CN116779498B - Testing device for semiconductor wafer surface - Google Patents
Testing device for semiconductor wafer surface Download PDFInfo
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- CN116779498B CN116779498B CN202311067784.5A CN202311067784A CN116779498B CN 116779498 B CN116779498 B CN 116779498B CN 202311067784 A CN202311067784 A CN 202311067784A CN 116779498 B CN116779498 B CN 116779498B
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- 238000004140 cleaning Methods 0.000 claims abstract description 76
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- 230000007306 turnover Effects 0.000 claims abstract description 33
- 230000007246 mechanism Effects 0.000 claims abstract description 28
- 239000000428 dust Substances 0.000 claims description 77
- 239000007921 spray Substances 0.000 claims description 37
- 230000001050 lubricating effect Effects 0.000 claims description 34
- 238000003860 storage Methods 0.000 claims description 30
- 238000005461 lubrication Methods 0.000 claims description 28
- 238000002347 injection Methods 0.000 claims description 24
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- 230000001105 regulatory effect Effects 0.000 claims description 16
- 230000001502 supplementing effect Effects 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 5
- 238000009826 distribution Methods 0.000 claims 1
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- 230000000295 complement effect Effects 0.000 description 3
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention relates to the technical field of structures for photovoltaic modules, in particular to a testing device for the surface of a semiconductor wafer, which comprises a testing table, a testing frame, a first screw rod sliding table, a moving plate, a testing mechanism, a sorting mechanism and two sliding grooves, wherein the testing frame is arranged at the top of the testing table, the first screw rod sliding table is horizontally arranged at the top end of the testing table, the moving plate is arranged at the moving end of the first screw rod sliding table, the testing mechanism and the sorting mechanism are arranged at the top of the testing table at intervals, and the testing mechanism comprises a lifting frame, a second screw rod sliding table, an adjusting plate, a testing frame, a turnover plate, a turnover motor, a cleaning component, two vertical rods, two hydraulic push rods, two turnover shafts and two testing components. According to the invention, the angle adjustment is not carried out by adopting the connecting rope, so that the condition that the angle adjustment cannot be carried out due to the breakage of the connecting rope is avoided, and the cleaning component is used for cleaning ash of the probe without manual regular cleaning.
Description
Technical Field
The invention relates to the technical field of semiconductor test equipment, in particular to a test device for the surface of a semiconductor wafer.
Background
Semiconductors, as their name implies, are a class of objects that have electrical conductivity between conductors and insulators. The conductivity of the material is altered by the incorporation of impurities, which is the underlying basis of semiconductor technology. With this extension, this characteristic can be used to fabricate various transistors with different current-voltage characteristics.
The invention patent CN113909145B discloses a testing device for the surface of a semiconductor wafer, which comprises a testing table, a loading and unloading assembly, a moving assembly, a testing assembly and a defective product storage assembly, wherein two sliding grooves are symmetrically arranged at the top of the testing table, a moving groove is arranged at the top of the testing table, the moving groove is positioned between the two sliding grooves, the loading and unloading assembly is arranged at the left side of the testing table, the moving assembly is slidably arranged on the two sliding grooves, the defective product storage assembly is arranged at the right side of the testing table, the testing assembly is erected on the testing table, and the testing assembly is positioned between the loading and unloading assembly and the defective product storage assembly.
However, the above-mentioned patent has the following disadvantages in the actual use process: firstly, the patent needs two angle adjusting parts to work for automatically adjusting the angles of the adjusting disc and the probe so as to be suitable for testing semiconductor wafers of different types, and once the connecting rope in the angle adjusting parts is broken, the angles of the adjusting disc and the probe cannot be adjusted, so that the testing work is influenced; secondly, after the patent probe works for a certain time, the surface of the probe can adhere with some dust and other impurities, and the manual cleaning of the probe is required to be carried out manually at regular intervals, so that the patent probe is very inconvenient.
Disclosure of Invention
In order to make up for the defects, the invention provides a testing device for the surface of a semiconductor wafer, which aims to solve the problems that the angle of an adjusting disc and a probe cannot be adjusted when a connecting rope is broken in the background technology, the testing work is affected, and the probe needs to be manually cleaned periodically and manually, so that the problem is very inconvenient.
The technical scheme of the invention is as follows:
the utility model provides a testing arrangement on semiconductor wafer surface, includes test table, testboard, test frame, first lead screw slip table, movable plate, accredited testing organization, sorting mechanism and two spouts, two spout symmetry sets up the top at the test table, testboard slidable mounting is on two spouts, the top at the testboard is installed to the test frame, first lead screw slip table level sets up the top at the test table, the movable plate is installed on the mobile terminal of first lead screw slip table to the top of movable plate is connected with the bottom of testboard, be equipped with the movable groove that the confession movable plate passed on the test table, accredited testing organization and sorting mechanism interval set up the top at the test table, accredited testing organization includes crane, second lead screw slip table, regulating plate, test frame, turnover plate, turnover motor, cleaning component, two montants, two hydraulic push rods, two turnover shafts and two test components, two the symmetry sets up the top at the test table, two the lifting frame slidable mounting is on two montants, two hydraulic push rod symmetry sets up the mobile terminal at the mobile terminal of first lead screw slip table to be connected with the bottom of two test table, the top setting up at the horizontal output shaft of two turnover shaft, two sets up the top of two turnover shaft and two sets up the top of two test platform and two turnover frame.
Further, each test assembly comprises a fixing frame, a U-shaped frame, an adjusting disk, a probe, a linkage shaft, a first cam, a lubricating part, an adjusting motor, a driving wheel, a driven wheel, a belt, two adjusting shafts and two adjusting parts, wherein the fixing frame is arranged at the bottom of the turnover plate, the U-shaped frame is arranged at the bottom end of the fixing frame, the two adjusting shafts are respectively and rotatably arranged at the bottom end of the U-shaped frame, one ends of the two adjusting shafts extend to the outside of the U-shaped frame, two sides of the adjusting disk are respectively connected with the two adjusting shafts, the probe is arranged at the center of the bottom of the adjusting disk, the two adjusting parts are symmetrically arranged at the top of the U-shaped frame, the bottom ends of the two adjusting parts are respectively connected with one ends of the two adjusting shafts extending to the outside of the U-shaped frame, each adjusting part comprises a supporting frame, a first guide rail, a second guide rail, a first sliding block, a second sliding block, a first rack, a second rack, a connecting plate, an adjusting handle, a sector gear, a rotating seat, a rotating shaft and a rotating gear, wherein the supporting frame is arranged at the top of the U-shaped frame, the first guide rail and the second guide rail are symmetrically arranged at the top of the supporting frame, the first sliding block and the second sliding block are respectively and slidably arranged on the first guide rail and the second guide rail, the first rack is horizontally arranged at the top of the first sliding block, the second rack is horizontally arranged at the bottom of the second sliding block, two sides of the connecting plate are respectively connected with the first sliding block and the second sliding block, the bottom end of the adjusting handle is arranged at one end of an adjusting shaft extending to the outside of the U-shaped frame, the sector gear is arranged at the top of the adjusting handle, the sector gear is meshed with the second rack, the rotating seat is arranged at the top of the supporting frame, the rotating shaft is rotatably arranged on the rotating seat, the rotary gear is arranged at the head end of the rotary shaft and meshed with the first rack, two ends of the linkage shaft are respectively connected with the tail ends of the rotary shafts in the two adjusting parts, the first cam is arranged in the middle of the linkage shaft, the lubricating part is arranged at the top of the U-shaped frame and is in contact with the bottom end of the first cam, the lubricating part is used for lubricating the rotary gear and the sector gear in the two adjusting parts, the adjusting motor is horizontally arranged at the top of the U-shaped frame, the driving wheel is arranged on the output shaft of the adjusting motor, the driven wheel is arranged on the rotary shaft in one of the adjusting parts, and the belt is sleeved outside the driving wheel and the driven wheel.
Further, the lubrication component includes a lubrication cylinder, a piston, push away the post, the carrier block, bear seat, first gyro wheel, first spring, complement piece and two injection pieces, the vertical top that sets up at U type frame of lubrication cylinder, piston slidable mounting is in the lubrication cylinder, the bottom and the piston connection of push away the post, the top that pushes away the post extends to the top of lubrication cylinder, the top that pushes away the post is installed to the carrier block, bear seat installs at the top of carrier block, first gyro wheel rotates and installs in bearing seat to the top of first gyro wheel is contradicted with the bottom of first cam, first spring cover is established in the outside of pushing away the post, and the both ends of first spring are connected with the top of lubrication cylinder and the bottom of carrier block respectively, two injection pieces symmetry sets up on the lubrication cylinder, and two injection pieces extend to the rotation gear and the sector gear side in two adjusting part respectively, two injection pieces all are linked together with the inside bottom of lubrication cylinder, complement piece installs at the top of U type frame, and the inside of complement piece is linked together with the bottom of lubrication cylinder.
Further, every the injection member all includes first spray tube, first nozzle, second spray tube and second nozzle, the tail end of first spray tube and second spray tube all is linked together with the inside bottom of lubricated section of thick bamboo, the head end of first spray tube passes the roating seat and extends to the side of swivelling gear, the head end at first spray tube is installed to first nozzle sets up towards swivelling gear, the head end of second spray tube passes the support frame and extends to the side of sector gear, the head end at the second spray tube is installed to the second nozzle sets up towards the sector gear, all be equipped with first check valve on first spray tube and the second spray tube.
Further, the supplementary piece includes supplementary jar, supplementary pipe and second check valve, supplementary jar level sets up at the top of U type frame, the both ends of supplementary pipe are linked together with the inside bottom of supplementary jar and the inside bottom of lubricated section of thick bamboo respectively, the second check valve is installed on supplementary pipe, the top of supplementary jar is equipped with the interpolation pipe that is linked together rather than inside, be equipped with the control valve on the interpolation pipe.
Further, the clearance subassembly includes first cylinder, clearance frame, clearance case, dust removal motor, carousel, flabellum group, recess, carriage, first electric putter, dust removal frame, dust collecting plate, micro motor, deashing part and two vertical axes, the vertical top that sets up at the test frame of first cylinder, the clearance frame is installed on the output of first cylinder, the clearance case is installed in the bottom of clearance frame, the bottom of clearance case is equipped with the round hole, the bottom of clearance case is equipped with a plurality of and winds the exhaust groove of equidistant setting of round hole, be equipped with the filter screen in the exhaust groove, be equipped with the logical groove rather than inside being linked together on the outer wall of one side of clearance case, the vertical setting of dust removal motor is at the top of clearance case to dust removal motor's output shaft extends to the inside of clearance case, carousel and flabellum group interval set up on dust removal motor's output shaft, and the top of carousel are located the top of flabellum group, the top slidable mounting of carriage is on the recess, the bottom of first electric putter level sets up at the carousel to the bottom of the electric putter, and the output of first electric putter and the first motor and the vertical axis of rotation of the motor are installed at two vertical axes, the top and two vertical axes are installed at the top of the vertical axis of rotation of the brush, the dust collecting plate sets up.
Further, the ash removal part includes bottom plate, dust absorption fill, collecting box, fan, first connecting pipe, second connecting pipe and two shake pieces, the bottom plate is installed on the bottom outer wall of cleaning box, the dust absorption fill is installed at the top of bottom plate, collecting box and fan interval set up the top at the cleaning box, the both ends of first connecting pipe are linked together with the input and the dust absorption fill of fan respectively, the both ends of second connecting pipe are linked together with the inside top of output and collecting box of fan respectively, two shake piece symmetry sets up on the bottom outer wall of cleaning box.
Further, every shake piece all includes slide bar, shake board, fixed block, fixing base, second gyro wheel, second spring, mounting bracket, driving motor, second cam and two slip caps, two the slip cap interval sets up on the bottom outer wall of cleaning box, slide bar slidable mounting is sheathe in at two slips, shake the head end at the slide bar is installed to the board, the tail end at the slide bar is installed to the fixed block, the fixing base is installed on the outer wall of fixed block, the second gyro wheel is rotated and is installed in the fixing base, the outside at the slide bar is established to the second spring housing to the both ends of second spring are connected with one of them slip cap and fixed block respectively, the mounting bracket sets up on the bottom outer wall of cleaning box, driving motor level sets up on the outer wall of mounting bracket, the output shaft of driving motor is installed to the second cam to the one end and the second gyro wheel of second cam are contradicted.
Further, sorting mechanism includes portal frame, third lead screw slip table, second cylinder, letter sorting board and two storage module, the portal frame sets up at the top of test table, third lead screw slip table level sets up the top at the portal frame, the vertical setting of second cylinder is on the mobile end of third lead screw slip table, the letter sorting board is installed on the output of second cylinder, the bottom of letter sorting board is equipped with four sucking discs that the rectangle distributes, two storage module symmetry sets up the top at the test table.
Further, every deposit the subassembly and all include and deposit case, deposit board and second electric putter, deposit the top at the test table to install the case, deposit board slidable mounting and deposit the incasement, the vertical top that sets up at the test table of second electric putter to the output of second electric putter is connected with the bottom of depositing the board.
Compared with the prior art, the invention has the beneficial effects that:
the method comprises the following steps: according to the invention, the driving wheel is driven to rotate by the operation of the adjusting motor, the driven wheel is driven to rotate by the driving wheel, the rotating shaft in one adjusting part is driven to rotate by the driven wheel, the rotating shaft in the other adjusting part is driven to synchronously rotate by the rotating shaft, the rotating shafts in the two adjusting parts drive the rotating gears to rotate, the rotating gears drive the first racks and the first sliding blocks to horizontally move, the first sliding blocks drive the second sliding blocks and the second racks to horizontally move synchronously by the connecting plate, the second racks drive the adjusting handle to rotate by the sector gears, finally the adjusting handle drives the adjusting disc to rotate by the adjusting shaft, the probe is driven to rotate to perform angle adjustment by the adjusting disc, the angle adjustment is not performed by adopting a connecting rope structure, the condition that the angle adjustment cannot be performed on the probe due to breakage of the connecting rope is avoided, the fact that the testing work of the probe is not influenced is avoided, the first cam is driven to rotate while the connecting shaft is rotated, the first cam is driven to rotate, the lubricating part works to lubricate the rotating gears and the sector gears in the two adjusting parts, and the rotating gears and the sector gears in the angle adjustment work are guaranteed.
And two,: according to the invention, the cleaning frame is driven to move downwards through the operation of the first air cylinder, the cleaning box is driven to move downwards by the cleaning frame, the probe in the test assembly above the turnover plate enters into the cleaning box through the round hole, then the first electric push rod is operated to drive the sliding frame to horizontally slide on the groove, the sliding frame drives the dust removing frame and the dust removing plate to synchronously move, the dust removing plate drives the group of brush heads close to the probe to move to be in contact with the surface of the probe, then the dust removing motor is operated to drive the rotary table and the fan blade group to rotate, dust and other impurities on the surface of the probe are blown to fall into the bottom end of the cleaning box through the rotation of the fan blade group, and the rotary table drives the group of brush heads close to the probe to brush and clean the dust and other impurities on the surface of the probe without manually and regularly cleaning the probe, so that the cleaning is very convenient.
And thirdly,: when the piston moves away from the bottom end of the inside of the lubricating cylinder, the piston flows lubricating oil in the supplementing tank into the lubricating cylinder through the supplementing pipe, the purpose of supplementing the lubricating oil in the lubricating cylinder is achieved, the second one-way valve ensures that liquid in the supplementing pipe only flows to the lubricating cylinder in one direction, and in the working state of the supplementing piece below the overturning plate, the control valve controls the inside of the adding pipe to be in a communicating state with the inside of the supplementing tank, so that the lubricating oil in the supplementing tank cannot be extracted by the piston in a sealing state, meanwhile, new lubricating oil is conveniently and manually added into the supplementing tank by using the adding pipe, and when the supplementing piece is located above the overturning plate, the control valve controls the inside of the adding pipe to be in a non-communicating state with the inside of the supplementing tank, and the lubricating oil in the supplementing tank is prevented from flowing out through the adding pipe.
Fourth, it is: the driving motor of the invention works to drive the second cam to rotate, the second cam drives the sliding rod to horizontally slide on the two sliding sleeves in a reciprocating way by utilizing the second roller, the sliding rod drives the shaking plate to horizontally move in a reciprocating way by a certain distance, the reciprocating impact contact of the hair brush head is realized in the reciprocating movement process of the shaking plate, the hair brush head is vibrated, and the dust and other impurities adhered on the hair brush head fall into the dust suction hopper along with the shaking.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic perspective view of a second embodiment of the present invention;
FIG. 3 is a schematic perspective view of a testing mechanism of the present invention;
FIG. 4 is a schematic view of a partial perspective of the testing mechanism of the present invention;
FIG. 5 is a schematic perspective view of a test assembly according to the present invention;
FIG. 6 is a schematic diagram showing a second perspective view of the test assembly of the present invention;
FIG. 7 is a partial cross-sectional view of a test assembly of the present invention;
FIG. 8 is a side view of the test assembly of the present invention;
FIG. 9 is a schematic perspective view of a cleaning assembly of the present invention;
FIG. 10 is a schematic perspective view of a cleaning assembly according to the present invention;
FIG. 11 is a partial cross-sectional view of a cleaning assembly of the present invention;
Fig. 12 is a schematic perspective view of a shaking member of the present invention;
fig. 13 is a schematic perspective view of a sorting mechanism of the present invention;
FIG. 14 is a partial cross-sectional view of the storage assembly of the present invention;
fig. 15 is a partial perspective view of a cleaning assembly of the present invention.
Reference numerals illustrate:
test table 1, moving slot 11, test table 2, test frame 3, first screw slide 4, moving plate 5, test mechanism 6, lift frame 61, second screw slide 611, adjusting plate 612, test frame 613, reversing plate 62, reversing motor 63, cleaning assembly 64, first cylinder 641, cleaning frame 6411, cleaning box 642, dust removing motor 6421, rotary table 6422, fan blade group 6423, groove 6424, sliding frame 6425, round hole 6426, filter screen 6427, through slot 6428, first electric push rod 643, dust removing frame 644, dust removing plate 645, brush head 6451, micro motor 646, dust removing part 647, bottom plate 6471, dust collecting hopper 6472, collection box 6473, fan 6474, first connecting tube 6475, second connecting tube 6476, dithering piece 6477, sliding rod 6478, dithering plate 6479, fixing block 64791, fixing seat 64792, second roller 64793, second spring 64794, mounting bracket 64795, driving motor 64796, second cam 64797, sliding sleeve 64798, vertical shaft 648, the vertical rod 65, the hydraulic push rod 66, the tilting shaft 67, the test assembly 68, the fixing frame 681, the U-shaped frame 6811, the adjusting disk 6812, the probe 6813, the linkage shaft 682, the first cam 6821, the lubricating part 683, the lubricating cylinder 6831, the piston 6832, the push column 6833, the bearing block 6834, the bearing seat 6835, the first roller 6836, the first spring 6837, the replenishment piece 6838, the replenishment tank 68381, the replenishment pipe 68382, the second check valve 68383, the replenishment pipe 68384, the control valve 68385, the injection piece 6839, the first spray pipe 68391, the first spray pipe 68392, the second spray pipe 68393, the second spray pipe 68394, the first check valve 68395, the adjusting motor 684, the driving wheel 685, the driven wheel 686, the belt 687, the adjusting shaft 688, the adjusting part 689, the support frame 6891, the first guide rail 6892, the second guide rail 6893, the first slider 6894, the second slider 6895, the first rack 6896, the second rack 6897, the connecting plate 6898, the adjusting handle 6899, the fan-shaped gear 69, the rotating seat 691, rotation shaft 692, rotation gear 693, sorting mechanism 7, portal frame 71, third screw sliding table 72, second cylinder 73, sorting plate 74, storage assembly 75, sucking disc 76, storage box 77, storage plate 78, second electric push rod 79, and chute 8.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention provides a testing device for the surface of a semiconductor wafer by improvement, as shown in figures 1-15, comprising a testing table 1, a testing table 2, a testing frame 3, a first screw rod sliding table 4, a moving plate 5, a testing mechanism 6, a sorting mechanism 7 and two sliding grooves 8, wherein the two sliding grooves 8 are symmetrically arranged at the top of the testing table 1, the testing table 2 is slidably arranged on the two sliding grooves 8, the testing frame 3 is arranged at the top of the testing table 2, the first screw rod sliding table 4 is horizontally arranged at the top of the testing table 1, the moving plate 5 is arranged at the moving end of the first screw rod sliding table 4, the top of the moving plate 5 is connected with the bottom of the testing table 2, a moving groove 11 for the moving plate 5 to pass through is arranged on the testing table 1, the testing mechanism 6 and the sorting mechanism 7 are arranged at intervals at the top of the testing table 1, the test mechanism 6 comprises a lifting frame 61, a second screw rod sliding table 611, an adjusting plate 612, a test frame 613, a turnover plate 62, a turnover motor 63, a cleaning assembly 64, two vertical rods 65, two hydraulic push rods 66, two turnover shafts 67 and two test assemblies 68, wherein the two vertical rods 65 are symmetrically arranged at the top of the test table 1, the lifting frame 61 is slidably arranged on the two vertical rods 65, the two hydraulic push rods 66 are symmetrically arranged at the top of the test table 1, the output ends of the two hydraulic push rods 66 are respectively connected with the two sides of the bottom of the lifting frame 61, the second screw rod sliding table 611 is horizontally arranged at the top end of the lifting frame 61, the adjusting plate 612 is arranged at the moving end of the second screw rod sliding table 611, the test frame 613 is arranged at the bottom of the adjusting plate 612, the turnover plate 62 is rotatably arranged at the bottom end of the test frame 613 through the two turnover shafts 67, the turnover motor 63 is horizontally arranged on the outer wall of the bottom end of the test frame 613, and the output shaft of the turnover motor 63 is connected with one of the turnover shafts 67, the two test assemblies 68 are symmetrically arranged on the turnover plate 62, and the cleaning assembly 64 is arranged at the top end of the test frame 613; by placing the semiconductor wafer to be tested in the test frame 3, then the first screw sliding table 4 works to drive the moving plate 5 to move, the moving plate 5 drives the test table 2 to move on the two sliding grooves 8, the test table 2 drives the test frame 3 to move below the test mechanism 6, then the test assembly 68 positioned below the turnover plate 62 works to perform angle adjustment on the test end in the test frame, the test assembly 68 does not adopt a connecting rope to perform angle adjustment, the condition that the connecting rope breaks and cannot perform angle adjustment is avoided, after the angle adjustment is finished, the two hydraulic push rods 66 work to drive the lifting frame 61 to move downwards on the two vertical rods 65, the lifting frame 61 drives the test end in the test assembly 68 positioned below the turnover plate 62 to move downwards to be in contact with the surface of the semiconductor wafer in the test frame 3, after the test is finished, the two hydraulic push rods 66 continue to work to drive the lifting frame 61 to move upwards for a certain distance, then the first screw rod sliding table 4 and the second screw rod sliding table 611 work cooperatively to facilitate the test ends in the test assembly 68 to continuously perform contact test on a plurality of positions on the surface of the semiconductor wafer in the test frame 3, after the single test is completed, the first screw rod sliding table 4 continues to work to drive the test frame 3 to move to correspond to the sorting mechanism 7, the sorting mechanism 7 places the semiconductor wafer in the test frame 3 to the qualified product position or the unqualified product position according to the test result to store and sort, when the test ends in the test assembly 68 below the turnover plate 62 are adhered with dust and other impurities, the turnover motor 63 works to drive the turnover plate 62 and the two turnover shafts 67 to rotate 180 degrees, the test assembly 68 below the turnover plate 62 and the other test assembly 68 above the turnover plate 62 are positioned, the cleaning assembly 64 then automatically cleans the test ends of the test assembly 68, now above the roll-over plate 62, without requiring manual periodic cleaning, which is very convenient.
Specifically, each test assembly 68 includes a fixing frame 681, a U-shaped frame 6811, an adjusting disk 6812, a probe 6813, a linkage shaft 682, a first cam 6821, a lubrication component 683, an adjusting motor 684, a driving wheel 685, a driven wheel 686, a belt 687, two adjusting shafts 688 and two adjusting components 689, the fixing frame 681 is mounted at the bottom of the turnover plate 62, the U-shaped frame 6811 is mounted at the bottom of the fixing frame 681, the two adjusting shafts 688 are respectively rotatably mounted at the bottom of the U-shaped frame 6811, one ends of the two adjusting shafts 688 are respectively extended to the outside of the U-shaped frame 6811, both sides of the adjusting disk 6812 are respectively connected with the two adjusting shafts 688, the probe 6813 is mounted at the bottom center of the adjusting disk 6812, the two adjusting components 689 are symmetrically arranged at the top of the U-shaped frame 6811, and the bottom ends of the two adjusting components 689 are respectively connected with one ends of the two adjusting shafts 688 extended to the outside of the U-shaped frame 6811, each of the adjustment members 689 includes a support 6891, a first rail 6892, a second rail 6893, a first slide 6894, a second slide 6895, a first rack 6896, a second rack 6897, a connection plate 6898, an adjustment handle 6899, a sector gear 69, a rotating base 691, a rotating shaft 692, and a rotating gear 693, the support 6891 is mounted on the top of the U-shaped frame 6811, the first rail 6892 and the second rail 6893 are symmetrically disposed on the top of the support 6891, the first slide 6894 and the second slide 6895 are slidably mounted on the first rail 6892 and the second rail 6893, respectively, the first rack 6896 is horizontally disposed on the top of the first slide 6894, the second rack 6897 is horizontally disposed on the bottom of the second slide 6895, both sides of the connection plate 6898 are respectively connected with the first slide 6894 and the second slide 6895, the bottom end of the adjustment handle 6899 is mounted on one end of the adjustment shaft 688 extending outside the U-shaped frame 6811, the sector gear 69 is mounted on the top of the adjustment handle 6899, and the sector gear 69 is meshed with the second rack 6897, the rotating seat 691 is mounted on the top of the supporting frame 6891, the rotating shaft 692 is rotatably mounted on the rotating seat 691, the rotating gear 693 is mounted on the head end of the rotating shaft 692, the rotating gear 693 is meshed with the first rack 6896, two ends of the linkage shaft 682 are respectively connected with the tail ends of the rotating shaft 692 in the two adjusting parts 689, the first cam 6821 is mounted in the middle of the linkage shaft 682, the lubricating part 683 is mounted on the top of the U-shaped frame 6811, the top end of the lubricating part 683 is abutted against the bottom end of the first cam 6821, the lubricating part 683 is used for lubricating the rotating gear 693 and the sector gear 69 in the two adjusting parts 689, the adjusting motor 684 is horizontally arranged on the top of the U-shaped frame 6811, the driving wheel 685 is mounted on the output shaft of the adjusting motor 684, the driven wheel 686 is mounted on the rotating shaft 692 in one of the adjusting parts 689, and the belt 687 is sleeved outside the driving wheel 685 and the driven wheel 686; the driving wheel 685 is driven to rotate through the operation of the adjusting motor 684, the driving wheel 685 drives the driven wheel 686 to rotate through the belt 687, the driven wheel 686 drives the rotating shaft 692 in one adjusting part 689 to rotate, the rotating shaft 692 in the other adjusting part 689 is driven to synchronously rotate through the linkage shaft 682, the rotating shaft 692 in the two adjusting parts 689 drives the rotating gear 693 to rotate, the rotating gear 693 drives the first rack 6896 and the first sliding block 6894 to horizontally move, the first sliding block 6894 drives the second sliding block 6895 and the second rack 6897 to horizontally move synchronously through the connecting plate 6898, the second rack 6897 drives the adjusting handle 6899 to rotate through the sector gear 69, the adjusting handle 6899 finally drives the adjusting disc 6812 to rotate through the adjusting shaft 6812, the probe 6813 is driven to rotate through the angle adjustment through the adjusting disc 6812, the condition that the connecting rope is not adopted to conduct angle adjustment is avoided, the condition that the connecting rope is broken, the angle adjustment of the probe 6813 cannot be affected, the first cam 6821 is driven to rotate at the same time as the linkage shaft 682 rotates, the first sliding block 6821 rotates, the first sliding block 6895 and the second sliding block 6897 rotates, the sector gear 683 rotates the first sliding block 683, and the sector gear 683 rotates the first sliding block 683, the first sliding block 6869 and the second sliding block 6869, the second sliding block 683, the first sliding block 6869 and the second sliding block 686868686868683, the second sliding block 686868683, the 686868683 and the all.
Specifically, the lubrication component 683 includes a lubrication cylinder 6831, a piston 6832, a push column 6833, a bearing block 6834, a bearing seat 6835, a first roller 6836, a first spring 6837, a supplement piece 6838 and two injection pieces 6839, the lubrication cylinder 6831 is vertically arranged at the top of the U-shaped frame 6811, the piston 6832 is slidably installed in the lubrication cylinder 6831, the bottom end of the push column 6833 is connected with the piston 6832, the top end of the push column 6833 extends above the top of the lubrication cylinder 6831, the bearing block 6834 is installed at the top end of the push column 6833, the bearing seat 6835 is installed at the top of the bearing block 6834, the first roller 6836 is rotatably installed in the bearing seat 6835, the top end of the first roller 6836 is in contact with the bottom end of the first cam 6821, the first spring 6837 is sleeved outside the push column 6833, two ends of the first spring 6837 are respectively connected with the top of the lubrication cylinder 6831 and the bottom of the bearing block 6834, the two injection pieces 6839 are symmetrically arranged on the lubrication cylinder 6831, and the two injection pieces 6839 are respectively arranged at the top end of the two injection pieces 6833 and the two injection pieces 6839 are respectively connected with the top end of the two supplement piece 6838, which are rotatably connected with the inside of the two supplement piece 683, and the two injection pieces 6838 are respectively arranged at the top end of the side of the lubrication cylinder 683, and the two injection piece 683 are in the side of the lubrication cylinder 683 are in the side by the two side of the two injection pieces, and the two injection pieces are respectively; the first spring 6837 ensures that the top end of the first roller 6836 is tightly abutted against the bottom end of the first cam 6821 all the time, when the linkage shaft 682 drives the first cam 6821 to rotate, the first cam 6821 drives the push column 6833 to reciprocate by a certain distance through the first roller 6836, the push column 6833 drives the piston 6832 to reciprocate in the lubricating cylinder 6831 for a first distance, when the piston 6832 moves close to the bottom end inside the lubricating cylinder 6831, the piston 6832 sprays lubricating oil in the lubricating cylinder 6831 to the surfaces of the rotating gears 693 and the sector gears 69 in the two adjusting parts 689 through the two spraying parts 6839, and when the piston 6832 moves away from the bottom end inside the lubricating cylinder 6831, the piston 6832 pumps and supplements the lubricating oil in the supplementing parts 6838 into the lubricating cylinder 6831, so that sufficient lubricating oil is ensured to be always in the lubricating cylinder 6831.
Specifically, each jet member 6839 includes a first jet 68391, a first jet 68392, a second jet 68393, and a second jet 68394, the tail ends of the first jet 68391 and the second jet 68393 are each in communication with the inner bottom end of the lubrication cylinder 6831, the head end of the first jet 68391 extends to the side of the rotation gear 693 through the rotation seat 691, the first jet 68392 is mounted at the head end of the first jet 68391, and the first jet 68392 is disposed toward the rotation gear 693, the head end of the second jet 68393 extends to the side of the sector gear 69 through the support frame 6891, the second jet 68394 is mounted at the head end of the second jet 68393, and the second jet 68394 is disposed toward the sector gear 69, and the first jet 68391 and the second jet 68393 are each provided with a first check valve 68395; when the piston 6832 moves near the bottom end inside the lubricating cylinder 6831, the piston 6832 conveys the lubricating oil in the lubricating cylinder 6831 to the first nozzle 68392 and the second nozzle 68394 through the first spray pipe 68391 and the second spray pipe 68393, the first nozzle 68392 and the second nozzle 68394 spray the lubricating oil therein onto the surfaces of the rotating gear 693 and the sector gear 69 respectively, and further lubrication is realized on the first rack 6896 and the second rack 6897 in the process of rotating the rotating gear 693 and the sector gear 69, and the first check valve 68395 ensures that the liquid flow in the first spray pipe 68391 and the second spray pipe 68393 can only flow in one direction into the first nozzle 68392 and the second nozzle 68394.
Specifically, the replenishing member 6838 includes a replenishing tank 68381, a replenishing pipe 68382 and a second check valve 68383, the replenishing tank 68381 is horizontally disposed at the top of the U-shaped frame 6811, two ends of the replenishing pipe 68382 are respectively communicated with the inner bottom end of the replenishing tank 68381 and the inner bottom end of the lubricating cylinder 6831, the second check valve 68383 is mounted on the replenishing pipe 68382, an adding pipe 68384 communicated with the inside of the replenishing tank 68381 is disposed at the top of the replenishing tank 68381, and a control valve 68385 is disposed on the adding pipe 68384; when the piston 6832 moves away from the bottom end of the interior of the lubricating barrel 6831, the piston 6832 flows the lubricating oil in the replenishing tank 68381 into the lubricating barrel 6831 through the replenishing pipe 68382, the purpose of replenishing the lubricating oil in the lubricating barrel 6831 is achieved, the second one-way valve 68383 ensures that the liquid in the replenishing pipe 68382 can only flow to the lubricating barrel 6831 in one direction, the control valve 68385 controls the interior of the adding pipe 68384 to be in a communicating state with the interior of the replenishing tank 68381 in the working state of the replenishing piece 6838 below the turnover plate 62, the piston 6832 is prevented from being in a sealing state in the replenishing tank 68381, the lubricating oil in the replenishing tank 68381 cannot be extracted by the piston 6832, meanwhile, new lubricating oil is conveniently and manually added into the replenishing tank 68381 through the adding pipe 68384, and when the replenishing piece 6838 is located above the turnover plate 62, the control valve 68385 controls the interior of the adding pipe 68384 to be in a non-communicating state with the interior of the replenishing tank 68381, and the lubricating oil in the replenishing tank 68381 is prevented from flowing out through the adding pipe 68384.
Specifically, the cleaning assembly 64 includes a first cylinder 641, a cleaning frame 6411, a cleaning box 642, a dust removing motor 6421, a turntable 6422, a fan blade set 6423, a groove 6424, a sliding frame 6425, a first electric push rod 643, a dust removing frame 644, a dust removing plate 645, a micro motor 646, a dust removing component 647 and two vertical shafts 648, wherein the first cylinder 641 is vertically arranged at the top end of the test frame 613, the cleaning frame 6411 is arranged at the output end of the first cylinder 641, the cleaning box 642 is arranged at the bottom of the cleaning frame 6411, a circular hole 6426 is arranged at the bottom of the cleaning box 642, a plurality of exhaust grooves which are arranged at equal intervals around the circular hole 6426 are arranged at the bottom of the cleaning box 642, a filter screen 6427 is arranged in the exhaust grooves, a through groove 6428 which is communicated with the inside of the cleaning box 642 is arranged on the outer wall of one side of the cleaning box 642, the dust removing motor 6421 is vertically arranged at the top of the cleaning box 642, the output shaft of the dust removal motor 6421 extends to the inside of the cleaning box 642, the rotary table 6422 and the fan blade group 6423 are arranged on the output shaft of the dust removal motor 6421 at intervals, the rotary table 6422 is positioned above the fan blade group 6423, the groove 6424 is formed in the bottom of the rotary table 6422, the top end of the sliding frame 6425 is slidably arranged on the groove 6424, the first electric push rod 643 is horizontally arranged at the bottom of the rotary table 6422, the output end of the first electric push rod 643 is connected with the top end of the sliding frame 6425, the dust removal frame 644 is arranged at the bottom end of the sliding frame 6425, the dust removal plate 645 is rotatably arranged in the dust removal frame 644 through two vertical shafts 648, two groups of brush heads 6451 are symmetrically arranged on the dust removal plate 645, the micro motor 646 is vertically arranged at the bottom of the dust removal frame 644, the output shaft of the micro motor 646 is connected with one of the vertical shafts 648, and the dust removal component 647 is arranged on the outer wall of the cleaning box 642; the cleaning frame 6411 is driven to move downwards through the operation of the first air cylinder 641, the cleaning frame 6411 drives the cleaning box 642 to move downwards, the probe 6813 in the test assembly 68 above the turnover plate 62 enters the cleaning box 642 through the round hole 6426, then the first electric push rod 643 is driven to horizontally slide on the groove 6424, the sliding frame 6425 drives the dust removing frame 644 and the dust removing plate 645 to synchronously move, the dust removing plate 645 drives the group of brush heads 6451 close to the probe 6813 to move to be in contact with the surfaces of the probe 6813, then the dust removing motor 6421 drives the turntable 6422 and the fan blade group 6423 to rotate, the fan blade group 6423 rotates to blow dust and other impurities on the surfaces of the probe 6813 to fall into the inner bottom end of the cleaning box 642, the turntable 6422 drives the group of brush heads 6451 close to the probe 6813 to rotate to brush heads to brush dust and other impurities on the surfaces of the probe 6813, the group of brush heads 6451 do not need to be cleaned regularly, a part of dust and other impurities are adhered to the group of brush heads 6451, after the surface of the probe 6813 is cleaned manually, the group of brush heads 6451 is driven to move to the group of brush heads 6451, the dust removing motor 6421 continues to move to the position of the brush heads 6428 to be in contact with the surfaces of the group of the brush heads 6451, and the brush heads 6451 continues to move to the position of the brush heads 6451, and the other groups of the brush heads 6451 continue to move to the dust removing operation of the dust removing heads 6428, and the dust removal heads 6428 continuously move to the dust on the surfaces of the group of the brush heads 6428, and the dust cleaning heads 6428 continuously move to the dust on the surfaces of the groups of the brush heads 6428, and the dust cleaning heads, and the dust cleaning device is continuously moved to move up conveniently continuously and the dust conveniently cleaned.
Specifically, the ash cleaning component 647 includes a bottom plate 6471, a dust absorption bucket 6472, a collecting box 6473, a fan 6474, a first connecting pipe 6475, a second connecting pipe 6476 and two shaking pieces 6477, the bottom plate 6471 is installed on the outer wall of the bottom end of the cleaning box 642, the dust absorption bucket 6472 is installed on the top of the bottom plate 6471, the collecting box 6473 and the fan 6474 are arranged at intervals on the top of the cleaning box 642, two ends of the first connecting pipe 6475 are respectively communicated with the input end of the fan 6474 and the dust absorption bucket 6472, two ends of the second connecting pipe 6476 are respectively communicated with the output end of the fan 6474 and the inner top end of the collecting box 6473, and the two shaking pieces 6477 are symmetrically arranged on the outer wall of the bottom end of the cleaning box 642; the group of brush heads 6451 extending out of the cleaning box 642 are vibrated by the work of the two shaking pieces 6477, impurities such as dust adhered on the group of brush heads 6451 fall into the dust suction hopper 6472 along with shaking, meanwhile, the fan 6474 works to suck the impurities such as dust collected in the dust suction hopper 6472, and the impurities enter the collecting box 6473 to be collected through the first connecting pipe 6475 and the second connecting pipe 6476, so that the brush heads 6451 are automatically cleaned without manual cleaning, the degree of automation is high, and the cleaning is very convenient.
Specifically, each shaking member 6477 includes a sliding rod 6478, a shaking plate 6479, a fixed block 64791, a fixed block 64792, a second roller 64793, a second spring 64794, a mounting bracket 64795, a driving motor 64796, a second cam 64797 and two sliding sleeves 64798, wherein the two sliding sleeves 64798 are arranged on the bottom end outer wall of the cleaning box 642 at intervals, the sliding rod 6478 is slidably mounted on the two sliding sleeves 64798, the shaking plate 6479 is mounted on the head end of the sliding rod 6478, the fixed block 64791 is mounted on the tail end of the sliding rod 6478, the fixed block 64792 is mounted on the outer wall of the fixed block 64791, the second roller 64793 is rotatably mounted in the fixed block 64792, the second spring 64794 is sleeved outside the sliding rod 6478, and two ends of the second spring 64794 are respectively connected with one of the sliding sleeves 64798 and the fixed block 64791, the 64795 is arranged on the bottom end outer wall of the cleaning box 642, the driving motor 64796 is horizontally arranged on the outer wall of the mounting bracket 64795, the second cam 64797 is mounted on the output shaft of the driving motor 64796, and the second roller 64797 abuts against the second roller 64793; the second spring 64794 ensures that one end of the second cam 64797 is tightly abutted against the second roller 64793 all the time, the driving motor 64796 works to drive the second cam 64797 to rotate, the second cam 64797 drives the sliding rod 6478 to horizontally slide on the two sliding sleeves 64798 by a certain distance in a reciprocating manner through the second roller 64793, the sliding rod 6478 drives the shaking plate 6479 to horizontally move in a reciprocating manner by a certain distance, reciprocating impact contact on the brush head 6451 is achieved in the reciprocating movement process of the shaking plate 6479, shaking of the brush head 6451 is achieved, and impurities such as dust adhered on the brush head 6451 fall into the dust suction hopper 6472 along with shaking.
Specifically, the sorting mechanism 7 comprises a portal frame 71, a third screw rod sliding table 72, a second air cylinder 73, a sorting plate 74 and two storage components 75, wherein the portal frame 71 is erected at the top of the test table 1, the third screw rod sliding table 72 is horizontally arranged at the top end of the portal frame 71, the second air cylinder 73 is vertically arranged at the moving end of the third screw rod sliding table 72, the sorting plate 74 is arranged at the output end of the second air cylinder 73, four sucking discs 76 which are distributed in a rectangular shape are arranged at the bottom of the sorting plate 74, and the two storage components 75 are symmetrically arranged at the top of the test table 1; when the first screw sliding table 4 works to drive the test frame 3 to move to correspond to the sorting plate 74, the second air cylinder 73 works to drive the sorting plate 74 to move downwards, the sorting plate 74 drives the four suckers 76 to move downwards to suck the semiconductor wafers in the test frame 3, then the second air cylinder 73 continues to work to drive the sorting plate 74 to move upwards for a certain distance, then the third screw sliding table 72 drives the semiconductor wafers to move to the upper part of the corresponding storage assembly 75 according to the test result, finally the second air cylinder 73 and the four suckers 76 cooperate to put the semiconductor wafers into the corresponding storage assembly 75, one storage assembly 75 is used for storing qualified semiconductor wafers, and the other storage assembly 75 is used for storing unqualified semiconductor wafers, so that the semiconductor wafers are classified and stored according to the test result.
Specifically, each storage assembly 75 includes a storage box 77, a storage plate 78 and a second electric push rod 79, the storage box 77 is mounted at the top of the test table 1, the storage plate 78 is slidably mounted in the storage box 77, the second electric push rod 79 is vertically disposed at the top of the test table 1, and the output end of the second electric push rod 79 is connected with the bottom of the storage plate 78; the second electric push rod 79 works to drive the storage plate 78 to move upwards to a proper height in the storage box 77, and as the semiconductor wafers stored on the storage plate 78 are more and more, the second electric push rod 79 continues to work to drive the storage plate 78 to move downwards slowly, so that the semiconductor wafers stored on the storage plate 78 are prevented from being higher than the top end of the storage box 77.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.
Claims (9)
1. A semiconductor wafer surface testing apparatus, characterized in that: including test table (1), test bench (2), test frame (3), first lead screw slip table (4), movable plate (5), test mechanism (6), letter sorting mechanism (7) and two spouts (8), two spout (8) symmetry sets up the top at test table (1), test bench (2) slidable mounting is on two spouts (8), test frame (3) are installed at the top of test bench (2), first lead screw slip table (4) level sets up the top at test table (1), movable plate (5) are installed on the movable end of first lead screw slip table (4) to the top and the bottom of test bench (2) of movable plate (5) are connected, be equipped with on test table (1) and supply movable groove (11) that movable plate (5) passed, test mechanism (6) and letter sorting mechanism (7) interval set up the top at test table (1), test mechanism (6) are including crane (61), second lead screw (611), regulating plate (612), test plate (62), two montants (67), two (66) two push rod components (65) are two, two hydraulic pressure components (65) are overturned, the two montants (65) symmetry sets up the top at test table (1), crane (61) slidable mounting is on two montants (65), two hydraulic push rod (66) symmetry sets up the top at test table (1) to the output of two hydraulic push rod (66) is connected with the bottom both sides of crane (61) respectively, second lead screw slip table (611) level sets up on the top of crane (61), regulating plate (612) are installed on the mobile terminal of second lead screw slip table (611), test frame (613) are installed in the bottom of regulating plate (612), tilting plate (62) are installed in the bottom of test frame (613) through two tilting shaft (67) rotation, tilting motor (63) level sets up on the bottom outer wall of test frame (613) to the output shaft and one of them tilting shaft (67) of tilting motor (63) are connected, two test assembly (68) symmetry sets up on tilting plate (62), cleaning assembly (64) are installed on the moving end of regulating plate (611), and each of test frame (681), tilting plate (681), 681) are all including a moving shaft (681), a universal joint part (681), 6813, 681 The utility model provides a novel multifunctional electric power tool, which comprises a driving wheel (685), a driven wheel (686), a belt (687), two regulating shafts (688) and two regulating components (689), wherein the fixing frame (681) is arranged at the bottom of a turnover plate (62), a U-shaped frame (6811) is arranged at the bottom end of the fixing frame (6811), the two regulating shafts (688) are respectively rotatably arranged at the bottom end of the U-shaped frame (6811), one ends of the two regulating shafts (688) extend to the outside of the U-shaped frame (6811), two sides of the regulating plate (6812) are respectively connected with the two regulating shafts (688), the probe (6813) is arranged at the bottom center of the regulating plate (6812), the two regulating components (689) are symmetrically arranged at the top of the U-shaped frame (6811), the bottom ends of the two regulating components (689) are respectively connected with one end of the two regulating shafts (688) which extends to the outside of the U-shaped frame (6811), each regulating component (689) comprises a guide rail (6991), a first rotary rack (6992), a second rotary rack (6895), a guide rail (6895), a rotary rack (6895) and a rotating seat (692), the support frame (6891) is arranged at the top of the U-shaped frame (6811), the first guide rail (6892) and the second guide rail (6893) are symmetrically arranged at the top of the support frame (6891), the first slide block (6894) and the second slide block (6895) are respectively arranged at the top of the first guide rail (6892) and the second guide rail (6893) in a sliding manner, the first rack (6896) is horizontally arranged at the top of the first slide block (6894), the second rack (6897) is horizontally arranged at the bottom of the second slide block (6895), two sides of the connecting plate (6898) are respectively connected with the first slide block (6894) and the second slide block (6895), the bottom end of the adjusting handle (6899) is arranged at one end of the adjusting shaft (688) extending to the outside the U-shaped frame (6811), the sector gear (69) is arranged at the top of the adjusting handle (6899), the sector gear (69) is meshed with the second rack (6897), the rotating seat (691) is arranged at the tail end of the rotating seat (691) and is rotatably connected with the rotating shaft (692) of the rotating shaft (683) of the support frame (681), the first cam (6821) is installed in the middle part of the linkage shaft (682), the lubricating part (683) is installed at the top of the U-shaped frame (6811), and the top of the lubricating part (683) is in conflict with the bottom of the first cam (6821), the lubricating part (683) is used for lubricating the rotating gear (693) and the sector gear (69) in the two adjusting parts (689), the adjusting motor (684) is horizontally arranged at the top of the U-shaped frame (6811), the driving wheel (685) is installed on the output shaft of the adjusting motor (684), the driven wheel (686) is installed on the rotating shaft (692) in one of the adjusting parts (689), and the belt (687) is sleeved outside the driving wheel (685) and the driven wheel (686).
2. A semiconductor wafer surface testing apparatus according to claim 1, wherein: the lubrication component (683) comprises a lubrication cylinder (6831), a piston (6832), a push column (6833), a bearing block (6834), a bearing seat (6835), a first roller (6836), a first spring (6837), a supplementing piece (6838) and two injection pieces (6839), wherein the lubrication cylinder (6831) is vertically arranged at the top of a U-shaped frame (6811), the piston (6832) is slidably arranged in the lubrication cylinder (6831), the bottom end of the push column (6833) is connected with the piston (6832), the top end of the push column (6833) extends above the top of the lubrication cylinder (6831), the bearing block (6834) is arranged at the top end of the push column (6833), the bearing seat (6835) is arranged at the top of the bearing block (6834), the first roller (6836) is rotatably arranged in the bearing seat (6835), the top end of the first roller (6836) is in contact with the bottom end of the first cam (6821), the first roller (6832) is sleeved on the two sides of the first roller (6833) and the two injection pieces (6833) are symmetrically arranged at the top of the two injection pieces (6831) and the two injection pieces (6833) are respectively arranged at the top of the two injection pieces (6833) and the top parts (6831) of the two injection pieces (6833) are respectively arranged at the top of the two injection pieces (6833) and at the top of the two injection pieces (6833) respectively (6839), both of the spray members (6839) communicate with the inner bottom end of the lubrication cylinder (6831), the replenishment member (6838) is mounted on top of the U-shaped frame (6811), and the replenishment member (6838) communicates with the inner bottom end of the lubrication cylinder (6831).
3. A semiconductor wafer surface testing apparatus according to claim 2, wherein: each injection piece (6839) comprises a first spray pipe (68391), a first spray nozzle (68392), a second spray pipe (68393) and a second spray nozzle (68394), tail ends of the first spray pipe (68391) and the second spray pipe (68393) are communicated with the inner bottom end of a lubricating cylinder (6831), the head end of the first spray pipe (68391) penetrates through a rotating seat (691) to extend to the side of a rotating gear (693), the first spray nozzle (68392) is installed at the head end of the first spray pipe (68391), the first spray nozzle (68392) is arranged towards the rotating gear (693), the head end of the second spray pipe (68393) penetrates through a supporting frame (6891) to extend to the side of the sector gear (69), the second spray pipe (68394) is installed at the head end of the second spray pipe (68393), the second spray pipe (68394) is arranged towards the sector gear (69), and the first spray pipe (68391) and the second spray pipe (68393) are provided with a first one-way valve (68395).
4. A semiconductor wafer surface testing apparatus according to claim 2, wherein: the replenishing piece (6838) comprises a replenishing tank (68381), a replenishing pipe (68382) and a second one-way valve (68383), the replenishing tank (68381) is horizontally arranged at the top of the U-shaped frame (6811), two ends of the replenishing pipe (68382) are respectively communicated with the inner bottom end of the replenishing tank (68381) and the inner bottom end of the lubricating cylinder (6831), the second one-way valve (68383) is arranged on the replenishing pipe (68382), an adding pipe (68384) communicated with the inside of the replenishing tank (68381) is arranged at the top of the replenishing tank, and a control valve (68385) is arranged on the adding pipe (68384).
5. A semiconductor wafer surface testing apparatus according to claim 1, wherein: the cleaning assembly (64) comprises a first cylinder (641), a cleaning frame (6411), a cleaning box (642), a dust removing motor (6421), a rotary table (6422), a fan blade group (6423), a groove (6424), a sliding frame (6425), a first electric push rod (643), a dust removing frame (644), a dust removing plate (645), a micro motor (646), a dust removing component (647) and two vertical shafts (648), wherein the first cylinder (641) is vertically arranged at the top end of the test frame (613), the cleaning box (6411) is arranged at the output end of the first cylinder (641), the cleaning box (642) is arranged at the bottom of the cleaning frame (6411), the bottom of the cleaning box (642) is provided with a plurality of air exhausting grooves which are arranged at equal intervals around the circular hole (6426), a filter screen (6427) is arranged in the air exhausting grooves, a through groove (6428) which is communicated with the inside is formed in the outer wall of one side of the cleaning box (642), the vertical motor (6421) is arranged at the output end of the test frame (641), the cleaning box (642) is arranged at the top of the fan blade group (6421) and the output shaft (6411) of the fan blade group (6421) is arranged at the top of the rotary table (6411) and extends to the output shaft (6423) of the cleaning box (6423), the utility model discloses a dust removal device, including carousel (6422), recess (6424), top slidable mounting of carriage (6425) is on recess (6424), first electric putter (643) level sets up the bottom at carousel (6422) to the output of first electric putter (643) is connected with the top of carriage (6425), the bottom at carriage (6425) is installed to dust removal frame (644), dust removal board (645) are installed in dust removal frame (644) through two vertical shaft (648) rotations, the symmetry is provided with two sets of brush heads (6451) on dust removal board (645), miniature motor (646) are vertical to be set up the bottom at dust removal frame (644) to the output shaft and one of them vertical shaft (648) of miniature motor (646) are connected, ash removal part (647) are installed on the outer wall of cleaning box (642).
6. A semiconductor wafer surface testing apparatus according to claim 5, wherein: the ash cleaning component (647) comprises a bottom plate (6471), a dust collection bucket (6472), a collecting box (6473), a fan (6474), a first connecting pipe (6475), a second connecting pipe (6476) and two shaking pieces (6477), wherein the bottom plate (6471) is installed on the outer bottom wall of the cleaning box (642), the dust collection bucket (6472) is installed at the top of the bottom plate (6471), the collecting box (6473) and the fan (6474) are arranged at the top of the cleaning box (642) at intervals, two ends of the first connecting pipe (6475) are respectively communicated with the input end of the fan (6474) and the dust collection bucket (6472), two ends of the second connecting pipe (6476) are respectively communicated with the output end of the fan (6474) and the inner top end of the collecting box (6473), and the two shaking pieces (6477) are symmetrically arranged on the outer bottom wall of the cleaning box (642).
7. A semiconductor wafer surface testing apparatus according to claim 6, wherein: each shaking piece (6477) comprises a sliding rod (6478), a shaking plate (6479), a fixed block (64791), a fixed seat (64792), a second roller (64793), a second spring (64794), a mounting frame (64795), a driving motor (64796), a second cam (64797) and two sliding sleeves (64798), wherein the two sliding sleeves (64798) are arranged on the outer wall of the bottom end of a cleaning box (642) at intervals, the sliding rod (6478) is slidably arranged on the two sliding sleeves (64798), the shaking plate (6479) is arranged at the head end of the sliding rod (6478), the fixed block (64791) is arranged at the tail end of the sliding rod (6478), the fixed seat (64792) is arranged on the outer wall of the fixed block (64791), the second roller (64793) is rotatably arranged in the fixed seat (64792), the second spring (64794) is sleeved outside the sliding rod (6478), the two ends of the second spring (64794) are respectively connected with the two cams (67683) and the driving motor (64797) which are arranged on the outer wall of the fixed block (3765) at the two driving boxes (64797), and one end of the second cam (64797) is abutted against the second roller (64793).
8. A semiconductor wafer surface testing apparatus according to claim 1, wherein: sorting mechanism (7) are including portal frame (71), third lead screw slip table (72), second cylinder (73), sorting board (74) and two storage module (75), the top at test table (1) is erect in portal frame (71), third lead screw slip table (72) level sets up the top at portal frame (71), second cylinder (73) are vertical to be set up on the mobile terminal of third lead screw slip table (72), sorting board (74) are installed on the output of second cylinder (73), the bottom of sorting board (74) is equipped with sucking disc (76) of four rectangle distributions, two storage module (75) symmetry sets up the top at test table (1).
9. A semiconductor wafer surface testing apparatus according to claim 8, wherein: every deposit subassembly (75) all including depositing case (77), depositing board (78) and second electric putter (79), deposit the top at test table (1) is installed to case (77), deposit board (78) slidable mounting in depositing case (77), the vertical top that sets up at test table (1) of second electric putter (79) to the output of second electric putter (79) is connected with the bottom of depositing board (78).
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| CN117249992B (en) * | 2023-09-27 | 2024-04-23 | 济南成宇试验设备有限公司 | Spring test device |
| CN117452317B (en) * | 2023-12-25 | 2024-03-12 | 四川中威能电力科技有限公司 | Smart electric meter test equipment |
| CN117773441B (en) * | 2024-02-26 | 2024-05-10 | 中国水利水电第九工程局有限公司 | Bridge beam plate reinforcement welding equipment and welding method |
| CN118342434B (en) * | 2024-06-17 | 2024-08-06 | 济南鑫硕电子科技有限公司 | Electronic instrument test fixture |
| CN119170530A (en) * | 2024-09-23 | 2024-12-20 | 重庆市合百盛电子科技有限公司 | A method for automatically producing semiconductor devices |
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| CN111999633A (en) * | 2020-08-18 | 2020-11-27 | 张克引 | Thin film circuit board test system |
| CN213728214U (en) * | 2020-11-23 | 2021-07-20 | 江阴市州禾电子科技有限公司 | Semiconductor chip detection probe cleaning device |
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| CN113909145A (en) * | 2021-09-23 | 2022-01-11 | 无锡昌鼎电子有限公司 | Testing device for surface of semiconductor wafer |
| CN114236337A (en) * | 2021-12-13 | 2022-03-25 | 江苏威森美微电子有限公司 | Wafer test equipment |
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| TWI402932B (en) * | 2009-05-27 | 2013-07-21 | Star Techn Inc | Probing apparatus with multiaxial stages for testing semiconductor devices |
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| CN111999633A (en) * | 2020-08-18 | 2020-11-27 | 张克引 | Thin film circuit board test system |
| CN213728214U (en) * | 2020-11-23 | 2021-07-20 | 江阴市州禾电子科技有限公司 | Semiconductor chip detection probe cleaning device |
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