CN116009266A - Pulse stretching unit assembling and adjusting device - Google Patents
Pulse stretching unit assembling and adjusting device Download PDFInfo
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- CN116009266A CN116009266A CN202111231047.5A CN202111231047A CN116009266A CN 116009266 A CN116009266 A CN 116009266A CN 202111231047 A CN202111231047 A CN 202111231047A CN 116009266 A CN116009266 A CN 116009266A
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Abstract
The application discloses a device is transferred to pulse width unit's dress, include: a visible light source device, a pulse stretching unit, a phase delay element, a linear polarizer and a reticle; the pulse stretching unit comprises a beam splitting element and a reflecting mirror group; the output light beam output by the visible light source device is incident to the beam splitting element; the beam splitting element splits the received output beam into a first reflected beam and a transmitted beam; the first reflected light beam is incident to the emergent surface of the beam splitting element after passing through the reflecting lens group, and is irradiated to the reticle together with the transmitted light beam after being reflected by the emergent surface; the linear polaroid is arranged in the light path of the emergent transmitted light beam, and the included angle between the light transmission direction and the polarization direction of the transmitted light beam transmitted by the beam splitting element meets the following conditions: eliminating part of the energy of the transmitted beam; the phase delay element is arranged in the light path before the first reflected light beam enters the emergent face of the beam splitting element and is used for rotating the polarization direction of the first reflected light beam by the same angle as the included angle.
Description
Technical Field
The application relates to the technical field of optics, in particular to an adjusting device of a pulse stretching unit.
Background
ArF excimer lasers are widely used in the field of integrated circuit fabrication. Excimer lasers require the generation of deep ultraviolet laser radiation by means of gas high-voltage discharges, limited by the glow discharge time, the laser pulse width generated by the discharge chamber being approximately 10ns. In order to ensure that the light source realizes good transmission after the energy method process, reduce the photoinduced damage of various optical elements in the subsequent transmission process, improve the service life of the optical elements, and need to broaden laser pulses from a time domain through a laser pulse broadening device so as to reduce the peak power density of laser irradiation. The principle of the pulse stretching unit for realizing pulse stretching is a multi-mirror mutual coupling imaging laser delay mechanism. The pulse stretching unit comprises a plurality of reflectors. The pulse stretcher units currently provided with excimer lasers for immersion lithography typically require 12 mirrors or more. These mirrors need to be precisely mounted in the designated locations to form precise delay paths so that the laser beams can precisely coincide when they reach the pulse stretcher exit.
The pulse stretching unit of the excimer laser is very difficult to adjust. The main reasons for the difficulty in adjustment are as follows: 1. the pulse stretching unit equipped with the excimer laser has a reflecting mirror film with high reflectivity for 193nm wave band, the reflectivity of the light beam in the visible wave band is between 4 and 10 percent, if the light beam is directly modulated by a common modulating instrument (such as a visible light collimator) in the visible wave band, the intensity of the light beam directly transmitted by the beam splitter can be too much stronger than the light beam output after passing through the reflecting mirror, so that the light beam cannot be modulated by the common modulating instrument (such as the visible light collimator) in the visible wave band. 2. The pulse stretching unit equipped with the excimer laser has a large number of reflectors and long optical path, so that the requirement on the positioning precision of the reflectors is high, and the positions of the reflectors cannot be directly determined by utilizing the machining precision.
The current common method for adjusting the pulse stretching unit of the excimer laser is to use a deep ultraviolet collimator and a deep ultraviolet autocollimator for adjusting, and the deep ultraviolet collimator and the deep ultraviolet autocollimator have no commercial products, so that the research and development difficulty is high and the research and development cost is high.
Disclosure of Invention
The application provides a pulse stretching unit adjusting device, which is used for solving the problem that the pulse stretching unit of the excimer laser in the prior art is difficult to adjust.
The application provides a device is transferred to pulse width unit, includes: a visible light source device, a pulse stretching unit, a phase delay element, a linear polarizer and a reticle;
the pulse stretching unit comprises a beam splitting element and a reflecting mirror group;
the output light beam output by the visible light source device is incident to the beam splitting element; the beam splitting element splits the received output beam into a first reflected beam and a transmitted beam; the first reflected light beam is incident to the emergent surface of the beam splitting element after passing through the reflecting lens group, and is irradiated to the reticle together with the transmitted light beam after being reflected by the emergent surface;
the linear polaroid is arranged in the light path of the transmitted light beam, and the included angle between the light transmission direction and the polarization direction of the transmitted light beam transmitted by the beam splitting element meets the following conditions: eliminating part of the energy of the transmitted beam;
the phase delay element is arranged in an optical path before the first reflected light beam enters the emergent face of the beam splitting element and is used for rotating the polarization direction of the first reflected light beam by the same angle as the included angle.
As one embodiment, the visible light source device is arranged on a cavity of the pulse stretching unit, and the cavity is a mechanical reference; the output light beam of the visible light source device is concentric with the inlet light path of the pulse widening unit.
As one embodiment, the visible light source device is a laser, and the wavelength of the output beam of the laser is in the visible light band range.
As one embodiment, the polarization direction of the laser is horizontal.
As one embodiment, the laser is a 532nm laser.
As one embodiment, the included angle between the light transmission direction and the polarization direction of the transmitted light beam transmitted from the beam splitting element is 90 degrees, and the phase retardation element is a half wave plate.
As an embodiment, the mirror group includes four mirrors: a first mirror, a second mirror, a third mirror, a fourth mirror; the phase delay element is arranged between the beam splitting element and the first reflecting mirror;
the first reflected light beam is incident to an emergent surface of the beam splitting element after passing through the reflecting lens group, is irradiated to the reticle together with the transmitted light beam after being reflected by the emergent surface, and comprises the following components:
the first reflected light beam is incident to the first reflector through the phase delay element, and is reflected by the first reflector, the second reflector and the third reflector in sequence and then is incident to the fourth reflector; the second reflected light beam formed by reflection of the fourth reflecting mirror is reflected by the emergent surface of the beam splitting element to form a third reflected light beam; the third reflected beam is co-incident with the transmitted beam onto the reticle.
As one embodiment, the mirror group includes an even number of mirrors.
As one embodiment, the mirror is a spherical mirror.
As one embodiment, the reticle is a ground glass reticle and the pattern is a checkerboard pattern.
Compared with the prior art, the application has the following advantages:
the application provides a device is transferred to pulse width unit, includes: a visible light source device, a pulse stretching unit, a phase delay element, a linear polarizer and a reticle; the pulse stretching unit comprises a beam splitting element and a reflecting mirror group; the output light beam output by the visible light source device is incident to the beam splitting element; the beam splitting element splits the received output beam into a first reflected beam and a transmitted beam; the first reflected light beam is incident to the emergent surface of the beam splitting element after passing through the reflecting lens group, and is irradiated to the reticle together with the transmitted light beam after being reflected by the emergent surface; the linear polaroid is arranged in the light path of the transmitted light beam, and the included angle between the light transmission direction and the polarization direction of the transmitted light beam transmitted by the beam splitting element meets the following conditions: part of the energy of the transmitted beam can be eliminated; the phase delay element is arranged in an optical path before the first reflected light beam enters the emergent face of the beam splitting element and is used for rotating the polarization direction of the first reflected light beam by the same angle as the included angle.
According to the adjusting device of the pulse stretching unit, which is provided by the application, for the problem that the reflectivity of the pulse stretching unit provided by the excimer laser to light emitted by a visible light source device (for example, an auxiliary laser) is low, the brightness difference of two light spots at the outlet of the pulse stretching unit provided by the excimer laser is overlarge, the polarization characteristic is utilized, the polarizer is set to be an included angle between the light transmission direction and the polarization direction of a transmitted light beam transmitted by a beam splitting element, so that part of energy of the transmitted light beam can be eliminated, the attenuation of the brighter transmitted light beam by the linear polarizer is realized, and meanwhile, the phase delay element is arranged in a light path before the first reflected light beam is incident on the emergent surface of the beam splitting element and used for rotating the polarization direction of the first reflected light beam by the same angle as the included angle, so that the reflected light beam is not attenuated, and the brightness value of the two paths of light reaching a reticle is close, and the pulse stretching unit can be adjusted by the visible light source device (for example, the auxiliary laser). The problem of the pulse widening unit that the excimer laser of prior art was equipped with to install and transfer difficultly is solved.
Drawings
Fig. 1 is a schematic diagram of an apparatus for adjusting a pulse stretching unit provided in the present application.
Fig. 2 is a schematic view of a reticle pattern according to a first embodiment of the present application.
Detailed Description
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may be embodied in many other forms than those herein described, and those skilled in the art will readily appreciate that the present invention may be similarly embodied without departing from the spirit or essential characteristics thereof, and therefore the present invention is not limited to the specific embodiments disclosed below.
A first embodiment of the present application provides a tuning device for a pulse stretching unit, as shown in fig. 1.
The pulse stretching unit is installed and adjusted the device includes: a visible light source device 1-1, a pulse widening unit, a phase delay element 1-3, a linear polarizer 1-4 and a reticle 1-5;
the pulse widening unit comprises beam splitting elements 1-2-1 and reflector groups 1-2-2;
the visible light source device 1-1 is arranged on a cavity of the pulse stretching unit, and the cavity is a mechanical reference; the output light beam of the visible light source device is concentric with the inlet light path of the pulse widening unit;
the output light beam output by the visible light source device 1-1 is incident on the beam splitting element 1-2-1; the beam splitting element 1-2-1 splits the received output beam into a first reflected beam and a transmitted beam; the first reflected light beam enters the emergent face of the beam splitting element 1-2-1 after passing through the reflecting lens group, and is irradiated to the reticle 1-5 together with the transmitted light beam after being reflected by the emergent face;
the linear polaroid 1-4 is arranged in the light path of the transmitted light beam, and the included angle between the light transmission direction and the polarization direction of the transmitted light beam transmitted by the beam splitting element meets the following conditions: eliminating part of the energy of the transmitted beam;
and a phase delay element 1-3 disposed in the optical path before the first reflected light beam is incident on the exit surface of the beam splitting element 1-2-1, for rotating the polarization direction of the first reflected light beam by the same angle as the aforementioned included angle.
The following describes the working principle of the tuning device of the pulse stretching unit provided in the first embodiment of the present application: the output light beam output by the visible light source device 1-1 is incident on the beam splitting element 1-2-1; the beam splitting element 1-2-1 splits the received output beam into a first reflected beam and a transmitted beam; the transmitted light beam reaches the linear polarizers 1 to 4, and part of energy of the transmitted light beam can be eliminated due to the included angle between the light transmission direction of the linear polarizers and the polarization direction of the transmitted light beam transmitted from the beam splitting element, so that part of energy of the transmitted light beam is eliminated after passing through the linear polarizers; the phase delay element 1-3 behind the beam splitting element 1-2-1 rotates the polarization direction of the first reflected light beam reflected by the beam splitting mirror by an angle between the light transmission direction of the linear polarizer and the polarization direction of the transmitted light beam transmitted by the beam splitting element, so that the energy of the reflected light beam after passing through the linear polarizer is not attenuated; since the transmitted beam removes some of the energy through the linear polarizer and the reflected beam does not attenuate the energy of the light after passing through the polarizer, the brightness values of the two light paths reaching the reticle can be approximated, and the pulse stretching unit can be tuned using a visible light source device (e.g., an auxiliary laser).
Because the pulse stretching unit is assembled and regulated by the deep ultraviolet collimator and the deep ultraviolet autocollimator at present, no commercial product exists in the deep ultraviolet collimator and the deep ultraviolet autocollimator, the research and development difficulty is high, the research and development cost is high, in practical application, an auxiliary visible light source device (such as an auxiliary laser) can be considered for assembling and regulating, but the light power reaching the outlet of the pulse stretching unit arranged by the excimer laser through the beam splitter is far greater than the light power reflected by the beam splitter and reaching the outlet of the pulse stretching unit arranged by the excimer laser through the reflector, so that the brightness values of two light spots at the outlet of the pulse stretching unit arranged by the excimer laser are too great to exceed the observation range of human eyes, and the visible light source device cannot be directly used in assembling and regulating the pulse stretching unit arranged by the excimer laser.
Compared with the prior art, according to the first embodiment of the application, aiming at the problem that the reflectivity of the pulse widening unit equipped with the excimer laser to the light emitted by the visible light source device (for example, the auxiliary laser) is low, the brightness difference of two light spots at the outlet of the pulse widening unit equipped with the excimer laser is overlarge, the polarization characteristics are utilized, the polarizer is set to be the included angle between the light transmission direction and the polarization direction of the transmitted light beam transmitted by the beam splitting element so as to meet the condition of eliminating part of energy of the transmitted light beam, the attenuation of the brighter transmitted light beam by the linear polarizer is realized, and meanwhile, the phase delay element is arranged in the light path before the first reflected light beam is incident on the emergent surface of the beam splitting element and is used for rotating the polarization direction of the first reflected light beam by the same angle as the included angle, so that the reflected light beam is not attenuated, and the brightness value of the two light paths reaches the reticle is close, and the visible light source device (for example, the auxiliary laser) can be used for carrying out the adjustment on the pulse widening unit.
As an embodiment, the visible light source device may be a laser, and the wavelength of the output beam of the laser is in the visible light band. The polarization direction of the laser may be horizontal.
The laser can be 532nm laser, or other wavelength lasers can be selected.
As one embodiment, the angle between the light transmission direction and the polarization direction of the transmitted beam transmitted from the beam splitting element is 90 degrees, and the phase retardation element is a half wave plate.
The included angle between the light transmission direction of the linear polarizer and the polarization direction of the transmitted light beam transmitted from the beam splitter may be other angles, so long as the energy of the two light beams (transmitted light beam and reflected light beam) reaching the reticle is close to the energy of the transmitted light beam. The phase delay element may also be another single element or a combination of elements that can achieve rotation of the polarization direction of the first reflected light beam by a certain angle (the degree of the included angle of the transmission direction of the linear polarizer and the polarization direction of the transmitted light beam transmitted from the beam splitting element).
As one embodiment, the mirror group includes an even number of mirrors. For example, the mirror group includes 4 or 6 mirrors.
As an embodiment, a spherical mirror may be used as the mirror.
As one embodiment, the mirror group includes four mirrors: a first mirror, a second mirror, a third mirror, a fourth mirror; the phase delay element is arranged between the beam splitting element and the first reflecting mirror;
the first reflected light beam is incident to the emergent face of the beam splitting element after passing through the reflecting lens group, and is irradiated to the reticle together with the transmitted light beam after being reflected by the emergent face, and the method comprises the following steps:
the first reflected light beam is incident to the first reflector through the phase delay element, and is reflected by the first reflector, the second reflector and the third reflector in sequence and then is incident to the fourth reflector; the second reflected light beam formed by reflection of the fourth reflector is reflected by the emergent surface of the beam splitting element to form a third reflected light beam; the third reflected beam is irradiated onto the reticle together with the transmitted beam.
As shown in fig. 1, the mirror group includes four mirrors: a first reflector 1-2-2-1, a second reflector 1-2-2-2, a third reflector 1-2-2-3, and a fourth reflector 1-2-2-4; the phase delay element 1-3 is arranged between the beam splitting element 1-2-1 and the first reflecting mirror 1-2-2-1; the first reflected light beam is incident to the first reflecting mirror through the phase delay element 1-3, is reflected by the first reflecting mirror 1-2-2-1, the second reflecting mirror 1-2-2-2 and the third reflecting mirror 1-2-2-3 in sequence and then is incident to the fourth reflecting mirror 1-2-2-4; the second reflected light beam formed by reflection of the fourth reflector 1-2-2-4 is reflected by the emergent surface of the beam splitting element 1-2-1 to form a third reflected light beam; the third reflected beam is irradiated onto the reticle 1-5 together with the transmitted beam.
For convenience of adjustment, a phase delay element may be disposed between the beam splitting element 1-2-1 and the first mirror 1-2-2-1, and in a specific implementation, the phase delay element may be disposed between the first mirror and the second mirror, between the second mirror and the third mirror, between the third mirror and the fourth mirror, or between the fourth mirror and the beam splitting element.
The reticle may be a ground glass reticle with a checkerboard pattern. The pattern can be designed according to the requirements.
The following describes a specific scheme and basic principle of a pulse stretcher unit tuning device equipped with an excimer laser. As shown in fig. 1. The cavity of the pulse widening unit equipped with the excimer laser is used as a mechanical reference, the auxiliary laser used for adjustment is a 532nm laser, and the polarization degree is 10000:1. The polarization direction is the horizontal direction. The 532nm laser is mounted on a mechanical reference, and the output beam of the 532nm laser 1-1 is concentric with the input optical path of the pulse widening unit 1-2. A half wave plate 1-3 is arranged behind the beam splitter 1-2-1, and the function is to rotate the polarization direction of the reflected light beam reflected by the beam splitter by 90 degrees. A linear polaroid 1-4 is placed in front of a frosted glass reticle 1-5, and the extinction ratio is 100000:1. The light transmission direction of the linear polarizer is perpendicular to the polarization direction of the transmitted light beam transmitted from the beam splitter, so as to block most of the transmitted light beam of the beam splitter. At the exit of the pulse stretching unit, frosted glass reticles 1-5 are mounted, the pattern on the frosted glass reticles being a checkerboard pattern, as shown in fig. 2. The width of each cell was 1mm.
In this embodiment, the optical power of the 532nm laser is 10000mW. The reflectivity of the beam splitter 1-2-1 to 532nm laser is 20%, and the reflectivity of the reflector to 532nm laser is 20%, so that the light power of the transmitted light beam transmitted through the beam splitter reaching the reticle 1-5 is 0.88mW. The reflected light beam reflected by the beam splitter 1-2-1 reaches the reticle 1-5 with an optical power of 0.64mW. It can be seen that the optical power of the two is close, as is the brightness on the reticle. The first reflecting mirror, the second reflecting mirror, the third reflecting mirror and the fourth reflecting mirror are adjusted, the light spots of the reflected light of the beam splitter are adjusted to be overlapped with the light spots of the transmitted light of the beam splitter, namely, two light spots are seen to be overlapped on the reticle, and at the moment, the pulse widening unit equipped with the excimer laser is adjusted.
For the tuning device of the pulse stretching unit shown in fig. 1, a specific tuning procedure may include the following steps:
(1) The 532nm laser 1-1 was mounted on a mechanical reference, and the polarization direction of the output laser light was horizontal.
(2) And installing the beam splitter 1-2-1 on the lens base for fastening.
(3) The first mirror 1-2-2-1 is mounted.
(4) The half wave plates 1-3 are mounted.
(5) The 532nm laser is turned on and the laser is preheated to be stable.
(6) The first mirror 1-2-2-1 was adjusted so that 532nm laser light was irradiated to the center of the first mirror.
(7) The second reflector 1-2-2-2 is installed, and the first reflector 1-2-2-1 is adjusted to irradiate 532nm laser to the center of the second reflector.
(8) The third reflecting mirror 1-2-2-3 is installed, and the second reflecting mirror 1-2-2 is adjusted to irradiate 532nm laser to the center of the third reflecting mirror.
(9) The fourth reflector 1-2-2-4 is installed, and the third reflector 1-2-2-3 is adjusted to irradiate 532nm laser to the center of the fourth reflector.
(10) And installing ground glass reticles 1-5.
(11) The linear polarizers 1 to 4 are installed.
(12) The linear polarizers 1 to 4 are adjusted so that the brightness of the light spot passing through the beam splitter and irradiated onto the ground glass reticle is the weakest.
The first embodiment of the present application is described so far, and the adjustment device for a pulse stretching unit provided in the first embodiment of the present application is configured to solve the problem that, in response to a problem that a reflectance of a pulse stretching unit provided by an excimer laser to laser light of a visible light auxiliary laser is low, a difference in brightness between laser light at an exit of the pulse stretching unit provided by the excimer laser is too large, set a polarizer to have a light transmission direction and an included angle between a polarization direction of a transmitted beam transmitted from a beam splitting element to satisfy a requirement of eliminating a part of energy of the transmitted beam by using a polarization characteristic of the light, implement attenuation of a brighter transmitted beam by using a linear polarizer, and simultaneously set a phase delay element in an optical path before the first reflected beam is incident on an exit surface of the beam splitting element, for rotating the polarization direction of the first reflected beam by the same angle as the included angle, thereby realizing that the reflected beam is not attenuated, and that brightness values of the two paths of light reach a reticle are close, so that the pulse stretching unit can be adjusted by using a visible light source device (e.g., auxiliary laser); in addition, the visible light auxiliary laser is used, so that the cost is low compared with a deep ultraviolet collimator; compared with a deep ultraviolet collimator, the light spots of the two paths of light can be directly adjusted to coincide, and the precision is higher.
While the preferred embodiment has been described, it is not intended to limit the invention thereto, and any person skilled in the art may make variations and modifications without departing from the spirit and scope of the present invention, so that the scope of the present invention shall be defined by the claims of the present application.
Claims (10)
1. An apparatus for adjusting a pulse stretching unit, comprising: a visible light source device, a pulse stretching unit, a phase delay element, a linear polarizer and a reticle;
the pulse stretching unit comprises a beam splitting element and a reflecting mirror group;
the output light beam output by the visible light source device is incident to the beam splitting element; the beam splitting element splits the received output beam into a first reflected beam and a transmitted beam; the first reflected light beam is incident to the emergent surface of the beam splitting element after passing through the reflecting lens group, and is irradiated to the reticle together with the transmitted light beam after being reflected by the emergent surface;
the linear polaroid is arranged in the light path of the transmitted light beam, and the included angle between the light transmission direction and the polarization direction of the transmitted light beam transmitted by the beam splitting element meets the following conditions: eliminating part of the energy of the transmitted beam;
the phase delay element is arranged in an optical path before the first reflected light beam enters the emergent face of the beam splitting element and is used for rotating the polarization direction of the first reflected light beam by the same angle as the included angle.
2. The pulse stretching unit adjusting device according to claim 1, wherein the visible light source device is arranged on a cavity of the pulse stretching unit, and the cavity is a mechanical reference; the output light beam of the visible light source device is concentric with the inlet light path of the pulse widening unit.
3. The pulse stretching unit tuning apparatus of claim 2, wherein the visible light source device is a laser, and the wavelength of the output beam of the laser is in the visible light band.
4. The pulse stretching unit tuning apparatus of claim 2, wherein the polarization direction of the laser is horizontal.
5. The pulse stretcher unit tuning apparatus of claim 2, wherein the laser is a 532nm laser.
6. The pulse stretching unit adjusting device according to claim 1, wherein an included angle between the light transmission direction and the polarization direction of the transmitted light beam transmitted from the beam splitting element is 90 degrees, and the phase delay element is a half wave plate.
7. The pulse stretcher unit tuning device of claim 1, wherein the mirror group comprises four mirrors: a first mirror, a second mirror, a third mirror, a fourth mirror; the phase delay element is arranged between the beam splitting element and the first reflecting mirror;
the first reflected light beam is incident to an emergent surface of the beam splitting element after passing through the reflecting lens group, is irradiated to the reticle together with the transmitted light beam after being reflected by the emergent surface, and comprises the following components:
the first reflected light beam is incident to the first reflector through the phase delay element, and is reflected by the first reflector, the second reflector and the third reflector in sequence and then is incident to the fourth reflector; the second reflected light beam formed by reflection of the fourth reflecting mirror is reflected by the emergent surface of the beam splitting element to form a third reflected light beam; the third reflected beam is co-incident with the transmitted beam onto the reticle.
8. The pulse stretching unit tuning apparatus of claim 1, wherein the mirror group comprises an even number of mirrors.
9. The pulse stretcher unit tuning apparatus of claim 8, wherein the mirror is a spherical mirror.
10. The apparatus for tuning a pulse stretcher unit according to claim 1, wherein the reticle is a ground glass reticle and the pattern is a checkerboard pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111231047.5A CN116009266A (en) | 2021-10-22 | 2021-10-22 | Pulse stretching unit assembling and adjusting device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111231047.5A CN116009266A (en) | 2021-10-22 | 2021-10-22 | Pulse stretching unit assembling and adjusting device |
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| CN116009266A true CN116009266A (en) | 2023-04-25 |
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| CN202111231047.5A Pending CN116009266A (en) | 2021-10-22 | 2021-10-22 | Pulse stretching unit assembling and adjusting device |
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