CN115980928A - Optical switch and optical switch array - Google Patents
Optical switch and optical switch array Download PDFInfo
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- CN115980928A CN115980928A CN202310055419.6A CN202310055419A CN115980928A CN 115980928 A CN115980928 A CN 115980928A CN 202310055419 A CN202310055419 A CN 202310055419A CN 115980928 A CN115980928 A CN 115980928A
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Abstract
An optical switch and optical switch array comprising: the micro-mirror comprises an insulating layer, a supporting part, a micro-mirror, a first driving electrode, a second driving electrode and a third driving electrode; the micromirror is supported above the insulating layer through the supporting part for reflecting the light beam; the first driving electrode is arranged on the insulating layer and is positioned on one side of the micromirror; the second driving electrode is arranged on the micromirror, and the third driving electrode is arranged on the supporting part; the first driving electrode, the second driving electrode and the third driving electrode are matched with the driving micro-mirror to be in a deflection state; under the state that the first driving electrode is powered off and the second driving electrode and the third driving electrode are powered on, a horizontal balancing electrostatic force is formed between the second driving electrode and the third driving electrode, so that the micromirror is in a horizontal state; the optical switch is controlled to be on or off based on the deflection state or horizontal state of the micromirror. The optical switch needs a limit structure for limitation, the long-term stability of the optical switch is still guaranteed without being influenced by micro-structure abrasion and the like, and the manufacturing difficulty and cost can be obviously reduced without independently adopting the limit structure.
Description
Technical Field
The invention relates to the technical field of light beam control, in particular to an optical switch and an optical switch array.
Background
When the incident light spot array needs to output a specific pattern or realize scanning, the light switch array needs to be used for reflecting the incident light spot array, and the light spot array outputs a target pattern or a scanning function by controlling the reflection of the light switch unit at a specific position in the array.
The common technique is to form an array by using a flat capacitive optical switch, which pulls a micromirror to an electrode by driving the electrode in a specific direction and stops on a limit structure, and the consistency of the optical switch array is achieved by using the consistency of the limit structure.
As shown in fig. 1, 1 is a micromirror, 2 is a hidden member with a dotted line, which is a torsion structure, 3 is a support structure for raising a mirror surface and a torsion beam, and the micromirror 1, the torsion structure 2, and the support structure 3 are at the same potential; 4 is an electrode in the deflection direction of the micromirror, 5 is an electrode in the deflection direction of the other micromirror, when the electrodes 4 and 5 are applied with electric potentials independently, a potential difference is generated between the electrode and the electrode where the micromirror plate 1 is located, and the micromirror plate 1 generates deflection motion towards the electrode 4 or the electrode 5 due to the pull-down electrostatic force received by the electrode 4 or the electrode 5 and the torsion freedom of the torsion structure 2. And 6, a limit structure which has no potential or has the same potential with the micro mirror 1, the torsion structure 2 and the support structure 3 and blocks the micro mirror 1 from continuously deflecting when the micro mirror deflects to a specific angle towards one direction. When the optical switch array is normally used, the electrodes of the micro mirror 1, the torsion structure 2, the support structure 3, the electrodes 4, the electrodes 5 and the limit structures 6 are all arranged on the electrodes 7 and are insulated and isolated from each other, and the electrodes are guided to the back of the array by manufacturing conductive patterns and conductive through holes on the electrodes 7 so as to facilitate corresponding packaging with a control circuit. The optical switch is turned on by the micromirror 1 deflecting in the direction of the electrode 4 or 5 to the stop position, and turned off in the opposite direction.
In the prior art, digital array control is mainly realized by a flat capacitive micromirror, the array consistency is limited by the consistency of a limiting structure, but under the influence of long-term impact limiting, the loss of the limiting structure and the impact position of a mirror surface cannot ensure the consistency and the service life influence; in the manufacturing process, the existence of the limit structure and the high consistency thereof can also increase the cost and the manufacturing difficulty.
Disclosure of Invention
For the loss of solving the produced striking position because of limit structure in dull and stereotyped electric capacity photoswitch, influence life's problem, and limit structure's existence leads the big problem of the preparation degree of difficulty rather than high uniformity, the application provides a photoswitch and photoswitch array, guarantee photoswitch array uniformity under specific angle through mixing with broach and dull and stereotyped electric capacity drive mode, need not limit structure under this angle and restrict, do not receive influences such as micro-structure wearing and tearing still guarantee its long-term stability, adopt limit structure can obviously reduce the preparation degree of difficulty and cost simultaneously alone.
The technical scheme provided by the invention is as follows:
the present invention provides an optical switch, including: the micro-mirror comprises an insulating layer, a supporting part, a micro-mirror, a first driving electrode, a second driving electrode and a third driving electrode;
the micromirror is supported above the insulating layer through the supporting part for reflecting a light beam;
the first driving electrode is arranged on the insulating layer and is positioned on one side of the micromirror;
the second driving electrode is arranged on the micromirror, the third driving electrode is arranged on the supporting part, and the second driving electrode and the third driving electrode are respectively distributed symmetrically relative to the rotating shaft of the micromirror;
the first driving electrode, the second driving electrode and the third driving electrode are matched to drive the micromirror to be in a deflection state;
under the state that the first driving electrode is powered off and the second driving electrode and the third driving electrode are powered on, a horizontal balancing electrostatic force is formed between the second driving electrode and the third driving electrode, so that the micromirror is in a horizontal state;
controlling the on or off of the optical switch based on the deflection state or horizontal state of the micromirror.
Further preferably, the electrode structure of the second driving electrode and the electrode structure of the third driving electrode are matched with each other, and when the second driving electrode and the third driving electrode are energized by the matching, a horizontally balanced electrostatic force is formed between the second driving electrode and the third driving electrode.
Further preferably, the electrode structure of the second driving electrode and the electrode structure of the third driving electrode are in the same horizontal plane and are centrosymmetric with respect to the rotation axis of the micromirror, so that the electrostatic force formed is distributed symmetrically with respect to the micromirror center.
Further preferably, the electrode structure of the second driving electrode and the electrode structure of the third driving electrode are tooth structures alternately arranged on the micromirror and the supporting part.
Further preferably, the electrode structure of the second driving electrode and the electrode structure of the third driving electrode are planar comb tooth structures alternately arranged on the micromirror and the supporting portion.
Further preferably, the electrode structure of the second driving electrode and the electrode structure of the third driving electrode are comb tooth structures with tip portions, which are alternately arranged on the micromirror and the supporting portion.
Further preferably, the electrode structure of the second driving electrode and the electrode structure of the third driving electrode are concave-convex structures with matching concave-convex arranged on the micromirror and the supporting part.
Further preferably, the comb teeth of the electrode structure of the second driving electrode and the comb teeth of the electrode structure of the third driving electrode are staggered and equidistant.
Further preferably, the width of first driving electrode is less than 1/2 of the micromirror width, first driving electrode is close to the central point of micromirror puts and arranges in on the insulating layer, makes the micromirror orientation first driving electrode one side deflect and with during the insulating layer contact, the micromirror with first driving electrode non-contact.
The invention also provides an optical switch array which comprises a plurality of optical switches, wherein the optical switches are arranged in an array.
According to the optical switch and the optical switch array provided by the invention, the consistency of the optical switch array at a specific angle is ensured in a driving mode of mixing the comb teeth and the plate capacitor, the angle is not limited by a limit structure, the long-term stability of the optical switch array is still ensured without being influenced by micro-structure abrasion and the like, and meanwhile, the manufacturing difficulty and the cost are obviously reduced without independently adopting the limit structure.
Drawings
FIG. 1 is a schematic diagram of a conventional digital micromirror device using the principle of plate capacitance;
fig. 2 is a schematic structural diagram of an optical switch provided in the present application;
FIG. 3 is a cross-sectional view of FIG. 2;
FIG. 4 is a top view of FIG. 2;
FIG. 5 is a schematic view of the tooth-like engagement of the second driving electrode and the third driving electrode;
FIG. 6 is a schematic view showing the concave-convex matching of the second driving electrode and the third driving electrode;
fig. 7 is a side cross-sectional schematic view of fig. 2.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following description will be made with reference to the accompanying drawings. It is obvious that the drawings in the following description are only some examples of the invention, and that for a person skilled in the art, other drawings and embodiments can be derived from them without inventive effort.
A micromirror: the micro-mirror is deflected by micro-structure and electric driving mode.
An optical switch: the incident light irradiates the optical micro-mirror manufactured by a semiconductor process based on the micro-system structure, and when the optical micro-mirror deflects a specific angle, the emergent light can be emitted to a target position.
Plate capacitive optical switch: the micromirror and the driving electrode are both planar and have a vertical parallel spatial structure, and when the micromirror is driven, the electrostatic force caused by the potential difference between the micromirror and the lower electrode is mutually attracted, so that the micromirror is deflected to a specific angle.
Comb tooth structure photoswitch: comb teeth or comb-like tooth structures which are mutually staggered and not in contact exist between the micromirror and the driving electrode, the micromirror and the driving electrode are placed up and down, electrostatic force caused by the potential difference between the micromirror and the driving electrode is mutually attracted during driving, and the micromirror is deflected to a specific angle by controlling the potential difference.
The embodiment provides an optical switch, guarantees the uniformity of optical switch array under specific angle through mixing with broach and dull and stereotyped capacitor drive mode, need not limit structure under this angle and limits, does not receive influences such as micro-structure wearing and tearing still to guarantee its long-term stability, does not adopt limit structure alone simultaneously and can obviously reduce the preparation degree of difficulty and cost.
Specifically, as shown in fig. 2 and 3, the optical switch includes an insulating layer 100, a supporting portion 200, a micro mirror 300, a first driving electrode 400, a second driving electrode 500, and a third driving electrode 600, wherein the first driving electrode 400 is a plate capacitor electrode, and the second driving electrode 500 and the third driving electrode 600 are matched in a tooth structure or a tooth-like structure.
The spatial arrangement of the components can be seen from fig. 2 and 3: the micro mirror 300 is supported above the insulating layer 100 by the supporting portion 200, the micro mirror 300 is used for reflecting a light beam, and the first driving electrode 400 is disposed on the insulating layer 100 and located at one side of the micro mirror 300; the second driving electrode 500 is disposed on the micromirror 300, the third driving electrode 600 is disposed on the supporting part 200, and the second driving electrode 500 and the third driving electrode 600 are symmetrically distributed with respect to the rotation axis of the micromirror 300, respectively.
The first driving electrode 400, the second driving electrode 500 and the third driving electrode 600 cooperate to drive the micromirror 300 to be in a deflection state, and when the first driving electrode 400 is powered off and the second driving electrode 500 and the third driving electrode 600 are powered on, a horizontal balancing electrostatic force is formed between the second driving electrode 500 and the third driving electrode 600, so that the micromirror 300 is in a horizontal state; the optical switch is controlled to be on or off by the deflected state or the horizontal state of the micro mirror 300, e.g., the optical switch is off when the micro mirror 300 is in the horizontal state and the optical switch is on when the micro mirror 300 handles the deflected state.
In a specific design process, the present embodiment designs the electrode structure of the second driving electrode 500 and the electrode structure of the third driving electrode 600 to match each other, and the matching enables a horizontally balanced electrostatic force to be formed between the second driving electrode 500 and the third driving electrode 600 in a state that the second driving electrode 500 and the third driving electrode 600 are energized.
Preferably, the electrode structure of the second driving electrode 500 and the electrode structure of the third driving electrode 600 are in the same horizontal plane and are centrosymmetric with respect to the rotation axis of the micro mirror 300, so that the electrostatic force formed is distributed symmetrically with respect to the center of the micro mirror 300.
Regarding the matching between the second driving electrode 500 and the third driving electrode 600, the present embodiment provides the following design solutions:
the first design scheme is as follows:
the electrode structure of the second driving electrode 500 and the electrode structure of the third driving electrode 600 are tooth structures alternately disposed on the micromirror 300 and the supporting part 200;
this embodiment can be subdivided into the following embodiments:
as shown in fig. 4, the electrode structure of the second driving electrode 500 and the electrode structure of the third driving electrode 600 are planar comb tooth structures alternately disposed on the micromirror 300 and the support part 200;
as shown in fig. 5, the electrode structure of the second driving electrode 500 and the electrode structure of the third driving electrode 600 are comb tooth structures having tip portions, which are alternately disposed on the micro mirror 300 and the support portion 200;
with respect to the electrode design of the tooth-shaped structure, in the present embodiment, the comb teeth of the electrode structure of the second driving electrode 500 and the comb teeth of the electrode structure of the third driving electrode 600 are staggered and equidistant from each other and are symmetrically arranged at the rotational axis of the micromirror 300, regardless of the planar comb teeth or the comb teeth having the tip portion.
In a second design, as shown in fig. 6, the electrode structure of the second driving electrode 500 and the electrode structure of the third driving electrode 600 are concave-convex structures with matching concave-convex arranged on the micromirror 300 and the supporting part 200.
For the first drive electrode 400, the specific design requirements are: the width of the first driving electrode 400 is less than 1/2 of the width of the micro mirror 300, the first driving electrode 400 is disposed on the insulating layer 100 near the center of the micro mirror 300, so that when the micro mirror 300 deflects toward one side of the first driving electrode 400 and contacts the insulating layer 100, the micro mirror 300 is not in contact with the first driving electrode 400, specifically, as shown in fig. 7, the insulating layer 100 can achieve a self-limiting function without an independent limiting structure.
Further, in order to better realize the precise switching between the deflection state and the horizontal state of the micromirror 300, the supporting portion 200 includes a third driving electrode supporting frame 201, a micromirror fixing supporting frame 202 and a micromirror rotation supporting frame 203, specifically referring to fig. 4, the third driving electrode supporting frame 201 and the micromirror fixing supporting frame 202 are respectively fixed on the insulating layer 100, a gap is left between the third driving electrode supporting frame 201 and the micromirror fixing supporting frame 202, and the micromirror 300 spans between the two micromirror fixing supporting frames 202 through the micromirror rotation supporting frame 203 and is located above the insulating layer 100; the end surface of the micromirror 300 close to the micromirror rotation support frame 203 is provided with a second driving electrode 500, and the second driving electrode 500 is symmetrically arranged about the central rotation axis of the micromirror rotation support frame 203; the third driving electrode 600 is disposed on the third driving electrode supporting frame 201 matching with the second driving electrode 500, for example, the tooth structure of the third driving electrode 600 is staggered with the tooth structure of the second driving electrode 500, or the electrode structure of the third driving electrode 600 is concave-convex matched with the electrode structure of the second driving electrode 500.
The third driving electrode support frame 201, the micromirror support frame 202 and the first driving electrode 400 are spatially fixed to the insulating layer 100, but are insulated from each other. Conductive patterns and conductive vias are present in the insulating layer 100 to guide the electrodes to the back of the array for convenient packaging with the control circuitry.
When the second driving electrode 500 and the third driving electrode 600 form a potential difference and the first driving electrode 400 is in a non-potential state, because the comb teeth of the second driving electrode 500 and the third driving electrode 600 are in the same plane and are symmetrical about the rotation axis of the micromirror rotation support frame 203, the electrostatic force formed by the comb teeth is a plane horizontal pulling, so that the plane levelness of the micromirror 300, the third driving electrode support frame 201 and the micromirror fixing support frame 202 is ensured, and because the electrostatic force is symmetrical about the center, the micromirror 300 does not deflect or pulls the original deflection to the horizontal, and the state is a state of high precision and high consistency of the optical switch, and can be turned off or turned on. In this state, the loss of the micromirror 300 at the bottom-touching position due to the impact does not affect the ability of pulling the micromirror to the horizontal position, and the torsion stress of the micromirror rotation support frame 203 is minimum at this time, so that the service life of the micromirror can be ensured.
When the second driving electrode 500 and the first driving electrode 400 form a potential difference and the third driving electrode 600 is not applied with a potential or the deflection force caused by the potential difference between the second driving electrode 500 and the third driving electrode 600 is smaller than the deflection force caused by the potential difference between the second driving electrode 500 and the first driving electrode 400, the micro mirror 300 will deflect to the first driving electrode 400 to contact with the insulating layer 100. This state is another state of the optical switch, which may be off or on.
Based on the optical switch provided by this embodiment, this embodiment also provides an optical switch array, which includes a plurality of the above optical switches, and the plurality of optical switches are arranged in an array.
The embodiment guarantees the consistency of the optical switch array at a specific angle through the mixed comb teeth and the flat capacitor driving mode, limits the optical switch array at the specific angle without a limit structure, still guarantees the long-term stability of the optical switch array without being influenced by micro-structure abrasion and the like, and obviously reduces the manufacturing difficulty and cost without independently adopting the limit structure.
The present invention has been described in terms of specific examples, which are provided to aid understanding of the invention and are not intended to be limiting. For a person skilled in the art to which the invention pertains, several simple deductions, modifications or substitutions may be made according to the idea of the invention.
Claims (10)
1. An optical switch, comprising: the micro-mirror comprises an insulating layer, a supporting part, a micro-mirror, a first driving electrode, a second driving electrode and a third driving electrode;
the micromirror is supported above the insulating layer through the supporting part for reflecting a light beam;
the first driving electrode is arranged on the insulating layer and is positioned on one side of the micromirror;
the second driving electrode is arranged on the micromirror, the third driving electrode is arranged on the supporting part, and the second driving electrode and the third driving electrode are symmetrically distributed relative to the rotating shaft of the micromirror respectively;
the first driving electrode, the second driving electrode and the third driving electrode are matched to drive the micromirror to be in a deflection state;
under the state that the first driving electrode is powered off and the second driving electrode and the third driving electrode are powered on, a horizontal balancing electrostatic force is formed between the second driving electrode and the third driving electrode, so that the micromirror is in a horizontal state;
controlling the on or off of the optical switch based on the deflection state or the horizontal state of the micromirror.
2. The optical switch of claim 1, wherein the electrode structure of the second driving electrode and the electrode structure of the third driving electrode are matched to each other, and the matching enables a horizontally balanced electrostatic force to be formed between the second driving electrode and the third driving electrode in a state where the second driving electrode and the third driving electrode are energized.
3. The optical switch of claim 2, wherein the electrode structure of the second driving electrode and the electrode structure of the third driving electrode are in the same horizontal plane and are centrosymmetric with respect to the rotation axis of the micromirror, such that the electrostatic force formed is distributed symmetrically with respect to the micromirror center.
4. The optical switch of claim 3, wherein the electrode structure of the second driving electrode and the electrode structure of the third driving electrode are tooth structures alternately disposed on the micromirrors and the supports.
5. The optical switch of claim 4, wherein the electrode structure of the second driving electrode and the electrode structure of the third driving electrode are planar comb tooth structures alternately disposed on the micromirror and the support portion.
6. The optical switch of claim 4, wherein the electrode structure of the second driving electrode and the electrode structure of the third driving electrode are comb tooth structures having tip portions alternately arranged on the micromirror and the support portion.
7. The optical switch of claim 3, wherein the electrode structure of the second driving electrode and the electrode structure of the third driving electrode are concave-convex structures with concave-convex matching arranged on the micromirror and the supporting part.
8. The optical switch of any of claims 4-6, wherein the comb teeth of the electrode structure of the second drive electrode and the comb teeth of the electrode structure of the third drive electrode are interleaved and equidistant.
9. The optical switch of claim 1, wherein the width of the first driving electrode is less than 1/2 of the width of the micromirror, and the first driving electrode is disposed on the insulating layer near the center of the micromirror such that the micromirror is not in contact with the first driving electrode when deflected toward the first driving electrode and contacts the insulating layer.
10. An optical switch array comprising a plurality of optical switches according to any of claims 1-9, wherein the plurality of optical switches are arranged in an array.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310055419.6A CN115980928A (en) | 2023-01-16 | 2023-01-16 | Optical switch and optical switch array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310055419.6A CN115980928A (en) | 2023-01-16 | 2023-01-16 | Optical switch and optical switch array |
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| Publication Number | Publication Date |
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| CN115980928A true CN115980928A (en) | 2023-04-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310055419.6A Pending CN115980928A (en) | 2023-01-16 | 2023-01-16 | Optical switch and optical switch array |
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|---|---|
| CN (1) | CN115980928A (en) |
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- 2023-01-16 CN CN202310055419.6A patent/CN115980928A/en active Pending
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