CN1162222C - Fluid jet device capable of jetting liquid drops with different sizes and method thereof - Google Patents

Abstract

A fluid ejection device and method for ejecting droplets of different sizes, the fluid ejection device is in communication with a fluid reservoir. The fluid ejection device includes a substrate, an orifice layer, a first nozzle group, and a second nozzle group. The base plate includes a manifold for receiving fluid in a fluid reservoir. The jet hole layer is arranged on the top side of the substrate, and a plurality of first fluid cavities and second fluid cavities are formed between the top side of the substrate and the jet hole layer. In addition, a plurality of first and second nozzles are arranged on the nozzle layer. The invention makes the fluid jet device generate liquid drops with different sizes by changing the structural size of the fluid cavity of the fluid jet device, the distance between the adjacent heaters and the aperture of the jet hole.

Description

Fluid ejection device and method capable of ejecting liquid droplets of different sizes

technical field

The invention relates to a fluid ejection device, in particular to a fluid ejection device and method capable of ejecting droplets of different sizes.

Background technique

Today, fluid ejection devices that can eject droplets of different sizes are widely used to improve the combustion efficiency of micro-fuel engines, or to increase the printing variation of inkjet printers. For example: an inkjet printer can be used to print documents through ink droplets of different sizes, and in this way, not only can the chromaticity of the printed documents be varied, but also the speed of printing chromaticity can be accelerated.

Please refer to FIG. 1 , which is a schematic diagram of a conventional fluid ejection device 10 . The fluid ejection device 10 is disclosed by Canon in U.S. Patent No. US 4251824 "A Liquid jet recording method with variable thermal viscosity modulation" (Liquid jet recording method with variable thermal viscosity modulation), which utilizes a fluid chamber (liquid A plurality of heating elements (heatgenerating bodies) 21-25 on the axis of the chamber 12 provide energy sequentially or independently, so that the starting positions of the multiple bubbles (foams) 31-35 in the fluid chamber 12 are different and different amounts are squeezed out 40 of the droplets to print the document. However, because many heating elements 21-25 must be placed in the same fluid chamber 12 of the fluid ejection device 10, when the resolution of the document printed by the fluid ejection device 10 is to be improved, the fluid ejection device 10 must include several more fluid chambers 12 and the heating element, which would make manufacturing the fluid ejection device 10 more difficult. In addition, the fluid ejection device 10 also has the disadvantage of easily generating satellite droplets. When the fluid ejection device 10 generates satellite droplets, the satellite droplets will cause blurred documents printed by the fluid ejection device 10 . The satellite droplets produced by the fluid ejection device 10 trail behind the main droplets. When the fluid ejection device 10 and the document are in relative motion, the position of the satellite droplets hitting the document will be slightly different from that of the main droplet hitting the document. Therefore, the print quality of the fluid ejection device 10 will be affected by the satellite droplets.

Contents of the invention

The object of the present invention is to provide a fluid ejecting device capable of ejecting liquid droplets of different sizes, which can be used in the design of inkjet heads, so as to avoid the above-mentioned disadvantages of conventional inkjet heads.

The purpose of the present invention is achieved by providing a fluid ejection device that communicates with a fluid storage tank, the fluid injection device includes: a base plate that includes a manifold for receiving the fluid in the fluid storage tank fluid; an orifice layer, located on the top side of the substrate, forming a plurality of first fluid cavities and a plurality of second fluid cavities with the top side of the substrate; a first nozzle group, which includes a plurality of first nozzles , set on the orifice layer in a manner corresponding to the plurality of first fluid chambers, each first nozzle includes: a first orifice; a first air bubble generator, arranged at one of the first orifices side, used to generate a first bubble; and a second bubble generator, located on the other side of the first spray hole, used to generate a second bubble after the first bubble is generated, and the second bubble will Pushing the fluid between the first bubble and the second bubble out of the first nozzle hole to form a first droplet; and a second nozzle group, which includes a plurality of second nozzles corresponding to the plurality of The mode of a second fluid cavity is arranged on this spray hole layer, and each second nozzle includes: a second spray hole; A third bubble generator, is arranged on the side of this second spray hole, is used for generating a third bubble; and a fourth bubble generator, located on the other side of the second spray hole, used to generate a fourth bubble after the third bubble is generated, and the fourth bubble will combine the third bubble and The fluid between the fourth bubbles is pushed out of the second nozzle hole to form a second droplet; wherein the first fluid cavity and the second fluid cavity have different structural dimensions, so that the size of the first droplet is the same as that of the second fluid cavity. The second droplet is different.

The present invention also provides a fluid injection device, which communicates with a fluid storage tank, and the fluid injection device includes: a base plate, which includes a manifold, used to receive the fluid in the fluid storage tank; an orifice layer , set on the top side of the substrate, and form a plurality of first fluid chambers and a plurality of second fluid chambers with the top side of the substrate; a first nozzle group, which includes a plurality of first nozzles to correspond to the plurality of The mode of the first fluid cavity is arranged on the nozzle hole layer, and each first nozzle includes: a first nozzle hole; a first bubble generator, which is arranged on one side of the first nozzle hole, and is used to generate a first nozzle hole. an air bubble; and a second air bubble generator, located on the other side of the first spray hole, used to generate a second air bubble after the first air bubble is generated, and the second air bubble will combine the first air bubble and the first air bubble The fluid between the two bubbles is pushed out of the first nozzle hole to form a first droplet; and a second nozzle group, which includes a plurality of second nozzles in a manner corresponding to the plurality of second fluid chambers Located on the spray hole layer, each second nozzle includes: a second spray hole; a third bubble generator, located on one side of the second spray hole, for generating a third bubble; and a The fourth air bubble generator is arranged on the other side of the second spray hole, and is used to generate a fourth air bubble after the third air bubble is generated, and the fourth air bubble will transfer the air between the third air bubble and the fourth air bubble. The fluid is pushed out of the second nozzle hole to form a second droplet; wherein the distance between the first and second bubble generators of the first nozzle is greater than the distance between the third and fourth bubble generators of the second nozzle The distance between them makes the first droplet larger than the second droplet.

The present invention also provides a fluid injection device, which communicates with a fluid storage tank, and the fluid injection device includes: a base plate, which includes a manifold, used to receive the fluid in the fluid storage tank; an orifice layer , set on the top side of the substrate, and form a plurality of first fluid chambers and a plurality of second fluid chambers with the top side of the substrate; a first nozzle group, which includes a plurality of first nozzles to correspond to the plurality of The mode of the first fluid cavity is arranged on the nozzle hole layer, and each first nozzle includes: a first nozzle hole; a first bubble generator, which is arranged on one side of the first nozzle hole, and is used to generate a first nozzle hole. an air bubble; and a second air bubble generator, located on the other side of the first spray hole, used to generate a second air bubble after the first air bubble is generated, and the second air bubble will combine the first air bubble and the first air bubble The fluid between the two bubbles is pushed out of the first nozzle hole to form a first droplet; and a second nozzle group, which includes a plurality of second nozzles in a manner corresponding to the plurality of second fluid chambers Located on the spray hole layer, each second nozzle includes: a second spray hole; a third bubble generator, located on one side of the second spray hole, for generating a third bubble; and a The fourth air bubble generator is arranged on the other side of the second spray hole, and is used to generate a fourth air bubble after the third air bubble is generated, and the fourth air bubble will transfer the air between the third air bubble and the fourth air bubble. The fluid is pushed out of the second nozzle hole to form a second droplet; wherein the first nozzle hole is larger than the second nozzle hole, so that the first droplet is larger than the second droplet.

The present invention also provides a method of producing droplets of various sizes using a fluid ejection device in communication with a fluid reservoir and comprising: a base plate including a manifold for receiving the fluid reservoir The fluid in the groove; an orifice layer, which is arranged on the top side of the substrate, forms a plurality of first fluid chambers and a plurality of second fluid chambers with the top side of the substrate, and the plurality of first fluid chambers are larger than the plurality of second fluid chambers. Fluid chamber; a first nozzle group, which includes a plurality of first nozzles, which are arranged on the orifice layer in a manner corresponding to the plurality of first fluid chambers, and each first nozzle includes: a first orifice , formed on the substrate; a first bubble generator, located on one side of the first spray hole; and a second bubble generator, located on the other side of the first spray hole; and a second nozzle A group comprising a plurality of second nozzles disposed on the orifice layer in a manner corresponding to the plurality of second fluid chambers, each second nozzle comprising: a second orifice formed on the substrate ; a third bubble generator, located on one side of the second spray hole, and a fourth bubble generator, located on the other side of the second spray hole; the method includes the following steps: making the first bubble The generator generates a first bubble in the corresponding first fluid chamber; when the first bubble is generated, the second bubble generator generates a second bubble in the corresponding first fluid chamber, and the second bubble will pushing the fluid between the first bubble and the second bubble out of the first spray hole to form a first droplet; causing the third bubble generator to generate a third bubble in the corresponding second fluid chamber ; and when the third bubble is generated, make the fourth bubble generator generate a fourth bubble in the corresponding second fluid cavity, and the fourth bubble will transfer the fluid between the third bubble and the fourth bubble pushing out the second spray hole to form a second droplet smaller than the first droplet.

The present invention also provides a method of producing droplets of various sizes using a fluid ejection device in communication with a fluid reservoir and comprising: a base plate including a manifold for receiving the fluid reservoir The fluid in the groove; an orifice layer, which is arranged on the top side of the substrate, forms a plurality of first fluid chambers and a plurality of second fluid chambers with the top side of the substrate; a first nozzle group, which includes a plurality of first fluid chambers A nozzle is arranged on the orifice layer in a manner corresponding to the plurality of first fluid chambers, and each first nozzle includes: a first orifice formed on the substrate; a first air bubble generator configured to on one side of the first spray hole; and a second bubble generator located on the other side of the first spray hole; and a second nozzle group, which includes a plurality of second nozzles corresponding to the A plurality of second fluid chambers are arranged on the orifice layer, and each second nozzle includes: a second orifice formed on the substrate; a third bubble generator arranged at the second orifice One side of the first nozzle, and a fourth bubble generator, located on the other side of the second spray hole; wherein the distance between the first and second bubble generators of the first nozzle is greater than that of the third nozzle of the second nozzle and the distance between the fourth bubble generator; the method includes the following steps: making the first bubble generator generate a first bubble in the corresponding first fluid cavity; when the first bubble is generated, making the second The bubble generator generates a second bubble in the corresponding first fluid cavity, and the second bubble will push the fluid between the first bubble and the second bubble out of the first nozzle hole to form a first droplet ; make the third bubble generator generate a third bubble in the corresponding second fluid chamber; and when the third bubble is generated, make the fourth bubble generator generate a third bubble in the corresponding second fluid chamber The fourth bubble pushes the fluid between the third bubble and the fourth bubble out of the second nozzle hole to form a second droplet smaller than the first droplet.

The present invention also provides a method of producing droplets of various sizes using a fluid ejection device in communication with a fluid reservoir and comprising: a base plate including a manifold for receiving the fluid reservoir The fluid in the groove; an orifice layer, which is arranged on the top side of the substrate, forms a plurality of first fluid chambers and a plurality of second fluid chambers with the top side of the substrate; a first nozzle group, which includes a plurality of first fluid chambers A nozzle is arranged on the orifice layer in a manner corresponding to the plurality of first fluid chambers, and each first nozzle includes: a first orifice formed on the substrate; a first air bubble generator configured to on one side of the first spray hole; and a second bubble generator located on the other side of the first spray hole; and a second nozzle group, which includes a plurality of second nozzles corresponding to the A plurality of second fluid chambers are arranged on the orifice layer, and each second nozzle includes: a second orifice formed on the substrate; a third bubble generator arranged at the second orifice One side of the nozzle, and a fourth bubble generator, located on the other side of the second nozzle hole; wherein the first nozzle hole is larger than the second nozzle hole; the method includes the following steps: making the first bubble generator Generate a first bubble in the corresponding first fluid chamber; when the first bubble is generated, make the second bubble generator generate a second bubble in the corresponding first fluid chamber, and the second bubble will The fluid between a bubble and the second bubble is pushed out of the first spray hole to form a first droplet; the third bubble generator generates a third bubble in the corresponding second fluid cavity; and After the third bubble is generated, the fourth bubble generator generates a fourth bubble in the corresponding second fluid cavity, and the fourth bubble pushes the fluid between the third bubble and the fourth bubble out of the second spray hole to form a second droplet smaller than the first droplet.

The present invention also provides a fluid injection device, which communicates with a fluid storage tank, and the fluid injection device includes: a base plate, which includes a manifold, used to receive the fluid in the fluid storage tank; an orifice layer , arranged on the top side of the substrate, forming a first fluid chamber and a second fluid chamber with the top side of the substrate; a first nozzle, arranged on the orifice layer in a manner corresponding to the first fluid chamber, the The first nozzle includes a first spray hole and a first bubble generator and a second bubble generator located on both sides of the first spray hole, the first bubble generator can generate a first bubble as a first virtual Air valve (Virtual Valve) to restrict the fluid between the first bubble generator and the second bubble generator to flow to the manifold, the second bubble generator can generate a second bubble to connect the first bubble with the The fluid between the second bubbles is pushed out of the first nozzle hole to form a first droplet; and a second nozzle is arranged on the nozzle hole layer in a manner corresponding to the second fluid chamber, the first nozzle The second nozzle includes a second spray hole and a third bubble generator and a fourth bubble generator located on both sides of the second spray hole, the third bubble generator can generate a third bubble as a second virtual gas Valve (Virtual Valve) to limit the fluid between the third bubble generator and the fourth bubble generator to flow to the manifold, the fourth bubble generator can generate a fourth bubble to connect the third bubble with the The fluid between the fourth bubbles is pushed out of the second nozzle hole to form a second droplet; wherein the first droplet is larger than the second droplet.

The present invention also provides a method of producing droplets of various sizes using a fluid ejection device in communication with a fluid reservoir and comprising: a base plate including a manifold for receiving the fluid reservoir The fluid in; an orifice layer, is arranged on the top side of this substrate, forms a first fluid cavity and a second fluid cavity with the top side of this substrate, and the structure size of this first fluid cavity is the same as the structure of this second fluid cavity different sizes; a first nozzle including a first spray hole and a first bubble generator and a second bubble generator located on both sides of the first spray hole; and a second nozzle including a second spray hole and a third bubble generator and a fourth bubble generator located on both sides of the second spray hole; the method includes the following steps: the first bubble generator generates a first bubble in the corresponding first fluid chamber, The second bubble generator generates a second bubble in the corresponding first fluid cavity, the first bubble and the second bubble are close to each other, and the fluid between the first bubble and the second bubble is pushed out The first spray hole forms a first droplet; the third bubble generator generates a third bubble in the corresponding second fluid cavity, and the fourth bubble generator generates a third bubble in the corresponding second fluid cavity A fourth bubble, the third bubble and the fourth bubble are close to each other, and the fluid between the third bubble and the fourth bubble is pushed out of the second nozzle hole to form a first droplet larger than the first droplet Two droplets.

In a word, the fluid ejection device uses a bubble as a virtual air valve to increase the flow resistance between the fluid chamber and the manifold or block the fluid communication between the fluid chamber and the manifold, and then use another bubble to push Squeeze the fluid in the fluid chamber to eject the fluid from the fluid chamber. The present invention enables the fluid ejection device to produce liquid droplets of different sizes by changing the structural size of the fluid chamber or the diameter of the orifice of the fluid ejection device.

Description of drawings

Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein:

FIG. 1 is a schematic diagram of an existing fluid ejection device;

2 is a schematic diagram of a fluid ejection device according to a first embodiment of the present invention;

Figure 3 is a cross-sectional view of the fluid ejection device of Figure 2 taken along line 3-3;

4 is a schematic cross-sectional view of the fluid ejection device in FIG. 2 when bubbles are generated;

5 is a schematic cross-sectional view of the fluid ejection device in FIG. 2 when the fluid is ejected;

6 is a schematic diagram of a fluid ejection device according to a second embodiment of the present invention;

7 is a schematic cross-sectional view of a fluid injection device according to a third embodiment of the present invention;

8 is a schematic cross-sectional view of a fluid ejection device according to a fourth embodiment of the present invention;

9 is a schematic cross-sectional view of a fluid ejection device according to a fifth embodiment of the present invention;

10 and 11 are schematic diagrams of a fluid ejection device according to a sixth embodiment of the present invention;

12 and 13 are schematic views of the first and second fluid chambers of the fluid ejection device according to the seventh embodiment of the present invention.

Specific implementation content

Please refer to FIG. 2 , which is a schematic diagram of a fluid ejection device 100 according to a first embodiment of the present invention. The fluid ejection device 100 communicates with a fluid reservoir 110 . The fluid ejection device 100 includes a substrate 112 disposed on one side of the fluid reservoir 110, and an orifice layer 120 disposed on the top side of the substrate 112 to form a plurality of first fluid chambers ( Chamber) 122 and a plurality of second fluid chambers 124, and the volume of the first fluid chamber 122 is greater than the volume of the second fluid chamber 124. Base plate 112 includes a manifold 114 for delivering fluid 116 from fluid reservoir 110 to fluid ejection device 100 . A plurality of first fluid chambers 122 are formed on the first side 115 of the manifold 114 and a plurality of second fluid chambers 124 are formed on the second side 117 of the manifold 114 . The orifice layer 120 is provided with a first nozzle group 130 and a second nozzle group 140, the first nozzle group 130 includes a plurality of first nozzles 131, and the second nozzle group 140 includes a plurality of second nozzles 141, each A first nozzle 131 corresponds to a first fluid chamber 122 , and each second nozzle 141 corresponds to a second fluid chamber 124 . Wherein each first nozzle 131 includes a first nozzle hole 132, a first bubble generator 136 and a second bubble generator 138, each second nozzle 141 includes a second nozzle hole 134, a third bubble generator device 142 and a fourth bubble generator 144 . The first injection hole 132 is formed on the injection hole layer 120 and corresponds to the first fluid cavity 122 , and the second injection hole 134 is also formed on the injection hole layer 120 and corresponds to the second fluid cavity 124 . The first, second, third, and fourth bubble generators 136, 138, 142, and 144 are respectively a heater, wherein the first heater 136 and the second heater 138 are used to control the fluid in the first fluid chamber 122 respectively. 116 is heated, and the third heater 142 and the fourth heater 144 are respectively used to heat the fluid 116 in the second fluid cavity 124 . In addition, the first heater 136 and the second heater 138 are connected in series to a first common electrode (Common electrode) 172, and the third heater 142 and the fourth heater 144 are connected in series to a second common electrode. Electrode 174.

Please refer to FIGS. 3 to 5. FIG. 3 is a cross-sectional view of the fluid ejection device 100 in FIG. 2 along the tangent line 3-3. FIG. A schematic cross-sectional view of the device 100 when the fluid is ejected. As shown in the figure, each first heater 136 is arranged on a side of a corresponding first spray hole 132 closer to the manifold 114, and is used to heat the fluid 116 in the corresponding first fluid cavity 122 to generate a First air bubbles 152, each second heater 138 is arranged on a corresponding first spray hole 132 farther away from the other side of the manifold 114, used for the corresponding first fluid cavity 122 after the first air bubbles 152 are generated The fluid 116 inside is heated to generate a second bubble 154 . In addition, each third heater 142 is disposed on a side of a corresponding second spray hole 134 closer to the manifold 114, and is used to heat the fluid 116 in the corresponding second fluid chamber 124 to generate a third heater 142. Bubbles 156, and each fourth heater 144 is arranged on a corresponding second nozzle hole 134 farther away from the other side of the manifold 114, used for the corresponding second fluid chamber 124 after the third bubble 156 is generated The fluid 116 inside is heated to generate a fourth bubble 158 . Wherein, because the width of the first heater 136 is narrower than that of the second heater 138, the resistance value of the first heater 136 will be larger than the resistance value of the second heater 138, so that the first air bubble 152 will be larger than the second air bubble. 154 is generated first. Similarly, the width of the third heater 142 is also narrower than that of the fourth heater 144, so the resistance value of the third heater 142 will be larger than the resistance value of the fourth heater 144, and thus the third air bubble 156 will be larger than the resistance value of the fourth heater 144. Four bubbles 158 are generated first. When the first air bubble 152 is generated, it will start to restrict the flow of the fluid 116 in the first fluid chamber 122 to the manifold 114, thereby forming a virtual valve (Virtual valve) to isolate the first fluid chamber 122 from the manifold 114, and thereby protect the Adjacent fluid chambers are free from mutual interference (Cross talk), and when the third air bubble 156 is produced, it will also begin to restrict the flow of fluid 116 in the second fluid chamber 124 to the manifold 114, and thus form another virtual air valve to separate the first Two fluid chambers 124 are isolated from the manifold 114 . After the first air bubbles 152 are generated, the second heater 138 starts to generate the second air bubbles 154. At this time, the fluid pressure in the first fluid chamber 122 will increase with the gradual expansion of the second air bubbles 154, so that the fluid pressure in the first fluid chamber 122 The fluid 116 is ejected from the first nozzle hole 132 to form a first droplet 162 . Similarly, after the third bubble 156 is generated, the fourth heater 144 starts to generate the fourth bubble 158, at this time, the fluid pressure in the second fluid chamber 124 will increase with the gradual expansion of the fourth bubble 158, so that The fluid 116 in the second fluid chamber 124 is ejected from the second nozzle hole 134 to form a second droplet 164 . As shown in FIG. 5 , as the first bubble 152 and the second bubble 154 continue to expand, the first bubble 152 and the second bubble 154 will approach each other. When the first bubble 152 and the second bubble 154 begin to combine, the first liquid The tail 166 of the droplet 162 will be cut off abruptly, and the first droplet 162 will be ejected from the first nozzle 131 , so that no satellite droplets will be generated after the first nozzle 131 ejects the first droplet 162 . Similarly, as the third bubble 156 and the fourth bubble 158 continue to expand, the third bubble 156 and the fourth bubble 158 will also approach each other. When the third bubble 156 and the fourth bubble 158 start to combine, the second droplet 164 The tail 168 of the tail portion 168 will also be cut off suddenly, and the second liquid droplet 164 will be ejected from the second nozzle 141, so that after the second nozzle 141 ejects the second liquid droplet 164, no satellite droplet will be produced. In addition, as mentioned above, the capacity volume of the first fluid cavity 122 is greater than the capacity volume of the second fluid cavity 124, so the amount of fluid between the first and second bubbles 152, 154 will be more than that between the third and fourth bubbles 156, 158. The amount of fluid in between makes the first droplet 162 larger than the second droplet 164.

As can be seen from the above, according to the present invention, the method for ejecting the fluid 116 from a fluid ejection device 100 to form the first and second droplets 162, 164 generally includes the following steps:

(A) Make the first bubble generator 136 generate the first bubble 152 in the corresponding first fluid chamber 122;

(B) After the first bubbles 152 are generated, the second bubble generator 138 is made to generate the second bubbles 154 in the corresponding first fluid cavity 122, so that the second bubbles 154 can transfer the first bubble 152 to the second bubble 154 The fluid 116 between is pushed out of the first nozzle hole 132 to form the first droplet 162;

(C) making the third bubble generator 142 generate a third bubble 156 in the corresponding second fluid cavity 124; and

(D) After the third bubble is generated 156, make the fourth bubble generator 144 generate the fourth bubble 158 in the corresponding second fluid chamber 124, so that the fourth bubble 158 will combine the third bubble 156 and the fourth bubble 168 The intervening fluid 116 is pushed out of the second orifice 134 to form the second droplet 164 which is smaller than the first droplet.

It should be noted that among the above steps, steps (A) and (B) belong to the generation process of the first droplet 162 , while steps (C) and (D) belong to the generation process of the second droplet 164 . Step (B) must occur after step (A), and step (D) must occur after step (C). In addition, these steps can be arranged in various order according to the actual requirement of generating the liquid droplets. For example: (C), (D), (A), (B); or (A), (C), (B), (D); or (A), (C), (D), (B) and so on. Based on this spirit and its derivatives, many embodiments with different structures can be developed, which are described in detail as follows.

Please refer to FIG. 6 , which is a schematic diagram of a fluid ejection device 200 according to a second embodiment of the present invention. The fluid ejection device 200 has a similar structure to the fluid ejection device 100, and the fluid ejection device 200 is also communicated with a fluid storage tank 210, and includes a substrate 212, an orifice layer 220, a first nozzle group 230, and a second nozzle Group 240. The first nozzle group 230 includes a plurality of first nozzles 231 , and the second nozzle group 240 includes a plurality of second nozzles 241 . Wherein each first nozzle 231 includes a first nozzle hole 232, a first bubble generator 236 and a second bubble generator 238, each second nozzle 241 includes a second nozzle hole 234, a third bubble generator 242 and a fourth bubble generator 244, in this embodiment, the first, second, third and fourth bubble generators 236, 238, 242, 244 are respectively a heater. In addition, the orifice layer 220 and the top side of the substrate 212 also form a plurality of first fluid cavities 222 and a plurality of second fluid cavities 224 . Wherein, a plurality of first fluid chambers 222 and a plurality of second fluid chambers 224 are respectively formed on both sides of the manifold 214, the first nozzle holes 232 are formed on the nozzle hole layer 220 and correspond to the first fluid chambers 222, and the second nozzle holes 234 is also formed on the orifice layer 220 and corresponds to the second fluid cavity 224 . Different from the fluid ejection device 100 , the width W1 of the first fluid chamber 222 is greater than the width W2 of the second fluid chamber 224 . When the first, second, third and fourth heaters 236, 238, 242, 244 respectively heat the fluids in the first and second fluid chambers 222, 224 to generate air bubbles, the width W1 of the first fluid chamber 222 is greater than The width W2 of the second fluid chamber 224 makes the fluid pushed by the air bubbles in the first fluid chamber 222 more than the fluid pushed by the air bubbles in the second fluid chamber 224, and thus makes the first fluid ejected from the first nozzle hole 232 A droplet is larger than the second droplet ejected from the second nozzle hole 234 . And by pushing different amounts of fluid, the fluid ejection device 200 can eject liquid droplets of different sizes.

Please refer to FIG. 7 , which is a schematic cross-sectional view of a fluid ejection device 300 according to a third embodiment of the present invention. In the third embodiment, the first and second fluid chambers 322, 324 of the fluid ejection device 300 have different depths. As shown in FIG. 7 , the depth H1 of the first fluid cavity 322 is greater than the depth H2 of the second fluid cavity 324 . The first, second, third and the fourth bubbles 352, 354, 356, 358, because the depth H1 of the first fluid chamber 322 is greater than the depth H2 of the second fluid chamber 324, the first droplet 362 ejected by the first nozzle hole 332 is larger than the depth H2 of the second fluid chamber 324. The second droplet 364 ejected from the second nozzle hole 334 .

Please refer to FIG. 8 , which is a schematic cross-sectional view of a fluid ejection device 400 according to a fourth embodiment of the present invention. As shown in FIG. 8 , the distance D1 between the first and second heaters 436 and 438 on both sides of the first injection hole 432 is greater than the distance D2 between the third and fourth heaters 442 and 444 on both sides of the second injection hole 434 . The first, second, third and the fourth air bubbles 452, 454, 456, 458, the distance D1 between the first and second heaters 436, 438 on both sides of the first nozzle hole 432 is greater than that of the third and fourth heaters on both sides of the second nozzle hole 434. The distance D2 of the heaters 442, 444 makes the fluid pushed by the first and second air bubbles 452, 454 in the first fluid chamber 422 more than that pushed by the third and fourth air bubbles 456, 458 in the second fluid chamber 424 fluid, and thus make the first liquid droplet 462 ejected from the first nozzle hole 432 larger than the second liquid droplet 464 ejected from the second nozzle hole 434 .

Please refer to FIG. 9 , which is a schematic cross-sectional view of a fluid ejection device 500 according to a fifth embodiment of the present invention. As shown in FIG. 9 , the first injection hole 532 is larger than the second injection hole 534 , that is, the aperture r1 of the first injection hole 532 is larger than the aperture r2 of the second injection hole 534 . The first, second, third And when the fourth air bubbles 552, 554, 556, 558, because the first spray hole 532 is larger than the second spray hole 534, the resistance produced when the first and second air bubbles 552, 554 push the fluid is smaller than the third and second air bubbles 552, 554. The resistance generated when the fourth air bubbles 556 and 558 push the fluid makes the fluid 562 ejected from the first nozzle hole 532 larger than the fluid 564 ejected from the second nozzle hole 534 .

Please refer to FIG. 10 and FIG. 11 , which are schematic diagrams of a fluid ejection device 600 according to a sixth embodiment of the present invention. In addition to being arranged side by side, the first and second fluid chambers of the fluid ejection device in the previous embodiments may also be arranged in a staggered manner like the first and second fluid chambers of the fluid ejection device 600 . When the first and second heaters 636 and 638 of the fluid ejection device 600 heat the fluid in the first fluid chamber 622 to generate air bubbles, the fluid in the second fluid chamber 624 will not be affected by the first and second heaters 636 and 638. The generated air bubbles are pushed out of the second nozzle hole 634 by mistake. Similarly, when the third and fourth heaters 642 and 644 of the fluid ejection device 600 heat the fluid in the second fluid chamber 624 to generate air bubbles, the fluid in the first fluid chamber 622 will not be heated by the third and fourth heaters 642. , 644 produced by the impact of the bubbles. In other words, in this embodiment, there will be no mutual interference between the first and second fluid chambers 622 and 624 . Of course, the first and second fluid chambers can be arranged in other ways besides being arranged in a side-by-side manner or in a staggered manner, for example: two (or more than two) fluids with different droplet sizes can be ejected The chambers are arranged in a staggered manner (or in any specific arrangement) on the same side of the manifold; or two (or more than two) fluid chambers that can spray different droplet sizes are arranged in a staggered manner (or in any particular arrangement) on both sides of the manifold. However, the nozzles of the two nozzle groups form droplets of different sizes by successively generating two bubbles, thereby achieving the effect of avoiding mutual interference and producing satellite droplets, regardless of the arrangement of the first and second fluid chambers. Regardless of the manner, all should belong to the category covered by the present invention.

Please refer to FIG. 12 and FIG. 13 . FIG. 12 and FIG. 13 are schematic diagrams of the first and second fluid chambers 722 and 724 of the fluid ejection device according to the seventh embodiment of the present invention. 12 is used to illustrate the first fluid chamber 722 and the first and second heaters 736 and 738 , and FIG. 13 is used to illustrate the second fluid chamber 724 and the third and fourth heaters 742 and 744 . When the first and second heaters 736 and 738 heat the fluid to generate air bubbles, the first nozzle hole 732 will eject liquid droplets with a diameter of 45 microns; when the third and fourth heaters 742 and 744 heat the fluid to generate air bubbles , the second orifice 734 will eject liquid droplets with a diameter of 35 microns. It should be noted that these data are only for ease of illustration. When implementing the present invention, it should still be noted that the droplet size ejected by the first spray hole 732 and the second spray hole 734 is also related to many variables, for example: the composition of the fluid , ambient temperature, etc. In this embodiment, not only the widths of the first and second fluid chambers 722, 724 are different, but also the distance between the first and second heaters 736, 738 is greater than the distance between the third and fourth heaters 742, 744. In the configuration, the first fluid chamber 722 and the second fluid chamber 724 can generate droplets of different sizes. That is to say, manufacturers can also combine different size changes in the first fluid chamber 722 and the second fluid chamber 724 to generate droplets of different sizes.

Compared with the existing fluid ejection device, the fluid ejection device of the present invention makes the fluid ejection device produce different sizes by changing the structure of the fluid cavity of the fluid ejection device, the distance between adjacent heaters and the aperture of the spray hole. droplet. The fluid injection device of the present invention can be used on the inkjet printing device to achieve the purpose of increasing the change of chromaticity and speeding up the printing speed of chromaticity, and it can also be used to improve the combustion efficiency of the micro-fuel engine. Or applied to the field of biochemical technology. In addition to the variations of the above-mentioned embodiments, as long as the concept of the present invention is used to change the structure of the fluid chambers on both sides of the manifold so that the fluid ejection device produces liquid droplets of different sizes, it falls within the scope of the present invention.

The above descriptions are only preferred embodiments of the present invention, and all equivalent changes and modifications made according to the claims of the present invention shall fall within the scope of the patent of the present invention.

Claims (54)

1. fluid ejection apparatus, it is connected with a fluid storage tank, and this fluid ejection apparatus includes:

One substrate, it includes a manifold, is used for receiving the fluid in this fluid reservoir;

One ejection layer is located at the top side of this substrate, forms a plurality of first-class body cavitys and a plurality of second fluid cavity with the top side of this substrate;

One first nozzle group, it includes a plurality of first nozzles, and to be located on this ejection layer corresponding to the mode of these a plurality of first-class body cavitys, each first nozzle includes:

One first spray orifice;

One first bubble generator is located at a side of this first spray orifice, is used for producing one first bubble; And

One second bubble generator is located at the opposite side of this first spray orifice, is used for producing the back at this first bubble and produces one second bubble, and this second bubble can be pushed out the fluid between first bubble and this second bubble this first spray orifice and form one first drop; And

One second nozzle group, it includes a plurality of second nozzles, and to be located on this ejection layer corresponding to the mode of these a plurality of second fluid cavitys, each second nozzle includes:

One second spray orifice;

One the 3rd bubble generator is located at a side of this second spray orifice, is used for producing one the 3rd bubble; And

One the 4th bubble generator is located at the opposite side of this second spray orifice, is used for producing the back in the 3rd bubble and produces one the 4th bubble, and the 4th bubble can be pushed out the fluid between the 3rd bubble and the 4th bubble this second spray orifice and form one second drop;

It is characterized in that this first-class body cavity (122) is different with the physical dimension of this second fluid cavity (124), and makes the size of this first drop (162) different with this second drop (164).

2. fluid ejection apparatus as claimed in claim 1, wherein this first, second, third and the 4th bubble generator (136,138,142,144) is respectively a heater, this first and second heater is used for to the heating of the fluid in the corresponding first-class body cavity (122) producing this first and second bubble (152,154), and the 3rd and the 4th heater is used for to the heating of the fluid in corresponding second fluid cavity (124) to produce the 3rd and the 4th bubble (156,158).

3. fluid ejection apparatus as claimed in claim 2, wherein this first and second heater is connected in the mode of series connection, and the 3rd and the 4th heater also is connected in the mode of series connection.

4. fluid ejection apparatus as claimed in claim 1, wherein the width of this first-class body cavity (122) is different with the width of this second fluid cavity (124), and makes the size of this first drop (162) different with this second drop (164).

5. fluid ejection apparatus as claimed in claim 1, wherein the degree of depth of this first-class body cavity (122) is different with the degree of depth of this second fluid cavity (124), and makes the size of this first drop (162) and varying in size of these second drop (164).

6. fluid ejection apparatus as claimed in claim 1, wherein this first bubble generator (136) is located at this first spray orifice (132) than the side near this manifold (114), this second bubble generator (138) is located at this first spray orifice (132) than the opposite side away from this manifold (114), the 3rd bubble generator (142) is located at this second spray orifice (134) near a side of this manifold (114), and the 4th bubble generator (144) is located at this second spray orifice (134) than the opposite side away from this manifold (114).

7. fluid ejection apparatus as claimed in claim 1, wherein this first bubble (152) is used as one first virtual air valve in this first-class body cavity (122), be used for after this second bubble (154) produces, limit past this manifold flow of fluid between this first bubble (152) and this second bubble (154), and the 3rd bubble (156) is used as one second virtual air valve in this second fluid cavity (124), be used for after the 4th bubble (158) produces, the fluid that limits between the 3rd bubble (156) and the 4th bubble (158) flows toward this manifold (114).

8. fluid ejection apparatus as claimed in claim 1, wherein this substrate (112) is located at a side of this fluid reservoir (110).

9. fluid ejection apparatus, it is connected with a fluid storage tank, and this fluid ejection apparatus includes:

One substrate, it includes a manifold, is used for receiving the fluid in this fluid reservoir;

One ejection layer is located at the top side of this substrate, forms a plurality of first-class body cavitys and a plurality of second fluid cavity with the top side of this substrate;

One first nozzle group, it includes a plurality of first nozzles, and to be located on this ejection layer corresponding to the mode of these a plurality of first-class body cavitys, each first nozzle includes:

One first spray orifice;

One first bubble generator is located at a side of this first spray orifice, is used for producing one first bubble; And

One second bubble generator is located at the opposite side of this first spray orifice, is used for producing the back in this first bubble and produces one second bubble, and this second bubble can be pushed out the fluid between first bubble and this second bubble this first spray orifice and form one first drop; And

One second nozzle group, it includes a plurality of second nozzles, and to be located on this ejection layer corresponding to the mode of these a plurality of second fluid cavitys, each second nozzle includes:

One second spray orifice;

One the 3rd bubble generator is located at a side of this second spray orifice, is used for producing one the 3rd bubble; And

One the 4th bubble generator is located at the opposite side of this second spray orifice, is used for producing the back in the 3rd bubble and produces one the 4th bubble, and the 4th bubble can be pushed out the fluid between the 3rd bubble and the 4th bubble this second spray orifice and form one second drop;

It is characterized in that, distance between its first and second bubble generator (436,438) of this first nozzle is greater than the distance between its 3rd and the 4th bubble generator (442,444) of this second nozzle, and makes this first drop (462) greater than this second drop (464).

10. fluid ejection apparatus as claimed in claim 9, wherein this first, second, third and the 4th bubble generator (436,438,442,444) is respectively a heater, this first and second heater is used for the fluid in the corresponding first-class body cavity (422) is heated to produce this first and second bubble (436,438), and the 3rd and the 4th heater is used for to the heating of the fluid in corresponding second fluid cavity (424) to produce the 3rd and the 4th bubble (142,144).

11. fluid ejection apparatus as claimed in claim 10, wherein this first and second heater is connected in the mode of series connection, and the 3rd and the 4th heater also is connected in the mode of series connection.

12. fluid ejection apparatus as claimed in claim 9, wherein this first bubble generator (436) is located at this first spray orifice (432) than the side near this manifold, this second bubble generator (438) is located at this first spray orifice (432) than the opposite side away from this manifold, the 3rd bubble generator (442) is located at this second spray orifice (434) near a side of this manifold, and the 4th bubble generator (444) is located at this second spray orifice (434) than the opposite side away from this manifold.

13. fluid ejection apparatus as claimed in claim 9, wherein this first bubble (452) is used as one first virtual air valve in this first-class body cavity (422), be used for after this second bubble (454) produces, limit past this manifold flow of fluid between this first bubble (452) and this second bubble (454), the 3rd bubble (456) is used as one second virtual air valve in this second fluid cavity (424), be used for after the 4th bubble (458) produces, limit past this manifold flow of fluid between the 3rd bubble (456) and the 4th bubble (458).

14. fluid ejection apparatus as claimed in claim 9, wherein this substrate is located at a side of this fluid reservoir.

15. a fluid ejection apparatus, it is connected with a fluid storage tank, and this fluid ejection apparatus includes:

One substrate, it includes a manifold, is used for receiving the fluid in this fluid reservoir;

One ejection layer is located at the top side of this substrate, forms a plurality of first-class body cavitys and a plurality of second fluid cavity with the top side of this substrate;

One first nozzle group, it includes a plurality of first nozzles, and to be located on this ejection layer corresponding to the mode of these a plurality of first-class body cavitys, each first nozzle includes:

One first spray orifice;

One first bubble generator is located at a side of this first spray orifice, is used for producing one first bubble; And

One second bubble generator is located at the opposite side of this first spray orifice, is used for producing the back in this first bubble and produces one second bubble, and this second bubble can be pushed out the fluid between first bubble and this second bubble this first spray orifice and form one first drop; And

One second nozzle group, it includes a plurality of second nozzles, and to be located on this ejection layer corresponding to the mode of these a plurality of second fluid cavitys, each second nozzle includes:

One second spray orifice;

One the 3rd bubble generator is located at a side of this second spray orifice, is used for producing one the 3rd bubble; And

One the 4th bubble generator is located at the opposite side of this second spray orifice, is used for producing the back in the 3rd bubble and produces one the 4th bubble, and the 4th bubble can be pushed out the fluid between the 3rd bubble and the 4th bubble this second spray orifice and form one second drop;

It is characterized in that this first spray orifice (532) is greater than this second spray orifice (534), and make this first drop (562) greater than this second drop (564).

16. fluid ejection apparatus as claimed in claim 15, wherein this first, second, third and the 4th bubble generator (552,554,556,558) is respectively a heater, this first and second heater is used for the fluid in the corresponding first-class body cavity is heated to produce this first and second bubble (552,554), and the 3rd and the 4th heater is used for to the heating of the fluid in corresponding second fluid cavity to produce the 3rd and the 4th bubble (556,558).

17. fluid ejection apparatus as claimed in claim 16, wherein this first and second heater is connected in the mode of series connection, and the 3rd and the 4th heater also is connected in the mode of series connection.

18. fluid ejection apparatus as claimed in claim 15, wherein this first bubble generator (536) is located at this first spray orifice (532) than the side near this manifold, this second bubble generator (538) is located at this first spray orifice (532) than the opposite side away from this manifold, the 3rd bubble generator (542) is located at this second spray orifice (534) near a side of this manifold, and the 4th bubble generator (544) is located at this second spray orifice (534) than the opposite side away from this manifold.

19. fluid ejection apparatus as claimed in claim 15, wherein this first bubble (552) is used as one first virtual air valve in this first-class body cavity, be used for after this second bubble (554) produces, limit past this manifold flow of fluid between this first bubble (552) and this second bubble (554), the 3rd bubble (556) is used as one second virtual air valve in this second fluid cavity, be used for after the 4th bubble (558) produces, limit past this manifold flow of fluid between the 3rd bubble (556) and the 4th bubble (558).

20. fluid ejection apparatus as claimed in claim 15, wherein this substrate is located at a side of this fluid reservoir.

21. a method of utilizing a fluid injection apparatus to produce liquid drops in different size, this fluid ejection apparatus is connected with a fluid storage tank and includes:

One substrate, it includes a manifold, is used for receiving the fluid in this fluid reservoir;

One ejection layer is located at the top side of this substrate, forms a plurality of first-class body cavitys and a plurality of second fluid cavity with the top side of this substrate, and these a plurality of first-class body cavitys are greater than these a plurality of second fluid cavitys;

One first nozzle group, it includes a plurality of first nozzles, and to be located on this ejection layer corresponding to the mode of these a plurality of first-class body cavitys, each first nozzle includes:

One first spray orifice is formed on this substrate;

One first bubble generator is located at a side of this first spray orifice; And

One second bubble generator is located at the opposite side of this first spray orifice; And

One second nozzle group, it includes a plurality of second nozzles, and to be located on this ejection layer corresponding to the mode of these a plurality of second fluid cavitys, each second nozzle includes:

One second spray orifice is formed on this substrate;

One the 3rd bubble generator is located at a side of this second spray orifice, and

One the 4th bubble generator is located at the opposite side of this second spray orifice;

It is characterized in that this method comprises following step:

Make this first bubble generator (236) in corresponding first-class body cavity (222), produce one first bubble;

After this first bubble produces, make this second bubble generator (238) produce one second bubble in corresponding first-class body cavity (222), this second bubble can be pushed out the fluid between first bubble and this second bubble this first spray orifice (232) and form one first drop;

Make the 3rd bubble generator (242) in corresponding second fluid cavity (224), produce one the 3rd bubble; And

After the 3rd bubble produces, make the 4th bubble generator (244) produce one the 4th bubble in corresponding second fluid cavity, the 4th bubble can be pushed out this second spray orifice (234) with the fluid between the 3rd bubble and the 4th bubble and form second drop less than this first drop.

22. method as claimed in claim 21, wherein this first, second, third and the 4th bubble generator is respectively a heater, this first and second heater is used for the fluid in the corresponding first-class body cavity is heated to produce this first and second bubble, and the 3rd and the 4th heater is used for to the heating of the fluid in corresponding second fluid cavity to produce the 3rd and the 4th bubble.

23. method as claimed in claim 22, wherein this first and second heater is connected in the mode of series connection, and the 3rd and the 4th heater also is connected in the mode of series connection.

24. method as claimed in claim 21, wherein the width of this first-class body cavity (222) makes this first drop greater than this second drop greater than the width of this second fluid cavity (224).

25. method as claimed in claim 21, wherein the degree of depth of this first-class body cavity (222) makes this first drop greater than this second drop greater than the degree of depth of this second fluid cavity (224).

26. method as claimed in claim 21, wherein this first bubble generator is located at this first spray orifice than the side near this manifold, this second bubble generator is located at this first spray orifice than the opposite side away from this manifold, the 3rd bubble generator is located at this second spray orifice near a side of this manifold, and the 4th bubble generator is located at this second spray orifice than the opposite side away from this manifold.

27. method as claimed in claim 21, wherein this first bubble is used as one first virtual air valve in this first-class body cavity, be used for after this second bubble produces, limit past this manifold flow of fluid between this first bubble and this second bubble, the 3rd bubble is used as one second virtual air valve in this second fluid cavity, be used for after the 4th bubble produces, limit past this manifold flow of fluid between the 3rd bubble and the 4th bubble.

28. method as claimed in claim 21, wherein this substrate is located at a side of this fluid reservoir.

29. a method of utilizing a fluid injection apparatus to produce liquid drops in different size, this fluid ejection apparatus is connected with a fluid storage tank and includes:

One substrate, it includes a manifold, is used for receiving the fluid in this fluid reservoir;

One ejection layer is located at the top side of this substrate, forms a plurality of first-class body cavitys and a plurality of second fluid cavity with the top side of this substrate;

One first nozzle group, it includes a plurality of first nozzles, and to be located on this ejection layer corresponding to the mode of these a plurality of first-class body cavitys, each first nozzle includes:

One first spray orifice is formed on this substrate;

One first bubble generator is located at a side of this first spray orifice; And

One second bubble generator is located at the opposite side of this first spray orifice; And

One second nozzle group, it includes a plurality of second nozzles, and to be located on this ejection layer corresponding to the mode of these a plurality of second fluid cavitys, each second nozzle includes:

One second spray orifice is formed on this substrate;

One the 3rd bubble generator is located at a side of this second spray orifice, and

One the 4th bubble generator is located at the opposite side of this second spray orifice;

It is characterized in that the distance between its first and second bubble generator (436,438) of this first nozzle is greater than the distance between its 3rd and the 4th bubble generator (442,444) of this second nozzle;

This method comprises following step:

Make this first bubble generator (436) in corresponding first-class body cavity (422), produce one first bubble;

After this first bubble (452) produces, make this second bubble generator (438) produce one second bubble (454) in corresponding first-class body cavity (422), this second bubble (454) can be pushed out the fluid between first bubble (452) and this second bubble (454) this first spray orifice (432) and form one first drop (462);

Make the 3rd bubble generator (442) in corresponding second fluid cavity (424), produce one the 3rd bubble (456); And

After the 3rd bubble (456) produces, make the 4th bubble generator (444) produce one the 4th bubble (458) in corresponding second fluid cavity (424), the 4th bubble (458) can be pushed out the fluid between the 3rd bubble (456) and the 4th bubble (458) this second spray orifice (434) and form second drop (464) less than this first drop (462).

30. method as claimed in claim 29, wherein this first, second, third and the 4th bubble generator (436,438,442,444) is respectively a heater, this first and second heater is used for the fluid in the corresponding first-class body cavity is heated to produce this first and second bubble (452,454), and the 3rd and the 4th heater is used for to the heating of the fluid in corresponding second fluid cavity to produce the 3rd and the 4th bubble (456,458).

31. method as claimed in claim 30, wherein this first and second heater is connected in the mode of series connection, and the 3rd and the 4th heater also is connected in the mode of series connection.

32. method as claimed in claim 29, wherein this first bubble generator (436) is located at this first spray orifice (432) than the side near this manifold, this second bubble generator (438) is located at this first spray orifice (432) than the opposite side away from this manifold, the 3rd bubble generator (442) is located at this second spray orifice (434) near a side of this manifold, and the 4th bubble generator (444) is located at this second spray orifice (434) than the opposite side away from this manifold.

33. method as claimed in claim 29, wherein this first bubble is used as one first virtual air valve in this first-class body cavity, be used for after this second bubble produces, limit past this manifold flow of fluid between this first bubble and this second bubble, the 3rd bubble is used as one second virtual air valve in this second fluid cavity, be used for after the 4th bubble produces, limit past this manifold flow of fluid between the 3rd bubble and the 4th bubble.

34. method as claimed in claim 29, wherein this substrate is located at a side of this fluid reservoir.

35. a method of utilizing a fluid injection apparatus to produce liquid drops in different size, this fluid ejection apparatus is connected with a fluid storage tank and includes:

One substrate, it includes a manifold, is used for receiving the fluid in this fluid reservoir;

One ejection layer is located at the top side of this substrate, forms a plurality of first-class body cavitys and a plurality of second fluid cavity with the top side of this substrate;

One first nozzle group, it includes a plurality of first nozzles, and to be located on this ejection layer corresponding to the mode of these a plurality of first-class body cavitys, each first nozzle includes:

One first spray orifice is formed on this substrate;

One first bubble generator is located at a side of this first spray orifice; And

One second bubble generator is located at the opposite side of this first spray orifice; And

One second nozzle group, it includes a plurality of second nozzles, and to be located on this ejection layer corresponding to the mode of these a plurality of second fluid cavitys, each second nozzle includes:

One second spray orifice is formed on this substrate;

One the 3rd bubble generator is located at a side of this second spray orifice, and

One the 4th bubble generator is located at the opposite side of this second spray orifice;

It is characterized in that this first spray orifice (532) is greater than this second spray orifice (534);

This method comprises following step:

Make this first bubble generator (536) in corresponding first-class body cavity (522), produce one first bubble (552);

After this first bubble (552) produces, make this second bubble generator (538) produce one second bubble (554) in corresponding first-class body cavity (522), this second bubble (554) can be pushed out the fluid between first bubble (552) and this second bubble (554) this first spray orifice (532) and form one first drop;

Make the 3rd bubble generator (542) in corresponding second fluid cavity (522), produce one the 3rd bubble (556); And

After the 3rd bubble (556) produces, make the 4th bubble generator (544) produce one the 4th bubble (558) in corresponding second fluid cavity (522), the 4th bubble (558) can be pushed out the fluid between the 3rd bubble (556) and the 4th bubble (558) this second spray orifice (534) and form second drop less than this first drop.

36. method as claimed in claim 35, wherein this first, second, third and the 4th bubble generator is respectively a heater, this first and second heater is used for the fluid in the corresponding first-class body cavity is heated to produce this first and second bubble, and the 3rd and the 4th heater is used for to the heating of the fluid in corresponding second fluid cavity to produce the 3rd and the 4th bubble.

37. method as claimed in claim 36, wherein this first and second heater is connected in the mode of series connection, and the 3rd and the 4th heater also is connected in the mode of series connection.

38. method as claimed in claim 35, wherein this first bubble generator is located at this first spray orifice than the side near this manifold, this second bubble generator is located at this first spray orifice than the opposite side away from this manifold, the 3rd bubble generator is located at this second spray orifice near a side of this manifold, and the 4th bubble generator is located at this second spray orifice than the opposite side away from this manifold.

39. method as claimed in claim 35, wherein this first bubble is used as one first virtual air valve in this first-class body cavity, be used for after this second bubble produces, limit past this manifold flow of fluid between this first bubble and this second bubble, the 3rd bubble is used as one second virtual air valve in this second fluid cavity, be used for after the 4th bubble produces, limit past this manifold flow of fluid between the 3rd bubble and the 4th bubble.

40. method as claimed in claim 35, wherein this substrate is located at a side of this fluid reservoir.

41. a fluid ejection apparatus, it is connected with a fluid storage tank, and this fluid ejection apparatus includes:

One substrate, it includes a manifold, is used for receiving the fluid in this fluid reservoir;

One ejection layer is located at the top side of this substrate, forms a first-class body cavity and one second fluid cavity with the top side of this substrate;

One first nozzle, to be located on this ejection layer corresponding to the mode of this first-class body cavity, one first bubble generator and one second bubble generator that this first nozzle includes one first spray orifice and is positioned at these first spray orifice both sides, this first bubble generator can produce one first bubble as one first virtual air valve to limit fluid between this first bubble generator and this second bubble generator toward this manifold flow, this second bubble generator can produce one second bubble so that the fluid between this first bubble and this second bubble is pushed out this first spray orifice and formed one first drop; And

One second nozzle, to be located on this ejection layer corresponding to the mode of this second fluid cavity, one the 3rd bubble generator and one the 4th bubble generator that this second nozzle includes one second spray orifice and is positioned at these second spray orifice both sides, the 3rd bubble generator can produce one the 3rd bubble as one second virtual air valve to limit fluid between the 3rd bubble generator and the 4th bubble generator toward this manifold flow, the 4th bubble generator can produce one the 4th bubble so that the fluid between the 3rd bubble and the 4th bubble is pushed out this second spray orifice and formed one second drop;

It is characterized in that this first drop (162) is greater than this second drop (164).

42. fluid ejection apparatus as claimed in claim 41, wherein this first, second, third and the 4th bubble generator (136,138,142,144) is respectively a heater, this first and second heater is used for the fluid in the corresponding first-class body cavity (122) is heated to produce this first and second bubble (152,154), and the 3rd and the 4th heater is used for to the heating of the fluid in corresponding second fluid cavity (124) to produce the 3rd and the 4th bubble (156,158).

43. fluid ejection apparatus as claimed in claim 42, wherein this first and second heater is connected in the mode of series connection, and the 3rd and the 4th heater also is connected in the mode of series connection.

44. fluid ejection apparatus as claimed in claim 41, wherein the physical dimension of this first-class body cavity (122) is different with the physical dimension of this second fluid cavity (124), and makes this first drop (162) greater than this second drop (164).

45. fluid ejection apparatus as claimed in claim 41, wherein the degree of depth of this first-class body cavity (122) is greater than the degree of depth of this second fluid cavity (124), and this first liquid (162) is dripped greater than this second drop (164).

46. fluid ejection apparatus as claimed in claim 41, wherein this first bubble generator (136) is located at this first spray orifice (132) than the side near this manifold (114), this second bubble generator (138) is located at this first spray orifice than the opposite side away from this manifold, the 3rd bubble generator (142) is located at this second spray orifice (134) near a side of this manifold (114), and the 4th bubble generator (144) is located at this second spray orifice (134) than the opposite side away from this manifold (114).

47. fluid ejection apparatus as claimed in claim 41, wherein this first spray orifice (132) makes this first drop (162) greater than this second drop (164) greater than this second spray orifice (134).

48. a method of utilizing a fluid injection apparatus to produce liquid drops in different size, this fluid ejection apparatus is connected with a fluid storage tank and includes:

One substrate, it includes a manifold, is used for receiving the fluid in this fluid reservoir;

One ejection layer is located at the top side of this substrate, forms a first-class body cavity and one second fluid cavity with the top side of this substrate, and the physical dimension of this first-class body cavity is different with the physical dimension of this second fluid cavity;

One first nozzle, the one first bubble generator and the one second bubble generator that comprise one first spray orifice and be positioned at these first spray orifice both sides; And

One second nozzle, one the 3rd bubble generator and one the 4th bubble generator that comprise one second spray orifice and be positioned at these second spray orifice both sides;

It is characterized in that this method comprises following step:

This first bubble generator (136) produces one first bubble (152) in corresponding first-class body cavity (122), this second bubble generator (138) produces one second bubble (152) in corresponding first-class body cavity (122), this first bubble (152) and this second bubble (154) is closer to each other, and the fluid between this first bubble (152) and this second bubble (154) is pushed out this first spray orifice (132) and formed one first drop (162);

The 3rd bubble generator (142) produces one the 3rd bubble (156) in corresponding second fluid cavity (124), the 4th bubble generator (144) produces one the 4th bubble (158) in corresponding second fluid cavity (124), the 3rd bubble and the 4th bubble (152,154) are closer to each other and the fluid between the 3rd bubble and the 4th bubble (156,158) pushed out this second spray orifice (134) and form second drop (164) greater than this first drop (162).

49. method as claimed in claim 48, wherein this first, second, third and the 4th bubble generator (136,138,142,144) is respectively a heater, this first and second heater is used for the fluid in the corresponding first-class body cavity (122) is heated to produce this first and second bubble (152,154), and the 3rd and the 4th heater is used for to the heating of the fluid in corresponding second fluid cavity (124) to produce the 3rd and the 4th bubble (156,158).

50. method as claimed in claim 49, wherein this first and second heater is connected in the mode of series connection, and the 3rd and the 4th heater also is connected in the mode of series connection.

51. method as claimed in claim 48, wherein the width of this first-class body cavity (122) is greater than the width of this second fluid cavity (124), and makes this first drop (162) greater than this second drop (164).

52. method as claimed in claim 48, wherein the degree of depth of this first-class body cavity (122) is greater than the degree of depth of this second fluid cavity (124), and makes this first drop (162) greater than this second drop (164).

53. method as claimed in claim 48, wherein this first bubble generator (136) is located at this first spray orifice (132) than the side near this manifold (114), this second bubble generator (138) is located at this first spray orifice (132) than the opposite side away from this manifold (114), the 3rd bubble generator (142) is located at this second spray orifice (134) near a side of this manifold (114), and the 4th bubble generator (144) is located at this second spray orifice (134) than the opposite side away from this manifold (114).

54. method as claimed in claim 48, wherein this first bubble (152) is used as one first virtual air valve in this first-class body cavity, be used for after this second bubble produces, the fluid that limits between this first bubble (152) and this second bubble (154) flows toward this manifold (114), and the 3rd bubble (156) is used as one second virtual air valve in this second fluid cavity (124), be used for after the 4th bubble (154) produces, the fluid that limits between the 3rd bubble (156) and the 4th bubble (158) flows toward this manifold (114).

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