CN116314066A - A kind of power device and power module - Google Patents
A kind of power device and power module Download PDFInfo
- Publication number
- CN116314066A CN116314066A CN202310216979.5A CN202310216979A CN116314066A CN 116314066 A CN116314066 A CN 116314066A CN 202310216979 A CN202310216979 A CN 202310216979A CN 116314066 A CN116314066 A CN 116314066A
- Authority
- CN
- China
- Prior art keywords
- power module
- groove
- plastic package
- heat sink
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 101
- 239000002184 metal Substances 0.000 claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 37
- 230000001965 increasing effect Effects 0.000 claims description 16
- 230000017525 heat dissipation Effects 0.000 abstract description 34
- 238000003475 lamination Methods 0.000 abstract description 2
- 238000006243 chemical reaction Methods 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 239000010949 copper Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 238000005245 sintering Methods 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000003466 welding Methods 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 6
- 239000002131 composite material Substances 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 230000005669 field effect Effects 0.000 description 6
- 229910044991 metal oxide Inorganic materials 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 238000002788 crimping Methods 0.000 description 4
- 230000002708 enhancing effect Effects 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- -1 silicon carbide metal oxide Chemical class 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 230000037303 wrinkles Effects 0.000 description 3
- 229910016525 CuMo Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000008358 core component Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 239000002826 coolant Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920006336 epoxy molding compound Polymers 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000012782 phase change material Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3672—Foil-like cooling fins or heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
- H01L21/4814—Conductive parts
- H01L21/4871—Bases, plates or heatsinks
- H01L21/4882—Assembly of heatsink parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
技术领域technical field
本申请涉及电子电力技术领域,尤其涉及一种功率设备和功率模组。The present application relates to the field of electronic power technology, and in particular to a power device and a power module.
背景技术Background technique
近年来,绿色能源日益发展,逐渐成为解决能源危机的主要手段。功率模组作为绿色能源的核心部件得到广泛应用。智能功率模块(IPM:Intelligent Power Module)内部集成了逻辑、控制、检测和保护电路,使用起来方便,不仅减小了系统的体积以及开发时间,也大大增强了系统的可靠性,适应了当今功率器件的发展方向,在电力电子领域得到了越来越广泛的应用。In recent years, green energy has developed day by day and has gradually become the main means to solve the energy crisis. Power modules are widely used as the core components of green energy. The Intelligent Power Module (IPM: Intelligent Power Module) integrates logic, control, detection and protection circuits, which is convenient to use, not only reduces the size of the system and development time, but also greatly enhances the reliability of the system, adapting to today's power The development direction of the device has been more and more widely used in the field of power electronics.
首先,功率模组中的芯片失效释放应力引起短路炸机时,容易导致设备外壳和芯片绝缘失效漏电,引发安全问题;其次,为了适应高压应用,需要进一步的在不增加模组尺寸的前提下提高功率模组的耐压值,以适用于高压小型化场景;最后,由于当前功率模组的功率越来越高,散热能力亟需提高。功率模组的上述问题,严重制约了新能源产业的发展,因此业界需要新型的功率模组,继续推动产业的进步。First of all, when the chip in the power module fails to release the stress and causes a short circuit, it is easy to cause the insulation failure and leakage of the device shell and chip, causing safety problems; Increase the withstand voltage value of the power module to be suitable for high-voltage miniaturization scenarios; finally, as the power of the current power module is getting higher and higher, the heat dissipation capacity needs to be improved urgently. The above-mentioned problems of the power module seriously restrict the development of the new energy industry, so the industry needs a new type of power module to continue to promote the progress of the industry.
发明内容Contents of the invention
本申请提供了一种功率设备和功率模组。本申请中对功率设备中功率模组进行了改进,从而使整个功率设备的结构安全性、耐压性以及散热性得到提升。首先,在芯片下方塑封体的对应位置增加凹陷部,从而在芯片下方塑封体上形成一个薄弱点,使得芯片失效产生应力时更容易从所述薄弱点进行释放,而不损坏芯片上方的覆金属层基板,减少了由于覆金属层基板中绝缘层的开裂而使散热器与芯片出现短路进而引起严重的安全问题;其次,通过在功率模组的覆金属层基板与芯片之间增加具有高导热特性的热沉片,提高了覆金属层基板与芯片之间的结构强度,使芯片应力更容易从芯片下方塑封体的凹陷部释放,同时也增强了功率模组的散热性能;再次,在塑封体靠近覆金属层基板一面的边缘增加第一凹槽,使得功率模组在不增加塑封体厚度的情况下,增加了引脚到散热器之间的爬电距离,保证了功率模组体积不变以及制造成本不提升;最后,在塑封体中第一凹槽的相对位置设置了第二凹槽,第二凹槽与凹陷部均位于塑封体背离覆金属层基板的一面,第二凹槽可以降低了由于散热器压接而使第二凹槽的对应位置产生裂纹的风险。The present application provides a power device and a power module. In this application, the power module in the power device is improved, so that the structural safety, pressure resistance and heat dissipation of the entire power device are improved. First, add a recessed part to the corresponding position of the plastic package under the chip, thereby forming a weak point on the plastic package under the chip, so that it is easier to release from the weak point when the chip fails to generate stress, without damaging the metal-clad above the chip layer substrate, which reduces the short circuit between the heat sink and the chip due to the cracking of the insulating layer in the metal-clad substrate and causes serious safety problems; secondly, by adding a high thermal conductivity between the metal-clad substrate and the chip of the power module The special heat sink improves the structural strength between the metal-clad substrate and the chip, making it easier for the stress of the chip to be released from the concave part of the plastic package under the chip, and also enhances the heat dissipation performance of the power module; again, in the plastic package The first groove is added to the edge of the body close to the metal-clad substrate, so that the power module increases the creepage distance between the pin and the heat sink without increasing the thickness of the plastic package, ensuring that the volume of the power module is small. change and the manufacturing cost does not increase; finally, a second groove is provided in the opposite position of the first groove in the plastic package. The risk of cracks at the corresponding positions of the second groove due to crimping of the heat sink can be reduced.
为此本申请的实施例采用如下的技术方案:For this reason the embodiment of the application adopts following technical scheme:
第一方面,本申请实施例提供了一种功率设备。所述功率设备包括:电路板、功率模组和散热器,所述功率模组设置于电路板上,所述散热器设置于所述功率模组背离所述电路板的一面;所述功率模组包括覆金属层基板、芯片和塑封体;所述覆金属层基板与所述芯片叠层设置,且塑封在所述塑封体内;所述塑封体包括凹陷部,所述凹陷部设置于所述塑封体背离所述散热器的一面,并且位于所述塑封体背离所述散热器一面的表面与电路板之间,以在所述电路板和塑封体之间形成应力释放空间,所述凹陷部在所述功率模组厚度方向上的投影覆盖所述芯片在所述功率模组厚度方向上的投影。In a first aspect, the embodiment of the present application provides a power device. The power equipment includes: a circuit board, a power module, and a radiator, the power module is arranged on the circuit board, and the radiator is arranged on the side of the power module away from the circuit board; the power module The set includes a metal-clad substrate, a chip, and a plastic package; the metal-clad substrate is laminated with the chip and is plastic-packed in the plastic package; the plastic package includes a recess, and the recess is arranged on the The side of the plastic package away from the heat sink is located between the surface of the plastic package away from the side of the heat sink and the circuit board, so as to form a stress relief space between the circuit board and the plastic package, and the recess The projection in the thickness direction of the power module covers the projection of the chip in the thickness direction of the power module.
可以理解的,在塑封体中增加的凹陷部,为所述功率模组提供了一个相对薄弱的位置,引导芯片产生的应力由凹陷部处释放,而不损坏覆金属层基板中的绝缘层,降低了芯片与散热器短路的可能性。有效提高功率模组的结构稳定性以及安全性,也就是提高了功率设备的稳定性与安全性。It can be understood that the recessed part added in the plastic package provides a relatively weak position for the power module, and the stress generated by the guide chip is released from the recessed part without damaging the insulating layer in the metal-clad substrate. Reduces the possibility of shorting the chip to the heat sink. Effectively improve the structural stability and safety of the power module, that is, improve the stability and safety of the power equipment.
结合第一方面,在第一种可能的实施方式中,所述功率设备中的功率模组还包括热沉片,所述热沉片设置于所述覆金属层基板与所述芯片之间,所述功率模组中的所述热沉片的厚度大于所述覆金属层基板中金属层的厚度,所述热沉片在所述功率模组厚度方向上的投影覆盖所述芯片在所述功率模组厚度方向上的投影,所述热沉片的面积大于所述芯片的面积。一般的,所述热沉片在所述功率模组厚度方向上的投影的长和宽分别比所述芯片在所述功率模组厚度方向上的投影的长和宽大1mm以上。可以理解的,增加的热沉片弥补了覆金属层基板由于金属层太薄而所能承受的应力较差的问题,从而增强了功率模组中覆金属层基板与芯片之间结构强度,热沉片与凹陷部相互配合,使芯片应力更容易从凹陷部得到释放,从而减少了覆金属层基板内的绝缘层因损坏而使芯片与散热器短路的问题的发生,提高了功率模组安全性,也就提高了功率设备的安全性。同时,由于热沉片具有高导热特性,所述芯片的各个部分可以充分的与所述热沉片接触,最大化的利用散热面积,从而进一步增强了功率模组的导热性,提高了功率模组功率密度,也就提高了功率设备的功率输出。With reference to the first aspect, in a first possible implementation manner, the power module in the power device further includes a heat sink, and the heat sink is disposed between the metal-clad substrate and the chip, The thickness of the heat sink in the power module is greater than the thickness of the metal layer in the metal-clad substrate, and the projection of the heat sink in the thickness direction of the power module covers the chip on the In the projection on the thickness direction of the power module, the area of the heat sink is larger than the area of the chip. Generally, the length and width of the projection of the heat sink in the thickness direction of the power module are respectively greater than the length and width of the projection of the chip in the thickness direction of the power module by more than 1 mm. It can be understood that the added heat sink makes up for the problem that the metal-clad substrate can bear poor stress due to the thin metal layer, thereby enhancing the structural strength between the metal-clad substrate and the chip in the power module, and the thermal The sinker and the concave part cooperate with each other, so that the stress of the chip can be released from the concave part more easily, thereby reducing the occurrence of the short circuit between the chip and the heat sink due to damage to the insulating layer in the metal-clad substrate, and improving the safety of the power module This improves the safety of power equipment. At the same time, due to the high thermal conductivity of the heat sink, each part of the chip can be fully in contact with the heat sink to maximize the use of the heat dissipation area, thereby further enhancing the thermal conductivity of the power module and improving the efficiency of the power module. The power density of the group increases, which increases the power output of the power device.
结合第一方面,在第二种可能的实施方式中,所述功率设备中的功率模组还包括第一凹槽与引脚,所述第一凹槽设置于所述塑封体靠近所述散热器的一面,且位于所述塑封体与所述散热器之间,形成面向所述散热器的凹陷空间,所述第一凹槽可以增加所述引脚与所述散热器之间的爬电距离;所述引脚的第一部分设置于所述塑封体内,一般的,所述功率模组利用所述引脚的第二部分通过表贴或者直插的方式设置在电路板上。可以理解的,所述第一凹槽形成的凹陷空间,增加了所述塑封体的表面褶皱程度,延长了所述塑封体的表面长度,因此增加了所述引脚与所述散热器之间的爬电距离。With reference to the first aspect, in a second possible implementation manner, the power module in the power device further includes a first groove and pins, and the first groove is arranged on the plastic package near the heat sink. One side of the heat sink, and located between the plastic package and the heat sink, forming a recessed space facing the heat sink, the first groove can increase the creepage between the pin and the heat sink distance; the first part of the pins is arranged in the plastic package, and generally, the power module is arranged on the circuit board by using the second part of the pins in a surface-mount or in-line manner. It can be understood that the recessed space formed by the first groove increases the surface wrinkle degree of the plastic package and prolongs the surface length of the plastic package, thus increasing the distance between the pin and the heat sink. creepage distance.
结合第一方面,在第三种可能的实施方式中,所述功率设备中的功率模组还包括第二凹槽,所述第二凹槽设置于所述塑封体背离所述散热器的一面,且位于所述塑封体与所述电路板之间,且沿所述电路板表面延伸,形成面向所述引脚开口的扁平空间。一般的,所述第二凹槽与所述第一凹槽相对设置,所述第二凹槽在所述功率模组厚度方向上的投影覆盖所述第一凹槽在所述功率模组厚度方向上的投影。可以理解的,在塑封体中第一凹槽的相对位置增加的第二凹槽,可以降低由于散热器压接而使第二凹槽的对应位置产生裂纹的风险。With reference to the first aspect, in a third possible implementation manner, the power module in the power device further includes a second groove, and the second groove is disposed on a side of the plastic package facing away from the heat sink , and is located between the plastic package and the circuit board, and extends along the surface of the circuit board to form a flat space facing the pin opening. Generally, the second groove is arranged opposite to the first groove, and the projection of the second groove in the thickness direction of the power module covers the first groove in the thickness direction of the power module. projection in the direction. It can be understood that the second groove added to the relative position of the first groove in the plastic package can reduce the risk of cracks at the corresponding position of the second groove due to crimping of the heat sink.
结合第一方面,在第四种可能的实施方式中,所述覆金属层基板包括第一金属层、第二金属层以及绝缘层,所述第二金属层设置在所述绝缘层靠近所述芯片的一面,所述热沉片的厚度大于所述第二金属层的厚度。一般的,所述热沉片的厚度为所述第二金属层厚度的两倍以上。一般的,所述覆金属层基板为覆铜陶瓷基板(Direct Bond Copper,DBC)、活性金属焊接基板(Active metal brazed copper,AMB,例如Al2O3-AMB、Si3N4-AMB或AlN-AMB)或绝缘金属基板(Insulated metal substrate,IMS)等。示例性的,为了进一步提高功率密度,所述覆金属层基板可以采用高导热性的AlN-DBC、Si3N4-AMB或AlN-AMB形成,在此不作限定。可以理解的,使热沉片超过第一金属层的厚度,可以提高热沉片的散热效率,同时进一步增强芯片与覆金属层基板之间的强度,减少芯片失效产生应力而损坏覆金属层基板中的绝缘层的问题,提高功率设备的安全性。With reference to the first aspect, in a fourth possible implementation manner, the metal-clad substrate includes a first metal layer, a second metal layer, and an insulating layer, and the second metal layer is disposed on the insulating layer close to the On one side of the chip, the thickness of the heat sink is greater than the thickness of the second metal layer. Generally, the thickness of the heat sink is more than twice the thickness of the second metal layer. Generally, the metal-clad substrate is a copper-clad ceramic substrate (Direct Bond Copper, DBC), an active metal brazed copper substrate (AMB, such as Al2O3-AMB, Si3N4-AMB or AlN-AMB) or an insulating metal Substrate (Insulated metal substrate, IMS), etc. Exemplarily, in order to further increase the power density, the metal-clad substrate may be formed of AlN-DBC, Si3N4-AMB or AlN-AMB with high thermal conductivity, which is not limited herein. It can be understood that making the heat sink exceed the thickness of the first metal layer can improve the heat dissipation efficiency of the heat sink, and at the same time further enhance the strength between the chip and the metal-clad substrate, reducing the stress caused by chip failure and damage to the metal-clad substrate The problem of the insulation layer in the middle, improve the safety of the power equipment.
结合第一方面,在第五种可能的实施方式中,所述第一凹槽的侧壁与所述功率模组厚度方向的夹角不为零,所述第一凹槽的底部宽度小于所述第一凹槽顶部宽度,示例的,所述第一凹槽为梯形结构。一般的,所述第一凹槽侧壁与所述功率模组厚度方向的夹角大于等于10度,所述第一凹槽顶部到塑封体顶部距离、第一凹槽的深度以及第一凹槽底部宽度不小于1mm,同时所述第一凹槽可以有两个侧壁,也可以有一个侧壁。可以理解的,梯形结构相比垂直结构更加稳定,可以有效的提高功率模组抗损性,也就提高了功率设备的可靠性与安全性。With reference to the first aspect, in a fifth possible implementation manner, the included angle between the side wall of the first groove and the thickness direction of the power module is not zero, and the width of the bottom of the first groove is smaller than the The top width of the first groove, for example, the first groove is a trapezoidal structure. Generally, the included angle between the side wall of the first groove and the thickness direction of the power module is greater than or equal to 10 degrees, the distance from the top of the first groove to the top of the plastic package, the depth of the first groove and the The width of the bottom of the groove is not less than 1 mm, and the first groove may have two side walls or one side wall. It can be understood that the trapezoidal structure is more stable than the vertical structure, which can effectively improve the damage resistance of the power module, and also improve the reliability and safety of the power equipment.
结合第一方面,在第六种可能的实施方式中,所述第一凹槽为垂直结构。可以理解的,垂直结构相比梯形结构可以有效的增加所述第一凹槽的表面长度,也就增加了引脚到散热器之间的爬电距离,提高了功率模组所能承受的电压,也就提高了功率设备所能承受的最大电压。With reference to the first aspect, in a sixth possible implementation manner, the first groove is a vertical structure. It can be understood that, compared with the trapezoidal structure, the vertical structure can effectively increase the surface length of the first groove, which also increases the creepage distance between the pin and the heat sink, and improves the voltage that the power module can withstand , which increases the maximum voltage that the power equipment can withstand.
结合第一方面,在第七种可能的实施方式中,所述第一凹槽的侧壁设置有至少一个阶梯齿。可以理解的,增加阶梯齿可以有效的增加所述第一凹槽的表面长度,也就增加了引脚到散热器之间的爬电距离,同时阶梯齿数量越多爬电距离越长,功率模组所能承受的电压也就越大。With reference to the first aspect, in a seventh possible implementation manner, the sidewall of the first groove is provided with at least one stepped tooth. It can be understood that increasing the stepped teeth can effectively increase the surface length of the first groove, which also increases the creepage distance between the pin and the heat sink. At the same time, the more the stepped teeth, the longer the creepage distance, and the power The greater the voltage the module can withstand.
结合第一方面,在第八种可能的实施方式中,所述第一凹槽中包括至少一个子凹槽。可以理解的,通过设置子凹槽可以有效的增加所述第一凹槽的表面长度,也就增加了引脚到散热器之间的爬电距离,同时子凹槽数量越多爬电距离越长,功率模组所能承受的电压也就越大。With reference to the first aspect, in an eighth possible implementation manner, the first groove includes at least one sub-groove. It can be understood that the surface length of the first groove can be effectively increased by setting the sub-grooves, which increases the creepage distance between the pin and the heat sink, and the more the number of sub-grooves, the greater the creepage distance. The longer the voltage, the greater the voltage the power module can withstand.
结合第一方面,在第九种可能的实施方式中,所述第一凹槽设置在所述塑封体靠近所述覆金属层基板的一面的边缘。一般的,所述第一凹槽可以设置在所述塑封体靠近所述覆金属层基板的一面的一边或两边或三边或四周。With reference to the first aspect, in a ninth possible implementation manner, the first groove is disposed on an edge of a side of the plastic package close to the metal-clad substrate. Generally, the first groove can be disposed on one side, two sides, three sides or four sides of the plastic package close to the side of the metal-clad substrate.
结合第一方面,在第十种可能的实施方式中,所述功率模组还包括键合线或互联片,所述芯片通过所述键合线或互联片与所述引脚电连接,所述引脚为鸥翼形或直插形。With reference to the first aspect, in a tenth possible implementation manner, the power module further includes bonding wires or interconnection sheets, and the chip is electrically connected to the pins through the bonding wires or interconnection sheets, so The above pins are gull-wing or in-line.
结合第一方面,在第十一种可能的实施方式中,所述凹陷部的底部宽度小于所述凹陷部顶部宽度。一般的,所述凹陷部侧壁与所述功率模组厚度方向的夹角大于等于10度。所述凹陷部在所述功率模组厚度方向上的投影的长和宽分别比所述芯片在所述功率模组厚度方向上的投影的长和宽大1mm以上。同时所述凹陷部的深度大于等于0.2mm,且所述凹陷部底部与所述键合线或互联片弧顶的距离大于等于0.5mm。可以理解的,梯形结构相比垂直结构更加稳定,可以有效的提高功率模组抗损性,也就提高了功率设备的可靠性与安全性。With reference to the first aspect, in an eleventh possible implementation manner, the width of the bottom of the depression is smaller than the width of the top of the depression. Generally, the included angle between the side wall of the recess and the thickness direction of the power module is greater than or equal to 10 degrees. The length and width of the projection of the concave portion in the thickness direction of the power module are respectively greater than the length and width of the projection of the chip in the thickness direction of the power module by more than 1 mm. At the same time, the depth of the depression is greater than or equal to 0.2 mm, and the distance between the bottom of the depression and the arc top of the bonding wire or interconnection is greater than or equal to 0.5 mm. It can be understood that the trapezoidal structure is more stable than the vertical structure, which can effectively improve the damage resistance of the power module, and also improve the reliability and safety of the power equipment.
结合第一方面,在第十二种可能的实施方式中,所述第二凹槽的底部宽度小于所述第二凹槽顶部宽度。一般的,所述第二凹槽侧壁与所述功率模组厚度方向的夹角大于等于10度。所述第二凹槽的深度大于等于0.2mm。With reference to the first aspect, in a twelfth possible implementation manner, the width of the bottom of the second groove is smaller than the width of the top of the second groove. Generally, the included angle between the side wall of the second groove and the thickness direction of the power module is greater than or equal to 10 degrees. The depth of the second groove is greater than or equal to 0.2mm.
结合第一方面,在第十三种可能的实施方式中,所述功率设备中的散热器通过焊接或烧结的方式设置在所述覆金属层基板背离所述芯片的一面。一般的,在所述散热器的内部均设有散热水道,所述散热水道具有进水口、出水口。冷却液由所述进水口进入位于所述散热器内部的散热水道,吸收所述散热器的热量,并最终由所述出水口流出将所有热量带走。可以理解的,散热器可以吸收所述覆金属层基板传递来的热量,使功率模组的温度降低,进而使功率设备的温度下降。With reference to the first aspect, in a thirteenth possible implementation manner, the heat sink in the power device is disposed on the side of the metal-clad substrate facing away from the chip by welding or sintering. Generally, heat dissipation channels are provided inside the radiators, and the heat dissipation channels have water inlets and water outlets. The cooling liquid enters the heat dissipation channel inside the radiator through the water inlet, absorbs the heat of the radiator, and finally flows out through the water outlet to take away all the heat. It can be understood that the heat sink can absorb the heat transferred from the metal-clad substrate, so as to reduce the temperature of the power module and further reduce the temperature of the power device.
结合第一方面,在第十四种可能的实施方式中,所述覆金属层基板背离所述芯片的一面与所述塑封体靠近所述散热器的一面处于同一平面。可以理解的,上述设置,可以使散热器与覆金属层基板的金属层平整的贴合,提高所述功率模组的散热性能,也就提升了功率设备的散热性能。With reference to the first aspect, in a fourteenth possible implementation manner, the side of the metal-clad substrate facing away from the chip is on the same plane as the side of the plastic package close to the heat sink. It can be understood that the above arrangement can make the radiator and the metal layer of the metal-clad substrate adhere smoothly, improve the heat dissipation performance of the power module, and also improve the heat dissipation performance of the power device.
结合第一方面,在第十五种可能的实施方式中,所述覆金属层基板、所述热沉片与所述芯片通过焊接或烧结的方式依次叠层设置。With reference to the first aspect, in a fifteenth possible implementation manner, the metal-clad substrate, the heat sink, and the chip are sequentially stacked by welding or sintering.
结合第一方面,在第十六种可能的实施方式中,所述功率模组中的热沉片具有高导热、高导电的性能。所述高导热特性可以将所述芯片在工作时产生的热量传导至所述热沉中,所述高导电特性可以满足所述芯片在工作时内部电流流动的需求,为内部电流流动提供通道。所述热沉片的材料包括但不限于Cu、CuMo复合材料、金刚石、金刚石-铜复合材料、Al-SiC复合材料等具有高导热的材料。可以理解的,所述热沉片采用高导热高导电的材料,既可以提高所述芯片的散热性能,又可以为所述芯片提供电流通道,从而提高所述功率模组的散热性能,进而提高所述功率模组的功率密度。With reference to the first aspect, in a sixteenth possible implementation manner, the heat sink in the power module has high thermal conductivity and high electrical conductivity. The high thermal conductivity can conduct the heat generated by the chip during operation to the heat sink, and the high electrical conductivity can meet the internal current flow requirement of the chip during operation and provide a channel for internal current flow. The material of the heat sink includes but not limited to Cu, CuMo composite material, diamond, diamond-copper composite material, Al-SiC composite material and other materials with high thermal conductivity. It can be understood that the heat sink is made of a material with high thermal conductivity and high conductivity, which can not only improve the heat dissipation performance of the chip, but also provide a current channel for the chip, thereby improving the heat dissipation performance of the power module, and further improving the heat dissipation performance of the chip. The power density of the power module.
结合第一方面,在第十七种可能的实施方式中,所述功率模组中的芯片为多个。一般的,所述凹陷部可以根据所述功率模组中的芯片的数量进行设置,凹陷部可以设置至少一个子区域,每个凹陷部的子区域对应至少一个芯片。一般的,所述芯片包括绝缘栅双极型晶体管芯片、绝缘栅双极型晶体管芯片与二极管芯片合封芯片、硅金属氧化物半导体场效应晶体管、碳化硅金属氧化物半导体场效应晶体管、氮化镓金属氧化物半导体场效应晶体管等功率半导体芯片或者IC驱动芯片等。With reference to the first aspect, in a seventeenth possible implementation manner, there are multiple chips in the power module. Generally, the recessed part can be set according to the number of chips in the power module, and the recessed part can be provided with at least one sub-region, and each sub-region of the recessed part corresponds to at least one chip. Generally, the chip includes an insulated gate bipolar transistor chip, an insulated gate bipolar transistor chip and a diode chip packaged chip, a silicon metal oxide semiconductor field effect transistor, a silicon carbide metal oxide semiconductor field effect transistor, a nitride Power semiconductor chips such as gallium metal oxide semiconductor field effect transistors or IC driver chips, etc.
第二方面,本申请实施例提供了一种功率模组。所述功率模组包括:覆金属层基板、芯片和塑封体;所述覆金属层基板与所述芯片叠层设置,且塑封在所述塑封体内;所述塑封体包括凹陷部;所述凹陷部设置于所述塑封体背离所述覆金属层基板的一面,所述凹陷部在所述功率模组厚度方向上的投影覆盖所述芯片在所述功率模组厚度方向上的,以在所述芯片背离所述覆金属层基板的一面的塑封体上形成应力释放部。In a second aspect, the embodiment of the present application provides a power module. The power module includes: a metal-clad substrate, a chip, and a plastic package; the metal-clad substrate is laminated with the chip and is plastic-packed in the plastic package; the plastic package includes a recess; the recess The part is arranged on the side of the plastic package away from the metal-clad substrate, and the projection of the recessed part in the thickness direction of the power module covers the chip in the thickness direction of the power module, so that in the A stress release part is formed on the plastic package of the chip on the side away from the metal-clad substrate.
可以理解的,在塑封体中增加的凹陷部,为所述功率模组提供了一个相对薄弱的位置,引导芯片产生的应力由凹陷部处释放,而不损坏覆金属层基板中的绝缘层,降低了芯片与散热器短路的可能性。有效提高功率模组散热效率、结构稳定性以及安全性。It can be understood that the recessed part added in the plastic package provides a relatively weak position for the power module, and the stress generated by the guide chip is released from the recessed part without damaging the insulating layer in the metal-clad substrate. Reduces the possibility of shorting the chip to the heat sink. Effectively improve the heat dissipation efficiency, structural stability and safety of the power module.
结合第二方面,在第一种可能的实施方式中,所述功率模组中的所述热沉片的厚度大于所述覆金属层基板中金属层的厚度,所述热沉片在所述功率模组厚度方向上的投影覆盖所述芯片在所述功率模组厚度方向上的投影,所述热沉片的面积大于所述芯片的面积。一般的,所述热沉片在所述功率模组厚度方向上的投影的长和宽分别比所述芯片在所述功率模组厚度方向上的投影的长和宽大1mm以上。可以理解的,增加的热沉片弥补了覆金属层基板由于金属层太薄而所能承受的应力较差的问题,从而增强了功率模组中覆金属层基板与芯片之间结构强度,热沉片与凹陷部相互配合,使芯片应力更容易从凹陷部得到释放,从而减少了覆金属层基板内的绝缘层因损坏而使芯片与散热器短路的问题,提高了功率模组安全性,也就提高了功率设备的安全性。同时,由于热沉片具有高导热特性,所述芯片的各个部分可以充分的与所述热沉片接触,最大化的利用散热面积,从而进一步增强了功率模组的导热性,提高了功率模组功率密度,也就提高了功率设备的功率输出。With reference to the second aspect, in a first possible implementation manner, the thickness of the heat sink in the power module is greater than the thickness of the metal layer in the metal-clad substrate, and the heat sink in the The projection in the thickness direction of the power module covers the projection of the chip in the thickness direction of the power module, and the area of the heat sink is larger than the area of the chip. Generally, the length and width of the projection of the heat sink in the thickness direction of the power module are respectively greater than the length and width of the projection of the chip in the thickness direction of the power module by more than 1mm. It can be understood that the added heat sink makes up for the problem that the metal-clad substrate can bear poor stress due to the thin metal layer, thereby enhancing the structural strength between the metal-clad substrate and the chip in the power module, and the thermal The sinker and the concave part cooperate with each other, so that the stress of the chip can be released from the concave part more easily, thereby reducing the problem of short circuit between the chip and the heat sink due to damage to the insulating layer in the metal-clad substrate, and improving the safety of the power module. The safety of the power equipment is also improved. At the same time, due to the high thermal conductivity of the heat sink, each part of the chip can be fully in contact with the heat sink to maximize the use of the heat dissipation area, thereby further enhancing the thermal conductivity of the power module and improving the efficiency of the power module. The power density of the group increases, which increases the power output of the power device.
结合第二方面,在第二种可能的实施方式中,所述功率模组还包括:第一凹槽与引脚,所述第一凹槽设置于所述塑封体靠近所述覆金属层基板的一面,以在所述塑封体靠近所述覆金属层基板的一面形成凹陷区域,所述第一凹槽可以增加所述引脚与散热器之间的爬电距离;所述引脚的第一部分设置于所述塑封体内,一般的,所述功率模组利用所述引脚的第二部分通过表贴或者直插的方式设置在电路板上。可以理解的,所述功率模组还包括:所述第一凹槽形成的凹陷区域,增加了所述塑封体的表面褶皱程度,延长了所述塑封体的表面长度,因此所述第一凹槽可以增加所述引脚与散热器之间的爬电距离。With reference to the second aspect, in a second possible implementation manner, the power module further includes: a first groove and pins, and the first groove is arranged on the plastic package close to the metal-clad substrate one side of the plastic package to form a recessed area on the side of the plastic package close to the metal-clad substrate, the first groove can increase the creepage distance between the pin and the heat sink; the first groove of the pin can increase the creepage distance between the pin and the radiator; A part is arranged in the plastic package, and generally, the power module is arranged on the circuit board by using the second part of the pins in a surface-mount or in-line manner. It can be understood that the power module also includes: the concave area formed by the first groove increases the surface wrinkle degree of the plastic package and prolongs the surface length of the plastic package, so the first concave The slots can increase the creepage distance between the pins and the heat sink.
结合第二方面,在第三种可能的实施方式中,所述功率模组还包括:第二凹槽,所述第二凹槽设置于所述塑封体背离所述散热器的一面,且沿所述塑封体背离所述覆金属层基板的一面延伸,以形成面向所述引脚开口的扁平空间。一般的,所述第二凹槽与所述第一凹槽相对设置,所述第二凹槽在所述功率模组厚度方向上的投影覆盖所述第一凹槽在所述功率模组厚度方向上的投影。可以理解的,在塑封体中第一凹槽的相对位置增加的第二凹槽,可以降低由于散热器压接而使第二凹槽的对应位置产生裂纹的风险。With reference to the second aspect, in a third possible implementation manner, the power module further includes: a second groove, the second groove is disposed on a side of the plastic package facing away from the heat sink, and along the The plastic package body extends away from the side of the metal-clad substrate to form a flat space facing the pin opening. Generally, the second groove is arranged opposite to the first groove, and the projection of the second groove in the thickness direction of the power module covers the first groove in the thickness direction of the power module. projection in the direction. It can be understood that the second groove added to the relative position of the first groove in the plastic package can reduce the risk of cracks at the corresponding position of the second groove due to crimping of the heat sink.
结合第二方面,在第四种可能的实施方式中,第一凹槽的侧壁与所述功率模组厚度方向的夹角不为零,所述第一凹槽的底部宽度小于所述第一凹槽顶部宽度,示例的,所述第一凹槽为梯形结构。一般的,所述第一凹槽侧壁与所述功率模组厚度方向的夹角大于等于10度,所述第一凹槽顶部到塑封体顶部距离、第一凹槽的深度以及第一凹槽底部宽度不小于1mm,同时所述第一凹槽可以有两个侧壁,也可以有一个侧壁。可以理解的,梯形结构相比垂直结构更加稳定,可以有效的提高功率模组抗损性。In combination with the second aspect, in a fourth possible implementation manner, the included angle between the side wall of the first groove and the thickness direction of the power module is not zero, and the width of the bottom of the first groove is smaller than that of the first groove. A groove top width, for example, the first groove is a trapezoidal structure. Generally, the included angle between the side wall of the first groove and the thickness direction of the power module is greater than or equal to 10 degrees, the distance from the top of the first groove to the top of the plastic package, the depth of the first groove and the The width of the bottom of the groove is not less than 1 mm, and the first groove may have two side walls or one side wall. It can be understood that the trapezoidal structure is more stable than the vertical structure, and can effectively improve the damage resistance of the power module.
结合第二方面,在第五种可能的实施方式中,所述第一凹槽为垂直结构。可以理解的,垂直结构相比梯形结构可以有效的增加所述第一凹槽的表面长度,也就增加了引脚到散热器之间的爬电距离,提高了功率模组所能承受的电压。With reference to the second aspect, in a fifth possible implementation manner, the first groove is a vertical structure. It can be understood that, compared with the trapezoidal structure, the vertical structure can effectively increase the surface length of the first groove, which also increases the creepage distance between the pin and the heat sink, and improves the voltage that the power module can withstand .
结合第二方面,在第六种可能的实施方式中,所述第一凹槽的侧壁设置有至少一个阶梯齿。可以理解的,增加阶梯齿可以有效的增加所述第一凹槽的表面长度,也就增加了引脚到散热器之间的爬电距离,同时阶梯齿数量越多爬电距离越长,功率模组所能承受的电压也就越大。With reference to the second aspect, in a sixth possible implementation manner, the sidewall of the first groove is provided with at least one stepped tooth. It can be understood that increasing the stepped teeth can effectively increase the surface length of the first groove, which also increases the creepage distance between the pin and the heat sink. At the same time, the more the stepped teeth, the longer the creepage distance, and the power The greater the voltage the module can withstand.
结合第二方面,在第七种可能的实施方式中,所述第一凹槽中包括至少一个子凹槽。可以理解的,通过设置子凹槽可以有效的增加所述第一凹槽的表面长度,也就增加了引脚到散热器之间的爬电距离,同时子凹槽数量越多爬电距离越长,功率模组所能承受的电压也就越大。With reference to the second aspect, in a seventh possible implementation manner, the first groove includes at least one sub-groove. It can be understood that the surface length of the first groove can be effectively increased by setting the sub-grooves, which increases the creepage distance between the pin and the heat sink, and the more the number of sub-grooves, the greater the creepage distance. The longer the voltage, the greater the voltage the power module can withstand.
结合第二方面,在第八种可能的实施方式中,所述第一凹槽设置在所述塑封体靠近所述覆金属层基板的一面的边缘。一般的,所述第一凹槽可以设置在所述塑封体靠近所述覆金属层基板的一面的一边或两边或三边或四周。With reference to the second aspect, in an eighth possible implementation manner, the first groove is disposed on an edge of a side of the plastic package close to the metal-clad substrate. Generally, the first groove can be disposed on one side, two sides, three sides or four sides of the plastic package close to the side of the metal-clad substrate.
结合第二方面,在第九种可能的实施方式中,所述凹陷部的底部宽度小于所述凹陷部顶部宽度。一般的,所述凹陷部侧壁与所述功率模组厚度方向的夹角大于等于10度。所述凹陷部在所述功率模组厚度方向上的投影的长和宽分别比所述芯片在所述功率模组厚度方向上的投影的长和宽大1mm以上。同时所述凹陷部的深度大于等于0.2mm,且所述凹陷部底部与所述键合线或互联片弧顶的距离大于等于0.5mm。可以理解的,梯形结构相比垂直结构更加稳定,可以有效的提高功率模组抗损性。With reference to the second aspect, in a ninth possible implementation manner, the width of the bottom of the depression is smaller than the width of the top of the depression. Generally, the included angle between the side wall of the recess and the thickness direction of the power module is greater than or equal to 10 degrees. The length and width of the projection of the concave portion in the thickness direction of the power module are respectively greater than the length and width of the projection of the chip in the thickness direction of the power module by more than 1mm. At the same time, the depth of the depression is greater than or equal to 0.2 mm, and the distance between the bottom of the depression and the arc top of the bonding wire or interconnection is greater than or equal to 0.5 mm. It can be understood that the trapezoidal structure is more stable than the vertical structure, and can effectively improve the damage resistance of the power module.
结合第二方面,在第十种可能的实施方式中,所述第二凹槽的底部宽度小于所述第二凹槽顶部宽度。一般的,所述第二凹槽侧壁与所述功率模组厚度方向的夹角大于等于10度。所述第二凹槽的深度大于等于0.2mm。With reference to the second aspect, in a tenth possible implementation manner, the width of the bottom of the second groove is smaller than the width of the top of the second groove. Generally, the included angle between the side wall of the second groove and the thickness direction of the power module is greater than or equal to 10 degrees. The depth of the second groove is greater than or equal to 0.2mm.
结合第二方面,在第十一种可能的实施方式中,所述功率模组中的芯片为多个。一般的,所述凹陷部可以根据所述功率模组中的芯片的数量进行设置,凹陷部可以设置至少一个子区域,每个凹陷部的子区域对应至少一个芯片。一般的,所述芯片包括绝缘栅双极型晶体管芯片、绝缘栅双极型晶体管芯片与二极管芯片合封芯片、硅金属氧化物半导体场效应晶体管、碳化硅金属氧化物半导体场效应晶体管、氮化镓金属氧化物半导体场效应晶体管等功率半导体芯片或者IC驱动芯片等。With reference to the second aspect, in an eleventh possible implementation manner, there are multiple chips in the power module. Generally, the recessed part can be set according to the number of chips in the power module, and the recessed part can be provided with at least one sub-region, and each sub-region of the recessed part corresponds to at least one chip. Generally, the chip includes an insulated gate bipolar transistor chip, an insulated gate bipolar transistor chip and a diode chip packaged chip, a silicon metal oxide semiconductor field effect transistor, a silicon carbide metal oxide semiconductor field effect transistor, a nitride Power semiconductor chips such as gallium metal oxide semiconductor field effect transistors or IC driver chips, etc.
结合第二方面,在第十二种可能的实施方式中,所述覆金属层基板背离所述芯片的一面与所述塑封体靠近所述散热器的一面处于同一平面。可以理解的,上述设置,可以使散热器与覆金属层基板的金属层平整的贴合,提高所述功率模组的散热性能,也就提升了功率设备的散热性能。With reference to the second aspect, in a twelfth possible implementation manner, the side of the metal-clad substrate facing away from the chip is on the same plane as the side of the plastic package close to the heat sink. It can be understood that the above arrangement can make the radiator and the metal layer of the metal-clad substrate adhere smoothly, improve the heat dissipation performance of the power module, and also improve the heat dissipation performance of the power device.
第三方面,本申请实施例提供了一种功率模组的制造方法,所述制造方法包括:In a third aspect, the embodiment of the present application provides a method for manufacturing a power module, the method includes:
第一步:将覆金属层基板、热沉片、芯片通过焊接或烧结依次叠层设置;Step 1: Laminate the metal-clad substrate, heat sink, and chips sequentially by welding or sintering;
第二步:塑封,使用塑封体将所述覆金属层基板、所述热沉片以及所述芯片密封,所述塑封体包括凹陷部;所述凹陷部设置于所述塑封体背离所述覆金属层基板的一面,所述凹陷部在所述功率模组厚度方向上的投影覆盖所述芯片在所述功率模组厚度方向上的投影。The second step: plastic sealing, using a plastic package to seal the metal-clad substrate, the heat sink, and the chip, the plastic package includes a depression; the depression is arranged on the plastic package away from the cover On one side of the metal layer substrate, the projection of the recessed portion in the thickness direction of the power module covers the projection of the chip in the thickness direction of the power module.
结合第三方面,在第一种可能的实施方式中,所述塑封体还包括第一凹槽,所述第一凹槽设置于所述塑封体靠近所述覆金属层基板的一面,所述第一凹槽可以增加功率模组中引脚与散热器之间的爬电距离。With reference to the third aspect, in a first possible implementation manner, the plastic package further includes a first groove, and the first groove is arranged on a side of the plastic package close to the metal-clad substrate, and the The first groove can increase the creepage distance between the pins in the power module and the heat sink.
结合第三方面,在第二种可能的实施方式中,所述塑封体还包括第二凹槽,所述第二凹槽设置于所述塑封体背离所述散热器的一面,所述第二凹槽在所述功率模组厚度方向上的投影覆盖所述第一凹槽在所述功率模组厚度方向上的投影。With reference to the third aspect, in a second possible implementation manner, the plastic package further includes a second groove, the second groove is provided on a side of the plastic package away from the heat sink, and the second The projection of the groove in the thickness direction of the power module covers the projection of the first groove in the thickness direction of the power module.
结合第三方面,在第三种可能的实施方式中,在第一步后,所述制造方法还包括:通过焊接或烧结将所述芯片利用所述键合线或互联片与所述功率模组中的引脚电连接。With reference to the third aspect, in a third possible implementation manner, after the first step, the manufacturing method further includes: welding or sintering the chip to the power module by using the bonding wire or the interconnect sheet. The pins in the group are electrically connected.
结合第三方面,在第四种可能的实施方式中,在第二步后,所述制造方法还包括:对所述引脚进行冲压成型,使所述引脚形成鸥翼形或直插形。With reference to the third aspect, in a fourth possible implementation manner, after the second step, the manufacturing method further includes: stamping the pins so that the pins form a gull-wing shape or an in-line shape .
第四方面,本申请实施例提供了一种功率变换电路,其特征在于,所述功率变换电路包括:电容和至少一个功率模组,所述功率模组与所述电容电连接,所述电容用于为所述功率模组提供电压,所述至少一个功率模组用于交/直流电转换。其中,功率模组还包括:覆金属层基板、热沉片、芯片和塑封体;所述覆金属层基板、所述热沉片与所述芯片依次叠层设置,且塑封在所述塑封体内;所述塑封体包括凹陷部;所述凹陷部设置于所述塑封体背离所述覆金属层基板的一面,所述凹陷部在所述功率模组厚度方向上的投影覆盖所述芯片在所述功率模组厚度方向上的投影。可以理解的,所述功率变换电路包含了如第一方面的申请实施例中的功率模组,由于所述功率模组具有良好的散热性以及更高的功率密度,从而可以提高所述电机驱动器的功率转换效率。In a fourth aspect, an embodiment of the present application provides a power conversion circuit, wherein the power conversion circuit includes: a capacitor and at least one power module, the power module is electrically connected to the capacitor, and the capacitor It is used to provide voltage for the power module, and the at least one power module is used for AC/DC conversion. Wherein, the power module further includes: a metal-clad substrate, a heat sink, a chip, and a plastic package; the metal-clad substrate, the heat sink, and the chip are sequentially stacked and packaged in the plastic package The plastic package includes a concave portion; the concave portion is arranged on the side of the plastic package away from the metal-clad substrate, and the projection of the concave portion in the thickness direction of the power module covers the chip on the The projection in the thickness direction of the above power module. It can be understood that the power conversion circuit includes the power module as in the application embodiment of the first aspect. Since the power module has good heat dissipation and higher power density, the motor driver can be improved. power conversion efficiency.
附图说明Description of drawings
图1是实施例一提供的一种功率设备结构示意图;FIG. 1 is a schematic structural diagram of a power device provided in
图2A是实施例一提供的一种功率模组结构示意图;Fig. 2A is a schematic structural diagram of a power module provided by
图2B是实施例一提供的一种功率模组结构立体图;Fig. 2B is a perspective view of a power module structure provided by
图3是实施例一提供的另一种功率模组结构示意图;Fig. 3 is a schematic structural diagram of another power module provided by
图4是实施例一提供的另一种功率模组结构示意图;Fig. 4 is a schematic structural diagram of another power module provided by
图5是实施例一提供的另一种功率模组结构示意图;Fig. 5 is a schematic structural diagram of another power module provided by
图6A-6C是实施例一提供的一种功率模组结构主视图;6A-6C are front views of a power module structure provided by
图7是实施例二提供的一种功率模组的制造方法。Fig. 7 is a manufacturing method of a power module provided by the second embodiment.
附图标记:Reference signs:
塑封体-1,凹陷部1-1,子区域1-1-1,第一凹槽1-2,阶梯齿1-2-1,子凹槽1-2-2,第二凹槽1-3,覆金属层基板2,第一金属板2-1,第二金属板2-2,绝缘层2-3,热沉片3,芯片4,引脚5,键合线6,散热器7,电路板8,功率模组9。Plastic package-1, recessed part 1-1, sub-region 1-1-1, first groove 1-2, stepped teeth 1-2-1, sub-groove 1-2-2, second groove 1- 3. Metal-clad
具体实施方式Detailed ways
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行描述。The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.
在功率设备中功率模块扮演着重要的角色,无论是在新能源汽车、智能光伏等领域都是功率设备的核心组件。在功率设备工作时,功率模块通过频繁的开通与关断的状态切换,实现交/直流电的转换。但是频繁的状态切换,会为功率模组带来大量的热量,而高温将导致功率模组中的功率芯片转换效率降低甚至损坏,同时,随着业界向高压场景的发展,功率模组也向着高压的方向发展,例如新能源汽车高压快充、智能光伏高压发电等。因此将功率模组在高压工作状态下产生的热量及时的导出,降低功率模组在工作状态的温度,提高功率模组的耐压值,同时保持功率模组长期稳定的工作,一直是业界研究的重点。Power modules play an important role in power equipment, and are the core components of power equipment in the fields of new energy vehicles and smart photovoltaics. When the power device is working, the power module realizes the conversion of AC/DC power through frequent on and off state switching. However, frequent state switching will bring a lot of heat to the power module, and high temperature will cause the conversion efficiency of the power chip in the power module to decrease or even be damaged. Development in the direction of high voltage, such as high-voltage fast charging of new energy vehicles, smart photovoltaic high-voltage power generation, etc. Therefore, timely exporting the heat generated by the power module in the high-voltage working state, reducing the temperature of the power module in the working state, improving the withstand voltage value of the power module, and maintaining the long-term stable operation of the power module has always been the research of the industry. the key of.
当前的功率模组有很多问题,首先,当前业界为了提高散热效率,在安装散热片或者散热器之前,首先在芯片上贴合三层结构基板,如覆铜陶瓷基板(Direct Bond Copper,DBC)、活性金属焊接基板(Active metal brazed copper,AMB,例如Al2O3-AMB、Si3N4-AMB或AlN-AMB)或绝缘金属基板(Insulated metal substrate,IMS)等,三层基板的上下两层为导电导热材料,靠近功率芯片的下层既可以为功率芯片内部电流的流动提供通道,也可以为将功率芯片产生的热量及时的导出,而靠近散热器上层主要可以为所述功率芯片提供保护,降低功率芯片外界撞击的影响,而中间层为绝缘层,可以防止下层的导电导热材料与散热器导通,防止芯片出现短路等问题。但是由于基板的下层,如DBC,一般采用铜层与功率芯片相接,下层的铜层比较薄对提升瞬态热性能有限,导致其有效热扩散面积小,稳态热性能不是最优。The current power module has many problems. First, in order to improve the heat dissipation efficiency, the current industry first attaches a three-layer structure substrate on the chip, such as a copper-clad ceramic substrate (Direct Bond Copper, DBC) before installing a heat sink or heat sink. , active metal brazed copper (AMB, such as Al2O3-AMB, Si3N4-AMB or AlN-AMB) or insulated metal substrate (Insulated metal substrate, IMS), etc., the upper and lower layers of the three-layer substrate are conductive and thermally conductive materials , the lower layer close to the power chip can not only provide a channel for the internal current flow of the power chip, but also timely export the heat generated by the power chip, and the upper layer close to the heat sink can mainly provide protection for the power chip and reduce the external environment of the power chip. The impact of the impact, and the middle layer is an insulating layer, which can prevent the conductive and heat-conducting material of the lower layer from conducting with the heat sink, and prevent the short circuit of the chip and other problems. However, because the lower layer of the substrate, such as DBC, generally uses a copper layer to connect with the power chip, the thinner copper layer on the lower layer has limited improvement in transient thermal performance, resulting in a small effective thermal diffusion area and suboptimal steady-state thermal performance.
其次,当前业界为了提高功率模组的耐压值,通过增加塑封体的厚度来增加功率芯片的引脚与散热器之间的爬电距离,但是塑封体厚度的增加,会使得功率模组的工艺与成本增加,同时塑封体厚度的增加也不利于功率模组的散热,也不利于功率模组在小型化场景的应用,从而限制功率模组的发展。Secondly, in order to improve the withstand voltage value of the power module, the current industry increases the creepage distance between the pins of the power chip and the heat sink by increasing the thickness of the plastic package, but the increase in the thickness of the plastic package will make the power module The process and cost increase, and the increase in the thickness of the plastic package is not conducive to the heat dissipation of the power module, and it is also not conducive to the application of the power module in the miniaturization scene, thus limiting the development of the power module.
最后,由于功率模组需要长时间的运行,同时其工作环境也是多种多样,因此功率模组中的功率芯片难免会因为各种各样的原因出现故障。例如,功率芯片出现故障产生应力,使覆金属层基板中的绝缘层损坏,从而导致功率芯片与散热器短路,导致严重的安全事故。因此如何在功率芯片出现故障时,将故障的危害程度降到最低,不影响整个系统的运行,对功率模组的安全可靠性提出了新的要求。Finally, since the power module needs to run for a long time, and its working environment is also varied, the power chips in the power module will inevitably fail due to various reasons. For example, a failure of a power chip generates stress, which damages the insulating layer in the metal-clad substrate, thereby causing a short circuit between the power chip and the heat sink, resulting in serious safety accidents. Therefore, when the power chip fails, how to minimize the damage of the failure without affecting the operation of the entire system puts forward new requirements for the safety and reliability of the power module.
针对以上问题,本申请提供了一种新型的功率设备、功率模组结构以及制作方法和功率变换电路。本申请首先在塑封体中增加凹陷部,在芯片下方的塑封体上形成一个薄弱点,使得芯片失效产生的应力更容易从所述薄弱点进行释放,而不损坏芯片上方的覆金属层基板,减少了由于覆金属层基板中绝缘层的开裂而使散热器与芯片出现短路进而引起严重的安全问题。与凹陷部相适应的,为了弥补覆金属层基板中金属层而所能承受的应力较差的缺点,在芯片与覆金属层基板之间设置热沉片,一般的,热沉片的厚度可以设置为大于覆金属层基板中金属层厚度的一倍以上。热沉片也可以提高芯片与散热片之间的应力承受能力,增强了功率模组的结构稳定性,进一步引导芯片应力从凹陷部进行释放,降低了由于芯片失效产生应力导致散热片中的绝缘层损坏而使芯片与散热器之间短路的可能性。同时,由于热沉片具有高效的导热导电性,因此可以提高功率模组的整体散热效率。In view of the above problems, the present application provides a novel power device, a power module structure and a manufacturing method, and a power conversion circuit. In this application, firstly, a recess is added to the plastic package to form a weak point on the plastic package under the chip, so that the stress generated by the chip failure can be released from the weak point more easily without damaging the metal-clad substrate above the chip. The short circuit between the heat sink and the chip due to the crack of the insulating layer in the metal-clad substrate is reduced, thereby causing serious safety problems. Compatible with the recessed part, in order to make up for the shortcoming that the metal layer in the metal-clad substrate can withstand poor stress, a heat sink is arranged between the chip and the metal-clad substrate. Generally, the thickness of the heat sink can be It is set to be more than twice the thickness of the metal layer in the metal-clad substrate. The heat sink can also improve the stress bearing capacity between the chip and the heat sink, enhance the structural stability of the power module, further guide the chip stress to be released from the recess, and reduce the insulation in the heat sink caused by the stress caused by chip failure. Possibility of layer damage causing a short circuit between the chip and the heat sink. At the same time, since the heat sink has efficient thermal conductivity, it can improve the overall heat dissipation efficiency of the power module.
为了在不降低功率模组散热能力的前提下,又同时提高功率模组的耐压能力,本申请在塑封体靠近覆金属层基板一面的边缘增加了第一凹槽,使得功率模组在不增加塑封体厚度的情况下,增加了引脚到散热器之间的爬电距离,保证了功率模组的散热能力的不下降以及工艺制造成本不提升。最后,为了进一步的提高功率模组的结构稳定性,在塑封体中第一凹槽的相对位置设置了第二凹槽,第二凹槽与凹陷部同样位于塑封体背离覆金属层基板的一面,第二凹槽可以降低由于散热器压接而使第二凹槽的对应位置产生裂纹的风险。In order to improve the pressure resistance of the power module without reducing the heat dissipation capability of the power module, this application adds a first groove to the edge of the plastic package close to the metal-clad substrate, so that the power module does not When the thickness of the plastic package is increased, the creepage distance between the pin and the radiator is increased, which ensures that the heat dissipation capability of the power module does not decrease and the manufacturing cost does not increase. Finally, in order to further improve the structural stability of the power module, a second groove is provided in the opposite position of the first groove in the plastic package, and the second groove and the concave part are also located on the side of the plastic package away from the metal-clad substrate , the second groove can reduce the risk of cracks at the corresponding position of the second groove due to crimping of the heat sink.
本申请提供的第一种实施例如图1所述,本申请的第一种实施例提供一种功率设备,所述功率设备包括电路板8、功率模组9以及散热器7。功率模组9通过引脚5采用表贴的方式设置在电路板8上,散热器7设置在功率模组9背离电路板8的一面。其中,功率模组9包括塑封体1、覆金属层基板2、热沉片3以及芯片4。热沉片3置于覆金属层基板2与芯片4之间,其中覆金属层基板2包括第一金属层2-1、第二金属层2-2以及绝缘层2-3,第二金属层2-2与热沉片3之间通过焊接或者烧结的方式结合在一起,由于在现有技术中第一金属层2-1与第二金属层2-2的厚度相对较薄,结构强度不够,不能满足功率设备对安全性的需求,因此本申请中,热沉片3的厚度为第二金属层2-2的厚度的2倍,当然也可以更厚,例如,热沉片3的厚度为第二金属层2-2的厚度的2.5倍,因此热沉片3可以增强芯片4与覆金属层基板2之间的结构强度,在芯片3出现损坏产生应力时,增强对覆金属层基板2的保护,降低覆金属层基板2中绝缘层2-3发生损坏的可能性。同时为了充分的利用热沉片的接触面积,热沉片3的长和宽分别比芯片4的长和宽大1mm,当然,热沉片3还可以更大,热沉片3的长和宽也可以分别比芯片4的长和宽大1.5mm。另外,热沉片3还可以提高功率模组9的散热性能,保证了功率设备的散热性能。热沉片3的材料与第一金属层2-1以及第二金属层2-2的材料相同,都为Cu,但是也可以为CuMo复合材料、金刚石、金刚石-铜复合材料、Al-SiC复合材料等具有高导热导电的其他材料。热沉片3具有导热导电特性,既可以为芯片4提供散热,也可以为芯片4内部电流提供电流通道。The first embodiment provided by the present application is as shown in FIG. 1 , the first embodiment of the present application provides a power device, and the power device includes a
覆金属层基板2、热沉片3以及芯片4由塑封体1进行塑封,热沉片3可以增强芯片4与覆金属层基板2之间的结构强度,适应性的,为了进一步保护覆金属层基板2中的绝缘层2-3,在塑封体1中增加凹陷部1-1,从而可以在芯片4下方的塑封体上形成一个薄弱点,使得芯片4失效产生应力时更容易从所述薄弱点进行释放,从而保护了绝缘层2-3。凹陷部1-1的形状为正梯形,凹陷部1-1的底部宽度小于凹陷部1-1顶部宽度,凹陷部1-1侧壁倾斜角为10度,当然,倾斜角可以更大,例如,凹陷部1-1侧壁倾斜角为12度。为了达到更好的保护效果,凹陷部1-1的底部的长度和宽度比芯片4的长度和宽度大1.0mm,当然,凹陷部1-1也可以更大,例如,凹陷部1-1的底部的长度和宽度比芯片4的长度和宽度大1.2mm。在凹陷部1-1的深度设计方面,图1中凹陷部1-1的深度为0.2mm,当然,也可以更深,例如,图1中凹陷部1-1的深度为0.3mm。凹陷部1-1底部与键合线6之间的也需要保证安全距离,凹陷部1-1底部与键合线6之间的距离为0.5mm,当然,距离也可以更大,凹陷部1-1底部与键合线6之间的距离为0.6mm。该结构相比垂直结构更加稳定,可以有效的提高功率模组9抗损性,也提高了功率设备的安全性。芯片4可以有多个,与之对应的,也可以设置多个芯片区域,每个芯片区域对应设置一个凹陷部1-1,如图2A所示,功率模组9内部具有两个芯片4,在塑封体1的底部设置凹陷部1-1的两个子区域1-1-1,分别对应两个芯片区域。如图2B所示,为功率模组9的立体图,为了清楚的展示凹陷部1-1的结构,图2B中,凹陷部1-1的部分朝上设置,可以看出凹陷部1-1分别具有两个子区域。需要指出的是,图2A与图2B不是一一对应的关系,在图2A中凹陷部1-1的子区域排列方向与图2B中相反。The metal-clad
在塑封体1中增加第一凹槽1-2,第一凹槽1-2设置于塑封体1与散热器7之间,形成面向散热器7的凹陷空间,如图1中的箭头所示,增加了塑封体1的表面褶皱程度,延长了塑封体1的表面长度,可以增加引脚5到散热片7之间的爬电距离,从而增加功率模组9的耐压能力,也就提高了功率设备的耐压能力。第一凹槽1-2并没有增加塑封体1的厚度,因此不会降低功率模组9的散热能力,同时也不会因为塑封体1使用材料的增加而增加功率模组9的制造成本。如图1中,第一凹槽1-2为梯形结构,第一凹槽1-2的底部宽度小于第一凹槽1-2的顶部宽度,这里第一凹槽1-2侧壁倾斜角为10度,当然,倾斜角可以更大,例如,凹陷部1-1侧壁倾斜角为12度。第一凹槽1-2顶部到塑封体1顶部距离、第一凹槽1-2的深度以及第一凹槽1-2底部宽度为1.0mm,当然,也可以设置更大值,例如,第一凹槽1-2顶部到塑封体1顶部距离、第一凹槽1-2的深度以及第一凹槽1-2底部宽度为1.2mm。梯形结构相比垂直结构更加稳定,可以有效的提高功率模组9抗损性,也就提高了功率设备的安全性。Add a first groove 1-2 in the
在第一凹槽1-2中,如图3所示,可以增加阶梯齿1-2-1,阶梯齿1-2-1可以有效的增加第一凹槽1-2的表面长度,也就进一步增加了引脚5到散热器7之间的爬电距离,最终提高了功率模组9的耐压能力。可以推理得到的,阶梯齿1-2-1数量越多爬电距离越长,本申请对阶梯齿1-2-1的数量不做具体限制,可以是一个,也可以是两个、三个或四个。In the first groove 1-2, as shown in Figure 3, stepped teeth 1-2-1 can be added, and the stepped teeth 1-2-1 can effectively increase the surface length of the first groove 1-2, that is The creepage distance between the
在第一凹槽1-2中,如图4所示,可以在第一凹槽1-2中增加子凹槽1-2-2,与阶梯齿1-2-1类似的,子凹槽1-2-2也可以增加第一凹槽1-2的表面长度,也就进一步增加了引脚5到散热器7之间的爬电距离,最终提高了功率模组9的耐压能力。可以推理得到的,子凹槽1-2-2数量越多爬电距离越长,本申请对子凹槽1-2-2的数量不做具体限制,可以是一个,也可以是两个、三个或四个。In the first groove 1-2, as shown in Figure 4, a sub-groove 1-2-2 can be added in the first groove 1-2, similar to the stepped tooth 1-2-1, the sub-groove 1-2-2 can also increase the surface length of the first groove 1-2, which further increases the creepage distance between the
在一些特殊的场景下,如图5所示,第一凹槽1-2也可以矩形,即第一凹槽1-2的侧壁可以为垂直结构,矩形结构相比梯形结构可以有效的增加所述第一凹槽的表面长度,也就增加了引脚5到散热器7之间的爬电距离,可以有效提高功率模组9所能承受的电压。In some special scenarios, as shown in Figure 5, the first groove 1-2 can also be rectangular, that is, the side wall of the first groove 1-2 can be a vertical structure, and the rectangular structure can effectively increase the The surface length of the first groove also increases the creepage distance between the
如图6A-6C,为功率模组9的俯视图,由图中可以看出第一凹槽1-2可以设置在塑封体1中靠近覆金属层基板2的一面的边缘的一边或两边或四周。可以根据具体的场景进行设置。本申请不做具体的限制。Figures 6A-6C are top views of the
第二凹槽1-3,第二凹槽1-3设置于塑封体1与电路板8之间,且沿电路板8表面延伸,形成面向引脚5开口的扁平空间,在塑封体1中第一凹槽1-2的相对位置增加的第二凹槽1-3,可以降低由于散热器7压接而使第二凹槽1-3的对应位置产生裂纹的风险。第二凹槽1-3的形状也是梯形,第二凹槽1-3的底部宽度小于所述第二凹槽1-3顶部宽度。如图1中所示,第二凹槽1-3侧壁与功率模组9厚度方向的夹角10度,当然,夹角可以更大,例如,第二凹槽1-3侧壁与功率模组9厚度方向的夹角12度。第二凹槽1-3的深度0.2mm,当然,也可以更深,例如,第二凹槽1-3的深度0.3mm。第二凹槽1-3在功率模组9受到压力时,可以起到缓冲的作用,保护功率模组9。The second groove 1-3, the second groove 1-3 is arranged between the
如图1所示,功率模组9还包括引脚5与键合线6,其中键合线6也可以使用互联片取代,芯片4通过键合线6或互联片与引脚5电连接,引脚5的第一部分设置于塑封体1内部,引脚5的第二部分用于与电路板8连接,在本实施例中,引脚5的形状为鸥翼形,当然引脚5也可以为直插形。As shown in FIG. 1 , the
如图1所示,散热器7通过焊接或烧结的方式设置在覆金属层基板2背离芯片4的一面,散热器7与覆金属层基板2也可以通过热硅脂、石墨膜、硅凝胶、相变材料等导热界面材料进行贴合。在散热器7的内部设有散热水道,散热水道具有进水口、出水口。冷却液由进水口进入位于散热器7内部的散热水道,吸收散热器7的热量,并最终由出水口流出将所有热量带走。散热器7可以吸收覆金属层基板2传递来的热量,使功率模组9的温度降低。且由图1还可以看到,散热器7与塑封体1的上表面处于同一平面,这样可以使散热器7与覆金属层基板2的第二金属层2-2平整的贴合,提高所述功率模组9的散热性能。散热器7具有散热翅片,散热翅片可以增大散热面积,提高所述散热器7的散热效率。As shown in Figure 1, the
本申请的第二种实施方式提供了一种功率模组的制造方法,所述方法如图7所示包括:The second embodiment of the present application provides a method for manufacturing a power module, the method includes as shown in FIG. 7 :
S1:将覆金属层基板2、热沉片3、芯片4通过焊接或烧结依次叠层设置;其中,热沉片3的厚度大于覆金属层基板2中第二金属层2-2的厚度,热沉片3在功率模组厚度方向上的投影覆盖芯片4在功率模组厚度方向上的投影;S1: The metal-clad
S2:塑封,使用塑封体1将覆金属层基板2、热沉片3以及芯片4密封,塑封体1设置有凹陷部1-1、第一凹槽1-2与第二凹槽1-3;其中凹陷部1-1与第二凹槽1-3设置在塑封体1背离覆金属层基板2的一面,且凹陷部1-1在功率模组厚度方向上的投影覆盖芯片4在功率模组厚度方向上的投影;第一凹槽1-2与第二凹槽1-3相对设置,第一凹槽1-2设置在塑封体1靠近覆金属层基板2的一面,且第二凹槽1-3在功率模组厚度方向上的投影覆盖第一凹槽1-2在功率模组厚度方向上的投影。S2: plastic packaging, use the
塑封体1所采用的塑封料使用低模量的塑封料,可以提高功率模组的可靠性,塑封料可以采用弹性模量在0.5GPa~20GPa之间的材料形成,例如环氧塑封料等,在此不作限定。在具体实施时,塑封完成后可以对功率模块的上下表面进行研磨,使功率模块的两面平行。当然,也可以根据需求不用研磨。示例性的,塑封后还可以对裸露在功率模组外部的引脚5进行镀锡处理,以防止引脚5氧化和增加引脚5的可焊性。The molding compound used in the
制作完整的功率模组,在S1之后还具有S11,通过焊接或烧结将芯片4利用所述键合线6或互联片与引脚5电连接。同时在S2之后还具有S21,对引脚5进行冲压成型,使引脚5形成鸥翼形或直插形。To make a complete power module, there is S11 after S1, and the
本申请的第三种实施方式提供了一种功率变换电路,所述功率变换电路包括电容和至少一个如以上任一申请实施例中功率模组,功率模组与电容电连接,电容用于为功率模组提供电压,功率变换电路用于交/直流转换。本申请实施例中,功率模组的结构和工作原理可以参考上述实施例的描述,本申请实施例中不再赘述。The third embodiment of the present application provides a power conversion circuit, the power conversion circuit includes a capacitor and at least one power module as in any of the above application embodiments, the power module is electrically connected to the capacitor, and the capacitor is used for The power module provides voltage, and the power conversion circuit is used for AC/DC conversion. In the embodiment of the present application, the structure and working principle of the power module can refer to the description of the foregoing embodiments, and will not be repeated in the embodiment of the present application.
一般的,本申请实施例提供的功率变换电路,功率变换电路包含了以上任一申请实施例中的功率模组,由于功率模组采用了上述实施例中的结构,使得功率模组的散热性能大大提高,同时耐压性也得到增强,因此相同面积的功率芯片,采用本申请实施例的功率模组的功率芯片可以承受更高的电流,从而获得更高的功率密度,而采用此功率模组的功率变换电路,也因此可以输出更高的功率,具有更高的功率转化效率。同时,由于本申请实施例中的功率模组,设置凹陷部与第二凹槽,进一步提高功率模组的可靠性,延长了芯片4工作寿命长,同样也提高了实施例三中功率变换电路的可靠性。Generally, the power conversion circuit provided by the embodiment of the present application includes the power module in any of the above application embodiments. Since the power module adopts the structure in the above embodiment, the heat dissipation performance of the power module Greatly improved, and at the same time the withstand voltage is also enhanced, so the same area of the power chip, the power chip using the power module of the embodiment of the application can withstand higher current, thereby obtaining a higher power density, while using this power module The power conversion circuit of the group can therefore output higher power and have higher power conversion efficiency. At the same time, since the power module in the embodiment of the present application is provided with the concave portion and the second groove, the reliability of the power module is further improved, the working life of the
以上,仅为本申请的具体实施方式,但本申请的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本申请揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本申请的保护范围之内。因此,本申请的保护范围应以所述权利要求的保护范围为准。The above is only the specific implementation of the application, but the scope of protection of the application is not limited thereto. Anyone familiar with the technical field can easily think of changes or replacements within the technical scope disclosed in the application, and should cover Within the protection scope of this application. Therefore, the protection scope of the present application should be determined by the protection scope of the claims.
Claims (15)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202310216979.5A CN116314066A (en) | 2023-02-28 | 2023-02-28 | A kind of power device and power module |
PCT/CN2023/120242 WO2024178963A1 (en) | 2023-02-28 | 2023-09-21 | Power device and power module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202310216979.5A CN116314066A (en) | 2023-02-28 | 2023-02-28 | A kind of power device and power module |
Publications (1)
Publication Number | Publication Date |
---|---|
CN116314066A true CN116314066A (en) | 2023-06-23 |
Family
ID=86825215
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202310216979.5A Pending CN116314066A (en) | 2023-02-28 | 2023-02-28 | A kind of power device and power module |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN116314066A (en) |
WO (1) | WO2024178963A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024178963A1 (en) * | 2023-02-28 | 2024-09-06 | 华为数字能源技术有限公司 | Power device and power module |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0690499A3 (en) * | 1994-06-30 | 1997-05-28 | Digital Equipment Corp | Molded plastic packaging for semiconductor chip without support |
KR101221805B1 (en) * | 2006-03-03 | 2013-01-14 | 페어차일드코리아반도체 주식회사 | Package and package assembly for power device |
US8207455B2 (en) * | 2009-07-31 | 2012-06-26 | Power Integrations, Inc. | Power semiconductor package with bottom surface protrusions |
DE102020130612A1 (en) * | 2020-11-19 | 2022-05-19 | Infineon Technologies Ag | Package with an electrically insulating carrier and at least one step on the encapsulant |
CN114373731A (en) * | 2021-12-22 | 2022-04-19 | 华为数字能源技术有限公司 | Packaging structure, circuit board assembly and electronic equipment |
CN115662985A (en) * | 2022-10-27 | 2023-01-31 | 海信家电集团股份有限公司 | Intelligent power module and terminal equipment with same |
CN116314066A (en) * | 2023-02-28 | 2023-06-23 | 华为数字能源技术有限公司 | A kind of power device and power module |
-
2023
- 2023-02-28 CN CN202310216979.5A patent/CN116314066A/en active Pending
- 2023-09-21 WO PCT/CN2023/120242 patent/WO2024178963A1/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024178963A1 (en) * | 2023-02-28 | 2024-09-06 | 华为数字能源技术有限公司 | Power device and power module |
Also Published As
Publication number | Publication date |
---|---|
WO2024178963A1 (en) | 2024-09-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6765469B2 (en) | Power module semiconductor device | |
CN112701095B (en) | Power chip stacking and packaging structure | |
CN102664177B (en) | Power semiconductor module adopting double-sided cooling | |
KR101208332B1 (en) | Clip structure for semiconductor package and a semiconductor package using the same | |
JP6077773B2 (en) | Power module semiconductor device | |
CN214043635U (en) | Intelligent power module and power electronic equipment | |
CN109637983B (en) | Chip packaging | |
US9105601B2 (en) | Power module package | |
CN111554645B (en) | Double-sided water-cooling SiC half-bridge module packaging structure integrated with laminated busbar | |
CN107146775A (en) | A kind of low stray inductance two-side radiation power model | |
CN113782504B (en) | Simplified packaging structure of power module of integrated radiator and manufacturing method | |
JP2021141275A (en) | Electric circuit bodies, power converters, and methods for manufacturing electric circuit bodies | |
WO2024178963A1 (en) | Power device and power module | |
CN116364671A (en) | A power converter, packaging structure and heat dissipation structure | |
EP4254485A1 (en) | Power module | |
CN216145614U (en) | Intelligent power module | |
CN105990275B (en) | Power module package part and preparation method thereof | |
CN113314479A (en) | Semiconductor circuit having a plurality of transistors | |
CN215578508U (en) | Semiconductor circuit having a plurality of transistors | |
CN110676232A (en) | Semiconductor device packaging structure, manufacturing method thereof and electronic equipment | |
CN216818324U (en) | Power semiconductor module | |
CN215644461U (en) | Power module and electronic equipment | |
CN114256172A (en) | High-reliability packaging structure and packaging process of power MOSFET | |
CN222233633U (en) | Low inductance power module | |
CN219553614U (en) | Semiconductor circuit and radiator |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination |