CN116146658A - Six-degree-of-freedom vibration isolation platform supported by quasi-zero stiffness support column based on active control - Google Patents
Six-degree-of-freedom vibration isolation platform supported by quasi-zero stiffness support column based on active control Download PDFInfo
- Publication number
- CN116146658A CN116146658A CN202211409111.9A CN202211409111A CN116146658A CN 116146658 A CN116146658 A CN 116146658A CN 202211409111 A CN202211409111 A CN 202211409111A CN 116146658 A CN116146658 A CN 116146658A
- Authority
- CN
- China
- Prior art keywords
- quasi
- zero stiffness
- vibration
- vibration isolation
- shell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002955 isolation Methods 0.000 title claims abstract 15
- 230000007246 mechanism Effects 0.000 claims abstract 11
- 238000009434 installation Methods 0.000 claims 1
- 238000013016 damping Methods 0.000 abstract 4
- 238000005516 engineering process Methods 0.000 abstract 1
- 230000005284 excitation Effects 0.000 abstract 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
- F16F15/067—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
- F16F15/073—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only leaf springs
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Vibration Prevention Devices (AREA)
Abstract
本发明属于工程减振技术领域,尤其是涉及基于主动控制的准零刚度支柱支撑的六自由度隔振平台,包括平台底板、承载平台和至少两个减振机构组,每个减振机构组均包括两个减振机构,每个减振机构均包括电机安装座、准零刚度装置和连杆,电机安装座固定设置在平台底板上,准零刚度装置的下端与电机安装座固定连接,准零刚度装置的上端与连杆的下端固定连接,连杆的上端设有与其固定连接的连接件,连杆包括至少两段杆体,相邻的两个杆体的端部通过柔性铰链连接在一起。本发明不仅充分利用准零刚度技术和主动控制所具有的优势使隔振系统在整个频段上都具有优秀的隔振效果,同时能使得隔振物体所受的外界激励可以是多方向的。
The invention belongs to the technical field of engineering vibration reduction, in particular to a six-degree-of-freedom vibration isolation platform supported by quasi-zero-stiffness pillars based on active control, including a platform bottom plate, a bearing platform and at least two vibration-damping mechanism groups, each vibration-damping mechanism group Both include two vibration damping mechanisms, each vibration damping mechanism includes a motor mount, a quasi-zero stiffness device and a connecting rod, the motor mount is fixed on the platform floor, and the lower end of the quasi-zero stiffness device is fixedly connected to the motor mount, The upper end of the quasi-zero stiffness device is fixedly connected to the lower end of the connecting rod, and the upper end of the connecting rod is provided with a connecting piece fixedly connected to it. The connecting rod includes at least two sections of rod bodies, and the ends of two adjacent rod bodies are connected together by flexible hinges . The invention not only makes full use of the quasi-zero stiffness technology and the advantages of active control to make the vibration isolation system have excellent vibration isolation effect in the whole frequency band, but also enables the vibration isolation objects to receive external excitations in multiple directions.
Description
技术领域technical field
本发明涉及工程减振技术领域,尤其是涉及基于主动控制的准零刚度支柱支撑的六自由度隔振平台。The invention relates to the technical field of engineering vibration reduction, in particular to a six-degree-of-freedom vibration isolation platform supported by quasi-zero-stiffness pillars based on active control.
背景技术Background technique
随着科学技术的飞速发展,各行各业都对隔振提出了更高的要求,例如船舶、铁路、航天器和精密仪器等等,振动的产生会直接影响到设备的正常运转,但设备在运行过程中往往会受到外界的激励和自身所产生的振动,研究表明,有效的消振隔振手段对于工程领域有着至关重要的作用。一般而言隔振起始频率与传递率是评价隔振性能的两个重要参数,性能优异的隔振系统应该具有较低的隔振起始频率和较低的传递率,以获得更宽的隔振频带和降低振动的危害。影响隔振系统主要性能的参数是固有频率和阻尼比。若选用刚度较小的隔振系统,会使其固有频率减小,从而减小隔振起始频率,拓宽隔振频带,但是其承载能力下降,静态位移增加;若增加系统阻尼,隔振系统在共振频率点的振动传递率减小,但其高频时的振动传递率却会增加。基于此种情况,人们做了大量关于准零刚度的研究,准零刚度具有高静态低动态的刚度特性,即在静态工况下具有较高的刚度来保证其承载能力,而在高频情况下具有较低的刚度来减小振动传递率对于低频隔振有着至关重要的影响;尽管如此,大多数准零刚度隔离器都是为垂直平移方向的振动隔离而开发的,而实际上,外界的激励往往是从多个方向来的。With the rapid development of science and technology, all walks of life have put forward higher requirements for vibration isolation, such as ships, railways, spacecraft and precision instruments, etc. The generation of vibration will directly affect the normal operation of the equipment, but the equipment in In the process of operation, it is often subject to external excitation and self-generated vibration. Studies have shown that effective vibration reduction and isolation methods play a vital role in the engineering field. Generally speaking, the initial frequency of vibration isolation and transmissibility are two important parameters to evaluate the performance of vibration isolation. A vibration isolation system with excellent performance should have a lower initial frequency of vibration isolation and lower transmissibility to obtain a wider Isolate frequency bands and reduce vibration hazards. The parameters that affect the main performance of the vibration isolation system are the natural frequency and the damping ratio. If a vibration isolation system with a smaller stiffness is selected, its natural frequency will decrease, thereby reducing the initial frequency of vibration isolation and widening the frequency band of vibration isolation, but its bearing capacity will decrease and the static displacement will increase; if the system damping is increased, the vibration isolation system will The vibration transmissibility at the resonant frequency decreases, but the vibration transmissibility increases at high frequencies. Based on this situation, people have done a lot of research on quasi-zero stiffness. Quasi-zero stiffness has high static and low dynamic stiffness characteristics, that is, it has high stiffness under static conditions to ensure its bearing capacity, while under high-frequency conditions Lower stiffness to reduce the vibration transmissibility is crucial for low-frequency vibration isolation; nevertheless, most quasi-zero stiffness isolators were developed for vibration isolation in the vertical translational direction, and in practice, External incentives often come from multiple directions.
发明内容Contents of the invention
本发明要解决的技术问题是:如何减小从多个方向传递来的振动的问题。The technical problem to be solved by the invention is: how to reduce the vibration transmitted from multiple directions.
本发明提供基于主动控制的准零刚度支柱支撑的六自由度隔振平台,包括平台底板、承载平台和至少两个减振机构组,所有减振机构组均匀分布在平台底板上且所有减振机构组共同支撑承载平台;The invention provides a six-degree-of-freedom vibration-isolation platform supported by quasi-zero-stiffness pillars based on active control, including a platform bottom plate, a bearing platform, and at least two vibration-damping mechanism groups. All vibration-damping mechanism groups are evenly distributed on the platform bottom plate and all vibration-damping The mechanism group jointly supports the bearing platform;
每个所述减振机构组均包括两个减振机构,两个减振机构相互倾斜设置;Each of the damping mechanism groups includes two damping mechanisms, and the two damping mechanisms are arranged obliquely to each other;
每个所述减振机构均包括电机安装座、准零刚度装置和连杆,所述电机安装座固定设置在平台底板上,所述准零刚度装置的下端与电机安装座固定连接,所述准零刚度装置的上端与连杆的下端固定连接,所述连杆的上端设有与其固定连接的连接件,所述连接件与承载平台固定连接;Each of the damping mechanisms includes a motor mount, a quasi-zero stiffness device and a connecting rod, the motor mount is fixedly arranged on the platform bottom plate, the lower end of the quasi-zero stiffness device is fixedly connected to the motor mount, and the The upper end of the quasi-zero stiffness device is fixedly connected to the lower end of the connecting rod, the upper end of the connecting rod is provided with a connecting piece fixedly connected thereto, and the connecting piece is fixedly connected to the bearing platform;
所述连杆包括至少两段杆体,相邻的两个杆体的端部通过柔性铰链连接在一起。The connecting rod includes at least two sections of rod bodies, and the ends of two adjacent rod bodies are connected together by flexible hinges.
进一步,所述电机安装座、准零刚度装置和连杆在稳定的平衡状态下的轴线共线。Further, the axes of the motor mount, the quasi-zero stiffness device and the connecting rod are collinear in a stable equilibrium state.
进一步,所述电机安装座、准零刚度装置和连杆的轴线与平台底板之间的夹角均为45度。Further, the included angles between the axis of the motor mount, the quasi-zero stiffness device and the connecting rod and the platform bottom plate are all 45 degrees.
进一步,每个所述减振机构组中的两个连杆的上端通过同一个连接件与承载平台连接,所述连接件与每个连杆连接的一面均呈倾斜设置,且连杆的轴线垂直于连接件与其连接的侧面。Further, the upper ends of the two connecting rods in each of the shock absorbing mechanism groups are connected to the bearing platform through the same connecting piece, the side of the connecting piece connected to each connecting rod is inclined, and the axis of the connecting rod Perpendicular to the side the connector is attached to.
进一步,所述准零刚度装置包括主动作动器、壳体、作动杆和固定块,所述主动作动器安装在电机安装座内,所述壳体固定连接在主动作动器的上端,所述壳体上端设有通孔,所述作动杆的下端与主动作动器的输出端固定连接,所述作动杆的上端与连杆的下端固定连接,所述固定块固定设置在作动杆的中部且固定块位于壳体内,所述固定块的上端与壳体之间设有第一弹簧,所述固定块的旁侧设有至少两个呈圆周分布且呈收缩状态的弹性件,每个弹性件的两端分别与壳体和固定块铰接。Further, the quasi-zero stiffness device includes an active actuator, a casing, an actuating rod and a fixed block, the active actuator is installed in the motor mounting seat, and the casing is fixedly connected to the upper end of the active actuator , the upper end of the housing is provided with a through hole, the lower end of the actuating rod is fixedly connected to the output end of the active actuator, the upper end of the actuating rod is fixedly connected to the lower end of the connecting rod, and the fixed block is fixedly arranged In the middle of the actuating rod and the fixed block is located in the housing, a first spring is provided between the upper end of the fixed block and the housing, and at least two circumferentially distributed and contracted springs are provided on the side of the fixed block. Elastic parts, the two ends of each elastic part are respectively hinged with the housing and the fixed block.
进一步,所述弹性件采用第二弹簧。Further, the elastic member adopts a second spring.
进一步,所述弹性件采用欧拉梁。Further, the elastic member adopts an Euler beam.
进一步,所述主动作动器采用电磁作动器、气动作动器和压电作动器中的一种。Further, the active actuator adopts one of electromagnetic actuator, pneumatic actuator and piezoelectric actuator.
进一步,所述壳体包括上盖、第一外壳、第二外壳和第三外壳,所述上盖、第一外壳、第二外壳和第三外壳依次固定连接,所述通孔设置在上盖上,所有所述弹性件远离作动杆的一端均与第二外壳交接,所述第三外壳的端部与主动作动器固定连接。Further, the housing includes an upper cover, a first shell, a second shell and a third shell, the upper cover, the first shell, the second shell and the third shell are fixedly connected in sequence, and the through hole is arranged on the upper cover Above, the ends of all the elastic members far away from the actuating rod are in contact with the second casing, and the end of the third casing is fixedly connected with the active actuator.
进一步,所述连杆与连接件之间通过螺纹连接。Further, the connection between the connecting rod and the connecting piece is threaded.
本发明的有益效果在于:The beneficial effects of the present invention are:
本发明提出了多自由度的隔振平台,不仅充分利用准零刚度技术和主动控制所具有的优势使隔振系统在整个频段上都具有优秀的隔振效果,同时能使得隔振物体所受的外界激励可以是多方向的。在位移、速度、加速度传感器的反馈信号下改变每个减振机构上准零刚度内的主动作动器的推力,对隔振对象的振动进行实时控制。从传统线性隔振理论而言,提高了隔振系统的隔振频段;从振动主动控制角度而言,充分利用了主动控制技术在低频段的优势,抑制系统低频共振峰值。The invention proposes a multi-degree-of-freedom vibration isolation platform, which not only makes full use of the quasi-zero stiffness technology and the advantages of active control to make the vibration isolation system have excellent vibration isolation effects in the entire frequency band, but also makes the vibration isolation objects suffer External stimuli can be multidirectional. Under the feedback signals of the displacement, velocity and acceleration sensors, the thrust of the active actuator within the quasi-zero stiffness on each vibration damping mechanism is changed, and the vibration of the vibration isolation object is controlled in real time. From the perspective of traditional linear vibration isolation theory, the vibration isolation frequency band of the vibration isolation system is improved; from the perspective of active vibration control, the advantages of active control technology in the low frequency band are fully utilized to suppress the low frequency resonance peak of the system.
附图说明Description of drawings
为了更清楚地说明本发明的技术方案,下面将对本发明所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施方式,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to illustrate the technical solution of the present invention more clearly, the accompanying drawings used in the present invention will be briefly introduced below. Obviously, the accompanying drawings in the following description are some implementations of the present invention. For those of ordinary skill in the art, In other words, other drawings can also be obtained from these drawings on the premise of not paying creative work.
图1为本发明实施例一的整体正视图;Fig. 1 is the overall front view of
图2为本发明实施例一的整体侧视图;2 is an overall side view of
图3为本发明实施例一中准零刚度装置的立体结构示意图;3 is a schematic diagram of a three-dimensional structure of a quasi-zero stiffness device in
图4为本发明实施例一中准零刚度装置的局部立体结构示意图;4 is a schematic diagram of a partial three-dimensional structure of a quasi-zero stiffness device in
图5为本发明实施例一中连杆的立体结构示意图;5 is a schematic diagram of a three-dimensional structure of a connecting rod in
图6为本发明实施例二中弹性件为欧拉梁时准零刚度装置的局部立体结构示意图。Fig. 6 is a schematic diagram of a partial three-dimensional structure of a quasi-zero-stiffness device in
附图标记:1、平台底板;2、承载平台;3、减振机构;31、电机安装座;32、准零刚度装置;321、主动作动器;322、壳体;323、作动杆;324、固定块;325、第一弹簧;326、弹性件;33、连杆;34、连接件;4、柔性铰链;5、上盖;6、第一外壳;7、第二外壳;8、第三外壳。Reference signs: 1. Platform bottom plate; 2. Bearing platform; 3. Vibration reduction mechanism; 31. Motor mounting base; 32. Quasi-zero stiffness device; 321. Active actuator; 322. Housing; 323. Actuating
具体实施方式Detailed ways
下面将结合附图对本发明的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are part of the embodiments of the present invention, but not all of them.
实施例一,如图1至图5所示,基于主动控制的准零刚度支柱支撑的六自由度隔振平台,包括平台底板1、承载平台2和至少两个减振机构组,所有减振机构组均匀分布在平台底板1上且所有减振机构组共同支撑承载平台2;在工作时,将隔振对象放置在承载平台2上,当隔振物体在工作时出现振动后,振动沿着承载平台2传递到减振机构组时,通过减振机构组对进行减振,避免振动的进一步传递或降低振动的进一步传递。本发明中减振机构组的数量可以是两个或者更多,首先,一个减振机构组无法对承载平台2起到良好的支撑作用,其次,是否要设置更多的减振机构组根据实际情况判断,如果承载平台2是三角形或近似于三角形,则三个侧面都需要减振机构组进行支撑,能够提高减振机构组对承载平台2支撑的稳定性,也能够吸收更多方向传递而来的振动。同样,若承载平台2为多边形结构,且承载平台2尺寸较大,可以在承载平台2的每个边都设置一个减振机构组,以提供稳定的支撑能力和更好的减振能力。
为了使得减振机构组能够对多个方向上的激励进行减振,每个减振机构组均包括两个减振机构3,两个减振机构3相互倾斜设置,减振机构3倾斜设置后不仅能够继续对竖直方向上的激励进行减振,还能够对很多其他方向上的激励起到减振的效果,此外,两个减振机构3的相互倾斜设置,能够构成一个三角形,对承载平台2提供更好的支撑力。In order to enable the vibration damping mechanism group to damp the excitation in multiple directions, each vibration damping mechanism group includes two
每个减振机构3均包括电机安装座31、准零刚度装置32和连杆33,电机安装座31固定设置在平台底板1上,准零刚度装置32的下端与电机安装座31固定连接,准零刚度装置32的上端与连杆33的下端固定连接,连杆33的上端设有与其固定连接的连接件34,连接件34与承载平台2固定连接;准零刚度装置32具有高静刚度和低动刚度,在稳定状态下,能够给承载平台2提供稳定的支撑力,在受到激励振动时,能够放大振动信号,再进行主动控制以将振动进行抵消。Each damping
为了避免减振机构3构成三角形对承载平台2稳定支撑导致承载平台2无法振动,连杆33包括至少两段杆体,相邻的两个杆体的端部通过柔性铰链4连接在一起,能够实现承载平台2的振动。In order to prevent the vibration-damping
具体地,电机安装座31、准零刚度装置32和连杆33在稳定的平衡状态下的轴线共线,这样能够使得振动的传递方向更准确,也更便于主动对振动进行抵消。电机安装座31、准零刚度装置32和连杆33的轴线如果不设置为共线状态,那么至少要设置为相互平行,否则振动的传递方向过于混乱,不便于后续对振动进行主动控制消除等操作。Specifically, the axes of the
为了使每个减振结构接受到的激励方向更广,电机安装座31、准零刚度装置32和连杆33的轴线与平台底板1之间的夹角均为45度,如果电机安装座31、准零刚度装置32和连杆33的轴线与平台底板1之间的夹角大于45度,有利于竖直方向上的激励在减振机构3中的传递,但不利于更广的水平方向上的激励在减振机构3中的传递,如果电机安装座31、准零刚度装置32和连杆33的轴线与平台底板1之间的夹角小于45度,有利于水平方向上的激励传在减振机构3中的传递,但不利于竖直方向上的激励在减振机构3中传递,因此,电机安装座31、准零刚度装置32和连杆33的轴线与平台底板1之间夹角为45度是最优设置,能够平衡各个方向上的激励在减振机构3中进行传递。In order to make the direction of excitation received by each damping structure wider, the included angle between the axes of the
具体地,每个减振机构组中的两个连杆33的上端通过同一个连接件34与承载平台2连接,连接件34与每个连杆33连接的一面均呈倾斜设置,且连杆33的轴线垂直于连接件34与其连接的侧面。当隔振物体产生振动,通过上述设置能够将振动更好的传递到减振机构3中。Specifically, the upper ends of the two connecting
具体地,准零刚度装置32包括主动作动器321、壳体322、作动杆323和固定块324,主动作动器321安装在电机安装座31内,壳体322固定连接在主动作动器321的上端,壳体322上端设有通孔,作动杆323的下端与主动作动器321的输出端固定连接,作动杆323的上端与连杆33的下端固定连接,固定块324固定设置在作动杆323的中部且固定块324位于壳体322内,固定块324的上端与壳体322之间设有第一弹簧325,固定块324的旁侧设有至少两个呈圆周分布且呈收缩状态的弹性件326,每个弹性件326的两端分别与壳体322和固定块324铰接。Specifically, the
工作原理:在隔振物体上安装位移传感器、速度传感器和加速度传感器,并将其固定在承载平台2上,使用控制器进行控制,控制器的结构以及控制器对安装位移传感器、速度传感器和加速度传感器的控制都是现有技术,在此不进行赘述,根据隔振物体质量,设计调节准零刚度装置32中弹性件326和第一弹簧325的刚度,使隔振物体安装到承载平台2上后,本发明整体能够保持准零刚度状态,当隔振物体产生振动或受到外界激励振动时,振动通过每个连杆33传递到准零刚度装置32,从而推动作动杆323带动固定块324一起发生振动,弹性件326弹力方向垂直作动杆323轴线的平衡被打破,从而会推动作动杆323和固定块324一起移动,传统线性刚度的隔振系统只有当外界激励频率较高时才能起到一个隔振效果,这里的三个在初始情况就已经被压缩的弹性件326在准零刚度装置32发生运动时会提供一个负刚度的效果,降低准零刚度装置32整体刚度,使得准零刚度装置32在受到的外界激励的频率较低时的情况能有一个低的起始隔振频率,达到低频隔振效果;同时,位移传感器、速度传感器和加速度传感器检测到振动的状态,并将信号传递给控制器,控制器控制主动作动器321提供动力,对上述的振动进行主动抵消,从而达到减振的效果。Working principle: install the displacement sensor, speed sensor and acceleration sensor on the vibration-isolated object, and fix it on the
具体地,弹性件326采用第二弹簧。收缩状态的第二弹簧能够提供弹力,以实现弹性件326的功能。Specifically, the
具体地,主动作动器321采用电磁作动器、气动作动器和压电作动器中的一种。上述主动作动器321均能够由控制器进行控制提供相应的力以抵消振动。Specifically, the
具体地,壳体322包括上盖5、第一外壳6、第二外壳7和第三外壳8,上盖5、第一外壳6、第二外壳7和第三外壳8依次固定连接,通孔设置在上盖5上,所有弹性件326远离作动杆323的一端均与第二外壳7交接,第三外壳8的端部与主动作动器321固定连接;壳体322的组装结构能够实现快速安装,也便于对壳体322内部的固定块324、第二弹簧等结构的刚性进行调整。Specifically, the
具体地,连杆33与连接件34之间通过螺纹连接,螺纹连接快速方便。Specifically, the connecting
实施例二,如图6所示,实施例二与实施例一唯一的区别在于弹性件326采用欧拉梁,欧拉梁是一种常见的弹性结构,也能够用于提供弹力,实现弹性件326的作用,而且欧拉梁提供的力的方向是稳定的,在工作过程中不会像第二弹簧那样出现本身弯曲的情况,但欧拉梁的延展性没有第二弹簧好,也就是固定块324和作动杆323的移动距离会受到更大的限制,具体可以根据实际情况进行选用。
最后应说明的是:以上各实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述各实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分或者全部技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的范围。Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than limiting them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: It is still possible to modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the technical solutions of the various embodiments of the present invention. scope.
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202211409111.9A CN116146658A (en) | 2022-11-11 | 2022-11-11 | Six-degree-of-freedom vibration isolation platform supported by quasi-zero stiffness support column based on active control |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202211409111.9A CN116146658A (en) | 2022-11-11 | 2022-11-11 | Six-degree-of-freedom vibration isolation platform supported by quasi-zero stiffness support column based on active control |
Publications (1)
Publication Number | Publication Date |
---|---|
CN116146658A true CN116146658A (en) | 2023-05-23 |
Family
ID=86353280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202211409111.9A Pending CN116146658A (en) | 2022-11-11 | 2022-11-11 | Six-degree-of-freedom vibration isolation platform supported by quasi-zero stiffness support column based on active control |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN116146658A (en) |
-
2022
- 2022-11-11 CN CN202211409111.9A patent/CN116146658A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9447839B2 (en) | Support module for lithography system | |
US6860152B2 (en) | High frequency multiple degree of freedom vibration test machine | |
US5390892A (en) | Vibration isolation system | |
US10281356B2 (en) | Oscillating device, electrodynamic actuator, cross guideway, linear guideway and vibrating table | |
CN108757799A (en) | A kind of quasi- zero stiffness isolation mounting of flexibility | |
JP2013080911A (en) | System and method for active vibration damping | |
CN100456140C (en) | A Precision Vibration Isolation System for Step and Scan Lithography Machine | |
US5549270A (en) | Vibration isolation system | |
CN103791023A (en) | Whole satellite six-dimensional vibration isolation device used for satellite vibration reduction in satellite launching process | |
CN108107934B (en) | The multistage steady picture/flyback multiplex control system of photoelectric nacelle | |
CN108240415B (en) | Large-load high-damping vibration absorber of composite bending beam/plate negative-stiffness dynamic vibration absorber | |
JP2019531449A (en) | Horizontal motion vibration isolator | |
JP2003148540A (en) | Air spring | |
CN209083883U (en) | A kind of quasi- zero stiffness isolation mounting of flexibility | |
US11339850B2 (en) | Orthogonally-optimized vibration isolation | |
CN116146658A (en) | Six-degree-of-freedom vibration isolation platform supported by quasi-zero stiffness support column based on active control | |
CN109869439A (en) | A kind of novel Stewart damper | |
CN107797217B (en) | Projection objective supporting device and photoetching machine equipment | |
CN112984044A (en) | Displacement suppression mechanism and vibration damping device | |
KR20070028233A (en) | Dustproof device | |
CN213451481U (en) | Shock-absorbing structure, inertia measuring device and movable platform | |
EP0710344B1 (en) | Vibration isolation system | |
CN112128307A (en) | Shock-absorbing structure, inertia measuring device and movable platform | |
CN219911616U (en) | Sandwich beam | |
CN115523254B (en) | Wide-stroke Gao Jingzai connecting rod type quasi-zero stiffness vibration isolator |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination |