CN116190190B - Automatic impedance matching method, device, system, electronic equipment and storage medium - Google Patents

Abstract

The present application relates to the field of semiconductor manufacturing, in particular, to an automatic impedance matching method, device, system, electronic equipment, and storage medium, including the following steps: obtaining phase information U of the load end_Phaseand amplitude information U_MAG, according to the phase information U_Phaseand amplitude information U_MAGCalculate and obtain the impedance judgment information U_rms; When the impedance judgment information is greater than the preset matching voltage threshold, the first adjustment command is repeatedly executed until the impedance judgment information is less than or equal to the matching voltage threshold; the first adjustment command includes: only adjusting the first adjustable capacitor C1, so that the impedance judgment information U_rmsAdjust to a minimum value; only adjust the second adjustable capacitor C2 or the third adjustable capacitor C3, so that the impedance judgment information U_rmsAdjust to the minimum value, this method makes the impedance judgment information U through cyclic adjustment_rmsA new minimum is generated until it is less than or equal to the match voltage threshold, enabling fast impedance matching.

Description

Automatic impedance matching method, device, system, electronic equipment and storage medium

technical field

The present application relates to the field of semiconductor manufacturing, in particular, to an automatic impedance matching method, device, system, electronic equipment and storage medium.

Background technique

With the development of science and technology and modern industry, the application of radio frequency power supply is becoming more and more extensive. It has penetrated into many fields such as vacuum coating, plasma equipment cleaning, semiconductor etching, etc., including the application of radio frequency discharge and radio frequency heating. Because the impedance characteristics of the gas in the reaction chamber change drastically before and after plasmaization, if the impedance is mismatched, a large amount of RF power will be reflected from the cavity back to the RF power supply, causing damage to the RF power supply. Because an impedance matching box must be provided between the radio frequency power supply and the reaction chamber to perform impedance matching between the two, so that power can be fed into the reaction chamber with high efficiency.

The existing automatic impedance matching method generally performs impedance matching through the directional coupling of an impedance matcher. Specifically, the amplitude of the incident voltage and reflected voltage is collected through the information, and the amplitude of the reflection coefficient is used as a reference value for impedance matching network adjustment to perform impedance matching. However, since this adjustment method does not detect real-time phase information of the load, it needs to continuously measure changes in impedance to achieve impedance matching. Therefore, multiple iterations are required to complete impedance matching, resulting in long matching time and low matching accuracy.

For the above problems, there is no effective technical solution at present.

Contents of the invention

The purpose of the present application is to provide an automatic impedance matching method, device, system, electronic equipment and storage medium, aiming at solving the problems of large amount of calculation and low efficiency of automatic impedance matching.

In a first aspect, the present application provides an automatic impedance matching method for completing impedance matching in an impedance matching box. The impedance matching box includes a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3. The parallel capacitor group is composed of a first adjustable capacitor C1 and a second adjustable capacitor C2 in parallel. An automatic impedance matching method includes the following steps:

S1. Obtain the phase information of the load end and amplitude information /> , and according to the phase information /> and amplitude information /> Calculate and obtain impedance judgment information/> ;

S2, in the impedance judgment information When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> less than or equal to the matching voltage threshold;

The first conditioning commands include:

Only adjust the first adjustable capacitor C1, so that the impedance judgment information adjusted to a minimum value;

Only adjust the second adjustable capacitor C2 or the third adjustable capacitor C3, so that the impedance judgment information Adjust to minimum value.

The automatic impedance matching method provided by this application can obtain the phase information of the load terminal in the impedance matching box in real time and amplitude information /> By first adjusting only the first adjustable capacitor C1, the impedance judgment information at this time is adjusted to a minimum value, and then according to the type of the matching network, the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted to adjust the impedance judgment information at this time to a minimum value, and the impedance judgment information is obtained in real time during the adjustment process of the adjustable capacitor, and the adjustable capacitor is repeatedly adjusted until the impedance judgment information is less than or equal to the matching voltage threshold. The minimum value of the impedance to quickly judge the information Impedance matching can be realized by reducing to less than or equal to the matching voltage threshold, and this method can adjust different adjustable capacitors according to different matching network selections, so this adjustment method can be applied to different matching networks.

Optionally, in an automatic impedance matching method provided by the present application, in step S2, when the matching network is Gama type, the first adjustment command is:

Only adjust the first adjustable capacitor C1, so that the impedance judgment information adjusted to a minimum value;

Only adjust the third adjustable capacitor C3, so that the impedance judgment information Adjust to minimum value.

Optionally, in an automatic impedance matching method provided by the present application, in step S2, when the matching network is of Pi type, the first adjustment command is:

Only adjust the first adjustable capacitor C1, so that the impedance judgment information adjusted to a minimum value;

Only adjust the second adjustable capacitor C2, so that the impedance judgment information Adjust to minimum value.

Optionally, in an automatic impedance matching method provided by the present application, step S2 includes the following steps:

S21, in the impedance judgment information When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> is less than or equal to the matching voltage threshold, or repeatedly execute the first adjustment command until the number of repetitions is greater than the preset cycle number threshold.

In the actual test process, it is found that the impedance matching can be completed only by 2-3 cycles in this way. Therefore, the application sets the threshold of the number of cycles and completes the impedance matching when the number of cycles exceeds the threshold, so as to avoid other factors that cause the matching to be completed but have been in the process of cyclic adjustment, thereby affecting the matching efficiency.

Optionally, in an automatic impedance matching method provided by the present application, in step S1, the impedance judgment information The calculation formula is:

.

Optionally, in an automatic impedance matching method provided by this application, the phase information is based on the measured output voltage of a diode-balanced phase detector connected in an impedance matching box, amplitude information /> is based on the measured output voltage of a diode amplitude detector connected to an impedance matching box.

The automatic impedance matching method proposed in this application obtains the phase information of the load end in the impedance matching box in real time and amplitude information /> By first adjusting only the first adjustable capacitor C1, the impedance judgment information at this time is adjusted to a minimum value, and then according to the type of the matching network, the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted to adjust the impedance judgment information at this time to a minimum value, and the impedance judgment information is obtained in real time during the adjustment process of the adjustable capacitor, and the adjustable capacitor is repeatedly adjusted until the impedance judgment information is less than or equal to the matching voltage threshold. The minimum value of the impedance to quickly judge the information Reduce to less than or equal to the matching voltage threshold to achieve impedance matching, and this method can adjust different adjustable capacitors according to different matching network selections, so this adjustment method can be applied to different matching networks, and the matching efficiency can be further ensured by preset cycle thresholds.

In a second aspect, the present application also provides an automatic impedance matching device for completing impedance matching in an impedance matching box. The impedance matching box includes a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3. The parallel capacitor group is composed of a first adjustable capacitor C1 and a second adjustable capacitor C2 in parallel. The automatic impedance matching device includes:

Acquisition module, used to obtain the phase information of the load end and amplitude information /> , and according to the phase information /> and amplitude information /> Calculate and obtain impedance judgment information/> ;

adjustment module for judging information in the impedance When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> less than or equal to the matching voltage threshold;

The first conditioning commands include:

Only adjust the first adjustable capacitor C1, so that the impedance judgment information adjusted to a minimum value;

Only adjust the second adjustable capacitor C2 or the third adjustable capacitor C3, so that the impedance judgment information Adjust to minimum value.

The automatic impedance matching device provided by this application can obtain the phase information of the load end in the impedance matching box in real time and amplitude information /> , by first adjusting only the first adjustable capacitor C1, the impedance judgment information at this time is adjusted to a minimum value, and then the second adjustable capacitor C2 or the third adjustable capacitor C3 is selected according to the type of matching network. The minimum value of the impedance judgment information /> Reduce to less than or equal to the matching voltage threshold to achieve impedance matching, and this method can adjust different adjustable capacitors according to different matching network selections, so this adjustment method can be applied to different matching networks, and this scheme further ensures matching efficiency by setting the cycle number threshold.

In the third aspect, the present application also provides an automatic impedance matching system for completing impedance matching in an impedance matching box, including:

a reaction chamber for providing a reaction space for plasma activation;

a radio frequency power supply for providing energy for plasma activation;

The impedance matching box is used to adjust the impedance by adjusting the internal adjustable capacitor. The impedance matching box includes a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3. The parallel capacitor group is composed of the first adjustable capacitor C1 and the second adjustable capacitor C2 in parallel;

Real-time voltage detector for real-time acquisition of phase information at the load end and amplitude information /> ;

Loop matching unit for judging information in the impedance When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> less than or equal to the match voltage threshold, the first regulation command includes:

Only adjust the first adjustable capacitor C1, so that the impedance judgment information adjusted to a minimum value;

Only adjust the second adjustable capacitor C2 or the third adjustable capacitor C3, so that the impedance judgment information adjusted to a minimum value;

The controller is electrically connected with the radio frequency power supply, the impedance matching box, the real-time voltage detector, and the loop matching unit;

The controller is used to obtain the phase information of the load terminal through the real-time voltage detector and amplitude information , and according to the phase information /> and amplitude information /> Calculate and obtain impedance judgment information/> ;

The controller is also used to pass the loop matching unit in the impedance judgment information When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> Less than or equal to match voltage threshold.

In the automatic impedance matching system provided by this application, the controller controls the real-time voltage detector to obtain the phase information of the load terminal in the impedance matching box in real time and amplitude information /> , and then control the loop matching unit to adjust only the first adjustable capacitor C1, so that the impedance judgment information at this time is adjusted to a minimum value, and then select only the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the matching network type. The minimum value of the impedance judgment information /> Impedance matching can be realized by reducing to less than or equal to the matching voltage threshold, and this method can adjust different adjustable capacitors according to different matching network selections, so this adjustment method can be applied to different matching networks.

In the fourth aspect, the present application also provides an electronic device, including a processor and a memory. The memory stores computer-readable instructions. When the computer-readable instructions are executed by the processor, the steps of the automatic impedance matching method provided in the above-mentioned first aspect are executed: obtaining phase information of the load end and amplitude information /> , and according to the phase information /> and amplitude information /> Calculate and obtain impedance judgment information/> ;In the impedance judgment message /> When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> Less than or equal to the matching voltage threshold; the first adjustment command includes: only adjusting the first adjustable capacitor C1, so that the impedance judgment information /> Adjust to a minimum value; only adjust the second adjustable capacitor C2 or the third adjustable capacitor C3, so that the impedance judgment information /> Adjust to minimum value.

In the fifth aspect, the present application also provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by the processor, the steps of the automatic impedance matching method provided in the first aspect above are executed: acquiring phase information of the load end and amplitude information /> , and according to the phase information /> and amplitude information /> Calculate and obtain impedance judgment information/> ;In the impedance judgment message /> When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> Less than or equal to the matching voltage threshold; the first adjustment command includes: only adjusting the first adjustable capacitor C1, so that the impedance judgment information /> Adjust to a minimum value; only adjust the second adjustable capacitor C2 or the third adjustable capacitor C3, so that the impedance judgment information /> Adjust to minimum value.

As can be seen from the above, the automatic impedance matching method, device, system, electronic equipment and storage medium provided by the present application, the matching method obtains the phase information of the load end in the impedance matching box in real time and amplitude information /> , by first adjusting only the first adjustable capacitor C1, the impedance judgment information at this time /> Adjust to the minimum value, and then adjust the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the type of the matching network, so that the impedance judgment information at this time is adjusted to the minimum value, obtain the impedance judgment information in real time during the adjustment process of the adjustable capacitor, and repeatedly adjust the adjustable capacitor until the impedance judgment information is less than or equal to the matching voltage threshold. This matching method continuously refreshes the impedance judgment information through the above adjustment method /> The minimum value of the impedance judgment information /> Reduce to less than or equal to the matching voltage threshold to achieve impedance matching, and this method can adjust different adjustable capacitors according to different matching network selections, so this adjustment method can be applied to different matching networks, and this scheme further ensures matching efficiency by setting the cycle number threshold.

Additional features and advantages of the application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the application. The objectives and other advantages of the application will be realized and attained by the structure particularly pointed out in the written description and appended drawings.

Description of drawings

FIG. 1 is a flow chart of steps of an automatic impedance matching method provided in an embodiment of the present application.

FIG. 2 is a schematic structural diagram of a matching adjustment unit provided by an embodiment of the present application.

FIG. 3 is a schematic diagram of the variation of the reflection coefficient with the capacitance value in the Gama-type matching network in the embodiment of the present application.

FIG. 4 is a schematic diagram of the variation of the reflection coefficient with the capacitance value in the Pi-type matching network in the embodiment of the present application.

FIG. 5 is a schematic structural diagram of an automatic impedance matching device provided in an embodiment of the present application.

FIG. 6 is a schematic structural diagram of an automatic impedance matching system provided by an embodiment of the present application.

FIG. 7 is an electronic device provided by an embodiment of the present application.

Reference numerals: 1. RF power supply; 2. Impedance matching box; 3. Reaction chamber; 4. Real-time voltage detector; 5. Controller; 6. Loop matching unit; 100. Acquisition module; 200. Adjustment module; 91. Processor;

Detailed ways

The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all of them. The components of the embodiments of the application generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations. Accordingly, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of the present application.

It should be noted that like numerals and letters denote similar items in the following figures, therefore, once an item is defined in one figure, it does not require further definition and explanation in subsequent figures. Meanwhile, in the description of the present application, the terms "first", "second" and the like are only used to distinguish descriptions, and cannot be understood as indicating or implying relative importance.

In the existing impedance matching method, the impedance matching is usually carried out through the directional coupling of the impedance matching device. Specifically, the amplitude of the reflection coefficient is used as the reference value for the adjustment of the impedance matching network through the amplitude of the incident voltage and the reflected voltage of the collected information. However, because the phase factor is not considered in this method, the matching time is long and the matching accuracy is low.

In the first aspect, referring to Fig. 1 and Fig. 2, Fig. 1 is a flow chart of the steps of an automatic impedance matching method provided by the embodiment of the present application, Fig. 2 is a schematic structural diagram of the matching adjustment unit provided by the embodiment of the present application, a kind of automatic impedance matching method shown in Fig. 1 is used to complete impedance matching in the impedance matching box 2, the impedance matching box 2 includes a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3, and the parallel capacitor group is composed of a first adjustable capacitor C1 and a second adjustable capacitor C2 in parallel. An automatic impedance matching method includes the following steps:

S1. Obtain the phase information of the load end and amplitude information /> , and according to the phase information /> and amplitude information /> Calculate and obtain impedance judgment information/> ;

S2, in the impedance judgment information When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> less than or equal to the matching voltage threshold;

The first conditioning commands include:

Only adjust the first adjustable capacitor C1, so that the impedance judgment information adjusted to a minimum value;

Only adjust the second adjustable capacitor C2 or the third adjustable capacitor C3, so that the impedance judgment information Adjust to minimum value.

Specifically, the way to adjust the adjustable capacitor is to adjust the capacitance. During the process of adjusting the capacitance of the adjustable capacitor, the obtained phase information and amplitude information /> The corresponding changes will result in the calculated impedance judgment information change.

Specifically, there is a matching adjustment unit in the impedance matching box 2. In this embodiment, the matching adjustment unit is suitable for performing impedance matching on a Pi-type matching network and a Gama-type (inverted L-type) matching network. Specifically, the matching adjustment unit includes a parallel capacitor group composed of a first adjustable capacitor C1 and a second adjustable capacitor C2 connected in parallel and a third adjustable capacitor C3 connected in series with the parallel capacitor group. The parallel capacitor group also includes a first inductor L1. , when adjusting the first adjustable capacitor C1, the second adjustable capacitor C2 or the third adjustable capacitor C3, the amplitude information of the load terminal is collected in real time and phase information /> , and according to the amplitude information /> and phase information /> Output impedance judgment information in real time, specifically, phase information /> It is used to characterize the phase difference information between the two input signals passing through the two diodes in the impedance matching box. Specifically, the matching box also includes a diode balance phase detector. Specifically, the diode balance phase detector refers to a device that can identify the phase difference of the input signal. It is a circuit that makes the output voltage and the phase difference between the two input signals have a definite relationship. In this embodiment, the diode balance phase detector has two diodes. By applying the input signal to the two diodes, the voltage at the output end of the diode balance phase detector is measured, thereby characterizing the phase difference information of the two input signals; amplitude information /> It is used to represent the amplitude ratio information between the two input signals passing through the two diodes in the impedance matching box. Specifically, the impedance matching box also includes a diode amplitude detector. The peak detector is a device that can detect the peak value of the AC signal. The input of the peak detector circuit is the detected signal, and the output is a stable voltage (the peak value of the AC signal) under ideal conditions. There are two diodes in the diode amplitude detector. value information /> .

Specifically, referring to FIG. 3, FIG. 3 is a schematic diagram of the variation of the reflection coefficient with the capacitance value in the Gama-type matching network in the embodiment of the present application. In the Gama-type matching network, the reflection coefficient changes with the first adjustable capacitor C1 and the third adjustable capacitor C3. When the first adjustable capacitor C1 is constant, the reflection coefficient changes with the third adjustable capacitor C3. and amplitude information /> , and the calculated impedance judgment information/> It is also a minimum value; when the third adjustable capacitor C3 is constant, the reflection coefficient changes with the first adjustable capacitor C1, and when the first adjustable capacitor C1 is adjusted to a certain position, the reflection coefficient has a minimum value, and the impedance judgment information It is also a minimum value, so it can be concluded that when adjusting the first adjustable capacitor C1 or the third adjustable capacitor C3, the impedance judgment information /> There will be a minimum value, and when the first adjustable capacitor C1 or the third adjustable capacitor C3 is cyclically adjusted, the impedance judgment information /> The minimum value will be continuously updated, so in this scheme, the impedance judgment information can be adjusted by adjusting the first adjustable capacitor C1 or the third adjustable capacitor C3 Decrease gradually until impedance matching is achieved.

Similarly, referring to FIG. 4, FIG. 4 is a schematic diagram of the reflection coefficient changing with the capacitance value in the Pi-type matching network in the embodiment of the present application. In the Pi-type matching network, the reflection coefficient changes with the first adjustable capacitor C1 and the second adjustable capacitor C2. When the first adjustable capacitor C1 is constant, the reflection coefficient changes with the second adjustable capacitor C2. and amplitude information /> , and the calculated impedance judgment information/> It is also a minimum value; when the second adjustable capacitor C2 is constant, the reflection coefficient changes with the first adjustable capacitor C1, and when the first adjustable capacitor C1 is adjusted to a certain position, the reflection coefficient has a minimum value, and the impedance judgment information /> It is also a minimum value, so it can be concluded that when adjusting the first adjustable capacitor C1 or the second adjustable capacitor C2, the impedance judgment information /> There will be a minimum value, and when the first adjustable capacitor C1 or the second adjustable capacitor C2 is cyclically adjusted, the impedance judgment information The minimum value will be continuously updated, so in this scheme, the impedance judgment information can be adjusted by adjusting the first adjustable capacitor C1 or the second adjustable capacitor C2 Decrease gradually until impedance matching is achieved.

In this embodiment, when the impedance is perfectly matched, the amplitude information and phase information /> are all zero, that is, the output impedance judgment information /> It is also zero. In actual operation, if the impedance needs to be fully matched, more adjustment times are required, resulting in a longer matching time. Therefore, preferably, in this embodiment, the matching voltage threshold is preset before matching. When the output impedance judgment information /> When the matching voltage threshold is less than or equal to the matching voltage threshold, the impedance matching can be completed. Therefore, the matching voltage threshold should be set on the premise that the matched impedance will not affect the subsequent links. By setting the matching voltage threshold, the number of adjustments to the adjustable capacitor can be reduced without affecting the subsequent process, thereby improving the efficiency of impedance matching.

Preferably, in some implementations, when adjusting one of the first adjustable capacitor C1, the second adjustable capacitor C2, or the third adjustable capacitor C3, the output impedance judgment information is less than or equal to the matching voltage threshold, and there is no need to adjust other adjustable capacitors, thereby improving matching efficiency.

The automatic impedance matching method in the embodiment of the present application obtains the phase information of the load end in the impedance matching box 2 in real time and amplitude information /> , by first adjusting only the first adjustable capacitor C1, the impedance judgment information at this time /> Adjust to the minimum value, and then select only one of the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the needs of the matching network, so that the impedance judgment information at this time is adjusted to the minimum value, and the impedance judgment information is obtained in real time during the adjustment of the adjustable capacitor. Impedance matching is completed until the impedance judgment information is less than or equal to the matching voltage threshold. This matching method continuously refreshes the impedance judgment information through the above adjustment method /> The minimum value of the impedance to quickly judge the information Impedance matching can be realized by reducing to less than or equal to the matching voltage threshold, and this method can adjust different adjustable capacitors according to different matching network selections, so this adjustment method can be applied to different matching networks.

In some preferred embodiments, in step S2, when the matching network is Gama type, the first adjustment command is:

Only adjust the first adjustable capacitor C1, so that the impedance judgment information adjusted to a minimum value;

Only adjust the third adjustable capacitor C3, so that the impedance judgment information Adjust to minimum value.

Specifically, in some embodiments, when the matching network that needs to perform impedance matching is a Gama-type network (that is, an inverted L-type network), it is necessary to keep the second adjustable capacitor C2 constant, and only adjust the first adjustable capacitor C1 and the third adjustable capacitor C3.

Optionally, in some embodiments, when performing impedance matching on a Gama-type network (that is, an inverted L-type network), keep the first adjustable capacitor C1 and the second adjustable capacitor C2 constant, and only adjust the third adjustable capacitor C3, so that the impedance judgment information at this time is a minimum value, then keep the second adjustable capacitor C2 and the third adjustable capacitor C3 constant, and only adjust the first adjustable capacitor C1, so that the impedance judgment information at this time /> is the minimum value, loop the adjustment step until the impedance judgment information /> Impedance matching can be completed if it is less than or equal to the matching voltage threshold.

In some preferred embodiments, in step S2, when the matching network is of Pi type, the first adjustment command is:

Only adjust the first adjustable capacitor C1, so that the impedance judgment information adjusted to a minimum value;

Only adjust the second adjustable capacitor C2, so that the impedance judgment information Adjust to minimum value.

Specifically, in some embodiments, when the matching network that needs to perform impedance matching is a Pi-type network, the third adjustable capacitor C3 needs to be kept constant, and only the first adjustable capacitor C1 and the second adjustable capacitor C2 need to be adjusted.

Optionally, in some embodiments, when performing impedance matching on the Pi-type network, keep the first adjustable capacitor C1 and the third adjustable capacitor C3 constant, and only adjust the second adjustable capacitor C2, so that the impedance judgment information at this time is a minimum value, then keep the second adjustable capacitor C2 and the third adjustable capacitor C3 constant, and only adjust the first adjustable capacitor C1, so that the impedance judgment information at this time /> is the minimum value, loop the adjustment step until the impedance judgment information /> Impedance matching can be completed if it is less than or equal to the matching voltage threshold.

Preferably, in this solution, the first adjustable capacitor C1 needs to be adjusted no matter for the Gama-type network or the Pi-type network. Therefore, in this embodiment, the second adjustable capacitor C2 and the third adjustable capacitor C3 are kept constant, and the first adjustable capacitor C1 is adjusted so that the impedance judgment information at this time Adjust to a minimum value, and then choose to adjust the second adjustable capacitor C2 or the third adjustable capacitor C3 according to whether the impedance matching network is a Gama network or a Pi network.

In some preferred embodiments, step S2 includes the following steps:

S21, in the impedance judgment information When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> is less than or equal to the matching voltage threshold, or repeatedly executes the first adjustment command until the number of repetitions is greater than the preset cycle number threshold.

Specifically, in the actual operation process, the impedance matching process only needs to be repeated two to three times to achieve impedance matching. However, in some embodiments, there may be a problem that the output impedance judgment information is not equal to the actual one due to other factors such as electronic component failures and cannot be less than or equal to the matching threshold information, which leads to continuous looping. Therefore, preferably, in this embodiment, in addition to setting the matching voltage threshold, an additional cycle number threshold is also set. match.

In some preferred embodiments, in step S1, the impedance judgment information The calculation formula is:

.

Specifically, in the process of adjusting the adjustable capacitor, the output phase information and amplitude information will change correspondingly, and in the adjustment process, the reflection coefficient needs to be reduced to a certain extent to achieve impedance matching. In this embodiment, the phase information /> and amplitude information /> Changes with the change of the reflection coefficient, so in this embodiment, the information is judged by the impedance /> Characterize phase information/> and amplitude information /> The trend of change, when the impedance judgment information /> When is a minimum value, it means that the reflection coefficient is also a minimum value at this time.

In some preferred embodiments, the phase information is based on the measured output voltage of a diode-balanced phase detector connected in an impedance matching box, amplitude information /> is based on the measured output voltage of a diode amplitude detector connected to an impedance matching box.

Specifically, in this embodiment, the diode balance phase detector includes two diodes, and the voltage at the output terminal of the diode balance phase detector is measured as the phase information , which is used to characterize the phase difference information between two input signals passing through two diodes in the impedance matching box. The diode amplitude detector includes two diodes, and the voltage at the output terminal of the diode amplitude detector is measured as the amplitude information /> , used to characterize the amplitude ratio information between the two input signals passing through the two diodes in the impedance matching box.

The automatic impedance matching method provided in this embodiment obtains the phase information of the load end in the impedance matching box 2 in real time and amplitude information /> , by first adjusting only the first adjustable capacitor C1, the impedance judgment information at this time Adjust to the minimum value, and then select only one of the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the needs of the matching network, so that the impedance judgment information at this time is adjusted to the minimum value, and the impedance judgment information is obtained in real time during the adjustment of the adjustable capacitor. Impedance matching is completed until the impedance judgment information is less than or equal to the matching voltage threshold. This matching method continuously refreshes the impedance judgment information through the above adjustment method /> The minimum value of the impedance judgment information /> Reduce to less than or equal to the matching voltage threshold to achieve impedance matching, and this method can adjust different adjustable capacitors according to different matching network selections, so this adjustment method can be applied to different matching networks, and this scheme further ensures matching efficiency by setting the cycle number threshold.

In the second aspect, refer to FIG. 5. FIG. 5 is a schematic structural diagram of an automatic impedance matching device provided in the embodiment of the present application. The automatic impedance matching device shown in FIG. 5 is used to complete impedance matching in the impedance matching box 2. The impedance matching box 2 includes a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3. The parallel capacitor group is composed of a first adjustable capacitor C1 and a second adjustable capacitor C2 in parallel. The automatic impedance matching device includes:

Obtaining module 100, configured to obtain phase information of the load end and amplitude information /> , and according to the phase information /> and amplitude information /> Calculate and obtain impedance judgment information/> ;

The adjustment module 200 is used for judging information in the impedance When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> less than or equal to the matching voltage threshold;

The first conditioning commands include:

Only adjust the first adjustable capacitor C1, so that the impedance judgment information adjusted to a minimum value;

Only adjust the second adjustable capacitor C2 or the third adjustable capacitor C3, so that the impedance judgment information Adjust to minimum value.

The automatic impedance matching device provided in this embodiment obtains the phase information of the load end in the impedance matching box 2 in real time through the acquisition module 100 and amplitude information /> , and then only the first adjustable capacitor C1 is adjusted through the adjustment module 200, so that the impedance judgment information at this time /> Adjust to a minimum value, and then select only one of the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the needs of the matching network, so that the impedance judgment information at this time is adjusted to a minimum value, and the impedance judgment information is obtained in real time during the adjustment of the adjustable capacitor. Impedance matching is completed until the impedance judgment information is less than or equal to the matching voltage threshold, and the impedance judgment information is continuously refreshed through the above adjustment device /> The minimum value of the impedance judgment information /> Impedance matching can be realized by reducing to less than or equal to the matching voltage threshold, and this method can adjust different adjustable capacitors according to different matching network selections, so this adjustment method can be applied to different matching networks.

In the third aspect, refer to FIG. 6. FIG. 6 is a schematic structural diagram of an automatic impedance matching system provided in the embodiment of the present application. The automatic impedance matching system shown in FIG. 6 is used to complete impedance matching in the impedance matching box 2, including:

The reaction chamber 3 is used to provide a reaction space for plasma activation;

RF power supply 1, used to provide energy for plasma activation;

The impedance matching box 2 is used to adjust the impedance by adjusting the internal adjustable capacitor. The impedance matching box 2 includes a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3. The parallel capacitor group is composed of the first adjustable capacitor C1 and the second adjustable capacitor C2 in parallel;

Real-time voltage detector 4 for real-time acquisition of phase information at the load end and amplitude information /> ;

Loop matching unit 6, used for judging information in impedance When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> less than or equal to the match voltage threshold, the first regulation command includes:

Only adjust the first adjustable capacitor C1, so that the impedance judgment information adjusted to a minimum value;

Only adjust the second adjustable capacitor C2 or the third adjustable capacitor C3, so that the impedance judgment information adjusted to a minimum value;

A controller 5, the controller 5 is electrically connected with the radio frequency power supply 1, the impedance matching box 2, the real-time voltage detector 4, and the loop matching unit 6;

The controller 5 is used to obtain the phase information of the load terminal through the real-time voltage detector 4 and amplitude information , and according to the phase information /> and amplitude information /> Calculate and obtain impedance judgment information/> ;

The controller 5 is also used to pass the loop matching unit 6 in the impedance judgment information When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> Less than or equal to match voltage threshold.

In the automatic impedance matching system provided in the embodiment of the present application, the controller 5 controls the real-time voltage detector 4 to obtain the phase information of the load terminal in the impedance matching box 2 in real time and amplitude information /> , and then control the loop matching unit 6 to adjust only the first adjustable capacitor C1, so that the impedance judgment information at this time /> Adjust to a minimum value, and then select only one of the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the needs of the matching network, so that the impedance judgment information at this time is adjusted to a minimum value, and the impedance judgment information is obtained in real time during the adjustment of the adjustable capacitor. Impedance matching is completed until the impedance judgment information is less than or equal to the matching voltage threshold, and the impedance judgment information is continuously refreshed through the above matching system /> The minimum value of the impedance judgment information /> Impedance matching can be realized by reducing to less than or equal to the matching voltage threshold, and this method can adjust different adjustable capacitors according to different matching network selections, so this adjustment method can be applied to different matching networks.

In the fourth aspect, refer to FIG. 7. FIG. 7 is an electronic device provided by the present application, including: a processor 91 and a memory 92. The processor 91 and the memory 92 are interconnected and communicate with each other through a communication bus 93 and/or other forms of connection mechanisms (not shown). The memory 92 stores computer-readable instructions executable by the processor 91. When the electronic device is running, the processor 91 executes the computer-readable instructions to perform any of the optional implementations of the above-mentioned embodiments to achieve the following functions: Obtain the phase information of the load end and amplitude information /> , and according to the phase information /> and amplitude information /> Calculate and obtain impedance judgment information/> ;In the impedance judgment message /> When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> Less than or equal to the matching voltage threshold; the first adjustment command includes: only adjusting the first adjustable capacitor C1, so that the impedance judgment information /> Adjust to a minimum value; only adjust the second adjustable capacitor C2 or the third adjustable capacitor C3, so that the impedance judgment information /> Adjust to minimum value.

In the fifth aspect, the present application provides a computer-readable storage medium on which a computer program is stored. When the computer program is executed by the processor 91, the method in any optional implementation manner of the above-mentioned embodiment is executed to realize the following functions: acquire phase information of the load end and amplitude information /> , and according to the phase information /> and amplitude information /> Calculate and obtain impedance judgment information/> ;In the impedance judgment message /> When it is greater than the preset matching voltage threshold, repeat the first adjustment command until the impedance judgment information /> Less than or equal to the matching voltage threshold; the first adjustment command includes: only adjusting the first adjustable capacitor C1, so that the impedance judgment information /> Adjust to a minimum value; only adjust the second adjustable capacitor C2 or the third adjustable capacitor C3, so that the impedance judgment information /> Adjust to minimum value.

As can be seen from the above, the automatic impedance matching method, device, system, electronic equipment and storage medium provided by the present application can obtain the phase information of the load end in the impedance matching box 2 in real time and amplitude information /> , by first adjusting only the first adjustable capacitor C1, the impedance judgment information at this time /> Adjust to a minimum value, and then select only one of the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the needs of the matching network, so that the impedance judgment information at this time is adjusted to a minimum value, and the impedance judgment information is obtained in real time during the adjustment process of the adjustable capacitor. Impedance matching is completed until the impedance judgment information is less than or equal to the matching voltage threshold. This matching method continuously refreshes the impedance judgment information through the above adjustment method /> The minimum value of the impedance judgment information /> Reduce to less than or equal to the matching voltage threshold to achieve impedance matching, and this method can adjust different adjustable capacitors according to different matching network selections, so this adjustment method can be applied to different matching networks, and by setting the threshold of the number of cycles, the matching efficiency is further guaranteed.

In the embodiments provided in this application, it should be understood that the disclosed devices and methods may be implemented in other ways. The device embodiments described above are only illustrative. For example, the division of units is only a logical function division. In actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not implemented. In another point, the mutual coupling or direct coupling or communication connection shown or discussed may be through some communication interfaces, and the indirect coupling or communication connection of devices or units may be in electrical, mechanical or other forms.

In addition, a unit described as a separate component may or may not be physically separated, and a component displayed as a unit may or may not be a physical unit, that is, it may be located in one place, or may be distributed to multiple network units. Part or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

Furthermore, each functional module in each embodiment of the present application may be integrated to form an independent part, each module may exist independently, or two or more modules may be integrated to form an independent part.

In this document, relational terms such as first and second etc. are used merely to distinguish one entity or operation from another without necessarily requiring or implying any such actual relationship or order between these entities or operations.

The above are only examples of the present application, and are not intended to limit the protection scope of the present application. For those skilled in the art, the present application may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of this application shall be included within the protection scope of this application.

Claims (9)

1. An automatic impedance matching method for completing impedance matching in an impedance matching box, characterized in that the impedance matching box comprises a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3, the parallel capacitor group is composed of a first adjustable capacitor C1 and a second adjustable capacitor C2 which are connected in parallel, the automatic impedance matching method comprises the following steps:

s1, acquiring phase information of a load endAmplitude information +.>And according to said phase information +.>And the amplitude information +.>Calculating and acquiring impedance judgment information->The calculation formula of the impedance judgment information is as follows:

；

s2, judging information on the impedanceWhen the impedance judgment information is larger than a preset matching voltage threshold value, repeatedly executing a first regulation command until the impedance judgment information +.>Less than or equal to the matching voltage threshold;

the first adjustment command includes:

firstly, only the first adjustable capacitor C1 is adjusted to enable the impedance to judge informationRegulating to a minimum value;

then, according to the requirement of the matching network, only the second adjustable capacitor C2 or the third adjustable capacitor C3 is selected to be adjusted, so that the impedance judgment information is obtainedAnd adjusting to a minimum value, wherein the matching network comprises a Gama type matching network or a Pi type matching network.

2. The automatic impedance matching method according to claim 1, wherein in step S2, when the matching network is Gama type, the first adjustment command is:

firstly, only the first adjustable capacitor C1 is adjusted to enable the impedance to judge informationRegulating to a minimum value;

then adjusting only the third adjustable capacitor C3 to make the impedance judge informationRegulating to a minimum value.

3. An automatic impedance matching method according to claim 1, wherein in step S2, when the matching network is of Pi type, the first adjustment command is:

firstly, only the first adjustable capacitor C1 is adjusted to enable the impedance to judge informationRegulating to a minimum value;

then only the second adjustable capacitor C2 is adjusted to enable the impedance to judge informationRegulating to a minimum value.

4. An automatic impedance matching method according to claim 1, wherein step S2 comprises the steps of:

s21, judging information on the impedanceWhen the impedance judgment information is larger than a preset matching voltage threshold value, repeatedly executing a first regulation command until the impedance judgment information +.>And the first regulation command is smaller than or equal to the matching voltage threshold value, or is repeatedly executed until the repeated times are larger than a preset cycle times threshold value.

5. An automatic impedance matching method according to claim 1, wherein said phase informationFor balancing the output voltage measured by the phase detector based on the diodes connected in the impedance matching box, the amplitude information>Based on the output measured by a diode amplitude detector connected in the impedance matching boxA voltage.

6. An automatic impedance matching device for completing impedance matching in an impedance matching box, characterized in that the impedance matching box includes a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3, the parallel capacitor group is composed of a first adjustable capacitor C1 and a second adjustable capacitor C2 in parallel, the automatic impedance matching device includes:

an acquisition module for acquiring phase information of the load endAmplitude information +.>And according to the phase informationAnd the amplitude information +.>Calculating and acquiring impedance judgment information->Said impedance judgment information->The calculation formula of (2) is as follows:

；

an adjusting module for determining information on the impedanceWhen the impedance judgment information is larger than a preset matching voltage threshold value, repeatedly executing a first regulation command until the impedance judgment information +.>Less than or equal to the matching voltage threshold;

The first adjustment command includes:

firstly, only the first adjustable capacitor C1 is adjusted to enable the impedance to judge informationRegulating to a minimum value;

then, according to the requirement of the matching network, only the second adjustable capacitor C2 or the third adjustable capacitor C3 is selected to be adjusted, so that the impedance judgment information is obtainedAnd adjusting to a minimum value, wherein the matching network comprises a Gama type matching network or a Pi type matching network.

7. An automatic impedance matching system for performing impedance matching in an impedance matching box, comprising:

a reaction chamber for providing a reaction space for plasma activation;

a radio frequency power supply for providing energy for the plasma activation;

wherein the automatic impedance matching system further comprises:

the impedance matching box is used for completing the adjustment and change of impedance by adjusting the internal adjustable capacitor, and comprises a matching adjustment unit consisting of a parallel capacitor group and a third adjustable capacitor C3, wherein the parallel capacitor group consists of a first adjustable capacitor C1 and a second adjustable capacitor C2 which are connected in parallel;

the real-time voltage detector is used for detecting the phase information of the load end in real timeAmplitude information +.>；

A loop matching unit for judging information in impedance When the impedance judgment information is larger than a preset matching voltage threshold value, repeatedly executing a first regulation command until the impedance judgment information +.>Less than or equal to the match voltage threshold, the first adjustment command comprising:

firstly, only the first adjustable capacitor C1 is adjusted to enable the impedance to judge informationRegulating to a minimum value;

then, according to the requirement of the matching network, only the second adjustable capacitor C2 or the third adjustable capacitor C3 is selected to be adjusted, so that the impedance judgment information is obtainedThe matching network comprises a Gama type matching network or a Pi type matching network;

the controller is electrically connected with the radio frequency power supply, the impedance matching box, the real-time voltage detector and the circulation matching unit;

the controller is used for controlling the real-time voltage detector to acquire the phase information of the load end in real timeAmplitude information +.>And according to said phase information +.>And the amplitude information +.>Calculating and acquiring impedance judgment information->Said impedance judgment information->The calculation formula of (2) is as follows:

；

the controller is also used for controlling the cyclic matching unit to judge information in the impedanceWhen the impedance judgment information is larger than a preset matching voltage threshold value, repeatedly executing a first regulation command until the impedance judgment information +. >Less than or equal to the matching voltage threshold.

8. An electronic device comprising a processor and a memory storing computer readable instructions that, when executed by the processor, perform the steps of the method of any of claims 1-5.

9. A computer readable storage medium, on which a computer program is stored, characterized in that the computer program, when being executed by a processor, performs the steps of the method according to any of claims 1-5.