CN116442019A - Grinding device - Google Patents

Abstract

The invention provides a grinding device for grinding a graphite crucible, which includes a support base, a rotating assembly, a lifting assembly and an adsorption assembly; the rotating assembly is used to drive the graphite crucible to rotate; the lifting assembly is used to drive the adsorption assembly to rise and fall; the adsorption assembly includes seat and suction cup, the suction surface of the suction cup is provided with a plurality of adsorption holes, the suction seat is provided with a negative pressure interface, the negative pressure interface is connected to a plurality of adsorption holes, and the negative pressure interface is used to connect a negative pressure machine to form a vacuum in the adsorption hole. Negative pressure. Through the negative pressure in multiple adsorption holes, the grinding sheet can be adsorbed on the adsorption surface to realize the fixing of the grinding sheet, and the installation is simple and fast; the grinding sheet moves vertically under the drive of the lifting assembly, so that it can be close to or away from the rotating assembly Move on the graphite crucible. When the grinding sheet is in contact with the graphite crucible, the rotating component drives the graphite crucible to rotate, and the graphite crucible can be ground, which can effectively save manpower and improve production efficiency.

Description

grinding device

technical field

The invention relates to the technical field of silicon carbide production, in particular to a grinding device.

Background technique

As a third-generation wide-bandgap semiconductor material, silicon carbide has the characteristics of high thermal conductivity, high breakdown electric field, and high radiation resistance. Because 4H-SiC has more excellent electrical properties in many crystal forms, it meets the needs of today's technological development for substrate materials such as high-power and radiation-resistant devices. At present, the industrial production of silicon carbide single crystal growth method is mainly physical vapor transport method (Physical Vapor Transport, referred to as PVT).

In the silicon carbide growth process based on the physical vapor transport method, the quality of the graphite crucible directly determines the growth quality of the crystal. Since the PVT crystal growth method has precise size requirements for graphite crucibles, and the production size of graphite parts will have certain errors, it is necessary to polish the graphite crucible according to the requirements of the crystal growth furnace. At present, the shaping of graphite crucibles is mostly done manually. However, manual grinding is often difficult to meet the flatness requirements, and requires continuous rework, which greatly wastes manpower and material resources and reduces production efficiency.

Contents of the invention

The invention provides a grinding device, which can save manpower and improve production efficiency.

The invention provides a grinding device for grinding a graphite crucible, including a support base, a rotating component, a lifting component and an adsorption component;

The rotating assembly is arranged on the support base for driving the graphite crucible to rotate;

The lifting component is arranged on the support seat and connected to the adsorption component, and is used to drive the adsorption component up and down;

The adsorption assembly is used to absorb the grinding sheet and is arranged opposite to the rotating assembly. It includes an adsorption seat and a suction cup. The adsorption seat is connected to the lifting assembly. One side; the suction cup has a suction surface facing the rotating assembly, a plurality of suction holes are provided on the suction surface, a negative pressure port is provided on the suction seat, and the negative pressure port is connected to a plurality of the The adsorption hole, the negative pressure interface is used to connect a negative pressure machine to form a negative pressure in the adsorption hole, so that the abrasive sheet is adsorbed on the adsorption surface.

Wherein, the rotating assembly includes a rotating base and a rotating motor, the rotating base is rotatably connected to the support base, and the rotating base is provided with a fastener for fixing the graphite crucible; the rotating motor is fixed on the supporting base, And it is transmission connected to the rotating base to drive the rotating base to rotate.

Wherein, the support seat includes a base and a column fixedly connected, the rotating assembly is arranged on the base, the column is vertically fixed on the base, and the bottom end of the lifting assembly is fixedly connected to the base , the side of the lifting assembly is fixedly connected with the column.

Wherein, the lifting assembly is located on one side of the rotating assembly, and the grinding device further includes a cantilever, one end of the cantilever is connected to the lifting assembly, and the other end is fixedly connected to the top center of the adsorption seat.

Wherein, the suction cup is a flat plate structure, and the suction surface is a flat surface.

Wherein, the suction cup is provided with a plurality of adjusting top wires arranged along the periphery of the suction cup, and the adjusting top wires are threadedly connected to the suction cup and abut against the suction seat , for adjusting the suction cup.

Wherein, a sealing ring is arranged between the suction cup and the adsorption seat, and the sealing ring surrounds all the adsorption holes of the suction cup.

Wherein, a plurality of the adjusting top wires evenly surround all the adsorption holes of the suction cup.

Wherein, the side of the suction seat facing the suction cup is planar.

Wherein, the grinding device also includes a dust removal assembly, the dust removal assembly includes a fixed ring and a mouthpiece, the fixed ring is sleeved outside the adsorption seat, and the inner wall of the fixed ring is in contact with the outer wall of the adsorption seat ;

The inner wall of the fixed ring is provided with a main groove and a plurality of sub-grooves, the main groove is annular arranged along the circumferential direction of the fixed ring, and is located above the plurality of sub-grooves, and the plurality of sub-grooves are along the The circumferential arrangement of the fixing rings, the top of each sub-groove is connected to the main groove, and the bottom is connected to the bottom space of the adsorption seat;

The interface pipe communicates with the main tank, and communicates with the suction fan through the filter module.

The grinding device provided by the present invention can adsorb the grinding sheet on the adsorption surface of the suction cup through the negative pressure in the multiple adsorption holes of the suction cup, so as to realize the fixing of the grinding sheet, and the installation is simple and quick; the grinding sheet is driven by the lifting assembly along the Move vertically so that it can be moved closer to or away from the graphite crucible on the rotating assembly. When the grinding sheet is in contact with the graphite crucible, the rotating component drives the graphite crucible to rotate, so that the surface of the graphite crucible can be ground, which can improve the parallelism between the grinding surface and the bottom of the graphite crucible, which can effectively save manpower and improve production efficiency.

Description of drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings that need to be used in the embodiments. The drawings in the following description are only corresponding to some embodiments of the present invention. attached drawings.

Fig. 1 is a schematic structural view of a grinding device provided by a first embodiment of the present invention;

Fig. 2 is the plan view of Fig. 1 grinding device;

Fig. 3 is a schematic structural view of the adsorption assembly of the grinding device in Fig. 1;

Figure 4 is an enlarged view of G in Figure 1;

Fig. 5 is an exploded schematic diagram of the adsorption assembly and the dust removal assembly provided by the second embodiment of the present invention.

Detailed ways

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts belong to the protection scope of the present invention.

The directional terms mentioned in the present invention, such as "inner" and "outer", are only referring to the orientation of the drawings, and the directional terms used are for explaining and understanding the present invention, but not for limiting the present invention.

Words such as "first" and "second" in the terminology of the present invention are only used for descriptive purposes, and should not be understood as indicating or implying relative importance, and not as limiting the sequence.

In the present invention, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection" and "fixation" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , or integrated; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, and it can be the internal communication of two components or the interaction relationship between two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

Please refer to FIG. 1 to FIG. 2 , a grinding device provided in the first embodiment of the present invention is used for grinding a graphite crucible 90 so that the surface to be ground of the graphite crucible 90 is flat, and crystals of better quality can be grown. The grinding device includes a support base 1 , a rotating assembly 2 , a lifting assembly 3 , and an adsorption assembly 4 . The support base 1 is used to provide support for the entire grinding device. The rotating assembly 2 and the lifting assembly 3 are all arranged on the support base 1. The rotating assembly 2 is used to drive the graphite crucible 90 to rotate, and the adsorption assembly 4 is used to absorb the grinding sheet. The grinding sheet can be Consumables such as sandpaper and sand discs that can be ground; the lifting assembly 3 is connected to the adsorption assembly 4 to drive the adsorption assembly 4 up and down, so that the grinding sheet moves close to or away from the graphite crucible 90 on the rotating assembly 2; when the grinding sheet and graphite When the crucibles 90 are in contact with each other and the graphite crucible 90 rotates driven by the rotating assembly 2 , the grinding sheet can grind the graphite crucible 90 .

As shown in Figure 3, the adsorption assembly 4 is used to adsorb the grinding sheet, and is arranged opposite to the rotating assembly 2. It includes an adsorption seat 41 and a suction cup 42. The adsorption seat 41 is connected with the lifting assembly 3. One side of the component 2; the suction cup 42 has a suction surface 40 facing the rotating component 2, and a plurality of suction holes 420 are provided on the suction surface 40, and a negative pressure port 411 is provided on the suction seat 41, and the negative pressure port 411 is connected to multiple suction ports. The hole, the negative pressure interface 411 is used to connect a negative pressure machine to form a negative pressure in the adsorption hole 420 , and then make the abrasive sheet adsorb on the adsorption surface 40 .

Through the negative pressure in the plurality of adsorption holes 420 of the suction cup 42, the grinding sheet can be adsorbed on the adsorption surface 40 of the suction cup 42 to realize the fixing of the grinding sheet, and the installation is simple and fast; Move so that it can move close to or away from the graphite crucible 90 on the rotating assembly 2 . When the grinding sheet is in contact with the graphite crucible 90, the rotating assembly 2 drives the graphite crucible 90 to rotate, so that the surface of the graphite crucible 90 can be ground, which can improve the parallelism and fit between the grinding surface and the bottom of the graphite crucible 90, It can effectively save manpower and improve production efficiency.

As shown in Figures 3 and 4, the suction cup 42 is provided with a plurality of adjusting jackscrews 45 arranged along the periphery of the sucking cup 42, and the adjusting jackscrews 45 are threadedly connected to the sucking cup 42 and abut against the suction cup 42. The seat 41 is used to adjust the distance between the periphery of the suction cup 42 and the suction seat 41 , and then adjust the attitude of the suction cup 42 relative to the support seat.

By rotating and adjusting the top wire 45, the distance between the sucker 42 at each position of the top wire 45 and the suction seat 41 can be changed, and then the posture of the suction cup 42 relative to the support seat 1 can be changed, so that the suction surface of the suction cup 42 can be aligned with the support seat. The upper surface is parallel, which is beneficial to the grinding of the graphite crucible. Whether the suction surface of the suction cup 42 reaches a parallel state can be detected by using a high-precision digital display dial gauge on the support seat.

A plurality of adjusting top wires 45 evenly surround all the adsorption holes 420 of the suction cup 42 to avoid the influence of the adjustment top wires 45 on the adsorption holes 420, and at the same time make the adjustment top wires 45 closer to the edge of the suction cup 42 to facilitate adjustment. The number of adjusting jackscrews 45 can be determined as required, preferably three or four, evenly arranged around the suction cup 42 to facilitate adjustment, of course, in other embodiments, the number of adjusting jackscrews 45 can also be 8, or other numbers.

A sealing ring (not shown in the figure) is arranged between the suction cup 42 and the suction seat 41 , and the sealing ring surrounds all the suction holes 420 of the suction cup 42 . Using the elastic performance of the sealing ring itself, when the gap between the suction cup 42 and the adsorption seat 41 changes, the sealing performance between the two can be guaranteed, and air leakage between the negative pressure interface and the adsorption hole 420 can be avoided, which will affect the adsorption performance. .

In this embodiment, the side of the suction seat 41 facing the suction cup 42 is planar, and the size of the suction seat 41 and the suction cup 42 in the horizontal direction can be equivalent to facilitate the assembly between the two.

The adsorption seat 41 and the suction cup 42 are connected by a plurality of bolts 46, and the bolts 46 run through the adsorption seat 41 and the suction cup 42, so that the adsorption seat 41 and the suction cup 42 are connected as a whole, and the adsorption seat 41 and the suction cup 42 are vertically kept constant. The relative movement space is convenient to adjust the posture of the suction cup 42 by adjusting the jack screw 45.

The rotating assembly 2 is arranged on the support base 1 and is used to drive the graphite crucible 90 to rotate vertically. The rotating assembly 2 comprises a rotating base 21 and a rotating motor 22, the rotating base 21 is rotatably connected to the support base 1, and the rotating base 21 is provided with a fastener 23 for fixing the graphite crucible 90; the rotating motor 22 is fixed on the supporting base 1, and drives It is connected to the rotating base 21 to drive the rotating base 21 to rotate. The rotating base 21 can be driven to rotate by the rotating motor 22, and the graphite crucible 90 can be conveniently fixed on the rotating base 21 by the fastener 23, so that the graphite crucible 90 can rotate relative to the grinding sheet driven by the rotating base 21, and the grinding sheet can be The graphite crucible 90 is ground.

Fastener 23 can adopt the structure that can detachably fix the object such as hoop, buckle, etc. Fastener 23 can be a plurality of, and arranges around rotating base 21, so that graphite crucible 90 can be fixed on rotating base from multiple directions around. Seat 21.

In this embodiment, the rotary motor 22 is connected to the rotary base 21 through a gear train transmission. As shown in FIG. 2 , the gear train includes a driving wheel 24 and a driven wheel 25. The driving wheel 25 is coaxially fixedly connected with the rotating base 21 . The driving wheel 24 meshes with the driven wheel 25 , and the driving wheel 24 can transmit the power of the rotating motor 22 to the rotating base 21 through the driven wheel 25 . The number of teeth of the driven wheel 25 is greater than that of the driving wheel 24, so that the gear set has a deceleration effect. The outer diameter of the driven wheel 25 is larger than that of the rotating seat 21 , which is beneficial to the engagement between the driven wheel 25 and the driving wheel 24 . Here, in other embodiments, the rotating motor 22 and the rotating base 21 may also be connected through other transmission mechanisms such as a belt transmission assembly and a chain transmission assembly.

As shown in FIG. 1 , the lifting assembly 3 is arranged on the support base 1 and connected to the adsorption assembly 4 for driving the adsorption assembly 4 to move vertically. In this embodiment, the support base 1 includes a fixedly connected base 11 and a column 12, the rotating assembly 2 is arranged on the base 11, the column 12 is vertically fixed on the base 11, the bottom end of the lifting assembly 3 is fixedly connected to the base 11, and the lifting The side of the component 3 is fixedly connected with the column 12, so that the connection between the lifting component 3 and the support base 1 is firm and reliable, avoiding the toppling of the lifting component 3, and ensuring the stability of the operation of the lifting component 3. The column 12 can be made of marble to improve the stability of the column 12 .

The lifting assembly 3 is located at one side of the rotating assembly 2, and the grinding device also includes a cantilever 5, one end of the cantilever 5 is connected to the lifting assembly 3, and the other end is fixedly connected to the top center of the adsorption seat 41. The cantilever 5 can be used to make the adsorption assembly 4 hang on the square of the rotating assembly 2, and the cantilever 5 is connected to the top middle position of the adsorption seat 41, so that the adsorption seat 41 can move up and down more smoothly.

The lifting assembly 3 includes a lifting motor 31 and a ball screw mechanism 32. The ball screw mechanism 32 includes a housing 321, a slide block (not shown) and a screw mandrel 322. The screw mandrel 322 is arranged in the housing 321. The screw mandrel 322 and the The slider is screwed, and the slider is slidably connected to the housing 321 and fixedly connected to the adsorption component 4 through the cantilever 5 . The bottom of the housing 321 is fixedly connected to the base 11 , and the side is fixedly connected to the column 12 . The lifting motor 31 is arranged on the top of the shell 321, and is connected with the screw rod 322 to drive the screw rod 322 to rotate around its own axis, and then drive the slider to move vertically, and the slider further drives the adsorption assembly 4 to move up and down. The cooperation of the lifting motor 31 and the ball screw 322 mechanism 32 can ensure the stability of the lifting assembly 3 and the accuracy of the lifting distance of the adsorption assembly 4 .

Here, in other embodiments, the lifting assembly 3 can also use a cylinder, a linear motor, or other linear drive mechanisms.

The grinding device also includes a control module 6 , which is electrically connected to the lifting assembly 3 , the negative pressure machine and the rotating assembly 2 to control the operation of the lifting assembly 3 , the negative pressure machine and the rotating assembly 2 . In this embodiment, the control module 6 is an industrial computer, which is fixed on the support base 1 .

The grinding device provided by the invention can realize the grinding of the graphite crucible on the order of 90 microns, greatly reduces the grinding loss, saves costs, and greatly improves the parallelism between the grinding surface and the bottom of the component, thereby improving production efficiency.

Based on the grinding device provided in the first embodiment above, the grinding device provided in the second embodiment of the present invention may include all the structural features in the first embodiment above.

The grinding device includes a support base 1, a rotating assembly 2, a lifting assembly 3, an adsorption assembly 4, a dust removal assembly 7 and a control module. The supporting base 1, the rotating assembly 2, the lifting assembly 3 and the control module are substantially the same as those in the previous embodiment, and will not be repeated here.

As shown in FIG. 5 , in the adsorption assembly 4 , a groove 412 is provided on the side of the adsorption seat 41 facing the rotating assembly 2 , and the suction cup 42 is placed in the groove 412 . By providing the groove 412 on the suction seat 41 , the suction cup 42 can be embedded in the suction seat 41 , so as to facilitate the assembly connection between the suction cup 42 and the suction seat 41 . The suction surface 40 of the suction cup 42 can be flush with the lower surface of the suction seat 41 so that the grinding sheet can be straight.

The suction cup 42 is a flat plate structure, and its adsorption surface 40 is a flat surface, which is beneficial to absorb the grinding sheet on the adsorption surface 40 evenly, and further improves the smoothness of the grinding surface on the graphite crucible 90 after processing. The grinding sheet covers all the adsorption holes 420 to prevent the dust generated during the grinding process from entering the adsorption holes 420 to cause blockage, and to prevent the dust from entering the negative pressure machine and causing damage to the machine.

The opening of the groove 412 is provided with a stepped surface 413, the suction cup 42 is arranged in the groove 412, and connects the stepped surface 413 to form an adsorption chamber in the groove 412, and a plurality of adsorption holes 420 are connected to the adsorption chamber, and the negative The pressure port 411 communicates with the adsorption chamber. Using the step surface 413 at the opening of the groove 412, an adsorption cavity can be formed between the adsorption disk and the bottom surface of the groove 412, and a negative pressure cavity can be formed in the adsorption cavity by using the adsorption cavity, so that the negative pressure is relatively balanced Distributed to all the adsorption holes 420, so that each position of the grinding sheet receives a more balanced adsorption force, ensuring the stability and reliability of the connection between the grinding sheet and the suction cup 42.

A plurality of adjusting jackscrews 45 (not shown in the figure) can be set on the suction cup 42, and the ends of the adjusting jackscrews 45 abut against the step surface 413, and the principle of its adjusting structure is the same as that of the first embodiment, and will not be repeated here. .

As shown in Figure 5, the dust removal assembly 7 includes a fixed ring 71 and an interface pipe 72, the fixed ring 71 is sleeved outside the adsorption seat 41, the inner wall of the fixed ring 71 is connected with the outer wall of the adsorption seat 41, and the inner wall of the fixed ring 71 is provided There is a main groove 711 and a plurality of sub-grooves 712, the main groove 711 is annular arranged along the circumferential direction of the fixed ring 71, and is located above the plurality of sub-grooves 712, and the plurality of sub-grooves 712 are arranged along the circumferential direction of the fixed ring 71, each sub-groove The top end of 712 communicates with the main groove 711 , and the bottom end communicates with the bottom space of the suction seat 41 . The interface pipe 72 communicates with the main tank 711 and communicates with the suction fan through the filter module. After the fixed ring 71 is sleeved outside the adsorption seat 41, the inner wall of the fixed ring 71 is connected to the outer wall of the adsorption seat 41, and an air flow can be formed between the groove wall of the main groove 711, the groove walls of the plurality of sub-grooves 712 and the outer wall of the adsorption seat 41. Channel, after the suction fan is started, the air with dust at the bottom of the adsorption seat 41 can flow to the filter module through the sub-groove 712, the main groove 711 and the interface pipe 72, and the dust generated in the grinding process can be collected and filtered by the filter module, thereby Avoid wind and dust floating around the graphite crucible 90 and avoid affecting surrounding equipment.

The air flow channel of dust is formed by docking the groove wall and the outer wall of the adsorption seat 41 , after the fixing ring 71 is disassembled, the residual dust in the sub groove 712 and the main groove 711 can be cleaned conveniently. The cross-section of the sub-groove 712 is arc-shaped, which can further facilitate cleaning in the groove.

The grinding sheet can completely cover the suction cup 42 , and its peripheral edges protrude from the suction cup 42 . A plurality of sub-grooves 712 can form an upward airflow, so that the peripheral edges of the grinding sheet face up to meet the adsorption seat 41 , preventing the peripheral edges of the grinding sheet from drooping and affecting the smoothness of the grinding. When the grinding sheet is installed, the suction fan can be started at first, and an upward airflow is formed around the adsorption seat 41, so that the edges around the grinding sheet are upwardly attached to the adsorption seat 41. At this time, after the flatness of the grinding sheet can be adjusted, Start the negative pressure machine again, and the grinding sheet is adsorbed on the adsorption surface 40 of the suction cup 42, which facilitates the installation of the grinding sheet.

The adsorption surface 40 can protrude downward from the lower surface of the adsorption seat 41. Due to the upward airflow around, the periphery of the grinding sheet can be slightly bent towards the adsorption seat 41 without affecting the flatness of the grinding sheet at the adsorption surface 40. And there is no requirement that the adsorption surface 40 and the lower surface of the adsorption seat 41 need to be flush, which reduces the assembly accuracy and the production cost of the entire device. The outer diameter of the adsorption surface 40 is larger than that of the graphite crucible, so that the graphite crucible can be ground by using the straight structure of the grinding sheet.

The outer periphery of the fixed ring 71 extends toward the rotating seat 21 to form a housing sleeve 713, which surrounds the graphite crucible 90, so that the dust formed during the grinding process can be limited in the housing sleeve 713, and then collected to further facilitate the collection of dust , to prevent dust from spreading around.

A plurality of sub-slots 712 are inclined, and the interface tube 72 is connected to the main slot 711 along the tangential direction of the main slot 711 . When the suction fan is started, an annular airflow can be formed in the main groove 711, and the air in the sub-groove 712 can be driven to flow obliquely from bottom to top, so that the bottom of the adsorption seat 41 forms a vortex airflow, so as to facilitate the dust to enter the sub-groove 712 upwards middle. The vortex air flow at the bottom of the adsorption seat 41 is in the same rotation direction as the rotating device, thereby further accelerating the speed of the dust flowing around the graphite crucible 90 and facilitating the dust entering the sub-slot 712 .

The mouthpiece 72 is provided on two opposite sides of the fixing ring 71 to increase the airflow velocity in the main groove 711 .

In summary, although the present invention has been disclosed above with preferred embodiments, the above preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the scope defined in the claims.

Claims (10)

1. A grinding device for grinding a graphite crucible, comprising a support base, a rotating assembly, a lifting assembly and an adsorption assembly; The rotating assembly is arranged on the support base for driving the graphite crucible to rotate; The lifting component is arranged on the support seat and connected to the adsorption component, and is used to drive the adsorption component up and down; The adsorption assembly is used to absorb the grinding sheet and is arranged opposite to the rotating assembly. It includes an adsorption seat and a suction cup. The adsorption seat is connected to the lifting assembly. One side; the suction cup has a suction surface facing the rotating assembly, a plurality of suction holes are provided on the suction surface, a negative pressure port is provided on the suction seat, and the negative pressure port is connected to a plurality of the The adsorption hole, the negative pressure interface is used to connect a negative pressure machine to form a negative pressure in the adsorption hole, so that the abrasive sheet is adsorbed on the adsorption surface. 2. The grinding device according to claim 1, wherein the rotating assembly includes a rotating base and a rotating motor, the rotating base is rotatably connected to the support base, and the rotating base is provided with a shaft for fixing the graphite crucible. The fastener; the rotating motor is fixed on the supporting base, and is connected to the rotating base by transmission, so as to drive the rotating base to rotate. 3. The grinding device according to claim 1, wherein the support base comprises a fixedly connected base and a column, the rotating assembly is arranged on the base, and the column is vertically fixed on the base , the bottom end of the lifting assembly is fixedly connected to the base, and the side of the lifting assembly is fixedly connected to the column. 4. The grinding device according to claim 3, wherein the lifting assembly is located at one side of the rotating assembly, the grinding device further comprises a cantilever, and one end of the cantilever is connected to the lifting assembly, The other end is fixedly connected with the top center of the suction seat. 5 . The grinding device according to claim 1 , wherein the suction cup is a straight plate-like structure, and the suction surface is a flat surface. 6 . 6. The grinding device according to claim 1, characterized in that, the suction cup is provided with a plurality of adjusting jackscrews arranged along the periphery of the sucker, and the adjusting jackscrew threads It is connected to the suction cup and abuts against the suction seat for adjusting the suction cup. 7 . The grinding device according to claim 6 , wherein a sealing ring is provided between the suction cup and the suction seat, and the sealing ring surrounds all the suction holes of the suction cup. 8 . The grinding device according to claim 6 , wherein a plurality of the adjusting top wires evenly surround all the adsorption holes of the suction cup. 9 . The grinding device according to claim 1 , wherein a side of the suction seat facing the suction cup is planar. 10. The grinding device according to claim 1, characterized in that, the grinding device also includes a dust removal assembly, the dust removal assembly includes a fixed ring and a mouthpiece, the fixed ring is sleeved outside the adsorption seat, the The inner wall of the fixed ring is connected with the outer wall of the adsorption seat; The inner wall of the fixed ring is provided with a main groove and a plurality of sub-grooves, the main groove is annular arranged along the circumferential direction of the fixed ring, and is located above the plurality of sub-grooves, and the plurality of sub-grooves are along the The circumferential arrangement of the fixing rings, the top of each sub-groove is connected to the main groove, and the bottom is connected to the bottom space of the adsorption seat; The interface pipe communicates with the main tank, and communicates with the suction fan through the filter module.