CN116448799A - Cathode fluorescence imaging system and control method thereof - Google Patents
Cathode fluorescence imaging system and control method thereof Download PDFInfo
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- CN116448799A CN116448799A CN202310511479.4A CN202310511479A CN116448799A CN 116448799 A CN116448799 A CN 116448799A CN 202310511479 A CN202310511479 A CN 202310511479A CN 116448799 A CN116448799 A CN 116448799A
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Abstract
The present disclosure provides a cathode fluorescence imaging system and a control method thereof, wherein the system comprises: the photoelectric conversion device, the signal processing device and the signal acquisition device are electrically connected in sequence; the photoelectric conversion device is used for acquiring a cathode fluorescence signal generated after the excitation of the electron beam and the sample to be detected, and performing photoelectric conversion treatment on the cathode fluorescence signal to obtain a weak current signal; the signal processing device is used for performing at least current conversion processing and signal amplification processing on the weak current signal to obtain a processed signal; the signal acquisition device is used for receiving the processed signals, and the processed signals are used for performing cathode fluorescence imaging to obtain cathode fluorescence images. Here, the signal processing device performs signal processing operations including current conversion and signal amplification, so that the weak current signal obtained by conversion can be more explicitly presented, and the image quality of the cathode fluorescence image obtained by imaging is higher.
Description
Technical Field
The disclosure relates to the technical field of cathode fluorescence imaging, in particular to a cathode fluorescence imaging system and a control method thereof.
Background
In recent years, techniques relating scanning electron microscopy (Scanning Electron Microscope, SEM) to cathode fluorescence (CL) have been rapidly developed, and SEM-CL can obtain more information through CL signals, such as morphology observations, structural and compositional analysis, etc. The CL signal herein refers to an electromagnetic wave emitted at a frequency in the ultraviolet, infrared or visible light band, except secondary electrons, backscattered electrons, auger electrons and X-rays, when an electron beam impinges on the surface of a material, and the basic principle is that electrons inside the material are excited to a high energy state by the incident electrons, jump back to a low energy state through a certain relaxation time, and release energy, wherein a part of the energy is emitted in the form of electromagnetic radiation.
Cathode fluorescence detection and imaging systems are the primary method of acquiring CL signals. The system mainly comprises a cathode fluorescence collecting and detecting device and a transfer conduction device. The cathode fluorescence collecting and detecting device is used for collecting cathode fluorescence signals excited by the electron beam and converting the cathode fluorescence signals into electric signals (namely current signals), and the electric signals are transmitted outwards through the switching conduction device and can be processed into synchronous image information or intensity information by a computer.
However, the current imaging system is limited by the characteristic that the current signal cannot obtain high-quality cathode fluorescence image on high-speed real-time scanning, and the high-quality cathode fluorescence image is excessively noisy and has serious image stripes.
Disclosure of Invention
The embodiment of the disclosure at least provides a cathode fluorescence imaging system and a control method thereof, so as to improve the image quality of cathode fluorescence imaging.
In a first aspect, embodiments of the present disclosure provide a cathode fluorescence imaging system comprising: the photoelectric conversion device, the signal processing device and the signal acquisition device are electrically connected in sequence;
the photoelectric conversion device is used for acquiring a cathode fluorescence signal generated after excitation of the electron beam and a sample to be detected, and performing photoelectric conversion treatment on the cathode fluorescence signal to obtain a weak current signal;
the signal processing device is used for performing at least current conversion processing and signal amplification processing on the weak current signal to obtain a processed signal;
the signal acquisition device is used for receiving the processed signal, and the processed signal is used for performing cathode fluorescence imaging to obtain a cathode fluorescence image.
In one possible embodiment, the signal processing device includes a current converter and a controllable amplifier, the current converter being electrically connected to the controllable amplifier;
the current converter is used for carrying out current-voltage conversion processing on the current signal to obtain a voltage signal;
the controllable amplifier is used for amplifying the voltage signal with controllable amplification times to obtain an amplified voltage signal, and the processed signal comprises the amplified voltage signal.
In one possible embodiment, where the cathode fluorescence signal comprises a set of cathode fluorescence sub-signals, the amplified voltage signal comprises a set of amplified voltage sub-signals; the signal processing device further comprises a buffer, wherein the buffer is electrically connected with the controllable amplifier;
the buffer is used for buffering a group of amplified voltage sub-signals and outputting buffered voltage signals.
In one possible embodiment, the signal processing device further includes a bandwidth selector, and the bandwidth selector is electrically connected to the controllable amplifier;
the bandwidth selector is used for performing bandwidth limitation on the amplified voltage signal based on synchronous operation between the generation frequency of the signal generator for generating the cathode fluorescent signal and the acquisition frequency of the signal acquisition device.
In a possible implementation manner, the signal processing device further comprises a micro control unit MCU, and the MCU is electrically connected with the controllable amplifier;
and the MCU is used for directly controlling the controllable amplifier or controlling other devices in a linkage way through the controllable amplifier.
In a possible implementation manner, the signal processing device further comprises a high voltage generator, and the high voltage generator is electrically connected with the MCU;
the high voltage generator is used for converting the voltage of the multichannel power supply system into a specific power supply voltage based on the control of the MCU, and the specific power supply voltage is used for supplying power to the photoelectric conversion device.
In one possible implementation, the signal processing device further includes an external communication interface, and the external communication interface is electrically connected to the MCU.
In a possible implementation manner, in the case that the external communication interface includes a first communication interface connected to an external control center, the MCU is configured to receive a first control instruction of the external control center through the first communication interface;
in case the external communication interface comprises a second communication interface connected with an external control unit, the MCU is configured to receive a second control instruction of the external control unit through the second communication interface.
In one possible embodiment, the signal acquisition device comprises a signal generator and a signal receiver;
the signal generator is used for generating a scanning waveform signal with a specific scanning frequency and driving a scanning coil of the scanning electron microscope to scan the electron beam based on the scanning waveform signal;
the signal processing device is used for selecting a signal bandwidth corresponding to the specific scanning frequency for the amplified voltage signal based on a bandwidth selector;
the signal receiver is configured to receive the amplified voltage signal after bandwidth selection.
In a second aspect, the present disclosure further provides a control method of a cathode fluorescence imaging system, including:
obtaining a weak current signal obtained by photoelectric conversion treatment of a cathode fluorescence signal, wherein the cathode fluorescence signal is generated after excitation of an electron beam and a sample to be detected;
and performing at least current conversion processing and signal amplification processing on the weak current signal to obtain a processed signal, wherein the processed signal is used for performing cathode fluorescence imaging.
In one possible implementation manner, the performing at least a current conversion process and a signal amplification process on the weak current signal includes:
performing current-voltage conversion processing on the current signal to obtain a voltage signal;
and carrying out amplification processing on the voltage signal with controllable amplification times to obtain an amplified voltage signal, wherein the processed signal comprises the amplified voltage signal.
In one possible embodiment, the resulting processed signal includes:
acquiring a specific scanning frequency under electron beam scanning;
and selecting a signal bandwidth corresponding to the specific scanning frequency according to the amplified voltage signal.
By adopting the cathode fluorescence imaging system and the control method thereof, the cathode fluorescence imaging system realizes effective treatment of cathode fluorescence signals through the cooperation of the photoelectric conversion device, the signal processing device and the signal acquisition device which are electrically connected in sequence, wherein the photoelectric conversion device is used for acquiring the cathode fluorescence signals generated after the excitation of the electron beam and the sample to be detected and carrying out photoelectric conversion treatment on the cathode fluorescence signals; the signal processing device is used for performing at least current conversion processing and signal amplification processing on the weak current signal obtained through conversion processing to obtain a processed signal; the signal acquisition device is used for receiving the processed signal, and the processed signal is subjected to cathode fluorescence imaging to obtain a cathode fluorescence image. Here, after photoelectric conversion is performed based on the photoelectric conversion device, signal processing operations including current conversion and signal amplification are performed by the signal processing device, so that the weak current signal obtained by conversion is more explicitly presented, and thus the image quality of the imaged cathode fluorescence image is higher.
Other advantages of the present disclosure will be explained in more detail in conjunction with the following description and accompanying drawings.
It should be understood that the foregoing description is only an overview of the technical solutions of the present disclosure so that the technical means of the present disclosure may be more clearly understood and may be implemented in accordance with the content of the specification. The following specific examples illustrate the present disclosure in order to make the above and other objects, features and advantages of the present disclosure more comprehensible.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings required for the embodiments are briefly described below, which are incorporated in and constitute a part of the specification, these drawings showing embodiments consistent with the present disclosure and together with the description serve to illustrate the technical solutions of the present disclosure. It is to be understood that the following drawings illustrate only certain embodiments of the present disclosure and are therefore not to be considered limiting of its scope, for the person of ordinary skill in the art may admit to other equally relevant drawings without inventive effort. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:
FIG. 1 illustrates a schematic diagram of a cathode fluorescence imaging system provided by an embodiment of the present disclosure;
FIG. 2 is a schematic diagram of a signal processing device in a cathode fluorescence imaging system according to an embodiment of the disclosure;
FIG. 3 illustrates a schematic application of a cathode fluorescence imaging system provided by an embodiment of the present disclosure;
FIG. 4 illustrates a flow chart of a method of controlling a cathode fluorescence imaging system provided by an embodiment of the present disclosure;
FIG. 5 illustrates a schematic diagram of a control device of a cathode fluorescence imaging system provided by an embodiment of the present disclosure;
fig. 6 shows a schematic diagram of an electronic device provided by an embodiment of the disclosure.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
In the description of the embodiments of the present disclosure, it should be understood that terms such as "comprises" or "comprising" are intended to indicate the presence of features, numbers, steps, acts, components, portions or combinations thereof disclosed in the present specification, and are not intended to exclude the possibility of the presence of one or more other features, numbers, steps, acts, components, portions or combinations thereof.
Unless otherwise indicated, "/" means or, e.g., A/B may represent A or B; "and/or" herein is merely an association relationship describing an association object, and means that three relationships may exist, for example, a and/or B may mean: a exists alone, A and B exist together, and B exists alone.
The terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the embodiments of the present disclosure, unless otherwise indicated, the meaning of "a plurality" is two or more.
It is found that the physical process of fluorescence generated by the material under the excitation of electron beam is determined by the electronic structure, and the electronic structure is related to the element composition, lattice structure and defect, and the mechanical, thermal and electromagnetic environment. Thus, electron beam excited cathode fluorescence spectra can reflect the physical properties of the material itself through the material electronic structure.
Detection and processing of electron beam excitation cathode fluorescence signals is usually combined with scanning or transmission electron microscopy, and can realize morphology observation, structure and component analysis and combination research of electron beam excitation fluorescence spectrum. The electron beam spot used for exciting fluorescence by the electron beam is very small, the energy is high, compared with photoluminescence, the electron beam excited fluorescence signal has the characteristics of high spatial resolution, high excitation energy, wide spectrum range, large excitation depth and the like, and full spectrum or single spectrum fluorescence scanning imaging can be realized.
The cathode fluorescence detection and imaging system is a main method for acquiring the cathode fluorescence signal. The system generally includes a cathode fluorescence collection and detection device, an adaptor conduction device.
The cathode fluorescence collecting and detecting device part of the system is a collecting and detecting device for collecting cathode fluorescence signals excited by electron beams and converting the signals into electric signals; the cathode fluorescent signal is directly collected by the device after being excited by electron beams and converted into an electric signal, the electric signal is transmitted to a computer in a general atmospheric environment from a vacuum environment through a transfer conduction device to be processed into synchronous image information or intensity information, the system directly collects the cathode fluorescent signal, performs space collection to the greatest extent through a limited space, and finally is converted into a digital information image and a digital information chart through photoelectric conversion.
To at least partially address one or more of the above problems, as well as other potential problems, the present disclosure provides at least one cathode fluorescence imaging system and a control method thereof to improve the image quality of cathode fluorescence imaging.
In order to facilitate understanding of the cathode fluorescence imaging system and the control method thereof provided in the embodiments of the present disclosure, the cathode fluorescence imaging system will be specifically described below. As shown in fig. 1, the cathode fluorescence imaging system provided in the embodiment of the disclosure mainly includes a photoelectric conversion device 11, a signal processing device 22 and a signal acquisition device 33, where the photoelectric conversion device 11, the signal processing device 22 and the signal acquisition device 33 are electrically connected in sequence;
the photoelectric conversion device 11 is used for acquiring a cathode fluorescence signal generated after the excitation of the electron beam and the sample to be detected, and performing photoelectric conversion treatment on the cathode fluorescence signal to obtain a weak current signal;
signal processing means 22 for performing at least current conversion processing and signal amplification processing on the weak current signal to obtain a processed signal;
the signal acquisition device 33 is configured to receive the processed signal, and the processed signal is used for performing cathode fluorescence imaging to obtain a cathode fluorescence image.
In order to facilitate understanding of the cathode fluorescence imaging system provided by the embodiments of the present disclosure, a detailed description is first provided below of an application scenario of the system. The cathode fluorescence imaging system is mainly used in various application fields requiring excitation of cathode fluorescence signals for fluorescent substance research. In view of the fact that the semiconductor material with better luminescence characteristics can be applied to researches on micron-scale and nano-scale semiconductor quantum dots, quantum wires and the like, besides, the semiconductor material can also be applied to many other conductor and non-conductor substances, such as zircon materials in geologic time researches, and the zircon materials can also show abundant cathode fluorescence information, and the embodiment of the disclosure is not limited in particular.
The embodiments of the present disclosure are not limited in particular, and may be specifically described below in connection with a scanning electron microscope (hereinafter referred to as a "scanning electron microscope") in view of the technical relevance of the scanning electron microscope to the cathode fluorescence technique, as the sample materials under study are different and may be specifically applied to the corresponding technical fields.
The cathode fluorescence imaging system realizes effective processing of cathode fluorescence signals through the cooperation of the photoelectric conversion device 11, the signal processing device 22 and the signal acquisition device 33 which are electrically connected in sequence, wherein the photoelectric conversion device 11 is used for acquiring the cathode fluorescence signals generated after the excitation of the electron beam and the sample to be detected and carrying out photoelectric conversion processing on the cathode fluorescence signals; a signal processing device 22, configured to perform at least current conversion processing and signal amplification processing on the weak current signal obtained by the conversion processing, so as to obtain a processed signal; the signal acquisition device 33 is configured to receive the processed signal, and the processed signal is subjected to cathode fluorescence imaging to obtain a cathode fluorescence image. Here, after photoelectric conversion by the photoelectric conversion device 11, signal processing operations including current conversion and signal amplification are performed by the signal processing device 22, so that the weak current signal obtained by conversion is more explicitly presented, and thus the image quality of the imaged cathode fluorescence image is higher.
In practical application, the cathode fluorescence signal generated by the scanning electron microscope is provided with two-dimensional coordinate information of a plane, and the coordinate information is consistent with the measurement scale of the real space in height, and the position information can be provided corresponding to the generated cathode fluorescence signal. In general, in order to obtain this information, it is necessary to control the deflection system of the scanning electron microscope, and receive the cathode fluorescence signal simultaneously during the residence time of the electron beam, then, correspondingly receive and combine the cathode fluorescence intensity image along with the raster scanning of the electron beam, and finally, read the size information obtained by the electron microscope system onto the cathode fluorescence intensity image to complete an intensity image of cathode fluorescence with a spatial size, so the cathode fluorescence image in the embodiment of the disclosure may be the intensity image itself, or may be an intensity image carrying other attribute information (such as a spatial size), and spectral information at a single coordinate position, such as wavelength information, energy information or other optical information, and the like, which is not limited in particular herein.
The cathode fluorescence imaging system provided by the embodiment of the disclosure is positioned after the cathode fluorescence signal is received and before the cathode fluorescence signal is received by a computer. Here, the electron beam and the sample to be measured are excited by the electron microscope to generate a cathode fluorescence signal, the light signal is converted into a weak current signal by the photoelectric conversion device 11, and the weak current signal is received by the image acquisition device after being processed by the signal processing device 22, so that the computer equipment can perform cathode fluorescence imaging based on the processed signal.
In view of the key role of the signal processing device 22 for the entire imaging effect, the description of the signal processing device 22 will be focused next.
As shown in fig. 22, the signal processing device 22 in the embodiment of the disclosure mainly includes a current converter and a controllable amplifier, where the current converter 221 is electrically connected to the controllable amplifier 222; wherein:
a current converter 221 for performing a current-voltage conversion process on the weak current signal to obtain a voltage signal;
the controllable amplifier 222 is configured to amplify the voltage signal by a controllable amplification factor to obtain an amplified voltage signal, where the amplified voltage signal includes the amplified voltage signal.
As shown in fig. 2, after the photoelectric conversion processing is performed on the received cathode fluorescent signal by the photoelectric conversion device 11 such as a silicon photomultiplier (Silicon photomultiplier, siPM) or a photomultiplier (PhotoMultiplier Tube, PMT), the current-voltage conversion processing and the voltage signal amplification processing can be performed sequentially by the current converter 221 and the controllable amplifier 222, and the imaging effect of the amplified voltage signal is better.
The current converter 221 may adopt a transimpedance amplifier to realize volt-ampere conversion (i.e. current-to-voltage), the controllable amplifier 222 may refer to a voltage amplifier that controls amplification factor through a micro control unit such as a singlechip, so as to better adapt amplification effect, and this mainly considers that an excessive amplification factor may possibly cause pressure of a subsequent receiving voltage, and an insufficient amplification factor may not well characterize signal characteristics, based on this, different sample materials and different application scenarios may be combined to select an appropriate amplification factor, and further, the controllable amplifier 222 further has a certain bias voltage function, that is, the amplified signal is synchronously reduced, so that an amplified ac signal with more cathode fluorescence information is ensured instead of a dc signal.
In practical applications, in order to suppress the current rise rate and the voltage rise rate of the device, and prevent damage to the device, a buffer 223 may be provided after the controllable amplifier 222, as shown in fig. 2. In a specific application, if the cathode fluorescent signal includes a set of cathode fluorescent sub-signals, the amplified voltage signal includes a set of amplified voltage sub-signals, the set of amplified voltage sub-signals may be buffered based on the buffer 223, and the buffered voltage signal is output.
In practical applications, the number of voltage sub-signals that can be buffered may be determined based on the buffering capability of the buffer 223, for example, when the memory of the buffer 223 is larger and the buffering capability is stronger, more voltage sub-signals can be buffered, for example, when the memory of the buffer 223 is smaller and the buffering capability is weaker, fewer voltage sub-signals can be buffered, so that the problem that the subsequent signal output interface is damaged due to receiving the overloaded voltage at one time can be well guaranteed.
As shown in fig. 2, the embodiment of the present disclosure is further adapted to be provided with a bandwidth selector 224, the bandwidth selector 224 being configured to bandwidth-limit the amplified voltage signal based on a synchronous operation between the generation frequency of the signal generator generating the cathode fluorescent signal and the acquisition frequency of the signal acquisition device 33. That is, the bandwidth selector 224 herein may select different bandwidths, and the larger the bandwidth, the larger the bandwidth needs to be adapted to a certain extent to the larger signal acquisition frequency, and the signal acquisition frequency is correspondingly synchronous with the signal generation frequency, so that the signal-to-noise ratio of the cathode fluorescent signal acquisition is greatly improved, so that the cathode fluorescent signal can be kept relatively clear under different speed displays, and is clearer under a high-speed scanning mode compared with similar products.
In practical applications, the control of the master micro control unit (Microcontroller Unit, MCU) is required, whether the controllable amplifier 222 or the bandwidth selector 224, for example, the direct control of the directly connected controllable amplifier 222 as shown in fig. 2, or the indirect connection control of the bandwidth selector 224 through the controllable amplifier 222 as shown in fig. 2.
In addition to the controllable amplifier 222 and the bandwidth selector 224 of the above example, the main control MCU225 serves as a central processing unit, and can control and link all modules.
As shown in fig. 2, the signal processing device 22 herein further includes a high voltage generator 226, and the high voltage generator 226 converts the voltage of the multi-channel power supply system into a specific power supply voltage based on the control of the MCU225, and the specific power supply voltage is used to power the photoelectric conversion device 11.
The multichannel power supply system can provide basic power supply voltage for each device, and details are omitted here.
As shown in fig. 1, the cathode fluorescence imaging system provided in the embodiment of the present disclosure may further perform information interaction with the outside through the signal processing device 22, specifically, the signal processing device 22 is provided with an external communication interface, and performs connection communication with the external device 44 through the external communication interface.
Here, the communication interfaces provided correspondingly to the different external devices 44 are also different, and the external device 44 may be an external control unit (e.g., a manual box) or an external control center. In the case that the external communication interface includes a first communication interface connected to the external control hub, the MCU225 is configured to receive a first control instruction of the external control hub through the first communication interface; in case the external communication interface includes a second communication interface connected to the external control unit, the MCU225 is configured to receive a second control instruction of the external control unit through the second communication interface.
In practical applications, the first communication interface may be, for example, a universal serial bus (Universal Serial Bus, USB) interface, and the second communication interface may be, for example, a BOX interface (an electrical signal interface), as shown in fig. 2. The control related instructions can be issued from outside whether the first control instruction or the second control instruction. Taking the control by the external control unit as an example, the control here may be the control of the high voltage generator 226, the signal gain control of the controllable amplifier 222, the amplitude bias control when outputting the voltage signal, or the like.
In order to further improve the imaging quality, in the process of actually acquiring the amplified voltage signal, the scanning frequency of the reference signal generator is required, which mainly considers that if the scanning frequency is higher and the signal acquisition frequency is smaller, the part of signals are missing, so that abnormal points exist in the imaging result, if the scanning frequency is lower and the signal acquisition frequency is higher, redundant acquisition of signals is caused, and if redundant deletion is not performed, the imaging result is poor. Based on this, in the embodiment of the present disclosure, synchronization setting of the frequency of occurrence of the signal in the signal acquisition device 33 and the selection bandwidth of the bandwidth selector 224 in the signal processing device 22 is required.
As shown in fig. 3, the signal acquisition device 33 in the embodiment of the present disclosure includes a signal generator 331 and a signal receiver 332. The signal generator 331 is configured to generate a scan waveform signal with a specific scan frequency, and drive a scan coil of the electron microscope to scan the electron beam based on the scan waveform signal; the signal processing device 22 is configured to perform, for the amplified voltage signal, selection of a signal bandwidth corresponding to a specific scanning frequency based on the bandwidth selector so as to facilitate the signal receiver 332 to receive the bandwidth-selected amplified voltage signal.
In practical application, the signal generator 331 sends a scanning waveform signal with a specific scanning frequency to a scanning control unit in the scanning electron microscope, the scanning control unit drives a scanning coil to scan with different frequencies (speeds), the corresponding electron beam and the sample to be tested react to generate a cathode fluorescence signal with a specific position and a corresponding speed, the light signal is received by the photoelectric conversion device 11, transmitted to the signal processing device 22, and then transmitted to a bandwidth selector in the signal processing device 22 to perform a scanning operation according to the corresponding scanning frequency
The corresponding bandwidth is selected (speed) and the generated voltage signal is received by the signal receiver 332 and output to a computer for imaging.
The control method of the cathode fluorescence imaging system provided by the embodiment of the disclosure is described in detail below. The execution subject of the control method here is generally a processing device having a certain computing power. In some possible implementations, the control method may be implemented by a processor calling computer readable instructions stored in a memory, i.e. the control method described above may be automatically executed based on a pre-stored program of instructions. In practical applications, the processing device may be controlled by a mechanical structure such as a dial switch to implement basic control of related circuits, for example, the control method is performed when corresponding circuit components are manually performed.
Referring to fig. 4, a flowchart of a control method of a cathode fluorescence imaging system according to an embodiment of the disclosure is shown, where the control method includes steps S401 to S402, where:
s401: obtaining a weak current signal obtained by photoelectric conversion treatment of a cathode fluorescence signal, wherein the cathode fluorescence signal is generated after excitation of an electron beam and a sample to be detected;
s402: and performing at least current conversion processing and signal amplification processing on the weak current signal to obtain a processed signal, wherein the processed signal is used for performing cathode fluorescence imaging.
After photoelectric conversion, the control method of the cathode fluorescence imaging system provided by the invention enables the weak current signal obtained by conversion to be more explicitly presented by performing signal processing operations including current conversion and signal amplification, so that the image quality of the imaged cathode fluorescence image is higher.
For the specific implementation procedure of the photoelectric conversion process, reference is made to the related description in the above embodiment, and the description is omitted here.
When at least the current conversion processing and the signal amplification processing are performed on the weak current signal, the following steps may be performed:
step one, performing current-voltage conversion processing on a current signal to obtain a voltage signal;
and step two, performing voltage signal amplification processing of controllable amplification times on the voltage signals to obtain amplified voltage signals, wherein the processed signals comprise the amplified voltage signals.
The specific implementation process of the current conversion process and the signal amplification process is referred to the related description in the above embodiment, and will not be repeated here.
In practical applications, the selection of the signal bandwidth corresponding to the specific scanning frequency may be performed on the amplified voltage signal by using the obtained specific scanning frequency under the electron beam scanning, and details thereof will not be described herein.
In the description of the present specification, reference to the terms "some possible embodiments," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiments or examples is included in at least one embodiment or example of the present disclosure. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the various embodiments or examples described in this specification and the features of the various embodiments or examples may be combined and combined by those skilled in the art without contradiction.
With respect to the method flow diagrams of the disclosed embodiments, certain operations are described as distinct steps performed in a certain order. Such a flowchart is illustrative and not limiting. Some steps described herein may be grouped together and performed in a single operation, may be partitioned into multiple sub-steps, and may be performed in an order different than that shown herein. The various steps illustrated in the flowcharts may be implemented in any manner by any circuit structure and/or tangible mechanism (e.g., by software running on a computer device, hardware (e.g., processor or chip implemented logic functions), etc., and/or any combination thereof).
It will be appreciated by those skilled in the art that in the above-described method of the specific embodiments, the written order of steps is not meant to imply a strict order of execution but rather should be construed according to the function and possibly inherent logic of the steps.
Based on the same inventive concept, the embodiment of the disclosure further provides a control device of the cathode fluorescence imaging system corresponding to the control method of the cathode fluorescence imaging system, and since the principle of solving the problem by the device in the embodiment of the disclosure is similar to that of the control method of the cathode fluorescence imaging system in the embodiment of the disclosure, the implementation of the device can refer to the implementation of the method, and the repetition is omitted.
Referring to fig. 5, a schematic diagram of a control device of a cathode fluorescence imaging system according to an embodiment of the disclosure is shown, where the device includes: an acquisition module 501 and a processing module 502; wherein,,
the acquisition module 501 is used for acquiring a weak current signal obtained by photoelectric conversion processing of a cathode fluorescence signal, wherein the cathode fluorescence signal is generated after excitation of an electron beam and a sample to be detected;
the processing module 502 is configured to perform at least current conversion processing and signal amplification processing on the weak current signal, so as to obtain a processed signal, where the processed signal is used for performing cathode fluorescence imaging.
In a possible implementation manner, the processing module 502 is specifically configured to perform at least a current conversion process and a signal amplification process on the weak current signal according to the following steps:
performing current-voltage conversion processing on the current signal to obtain a voltage signal;
and performing voltage signal amplification processing of controllable amplification times on the voltage signals to obtain amplified voltage signals, wherein the processed signals comprise the amplified voltage signals.
In a possible implementation manner, the processing module 502 is specifically configured to obtain the processed signal according to the following steps:
acquiring a specific scanning frequency under electron beam scanning;
the amplified voltage signal is selected to have a signal bandwidth corresponding to a specific scanning frequency.
It should be noted that, the apparatus in the embodiments of the present disclosure may implement each process of the foregoing embodiments of the method, and achieve the same effects and functions, which are not described herein again.
The embodiment of the disclosure further provides an electronic device, as shown in fig. 6, which is a schematic structural diagram of the electronic device provided by the embodiment of the disclosure, including: a processor 601, a memory 602, and a bus 603. The memory 602 stores machine-readable instructions executable by the processor 601 (e.g., execution instructions corresponding to the acquisition module 501 and the processing module 502 in the apparatus of fig. 5), and when the electronic device is running, the processor 601 communicates with the memory 602 through the bus 603, and the machine-readable instructions execute by the processor 601 as follows:
obtaining a weak current signal obtained by photoelectric conversion treatment of a cathode fluorescence signal, wherein the cathode fluorescence signal is generated after excitation of an electron beam and a sample to be detected;
and performing at least current conversion processing and signal amplification processing on the weak current signal to obtain a processed signal, wherein the processed signal is used for performing cathode fluorescence imaging.
The disclosed embodiments also provide a computer readable storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of the method of controlling a cathode fluorescence imaging system described in the above method embodiments. Wherein the storage medium may be a volatile or nonvolatile computer readable storage medium.
Embodiments of the present disclosure further provide a computer program product, where the computer program product carries a program code, where instructions included in the program code may be used to perform steps of a method for controlling a cathode fluorescence imaging system described in the foregoing method embodiments, and specifically reference may be made to the foregoing method embodiments, which are not described herein.
Wherein the above-mentioned computer program product may be realized in particular by means of hardware, software or a combination thereof. In an alternative embodiment, the computer program product is embodied as a computer storage medium, and in another alternative embodiment, the computer program product is embodied as a software product, such as a software development kit (Software Development Kit, SDK), or the like.
The various embodiments in this disclosure are described in a progressive manner, and identical and similar parts of the various embodiments are all referred to each other, and each embodiment is mainly described as different from other embodiments. In particular, for apparatus, devices and computer readable storage medium embodiments, the description thereof is simplified as it is substantially similar to the method embodiments, as relevant points may be found in part in the description of the method embodiments.
The apparatus, the device, and the computer readable storage medium provided in the embodiments of the present disclosure are in one-to-one correspondence with the methods, and therefore, the apparatus, the device, and the computer readable storage medium also have similar advantageous technical effects as the corresponding methods, and since the advantageous technical effects of the methods have been described in detail above, the advantageous technical effects of the apparatus, the device, and the computer readable storage medium are not repeated herein.
It will be apparent to those skilled in the art that embodiments of the present disclosure may be provided as a method, apparatus (device or system), or computer readable storage medium. Accordingly, the present disclosure may take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present disclosure may take the form of a computer-readable storage medium embodied in one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) having computer-usable program code embodied therein.
The present disclosure is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (devices or systems) and computer-readable storage media according to embodiments of the disclosure. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
In one typical configuration, a computing device includes one or more processors (CPUs), input/output interfaces, network interfaces, and memory.
The memory may include volatile memory in a computer-readable medium, random Access Memory (RAM) and/or nonvolatile memory, such as Read Only Memory (ROM) or flash memory (flash RAM). Memory is an example of computer-readable media.
Computer readable media, including both non-transitory and non-transitory, removable and non-removable media, may implement information storage by any method or technology. The information may be computer readable instructions, data structures, modules of a program, or other data. Examples of storage media for a computer include, but are not limited to, phase change memory (PRAM), static Random Access Memory (SRAM), dynamic Random Access Memory (DRAM), other types of Random Access Memory (RAM), read Only Memory (ROM), electrically Erasable Programmable Read Only Memory (EEPROM), flash memory or other memory technology, compact disc read only memory (CD-ROM), digital Versatile Discs (DVD) or other optical storage, magnetic cassettes, magnetic tape magnetic disk storage or other magnetic storage devices, or any other non-transmission medium, which can be used to store information that can be accessed by a computing device. Furthermore, although the operations of the methods of the present disclosure are depicted in the drawings in a particular order, this is not required to or suggested that these operations must be performed in this particular order or that all of the illustrated operations must be performed in order to achieve desirable results. Additionally or alternatively, certain steps may be omitted, multiple steps combined into one step to perform, and/or one step decomposed into multiple steps to perform.
While the spirit and principles of the present disclosure have been described with reference to several particular embodiments, it is to be understood that this disclosure is not limited to the particular embodiments disclosed nor does it imply that features in these aspects are not to be combined to benefit from this division, which is done for convenience of description only. The disclosure is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.
Claims (12)
1. A cathode fluorescence imaging system, comprising: the photoelectric conversion device, the signal processing device and the signal acquisition device are electrically connected in sequence;
the photoelectric conversion device is used for acquiring a cathode fluorescence signal generated after excitation of the electron beam and a sample to be detected, and performing photoelectric conversion treatment on the cathode fluorescence signal to obtain a weak current signal;
the signal processing device is used for performing at least current conversion processing and signal amplification processing on the weak current signal to obtain a processed signal;
the signal acquisition device is used for receiving the processed signal, and the processed signal is used for performing cathode fluorescence imaging to obtain a cathode fluorescence image.
2. The system of claim 1, wherein the signal processing device comprises a current converter and a controllable amplifier, the current converter being electrically connected to the controllable amplifier;
the current converter is used for carrying out current-voltage conversion processing on the weak current signal to obtain a voltage signal;
the controllable amplifier is used for amplifying the voltage signal with controllable amplification times to obtain an amplified voltage signal, and the processed signal comprises the amplified voltage signal.
3. The system of claim 2, wherein the amplified voltage signal comprises a set of amplified voltage sub-signals in the case where the cathode fluorescence signal comprises a set of cathode fluorescence sub-signals; the signal processing device further comprises a buffer, wherein the buffer is electrically connected with the controllable amplifier;
the buffer is used for buffering a group of amplified voltage sub-signals and outputting buffered voltage signals.
4. A system according to claim 2 or 3, wherein the signal processing means further comprises a bandwidth selector, the bandwidth selector being electrically connected to the controllable amplifier;
the bandwidth selector is used for performing bandwidth limitation on the amplified voltage signal based on synchronous operation between the generation frequency of the signal generator for generating the cathode fluorescent signal and the acquisition frequency of the signal acquisition device.
5. A system according to claim 2 or 3, wherein the signal processing device further comprises a micro control unit MCU, the MCU being electrically connected to the controllable amplifier;
and the MCU is used for directly controlling the controllable amplifier or controlling other devices in a linkage way through the controllable amplifier.
6. The system of claim 5, wherein the signal processing device further comprises a high voltage generator electrically connected to the MCU;
the high voltage generator is used for converting the voltage of the multichannel power supply system into a specific power supply voltage based on the control of the MCU, and the specific power supply voltage is used for supplying power to the photoelectric conversion device.
7. The system of claim 5, wherein the signal processing device further comprises an external communication interface, the external communication interface being electrically connected to the MCU.
8. The system of claim 7, wherein, in the case where the external communication interface includes a first communication interface connected to an external control hub, the MCU is configured to receive a first control instruction of the external control hub through the first communication interface;
in case the external communication interface comprises a second communication interface connected with an external control unit, the MCU is configured to receive a second control instruction of the external control unit through the second communication interface.
9. A system according to claim 2 or 3, wherein the signal acquisition means comprises a signal generator and a signal receiver;
the signal generator is used for generating a scanning waveform signal with a specific scanning frequency and driving a scanning coil of the electron microscope to scan the electron beam based on the scanning waveform signal;
the signal processing device is used for selecting a signal bandwidth corresponding to the specific scanning frequency for the amplified voltage signal based on a bandwidth selector;
the signal receiver is configured to receive the amplified voltage signal after bandwidth selection.
10. A method of controlling a cathode fluorescence imaging system, comprising:
obtaining a weak current signal obtained by photoelectric conversion treatment of a cathode fluorescence signal, wherein the cathode fluorescence signal is generated after excitation of an electron beam and a sample to be detected;
and performing at least current conversion processing and signal amplification processing on the weak current signal to obtain a processed signal, wherein the processed signal is used for performing cathode fluorescence imaging.
11. The method of claim 10, wherein said performing at least a current conversion process and a signal amplification process on said weak current signal comprises:
performing current-voltage conversion processing on the current signal to obtain a voltage signal;
and carrying out amplification processing on the voltage signal with controllable amplification times to obtain an amplified voltage signal, wherein the processed signal comprises the amplified voltage signal.
12. The method of claim 11, wherein the obtaining the processed signal comprises:
acquiring a specific scanning frequency under electron beam scanning;
and selecting a signal bandwidth corresponding to the specific scanning frequency according to the amplified voltage signal.
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