CN116196910A - Device for Enhancing Adsorption Rate of Large Volume Getters by Dielectric Barrier Discharge Plasma - Google Patents

Abstract

The invention relates to a device for enhancing the adsorption rate of a large-volume getter by dielectric barrier discharge plasma, including a vacuum chamber, a heating rod, a getter container, a metal electrode dielectric plate, a diffuser, an air supply system, and an air pressure collection system , vacuum system and discharge system, wherein the front end of the vacuum chamber is connected to the diffuser, the diffuser is connected to the gas supply system, and the rear end of the vacuum chamber is respectively connected to the vacuum system and the air pressure collection system through pipelines. The aerosol container and the metal electrode dielectric plate are alternately arranged in the vacuum chamber, and the getter container is provided with a heating rod and a getter material, and the lower end of the metal electrode dielectric plate is arranged outside the vacuum chamber. connected to the discharge system. The invention guarantees the encapsulation reaction of the large-volume getter, and at the same time, the gas-absorption rate of the getter in the whole device can be accelerated through the heating coupling energy of the heating rod and the active species generated in the plasma.

Description

Device for Enhancing Adsorption Rate of Large Volume Getters by Dielectric Barrier Discharge Plasma

technical field

The invention relates to the application fields of heat, electromagnetism and materials, in particular to a device for enhancing the adsorption rate of large-volume getters by dielectric barrier discharge plasma.

Background technique

At present, industrial applications and basic scientific research in many fields need to be carried out in a vacuum environment, including coating, heat treatment, micro-electromechanical systems, surface science, atomic physics, nanotechnology and semiconductor industry. For vacuum technology, the internal vacuum environment and vacuum degree directly affect the working range and efficiency, especially after entering the 21st century, with the continuous improvement of various application indicators and the deepening of basic discipline research, its operation and research All environments require different degrees of high vacuum or even ultra-high vacuum to maintain, which also puts forward higher requirements and challenges for the process of vacuum packaging process and the means of obtaining the subsequent vacuum environment. Therefore, in addition to the conventional means of obtaining vacuum, such as mechanical pumps, molecular pumps, cryopumps, etc., vacuum adsorption technology based on getter materials has gradually attracted attention and played a more important role.

Non-evaporable getter (Non-Evaporable Getter, NEG) has been used in scientific research and industrial production of electric vacuum devices, ultra-high vacuum acquisition, atomic energy industry, etc. because of its low equilibrium pressure, large suction capacity and high suction rate. got applied. Generally speaking, at present, this type of getter material needs to be heat-treated when it is working, and then the getter can have the getter function, and this process is called the activation process of the getter. The traditional process of activating the getter is generally heated by a heating wire or a heating rod, and the getter is activated at a high temperature and begins to absorb gas.

However, although NEG has unique advantages in the application of high vacuum and ultra-high vacuum devices and has been widely used, with the acceleration of industrialization in the new century in my country, the limitations of this type of suction method are gradually reflected: ①Industrialization Devices are no longer limited to small vacuum devices (such as chemical laser adsorption systems), which often need to be scaled up. For large devices to obtain high vacuum, it is still necessary to use getters for adsorption on the basis of conventional acquisition methods. In this case, it is often necessary to increase the amount of getter, that is, a large volume of getter may be required to achieve the high vacuum effect of a large device. How to ensure the encapsulation and air absorption of the large-volume getter is a technical problem. ② The getter is selective in the adsorption of some gases, and the getter rate will be greatly affected depending on the type of gas. For some gases that are difficult to absorb, such as nitrogen, a high temperature of several hundred degrees Celsius is often required to activate the getter to inhale, and the inhalation rate after activation is very slow. How to effectively increase the adsorption rate of quantitative getters for difficult-to-adsorb gases is very important.

The existence of the above problems will limit the comprehensive application function of the getter. It is very important to design a device that is suitable for the current application of large-volume getters and improves the adsorption rate of the getter to the difficult-to-adsorb gas.

Contents of the invention

The purpose of the present invention is to provide a device for enhancing the adsorption rate of large-volume getters by dielectric barrier discharge plasma, which ensures the encapsulation reaction of large-volume getters, and at the same time couples the energy through the heating of the heating rod and the active species generated in the plasma. The getter rate can be accelerated throughout the device.

The purpose of the present invention is achieved through the following technical solutions:

A device for enhancing the adsorption rate of a large-volume getter by dielectric barrier discharge plasma, including a vacuum chamber, a heating rod, a getter container, a metal electrode dielectric plate, a diffuser, a gas supply system, an air pressure collection system, and a vacuum pump System and discharge system, wherein the front end of the vacuum chamber is connected to the diffuser, the diffuser is connected to the gas supply system, the rear end of the vacuum chamber is respectively connected to the vacuum pumping system and the air pressure collection system through pipelines, and the getter container and the metal electrode dielectric plate are interlaced in the vacuum chamber, and the getter container is provided with a heating rod and a getter material, and the lower end of the metal electrode dielectric plate is connected with the discharge system arranged outside the vacuum chamber connected.

The front end of the vacuum chamber is provided with a front flange which is in sealing connection with the rear end of the diffuser. connected to the vacuum system, the other rear flange is connected to the air pressure collection system through the second pipeline, a cover plate is provided on the upper side of the vacuum chamber, and the cover plate is sealed and connected to the upper end of the vacuum chamber, and the heating rod wears After passing through the cover plate, insert it into the corresponding getter container.

The upper end of the getter container is integrally connected with the cover plate, the lower end of the getter container is threadedly connected with a cover, and the wall surface of the getter container has holes.

The getter container is a hollow cylindrical structure with holes on the wall.

The discharge system includes a high-voltage AC power supply and a vacuum electrode flange, wherein a cavity flange is provided on the lower side of the vacuum chamber, and the vacuum electrode flanges are respectively sealed and connected to the corresponding cavity flanges, and the metal electrode medium The lower end of the plate is connected to the corresponding vacuum electrode flange after passing through the corresponding cavity flange, and the vacuum electrode flange is connected to the high-voltage AC power supply through wires.

A getter container is provided between any adjacent two metal electrode dielectric plates, and one of the metal electrode dielectric plates is connected to the high-voltage output terminal A of the high-voltage AC power supply among the two adjacent metal electrode dielectric plates , the other metal electrode dielectric plate is connected to the low-voltage output terminal B of the high-voltage AC power supply, and the low-voltage output terminal B of the high-voltage AC power supply is connected to the ground wire at the same time.

The diffuser is a hollow metal cylinder with one end thick and the other end thin, and the thick end of the diffuser is connected to the vacuum chamber, and the thin end of the diffuser is connected to the gas supply through the gas pipeline. system connection.

The gas supply system includes a gas supply source and a mass flow meter connected in series in sequence.

The vacuum pumping system includes a vacuum pump, and a valve is arranged on the pipeline between the vacuum pump and the vacuum chamber.

The air pressure acquisition system includes a vacuum gauge, a vacuum gauge display, a digital information acquisition card and a computer connected in series in sequence.

Advantage of the present invention and positive effect are:

1. The vacuum chamber structure of the present invention can ensure large-volume getter packaging, and the present invention uses a heating rod to heat and activate the getter material in the getter container, and uses any two adjacent metal electrode dielectric plates The plasma generated between them reacts with the getter in the corresponding getter container in the middle, which can accelerate the getter rate of the getter in the whole device.

2. The gas supply system of the present invention can monitor the gas intake parameters in real time, and the air pressure acquisition system can monitor the air pressure in the vacuum chamber in real time, so that real-time adjustments can be made to ensure that the reaction environment meets the requirements.

Description of drawings

Fig. 1 is a structural schematic diagram of the present invention.

Among them, 1 is the vacuum chamber, 2 is the cover plate, 3 is the seal, 4 is the connecting flange, 5 is the bolt, 6 is the sealing flange, 7 is the heating rod, 8 is the straight ferrule joint, 9 is the front method Lan, 10 is a diffuser, 11 is a gas pipeline, 12 is a mass flow meter, 13 is a gas supply source, 14 is a rear flange, 15 is a valve, 16 is a vacuum pump, 17 is a vacuum gauge, and 18 is a vacuum gauge Display, 19 is a digital information acquisition card, 20 is a computer, 21 is a getter container, 22 is a cover, 23 is a high-voltage AC power supply, 24 is a metal electrode dielectric plate, 25 is a wire, 26 is a vacuum electrode flange, 27 is the ground wire, and 28 is the cavity flange.

Detailed ways

The present invention will be described in further detail below in conjunction with the accompanying drawings.

As shown in Figure 1, the present invention includes a vacuum chamber 1, a heating rod 7, a getter container 21, a metal electrode dielectric plate 24, a diffuser 10, an air supply system, an air pressure collection system, a vacuum system and a discharge system, Wherein the front end of the vacuum chamber 1 is connected to the diffuser 10, the diffuser 10 is connected to the gas supply system through the gas pipeline 11, and the rear end of the vacuum chamber 1 is respectively connected to the vacuum pumping system and the air pressure collection system through pipelines, The getter container 21 and the metal electrode dielectric plate 24 are alternately arranged in the vacuum chamber 1, and the getter container 21 is provided with a heating rod 7 and a getter material, and the lower end of the metal electrode dielectric plate 24 is It is connected with the discharge system arranged outside the vacuum chamber 1 .

As shown in Figure 1, the front end of the vacuum chamber 1 is provided with a front flange 9, and the front flange 9 is connected to the flange at the rear end of the diffuser 10 through bolts 5, and the front flange 9 is connected to the rear end of the diffuser 10. A sealing member 3 is provided between the flanges at the rear end of the diffuser 10 to ensure sealing. Two rear flanges 14 are provided at the rear end of the vacuum chamber 1, and one of the rear flanges 14 is connected to the vacuum through the first pipeline. System connection, the other rear flange 14 is connected to the air pressure collection system through the second pipeline, the upper side of the vacuum chamber 1 is provided with a cover plate 2, and the cover plate 2 is connected to the vacuum chamber 1 through bolts 5 The connecting flange 4 on the outer side of the upper end is fixedly connected, and a seal 3 is also provided between the cover plate 2 and the connecting flange 4, and the heating rod 7 is inserted into the corresponding getter container after passing through the cover plate 2 In 21, in this embodiment, the heating rod 7 is an electric heating rod, the upper end of which is connected to an electric wire, and the upper side of the cover plate 2 is provided with a sealing flange 6, and the heating rod 7 passes through the corresponding sealing The flange 6 is inserted into the vacuum chamber 1 after being sealed by a welded straight-through ferrule joint 8. The sealing flange 6 fixes the heating rod 7 while also ensuring the connection between the heating rod 7 and the cover plate 2. seal.

As shown in Figure 1, the getter container 21 is a hollow cylindrical structure with holes on the wall, and the lower end of the getter container 21 is threadedly connected with a cover 22, and the getter container 22 can be opened to realize Addition and replacement of materials, in this embodiment, the hollow cylinder and the cover plate 2 are welded together, and the centerline of the hollow cylinder corresponds to the centerline of the sealing flange 6 on the upper side of the cover 2 overlap, so that when the cover plate 2 is buckled on the vacuum cavity 1, all the getter containers 21 can be integrated into it, which is convenient for installation. The heating rod 7 is arranged in the corresponding getter container 21 for heating and absorbing The aerosol material is activated.

As shown in Figure 1, the discharge system includes a high-voltage AC power supply 23 and a vacuum electrode flange 26, wherein a cavity flange 28 is provided on the lower side of the vacuum chamber 1, and the vacuum electrode flange 26 is connected to the corresponding cavity respectively. The body flange 28 is sealed and connected, and insulating pads and other components can be arranged between the vacuum electrode flange 23 and the cavity flange 28 to prevent leakage. The lower end of the metal electrode dielectric plate 24 passes through the corresponding cavity flange 28 and connects with The corresponding vacuum electrode flanges 26 are connected, and the vacuum electrode flanges 26 are connected to the high-voltage AC power supply 23 through wires 25 . The lower end of the metal electrode dielectric plate 24 is inserted into the corresponding cavity flange 28 for fixing.

As shown in Figure 1, a getter container 21 is provided between any adjacent two metal electrode dielectric plates 24, and in any adjacent two metal electrode dielectric plates 24, one of the metal electrode dielectric plates 24 is connected to the The high-voltage output terminal A of the high-voltage AC power supply 23 is connected, and the other metal electrode dielectric plate 24 is connected with the low-voltage output terminal B of the high-voltage AC power supply 23, and the low-voltage output terminal B of the high-voltage AC power supply 23 is simultaneously connected with The ground wire 27 is connected. In this embodiment, the high-voltage AC power supply 23 is an intermediate frequency AC power supply or a radio frequency power supply, and the output power is 10-1000 watts. The distance between two adjacent metal electrode dielectric plates 24 and the getter container 21 in the middle is the same, and the adjacent two metal electrode dielectric plates 24 have the same potential difference, so that the distance between the adjacent two metal electrode dielectric plates 24 can be Plasma is generated and reacts with the getter. In this embodiment, the metal electrode dielectric plate 24 may be an insulating plate coated with a metal film, or an insulating plate glued with a metal material.

As shown in Figure 1, the diffuser 10 is a hollow metal cylinder with one end thick and the other end thin, and the thick end of the diffuser 10 is connected with the vacuum chamber 1, the diffuser 10 The thin end is connected to the gas supply system through the gas pipeline 11.

As shown in Figure 1, in this embodiment, the gas supply system includes a gas supply source 13 and a mass flow meter 12 connected in series in sequence, and the mass flow meter 12 detects the input gas flow rate in real time to facilitate system control, which is the basic Known technology in the field.

As shown in Figure 1, in the present embodiment, the vacuum pumping system includes a vacuum pump 16, and a valve 15 is arranged on the pipeline between the vacuum pump 16 and the vacuum chamber 1, and the vacuum pumping system can make a vacuum The interior of chamber 1 reaches a subatmospheric vacuum level.

As shown in Figure 1, in the present embodiment, the air pressure acquisition system includes a vacuum gauge 17, a vacuum gauge display 18, a digital information acquisition card 19 and a computer 20 connected in series in sequence, and the vacuum gauge 17 detects the air pressure in the vacuum chamber 1 in real time The value is transmitted to the vacuum gauge display 18 for display and reading. The vacuum gauge display 18 is connected to the computer 20 via the digital information acquisition card 19, and the corresponding software on the computer 20 can directly collect the air pressure change curve. The vacuum gauge 17, the vacuum gauge display 18, the digital information acquisition card 19 and the computer 20 are all technologies known in the art.

In this embodiment, the sealing member 3 can use oxygen-free copper sealing rings, graphite sealing rings, O-rings and other components, and the oxygen-free copper and graphite are high temperature resistant materials, which can meet the requirements of use.

In this embodiment, each flange can be made of metal materials such as stainless steel, aluminum, iron, copper and alloys.

In this embodiment, the heating rod 7 is an electric heating rod or an electric heating tube, which can be made of an electric heating alloy such as Fe-Cr-Al or Ni-Cr.

Working principle of the present invention is:

When the present invention works, the gas in the vacuum chamber 1 is first extracted through the vacuum system to obtain a lower air pressure environment when the getter works, and then the working air pressure and gas pressure can be properly adjusted within a certain range through the air supply system and the diffuser 10. Type and flow rate, when the heating rod 7 starts to heat the getter material in the getter container 12 to activate the getter, the high-voltage AC power supply 23 in the discharge system energizes the metal electrode dielectric plate 24, and any two adjacent metal electrodes Plasma is generated between the dielectric plates 24 and reacts with the getter in the corresponding getter container 12 in the middle. The present invention couples energy through the heating of the heating rod 7 and at the same time accelerates the gettering rate of the getter in the whole device through the active species generated in the plasma.

Claims (10)

1. A device for enhancing the adsorption rate of a large-volume getter by dielectric barrier discharge plasma, which is characterized in that: including vacuum chamber (1), heating rod (7), getter container (21), metal electrode medium board (24), diffuser (10), air feed system, atmospheric pressure acquisition system, evacuation system and discharge system, wherein vacuum chamber (1) front end is connected with diffuser (10), diffuser (10) are connected with air feed system, and vacuum chamber (1) rear end is connected with evacuation system and atmospheric pressure acquisition system through the pipeline respectively, and getter container (21) and metal electrode medium board (24) are crisscross to be located in vacuum chamber (1), just be equipped with heating rod (7) and getter material in getter container (21), metal electrode medium board (24) lower extreme links to each other with the discharge system who locates the vacuum chamber (1) outside.

2. The apparatus for increasing the adsorption rate of a bulk getter by a dielectric barrier discharge plasma according to claim 1, wherein: the vacuum chamber (1) front end be equipped with front flange (9) with diffuser (10) rear end sealing connection, vacuum chamber (1) rear end is equipped with two back flanges (14), and one of them back flange (14) are connected with the evacuation system through first pipeline, and another back flange (14) are connected with the atmospheric pressure acquisition system through the second pipeline, vacuum chamber (1) upside is equipped with apron (2), just apron (2) and vacuum chamber (1) upper end sealing connection, heating rod (7) pass behind apron (2) insert in corresponding getter container (21).

3. The apparatus for increasing the adsorption rate of a bulk getter by a dielectric barrier discharge plasma according to claim 2, wherein: the upper end of the getter container (21) is integrally and fixedly connected with the cover plate (2), the lower end of the getter container (21) is in threaded connection with a sealing cover (22), and the wall surface of the getter container (21) is provided with holes.

4. A device for enhancing the adsorption rate of a bulk getter by a dielectric barrier discharge plasma according to claim 3, wherein: the getter container (21) is of a hollow cylinder structure with holes on the wall surface.

5. The apparatus for increasing the adsorption rate of a bulk getter by a dielectric barrier discharge plasma according to claim 1, wherein: the discharging system comprises a high-voltage alternating current power supply (23) and a vacuum electrode flange (26), wherein a cavity flange (28) is arranged on the lower side of the vacuum chamber (1), the vacuum electrode flange (26) is respectively and hermetically connected with the corresponding cavity flange (28), the lower end of the metal electrode dielectric plate (24) penetrates through the corresponding cavity flange (28) and then is connected with the corresponding vacuum electrode flange (26), and the vacuum electrode flange (26) is connected with the high-voltage alternating current power supply (23) through a wire (25).

6. The apparatus for increasing the adsorption rate of a bulk getter by a dielectric barrier discharge plasma according to claim 5, wherein: a getter container (21) is arranged between any two adjacent metal electrode dielectric plates (24), one metal electrode dielectric plate (24) is connected with a high-voltage output terminal A of the high-voltage alternating-current power supply (23), the other metal electrode dielectric plate (24) is connected with a low-voltage output terminal B of the high-voltage alternating-current power supply (23), and the low-voltage output terminal B of the high-voltage alternating-current power supply (23) is connected with a ground wire (27) at the same time.

7. The apparatus for increasing the adsorption rate of a bulk getter by a dielectric barrier discharge plasma according to claim 1, wherein: the diffuser (10) is a hollow metal cylinder with one thick end and the other thin end, the thick end of the diffuser (10) is connected with the vacuum chamber (1), and the thin end of the diffuser (10) is connected with the gas supply system through a gas pipeline (11).

8. The apparatus for increasing the adsorption rate of a bulk getter by a dielectric barrier discharge plasma according to claim 1, wherein: the air supply system comprises an air supply source (13) and a mass flowmeter (12) which are sequentially connected in series.

9. The apparatus for increasing the adsorption rate of a bulk getter by a dielectric barrier discharge plasma according to claim 1, wherein: the vacuumizing system comprises a vacuum pump (16), and a valve (15) is arranged on a pipeline between the vacuum pump (16) and the vacuum chamber (1).

10. The apparatus for increasing the adsorption rate of a bulk getter by a dielectric barrier discharge plasma according to claim 1, wherein: the air pressure acquisition system comprises a vacuum gauge (17), a vacuum gauge display (18), a digital information acquisition card (19) and a computer (20) which are sequentially connected in series.

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