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CN116240491A - A kind of scalpel coating and its preparation method and application - Google Patents

A kind of scalpel coating and its preparation method and application Download PDF

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CN116240491A
CN116240491A CN202310224194.2A CN202310224194A CN116240491A CN 116240491 A CN116240491 A CN 116240491A CN 202310224194 A CN202310224194 A CN 202310224194A CN 116240491 A CN116240491 A CN 116240491A
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zrn
scalpel
coating
magnetron sputtering
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CN116240491B (en
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代伟
梁道轩
冯耿超
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Shenzhen Surgscience Medical Technology Co ltd
Guangdong University of Technology
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Shenzhen Surgscience Medical Technology Co ltd
Guangdong University of Technology
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/165Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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Abstract

本发明公开了一种手术刀涂层及其制备方法和应用,涉及到抗黏附涂层领域。本发明提供的手术刀涂层依次包括金属锆过渡层、等化学计量比ZrN中间层和表面过化学计量ZrNx层;等化学计量比ZrN层中N/Zr=0.9~1.1;过化学计量比ZrNx层中N/Zr=1.15~1.3;其中金属锆过渡层、等化学计量比ZrN中间层和表面过化学计量ZrNx层厚度分别是200~230nm、620~650nm、220~250nm。基于ZrNx层的疏水性和低反光度,ZrN层优异的物理和机械性能以及ZrN层对Zr过渡层、ZrNx层之间较强的结合力,本发明所提供的涂层同时兼具抗粘附性能、低反光度和优异的物理性能,在高频手术电刀上具有广阔的应用前景。

Figure 202310224194

The invention discloses a scalpel coating, a preparation method and application thereof, and relates to the field of anti-adhesion coatings. The scalpel coating provided by the present invention comprises metal zirconium transition layer, equistoichiometric ratio ZrN intermediate layer and surface overstoichiometric ZrN x layer in turn; N/Zr=0.9~1.1 in equal stoichiometric ratio ZrN layer; overstoichiometric ratio In the ZrN x layer, N/Zr=1.15-1.3; wherein the metal zirconium transition layer, the equistoichiometric ZrN intermediate layer and the surface overstoichiometric ZrN x layer have thicknesses of 200-230nm, 620-650nm, and 220-250nm respectively. Based on the hydrophobicity and low reflectivity of the ZrNx layer, the excellent physical and mechanical properties of the ZrN layer, and the strong binding force between the ZrN layer to the Zr transition layer and the ZrNx layer, the coating provided by the present invention has both anti- Adhesive properties, low reflectivity and excellent physical properties have broad application prospects in high-frequency surgical electrosurgical units.

Figure 202310224194

Description

一种手术刀涂层及其制备方法和应用A kind of scalpel coating and its preparation method and application

技术领域technical field

本发明涉及抗黏附涂层领域,具体涉及一种手术刀涂层及其制备方法和应用。The invention relates to the field of anti-adhesion coatings, in particular to a scalpel coating and its preparation method and application.

背景技术Background technique

高频手术电刀是一种新型微创手术器具,通过刀尖电极放电产生高频高压电流,接触高阻抗的生物组织,在组织附近形成高热环境,其热效应可使组织细胞蛋白质变性脱水。故高频手术电刀同时具备切割和止血功能,其止血效果好、操作简单,不仅减少了手术时间,也降低了并发症发生概率,故目前在临床上得到广泛使用。然而,正因为细胞组织受高温会脱水变性,在手术时变性的组织会形成结痂物,黏附在刀片表面,而后因受到电刀的高温进一步碳化,黏附得更牢固。结痂物的存在会导致手术刀刀片的电阻增大,进而导致电刀温度增高,在影响切割精度的同时高容易导致非目标组织的热损伤,诱发并发症。黏附在刀片表面的结痂物不易脱落,需要主刀医生手动清洁,这就会增加手术的时间。此外,高频电刀刀头通常为亮面金属色,在手术灯的照射下会反射刺眼的光线,干扰医生视线,降低手术精度。High-frequency surgical electric knife is a new type of minimally invasive surgical instrument. It generates high-frequency and high-voltage current through the discharge of the knife tip electrode, contacts with high-impedance biological tissue, and forms a high-temperature environment near the tissue. The thermal effect can denature and dehydrate tissue cell proteins. Therefore, the high-frequency electrosurgical knife has the functions of cutting and hemostasis at the same time. Its hemostatic effect is good and the operation is simple, which not only reduces the operation time, but also reduces the probability of complications, so it is widely used in clinical practice. However, just because the cells and tissues will be dehydrated and denatured by high temperature, the denatured tissues will form scabs during the operation, which will adhere to the surface of the blade, and then be further carbonized by the high temperature of the electric knife, and the adhesion will be stronger. The existence of scabs will increase the resistance of the scalpel blade, which in turn will lead to an increase in the temperature of the electric knife, which will affect the cutting accuracy and easily cause thermal damage to non-target tissues and induce complications. The scabs adhering to the surface of the blade are not easy to fall off and need to be manually cleaned by the surgeon, which will increase the operation time. In addition, the high-frequency electrosurgical knife head is usually bright metallic color, which will reflect glare light under the illumination of the surgical lamp, interfere with the doctor's line of sight and reduce the accuracy of the operation.

目前主要有以下三种方式试图解决以上高频电刀存在的问题:刀片表面结构改性、刀片表面涂层改性、表面结构-涂层改性。现有技术公开了一种涂覆在刀头电极表面的PTFE(聚四氟乙烯)涂层,该涂层增加了手术刀表面的疏水性从而减少了手术时黏附在刀片上的组织。然而,PTFE在受高温时会产生有害废气,且PTFE属于软质涂层,与手术刀表面的结合力差,容易脱落,在手术中会残留于病患体内,影响患者恢复甚至使其中毒。另有现有技术公开了一种由SiO2颗粒及其表面的有机疏水基团构成的疏水减反射涂层,然而由于该涂层的主要成分为二氧化硅,机械强度不足,不适用于涂覆在手术刀表面。At present, there are mainly three ways to try to solve the above problems of high-frequency electric knife: blade surface structure modification, blade surface coating modification, and surface structure-coating modification. The prior art discloses a PTFE (polytetrafluoroethylene) coating coated on the electrode surface of the knife head, which increases the hydrophobicity of the surface of the scalpel so as to reduce the tissue adhering to the blade during surgery. However, PTFE will produce harmful exhaust gas when subjected to high temperature, and PTFE is a soft coating, which has poor bonding force with the surface of the scalpel and is easy to fall off. It will remain in the patient's body during the operation, affecting the recovery of the patient and even causing poisoning. Another prior art discloses a hydrophobic anti-reflective coating composed of SiO2 particles and organic hydrophobic groups on their surface. However, since the main component of the coating is silicon dioxide, the mechanical strength is insufficient, so it is not suitable for coating Cover the surface of the scalpel.

发明内容Contents of the invention

针对现有技术中手术刀表面容易反射刺眼光线,以及对手术刀表面进行修饰的涂层容易脱落的问题,本发明提供了一种手术刀涂层,该涂层是一种ZrN/ZrNx复合涂层,基于ZrN的物理机械性能,表面ZrNx层的低反光度,以及ZrN、ZrNx的疏水性,手术刀涂层具有良好的物理性能、机械强度、抗生物组织黏附和抗反光的性能;与此同时,由于ZrN对ZrNx层、锆过渡层均具有较高的结合力,所以手术刀涂层不易从手术刀表面脱落。Aiming at the problems in the prior art that the surface of the scalpel is easy to reflect glare light and the coating that modifies the surface of the scalpel is easy to fall off, the present invention provides a coating of a scalpel, which is a ZrN/ZrN x composite Coating, based on the physical and mechanical properties of ZrN, the low reflectivity of the ZrN x layer on the surface, and the hydrophobicity of ZrN and ZrN x , the scalpel coating has good physical properties, mechanical strength, anti-biological tissue adhesion and anti-reflection performance ; At the same time, because ZrN has a higher binding force to the ZrN x layer and the zirconium transition layer, the scalpel coating is not easy to come off from the scalpel surface.

本发明的另一目的在于提供一种手术刀涂层的制备方法。Another object of the present invention is to provide a method for preparing a scalpel coating.

本发明的再一目的在于提供一种手术刀。Another object of the present invention is to provide a scalpel.

为了实现上述目的,本发明提供了如下技术方案:一种手术刀涂层,依次包括金属锆过渡层、等化学计量比ZrN层以及表面过化学计量比ZrNx层;等化学计量比ZrN层中N/Zr=0.9~1.1;过化学计量比ZrNx层中N/Zr=1.15~1.3;金属锆过渡层、等化学计量比ZrN中间层和表面过化学计量比ZrNx层厚度分别是200~230nm、620~650nm、220~250nm。In order to achieve the above object, the present invention provides the following technical solutions: a scalpel coating, which successively includes a metal zirconium transition layer, an equal stoichiometric ZrN layer, and a surface cross-stoichiometric ZrN x layer; N/Zr=0.9~1.1; N/Zr=1.15~1.3 in the stoichiometric ratio ZrN x layer; metal zirconium transition layer, equal stoichiometric ratio ZrN intermediate layer and surface stoichiometric ratio ZrN x layer thickness are 200~ 230nm, 620~650nm, 220~250nm.

本发明提供的手术刀涂层中,金属氮化物ZrN与ZrNx属于陶瓷材料,热膨胀系数等物理性能与金属手术刀基体之间相差较大,因此本发明在ZrN层与基体之间引入一层金属Zr层,使每层之间的物理机械性能是梯度变化的,降低涂层因受热等情况而从手术刀表面脱落的概率。In the scalpel coating provided by the present invention, metal nitrides ZrN and ZrNx belong to ceramic materials, and the physical properties such as thermal expansion coefficient are quite different from those of the metal scalpel substrate. Therefore, the present invention introduces a layer between the ZrN layer and the substrate The metal Zr layer makes the physical and mechanical properties between each layer change gradually, reducing the probability that the coating will fall off from the surface of the scalpel due to heat and other conditions.

本发明采用过化学计量ZrNx层(N/Zr=1.15~1.3)作为涂层的最外层,是因为在超过化学计量比的金属氮化物中,过渡金属锆中d轨道的电子会转移到过量的N原子上形成过氮化物,氮化物层内部的自由电子减少,因而入射光线与自由电子相互作用产生反射光线的机率减小,与此同时,ZrNx的外观是暗灰色的,因此ZrNx层具有低反光度。此外,氮元素的引入使得氮化锆具有了一定的疏水性,所以在手术刀表面添加一层ZrNx层能够同时改善手术刀抗生物组织粘附的性能,防止手术刀因为被组织粘附而产生电阻增大、对非目标组织产生热损伤的问题。The present invention adopts stoichiometric ZrNx layer (N/Zr=1.15~1.3) as the outermost layer of the coating, because in metal nitrides exceeding the stoichiometric ratio, the electrons of d orbitals in the transition metal zirconium will transfer to Nitride is formed on excess N atoms, and the free electrons inside the nitride layer are reduced, so the probability of incident light interacting with free electrons to generate reflected light is reduced. At the same time, the appearance of ZrN x is dark gray, so ZrN The x- layer has low reflectivity. In addition, the introduction of nitrogen makes zirconium nitride have a certain degree of hydrophobicity, so adding a layer of ZrN x layer on the surface of the scalpel can improve the performance of the scalpel against biological tissue adhesion at the same time, and prevent the scalpel from being damaged by tissue adhesion. Problems arise from increased electrical resistance and thermal damage to non-target tissue.

然而,过量N元素的存在会对ZrNx层与Zr层之间的成键造成影响,使得两层之间的结合力下降,因此,本发明在表面ZrNx层与Zr过渡层之间引入了一层等化学计量比的ZrN中间层(N/Zr=0.9~1.1),该中间层对于ZrNx层与Zr层都具有较强的结合力,且具有优异的物理机械性能,能够提高手术刀涂层的机械强度和导电性等物理性能,而导电性的提高也进一步降低了手术刀表面因为被生物组织黏附而产生电阻增大现象、对非目标组织造成热损伤的概率。However, the presence of excessive N elements will affect the bonding between the ZrN x layer and the Zr layer, so that the binding force between the two layers will drop. Therefore, the present invention introduces a new method between the surface ZrN x layer and the Zr transition layer A layer of ZrN intermediate layer with equal stoichiometric ratio (N/Zr=0.9~1.1), the intermediate layer has strong binding force for ZrN x layer and Zr layer, and has excellent physical and mechanical properties, which can improve the scalpel The physical properties such as mechanical strength and electrical conductivity of the coating, and the improvement of electrical conductivity further reduces the probability of increased electrical resistance and thermal damage to non-target tissues due to the adhesion of biological tissues on the surface of the scalpel.

为了保证涂层不影响高频手术电刀的使用,本发明将手术刀涂层的总厚度限定在1μm左右。其中,金属锆过渡层的厚度为200~230nm,这是在金属基体上制备陶瓷材料涂层时引入的金属过渡层的常规厚度;等化学计量比ZrN中间层的厚度为620~650nm,低于620nm时中间层的物理机械性能不足,手术刀涂层的导电性、硬度和对手术刀基体的结合力等都难以超越现有技术的水平,而当中间层的厚度高于650nm时,手术刀涂层的总厚度会因此增大,影响手术刀的正常运行,涂层的制备成本也随之提高;表面过化学计量ZrNx层的厚度为220~250nm,低于220nm的表面层,难以提升手术刀涂层的抗反光性能,这是因为,中间的等化学计量比ZrN层外观是金黄色的,容易反射刺眼光线,过薄的暗灰色表面层,无法较好地覆盖中间层,而过厚的表面层则会影响手术刀涂层的导电性和力学性能。In order to ensure that the coating does not affect the use of the high-frequency electrosurgical knife, the present invention limits the total thickness of the scalpel coating to about 1 μm. Among them, the thickness of the metal zirconium transition layer is 200-230nm, which is the conventional thickness of the metal transition layer introduced when the ceramic material coating is prepared on the metal substrate; the thickness of the equistoichiometric ZrN intermediate layer is 620-650nm, which is lower than At 620nm, the physical and mechanical properties of the intermediate layer are insufficient, and the electrical conductivity, hardness, and bonding force to the scalpel substrate of the scalpel coating are difficult to surpass the level of the prior art, and when the thickness of the intermediate layer is higher than 650nm, the scalpel The total thickness of the coating will thus increase, affecting the normal operation of the scalpel, and the preparation cost of the coating will also increase; the thickness of the surface stoichiometric ZrN x layer is 220-250nm, and the surface layer below 220nm is difficult to improve The anti-reflection performance of the scalpel coating is because the appearance of the middle equistoichiometric ZrN layer is golden yellow, which is easy to reflect glare light, and the too thin dark gray surface layer cannot cover the middle layer well, and the too thin A thick surface layer will affect the electrical conductivity and mechanical properties of the scalpel coating.

本发明保护一种手术刀涂层的制备方法,具体包括如下步骤:依次在基底上沉积金属Zr过渡层、等化学计量比ZrN中间层和表面过化学计量ZrNx层。The invention protects a preparation method of a scalpel coating, which specifically comprises the following steps: sequentially depositing a metal Zr transition layer, an equistoichiometric ZrN intermediate layer and a surface overstoichiometric ZrN x layer on a substrate.

优选地,沉积涂层的方法为直流磁控溅射法,具体包括如下步骤:Preferably, the method for depositing the coating is a DC magnetron sputtering method, which specifically includes the following steps:

向真空室中通入氩气与氮气的混合气体,控制氮气在混合气体中的占比和真空室内真空度,打开Zr靶材进行沉积;Introduce a mixed gas of argon and nitrogen into the vacuum chamber, control the proportion of nitrogen in the mixed gas and the vacuum degree of the vacuum chamber, and open the Zr target for deposition;

混合气体氛围中氮气的占比,在沉积等化学计量比ZrN中间层时为12~15%;The proportion of nitrogen in the mixed gas atmosphere is 12 to 15% when depositing an equistoichiometric ZrN intermediate layer;

混合气体氛围中氮气的占比,在沉积表面过化学计量ZrNx层时为44~52%。The proportion of nitrogen gas in the mixed gas atmosphere is 44-52% when depositing the stoichiometric ZrNx layer on the surface.

用磁控溅射法制备出的手术刀涂层能够在物理机械性能、疏水性和抗反光性等性能提高的同时使涂层的表面具有更少缺陷,这是采用其他沉积方法无法实现的:例如,采用阴极电弧沉积法沉积涂层时,虽然涂层对基体有着优异的结合力,但涂层表面具有非常多的缺陷、凹凸不平,涂层的性质也就并不均匀一致,难以满足制备手术刀的要求。The scalpel coating prepared by magnetron sputtering can improve the physical and mechanical properties, hydrophobicity and anti-reflective properties while making the surface of the coating have fewer defects, which cannot be achieved by other deposition methods: For example, when the coating is deposited by the cathodic arc deposition method, although the coating has excellent adhesion to the substrate, the surface of the coating has a lot of defects and unevenness, and the properties of the coating are not uniform, which is difficult to meet the requirements of preparation. Scalpel requirements.

手术刀涂层中中间层和表面层N/Zr的具体数值是由沉积时磁控溅射真空室中的氮气在混合气体氛围中的占比决定的。当采用直流磁控溅射进行手术刀涂层中不同组成层的沉积时,将混合气体氛围中氮气的占比分别控制在12~15%、44~52%的范围内,才能将中间层和表面层的N/Zr分别控制在0.9~1.1以及1.15~1.3的范围内。The specific value of N/Zr in the middle layer and the surface layer in the scalpel coating is determined by the ratio of nitrogen in the magnetron sputtering vacuum chamber to the mixed gas atmosphere during deposition. When DC magnetron sputtering is used to deposit different composition layers in the scalpel coating, the proportion of nitrogen in the mixed gas atmosphere should be controlled in the ranges of 12-15% and 44-52%, respectively, so that the middle layer and N/Zr of the surface layer is controlled in the ranges of 0.9-1.1 and 1.15-1.3, respectively.

更优选地,在进行直流磁控溅射前,先对手术刀基体进行水洗和氩离子清洗。More preferably, before the DC magnetron sputtering, the scalpel substrate is washed with water and cleaned with argon ions.

对基体进行水洗和氩离子清洗,能够使得基体更加清洁,更有利于手术刀涂层的沉积。Washing the substrate with water and argon ions can make the substrate cleaner and more conducive to the deposition of the scalpel coating.

在本发明的具体实施方式中,对手术刀基体进行水洗和氩离子清洗的具体操作步骤如下:In a specific embodiment of the present invention, the specific operation steps of water washing and argon ion cleaning on the scalpel substrate are as follows:

在去离子水中加入金属清洗粉,开启超声波清洗手术刀基体,清洗完成后用去离子水清洗残余金属清洗粉,用无水乙醇漂洗,再用干燥压缩空气吹干基体。将基体置于真空室的工件支架上,真空室抽真空,至真空度4.0×10–3Pa以下,控制温度在300~350℃,向沉积室通入氩气,保持真空室压强在0.8~1pa,设置工件支架偏压-550~-600V,工作时间20min,然后开启离子源,向离子源通入氩气,保持真空室压强在0.8~1Pa,设置离子源电流为20A,设置工件支架偏压-150~-200V,工作时间为15min。Add metal cleaning powder in deionized water, turn on ultrasonic cleaning scalpel substrate, after cleaning, clean residual metal cleaning powder with deionized water, rinse with absolute ethanol, and dry the substrate with dry compressed air. Place the substrate on the workpiece support in the vacuum chamber, evacuate the vacuum chamber until the vacuum degree is below 4.0× 10-3 Pa, control the temperature at 300-350°C, feed argon gas into the deposition chamber, and keep the pressure of the vacuum chamber at 0.8-3 Pa. 1pa, set the bias voltage of the workpiece support to -550~-600V, and work for 20 minutes, then turn on the ion source, pass argon gas into the ion source, keep the pressure of the vacuum chamber at 0.8~1Pa, set the current of the ion source to 20A, set the bias of the workpiece support Voltage -150 ~ -200V, working time is 15min.

更优选地,在直流磁控溅射法中真空室整体气压为0.2~0.8Pa。More preferably, in the DC magnetron sputtering method, the overall pressure of the vacuum chamber is 0.2-0.8 Pa.

真空室的整体气压首先必须高于0.2Pa,磁控溅射电源才能使惰性气体分子电离、轰击靶材;然而真空室内的整体气压也不能高于0.8Pa,否则过多的气体分子会阻碍在靶材中被轰击出的金属离子的运动路径,使其无法顺利沉积在基体上,难以形成均匀一致的涂层。The overall air pressure in the vacuum chamber must first be higher than 0.2Pa, so that the magnetron sputtering power supply can ionize the inert gas molecules and bombard the target; however, the overall air pressure in the vacuum chamber should not be higher than 0.8Pa, otherwise too many gas molecules will hinder the The movement path of the bombarded metal ions in the target makes it difficult to deposit on the substrate smoothly, and it is difficult to form a uniform coating.

更优选地,在直流磁控溅射法中磁控溅射电源的功率为3.5~4kW。More preferably, the power of the magnetron sputtering power supply in the DC magnetron sputtering method is 3.5-4kW.

溅射功率过小,溅射电源所做的有用功就无法达到能够进行辉光放电的要求;而若溅射功率过大,涂层的沉积速率就会过高,导致基体温度升高,进而使得涂层均匀性和致密性有所降低,影响涂层的抗反光等性能。If the sputtering power is too small, the useful work done by the sputtering power supply cannot meet the requirements of glow discharge; if the sputtering power is too large, the deposition rate of the coating will be too high, resulting in an increase in the temperature of the substrate, and further The uniformity and compactness of the coating are reduced, which affects the anti-reflection and other properties of the coating.

更优选地,在直流磁控溅射法中基体的偏压为-50~-200V。More preferably, the bias voltage of the substrate in the DC magnetron sputtering method is -50~-200V.

在其余条件相同的情况下,基体偏压越高,基体反溅射的效应增强,沉积速率下降,所需沉积时间会上升,也会使涂层内部产生缺陷;而基体偏压过小也会影响涂层的效果,当基体偏压低于-50V时,溅射电源发出的电子到达基体时具有的能量较小,因此在基体表面生长出的涂层具有更细的晶粒,且涂层更疏松,强度等性能有所下降。Under the same other conditions, the higher the substrate bias, the stronger the effect of substrate anti-sputtering, the lower the deposition rate, the higher the required deposition time, and the defects inside the coating; Affect the effect of the coating. When the bias voltage of the substrate is lower than -50V, the electrons emitted by the sputtering power supply have less energy when they reach the substrate, so the coating grown on the surface of the substrate has finer grains, and the coating is more Porosity, strength and other properties have declined.

更优选地,在直流磁控溅射法中基体的温度为300~350℃。More preferably, the temperature of the substrate in the DC magnetron sputtering method is 300-350°C.

基体的温度会影响溅射原子在其上的扩散能力,该温度越低,溅射在基体上的涂层原子扩散得越慢,涂层的缺陷也就越多。将基体的温度限制在上述范围内,能够制备得到缺陷更少的手术刀涂层,涂层的物理机械性能等也就越好。The temperature of the substrate affects the diffusion ability of sputtered atoms on it, the lower the temperature, the slower the diffusion of coating atoms sputtered on the substrate, and the more defects of the coating. If the temperature of the substrate is limited to the above range, the scalpel coating with fewer defects can be prepared, and the physical and mechanical properties of the coating will be better.

更优选地,在直流磁控溅射法中,在沉积金属Zr过渡层时沉积时间为15~25min。More preferably, in the DC magnetron sputtering method, the deposition time is 15-25 minutes when depositing the metal Zr transition layer.

当磁控溅射沉积时间为15~25min时,结合对基体偏压、磁控溅射电源功率等参数的调整,能够将金属锆过渡层的厚度控制在200~230nm的范围内。沉积时间更长,但将基体偏压等相对调低,也可以将金属锆过渡层的厚度控制在上述范围内,但涂层的晶粒大小、致密程度等都会被影响,最终影响涂层的综合性能。When the magnetron sputtering deposition time is 15-25 minutes, combined with the adjustment of the substrate bias voltage, magnetron sputtering power supply and other parameters, the thickness of the metal zirconium transition layer can be controlled within the range of 200-230nm. The deposition time is longer, but the substrate bias is relatively lowered, and the thickness of the metal zirconium transition layer can also be controlled within the above range, but the grain size and compactness of the coating will be affected, which will eventually affect the coating. Comprehensive performance.

更优选地,在直流磁控溅射法中,在沉积等化学计量比ZrN中间层时沉积时间为85~95min。More preferably, in the DC magnetron sputtering method, the deposition time is 85-95 minutes when depositing the equistoichiometric ZrN intermediate layer.

当磁控溅射沉积时间为85~95min时,结合对基体偏压、磁控溅射电源功率等参数的调整,能够将等化学计量比ZrN中间层的厚度控制在620~650nm的范围内。When the magnetron sputtering deposition time is 85-95min, combined with the adjustment of the substrate bias voltage, magnetron sputtering power and other parameters, the thickness of the equistoichiometric ZrN intermediate layer can be controlled within the range of 620-650nm.

更优选地,直流磁控溅射法中,在沉积表面过化学计量比ZrNx层时沉积时间为45~65min。More preferably, in the direct current magnetron sputtering method, the deposition time is 45-65 minutes when depositing a surface-overstoichiometric ZrN x layer.

当磁控溅射沉积时间为45~65min时,结合对基体偏压、磁控溅射电源功率等参数的调整,能够将表面过化学计量比ZrNx层的厚度控制在220~250nm的范围内。When the magnetron sputtering deposition time is 45-65min, combined with the adjustment of the substrate bias voltage, magnetron sputtering power supply and other parameters, the thickness of the surface stoichiometric ZrNx layer can be controlled within the range of 220-250nm .

本发明还保护一种手术刀,手术刀表面具有上述手术刀涂层。The present invention also protects a scalpel, the surface of which has the above-mentioned scalpel coating.

与现有技术相比,本发明的有益效果在于:Compared with prior art, the beneficial effect of the present invention is:

本发明在高频手术电刀表面引入过化学计量比ZrNx层,形成很薄一层暗灰色层,降低了手术刀表面的反光度,也提高了手术刀表面的疏水性,进而改善了手术刀表面的抗生物组织粘附性能。为了降低金属基体和金属氮化物陶瓷材料之间因为热膨胀系数不同等原因而发生脱落的概率,本发明在金属基体表面引入了一层金属Zr过渡层。然而金属Zr过渡层与ZrNx层之间的结合力不足。等化学计量比ZrN中间层的硬度、导热率、和电阻率等物理性能都比较优异,且对Zr、ZrNx都具有较强的结合力,因此本发明还在Zr过渡层与ZrNx层之间引入了一层ZrN中间层。本发明所提供的手术刀涂层,兼具高物理和机械性能、高抗生物粘附性和低反光度,能显著提高医用高频电刀手术切割性能且降低医生在手术中受到的手术灯的干扰。The present invention introduces a stoichiometric ZrNx layer on the surface of the high-frequency surgical electric knife to form a very thin layer of dark gray layer, which reduces the reflectivity of the scalpel surface and improves the hydrophobicity of the scalpel surface, thereby improving the operation efficiency. Anti-biological tissue adhesion properties of the knife surface. In order to reduce the probability of shedding between the metal substrate and the metal nitride ceramic material due to reasons such as differences in thermal expansion coefficients, the present invention introduces a metal Zr transition layer on the surface of the metal substrate. However, the bonding force between the metallic Zr transition layer and the ZrNx layer is insufficient. The physical properties such as hardness, thermal conductivity, and electrical resistivity of the equal stoichiometric ratio ZrN intermediate layer are all relatively excellent, and have strong binding force to Zr and ZrNx , so the present invention is also between the Zr transition layer and the ZrNx layer. A ZrN interlayer is introduced in between. The scalpel coating provided by the present invention has both high physical and mechanical properties, high anti-bioadhesion and low reflectivity, can significantly improve the cutting performance of medical high-frequency electrosurgical surgery and reduce the exposure of doctors to surgical lights during surgery. interference.

附图说明Description of drawings

图1为本发明提供的手术刀涂层的结构示意图。Fig. 1 is a schematic structural view of the scalpel coating provided by the present invention.

图2为本发明提供的手术刀涂层的制备方法路线。Fig. 2 is the preparation method route of scalpel coating provided by the present invention.

图3为本发明实施例1所提供手术刀涂层的接触角测试结果。Fig. 3 is the contact angle test result of the scalpel coating provided in Example 1 of the present invention.

图4为本发明对比例3所提供等化学计量比ZrN涂层的接触角测试结果。Fig. 4 is the test result of the contact angle of the equistoichiometric ZrN coating provided in Comparative Example 3 of the present invention.

图5为本发明对比例4所提供过化学计量比ZrNx涂层的接触角测试结果。Fig. 5 is the contact angle test result of the stoichiometric ZrN x coating provided in Comparative Example 4 of the present invention.

图6为本发明对比例3所提供等化学计量比ZrN涂层的厚度及颜色。FIG. 6 shows the thickness and color of the equistoichiometric ZrN coating provided in Comparative Example 3 of the present invention.

图7为本发明对比例4所提供过化学计量比ZrNx涂层的厚度及颜色。Fig. 7 shows the thickness and color of the stoichiometric ZrN x coating provided in Comparative Example 4 of the present invention.

具体实施方式Detailed ways

以下给出本发明的具体实施案例,对本发明做进一步的详细说明。但实施例并不对本发明做任何形式的限定。除非另有说明,本发明实施例采用的原料试剂为常规购买的原料试剂。The specific implementation examples of the present invention are given below to further describe the present invention in detail. However, the examples do not limit the present invention in any form. Unless otherwise specified, the raw material reagents used in the examples of the present invention are conventionally purchased raw material reagents.

实施例1Example 1

一种手术刀涂层,依次包括手术刀基体、金属锆过渡层、等化学计量比ZrN层以及表面过化学计量比ZrNx层;等化学计量比ZrN层中N/Zr=1.0;过化学计量比ZrNx层中N/Zr=1.2;金属锆过渡层、等化学计量比ZrN中间层和表面过化学计量比ZrNx层厚度分别是220nm、645nm、240nm。A scalpel coating, comprising a scalpel substrate, a metal zirconium transition layer, an equal stoichiometric ZrN layer, and a surface over-stoichiometric ZrN x layer; N/Zr=1.0 in the equal-stoichiometric ZrN layer; over-stoichiometric N/Zr=1.2 in the ratio ZrN x layer; the metal zirconium transition layer, the equistoichiometric ZrN intermediate layer and the surface overstoichiometric ZrN x layer have thicknesses of 220nm, 645nm, and 240nm, respectively.

上述实施例1手术刀涂层的制备方法,具体包括如下步骤:The preparation method of above-mentioned embodiment 1 scalpel coating specifically comprises the steps:

S1.在去离子水中加入金属清洗粉,用超声波清洗手术刀基体,用去离子水清洗残余金属清洗粉,然后用无水乙醇漂洗,用干燥压缩空气吹干,然后将基体置于真空室的工件支架上,真空室抽真空,至真空度4.0×10–3Pa以下,控制温度在330℃,向沉积室通入氩气250sccm,保持压强在0.8pa,设置工件支架偏压-600V,工作时间20分钟,然后开启离子源,向离子源通入氩气600sccm,保持强压在1Pa,设置离子源电流为20A,设置工件支架偏压-200V,工作时间为15分钟,进行氩离子清洗;S1. Add metal cleaning powder in deionized water, clean the scalpel substrate with ultrasonic waves, clean the residual metal cleaning powder with deionized water, then rinse with absolute ethanol, dry with dry compressed air, and then place the substrate in a vacuum chamber On the workpiece support, the vacuum chamber is evacuated until the vacuum degree is below 4.0×10 –3 Pa, the temperature is controlled at 330°C, 250 sccm of argon gas is introduced into the deposition chamber, and the pressure is kept at 0.8 Pa, and the bias voltage of the workpiece support is set to -600V. Time 20 minutes, then turn on the ion source, pass argon 600sccm into the ion source, keep the strong pressure at 1Pa, set the ion source current to 20A, set the workpiece support bias to -200V, and work for 15 minutes to perform argon ion cleaning;

S2.控制基体温度为330℃,向真空室通入氩气,控制真空室整体气压0.6Pa;同时将基体的偏压设置为-100V,溅射电源设置在4kW,打开Zr靶材,沉积20min;S2. Control the temperature of the substrate at 330°C, feed argon gas into the vacuum chamber, and control the overall pressure of the vacuum chamber to 0.6Pa; at the same time, set the bias voltage of the substrate to -100V, set the sputtering power supply to 4kW, turn on the Zr target, and deposit for 20min ;

S3.控制基体温度为330℃,向真空室通入氮气与氩气的混合气体,控制氮气占混合气体的14%,控制真空室整体气压为0.6Pa;同时将基体的偏压设置为-100V,溅射电源设置在4kW,打开Zr靶材,沉积90min;S3. Control the temperature of the substrate to 330°C, feed a mixed gas of nitrogen and argon into the vacuum chamber, control nitrogen to account for 14% of the mixed gas, and control the overall pressure of the vacuum chamber to 0.6Pa; at the same time, set the bias voltage of the substrate to -100V , set the sputtering power supply at 4kW, turn on the Zr target, and deposit for 90min;

S4.控制基体温度为330℃,向真空室通入氮气与氩气的混合气体,控制氮气占总气体的50%,控制真空室整体气压0.6Pa;同时将基体的偏压设置为-100V,溅射电源设置在4kW,向真空室中通入氩气与氮气的混合气体,打开Zr靶材,沉积60min,沉积完成即可得到表面带有手术刀涂层的基体。S4. Control the temperature of the substrate to be 330°C, feed a mixed gas of nitrogen and argon into the vacuum chamber, control nitrogen to account for 50% of the total gas, and control the overall pressure of the vacuum chamber to 0.6Pa; meanwhile, set the bias voltage of the substrate to -100V, The sputtering power supply was set at 4kW, a mixed gas of argon and nitrogen was introduced into the vacuum chamber, the Zr target was turned on, and the deposition was carried out for 60 minutes. After the deposition was completed, a substrate with a scalpel coating on the surface could be obtained.

实施例2Example 2

一种手术刀涂层,和实施例1所提供手术刀涂层的不同之处在于:等化学计量比ZrN层中N/Zr=1.1。A scalpel coating, which differs from the scalpel coating provided in Example 1 in that: N/Zr=1.1 in the equistoichiometric ZrN layer.

上述实施例2手术刀涂层的制备方法,与实施例1的不同之处在于:The preparation method of above-mentioned embodiment 2 scalpel coating, the difference with embodiment 1 is:

S3.氮气在混合气体中的占比为15%。S3. The proportion of nitrogen in the mixed gas is 15%.

实施例3Example 3

一种手术刀涂层,和实施例1所提供手术刀涂层的不同之处在于:等化学计量比ZrN层中N/Zr=0.9。A scalpel coating, which differs from the scalpel coating provided in Example 1 in that: N/Zr=0.9 in the equistoichiometric ZrN layer.

上述实施例3手术刀涂层的制备方法,与实施例1的不同之处在于:The preparation method of above-mentioned embodiment 3 scalpel coating, the difference with embodiment 1 is:

S3.氮气在混合气体中的占比为12%。S3. The proportion of nitrogen in the mixed gas is 12%.

实施例4Example 4

一种手术刀涂层,和实施例1所提供手术刀涂层的不同之处在于:过化学计量比ZrNx层中N/Zr=1.15。A scalpel coating, which differs from the scalpel coating provided in Example 1 in that: N/Zr=1.15 in the overstoichiometric ZrN x layer.

上述实施例4手术刀涂层的制备方法,与实施例1的不同之处在于:The preparation method of above-mentioned embodiment 4 scalpel coating, the difference with embodiment 1 is:

S4.氮气在混合气体中的占比为40%。S4. The proportion of nitrogen in the mixed gas is 40%.

实施例5Example 5

一种手术刀涂层,和实施例1所提供手术刀涂层的不同之处在于:过化学计量比ZrNx层中N/Zr=1.3。A scalpel coating, which differs from the scalpel coating provided in Example 1 in that: N/Zr=1.3 in the overstoichiometric ZrN x layer.

上述实施例5手术刀涂层的制备方法,与实施例1的不同之处在于:The preparation method of above-mentioned embodiment 5 scalpel coating, the difference with embodiment 1 is:

S4.氮气在混合气体中的占比为52%。S4. The proportion of nitrogen in the mixed gas is 52%.

实施例6Example 6

一种手术刀涂层,和实施例1所提供手术刀涂层的不同之处在于:金属锆过渡层、等化学计量比ZrN中间层和表面过化学计量比ZrNx层厚度分别是200nm、650nm、220nm。A kind of scalpel coating, and the difference of the scalpel coating provided in embodiment 1 is: metal zirconium transition layer, equistoichiometric ratio ZrN middle layer and surface superstoichiometric ratio ZrN x layer thickness are respectively 200nm, 650nm , 220nm.

上述实施例6手术刀涂层的制备方法,与实施例1的不同之处在于:The preparation method of above-mentioned embodiment 6 scalpel coating, the difference with embodiment 1 is:

S2.沉积时间为17min;S2. The deposition time is 17min;

S3.沉积时间为92min;S3. The deposition time is 92min;

S4.沉积时间为55min。S4. The deposition time is 55 minutes.

实施例7Example 7

一种手术刀涂层,和实施例1所提供手术刀涂层的不同之处在于:金属锆过渡层、等化学计量比ZrN中间层和表面过化学计量比ZrNx层厚度分别是230nm、620nm、250nm。A kind of scalpel coating, and the difference of the scalpel coating provided in embodiment 1 is: metal zirconium transition layer, equistoichiometric ratio ZrN intermediate layer and surface superstoichiometric ratio ZrN x layer thickness are respectively 230nm, 620nm , 250nm.

上述实施例7手术刀涂层的制备方法,与实施例1的不同之处在于:The preparation method of above-mentioned embodiment 7 scalpel coatings, the difference with embodiment 1 is:

S2.沉积时间为23min;S2. Deposition time is 23min;

S3.沉积时间为86min;S3. The deposition time is 86min;

S4.沉积时间为63min。S4. The deposition time is 63 minutes.

对比例1Comparative example 1

一种手术刀涂层,和实施例1所提供手术刀涂层的不同之处在于:金属锆过渡层、等化学计量比ZrN中间层和表面过化学计量ZrNx层的厚度分别为215nm,641nm和124.5nm。A kind of scalpel coating, and the difference of the scalpel coating provided in embodiment 1 is: the thickness of metal zirconium transition layer, equistoichiometric ratio ZrN middle layer and surface stoichiometric ZrN x layer is respectively 215nm, 641nm and 124.5nm.

对比例2Comparative example 2

一种手术刀涂层,和实施例1所提供手术刀涂层的不同之处在于:金属锆过渡层、等化学计量比ZrN中间层和表面过化学计量ZrNx层的厚度分别为219nm,217nm和243nm。A kind of scalpel coating, and the difference of the scalpel coating provided in embodiment 1 is: the thickness of metal zirconium transition layer, equistoichiometric ratio ZrN middle layer and surface stoichiometric ZrN x layer is respectively 219nm, 217nm and 243nm.

对比例3Comparative example 3

一种ZrN涂层,和实施例1所提供手术刀涂层的不同之处在于:该涂层只包括金属锆过渡层和等化学计量比ZrN层。A ZrN coating, the difference from the scalpel coating provided in Example 1 is that the coating only includes a metal zirconium transition layer and an equistoichiometric ZrN layer.

对比例4Comparative example 4

一种ZrNx涂层,和实施例1所提供手术刀涂层的不同之处在于,该涂层只包括金属锆过渡层和等化学计量比ZrN层。A ZrNx coating, the difference from the scalpel coating provided in Example 1 is that the coating only includes a metal zirconium transition layer and an equistoichiometric ZrN layer.

性能测试Performance Testing

结合力测试:采用Anton Parr RST3大载荷划痕测试仪进行实验采用半径为200.0μm的Rockwell C型金刚石压头,载荷范围为1.0~100.0N,线性加载速率为100N/min,划痕长度为3.0mm,单个样品重复测试3次。Bonding force test: Anton Parr RST 3 large-load scratch tester was used for the experiment. A Rockwell C-type diamond indenter with a radius of 200.0 μm was used. The load range was 1.0-100.0 N, the linear loading rate was 100 N/min, and the scratch length was 3.0mm, repeat the test 3 times for a single sample.

硬度及弹性模量测试:用Anton Parr NHT2(TTX)纳米压痕仪进行测试,最大压入深度应小于10%涂层厚度,最大载荷为5.0mN,加载保持5.0s,单个样品重复测试15次。Hardness and elastic modulus test: test with Anton Parr NHT 2 (TTX) nano-indentation instrument, the maximum indentation depth should be less than 10% of the coating thickness, the maximum load is 5.0mN, the loading is maintained for 5.0s, and a single sample is repeatedly tested for 15 Second-rate.

弹性模量测试:用Anton Parr NHT2(TTX)纳米压痕仪进行测试。Elastic modulus test: Anton Parr NHT 2 (TTX) nano-indenter was used for testing.

涂层厚度测试:用SU8820型横截面扫描电子显微镜测得。Coating thickness test: Measured with a SU8820 cross-sectional scanning electron microscope.

常温平均摩擦系数测试:用Aton Paar THT-1000型测得。Normal temperature average friction coefficient test: measured by Aton Paar THT-1000.

磨损率测试:用Anton Paar THT-1000球-盘式高温摩擦磨损实验仪进行测试,温度为25℃,相对湿度55%,摩擦副选用直径为6mm Al2O3球,线速度为0.1m/s,磨痕直径为4mm,摩擦滑动距离为7.53m。用激光共聚焦显微镜获取摩痕三维形貌数据,结合Archard方程计算磨损率:Wr=V/(F*L),其中Wr为磨损率(mm3/Nm),V为磨损体积(mm3),F为垂直载荷(N),L为磨损距离;本实验载荷选用3N,距离为7.53m。Wear rate test: Anton Paar THT-1000 ball-disk high-temperature friction and wear tester is used for testing, the temperature is 25°C, the relative humidity is 55%, the friction pair is Al 2 O 3 ball with a diameter of 6mm, and the linear speed is 0.1m/ s, the wear scar diameter is 4mm, and the friction sliding distance is 7.53m. Obtain the three-dimensional shape data of the friction marks with a laser confocal microscope, and calculate the wear rate by combining the Archard equation: Wr=V/(F*L), where Wr is the wear rate (mm 3 /Nm), and V is the wear volume (mm 3 ) , F is the vertical load (N), L is the wear distance; the load in this experiment is 3N, and the distance is 7.53m.

电阻率测试:利用LSP20171型四探针仪测得。Resistivity test: Measured by LSP20171 four-probe instrument.

接触角测试:在涂层表面滴落0.02mL/滴的液滴,采用JCJTest软件测得涂层与水滴的接触角。Contact angle test: drop 0.02mL/drop on the surface of the coating, and use JCJTest software to measure the contact angle between the coating and the water drop.

抗粘附测试:用表面覆有实施例1所提供手术刀涂层的手术刀对猪小肠进行切割,进行十次,记录每次手术刀的切割时长和切割后刀头的状态。Anti-adhesion test: cut pig small intestine with a scalpel coated with the scalpel coating provided in Example 1 for ten times, and record the cutting time of each scalpel and the state of the cutting head after cutting.

测试结果如图1~7与下表1~2所示:The test results are shown in Figures 1-7 and Tables 1-2 below:

表1实施例1涂层的抗生物组织黏附测试结果The anti-biological tissue adhesion test result of the coating of table 1 embodiment 1

切割次数Cutting times 是否焦痂Whether eschar 11 no 22 no 33 no 44 no 55 no 66 no 77 no 88 no 99 no 1010 no

表2实施例与对比例性能测试结果Table 2 embodiment and comparative example performance test result

结合力/NBinding force/N 接触角/°Contact angle/° HSB色相HSB Hue 抗粘附效果Anti-adhesion effect 实施例1Example 1 31.531.5 98.698.6 31≤B≤3431≤B≤34 excellent 实施例2Example 2 30.730.7 97.897.8 31≤B≤3431≤B≤34 excellent 实施例3Example 3 33.133.1 100.3100.3 31≤B≤3431≤B≤34 excellent 实施例4Example 4 32.532.5 97.497.4 31≤B≤3431≤B≤34 excellent 实施例5Example 5 29.229.2 98.398.3 32≤B≤3532≤B≤35 excellent 实施例6Example 6 30.930.9 99.799.7 31≤B≤3431≤B≤34 good 实施例7Example 7 31.731.7 98.198.1 31≤B≤3431≤B≤34 excellent 对比例1Comparative example 1 21.421.4 9191 40≤B≤11040≤B≤110 一般generally 对比例2Comparative example 2 16.216.2 9292 32≤B≤3432≤B≤34 一般generally 对比例3Comparative example 3 32.732.7 105105 /(涂层呈金色)/ (coated in gold) excellent 对比例4Comparative example 4 15.315.3 9696 32≤B≤3332≤B≤33 一般generally

从表1的结果可以看出,本发明所提供的手术刀涂层具有优异的抗生物组织黏附功能,覆盖有本发明所提供的涂层的手术刀,在对新鲜的猪小肠切割十次后依然没有出现焦痂,说明没有出现生物组织的黏附。As can be seen from the results in Table 1, the scalpel coating provided by the present invention has excellent anti-biological tissue adhesion function, and the scalpel covered with the coating provided by the present invention, after fresh pig small intestine was cut ten times There was still no eschar, indicating that there was no adhesion of biological tissue.

从表2的数据可以看出,在本发明实施例1~7所提供的手术刀涂层中,由于涂层满足:等化学计量比ZrN层中N/Zr为0.9~1.1、过化学计量比ZrNx层中N/Zr为1.15~1.3、金属锆过渡层、等化学计量比ZrN中间层和表面过化学计量比ZrNx层厚度分别是200~230nm、620~650nm、220~250nm这三个条件,所以涂层与手术刀基体之间的结合力基本都在30N以上,不易脱落;与此同时,涂层的接触角都在97°以上,具有良好的疏水性,因此也就具有了良好的抗生物组织黏附的性能;涂层的HSB色相也纷纷达到了31以上,涂层呈深色,抗反光性能优异。As can be seen from the data in Table 2, in the scalpel coatings provided by Examples 1 to 7 of the present invention, since the coatings satisfy: N/Zr in the equistoichiometric ZrN layer is 0.9 to 1.1, the stoichiometric ratio The N/Zr in the ZrN x layer is 1.15-1.3, the thickness of the metal zirconium transition layer, the equistoichiometric ZrN intermediate layer, and the surface over-stoichiometric ZrN x layer are 200-230nm, 620-650nm, and 220-250nm, respectively. Conditions, so the bonding force between the coating and the scalpel substrate is basically above 30N, and it is not easy to fall off; at the same time, the contact angle of the coating is above 97°, which has good hydrophobicity, so it also has good The performance of anti-biological tissue adhesion; the HSB hue of the coating has also reached more than 31, the coating is dark, and the anti-reflection performance is excellent.

对比例1所提供的手术刀涂层由于表面过化学计量比ZrNx层的厚度不足,所以接触角降低,抗生物组织黏附性能下降,同时表面层的厚度下降也会相应地导致涂层结合力的下降,且HSB色相中的B值增大。HSB中的B值控制纯色中混入黑色的量,B值越大,涂层颜色中的黑色越少,明度越高,因此从表2数据可以看出对比例1所提供的手术刀涂层抗反光性能会下降。The scalpel coating provided in Comparative Example 1 is due to the insufficient thickness of the surface stoichiometric ratio ZrN x layer, so the contact angle decreases and the anti-biological tissue adhesion performance decreases. , and the B value in the HSB hue increases. The B value in HSB controls the amount of black mixed into the pure color. The larger the B value, the less black in the coating color and the higher the lightness. Therefore, it can be seen from the data in Table 2 that the scalpel coating provided by Comparative Example 1 is resistant to Reflective performance will be reduced.

对比例2所提供的手术刀涂层由于中间等化学计量比ZrN层的厚度不足,所以涂层总体与基体的结合力有所下降。In the scalpel coating provided in Comparative Example 2, due to the insufficient thickness of the ZrN layer with an intermediate equistoichiometric ratio, the bonding force between the coating and the substrate as a whole is reduced.

对比例3所提供的ZrN涂层,虽然涂层与基体的结合力、疏水性能都满足手术刀涂层的要求,但由于没有最外层的表面过化学计量比ZrNx层,所以涂层呈现金色,不具有抗反光性能。For the ZrN coating provided in Comparative Example 3, although the binding force and hydrophobicity of the coating and the substrate all meet the requirements of the scalpel coating, but because there is no surface of the outermost layer through the stoichiometric ZrN x layer, the coating presents Gold, not anti-reflective.

对比例4所提供的ZrNx涂层,虽然具有良好的疏水性和抗反光性能,但由于没有了中间等化学计量比ZrN涂层的过渡,ZrNx涂层与手术刀基体的结合力不足。Although the ZrNx coating provided in Comparative Example 4 has good hydrophobicity and anti-reflection properties, the binding force between the ZrNx coating and the scalpel substrate is insufficient due to the absence of the intermediate equistoichiometric ZrN coating transition.

图1为本发明提供的手术刀涂层的结构示意图。从图1中可以看出,本发明所提供的手术刀涂层依次包括手术刀基体、金属锆过渡层、等化学计量比ZrN层以及表面过化学计量比ZrNx层。Fig. 1 is a schematic structural view of the scalpel coating provided by the present invention. It can be seen from FIG. 1 that the scalpel coating provided by the present invention sequentially includes a scalpel substrate, a metal zirconium transition layer, an equistoichiometric ZrN layer, and a surface overstoichiometric ZrN x layer.

图2为本发明提供的手术刀涂层的制备方法路线。从图2中可以看出,本发明所提供的手术刀涂层的制备方法,主要包括如下步骤:依次在基底上沉积金属Zr过渡层、等化学计量比ZrN中间层和表面过化学计量ZrNx层。Fig. 2 is the preparation method route of scalpel coating provided by the present invention. As can be seen from Fig. 2, the preparation method of scalpel coating provided by the present invention mainly includes the steps of: depositing metal Zr transition layer, equal stoichiometric ratio ZrN intermediate layer and surface stoichiometric ZrNx layer on the substrate successively .

图3为本发明实施例1所提供手术刀涂层的接触角测试结果。从图3中可以看出,实施例1所提供涂层的接触角达到98.2°,具有良好的疏水性。Fig. 3 is the contact angle test result of the scalpel coating provided in Example 1 of the present invention. It can be seen from FIG. 3 that the contact angle of the coating provided by Example 1 reaches 98.2°, which has good hydrophobicity.

图4为本发明对比例3所提供等化学计量比ZrN涂层的接触角测试结果。从图4中可以看出,对比例3所提供涂层的接触角达到105°,也具有良好的疏水性。Fig. 4 is the test result of the contact angle of the equistoichiometric ZrN coating provided in Comparative Example 3 of the present invention. It can be seen from Fig. 4 that the contact angle of the coating provided by Comparative Example 3 reaches 105°, and also has good hydrophobicity.

图5为本发明对比例4所提供过化学计量比ZrNx涂层的接触角测试结果。从图5中可以看出,对比例4所提供过化学计量比ZrNx涂层的接触角达到96°,同样具有良好疏水性。Fig. 5 is the contact angle test result of the stoichiometric ZrN x coating provided in Comparative Example 4 of the present invention. It can be seen from FIG. 5 that the contact angle of the stoichiometric ZrNx coating provided by Comparative Example 4 reaches 96°, which also has good hydrophobicity.

图6为本发明对比例3所提供等化学计量比ZrN涂层的厚度及颜色。从图6中可以看出,对比例3所提供涂层颜色呈亮金黄色,涂层极易反光。FIG. 6 shows the thickness and color of the equistoichiometric ZrN coating provided in Comparative Example 3 of the present invention. It can be seen from FIG. 6 that the color of the coating provided by Comparative Example 3 is bright golden yellow, and the coating is very reflective.

图7为本发明对比例4所提供过化学计量比ZrNx涂层的厚度及颜色。从图7中可以看出,对比例4所提供涂层颜色呈棕灰色,HSB色相中B最大为33最小为32,皆低于40,涂层不易反光。Fig. 7 shows the thickness and color of the stoichiometric ZrN x coating provided in Comparative Example 4 of the present invention. It can be seen from Figure 7 that the color of the coating provided by Comparative Example 4 is brownish gray, and the B in the HSB hue ranges from a maximum of 33 to a minimum of 32, all of which are lower than 40, and the coating is not easy to reflect light.

显然,本发明的上述实施例仅仅是为清楚地说明本发明所作的举例,而并非是对本发明的实施方式的限定。对于所属领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明权利要求的保护范围之内。Apparently, the above-mentioned embodiments of the present invention are only examples for clearly illustrating the present invention, rather than limiting the implementation of the present invention. For those of ordinary skill in the art, other changes or changes in different forms can be made on the basis of the above description. It is not necessary and impossible to exhaustively list all the implementation manners here. All modifications, equivalent replacements and improvements made within the spirit and principles of the present invention shall be included within the protection scope of the claims of the present invention.

Claims (10)

1. A scalpel coating is characterized by sequentially comprising a metallic zirconium transition layer, a ZrN layer with equal stoichiometric ratio and a ZrN layer with surface over stoichiometric ratio x A layer;
n/zr=0.9 to 1.1 in the equal stoichiometric ZrN layer;
the superstoichiometric ratio ZrN x N/zr=1.15 to 1.3 in the layer;
the zirconium metal transition layer, the ZrN intermediate layer with equal stoichiometric ratio and the ZrN with surface over stoichiometric ratio x The layer thicknesses are 200-230 nm, 620-650 nm and 220-250 nm respectively.
2. A method for preparing the scalpel coating according to claim 1, comprising the steps of: sequentially depositing a metallic Zr transition layer, a ZrN intermediate layer with equal stoichiometric ratio and surface over-stoichiometric ZrN on a substrate x A layer.
3. The method for preparing the scalpel coating according to claim 2, wherein the deposition method is a direct current magnetron sputtering method, and specifically comprises the following steps:
introducing mixed gas of argon and nitrogen into the vacuum chamber, controlling the ratio of the nitrogen in the mixed gas and the vacuum degree in the vacuum chamber, and opening a Zr target for deposition;
the ratio of nitrogen in the mixed gas atmosphere is 12-15% when a ZrN intermediate layer with equal stoichiometric ratio is deposited;
the ratio of nitrogen in the mixed gas atmosphere is over stoichiometric ZrN on the deposition surface x 44-52% of the layer.
4. The method for preparing a scalpel coating according to claim 3, wherein the overall air pressure of the vacuum chamber in the direct current magnetron sputtering method is 0.2-0.8 Pa.
5. A method of preparing a surgical knife coating as claimed in claim 3, wherein the power of the magnetron sputtering power supply in the dc magnetron sputtering method is 3.5 to 4kW.
6. The method for preparing a coating for a surgical knife according to claim 3, wherein the bias voltage of the substrate in the direct current magnetron sputtering method is-50 to-200V.
7. A method of preparing a surgical knife coating according to claim 3, wherein the temperature of the substrate in the dc magnetron sputtering process is 300 to 350 ℃.
8. The method for preparing a scalpel coating according to claim 3, wherein the deposition time is 15-25 min when the metallic Zr transition layer is deposited in the direct current magnetron sputtering method.
9. The method for preparing a scalpel coating as claimed in claim 3, wherein in the direct current magnetron sputtering method, the deposition time is 85-95 min when the intermediate layer with equal stoichiometric ratio ZrN is deposited.
10. A scalpel, characterized in that the scalpel surface has a scalpel coating as claimed in any one of claims 1 to 9.
CN202310224194.2A 2023-03-09 2023-03-09 Scalpel coating and preparation method and application thereof Active CN116240491B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5242753A (en) * 1991-07-11 1993-09-07 Praxair S.T. Technology, Inc. Substoichiometric zirconium nitride coating
US5925043A (en) * 1997-04-30 1999-07-20 Medquest Products, Inc. Electrosurgical electrode with a conductive, non-stick coating
CN101675183A (en) * 2006-10-02 2010-03-17 普莱克斯S.T.技术有限公司 multilayer nitride-containing coatings
CN103938157A (en) * 2014-05-12 2014-07-23 重庆科技学院 ZrNbAlN superlattice coating and preparation method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5242753A (en) * 1991-07-11 1993-09-07 Praxair S.T. Technology, Inc. Substoichiometric zirconium nitride coating
US5925043A (en) * 1997-04-30 1999-07-20 Medquest Products, Inc. Electrosurgical electrode with a conductive, non-stick coating
CN101675183A (en) * 2006-10-02 2010-03-17 普莱克斯S.T.技术有限公司 multilayer nitride-containing coatings
CN103938157A (en) * 2014-05-12 2014-07-23 重庆科技学院 ZrNbAlN superlattice coating and preparation method

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