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CN116625508B - Multi-target hyperspectral detection system based on optical fiber array - Google Patents

Multi-target hyperspectral detection system based on optical fiber array Download PDF

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Publication number
CN116625508B
CN116625508B CN202310883294.6A CN202310883294A CN116625508B CN 116625508 B CN116625508 B CN 116625508B CN 202310883294 A CN202310883294 A CN 202310883294A CN 116625508 B CN116625508 B CN 116625508B
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optical fiber
narrow
band
array
light
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CN116625508A (en
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杨晋
冯树龙
陈佳奇
孙慈
王金雨
宋楠
王明佳
赵梓彤
王添一
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/10Arrangements of light sources specially adapted for spectrometry or colorimetry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1809Echelle gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • G01J2003/282Modified CCD or like
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A40/00Adaptation technologies in agriculture, forestry, livestock or agroalimentary production
    • Y02A40/10Adaptation technologies in agriculture, forestry, livestock or agroalimentary production in agriculture

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

The invention relates to the technical field of spectrum equipment, and particularly provides a multi-target hyperspectral detection system based on an optical fiber array. Comprising the following steps: a light source, a narrow-band multi-color light forming system, a dispersion system and a detector system; the narrow-band compound-color light forming system comprises a narrow-band filter wheel, an optical fiber bundle array and a slit; the light source is used for emitting broadband polychromatic light, the broadband polychromatic light enters the fiber bundle array after passing through the narrow-band filter wheel, the fiber bundle array cuts a surface view field into a matrix view field, and then enters the slit to change the matrix view field into a linear array view field, so that the narrow-band polychromatic light is obtained; and the narrow-band polychromatic light is incident into the detector system after the dispersion system generates a dispersion light beam, so as to obtain a hyperspectral image. The advantages are that: the miniaturization is ensured, the spectrum resolution is improved, and the multi-target detection of the surface view field is realized; spectral resolution imaging at pm level is achieved.

Description

Multi-target hyperspectral detection system based on optical fiber array
Technical Field
The invention relates to the technical field of spectrum equipment, in particular to a multi-target hyperspectral detection system based on an optical fiber array.
Background
Compared with the conventional grating spectrometer, the echelle grating spectrometer has the advantages of high spectral resolution, high diffraction efficiency, full-spectrum transient direct reading and the like, is a preferred spectrometer for fine analysis of inductively coupled plasma, laser-induced plasma, spark spectrum and astronomical spectrum, and is widely applied to the fields of atomic emission spectrum detection, astronomical star detection and the like.
In the prior art, the basic optical path of the echelle grating spectrometer is a Czerny-Turner optical path, the structure of which is shown in fig. 1, and most designs of the echelle grating spectrometer are improved and evolved from the optical path according to the performance index. Wherein,,the incident angle of incident light is defined as the included angle between the projection of the wave vector of light ray in the main section and the grating normal, and has positive and negative characteristics, the same side of the grating normal is different, and the two sides of the grating normal are same. />The azimuth angle of incidence of incident light is defined as the angle between the wave vector and the main section. L, W is the length and width of the echelle grating. The polychromatic light enters from the pinhole, becomes parallel light beam by the collimating lens, and then enters the echelle gratingxThe first dispersion splitting is performed in the direction. The first dispersion beam has multiple orders of spectrum overlapping, and needs to be formed by another grating or prismyAnd carrying out second dispersion light splitting in the direction, and finally, imaging the two-dimensional dispersion light beam on an image plane by a converging mirror to obtain the two-dimensional distribution of the pinhole monochromatic image.
The existing echelle grating spectrometer is small-hole incident and can only detect single points, if ultrahigh spectral resolution detection is needed, the focal length of the system is required to be lengthened, the length-width ratio of the echelle grating is increased, the volume of the instrument is large, the echelle grating is difficult to process, the echelle grating is difficult to match with a detector, and meanwhile, the aberration correction is difficult.
In summary, how to design a spectrum detection system capable of improving spectrum resolution and realizing multi-target detection of a surface view field while ensuring miniaturization of a spectrometer is a problem to be solved currently.
Disclosure of Invention
The invention provides a multi-target hyperspectral detection system based on an optical fiber array for solving the problems.
The invention aims to provide a multi-target hyperspectral detection system based on an optical fiber array, which is characterized by comprising the following components: a light source, a narrow-band multi-color light forming system, a dispersion system and a detector system; the narrow-band compound-color light forming system comprises a narrow-band filter wheel, an optical fiber bundle array and a slit;
the light source is used for emitting broadband polychromatic light, the broadband polychromatic light enters the fiber bundle array after passing through the narrow-band filter wheel, the fiber bundle array cuts a surface view field into a matrix view field, and then enters the slit to change the matrix view field into a linear array view field, so that the narrow-band polychromatic light is obtained;
and the narrow-band polychromatic light is incident into the detector system after the dispersion system generates a dispersion light beam, so as to obtain a hyperspectral image.
Preferably, the input end of the fiber bundle array is an N x N fiber bundle array, and the output end is 1 x N 2 And (5) an optical fiber bundle linear array.
Preferably, the dispersion system comprises a collimator and an echelle grating;
the narrow-band polychromatic light is collimated by the collimating lens and then enters the echelle grating, and is subjected to narrow-band dispersion by the echelle grating to form a dispersion light beam, and then enters the detector system.
Preferably, the length direction of the slit is perpendicular to the dispersion direction.
Preferably, the detector system comprises an imaging mirror and a detector arranged in sequence along the optical path; the dispersed light beams are converged by the imaging mirror and then are incident to the detector.
Preferably, the light at each position in the linear array field of view corresponds to a pixel of the detector.
Preferably, the dispersion system further comprises a turning mirror, which is arranged between the slit and the collimating mirror.
Preferably, the detector is an imperx area array CMOS.
Preferably, the bandwidth of the narrowband polychromatic light is 30-100 nm.
Compared with the prior art, the invention has the following beneficial effects:
the multi-target hyperspectral detection system based on the optical fiber array ensures miniaturization, improves the spectral resolution and realizes multi-target detection of a surface view field; the problems that the existing echelle grating spectrometer is incident to a small hole and can only detect a single point, if ultrahigh spectral resolution detection is needed, the focal length of a system is required to be lengthened, the length-width ratio of the echelle grating is increased, the volume of the instrument is large, the echelle grating is difficult to process and is difficult to match with a detector, meanwhile, difficulty is brought to aberration correction are solved, and pm-level spectral resolution imaging is realized.
Drawings
FIG. 1 is a schematic diagram of the optical path structure of an echelle grating spectrometer.
Fig. 2 is a schematic diagram of a multi-target hyperspectral detection system based on an optical fiber array according to an embodiment of the present invention.
Fig. 3 is a schematic flow chart of imaging of a multi-target hyperspectral detection system based on an optical fiber array according to an embodiment of the present invention.
Fig. 4 is a schematic view of a cut field of view of an array of fiber optic bundles provided in accordance with an embodiment of the present invention.
Fig. 5 is a schematic view of target surface dispersion of a detector according to an embodiment of the present invention.
Reference numerals:
1. a narrowband filter wheel; 2. an array of optical fiber bundles; 3. a slit; 4. a collimator lens; 5. an echelle grating; 6. an imaging mirror; 7. a detector.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, like modules are denoted by like reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, a detailed description thereof will not be repeated.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limiting the invention.
FIG. 2 illustrates a multi-target hyperspectral detection system based on an optical fiber array, comprising: a light source, a narrow-band multi-color light forming system, a dispersion system and a detector system; the narrow-band compound-color light forming system comprises a narrow-band filter wheel 1, an optical fiber bundle array 2 and a slit 3; the dispersion system comprises a collimating lens 4 and an echelle grating 5; the detector system comprises an imaging mirror 6 and a detector 7 which are arranged in sequence along the light path;
the light source adopts a broadband high-power halogen light source and is used for emitting broadband polychromatic light; the wide-band polychromatic light enters the optical fiber bundle array 2 after passing through the narrow-band optical filter wheel 1, cuts the surface view field into a matrix view field through the optical fiber bundle array 2, and then enters the slit 3 to change the matrix view field into a linear array view field so as to obtain the narrow-band polychromatic light; the narrow-band polychromatic light is collimated by the collimating lens 4 and then enters the echelle grating 5, and is subjected to narrow-band dispersion by the echelle grating 5 to form a dispersion light beam, and the dispersion light beam is converged by the imaging lens 6 and then enters the detector 7 to obtain a hyperspectral image.
The input end of the fiber bundle array 2 is an N x N fiber bundle array, and the output end is 1 x N 2 And (5) an optical fiber bundle linear array.
The length direction of the slit 3 is perpendicular to the dispersion direction.
The light at each position in the linear array field of view corresponds to a picture element of the detector 7.
In a specific embodiment, a turning mirror is further arranged between the slit 3 and the collimator mirror 4.
In a specific embodiment, the slit 3 is an electric slit.
In a specific embodiment, the detector 7 is an imperx area array CMOS.
Example 1
The embodiment provides a multi-target hyperspectral detection system based on an optical fiber array, which comprises the following components: the optical fiber laser comprises a light source, a narrow-band filter wheel 1, an optical fiber bundle array 2, a slit 3, a collimating lens 4, an echelle grating 5, an imaging lens 6 and a detector 7;
FIG. 4 is a schematic view of a cut field of view of a fiber array, wherein the input end of the fiber array 2 is a 3×3 fiber array, and the output end is a 1×9 fiber array, so as to convert the field of view of the array into a linear array field of view and enter the slit 3;
the slit 3 is an electric slit, and the purpose of adopting the electric slit is to control the size and the position of the slit in the system adjustment process; the length direction of the slit 3 is perpendicular to the dispersion direction, that is, the linear array field of view is perpendicular to the dispersion direction, and the dispersion direction means that each space point on the slit can be dispersed along the dispersion direction shown in fig. 5; FIG. 5 is a schematic view of the dispersion of the target surface of the detector, wherein the size of the image surface is shown by taking the conventional CMOS as an example, the number of pixels of the target surface is 1024×1024, the size of the pixels is 7.4um, and the relationship between the dispersion direction and the slit length direction is shown in the figure;
the detector 7 is an imperx area array CMOS;
the light source is used for emitting broadband polychromatic light, the broadband polychromatic light enters the optical fiber bundle array 2 after passing through the narrowband optical filter wheel 1, the surface view field is cut into a matrix view field by the optical fiber bundle array 2, and then the matrix view field is changed into a linear array view field by entering the slit 3, so that narrowband polychromatic light is obtained; the narrow-band polychromatic light is collimated by the collimating lens 4 and then enters the echelle grating 5, and is subjected to narrow-band dispersion by the echelle grating 5 to form a dispersion light beam, and the dispersion light beam is converged by the imaging lens 6 and then enters the detector 7 to obtain a hyperspectral image.
The bandwidth of the narrowband polychromatic light is 50nm.
The echelle grating 5 in the invention works at a higher blazed level by utilizing the lower linear density and the larger blazed angle, and the free spectral area of each level is narrower, so that broadband complex-color light is required to be changed into narrowband complex-color light and then dispersed by the echelle grating 5, so that the problems of spectrum aliasing and the like are avoided; meanwhile, the system can finish the hyperspectral imaging of the final wide-band surface view field, reduces system moving parts and provides a solution idea for dynamic hyperspectral detection.
Example 2
The difference between the multi-target hyperspectral detection system based on the optical fiber array and the embodiment 1 is that a turning mirror is further arranged between the slit 3 and the collimating mirror 4; the purpose of the folding mirror is to reduce the volume of the whole system after folding.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present disclosure may be performed in parallel, sequentially, or in a different order, provided that the desired results of the technical solutions of the present disclosure are achieved, and are not limited herein.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.

Claims (8)

1.基于光纤阵列的多目标超光谱探测系统,其特征在于,包括:光源、窄带复色光形成系统、色散系统和探测器系统;所述窄带复色光形成系统包括窄带滤光片轮、光纤束阵列、狭缝;1. A multi-target hyperspectral detection system based on an optical fiber array, characterized in that it includes: a light source, a narrow-band polychromatic light forming system, a dispersion system and a detector system; the narrow-band polychromatic light forming system includes a narrow-band filter wheel, an optical fiber bundle array, slit; 所述光源用于发出宽波段复色光,所述宽波段复色光经所述窄带滤光片轮后入射至所述光纤束阵列,经所述光纤束阵列将面视场切割成矩阵视场,再入射至所述狭缝将所述矩阵视场变成线阵视场,得到窄带复色光;The light source is used to emit broad-band polychromatic light. The broad-band polychromatic light is incident on the optical fiber bundle array after passing through the narrow-band filter wheel. The surface field of view is cut into a matrix field of view through the fiber bundle array. Then it is incident on the slit to change the matrix field of view into a linear array field of view, thereby obtaining narrow-band polychromatic light; 所述窄带复色光经所述色散系统产生色散光束后,入射至所述探测器系统中,得到超光谱图像;After the narrow-band polychromatic light generates a dispersive beam through the dispersion system, it is incident on the detector system to obtain a hyperspectral image; 所述色散系统包括准直镜和中阶梯光栅;所述窄带复色光经过所述准直镜的准直后,入射至所述中阶梯光栅,经所述中阶梯光栅发生窄带色散后形成色散光束,入射至所述探测器系统。The dispersion system includes a collimating mirror and an echelle grating; after being collimated by the collimating mirror, the narrow-band polychromatic light is incident on the echelle grating, and forms a dispersive light beam after narrow-band dispersion occurs through the echelle grating. , incident on the detector system. 2.根据权利要求1所述的基于光纤阵列的多目标超光谱探测系统,其特征在于:所述光纤束阵列的输入端为N×N光纤束阵列,输出端为1×N2光纤束线阵。2. The multi-target hyperspectral detection system based on optical fiber array according to claim 1, characterized in that: the input end of the optical fiber bundle array is an N×N optical fiber bundle array, and the output end is a 1× N optical fiber bundle line. Array. 3.根据权利要求2所述的基于光纤阵列的多目标超光谱探测系统,其特征在于:所述狭缝的长度方向与色散方向相垂直。3. The multi-target hyperspectral detection system based on optical fiber array according to claim 2, characterized in that: the length direction of the slit is perpendicular to the dispersion direction. 4.根据权利要求3所述的基于光纤阵列的多目标超光谱探测系统,其特征在于:所述探测器系统包括沿光路依次设置的成像镜和探测器;所述色散光束经过所述成像镜的汇聚后入射至所述探测器。4. The multi-target hyperspectral detection system based on optical fiber array according to claim 3, characterized in that: the detector system includes an imaging mirror and a detector arranged sequentially along the optical path; the dispersive light beam passes through the imaging mirror After convergence, they are incident on the detector. 5.根据权利要求4所述的基于光纤阵列的多目标超光谱探测系统,其特征在于:所述线阵视场中每一个位置的光与所述探测器的像元像素相互对应。5. The multi-target hyperspectral detection system based on optical fiber array according to claim 4, characterized in that: the light at each position in the linear array field of view corresponds to the pixels of the detector. 6.根据权利要求5所述的基于光纤阵列的多目标超光谱探测系统,其特征在于:所述色散系统还包括折转镜,所述折转镜设置在所述狭缝与所述准直镜之间。6. The multi-target hyperspectral detection system based on fiber array according to claim 5, characterized in that: the dispersion system further includes a folding mirror, the folding mirror is arranged between the slit and the collimation Between the mirrors. 7.根据权利要求6所述的基于光纤阵列的多目标超光谱探测系统,其特征在于:所述探测器为imperx面阵CMOS。7. The multi-target hyperspectral detection system based on optical fiber array according to claim 6, characterized in that: the detector is imperx area array CMOS. 8.根据权利要求7所述的基于光纤阵列的多目标超光谱探测系统,其特征在于:所述窄带复色光的带宽为30~100nm。8. The multi-target hyperspectral detection system based on optical fiber array according to claim 7, characterized in that: the bandwidth of the narrow-band complex color light is 30~100nm.
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CN102435311A (en) * 2011-09-07 2012-05-02 杭州远方光电信息股份有限公司 Optical fiber bundle spectrometer
CN103776531A (en) * 2014-01-01 2014-05-07 西安应用光学研究所 Near infrared weak pulse spectral radiance calibration device
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