CN116766786A - A curved surface deposition system based on inkjet and laser integration - Google Patents

Abstract

The invention relates to a curved surface deposition system based on the integration of inkjet and laser, and belongs to the technical field of inkjet printing. It solves the technical problem in the existing technology that inkjet printing equipment cannot complete inkjet printing to deposit thin films on complex curved surfaces, and the accuracy needs to be improved for inkjet printing and manufacturing of thin films coupled with multiple materials. The curved surface deposition system of the present invention includes an inkjet printing system, a laser system, a motion system and a control system. This curved surface deposition system integrates the inkjet printing system, laser system and motion system, and successfully builds a direct writing additive manufacturing system suitable for complex curved surfaces, which can realize curved surface inkjet printing, laser heating and controlled nanoparticle deposition, laser Functions such as sintering conductive films and in-situ calibration of film properties break through the bottleneck of inkjet printing deposition on complex curved surfaces, can reduce the number of device loading and unloading times in each process step, and improve the accuracy and efficiency of nanoparticle film manufacturing on complex curved surfaces.

Description

A curved surface deposition system based on inkjet and laser integration

Technical field

The invention belongs to the technical field of inkjet printing, and specifically relates to a curved surface deposition system based on the integration of inkjet and laser.

Background technique

Inkjet printing is an on-demand additive manufacturing technology that dissolves functional materials in organic solvents to form functional ink and deposits the functional ink onto the target surface through a nozzle. The organic solvent deposited on the target surface is evaporated. Finally, a nanoparticle film is formed, and the nanoparticle film is thermally sintered to obtain a dense functional film. Inkjet printing has very broad application prospects in the manufacturing of electronic components, thin film sensors and other devices.

In the existing technology, most inkjet printing equipment can only be used to manufacture thin films on flat plates, and cannot deposit thin films by inkjet printing on complex curved surfaces. And for the inkjet printing and manufacturing of thin films coupled with multiple materials, the target substrate needs to be loaded and unloaded back and forth between the inkjet printing equipment, solvent evaporation equipment, and thermal sintering equipment. However, repeated loading and unloading will greatly reduce the manufacturing accuracy of the thin film. There is a lack of a more integrated system that can achieve the above three goals in one load.

As people have higher and higher requirements for product quality and more and more diversified product types, inkjet printing equipment needs to be continuously upgraded and transformed to have more complete functions, higher printing accuracy, and wider application scenarios.

Contents of the invention

In view of this, the present invention solves the technical problem in the prior art that inkjet printing equipment cannot complete inkjet printing to deposit thin films on complex curved surfaces, and the accuracy needs to be improved for inkjet printing manufacturing of thin films coupled with multiple materials. It provides A curved surface deposition system based on the integration of inkjet and laser. The curved surface deposition system of the present invention realizes inkjet printing, solvent evaporation and particle sintering in a single load through inkjet system printing and laser system integration.

The technical solutions adopted by the present invention to solve the above technical problems are as follows.

The curved surface deposition system of the present invention based on the integration of inkjet and laser includes an inkjet printing system, a laser system, a motion system and a control system;

The inkjet printing system includes a nozzle, a piezoelectric ceramic, an adjustable positive and negative pressure air source, an ink liquid storage bottle and a signal generator. One end of the ink liquid storage bottle is connected to the adjustable positive and negative pressure air source, and the other end is connected to the nozzle. , the piezoelectric ceramic is fixed in the nozzle, the signal generator is connected to the piezoelectric ceramic, the positive and negative pressure air sources are adjustable to adjust the pressure, so that the inkjet printing ink stored in the ink storage bottle fills the nozzle, and the signal generator sends a driving pulse The signal is given to the piezoelectric ceramic, which deforms and squeezes the inkjet printing ink in the nozzle, producing droplets for inkjet printing;

The laser system includes a laser and a lens, and the lens is fixed on the optical path of the laser emitting laser;

The motion system includes a clamping mechanism and a motion mechanism. The clamping mechanism is fixed on the motion mechanism, and is driven by the motion mechanism to realize five movements of X-axis movement, Y-axis movement, Z-axis movement, X-axis rotation and Y-axis rotation. There are three degrees of freedom of movement, and the clamping mechanism is used to fix the target surface;

The control system is connected to piezoelectric ceramics, lasers, lenses, and motion systems. The control system regulates the droplets by regulating the driving pulse waveform of the piezoelectric ceramics in real time. The control system controls the output power and spot size of the outgoing laser by controlling the laser and lens. ; The control system issues control instructions to the motion system, and the motion system drives the target surface to move according to the control instructions.

Further, in step one, the diameter of the nozzle is at least 40 μm and at most 100 μm.

Further, in step two, the inkjet printing ink is prepared by the following method: the functional material is evenly dispersed in an organic solvent to obtain the inkjet printing ink.

Furthermore, ultrasonic dispersion is used to achieve uniform dispersion.

Further, the target target surface is a curved surface.

Compared with the prior art, the beneficial effects of the present invention are:

The curved surface deposition system based on the integration of inkjet and laser of the present invention integrates the inkjet printing system, laser system and motion system, and successfully builds a direct writing additive manufacturing system suitable for complex curved surfaces, which can realize curved surface inkjet printing. , laser heating to control nanoparticle deposition, laser sintering of conductive films and in-situ calibration of film properties, etc., break through the bottleneck of inkjet printing deposition on complex curved surfaces, can reduce the number of device loading and unloading in each process link, and improve nanoparticle films on complex curved surfaces. Manufacturing precision and efficiency.

Description of drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. Those of ordinary skill in the art can also obtain other drawings based on these drawings without exerting creative efforts.

Figure 1 is a schematic structural diagram of the curved surface deposition system based on inkjet and laser integration according to the present invention;

Figure 2 is a schematic diagram of the coordinate system of the curved surface deposition system based on inkjet and laser integration in Figure 1;

In the figure, 1. Nozzle, 2. Droplets, 3. Deposited film, 4. Laser, 5. Target surface, 6. Motion system, 7. Lens.

Detailed ways

In order to further understand the present invention, preferred embodiments of the present invention are described below, but it should be understood that these descriptions are only to further illustrate the features and advantages of the present invention, rather than to limit the claims of the present invention.

As shown in Figure 1, the curved surface deposition system of the present invention based on the integration of inkjet and laser includes an inkjet printing system, a laser system, a motion system and a control system;

The inkjet printing system includes a nozzle 1, piezoelectric ceramics, adjustable positive and negative pressure air sources, ink storage bottles and signal generators. One end of the ink storage bottle is connected to the adjustable positive and negative pressure air source, and the other end is connected to the nozzle 1. The piezoelectric ceramic is fixed in the nozzle 1, and the signal generator is connected to the piezoelectric ceramic; the adjustable positive and negative pressure air source adjusts the pressure so that The inkjet printing ink stored in the ink storage bottle fills the nozzle 1. The signal generator sends a driving pulse signal to the piezoelectric ceramic. The piezoelectric ceramic deforms and squeezes the inkjet printing ink in the nozzle 1 to generate droplets on demand. 2 for printing. The nozzle 1 is of replaceable design, and its nozzle diameter is as small as 40 μm and as large as 100 μm. It can generate droplets 2 of different diameters according to actual needs.

The laser system includes a laser 4 and a lens 7. The lens 7 is fixed on the optical path of the laser emitted by the laser 4. In the inkjet printing stage, the laser emitted by the laser 4 passes through the lens 7 and irradiates the droplets 2 deposited on the target target surface 5 or the target target surface 5, and quickly evaporates the organic solvent in the droplets 2, so that the droplets 2 are Nanoparticles are deposited on the target surface 5 to form a deposited film 3, and the deposited film 3 is laser-sintered to form a dense nanoparticle film; in addition, if the device to be processed by the curved surface deposition system of the present invention is and Temperature-related sensors can also use the emitted laser as a hot end heating source to perform in-situ performance calibration of the manufactured sensor.

The motion system 6 includes a clamping mechanism and a motion mechanism. The clamping mechanism is fixed on the motion mechanism and moves in five degrees of freedom (i.e., X-axis movement, Y-axis movement, Z-axis movement, X-axis movement, Axis rotation and Y-axis rotation are usually composed of three displacement platforms and two rotation platforms. The axial direction of the nozzle is the Z-axis, the horizontal direction is the X-axis, and the X-axis, Y-axis and Z-axis are vertical in pairs, as shown in Figure 2 (shown) movement; the clamping mechanism is used to fix the target surface 5 to prevent the target surface 5 from shifting during the movement.

The control system mainly includes a signal transmission module, and the control system is connected to piezoelectric ceramics, laser 4, lens 7, and motion system 6. The control system regulates the generation of the droplets 2 by real-time regulating the driving pulse waveform of the piezoelectric ceramics; the control system controls the generation of the droplets 2 according to the heating requirements of the target surface 5 or the droplets 2, the sintering requirements of the nanoparticles in the inkjet printing ink, and the temperature-related Sensor calibration requirements: control the output power and spot size of the outgoing laser by controlling the laser 4 and the lens 7 to realize the evaporation of the organic solvent in the droplet 2, the conductive function of the nanoparticle film and the calibration of the temperature-related sensor; the control system controls the motion system 6 According to the control instructions of the control system, the target surface 5 is driven to move (movement speed, movement displacement and rotation angle), and then the inkjet printing parameters (printing dot spacing, printing height and printing speed) are realized, as well as the target surface 5 and the nozzle 1 The relative position and relative angle between the two can be controlled to ensure that a high-quality nanoparticle film can be prepared on the target surface 5 .

It should be noted that the curved surface deposition system based on inkjet and laser integration of the present invention is mainly applicable to the curved target surface 5, but it is also applicable to flat surfaces. The curved surface deposition system based on inkjet and laser integration of the present invention is particularly suitable for the preparation of multi-layer coupling structure films, but it can also prepare single-layer films.

The method for depositing thin films using the curved surface deposition system based on inkjet and laser integration of the present invention includes the following steps:

Step 1. Prepare inkjet printing ink

The functional materials are evenly dispersed in the organic solvent to obtain inkjet printing ink;

It should be noted that there are no special restrictions on functional materials and organic solvents and can be set according to the actual needs of those skilled in the art. There are no special restrictions on equipment for uniform dispersion. Ultrasonic dispersion has better uniformity and stability, so ultrasonic dispersion is preferred. Disperse evenly.

Step 2. Control the droplets of inkjet printing 2

Place the inkjet printing ink in the ink storage bottle, and adjust the driving pulse waveform of the piezoelectric ceramic built into the nozzle 1. Different driving pulse waveforms correspond to different shapes of the generated droplets 2; by adjusting the driving pulse waveform, the nozzle 1 can generate uniform , stable, satellite-free droplets2.

Step 3. Laser inkjet printing

Perform inkjet printing according to the deposition pattern to be prepared to form a deposition film 3 on the target target surface 5;

During the printing process, the movement of the motion system 6 is controlled by the control system to ensure that the relative position of the laser irradiation point of the laser 4 and the deposition point of the droplet 2 of the nozzle 1 is less than or equal to 0.2mm. The laser 4 and the lens 7 are controlled by the control system to regulate the laser power. and spot size, so that the emitted laser can evaporate the organic solvent in the droplet 2 without damaging (not ablating) the functional materials in the droplet;

It should be noted that the mode of laser evaporation of solvent is selected according to the printing requirements. When it is necessary to directly use the laser to heat the organic solvent in droplet 2 to quickly evaporate it, the laser irradiation point is 0.2mm behind the deposition point of droplet 2, that is, when After the droplet 2 is deposited, the laser is directly irradiated on the surface of the droplet 2 to evaporate the solvent; when it is necessary to use the heat of the target surface 5 to evaporate the organic solvent, the laser irradiation point is 0.2mm in front of the deposition point of the droplet 2, that is, The laser first heats the target surface 5, and the droplets 2 are deposited on the heated target surface 5, and the residual temperature of the target surface 5 is used to evaporate the organic solvent;

It should be noted that the method for determining the laser power is: by controlling different laser powers to print according to the printing line, and observing the nanoparticle distribution characteristics of the nanoparticles in the deposited film 3 under the action of the laser. When the nanoparticles can be evenly covered When printing the entire circuit, the laser power is an outgoing laser that can evaporate the organic solvent in the droplets without ablating the nanoparticles in the droplets. It should be noted that the laser power will affect the temperature and temperature gradient of the target surface 5 , affect the evaporation rate and internal flow of the organic solvent, and further affect the nanoparticle deposition characteristics of the deposited film 3 . When the temperature of the target surface 5 after laser heating is too low, the organic solvent cannot be completely evaporated, and the uniformity control of nanoparticle deposition is not ideal; when the temperature of the target surface 5 after laser heating is too high, the nanoparticles may be ablated. risk of seriously damaging the deposition quality.

Step 4. Laser sintering deposition film 3

The laser power and spot size of the laser and lens are adjusted by the control system, and the deposited film prepared in step three is laser-sintered using the same outgoing laser trajectory as during inkjet printing in step three, to obtain a nanoparticle film.

In the above technical solution, if it is the preparation of a single-layer film, the above process is carried out once. If it is the preparation of N-layer coupling structure film, the above process is repeated N times, that is, after preparing a layer of nanoparticle film, it is used as Target surface 5, prepare the next nanoparticle film, and so on.

In the above technical solution, if the device to be processed by the curved surface deposition system of the present invention is a temperature-related sensor (a functional film that is sensitive to changes in temperature, such as a thermocouple, a thermal resistor, etc.), it also includes: using the laser 4 to heat the sensor. Calibration. That is, the laser 4 is used as a heat source to heat the temperature measurement end, measure the sensor output signal, and realize in-situ calibration of the sensor.

The terms used in the present invention generally have the meanings commonly understood by those of ordinary skill in the art, unless otherwise stated. In order to enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be described in further detail below with reference to examples.

In the following examples, various procedures and methods not described in detail are conventional methods well known in the art. The materials, reagents, devices, instruments, equipment, etc. used in the following examples can all be obtained from commercial sources unless otherwise specified.

Example 1

Using a thin film deposition method based on an integrated inkjet and laser integrated curved surface deposition system, the manufacturing of multi-layer high-temperature film thermocouples on the complex curved surface of nickel-based high-temperature alloy turbine blades is realized. The multi-layer high-temperature film thermocouple includes an insulation layer, a thermocouple functional layer and a protection layer. layer. The insulating layer material is aluminum oxide, the functional layer material is ITO and In ₂ O ₃ , and the protective layer material is also aluminum oxide. During preparation, an insulating layer is first prepared, then a thermocouple functional layer is prepared on the insulating layer, and finally a protective layer is prepared on the thermocouple functional layer.

The preparation parameters of the insulating layer and the protective layer are the same: the alumina mass fraction is 3%, and the organic solvent is a mixed solvent of isopropyl alcohol and ethylene glycol with a mass ratio of 1:1. The printing dot pitch is 0.04mm and the speed is 10mm/s. When using the laser to heat the organic solvent in the droplet 2 to quickly evaporate it, the laser irradiation point is 0.2 mm behind the deposition point of the droplet 2. The laser heating parameter is 30W and the spot size is 0.3mm. The sintering parameters are laser power 90W and spot size 0.3mm.

The functional layer preparation parameters are: ITO and In ₂ O ₃ mass fraction 10%, and the organic solvent is a mixed solvent of isopropyl alcohol and ethylene glycol with a mass ratio of 1:1. The printing dot pitch is 0.04mm and the speed is 10mm/s. When using the laser to heat the organic solvent in the droplet 2 to quickly evaporate it, the laser irradiation point is 0.2 mm behind the deposition point of the droplet 2. The laser heating parameter is 30W and the spot size is 0.3mm. The sintering parameters are laser power 60W and spot size 0.3mm.

Obviously, the above-mentioned embodiments are only examples for clear explanation and are not intended to limit the embodiments. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. An exhaustive list of all embodiments is neither necessary nor possible. The obvious changes or modifications derived therefrom are still within the protection scope of the present invention.

Claims (5)

1. The curved surface deposition system based on the integration of ink jet and laser is characterized by comprising an ink jet printing system, a laser system, a motion system (6) and a control system;

the ink-jet printing system comprises a spray head (1), piezoelectric ceramics, an adjustable positive and negative pressure air source, an ink liquid storage bottle and a signal generator, wherein one end of the ink liquid storage bottle is connected with the adjustable positive and negative pressure air source, the other end of the ink liquid storage bottle is connected with the spray head (1), the piezoelectric ceramics is fixed in the spray head (1), the signal generator is connected with the piezoelectric ceramics, the pressure of the adjustable positive and negative pressure air source is adjusted, so that the spray head (1) is filled with ink-jet printing ink stored in the ink liquid storage bottle, the signal generator sends a driving pulse signal to the piezoelectric ceramics, and the piezoelectric ceramics deforms to squeeze the ink-jet printing ink in the spray head (1) to generate liquid drops (2) for ink-jet printing;

the laser system comprises a laser (4) and a lens (7), wherein the lens (7) is fixed on a light path of laser emitted by the laser (4);

the motion system comprises a clamping mechanism and a motion mechanism, wherein the clamping mechanism is fixed on the motion mechanism and driven by the motion mechanism to realize five-degree-of-freedom motions of X-axis motion, Y-axis motion, Z-axis motion, X-axis rotation and Y-axis rotation, and the clamping mechanism is used for fixing a target surface (5);

the control system is connected with the piezoelectric ceramic, the laser (4), the lens (7) and the motion system, the control system regulates and controls the liquid drops (2) by regulating and controlling the driving pulse waveform of the piezoelectric ceramic in real time, and the control system controls the output power and the spot size of emergent laser by controlling the laser (4) and the lens (7); the control system sends a control instruction to the motion system, and the motion system drives the target surface (5) to realize motion according to the control instruction.

2. The curved deposition system based on the integration of inkjet and laser according to claim 1, wherein in the first step, the nozzle of the nozzle head (1) has a diameter of at least 40 μm and at most 100 μm.

3. The curved surface deposition system based on the integration of ink jet and laser according to claim 1, wherein in the second step, the ink jet printing ink is prepared by the following method: and uniformly dispersing the functional material in an organic solvent to obtain the ink for inkjet printing.

4. The curved surface deposition system based on the integration of ink jet and laser according to claim 1, wherein the uniform dispersion is achieved by ultrasonic dispersion.

5. The curved deposition system based on inkjet and laser integration according to claim 1, wherein the target surface (5) is curved.