CN116825658B - Method and device for monitoring beam current of ion beam in real time - Google Patents
Method and device for monitoring beam current of ion beam in real time Download PDFInfo
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Abstract
The invention provides a method and a device for monitoring beam current of an ion beam in real time, wherein the method comprises the following steps: a non-magnetic permeability circular ring which is provided with a position sensor and can repeatedly rotate along the axis is arranged on a passage of the ion beam, and a magnetic field intensity sensor is arranged on the non-magnetic permeability circular ring; acquiring a magnetic induction intensity sampling path based on the position sensor and acquiring magnetic induction intensity through the magnetic field intensity sensor; and acquiring in-loop current through the magnetic induction sampling path and the magnetic induction so as to realize real-time monitoring of the beam current of the ion beam. According to the method and the device for monitoring the beam current of the ion beam in real time, the magnetic induction sampling path and the magnetic induction are periodically obtained through the rotation of the non-magnetic permeability circular ring, the in-ring current can be obtained through the magnetic induction sampling path and the magnetic induction, the real-time monitoring of the beam current of the ion beam can be realized, and the accuracy of beam current monitoring is improved.
Description
Technical Field
The invention relates to the technical field of ion beam current monitoring, in particular to a method and a device for monitoring ion beam current in real time.
Background
An ion beam refers to a group of ions moving in nearly the same direction at approximately uniform velocities, which can be obtained by an ion source. The beam current is an important parameter of the ion source and needs to be monitored during application.
The current ion beam current monitoring method is carried out in the beam current establishment stage, and the current of the ion beam is obtained by intercepting the ion beam which is being injected by adopting a Faraday cup and according to the current of the neutralized ion beam, so as to achieve the aim of monitoring. However, the monitoring mode can only be carried out in the preparation stage of ion beam implantation, real-time monitoring cannot be realized in the implantation process, the stability of the ion beam current can only be indirectly judged according to power supply and feedback, and the monitoring result is inaccurate.
Disclosure of Invention
The invention aims to provide a method and a device for monitoring the beam current of an ion beam in real time, so as to solve the technical problems, realize the real-time monitoring of the beam current of the ion beam and improve the accuracy of monitoring.
In order to solve the technical problems, the invention provides a method for monitoring beam current of an ion beam in real time, which comprises the following steps:
a non-magnetic permeability circular ring which is provided with a position sensor and can repeatedly rotate along the axis is arranged on a passage of the ion beam, and a magnetic field intensity sensor is arranged on the non-magnetic permeability circular ring;
acquiring a magnetic induction intensity sampling path based on the position sensor and acquiring magnetic induction intensity through the magnetic field intensity sensor;
and acquiring in-loop current through the magnetic induction sampling path and the magnetic induction so as to realize real-time monitoring of the beam current of the ion beam.
According to the scheme, through rotation of the non-magnetic permeability circular ring, the magnetic induction sampling path and the magnetic induction are periodically obtained, and the current in the ring can be obtained through the magnetic induction sampling path and the magnetic induction; if the ion beam current is unchanged, the result of each sampling period is unchanged, and if the ion beam current is changed, the finally obtained in-loop current is correspondingly changed, so that the real-time monitoring of the ion beam current can be realized, and the accuracy of beam current monitoring is improved.
Further, the acquiring in-loop current through the magnetic induction sampling path and the magnetic induction so as to realize real-time monitoring of the beam current of the ion beam, including:
based on ampere loop theorem, the magnetic induction is utilized to integrate the magnetic induction sampling path so as to obtain in-loop current, and a calculation formula is specifically as follows:
wherein:representing the magnetic induction intensity; />Representing a magnetic induction sampling path; />Indicating vacuum permeability; />Representing the in-loop current.
Further, when the beam current is a finite length current, the calculation formula of the in-loop current is specifically as follows:
wherein:representing the included angle between the magnetic field intensity sensor and the beam left end connection line, +.>And the included angle between the magnetic field intensity sensor and the connecting line of the right end of the beam current is shown.
In the scheme, the actually monitored ion beam current is not of an infinite length, and the magnetic induction intensity acquired by the magnetic field intensity sensor is only a part of the ion beam of the infinite length, so that the universality of the scheme is improved and the accuracy of the real-time monitoring of the beam current is improved by setting the compensation coefficient.
Further, the magnetic field strength sensor is mounted with a magnetic shield.
In the scheme, the magnetic shielding cover is arranged on the magnetic field intensity sensor, so that the environmental change magnetic field interference can be effectively avoided, the accuracy of data acquisition of the magnetic field intensity sensor is improved, and the accuracy of a monitoring result is further improved.
Further, the non-magnetic permeability ring is provided withThe magnetic field intensity sensor comprises the following components: the non-magnetic permeability circular rings are uniformly arranged at equal intervalsAnd magnetic field strength sensors.
In the scheme, through the arrangement ofThe magnetic field intensity sensors collect the magnetic field intensity at the same time, so that the defect that one measurement period can be completed only by rotating 360 degrees during single sensor collection can be overcome, and the measurement period is only required to be within the range of +.>One measuring period can be completed by one-time rotation of the range, wiring difficulty is reduced, monitoring frequency is improved, and monitoring instantaneity is guaranteed.
The invention also provides an ion beam current real-time monitoring device which comprises a non-magnetic permeability circular ring with a position sensor, a data acquisition module and a beam current monitoring module; the non-magnetic permeability circular ring is provided with a magnetic field intensity sensor;
when the beam current is monitored in real time:
the non-magnetic permeability circular ring can be repeatedly and rotatably arranged on a path of the ion beam current along the axis;
acquiring a magnetic induction intensity sampling path based on the position sensor, acquiring magnetic induction intensity through the magnetic field intensity sensor, and acquiring data of the magnetic induction intensity sampling path and the magnetic induction intensity based on the data acquisition module;
the beam current monitoring module is used for acquiring in-loop current through the magnetic induction sampling path and the magnetic induction so as to realize real-time monitoring of the ion beam current.
The monitoring device periodically acquires a magnetic induction sampling path and magnetic induction through rotation of the non-magnetic permeability circular ring, and can acquire in-ring current through the magnetic induction sampling path and the magnetic induction; if the ion beam current is unchanged, the result of each sampling period is unchanged, and if the ion beam current is changed, the finally obtained in-loop current is correspondingly changed, so that the real-time monitoring of the ion beam current can be realized, and the accuracy of beam current monitoring is improved.
Further, the beam current monitoring module is configured to obtain an in-loop current through the magnetic induction sampling path and the magnetic induction so as to realize real-time monitoring of an ion beam current, and includes:
based on ampere loop theorem, the magnetic induction is utilized to integrate the magnetic induction sampling path so as to obtain in-loop current, and a calculation formula is specifically as follows:
wherein:representing the magnetic induction intensity; />Representing a magnetic induction sampling path; />Indicating vacuum permeability; />Representing the in-loop current.
Further, in the beam monitoring module, when the beam current is a finite length current, the calculation formula of the in-loop current is specifically as follows:
wherein:representing the included angle between the magnetic field intensity sensor and the beam left end connection line, +.>And the included angle between the magnetic field intensity sensor and the connecting line of the right end of the beam current is shown.
In the scheme, the actually monitored ion beam current is not of an infinite length, and the magnetic induction intensity acquired by the magnetic field intensity sensor is only a part of the ion beam of the infinite length, so that the universality of the scheme is improved and the accuracy of the real-time monitoring of the beam current is improved by setting the compensation coefficient.
Further, the magnetic field strength sensor is mounted with a magnetic shield.
In the scheme, the magnetic shielding cover is arranged on the magnetic field intensity sensor, so that the environmental change magnetic field interference can be effectively avoided, the accuracy of data acquisition of the magnetic field intensity sensor is improved, and the accuracy of a monitoring result is further improved.
Further, a magnetic field intensity sensor is arranged on the non-magnetic permeability circular ring, and specifically: the non-magnetic permeability circular rings are uniformly arranged at equal intervalsAnd magnetic field strength sensors.
In the scheme, through the arrangement ofThe magnetic field intensity sensors collect the magnetic field intensity at the same time, so that the defect that one measurement period can be completed only by rotating 360 degrees during single sensor collection can be overcome, and the measurement period is only required to be within the range of +.>One measuring period can be completed by one-time rotation of the range, wiring difficulty is reduced, monitoring frequency is improved, and monitoring instantaneity is guaranteed.
Drawings
Fig. 1 is a schematic flow chart of a method for monitoring beam current of an ion beam in real time according to an embodiment of the invention;
fig. 2 is a schematic diagram of a non-magnetic ring setup of an ion beam current real-time monitoring device according to an embodiment of the present invention;
fig. 3 is a schematic circuit module connection diagram of an ion beam current real-time monitoring device according to an embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1, the present embodiment provides a method for monitoring beam current of an ion beam in real time, which includes the following steps:
s1: a non-magnetic permeability circular ring with a position sensor is arranged on a passage of the ion beam and can be driven by a cylinder to repeatedly rotate along the axis, and a magnetic field intensity sensor is arranged on the non-magnetic permeability circular ring;
s2: acquiring a magnetic induction intensity sampling path based on the position sensor and acquiring magnetic induction intensity through the magnetic field intensity sensor;
s3: and acquiring in-loop current through the magnetic induction sampling path and the magnetic induction so as to realize real-time monitoring of the beam current of the ion beam.
According to the embodiment, through rotation of the non-magnetic permeability circular ring, a magnetic induction sampling path and magnetic induction are periodically obtained, and through the magnetic induction sampling path and the magnetic induction, in-ring current can be obtained; if the ion beam current is unchanged, the result of each sampling period is unchanged, and if the ion beam current is changed, the finally obtained in-loop current is correspondingly changed, so that the real-time monitoring of the ion beam current can be realized, and the accuracy of beam current monitoring is improved.
The positive ion beam in the space corresponds to a direct current, which is required to be stable during ion implantation, and thus the magnetic field generated is also stable. In a steady magnetic field, the line integral of the magnetic induction B along any closed path is equal to the algebraic sum of the individual currents enclosed by the closed path.
In this embodiment, the magnetic field intensity sensor used in this embodiment may be a fluxgate magnetic field intensity sensor, and its low range is 0.1nt to 100mt.
Further, the acquiring in-loop current through the magnetic induction sampling path and the magnetic induction so as to realize real-time monitoring of the beam current of the ion beam, including:
based on ampere loop theorem, the magnetic induction is utilized to integrate the magnetic induction sampling path so as to obtain in-loop current, and a calculation formula is specifically as follows:
wherein:the magnetic induction intensity is expressed as T tesla N/(A.m); />Representing a magnetic induction sampling path;represents the vacuum permeability, in this embodiment +.>；/>Representing the in-loop current.
The embodiment calculates for the simplified ion beam current, the length of the simplified ion beam current is infinitely long relative to the diameter of the non-magnetic ring, and the ion beam is concentrated at the axis of the non-magnetic ring. If the radius of the ring is 1.5X10 -3 m, the detection range of the non-magnetic permeability ring can be calculated as: 7.5X10 -6 A-75A, and the current intensity of the ion beam in ion implantation is as follows: 1X 10 -5 A~1×10 -2 A。
Further, when the beam current is a finite length current, the calculation formula of the in-loop current is specifically as follows:
wherein:representing the included angle between the magnetic field intensity sensor and the beam left end connection line, +.>And the included angle between the magnetic field intensity sensor and the connecting line of the right end of the beam current is shown.
In this embodiment, since the actually monitored ion beam current is not of an infinite length, the magnetic induction intensity collected by the magnetic field intensity sensor is only a part of the ion beam of an infinite length, so that the universality of the scheme and the accuracy of the real-time monitoring of the beam current are improved by setting the compensation coefficient.
Further, the magnetic field strength sensor is mounted with a magnetic shield. The magnetic shield may be a silicon steel magnetically permeable shield.
In the embodiment, the magnetic shielding cover is arranged on the magnetic field intensity sensor, so that the interference of an environment-changing magnetic field can be effectively avoided, the accuracy of data acquisition of the magnetic field intensity sensor is improved, and the accuracy of a monitoring result is further improved.
Further, a magnetic field intensity sensor is arranged on the non-magnetic permeability circular ring, and specifically: the non-magnetic permeability circular rings are uniformly arranged at equal intervalsAnd magnetic field strength sensors.
It should be noted thatThe values measured by the magnetic field strength sensors are integrated and summed to obtain +.>Loop current under the individual magnetic field strength sensors.
In the present embodiment, by setting upThe magnetic field intensity sensors collect the magnetic field intensity at the same time, so that the defect that one measurement period can be completed only by rotating 360 degrees during single sensor collection can be overcome, and the measurement period is only required to be within the range of +.>One measuring period can be completed by one-time rotation of the range, wiring difficulty is reduced, monitoring frequency is improved, and monitoring instantaneity is guaranteed.
If the non-magnetic conductive ring has only one magnetic field intensity sensor, the ring needs to rotate 360 degrees to complete one measurement period to limit the measurement frequency, thereby increasing the wiring difficulty and settingThe magnetic field strength sensors distributed uniformly along the radial vertical axis are then only required +.>The whole loop can be measured by one-time rotation of the range, the wiring difficulty can be reduced, and the number of the wires is reduced>An increase in (c) may increase the detection frequency. Is provided with->The in-loop current calculation formula of each magnetic field intensity sensor can be:
the embodiment provides an ion beam current real-time monitoring device, which comprises a non-magnetic permeability circular ring with a position sensor, a data acquisition module and a beam current monitoring module; the non-magnetic permeability circular ring is provided with a magnetic field intensity sensor;
when the beam current is monitored in real time, the installation of the non-magnetic permeability ring can be seen from fig. 2, and the schematic connection diagram of the circuit module of the beam current real-time monitoring device can be seen from fig. 3:
the non-magnetic permeability circular ring can be repeatedly and rotatably arranged on a path of the ion beam current along the axis;
acquiring a magnetic induction intensity sampling path based on the position sensor, acquiring magnetic induction intensity through the magnetic field intensity sensor, and acquiring data of the magnetic induction intensity sampling path and the magnetic induction intensity based on the data acquisition module;
the beam current monitoring module is used for acquiring in-loop current through the magnetic induction sampling path and the magnetic induction so as to realize real-time monitoring of the ion beam current.
The monitoring device provided by the embodiment periodically acquires a magnetic induction sampling path and magnetic induction through the rotation of the non-magnetic permeability circular ring, and can acquire in-ring current through the magnetic induction sampling path and the magnetic induction; if the ion beam current is unchanged, the result of each sampling period is unchanged, and if the ion beam current is changed, the finally obtained in-loop current is correspondingly changed, so that the real-time monitoring of the ion beam current can be realized, and the accuracy of beam current monitoring is improved.
Further, the beam current monitoring module is configured to obtain an in-loop current through the magnetic induction sampling path and the magnetic induction so as to realize real-time monitoring of an ion beam current, and includes:
based on ampere loop theorem, the magnetic induction is utilized to integrate the magnetic induction sampling path so as to obtain in-loop current, and a calculation formula is specifically as follows:
wherein:representing the magnetic induction intensity; />Representing a magnetic induction sampling path; />Indicating vacuum permeability; />Representing the in-loop current.
Further, in the beam monitoring module, when the beam current is a finite length current, the calculation formula of the in-loop current is specifically as follows:
wherein:representing the included angle between the magnetic field intensity sensor and the beam left end connection line, +.>And the included angle between the magnetic field intensity sensor and the connecting line of the right end of the beam current is shown.
In this embodiment, since the actually monitored ion beam current is not of an infinite length, the magnetic induction intensity collected by the magnetic field intensity sensor is only a part of the ion beam of an infinite length, so that the universality of the scheme and the accuracy of the real-time monitoring of the beam current are improved by setting the compensation coefficient.
Further, the magnetic field strength sensor is mounted with a magnetic shield.
In the embodiment, the magnetic shielding cover is arranged on the magnetic field intensity sensor, so that the interference of an environment-changing magnetic field can be effectively avoided, the accuracy of data acquisition of the magnetic field intensity sensor is improved, and the accuracy of a monitoring result is further improved.
Further, a magnetic field intensity sensor is arranged on the non-magnetic permeability circular ring, and specifically: the saidThe non-magnetic permeability circular rings are uniformly arranged at equal intervalsAnd magnetic field strength sensors.
In the present embodiment, by setting upThe magnetic field intensity sensors collect the magnetic field intensity at the same time, so that the defect that one measurement period can be completed only by rotating 360 degrees during single sensor collection can be overcome, and the measurement period is only required to be within the range of +.>One measuring period can be completed by one-time rotation of the range, wiring difficulty is reduced, monitoring frequency is improved, and monitoring instantaneity is guaranteed.
While the foregoing is directed to the preferred embodiments of the present invention, it will be appreciated by those skilled in the art that changes and modifications may be made without departing from the principles of the invention, such changes and modifications are also intended to be within the scope of the invention.
Claims (8)
1. The ion beam current real-time monitoring method is characterized by comprising the following steps of:
a non-magnetic permeability circular ring with a position sensor and capable of repeatedly rotating along the axle center is arranged on the path of the ion beam, and the non-magnetic permeability circular ring is uniformly arranged at equal intervalsA plurality of magnetic field strength sensors;
acquiring a magnetic induction intensity sampling path based on the position sensor and acquiring magnetic induction intensity through the magnetic field intensity sensor;
acquiring in-loop current through the magnetic induction sampling path and the magnetic induction so as to realize real-time monitoring of the beam current of the ion beam; wherein:
comprisesThe calculation formula of the in-loop current of each magnetic field intensity sensor is specifically as follows:
in the method, in the process of the invention,representing the in-loop current; i represents an ith magnetic field strength sensor; />Indicating vacuum permeability; />Representing the magnetic induction intensity; />Representing the included angle between the magnetic field intensity sensor and the connecting line of the beam left end; />Representing the included angle between the magnetic field intensity sensor and the connecting line of the right end of the beam; />Representing the magnetic induction sampling path.
2. The method according to claim 1, wherein the acquiring in-loop current through the magnetic induction sampling path and the magnetic induction so as to realize real-time monitoring of the ion beam current comprises:
based on ampere loop theorem, the magnetic induction is utilized to integrate the magnetic induction sampling path so as to obtain in-loop current, and a calculation formula is specifically as follows:
wherein:representing the magnetic induction intensity; />Representing a magnetic induction sampling path; />Indicating vacuum permeability; />Representing the in-loop current.
3. The method according to claim 2, wherein the calculation formula of the in-loop current is specifically as follows:
wherein:representing the included angle between the magnetic field intensity sensor and the beam left end connection line, +.>And the included angle between the magnetic field intensity sensor and the connecting line of the right end of the beam current is shown.
4. The method of claim 1, wherein the magnetic field strength sensor is provided with a magnetic shield.
5. The ion beam current real-time monitoring device is characterized by comprising a non-guide with a position sensorThe device comprises a magnetic ring, a data acquisition module and a beam monitoring module; the non-magnetic permeability circular rings are uniformly arranged at equal intervalsA plurality of magnetic field strength sensors;
when the beam current is monitored in real time:
the non-magnetic permeability circular ring can be repeatedly and rotatably arranged on a path of the ion beam current along the axis;
acquiring a magnetic induction intensity sampling path based on the position sensor, acquiring magnetic induction intensity through the magnetic field intensity sensor, and acquiring data of the magnetic induction intensity sampling path and the magnetic induction intensity based on the data acquisition module;
the beam current monitoring module is used for acquiring in-loop current through the magnetic induction sampling path and the magnetic induction so as to realize real-time monitoring of the ion beam current; wherein:
comprisesThe calculation formula of the in-loop current of each magnetic field intensity sensor is specifically as follows:
in the method, in the process of the invention,representing the in-loop current; i represents an ith magnetic field strength sensor; />Indicating vacuum permeability; />Representing the magnetic induction intensity; />Indicating the magnetic field strengthAn included angle between the beam left end connecting line and the degree sensor; />Representing the included angle between the magnetic field intensity sensor and the connecting line of the right end of the beam; />Representing the magnetic induction sampling path.
6. The apparatus according to claim 5, wherein the beam current monitoring module is configured to obtain an in-loop current through the magnetic induction sampling path and the magnetic induction so as to realize real-time monitoring of the beam current of the ion beam, and the apparatus comprises:
based on ampere loop theorem, the magnetic induction is utilized to integrate the magnetic induction sampling path so as to obtain in-loop current, and a calculation formula is specifically as follows:
wherein:representing the magnetic induction intensity; />Representing a magnetic induction sampling path; />Indicating vacuum permeability; />Representing the in-loop current.
7. The apparatus according to claim 6, wherein in the beam current monitoring module, when the beam current is a finite length current, a calculation formula of the in-loop current is specifically as follows:
wherein:representing the included angle between the magnetic field intensity sensor and the beam left end connection line, +.>And the included angle between the magnetic field intensity sensor and the connecting line of the right end of the beam current is shown.
8. The apparatus according to claim 5, wherein the magnetic field strength sensor is provided with a magnetic shield.
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| CN102194636A (en) * | 2010-03-18 | 2011-09-21 | 上海凯世通半导体有限公司 | Ion implantation system and method |
| CN105869978A (en) * | 2011-12-13 | 2016-08-17 | 艾克塞利斯科技公司 | System and method for ion implantation with improved productivity and uniformity |
| JP2013152208A (en) * | 2011-12-26 | 2013-08-08 | Hitachi Metals Ltd | Magnetic sensor device and current sensor circuit |
| JP2014143243A (en) * | 2013-01-22 | 2014-08-07 | Institute Of Physical & Chemical Research | Electric current detection device for charged particle beam |
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| CN112684489A (en) * | 2021-01-05 | 2021-04-20 | 中国原子能科学研究院 | Heavy ion beam real-time monitoring device and irradiation test system |
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