CN116658802B - Temperature difference type isolation filling cabinet for filling chlorine trifluoride and filling method thereof - Google Patents
Temperature difference type isolation filling cabinet for filling chlorine trifluoride and filling method thereof Download PDFInfo
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- CN116658802B CN116658802B CN202310719592.1A CN202310719592A CN116658802B CN 116658802 B CN116658802 B CN 116658802B CN 202310719592 A CN202310719592 A CN 202310719592A CN 116658802 B CN116658802 B CN 116658802B
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- cabinet body
- convex edge
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- JOHWNGGYGAVMGU-UHFFFAOYSA-N trifluorochlorine Chemical compound FCl(F)F JOHWNGGYGAVMGU-UHFFFAOYSA-N 0.000 title claims abstract description 82
- 238000002955 isolation Methods 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims abstract description 22
- 239000000463 material Substances 0.000 claims abstract description 102
- 238000007599 discharging Methods 0.000 claims abstract description 72
- 230000007246 mechanism Effects 0.000 claims abstract description 38
- 239000007789 gas Substances 0.000 claims description 98
- 238000007789 sealing Methods 0.000 claims description 66
- 239000011261 inert gas Substances 0.000 claims description 38
- 238000011084 recovery Methods 0.000 claims description 24
- 238000005429 filling process Methods 0.000 claims description 19
- 238000012544 monitoring process Methods 0.000 claims description 15
- 238000005057 refrigeration Methods 0.000 claims description 14
- 238000009833 condensation Methods 0.000 claims description 13
- 230000005494 condensation Effects 0.000 claims description 13
- 238000005192 partition Methods 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 9
- 230000007306 turnover Effects 0.000 claims description 9
- 239000007791 liquid phase Substances 0.000 claims description 8
- 239000012071 phase Substances 0.000 claims description 7
- 239000003638 chemical reducing agent Substances 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 6
- 230000006978 adaptation Effects 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 4
- 229920000742 Cotton Polymers 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 3
- 239000011229 interlayer Substances 0.000 claims description 3
- 238000005303 weighing Methods 0.000 claims description 3
- 238000010009 beating Methods 0.000 claims 1
- 230000008569 process Effects 0.000 description 10
- 230000009471 action Effects 0.000 description 7
- 238000004064 recycling Methods 0.000 description 3
- 239000000945 filler Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C6/00—Methods and apparatus for filling vessels not under pressure with liquefied or solidified gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/04—Arrangement or mounting of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/08—Mounting arrangements for vessels
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filling Of Jars Or Cans And Processes For Cleaning And Sealing Jars (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The invention discloses a temperature difference type isolation filling cabinet for chlorine trifluoride filling and a filling method thereof, wherein the temperature difference type isolation filling cabinet comprises a filling cabinet body, and the filling cabinet body is divided into an upper normal temperature area and a lower low temperature area; the filling tank fixing mechanism comprises a fixing base movably arranged at the bottom of the filling cabinet body, a first fixing plate is fixedly connected to the outer side of the fixing base upwards, an isolation limiting plate is fixedly connected to the upper part of the first fixing plate inwards, and a second fixing plate is fixedly connected to the inner side of the isolation limiting plate downwards; the filling mechanism comprises a material filling tube, and a material filling valve is fixedly arranged on the material filling tube; the filling tank comprises a filling tank body and a feeding and discharging pipe connected to the top of the filling tank body, wherein a feeding and discharging valve is fixedly installed on the feeding and discharging pipe, and the feeding and discharging pipe is fixedly inserted into the material filling pipe when the first fixing plate is sealed outside the opening of the filling cabinet body. The invention can effectively, quickly and safely fill the chlorine trifluoride.
Description
Technical Field
The invention relates to a temperature difference type isolation filling cabinet for filling chlorine trifluoride and a filling method thereof, which can effectively, quickly and safely fill the chlorine trifluoride.
Background
The chlorine trifluoride is conveyed at a constant temperature of 30-50 ℃ in the conveying process, so that the chlorine trifluoride can be conveyed smoothly; the normal temperature is required to be kept before the chlorine trifluoride gas enters the filling tank so as to prevent the chlorine trifluoride gas from being converted into a liquid phase state before the chlorine trifluoride gas enters the filling tank, thereby ensuring that the chlorine trifluoride gas can be smoothly filled into the filling tank; after the chlorine trifluoride gas enters the filling tank, the chlorine trifluoride gas needs to be rapidly cooled, so that the chlorine trifluoride gas is accumulated and filled after being converted from gas phase liquid to liquid phase. Therefore, the space of the filling tank in the filling process needs to be divided into a normal temperature area and a low temperature area, so that the feeding end part of the filling tank in the filling process is arranged in the normal temperature area, and the chlorine trifluoride gas can smoothly enter the filling tank; the storage part of the filling tank in the filling process is placed in a low-temperature area to ensure that the chlorine trifluoride gas entering the filling tank can be rapidly cooled, so that the chlorine trifluoride gas is accumulated and filled after being converted from gas phase liquid to liquid phase.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention provides the temperature difference type isolation filling cabinet for filling the chlorine trifluoride and the filling method thereof, which can effectively, quickly and safely fill the chlorine trifluoride.
The technical scheme of the invention is as follows:
a temperature difference type isolation filling cabinet for filling chlorine trifluoride comprises
The refrigerator comprises a filling cabinet body, wherein the filling cabinet body is divided into an upper normal temperature area and a lower low temperature area through corresponding partition boards, and a condensation assembly for refrigeration is arranged in the lower low temperature area; a corresponding opening is formed in one side of the filling cabinet body, and a guide opening communicated with the opening is transversely formed in the bottom side of the opening in a T shape; a limiting notch which is arranged in a rectangular shape is arranged on one side of the partition plate, which faces the opening, the outer side of the limiting notch is communicated to the opening, a plugging groove which is communicated to the limiting notch is arranged on the partition plate on the inner side of the limiting notch, the plugging groove is arranged in a rectangular shape, the width of the plugging groove is larger than that of the limiting notch, and clamping grooves which are matched with the plugging groove are arranged on the limiting notch and on two sides of the opening;
The filling tank fixing mechanism comprises a fixing base movably arranged at the bottom of the filling cabinet body, the fixing base is movably inserted into the guide opening, and an electronic scale assembly for weighing the filling tank is fixedly arranged in the middle of the fixing base; the outer side of the fixed base extends to the outside of the guide opening and is fixedly connected with a first fixed plate which can form a seal on the outer side of the opening upwards, the upper part of the first fixed plate is fixedly connected with an isolation limiting plate which can be movably inserted into the clamping groove inwards, and one end of the isolation limiting plate which is not connected with the first fixed plate extends to the inner end of the inserting groove; the middle part of the isolation limiting plate is provided with a filling tank limiting hole with the diameter smaller than the width of the limiting notch, and the isolation limiting plate is fixedly connected with a second fixing plate which can form a seal on the inner side of the opening downwards at the inner side of the filling tank limiting hole;
the filling mechanism comprises a material filling pipe fixedly arranged at the inner side of the upper normal temperature area of the filling cabinet body, and a corresponding material filling valve is fixedly arranged on the material filling pipe;
the charging tank comprises a charging tank body and a feeding and discharging pipe connected to the top of the charging tank body, a corresponding feeding and discharging valve is fixedly arranged on the feeding and discharging pipe, the bottom of the charging tank body is supported and arranged on the electronic scale assembly of the fixed base, and the upper part of the charging tank body is limited by a charging tank limiting hole on the isolation limiting plate; when the fixed base moves inwards to the outside of the opening of the filling cabinet body, the filling tank body is positioned in the filling cabinet body, and the material inlet and outlet pipe is fixedly inserted into the material filling pipe; when the fixing base outwards moves to the position where the second fixing plate is sealed at the inner side of the opening, the filling tank body is located outside the filling cabinet body, and the spacing limiting plate seals the spacing notch.
The temperature difference type isolation filling cabinet further comprises a gas leakage monitoring mechanism, wherein the gas leakage monitoring mechanism comprises a filling fixed pipe fixedly installed at the outer end part of the material filling pipe, the outer end part of the filling fixed pipe is integrally formed and inwards provided with a limiting convex edge which is in interference fit with the outer side wall of the material inlet and outlet pipe of the filling tank, and the inner side of the filling fixed pipe is integrally formed and inwards provided with a sealing convex edge matched with the end part of the material inlet and outlet pipe of the filling tank; when the fixed base moves inwards to the outside of the opening of the filling cabinet body, the material inlet and outlet pipe is fixedly inserted into the filling fixed pipe, the outer side wall and the end part of the material inlet and outlet pipe are respectively and hermetically abutted to the limiting convex edge and the sealing convex edge, and the filling fixed pipe, the material inlet and outlet pipe, the limiting convex edge and the sealing convex edge form a sealing space; the gas leakage monitoring mechanism further comprises a pressurizing pipe which is connected to the sealed space in a communicating mode, and the pressurizing pipe is fixedly provided with a corresponding pressure gauge and is connected to an external inert gas source.
The temperature difference type isolation filling cabinet further comprises a filling tail gas recovery mechanism, wherein the filling tail gas recovery mechanism comprises a tail gas recovery pipe which is connected to a material filling pipe on the outer side of the material filling valve in a communicating mode, and the tail gas recovery pipe is connected to an air inlet end of external tail gas treatment equipment through a corresponding tail gas recovery valve.
The inner end of the sealing convex edge is integrally formed and outwards turned, and the inner side wall of the feeding and discharging pipe is abutted to the turning part of the sealing convex edge.
The bottom outside fixed mounting of filling cabinet body has with filling cabinet body's bottom plate is high the supporting baseplate equally, be provided with a set of being located between filling cabinet body's bottom plate and the supporting baseplate the inboard guide rail of guiding port, unable adjustment base's bottom be provided with the guide slot of guide rail looks adaptation, through the guide slot with the guide rail cooperation will unable adjustment base movable mounting fills the bottom of filling cabinet body.
The outer end part of the supporting bottom plate is upwards and fixedly provided with a driving mechanism, the driving mechanism comprises a driving motor and a speed reducer connected to the output shaft end of the driving motor in a transmission way, and the output shaft end of the speed reducer is outwards connected with a transmission screw rod used for driving the fixed base in a transmission way.
The filling cabinet body is formed by sandwiching heat insulation cotton between interlayer shells.
The condensing assembly for refrigeration comprises a condensing pipeline, and the upper end and the lower end of the condensing pipeline are respectively and outwardly connected with a corresponding condensate liquid inlet pipeline and a condensate liquid outlet pipeline.
A filling method of a temperature difference type isolation filling cabinet for filling chlorine trifluoride comprises the following specific steps:
s1, moving the fixed base outwards to the inner side of the opening of the filling cabinet body by sealing the second fixed plate, and enabling condensate of external refrigeration equipment to circulate through a condensation component for refrigeration so as to cool a lower low-temperature area of the filling cabinet body;
s2, hoisting the filling tank body to an electronic scale assembly with the bottom support mounted on the fixed base through the filling tank limiting hole, so that the upper part of the filling tank body is fixed in the filling tank limiting hole;
s3, moving the fixed base inwards to the outer side of the opening of the filling cabinet body by sealing the first fixed plate, enabling a material inlet and outlet pipe of the filling tank to be fixedly inserted into the filling fixed pipe, and further enabling the outer side wall and the end part of the material inlet and outlet pipe to be respectively and hermetically abutted to the limiting convex edge and the sealing convex edge of the filling fixed pipe;
s4, the external inert gas is pumped into a sealing space formed by the filling fixed pipe, the feeding pipe, the limiting flange and the sealing flange through the pressurizing pipe, so that the inert gas pressure in the sealing space is higher than normal pressure and lower than the filling pressure of chlorine trifluoride gas;
S5, opening a feeding and discharging valve on a feeding and discharging pipe of the filling tank, then opening a material filling valve, and filling outside chlorine trifluoride gas into the filling tank at a filling pressure of 0.2-0.5 mpa;
s6, acquiring a pressure value in the sealed space in real time through the pressure gauge:
when the pressure value of the inert gas in the sealed space does not change, judging that the outer side wall of the feeding and discharging pipe, the limit convex edge of the end part and the filling fixed pipe and the gap between the end part and the seal convex edge do not leak, and filling is continued;
when the pressure value of the inert gas in the sealed space is reduced, judging that leakage is generated between the outer side wall of the feeding and discharging pipe and the limiting convex edge of the filling fixed pipe, no leakage is generated between the end part of the feeding and discharging pipe and the sealing convex edge of the filling fixed pipe, filling is continued, and after filling is completed, replacing the filling fixed pipe;
when the pressure value of the inert gas in the sealed space is increased, judging that leakage is generated between the end part of the feeding and discharging pipe and the sealing convex edge of the filling fixed pipe, no leakage is generated between the outer side wall of the feeding and discharging pipe and the limiting convex edge of the filling fixed pipe, continuing filling, and after filling is completed, carrying out replacement operation on the filling fixed pipe;
When the pressure value of the inert gas in the sealed space is reduced and increased and the concurrent fluctuation changes, judging that leakage is generated between the outer side wall of the material inlet and outlet pipe, the limit convex edge of the end part of the material inlet and outlet pipe and the sealing convex edge, immediately stopping the filling process, closing the material filling valve and the material inlet and outlet valve on the material inlet and outlet pipe, and then carrying out emergency treatment;
s7, after the chlorine trifluoride gas enters the filling tank body, rapidly cooling the filling tank body corresponding to the lower low-temperature area, so that the gas phase is converted into a liquid phase, and accumulated filling is carried out in the filling tank body;
s8, the electronic scale assembly acquires the whole actual weight of the charging tank in real time, and when the actual weight of the charging tank reaches a set value, namely the actual charging amount of the chlorine trifluoride reaches the set value, the material charging valve and the feeding and discharging valve on the feeding and discharging pipe are closed to stop charging of the chlorine trifluoride;
s9, moving the fixing base outwards to the inner side of the opening of the filling cabinet body, sealing the second fixing plate, hoisting the filled filling tank into a corresponding placing area, and repeating the steps S1-S9 to continuously perform chlorine trifluoride filling operation on different filling tanks.
Step S9 is to move the unable adjustment base outwards to the in-process of second fixed plate closure in the opening inboard of filling cabinet body, the tail gas recovery valve opens, and external inert gas is beaten into filling fixed pipe through the booster pipe after stepping up, gets into the outer tip of business turn over material pipe under the direction effect of the turn-over portion of sealed protruding edge to with the chlorine trifluoride filling tail gas that is located between material filling valve and business turn over material valve dashes and arranges to external tail gas treatment facility and handle.
The invention has the advantages that:
1) According to the invention, the filling cabinet body is divided into an upper normal temperature area and a lower low temperature area through the partition plate, and before filling, the fixing base of the filling tank fixing mechanism can be moved to the outside to the inside of the opening of the filling cabinet body by the second fixing plate; then, hoisting the filling tank body to an electronic scale assembly with the bottom support mounted on the fixed base through the filling tank limiting hole, so that the upper part of the filling tank body is fixed in the filling tank limiting hole; and then the fixed base is moved to the first fixed plate to be sealed at the outer side of the opening of the filling cabinet body, so that the material inlet and outlet pipe of the filling tank is fixedly inserted into the filling fixed pipe, and the material inlet and outlet valve and the material filling valve can be opened to perform chlorine trifluoride filling operation.
After filling, the fixed base is moved to the outside to be sealed at the inner side of the opening of the filling cabinet body by the second fixed plate, so that the filling can be replaced conveniently; the main point is that in the whole filling process and the replacement process of the filling tank, the upper normal temperature area and the lower low temperature area are always separated by the cooperation of an isolation limiting plate and a baffle plate, and part of cold energy from the lower low temperature area and heat energy of chlorine trifluoride gas from a material filling pipe are balanced, so that the upper normal temperature area is continuously in a state close to normal temperature, and the chlorine trifluoride gas can be smoothly filled into the filling tank; the lower low-temperature area is in a low-temperature state under the action of the condensing assembly for refrigeration, so that the chlorine trifluoride entering the filling tank body can be rapidly cooled and is accumulated and filled after being converted from gas phase liquid into liquid phase; in the filling process, the opening area corresponding to the lower low-temperature area is sealed by the first fixing plate, and in the replacing process of the filling tank, the opening area corresponding to the lower low-temperature area is sealed by the second fixing plate, so that the cold loss of the lower low-temperature area in the filling process and the replacing process of the filling tank can be greatly reduced, and the practical effect of the invention is ensured.
2) Because chlorine trifluoride gas leakage is easy to generate between the material filling tube and the material feeding and discharging tube of the filling tank in the filling process, the invention further comprises a gas leakage monitoring mechanism which comprises a filling fixed tube fixedly arranged at the outer end part of the material filling tube, wherein the outer end part of the filling fixed tube is provided with a limiting convex edge, and the inner side of the filling fixed tube is provided with a sealing convex edge. When the fixed base moves inwards to the outside of the opening of the filling cabinet body, the feeding and discharging pipe is fixedly inserted into the filling fixed pipe, and at the moment, the outer side wall and the end part of the feeding and discharging pipe are respectively and hermetically abutted to the limiting convex edge and the sealing convex edge, so that the filling fixed pipe, the feeding and discharging pipe, the limiting convex edge and the sealing convex edge form a sealing space. The gas leakage monitoring mechanism also comprises a pressurizing pipe which is connected to the sealed space in a communicating way, and the pressurizing pipe is fixedly provided with a corresponding pressure gauge and is connected to an external inert gas source.
In the filling process of chlorine trifluoride, external inert gas can be pumped into a sealing space formed by a filling fixing pipe, a feeding pipe, a discharging pipe, a limiting convex edge and a sealing convex edge, so that the pressure of the inert gas in the sealing space is higher than normal pressure and lower than the filling pressure of the chlorine trifluoride gas. The pressure value in the sealed space is obtained in real time through the pressure gauge, when the inert gas pressure value in the sealed space does not change, the outer side wall of the feeding and discharging pipe, the limit convex edge of the end part and the filling fixed pipe, and the sealing convex edge are judged not to leak, and filling is continued; when the pressure value of the inert gas in the sealed space is reduced, judging that leakage is generated between the outer side wall of the feeding and discharging pipe and the limiting convex edge of the filling fixed pipe, no leakage is generated between the end part of the feeding and discharging pipe and the sealing convex edge of the filling fixed pipe, filling is continued, and after filling is completed, replacing the filling fixed pipe; when the pressure value of the inert gas in the sealed space is increased, judging that leakage is generated between the end part of the feeding and discharging pipe and the sealing convex edge of the filling fixed pipe, no leakage is generated between the outer side wall of the feeding and discharging pipe and the limiting convex edge of the filling fixed pipe, continuing filling, and after filling is completed, carrying out replacement operation on the filling fixed pipe; when the inert gas pressure value in the sealed space is reduced and increased and fluctuated, leakage is judged to be generated between the outer side wall of the material inlet and outlet pipe, the limit convex edge of the end part and the filling fixed pipe and between the end part and the seal convex edge, the filling process is stopped immediately, the material filling valve and the material inlet and outlet valve on the material inlet and outlet pipe are closed, and then emergency treatment is carried out.
Under the action of the gas leakage monitoring mechanism, two seals can be formed at the joint of the material filling pipe and the material inlet and outlet pipe of the filling tank, so that the sealing effect is improved, and the leakage of the chlorine trifluoride gas is effectively prevented; meanwhile, the leakage problem in the filling process can be effectively and accurately monitored between the two seals, and corresponding emergency treatment can be carried out according to the monitoring result, so that the filling safety of the chlorine trifluoride is greatly improved.
3) Before leaving the filling cabinet body, the filling tank after filling is filled, the material filling valve and the feeding and discharging valve on the feeding and discharging pipe are respectively closed, at this time, part of chlorine trifluoride gas can remain between the filling fixed pipe and the feeding and discharging pipe, and if the part of gas is not effectively recycled, the leakage of chlorine trifluoride can be caused. For the recovery of the part of chlorine trifluoride gas, the invention further comprises a filling tail gas recovery mechanism which comprises a tail gas recovery pipe which is communicated with a material filling pipe connected to the outer side of the material filling valve, and the tail gas recovery pipe is connected to the air inlet end of external tail gas treatment equipment through a corresponding tail gas recovery valve.
In the process that the fixed base moves to the second fixed plate to be sealed at the inner side of the opening of the filling cabinet body, the tail gas recovery valve is opened, external inert gas is pumped into the filling fixed pipe through the pressurizing pipe after pressure is increased, and the pressurized inert gas enters the outer end part of the feeding and discharging pipe under the guiding action of the turnover part of the sealing flange so as to flush and discharge the chlorine trifluoride filling tail gas between the material filling valve and the feeding and discharging valve to external tail gas treatment equipment. Therefore, after filling is completed, the residual chlorine trifluoride gas between the filling fixed pipe and the feeding and discharging pipe is effectively recovered, and the filling safety of the invention is further ensured.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a view showing the state of use of the present invention in the filling process.
Fig. 3 is a partial enlarged view of fig. 2.
Fig. 4 is a schematic view of the structure of the present invention without the filler tank.
Fig. 5 is a schematic view of the structure of the present invention when the filler tank fixing mechanism is not provided.
Detailed Description
For the convenience of understanding by those skilled in the art, the structure of the present invention will now be described in further detail with reference to the accompanying drawings:
example 1
Referring to FIGS. 1-5, a temperature difference type isolation filling cabinet for filling chlorine trifluoride comprises
The refrigerator comprises a filling cabinet body 1, wherein the filling cabinet body 1 is divided into an upper normal temperature area 101 and a lower low temperature area 102 by a corresponding partition board 2, and a condensation component 3 for refrigeration is arranged in the lower low temperature area 102; a corresponding opening 4 is formed in one side of the filling cabinet body 1, and a guide opening 5 communicated with the opening 4 is transversely formed in the bottom side of the opening 4 in a T shape; a limiting notch 201 which is rectangular is arranged on one side of the partition board 2 facing the opening 4, the outer side of the limiting notch 201 is communicated to the opening 4, a plugging groove 202 which is communicated to the limiting notch 201 is arranged on the partition board 2 on the inner side of the limiting notch 201, the plugging groove 202 is rectangular, the width of the plugging groove 202 is larger than that of the limiting notch 201, and clamping grooves 203 which are matched with the plugging groove 202 are arranged on the limiting notch 201 and on two sides of the opening;
The filling tank fixing mechanism 6 comprises a fixing base 601 movably arranged at the bottom of the filling cabinet body 1, the fixing base 601 is movably inserted into the guide opening 5, and an electronic scale assembly 7 for weighing the filling tank is fixedly arranged in the middle of the fixing base 601; the outer side of the fixed base 601 extends to the outer side of the guide opening 5 and is fixedly connected with a first fixed plate 602 which can form a closed state for the outer side of the opening 4 upwards, the upper part of the first fixed plate 602 is fixedly connected with an isolation limiting plate 603 which can be movably inserted into the clamping groove 203 inwards, and one end of the isolation limiting plate 603 which is not connected with the first fixed plate 602 extends to the inner end of the insertion groove 202; the middle part of the isolation limiting plate 603 is provided with a filling tank limiting hole 6031 with a diameter smaller than the width of the limiting notch 201, and the isolation limiting plate 603 is fixedly connected with a second fixing plate 604 which can form a seal on the inner side of the opening 4 downwards at the inner side of the filling tank limiting hole 6031;
the filling mechanism 8 comprises a material filling pipe 801 fixedly arranged at the inner side of the upper normal temperature area 101 of the filling cabinet body 1, and a corresponding material filling valve 802 is fixedly arranged on the material filling pipe 801;
The filling tank 9 comprises a filling tank body 901 and a feeding and discharging pipe 902 connected to the top of the filling tank body 901, wherein a corresponding feeding and discharging valve 903 is fixedly arranged on the feeding and discharging pipe 902, the bottom of the filling tank body 901 is supported and arranged on the electronic scale assembly 7 of the fixed base 601, and the upper part of the filling tank body 901 is limited by a filling tank limiting hole 6031 on the isolating limiting plate 603; when the fixing base 601 moves inwards to the outside of the opening 4 of the filling cabinet body 1 where the first fixing plate 602 is sealed, the filling can 901 is located in the filling cabinet body 1, and the material inlet and outlet pipe 902 is fixedly inserted into the material filling pipe 801; when the fixing base 601 moves outwards to the position where the second fixing plate 604 is sealed inside the opening 4, the filling can 901 is located outside the filling cabinet body 1, and the spacing plate 603 seals the spacing gap 201.
The temperature difference type isolation filling cabinet further comprises a gas leakage monitoring mechanism 10, wherein the gas leakage monitoring mechanism 10 comprises a filling fixed pipe 1001 fixedly installed at the outer end part of the material filling pipe 801, a limiting convex edge 11 which is in interference fit with the outer side wall of the material inlet and outlet pipe 902 of the filling tank 9 is integrally formed inwards at the outer end part of the filling fixed pipe 1001, and a sealing convex edge 12 which is matched with the end part of the material inlet and outlet pipe 902 of the filling tank 9 is integrally formed inwards at the inner side of the filling fixed pipe 1001; when the fixing base 601 moves inward to the outside of the opening 4 of the filling cabinet body 1 where the first fixing plate 602 is sealed, the feeding and discharging pipe 902 is fixedly inserted into the filling fixing pipe 1001, the outer side wall and the end of the feeding and discharging pipe 902 are respectively and hermetically abutted to the limiting flange 11 and the sealing flange 12, and the filling fixing pipe 1001, the feeding and discharging pipe 902, the limiting flange 11 and the sealing flange 12 form a sealing space; the gas leakage monitoring mechanism 10 further comprises a pressurizing pipe 1002 connected to the sealed space in a communicating manner, and a corresponding pressure gauge 1003 is fixedly arranged on the pressurizing pipe 1002 and connected to an external inert gas source.
The filling cabinet body 1 is divided into an upper normal temperature area 101 and a lower low temperature area 102 by the partition board 2, before filling, the fixing base 601 of the filling tank fixing mechanism 6 can be moved to the outside to the second fixing plate 604 to be sealed at the inner side of the opening of the filling cabinet body 1; then, the filling tank body 901 is hoisted to the electronic scale assembly 7 with the bottom support mounted on the fixed base 601 through the filling tank limiting hole 6031, so that the upper part of the filling tank body 901 is fixed in the filling tank limiting hole 6031; then, the fixing base 601 is moved to the first fixing plate 602 to be sealed at the outside of the opening of the filling cabinet body 1, so that the material inlet and outlet pipe 902 of the filling can 9 is fixedly inserted into the filling fixing pipe 1001, and the material inlet and outlet valve 903 and the material filling valve 802 can be opened to perform chlorine trifluoride filling operation.
After filling, the fixing base 601 is moved to the outside to the inner side of the opening of the filling cabinet body 1 by the second fixing plate 604, so that the filling tank 9 can be replaced conveniently; most importantly, in the whole filling process and the replacement process of the filling tank 9, the upper normal temperature area 101 and the lower low temperature area 102 are always separated by the cooperation of the separation limiting plate 603 and the partition plate 2, and part of cold energy from the lower low temperature area 102 and heat energy of chlorine trifluoride gas from the material filling pipe 801 are balanced, so that the upper normal temperature area 101 is continuously in a state close to normal temperature, and the chlorine trifluoride gas can be smoothly filled into the filling tank 901; the lower low temperature area 102 is in a low temperature state under the action of the refrigeration condensation assembly 3, so that the chlorine trifluoride gas entering the filling tank 901 can be rapidly cooled and is accumulated and filled after being converted from gas phase liquid into liquid phase; in the filling process, the opening area corresponding to the lower low temperature area 102 is closed by the first fixing plate 602, and in the replacing process of the filling tank 9, the opening area corresponding to the lower low temperature area 102 is closed by the second fixing plate 604, so that the amount of cold loss of the lower low temperature area 102 can be greatly reduced, and the practical effect of the invention is ensured.
Under the action of the gas leakage monitoring mechanism 10, two seals can be formed at the joint of the material filling tube 801 and the material inlet and outlet tube 902 of the filling tank 9, so that the sealing effect is improved, and the leakage of the chlorine trifluoride gas is effectively prevented; meanwhile, leakage in the filling process can be effectively and accurately monitored between the two seals, and in the filling process of chlorine trifluoride, external inert gas can be pumped into a sealing space formed by the filling fixing tube 1001, the feeding and discharging tube 902, the limiting flange 11 and the sealing flange 12, so that the pressure of the inert gas in the sealing space is higher than normal pressure and lower than the filling pressure of the chlorine trifluoride gas. The pressure value in the sealed space is obtained in real time through the pressure gauge 1003, so that whether the leakage problem exists between the filling fixed pipe 1001 and the feeding and discharging pipe 902 in the filling process and the position of the existing leakage area can be effectively judged, and corresponding emergency treatment can be carried out according to the monitoring result, thereby greatly improving the filling safety of the chlorine trifluoride.
The temperature difference type isolation filling cabinet further comprises a filling tail gas recovery mechanism 13, the filling tail gas recovery mechanism 13 comprises a tail gas recovery pipe 1301 which is connected to a material filling pipe 801 outside the material filling valve 802 in a communicating mode, and the tail gas recovery pipe 1301 is connected to an air inlet end of external tail gas treatment equipment through a corresponding tail gas recovery valve 1302.
The inner end of the sealing flange 12 is integrally formed and turned outwards, and the inner side wall of the feeding and discharging pipe 902 abuts against the turning part of the sealing flange 12.
Before the filled filling tank 9 leaves the filling cabinet body 1, the material filling valve 802 and the feeding and discharging valve 903 on the feeding and discharging pipe 902 are respectively closed, at this time, part of chlorine trifluoride gas remains between the filling fixing pipe 1001 and the feeding and discharging pipe 902, and if the part of gas is not effectively recovered, the chlorine trifluoride will leak. For the recycling of the chlorine trifluoride gas, the invention further comprises a filling tail gas recycling mechanism 13, in the process that the fixed base 601 moves to the second fixed plate 604 to be sealed at the inner side of the opening of the filling cabinet body 1, the tail gas recycling valve 1302 is opened, external inert gas is pumped into the filling fixed pipe 1001 through the pressurizing pipe 1002 after being pressurized, and the pressurized inert gas enters the outer end part of the feeding and discharging pipe 902 under the guiding action of the turnover part of the sealing flange 12, so that the chlorine trifluoride filling tail gas between the material filling valve 802 and the feeding and discharging valve 903 is flushed and discharged to external tail gas treatment equipment for treatment.
The bottom outside fixed mounting of filling cabinet body 1 has with filling cabinet body 1's bottom plate same high supporting baseplate 14, be provided with a set of being located between filling cabinet body 1's bottom plate and the supporting baseplate 14 filling cabinet body 5 inboard guide rail 15, the bottom of unable adjustment base 601 be provided with guide rail 15 looks adaptation's guide slot, through the guide slot with guide rail 15 cooperation will unable adjustment base 601 movable mounting is in filling cabinet body 1's bottom.
The outer end of the supporting base plate 14 is fixedly provided with a driving mechanism 16 upwards, the driving mechanism 16 comprises a driving motor 1601 and a speed reducer 1602 connected to the output shaft end of the driving motor 1601 in a transmission manner, and the output shaft end of the speed reducer 1602 is connected with a transmission screw 1603 for driving the fixed base 601 in an outward transmission manner.
The filling cabinet body 1 is formed by sandwiching heat insulation cotton between interlayer shells.
The condensation assembly 3 for refrigeration comprises a condensation pipeline 301, and the upper end and the lower end of the condensation pipeline 301 are respectively and outwardly connected with a corresponding condensate liquid inlet pipeline 302 and a condensate liquid outlet pipeline 303.
Example two
The filling method of the temperature difference type isolation filling cabinet for chlorine trifluoride filling according to the embodiment one comprises the following specific steps:
s1, moving the fixing base 601 to the outside to the inner side of the opening of the filling cabinet body 1 by sealing the second fixing plate 604, and circulating condensate of external refrigeration equipment through the condensation component 3 for refrigeration to cool the lower low-temperature area 102 of the filling cabinet body 1;
s2, hoisting the filling tank body 901 to an electronic scale assembly 7 with the bottom support mounted on the fixed base 601 through the filling tank limiting hole 6031, and fixing the upper part of the filling tank body 901 in the filling tank limiting hole 6031;
S3, moving the fixing base 601 to the outer side of the opening of the filling cabinet body 1 by sealing the first fixing plate 602, fixedly inserting the feeding and discharging pipe 902 of the filling tank 9 into the filling fixing pipe 1001, and sealing and abutting the outer side wall and the end part of the feeding and discharging pipe 902 on the limiting convex edge 11 and the sealing convex edge 12 of the filling fixing pipe 1001 respectively;
s4, the external inert gas is pumped into a sealed space formed by the filling fixed pipe 1001, the feeding and discharging pipe 902, the limiting flange 11 and the sealing flange 12 through the pressurizing pipe 1002, so that the inert gas pressure in the sealed space is higher than the normal pressure and lower than the filling pressure of chlorine trifluoride gas;
s5, opening a feeding and discharging valve 903 on a feeding and discharging pipe 902 of the charging tank 9, and after that, opening a material charging valve 802, and charging outside chlorine trifluoride gas into the charging tank 901 at a charging pressure of 0.2-0.5 mpa;
s6, acquiring the pressure value in the sealed space in real time through the pressure gauge 1003:
when the inert gas pressure value in the sealed space does not change, the outer side wall and the end part of the feeding and discharging pipe 902 and the limit convex edge 11 and the sealing convex edge 12 of the filling and fixing pipe 1001 are judged not to leak, and the filling is continued;
When the pressure value of the inert gas in the sealed space is reduced, judging that leakage is generated between the outer side wall of the feeding and discharging pipe 902 and the limiting convex edge 11 of the filling and fixing pipe 1001, no leakage is generated between the end part of the feeding and discharging pipe 902 and the sealing convex edge 12 of the filling and fixing pipe 1001, and after filling is completed, carrying out replacement operation on the filling and fixing pipe 1001;
when the pressure value of the inert gas in the sealed space increases, it is determined that leakage is generated between the end part of the feeding and discharging pipe 902 and the sealing convex edge 12 of the filling and fixing pipe 1001, no leakage is generated between the outer side wall of the feeding and discharging pipe 902 and the limiting convex edge 11 of the filling and fixing pipe 1001, filling is continued, and after filling is completed, replacement operation is performed on the filling and fixing pipe 1001;
when the fluctuation of the inert gas pressure value in the sealed space is reduced and increased, judging that leakage is generated between the outer side wall of the material inlet and outlet pipe 902, the end part of the material inlet and outlet pipe and the limiting convex edge 11 and the sealing convex edge 12 of the filling fixed pipe 1001, immediately stopping the filling process, closing the material filling valve 802 and the material inlet and outlet valve 903 on the material inlet and outlet pipe 902, and then performing emergency treatment;
The upper portion normal atmospheric temperature district 101 of filling cabinet body 1 in this embodiment is provided with the blast pipe that has the exhaust fan, the end of giving vent to anger of blast pipe is connected to external tail gas treatment facility's inlet end, emergency treatment process includes:
1) The exhaust fan is started to pump and exhaust the internal body in the upper normal temperature area 101 to external tail gas treatment equipment for treatment;
2) The fixed base 601 is moved outwards by a small distance, so that the abutting connection between the end part of the feeding and discharging pipe 902 and the sealing convex edge 12 of the filling fixed pipe 1001 is disconnected;
3) The external inert gas is pumped into the filling fixed pipe 1001 through the pressurizing pipe 1002 after being pressurized to 1mpa so as to flush and discharge the chlorine trifluoride between the material filling valve 802 and the material inlet and outlet valve 903 to external tail gas treatment equipment for treatment;
s7, after the chlorine trifluoride gas enters the filling tank 901, rapidly cooling in the filling tank 901 corresponding to the lower low-temperature area 102, so that the gas phase is converted into a liquid phase, and accumulated filling is performed in the filling tank 901;
s8, the electronic scale assembly 7 acquires the whole actual weight of the charging tank 9 in real time, and when the actual weight of the charging tank 9 reaches a set value, namely the actual charging amount of the chlorine trifluoride reaches the set value, the material charging valve 802 and the feeding and discharging valve 903 on the feeding and discharging pipe 902 are closed to stop the charging of the chlorine trifluoride;
S9, moving the fixing base 601 to the outside, closing the second fixing plate 604 on the inner side of the opening of the filling cabinet body 1, hoisting the filled filling cans 9 to the corresponding placing areas, and repeating the steps S1-S9 to continuously perform chlorine trifluoride filling operation on different filling cans 9.
In the step S9, in the process of moving the fixing base 601 to the second fixing plate 604 to close the inner side of the opening of the filling cabinet body 1, the tail gas recovery valve 1302 is opened, the external inert gas is pumped into the filling fixing tube 1001 through the pressurizing tube 1002 after being pressurized to 1mpa, and enters the outer end portion of the feeding and discharging tube 902 under the guiding action of the turnover portion of the sealing flange 12, so as to flush and discharge the chlorine trifluoride filling tail gas between the material filling valve 802 and the feeding and discharging valve 903 to the external tail gas treatment equipment for treatment.
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.
Claims (10)
1. The utility model provides a chlorine trifluoride fills with temperature difference formula isolation filling cabinet which characterized in that: comprising
The refrigerator comprises a filling cabinet body (1), wherein the filling cabinet body (1) is divided into an upper normal temperature area (101) and a lower low temperature area (102) through corresponding partition plates (2), and a condensation assembly (3) for refrigeration is arranged in the lower low temperature area (102); a corresponding opening (4) is formed in one side of the filling cabinet body (1), and a guide opening (5) communicated with the opening (4) is transversely formed in the bottom side of the opening (4) in a T shape; a limiting notch (201) which is rectangular is arranged on one side, facing the opening (4), of the partition board (2), the outer side of the limiting notch (201) is communicated to the opening (4), a plugging groove (202) which is communicated to the limiting notch (201) is arranged on the partition board (2) on the inner side of the limiting notch (201), the plugging groove (202) is rectangular, the width of the plugging groove (202) is larger than that of the limiting notch (201), and clamping grooves (203) which are matched with the plugging groove (202) are arranged on the two sides of the limiting notch (201) and the opening (4);
the filling tank fixing mechanism (6) comprises a fixing base (601) movably arranged at the bottom of the filling cabinet body (1), the fixing base (601) is movably inserted into the guide opening (5), and an electronic scale assembly (7) for weighing the filling tank is fixedly arranged in the middle of the fixing base (601); the outer side of the fixed base (601) extends to the outer side of the guide opening (5) and is fixedly connected with a first fixed plate (602) which can form a seal on the outer side of the opening (4) upwards, the upper part of the first fixed plate (602) is fixedly connected with an isolation limiting plate (603) which can be movably inserted into the clamping groove (203) inwards, and one end of the isolation limiting plate (603) which is not connected with the first fixed plate (602) extends to the inner end of the inserting groove (202); the middle part of the isolation limiting plate (603) is provided with a filling tank limiting hole (6031) with the diameter smaller than the width of the limiting notch (201), and the isolation limiting plate (603) is fixedly connected with a second fixing plate (604) which can form a seal on the inner side of the opening (4) downwards at the inner side of the filling tank limiting hole (6031);
The filling mechanism (8) comprises a material filling tube (801) fixedly arranged on the inner side of the upper normal temperature area (101) of the filling cabinet body (1), and a corresponding material filling valve (802) is fixedly arranged on the material filling tube (801);
the charging tank (9) comprises a charging tank body (901) and a feeding and discharging pipe (902) connected to the top of the charging tank body (901), a corresponding feeding and discharging valve (903) is fixedly arranged on the feeding and discharging pipe (902), the bottom of the charging tank body (901) is supported and arranged on an electronic scale assembly (7) of the fixed base (601), and the upper part of the charging tank body (901) is limited by a charging tank limiting hole (6031) on the isolation limiting plate (603); when the fixed base (601) moves inwards to the outside of the opening (4) of the filling cabinet body (1) where the first fixed plate (602) is sealed, the filling tank (901) is positioned in the filling cabinet body (1), and the material inlet and outlet pipe (902) is fixedly inserted into the material filling pipe (801); when the fixing base (601) moves outwards to the inner side of the opening (4) where the second fixing plate (604) is sealed, the filling tank (901) is located outside the filling cabinet body (1), and the spacing limiting plate (603) seals the spacing gap (201).
2. The temperature difference type isolation filling cabinet for filling chlorine trifluoride as claimed in claim 1, wherein: the temperature difference type isolation filling cabinet further comprises a gas leakage monitoring mechanism (10), the gas leakage monitoring mechanism (10) comprises a filling fixed pipe (1001) fixedly installed at the outer end part of the material filling pipe (801), a limiting convex edge (11) which is in interference fit with the outer side wall of a material inlet and outlet pipe (902) of the filling tank (9) is inwards formed in an integrated mode at the outer end part of the filling fixed pipe (1001), and a sealing convex edge (12) which is matched with the end part of the material inlet and outlet pipe (902) of the filling tank (9) is inwards formed in an integrated mode at the inner side of the filling fixed pipe (1001); when the fixed base (601) moves inwards to the outside of the opening (4) of the filling cabinet body (1), the material inlet and outlet pipe (902) is fixedly inserted into the filling fixed pipe (1001), the outer side wall and the end part of the material inlet and outlet pipe (902) are respectively in sealing contact with the limiting convex edge (11) and the sealing convex edge (12), and the filling fixed pipe (1001), the material inlet and outlet pipe (902), the limiting convex edge (11) and the sealing convex edge (12) form a sealing space; the gas leakage monitoring mechanism (10) further comprises a pressurizing pipe (1002) which is connected to the sealed space in a communicating mode, and a corresponding pressure gauge (1003) is fixedly arranged on the pressurizing pipe (1002) and connected to an external inert gas source.
3. A temperature differential isolation filing cabinet for chlorine trifluoride filling as defined in claim 2, wherein: the temperature difference type isolation filling cabinet further comprises a filling tail gas recovery mechanism (13), the filling tail gas recovery mechanism (13) comprises a tail gas recovery pipe (1301) which is connected to a material filling pipe (801) outside the material filling valve (802) in a communicating mode, and the tail gas recovery pipe (1301) is connected to an air inlet end of external tail gas treatment equipment through a corresponding tail gas recovery valve (1302).
4. A temperature differential isolation filing cabinet for chlorine trifluoride filling as defined in claim 2, wherein: the inner end part of the sealing convex edge (12) is integrally formed and outwards turned, and the inner side wall of the feeding and discharging pipe (902) is abutted to the turning part of the sealing convex edge (12).
5. The temperature difference type isolation filling cabinet for filling chlorine trifluoride as claimed in claim 1, wherein: the bottom outside fixed mounting of filling cabinet body (1) have with filling cabinet body's (1) bottom plate same height supporting baseplate (14), be provided with a set of being located between filling cabinet body's (1) bottom plate and supporting baseplate (14) guide rail (15) of guiding mouth (5) inboard, the bottom of unable adjustment base (601) be provided with guide slot of guide rail (15) looks adaptation, through the guide slot with guide rail (15) cooperation will unable adjustment base (601) movable mounting is in filling cabinet body's (1) bottom.
6. The temperature difference type isolation filling cabinet for filling chlorine trifluoride as claimed in claim 5, wherein: the outer end part of the supporting bottom plate (14) is fixedly provided with a driving mechanism (16) upwards, the driving mechanism (16) comprises a driving motor (1601) and a speed reducer (1602) connected to the output shaft end of the driving motor (1601) in a transmission mode, and the output shaft end of the speed reducer (1602) is connected with a transmission screw rod (1603) used for driving the fixed base (601) in an outward transmission mode.
7. The temperature difference type isolation filling cabinet for filling chlorine trifluoride as claimed in claim 1, wherein: the filling cabinet body (1) is formed by sandwiching heat insulation cotton between interlayer shells.
8. The temperature difference type isolation filling cabinet for filling chlorine trifluoride as claimed in claim 1, wherein: the condensation component (3) for refrigeration comprises a condensation pipeline (301), and the upper end and the lower end of the condensation pipeline (301) are respectively and outwards connected with a corresponding condensate liquid inlet pipeline (302) and a condensate liquid outlet pipeline (303).
9. A method of filling a temperature differential isolation filling cabinet for chlorine trifluoride filling as defined in claim 3, wherein: comprises the following specific steps:
S1, moving the fixing base (601) to the outside of the second fixing plate (604) to be sealed at the inner side of an opening of the filling cabinet body (1), and enabling condensate of external refrigeration equipment to circulate through the condensation component (3) for refrigeration so as to cool a lower low-temperature area (102) of the filling cabinet body (1);
s2, hoisting the filling tank body (901) to an electronic scale assembly (7) with the bottom support mounted on the fixed base (601) through the filling tank limiting hole (6031), and fixing the upper part of the filling tank body (901) in the filling tank limiting hole (6031);
s3, moving the fixed base (601) to the outer side of the opening of the filling cabinet body (1) in a sealing way, enabling a material inlet and outlet pipe (902) of a filling tank (9) to be fixedly inserted into the filling fixed pipe (1001), and enabling the outer side wall and the end part of the material inlet and outlet pipe (902) to be respectively and hermetically abutted to a limit convex edge (11) and a sealing convex edge (12) of the filling fixed pipe (1001);
s4, the external inert gas is pumped into a sealing space formed by a filling fixed pipe (1001), a feeding and discharging pipe (902), a limiting convex edge (11) and a sealing convex edge (12) through a pressurizing pipe (1002), so that the inert gas pressure in the sealing space is higher than the normal pressure and lower than the filling pressure of chlorine trifluoride gas;
S5, opening a material inlet and outlet valve (903) on a material inlet and outlet pipe (902) of the filling tank (9), and after that, opening a material filling valve (802), and filling external chlorine trifluoride gas into the filling tank body (901) at a filling pressure of 0.2-0.5 mpa;
s6, acquiring a pressure value in the sealed space in real time through the pressure gauge (1003):
when the inert gas pressure value in the sealed space does not change, judging that leakage does not occur between the outer side wall of the feeding and discharging pipe (902) and the limit convex edge (11) of the end part and the filling fixing pipe (1001) and between the end part and the sealing convex edge (12), and filling is continued;
when the pressure value of inert gas in the sealed space is reduced, judging that leakage is generated between the outer side wall of the feeding and discharging pipe (902) and the limiting convex edge (11) of the filling fixed pipe (1001), no leakage is generated between the end part of the feeding and discharging pipe (902) and the sealing convex edge (12) of the filling fixed pipe (1001), filling is continued, and after filling is completed, replacing the filling fixed pipe (1001);
when the pressure value of the inert gas in the sealed space is increased, judging that leakage is generated between the end part of the feeding and discharging pipe (902) and the sealing convex edge (12) of the filling fixed pipe (1001), no leakage is generated between the outer side wall of the feeding and discharging pipe (902) and the limiting convex edge (11) of the filling fixed pipe (1001), filling is continued, and after filling is completed, replacing the filling fixed pipe (1001);
When the pressure value of the inert gas in the sealed space is reduced and increased and the concurrent fluctuation changes, leakage is judged to be generated between the outer side wall of the material inlet and outlet pipe (902) and between the end part of the material inlet and outlet pipe and the limiting convex edge (11) and the sealing convex edge (12) of the filling fixed pipe (1001), the filling process is stopped immediately, the material filling valve (802) and the material inlet and outlet valve (903) on the material inlet and outlet pipe (902) are closed, and then emergency treatment is carried out;
s7, after the chlorine trifluoride gas enters the filling tank (901), rapidly cooling in the filling tank (901) corresponding to the lower low-temperature area (102), converting the gas phase into a liquid phase, and performing accumulated filling in the filling tank (901);
s8, the electronic scale assembly (7) acquires the whole actual weight of the charging tank (9) in real time, and when the actual weight of the charging tank (9) reaches a set value, namely the actual charging amount of the chlorine trifluoride reaches the set value, the material charging valve (802) and the material inlet and outlet valve (903) on the material inlet and outlet pipe (902) are closed to stop charging of the chlorine trifluoride;
s9, moving the fixing base (601) to the outside of the second fixing plate (604) to be sealed at the inner side of the opening of the filling cabinet body (1), hoisting the filled filling tank (9) to a corresponding placing area, and repeating the steps S1-S9 to continuously perform chlorine trifluoride filling operation on different filling tanks (9).
10. The filling method of the temperature difference type isolation filling cabinet for filling chlorine trifluoride as claimed in claim 9, wherein the filling method comprises the following steps: step S9 is to move the unable adjustment base (601) to the second fixed plate (604) seals the in-process of filling the opening inboard of cabinet body (1), and tail gas recovery valve (1302) is opened, and external inert gas is in the fixed pipe (1001) of filling of beating into through booster pipe (1002) after stepping up, gets into the outer tip of business turn over pipe (902) under the direction effect of the turn-over portion of sealed protruding edge (12) to with the chlorine trifluoride fills the dress tail gas between material filling valve (802) and business turn over material valve (903) towards outside tail gas treatment facility and handles.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310719592.1A CN116658802B (en) | 2023-06-16 | 2023-06-16 | Temperature difference type isolation filling cabinet for filling chlorine trifluoride and filling method thereof |
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| CN202310719592.1A CN116658802B (en) | 2023-06-16 | 2023-06-16 | Temperature difference type isolation filling cabinet for filling chlorine trifluoride and filling method thereof |
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| CN116658802B true CN116658802B (en) | 2023-12-22 |
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| CN117482864B (en) * | 2023-10-28 | 2024-08-09 | 福建德尔科技股份有限公司 | Preparation system and method of electronic grade chlorine trifluoride |
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| CN116658802A (en) | 2023-08-29 |
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