CN116317685B - Piezoelectric micro-motor and preparation method thereof - Google Patents

Abstract

The application relates to a piezoelectric micromotor and a preparation method thereof. Wherein, the piezoelectric micromotor includes a stator and a rotor, and the stator includes a controlled deformation part, a passive deformation part and a transmission link group. The controlled deformation part and the passive deformation part are provided with rotor through holes, and the rotor is arranged in at least one of the rotor through holes. An inverse piezoelectric part is also provided on the controlled deformation part, and the inverse piezoelectric part is used for generating deformation. The transmission link group is located between the controlled deformation part and the passive deformation part. The transmission link set includes at least two transmission links, and the two ends of the transmission links are respectively connected to the controlled deformation part and the passive deformation part. The controlled deformation part, the passive deformation part are integrally formed with the transmission connecting rod set. According to the embodiment of the present application, the processing requirements of the piezoelectric micromotor 10 at the millimeter level or even at the micron level can be met.

Description

Piezoelectric micromotor and its preparation method

technical field

The present application relates to the field of piezoelectric motors, in particular to a piezoelectric micromotor and a preparation method thereof.

Background technique

In the related technology, different from the traditional electromagnetic motor, the piezoelectric motor is a new principle motor, which uses the inverse piezoelectric effect of piezoelectric ceramics to make the stator vibrate slightly, and then through the friction of the contact interface between the stator and the rotor. The micro-vibration of the stator is converted into the macroscopic motion of the rotor. Therefore, piezoelectric motors have the characteristics of compact structure, no electromagnetic interference, easy miniaturization, and high energy density, which enable piezoelectric motors to be successfully used in many fields such as digital cameras, biomedical therapy, aerospace equipment, and precision systems.

However, the piezoelectric micromotor processed by machining has a size limit, and once the size is below a certain size, the performance of the motor will drop sharply.

Contents of the invention

The application provides a piezoelectric micromotor and a preparation method thereof.

According to the first aspect of the embodiments of the present application, there is provided a piezoelectric micromotor, including a stator and a rotor, and the stator includes a controlled deformation part, a passive deformation part and a transmission linkage group;

The controlled deformation part and the passive deformation part are provided with at least one rotor through hole, and the rotor is arranged in the rotor through hole;

The controlled deformation part is also provided with an inverse piezoelectric part for generating deformation;

The transmission link set is located between the controlled deformation part and the passive deformation part; the transmission link set includes at least two transmission links, and the two ends of the transmission links are respectively connected to the controlled deformation part. controlling the deformation part and the passive deformation part;

The controlled deformation part, the passive deformation part are integrally formed with the transmission connecting rod set.

In some embodiments, the controlled deformation part includes a first controlled deformation part and a second controlled deformation part; the transmission link set includes a first link set and a second link set; the first The connecting rod group is located between the first controlled deformation part and the passive deformation part, and the second connecting rod group is located between the second controlled deformation part and the passive deformation part; the first The controlled deformation part and the second controlled deformation part are symmetrically arranged on both sides of the passive deformation part.

In some embodiments, the first controlled deformation portion and the second controlled deformation portion are rectangular; the inverse piezoelectric portion is located between the first controlled deformation portion and the second controlled deformation portion On the four sides, the four corners of the first controlled deformation part and the second controlled deformation part are arc-shaped.

In some embodiments, the inverse piezoelectric part is used to generate deformation after receiving an excitation signal; two opposite inverse piezoelectric parts on each of the controlled deformation parts form a group, and each of the controlled deformation parts The two groups of inverse piezoelectric parts on the deformation control part are respectively used to receive the cosine excitation signal and the sine excitation signal;

The frequency of the excitation signal is greater than or equal to 393.368 kHz and less than or equal to 393.871 kHz. At this time, two resonant modes of the stator will be excited to drive the rotor through resonant vibration of the stator.

In some embodiments, the direction of the controlled deformation part pointing to the passive deformation part is the horizontal direction, and the direction perpendicular to the horizontal direction is the longitudinal direction. At this time, the frequency of the excitation signal may not be near the resonance frequency of the working mode. , the stator forms an elliptical motion track at the driving point through non-resonance;

The reverse piezoelectric part located on the first controlled deformation part includes a first group and a second group, the first group is located on the lateral side of the first controlled deformation part, and the second group is located on the lateral side of the first controlled deformation part. On the longitudinal side of the first controlled deformation part; the reverse piezoelectric part located at the second controlled deformation part includes a third group and a fourth group, and the third group is located at the second controlled deformation part. On the lateral side of the deformation part, the fourth group is located on the longitudinal side of the second controlled deformation part;

The first group and the fourth group are used to receive the sine excitation signal, and the second group and the third group are used to receive the cosine excitation signal; or, the first group and the fourth group use For receiving cosine excitation signals, the second group and the third group are used for receiving sinusoid excitation signals.

In some embodiments, the piezoelectric micromotor also includes microtooth;

The micro-tooth is disposed in the through hole of the rotor and is located between the stator and the rotor; the micro-tooth is disposed on at least one of the stator and the rotor; the stator passes through the The microteeth are in contact with the rotor.

In some embodiments, the micro-tooths are distributed at equal intervals, and the spacing between adjacent micro-tooths is an integer multiple of the wavelength; the wavelength conforms to the formula: λ=v×T; where λ is the wavelength, v is the speed of sound in the stator or rotor, and T is the period of applying the sinusoidal excitation signal.

In some embodiments, the piezoelectric micromotor also includes a micro-drive structure;

The micro-drive structure includes a conductive column and a micro-drive circuit; the micro-drive circuit is arranged on a flexible carrier; one end of the conductive column is electrically connected to the micro-drive circuit, and the other end is electrically connected to the reverse piezoelectric part .

According to the second aspect of the embodiments of the present application, a method for manufacturing a piezoelectric micromotor is provided, including: providing a substrate;

cutting the base body by laser to form a stator base body, and forming an inverse piezoelectric part with a thickness of 0.01 mm to 0.1 mm on the stator base body by magnetron sputtering technology;

After forming the reverse piezoelectric part, polarizing the reverse piezoelectric part through a polarization process to form a stator;

After the reverse piezoelectric part is polarized, a flexible carrier is provided; a micro-drive circuit is formed on the flexible carrier to form a micro-drive structure; connect.

In some embodiments, the reverse piezoelectric part is formed on the stator base by magnetron sputtering technology, and the reverse piezoelectric part is polarized by a polarization process, including:

A polymer mask is set on the stator base, and the reverse piezoelectric part is formed on the stator base by magnetron sputtering technology; after the reverse piezoelectric part is formed, the high The molecular mask plate is used to polarize the inverse piezoelectric part through the process of corona polarization.

In some embodiments, after polarizing the inverse piezoelectric part through a polarization process, further comprising:

A polymer mask plate is arranged on the stator, and a rotor is formed by plating in the through hole of the rotor by magnetron sputtering technology; after the rotor is formed, the polymer mask plate is removed.

In some embodiments, after forming the rotor, it further includes:

Installing a pre-pressure structure on the stator; forming a micro-drive circuit on a flexible carrier by inkjet printing;

A solid sleeve is arranged on the pad of the micro-drive circuit, the hollow part of the solid sleeve is aligned with the pad of the micro-drive circuit; conductive glue is poured into the solid sleeve; After solidification, the solid sleeve is removed, and the solidified conductive glue is polished to form a conductive column; the other end of the conductive column is electrically connected to the reverse piezoelectric part.

According to the embodiment of the present application, it can be seen that when the size of the piezoelectric micromotor is at the millimeter level or even smaller, if the parts of the stator are formed separately and reassembled, there will be errors in the processing of each part, and after the assembly, it will cause Larger machining deviations. After repeated experiments, the inventor found that for the piezoelectric micromotor, the processing deviation of the substrate at the level of 0.1 mm will also cause the piezoelectric micromotor to fail to operate stably. By integrating the controlled deformation part, the passive deformation part and the transmission link group, the machining deviation of the stator as a whole can be effectively reduced, thereby meeting the processing requirements of millimeter-level or even micron-level piezoelectric micromotors.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.

Description of drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and together with the description serve to explain the principles of the application.

FIG. 1 is a schematic structural diagram of a piezoelectric micromotor according to an embodiment of the present application.

Fig. 2 is a schematic structural diagram of a stator according to an embodiment of the present application.

Fig. 3 is a schematic structural diagram of a controlled deformation part according to an embodiment of the present application.

Fig. 4 is a schematic diagram showing simulations of various deformations of a stator according to an embodiment of the present application.

Fig. 5 is a schematic diagram showing simulations of various deformations of another stator according to an embodiment of the present application.

Fig. 6 is a partially enlarged view of a piezoelectric micromotor located in a controlled deformation part according to an embodiment of the present application.

Fig. 7 is a schematic structural diagram of a micro-drive structure according to an embodiment of the present application.

FIG. 8 is a schematic structural diagram of a micro-drive circuit according to an embodiment of the present application.

Fig. 9 is a flow chart of a method for manufacturing a piezoelectric micromotor according to an embodiment of the present application.

Detailed ways

Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. The implementations described in the following exemplary embodiments do not represent all implementations consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with aspects of the present application as recited in the appended claims.

The embodiment of the present application provides a piezoelectric micromotor 10 , and FIG. 1 shows a schematic structural diagram of the piezoelectric micromotor 10 . As shown in FIG. 1 , the piezoelectric micromotor 10 includes: a stator 11 and a rotor 12 .

The stator 11 includes a controlled deformation part 13 , a passive deformation part 14 and a transmission connecting rod set 15 .

The controlled deformation part 13 and the passive deformation part 14 are provided with at least one rotor through hole 16 , and the rotor 12 is disposed in the rotor through hole 16 .

Specifically, the controlled deformation part 13 and the passive deformation part 14 are provided with at least one rotor through hole 16, that is, one or more rotor through holes 16 may be provided only in the controlled deformation part 13, or may only be provided in the passive deformation part. 14 is provided with one or more rotor through holes 16 , or one or more rotor through holes 16 may be provided at both the controlled deformation part 13 and the passive deformation part 14 . Through different rotor through holes 16 and rotor 12 settings, the number of loads connected to the piezoelectric micromotor 10 can be flexibly adjusted, and the piezoelectric micromotor 10 can also be flexibly adjusted to loads with different parameters, so that the voltage can be expanded. The usage scenarios and usage scope of the electric micro-motor 10.

The controlled deformation part 13 is also provided with an inverse piezoelectric part 17 for generating deformation.

The transmission link group 15 is located between the controlled deformation part 13 and the passive deformation part 14 . The transmission link set 15 includes at least two transmission links 151 , and the two ends of the transmission links 151 are respectively connected to the controlled deformation part 13 and the passive deformation part 14 .

Specifically, the inverse piezoelectric part 17 is made of a piezoelectric material, and the piezoelectric material may be piezoelectric ceramics, but is not limited thereto. Therefore, when the inverse piezoelectric part 17 receives the excitation signal, it will generate a continuously changing deformation under the action of the excitation signal. The deformed inverse piezoelectric part 17 will drive the controlled deformation part 13 to produce a continuously changing deformation, and the deformation of the controlled deformation part 13 will drive the rotor through hole 16 to produce a continuously changing deformation. Therefore, the rotor 12 can be driven to rotate through the rotor through-hole 16 which continuously changes the deformation, so as to drive the load connected with the piezoelectric micromotor 10 .

Moreover, the deformation of the controlled deformation part 13 can also be transmitted to the passive deformation part 14 through the transmission link group 15 to drive its movement, thus, the deformation of the controlled deformation part 13 and the passive deformation part 14 can simultaneously drive multiple rotors The through hole 16 produces a continuously changing deformation, and then, the rotor through hole 16 which produces a continuously changing deformation can drive a plurality of rotors 12 to rotate, so as to drive a plurality of loads connected to the piezoelectric micromotor 10 .

Meanwhile, FIG. 2 shows a schematic structural view of a stator 11 . As shown in FIG. 1 and with reference to FIG. 2 , the controlled deformation portion 13 of the stator 11 may be rectangular or cross-shaped, but not limited thereto. The deformed shape is produced under the action of .

The controlled deformation part 13 , the passive deformation part 14 and the transmission link group 15 are integrally formed.

Specifically, the integrated formation mentioned in this application means that the controlled deformation part 13, the passive deformation part 14 and the transmission link group 15 are formed after processing from the same material, and there is no need to form the controlled deformation part 13, the passive deformation part After the part 14 and the transmission link group 15, the assembly process is carried out.

When the size of the piezoelectric micromotor 10 is at the millimeter level or even smaller, if the various parts of the stator 11 are formed separately and reassembled, there will be errors in the processing of each part, and a greater processing deviation will be caused after the assembly . After repeated experiments, the inventor found that for the piezoelectric micromotor 10 with a size ranging from 1 mm to 5 mm, the processing deviation of the substrate at the level of 0.1 mm will also cause the piezoelectric micromotor 10 to fail to operate stably. By integrating the controlled deformation part 13, the passive deformation part 14 and the transmission link group 15, the overall processing deviation of the stator 11 can be effectively reduced, thereby meeting the processing requirements of the piezoelectric micromotor 10 at the millimeter level or even the micron level .

In some embodiments, as shown in FIG. 1 , the controlled deformation part 13 and the passive deformation part 14 are located on the same central axis X. The center of each rotor through hole 16 may lie on the central axis X.

Specifically, the rotor through hole 16 is circular when the controlled deformation part 13 and the passive deformation part 14 are not deformed, and the center of the rotor through hole 16 is the center of the circle. The rotor through hole 16 is elliptical when the controlled deformation part 13 and the passive deformation part 14 are deformed, and the center of the rotor through hole 16 is the intersection point of the major axis and the minor axis of the ellipse.

It should be noted that the center of each rotor through hole 16 located on the central axis X is only a relatively feasible embodiment in this application, but in other embodiments of this application, the center of each rotor through hole 16 is also Some of them may be located on the central axis X, some of them may not be located on the central axis X, or all of them may not be located on the central axis X according to actual needs.

In some embodiments, as shown in FIG. 1 , the piezoelectric micromotor 10 further includes a pre-stress structure 19 . The pre-compression structure 19 is used to keep the stator 11 relatively fixed. Keeping the stator 11 relatively fixed by the pre-pressure structure 19 can keep other structures connected to the stator 11 relatively fixed, so that the normal operation of the piezoelectric micromotor 10 can be kept, and other structures can be avoided from interfering with the stator 11 Interfering with the deformation amplitude of the stator 11.

The preload structure 19 includes: a frame 191 , a fastening nut 192 and a disc spring 193 .

The fastening nut 192 is mounted on the frame 191 through threads. The preload structure 19 is used to keep the stator 11 relatively fixed, that is, to adjust the distance between it and the passive deformation part 14 by tightening the nut 192 , and keep the distance at the level where the disc spring 193 can generate elastic force without being overly compressed. Moreover, since the disc spring 193 still maintains a certain space for elastic deformation, it will not interfere too much with the deformation generated by the passive deformation part 14 .

At the same time, since the deformation amplitude generated by the passive deformation part 14 is smaller than that of the controlled deformation part 13, the compression position of the pre-compression structure 19 is located in the passive deformation part 14, which can minimize the deformation of the stator 11 by the pre-compression structure 19 magnitude of the impact.

In some embodiments, as shown in FIG. 1 , the transmission link 151 forms an angle α with the central axis X. In this way, the deformation generated by the controlled deformation part 13 can be amplified by the transmission link group 15 and then transmitted to the passive deformation part through the triangular amplification principle, so that the controlled deformation part 13 and the passive deformation part 14 can be used to drive different requirements. load.

It should be noted that, in this embodiment, the deformation generated by the controlled deformation part 13 is amplified by the transmission link group 15 and then transmitted to the passive deformation part through the triangular amplification principle, but it is not limited thereto. In other embodiments, The deformation generated by the controlled deformation part 13 can also be transmitted to the passive deformation part after being reduced by the transmission link set 15, so that the controlled deformation part 13 and the passive deformation part 14 can be used to drive loads with different requirements.

In some embodiments, as shown in FIG. 1 , the controlled deformation part 13 includes a first controlled deformation part 131 and a second controlled deformation part 132 . The transmission link set 15 includes a first link set 152 and a second link set 153 . The first connecting rod group 152 is located between the first controlled deformation part 131 and the passive deformation part 14 , and the second connecting rod group 153 is located between the second controlled deformation part 132 and the passive deformation part 14 . The first controlled deformation part 131 and the second controlled deformation part 132 are symmetrically disposed on two sides of the passive deformation part 14 .

By arranging the first controlled deformation part 131 and the second controlled deformation part 132 symmetrically on both sides of the passive deformation part 14, the force of the passive deformation part 14 can be made more uniform, thereby reducing the passive deformation part 14 The deformation caused by the uneven force is different from the deformation of the controlled deformation part 13 , furthermore, the stability of the passive deformation part 14 can be improved, and the overall operation stability of the piezoelectric micromotor 10 can be improved.

In some embodiments, FIG. 3 shows a schematic structural diagram of a controlled deformation part 13 . As shown in FIG. 1 and FIG. 3 , the first controlled deformation portion 131 and the second controlled deformation portion 132 are rectangular. The inverse piezoelectric part 17 is located on four sides of the first controlled deformation part 131 and the second controlled deformation part 132 , and the four corners of the first controlled deformation part 131 and the second controlled deformation part 132 are circular arcs.

Specifically, in this embodiment, the inverse piezoelectric part 17 is symmetrically disposed on four sides of the first controlled deformation part 131 and the second controlled deformation part 132 . Fig. 1 shows the central axis X, and the first axis Y1 of the first controlled deformation part 131 and the second axis Y2 of the second controlled deformation part 132, which are arranged on the inverse piezoelectric part of the first controlled deformation part 131 17 is symmetrical along the central axis X and the first axis Y1 , and the inverse piezoelectric part 17 disposed on the second controlled deformation part 132 is symmetrical along the central axis X and the second axis Y2 .

FIG. 4 and FIG. 5 show the simulated schematic diagrams of various deformations of the stator 11 after the first controlled deformation part 131 and the second controlled deformation part 132 are deformed obtained by the inventor after the simulation experiment. Referring to FIG. 4 and FIG. 5 , the inverse piezoelectric part 17 is located on four sides of the first controlled deformation part 131 and the second controlled deformation part 132 . After the inverse piezoelectric part 17 receives the excitation signal and undergoes deformation, it produces different deformation states and drives the controlled deformation part 13 to deform. It can also be seen from FIG. 4 and FIG. 5 that the inverse piezoelectric portion 17 is the portion on the stator 11 that undergoes the largest deformation.

After the controlled deformation part 13 is deformed, the rotor through hole 16 will transform into an oval shape due to the deformation of the controlled deformation part 13 . By controlling the inverse piezoelectric parts 17 on the four sides of the first controlled deformation part 131 or the second controlled deformation part 132, the deformation state of the first controlled deformation part 131 or the second controlled deformation part 132 can be adjusted. Adjust, so that the ellipse formed by the deformation of the rotor through hole 16 rotates around its center, thereby driving the rotor 12 to rotate.

It can also be observed from Fig. 4 and Fig. 5 that on the four corners of the controlled deformation part 13, there are obvious small deformation parts, that is, in Fig. 4 and Fig. 5, areas Q1, Q2, Q3, Q4 and The dark part shown at Q5. By setting the four corners of the first controlled deformation part 131 and the second controlled deformation part 132 in an arc shape, the deformation at the four corners of the first controlled deformation part 131 and the second controlled deformation part 132 can be reduced. Smaller parts, thus, can improve the deformation amount produced by the controlled deformation part 13 under the same deformation amount generated by the inverse piezoelectric part 17, and then can improve the operating efficiency of the stator 11, and the overall performance of the piezoelectric micromotor 10 operating efficiency.

It should be noted that due to viewing angle problems, Fig. 4 and Fig. 5 do not show the deformation amounts of all the corners of the first controlled deformation part 131 and the second controlled deformation part 132, but the remaining deformations are not shown. Variable corners can still refer to the shown deformation of the corners.

In some embodiments, the inverse piezoelectric part 17 is used to generate deformation after receiving an excitation signal. The two opposite inverse piezoelectric parts 17 on each controlled deformation part 13 form a group, and the two groups of inverse piezoelectric parts 17 on each controlled deformation part 13 are used to receive the cosine excitation signal and the sine excitation signal respectively.

The frequency of the excitation signal is greater than or equal to 393.368 kHz and less than or equal to 393.871 kHz.

Specifically, as shown in FIG. 1 , the two opposing piezoelectric parts 17 on the controlled deformation part 13 form a group, that is, on the first controlled deformation part 131, the reverse piezoelectric parts located on both sides of the first axis Y1 One group of piezoelectric parts 17, and another group of reverse piezoelectric parts 17 located on both sides of the central axis X. Similarly, on the second controlled deformation part 132 , there is one group of inverse piezoelectric parts 17 located on both sides of the second axis Y2 , and another group of inverse piezoelectric parts 17 located on both sides of the central axis X.

The frequency of the excitation signal is greater than or equal to 393.368 kHz and less than or equal to 393.871 kHz. When the excitation signal is within this range, it is just in the range of the resonance excitation of the two controlled deformation parts 13, thus, the resonance excitation of the controlled deformation part 13 can be used to increase its deformation after receiving the excitation signal, and then , which can improve parameters such as the overall rotational speed and output torque of the piezoelectric micromotor 10 .

In some embodiments, as shown in FIG. 1 , the direction from the controlled deformation part 13 to the passive deformation part 14 is the horizontal direction Z1, and the direction perpendicular to the horizontal direction Z1 is the longitudinal direction Z2.

The inverse piezoelectric part 17 located in the first controlled deformation part 131 includes a first group 171 and a second group 172, the first group 171 is located on the lateral side Z1 of the first controlled deformation part 131, and the second group 172 is located in the first group 172. The controlled deformation part 131 is on the edge of the longitudinal direction Z2. The inverse piezoelectric part 17 located in the second controlled deformation part 132 includes a third group 173 and a fourth group 174, the third group 173 is located on the lateral Z1 side of the second controlled deformation part 132, and the fourth group 174 is located in the second The controlled deformation part 132 is on the edge of the longitudinal direction Z2.

The first group 171 and the fourth group 174 are used to receive the sine excitation signal, the second group 172 and the third group 173 are used to receive the cosine excitation signal, or the first group 171 and the fourth group 174 are used to receive the cosine excitation signal, The second group 172 and the third group 173 are used to receive the sinusoidal excitation signal.

In this way, when the frequency of the excitation signal is within the range of 393.368 kHz to 393.871 kHz, the excitation signal is input in reverse to the piezoelectric part 17 in the above manner, and the two resonance modes of the controlled deformation part 13 can be simultaneously excited, thus, The resonant excitation of the controlled deformation part 13 can be further used to increase its deformation after receiving the excitation signal, and further, the overall speed and output torque of the piezoelectric micromotor 10 can be further improved.

In addition, the frequency of the excitation signal may not be in the range of 393.368 kHz to 393.871 kHz. At this time, when the excitation signal is still applied according to the above-mentioned mode, the first group 171 and the fourth group 174 of the inverse piezoelectric parts will generate vertical vibration under the excitation of the electric signal. Vibration in the same direction, the second group 172 and the third group 173 inverse piezoelectric parts will generate vibration in the horizontal direction under the excitation of electric signals, and the superposition of vibration in the two directions can also form an elliptical motion that can drive the rotor to rotate. But at this time, the piezoelectric micromotor works in a non-resonant state.

It should be noted that although the deformation of the passive deformation portion 14 shown in FIG. 4 is smaller than that of the passive deformation portion 14 shown in FIG. 5 , in fact, this is a simulation diagram obtained by the inventor under different data conditions . Therefore, the difference in deformation amount between FIG. 4 and FIG. 5 does not conflict with the effect in this embodiment.

In some embodiments, the transmission link set 15 includes at least one of a flexible hinge, a horn and a rigid link. Such setting can better realize the displacement amplification effect of the transmission link group 15, that is, the deformation amount transmitted from the transmission link group 15 to the passive deformation part 14 can be closer to the preset value, thus, the reverse pressure can be further improved. Under the same deformation generated by the electric part 17 , the deformation generated by the deformable part 13 can be controlled, thereby further improving the operating efficiency of the stator 11 and the overall operating efficiency of the piezoelectric micromotor 10 .

In some embodiments, as shown in FIG. 1 , the piezoelectric micromotor 10 further includes microtooths 18 .

The micro teeth 18 are disposed in the rotor through hole 16 and between the stator 11 and the rotor 12 . The micro teeth 18 are disposed on at least one of the stator 11 and the rotor 12 . The stator 11 is in contact with the rotor 12 through microteeth 18 .

Specifically, the micro-tooth 18 can be arranged only on the stator 11, that is, the solution shown in FIG. .

Moreover, making the stator 11 contact the rotor 12 through the micro-tooth 18 can increase the action area of the stator 11 on the rotor 12 . Specifically, FIG. 6 shows a partial enlarged view of the piezoelectric micromotor 10 located at the controlled deformation part 13. Referring to the content shown in FIG. After the shape of the hole 16 is transformed into an ellipse, the minor axis of the ellipse is shorter than the diameter of the circular rotor through hole 16 before deformation, and the micro-tooth 18 is pressed on the rotor 12 to lift the rotor through hole 16 against the rotor 12. The role of the area of action.

It should be noted that, in order to visually show the micro-tooth 18, the gap between the stator 11 and the rotor 12 shown in the drawings is relatively large, but in fact, the micro-tooth 18 itself is relatively small, and the shape of the rotor through hole 16 changes After being elliptical, the stator 11 can be in contact with the rotor 12 after superimposing the characteristics such as material flexibility of the stator 11 and the rotor 12 .

The contact between the stator 11 and the rotor 12 through the micro-tooth 18 can increase the active area of the stator 11 on the rotor 12, thereby improving the efficiency of the power transmitted from the stator 11 to the rotor 12, and further improving the performance of the piezoelectric micromotor 10.

In some embodiments, the micro-teeth 18 are equally spaced, and the distance between adjacent micro-teeth 18 is an integer multiple of the wavelength. The wavelength conforms to the formula: λ=v×T. Wherein, λ is the wavelength, v is the speed of sound in the stator 11 or the rotor 12, and T is the period of applying the sinusoidal excitation signal.

Specifically, when the micro-tooth 18 is only provided on the stator 11 , v is the speed of sound in the stator 11 . When the micro-teeth 18 are only provided on the rotor 12 , v is the speed of sound in the rotor 12 .

By making the micro-tooth 18 conform to the above-mentioned distribution law at the same time, the stator 11 can be better contacted with the rotor 12 through the micro-tooth 18, so as to increase the area of action of the stator 11 on the rotor 12, thereby further improving the transmission of the stator 11 to the rotor 12 The power efficiency of the piezoelectric micromotor 10 can further improve the performance of the piezoelectric micromotor 10.

In some embodiments, FIG. 7 shows a schematic structural view of the micro-drive structure 20, and the flexible carrier 21 is a hollow rectangular plate structure. As shown in FIG. 7 , the piezoelectric micromotor 10 also includes a micro-driving structure 20 .

Referring to the structural diagram of the micro-driving circuit 23 shown in FIG. 8 , the micro-driving structure 20 includes conductive pillars 22 and the micro-driving circuit 23 . The micro-drive circuit 23 is disposed on the flexible carrier 21 . One end of the conductive column 22 is electrically connected to the micro-drive circuit 23 , and the other end is electrically connected to the inverse piezoelectric part 17 .

Specifically, the area Q6 shown in FIG. 7 is used to refer to the stator 11, the rotor 12, the controlled deformation part 13, the passive deformation part 14, the transmission link group 15, the rotor through hole 16, the reverse pressure Electrical part 17, micro-tooth 18 and pre-pressure structure 19 and other parts.

Moreover, as shown in FIG. 7 , the frame of the flexible carrier 21 is a hollow rectangular plate structure, and the flexible carrier 21 surrounds the stator 11 . The micro-drive circuit 23 is a flexible composite circuit board, which not only includes a low-voltage drive piezoelectric micro-motor dedicated drive control chip, chip resistors, capacitors and inductors and other rigid devices, but also includes pads and wires. on carrier board 21. The flexible carrier 21 adopts a flexible base material, such as polyimide, polyethylene or polyethylene terephthalate, but is not limited thereto. By integrating the micro-drive structure 20 on the piezoelectric micro-motor 10 , the integration of the motor part and the driving part of the piezoelectric micro-motor 10 can be realized, and the degree of integration of the piezoelectric micro-motor 10 can be improved.

Various components of the micro-drive circuit 23 , such as wires and pads, are formed on the flexible carrier 21 by electrofluid inkjet printing, so that a finer structure of the micro-drive circuit 23 can be formed.

It should be noted that the hollow rectangular plate-shaped flexible carrier 21 used in the embodiment of the present application is only a more feasible embodiment, but it is not limited thereto in other embodiments. For example, the flexible carrier 21 can be a whole piece of rectangular flexible carrier, and the micro-drive structure 20 can also be arranged on the piezoelectric micro-motor 10 in layers. At this time, refer to the structure of the micro-drive circuit 23 shown in FIG. Schematic diagram, the first pad 40, the second pad 41, the third pad 42 and the fourth pad 43 to be connected with the piezoelectric ceramics on the piezoelectric micromotor on the micro drive circuit 23 are arranged on the first The position where the inverse piezoelectric part 17 in the controlled deformation part 131 or the second controlled deformation part 132 is parallel. The first pad 40, the second pad 41, the third pad 42, and the fourth pad 43 can be arranged in a rectangle, and the conductive column 22 is electrically connected to the corresponding pad and the inverse piezoelectric part 17, so that the conductive column can 22 realizes the conduction of the circuit and supports the micro-drive structure 20 at the same time.

According to the second aspect of the present application, a method for manufacturing a piezoelectric micromotor 10 is provided, and FIG. 9 shows a flow chart of the method for manufacturing a piezoelectric micromotor 10 . As shown in FIG. 9 , the manufacturing method of the piezoelectric micromotor 10 includes: step S110 to step S140.

In step S110, a substrate is provided.

In step S120 , the stator base is formed by laser cutting the base, and the inverse piezoelectric part with a thickness of 0.01 mm to 0.1 mm is formed on the stator base by magnetron sputtering technology.

Specifically, the stator base includes a first controlled deformation portion 131 , a second controlled deformation portion 132 , a passive deformation portion 14 and a transmission link set 15 .

In step S130 , after forming the reverse piezoelectric part 17 , the reverse piezoelectric part 17 is polarized through a polarization process to form the stator 11 .

In step S140 , after the inverse piezoelectric part 17 is polarized, the flexible carrier 21 is provided. A micro-drive circuit 23 is formed on a flexible carrier 21 to form a micro-drive structure 20 . The pads of the micro drive circuit 23 are electrically connected to the inverse piezoelectric part 17 .

In this way, the stator 11 can be formed by integral molding, that is, the controlled deformation part 13, the passive deformation part 14 and the transmission connecting rod group 15 are integrally formed, so that the processing of the piezoelectric micromotor 10 of the millimeter level or even the micron level can be satisfied. It is required, in turn, that the machining errors of various parts can be reduced to ensure that the piezoelectric micromotor 10 cannot operate stably.

In some embodiments, the reverse piezoelectric part 17 is plated on the stator base by magnetron sputtering technology, and the reverse piezoelectric part 17 is polarized by a polarization process, including:

A polymer mask is set on the stator base, and the inverse piezoelectric part 17 is formed on the stator base through magnetron sputtering technology. After the reverse piezoelectric part 17 is formed, the polymer mask is removed, and the reverse piezoelectric part 17 is polarized by a corona polarization process.

Due to the smaller size of the stator base body, correspondingly, the size of the inverse piezoelectric part 17 is also smaller, requiring higher precision. By setting a polymer mask and performing magnetron sputtering, the inverse piezoelectric part 17 can be directly deposited on the stator substrate, so that the inverse piezoelectric part 17 can be formed with a small error to achieve piezoelectricity. The error requirements of the micro-motor 10 on the inverse piezoelectric part 17. Moreover, compared with preparing and assembling the inverse piezoelectric portion 17 separately, forming the inverse piezoelectric portion 17 by direct deposition saves an assembly step, which can further reduce errors.

In some embodiments, after polarizing the inverse piezoelectric part 17 through the polarization process, further include:

A polymer mask is set on the stator 11, and the rotor 12 is formed by plating in the rotor through hole 16 by magnetron sputtering technology. After the rotor 12 is formed, the polymer mask is removed.

Specifically, when the rotor 12 is formed by plating in the rotor through hole 16 , there is a gap between the rotor 12 and the rotor through hole 16 . Therefore, the rotor 12 formed by plating can be kept independent from the rotor through hole 16 . Moreover, the material that partially falls into the gap between the rotor 12 and the rotor through hole 16 can also be removed through subsequent processes without affecting the machining accuracy of the stator 11 and the rotor 12 .

Due to the smaller size of the stator 11 , correspondingly, the smaller size of the rotor 12 requires higher precision. By arranging a polymer mask and performing magnetron sputtering, the rotor 12 can be directly deposited on the stator 11, so that the inverse piezoelectric part 17 can be formed with a small error to achieve the piezoelectric micromotor 10 Error requirements for the inverse piezoelectric part 17 . Moreover, compared with preparing and assembling the rotor 12 separately, the direct deposition forming of the rotor 12 omits an assembly step, which can further reduce errors.

In some embodiments, after the rotor 12 is formed, it further includes:

A pre-stress structure 19 is formed on the stator 11 . The micro-drive circuit 23 is formed on the flexible carrier 21 by inkjet printing.

A solid sleeve is arranged on the welding pad of the micro-drive circuit 23 , and the hollow part of the solid sleeve is aligned with the pad of the micro-drive circuit 23 . Fill the solid sleeve with conductive glue. After the conductive glue is solidified, the solid sleeve is removed, and the solidified conductive glue is polished to form the conductive pillars 22 . The other end of the conductive post 22 is electrically connected to the reverse piezoelectric part 17 .

Specifically, the micro-drive circuit 23 includes a first pad 40 , a second pad 41 , a third pad 42 and a fourth pad 43 . The provided solid sleeve may be a hollow rectangular sleeve with a height of 1.5 mm, but is not limited thereto. Wherein, the conductive adhesive may be epoxy conductive adhesive, specifically E-Solder 3022, but not limited thereto.

Through such a method, the micro driving structure 20 can be prepared. And by integrating the micro-drive circuit 23 in the flexible carrier 21, the micro-drive structure 20 can be integrated on the piezoelectric micro-motor 10, thereby, the integration of the motor part and the drive part of the piezoelectric micro-motor 10 can be realized, and the voltage can be increased. The degree of integration of the electric micro-motor 10.

The above-mentioned embodiments of the present application may complement each other under the condition that no conflict arises.

It should be noted that in the drawings, the dimensions of layers and regions may be exaggerated for clarity of illustration. Also it will be understood that when an element or layer is referred to as being "on" another element or layer, it can be directly on the other element or intervening layers may be present. Further, it will be understood that when an element or layer is referred to as being "under" another element or layer, it can be directly under the other element, or one or more intervening layers or elements may be present. In addition, it will also be understood that when a layer or element is referred to as being "between" two layers or elements, it can be the only layer between the two layers or elements, or one or more intervening layers may also be present. or components. Like reference numerals designate like elements throughout.

The term "plurality" means two or more, unless otherwise clearly defined.

Other embodiments of the present application will be readily apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This application is intended to cover any modification, use or adaptation of the application, these modifications, uses or adaptations follow the general principles of the application and include common knowledge or conventional technical means in the technical field not disclosed in the application . The specification and examples are to be considered exemplary only, with a true scope and spirit of the application indicated by the following claims.

It should be understood that the present application is not limited to the precise constructions which have been described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from the scope thereof. The scope of the application is limited only by the appended claims.

Claims (12)

1. A piezoelectric micro-motor, comprising a stator and a rotor, characterized in that the stator comprises a controlled deformation portion, a passive deformation portion and a transmission linkage; The controlled deformation part and the passive deformation part are provided with at least one rotor through hole, and the rotor is arranged in the rotor through hole; The controlled deformation part is also provided with an inverse piezoelectric part for generating deformation; The transmission link set is located between the controlled deformation part and the passive deformation part; the transmission link set includes at least two transmission links, and the two ends of the transmission links are respectively connected to the controlled deformation part. controlling the deformation part and the passive deformation part; The controlled deformation part, the passive deformation part are integrally formed with the transmission connecting rod set. 2. The piezoelectric micromotor according to claim 1, wherein the controlled deformation part comprises a first controlled deformation part and a second controlled deformation part; the transmission link group comprises a first connecting rod group and the second connecting rod group; the first connecting rod group is located between the first controlled deformation part and the passive deformation part, and the second connecting rod group is located between the second controlled deformation part and the passive deformation part Between the passive deformation parts; the first controlled deformation part and the second controlled deformation part are symmetrically arranged on both sides of the passive deformation part. 3. The piezoelectric micromotor according to claim 2, wherein the first controlled deformation part and the second controlled deformation part are rectangular; the reverse piezoelectric part is located at the first controlled deformation part. On the four sides of the controlled deformation part and the second controlled deformation part, the four corners of the first controlled deformation part and the second controlled deformation part are arc-shaped. 4. The piezoelectric micromotor according to claim 3, characterized in that, the inverse piezoelectric part is used to generate deformation after receiving the excitation signal; the two opposite inverse piezoelectric parts on each of the controlled deformation parts There is one group of piezoelectric parts, and the two groups of inverse piezoelectric parts on each controlled deformation part are respectively used to receive cosine excitation signals and sine excitation signals; The frequency of the excitation signal is greater than or equal to 393.368kHz and less than or equal to 393.871kHz. 5. The piezoelectric micromotor according to claim 4, characterized in that, the direction in which the controlled deformation part points to the passive deformation part is a horizontal direction, and the direction perpendicular to the horizontal direction is a longitudinal direction; The reverse piezoelectric part located on the first controlled deformation part includes a first group and a second group, the first group is located on the lateral side of the first controlled deformation part, and the second group is located on the lateral side of the first controlled deformation part. On the longitudinal side of the first controlled deformation part; the reverse piezoelectric part located at the second controlled deformation part includes a third group and a fourth group, and the third group is located at the second controlled deformation part. On the lateral side of the deformation part, the fourth group is located on the longitudinal side of the second controlled deformation part; The first group and the fourth group are used to receive the sine excitation signal, and the second group and the third group are used to receive the cosine excitation signal; or, the first group and the fourth group use For receiving cosine excitation signals, the second group and the third group are used for receiving sinusoid excitation signals. 6. piezoelectric micromotor according to claim 1, is characterized in that, described piezoelectric micromotor also comprises micro-tooth; The micro-tooth is disposed in the through hole of the rotor and is located between the stator and the rotor; the micro-tooth is disposed on at least one of the stator and the rotor; the stator passes through the The microteeth are in contact with the rotor. 7. The piezoelectric micromotor according to claim 6, wherein the micro-tooths are distributed at equal intervals, and the spacing between adjacent said micro-tooths is an integer multiple of the wavelength; the wavelength conforms to the formula: λ=v×T; among them, λ is the wavelength, v is the sound velocity in the stator or rotor, and T is the period of applying the sinusoidal excitation signal. 8. piezoelectric micromotor according to claim 1, is characterized in that, described piezoelectric micromotor also comprises micro-drive structure; The micro-drive structure includes a conductive column and a micro-drive circuit; the micro-drive circuit is arranged on a flexible carrier; one end of the conductive column is electrically connected to the micro-drive circuit, and the other end is electrically connected to the reverse piezoelectric part . 9. A method for preparing a piezoelectric micromotor, comprising: provide a substrate; cutting the base body by laser to form a stator base body, and forming an inverse piezoelectric part with a thickness of 0.01 mm to 0.1 mm on the stator base body by magnetron sputtering technology; After forming the reverse piezoelectric part, polarizing the reverse piezoelectric part through a polarization process to form a stator; After the reverse piezoelectric part is polarized, a flexible carrier is provided; a micro-drive circuit is formed on the flexible carrier to form a micro-drive structure; connect. 10. The preparation method of the piezoelectric micromotor according to claim 9, characterized in that, the inverse piezoelectric part is formed on the stator substrate by magnetron sputtering technology, and polarized by the polarization process The inverse piezoelectric part includes: A polymer mask is set on the stator base, and the reverse piezoelectric part is formed on the stator base by magnetron sputtering technology; after the reverse piezoelectric part is formed, the high The molecular mask plate is used to polarize the inverse piezoelectric part through the process of corona polarization. 11. The preparation method of the piezoelectric micromotor according to claim 9, is characterized in that, after the described inverse piezoelectric part is polarized by the polarization process, it also includes: A polymer mask plate is arranged on the stator, and a rotor is formed by plating in the through hole of the rotor by magnetron sputtering technology; after the rotor is formed, the polymer mask plate is removed. 12. the preparation method of piezoelectric micromotor according to claim 11, is characterized in that, after forming described rotor, also comprises: Installing a pre-pressure structure on the stator; forming a micro-drive circuit on a flexible carrier by inkjet printing; A solid sleeve is arranged on the pad of the micro-drive circuit, the hollow part of the solid sleeve is aligned with the pad of the micro-drive circuit; conductive glue is poured into the solid sleeve; After solidification, the solid sleeve is removed, and the solidified conductive glue is polished to form a conductive column; the other end of the conductive column is electrically connected to the reverse piezoelectric part.