CN116214679A

CN116214679A - Cold isostatic pressing mould

Info

Publication number: CN116214679A
Application number: CN202310006709.1A
Authority: CN
Inventors: 高日旭; 李帅; 刘文杰; 余芳; 李明鸿; 李叶
Original assignee: Vital Thin Film Materials Guangdong Co Ltd
Current assignee: Vital Thin Film Materials Guangdong Co Ltd
Priority date: 2023-01-04
Filing date: 2023-01-04
Publication date: 2023-06-06

Abstract

The invention relates to the technical field of target forming, in particular to a cold isostatic pressing die. Including forming unit, mould cap and mould axle, forming unit has seted up the trompil and has open-ended accommodation chamber, and the trompil is closed relatively with accommodation chamber and is set up, and the upper and lower both ends of mould axle are spacing in accommodation chamber through the die cushion respectively, and mould axle, die cushion and forming unit enclose into the mould chamber, and the sealed opening of mould cap, and can dismantle with forming unit and be connected. The beneficial effects are that: the upper end and the lower end of the die shaft are respectively limited in the accommodating cavity through die pads, so that the gesture of the die shaft in the accommodating cavity can be stabilized, and the eccentricity of a target blank after being formed is avoided; the forming unit is provided with an opening which is sealed and arranged opposite to the accommodating cavity, so that hydraulic oil can enter smoothly, the stress uniformity of raw materials in the cold isostatic pressing process can be improved, the density distribution of the target material after the cold isostatic pressing process is uniform, and the shrinkage uniformity in all directions in sintering is facilitated.

Description

Cold isostatic pressing mould

Technical Field

The invention relates to the technical field of target forming, in particular to a cold isostatic pressing die.

Background

ITO (indium tin oxide) goes through a series of steps from powder material to finished sputterable material. One of the factors that determines the sintering density of a target is the density of the green body target after forming. The existing forming mode is mainly cold isostatic pressing, so that the components of the target blank after forming are uniform and compact, and high requirements on a forming die are required.

The ITO powder is subjected to cold isostatic pressing process and is subjected to omnibearing pressure of more than 200 MPa. There is a cold isostatic pressing mould of an ITO rotary target with publication number of CN114523551A, wherein the upper end and the lower end of the cold isostatic pressing mould are made of rigid materials, the side edges of the cold isostatic pressing mould are made of elastic sleeve bodies, and when the cold isostatic pressing process is carried out (Cold Isostatic Pressing, cold isostatic pressing process), the joint of the sleeve bodies and the rigid materials is easy to bear uneven force, so that the density distribution of the target is uneven, and the density of the sintered target is affected.

Disclosure of Invention

The invention aims to solve the technical problems that: the existing mould has the problem of uneven stress during cold isostatic pressing process treatment.

In order to solve the technical problems, the invention provides a cold isostatic pressing die which comprises a forming unit, a die cap and a die shaft, wherein the forming unit is provided with an opening and a containing cavity with an opening, the opening and the containing cavity are relatively closed, the upper end and the lower end of the die shaft are respectively limited in the containing cavity through die pads, the die shaft, the die pads and the forming unit enclose a die cavity, and the die cap seals the opening and is detachably connected with the forming unit.

In the technical scheme, the die comprises a die sleeve and an outer die frame, wherein the die sleeve is provided with the accommodating cavity, the outer die frame is sleeved on the outer side wall of the accommodating cavity, and the outer die frame is provided with the opening.

In the above technical scheme, the mould cover includes the cover body and turn-ups, the cover body has been seted up hold the chamber, the turn-ups is located open-ended outside, the turn-ups with the cover body encloses into the installation cavity, the tip of external mold frame stretches into the installation cavity.

In the technical scheme, the edge of the die cap is provided with the mounting part which extends downwards, and the mounting part is connected with the flanging through the hose clamp.

In the technical scheme, handles are arranged on two opposite sides of the outer die frame.

In the above technical scheme, the opening comprises a first opening and a second opening, the first opening is formed in the side wall of the outer mold frame, and the second opening is formed in the bottom wall of the outer mold frame.

In the above technical scheme, the upper end of the die shaft is provided with the upper die pad, the upper die pad is provided with the first inclined plane, the lower end of the die shaft is provided with the lower die pad, the lower die pad is provided with the second inclined plane, and the first inclined plane and the second inclined plane are oppositely arranged along the axial direction of the die shaft.

In the above technical solution, the first inclined plane extends upward from inside to outside, and the second inclined plane extends downward from inside to outside.

In the technical scheme, the cross section area of the die shaft is gradually reduced from top to bottom.

In the technical scheme, the outer surface of the die shaft is provided with an anodic oxidation layer.

Compared with the prior art, the cold isostatic pressing die provided by the embodiment of the invention has the beneficial effects that: the accommodating cavity can be used for accommodating the die shaft, so that the die cavity surrounded by the die shaft, the die pad and the forming unit can be used for accommodating raw materials, and the raw materials are pressed into target blanks by the cold isostatic pressing process; the upper end and the lower end of the die shaft are respectively limited in the accommodating cavity through die pads, so that the gesture of the die shaft in the accommodating cavity can be stabilized, and the eccentricity of a target blank after being formed is prevented; the forming unit is provided with an opening which is sealed and arranged opposite to the accommodating cavity, so that hydraulic oil can enter smoothly, the stress uniformity of raw materials in the cold isostatic pressing process can be improved, the density distribution of the target material after the cold isostatic pressing process is uniform, and the shrinkage uniformity in all directions in sintering is facilitated.

Drawings

FIG. 1 is a schematic cross-sectional view of a cold isostatic pressing die according to an embodiment of the invention;

FIG. 2 is a schematic cross-sectional view of an outer mold frame of an embodiment of the present invention;

FIG. 3 is a schematic top view of an outer mold frame of an embodiment of the present invention;

FIG. 4 is a schematic cross-sectional view of a mold sleeve according to an embodiment of the present invention;

100, a mold cavity; 1. a molding unit; 101. a first opening; 102. a second opening; 11. a die sleeve; 111. a sleeve body; 112. flanging; 12. an outer mold frame; 121. a handle; 2. a mold cap; 21. a mounting part; 3. a mold shaft; 31. an upper die pad; 32. and (5) a lower die pad.

Detailed Description

The following describes in further detail the embodiments of the present invention with reference to the drawings and examples. The following examples are illustrative of the invention and are not intended to limit the scope of the invention.

In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "inner", "outer", etc. in the present invention are based on the orientation or positional relationship shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

In the description of the present invention, it should be understood that the terms "connected," "fixed," and the like are used in the present invention in a broad sense, and for example, may be fixedly connected, detachably connected, or integrated; the mechanical connection can be realized, and the welding connection can be realized; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

As shown in fig. 1, 2 and 3, a cold isostatic pressing die according to a preferred embodiment of the present invention includes a forming unit 1, a die cap 2 and a die shaft 3, where the forming unit 1 is provided with an opening and a receiving cavity having an opening, the opening and the receiving cavity are relatively closed, the upper and lower ends of the die shaft 3 are respectively limited in the receiving cavity by a die pad, the die shaft 3, the die pad and the forming unit 1 enclose a die cavity 100, and the die cap 2 seals the opening and is detachably connected with the forming unit 1.

It will be appreciated that the holding cavity may house the die shaft 3, so that the die cavity 100 defined by the die shaft 3, the die pad and the forming unit 1 may be filled with raw materials, which is advantageous for the present invention to press the raw materials into target blanks by the cold isostatic pressing process; the upper end and the lower end of the die shaft 3 are respectively limited in the accommodating cavity through die pads, so that the gesture of the die shaft 3 in the accommodating cavity can be stabilized, and the eccentricity of a target blank after being formed is avoided; the forming unit 1 is provided with an opening which is sealed and arranged opposite to the accommodating cavity, so that hydraulic oil can enter smoothly, the stress uniformity of raw materials in the cold isostatic pressing process can be improved, the density distribution of target materials after the cold isostatic pressing process treatment is uniform, and the shrinkage uniformity in all directions in sintering is facilitated.

As shown in fig. 1, 2 and 4, the mold comprises a mold sleeve 11 and an outer mold frame 12, wherein the mold sleeve 11 is provided with a containing cavity, the outer mold frame 12 is sleeved on the outer side wall of the containing cavity, and the outer mold frame 12 is provided with an opening.

It will be appreciated that the die sleeve 11 may cooperate with the die shaft 3 and die pad to form the die cavity 100 to complete the cold isostatic pressing of the target blank. The outer die frame 12 is provided with holes, so that hydraulic oil can smoothly enter, the stress uniformity of raw materials in the cold isostatic pressing process can be improved, the density distribution of the target material after the cold isostatic pressing process is uniform, and the shrinkage uniformity in all directions in sintering is facilitated.

Preferably, the outer mold frame 12 is integrally welded.

As shown in fig. 1 and 4, further, the mold sleeve 11 includes a sleeve body 111 and a flange 112, the sleeve body 111 is provided with a receiving cavity, the flange 112 is provided at the outside of the opening, the flange 112 and the sleeve body 111 enclose a mounting cavity, and the end of the outer mold frame 12 extends into the mounting cavity.

It can be appreciated that the flange 112 and the sleeve body 111 form a mounting cavity, so that the outer die frame 12 can be in interference fit with the mounting cavity, and further the overall structural strength of the die sleeve 11 is improved, so that the raw materials can form a target blank through a cold isostatic pressing process.

In one embodiment, as shown in fig. 1, the edge of the mold cap 2 is provided with a mounting portion 21 extending downward, and the mounting portion 21 is connected to the flange 112 by a throat hoop.

In the above embodiment, the mounting portion 21 provided at the edge of the mold cap 2 provides a position for connection between the mold cap 2 and the flange 112, so that the sealing effect of the mold cap 2 to the opening can be improved by connecting the flange 112 and the mold cap 2.

As shown in fig. 1 and 4, further, handles 121 are provided on opposite sides of the outer mold frame 12. After the cold isostatic pressing process of the raw materials in the mold cavity 100, the handle 121 provides an impetus for the worker to complete the demolding of the target blank.

As shown in fig. 2 and 3, further, the openings include a first opening 101 and a second opening 102, the first opening 101 being provided in a side wall of the outer mold frame 12, and the second opening 102 being provided in a bottom wall of the outer mold frame 12.

It can be understood that the arrangement can increase the stress uniformity of the powder after the cold isostatic pressing process, so that the density distribution of the target after the cold isostatic pressing process is uniform, and the target is uniformly contracted in all directions during sintering.

Preferably, the first openings 101 are positioned at 10% -80% of the total length of the outer die frame 12, the number of the first openings 101 is 4-6 rows and 5-7 columns, the aperture size is 4-9 mm, and the chamfer angle is 0.3-1 mm;

preferably, the second open hole 102 is 50-70 mm away from the center of the bottom, 7-9 holes are provided, the aperture is 4-9 mm, and the chamfer angle is 0.3-1 mm;

further, as shown in fig. 1, the upper end of the mold shaft 3 is provided with an upper die pad 31, the upper die pad 31 has a first inclined surface, the lower end of the mold shaft 3 is provided with a lower die pad 32, the lower die pad 32 has a second inclined surface, and the first inclined surface and the second inclined surface are oppositely arranged along the axial direction of the mold shaft 3.

It can be understood that the first inclined plane and the second inclined plane are oppositely arranged along the axial direction of the die shaft 3, so that the phenomenon that the upper end face and the lower end face of the target material are deformed and inclined after being treated by the cold isostatic pressing process can be effectively relieved.

Preferably, the range of the inclination angle of the first inclined plane and the range of the inclination angle of the second inclined plane are both 0-30 degrees.

In one embodiment, as shown in fig. 1, the first inclined surface extends upward from the inside to the outside, and the second inclined surface extends downward from the inside to the outside.

Further, the cross-sectional area of the die shaft 3 gradually decreases from top to bottom.

It will be appreciated that the cross-sectional area of the die shaft 3 gradually decreases from top to bottom, so that the inner diameters of the upper and lower ends of the target material formed by sintering are similar, and the occurrence of a flare is reduced. The arrangement can reduce grinding cutting allowance and increase the yield of target finished products.

Preferably, the outer surface of the mould shaft 3 is provided with an anodic oxide layer.

The working process of the invention is as follows: placing the die sleeve 11 into the outer die frame 12, and placing the lower die pad 32 into the die sleeve 11; the die shaft 3 is put into the die sleeve 11 and matched with the lower die pad 32; before filling powder, a rod-shaped tool is used for applying force around the lower die pad 32 to enable the lower die pad 32 to be flat, a limiting funnel is embedded above the die shaft 3 and the die sleeve 11, the inner diameter of the funnel is matched with the die shaft 3, the outer diameter of the funnel is matched with the die sleeve 11, and the die shaft 3 and the die pad are ensured not to be eccentric when powder is fed; filling powder into the cavity of the mould, wherein in the process of filling the powder, vibration equipment can be used for further improving the density of the powder in the cavity; placing the upper die pad 31 into the die sleeve 11, sleeving the die cap 2 into the top of the die sleeve 11, and lightly extruding the top of the die cap 2 to discharge air in the die cap; locking the two hoops outside the die cap 2; and (5) feeding the assembled die into cold isostatic pressing equipment for cold isostatic pressing.

In summary, the embodiment of the invention provides a cold isostatic pressing die, wherein a die shaft 3 can be placed in a containing cavity of the cold isostatic pressing die, so that a die cavity 100 enclosed by the die shaft 3, a die pad and a forming unit 1 can be filled with raw materials, and the cold isostatic pressing die is beneficial to pressing the raw materials into target blanks through a cold isostatic pressing process; the upper end and the lower end of the die shaft 3 are respectively limited in the accommodating cavity through die pads, so that the gesture of the die shaft 3 in the accommodating cavity can be stabilized, and the eccentricity of a target blank after being formed is avoided; the forming unit 1 is provided with an opening which is sealed and arranged opposite to the accommodating cavity, so that hydraulic oil can enter smoothly, the stress uniformity of raw materials in the cold isostatic pressing process can be improved, the density distribution of target materials after the cold isostatic pressing process treatment is uniform, and the shrinkage uniformity in all directions in sintering is facilitated.

The foregoing is merely a preferred embodiment of the present invention, and it should be noted that modifications and substitutions can be made by those skilled in the art without departing from the technical principles of the present invention, and these modifications and substitutions should also be considered as being within the scope of the present invention.

Claims

1. The utility model provides a cold isostatic pressing mould, its characterized in that, includes forming unit, mould cap and mould axle, forming unit has seted up the trompil and has open-ended accommodation chamber, the trompil with accommodation chamber seals relatively and sets up, the upper and lower both ends of mould axle are located respectively through the die cushion hold the chamber, the mould axle the die cushion with forming unit encloses into the mould chamber, the mould cap seals the opening, and with forming unit can dismantle and be connected.

2. The cold isostatic pressing die as claimed in claim 1, comprising a die sleeve and an outer die frame, wherein the die sleeve is provided with the accommodating cavity, the outer die frame is sleeved on the outer side wall of the accommodating cavity, and the outer die frame is provided with the opening.

3. The cold isostatic pressing die as claimed in claim 2, wherein the die sleeve comprises a sleeve body and a flange, the sleeve body is provided with the accommodating cavity, the flange is arranged on the outer side of the opening, the flange and the sleeve body enclose a mounting cavity, and the end part of the outer die frame extends into the mounting cavity.

4. The cold isostatic pressing die as claimed in claim 3, wherein the edge of the die cap is provided with a mounting portion extending downward, and the mounting portion is connected with the flange through a throat hoop.

5. The cold isostatic press die as claimed in claim 2, wherein handles are provided on opposite sides of the outer mould frame.

6. The cold isostatic press die as claimed in claim 2, wherein the openings comprise a first opening and a second opening, the first opening being provided in a side wall of the outer mould frame and the second opening being provided in a bottom wall of the outer mould frame.

7. The cold isostatic press die as claimed in claim 1, wherein an upper die pad is provided at an upper end of the die shaft, the upper die pad has a first inclined surface, a lower die pad is provided at a lower end of the die shaft, the lower die pad has a second inclined surface, and the first inclined surface and the second inclined surface are disposed opposite to each other in an axial direction of the die shaft.

8. The cold isostatic pressing die as claimed in claim 7, wherein the first inclined surface is provided extending obliquely upward from inside to outside and the second inclined surface is provided extending obliquely downward from inside to outside.

9. The cold isostatic press die as claimed in claim 1, wherein the cross-sectional area of the die shaft decreases gradually from top to bottom.

10. The cold isostatic mould as claimed in any one of claims 1-9, wherein the outer surface of the mould shaft is provided with an anodic oxide layer.