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CN116929552A - A flat grating spectrometer based on curved prism - Google Patents

A flat grating spectrometer based on curved prism Download PDF

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Publication number
CN116929552A
CN116929552A CN202310897463.1A CN202310897463A CN116929552A CN 116929552 A CN116929552 A CN 116929552A CN 202310897463 A CN202310897463 A CN 202310897463A CN 116929552 A CN116929552 A CN 116929552A
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Prior art keywords
curved prism
curved
lens
optical
prism
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李西杰
高明
杨佳婷
吕宏
刘钧
陈阳
王青松
王伟
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Xian Technological University
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Xian Technological University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/14Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804Plane gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

The invention belongs to the technical field of imaging spectrum, and mainly relates to a plane grating spectrometer based on a curved prism. The optical system has greatly improved spectral performance, and the high diffraction efficiency of the planar grating realizes high signal-to-noise ratio and high dynamic measurement range. The structure of the invention realizes large-scale industrialized production, and has compact structure, small volume, light weight and simple engineering realization; realizing the design of large relative aperture of the system; the assembly process is simple, and no special requirements are made on the spacing and the relative positions of the optical elements. In the long range of 0.4-1 mu m, the spectrum resolution of the spectrometer is better than 2nm, and the spectrum bending is less than 0.5 mu m.

Description

一种基于曲面棱镜的平面光栅光谱仪A flat grating spectrometer based on curved prism

技术领域Technical field

本发明属于成像光谱技术领域,主要一种基于曲面棱镜的平面光栅光谱仪。The invention belongs to the technical field of imaging spectroscopy and is mainly a plane grating spectrometer based on a curved prism.

背景技术Background technique

高分辨率精细成像光谱仪通常采用非球面校正系统的像差,通过折转像面的位置使狭缝和像面置于不同平面内,例如“基于自由曲面的Littrow短波成像光谱仪”,包括狭缝、Littrow光学模块、平面光栅以及探测模块,由于使用的光栅为平面衍射光栅,存在的问题是:High-resolution fine imaging spectrometers usually use aspherical correction systems to correct aberrations, by folding the position of the image plane so that the slit and image plane are placed in different planes, such as the "Littrow shortwave imaging spectrometer based on free form surfaces", including the slit , Littrow optical module, plane grating and detection module. Since the grating used is a plane diffraction grating, the existing problems are:

1、平面光栅分光模块由于狭缝方向与系统的子午面互相垂直,狭缝上相同谱线不同物点发出的光线经过平面光栅后也会产生较为严重的谱线弯曲,严重的谱线弯曲就会使得系统产生光谱混叠,严重影响系统的成像质量。1. Since the slit direction of the plane grating spectroscopic module is perpendicular to the meridian plane of the system, the light emitted from different object points with the same spectral line on the slit will also produce more severe spectral line bending after passing through the plane grating. Severe spectral line bending will This will cause spectral aliasing in the system, seriously affecting the imaging quality of the system.

2、由于系统完全采用的是共用准直成像系统,无法实现大相对孔径设计;2. Since the system completely uses a shared collimated imaging system, it cannot achieve large relative aperture design;

3、由于自由曲面的加工难度大,精度低,同时价格昂贵,因此工程可实现性低。3. Since free-form surfaces are difficult to process, have low precision, and are expensive, the engineering achievability is low.

4、Littrow短波成像光谱仪工作波长为0.9~1.7μm,对于光学设计而言,波长越短,系统的焦深越小,像差越难校正,但是因为系统的焦深计算公式为±2λ(D/f)2,该结构不能进一步的缩短波长。4. The working wavelength of Littrow shortwave imaging spectrometer is 0.9~1.7μm. For optical design, the shorter the wavelength, the smaller the focal depth of the system, and the more difficult it is to correct aberrations. However, because the focal depth calculation formula of the system is ±2λ(D /f) 2 , this structure cannot further shorten the wavelength.

综上所述,不断提高曲面棱的平面光栅光谱仪的性能,成为本领域科研人员的重点研究方向。In summary, continuously improving the performance of planar grating spectrometers with curved edges has become a key research direction for researchers in this field.

发明内容Contents of the invention

本发明提供一种基于曲面棱镜的平面光栅光谱仪,以解决现有技术中存在的系统的成像质量、无法实现大相对孔径设计、工程可实现性低、不能进一步缩短波长的问题。The present invention provides a planar grating spectrometer based on a curved prism to solve the problems existing in the prior art in terms of system imaging quality, inability to achieve large relative aperture design, low engineering realizability, and inability to further shorten the wavelength.

为了达到本发明的目的,本发的技术方案是:一种基于曲面棱镜的平面光栅光谱仪,包括沿光轴依次设置的狭缝、曲面棱镜、准直成像透镜组、平面光栅、像面位置,所述曲面棱镜为离轴倾斜曲面透镜,准直成像透镜组由依次排列的第一双凸正透镜、双凹负透镜、第二双凸正透镜组成。In order to achieve the purpose of the present invention, the technical solution of the present invention is: a plane grating spectrometer based on a curved prism, including slits, a curved prism, a collimated imaging lens group, a plane grating, and an image plane position sequentially arranged along the optical axis, The curved prism is an off-axis tilted curved lens, and the collimating imaging lens group consists of a first biconvex positive lens, a biconcave negative lens, and a second biconvex positive lens arranged in sequence.

进一步的,上述曲面棱镜为离轴倾斜曲面透镜,主要由折射率nd=1.4585,vd=67.821的光学材料制成。Furthermore, the above-mentioned curved prism is an off-axis tilted curved lens, which is mainly made of optical materials with refractive index nd=1.4585 and vd=67.821.

进一步的,上述第一双凸正透镜由nd=1.6385,vd=55.447的光学材料制成,双凹负透镜由nd=1.618,vd=63.393的光学材料制成,第二双凸正透镜由nd=1.9538,vd=32.309的光学材料制成。Further, the above-mentioned first biconvex positive lens is made of optical materials with nd=1.6385, vd=55.447, the biconcave negative lens is made of optical materials with nd=1.618, vd=63.393, and the second biconvex positive lens is made of nd =1.9538, vd=32.309 made of optical materials.

进一步的,上述平面光栅由基底材料为nd=1.6221,vd=56.71的光学材料制成。Furthermore, the above-mentioned planar grating is made of an optical material whose base material is nd=1.6221 and vd=56.71.

与现有技术相比,本发明的优点是:Compared with the prior art, the advantages of the present invention are:

1、本发明提供的光谱仪的工作波长为达到0.4~1μm,基于此,且本发明光学系统的光谱性能有了非常大的改善,同时平面光栅的高衍射效率实现了系统的高信噪比,高动态测量范围。1. The working wavelength of the spectrometer provided by the present invention is 0.4-1 μm. Based on this, the spectral performance of the optical system of the present invention has been greatly improved. At the same time, the high diffraction efficiency of the planar grating achieves a high signal-to-noise ratio of the system. High dynamic measurement range.

2、本发明中采用的曲面棱镜加工难度小,加工技术成熟,将曲面棱镜与平面光栅相结合,用来校正光谱的光谱弯曲是本发明的创新之处。该结构使得其实现大规模的工业化生产变为现实,工程实现简单。2. The curved prism used in the present invention is easy to process, and the processing technology is mature. Combining the curved prism with a plane grating to correct the spectral bending of the spectrum is the innovation of the present invention. This structure makes large-scale industrial production a reality and the engineering implementation is simple.

3、本发明由于采用曲面棱镜,引入了棱镜非对称的光学特性,通过曲面棱镜的光学特性,有效抑制补偿了全系统的光谱弯曲,且曲面棱镜存在一定的倾斜偏心,实现系统的大相对孔径设计;3. Since the present invention uses a curved prism, it introduces the asymmetric optical characteristics of the prism. Through the optical characteristics of the curved prism, it effectively suppresses and compensates for the spectral curvature of the entire system, and the curved prism has a certain tilt eccentricity, achieving a large relative aperture of the system. design;

4、本发明通过改变曲面棱镜的倾斜和偏心,就可补偿大视场光学系统的光谱弯曲,本发明的结构紧凑,体积小,重量轻,4. The present invention can compensate for the spectral curvature of a large field of view optical system by changing the inclination and eccentricity of the curved prism. The present invention has a compact structure, small volume and light weight.

5、本发明装配工艺简单,对各光学元件之间的间距和相对位置无特殊需求,只要满足组装工艺即可。5. The assembly process of the present invention is simple, and there are no special requirements for the spacing and relative positions between the optical elements, as long as the assembly process is satisfied.

6、本发明适用于各种机载平台和小卫星平台,可涉及到农作物生态健康检测,水质水体成份检测,植物植被病虫害检测等各个领域。6. The present invention is suitable for various airborne platforms and small satellite platforms, and can be involved in various fields such as crop ecological health detection, water quality and water body composition detection, plant vegetation diseases and insect pests detection, etc.

附图说明Description of the drawings

图1为本发明的结构示意图;Figure 1 is a schematic structural diagram of the present invention;

图2为光谱弯曲曲线图。Figure 2 is a spectral bending curve diagram.

附图标记说明:1-狭缝、2-曲面棱镜、3-准直成像透镜组、3-1第一双凸正透镜、3-2双凹负透镜、3-3第二双凸正透镜、4-平面光栅、5-像面位置。Explanation of reference signs: 1-slit, 2-curved prism, 3-collimated imaging lens group, 3-1 first biconvex positive lens, 3-2 biconcave negative lens, 3-3 second biconvex positive lens , 4-plane grating, 5-image plane position.

具体实施方式Detailed ways

以下结合附图和实施例对本发明进行详细地说明。The present invention will be described in detail below with reference to the drawings and examples.

参见图1,一种基于曲面棱镜的平面光栅光谱仪,包括沿光轴依次设置的狭缝1、曲面棱镜2、准直成像透镜组3、平面光栅4、像面位置5,所述曲面棱镜2为离轴倾斜曲面透镜,准直成像透镜组3由依次排列的第一双凸正透镜3-1、双凹负透镜3-2和第二双凸正透镜3-3组成。Referring to Figure 1, a plane grating spectrometer based on a curved prism includes a slit 1, a curved prism 2, a collimating imaging lens group 3, a plane grating 4, and an image plane position 5 arranged sequentially along the optical axis. The curved prism 2 It is an off-axis tilted curved lens, and the collimating imaging lens group 3 is composed of a first biconvex positive lens 3-1, a biconcave negative lens 3-2 and a second biconvex positive lens 3-3 arranged in sequence.

所述狭缝1接收物镜获得的光谱信息,不同的狭缝宽度可以满足不同的光谱分辨率,不同的狭缝宽度会影响系统的信噪比。曲面棱镜2通过自身的倾斜/偏心校正系统的离轴像差,同时通过棱镜自身的特性,产生与光栅平面方向相反的光谱弯曲,通过补偿校正,使得系统的残余光谱弯曲接近于0。准直成像镜组3对入射光束进行准直,同时对光栅4的衍射光进行会聚成像。The slit 1 receives the spectral information obtained by the objective lens. Different slit widths can meet different spectral resolutions, and different slit widths will affect the signal-to-noise ratio of the system. The curved prism 2 corrects the off-axis aberration of the system through its own tilt/eccentricity. At the same time, through the characteristics of the prism itself, it produces a spectral curvature opposite to the direction of the grating plane. Through compensation and correction, the residual spectral curvature of the system is close to 0. The collimating imaging lens group 3 collimates the incident light beam and simultaneously performs convergence imaging on the diffracted light from the grating 4.

所述曲面棱镜2为离轴倾斜曲面透镜,主要由折射率nd=1.4585,vd=67.821的光学材料制成。所述第一双凸正透镜3-1由nd=1.6385,vd=55.447的光学材料制成,双凹负透镜3-2由nd=1.618,vd=63.393的光学材料制成,第二双凸正透镜3-3由nd=1.9538,vd=32.309的光学材料制成。所述平面光栅4由基底材料为nd=1.6221,vd=56.71的光学材料制成。The curved prism 2 is an off-axis tilted curved lens, mainly made of optical materials with refractive index nd=1.4585 and vd=67.821. The first biconvex positive lens 3-1 is made of optical material with nd=1.6385, vd=55.447, the biconcave negative lens 3-2 is made of optical material with nd=1.618, vd=63.393, and the second biconvex lens 3-2 is made of optical material with nd=1.618, vd=63.393. The positive lens 3-3 is made of optical material with nd=1.9538 and vd=32.309. The plane grating 4 is made of an optical material whose base material is nd=1.6221 and vd=56.71.

本发明提供的一种基于双臂补偿的成像光谱仪光学系统,其数值孔径为0.2,其工作的环境温度为-40℃~60℃;将像元尺寸为11μm的探测器设置于像面位置5处,参见图2,经过测试,在0.4~1μm长范围内,光谱仪的光谱分辨率优于2nm,光谱弯曲<0.5μm,满足国际高分辨率要求。The present invention provides an imaging spectrometer optical system based on double-arm compensation. Its numerical aperture is 0.2, and its working environment temperature is -40°C to 60°C; a detector with a pixel size of 11 μm is set at the image plane position 5 , see Figure 2. After testing, in the long range of 0.4 to 1 μm, the spectral resolution of the spectrometer is better than 2 nm, and the spectral bend is <0.5 μm, meeting the international high resolution requirements.

以上所述,仅是本发明的较佳实施例,并非对本发明作任何形式上的限制,凡是依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均仍属本发明技术方案的保护范围。The above are only preferred embodiments of the present invention and do not limit the present invention in any form. Any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention still belong to the present invention. The scope of protection of the technical solution of the invention.

Claims (4)

1. A plane grating spectrometer based on a curved prism is characterized in that: the optical collimator comprises a slit (1), a curved prism (2), a collimating imaging lens group (3), a plane grating (4) and an image plane position (5) which are sequentially arranged along an optical axis, wherein the curved prism (2) is an off-axis inclined curved lens, and the collimating imaging lens group (3) consists of a first biconvex positive lens (3-1), a biconcave negative lens (3-2) and a second biconvex positive lens (3-3) which are sequentially arranged.
2. A planar grating spectrometer based on a curved prism as recited in claim 1, wherein: the curved prism (2) is an off-axis inclined curved lens and is mainly made of an optical material with refractive index nd=1.4585 and vd= 67.821.
3. A planar grating spectrometer based on a curved prism as claimed in claim 1 or 2, wherein: the first biconvex positive lens (3-1) is made of an optical material with nd=1.6385 and vd= 55.447, the biconcave negative lens (3-2) is made of an optical material with nd=1.618 and vd= 63.393, and the second biconvex positive lens (3-3) is made of an optical material with nd=1.9538 and vd= 32.309.
4. A curved prism-based planar grating spectrometer as recited in claim 3, wherein: the planar grating (4) is made of an optical material with a base material nd=1.6221 and vd= 56.71.
CN202310897463.1A 2023-07-21 2023-07-21 A flat grating spectrometer based on curved prism Pending CN116929552A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000056226A (en) * 1998-08-04 2000-02-25 Olympus Optical Co Ltd Display/image pickup device
US6288781B1 (en) * 1997-02-24 2001-09-11 Sira Electro-Optics Ltd Imaging spectrometer
CN108489611A (en) * 2018-02-09 2018-09-04 中国科学院长春光学精密机械与物理研究所 More slotted prism dispersive spectrometer systems
CN116337232A (en) * 2023-03-10 2023-06-27 中国科学院西安光学精密机械研究所 Ultra-high-speed collision flash spectrum detection system based on image intensifier

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6288781B1 (en) * 1997-02-24 2001-09-11 Sira Electro-Optics Ltd Imaging spectrometer
JP2000056226A (en) * 1998-08-04 2000-02-25 Olympus Optical Co Ltd Display/image pickup device
CN108489611A (en) * 2018-02-09 2018-09-04 中国科学院长春光学精密机械与物理研究所 More slotted prism dispersive spectrometer systems
CN116337232A (en) * 2023-03-10 2023-06-27 中国科学院西安光学精密机械研究所 Ultra-high-speed collision flash spectrum detection system based on image intensifier

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