CN116137750A - Special partition power long-life infrared heating lamp for PECVD double-boat auxiliary heating - Google Patents
Special partition power long-life infrared heating lamp for PECVD double-boat auxiliary heating Download PDFInfo
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- CN116137750A CN116137750A CN202310304646.8A CN202310304646A CN116137750A CN 116137750 A CN116137750 A CN 116137750A CN 202310304646 A CN202310304646 A CN 202310304646A CN 116137750 A CN116137750 A CN 116137750A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/0038—Heating devices using lamps for industrial applications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention discloses a special partition power long-life infrared heating lamp for PECVD double-boat auxiliary heating, and relates to the technical field of PECVD equipment. Comprising the following steps: one end of the outer sleeve is inserted into the heating furnace body in a closed manner, the other end of the outer sleeve is exposed out of the furnace body, and a through hole is formed in one end of the outer sleeve exposed out of the furnace body; the infrared heating lamp is inserted into the outer sleeve from the outer sleeve through hole and is fixed on the outer sleeve through the fixing ring, and comprises a double Kong Luanguan quartz shell and infrared heating tungsten wires positioned in the inner cavity of the infrared heating lamp shell, wherein the infrared heating tungsten wires are spirally wound by the double tungsten wires, and the spiral density degree of the infrared heating tungsten wires at different sections is different. According to the invention, the safety guarantee of the infrared heating lamp in the vacuum furnace is improved by arranging the quartz or silicon carbide outer sleeve in the heating furnace body. The double tungsten wires are spirally wound to improve the service life of the infrared heating lamp with high power density; the spiral density degree of the double tungsten wires of different sections is different, so that the partition power of the corresponding area of the auxiliary infrared heating lamp is controlled.
Description
Technical Field
The invention belongs to the technical field of PECVD equipment, and particularly relates to a special partition power long-life infrared heating lamp for PECVD double-boat auxiliary heating.
Background
PECVD (PlasmaEnhancedChemicalVaporDeposition) plasma enhanced chemical vapor deposition is to use low-temperature plasma as an energy source, place a solar cell silicon wafer on a cathode subjected to glow discharge under low air pressure, heat the silicon wafer to a preset temperature by glow discharge (or additionally a heating body), then introduce a proper amount of reaction gas, and react the gas to form a solid film on the silicon wafer through chemistry and plasma, thus the preparation process is an indispensable film plating preparation process of the solar cell, however, in the actual preparation process, the requirements on heating efficiency and heating uniformity are higher and higher, especially in the existing single-tube double-boat process, the local position temperature is too low, the boat color difference is obvious, the yield is low, the existing furnace body heating device or the common auxiliary heating lamp or the auxiliary heater is added, the heating temperature in the furnace body can be always uniformly adjusted, and the different areas in the furnace body cannot be heated by different temperature compensation, so that the product percent of pass is intended to be improved, the production efficiency is intended to be improved, and therefore, further development and improvement are still required. In addition, the common auxiliary heating lamp or auxiliary heater has short service life, the outer sleeve is easy to break, the stability is poor, and the production takt and the production efficiency are directly influenced, so that further research and development are required.
Disclosure of Invention
The invention aims to provide a special partition power long-life infrared heating lamp for PECVD double-boat auxiliary heating, which solves the problem that the temperature compensation heating for distinguishing different areas in a furnace body still has certain difficulty. Solves the problems of short service life, easy breakage of the outer sleeve and poor stability of the common auxiliary heating lamp or auxiliary heater
In order to solve the technical problems, the invention is realized by the following technical scheme:
the invention relates to a special partition power long-life infrared heating lamp for PECVD double-boat auxiliary heating, which comprises: the closed end of one end of the outer sleeve is inserted into the heating furnace body, the other end of the outer sleeve is exposed out of the heating furnace body, and a through hole is formed in one end of the outer sleeve exposed out of the heating furnace body; the infrared heating lamp is inserted into the outer sleeve from the outer sleeve through hole, the infrared heating lamp is fixed on the outer sleeve through the fixing ring, the infrared heating lamp comprises an infrared heating lamp shell and infrared heating tungsten wires positioned in the inner cavity of the infrared heating lamp shell, the infrared heating tungsten wires are spirally wound by double tungsten wires, and spiral density degrees of the infrared heating tungsten wires in different sections in the heating lamp are different.
As a preferable technical scheme of the invention, the outer sleeve is a quartz tube or a silicon carbide tube.
As a preferable technical scheme of the invention, the outer sleeve is in a cylindrical shape with a single end closed.
As a preferable technical scheme of the invention, one end of the outer sleeve, which is inserted into the heating furnace body, is provided with a sealing plug, and a sealing component is arranged between the other end of the outer sleeve and the heating furnace.
As a preferable technical scheme of the invention, the infrared heating lamp shell is a double-hole twin Guan Touming quartz tube, one end of the infrared heating lamp shell is in press seal with the sealing head, and the other end of the infrared heating lamp shell is provided with a double-layer ceramic part structure and is made into a single-end outgoing line safety guarantee structure through the double-layer ceramic part structure.
As a preferable technical scheme of the invention, the single-end outgoing line safety guarantee structure is constructed by pressing a molybdenum sheet and a molybdenum rod, an infrared heating tungsten wire inside a double-hole twin Guan Touming quartz tube is welded and communicated with an external high-temperature lead, and a high-temperature lead welding part and an infrared heating lamp shell are fixed into a whole through a double-layer ceramic structure, so that the single-end outgoing line safety guarantee structure is manufactured.
As a preferable technical scheme of the invention, the infrared heating lamp shell outer wall is sintered with a white ceramic infrared reflection coating at 180 degrees.
As a preferable technical scheme of the invention, the infrared heating tungsten wire is a customized high-temperature infrared double tungsten wire which is spirally wound along the length direction of the lamp cavity of the infrared heating lamp.
As a preferable technical scheme of the invention, the cold end of the infrared heating tungsten wire is provided with a molybdenum wire large spiral structure.
The invention has the following beneficial effects:
according to the invention, the quartz or silicon carbide outer sleeve in the heating furnace body is arranged, so that the problem of breakage of the common auxiliary heating lamp or the auxiliary heater outer sleeve is solved, and the safety guarantee of the infrared heating lamp in the vacuum furnace is improved. The double-hole twin-tube transparent quartz can be made into a single-end outgoing line safety guarantee structure. The double-layer ceramic structure can protect the vacuum press seal of the infrared heating lamp and the integral strength of the lead structure, and the safe use coefficient is improved. The white ceramic infrared reflective coating is sintered at 180 degrees on the outer wall of the double-hole twin Guan Touming quartz, so that unidirectional infrared radiation energy is increased. The infrared heating tungsten wire is a customized high-temperature infrared double tungsten wire, and the double tungsten wire is spirally wound to prolong the service life of the infrared heating lamp. The spiral density degree of the double tungsten wires of different sections is different, so that the partition power of the corresponding area of the auxiliary infrared heating lamp is controlled. The cold end of the infrared heating tungsten wire is designed with a molybdenum wire large spiral structure, so that the service life and the safety of the infrared heating lamp can be greatly improved.
Of course, it is not necessary for any one product to practice the invention to achieve all of the advantages set forth above at the same time.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a cross-sectional view of the present invention;
FIG. 3 is a schematic view of a double-tungsten spiral winding structure of an infrared heating tungsten wire in the invention;
FIG. 4 is a diagram showing the distribution of heating power in a furnace body of a conventional heating furnace
In the drawings, the list of components represented by the various numbers is as follows:
the heat-insulating lamp comprises a 1-outer sleeve, a 2-infrared heating lamp shell, a 3-infrared heating tungsten wire, a 4-fixing ring, a 5-double-layer ceramic part structure and a 6-molybdenum wire large spiral structure.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be understood that the terms "open," "upper," "lower," "thickness," "top," "middle," "length," "inner," "peripheral," and the like indicate orientation or positional relationships, merely for convenience in describing the present invention and to simplify the description, and do not indicate or imply that the components or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.
As shown in fig. 1-2: the special partition power long-life infrared heating lamp for PECVD double-boat auxiliary heating comprises an outer sleeve 1, wherein the closed end of the outer sleeve 1 is inserted into a heating furnace body, one end of the outer sleeve 1 is exposed out of the heating furnace body, and a through hole is formed in one end of the outer sleeve 1 exposed out of the heating furnace body; the infrared heating lamp is inserted into the outer sleeve 1, the infrared heating lamp is fixed on the outer sleeve 1 through the fixing ring 4, the infrared heating lamp comprises an infrared heating lamp shell 2 and infrared heating tungsten wires 3 positioned in the inner cavity of the infrared heating lamp shell 2, the infrared heating tungsten wires 3 are spirally wound in a double-tungsten wire mode, and spiral density degrees of the infrared heating tungsten wires 3 in different sections in the infrared heating lamp are different.
As shown in fig. 1-2: the outer sleeve 1 is a quartz tube or a silicon carbide tube. The outer sleeve 1 is cylindrical. One end of the closed end of the outer sleeve 1, which is inserted into the furnace body of the heating furnace, is provided with a sealing plug, and a sealing component is arranged between the other end of the outer sleeve 1 and the heating furnace.
As shown in fig. 2: the infrared heating lamp housing 2 is a double-hole twin-tube transparent quartz tube, one end of the infrared heating lamp housing 2 is in press seal with the sealing head, the other end of the infrared heating lamp housing 2 is provided with a double-layer ceramic part structure 5, and the double-layer ceramic part structure 5 is used for manufacturing a single-end outgoing line safety guarantee structure. The single-end outgoing line safety guarantee structure is constructed by pressing a molybdenum sheet and a molybdenum rod, an infrared heating tungsten wire 3 inside an infrared heating lamp shell 2 is welded and communicated with an external high-temperature lead, and a high-temperature lead welding part and the infrared heating lamp shell are fixed into a whole through a double-layer ceramic part structure 5 to manufacture the single-end outgoing line safety guarantee structure. The white ceramic infrared reflective coating is sintered at 180 degrees on the outer wall of the infrared heating lamp housing 2. The infrared heating tungsten wire 3 is a customized high-temperature infrared double tungsten wire which is spirally wound along the length direction of the lamp cavity of the heating lamp. The cold end of the infrared heating tungsten filament 3 is provided with a molybdenum filament large spiral structure 6.
The length in the furnace of the existing PECVD double-boat equipment is more than 4 meters, the effective heating length is more than 3 meters, and the distribution of heating power is shown in figure 3. In order to solve the special partition power and long-life stable requirement of the auxiliary heating infrared heating lamp tube, the invention mainly makes innovative design for the special partition power long-life infrared heating lamp structure and production process of double-boat auxiliary heating, wherein the design points are as follows: selecting a quartz or silicon carbide outer sleeve protection design; double-hole twin-tube transparent quartz tube double-layer ceramic reinforced single-end outgoing line safety guarantee structure design; the high-temperature infrared double tungsten wire spiral winding design; a zoned double tungsten wire spiral density power winding design; the cold end molybdenum wire is designed to reduce cold and hot tension of tungsten wire; and designing a 180-degree sintered ceramic reflecting coating on the outer wall of the double-hole twin-tube transparent quartz tube.
The method is specifically designed as follows: one end of the quartz or silicon carbide outer sleeve is provided with a sealing plug, and the whole quartz or silicon carbide outer sleeve is inserted into the heating furnace; the other end is a through hole, the end is exposed out of the furnace body, and the end is in vacuum sealing with the heating furnace through the sealing component, so that the problem that the common auxiliary heating lamp or the auxiliary heater outer sleeve is easy to break is solved. The infrared heating lamps with special partition power for auxiliary heating of the double boats are inserted into the quartz or silicon carbide outer sleeve at the outer edge of the furnace body along the fixing ring, and are assembled into a whole set through the fixing ring. The infrared heating lamp shell with special partition power for auxiliary heating of the double boat adopts a double-hole twin-tube transparent quartz tube, and one end of the double-hole twin-tube transparent quartz tube is sealed by pressing; the other end is pressed and sealed with a molybdenum sheet and a molybdenum rod, and an infrared heating tungsten wire inside the double-hole twin Guan Touming quartz tube is welded and communicated with an external high-temperature lead; the welding part of the high-temperature lead and the double-hole twin Guan Touming quartz tube are fixed into a whole through a double-layer ceramic structure, so that a single-end outgoing line safety guarantee structure is manufactured, the service life of the infrared heating lamp is prolonged, and the safety of easy damage during installation is enhanced; the white ceramic infrared reflective coating is sintered at 180 degrees on the outer wall of the double-hole twin Guan Touming quartz, so that unidirectional infrared radiation energy is increased; the double-hole twin-tube transparent quartz cavity is internally provided with a high-temperature infrared heating tungsten wire along the length direction, the infrared heating tungsten wire is a customized high-temperature infrared double-tungsten wire, the double-tungsten wire is spirally wound, and the service life of the filament of the infrared heating lamp is prolonged; the spiral density degree of the double tungsten wires at different sections in the infrared heating lamp cavity is different, so that the partition power of the corresponding region of the auxiliary infrared heating lamp is controlled, and the problem that the different regions in the furnace body need temperature compensation heating with different power densities is solved; the cold end of the infrared heating tungsten wire is designed with a molybdenum wire large spiral structure, so that the expansion and contraction tension of the whole tungsten wire with cold and hot alternation of the infrared heating tungsten wire is reduced, and the service life and the safety of the infrared heating lamp can be greatly improved.
In the description of the present specification, the descriptions of the terms "one embodiment," "example," "specific example," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The preferred embodiments of the invention disclosed above are intended only to assist in the explanation of the invention. The preferred embodiments are not exhaustive or to limit the invention to the precise form disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best understand and utilize the invention. The invention is limited only by the claims and the full scope and equivalents thereof.
Claims (8)
1. Special partition power long-life infrared heating lamp of two boat auxiliary heating of PECVD, its characterized in that includes:
the heating furnace comprises an outer sleeve (1), wherein a closed end at one end of the outer sleeve (1) is inserted into a heating furnace body, the other end of the outer sleeve (1) is exposed out of the heating furnace body, a through hole is formed in one end of the outer sleeve (1) exposed out of the heating furnace body, and the outer sleeve (1) is made of a quartz tube or a silicon carbide round tube;
the infrared heating lamp is inserted into the outer sleeve (1) from the outer sleeve through hole, the infrared heating lamp is fixed on the outer sleeve (1) through the fixing ring (4), the infrared heating lamp comprises an infrared heating lamp shell (2) and an infrared heating tungsten wire (3) positioned in an inner cavity of the infrared heating lamp shell (2), the infrared heating lamp shell (2) is a double-hole twin Guan Touming quartz tube, the infrared heating tungsten wire (3) is spirally wound by double tungsten wires, and spiral density degrees of the infrared heating tungsten wires (3) at different sections in the infrared heating lamp are different.
2. The special partitioned power long-life infrared heating lamp for PECVD double-boat auxiliary heating according to claim 1, wherein the outer sleeve (1) is in a single-ended closed cylinder shape.
3. The special partition power long-life infrared heating lamp for PECVD double-boat auxiliary heating according to claim 2, wherein the closed end of one end of the outer sleeve (1) is inserted into the furnace body of the heating furnace, and a sealing component and a fixing ring are arranged between the through hole and the heating furnace at the other end of the outer sleeve (1).
4. The special partitioned power long-life infrared heating lamp for PECVD double-boat auxiliary heating according to claim 1, wherein one end of the infrared heating lamp shell (2) is pressed and sealed with a sealing head, and the other end of the infrared heating lamp shell (2) is provided with a double-layer ceramic part structure (5) and is made into a single-end outgoing line safety guarantee structure through the double-layer ceramic part structure (5).
5. The special partition power long-life infrared heating lamp for PECVD double-boat auxiliary heating according to claim 4, wherein the single-end outgoing line safety guarantee structure is constructed by pressing molybdenum sheets and molybdenum rods, an infrared heating tungsten wire (3) inside an infrared heating lamp shell (2) is communicated with an external high-temperature lead wire through welding, and a high-temperature lead wire welding part and the infrared heating lamp shell are fixed into a whole through a double-layer ceramic part structure (5) to manufacture the single-end outgoing line safety guarantee structure.
6. The special zoned power long-life infrared heating lamp for PECVD dual boat auxiliary heating of claim 5, wherein the infrared heating lamp housing (2) outer wall is 180 degree sintered white ceramic infrared reflective coating.
7. The special partitioned power long-life infrared heating lamp for PECVD double-boat auxiliary heating according to claim 6, wherein the infrared heating tungsten wire (3) is a customized high-temperature infrared double-tungsten wire which is spirally wound along the length direction of a lamp cavity of the infrared heating lamp.
8. The special partitioned power long-life infrared heating lamp for PECVD double-boat auxiliary heating according to claim 7, wherein a molybdenum wire large spiral structure (6) is arranged at the cold end of the infrared heating tungsten wire (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310304646.8A CN116137750A (en) | 2023-03-27 | 2023-03-27 | Special partition power long-life infrared heating lamp for PECVD double-boat auxiliary heating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310304646.8A CN116137750A (en) | 2023-03-27 | 2023-03-27 | Special partition power long-life infrared heating lamp for PECVD double-boat auxiliary heating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116137750A true CN116137750A (en) | 2023-05-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310304646.8A Pending CN116137750A (en) | 2023-03-27 | 2023-03-27 | Special partition power long-life infrared heating lamp for PECVD double-boat auxiliary heating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116137750A (en) |
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2023
- 2023-03-27 CN CN202310304646.8A patent/CN116137750A/en active Pending
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