstract

The invention discloses a manipulator with an liftable arm, which comprises a body unit, a support arm unit, a lifting arm unit, a top arm unit, a first end effector unit and a second end effector unit, wherein: one end of the support arm unit rotates and/or moves up and down around the body unit; the other end of the supporting arm unit supports one end of the lifting arm unit and enables the lifting arm unit to perform rotation and/or lifting movement, the other end of the lifting arm unit supports, lifts and rotates the first end effector, one end of the top arm unit rotates around the lifting arm unit, and the other end of the top arm unit supports and rotates the second end effector; the distance between the first end effector and the second end effector is changed along with the lifting of the first end effector driven by the lifting arm unit; therefore, the invention not only can realize the function of taking and placing wafers from a single station and double stations, but also can realize the transmission of wafers with adjustable horizontal spacing, large span and height difference at two stations.

Description

Manipulator with liftable arm

Technical Field

The invention relates to the technical field of semiconductor wafer transmission equipment, in particular to a semiconductor wafer transmission manipulator with an liftable arm.

Background

With the rapid development of the semiconductor industry, front-end and back-end processing equipment factories have raised requirements for semiconductor automation transmission technologies, and particularly, requirements for the diversity of transmission functions and high productivity of front-end modules (Equipment Front End Module, abbreviated as EFEM) and vacuum transmission platforms (Vacuum Transfer Module, abbreviated as VTM) of semiconductor equipment used with various processing equipment are raised, the EFEM is a transition module for realizing the transfer of wafers from an atmospheric state into a vacuum processing chamber, and the VTM is a unit for realizing the transfer of wafers from the vacuum transmission chamber to a processing reaction chamber.

The diversity of the transmission functions and the high productivity of the automatic semiconductor transmission equipment often depend on the carrying capacity of the internal wafer transmission manipulator, and in the industry, the wafer transmission manipulator is only required to finish taking and placing wafers to one station in the equipment, but along with the improvement of the transmission diversity and the high productivity requirement of the whole machine, the wafer transmission manipulator is required to finish the transmission of wafers to one station, and the wafer transmission manipulator is required to finish the taking and placing transmission of wafers to two or more stations simultaneously.

Currently, manufacturers of automatic transmission equipment in industry generally adopt two methods to correspond to each other:

a method is to design a wafer transmission manipulator which is provided with two end effectors which are coaxially overlapped up and down and can rotate independently, when two stations are required to be used for taking and placing wafers at the same time, the two end effectors are controlled to do reverse rotation movement to enable the two end effectors to form a certain angle posture, the distances between fingers arranged on the two end effectors and the two stations are equal, and then wafer taking and placing actions are carried out.

Referring to fig. 1-4, fig. 1 is a side view of an axis of a manipulator for picking, placing and transferring a dual-station wafer in the prior art; FIG. 2 is a top view of the wafer transfer robot of the prior art; FIG. 3 is a top view of a wafer handling robot in a dual-station pick-and-place configuration of the prior art; fig. 4 is a side view of a dual-station pick-and-place wafer spindle of the wafer transfer robot of the prior art.

In another method, a wafer transfer manipulator is designed as well, an end effector is arranged at the tail end of the wafer transfer manipulator arm, the end effector is provided with fingers which are fixed together and have the same distance with the two stations, when the wafer taking and placing of the two stations are to be realized, the two fingers on the end effector are aligned with the two stations on a taking and placing path, and then the wafer taking and placing action is carried out.

The manipulator for picking, placing and transmitting the double-station wafer comprises a robot body, a robot big arm, a robot small arm and two end effectors, wherein the robot big arm is rotatably fixed on the robot body, the robot small arm is rotatably fixed on the robot big arm, the two end effectors are coaxially overlapped up and down and can be independently and rotatably fixed on the robot small arm, the up-down distance between the two end effectors is a fixed value, and the whole arm part formed by the robot big arm, the robot small arm and the two end effectors can realize up-down lifting motion relative to the robot body.

When the wafer taking and placing process is required to be carried out on the double-station wafer, a certain angle X gesture is formed between the two end effectors through controlling the two end effectors to do directional rotary motion, the distance between the centers of the corresponding two end effectors is L, as can be seen from fig. 3, when the distance between the four stations on the station is L and the height difference between the stations is equal to the distance between the two end effectors, the manipulator can respectively achieve the taking and placing process of the wafer at the A and B double-station, the taking and placing process of the wafer at the B and C double-station, and the taking and placing process of the wafer at the C and D double-station, and when the wafer taking and placing process is required to be carried out on the wafer at the A and C double-station and the B and D double-station, the distance between the centers of the two end effectors is over L due to overlarge span between the two stations, so that the distance between the centers of the two end effectors is not corresponding. In addition, when a large height difference exists among four stations A, B, C, D, and the height difference exceeds the distance between two end effectors, the manipulator cannot be used for simultaneously taking and placing wafers of any two stations. When the path of the wafer taking and placing of each station is limited, as the two end effectors of the manipulator form a certain angle between the gesture of the scissor hand and the vertical opening path of each station, the structure of the station is required to be specially made and the opening direction is required to be limited in order to avoid interference with the station in the process of taking and placing the double wafers in double stations.

Referring to fig. 5-8, fig. 5 is a two-axis side view of the wafer transfer robot of the prior art; FIG. 6 is a top view of a wafer transfer robot of the prior art; FIG. 7 is a top view of a dual-station pick-and-place wafer for the wafer transfer robot of the prior art; fig. 8 is a side view of a dual-station pick-and-place wafer spindle of the prior art wafer transfer robot.

The manipulator comprises a robot body, a robot big arm, a robot small arm and an end effector, wherein the robot big arm is rotatably fixed on the robot body, the robot small arm is rotatably fixed on the robot big arm, the end effector is independently rotatably fixed on the robot small arm, the end effector is provided with two fingers capable of bearing wafers, the distance between the fingers is a fixed value K, the height difference is also a fixed value, and the whole arm part formed by the robot big arm, the robot small arm and the end effector can realize up-down lifting motion relative to the robot body.

When the double-station wafer picking and placing operation is required, the two fingers on the end effector are aligned with the double-station opening and then the wafer picking and placing operation is performed, as can be seen from fig. 7, when the distance between the four stations on the station is L and L is equal to K, the manipulator can respectively pick and place the double-station wafers A and B, pick and place the double-station wafers B and C, and pick and place the double-station wafers C and D, and when the double-station wafers A and C and the double-station wafers B and D are required to be picked and placed, the span 2L between the two stations is longer than the finger distance K, so that the double-station wafers cannot be corresponded. In addition, when a large height difference exists among four stations A, B, C, D, and the height difference exceeds the distance between two end effectors, the manipulator can not simultaneously pick and place any two stations of wafers. When a wafer needs to be taken and placed on a single station, the fixed structure of the end effector cannot be satisfied.

There are two drawbacks to the first solution described above:

(1) when the space span of the stations for taking and placing wafers is large, the two end effectors are required to be lengthened to correspond, so that the moving space of the whole robot arm part is increased, the problem of shaking and the like in the wafer carrying process is also increased, the width dimension of the end effectors is required to be as small as possible, the risk of interference with the stations is avoided, and especially when the space span of the two stations is very large, the problem is solved.

(2) In the method, under the condition that the distance between the two stations is fixed, the wafer taking and placing path is fixed, and particularly complex station structures and limited opening directions need to be considered in order to avoid interference with the stations in the process of taking and placing the wafers.

When the two stations have a large height difference, the distance between the fingers at the two ends of the wafer conveying manipulator is generally fixed, and the wafer conveying manipulator cannot correspond to the distance.

There are also three drawbacks to the second solution described above:

(1) when two stations need to be simultaneously processed and the distance between the two stations is changed, the distance between the two fingers on the end effector of the wafer transmission manipulator is equidistant, so that the distance between the two stations is not enough to be changed.

(2) When a great height difference exists between two stations for taking and placing wafers at the same time, the height difference between two fingers on the end effector of the wafer conveying manipulator is constant, so that the station conveying requirement is also not satisfactory.

(3) When the wafer taking and placing of the single station is required, the wafer at the single station cannot be conveyed due to the fixing structure of the tail end.

Disclosure of Invention

The present invention is directed to solving, at least to some extent, one of the problems in the related art. Therefore, the invention aims to provide a manipulator with a liftable arm, which is used for solving the problem that the two stations and a single station are required to be compatible in the semiconductor industry, and mainly for solving the problem that the wafer can be transferred in a double-taking and double-placing mode when the two stations have large horizontal spacing span and large height difference.

In order to achieve the above purpose, the present invention adopts the following technical scheme:

the utility model provides a wafer transmission manipulator of arm liftable, its includes body unit, support arm unit, lift arm unit, top arm unit, first end effector unit and second end effector unit, wherein: one end of the support arm unit rotates and/or moves up and down around the body unit; the other end of the supporting arm unit supports one end of the lifting arm unit and enables the lifting arm unit to perform rotation and/or lifting movement, the other end of the lifting arm unit supports, lifts and rotates the first end effector, one end of the top arm unit rotates around the lifting arm unit, and the other end of the top arm unit supports and rotates the second end effector; the distance between the first end effector and the second end effector is changed along with the lifting of the first end effector driven by the lifting arm unit.

Further, the lifting arm unit comprises a lifting arm shell, an arm lifting seat, a lifting arm rotating motor, a driving belt pulley III, a driven belt pulley III, a driving belt III, a screw rod nut seat and a first end effector driving motor I; the lifting arm shell is pivoted with the arm lifting seat, the arm lifting seat is fixed on the lifting shaft, the lifting arm rotating motor is fixed inside the arm lifting seat, the driving belt pulley III is fixed at the output shaft end of the arm rotating motor, the driven belt pulley III is fixed on the lifting arm shell, the driving belt pulley III and the driven belt pulley III are wound by a group of driving mechanisms to realize power transmission, and the lifting arm unit rotates on the lifting shaft when the lifting arm rotating motor works; the screw rod is fixed on the supporting arm shell, and the nut seat is fixed on the arm lifting seat; when the arm lifting motor works, the screw rod enables the arm lifting seat to do up-down linear lifting motion along the lifting shaft, so that the lifting arm unit is synchronously lifted; the first end effector is fixed at the output shaft end of the first end effector driving motor, and the first end effector moves up and down and/or rotates when the first end effector driving motor works.

Further, the body unit comprises a robot body, a lifting seat and a support arm driving motor, wherein the lifting seat is fixed on the robot body, the support arm driving motor is fixed on the lifting seat, and the support arm driving motor moves in a linear lifting manner along with the lifting seat; the support arm unit comprises a support arm shell, an arm lifting motor, a first driving belt pulley, a first driven belt pulley, a first driving belt, a top arm rotating motor, a second driving belt pulley, a second driven belt pulley, a second driving belt pulley and a lifting shaft; the support arm shell is rotatably fixed in the lifting seat, the support arm driving motor rotates relative to the support arm unit, the arm lifting motor is fixed in the support arm shell, the driving pulley I is fixed at the output shaft end of the arm lifting motor, the driving belt I is wound on the driving pulley I and the driven pulley I to realize the transmission of power by a group of transmission mechanisms, the top arm rotating motor is also fixed in the support arm shell, the driving pulley II is fixed at the output shaft end of the top arm rotating motor, the driving belt II is wound on the driving pulley II and the driven pulley II to realize the transmission of power by a group of transmission mechanisms, the lifting shaft is rotatably fixed on the support arm shell, the driven pulley II is fixed at the lower end part of the lifting shaft, and the lifting shaft synchronously rotates when the top arm rotating motor works; the top arm unit comprises a top arm shell, a second end effector driving motor, a fourth driving belt pulley, a fourth driven belt pulley and a fourth driving belt, wherein the top arm shell is fixed at the other end of the lifting shaft, the second end effector driving motor is fixed inside the top arm shell, the fourth driving belt pulley is fixed at the output shaft end of the second end effector driving motor, the fourth driven belt pulley is fixed on the input shaft of the end effector unit, the fourth driving belt pulley and the fourth driven belt pulley form a group of transmission mechanisms to realize power transmission, and when the second end effector driving motor works, the second end effector is made to perform rotary motion; the end effector driving motor III is fixed inside the top arm shell, the driving belt pulley V is fixed at the three output shaft ends of the end effector driving motor III, the driven belt pulley V is fixed on the input shaft of the second end effector unit, the driving belt V and the driven belt pulley V form a group of transmission mechanisms to realize power transmission, and when the second end effector driving motor III works, the end effector unit can rotate.

Further, the arms of the first end effector and the second end effector are unequal in length.

Further, the first or end effector and the second or end effector hold a load in the form of passive friction, edge gripping, vacuum suction, or bernoulli.

Further, the arm length of the support arm unit is not equal to the arm lengths of the lifting arm unit and the top arm unit.

Compared with the prior art, the technical scheme provided by the embodiment of the invention has the following advantages: the invention not only can realize the function of taking and placing wafers from a single station and double stations, but also can realize the transmission of wafers with two stations, which have adjustable horizontal spacing, large span and height difference. The invention has strong compatibility and convenient adjustment, is not only suitable for the atmospheric manipulator but also suitable for the vacuum manipulator, has wide application range, and can be applied to the IC industry and other general semiconductor industries such as LEDs.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.

In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, and it will be obvious to a person skilled in the art that other drawings can be obtained from these drawings without inventive effort.

FIG. 1 is a side view of a wafer transfer robot in the prior art

FIG. 2 is a top view of a prior art wafer transfer robot

FIG. 3 is a top view of a wafer handling robot in the prior art with a dual-station pick-and-place wafer

Fig. 4 is a side view of a wafer handling robot in the prior art with a dual-station pick-and-place wafer spindle

FIG. 5 is a side view of a prior art wafer transfer robot

FIG. 6 is a top view of a wafer transfer robot of the prior art

FIG. 7 is a top view of a dual-station pick-and-place wafer for a prior art wafer transfer robot

FIG. 8 is a side view of a dual-station pick-and-place wafer spindle of a prior art wafer transfer robot

FIG. 9 is a schematic view illustrating an internal structure of a wafer transfer robot with a lifting arm according to the present invention

FIG. 10 is a schematic diagram illustrating the movement of each unit of the wafer transfer robot with a lifting arm according to the present invention

FIG. 11 is an isometric view of a wafer transfer robot with a lifting arm according to the present invention

FIG. 12 is a top view of a wafer transfer robot with a lifting arm according to the present invention

FIG. 13 is a side view of a dual-station pick-and-place wafer spindle of the arm lift wafer transfer robot of the present invention

FIG. 14 is a top view of a wafer handling robot with dual stage pick-and-place mechanism with lifting arms according to the present invention

FIG. 15 is a top view of a dual-station pick-and-place wafer with a lifting arm for a wafer transfer robot

FIG. 16 is a top view of a wafer handling robot with a lifting arm in a dual-station pick-and-place configuration

In the figure: 1, a robot body; 2, lifting seats; 3, a supporting arm driving motor; 4 a support arm housing; 5, an arm lifting motor; 6, driving a pulley I; 7, a driven belt wheel I; 8, a first transmission belt; 9 a top arm rotating motor; 10, a driving belt wheel II; 11, a driven belt pulley II; 12 a second transmission belt; 13 lifting shafts; 14 lifting arm shell; 15 arm lifting seats; 16 lifting arm rotating motor; 17 a driving belt wheel III; 18 driven pulleys three; 19 a third transmission belt; 20 screw rods; 21 a screw nut seat; 22 end effector drive motor one; 23 top arm housing; 24 end effector drive motor two; 25 driving pulley IV; 26, a driven belt pulley IV; 27, a transmission belt IV; 28 an end effector drive motor III; 29 a driving pulley V; 30 driven pulleys; 31 a transmission belt five; 32 finger mounting arms; 33 fingers;

Detailed Description

For a clearer understanding of technical features, objects and effects of the present invention, a detailed description of embodiments of the present invention will be made with reference to the accompanying drawings. In the following description, it should be understood that the directions or positional relationships indicated by "front", "rear", "upper", "lower", "left", "right", "longitudinal", "transverse", "vertical", "horizontal", "top", "bottom", "inner", "outer", "head", "tail", etc. are configured and operated in specific directions based on the directions or positional relationships shown in the drawings, and are merely for convenience of describing the present invention, not to indicate that the mechanism or element referred to must have specific directions, and thus should not be construed as limiting the present invention.

It should also be noted that unless explicitly stated or limited otherwise, terms such as "mounted," "connected," "secured," "disposed," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. When an element is referred to as being "on" or "under" another element, it can be "directly" or "indirectly" on the other element or one or more intervening elements may also be present. The terms "first," "second," "third," and the like are used merely for convenience in describing the present invention and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated, whereby features defining "first," "second," "third," etc. may explicitly or implicitly include one or more such features. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

In the following description, for purposes of explanation and not limitation, specific details are set forth such as the particular system architecture, techniques, etc., in order to provide a thorough understanding of the embodiments of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, mechanisms, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.

It should be noted that the wafer transfer manipulator with the liftable arm is not limited to the application of the semiconductor atmosphere and vacuum manipulator, and can be applied to other transmission devices, such as the application of surgical robots in medical instruments.

The application industry of the manipulator is not limited to the integrated circuit industry, and can be applied to other industries of general semiconductors, such as flat panel display, LED, solar cells, medical appliances, food transmission and the like.

In order to make the objects, technical solutions and advantages of the present invention more apparent, the following detailed description of the specific embodiments of the present invention will be given with reference to the accompanying drawings.

Referring to fig. 9-16, fig. 9 is a schematic view illustrating an internal structure of a wafer transfer robot with a lifting arm according to the present invention; FIG. 10 is a schematic diagram illustrating the movement of each unit of the wafer transfer robot with a lifting arm according to the present invention;

FIG. 11 is an isometric view of a wafer transfer robot with a lifting arm according to the present invention; FIG. 12 is a top view of the wafer transfer robot with the arm up and down according to the present invention; FIG. 13 is a side view of a dual-station pick-and-place wafer spindle of the arm liftable wafer transfer robot of the present invention; FIG. 14 is a top view of a dual-station pick-and-place wafer in a wafer transfer robot with a lifting arm in accordance with the present invention; FIG. 15 is a top view of a dual-station pick-and-place wafer in a wafer transfer robot with a lifting arm according to the present invention; fig. 16 is a top view of a wafer handling robot with a lifting arm in a dual-station pick-and-place configuration.

As shown in fig. 9-16, the present invention provides a wafer transfer robot with a liftable arm, a body unit, a support arm unit, a lifting arm unit, a top arm unit, a first end effector unit, and a second end effector unit, wherein: one end of the support arm unit rotates and/or moves up and down around the body unit; the other end of the supporting arm unit supports one end of the lifting arm unit and enables the lifting arm unit to perform rotation and/or lifting movement, the other end of the lifting arm unit supports, lifts and rotates the first end effector, one end of the top arm unit rotates around the lifting arm unit, and the other end of the top arm unit supports and rotates the second end effector; the distance between the first end effector and the second end effector is changed along with the lifting of the first end effector driven by the lifting arm unit. That is, the lifting arm can realize the rotation movement and the up-and-down lifting movement.

The body unit consists of a robot body 1, a lifting seat 2 and a support arm driving motor 3; the support arm unit consists of a support arm shell 4, an arm lifting motor 5, a first driving belt pulley, a first driven belt pulley 6, a first driving belt pulley 7, a first driving belt pulley 8, a top arm rotating motor 9, a second driving belt pulley 10, a second driven belt pulley 11, a second driving belt pulley 12 and a lifting shaft 13; the lifting arm unit can be composed of a lifting arm shell 14, an arm lifting seat 15, a lifting arm rotating motor 16, a driving belt pulley III 17, a driven belt pulley III 18, a driving belt III 19, a lead screw 20, a lead screw nut seat 21, an end effector driving motor I22 and a first end effector; the top arm unit is composed of a top arm housing 23, an end effector drive motor two 24, a driving pulley four 25, a driven pulley four 26, a transmission belt four 27, an end effector drive motor three 28, a driving pulley five 29, a driven pulley five 30, a transmission belt five 31, and a second end effector composed of a finger mounting arm 32, a finger 33.

In the invention, the lifting seat 2 is fixed on the robot body 1 in a linear motion way, the supporting arm driving motor 3 is fixed on the lifting seat 2, the supporting arm driving motor 3 can do linear lifting motion along with the lifting seat 2, and a driving mechanism for realizing the linear lifting motion of the lifting seat 2 is not limited.

According to the invention, a supporting arm shell 4 is rotatably fixed on a lifting seat 2, a supporting arm driving motor 3 can realize the rotary motion of a supporting arm unit, an arm lifting motor 5 is fixed in the supporting arm shell 4, a driving belt pulley I6 is fixed at the output shaft end of the arm lifting motor 5, a driving belt I8 is wound on the driving belt pulley I6 and a driven belt pulley I7 to realize the power transmission of a group of transmission mechanisms, a top arm rotating motor 9 is also fixed in the supporting arm shell 4, a driving belt pulley II 10 is fixed at the output shaft end of the top arm rotating motor 9, a driving belt II 12 is wound on the driving belt pulley II 10 and the driven belt pulley II to realize the power transmission of a group of transmission mechanisms, a lifting shaft II 11 is rotatably fixed on the supporting arm shell 4, a driven belt pulley II 11 is fixed at the lower end part of the lifting shaft 13, and the lifting shaft 13 can synchronously rotate when the top arm rotating motor 9 works.

According to the invention, a lifting arm shell 14 is rotatably fixed on an arm lifting seat 15, the arm lifting seat 15 is linearly movably fixed on a lifting shaft 13, a lifting arm rotating motor 16 is fixed inside the arm lifting seat 15, a driving belt pulley III 17 is fixed at the output shaft end of the arm rotating motor, a driven belt pulley III 18 is fixed on the lifting arm shell 14, a transmission belt 19 is wound on the driving belt pulley III 17 and the driven belt pulley III to realize the transmission of power by a group of transmission mechanisms, and the lifting arm rotating motor 16 can realize the rotation of a lifting arm unit on the lifting shaft 13 when working. The screw rod 20 is fixed on the support arm shell 4, the nut seat is fixed on the arm lifting seat 15, and when the arm lifting motor 5 works, the arm lifting seat 15 can do up-down linear lifting motion along the lifting shaft 13 through the screw rod 20, so that the lifting arm unit can do lifting motion synchronously. An end effector drive motor one 22 is fixed inside the lift arm housing 14, and the first end effector is fixed at an output shaft end of the end effector drive motor, and the first end effector can perform rotational movement when the end effector drive motor one 22 is operated.

In the invention, a top arm shell 23 is fixed at the other end of a lifting shaft 13, a second end effector driving motor 24 is fixed inside the top arm shell 23, a fourth driving belt pulley 25 is fixed at the output shaft end of the second end effector driving motor 24, a fourth driven belt pulley 26 is fixed on the input shaft of the end effector unit, a fourth driving belt 27 is wound on the fourth driving belt pulley 25 and the fourth driven belt pulley to form a group of driving mechanisms for realizing power transmission, and the second end effector unit can be rotated when the second end effector driving motor 24 works.

Further, in the present invention, the third end effector driving motor 28 is fixed inside the top arm casing 23, the fifth driving pulley 29 is fixed at the output shaft end of the third end effector driving motor 28, the fifth driven pulley 30 is fixed on the input shaft of the end effector unit, and the fifth driving belt 31 is wound around the fifth driving pulley 29 and the fifth driven pulley to form a set of transmission mechanism to realize power transmission, so that the third end effector driving motor 28 can realize the rotary motion of the second end effector unit when working.

The lifting arm unit can rotate around the lifting shaft 13, and can linearly lift along the lifting shaft 13.

According to the invention, the support arm unit, the lifting arm unit, the top arm unit, the first end effector and the second end effector form a SCARA (Selective Compliance Assembly Robot Arm) multi-joint robot arm, when the support arm driving motor 3 works, the whole arm part can rotate, when the arm lifting motor 5 works, the lifting arm unit can move up and down in a straight line, when the top arm rotating motor 9 works, the top arm unit can rotate, and when the lifting arm rotating motor 16 works, the lifting arm unit can rotate.

As shown in fig. 12, the manipulator of the present invention forms the dual-station wafer pick-and-place attitude by the support arm driving motor 3, the top arm rotating motor 9, the lifting arm rotating motor 16, the end effector driving motor one 22, the end effector driving motor two 24 and the end effector driving motor three 28, and at this time, the center-to-center distance between the end effector of the top arm unit and the end effector of the lifting arm unit is M, where M is variable according to actual requirements instead of fixed value, and since the lifting arm unit can perform lifting movement, the height difference between the two end effectors is also variable. As shown in fig. 13, four stations A, B, C, D exist on the station, wherein the heights of the three stations B, C, D are the same, and the height of the station a has a large height difference compared with the heights of the other stations, when the manipulator in the invention is required to take and put the sheets from the station a to the station C, the lifting arm is only required to be lifted to a designated position, so that the height difference between the end effector and the end effector on the top arm unit is the same as the height difference between the end effector and the station a to the station C, and then the sheets are taken and put. The distance between stations of the station is N, and when the distance M between the two end effectors of the manipulator is more than or equal to N and the height difference between the two stations is less than or equal to the height difference range of the two end effectors, double-wafer pick-and-place sheet conveying can be performed on any two stations.

14-16, the manipulator of the invention can respectively realize the picking and placing sheet transmission of double-station wafers of the stations C and D, the stations B and D and the stations A and B.

Further, the number of the end effectors is not limited to 1 and 2, and can be multiple as the installation space allows and the practical application needs. The end effector may be an end effector having a wafer flipping function.

Further, the number of the lifting arm units is not limited to 1, and may be plural under the requirements of installation space allowance and practical application.

Further, the lifting arm unit is not limited to the embodiment described between the support arm unit and the top arm unit, but may be located above the top arm unit. Meanwhile, the top arm unit is not limited to the specific embodiment described as being not liftable, and may have a lifting function like the lifting arm unit.

Further, when the double-station is equidistant from the relative level of the manipulator, the arm lengths of the lifting arm unit and the top arm unit are equal, and when the double-station is unequal to the picking and placing distance of the manipulator, the arm lengths of the supporting arm unit and the arm lengths of the upgrading arm unit and the top arm unit are unequal, and the arm lengths of the supporting arm unit and the arm lengths of the upgrading arm unit and the top arm unit are equal.

The transmission structure in each arm unit is not limited to the synchronous belt transmission mechanism described in the embodiment of the present invention, and may be other transmission structures having the same function. The lifting structure for realizing the lifting arm unit in the invention is not limited to the screw transmission mechanism described in the embodiment of the invention, and can be other transmission structures with specific same functions.

The load of the manipulator is not limited to the silicon-based semiconductor and the wafer used by the compound semiconductor, and the manipulator can also be a substrate similar to the wafer in shape by taking sapphire, quartz and the like as materials in other industries.

It is to be understood that the above examples only represent preferred embodiments of the present invention, which are described in more detail and are not to be construed as limiting the scope of the invention; it should be noted that, for a person skilled in the art, the above technical features can be freely combined, and several variations and modifications can be made without departing from the scope of the invention; therefore, all changes and modifications that come within the meaning and range of equivalency of the claims are to be embraced within their scope.

Claims (6)

1. The utility model provides a wafer transmission manipulator that arm liftable, its characterized in that includes body unit, support arm unit, lift arm unit, top arm unit, first end effector unit and second end effector unit, wherein: one end of the support arm unit rotates and/or moves up and down around the body unit; the other end of the supporting arm unit supports one end of the lifting arm unit and enables the lifting arm unit to perform rotation and/or lifting movement, the other end of the lifting arm unit supports, lifts and rotates the first end effector, one end of the top arm unit rotates around the lifting arm unit, and the other end of the top arm unit supports and rotates the second end effector; the distance between the first end effector and the second end effector is changed along with the lifting of the first end effector driven by the lifting arm unit.

2. The arm liftable wafer transfer robot of claim 1, wherein the lifting arm unit comprises a lifting arm housing, an arm lifting seat, a lifting arm rotating motor, a driving pulley three, a driven pulley three, a driving belt three, a screw rod nut seat and a first end effector driving motor one; the lifting arm shell is pivoted with the arm lifting seat, the arm lifting seat is fixed on the lifting shaft, the lifting arm rotating motor is fixed inside the arm lifting seat, the driving belt pulley III is fixed at the output shaft end of the arm rotating motor, the driven belt pulley III is fixed on the lifting arm shell, the driving belt pulley III and the driven belt pulley III are wound by a group of driving mechanisms to realize power transmission, and the lifting arm unit rotates on the lifting shaft when the lifting arm rotating motor works; the screw rod is fixed on the supporting arm shell, and the nut seat is fixed on the arm lifting seat; when the arm lifting motor works, the screw rod enables the arm lifting seat to do up-down linear lifting motion along the lifting shaft, so that the lifting arm unit is synchronously lifted; the first end effector is fixed at the output shaft end of the first end effector driving motor, and the first end effector moves up and down and/or rotates when the first end effector driving motor works.

3. The manipulator with liftable arms according to claim 2, wherein the body unit comprises a robot body, a lifting seat and a support arm driving motor, the lifting seat is fixed on the robot body, the support arm driving motor is fixed on the lifting seat, and the support arm driving motor moves in a linear lifting manner along with the lifting seat; the support arm unit comprises a support arm shell, an arm lifting motor, a first driving belt pulley, a first driven belt pulley, a first driving belt, a top arm rotating motor, a second driving belt pulley, a second driven belt pulley, a second driving belt pulley and a lifting shaft; the support arm shell is rotatably fixed in the lifting seat, the support arm driving motor rotates relative to the support arm unit, the arm lifting motor is fixed in the support arm shell, the driving pulley I is fixed at the output shaft end of the arm lifting motor, the driving belt I is wound on the driving pulley I and the driven pulley I to realize the transmission of power by a group of transmission mechanisms, the top arm rotating motor is also fixed in the support arm shell, the driving pulley II is fixed at the output shaft end of the top arm rotating motor, the driving belt II is wound on the driving pulley II and the driven pulley II to realize the transmission of power by a group of transmission mechanisms, the lifting shaft is rotatably fixed on the support arm shell, the driven pulley II is fixed at the lower end part of the lifting shaft, and the lifting shaft synchronously rotates when the top arm rotating motor works; the top arm unit comprises a top arm shell, a second end effector driving motor, a fourth driving belt pulley, a fourth driven belt pulley and a fourth driving belt, wherein the top arm shell is fixed at the other end of the lifting shaft, the second end effector driving motor is fixed inside the top arm shell, the fourth driving belt pulley is fixed at the output shaft end of the second end effector driving motor, the fourth driven belt pulley is fixed on the input shaft of the end effector unit, the fourth driving belt pulley and the fourth driven belt pulley form a group of transmission mechanisms to realize power transmission, and when the second end effector driving motor works, the second end effector is made to perform rotary motion; the end effector driving motor III is fixed inside the top arm shell, the driving belt pulley V is fixed at the three output shaft ends of the end effector driving motor III, the driven belt pulley V is fixed on the input shaft of the second end effector unit, the driving belt V and the driven belt pulley V form a group of transmission mechanisms to realize power transmission, and when the second end effector driving motor III works, the end effector unit can rotate.

4. The arm liftable wafer transfer robot of claim 1, wherein the arms of the first end effector and the second end effector are of unequal length.

5. The arm liftable wafer transfer robot of claim 1, wherein the first or end effector and the second or end effector hold a load in the form of passive friction, edge gripping, vacuum suction, or bernoulli.

6. The arm liftable wafer transfer robot of claim 1, wherein the arm length of the support arm unit is unequal to the arm lengths of the lift arm unit and the top arm unit.