CN116717640B - A flange component and exhaust gas treatment system that prevents vapor backflow - Google Patents

Abstract

The invention discloses a flange component capable of preventing reverse flow of steam and a tail gas treatment system, belongs to the technical field of tail gas treatment, and aims to solve the problems that in the prior art, a water film is unevenly covered on the inner wall of a reaction cavity, steam flows back to damage electronic elements in a flame generator in a thermal decomposition cavity, overflow branch pipes are additionally machined, machining removal amount is large, machining is complex, and machining efficiency is low. In the assembly, the fluid rotary flange comprises a flange base body, wherein an overflow groove is formed in the flange base body, the overflow hole penetrates through the side wall of the overflow groove, and the overflow groove is communicated with the fluid supply unit through the overflow hole; the flow guide baffle comprises a vertical ring and a transverse ring, the transverse ring is arranged above the overflow groove and has a first gap with the overflow groove, the vertical ring is arranged on the side wall of the flange base body and has a second gap with the side wall of the flange base body, and the first gap and the second gap are communicated to form a fluid channel between the water outlet of the fluid rotary flange and the reaction cavity. The invention can be used for tail gas treatment.

Description

A flange component and exhaust gas treatment system that prevents vapor backflow

Technical field

The invention belongs to the technical field of exhaust gas treatment, and particularly relates to a flange assembly and an exhaust gas treatment system that prevents vapor backflow.

Background technique

Existing semiconductor tail gas treatment equipment usually includes a thermal decomposition chamber and a reaction chamber arranged sequentially along the tail flow direction. A fluid rotating flange is provided between the thermal decomposition chamber and the reaction chamber. The fluid rotating flange has multiple water inlets and overflows. The straight-flow pipe connection has the axial direction of the overflow branch pipe tilted relative to the radial direction of the fluid rotating flange, which can provide fluid with tangential velocity to the fluid rotating flange to form a rotating water curtain.

However, on the one hand, due to the limited number of water outlets of the fluid rotating flange, there will be a problem of uneven coverage of the water film on the inner wall of the reaction chamber; at the same time, because the reaction chamber is connected to the thermal decomposition chamber, the temperature at the top of the reaction chamber is high and cannot be This will avoid the generation of water vapor, which will flow back into the thermal decomposition chamber and cause damage to the electronic components in the flame generator in the thermal decomposition chamber.

On the other hand, since the overflow branch pipe is a separate component, it protrudes from the outer wall of the flange base to form a straight pipe structure. Although it can be integrally formed with the fluid rotating flange, additional processing of the overflow branch pipe is required during the processing. For processing, the processing removal volume is large and the processing is complex, resulting in low processing efficiency.

Contents of the invention

In view of the above analysis, the present invention aims to provide a flange assembly and an exhaust gas treatment system that prevents vapor backflow, so as to solve the problem of uneven coverage of the water film on the inner wall of the reaction chamber and the impact of water vapor backflow on the thermal decomposition chamber in the prior art. At least one of the problems includes damage to the electronic components in the flame generator, additional processing of the overflow branch pipe, large amount of processing removal, and complex processing, resulting in low processing efficiency.

The purpose of the present invention is mainly achieved through the following technical solutions.

The invention provides a flange assembly that prevents vapor backflow, including a fluid rotating flange and a flow guide baffle. The fluid rotating flange includes a flange base body, an overflow groove and an overflow hole; the upper surface of the flange base body is provided with Overflow tank, the overflow hole penetrates the side wall of the overflow tank away from the center line of the flange base body, the overflow tank and the fluid supply unit are connected with the overflow tank through the overflow hole; the guide baffle includes a vertical ring and A transverse ring connected to the vertical ring. The transverse ring is provided above the overflow groove and has a first gap with the overflow groove. The vertical ring is provided on the side wall of the flange base body and has a second gap with the side wall of the flange base body. The first gap and the second gap communicate with each other to form a fluid channel between the water outlet of the fluid rotating flange and the reaction chamber.

Further, the shape of the flange base is a quadrilateral.

Further, the water outlet flow rate of the overflow tank is 8-32L/min.

Further, the flange base body includes four sides that are connected in sequence to form a quadrilateral, and each side includes a first straight line segment, a transition arc segment, and a second straight line segment that are sequentially connected to the flange base body. One center line is parallel, the distance between the first straight line segment and the center line is smaller than the distance between the second straight line segment and the center line, and the overflow hole is opened on the first straight line segment.

Further, the overflow hole includes a first straight pipe and a second straight pipe arranged sequentially along the direction of fluid movement.

Further, the diameter of the first straight tube is 10-12 mm, and the diameter of the second straight tube is 6-8 mm.

Further, the length of the first straight tube is 30-32mm, and the length of the second straight tube is 70-74mm.

Further, the number of overflow holes is 2 to 8, and the plurality of overflow holes are evenly arranged along the circumferential direction of the overflow tank.

The present invention also provides an exhaust gas treatment device, including the above-mentioned flange assembly that prevents vapor backflow.

Further, it also includes a dehumidifying cyclone device, an exhaust pipe, and a spray tower connected to the air inlet of the exhaust pipe. The dehumidifying cyclone device is located in the exhaust pipe or the spray tower.

Compared with the prior art, the present invention can achieve at least one of the following beneficial effects.

A) The flange assembly that prevents vapor backflow provided by the present invention, on the one hand, is provided with a guide baffle, and the gap between the guide baffle and the flange base serves as the gap between the outlet of the fluid rotating flange and the reaction chamber. When the fluid passes through this fluid channel, under the action of the swirling flow, it can basically fill the entire circle of the fluid channel. From then on, the swirling fluid flowing out of the fluid channel can cover the inner wall of the reaction chamber more evenly, reducing dust. Particles accumulate on the side walls of the reaction chamber to avoid clogging of the reaction chamber.

B) In the flange assembly that prevents vapor reflux provided by the present invention, the arrangement of the transverse ring is equivalent to placing a cover on the upper surface of the flange base, which can reduce the reflux of water vapor on the upper surface of the flange base to the thermal decomposition chamber. Water vapor backflow causes damage to the electronic components in the flame generator in the thermal decomposition chamber. The setting of the vertical ring can block the upper part of the water curtain on the side wall of the reaction chamber, and can also reduce the damage to the upper surface of the fluid rotating flange. The water vapor flows back into the thermal decomposition chamber, and the water vapor backflow causes damage to the electronic components in the flame generator in the thermal decomposition chamber.

C) In the flange assembly for preventing vapor backflow provided by the present invention, the shape of the flange base is a quadrilateral or approximately quadrilateral. The overflow hole penetrates the side wall of the overflow tank away from the center line of the flange base and is directly opened on the flange. On the base body, in this way, during the processing process, the quadrilateral blank can be directly used to process the flange base body, and then an overflow groove is opened on the upper surface of the flange base body, and the overflow groove is located one distance away from the center line of the flange base body. By processing a penetrating overflow hole on the side wall, the processing of the fluid rotating flange can be completed. The processing removal amount is small and the processing difficulty is low, which can greatly improve the processing efficiency.

In the present invention, the above technical solutions can also be combined with each other to achieve more preferred combination solutions. Additional features and advantages of the invention will be set forth in the description which follows, and in part, some advantages will be apparent from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention may be realized and obtained by the embodiments particularly pointed out in the description and drawings.

Description of the drawings

The drawings are for the purpose of illustrating specific embodiments only and are not to be construed as limitations of the invention. Throughout the drawings, the same reference characters represent the same components.

Figure 1 is a perspective view of a flange assembly for preventing vapor backflow provided by Embodiment 1 of the present invention;

Figure 2 is a top view of a flange assembly that prevents vapor backflow provided by Embodiment 1 of the present invention;

Figure 3 is a radial cross-sectional view of the flange assembly that prevents vapor backflow provided by Embodiment 1 of the present invention;

Figure 4 is a schematic structural diagram of the fluid rotating flange in the flange assembly for preventing vapor backflow provided by Embodiment 1 of the present invention;

Figure 5 is a schematic structural diagram of the flow guide baffle in the flange assembly for preventing vapor backflow provided by Embodiment 1 of the present invention;

Figure 6 is a schematic structural diagram of the dehumidification cyclone device in the exhaust gas treatment system provided in Embodiment 2 of the present invention;

Figure 7 is a first schematic diagram of the adjustment protrusion, the second arc-shaped through hole and the blades of the dehumidification cyclone device in the exhaust gas treatment system provided in Embodiment 2 of the present invention, in which the blades are in a horizontal state;

Figure 8 is a schematic diagram of the second cooperation of the adjustment protrusion, the second arc-shaped through hole and the blade of the dehumidification cyclone device in the exhaust gas treatment system provided in Embodiment 2 of the present invention, in which the blade is in an inclined state;

Figure 9 is a schematic diagram of the connection between the dehumidification cyclone device, the exhaust pipe and the spray tower in the exhaust gas treatment system provided in Embodiment 2 of the present invention.

Reference signs:

1-vertical ring; 2-transverse ring; 3-flange base; 4-overflow groove; 5-overflow hole; 6-second arc-shaped through hole; 7-flush component; 8-dehumidification component; 9 -The second spherical hinge structure; 10-exhaust pipe; 11-spray tower; 12-swirling sheet; 121-outer ring; 122-center column; 123-blade; 13-adjusting boss.

Detailed ways

The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The drawings constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention and are not intended to limit the scope of the present invention.

Embodiment 1

This embodiment provides a flange assembly that prevents vapor backflow. Refer to Figures 1 to 5. It includes a fluid rotating flange and a guide baffle. The fluid rotating flange includes a flange base 3, an overflow groove 4 and an overflow tank. The shape of the flow hole 5 and the flange base 3 is a quadrilateral (for example, rectangular or approximately rectangular). An overflow groove 4 is provided on the upper surface of the flange base 3. The overflow hole 5 penetrates the overflow groove 4 and is away from the center line of the flange base 3. On one side wall, the overflow tank 4 and the fluid supply unit are connected to the overflow tank 4 through the overflow hole 5. The fluid inlet axis of the overflow hole 5 is inclined with respect to the radial direction of the side wall of the overflow tank 4, so as to guide the fluid supply unit. The flow baffle includes a vertical ring 1 and a transverse ring 2 connected to the vertical ring 1. The transverse ring 2 is disposed above the overflow groove 4 and has a first gap with the overflow groove 4. The vertical ring 1 is disposed where the fluid rotates. The side wall of the flange has a second gap with the side wall of the flange base 3. The first gap and the second gap are connected to form a fluid channel between the water outlet of the fluid rotating flange and the reaction chamber.

Compared with the prior art, the flange assembly provided by this embodiment to prevent vapor backflow, on the one hand, is provided with a guide baffle, and the gap between the guide baffle and the flange base 3 serves as a gap for the fluid rotating flange. The fluid channel between the water outlet and the reaction chamber, when the fluid passes through this fluid channel, can basically fill the entire circle of the fluid channel under the action of the swirling flow, so that the swirling fluid flowing out of the fluid channel can cover it more evenly The inner wall of the reaction chamber reduces the accumulation of dust particles on the side walls of the reaction chamber and avoids clogging of the reaction chamber.

On the other hand, the arrangement of the transverse ring 2 is equivalent to placing a cover on the upper surface of the flange base 3, which can reduce the backflow of water vapor on the upper surface of the flange base 3 to the thermal decomposition chamber. The water vapor backflow has a negative impact on the thermal decomposition chamber. The electronic components in the flame generator cause damage. The setting of the vertical ring 1 can shield the upper part of the water curtain on the side wall of the reaction chamber to a certain extent. It can also reduce the water vapor on the upper surface of the fluid rotating flange from flowing back to the thermal decomposition chamber. , water vapor backflow causes damage to the electronic components in the flame generator in the thermal decomposition chamber.

On the other hand, the shape of the flange base 3 is a quadrilateral, and the overflow hole 5 penetrates the side wall of the overflow groove 4 away from the center line of the flange base 3 and is directly opened on the flange base 3. In this way, during the processing , you can directly use a quadrilateral blank to process the flange base 3, and then open an overflow groove 4 on the upper surface of the flange base 3, and set the side wall of the overflow groove 4 away from the center line of the flange base 3 By processing the through overflow hole 5, the processing of the fluid rotating flange can be completed. The processing removal amount is small and the processing difficulty is low, which can greatly improve the processing efficiency.

For example, in order to better cover the overflow groove 4, the end of the transverse ring 2 away from the side wall of the fluid rotating flange exceeds the radial width of the overflow groove 4 by 15 to 25 mm (for example, 20 mm).

Considering that the width of the overflow groove 4 will directly affect the water supply speed, in order to form a more uniform water curtain, the radial width of the overflow groove 4 is 20 to 30 mm (for example, 25 mm).

Similarly, since the first gap and the second gap are connected to form a fluid channel between the water outlet of the fluid rotating flange and the reaction chamber, correspondingly, the size of the fluid channel will also directly affect the water supply speed. For example, the first gap The height of the second gap is 4~8mm, and the radial width of the second gap is 4~8mm.

It should be noted that through the above size limitation, it is basically guaranteed that the flow rate of the cyclonic water curtain in the reaction chamber (that is, the water outlet flow rate of the overflow tank) is 8 to 32L/min (for example, 16L/min), thereby ensuring uniform formation. water curtain.

Considering that arranging the overflow hole 5 on the flange base 3 may cause the overflow hole 5 to be too long, resulting in excessive flow resistance in the overflow hole 5, therefore, the shape of the flange base 3 is approximately rectangular. , which includes four sides connected in sequence to form a quadrilateral, each side including a center line connecting the first straight line segment, the transition arc segment and the second straight line segment in turn, the first straight line segment and the second straight line segment and the flange base 3 Parallel, the distance between the first straight line segment and the center line is smaller than the distance between the second straight line segment and the center line, and the overflow hole 5 is opened on the first straight line segment. In this way, by using the flange base body 3 of this shape, the overflow hole 5 is opened on the first straight line segment, and the length of the overflow hole 5 can be reduced on the basis of ensuring the appropriate processing removal amount, thereby reducing the overflow. Flow resistance in hole 5.

From the perspective of flow resistance, for example, the length of the overflow hole 5 is 100 to 120 mm.

In order to facilitate connection, the structure of the overflow hole 5 specifically includes a first straight pipe and a second straight pipe arranged sequentially along the direction of fluid movement. The diameter of the first straight pipe is larger than the diameter of the second straight pipe. In this way, the connector of the fluid supply unit can be easily inserted into the first straight pipe to realize the connection between the fluid supply unit and the overflow hole 5 .

Similarly, from the perspective of flow resistance, the diameter ratio of the first straight tube and the second straight tube is 5-6:3-4.

For example, the diameter of the first straight tube is 10-12 mm, and the diameter of the second straight tube is 6-8 mm.

Correspondingly, the length ratio of the first straight tube to the second straight tube is 15-16:35-37.

For example, the length of the first straight pipe is 30-32m, and the length of the second straight pipe is 70-74mm.

In order to further improve the uniformity of the coverage of the spiral fluid film on the inner wall of the chamber, the number of overflow holes 5 is 2 to 8. From the perspective of layout, 4 are selected, and the 4 overflow holes 5 are along the overflow groove 4 Evenly arranged circumferentially.

Embodiment 2

This embodiment provides an exhaust gas treatment device, which includes a thermal decomposition chamber, a reaction chamber, and the flange component that is waterproof against vapor backflow provided in Embodiment 1. The thermal decomposition chamber is connected to the reaction chamber through the flange component that is waterproof against vapor backflow.

Compared with the prior art, the beneficial effects of the exhaust gas treatment device provided by this embodiment are basically the same as the beneficial effects of the flange assembly that prevents vapor backflow provided by Embodiment 1, and will not be described again here.

It can be understood that in order to realize the function of the fluid rotating flange to connect two chambers, the upper end surface of the above-mentioned flange base 3 is provided with an upper connecting ring, and the lower end surface is provided with a lower connecting ring. The upper connecting ring and the thermal decomposition chamber are detachable. The lower connecting ring is removably fixedly connected to the reaction chamber. For example, the upper connecting piece and the lower connecting piece are sealing rings or annular gaskets.

From the perspective of installation and processing, the upper connecting ring, the flange base 3 and the lower connecting ring are coaxially arranged, and the upper connecting ring and the lower connecting ring are located outside the overflow groove 4. This not only facilitates installation and Processing can also prevent the upper connecting ring and the lower connecting ring from interfering with the fluid flowing out of the overflow tank 4.

In order to realize the discharge of the treated exhaust gas, it can be understood that the above-mentioned exhaust gas treatment system also includes a dehumidification cyclone device, an exhaust pipe 10 and a spray tower 11 connected to the air inlet of the exhaust pipe 10, see Figure 9, where, The dehumidification swirl device, see Figures 6 to 8, includes a swirl plate 12. The swirl plate 12 is located at the air inlet of the exhaust pipe 10 or in a device connected to the air inlet of the exhaust pipe 10. The swirl plate 12 It includes an outer ring 121, a central column 122 located in the inner area of the outer ring 121, and a plurality of blades 123 located between the outer ring 121 and the central column 122. The first ends of the blades 123 are connected to the outer ring 121, and the blades 123 The second end is connected to the central column 122, and the outer ring 121 is connected to the inner wall of the exhaust pipe 10 or the inner wall of a device (for example, the spray tower 11) connected to the air inlet of the exhaust pipe 10.

Compared with the existing technology, the dehumidification cyclone device provided in this embodiment is provided with a cyclone sheet 12. In this way, when the treated exhaust gas containing dust and liquid droplets passes through the cyclone sheet 12, the movement direction of the liquid droplets and dust particles will change. Changes occur, making the two move in a spiral upward motion. Under the action of centrifugal force, liquid droplets and dust particles, especially larger mass liquid droplets and dust particles, will gradually concentrate on the inner wall area of the exhaust pipe 10. The liquid droplets and dust gradually merge into large droplets and dust particles, thereby achieving gas-liquid separation, which can reduce the dust and water vapor content entering the exhaust gas, and reduce the mixing of dust particles and water vapor to form slurry, which causes the exhaust pipe 10 to easily A blockage occurs.

From the perspective of water vapor reduction effect, the swirl blades 12 are arranged in a device connected to the air inlet of the exhaust pipe 10 . The number of swirl blades 12 is two, and one of the swirl blades 12 is disposed between the exhaust pipe 10 and the exhaust pipe 10 . The air inlet is connected to the air inlet end (i.e., the lower end) of the device, and the other is located at the air outlet end (i.e., the top) of the device connected to the air inlet of the exhaust pipe 10 .

In order to ensure the dehumidification swirl effect, it is necessary to comprehensively consider the size of the swirl blade 12, the number and inclination angle of the blades 123, and the gas flow rate. For example, the outer diameter of the swirl blade 12 is 100 to 300 mm. The height is 30 to 100 mm, the number of blades 123 is 8 to 20, the inclination angle of the blades 123 relative to the radial plane is 45 to 75°, and the gas flow rate is 2 to 8 m/s.

Considering that the inclination angle of the blades 123 relative to the radial plane will affect the degree of swirl, in order to adjust the degree of swirl according to the actual exhaust gas treatment conditions, the above-mentioned dehumidification swirl device also includes an adjustment ring (not shown in the figure) and Cylindrical adjustment protrusion 13, see Figure 7 to Figure 8. The adjustment ring can be rotated and sleeved on the outer wall of the exhaust pipe 10 or the outer wall of the device connected to the air inlet of the exhaust pipe 10. The outer ring 121 is provided with a second end. The ball hinge structure is a first arc-shaped through hole (not shown in the figure) at the center of the circle. The side wall of the exhaust pipe 10 or the side wall of the device connected to the air inlet of the exhaust pipe 10 is provided with a ball hinge structure at the second end. The second arc-shaped through hole 6 at the center of the circle, the first arc-shaped through hole and the second arc-shaped through hole 6 are all arranged along the axial direction of the outer ring 121, and the first arc-shaped through hole and the second arc-shaped through hole 6 are arranged along the axial direction of the outer ring 121. The holes overlap, the first end of the above-mentioned blade 123 is rotatably and fixedly connected to the outer ring 121 through the first spherical hinge structure 9, and the second end of the blade 123 is rotatably and fixedly connected to the center column 122 through the second spherical hinge structure 9, and the adjustment protrusion One end of the adjustment protrusion 13 is rotatably connected to the second end of the blade 123, and the other end of the adjustment protrusion 13 passes through the first arc-shaped through hole and the second arc-shaped through hole in turn and is then rotatably connected to the adjustment ring. This is because the swirl blade 12 is disposed on the inner wall of the exhaust pipe 10 or the inner wall of the device connected to the air inlet of the exhaust pipe 10, and the angle of the blade 123 cannot be directly adjusted through the adjustment ring, the adjustment protrusion 13 and the arc. The setting of the through-shaped through hole, by rotating the adjusting ring, drives the adjusting protrusion 13 to move upward or downward along the first arc-shaped through hole and the second arc-shaped through hole, so that the adjusting protrusion 13 is in contact with the spherical hinge structure at the second end. The distance between the projections in the radial plane changes, and the blade 123 rotates at a certain angle, so that the inclination angle of the blade 123 can be adjusted according to the actual exhaust gas condition.

It should be noted that due to the arrangement of the adjustment ring, it can cover the second arc-shaped through hole 6, so exhaust gas leakage will basically not occur.

It is worth noting that when the exhaust gas passes through the swirl plate 12 after the dust and droplets are processed, it will inevitably collide with the blades 123, the outer ring 121 and the central column 122 of the swirl plate 12, and be deposited on the swirl plate 12 surface, if not cleaned, will block the swirl plate 12, resulting in high exhaust pressure. Therefore, the above-mentioned dehumidification swirl device also includes a flushing component 7 located at the air outlet of the swirl sheet 12, and the water outlet of the flushing component 7 Toward the swirl piece 12. In this way, when a lot of dust is deposited on the swirl plate 12, the flushing assembly 7 can be turned on, and the dust on the swirl plate 12 can be washed by the water flow ejected from the flushing assembly 7.

Regarding the structure of the flushing assembly 7, specifically, it includes a plurality of flushing nozzles, which are arranged in multiple layers. The water outlet shape of the flushing nozzles is a columnar water flow. The number of flushing nozzles in each layer is 1 to 3, and the number of flushing nozzles in each layer is 1 to 3. The flow rate of the nozzle is 3 to 10 liters/minute.

In order to be able to automatically determine the degree of dust deposition on the swirl sheet 12 and thereby automatically open the flushing assembly 7, the above-mentioned dehumidifying swirl device also includes a flushing controller (not shown in the figure) and an infrared sensor (not shown in the figure), The projections of two adjacent blades 123 in the axial direction have an overlapping area. In the overlapping area, the transmitting end of the infrared sensor is located on one of the blades 123, and the receiving end of the infrared sensor is located on the other blade 123. The transmitting end and The position of the receiving end corresponds to that of the transmitting end, the flushing controller and the flushing component 7 are connected in sequence. During implementation, the receiving end receives the signal sent by the transmitting end in real time and transmits it to the flushing controller. Once the flushing controller does not receive the signal sent by the receiving end within the time threshold range (for example, 5s), it means that the dust on the swirl plate 12 If there is too much sedimentation, the flushing controller controls the flushing component 7 to open, flush the swirl sheet 12, and flush the dust on the swirl sheet 12 into the water tank.

Alternatively, the above-described dehumidification cyclone device also includes a flushing controller (not shown in the figure) and a pressure sensor (not shown in the figure). The pressure sensor is provided on the blade 123. Alternatively, the pressure sensor can also be provided at the exhaust gas inlet to the dehumidifier. Anywhere between the inlet ends of the swirl device. During implementation, the pressure data collected by the pressure sensor in real time are sent to the flushing controller. The flushing controller determines whether the pressure data exceeds the pressure threshold. If it exceeds, it means that there is too much dust deposition on the swirl plate 12, and the flushing controller controls the flushing component. 7 is turned on, flush the swirl plate 12, and flush the dust on the swirl plate 12 into the water tank.

Considering that the flushing assembly 7 will inevitably increase the water vapor content of the treated exhaust gas during the flushing process of the swirl plate 12, in order to reduce the impact of the flushing assembly 7 on the water vapor content, for example, the following two methods can be used:

In the first way, the flushing component 7 is sprayed regularly, for example, it is turned on once every 10 to 30 minutes.

Alternatively, a dehumidification component 8 (for example, a dehumidification cylinder and/or a dehumidification nozzle) is provided above the flushing component 7 to provide air to the exhaust pipe 10 or the air inlet of the exhaust pipe 10 under the action of exhaust negative pressure. Dry gas (for example, dry compressed air or dry compressed nitrogen) is supplied into the connected device to dilute the water vapor in the treated exhaust gas and reduce the water vapor content in it. The gas supply pressure is 3 to 5 kgf/cm ² , the air supply flow is 20 to 200 liters/minute.

Regarding the number of swirl blades 12 and the number of blades 123 layers on each swirl blade 12, for example, the following methods can be used:

In the first way, the above-mentioned dehumidification swirl device includes a swirl sheet 12, and the number of blades 123 on the swirl sheet 12 is one layer.

In the second way, the above-mentioned dehumidification swirl device includes a swirl sheet 12, and the number of layers of blades 123 on the swirl sheet 12 is at least two.

In the third way, the above-mentioned dehumidification swirl device includes at least two swirl sheets 12, and the number of blades 123 on each swirl sheet 12 is one layer.

In the fourth way, the above-mentioned dehumidification swirl device includes at least two swirl sheets 12, and the number of layers of blades 123 on the swirl sheets 12 is at least two.

It should be noted that from the dual perspectives of water vapor separation effect, anti-blocking effect and structural simplification, in practical applications, the second or third method can be selected.

In actual application, from the perspective of the amount of processed exhaust dust and flow resistance, in order to ensure sufficient separation of water vapor, it is also necessary to adjust the number of swirl blades 12 and the number of blades 123 on each layer of swirl blades 12 , see Table 1 for specific parameters.

Table 1 Correspondence table between the amount of dust and the number of swirl sheets and the number of blade layers on each layer of swirl sheets

Dust amount Number of swirl pieces The number of blades on each swirl piece Less than 100mg/m ³ 2 1st to 2nd floor 100～2000mg/m ³ 1 1 story More than 2000mg/ ^m3 1 1 story

It should be noted that in the field of exhaust gas treatment technology, it is generally believed that the greater the number of treatment equipment, the more beneficial it is to improve the effect. However, this embodiment found that when the amount of dust in the exhaust gas after treatment exceeds 100mg/ ^m3 , the swirl flow The increase in the number of pieces 12 will actually affect the flow of the treated exhaust gas, which is not conducive to the improvement of the effect.

In order to avoid excessive deposition of dust on the swirl plates 12, at least one flushing assembly 7 needs to be arranged above each swirl plate 12.

In order to facilitate the observation of the water vapor reduction effect, a transparent observation window is provided on the inner wall of the exhaust pipe 10 or the side wall of the device connected to the air inlet of the exhaust pipe 10 at the position corresponding to the swirl plate 12, through which the observation can be clearly observed. The dust condition and water vapor separation effect on the swirl plate 12.

It can be seen from the test that when the dehumidification cyclone device with the above structure is used, the spray volume of the flushing component 7 is 7 liters/minute, the flow rate of the treated exhaust gas is 4000 liters/minute, and the air supply flow rate of the dehumidification component 8 is 150 liters/minute. , based on the exhaust temperature of 30°C, the water vapor content of the treated exhaust gas can be reduced to one-third of the original value.

The above are only preferred specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person familiar with the technical field can easily think of changes or modifications within the technical scope disclosed in the present invention. All substitutions are within the scope of the present invention.

Claims (8)

1. An exhaust gas treatment device, characterized in that it includes a flange assembly that prevents vapor backflow; The flange assembly includes a fluid rotating flange and a flow guide baffle. The fluid rotating flange includes a flange base, an overflow groove and an overflow hole; an overflow groove is provided on the upper surface of the flange base, and the The overflow hole penetrates the side wall of the overflow groove away from the center line of the flange base body. The overflow groove and the fluid supply unit are connected to the overflow groove through the overflow hole; the flow guide baffle includes a vertical ring and a A transverse ring connected to a vertical ring. The transverse ring is provided above the overflow groove and has a first gap with the overflow groove. The vertical ring is provided on the side wall of the flange base body and is connected to the side wall of the flange base body. The wall has a second gap, and the first gap and the second gap communicate with each other to form a fluid channel between the water outlet of the fluid rotating flange and the reaction chamber; The exhaust gas treatment device also includes a dehumidification cyclone device, an exhaust pipe and a spray tower connected to the air inlet of the exhaust pipe, and the dehumidification cyclone device is located in the exhaust pipe or the spray tower; The dehumidification swirl device includes a swirl sheet, an adjustment ring and a cylindrical adjustment protrusion. The swirl sheet is located at the air inlet of the exhaust pipe. The swirl sheet includes an outer ring, a The central column in the inner area of the ring and a plurality of blades arranged between the outer ring and the central column, the first end of the blade is connected to the outer ring, the second end of the blade is connected to the central column, the outer ring Connected to the inner wall of the exhaust pipe; The first end of the blade is rotatably and fixedly connected to the outer ring through a first spherical hinge structure, and the second end of the blade is rotatably and fixedly connected to the center column through a second spherical hinge structure; The adjustment ring is rotatably mounted on the outer wall of the exhaust pipe. The outer ring is provided with a first arc-shaped through hole with the spherical hinge structure at the second end as the center. The side wall of the exhaust pipe is provided with a first arc-shaped through hole with the spherical hinge structure at the second end as the center. The ball hinge structure is a second arc-shaped through hole in the center of the circle. The first arc-shaped through hole coincides with the second arc-shaped through hole. One end of the adjustment protrusion is rotationally connected to the second end of the blade. The other end of the protrusion passes through the first arc-shaped through hole and the second arc-shaped through hole in sequence and then is rotatably connected to the adjusting ring. 2. The exhaust gas treatment device according to claim 1, characterized in that the shape of the flange base body is a quadrilateral. 3. The exhaust gas treatment device according to claim 1, characterized in that the water outlet flow rate of the overflow tank is 8-32L/min. 4. The exhaust gas treatment device according to claim 1, wherein the overflow hole includes a first straight pipe and a second straight pipe arranged sequentially along the direction of fluid movement. 5. The exhaust gas treatment device according to claim 4, wherein the diameter of the first straight pipe is 10-12 mm, and the diameter of the second straight pipe is 6-8 mm. 6. The exhaust gas treatment device according to claim 4, wherein the length of the first straight pipe is 30-32 mm, and the length of the second straight pipe is 70-74 mm. 7. The exhaust gas treatment device according to claim 1, wherein the flange base body includes four sides connected in sequence to form a quadrilateral, and each side includes a first straight line segment, a transition arc segment and a second straight line connected in sequence. segment, the first straight line segment and the second straight line segment are parallel to a center line of the flange base body, and the distance between the first straight line segment and the center line is smaller than the distance between the second straight line segment and the center line, so The overflow hole is opened on the first straight line segment. 8. The exhaust gas treatment device according to claim 1, characterized in that the number of the overflow holes is 2 to 8, and the plurality of overflow holes are evenly arranged along the circumferential direction of the overflow tank.