CN116009267A - Spot shaping device and laser processing equipment - Google Patents

Abstract

The embodiment of the application relates to the technical field of optical devices, in particular to a light spot shaping device and laser processing equipment, wherein the light spot shaping device comprises: the collimating component is internally provided with a collimating channel and is used for carrying out collimating treatment on light beams in the collimating channel; the homogenizing component is detachably connected with the collimating component, is positioned at the other end of the collimating channel, is internally provided with the homogenizing channel and is used for homogenizing the light beams in the homogenizing channel; the focusing assembly is detachably connected with one end of the homogenizing assembly, which is away from the collimating assembly, a focusing channel is arranged in the focusing assembly, the focusing channel is used for allowing the homogenized light beam to enter from one end of the homogenizing channel, which is away from the collimating assembly, and the focusing assembly is used for focusing the light beam in the focusing channel onto a workpiece. Through the mode, the embodiment of the application is convenient for the later maintenance of the light spot shaping device.

Description

Spot shaping device and laser processing equipment

technical field

The embodiments of the present application relate to the technical field of optical devices, and in particular to a spot shaping device and laser processing equipment.

Background technique

The shell of the existing spot shaping device is usually a one-piece structure, and the internal optical elements have been configured and formed after leaving the factory. When some of the optical elements are damaged, it is impossible to repair or replace the corresponding elements in a targeted manner. Instead, it is necessary to The entire spot shaping device is replaced, resulting in an increase in use cost.

Contents of the invention

In view of the above problems, the embodiments of the present application provide a spot shaping device and laser processing equipment, which facilitates later maintenance of the spot shaping device.

According to an aspect of the embodiment of the present application, a spot shaping device is provided, including: a collimation assembly, a collimation channel is arranged inside, one end of the collimation channel is used for light beams to enter, and the collimation assembly is used to align the light beams in the collimation channel Perform collimation treatment; the homogenization component is detachably connected with the collimation component, and the homogenization component is located at the other end of the collimation channel. The light beam enters from the other end of the collimation channel, and the homogenization component is used to homogenize the beam in the homogenization channel; the focusing component is detachably connected to the end of the homogenization component away from the collimation component, and the internal setting of the focusing component There is a focusing channel, the focusing channel is used for the homogenized light beam to enter from the end of the homogenizing channel away from the collimation channel, and the focusing component is used to focus the light beam in the focusing channel onto the workpiece.

In an optional manner, the spot shaping device further includes: a light splitting component, which is detachably connected between the homogenization component and the focusing component, a light splitting channel is provided inside the light splitting component, and a light splitting port is provided on the side wall of the light splitting component. The beam splitting component is used to transmit the beam entering the beam splitting channel from the homogenization channel into the focusing channel, and the beam splitting component is also used to reflect the beam radiated by the workpiece and enter the beam splitting channel from the focusing channel and pass through the beam splitting port; the reflective component is detachable Connected to the splitting component, and the reflective component is covered outside the splitting port. A reflective channel is provided inside the reflective component, and a beam exit is provided at one end of the reflective channel. The reflective component is used to reflect and pass the beam entering the reflective channel from the splitting port. The beam exit; the temperature control component, detachably connected to the reflection component, the temperature control component is arranged outside the beam exit, and the temperature control component is used to measure the temperature of the light beam passing through the beam exit.

In an optional manner, the spot shaping device further includes an adapter assembly, which is detachably connected to the end of the collimation assembly away from the homogenization assembly, and the adapter assembly is used to connect with the light source device that generates the light beam.

In an optional manner, one of the opposite ends between the collimation component and the homogenization component and/or between the homogenization component and the focusing component is provided with a connecting portion, and the other is provided with a matching portion, The connecting part and the mating part are fixedly connected to each other through fasteners.

In an optional manner, a seal is interposed between the collimation assembly and the homogenization assembly and/or between the homogenization assembly and the focusing assembly, and the seal is used to seal the gap between the collimation channel and the homogenization channel. Gap and/or gap between homogenization channel and focus channel.

In an optional manner, the homogenization assembly includes a housing and a fixed homogenization mirror group, the fixed homogenization mirror group is fixed in the housing, and the fixed homogenization mirror group is used to homogenize the beam in the homogenization channel ; The focusing assembly includes a housing and a zoom lens, and the zoom lens is used to change the size of the light spot focused on the workpiece by adjusting the focal length.

In an optional manner, the homogenization assembly includes a housing and a first homogenization mirror group, and the first homogenization mirror group is arranged in the housing; the first homogenization mirror group includes a first micro-cylindrical array and a second Micro-cylindrical arrays, the plane directions of the first micro-cylindrical array and the second micro-cylindrical array are the first direction, and the first direction is perpendicular to the axial direction of the homogenization channel; the first micro-cylindrical array and the second micro-cylindrical array At least one of the micro-cylindrical arrays is slidably connected with the housing along the axial direction of the homogenization channel, so that when the first micro-cylindrical array and the second micro-cylindrical array move relative to each other, the focus of the light beam in the first direction is changed to Spot size on workpiece.

In an optional manner, the first homogenizing mirror group further includes a distance adjustment member, the distance adjustment member penetrates through the housing and is internally connected to the first micro-cylindrical array, and the part of the distance adjustment member located outside the housing is provided with The force application part, the force application part is used to drive the first micro-cylindrical array to move along the axial direction of the homogenization channel through the distance adjustment member.

In an optional manner, the homogenization assembly further includes a second homogenization mirror group, and the second homogenization mirror group and the first homogenization mirror group are arranged in the casing along the axial direction of the homogenization channel; The mirror group includes the third micro-cylindrical array and the fourth micro-cylindrical array, the surface direction of the third micro-cylindrical array and the fourth micro-cylindrical array is the second direction, and the second direction is the same as the axis of the homogenization channel. direction and the first direction are vertical; at least one of the third micro-cylindrical array and the fourth micro-cylindrical array is slidably connected with the housing along the axial direction of the homogenization channel, so that the third micro-cylindrical array and the fourth micro-cylindrical array When the surface arrays move relative to each other, the spot size of the light beam focused on the workpiece in the second direction is changed.

In an optional manner, the first microcylindrical array is rotatably arranged in the homogenization channel along the axis of the homogenization channel, and the first microcylindrical array is used to eliminate the The sharp peaks at both ends of the light spot passing through the microchannel between the first microcylindrical array and the second microcylindrical array.

In an optional manner, a mirror frame is provided on the outer periphery of the first micro-cylindrical array, the first micro-cylindrical array is rotatably connected to the mirror frame, and the mirror frame is slidably connected to the casing.

In an optional manner, the mirror frame and the first micro-cylindrical array are respectively provided with a first connection structure and a second connection structure on one side, the first connection structure and the second connection structure are connected to each other through an elastic member, and the mirror frame and The first micro-cylindrical array is respectively provided with a third connection structure and a fourth connection structure on the opposite side, and the third connection structure and the fourth connection structure are connected to each other through an adjustment member; the adjustment member is used to adjust the third connection structure and the fourth connection structure. The distance between the fourth connection structures is such that when the distance between the third connection structure and the fourth connection structure increases, the fourth connection structure drives the first micro cylinder array along the first rotation direction relative to the second micro cylinder The array rotates; the elastic member is in a stretched state, so that when the distance between the third connection structure and the fourth connection structure decreases, the elastic member shrinks and drives the first micro-cylindrical array along the second rotation direction relative to the second connection structure. The second micro cylinder array rotates, and the second rotation direction is opposite to the first rotation direction.

In an optional manner, the frame is provided with a limiting shaft, the first micro-cylindrical array is provided with an arc-shaped sliding hole, the limiting shaft is inserted in the arc-shaped sliding hole and slidably fits with the arc-shaped sliding hole, To ensure that the first micro cylinder array rotates along the axis of the homogenization channel.

In an optional manner, the inner edge of the mirror frame is provided with a limiting groove, the outer edge of the first micro-cylindrical array is provided with a protrusion, and the protrusion is located in the limiting groove, and the two opposing circumferential grooves The inner wall is used to abut against the protrusion, so as to limit the maximum rotation stroke of the first micro-cylindrical array.

According to another aspect of the embodiments of the present application, there is provided a laser processing equipment, including a light source device, a working platform, and any one of the above-mentioned spot shaping devices, the light source device is arranged to align with the collimation assembly, and the light source device is used to generate a beam and Input to the collimation channel, the working platform is used to place the workpiece, and the focusing component is used to focus the beam in the focusing channel onto the workpiece to process the workpiece.

In the spot shaping device provided in the embodiment of the present application, a modularized spot shaping device is formed through the detachable connection between the collimating component, the homogenizing component and the focusing component, so that the collimating component, collimating component, and The homogenization component and the focusing component, for example, replace the corresponding collimation component according to the light output characteristics of the light source device, so as to improve the effect of beam collimation processing. Similarly, the homogenization component and the focusing component can also be selectively replaced, so as to homogenize the beam more specifically and focus the spot on workpieces at different distances according to job requirements.

In addition, the spot shaping device provided by the embodiment of the present application sets the collimation component, the homogenization component and the focusing component independently and detachably connects them sequentially, so that when some components in some components are damaged during use, the This part of the assembly is disassembled, and the damaged element can be easily repaired or replaced, which greatly reduces the cost of use.

The above description is only an overview of the technical solution of the present application. In order to better understand the technical means of the present application, it can be implemented according to the contents of the description, and in order to make the above and other purposes, features and advantages of the present application more obvious and understandable , the following specifically cites the specific implementation manner of the present application.

Description of drawings

Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiment. The drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the application. Also throughout the drawings, the same reference numerals are used to designate the same parts. In the attached picture:

FIG. 1 is a schematic diagram of a three-dimensional structure of a spot shaping device provided by an embodiment of the present invention;

FIG. 2 is a schematic diagram of the side structure of the spot shaping device provided by the embodiment of the present invention;

Fig. 3 is a schematic cross-sectional structure diagram along A-A of Fig. 2;

Fig. 4 is a schematic diagram of the exploded structure of the adapter assembly and the collimation assembly in the spot shaping device provided by the embodiment of the present invention;

Fig. 5 is a schematic diagram of the exploded structure of the adapter assembly and the collimation assembly in another viewing angle in the spot shaping device provided by the embodiment of the present invention;

Fig. 6 is a schematic diagram of the exploded structure of the collimation component and the homogenization component in the spot shaping device provided by the embodiment of the present invention;

Fig. 7 is a schematic diagram of the exploded structure of the collimation component and the homogenization component in another viewing angle in the spot shaping device provided by the embodiment of the present invention;

FIG. 8 is a perspective structural schematic diagram of a homogenization component in a spot shaping device provided by an embodiment of the present invention;

9 is a schematic structural diagram of the first micro-cylindrical array and the second micro-cylindrical array in the spot shaping device provided by the embodiment of the present invention;

Fig. 10 is a top view structural diagram of the first micro-cylindrical array and the mirror frame in the spot shaping device provided by the embodiment of the present invention;

Fig. 11 is a schematic structural diagram of a laser processing device provided by an embodiment of the present invention.

The reference numerals in the specific embodiment are as follows:

100. Spot shaping device; 110. Collimation component; 111. Collimation channel; 112. First threaded hole; 113. Connecting part; 1131. Second notch; 1132. Second through hole; 114. Fastener; 115 , the second socket wall; 116, the second annular limit groove; 120, the homogenization component; 121, the homogenization channel; 122, the matching part; 123, the shell; 124, the first homogenization mirror group; 1241, the first 1241a, second connection structure; 1241b, fourth connection structure; 1241c, arc-shaped sliding hole; 1241e, protrusion; 12411, mirror frame; 12411a, first connection structure; 12411b, third connection structure; 12411c, limit shaft; 12411d, abutment structure; 12411e, limit groove; 1242, second micro-cylindrical array; 1243, distance adjustment part; , focusing component; 131, focusing channel; 140, beam splitting component; 141, beam splitting channel; 142, beam splitting port; 143, one-way reflective element; 150, reflection component; 151, reflection channel; 152, beam exit; 153, reflective piece ; 160, temperature control assembly; 170, adapter assembly; 171, joint body; 172, joint seat; 1721, first gap; 1722, first through hole; 173, first threaded fastener; ; 175, the first plug-in wall; 176, the first annular limit groove; 177, the first sealing ring;

10. Laser processing equipment; 200. Light source device; 300. Working platform;

20. Processing parts.

Detailed ways

Embodiments of the technical solutions of the present application will be described in detail below in conjunction with the accompanying drawings. The following examples are only used to illustrate the technical solution of the present application more clearly, and therefore are only examples, rather than limiting the protection scope of the present application.

Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field of the application; the terms used herein are only for the purpose of describing specific embodiments, and are not intended to To limit this application; the terms "comprising" and "having" and any variations thereof in the specification and claims of this application and the description of the above drawings are intended to cover a non-exclusive inclusion.

In the description of the embodiments of the present application, technical terms such as "first" and "second" are only used to distinguish different objects, and should not be understood as indicating or implying relative importance or implicitly indicating the number, specificity, or specificity of the indicated technical features. Sequence or primary-secondary relationship. In the description of the embodiments of the present application, "plurality" means two or more, unless otherwise specifically defined.

Reference herein to an "embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The occurrences of this phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is understood explicitly and implicitly by those skilled in the art that the embodiments described herein can be combined with other embodiments.

In the description of the embodiment of the present application, the term "and/or" is only an association relationship describing associated objects, which means that there may be three relationships, such as A and/or B, which may mean: there is A, and there are A and B, there are three situations of B. In addition, the character "/" in this article generally indicates that the contextual objects are an "or" relationship.

In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two), similarly, "multiple groups" refers to more than two groups (including two), and "multiple pieces" refers to More than two pieces (including two pieces).

In the description of the embodiments of the present application, the technical terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical" "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial", "Radial", "Circumferential", etc. indicate the orientation or positional relationship based on the drawings Orientation or positional relationship is only for the convenience of describing the embodiment of the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as an implementation of the present application. Example limitations.

In the description of the embodiments of this application, unless otherwise clearly specified and limited, technical terms such as "installation", "connection", "connection" and "fixation" should be interpreted in a broad sense, for example, it can be a fixed connection or a fixed connection. Disassembled connection, or integration; it can also be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediary, and it can be the internal communication of two components or the interaction relationship between two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the embodiments of the present application according to specific situations.

The shell of the existing spot shaping device is usually a one-piece structure, and the internal optical elements have been configured and formed after leaving the factory. When some of the optical elements are damaged, it is impossible to repair or replace the corresponding elements in a targeted manner. Instead, it is necessary to The entire spot shaping device is replaced, resulting in an increase in use cost.

Based on this, the embodiment of the present application proposes a spot shaping device. By detachably connecting the collimation component, the homogenization component and the focusing component in sequence, a modularized spot shaping device is formed. When a component is damaged, this part of the component can be disassembled and repaired or replaced for the damaged component, which greatly reduces the cost of use. And the transmission of the light beam between each part of the components is realized through the interconnected channels of the collimation component, the homogenization component and the focusing component, and when the light beam passes through the channels in each part of the components, each part of the components is in its channel. Corresponding processing is carried out so that the beam that finally reaches the workpiece forms a uniform spot.

The spot shaping device provided in the embodiment of the present application includes but is not limited to the field of lighting or laser welding, such as the field of Mini LED mass welding.

Specifically, referring to Fig. 1 to Fig. 3, the three-dimensional structure of the spot shaping device is shown in Fig. 1, the side view structure of the spot shaping device is shown in Fig. 2, and the section along A-A of Fig. 2 is shown in Fig. 3 depending on the structure. As shown in the figure, the spot shaping device 100 includes a collimation component 110 , a homogenization component 120 and a focusing component 130 . A collimating channel 111 is provided inside the collimating component 110 , and one end of the collimating channel 111 is used for light beams to enter, and the collimating component 110 is used for collimating the beams in the collimating channel 111 . The homogenization component 120 is detachably connected to the collimation component 110, the homogenization component 120 is located at the other end of the collimation channel 111, and the homogenization component 120 is provided with a homogenization channel 121 inside, and the homogenization channel 121 is used for collimation processing The final beam enters from the other end of the collimation channel 111 , and the homogenization component 120 is used to homogenize the beam in the homogenization channel 121 . The focusing assembly 130 is detachably connected to the end of the homogenization assembly 120 away from the collimation assembly 110. The inside of the focusing assembly 130 is provided with a focusing channel 131. The focusing channel 131 is used for the homogenized light beam to go straight through One end of the channel 111 enters, and the focusing assembly 130 is used to focus the beam in the focusing channel 131 to the workpiece.

Take the fiber-coupled laser as an example for the light source device that generates the light beam, which outputs a light beam with a divergence angle less than or equal to 25.4° along the direction indicated by the top arrow in Figure 3, and the light beam enters the collimation channel 111 from the top and is collimated by the collimation component 110 After processing, a collimated beam with a divergence angle of less than 0.5° is output. Then the collimated beam enters the homogenization channel 121, and after being homogenized by the homogenization component 120, a uniform beam with a uniformity greater than 97% can be formed, and then the uniform beam enters the focusing channel 131, and is focused to the workpiece by the focusing component 130 For example, focusing on the surface of the workpiece for processing.

For the spot shaping device with an integrated housing, since the internal optical elements have been configured and molded after leaving the factory, the optical shaping device is limited by the internal optical elements and can only be used in specific application scenarios, resulting in a universal product. Poor sex. Specifically, for example, after the structural configuration of the focusing component in the spot shaping device is formed, its focal length has been fixed, so the spot shaping device can only focus a fixed spot on a workpiece at a fixed distance.

In the spot shaping device 100 provided in the embodiment of the present application, the modularized spot shaping device 100 is formed by detachable connections among the collimating component 110, the homogenizing component 120, and the focusing component 130, so that it can be flexibly configured according to job requirements. Or replace the collimation component 110, the homogenization component 120 and the focusing component 130, for example, replace the corresponding collimation component 110 according to the light output characteristics of the light source device, so as to improve the effect of beam collimation processing. Similarly, the homogenization component 120 and the focusing component 130 can also be selectively replaced, so as to homogenize the light beam in a more targeted manner and focus the light spot on workpieces at different distances according to job requirements.

In addition, the spot shaping device 100 provided by the embodiment of the present application sets the collimation component 110, the homogenization component 120 and the focusing component 130 independently and detachably connects them sequentially, so that when some components in some components are damaged during use, When this part of components can be disassembled, and the damaged components can be easily repaired or replaced, which greatly reduces the cost of use.

Please refer to FIG. 1 and FIG. 3 again, as shown in the figures, in some embodiments, the spot shaping device 100 further includes a light splitting component 140 , a reflecting component 150 and a temperature control component 160 . The light splitting assembly 140 is detachably connected between the homogenization assembly 120 and the focusing assembly 130, the inside of the light splitting assembly 140 is provided with a light splitting channel 141, and the side wall of the light splitting assembly 140 is provided with a light splitting port 142, and the light splitting assembly 140 is used for the light splitting channel 141 The beam entering from the homogenization channel 121 is transmitted into the focusing channel 131 , and the beam splitting assembly 140 is also used to reflect the beam irradiated by the workpiece and entering the beam splitting channel 141 from the focusing channel 131 and pass through the beam splitting port 142 . The reflection assembly 150 is detachably connected to the light splitting assembly 140, and the reflection assembly 150 is covered on the outside of the light splitting port 142. The inside of the reflection assembly 150 is provided with a reflection passage 151, and one end of the reflection passage 151 is provided with a beam outlet 152. The reflection assembly 150 uses The light beam entering the reflection channel 151 from the beam splitting opening 142 is reflected and passes through the beam exit 152 . The temperature control assembly 160 is detachably connected to the reflection assembly 150, and the temperature control assembly 160 is arranged on the outside of the beam exit 152. The temperature control assembly 160 is used to measure the temperature of the beam passing through the beam exit 152, that is, the temperature of the light radiated by the workpiece .

As shown in FIG. 3 , the reflection assembly 150 includes a one-way reflective element 143 obliquely arranged in the light-splitting channel 141, and the light beam entering by the homogenizing channel 121 (the arrow is realized in the light-splitting channel 141 in the figure) is transmitted through the one-way reflective element 143 arrives in the focusing channel 131. During processing, the light beam of a certain wavelength band radiated by the surface of the workpiece affected by the spot (the dotted arrow in the light-splitting channel 141 and the reflection channel 151 in the figure) will enter the light-splitting channel 141 through the focusing channel 131, and the one-way reflective element 143 The light beam is reflected into the reflection channel 151 through the beam splitting port 142, and then the reflection assembly 150 reflects the light beam to the temperature control assembly 160 through the beam exit 152, so that the temperature of the light beam is detected by the temperature control assembly 160, and the processing of the workpiece is realized. temperature measurement.

Further, the temperature control component 160 may be communicatively connected to the controller, and the controller determines the temperature obtained by detection and the target temperature value by comparing the temperature detected by the temperature control component 160 with the set target temperature value. According to the difference, the beam power generated by the light source device is adjusted to ensure that the surface temperature of the workpiece is stable at the target temperature value, thereby realizing automatic temperature control.

In the specific embodiment shown in FIG. 3 , the reflective assembly 150 includes a reflective member 153 obliquely arranged in the reflective channel 151, and the reflective member 153 and the one-way reflective element 143 are arranged parallel to each other, so that the light beam passes through the one-way reflective element 143 and the one-way reflective element 143 in sequence. After the reflective member 153 is reflected, it is output in the vertical upward direction. Accordingly, the temperature control assembly 160 is arranged at the upward end of the reflective assembly 150 to receive the light beam output from the beam outlet 152 and perform temperature detection. At the same time, the reflective member 153 Arranged in parallel with the one-way reflective element 143 , and the temperature control assembly 160 is arranged at the upward end of the reflective assembly 150 , it can effectively reduce the horizontal space occupation of the light spot shaping device 100 as a whole and ensure a compact structure.

By further detachably connecting the spectroscopic assembly 140 , the reflective assembly 150 and the temperature control assembly 160 , the temperature measurement of the workpiece is realized. Since each part of the light splitting assembly 140, the reflection assembly 150 and the temperature control assembly 160 is an independent modular structure, when a certain part of the assembly is damaged, it can also be disassembled separately for maintenance or replacement, reducing the cost of use.

In order to facilitate the installation and fixation of the spot shaping device 100, this application further proposes an implementation mode, please refer to Figure 1 and Figure 3 for details, as shown in the figure, the spot shaping device 100 also includes an adapter assembly 170, the adapter assembly 170 It is detachably connected to the end of the collimation assembly 110 away from the homogenization assembly 120, and the adapter assembly 170 is used to connect with the light source device that generates the light beam.

Specifically, for the application scenario of laser welding, the adapter assembly 170 can use a QBH (Quartz BlockHead) connector, and the QBH connector is connected to the fiber-coupled laser light source device to assemble the spot shaping device 100 on the light source device. During operation, the laser output from the fiber-coupled laser light source device enters the collimation channel 111 after passing through the QBH connector.

It can be understood that, in some other embodiments, according to different application scenarios and light source devices of the spot shaping device, the adapter assembly 170 can also be configured as other types of joints or connection structures.

After the adapter assembly 170 is detachably connected to the end of the collimation assembly 110 away from the homogenization assembly 120 , the light spot shaping device 100 can be integrally and conveniently assembled to the light source device through the adapter assembly 170 . Furthermore, when the spot shaping device 100 needs to be installed on different types or models of light source devices, the adapter assembly 170 that can be adapted to connect with the new light source device can be replaced by disassembling, so that the spot shaping device 100 can be used in different types or models. The installation and fixation on the light source device of different models improves the versatility of the light spot shaping device 100 .

For the connection structure between the adapter assembly 170 and the collimator assembly 110, the present application proposes an implementation mode, please refer to FIG. 1 again for details, and further in conjunction with FIG. An exploded view of component 110. As shown in the figure, the adapter assembly 170 includes a joint body 171 and a joint seat 172 fixed to each other. A first notch 1721 is opened at the edge of the side wall of the joint seat 172. The joint seat 172 faces the alignment assembly at the first notch 1721. 110 is provided with a first through hole 1722 on one side of the wall, and the side of the alignment assembly 110 facing the adapter assembly 170 is provided with a first threaded hole 112. The first notch 1721 is used for the first threaded fastener 173 to pass through the second A through hole 1722 is connected with the first threaded hole 112 to detachably fix the joint base 172 and the collimation assembly 110 together. Through the above manner, the adapter assembly 170 and the collimation assembly 110 can be easily disassembled.

In order to ensure the sealing performance of the beam channel, this application further proposes an implementation mode. For details, please continue to refer to FIG. 4 and further combine with FIG. 5, which shows the exploded structure of the adapter assembly 170 and the collimation assembly 110 from another perspective . As shown in the figure, an incident beam channel 174 is provided in the adapter assembly 170, and a first insertion wall 175 is provided on the outer edge of the incident beam channel 174 toward the end of the collimation assembly 110 in the adapter assembly 170. The first insertion wall 175 is inserted into the collimation channel 111, the position adjacent to the first insertion wall 175 on the adapter assembly 170 is provided with a first annular limiting groove 176, and a first sealing ring 177 is arranged in the first annular limiting groove 176 , the first sealing ring 177 is in interference fit with the surface of the collimation assembly 110 at the edge of the collimation channel 111 .

When assembling the adapter assembly 170 and the collimation assembly 110, the positioning between the adapter assembly 170 and the collimation assembly 110 can be realized by inserting the first insertion wall 175 into the collimation channel 111, ensuring the passage of the incident beam 174 is aligned with the collimation channel 111, by clamping the first sealing ring 177 to the inner wall of the first annular limiting groove 176 and the surface at the edge of the collimation channel 111, it can ensure that the collimation channel 111 is in the adapter assembly 170 The sealing performance of the joint with the collimation assembly 110.

For the connection structure of the collimation assembly 110 and the homogenization assembly 120, the present application proposes an implementation mode, please refer to FIG. 1 again for details, and further refer to FIG. 6, which shows the collimation assembly 110 and the homogenization assembly 120 Explosion structure from one perspective. As shown in the figure, among the opposite ends of the collimation assembly 110 and the homogenization assembly 120, one is provided with a connecting portion 113, and the other is provided with a fitting portion 122, and the connecting portion 113 and the fitting portion 122 are fastened The pieces 114 are fixedly connected to each other.

The connection part 113 may include a second notch 1131 and a second through hole 1132 , and the arrangement of the second notch 1131 and the second through hole 1132 is the same as that of the above-mentioned first notch 1721 and the first through hole 1722 . The matching portion 122 may be a second threaded hole provided on the surface of the homogenization component 120, and the fastener 114 may be a second threaded fastener. The fastener 114 is threaded through the second through hole 1132 and the mating part 122 through the second notch 1131, and the second notch 1131 provides a space for tightening the fastener 114, thereby facilitating the alignment assembly 110 and the homogenization assembly Assembly between 120.

Further, in order to ensure the sealing of the beam channel, the present application also proposes an implementation manner, please refer to FIG. 7 for details, which shows the exploded structure of the collimation assembly 110 and the homogenization assembly 120 from another perspective. As shown in the figure, a seal is interposed between the collimation assembly 110 and the homogenization assembly 120 , and the seal is used to seal the gap between the collimation channel 111 and the homogenization channel 121 .

Specifically, as shown in FIG. 7 , the collimation assembly 110 can be provided with a second insertion wall 115 on the outer edge of the end of the collimation channel 111 facing the homogenization channel 121 , and the second insertion wall 115 is inserted into the homogenization channel 121 Inside, the position adjacent to the second insertion wall 115 on the collimation assembly 110 is provided with a second annular limiting groove 116, and the sealing element is arranged in the second annular limiting groove 116, and the sealing element and the homogenizing assembly 120 are homogenized The surface at the edge of channel 121 is an interference fit.

By inserting the second insertion wall 115 into the homogenization channel 121 , the alignment between the collimation component 110 and the homogenization component 120 during assembly is realized, and the alignment between the collimation channel 111 and the homogenization channel 121 is ensured. By interposing a sealing member between the collimating component 110 and the homogenizing component 120 , the sealing performance of the collimating channel 111 and the homogenizing channel 121 at the joint between the collimating component 110 and the homogenizing component 120 is ensured.

For the detachable connection structures and sealing structures between the homogenization assembly 120 and the light splitting assembly 140, between the light splitting assembly 140 and the focusing assembly 130, between the light splitting assembly 140 and the reflection assembly 150, and between the reflection assembly 150 and the temperature control assembly 160 , can be set to be the same as the connection structure between the above-mentioned collimation component 110 and the homogenization component 120, or make adaptive adjustments according to the characteristics of the structure or shape of each component to form a connection method as shown in Figure 1, The specific connection structure will not be repeated here.

In order to realize the adjustment of the spot size formed on the workpiece, this application further proposes an embodiment, specifically, the homogenization assembly 120 includes a housing and a fixed homogenization mirror group, and the fixed homogenization mirror group is fixed in the housing. The fixed homogenizing mirror group is used to homogenize the light beam in the homogenizing channel. The focusing assembly 130 includes a housing and a zoom lens. The zoom lens is used to change the size of the spot focused on the workpiece by adjusting the focal length.

By adjusting the focal length of the zoom lens, the spot size can be adjusted to the size requirement of the target spot. However, it should be noted that after adjusting the focal length of the zoom lens, in order to ensure the accuracy of the spot size, it is necessary to change the distance between the zoom lens and the workpiece accordingly. The distance between them to ensure that the spot size focused on the surface of the workpiece is accurate and reliable.

In order to flexibly adjust the size of the light spot formed on the workpiece, the present application also proposes an implementation manner, please refer to FIG. 8 for details, which shows a perspective structure of the homogenization assembly 120 . As shown in the figure, the homogenization assembly 120 includes a casing 123 and a first homogenization mirror group 124 , and the first homogenization mirror group 124 is disposed in the casing 123 . The first homogenizing mirror group 124 includes a first micro-cylindrical array 1241 and a second micro-cylindrical array 1242, the plane directions of the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 are the first direction, the second One direction is perpendicular to the axial direction of the homogenization channel 121 . At least one of the first microcylindrical array 1241 and the second microcylindrical array 1242 is slidably connected with the housing 123 along the axial direction of the homogenization passage 121, so that the first microcylindrical array 1241 and the second microcylindrical array 1242 When moving relative to each other, the spot size of the light beam focused on the workpiece in the first direction is changed.

It should be noted that the axial direction of the homogenization channel 121 is the direction shown by the z-axis in FIG. 8, and the first direction can be the direction shown by the x-axis in FIG. vertical direction.

The first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 are micro-lenses with a plurality of convex columns arranged along the surface direction. FIG. 8 only shows the schematic structures of the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 .

Specifically, the length of the light spot formed on the workpiece in the first direction L=tanθ·f _F , where θ is the divergence angle of the beam, and f _F is the focal length of the focusing lens in the focusing assembly 130 . And tanθ=h/2f', wherein h is the height of the first microcylindrical array 1241 and the second microcylindrical array 1242, and f' is the combined focal length of the first microcylindrical array 1241 and the second microcylindrical array 1242 . When the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 slide relative to each other, the distance d between them changes, so that f' changes. Since tanθ=h/2f', when h is constant, θ changes with the change of f'. Since L=tanθ·f _F , when θ changes, L also changes accordingly.

It can also be understood that the numerical aperture NA of an optical system is a dimensionless number used to measure the angular range of light that the optical system can collect. The numerical aperture describes the size of the light-receiving cone angle of the lens, and the size of the light-receiving cone angle determines the light-receiving ability and spatial resolution of the lens. NA=sinθ·n, where n is the refractive index of the lens, θ is the same as above, and is the divergence angle of the beam. When θ changes, NA changes accordingly. Therefore, in essence, changing the size of the light spot in the first direction means changing the numerical aperture NA in the first direction.

Taking the spot formed on the workpiece as a rectangular spot as an example, when the distance between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 changes, under the condition that the focal length remains unchanged, the processing at the same distance The size of the rectangular light spot formed on the component in the first direction (the length or width direction of the rectangular light spot) changes accordingly.

By setting the plane directions of the first micro cylinder array 1241 and the second micro cylinder array 1242 as the first direction, and sliding at least one of the first micro cylinder array 1241 and the second micro cylinder array 1242 It is arranged in the housing 123 so that when the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 slide relative to each other, that is, the distance between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 changes , the size of the light spot formed on the workpiece in the first direction changes, so that for laser welding application scenarios, the size of the processing area can be controlled more precisely without changing the distance between the workpiece and the focusing assembly 130 .

Regarding the adjustment structure of the distance between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242, the present application further proposes an implementation mode, please continue to refer to Fig. 8 for details, as shown in the figure, the first homogenizing mirror The group 124 also includes a distance adjustment member 1243, the distance adjustment member 1243 penetrates the housing 123 and is connected to the first micro-cylindrical array 1241 inside, the part of the distance adjustment member 1243 located outside the housing 123 is provided with a force application part 1244, and the force application The part 1244 drives the first micro-cylindrical array 1241 to move along the axial direction of the homogenization channel 121 (the direction indicated by the z-axis in FIG. 8 ) through the distance adjusting member 1243 .

In the specific embodiment shown in Fig. 8, the distance adjusting part 1243 is a screw rod, the distance adjusting part 1243 is rotatably connected with the housing 123, and the distance adjusting part 1243 is also threadedly connected with the first micro-cylindrical array 1241 to form a screw die. Group. The force application part 1244 is a knob, and the distance adjustment part 1243 is driven to rotate by turning the force application part 1244 by hand. When the distance adjustment part 1243 rotates, the first micro cylinder array 1241 is driven by the thread cooperation with the first micro cylinder array 1241. Moving along the direction shown by the z-axis realizes the adjustment of the distance between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 .

It can be understood that FIG. 8 is only a specific adjustment structure provided by the embodiment of the present application. In some other embodiments, the distance adjustment member 1243 can also be a screw threaded with the first micro-cylindrical array 1241, and The force application part 1244 can be a motor, so that the distance adjustment member 1243 is driven to rotate by the motor to realize the automatic adjustment of the distance between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 . In some other embodiments, the distance adjusting member 1243 can also be a sliding rod that is slidably connected to the housing 123 along the axial direction of the homogenization channel 121, while the sliding rod is fixedly connected to the first microcylindrical array 1241 in the housing 123 When the force-applying part 1244 drives the slide bar to slide along the axial direction of the homogenization channel 121, the first micro-cylindrical array 1241 moves accordingly, thereby realizing the gap between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242. distance adjustment. Further, the joint between the slide bar and the housing 123 can be provided with a locking structure or a locking structure. When the first micro-cylindrical array 1241 is adjusted to a desired position, the locking structure or the locking structure can be used to lock the The sliding bar and the housing 123 are fixed to each other, so that the sliding bar will not slide easily, ensuring the accuracy of the position of the first micro-cylindrical array 1241 .

By setting the distance adjustment member 1243 through the housing 123, the distance adjustment member 1243 is internally connected to the first micro-cylindrical array 1241, and the part of the distance adjustment member 1243 located outside the housing 123 is provided with a force applying part 1244, thereby The distance between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 can be conveniently adjusted through the force application part 1244 and the distance adjustment member 1243, so as to realize online adjustment of the spot size in the first direction, and during the adjustment process The size of the middle spot in the first direction changes continuously, so it can be adjusted to any size and then stop.

Further, in some embodiments, the homogenization assembly 120 further includes a second homogenization mirror group (not shown in the figure), and the second homogenization mirror group and the first homogenization mirror group 124 are arranged along the axial direction of the homogenization channel 121 Set in the casing 123 . The second homogenizing mirror group comprises the 3rd micro-cylindrical array and the 4th micro-cylindrical array, the surface direction of the 3rd micro-cylindrical array and the 4th micro-cylindrical array is the second direction, the second direction is the same as the homogenization The axial direction and the first direction of the channel 121 are both vertical. At least one of the third micro-cylindrical array and the fourth micro-cylindrical array is slidably connected with the housing 123 along the axial direction of the homogenization channel 121, so that relative movement between the third micro-cylindrical array and the fourth micro-cylindrical array When , the spot size of the light beam focused on the workpiece in the second direction is changed.

It should be noted that if the first direction is the direction shown by the x-axis in FIG. 8, then the second direction is a direction perpendicular to both the x-axis and the z-axis; is a direction perpendicular to both the x-axis and the z-axis.

It can be understood that the third micro-cylindrical array and the fourth micro-cylindrical array in the second homogenizing mirror group are different from the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 in the first homogenizing mirror group 124 except Except for the different surface directions, the structures of other parts can be the same, and the adjustment principle is also the same, except that the first homogenizing mirror group 124 adjusts the size of the light spot in the first direction, and the second homogenizing mirror group adjusts the size of the light spot in the second direction. The size in the direction, so the specific implementation of the second homogenizing mirror group will not be repeated here.

The first homogenizing mirror group 124 adjusts the size of the light spot in the first direction, combined with the second homogenizing mirror group to adjust the size of the light spot in the second direction, the size of the light spot can be controlled more flexibly, for example, for a rectangular light spot, you can Accurately adjust the aspect ratio of the light spot.

Due to the existence of the first homogenizing mirror group 124 , affected by the diffraction of light, there are sharp peaks at both ends of the light spot output by the light spot shaping device 100 . Specifically, due to the effect of diffraction, there are diffraction peaks at both ends of the light spot passing through each microchannel between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 , and the peaks at both ends of the light spot will be larger after superposition.

Based on the above problems, in order to eliminate the peaks at both ends of the spot, the present application further proposes an implementation manner, please refer to FIG. 9 for details, which shows the structures of the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 . As shown in the figure, the first micro-cylindrical array 1241 is rotated and arranged in the homogenization channel 121 along the axis of the homogenization channel (z-axis in the figure), and the first micro-cylindrical array 1241 is used to rotate relative to the second micro-column When the surface array 1242 rotates, the sharp peaks at both ends of the light spot passing through the microchannel between the first microcylindrical array 1241 and the second microcylindrical array 1242 are eliminated.

By rotating the first micro-cylindrical array 1241 along the axis of the homogenization channel 121 (that is, the optical axis), it is arranged in the homogenization channel 121, so that when the first micro-cylindrical array 1241 is rotated along the axis of the homogenization channel 121, the The light spot of each microchannel between the first micro-cylindrical array 1241 and the second micro-cylindrical array 1242 will change, so that the peaks at both ends of the superimposed light spot are reduced, and the uniformity of the light spot in the effective area is improved.

For the rotation structure of the first micro-cylindrical array 1241, this application further proposes an implementation mode, please refer to Figure 8 to Figure 9 for details, as shown in the figure, the outer periphery of the first micro-cylindrical array 1241 is provided with a mirror frame 12411, the second A micro-cylindrical array 1241 is rotatably connected to the mirror frame 12411 , and the mirror frame 12411 is slidably connected to the housing 123 .

Specifically, the first micro-cylindrical array 1241 can be rotatably connected to the mirror frame 12411 through a hole-axis fit.

By rotating the first micro-cylindrical array 1241 to the mirror frame 12411 , the rotation adjustment of the first micro-cylindrical array 1241 is realized, and the mirror frame 12411 protects the first micro-cylindrical array 1241 .

Further, please continue to refer to FIG. 9 , as shown in the figure, in some embodiments, the mirror frame 12411 and the first micro-cylindrical array 1241 are respectively provided with a first connection structure 12411a and a second connection structure 1241a on one side. A connection structure 12411a and a second connection structure 1241a are connected to each other through an elastic member 1245, and the mirror frame 12411 and the first micro-cylindrical array 1241 are respectively provided with a third connection structure 12411b and a fourth connection structure 1241b on the opposite side. The third connection structure 12411b and the fourth connection structure 1241b are connected to each other through the adjusting member 1246 . The adjusting member 1246 is used to adjust the distance between the third connection structure 12411b and the fourth connection structure 1241b, so that when the distance between the third connection structure 12411b and the fourth connection structure 1241b increases, the fourth connection structure 1241b drives the first The micro cylinder array 1241 rotates relative to the second micro cylinder array 1242 along the first rotation direction (the rotation direction indicated by the arrow a in the figure). The elastic member 1245 is in a stretched state, so that when the distance between the third connecting structure 12411b and the fourth connecting structure 1241b decreases, the elastic member 1245 shrinks and drives the first microcylindrical array 1241 to rotate along the second through the second connecting structure 1241a The rotation direction (the rotation direction indicated by the arrow b in the figure) is relative to the rotation of the second micro cylinder array 1242, and the second rotation direction is opposite to the first rotation direction.

Specifically, please refer to FIG. 10 , which shows the top view structure of the first micro-cylindrical array 1241 and the mirror frame 12411 . As shown in the figure, in an initial state, both ends of the elastic member 1245 are fixedly connected to the first connection structure 12411a and the second connection structure 1241a respectively, and the elastic member 1245 is in a stretched state. The adjustment member 1246 can be a screw rod, and the adjustment member 1246 passes through the third connection structure 12411b and is threadedly engaged with the fourth connection structure 1241b. At 1246, the threaded fit between the fourth connection structure 1241b and the adjustment member 1246 causes the distance between the fourth connection structure 1241b and the third connection structure 12411b to change, thereby causing the first micro cylinder array 1241 to rotate relative to the mirror frame 12411 , even if the first micro-cylindrical array 1241 rotates relative to the second micro-cylindrical array 1242 .

One side of the mirror frame 12411 and the first micro-cylindrical array 1241 is connected to each other by a stretched elastic member 1245, and the opposite side is connected to each other by an adjustment member 1246, so that the first micro-cylinder array can be easily adjusted by operating the adjustment member 1246 The rotation of the array 1241 realizes the online adjustment of the rotation of the first micro cylinder array 1241 .

In order to ensure the rotation accuracy of the first micro-cylindrical array 1241, this application further proposes an implementation mode. For details, please continue to refer to FIG. 9 and FIG. The cylindrical array 1241 is provided with an arc-shaped sliding hole 1241c, and the limit shaft 12411c is penetrated in the arc-shaped sliding hole 1241c and is slidably matched with the arc-shaped sliding hole 1241c to ensure that the first micro-cylindrical array 1241 moves along the homogenization channel 121 axis (the z-axis shown in the figure) to rotate.

Specifically, the center of the arc-shaped sliding hole 1241c is located on the optical axis, that is, on the axis of the homogenization channel 121, so that when the first micro-cylindrical array 1241 rotates, the distance between the arc-shaped sliding hole 1241c and the limiting shaft 12411c The limitation of sliding fit between the first micro cylinder array 1241 makes the rotation axis of the first micro cylinder array 1241 coincide with the optical axis, thereby ensuring the rotation accuracy of the first micro cylinder array 1241 and preventing the rotation axis of the first micro cylinder array 1241 from shifting And affect the effect of beam homogenization.

In order to ensure the stability of the structure of the first micro-cylindrical array 1241, the present application further proposes an implementation mode, please refer to Fig. 9 and Fig. 10 again for details. The structure 12411d, the abutting structure 12411d abuts against the arc-shaped sliding hole 1241c to limit the movement of the first micro cylinder array 1241 along the axial direction of the homogenization channel 121 .

Specifically, the abutment structure 12411d can be the end portion with an enlarged cross-sectional area on the limiting shaft 12411c, or a gasket clamped between the end portion of the limiting shaft 12411c and the surface of the arc-shaped sliding hole 1241c .

By abutting the abutting structure 12411d at the end of the limiting shaft 12411c against the arc-shaped sliding hole 1241c, the first micro-cylindrical array 1241 is relatively fixed to the mirror frame 12411 in the axial direction of the homogenizing channel 121, thereby ensuring that the second The structure stability and position accuracy of a micro cylinder array 1241 ensure the homogenization effect on the light beam.

When eliminating the peaks at both ends of the light spot by rotating the first micro-cylindrical array 1241, it is generally only necessary to fine-tune the first micro-cylindrical array 1241. Therefore, in order to adjust the first micro-cylindrical array 1241 excessively, the present application further proposes a Embodiment, please continue to refer to Fig. 9 and Fig. 10 for details, as shown in the figure, the inner edge of the mirror frame 12411 is provided with a limiting groove 12411e, and the outer edge of the first micro-cylindrical array 1241 is provided with a protrusion 1241e, and the protrusion 1241e is located at In the limiting groove 12411e, the two opposite inner walls of the limiting groove 12411e along the circumferential direction (rotation direction of the first microcylindrical array 1241) are used to abut against the protrusion 1241e to limit the rotation of the first microcylindrical array 1241 Maximum stroke.

The limit groove 12411e on the inner edge of the mirror frame 12411 cooperates with the protrusion 1241e on the outer edge of the first micro cylinder array 1241, so that the maximum size of the limit groove 12411e along the circumferential direction determines the maximum rotation angle of the first micro cylinder array 1241 , so that the problem of excessive regulation of the first micro cylinder array 1241 can be effectively prevented. For example, when the adjustment member 1246 is loosened, the elastic member 1245 will drive the first micro-cylindrical array 1241 to rotate greatly during the process of shrinking and restoring deformation. The limitation of 1241e can effectively prevent the first micro-cylindrical array 1241 from greatly rotating, thereby avoiding the impact on the precision of the first homogenizing mirror group 124 .

It can be understood that, the foregoing embodiments for eliminating spikes and ensuring accuracy of the first homogenizing mirror group 124 are also applicable to the second homogenizing mirror group.

According to another aspect of the embodiment of the present application, a laser processing device is provided. For details, please refer to FIG. 11 , which shows the structure of a laser processing device 10 . As shown in the figure, the laser processing equipment 10 includes a light source device 200, a working platform 300 and the spot shaping device 100 in any of the above-mentioned embodiments. The light source device 200 is arranged in alignment with the collimating assembly 110, the light source device 200 is used to generate light beams and input them into the collimation channel 111, the working platform 300 is used to place the workpiece 20, and the focusing assembly 130 is used to focus the light beams in the focusing channel 131 onto the workpiece 20 to process the workpiece 20.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and are not intended to limit it; although the application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: It is still possible to modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the technical solutions of the various embodiments of the present application. All of them should be covered by the scope of the claims and description of the present application. In particular, as long as there is no structural conflict, the technical features mentioned in the various embodiments can be combined in any manner. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims (15)

1. A spot shaping apparatus, comprising:

the collimating component is internally provided with a collimating channel, one end of the collimating channel is used for allowing light beams to enter, and the collimating component is used for collimating the light beams in the collimating channel;

The homogenizing component is detachably connected with the collimating component, the homogenizing component is positioned at the other end of the collimating channel, a homogenizing channel is arranged in the homogenizing component, the homogenizing channel is used for allowing the collimated light beam to enter from the other end of the collimating channel, and the homogenizing component is used for homogenizing the light beam in the homogenizing channel;

the focusing assembly is detachably connected with one end of the homogenizing assembly, which is away from the collimating assembly, a focusing channel is arranged in the focusing assembly, the focusing channel is used for allowing a homogenized light beam to enter from one end of the homogenizing channel, which is away from the collimating assembly, and the focusing assembly is used for focusing the light beam in the focusing channel onto a workpiece.

2. The spot shaping device according to claim 1, characterized in that the spot shaping device further comprises:

the beam splitting assembly is detachably connected between the homogenizing assembly and the focusing assembly, a beam splitting channel is arranged in the beam splitting assembly, a beam splitting opening is formed in the side wall of the beam splitting assembly, the beam splitting assembly is used for transmitting a light beam entering from the homogenizing channel in the beam splitting channel into the focusing channel, and the beam splitting assembly is also used for reflecting and passing through the beam splitting opening, wherein the light beam is radiated by the workpiece and enters the beam splitting channel from the focusing channel;

The reflection assembly is detachably connected to the light splitting assembly, the reflection assembly is covered on the outer side of the light splitting opening, a reflection channel is arranged in the reflection assembly, a light beam outlet is formed in one end of the reflection channel, and the reflection assembly is used for reflecting a light beam entering the reflection channel from the light splitting opening and passing through the light beam outlet;

the temperature control assembly is detachably connected to the reflecting assembly, is arranged on the outer side of the light beam outlet and is used for measuring the temperature of a light beam passing through the light beam outlet.

3. The spot shaping device according to claim 1, further comprising a switching assembly detachably connected to an end of the collimating assembly facing away from the homogenizing assembly, the switching assembly being adapted to be connected to a light source device generating a light beam.

4. The spot shaping device according to claim 1, wherein one of the opposite ends between the collimating assembly and the homogenizing assembly and/or between the homogenizing assembly and the focusing assembly is provided with a connecting portion, and the other is provided with a mating portion, and the connecting portion and the mating portion are fixedly connected to each other by a fastener.

5. Spot shaping device according to claim 1, characterized in that a sealing member is sandwiched between the collimator assembly and the homogenizing assembly and/or between the homogenizing assembly and the focusing assembly, the sealing member being adapted to seal a gap between the collimator channel and the homogenizing channel and/or a gap between the homogenizing channel and the focusing channel.

6. The spot shaping device according to any one of claims 1-5, wherein the homogenizing assembly comprises a housing and a fixed homogenizing lens group fixed in the housing, the fixed homogenizing lens group being adapted to homogenize the light beam in the homogenizing channel;

the focus assembly includes a housing and a zoom lens for varying the size of a spot focused onto a work piece by adjusting a focal length.

7. The spot shaping device according to any one of claims 1-5, wherein the homogenizing assembly comprises a housing and a first homogenizing lens group disposed within the housing;

the first homogenizing lens group comprises a first micro-cylindrical array and a second micro-cylindrical array, the surface type directions of the first micro-cylindrical array and the second micro-cylindrical array are all first directions, and the first directions are perpendicular to the axial direction of the homogenizing channel;

And at least one of the first micro-cylindrical array and the second micro-cylindrical array is in sliding connection with the shell along the axial direction of the homogenizing channel, so that the light spot size of the light beam focused on the workpiece in the first direction is changed when the first micro-cylindrical array and the second micro-cylindrical array relatively move.

8. The spot shaping device according to claim 7, wherein the first homogenizing lens group further comprises a distance adjusting member penetrating through the housing and connected to the first micro-cylindrical array internally, and a force applying portion is provided at a portion of the distance adjusting member located outside the housing, the force applying portion being configured to drive the first micro-cylindrical array to move along an axial direction of the homogenizing channel by the distance adjusting member.

9. The spot shaping device according to claim 7, wherein the homogenizing assembly further comprises a second homogenizing lens group disposed within the housing in an axial alignment of the homogenizing channel with the first homogenizing lens group;

the second homogenizing lens group comprises a third micro-cylindrical array and a fourth micro-cylindrical array, the surface type directions of the third micro-cylindrical array and the fourth micro-cylindrical array are both second directions, and the second directions are perpendicular to the axial direction of the homogenizing channel and the first directions;

And at least one of the third micro-cylindrical array and the fourth micro-cylindrical array is in sliding connection with the shell along the axial direction of the homogenizing channel, so that the light spot size of the light beam focused on the workpiece in the second direction is changed when the third micro-cylindrical array and the fourth micro-cylindrical array relatively move.

10. The spot shaping device of claim 7 wherein the first micro-cylindrical array is rotatably disposed within the homogenizing channel along an axis of the homogenizing channel, the first micro-cylindrical array configured to eliminate spikes across a spot passing through a micro-channel between the first micro-cylindrical array and the second micro-cylindrical array when rotated relative to the second micro-cylindrical array.

11. The spot shaping device according to claim 10, wherein a mirror frame is provided on an outer periphery of the first micro-cylindrical array, the first micro-cylindrical array being rotatably connected to the mirror frame, the mirror frame being slidably connected to the housing.

12. The spot shaping device according to claim 11, wherein the mirror frame and the first micro-cylindrical array are provided with a first connection structure and a second connection structure, respectively, on one side, the first connection structure and the second connection structure being connected to each other by an elastic member, and the mirror frame and the first micro-cylindrical array are provided with a third connection structure and a fourth connection structure, respectively, on the opposite side, the third connection structure and the fourth connection structure being connected to each other by an adjustment member;

The adjusting piece is used for adjusting the distance between the third connecting structure and the fourth connecting structure, so that when the distance between the third connecting structure and the fourth connecting structure is increased, the fourth connecting structure drives the first micro-cylindrical surface array to rotate relative to the second micro-cylindrical surface array along a first rotation direction; when the elastic piece is in a stretching state and the distance between the third connecting structure and the fourth connecting structure is reduced, the elastic piece contracts and drives the first micro-cylindrical array to rotate relative to the second micro-cylindrical array along a second rotating direction through the second connecting structure, and the second rotating direction is opposite to the first rotating direction.

13. The spot shaping device as set forth in claim 12 wherein the mirror frame is provided with a limiting shaft, the first micro-cylindrical array is provided with an arc-shaped sliding hole, and the limiting shaft is disposed in the arc-shaped sliding hole in a penetrating manner and is in sliding fit with the arc-shaped sliding hole, so as to ensure that the first micro-cylindrical array rotates along the axis of the homogenizing channel.

14. The spot shaping device according to claim 12, wherein the inner edge of the mirror frame is provided with a limit groove, the outer edge of the first micro-cylindrical array is provided with a protrusion, the protrusion is located in the limit groove, and two circumferentially opposite inner walls of the limit groove are used for abutting against the protrusion to limit the maximum rotation stroke of the first micro-cylindrical array.

15. A laser processing apparatus comprising a light source device arranged in alignment with the collimation assembly, a work platform for generating a light beam for input into the collimation channel, and a spot shaping device according to any one of claims 1-14, the work platform for placing a work piece, and a focusing assembly for focusing the light beam in the focusing channel onto the work piece for processing the work piece.

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