CN116222485A - A linear guide rail accuracy detection device based on planar motor - Google Patents

Abstract

The invention discloses a linear guide rail precision detection device based on a plane motor, which mainly comprises a probe, a spherical universal joint, a table frame, the plane motor and a data processing device, and can realize high-precision measurement of the straightness, the parallelism and the surface microscopic morphology of the linear guide rail. According to the invention, the plane motor is used as a driving device to drive the probe to perform two-degree-of-freedom translation and deflection in the test plane, so that the influence of vibration and friction wear on detection data is eliminated, the influence of installation errors on detection results is reduced by controlling the change of the pose of the probe, and the surface information of the guide rail is accurately acquired. And performing splicing fitting calculation on the detection data through a data processing device to finish guide rail precision measurement. The invention has the advantages of strong anti-interference capability and high supporting rigidity, and is particularly suitable for measuring scenes such as high-precision linear guide rails, ultra-long guide rails and the like.

Description

A linear guide rail accuracy detection device based on planar motor

technical field

The invention relates to the field of precision measurement of guide rails of high-precision numerical control machine tools, in particular to a linear guide rail precision detection device based on a planar motor.

Background technique

Precision CNC machine tools are widely used in precision manufacturing fields such as aviation, aerospace, and vehicle engineering, and their machining accuracy directly determines the level of the national manufacturing industry. As the key functional part of the machine tool, the linear guide rail is affected by the external load and temperature during the machining process, and will undergo slight deformation, resulting in geometric errors and reducing the accuracy of the machine tool. The error compensation method based on the geometric error is an effective means to improve the machining accuracy of the machine tool. The original geometric error of the machine tool is offset by the software, and the error correction is realized. Accurate error measurement is the premise of error compensation. At present, the method of machine tool interferometer, interferometer and plane mirror group is mostly used to measure machine tool error. By placing the mirror group on the bed and using the numerical control system to control the feed of the motion platform, the direct acquisition Guideway geometric error value. However, this method requires a variety of instruments to be used together, which increases the installation error of the equipment. At the same time, there are factors such as vibration, friction and wear in the operation of the machine tool, which reduces the accuracy of error detection.

Contents of the invention

The technical problem of the present invention is: to overcome the deficiencies of the prior art, and to propose a linear guide rail accuracy detection device based on a plane motor, which eliminates the influence of friction, wear and vibration on the detection results, and has the advantages of simple operation, strong anti-interference ability, and support rigidity. Advanced advantages, especially suitable for high-precision, large-range linear guide error measurement.

The technical solution of the present invention is: a linear guide rail accuracy detection device based on a planar motor, which is characterized in that it is mainly composed of a probe, a spherical universal joint, a table frame, a planar motor and a data processing device. As the application object of the detection device, the guide rail system mainly includes machine bed, linear guide rail and bolts. The probe is located on the upper end of the linear guide rail and connected to the ball universal joint to ensure vertical contact with the measured plane of the linear guide rail. Connected by magnetic attraction, the plane motor is located on the radial side of the machine bed and the linear guide rail, arranged in parallel, the data processing device is connected with the probe, and the data collection results are analyzed and processed.

The spherical universal joint can realize the deflection at any angle of 135° in the direction of three coordinates in space, and can complete the precision measurement of the top surface, end surface and side surface of the linear guide rail; The position information of the table frame can be obtained in real time; the data processing device uses a splicing algorithm for data processing, and can complete the precision measurement of the ultra-long linear guide rail.

The principle of the above scheme is: a linear guide rail accuracy detection device based on a planar motor proposed by the present invention can realize the measurement of the straightness error, parallelism error and surface microscopic topography of a large-scale linear guide rail. First, install the planar motor on one side of the machine bed to ensure parallel installation. The meter frame is fixed on the top of the planar motor mover by means of magnetic attraction, and the spherical universal joint is vertically clamped to the end of the beam of the meter frame, which can drive the probe to deflect at any angle within 135° in the three-coordinate direction of the probe. The table frame adopts a retractable structure with a hollow structure inside and a laser displacement sensor embedded, which can measure the position information of the column and beam of the table frame, and transmit the data to the planar motor controller. By adjusting the magnitude and direction of the winding current, the control The planar motor generates a two-degree-of-freedom deflection to realize the pose control of the probe. Through the linkage between the plane motor and the meter frame, the probe is in plane contact with the linear guide rail. The plane motor is used to drive the probe to complete the radial two-degree-of-freedom translation, and the straightness of the linear guide rail, the surface topography information and the parallelism data acquisition are realized. The data processing device analyzes and calculates the information, and completes the accuracy measurement of the linear guide rail. At the same time, the data processing device is also embedded with a data splicing algorithm, which can realize high-precision measurement of ultra-long linear guide rails.

Compared with the prior art, the present invention has the advantages that: the present invention is a linear guide rail accuracy detection device based on a plane motor. Compared with the laser interferometer measurement method, the influence of vibration and friction and wear on the measurement accuracy during the measurement process is eliminated. . The magnetic levitation technology is introduced into the field of guide rail precision measurement, and the position and posture control of the probe is realized by using the planar motor, which reduces the influence of installation errors on the measurement results and improves the measurement accuracy.

Description of drawings

Fig. 1 is a structural principle diagram of the technical solution of the present invention;

Fig. 2 is a partial sectional view of the technical solution spherical universal joint of the present invention;

Fig. 3 is a table frame component diagram of the technical solution of the present invention;

Fig. 4 is a planar motor assembly diagram of the technical solution of the present invention;

Fig. 5 is a scene diagram of the linear guide rail accuracy measurement of the technical solution of the present invention;

Detailed ways

As shown in Figure 1, it is a structural principle diagram of the technical solution of the present invention, a linear guide rail accuracy detection device based on a planar motor, which is characterized in that it mainly consists of a probe 4, a spherical universal joint 5, a table frame 6, a planar motor 7 and The data processing unit 8 is composed. As the application object of the detection device, the guide rail system mainly includes the machine bed 1, the linear guide rail 2, and the bolt 3. The probe 4 is located at the upper end of the linear guide rail 2 and is connected to the spherical universal joint 5 to ensure vertical contact with the measured plane of the linear guide rail 2. The spherical universal joint 5 is fixedly installed on the meter frame 6, which is located on the plane The axial upper end of the motor 7 is connected by magnetic attraction. The plane motor 7 is located on the radial side of the machine bed 1 and the linear guide rail 2, and is arranged in parallel. The data processing device 8 is connected to the probe 4, and the data collection results are analyzed. for analytical processing.

As shown in Figure 2, it is a partial cross-sectional view of the spherical universal joint of the technical solution of the present invention. The spherical universal joint assembly is composed of a clamping shaft 501, a spherical shell 502, and a rotating column 503; the clamping shaft 501 is vertically clamped on the watch frame On the assembly 6, there is no spatial freedom of movement, the spherical shell 502 is fixed on the clamping shaft 501, which plays a protective role, and four round holes are left along the direction of the clamping shaft 501 and the circumferential direction for installing the probe 4, rotating The column 503 is installed on the upper end of the clamping shaft 501 and inside the spherical shell, and the end is connected with the probe 4, and can rotate within 145° along the three degrees of freedom in space, and can be used for the microscopic topography, straightness error, and parallelism error of the end surface and side surface of the guide rail It can also be applied to the accuracy measurement of flat bed and inclined bed rails.

As shown in Figure 3, it is a table frame assembly diagram of the technical solution of the present invention. The table frame 6 adopts a detachable structure, mainly including a base 601, a column 602, a column sensor 603, a beam 604, and a beam sensor 605; the base 601 is located at the bottom , to play a stable and fixed role. The column 602 is installed on the axial upper end of the base 601 through threads and adopts a hollow structure. The column sensor 603 is embedded in the column 602. The beam 604 adopts a hollow structure and is vertically installed on the column 602 through threads. The beam sensor 605 is embedded in the beam 604; the column 602 and the beam 604 both adopt a splicing structure, have a telescopic function, and are suitable for different scenarios. The column sensor 603 and the beam sensor 605 respectively detect the spatial position information of the column and the beam center, and detect The received data is transmitted to the planar motor controller, and the controller outputs the corresponding current to the corresponding winding to generate accurate angle compensation.

As shown in Figure 4, the planar motor assembly diagram of the technical solution of the present invention, the planar motor assembly mainly includes: axial stator guide rail 701, axial mover 702, winding 703, protection device 704, front radial stator 705, rear radial Stator 706, radial mover 707; stator guide rail 701 is located at the axial lower end of axial mover 702, winding 703, counterweight device 704, front radial stator 705, rear radial stator 706, and radial mover 707. The mover 702 is located at the axial upper end of the stator guide rail 701, the left front winding 703A, the right front winding 703B, the right rear winding 703C, and the left rear winding 703D are fixedly connected under the axial mover 702, and there is a 0.5mm gap between the stator guide rail 701 and the stator guide rail 701. Clearance, left front guard 704A, right front guard 704B, right rear guard 704C, left rear guard 704D, located on the radially outside of left front winding 703A, right front winding 703B, right rear winding 703C, right rear winding 703D, front radial The stator 705 is fixed at the axial upper end of the axial mover 702, the rear radial stator 706 is located at the axial rear end of the front radial stator 705, and the radial mover 707 is located at the axial mover 702, the front radial stator 705 and the rear The radial stator 706 is axially above, and there is a gap of 0.5 mm between the front radial stator 705 and the rear radial stator 706 .

As shown in Figure 5, it is a scene diagram of the linear guide rail accuracy measurement of the technical solution of the present invention, which can be used for linear guide rail straightness, surface microscopic topography, and parallelism measurement. Taking the guide rail end surface accuracy detection process as an example, the probe 4 is driven by the plane motor 7 Move from a to point b along the left linear guide rail 2A to complete the measurement of straightness and surface microscopic topography; based on the straightness measurement data, control the telescopic movement of the plane motor 7 and the crossbeam of the table frame 6, and move the probe 4 from the left linear guide rail 2A Move from point a to point c on the right straightness guide rail 2B, repeat the straightness measurement action, and analyze the two sets of data to complete the parallelism measurement;

The splicing algorithm integrated in the data processing device 8 is mainly the ICP (IterativeClosestPoint) algorithm, also known as the nearest neighbor iterative algorithm, recording the position information of the previous measurement data point as M _i , and the next measurement data point as N _j , through the rotation vector R (θ ₀ , θ _x , θ _y , θ _z ) and translation vector T(q _x , q _y , q _z ) are used to describe the motion. The specific calculation steps are as follows:

First initialize the coordinates, the rotation vector and the flat vector are R(0) and T(0) respectively.

Secondly, calculate the end data M{m _i |i=1,2,L,Np} of the previous segment to obtain the shortest distance m _i (k) of the N data. If the two segments of data can correspond, use the quaternion method Solve and judge the convergence of the calculation results.

Finally, the optimal R and T are obtained, and the measurement data splicing is completed;

The contents not described in detail in the description of the present invention belong to the prior art known to those skilled in the art.

Claims (6)

1. A linear guide rail accuracy detection device based on a planar motor, the guide rail system comprises a machine bed (1), a linear guide rail (2), and a bolt (3) as the application object of the detection device; it is characterized in that the detection device consists of Probe (4), spherical universal joint (5), meter stand (6), planar motor (7) and data processing device (8); the probe (4) is located at the upper end of the linear guide (2) and connected to the spherical On the universal joint (5), it is guaranteed to maintain vertical contact with the measured plane of the linear guide rail (2); the spherical universal joint (5) is fixedly installed on the table frame (6), and the table frame (6) is located The axial upper end of (7) is connected by magnetic attraction. The plane motor (7) is located on the radial side of the machine bed (1) and the linear guide rail (2), and is arranged in parallel. The data processing device (8) and The probe (4) is connected, and the data collection result is analyzed and processed. 2. A linear guide rail accuracy detection device based on a planar motor according to claim 1, characterized in that: the spherical universal joint (5) can realize a deflection at any angle of 135° in the direction of three coordinates in space, and complete the linear guide rail Precision measurement of top, end and side surfaces. 3. A linear guide rail accuracy detection device based on a planar motor according to claim 1, characterized in that: the table frame (6) adopts a retractable hollow structure with a built-in displacement sensor to obtain the position of the table frame in real time information. 4. A linear guide rail accuracy detection device based on a planar motor according to claim 1, characterized in that: said data processing device (8) uses a splicing algorithm for data processing to complete the ultra-long linear guide rail accuracy measurement. 5. A linear guide rail accuracy detection device based on a planar motor according to claim 1, characterized in that: the splicing algorithm integrated in the data processing device is an ICP algorithm, also known as the nearest neighbor iterative algorithm, and records the position of the last measurement data point The information is denoted as M _i , the next measurement data point is denoted as N _j , and the motion is described by the rotation vector R(θ ₀ , θ _x , θ _y , θ _z ) and the translation vector T(q _x , q _y , q _z ) , the specific calculation steps are as follows: First initialize the coordinates, the rotation vector and the flat vector are R(0) and T(0); Secondly, calculate the end data M{m _i |i=1,2,L,Np} of the previous segment to obtain the shortest distance m _i (k) of the N data. If the two segments of data correspond, use the quaternion method to solve , and judge the convergence of the calculation results; Get the optimal R and T, and complete the measurement data splicing. 6. A linear guide rail accuracy detection device based on a planar motor according to claim 1, characterized in that: the table frame adopts a detachable structure, including a base, a column, a column sensor, a beam, and a beam sensor; the base is located at the bottom , to play a stable and fixed role. The column is installed on the axial upper end of the base through threads and adopts a hollow structure. The column sensor is embedded in the column. The beam adopts a hollow structure and is vertically installed on the column through threads. The beam sensor is embedded in the beam. Inside; where the column and the beam adopt a splicing structure, the column sensor and the beam sensor respectively detect the spatial position information of the column and the beam center, and transmit the detected data to the planar motor controller, and output the corresponding current to the corresponding winding through the controller to generate Angle precise compensation.

Images