[go: up one dir, main page]

CN116334644A - A large-scale plasma rust removal system and method for metal surfaces - Google Patents

A large-scale plasma rust removal system and method for metal surfaces Download PDF

Info

Publication number
CN116334644A
CN116334644A CN202111591492.2A CN202111591492A CN116334644A CN 116334644 A CN116334644 A CN 116334644A CN 202111591492 A CN202111591492 A CN 202111591492A CN 116334644 A CN116334644 A CN 116334644A
Authority
CN
China
Prior art keywords
metal
plasma
low
rust
metal surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202111591492.2A
Other languages
Chinese (zh)
Inventor
欧阳博
孙超
阚二军
朱吉鹏
乔丰羽
杜罩富
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanjing University of Science and Technology
Original Assignee
Nanjing University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanjing University of Science and Technology filed Critical Nanjing University of Science and Technology
Priority to CN202111591492.2A priority Critical patent/CN116334644A/en
Publication of CN116334644A publication Critical patent/CN116334644A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

本申请提供了一种金属表面除锈方法。传统等离子体的除锈方法采用氢气及氢气混合气作为等离子体气源,危害性大,污染严重,不利于工业生产。同时,现有除锈等离子体系统主要基于弧光放电等离子体,该等离子体系统稳定性差、除锈面积小,均一性低,难以规模化使用。本申请采用水蒸汽辉光放电等离子体系统,等离子体源为水蒸汽,成本低,危害性小。该系统可以高效去除3d轨道过渡金属的表面锈层,特别是金属铜,金属钴,不锈钢表面锈层。除锈后的金属表面光泽度高、均一性好、除锈面积大,可为工业生产提供重要技术支撑。

Figure 202111591492

The application provides a metal surface rust removal method. The traditional plasma rust removal method uses hydrogen and hydrogen gas mixture as the plasma gas source, which is harmful and pollutes seriously, which is not conducive to industrial production. At the same time, the existing rust removal plasma system is mainly based on arc discharge plasma, which has poor stability, small rust removal area, and low uniformity, making it difficult to use on a large scale. This application adopts the water vapor glow discharge plasma system, the plasma source is water vapor, the cost is low, and the harm is small. The system can efficiently remove the surface rust layer of 3d orbital transition metals, especially metal copper, metal cobalt, and stainless steel surface rust layer. The metal surface after rust removal has high gloss, good uniformity and large rust removal area, which can provide important technical support for industrial production.

Figure 202111591492

Description

一种金属表面的等离子体大规模除锈系统及方法A large-scale plasma rust removal system and method for metal surfaces

技术领域technical field

本申请涉及金属除锈领域,特别涉及一种金属表面的等离子体大规模除锈系统及方法。The present application relates to the field of metal derusting, in particular to a large-scale plasma derusting system and method for metal surfaces.

背景技术Background technique

金属铜、生铁、不锈钢、钴等金属是芯片加工、汽车发动机制造中广泛使用的金属部件,以上部件在使用过程中需要长期暴露于酸、碱、盐、有机、高湿等复杂环境中,作为活泼的3d过渡轻金属材料,其表面更容易产生锈层,因此为了提高金属部件的重复利用率,对表面含有锈渍的金属部件进行除锈是非常必要的。Copper, pig iron, stainless steel, cobalt and other metals are metal parts widely used in chip processing and automobile engine manufacturing. Lively 3D transitional light metal materials are more likely to produce a rust layer on the surface, so in order to improve the reuse rate of metal parts, it is very necessary to derust the metal parts with rust stains on the surface.

传统的化学除锈法通常使用强酸,使其与锈渍中的主要成分金属氧化物/氢氧化物发生化学反应,生成可溶性盐类,从而达到除锈的目的。但在处理过程中,强酸同样会与金属基底反应生成氢气,导致金属表面出现缺陷、凹槽、甚至裂痕,严重影响其性能。同时,强酸的危害性极高、危险性极大,不利于工业生产的需求。虽然以强酸为基础,添加缓蚀剂、渗透剂、促进剂等除锈剂可降低强酸的危害性,例如CN103789775A公开了一种医疗器械除锈剂,该除锈剂是一种无色透明的温和弱酸性液体,不会刺激人体呼吸系统,危害性相对较低。 CN106191878公开了一种医疗器械除锈剂及其制备方法,在保持原有除锈效率的同时,降低对金属器械设备的腐蚀。然而,除锈剂的主要成分依然是酸类化学药品,其制备成本与使用成本依然居高不下,难以实现当前工业要求的绿色、环保指标。Traditional chemical rust removal methods usually use strong acid to chemically react with metal oxides/hydroxides, the main components in rust stains, to generate soluble salts, so as to achieve the purpose of rust removal. However, during the treatment process, the strong acid will also react with the metal substrate to generate hydrogen gas, which will cause defects, grooves, and even cracks on the metal surface, seriously affecting its performance. At the same time, strong acid is extremely harmful and dangerous, which is not conducive to the needs of industrial production. Although based on strong acid, adding corrosion inhibitors, penetrants, accelerators and other rust removers can reduce the hazards of strong acids. For example, CN103789775A discloses a medical device rust remover, which is a colorless and transparent Mild and weakly acidic liquid, it will not irritate the human respiratory system and is relatively less harmful. CN106191878 discloses a rust remover for medical equipment and a preparation method thereof, which can reduce corrosion to metal equipment while maintaining the original rust removal efficiency. However, the main components of rust removers are still acid chemicals, and their preparation and use costs are still high, making it difficult to achieve the green and environmental protection indicators required by the current industry.

等离子体表面除锈技术作为除锈领域的新型技术,受到国内外研究团队的广泛关注。该技术通过在高电压下激发活性气体,促使活性气体粒子与金属材料表面的锈渍发生化学反应,达成除锈效果。CN107794548A公布了一种常压等离子体除锈策略,采用弧光放电技术,以醇类物质作为反应源,激发其产生弧光等离子体,并喷涂至金属材料表面对其进行处理。此外,CN110860772A公布了一种常压等离子体表面除锈的方法,该方法将压缩空气作为等离子体源,通过击穿空气产生的等离子体流吹扫金属材料表面,将锈渍通过物理碰撞的方法去除干净。As a new technology in the field of rust removal, plasma surface rust removal technology has attracted extensive attention from research teams at home and abroad. This technology stimulates the active gas under high voltage to promote the chemical reaction between the active gas particles and the rust stains on the surface of the metal material to achieve the rust removal effect. CN107794548A discloses an atmospheric pressure plasma derusting strategy, adopts arc discharge technology, uses alcohol as a reaction source, excites it to generate arc plasma, and sprays it on the surface of metal materials for treatment. In addition, CN110860772A discloses a method of atmospheric pressure plasma surface rust removal, which uses compressed air as a plasma source, and blows the surface of metal materials by the plasma flow generated by breaking down the air, and removes rust stains through physical collisions. Remove cleanly.

虽然以上方法相较于酸腐蚀除锈具有更低的应用成本与重复利用价值,但均面临单次处理效率低下、处理速度缓慢、均一性差等问题,对于大面积金属部件,例如电路板制造领域广泛使用的铜支架等大面积金属基底,以上策略难以达成其工业需求。此外,传统等离子体通常采用氩气、氮气、空气等作为放电气体,以上气体在等离子体中产生的活性粒子极为有限,除锈效果欠佳。Although the above methods have lower application cost and reuse value than acid corrosion and rust removal, they all face the problems of low single-treatment efficiency, slow processing speed, and poor uniformity. For large-area metal parts, such as the field of circuit board manufacturing Widely used large-area metal substrates such as copper brackets, the above strategies are difficult to meet their industrial needs. In addition, traditional plasma usually uses argon, nitrogen, air, etc. as the discharge gas. The active particles produced by the above gases in the plasma are extremely limited, and the rust removal effect is not good.

发明内容Contents of the invention

鉴于现有技术存在的问题,本申请提供了一种可大面积、快速高效处理金属表面锈渍的方法,特别是芯片加工、发动机制造领域广泛使用的铜、铁、钴、镍、不锈钢等材料。所述方法在完全干态的条件下进行,不需要添加任何化学药剂,实现对锈渍的有效去除,尤其适用于复杂结构的材料表面。In view of the problems existing in the prior art, this application provides a method for large-area, fast and efficient treatment of rust stains on metal surfaces, especially copper, iron, cobalt, nickel, stainless steel and other materials widely used in chip processing and engine manufacturing fields . The method is carried out in a completely dry state without adding any chemical agent, and realizes effective removal of rust stains, and is especially suitable for material surfaces with complex structures.

为实现上述目的,本申请提供了一种利用低温低压蒸汽等离子体对金属表面除锈的方法,其特征在于,所述方法是利用低温低压等离子体对所述金属表面进行除锈。In order to achieve the above object, the present application provides a method for derusting a metal surface by using low-temperature and low-pressure steam plasma, which is characterized in that the method uses low-temperature and low-pressure plasma to derust the metal surface.

利用低温低压等离子体对所述金属表面进行除锈具体为:将水蒸气作为反应源通入辉光等离子腔体中,通过辉光放电系统激发水蒸气产生辉光等离子体,对所述金属表面进行除锈处理。Using low-temperature and low-pressure plasma to derust the metal surface specifically includes: passing water vapor as a reaction source into the glow plasma cavity, and exciting the water vapor through a glow discharge system to generate glow plasma, and then treating the metal surface Carry out rust removal treatment.

其原理是水蒸气在辉光放电中解离形成高活性含氢粒子,包括氢粒子、氢氧根粒子,由于电子在腔体中的速度远超过含氢粒子,电子会集中在金属基底表面,使金属表面形成负电鞘层,氢粒子带正电,会在负电鞘层的影响下优先与金属基底接触,与表面锈渍中的氧化物或氢氧化物反应,生成的氢氧根或水分子以游离态的形式离开金属表面,达到去除金属表面锈渍的作用。The principle is that water vapor dissociates in the glow discharge to form highly active hydrogen-containing particles, including hydrogen particles and hydroxide particles. Since the speed of electrons in the cavity is much higher than that of hydrogen-containing particles, the electrons will concentrate on the surface of the metal substrate. Make the metal surface form a negative electric sheath, and the hydrogen particles are positively charged, and under the influence of the negative electric sheath, they will preferentially contact the metal substrate, react with the oxide or hydroxide in the surface rust, and generate hydroxide or water molecules It leaves the metal surface in the form of a free state to achieve the effect of removing rust stains on the metal surface.

本申请在除锈过程中产生的等离子体为辉光等离子体,产生原理为:腔体气压为低气压放电,水分子在腔体内以气态形式存在,分子之间的平均自由程较大,水分子分散均匀,因此产生辉光放电。辉光放电过程中,粒子分布遵循麦克斯韦-玻尔兹曼分布,粒子在腔体内分布均一,稳定性高,因此可实现大面积金属表面的高效除锈。The plasma generated in the rust removal process of this application is glow plasma. The principle of generation is: the pressure of the cavity is low pressure discharge, and the water molecules exist in gaseous form in the cavity. The mean free path between the molecules is large, and the water molecules The molecules are evenly dispersed, thus generating a glow discharge. During the glow discharge process, the particle distribution follows the Maxwell-Boltzmann distribution, the particles are uniformly distributed in the cavity, and the stability is high, so it can achieve efficient rust removal on large-area metal surfaces.

在本申请可适用的金属基底方面,金属铜、铁、镍、钴是水蒸气等离子体较容易处理金属,其原因是,金属铁、铜、镍、钴均属于3d轨道的过渡金属。在形成锈渍的过程中,空气中的氧原子与金属接触,形成金属氧化物,化学键来自于过渡金属的3d轨道与氧原子的2p轨道结合的分子轨道上。由于3d轨道离过渡金属的原子核较远,原子核对该轨道上的电子的吸引力较弱,在除锈过程中,高活性氢粒子易与氧原子的2p轨道结合,形成共价键,使其形成氢氧根脱离金属表面。而对于3d轨道上不含有电子的碱金属或碱土金属,高活性氢粒子则难以去除其表面锈渍。In terms of metal substrates applicable to this application, metal copper, iron, nickel, and cobalt are metals that are easier to treat with water vapor plasma, because the metal iron, copper, nickel, and cobalt all belong to transition metals with 3d orbitals. In the process of forming rust stains, oxygen atoms in the air contact with metals to form metal oxides, and the chemical bonds come from the molecular orbitals where the 3d orbitals of transition metals combine with the 2p orbitals of oxygen atoms. Since the 3d orbital is far away from the nucleus of the transition metal, the attraction of the nucleus to the electrons on this orbital is weak. During the rust removal process, the highly active hydrogen particles are easy to combine with the 2p orbital of the oxygen atom to form a covalent bond, making it The formation of hydroxide ions detached from the metal surface. For alkali metals or alkaline earth metals that do not contain electrons in the 3d orbital, highly active hydrogen particles are difficult to remove rust stains on their surfaces.

优选地,所述水蒸气的水选自纯水或超纯水。Preferably, the water in the steam is selected from pure water or ultrapure water.

优选地,所述辉光放电系统包括微波放电、射频放电、微秒脉冲放电中的任意一种。Preferably, the glow discharge system includes any one of microwave discharge, radio frequency discharge, and microsecond pulse discharge.

优选地,所述金属包括铜、铁、生铁、不锈钢、钴、镍中的任意一种。Preferably, the metal includes any one of copper, iron, pig iron, stainless steel, cobalt and nickel.

优选地,所述金属为工业中使用的任意3d过渡金属器件。Preferably, the metal is any 3d transition metal device used in industry.

优选地,所述金属的单次处理面积在1~500cm2,处理厚度在1~100mm。Preferably, the single treatment area of the metal is 1-500 cm 2 , and the treatment thickness is 1-100 mm.

优选地,所述低温低压等离子体除锈处理的时间为1~200s,优选10~60s。Preferably, the time for the low-temperature and low-pressure plasma derusting treatment is 1-200s, preferably 10-60s.

优选地,所述低温低压等离子体除锈处理的蒸汽流量为5~200sccm,优选 20~70sccm。Preferably, the steam flow rate of the low-temperature and low-pressure plasma derusting treatment is 5-200 sccm, preferably 20-70 sccm.

优选地,所述低温低压等离子体除锈处理的腔体气压为5~200Pa,优选 30~80Pa。Preferably, the chamber pressure of the low-temperature and low-pressure plasma derusting treatment is 5-200Pa, preferably 30-80Pa.

优选地,所述的低温辉光等离子体除锈处理的放电功率为10~1000W,优选100~600W。Preferably, the discharge power of the low-temperature glow plasma rust removal treatment is 10-1000W, preferably 100-600W.

优选地,所述的低温辉光等离子体除锈处理的电极间距为50~1000mm,优选200~500mm。Preferably, the electrode distance of the low-temperature glow plasma rust removal treatment is 50-1000 mm, preferably 200-500 mm.

优选地,所述低温低压等离子体在除锈时,所述辉光等离子腔体的温度始终保持在室温环境。Preferably, when the low-temperature and low-pressure plasma is derusting, the temperature of the glow plasma chamber is always kept at room temperature.

本申请提供了一种利用低温低压水蒸汽等离子体的金属表面除锈的系统,所述系统包括辉光等离子放电系统、辉光等离子腔体、控制单元;The application provides a system for derusting metal surfaces using low-temperature and low-pressure water vapor plasma. The system includes a glow plasma discharge system, a glow plasma chamber, and a control unit;

所述控制单元将水蒸气作为反应源通入所述辉光等离子腔体中,通过所述辉光放电系统激发水蒸气产生辉光等离子体,对所述金属表面进行除锈处理;The control unit feeds water vapor into the glow plasma chamber as a reaction source, excites water vapor through the glow discharge system to generate glow plasma, and performs rust removal treatment on the metal surface;

其原理是水蒸气在辉光放电中解离形成高活性含氢粒子,包括氢粒子、氢氧根粒子,由于电子在腔体中的速度远超过含氢粒子,电子会集中在金属基底表面,使金属表面形成负电鞘层,氢粒子带正电,会在负电鞘层的影响下优先与金属基底接触,与表面锈渍中的氧化物或氢氧化物反应,生成的氢氧根或水分子以游离态的形式离开金属表面,达到去除金属表面锈渍的作用。The principle is that water vapor dissociates in the glow discharge to form highly active hydrogen-containing particles, including hydrogen particles and hydroxide particles. Since the speed of electrons in the cavity is much higher than that of hydrogen-containing particles, the electrons will concentrate on the surface of the metal substrate. Make the metal surface form a negative electric sheath, and the hydrogen particles are positively charged, and under the influence of the negative electric sheath, they will preferentially contact the metal substrate, react with the oxide or hydroxide in the surface rust, and generate hydroxide or water molecules It leaves the metal surface in the form of a free state to achieve the effect of removing rust stains on the metal surface.

与现有技术方案相比,本申请至少具有以下有益效果:Compared with the prior art solutions, the present application has at least the following beneficial effects:

1)本申请基于低温低气压辉光等离子体技术,提供一种具备环境友好性的金属材料表面除锈方法,利用等离子体中高活性氢粒子与金属表面锈渍发生物理化学作用,实现常温下的高效除锈;1) This application is based on the low-temperature and low-pressure glow plasma technology, and provides an environmentally friendly method for removing rust on the surface of metal materials. It utilizes the physical and chemical interaction between highly active hydrogen particles in the plasma and the rust stains on the metal surface to achieve rust removal at room temperature. Efficient rust removal;

2)本申请以水蒸气为原料,不使用除锈剂等化学试剂,绿色环保;2) This application uses water vapor as raw material, does not use chemical reagents such as rust removers, and is environmentally friendly;

3)与现有弧光等离子体除锈技术项目相比,辉光放电过程中,粒子分布遵循麦克斯韦-玻尔兹曼分布,粒子在腔体内分布均一,稳定性高,因此可实现大面积金属表面的高效除锈;,金属的单次处理面积在1~500cm2,处理厚度在 1~100mm。该方法可以广泛应用于多种工业金属材料的表面除锈中,对于除锈方法的革新具有重要意义;3) Compared with the existing arc plasma rust removal technology project, during the glow discharge process, the particle distribution follows the Maxwell-Boltzmann distribution, the particles are uniformly distributed in the cavity, and the stability is high, so large-area metal surfaces can be realized High-efficiency rust removal; the single treatment area of metal is 1-500cm 2 , and the treatment thickness is 1-100mm. This method can be widely used in the surface rust removal of various industrial metal materials, and is of great significance to the innovation of rust removal methods;

附图说明Description of drawings

图1为本申请的水蒸汽辉光等离子体除锈系统。Fig. 1 is the water vapor glow plasma derusting system of the present application.

图2为芯片加工中未使用的铜支架。Figure 2 shows the unused copper support in chip processing.

图3为芯片加工中使用被多次使用的铜支架。Figure 3 is a copper bracket used many times in chip processing.

图4为本水蒸气等离子体处理后的铜支架。Fig. 4 is the copper stent after the water vapor plasma treatment.

附图标记:1、辉光放电系统,2、辉光等离子腔体,3、金属样品,4、水蒸气。Reference signs: 1. Glow discharge system, 2. Glow plasma cavity, 3. Metal sample, 4. Water vapor.

具体实施方式Detailed ways

下面对本申请进一步详细说明。但下述的实例仅仅是本申请的简易例子,并不代表或限制本申请的权利保护范围,本申请的保护范围以权利要求书为准。The application will be further described in detail below. However, the following examples are only simple examples of the present application, and do not represent or limit the protection scope of the present application, and the protection scope of the present application shall be determined by the claims.

本申请提供的金属材料表面的除锈方法,其除锈效果是基于辉光放电中水蒸气裂解的氢粒子与氢氧根粒子,通过以上高活性粒子与金属材料表面的锈渍发生化学反应,将锈渍还原为金属单质,从而达到除锈的效果。The method for removing rust on the surface of metal materials provided by the application, its rust removal effect is based on the hydrogen particles and hydroxide particles cracked by water vapor in glow discharge, through the chemical reaction between the above highly active particles and the rust stains on the surface of metal materials, Restore rust stains to simple metal, so as to achieve the effect of rust removal.

本申请除锈的作用原理主要包括:水蒸气在辉光放电中解离形成高活性含氢粒子,包括氢粒子、氢氧根粒子,由于电子在腔体中的速度远超过含氢粒子,电子会集中在金属基底表面,使金属表面形成负电鞘层,氢粒子带正电,会在负电鞘层的影响下优先与金属基底接触,与表面锈渍中的氧化物或氢氧化物反应,生成的氢氧根或水分子以游离态的形式离开金属表面,达到去除金属表面锈渍的作用。同时,游离的氢氧根粒子由于带负电,难以进入负电鞘层区,无法参与反应。有效除锈成分为水蒸气等离子体中的氢粒子。The principle of rust removal in this application mainly includes: water vapor dissociates in glow discharge to form highly active hydrogen-containing particles, including hydrogen particles and hydroxide particles. Since the speed of electrons in the cavity is much higher than that of hydrogen-containing particles, It will concentrate on the surface of the metal substrate, forming a negative electric sheath on the metal surface. The hydrogen particles are positively charged, and will preferentially contact the metal substrate under the influence of the negative electric sheath, and react with the oxide or hydroxide in the surface rust to form Hydroxide or water molecules leave the metal surface in a free state to achieve the effect of removing rust stains on the metal surface. At the same time, because of the negative charge, the free hydroxide particles are difficult to enter the negatively charged sheath region and cannot participate in the reaction. The effective derusting ingredient is hydrogen particles in water vapor plasma.

本申请采用的等离子体源为水蒸气,不引入任意非反应气体,成本低,危害小。反应腔体处于低气压环境,水蒸汽会以气态的形式在腔体中稳定存在,而非液态,这保证了反应腔体中反应源的均一性,从而促进放电过程中的均一性高、稳定性好,可实现金属材料表面的大规模除锈。The plasma source used in this application is water vapor, without introducing any non-reactive gas, with low cost and little harm. The reaction chamber is in a low-pressure environment, and water vapor will exist stably in the chamber in the form of gas instead of liquid, which ensures the uniformity of the reaction source in the reaction chamber, thereby promoting high uniformity and stability during the discharge process. It has good performance and can realize large-scale rust removal on the surface of metal materials.

由于等离子体中产生的高活性氢粒子与金属基底相互独立,因此本申请可处理任意工业用轻金属,例如铜、铁、不锈钢等。Since the highly active hydrogen particles generated in the plasma are independent of the metal substrate, this application can treat any industrial light metal, such as copper, iron, stainless steel, etc.

根据本申请的一种金属材料表面除锈方法,特别是工业中广泛应用的铜金属、不锈钢,所述处理包括低压等离子体表面除锈,表面锈层既包括金属基器件使用中产生的金属氧化物或氢氧化物锈层,亦包括表面沾染的高分子杂质。该方法具体包括如下步骤:所述的低温等离子体表面除锈处理是将水蒸气作为反应源通入腔体中,通过放电系统激发水蒸气产生辉光等离子体,对金属材料表面进行除锈处理。According to a method for derusting the surface of metal materials of the present application, especially copper metal and stainless steel widely used in industry, the treatment includes low-pressure plasma surface derusting, and the surface rust layer includes metal oxidation produced during the use of metal-based devices. substances or hydroxide rust layer, including polymer impurities contaminated on the surface. The method specifically includes the following steps: the low-temperature plasma surface derusting treatment is to pass water vapor into the cavity as a reaction source, excite the water vapor through a discharge system to generate glow plasma, and perform derusting treatment on the surface of the metal material .

下面结合附图并通过具体实施方式来进一步说明本申请的技术方案。The technical solution of the present application will be further described below in conjunction with the accompanying drawings and through specific implementation methods.

实施例1:在本实施例中,采用射频容性放电系统,将表面带有锈渍的金属铜片放入腔体中,铜片的大小为100cm2。所述的辉光等离子体的形成过程是,将电极接在腔体两侧,对反应腔体抽真空,并通入水蒸气,调节蒸汽流速,将腔体气压控制于40Pa,调控反应功率500W、电极间距300mm。等离子体处理金属铜表面的时间为10s。处理后通过目测方法,检测金属铜表面的锈斑全部除尽,金属铜表面呈现原有光泽。Embodiment 1: In this embodiment, a radio frequency capacitive discharge system is used, and a metal copper sheet with rust stains on the surface is put into the cavity, and the size of the copper sheet is 100 cm 2 . The formation process of the glow plasma is that electrodes are connected to both sides of the cavity, the reaction cavity is evacuated, water vapor is introduced, the steam flow rate is adjusted, the pressure of the cavity is controlled at 40Pa, and the reaction power is adjusted to 500W, The electrode spacing is 300mm. The plasma treatment time on the copper surface is 10s. After the treatment, by visual inspection, it is detected that the rust spots on the surface of the metal copper are all removed, and the surface of the metal copper presents the original luster.

实施例2:在本实施例中,采用射频感性放电系统,将表面带有锈渍的不锈钢放入腔体中,不锈钢的大小为50cm2。所述的辉光等离子体的形成过程是,将电极接在腔体两侧,对反应腔体抽真空,并通入水蒸气,调节蒸汽流速,将腔体气压控制于20Pa,调控反应功率100W、电极间距200mm。等离子体处理不锈钢表面的时间为30s。处理后通过目测方法,检测不锈钢表面的锈斑全部除尽,不锈钢表面呈现原有光泽。Embodiment 2: In this embodiment, a radio frequency inductive discharge system is used, and stainless steel with rust stains on the surface is put into the cavity, and the size of the stainless steel is 50 cm 2 . The formation process of the glow plasma is that electrodes are connected to both sides of the cavity, the reaction cavity is evacuated, water vapor is introduced, the steam flow rate is adjusted, the pressure of the cavity is controlled at 20Pa, and the reaction power is adjusted to 100W, The electrode spacing is 200mm. The plasma treatment time of the stainless steel surface is 30s. After treatment, by visual inspection, it is detected that all the rust spots on the surface of the stainless steel are removed, and the surface of the stainless steel presents the original luster.

实施例3:在本实施例中,采用微波放电系统,将表面带有锈渍的金属铜片放入腔体中,不锈钢的大小为200cm2。所述的辉光等离子体的形成过程是,将电极接在腔体两侧,对反应腔体抽真空,并通入水蒸气,调节蒸汽流速,将腔体气压控制于40Pa,调控反应功率300W、电极间距500mm。等离子体处理不锈钢表面的时间为5s。处理后通过目测方法,检测铜片表面的锈斑全部除尽,铜片表面呈现原有光泽。Embodiment 3: In this embodiment, a microwave discharge system is used to put a metal copper sheet with rust stains on the surface into the cavity, and the size of the stainless steel is 200 cm 2 . The formation process of the glow plasma is that electrodes are connected to both sides of the cavity, the reaction cavity is evacuated, water vapor is introduced, the steam flow rate is adjusted, the pressure of the cavity is controlled at 40Pa, and the reaction power is adjusted to 300W, The electrode spacing is 500mm. The plasma treatment time of stainless steel surface is 5s. After treatment, by visual inspection, it is detected that the rust spots on the surface of the copper sheet are all removed, and the surface of the copper sheet presents the original luster.

实施例4:在本实施例中,采用纳秒脉冲放电系统,将表面带有锈渍的生铁放入腔体中,生铁的大小为30cm2。所述的辉光等离子体的形成过程是,将电极接在腔体两侧,对反应腔体抽真空,并通入水蒸气,调节蒸汽流速,将腔体气压控制于10Pa,调控反应功率200W、电极间距700mm。等离子体处理不锈钢表面的时间为10s。处理后通过目测方法,检测生铁表面的锈斑全部除尽,生铁表面呈现原有光泽。Embodiment 4: In this embodiment, a nanosecond pulse discharge system is used, and pig iron with rust stains on the surface is put into the cavity, and the size of the pig iron is 30 cm 2 . The formation process of the glow plasma is that the electrodes are connected to both sides of the cavity, the reaction cavity is evacuated, water vapor is introduced, the steam flow rate is adjusted, the cavity pressure is controlled at 10Pa, and the reaction power is adjusted to 200W, The electrode spacing is 700mm. The plasma treatment time of stainless steel surface is 10s. After the treatment, the rust spots on the surface of the pig iron are all removed by visual inspection, and the surface of the pig iron presents the original luster.

实施例5:在本实施例中,采用纳秒脉冲放电系统,将表面带有锈渍的钴片放入腔体中,钴片的大小为80cm2。所述的辉光等离子体的形成过程是,将电极接在腔体两侧,对反应腔体抽真空,并通入水蒸气,调节蒸汽流速,将腔体气压控制于30Pa,调控反应功率400W、电极间距400mm。等离子体处理钴片表面的时间为60s。处理后通过目测方法,检测钴片表面的锈斑全部除尽,钴Embodiment 5: In this embodiment, a nanosecond pulse discharge system is used to put a cobalt sheet with rust stains on the surface into the cavity, and the size of the cobalt sheet is 80 cm 2 . The formation process of the glow plasma is that electrodes are connected to both sides of the cavity, the reaction cavity is evacuated, water vapor is introduced, the steam flow rate is adjusted, the pressure of the cavity is controlled at 30Pa, and the reaction power is adjusted to 400W, The electrode spacing is 400mm. The plasma treatment time for the surface of the cobalt sheet is 60s. After the treatment, the rust spots on the surface of the cobalt flakes are all removed by visual inspection, and the cobalt

实施例6:在本实施例中,采用纳秒脉冲放电系统,将表面带有锈渍的镍片放入腔体中,钴片的大小为50cm2。所述的辉光等离子体的形成过程是,将电极接在腔体两侧,对反应腔体抽真空,并通入水蒸气,调节蒸汽流速,将腔体气压控制于40Pa,调控反应功率150W、电极间距300mm。等离子体处理镍片表面的时间为30s。处理后通过目测方法,检测镍片表面的锈斑全部除尽,镍片表面呈现原有光泽。Embodiment 6: In this embodiment, a nanosecond pulse discharge system is used to put a nickel sheet with rust stains on the surface into the cavity, and the size of the cobalt sheet is 50 cm 2 . The formation process of the glow plasma is that electrodes are connected to both sides of the cavity, the reaction cavity is evacuated, water vapor is introduced, the steam flow rate is adjusted, the pressure of the cavity is controlled at 40Pa, and the reaction power is adjusted to 150W, The electrode spacing is 300mm. The time for the plasma treatment on the surface of the nickel sheet is 30s. After the treatment, by visual inspection, it is detected that the rust spots on the surface of the nickel sheet are all removed, and the surface of the nickel sheet presents the original luster.

实施例7:在本实施例中,采用纳秒脉冲放电系统,将表面带有锈渍的铁片放入腔体中,铁片的大小为20cm2。所述的辉光等离子体的形成过程是,将电极接在腔体两侧,对反应腔体抽真空,并通入水蒸气,调节蒸汽流速,将腔体气压控制于25Pa,调控反应功率250W、电极间距200mm。等离子体处理铁片表面的时间为15s。处理后通过目测方法,检测铁片表面的锈斑全部除尽,镍片表面呈现原有光泽。Embodiment 7: In this embodiment, a nanosecond pulse discharge system is used, and an iron sheet with rust stains on the surface is put into the cavity, and the size of the iron sheet is 20 cm 2 . The formation process of the glow plasma is that electrodes are connected to both sides of the cavity, the reaction cavity is evacuated, water vapor is introduced, the steam flow rate is adjusted, the pressure of the cavity is controlled at 25Pa, and the reaction power is adjusted to 250W, The electrode spacing is 200mm. The plasma treatment time on the surface of the iron sheet is 15s. After treatment, by visual inspection, it is detected that the rust spots on the surface of the iron sheet are completely removed, and the surface of the nickel sheet presents the original luster.

如图1所示,是本申请的水蒸汽辉光等离子体除锈系统,除锈系统将水蒸气4作为反应源通入辉光等离子腔体2中,通过辉光放电系统1激发水蒸气4 产生辉光等离子体,对金属样品3表面进行除锈处理。As shown in Figure 1, it is the water vapor glow plasma rust removal system of the present application. The rust removal system uses water vapor 4 as a reaction source into the glow plasma cavity 2, and the water vapor 4 is excited by the glow discharge system 1. Glow plasma is generated to derust the surface of the metal sample 3 .

如图2所示,是芯片加工中未使用的铜支架,其表面光洁;如图3所示,为芯片加工中使用被多次使用的铜支架,其表面锈渍明显;如图4所示,铜支架在使用本申请提供的除锈方法除锈后,表面光洁。As shown in Figure 2, it is an unused copper bracket in chip processing, and its surface is smooth; as shown in Figure 3, it is a copper bracket that has been used many times in chip processing, and its surface has obvious rust stains; as shown in Figure 4 , the surface of the copper bracket is smooth and clean after using the derusting method provided by the application for derusting.

以上所述仅是本申请的优选实施方式,应当指出:对于本技术领域的普通技术人员来说,在不脱离本申请原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本申请的保护范围。The above is only the preferred embodiment of the application, it should be pointed out that for those of ordinary skill in the art, without departing from the principle of the application, some improvements and modifications can also be made, and these improvements and modifications are also It should be regarded as the protection scope of this application.

另外需要说明的是,在上述具体实施方式中所描述的各个具体技术特征,在不矛盾的情况下,可以通过任何合适的方式进行组合,为了避免不必要的重复,本申请对各种可能的组合方式不再另行说明。In addition, it should be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable way if there is no contradiction. The combination method will not be described separately.

此外,本申请的各种不同的实施方式之间也可以进行任意组合,只要其不违背本申请的思想,其同样应当视为本申请所公开的内容。In addition, any combination of various implementations of the present application can also be made, as long as they do not violate the idea of the present application, they should also be regarded as the content disclosed in the present application.

Claims (10)

1.一种利用低温低压水蒸汽等离子体的金属表面除锈方法,其特征在于,所述方法是利用低温低压等离子体对所述金属表面进行除锈;1. A metal surface derusting method utilizing low-temperature and low-pressure water vapor plasma, characterized in that, the method is to utilize low-temperature and low-pressure plasma to derust the metal surface; 利用低温低压等离子体对所述金属表面进行除锈,具体为:将水蒸气作为反应源通入辉光等离子腔体中,通过辉光放电系统激发水蒸气产生辉光等离子体,对所述金属表面进行除锈处理;Use low-temperature and low-pressure plasma to derust the metal surface, specifically: water vapor is introduced into the glow plasma chamber as a reaction source, and the water vapor is excited by a glow discharge system to generate glow plasma, and the metal surface is derusted. Rust removal treatment on the surface; 其原理是水蒸气在辉光放电中解离形成高活性含氢粒子,包括氢粒子、氢氧根粒子,由于电子在腔体中的速度远超过含氢粒子,电子会集中在金属基底表面,在金属表面处形成负电鞘层,氢粒子带正电,会在负电鞘层的影响下优先与金属基底接触,与表面锈渍中的氧化物或氢氧化物反应,生成的氢氧根或水分子以游离态的形式离开金属表面,达到去除金属表面锈渍的作用。The principle is that water vapor dissociates in the glow discharge to form highly active hydrogen-containing particles, including hydrogen particles and hydroxide particles. Since the speed of electrons in the cavity is much higher than that of hydrogen-containing particles, the electrons will concentrate on the surface of the metal substrate. A negative electric sheath is formed on the metal surface, and hydrogen particles are positively charged. Under the influence of the negative electric sheath, they will preferentially contact the metal substrate, react with oxides or hydroxides in the surface rust, and generate hydroxide or water. Molecules leave the metal surface in a free state to remove rust stains on the metal surface. 2.根据权利要求1所述的金属表面除锈方法,其特征在于,所述水蒸气的水选自纯水或超纯水。2. metal surface derusting method according to claim 1, is characterized in that, the water of described steam is selected from pure water or ultrapure water. 3.根据权利要求1所述的金属表面除锈方法,其特征在于,所述辉光放电系统包括微波放电、射频放电、微秒脉冲放电中的任意一种。3. The metal surface rust removal method according to claim 1, wherein the glow discharge system includes any one of microwave discharge, radio frequency discharge, and microsecond pulse discharge. 4.根据权利要求1所述的金属表面除锈方法,其特征在于,所述金属包括铜、铁、生铁、不锈钢、钴、镍中的任意一种。4. The metal surface derusting method according to claim 1, wherein the metal comprises any one of copper, iron, pig iron, stainless steel, cobalt, and nickel. 5.根据权利要求1所述的金属表面除锈方法,其特征在于,所述金属为工业中使用的任意3d过渡金属器件。5. The metal surface derusting method according to claim 1, characterized in that, the metal is any 3d transition metal device used in industry. 6.根据权利要求1所述的金属表面除锈方法,其特征在于,所述金属的单次处理面积在1~500cm2,处理厚度在1~100mm。6 . The method for derusting metal surfaces according to claim 1 , characterized in that, the single treatment area of the metal is 1-500 cm 2 , and the treatment thickness is 1-100 mm. 7 . 7.根据权利要求1所述的金属表面除锈方法,其特征在于,所述低温低压等离子体除锈处理的时间为1~200s。7. The method for derusting metal surfaces according to claim 1, characterized in that, the time for the low-temperature and low-pressure plasma derusting treatment is 1-200s. 8.根据权利要求1所述的一种表面除锈方法,其特征在于,所述低温低压等离子体在除锈时,所述辉光等离子腔体的温度始终保持在室温环境。8 . The surface derusting method according to claim 1 , characterized in that, when the low-temperature and low-pressure plasma is derusting, the temperature of the glow plasma chamber is always kept at room temperature. 9.一种利用低温低压水蒸汽等离子体的金属表面除锈系统,其特征在于,所述系统包括辉光等离子放电系统、辉光等离子腔体、控制单元;9. A metal surface derusting system utilizing low-temperature and low-pressure water vapor plasma, characterized in that the system includes a glow plasma discharge system, a glow plasma cavity, and a control unit; 所述控制单元将水蒸气作为反应源通入所述辉光等离子腔体中,通过所述辉光放电系统激发水蒸气产生辉光等离子体,对所述金属表面进行除锈处理;The control unit feeds water vapor into the glow plasma chamber as a reaction source, excites water vapor through the glow discharge system to generate glow plasma, and performs rust removal treatment on the metal surface; 其原理是水蒸气在辉光放电中解离形成高活性含氢粒子,包括氢粒子、氢氧根粒子,由于电子在腔体中的运动速度远超过含氢粒子,电子会集中在金属基底表面,使金属表面形成负电鞘层,氢粒子带正电,会在负电鞘层的影响下优先与金属基底接触,与表面锈渍中的氧化物或氢氧化物反应,生成的氢氧根或水分子以游离态的形式离开金属表面,达到去除金属表面锈渍的作用。The principle is that water vapor dissociates in the glow discharge to form highly active hydrogen-containing particles, including hydrogen particles and hydroxide particles. Since the movement speed of electrons in the cavity is much faster than that of hydrogen-containing particles, the electrons will concentrate on the surface of the metal substrate , so that the metal surface forms a negative electric sheath, and the hydrogen particles are positively charged, and under the influence of the negative electric sheath, they will preferentially contact the metal substrate, react with the oxide or hydroxide in the surface rust, and generate hydroxide or water Molecules leave the metal surface in a free state to remove rust stains on the metal surface. 10.根据权利要求1所述的一种表面除锈系统,其特征在于,在除锈时,所述辉光放电等离子体腔体的温度始终保持在室温环境。10. A surface derusting system according to claim 1, characterized in that, during derusting, the temperature of the glow discharge plasma cavity is always kept at room temperature.
CN202111591492.2A 2021-12-23 2021-12-23 A large-scale plasma rust removal system and method for metal surfaces Pending CN116334644A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111591492.2A CN116334644A (en) 2021-12-23 2021-12-23 A large-scale plasma rust removal system and method for metal surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111591492.2A CN116334644A (en) 2021-12-23 2021-12-23 A large-scale plasma rust removal system and method for metal surfaces

Publications (1)

Publication Number Publication Date
CN116334644A true CN116334644A (en) 2023-06-27

Family

ID=86879330

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111591492.2A Pending CN116334644A (en) 2021-12-23 2021-12-23 A large-scale plasma rust removal system and method for metal surfaces

Country Status (1)

Country Link
CN (1) CN116334644A (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06279842A (en) * 1993-01-29 1994-10-04 Mitsubishi Heavy Ind Ltd Continuous plasma reduction apparatus for steel sheet
CN1212028A (en) * 1996-02-23 1999-03-24 波音公司 Plasma descaling of titanium and titanium alloys
JP2006307255A (en) * 2005-04-27 2006-11-09 Micro Denshi Kk Treatment device for descaling or the like utilizing microwave
CN101030531A (en) * 2006-02-27 2007-09-05 应用材料股份有限公司 Method for controlling corrosion of a substrate
US20090114621A1 (en) * 2006-02-02 2009-05-07 Primoz Eiselt Method and device for the plasma treatment of materials
CN107794548A (en) * 2017-09-22 2018-03-13 深圳市中科摩方科技有限公司 A kind of surface derusting method of metal material
CN108284107A (en) * 2018-02-02 2018-07-17 安徽静斯德科技有限公司 A kind of workpiece cleaning method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06279842A (en) * 1993-01-29 1994-10-04 Mitsubishi Heavy Ind Ltd Continuous plasma reduction apparatus for steel sheet
CN1212028A (en) * 1996-02-23 1999-03-24 波音公司 Plasma descaling of titanium and titanium alloys
JP2006307255A (en) * 2005-04-27 2006-11-09 Micro Denshi Kk Treatment device for descaling or the like utilizing microwave
US20090114621A1 (en) * 2006-02-02 2009-05-07 Primoz Eiselt Method and device for the plasma treatment of materials
CN101030531A (en) * 2006-02-27 2007-09-05 应用材料股份有限公司 Method for controlling corrosion of a substrate
CN107794548A (en) * 2017-09-22 2018-03-13 深圳市中科摩方科技有限公司 A kind of surface derusting method of metal material
CN108284107A (en) * 2018-02-02 2018-07-17 安徽静斯德科技有限公司 A kind of workpiece cleaning method

Similar Documents

Publication Publication Date Title
CN108611623B (en) Spraying coating device and method for inhibiting secondary electron yield of solid dielectric material
CN105792495B (en) A kind of device and method generating atmospheric pressure homogeneous plasma brush
CN103789716A (en) Method for modifying surface of metal material by adopting atmospheric-pressure cold plasma jet
JP5558465B2 (en) Method and equipment for surface preparation by dielectric barrier discharge
CN108284107A (en) A kind of workpiece cleaning method
CN104085884A (en) A method for improving electrochemical performance by reducing graphene oxide (GO) with hydrogen (H2) and argon (Ar) mixed plasma
CN106011786A (en) Atmospheric pressure diffuse discharge device and method for depositing SiO2-like thin film on metal surface
CN116334644A (en) A large-scale plasma rust removal system and method for metal surfaces
CN103311104B (en) A kind of preparation method of Graphene
Kalita et al. Effective reduction and doping of graphene oxide films at near-room temperature by microwave-excited surface-wave plasma process
CN103275342B (en) Method for pulsed bias-assistant plasma high-speed treatment on organic film
CN101393852B (en) A kind of cleaning method of semiconductor silicon wafer
CN116213368A (en) Low-temperature plasma rust removal method for metal support surface
CN101284711B (en) Portable Atmospheric Pressure Plasma Cleaner
CN104073834B (en) Preparation method of nanometer diamond-like powder
CN108554745A (en) A kind of surface treatment method of DLC film layer
CN103879995B (en) The preparation method of carbon nanometer wall powder and the preparation method of graphene nanobelt
CN106532061A (en) Lithium ion battery positive current collector processing device and processing method thereof
CN105502474B (en) A kind of atmospheric pressure plasma preparation method of basic copper nitrate
CN1264163A (en) Method for cleaning surface of indium phosphide
CN113999422B (en) Polytetrafluoroethylene surface modification method and polytetrafluoroethylene
CN103681197B (en) A kind of capillary glass inside pipe wall plasma processing apparatus
CN202246435U (en) Plasma processing device for ultra-smooth surfaces
Saito et al. Effect of pressure on surface roughness treated by cathode spots of low pressure arc
CN102732109A (en) Coating and method for eliminating electromagnetic radiation generated by using electrical appliance

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination