CN116056263A - Heating and temperature measuring integrated non-magnetic electric heating plate processing method, electric heating plate and system - Google Patents

Abstract

The invention provides a processing method of a heating and temperature measuring integrated magneto-less heating plate, an electric heating plate and a system, comprising the following steps: depositing a first heating metal layer on a first surface of the flexible substrate, and depositing a second heating metal layer on a second surface of the flexible substrate; etching the first heating metal layer to form a first heating resistor layer and etching the second heating metal layer to form a second heating resistor layer respectively, wherein the energizing currents of the first heating resistor layer and the second heating resistor layer are opposite; depositing a temperature measuring metal layer on the first surface of the flexible substrate; etching the temperature-measuring metal layer to form a temperature-measuring resistor layer, wherein the first heating resistor layer is positioned at the periphery of the temperature-measuring resistor layer; and spin-coating a first insulating layer on the temperature measuring resistor layer and the first heating resistor layer, and spin-coating a second insulating layer on the second heating resistor layer. By applying the technical scheme of the invention, the technical problems that the mounting of an additional temperature sensor in the prior art can influence the ventilation path of the air chamber and interfere with the mounting of the optical element are solved.

Description

Heating and temperature measurement integrated non-magnetic electric heating sheet processing method, electric heating sheet and system

technical field

The invention relates to the technical field of nuclear magnetic resonance gyroscopes, in particular to a method for processing a heating and temperature measuring integrated non-magnetic electric heating sheet, an electric heating sheet and a system.

Background technique

The non-magnetic electric heating sheet provides the required temperature for the nuclear magnetic resonance gyro and the atomic magnetometer gas chamber, and since the general gas chamber heating needs to monitor the temperature of the gas chamber, it is necessary to install a temperature sensor around the gas chamber. Installing an additional temperature sensor will affect the light path of the gas chamber and interfere with the installation of optical components.

Contents of the invention

The invention provides a heating and temperature measurement integrated non-magnetic electric heating sheet processing method, electric heating sheet and system, which can solve the problem that the installation of additional temperature sensors in the prior art will affect the light path of the gas chamber and interfere with the installation of optical elements. question.

According to one aspect of the present invention, there is provided a method for processing a heating and temperature-measuring integrated non-magnetic electric heating sheet. The processing method for heating and temperature-measuring integrated non-magnetic and electric heating sheet includes: depositing a first heating metal layer on the first surface of a flexible substrate , depositing the second heating metal layer on the second surface of the flexible substrate; respectively etching the first heating metal layer according to the preset heating resistance value to form the first heating resistance layer and etching the second heating metal layer To form the second heating resistor layer, the first heating resistor layer and the second heating resistor layer have the same structure and are arranged symmetrically with respect to the flexible substrate, and the energizing currents of the first heating resistor layer and the second heating resistor layer are opposite; The heating resistance layer is protected, and the temperature-measuring metal layer is deposited on the first surface of the flexible substrate; the temperature-measuring metal layer is etched according to the preset temperature-measuring resistance value to form a temperature-measuring resistance layer, and the first heating resistance layer is located on the temperature-measuring The periphery of the resistance layer; the first insulating layer is spin-coated on the temperature measuring resistance layer and the first heating resistance layer, and the second insulating layer is spin-coated on the second heating resistance layer.

Further, the material of the temperature measuring resistance layer includes PT platinum metal.

Further, the materials of the first heating resistor layer and the second heating resistor layer include gold, platinum, copper, aluminum or titanium.

Further, the material of the flexible substrate includes polyimide.

Further, the materials of the first insulating layer and the second insulating layer both include polyimide or epoxy glue.

According to another aspect of the present invention, there is provided a non-magnetic electric heater integrated with heating and temperature measurement, which is processed using the above-mentioned processing method for the integrated non-magnetic electric heater with heating and temperature measurement.

Further, the heating and temperature measuring integrated non-magnetic electric heating sheet includes: a flexible substrate; a first heating resistor layer and a second heating resistor layer, the first heating resistor layer and the second heating resistor layer have the same structure, and the first heating resistor layer The first heating resistor layer is arranged on the first surface of the flexible substrate, the second heating resistor layer is arranged on the second surface of the flexible substrate, the first heating resistor layer and the second heating resistor layer are arranged symmetrically with respect to the flexible substrate, the first heating resistor layer and the The energizing current of the second heating resistance layer is opposite; the temperature measuring resistance layer, the temperature measuring resistance layer is arranged on the first surface of the flexible substrate, and the first heating resistance layer is located at the periphery of the temperature measuring resistance layer; the first insulating layer and the second insulating layer The first insulating layer is arranged on the temperature measuring resistance layer and the first heating resistance layer, and the second insulating layer is arranged on the second heating resistance layer.

Further, the first heating resistance layer and the second heating resistance layer both include a first heating resistance wire segment and a second heating resistance wire segment, and the first heating resistance wire segment and the second heating resistance wire segment are integrated with respect to the heating temperature measurement. The center line of the magnetoelectric heating sheet is arranged symmetrically, and the first heating resistance wire section includes the first lead pad, the first vertical heating section, the first horizontal heating section, the second vertical heating section, and the second horizontal heating section connected in sequence. Heating section, the third vertical heating section, the third horizontal heating section, the fourth vertical heating section, the fourth horizontal heating section, the fifth vertical heating section and the fifth horizontal heating section, the first horizontal heating section, the second The horizontal heating section, the third horizontal heating section, the fourth horizontal heating section and the fifth horizontal heating section are arranged parallel to each other, and any horizontal heating section and any vertical heating section are vertically arranged; The second lead pad connected, the sixth vertical heating section, the sixth horizontal heating section, the seventh vertical heating section, the seventh horizontal heating section, the eighth vertical heating section, the eighth horizontal heating section, the ninth vertical heating section Straight heating section, ninth horizontal heating section, tenth vertical heating section and tenth horizontal heating section, sixth horizontal heating section, seventh horizontal heating section, eighth horizontal heating section, ninth horizontal heating section and tenth horizontal heating section The heating sections are arranged parallel to each other, any horizontal heating section is vertically arranged with any vertical heating section, and the fifth horizontal heating section is connected with the tenth horizontal heating section.

Further, the temperature-measuring resistance layer includes a first temperature-measuring resistance wire segment and a second temperature-measuring resistance wire segment, and the first temperature-measuring resistance wire segment and the second temperature-measuring resistance wire segment are relatively non-magnetic and electric heaters for heating and measuring temperature. The center line of the center line is set symmetrically, and the first temperature measuring resistance wire section includes the third lead pad, the first vertical temperature measuring section, the first horizontal temperature measuring section, the second vertical temperature measuring section, the second horizontal Temperature measurement section, the third vertical temperature measurement section, the third horizontal temperature measurement section, the fourth vertical temperature measurement section, the fourth horizontal temperature measurement section, the fifth vertical temperature measurement section and the fifth horizontal temperature measurement section, the The first horizontal temperature measurement section, the second horizontal temperature measurement section, the third horizontal temperature measurement section, the fourth horizontal temperature measurement section and the fifth horizontal temperature measurement section are arranged in parallel with each other, any horizontal temperature measurement section and any vertical temperature measurement section The segments are all set vertically; the second temperature measuring resistance wire segment includes the fourth lead pad, the sixth vertical temperature measuring segment, the sixth horizontal temperature measuring segment, the seventh vertical temperature measuring segment, the seventh horizontal measuring temperature section, the eighth vertical temperature measurement section, the eighth horizontal temperature measurement section, the ninth vertical temperature measurement section, the ninth horizontal temperature measurement section, the tenth vertical temperature measurement section and the tenth horizontal temperature measurement section, the sixth The horizontal temperature measurement section, the seventh horizontal temperature measurement section, the eighth horizontal temperature measurement section, the ninth horizontal temperature measurement section and the tenth horizontal temperature measurement section are arranged in parallel with each other, any horizontal temperature measurement section and any vertical temperature measurement section They are all arranged vertically, and the fifth horizontal temperature measurement section is connected with the tenth horizontal temperature measurement section.

According to yet another aspect of the present invention, a non-magnetic and electric heating system with integrated heating and temperature measurement is provided. The non-magnetic and electric heating system with integrated heating and temperature measurement includes a non-magnetic and electric heating chip with integrated heating and temperature measurement and a processor. The resistance value of the temperature resistance layer is calculated to obtain the temperature of the object to be measured, and the heating and temperature measuring integrated non-magnetic and electric heating sheet is the heating and temperature measuring integrated non-magnetic and electric heating sheet as described above.

Applying the technical scheme of the present invention, a method for processing a heating and temperature measuring integrated non-magnetic and electric heating sheet is provided. The non-magnetic and electric heating sheet processing method realizes the non-magnetic and electric heating function by designing and processing a double-layer heating resistance layer. The first heating The energizing currents of the resistance layer 20 and the second heating resistance layer 30 are opposite, so that the generated magnetic fields can be canceled out; a temperature measuring resistance layer with a temperature measuring function is processed in the middle area of the non-magnetic electric heating part, so that temperature measurement can be realized. Compared with the existing technology, this method avoids the use of additional temperature sensors for temperature measurement during the heating process of the gas chamber, reduces the types of devices and the surface of the gas chamber, and reduces the risk of the bonding process; the heating process is processed on the same substrate surface The resistance layer and the temperature-measuring resistance layer effectively reduce the volume of the gas chamber for heating and measuring temperature. Therefore, the heating and temperature-measuring integrated non-magnetic electric heating sheet processing method provided by the present invention can monitor the temperature of the gas chamber while heating the gas chamber. , will not affect the light path of the gas chamber and interfere with the installation of optical components.

Description of drawings

The accompanying drawings are included to provide further understanding of the embodiments of the invention, and constitute a part of the specification, are used to illustrate the embodiments of the invention, and together with the description, explain the principle of the invention. Apparently, the drawings in the following description are only some embodiments of the present invention, and those skilled in the art can obtain other drawings according to these drawings without creative efforts.

Figure 1 shows a schematic structural view of a heating and temperature measuring integrated non-magnetic electric heating sheet provided according to a specific embodiment of the present invention;

Fig. 2 shows a cross-sectional view of an integrated non-magnetic electric heater for heating and temperature measurement according to a specific embodiment of the present invention;

Fig. 3 shows a schematic structural view of the first (second) heating resistance layer provided according to a specific embodiment of the present invention;

Fig. 4 shows a schematic structural diagram of a temperature measuring resistance layer provided according to a specific embodiment of the present invention.

Wherein, the above-mentioned accompanying drawings include the following reference signs:

10. Flexible substrate; 20. The first heating resistance layer; 21. The first heating resistance wire section; 211. The first lead pad; 212. The first vertical heating section; 213. The first horizontal heating section; 214. The second vertical heating section; 215, the second horizontal heating section; 216, the third vertical heating section; 217, the third horizontal heating section; 218, the fourth vertical heating section; 219, the fourth horizontal heating section; 220 , the fifth vertical heating section; 221, the fifth horizontal heating section; 31, the second heating resistance wire section; 311, the second lead pad; 312, the sixth vertical heating section; 313, the sixth horizontal heating section; 314, the seventh vertical heating section; 315, the seventh horizontal heating section; 316, the eighth vertical heating section; 317, the eighth horizontal heating section; 318, the ninth vertical heating section; 319, the ninth horizontal heating section ; 320, the tenth vertical heating section; 321, the tenth horizontal heating section; 30, the second heating resistance layer; 40, the temperature measuring resistance layer; 41, the first temperature measuring resistance wire section; 411, the third lead pad ; 412, the first vertical temperature measurement section; 413, the first horizontal temperature measurement section; 414, the second vertical temperature measurement section; 415, the second horizontal temperature measurement section; 416, the third vertical temperature measurement section; 417 , the third horizontal temperature measurement section; 418, the fourth vertical temperature measurement section; 419, the fourth horizontal temperature measurement section; 420, the fifth vertical temperature measurement section; 421, the fifth horizontal temperature measurement section; 51, the second Temperature measuring resistance wire section; 511, the fourth lead pad; 512, the sixth vertical temperature measuring section; 513, the sixth horizontal temperature measuring section; 514, the seventh vertical temperature measuring section; 515, the seventh horizontal temperature measuring section 516, the eighth vertical temperature measurement section; 517, the eighth horizontal temperature measurement section; 518, the ninth vertical temperature measurement section; 519, the ninth horizontal temperature measurement section; 520, the tenth vertical temperature measurement section; 521, the tenth horizontal temperature measurement section; 50, the first insulating layer; 60, the second insulating layer.

Detailed ways

It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and/or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and/or combinations thereof.

The relative arrangements of components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. At the same time, it should be understood that, for the convenience of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. Techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods and devices should be considered part of the Authorized Specification. In all examples shown and discussed herein, any specific values should be construed as illustrative only, and not as limiting. Therefore, other examples of the exemplary embodiment may have different values. It should be noted that like numbers and letters denote similar items in the following figures, therefore, once an item is defined in one figure, it does not require further discussion in subsequent figures.

As shown in Figures 1 to 4, according to a specific embodiment of the present invention, a method for processing a heating and temperature-measuring integrated non-magnetic electric heating sheet is provided. The processing method for heating and temperature-measuring integrated non-magnetic and electric heating sheet includes: The first heating metal layer is deposited on the first surface of the flexible substrate 10, and the second heating metal layer is deposited on the second surface of the flexible substrate 10; the first heating metal layer is respectively etched according to the preset heating resistance value to form a first heating The resistance layer 20 and the second heating metal layer are etched to form the second heating resistance layer 30. The first heating resistance layer 20 and the second heating resistance layer 30 have the same structure and are arranged symmetrically with respect to the flexible substrate 10. The first The energizing current of the heating resistance layer 20 and the second heating resistance layer 30 is opposite; the first heating resistance layer 20 is protected, and a temperature-measuring metal layer is deposited on the first surface of the flexible substrate 10; The temperature measuring metal layer is etched to form the temperature measuring resistance layer 40, and the first heating resistance layer 20 is located at the periphery of the temperature measuring resistance layer 40; the first insulating layer 50 is spin-coated on the temperature measuring resistance layer 40 and the first heating resistance layer 20 , spin-coat the second insulating layer 60 on the second heating resistor layer 30 .

Using this configuration method, a processing method for heating and temperature measuring integrated non-magnetic electric heating sheet is provided. The non-magnetic electric heating sheet processing method realizes the non-magnetic and electric heating function by designing and processing double-layer heating resistor layers. The first heating resistor The energizing currents of the layer 20 and the second heating resistance layer 30 are opposite, so that the generated magnetic fields can be canceled out; a temperature measuring resistance layer with a temperature measuring function is processed in the middle area of the non-magnetic and electric heating part, so that temperature measurement can be realized. Compared with the existing technology, this method avoids the use of additional temperature sensors for temperature measurement during the heating process of the gas chamber, reduces the types of devices and the surface of the gas chamber, and reduces the risk of the bonding process; the heating process is processed on the same substrate surface The resistance layer and the temperature-measuring resistance layer effectively reduce the volume of the gas chamber for heating and measuring temperature. Therefore, the heating and temperature-measuring integrated non-magnetic electric heating sheet processing method provided by the present invention can monitor the temperature of the gas chamber while heating the gas chamber. , will not affect the light path of the gas chamber and interfere with the installation of optical components.

As a specific embodiment of the present invention, considering the accuracy of temperature measurement and the difficulty of material acquisition, the material of the temperature measuring resistance layer 40 can be configured to include PT platinum metal.

Further, in order to realize heat treatment on the atomic gas cell, the materials of the first heating resistor layer 20 and the second heating resistor layer 30 can be configured to include gold, platinum, copper, aluminum or titanium.

In the present invention, in order to avoid short-circuiting between metals, the material of the flexible substrate 10 can be configured to include polyimide, and the materials of the first insulating layer 50 and the second insulating layer 60 both include polyimide or polyimide. Epoxy glue.

According to another aspect of the present invention, a heating and temperature measuring integrated non-magnetic electric heating sheet is provided, and the heating and temperature measuring integrated non-magnetic electric heating sheet is processed using the above-mentioned processing method for heating and temperature measuring integrated non-magnetic and electric heating sheet .

Using this configuration method, a non-magnetic and electric heating sheet integrated with heating and temperature measurement is provided. The non-magnetic and electric heating sheet realizes the non-magnetic and electric heating function by designing and processing a double-layer heating resistance layer. The first heating resistance layer 20 and the second heating resistance layer The energizing currents of the two heating resistance layers 30 are opposite, so that the generated magnetic fields can be canceled out; the temperature measuring resistance layer with temperature measuring function is processed in the middle area of the non-magnetic electric heating part, so that temperature measurement can be realized. Compared with the existing technology, this method avoids the use of additional temperature sensors for temperature measurement during the heating process of the gas chamber, reduces the types of devices and the surface of the gas chamber, and reduces the risk of the bonding process; the heating process is processed on the same substrate surface The resistance layer and the temperature-measuring resistance layer effectively reduce the volume of the gas chamber for heating and measuring temperature. Therefore, the heating and temperature-measuring integrated non-magnetic electric heating sheet provided by the present invention can monitor the temperature of the gas chamber while heating the gas chamber.

Further, in the present invention, as shown in Fig. 1 and Fig. 2, the heating and temperature measuring integrated non-magnetic electric heating sheet includes a flexible substrate 10, a first heating resistance layer 20, a second heating resistance layer 30, a temperature measuring resistance layer 40. The first insulating layer 50 and the second insulating layer 60, the first heating resistor layer 20 and the second heating resistor layer 30 have the same structure, the first heating resistor layer 20 is arranged on the first surface of the flexible substrate 10, the second The heating resistor layer 30 is arranged on the second surface of the flexible substrate 10, the first heating resistor layer 20 and the second heating resistor layer 30 are arranged symmetrically with respect to the flexible substrate 10, the first heating resistor layer 20 and the second heating resistor layer 30 On the contrary, the temperature measuring resistance layer 40 is arranged on the first surface of the flexible substrate 10, the first heating resistance layer 20 is located at the periphery of the temperature measuring resistance layer 40, and the first insulating layer 50 is arranged on the temperature measuring resistance layer 40 and the second heating resistance layer 40. On the first heating resistor layer 20 , the second insulating layer 60 is disposed on the second heating resistor layer 30 .

In this configuration, the heating resistor is processed by the upper and lower layers of metal, and the positions of the upper and lower layers of metal wire patterns are consistent. When the power is applied, the current direction of the two layers is opposite, so that the magnetic field generated is cancelled. The temperature measuring resistance is processed by a layer of PT metal, and the heating resistance layer is located around the temperature measuring resistance layer, so as to ensure the accuracy of the temperature measuring resistance to measure the temperature of the gas chamber.

In the present invention, in order to further eliminate the magnetic field generated by the heating resistance, both the first heating resistance layer 20 and the second heating resistance layer 30 can be configured to include the first heating resistance wire segment 21 and the second heating resistance wire segment 31 , the first heating resistance wire segment 21 and the second heating resistance wire segment 31 are arranged symmetrically with respect to the center line of the integrated non-magnetic and electric heater for heating and temperature measurement, and the first heating resistance wire segment 21 includes first lead pads connected in sequence 211, the first vertical heating section 212, the first horizontal heating section 213, the second vertical heating section 214, the second horizontal heating section 215, the third vertical heating section 216, the third horizontal heating section 217, the fourth vertical heating section Straight heating section 218, fourth horizontal heating section 219, fifth vertical heating section 220 and fifth horizontal heating section 221, first horizontal heating section 213, second horizontal heating section 215, third horizontal heating section 217, fourth The horizontal heating section 219 and the fifth horizontal heating section 221 are arranged parallel to each other, and any horizontal heating section and any vertical heating section are arranged vertically; the second heating resistance wire section 31 includes a second lead pad 311, The sixth vertical heating section 312, the sixth horizontal heating section 313, the seventh vertical heating section 314, the seventh horizontal heating section 315, the eighth vertical heating section 316, the eighth horizontal heating section 317, the ninth vertical heating section Section 318, ninth horizontal heating section 319, tenth vertical heating section 320 and tenth horizontal heating section 321, sixth horizontal heating section 313, seventh horizontal heating section 315, eighth horizontal heating section 317, ninth horizontal heating section The segment 319 and the tenth horizontal heating segment 321 are arranged parallel to each other, any horizontal heating segment is vertical to any vertical heating segment, and the fifth horizontal heating segment 221 is connected to the tenth horizontal heating segment 321 . As other embodiments of the present invention, the first heating resistor layer 20 and the second heating resistor layer 30 may also adopt other structural forms, which may be selected according to actual conditions.

In the present invention, in order to further eliminate the magnetic field generated by the temperature measuring resistance, the temperature measuring resistance layer 40 can be configured to include a first temperature measuring resistance wire segment 41 and a second temperature measuring resistance wire segment 51, the first temperature measuring resistance The wire segment 41 and the second temperature-measuring resistance wire segment 51 are arranged symmetrically with respect to the center line of the heating and temperature-measuring integrated non-magnetic electric heating sheet. The first temperature-measuring resistance wire segment 41 includes the third lead pad 411, the A vertical temperature measurement section 412, a first horizontal temperature measurement section 413, a second vertical temperature measurement section 414, a second horizontal temperature measurement section 415, a third vertical temperature measurement section 416, a third horizontal temperature measurement section 417, The fourth vertical temperature measurement section 418, the fourth horizontal temperature measurement section 419, the fifth vertical temperature measurement section 420 and the fifth horizontal temperature measurement section 421, the first horizontal temperature measurement section 413, the second horizontal temperature measurement section 415, The third horizontal temperature measurement section 417, the fourth horizontal temperature measurement section 419 and the fifth horizontal temperature measurement section 421 are arranged in parallel with each other, and any horizontal temperature measurement section and any vertical temperature measurement section are vertically arranged; the second temperature measurement resistance The wire section 51 includes a fourth lead wire pad 511, a sixth vertical temperature measurement section 512, a sixth horizontal temperature measurement section 513, a seventh vertical temperature measurement section 514, a seventh horizontal temperature measurement section 515, a sixth eighth vertical temperature measurement section 516, eighth horizontal temperature measurement section 517, ninth vertical temperature measurement section 518, ninth horizontal temperature measurement section 519, tenth vertical temperature measurement section 520 and tenth horizontal temperature measurement section 521, The sixth horizontal temperature measurement section 513, the seventh horizontal temperature measurement section 515, the eighth horizontal temperature measurement section 517, the ninth horizontal temperature measurement section 519 and the tenth horizontal temperature measurement section 521 are arranged in parallel with each other, and any horizontal temperature measurement section is connected to Any vertical temperature measuring section is arranged vertically, and the fifth horizontal temperature measuring section 421 is connected to the tenth horizontal temperature measuring section 521 . As other embodiments of the present invention, the temperature measuring resistance layer 40 may also adopt other structural forms, which may be selected according to actual conditions.

According to another aspect of the present invention, there is provided a heating and temperature measuring integrated non-magnetic and electric heating system, the heating and temperature measuring integrated non-magnetic and electric heating system includes a heating and temperature measuring integrated non-magnetic and electric heating sheet and a processor, the processor is used to The resistance value of the temperature measuring resistance layer 40 is calculated to obtain the temperature of the object to be measured, and the heating and temperature measuring integrated non-magnetic and electric heating sheet is the heating and temperature measuring integrated non-magnetic and electric heating sheet as described above.

Using this configuration method, a non-magnetic and electric heating system with integrated heating and temperature measurement is provided. The non-magnetic electric heating sheet realizes the non-magnetic electric heating function by designing and processing the double-layer heating resistance layer, and the energizing current of the first heating resistance layer 20 and the second heating resistance layer 30 are opposite, so that the generated magnetic fields can be canceled out; The middle area of the non-magnetic electric heating part is processed with a temperature-measuring resistance layer with a temperature-measuring function, so that temperature measurement can be realized. Compared with the existing technology, this method avoids the use of additional temperature sensors for temperature measurement during the heating process of the gas chamber, reduces the types of devices and the surface of the gas chamber, and reduces the risk of the bonding process; the heating process is processed on the same substrate surface The resistance layer and the temperature-measuring resistance layer effectively reduce the volume of the gas chamber for heating and measuring temperature. Therefore, using the heating and temperature-measuring integrated non-magnetic and electric heating sheet provided by the present invention in a non-magnetic and electric heating system can greatly improve the non-magnetic and electric heating system. The working performance of the magnetic electric heating system.

In order to have a further understanding of the present invention, the heating and temperature measuring integrated non-magnetic electric heating sheet and the processing method provided by the present invention will be described in detail below with reference to FIG. 1 to FIG. 4 .

As shown in Figures 1 to 4, according to specific embodiments of the present invention, a heating and temperature-measuring integrated non-magnetic electric heating sheet and a processing method are provided. The main body of the heating and temperature-measuring integrated non-magnetic and electric heating sheet is mainly composed of a A heating resistor layer 20 , a second heating resistor layer 30 and a temperature measuring resistor layer 40 are formed. Heating resistors and temperature measuring resistors are realized through different process steps, including metal deposition and metal etching (metal patterning). The heating resistor is processed by the upper and lower layers of metal, and the positions of the upper and lower layers of metal wire patterns are consistent. When the current is energized, the current direction of the two layers is opposite, so that the generated magnetic field cancels. The temperature measuring resistor is machined from a layer of PT metal.

As shown in Figure 2, the non-magnetic electric heating sheet with integrated heating and temperature measurement is mainly composed of three layers of metal, an intermediate flexible substrate (prefabricated film of polyimide material) and an insulating layer on the surface (made of polyimide spun glue). )composition.

As shown in Fig. 1, the heating resistance layer and the temperature measuring resistance layer are led out through their respective lead pads to facilitate electrical connection. Wherein the heating resistance is located around the temperature measuring resistance, so as to ensure the accuracy of the temperature measuring resistance for measuring the temperature of the gas chamber.

As shown in Figure 2, a layer of insulating layer is processed on the surface of the metal wire to ensure that the metal layer will not be damaged by leakage.

The manufacture process of the present invention is as follows:

In the first step, a layer of metal is deposited on the upper and lower surfaces of the flexible substrate, such metals include but are not limited to gold/platinum/copper/aluminum/titanium, etc.

In the second step, according to the resistance value required by use, calculate the required pattern size for the resistance value, and pattern the heating metal by corrosion or etching, so as to realize the resistance value that meets the heating demand.

The third step is to deposit another layer of metal on the surface of the flexible substrate as a temperature measuring resistor. Such metals include but are not limited to metals such as platinum/nickel/gold, and the metal surface described in the first step is protected before deposition. In order to avoid short circuit between two layers of metal.

The fourth step is to corrode or etch the temperature measuring metal in order to achieve a resistance value that meets the temperature measurement requirements.

The fifth step is to spin-coat a layer of insulating protective glue on the patterned metal surface with a certain resistance value. This kind of glue includes but is not limited to polyimide, epoxy glue and other high-temperature resistant insulating glue.

The non-magnetic and electric heating part of the present invention realizes the non-magnetic and electric heating function through the designed and processed double-layer heating resistance wire, and the middle area of the non-magnetic and electric heating plate is processed with a metal resistance with a temperature measuring function.

The non-magnetic electric heating sheet is made of identical platinum/gold/chromium wires processed on the upper and lower surfaces of the flexible substrate.

The metal resistance of the temperature measuring function is realized by processing a platinum resistance wire with a large temperature coefficient to realize that the resistance changes with the temperature change.

The invention has the advantages of avoiding the use of an additional temperature sensor for temperature measurement during the heating process of the gas chamber, reducing the types of devices and the use surface of the gas chamber, and reducing the risk of the bonding process.

Another advantage of the present invention is that the electric heating wire and the temperature measuring resistance are processed on the surface of the same substrate, which effectively reduces the volume of the gas chamber for heating and measuring temperature.

In summary, the present invention provides a method for processing a heating and temperature measuring integrated non-magnetic and electric heating sheet. The non-magnetic and electric heating sheet processing method realizes the non-magnetic and electric heating function by designing and processing a double-layer heating resistance layer. The first heating The energizing currents of the resistance layer 20 and the second heating resistance layer 30 are opposite, so that the generated magnetic fields can be canceled out; a temperature measuring resistance layer with a temperature measuring function is processed in the middle area of the non-magnetic electric heating part, so that temperature measurement can be realized. Compared with the existing technology, this method avoids the use of additional temperature sensors for temperature measurement during the heating process of the gas chamber, reduces the types of devices and the surface of the gas chamber, and reduces the risk of the bonding process; the heating process is processed on the same substrate surface The resistance layer and the temperature-measuring resistance layer effectively reduce the volume of the gas chamber for heating and measuring temperature. Therefore, the heating and temperature-measuring integrated non-magnetic electric heating sheet processing method provided by the present invention can monitor the temperature of the gas chamber while heating the gas chamber. .

For the convenience of description, spatially relative terms may be used here, such as "on ...", "over ...", "on the surface of ...", "above", etc., to describe The spatial positional relationship between one device or feature shown and other devices or features. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, devices described as "above" or "above" other devices or configurations would then be oriented "beneath" or "above" the other devices or configurations. under other devices or configurations”. Thus, the exemplary term "above" can encompass both an orientation of "above" and "beneath". The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptions used herein interpreted accordingly.

In addition, it should be noted that the use of words such as "first" and "second" to define components is only for the convenience of distinguishing corresponding components. To limit the protection scope of the present invention.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims (10)

1. The processing method of the heating and temperature measuring integrated non-magnetoelectric heating sheet is characterized by comprising the following steps of:

depositing a first heated metal layer on a first surface of a flexible substrate (10), and depositing a second heated metal layer on a second surface of the flexible substrate (10);

etching the first heating metal layer according to a preset heating resistance value to form a first heating resistance layer (20) and etching the second heating metal layer to form a second heating resistance layer (30), wherein the first heating resistance layer (20) and the second heating resistance layer (30) have the same structure and are symmetrically arranged relative to the flexible substrate (10), and the energizing currents of the first heating resistance layer (20) and the second heating resistance layer (30) are opposite;

protecting the first heating resistor layer (20), and depositing a temperature measuring metal layer on the first surface of the flexible substrate (10);

etching the temperature-measuring metal layer according to a preset temperature-measuring resistance value to form a temperature-measuring resistance layer (40), wherein the first heating resistance layer (20) is positioned at the periphery of the temperature-measuring resistance layer (40);

a first insulating layer (50) is spin-coated on the temperature-measuring resistive layer (40) and the first heating resistive layer (20), and a second insulating layer (60) is spin-coated on the second heating resistive layer (30).

2. The method for processing the heating and temperature measuring integrated magneto-less heating sheet according to claim 1, wherein the material of the temperature measuring resistor layer (40) comprises PT platinum metal.

3. The method for processing the heating and temperature measuring integrated magneto-less heating sheet according to claim 1, wherein the materials of the first heating resistor layer (20) and the second heating resistor layer (30) comprise gold, platinum, copper, aluminum or titanium.

4. A method of processing a heating and temperature measuring integrated magneto-less heating plate according to claim 3, wherein the material of the flexible substrate (10) comprises polyimide.

5. The method for manufacturing a heating and temperature measuring integrated magneto-less heating plate according to claim 4, wherein the materials of the first insulating layer (50) and the second insulating layer (60) comprise polyimide or epoxy glue.

6. A heating and temperature-measuring integrated non-magnetic electric heating sheet, characterized in that the heating and temperature-measuring integrated non-magnetic electric heating sheet is processed using the heating and temperature-measuring integrated non-magnetic electric heating sheet processing method according to any one of claims 1 to 5.

7. The heating and temperature measuring integrated magneto-less electric heating plate of claim 6, wherein the heating and temperature measuring integrated magneto-less electric heating plate comprises:

a flexible substrate (10);

the structure of the first heating resistor layer (20) and the structure of the second heating resistor layer (30) are the same, the first heating resistor layer (20) is arranged on the first surface of the flexible substrate (10), the second heating resistor layer (30) is arranged on the second surface of the flexible substrate (10), the first heating resistor layer (20) and the second heating resistor layer (30) are symmetrically arranged relative to the flexible substrate (10), and the energizing currents of the first heating resistor layer (20) and the second heating resistor layer (30) are opposite;

a temperature-measuring resistor layer (40), wherein the temperature-measuring resistor layer (40) is arranged on the first surface of the flexible substrate (10), and the first heating resistor layer (20) is positioned at the periphery of the temperature-measuring resistor layer (40);

a first insulating layer (50) and a second insulating layer (60), wherein the first insulating layer (50) is arranged on the temperature measuring resistance layer (40) and the first heating resistance layer (20), and the second insulating layer (60) is arranged on the second heating resistance layer (30).

8. The heating and temperature measurement integrated magneto-less electric heating plate according to claim 7, wherein the first heating resistance layer (20) and the second heating resistance layer (30) each comprise a first heating resistance wire section (21) and a second heating resistance wire section (31), the first heating resistance wire section (21) and the second heating resistance wire section (31) are symmetrically arranged relative to a central line of the heating and temperature measurement integrated magneto-less electric heating plate, the first heating resistance wire section (21) comprises a first lead pad (211), a first vertical heating section (212), a first horizontal heating section (213), a second vertical heating section (214), a second horizontal heating section (215), a third vertical heating section (216), a third horizontal heating section (217), a fourth vertical heating section (218), a fourth horizontal heating section (219), a fifth vertical heating section (220) and a fifth horizontal heating section (221), the first horizontal heating section (213), the second horizontal heating section (215), the third horizontal heating section (217), the fourth horizontal heating section (219) and the fifth horizontal heating section (219) are vertically arranged in parallel with each other; the second heating resistance wire section (31) comprises a second lead bonding pad (311), a sixth vertical heating section (312), a sixth horizontal heating section (313), a seventh vertical heating section (314), a seventh horizontal heating section (315), an eighth vertical heating section (316), an eighth horizontal heating section (317), a ninth vertical heating section (318), a ninth horizontal heating section (319), a tenth vertical heating section (320) and a tenth horizontal heating section (321), wherein the sixth horizontal heating section (313), the seventh horizontal heating section (315), the eighth horizontal heating section (317), the ninth horizontal heating section (319) and the tenth horizontal heating section (321) are arranged in parallel, any one of the horizontal heating sections is vertically arranged with any one of the vertical heating sections, and the fifth horizontal heating section (221) is connected with the tenth horizontal heating section (321).

9. The heating and temperature measurement integrated magneto-free heating sheet according to claim 8, wherein the temperature measurement resistance layer (40) comprises a first temperature measurement resistance wire section (41) and a second temperature measurement resistance wire section (51), the first temperature measurement resistance wire section (41) and the second temperature measurement resistance wire section (51) are symmetrically arranged relative to a central line of the heating and temperature measurement integrated magneto-free heating sheet, the first temperature measurement resistance wire section (41) comprises a third lead pad (411), a first vertical temperature measurement section (412), a first horizontal temperature measurement section (413), a second vertical temperature measurement section (414), a second horizontal temperature measurement section (415), a third vertical temperature measurement section (416), a third horizontal temperature measurement section (417), a fourth vertical temperature measurement section (418), a fourth horizontal temperature measurement section (419), a fifth vertical temperature measurement section (420) and a fifth horizontal temperature measurement section (421), the first horizontal temperature section (413), the second horizontal temperature section (415), the third horizontal temperature measurement section (417), the fourth horizontal temperature section (419) and the fifth horizontal temperature measurement section (421) are arranged in parallel to each other; the second temperature measuring resistance wire section (51) comprises a fourth lead bonding pad (511), a sixth vertical temperature measuring section (512), a sixth horizontal temperature measuring section (513), a seventh vertical temperature measuring section (514), a seventh horizontal temperature measuring section (515), an eighth vertical temperature measuring section (516), an eighth horizontal temperature measuring section (517), a ninth vertical temperature measuring section (518), a ninth horizontal temperature measuring section (519), a tenth vertical temperature measuring section (520) and a tenth horizontal temperature measuring section (521), wherein the sixth horizontal temperature measuring section (513), the seventh horizontal temperature measuring section (515), the eighth horizontal temperature measuring section (517), the ninth horizontal temperature measuring section (519) and the tenth horizontal temperature measuring section (521) are sequentially connected and are arranged in parallel, any one of the horizontal temperature measuring sections is perpendicular to any one of the vertical temperature measuring sections, and the fifth horizontal temperature measuring section (421) is connected with the tenth horizontal temperature measuring section (521).

10. The heating and temperature measurement integrated magneto-less electric heating system is characterized by comprising a heating and temperature measurement integrated magneto-less electric heating sheet and a processor, wherein the processor is used for calculating and acquiring the temperature of an object to be measured according to the resistance value of the temperature measurement resistance layer (40), and the heating and temperature measurement integrated magneto-less electric heating sheet is the heating and temperature measurement integrated magneto-less electric heating sheet according to any one of claims 6 to 9.

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