CN116445902A - Aluminum alloy polygon mirror processing method applied to rotary scanning optical system - Google Patents
Aluminum alloy polygon mirror processing method applied to rotary scanning optical system Download PDFInfo
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- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
- G02B5/0858—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising a single metallic layer with one or more dielectric layers
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Abstract
The invention provides a processing method of an aluminum alloy polygon mirror applied to a rotary scanning optical system, which relates to the technical field of aluminum alloy polygon mirror processing and comprises the following steps: s1, carrying out primary surface processing treatment on an aluminum alloy section; s2, performing primary oxidation and sealing treatment on the aluminum alloy section; s3, carrying out secondary surface processing treatment on the aluminum alloy profile; s4, carrying out surface detection on the aluminum alloy section subjected to secondary surface processing treatment, carrying out secondary sealing treatment on the aluminum alloy section with unqualified surface, and not carrying out secondary sealing treatment on the aluminum alloy section with qualified surface; s5, plating an optical reflection film on the aluminum alloy section bar; the invention is used for solving the problem of low plating quality of the reflecting film of the existing aluminum alloy polygon mirror.
Description
Technical Field
The invention relates to the technical field of aluminum alloy polygon mirror processing, in particular to an aluminum alloy polygon mirror processing method applied to a rotary scanning optical system.
Background
A polygon mirror, which is generally a regular polygon (for example, regular tetrahedron or regular hexahedron), is a core optical element in a scanning optical system, and is widely used in optical systems such as a laser printer, a scanner, and an automobile radar. Reflecting a light beam by a polygon mirror in a laser printer, and performing optical scanning by high-speed rotation of the polygon mirror, whereby the obtained scanning light is imaged on a surface of a rotating photosensitive drum to form an electrostatic latent image; in an automobile radar, the motor rotates to drive, the polygon mirror can reflect light rays emitted by the laser light source, the light rays are scanned to a subsequent beam expanding system and then hit the surface of a detected object, diffuse reflection light paths generated by the light rays on the detected object are returned to be received by the detector, and the distance of the detected object can be calculated by utilizing time difference.
There are four main technical solutions for manufacturing the current polygon mirror, namely a metal polygon coating solution, a plastic polygon coating solution, a prism polygon coating solution and a polygon mirror-attaching solution. The most mainstream technical scheme in the application field of the automotive radar is a scheme of adding a coating to a metal polyhedron, most of the adopted metal is hard aluminum alloy, such as 6-series aluminum alloy 6061T6, and the scheme has the advantages that the aluminum alloy has two characteristics of light weight and flexibility, so that the scheme is suitable for manufacturing a large-size rotating mirror and is used for high-speed rotation; the plastic polyhedron coating scheme is limited in application because of slightly lower material strength and surface machining precision; the prism polyhedron coating scheme is limited in application because of slightly poor material strength and difficult structural design serving the rotation purpose; the polyhedral mirror design requires extremely high assembly accuracy and is limited in application because of low temperature stability and reliability.
Even the scheme of manufacturing a metal polyhedron by using aluminum alloy is mainstream at present, the special technical problems or difficulties exist, firstly, the aluminum alloy has low hardness, when the metal surface is milled to a mirror surface with the roughness of 10nm, the surface is scratched even if a cotton swab is bumped, so that the protection, packaging, transportation and cleaning treatment of the polished surface are troublesome; secondly, the aluminum alloy processing surface is extremely easy to oxidize and fog before the follow-up coating process is implemented, and a plurality of tiny oxidation holes are formed on the surface to influence the surface flatness; thirdly, the surface of the aluminum alloy is not easy to be plated with a reflecting film due to the existence of surface oxidation with uncontrollable degree, or the reliability of the reflecting film is low; fourth, the existing aluminum alloy polygon mirror is formed by engraving and processing an integral solid aluminum block, and the hardness and quality of the selected aluminum alloy base material are low, so that the aluminum alloy polygon mirror is easy to wear and deform in the processing process, and the reliability of the final coating film is reduced; meanwhile, in the prior art, a method for coating a polygon mirror is disclosed, for example, in Chinese patent with application publication number of CN110699653A, a metal film preparation device and a method suitable for a polygon mirror are disclosed, the method is designed for better coating a polygon mirror, and the method can be suitable for various types of polygon mirrors by providing a complex target base relative motion path; also disclosed is a coating method for a metal substrate, for example, in Chinese patent application publication No. CN114196924A, wherein a dielectric spacer layer is added between a copper substrate and an aluminum film layer to prevent a copper-aluminum alloy from being formed between the copper substrate and the aluminum film, so that high reflectivity of the aluminum mirror on the copper substrate in a vacuum ultraviolet band is realized; for example, in chinese patent application publication No. CN114460560a, a patch type polygon mirror scanning system and a method for manufacturing the same are disclosed, in which stability and precision of manufacturing are improved by structural improvement in the manufacturing process of the polygon mirror; in the above published application documents, the improvement scheme for the coating stage is not capable of solving the four technical problems of the proposed scheme for manufacturing the metal polyhedron by using the aluminum alloy.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention is used for solving the problem of low plating quality of the reflecting film of the existing aluminum alloy polygon mirror.
In order to achieve the above object, the present invention provides an aluminum alloy polygon mirror processing method applied to a rotary scanning optical system, comprising the steps of:
s1, carrying out primary surface processing treatment on an aluminum alloy section;
s2, performing primary oxidation and sealing treatment on the aluminum alloy section;
s3, carrying out secondary surface processing treatment on the aluminum alloy profile;
s4, carrying out surface detection on the aluminum alloy section subjected to secondary surface processing treatment, carrying out secondary sealing treatment on the aluminum alloy section with unqualified surface, and not carrying out secondary sealing treatment on the aluminum alloy section with qualified surface;
s5, plating an optical reflection film on the aluminum alloy section.
Further, step S1 includes: performing primary polishing treatment on the surface of the aluminum alloy section through rough polishing, and reserving the size allowance thickness on the polished surface; and enabling the surface type precision after the first surface machining to reach PV smaller than a first precision threshold value, and enabling the roughness to reach Ra smaller than a first roughness threshold value.
Further, step S2 includes: performing primary oxidation on the aluminum alloy section subjected to primary surface processing, wherein a porous oxide layer is generated by at least one method of sulfuric acid, oxalic acid and chromic acid in the primary oxidation process;
and (3) performing primary sealing treatment on the aluminum alloy profile subjected to primary oxidation, wherein at least one method selected from hydration, nickel salt and dichromate is used for sealing the porous oxide layer in the primary sealing process.
Further, step S3 includes: performing secondary polishing treatment on the surface of the aluminum alloy section after primary oxidation and sealing by fine polishing to remove the thickness of the dimensional allowance; and enabling the surface type precision after the second surface machining to reach PV smaller than a second precision threshold, and enabling the roughness to reach Ra smaller than a second roughness threshold, wherein the second precision threshold is smaller than the first precision threshold, and the second roughness threshold is smaller than the first roughness threshold.
Further, step S4 includes: and (3) carrying out surface detection on the aluminum alloy profile subjected to the second surface processing, carrying out second sealing treatment on the aluminum alloy profile with unqualified surface by using at least one method selected from hydration, nickel salt and dichromate, and carrying out no second sealing treatment on the aluminum alloy profile with unqualified surface.
Further, the surface detection of the aluminum alloy section after the secondary surface processing treatment comprises the following steps: step S41, after the aluminum alloy section is subjected to secondary surface processing, obtaining detection data of the surface of the aluminum alloy section;
step S42, detecting data of the surface of the aluminum alloy section comprises surface high point height value data and surface low point height value data;
step S43, obtaining a first number of surface high point height values from the surface high point height value data, and obtaining a first number of surface low point height values from the surface low point height value data;
step S44, obtaining the maximum value and the minimum value in the first number of surface high point height values, setting the maximum value and the minimum value as high point maximum values and high point minimum values, subtracting the high point minimum values from the high point maximum values to obtain high point difference values, dividing the high point difference values by the first division number to obtain high point division number values, taking integer positions of the high point division number values as high point division units, establishing a high point distribution histogram for the first number of surface high point height values, taking the abscissa of the high point distribution histogram as the height values and dividing according to the high point division units, taking the ordinate of the high point distribution histogram as the high point distribution number, selecting a group of surface high point height values with the maximum corresponding high point distribution number in the high point division units as surface high point height reference values, calculating the average value of the plurality of surface high point height reference values, and setting the average value as the surface high point height average value;
step S45, obtaining the maximum value and the minimum value in the first number of surface low point height values, setting the maximum value and the minimum value as low point maximum values and low point minimum values, subtracting the minimum value from the low point maximum values to obtain low point difference values, dividing the low point difference values by the first division number to obtain low point division number values, taking integer positions of the low point division number values as low point division units, establishing a low point distribution histogram for the first number of surface low point height values, taking the abscissa of the low point distribution histogram as the height values and dividing according to the low point division units, taking the ordinate of the low point distribution histogram as the low point distribution number, selecting a group of surface low point height values with the maximum corresponding low point distribution number in the low point division units as surface low point height reference values, calculating the average value of the plurality of surface low point height reference values, and setting the average value as the surface low point height average value;
step S46, eliminating the surface high point height values corresponding to the two groups of high point dividing units with the highest height values in the high point distribution histogram, setting the surface high point height values in the rest first quantity as surface high point height fluctuation calculation values, and solving standard deviation for a plurality of surface high point height fluctuation calculation values to obtain surface high point standard deviation; removing surface low point height values corresponding to two groups of low point dividing units with lowest height values in the low point distribution histogram, setting the surface low point height values in the rest first quantity as surface low point height fluctuation calculation values, and solving standard deviation for a plurality of surface low point height fluctuation calculation values to obtain surface low point standard deviation;
step S47, subtracting the surface low point height average value from the surface high point height average value to obtain a surface height average difference value; adding the standard deviation of the surface high points to the standard deviation of the surface low points to obtain the standard deviation of the surface fluctuation; multiplying the surface fluctuation standard deviation by the surface height average difference value to obtain a surface fluctuation reference value;
and S48, when the surface fluctuation reference value is larger than the first surface fluctuation threshold value, marking the aluminum alloy section after the second surface processing as a surface unqualified section, and when the surface fluctuation reference value is smaller than or equal to the first surface fluctuation threshold value, marking the aluminum alloy section after the second surface processing as a surface qualified section.
Further, step S5 includes: the plated optical reflection film layer comprises at least one of a metal film, a metal film and a plated dielectric film.
Further, the optical reflection film layer plated in the step S5 includes a plurality of layers, wherein the film material of the film layer of the first layer is alumina.
Further, the manufacturing process of the aluminum alloy section comprises the following steps: and selecting an aluminum alloy material with a regular polygon cross section generated by drawing as a base material, and upsetting the base material to obtain the aluminum alloy profile.
Further, a central hole for installation and a symmetrical hole for weight reduction are formed in the cross section of the aluminum alloy section.
Compared with the polished reflecting surface obtained by the existing aluminum alloy polygon mirror, the method provided by the invention has at least the following beneficial effects:
1. the active surface oxidation treatment and sealing measures are added, so that the surface hardness is high, the damage is not easy, the corrosion is resistant, and the polished surface is free of the trouble of difficult cleaning, difficult packaging and difficult transferring before the coating process is implemented.
2. Compared with the polished surface of the aluminum alloy which is not subjected to the oxidation sealing treatment, the surface after the oxidation sealing is compact and solid, and the problems of easy moisture absorption and easy pollutant absorption caused by micropores in the surface of the material are avoided.
3. Because the surface of the alumina polishing layer is coated with the film, the film coating process is easy to realize, the film layer is firm, and the film layer is resistant to damage.
4. In step S4, the aluminum alloy profile after the secondary surface processing is subjected to surface detection, so that the aluminum alloy profile can be divided into an aluminum alloy profile with qualified surface and an aluminum alloy profile with unqualified surface, the aluminum alloy profile with unqualified surface is subjected to secondary sealing treatment, and the aluminum alloy profile with qualified surface is not subjected to secondary sealing treatment, so that the processing cost can be reduced, and the processing efficiency can be improved.
Compared with the blank selection processed by the existing aluminum alloy polygon mirror, the method provided by the invention has the following beneficial effects:
1. the aluminum alloy section with the regular polygon cross section generated by drawing is used, so that the chip amount of peripheral polygonal contour machining and middle part routing machining is reduced, and the cost is reduced.
2. The aluminum alloy section is subjected to upsetting treatment in advance before chip machining, so that grains can be thinned, anisotropy of tissues is reduced, compactness of the tissues is improved, and tensile strength of the material is improved.
3. The S3 step of processing is carried out on the oxide layer on the surface of the inner column of the central hole, and the obtained finished inner column surface is an alumina surface, so that the inner column is high in hardness, not easy to wear and convenient to install and use.
Additional aspects of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a flow chart of the steps of the method of the present invention;
FIG. 2 is a cross-sectional view of an aluminum alloy profile of the present invention;
FIG. 3 is a high point distribution histogram of the present invention;
fig. 4 is a low point distribution histogram of the present invention.
Detailed Description
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the invention. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the present invention.
Embodiments of the invention and features of the embodiments may be combined with each other without conflict.
Referring to fig. 1, the present invention provides a processing method of an aluminum alloy polygon mirror applied to a rotary scanning optical system, which solves the problems of improving the surface quality, and importantly, improving the surface cleanliness before plating, because the surface after oxidation and sealing can be used for cleaning ash with force, and the newly processed aluminum surface can hardly be touched; the problem of oxidation holes on the surface before plating is solved, and because the surface after sealing is complete, a large number of oxidation holes are formed on the surface of the newly processed aluminum which is not sealed; specifically, the processing method of the aluminum alloy polygon mirror applied to the rotary scanning optical system comprises the following steps:
s1, carrying out primary surface processing treatment on an aluminum alloy section; performing primary polishing treatment on the surface of the aluminum alloy section through rough polishing, and reserving the size allowance thickness on the polished surface; enabling the surface type precision after the first surface machining to reach that PV is smaller than a first precision threshold value, wherein the first precision threshold value is set to be 2 mu m, the roughness reaches that Ra is smaller than a first roughness threshold value, and the first roughness threshold value is set to be 100nm; in specific implementation, the method for oxidizing and sealing the surface of the aluminum alloy is a lot, belongs to the prior art, and is applied to the surface processing of the rotary reflecting polygon mirror although the oxidizing and sealing technology is in continuous development.
The prior art has various problems in processing aluminum alloy polygon mirrors due to the lack of active oxidation and sealing measures for the polished surface. Under the condition that active oxidation sealing is not performed, the polished surface is extremely easy to oxidize, but the thickness of the oxide layer is not controlled, and the oxide layer is microscopically porous loose structure, so that the hardness is low and the loose structure is easy to scratch, and the loose structure is easy to absorb water and other pollutants, so that the plated reflecting film is not hard and not firm due to the loose structure.
The application adds active surface oxidation treatment and sealing measures to subdivide the polygon mirror reflecting surface processing into 5 steps, namely, first surface processing (rough polishing), first oxidation and sealing, second surface processing (finish polishing), second sealing (or not sealing) and plating an optical reflecting film.
Step S1, rough polishing is carried out on a processed surface by a machine tool to a mirror surface, and the subsequent oxidation sealing is carried out on the basis of a certain mirror surface, so that requirements are provided for rough polishing processing precision, for example, the surface type precision after surface processing reaches PV <2 mu m, the roughness reaches Ra <100nm, and the step S1 also leaves enough required dimensional processing allowance for the subsequent step S3, and obviously, the requirements for rough processing surface type precision and roughness precision can be different for the multi-face mirrors with different sizes, the PV <2 mu m and Ra <100nm are the requirements provided for the laser radar multi-face mirrors with common dimensions, and the mirror surface with small size can be relatively easy to achieve higher indexes.
S2, performing primary oxidation and sealing treatment on the aluminum alloy section; performing primary oxidation on the aluminum alloy section subjected to primary surface processing, wherein a porous oxide layer is generated by at least one method of sulfuric acid, oxalic acid and chromic acid in the primary oxidation process, so that the thickness of the porous oxide layer is 10 mu m;
performing primary sealing treatment on the aluminum alloy section subjected to primary oxidation, wherein at least one method selected from hydration, nickel salt and dichromate is used for sealing the porous oxide layer in the primary sealing process; step S2 is to actively oxidize and seal the surface obtained in step S1.
The aluminum alloy oxidation method is many, for example, sulfuric acid, oxalic acid or chromic acid is used for oxidation to generate a porous oxide layer, the thickness of the natural color oxidation is usually 5 mu m to 20 mu m, the thickness of the hard oxidation can reach 40 mu m to 100 mu m, and the thickness of the oxide layer is not too thick because the subsequent step S5 on the surface of the polygon mirror is also required to be plated with a reflecting film. There are also many methods for sealing porous oxide layers of aluminum alloys, for example, hydration (such as boiling water and steam vapor), nickel salt (such as nickel fluoride and nickel acetate), dichromate, etc., which have different mechanisms, and the micropores of the oxide layer are swelled or deposited and buried to realize sealing. The specific oxidation sealing method is not repeated, and it should be noted that the quality of the polygon mirror is affected by the defect caused by poor sealing, for example, poor wear resistance and poor corrosion resistance may be caused by insufficient sealing, and cracking and fatigue resistance decrease of the sealing layer may be caused by excessive sealing.
S3, carrying out secondary surface processing treatment on the aluminum alloy profile; performing secondary polishing treatment on the surface of the aluminum alloy section after primary oxidation and sealing by fine polishing to remove the thickness of the dimensional allowance; and (3) enabling the surface type precision after the second surface machining to reach PV to be smaller than a second precision threshold, setting the second precision threshold to be 1 mu m, enabling the roughness to reach Ra to be smaller than a second roughness threshold, wherein the second precision threshold is smaller than the first precision threshold, the second roughness threshold is smaller than the first roughness threshold, setting the second roughness threshold to be 50nm, and in the specific implementation, performing finish polishing on the closed aluminum oxide 'compact' surface to remove the dimensional allowance so as to obtain a new aluminum oxide surface, wherein the finish polishing machining requirement is determined according to the surface requirement of a finished product of the polygon mirror, the surface type precision is generally up to PV <1 mu m, for example PV=0.5 mu m, and the roughness reaches Ra <50nm, for example Ra=20 nm. Since the finish polishing is performed on the oxide layer, the cutting thickness is not deep, for example 1-2 μm.
S4, carrying out surface detection on the aluminum alloy section subjected to secondary surface processing treatment, carrying out secondary sealing treatment on the aluminum alloy section with unqualified surface, and not carrying out secondary sealing treatment on the aluminum alloy section with qualified surface; carrying out surface detection on the aluminum alloy section subjected to the second surface processing, and marking the aluminum alloy section subjected to the second surface processing as a surface qualified section and a surface unqualified section according to detection results;
and (3) performing secondary sealing treatment on the aluminum alloy section marked as the surface unqualified section by using at least one method of hydration, nickel salt and dichromate, and not performing secondary sealing treatment on the aluminum alloy section marked as the surface unqualified section, wherein micro holes which are not well sealed in the step S2 or new micro holes which are formed in the step S3 can appear on the surface after the step S3 of finish polishing processing, and the second sealing is performed in the step S4, so that the aluminum oxide on the surface is more compact. The second sealing can still adopt hydration, nickel salt, dichromate and other methods, wherein the simple method is boiling water bath. If the finish polishing surface in the step S3 meets the requirement or is satisfied enough, the step can be omitted and the second sealing is not performed, so that the surface detection of the aluminum alloy section after the secondary surface processing treatment is required;
referring to fig. 3 and 4, specifically, the surface inspection of the aluminum alloy section after the secondary surface treatment includes the following steps: step S41, after the aluminum alloy section is subjected to secondary surface processing, obtaining detection data of the surface of the aluminum alloy section;
step S42, detecting data of the surface of the aluminum alloy section comprises surface high point height value data and surface low point height value data;
step S43, obtaining a first number of surface high point height values from the surface high point height value data, and obtaining a first number of surface low point height values from the surface low point height value data;
step S44, obtaining the maximum value and the minimum value in the first number of surface high point height values, setting the maximum value and the minimum value as high point maximum values and high point minimum values, subtracting the high point minimum values from the high point maximum values to obtain high point difference values, dividing the high point difference values by the first division number to obtain high point division number values, taking integer positions of the high point division number values as high point division units, establishing a high point distribution histogram for the first number of surface high point height values, taking the abscissa of the high point distribution histogram as the height value and dividing the high point distribution histogram according to the high point division units, taking the ordinate of the high point distribution histogram as the high point distribution number, selecting a group of surface high point height values with the maximum corresponding high point distribution number in the high point division units as surface high point height reference values, calculating the average value of the high point height reference values of a plurality of surfaces, and setting the average value as the surface high point height value, wherein in FIG. 3, the ordinate SGf is the high point distribution number, the abscissa GD is the height value, and the height value unit is [ mu ] m, and the high point division unit is 0.2 [ mu ] m;
step S45, obtaining the maximum value and the minimum value in the first number of surface low point height values, setting the maximum value and the minimum value as low point maximum values and low point minimum values, subtracting the minimum value from the low point maximum values to obtain low point difference values, dividing the low point difference values by the first division number to obtain low point division number values, taking integer positions of the low point division number values as low point division units, establishing a low point distribution histogram for the first number of surface low point height values, taking the abscissa of the low point distribution histogram as the height value and dividing the low point distribution histogram according to the low point division units, taking the ordinate of the low point distribution histogram as the low point distribution number, selecting a group of surface low point height values with the maximum corresponding low point distribution number in the low point division units as surface low point height reference values, calculating the average value of the plurality of surface low point height reference values, setting the surface low point height average value as the low point height value, and taking the ordinate Sdf as the low point distribution number, taking the abscissa GD as the height value, and taking the unit of the height value as [ mu ] m, and taking the low point division unit as 0.1 [ mu ] m;
step S46, eliminating the surface high point height values corresponding to the two groups of high point dividing units with the highest height values in the high point distribution histogram, setting the surface high point height values in the rest first quantity as surface high point height fluctuation calculation values, and solving standard deviation for a plurality of surface high point height fluctuation calculation values to obtain surface high point standard deviation; removing surface low point height values corresponding to two groups of low point dividing units with lowest height values in the low point distribution histogram, setting the surface low point height values in the rest first quantity as surface low point height fluctuation calculation values, and solving standard deviation for a plurality of surface low point height fluctuation calculation values to obtain surface low point standard deviation;
step S47, subtracting the surface low point height average value from the surface high point height average value to obtain a surface height average difference value; adding the standard deviation of the surface high points to the standard deviation of the surface low points to obtain the standard deviation of the surface fluctuation; multiplying the surface fluctuation standard deviation by the surface height average difference value to obtain a surface fluctuation reference value;
step S48, when the surface fluctuation reference value is larger than the first surface fluctuation threshold value, marking the aluminum alloy section after the second surface processing as a surface disqualified section, and when the surface fluctuation reference value is smaller than or equal to the first surface fluctuation threshold value, marking the aluminum alloy section after the second surface processing as a surface qualified section, wherein the average difference value of the surface heights is smaller than 1 mu m under the normal condition, and the standard deviation of the calculated surface fluctuation is smaller than 0.5, so that the first surface fluctuation threshold value is set to be 0.5; the first number is set to 30; setting the first division number to 8 can result in 8 sets of high-point division units or 8 sets of low-point division units.
S5, plating an optical reflection film on the aluminum alloy section, wherein the plated optical reflection film layer comprises at least one of a metal film, a plating dielectric film and a full dielectric film, the plated optical reflection film layer comprises a plurality of layers, wherein the film material of the film layer of the first layer is alumina, the step S5 is to plate the reflection film on the polished alumina layer formed in the previous step, the effect of coating film on the alumina layer is completely different from that of coating film on the metal aluminum, at the moment, the alumina layer is compact and has no impurity, has strong binding force with the film material, preferably, when the reflective film is coated, the first prime film layer is formed of alumina, which is the same material as the alumina coated on the alumina. The prior art is to continue plating metal film, metal film and plating dielectric film or full dielectric film on the bottom film layer.
Referring to the obtaining of the shape of the aluminum alloy section, referring to fig. 2, the cross section of the aluminum alloy section generated by drawing is a regular quadrangle (of course, other regular polygons can also be adopted), the outline shape of the peripheral part is a rough regular quadrangle with allowance, and the processing chip amount of the reflecting surface is smaller than that of the non-drawn section; in addition, the profile can be pulled out together with a hole for assembly positioning in the center and a hole for weight reduction in the periphery, wherein the hole for assembly positioning and the hole for weight reduction in the periphery are respectively set as a central hole 1 and a symmetrical hole 2, and the cylindrical inner diameter of the central hole 1 is provided with machining allowance, so that the cutting amount of the routing processing required by the inside of the polygon mirror is smaller than that of the non-drawn profile.
The aluminum alloy section produced by drawing can be subjected to upsetting treatment in advance before chip processing, and the aluminum alloy section is subjected to upsetting treatment, so that grains can be refined, the anisotropy of tissues is reduced, the compactness of the tissues is improved, and the tensile strength of the material is improved. The upsetting process of the aluminum alloy section belongs to the prior art, and the upsetting process is not described in detail in the application, and can be seen in the study of the tissue evolution and the mechanical property of the aluminum alloy in the upsetting and extrusion compounding process (2019 in Smart City application, no. 008) of repeated upsetting 6013-type aluminum alloy (rare metal material and engineering, no. 43, no. 11).
The inner column surface of the central hole shown in fig. 2 can be a direct metal aluminum surface, or an aluminum oxide surface obtained through the steps of S1 rough machining, S2 first oxidation sealing, S3 finish machining and S4 second sealing, and if the aluminum oxide surface is a compact aluminum oxide surface after oxidation sealing, the hardness is high, the abrasion is not easy, and the subsequent installation and use are convenient.
The method for carrying out active oxidation and sealing during the processing of the reflecting surface of the polygon mirror and the method for manufacturing the polygon mirror by drawing the aluminum alloy section are provided by the invention, and other variants can be made by the person skilled in the art without creative labor, and the protection scope of the invention is defined by the claims.
The above examples are only specific embodiments of the present invention, and are not intended to limit the scope of the present invention, but it should be understood by those skilled in the art that the present invention is not limited thereto, and that the present invention is described in detail with reference to the foregoing examples: any person skilled in the art may modify or easily conceive of the technical solution described in the foregoing embodiments, or perform equivalent substitution of some of the technical features, while remaining within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention, and are intended to be included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (8)
1. An aluminum alloy polygon mirror processing method applied to a rotary scanning optical system is characterized by comprising the following steps:
s1, carrying out primary surface processing treatment on an aluminum alloy section;
s2, performing primary oxidation and sealing treatment on the aluminum alloy section;
s3, carrying out secondary surface processing treatment on the aluminum alloy profile;
s4, carrying out surface detection on the aluminum alloy section subjected to secondary surface processing treatment, carrying out secondary sealing treatment on the aluminum alloy section with unqualified surface, and not carrying out secondary sealing treatment on the aluminum alloy section with qualified surface;
s5, plating an optical reflection film on the aluminum alloy section bar treated in the step S4;
the step S1 comprises the following steps: performing primary polishing treatment on the surface of the aluminum alloy section through rough polishing, and reserving the size allowance thickness on the polished surface; enabling the surface type precision after the first surface machining to reach that PV is smaller than a first precision threshold value, and enabling the roughness to reach that Ra is smaller than a first roughness threshold value;
the step S3 comprises the following steps: performing secondary polishing treatment on the surface of the aluminum alloy section after primary oxidation and sealing by fine polishing to remove the thickness of the dimensional allowance; and enabling the surface type precision after the second surface machining to reach PV smaller than a second precision threshold, and enabling the roughness to reach Ra smaller than a second roughness threshold, wherein the second precision threshold is smaller than the first precision threshold, and the second roughness threshold is smaller than the first roughness threshold.
2. The method for processing an aluminum alloy polygon mirror applied to a rotary scanning optical system according to claim 1, wherein step S2 includes: performing primary oxidation on the aluminum alloy section subjected to primary surface processing, wherein a porous oxide layer is generated by at least one method of sulfuric acid, oxalic acid and chromic acid in the primary oxidation process;
and (3) performing primary sealing treatment on the aluminum alloy profile subjected to primary oxidation, wherein at least one method selected from hydration, nickel salt and dichromate is used for sealing the porous oxide layer in the primary sealing process.
3. The method for processing an aluminum alloy polygon mirror applied to a rotary scanning optical system according to claim 2, wherein step S4 includes: and (3) carrying out surface detection on the aluminum alloy profile subjected to the second surface processing, carrying out second sealing treatment on the aluminum alloy profile with unqualified surface by using at least one method selected from hydration, nickel salt and dichromate, and carrying out no second sealing treatment on the aluminum alloy profile with unqualified surface.
4. The method for processing an aluminum alloy polygon mirror applied to a rotary scanning optical system according to claim 3, wherein the surface inspection of the aluminum alloy profile after the secondary surface processing treatment comprises the steps of: step S41, after the aluminum alloy section is subjected to secondary surface processing, obtaining detection data of the surface of the aluminum alloy section;
step S42, detecting data of the surface of the aluminum alloy section comprises surface high point height value data and surface low point height value data;
step S43, obtaining a first number of surface high point height values from the surface high point height value data, and obtaining a first number of surface low point height values from the surface low point height value data;
step S44, obtaining the maximum value and the minimum value in the first number of surface high point height values, setting the maximum value and the minimum value as high point maximum values and high point minimum values, subtracting the high point minimum values from the high point maximum values to obtain high point difference values, dividing the high point difference values by the first division number to obtain high point division number values, taking integer positions of the high point division number values as high point division units, establishing a high point distribution histogram for the first number of surface high point height values, taking the abscissa of the high point distribution histogram as the height values and dividing according to the high point division units, taking the ordinate of the high point distribution histogram as the high point distribution number, selecting a group of surface high point height values with the maximum corresponding high point distribution number in the high point division units as surface high point height reference values, calculating the average value of the plurality of surface high point height reference values, and setting the average value as the surface high point height average value;
step S45, obtaining the maximum value and the minimum value in the first number of surface low point height values, setting the maximum value and the minimum value as low point maximum values and low point minimum values, subtracting the minimum value from the low point maximum values to obtain low point difference values, dividing the low point difference values by the first division number to obtain low point division number values, taking integer positions of the low point division number values as low point division units, establishing a low point distribution histogram for the first number of surface low point height values, taking the abscissa of the low point distribution histogram as the height values and dividing according to the low point division units, taking the ordinate of the low point distribution histogram as the low point distribution number, selecting a group of surface low point height values with the maximum corresponding low point distribution number in the low point division units as surface low point height reference values, calculating the average value of the plurality of surface low point height reference values, and setting the average value as the surface low point height average value;
step S46, eliminating the surface high point height values corresponding to the two groups of high point dividing units with the highest height values in the high point distribution histogram, setting the surface high point height values in the rest first quantity as surface high point height fluctuation calculation values, and solving standard deviation for a plurality of surface high point height fluctuation calculation values to obtain surface high point standard deviation; removing surface low point height values corresponding to two groups of low point dividing units with lowest height values in the low point distribution histogram, setting the surface low point height values in the rest first quantity as surface low point height fluctuation calculation values, and solving standard deviation for a plurality of surface low point height fluctuation calculation values to obtain surface low point standard deviation;
step S47, subtracting the surface low point height average value from the surface high point height average value to obtain a surface height average difference value; adding the standard deviation of the surface high points to the standard deviation of the surface low points to obtain the standard deviation of the surface fluctuation; multiplying the surface fluctuation standard deviation by the surface height average difference value to obtain a surface fluctuation reference value;
and S48, when the surface fluctuation reference value is larger than the first surface fluctuation threshold value, marking the aluminum alloy section after the second surface processing as a surface unqualified section, and when the surface fluctuation reference value is smaller than or equal to the first surface fluctuation threshold value, marking the aluminum alloy section after the second surface processing as a surface qualified section.
5. The method for processing an aluminum alloy polygon mirror applied to a rotary scanning optical system according to claim 1, wherein step S5 includes: the plated optical reflection film layer comprises at least one of a metal film, a metal film and a plated dielectric film.
6. The method of claim 5, wherein the optical reflection film plated in step S5 comprises a plurality of layers, and the film material of the first layer is aluminum oxide.
7. The method for processing an aluminum alloy polygon mirror applied to a rotary scanning optical system according to claim 1, wherein the manufacturing process of the aluminum alloy profile comprises: and selecting an aluminum alloy material with a regular polygon cross section generated by drawing as a base material, and upsetting the base material to obtain the aluminum alloy profile.
8. The method for processing the aluminum alloy polygon mirror applied to the rotary scanning optical system according to claim 7, wherein a central hole for installation and a symmetrical hole for weight reduction are formed in the cross section of the aluminum alloy profile.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5919561A (en) * | 1996-08-15 | 1999-07-06 | Alusuisse Technology & Management, Ltd. | Reflector with resistant surface |
| CN101608307A (en) * | 2008-06-04 | 2009-12-23 | 梅西耶-布加蒂公司 | A kind of surface treatment method of the mechanical component of making by high-strength steel, and the tightness system that makes by described method |
| CN109719573A (en) * | 2018-12-13 | 2019-05-07 | 中国科学院上海光学精密机械研究所 | The processing method of axial cone mirror |
| CN114182226A (en) * | 2021-10-22 | 2022-03-15 | 南京理工大学 | Medium reflector type control method of ion source auxiliary coating based on precompensation |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5919561A (en) * | 1996-08-15 | 1999-07-06 | Alusuisse Technology & Management, Ltd. | Reflector with resistant surface |
| CN101608307A (en) * | 2008-06-04 | 2009-12-23 | 梅西耶-布加蒂公司 | A kind of surface treatment method of the mechanical component of making by high-strength steel, and the tightness system that makes by described method |
| CN109719573A (en) * | 2018-12-13 | 2019-05-07 | 中国科学院上海光学精密机械研究所 | The processing method of axial cone mirror |
| CN114182226A (en) * | 2021-10-22 | 2022-03-15 | 南京理工大学 | Medium reflector type control method of ion source auxiliary coating based on precompensation |
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